JP6802128B2 - Heat treatment equipment - Google Patents

Description

The present invention relates to a heat treatment apparatus that heat-treats a thin plate-shaped object to be heated such as a glass substrate with hot air or the like.

Patent Document 1 discloses a heat treatment apparatus that heat-treats a glass substrate or the like. The heat treatment apparatus disclosed in Patent Document 1 is, for example, a flat panel display (FPD) such as a liquid crystal display (LCD), a plasma display (PDP), an organic EL display, or the like. Used for production.
As one type of heat treatment apparatus, there is one that introduces hot air at a predetermined temperature into a heating chamber.
Further, as an example of the heat treatment apparatus, there is a structure in which a mounting shelf is arranged in the heating chamber.
For example, a glass substrate to which a specific solution has been applied to a glass plate or the like in advance is inserted between the steps of the mounting shelf described above using a robot hand. Then, hot air is introduced into the heating chamber, the glass plate is exposed to hot air to be dried or heat-treated (fired), and then the treated glass plate is taken out using a robot hand.

Some mounting shelves have a structure in which support members for supporting the substrate are provided in a plurality of stages in the vertical direction.
The support member may be composed of, for example, a rod, a beam, or a plate.

Japanese Unexamined Patent Publication No. 2006-46894

As described above, the glass substrate may be inserted into the heating chamber using, for example, a robot hand and installed on a predetermined stage of the mounting shelf. Then, hot air is circulated in the heating chamber to dry and bake the glass substrate.
Here, the size of the glass substrate, which is the object to be heated, varies, and there are those having a large area and those having a thin thickness. Particularly in recent years, an extremely thin glass substrate having a large area of about 1.0 square meter or more and a thickness of 0.5 mm may be heat-treated.

When a glass substrate having a large area and a thin area is exposed to hot air, the glass substrate may shift and move in the width direction (horizontal direction) due to the wind. In the present specification, the direction in which the glass substrate is inserted into the heating chamber is referred to as "vertical direction of the glass substrate", and the direction orthogonal to this is referred to as "width direction of the glass substrate".
The heat-treated glass substrate is taken out of the heating chamber by a robot hand or the like and sent to the next process. Here, if the glass substrate that has moved in the width direction from the regular position is placed on the device of the next process by a robot hand or the like, the mounting position of the glass substrate with respect to the device of the next process may deviate from the regular position. is there.

Therefore, the present inventors have provided a stopper member for restricting the movement of the glass substrate in the test chamber. The prototype stopper member has a plate shape and is installed in a vertical position. The plate surface of the stopper member faces the glass substrate side.
In the prototype heat treatment apparatus, the stopper members are arranged at both ends of the installation area where the glass substrate is installed, and when the glass substrate shifts in the width direction, it hits the stopper member and stops. Therefore, even if the glass substrate moves, the installation position of the glass substrate is within the allowable range, and when the glass substrate is moved to the device of the next process, the glass substrate is installed at the regular position of the device of the next process. Therefore, it was possible to perform a predetermined process with the device of the next process without any trouble.

However, the prototype heat treatment device caused an unexpected problem.
That is, when the glass substrate was heat-treated using the prototype heat treatment apparatus, the glass substrate was often chipped or cracked more than before.
When the cause of this was investigated, it was found that minute cracks were generated at the sides of the glass substrate, and these cracks led to cracks in the glass substrate in the subsequent steps.
Further pursuing this cause, it was found that the above-mentioned cracks occur when the glass substrate is taken out from the heating chamber using a robot hand.

That is, the glass substrate is placed flat on the support member in the heating chamber. When taking out the glass substrate, for example, as shown in FIG. 8, the fork-shaped holding member 110 of the robot hand is inserted into the lower surface side of the glass substrate to be taken out, and the holding member 110 is raised to scoop up and hold the glass substrate. The member 110 is retracted and the glass substrate is taken out from the heating chamber.
At this time, the edge of the glass substrate may move in the width direction to hit the stopper member, and when the edge moves upward, it may be rubbed against the stopper member and damaged.
This will be described below.

In the prototype heat treatment apparatus, the support member 100 is composed of two support pieces 101 as shown in FIG. The two support pieces 101 are rod-shaped members, and are installed in the forward direction with respect to the insertion direction (vertical direction) of the glass substrate 105. Further, the two support pieces 101 are installed in parallel with a certain distance.
The stopper member 102 is provided on the outer side in the width direction of each support piece 101. The stopper members 102 are all installed in a vertical posture (vertical posture) as shown in FIG.
As shown in FIG. 8A, the distance W between the stopper members 102 is wider than the natural width Wa of the glass substrate 105.

When the glass substrate 105 is placed on the support piece 101, the glass substrate 105 is slightly bent by its own weight and deforms into a downwardly convex shape as shown in FIG. 8 (b).
Therefore, the apparent width Wb of the glass substrate 105 is shorter than the original width Wa. As described above, the distance W between the stopper members 102 is wider than the natural width Wa of the glass substrate 105, and the apparent width Wb of the glass substrate 105 when installed on the support member 100 is the original width. Since it is shorter than Wa, the end portion of the glass substrate 105 does not hit the stopper member 102.

The glass substrate 105 is exposed to hot air in a heating chamber to be dried and fired. Further, the glass substrate 105 may be exposed to hot air and may be displaced in the width direction, and the end portion of the glass substrate 105 approaches one of the stopper members 102, for example, as shown in FIG. 8C.

When the drying and firing of the glass substrate 105 is completed, the claw portion 111 of the fork-shaped holding member 110 of the robot hand is inserted under the glass substrate 105 as shown in FIG. 8D. The distance between the claws 111 is narrower than the distance between the support pieces 101.
Subsequently, the holding member 110 is raised to scoop up the glass substrate 105.
Here, the glass substrate 105 is supported by two support pieces 101, and the one having a downwardly convex shape as shown in FIG. 8B is supported by the claw portion 111 of the holding member 110 at the central portion. As a result, it is deformed into an upwardly convex shape as shown in FIG. 8 (f). Then, in the middle stage, the glass substrate 105 becomes a linear state as shown in FIG. 8 (e), the apparent width returns to the original width Wa, the end portion of the glass substrate 105 approaches one stopper member 102, and one It comes into contact with the stopper member 102.
Then, in this state, the glass substrate 105 rises as shown in FIG. 8 (f), and the end portion of the glass substrate 105 rubs against one of the stopper members 102 and is damaged.

The present invention has been developed based on the above findings, and an object of the present invention is to develop a heat treatment apparatus having a structure that does not easily damage an object to be heated such as a glass substrate.

The inventions for solving the problems described above, it includes a heating chamber for heating an object, a heat treatment apparatus for heat-treating the lamellar material to be heated in the heating chamber, the object to be heated in the heating chamber In a heat treatment apparatus in which a support member that supports an object in a flat manner is installed and the object to be heated can be installed on the support member, the object to be heated is installed near the end of an installation area. , There is a stopper member that regulates the movement of the object to be heated, and the stopper member has a contact portion that the end portion of the object to be heated can come into contact with, and the contact portion is inclined in a direction that expands upward. It is a heat treatment apparatus characterized by being
The invention according to claim 1 is a heat treatment apparatus having a heating chamber for heating an object to be heated with hot air and heat-treating a thin plate-shaped object to be heated in the heating chamber, wherein the object to be heated has a central portion. It bends when it is supported and scooped up, and a support member that supports the object to be heated in a flat manner is installed in the heating chamber, and the object to be heated can be installed in the support member. In the heat treatment apparatus, the support member supports the object to be heated inside the end of the object to be heated, and is outside the support member and is an installation area in which the object to be heated is installed. At a position away from the support member near the end of the object, there is a stopper member that regulates the movement of the object to be heated, and the stopper member has a contact portion that the end of the object to be heated can come into contact with. The contact portion is a heat treatment apparatus characterized in that it is inclined in a direction in which the upper part expands.
The invention according to claim 2 is a heat treatment apparatus having a heating chamber for heating an object to be heated and heat-treating a thin plate-shaped object to be heated in the heating chamber, and flattening the object to be heated in the heating chamber. In a heat treatment apparatus in which a support member that supports the object in a stationary manner is installed and the object to be heated can be installed on the support member, the object to be heated is placed near the end of an installation area in which the object to be heated is installed. There is a stopper member that regulates the movement of the heated object, and the stopper member has a contact portion that the end portion of the heated object can come into contact with, and the contact portion is inclined in a direction in which the upper part expands, and the contact portion Has an inclined surface that faces the heat-treated object side and is inclined in a direction in which the upper side expands, and the vertical side of the inclined surface is folded back toward the opposite side with respect to the heat-treated object. It is a characteristic heat treatment apparatus.
The invention according to claim 3 is a heat treatment apparatus having a heating chamber for heating an object to be heated and heat-treating a thin plate-shaped object to be heated in the heating chamber, and flattening the object to be heated in the heating chamber. In a heat treatment apparatus in which a support member that supports the object in a stationary manner is installed and the object to be heated can be installed on the support member, the object to be heated is placed near the end of an installation area in which the object to be heated is installed. There is a stopper member that regulates the movement of the heated object, and the stopper member has a contact portion that the end portion of the heated object can come into contact with, and the contact portion is inclined in a direction in which the upper part expands, and the contact portion Is a heat treatment apparatus characterized in that it is composed of a rod-shaped member.

The heat treatment apparatus of the present invention has a stopper member that regulates the movement of the object to be heated in the width direction, and the stopper member has a contact portion that the end portion in the width direction of the object to be heated can come into contact with. Therefore, even if the thin plate-shaped object to be heated shifts during the heat treatment, the position of the object to be heated does not easily deviate from the predetermined range.
Further, the contact portion of the stopper member used in the present invention is inclined in the direction of expanding upward. Therefore, when the object to be heated is moved upward, the space between the contact portion and the object to be heated tends to gradually expand, and the object to be heated is unlikely to hit the stopper member. In addition, the object to be heated does not easily rub against the stopper member.

In the invention according to claim 2, the contact portion has an inclined surface that faces the object to be heated and is inclined in a direction in which the upper side expands, and the vertical side of the inclined surface is the object to be heated. It is characterized by being folded back toward the opposite side .

According to the heat treatment apparatus of the present invention, the vertical side of the inclined surface has a rounded shape, and the object to be heated is not easily damaged.

The invention according to claim 4 is the heat treatment apparatus according to any one of claims 1 to 3 , wherein the contact portion is a smoothed surface that has been subjected to a smoothing treatment.

According to the heat treatment apparatus of the present invention, since the contact portion of the stopper member is a smooth surface, it is difficult to damage the object to be heated.

The invention according to claim 5 is the heat treatment apparatus according to any one of claims 1 to 4 , wherein the contact portion has a hardened layer by surface treatment.

According to the heat treatment apparatus of the present invention, the contact portion of the stopper member has high hardness and is not easily scratched by contact with the object to be heated. Therefore, the stopper member maintains smoothness even after long-term use and is less likely to damage the object to be heated.

In the invention according to claim 6 , the support member is installed in a plurality of stages, the stopper member has a plurality of the contact portions, and the stopper member is attached to a predetermined position. The heat treatment apparatus according to any one of claims 1 to 5 , wherein each contact portion is located near an end portion of the installation area of each stage.

According to the present invention, the stopper member can be easily attached and positioned.

The invention according to claim 7 defines the traveling direction when the heated object is inserted into the heating chamber as the vertical direction of the heated object, and the direction orthogonal to the traveling direction is the heated object. 1. The stopper member is located in the vicinity of the widthwise end portion of the installation area, and regulates the movement of the object to be heated in the widthwise direction. The heat treatment apparatus according to any one of 6 to 6 .

According to the present invention, it is difficult to damage the side of the object to be heated in the width direction.

It is desirable that the bending angle of the end portion of the object to be heated is less than 5 degrees in a state where the object to be heated is held in contact with the support member (claim 8 ).

It is desirable that the contact portion has a portion inclined in a range of 5 degrees or more and 20 degrees or less with respect to the vertical direction (claim 9 ).

According to the heat treatment apparatus of the present invention, even if the thin plate-shaped object to be heated shifts during the heat treatment, the position of the object to be heated is unlikely to deviate from a predetermined range.
Further, according to the heat treatment apparatus of the present invention, the object to be heated is not easily damaged.

It is a perspective view which shows the internal structure of the heat treatment apparatus of embodiment of this invention. (A) is a front view of a shelf member built in the heat treatment apparatus of FIG. 1, and (b) is an enlarged view of the inside of the circle. (A) is a cross-sectional view of a shelf member built in the heat treatment apparatus of FIG. 1, and (b) is an enlarged view of the inside of the circle. It is an enlarged perspective view of the end portion of the shelf member built in the heat treatment apparatus of FIG. It is a partial perspective view of the stopper member adopted in the heat treatment apparatus of FIG. (A) to (e) are explanatory views showing the behavior of the glass substrate in the heat treatment apparatus of FIG. 1 and enlarged views in a circle thereof. (A) and (b) are perspective views which show the modification of the stopper member. (A) to (f) are explanatory views showing the behavior of the glass substrate in the heat treatment apparatus of the prior art and enlarged views in a circle thereof.

Hereinafter, embodiments of the present invention will be described.
As shown in FIG. 1, the heat treatment apparatus 1 of the present embodiment has a heating chamber 2 for heating an object to be heated, and a shelf member 3 is installed in the heating chamber 2. The shelf member 3 functions as a mounting shelf that holds the glass substrate 105, which is the object to be heated, in a substantially horizontal posture and stores a plurality of the glass substrate 105 vertically at regular intervals.
In the present embodiment, the shelf member 3 is a separate body from the main body portion of the heat treatment apparatus 1.
The main body of the heat treatment apparatus 1 has a heating chamber 2 in the center of the outer member 5 indicated by the alternate long and short dash line. There is an opening 6 on the front side of the heating chamber 2, and the opening 6 on the front of the heating chamber 2 is opened and closed by the door 7 indicated by the alternate long and short dash line.
The back surface side of the heating chamber 2, that is, the surface facing the opening 6, has an air outlet 8 on the entire surface, and a filter 10 is attached to the entire surface.

In the present embodiment, there is a side ventilation passage 11 on the side surface of the heating chamber 2. Further, there is a heater chamber 12 above the heating chamber 2, and an electric heater 13 is installed. There is a ventilation port 20 between the side ventilation passage 11 and the heater chamber 12, and the side ventilation passage 11 and the heater chamber 12 communicate with each other through the ventilation port 20. There is a back side ventilation passage 21 on the back surface side of the heating chamber 2. The back side ventilation passage 21 connects the heater chamber 12 and the air outlet 8 of the heating chamber 2, and the blower 23 is installed.

In the heat treatment apparatus 1, the air in the heating chamber 2 is circulated through the side ventilation passage 11 and the like by the blower 23 provided in the back side ventilation passage 21, and the air circulating through the heater chamber 12 is circulated between them. It is adjusted to a predetermined temperature.
That is, the air in the heating chamber 2 is sucked by the negative pressure of the blower 23 and flows from the vicinity of the front opening 6 to the side ventilation passage 11. The air that has passed through the side ventilation passage 11 enters the heater chamber 12 through the ventilation port 20 and comes into contact with the electric heater 13 to be adjusted to a predetermined temperature. The heating chamber 2 has a temperature sensor (not shown), and the electric heater 13 is controlled so that the temperature detected by the temperature sensor becomes a predetermined temperature.

The air adjusted to a predetermined temperature in the heater chamber 12 is sucked by the blower 23 and pressurized, and is supplied into the heating chamber 2 via the back side ventilation passage 21 and the air outlet 8.
Since the heat treatment apparatus 1 of the present embodiment heat-treats the object to be heated, the air introduced into the heating chamber 2 has a high temperature. In addition, air is flowing in the heating chamber 2 at a certain wind speed. In the present embodiment, hot air circulates in the heating chamber 2.

Next, the shelf member 3 will be described.
As shown in FIG. 1, the shelf member 3 is a separate body from the main body portion of the heat treatment apparatus 1. The shelf member 3 has a support member 15 (FIGS. 3 and 4) and a stopper member 27 (FIGS. 2 and 4) installed in the housing 25.
As shown in FIGS. 1, 2, and 3, the housing 25 of the shelf member 3 has a bottom surface 45, a top surface 46, and left and right side surfaces 47 and 48 covered with plates, and the front surface and the back surface are open.

The support member 15 supports the glass substrate 105 in a flat manner in the heating chamber 2, and in the present embodiment, it is composed of two support pieces 26a and 26b in each stage as shown in FIG. .. Further, in the present embodiment, the support members 15 are installed in a plurality of stages at predetermined intervals in the height direction in order to accommodate a large number of glass substrates 105.
The support pieces 26a and 26b constituting the support member 15 are rod-shaped as shown in FIGS. 3 and 4. The support pieces 26a and 26b are supported by a large number of brackets 43 projecting cantilevered from the side surfaces 47 and 48 of the housing 25 as shown in FIGS. 3 and 4.
The support pieces 26a and 26b are in a horizontal posture, parallel to the side surfaces 47 and 48 of the housing 25, and are installed in the insertion direction of the object to be heated.
Front-to-back positioning members 42 are provided at both ends of the support pieces 26a and 26b in the longitudinal direction to prevent the glass substrate 105 from being displaced in the vertical direction (FIGS. 2 and 4).

The stopper member 27 is made by bending a metal plate such as stainless steel, and has a structure in which a plurality of contact portions 30 are connected by a connecting portion 31 as shown in FIGS. 2, 4, and 5. ing.
The contact portion 30 is a portion that constitutes a flat surface that is inclined with respect to the mounting posture as shown in FIGS. 2 and 4.
The connecting portion 31 is a portion that functions as a mounting portion to be attached to the housing 25 of the shelf member 3 and a function of connecting a plurality of contact portions 30 as shown in FIGS. 2 and 4.
The shape of the connecting portion 31 is strip-shaped as shown in FIG. Then, the protruding piece portions 35 project from one side of the connecting portion 31 at regular intervals. The protruding piece portion 35 constitutes the same plane as the connecting portion 31 described above.

The free end side of the protruding piece portion 35 is bent in the vertical direction as shown in FIG. 5, and the contact portion 30 described above is formed. However, the bending line 36 is inclined with respect to the axis 37 of the connecting portion 31. Therefore, as shown in FIG. 5, the contact portion 30 intersects with the connecting portion 31 and has an inclined flat surface. That is, when the plane constituting the contact portion 30 is virtually extended, it intersects with the connecting portion 31. Further, the contact portion 30 is in an inclined posture with respect to a vertical posture (vertical posture) based on the attached posture.

The free end side of the contact portion 30 is further folded back. In this embodiment, the folded-back portion 38 is folded back to the extent that it is substantially parallel to the contact portion 30. Therefore, the folding line 40 is considerably rounded. The bent form of the folded-back portion 38 of the present embodiment is a form called hemming bending.
The free end side of the contact portion 30, that is, the folding line 40 corresponds to the vertical side of the inclined surface in the state where the stopper member 27 is attached, and is in a state of being folded toward the opposite side with respect to the object to be heated. ..

Further, in the present embodiment, the contact portion 30 is subjected to a smoothing treatment and a hardening treatment.
Specifically, the contact portion 30 is subjected to an electrolytic polishing treatment, and a smoothing treatment and a hardening treatment are performed at the same time. Here, electrolytic polishing is a method in which the work side is used as an anode and immersed in an electrolytic solution, and the counter electrode is used as a cathode to energize.
In this embodiment, the stopper member 27 is made of stainless steel. When stainless steel is electropolished, a large amount of current flows through the convex portions of the surface with minute irregularities, and the convex portions are melted and smoothed. In addition, among the dissolved metal components, chromium combines with oxygen to form an oxide film on the surface of the work. As a result, the surface of the work is hardened.
In the present embodiment, after the stopper member 27 is molded, the contact portion 30 is electropolished as a post-processing. Therefore, the contact portion 30 has high smoothness and high hardness.

The stopper member 27 is attached to the shelf member 3 as shown in FIGS. 2 and 4. Specifically, the connecting portion 31 of the stopper member 27 is fixed to the open end surface of the housing 25 by the screw 41 and attached to the shelf member 3.
In the state where the stopper member 27 is attached, each contact portion 30 is located at a height equivalent to that of the support pieces 26a and 26b. That is, in the state where the stopper member 27 is attached, each contact portion 30 has the same height as the support member 15, and when the glass substrate 105 is blown by hot air and moves in the width direction, the end portion of the glass substrate 105 Can come into contact.
Further, each contact portion 30 is located outside the support pieces 26a and 26b. In the present embodiment, since the glass substrate 105 is installed on the support pieces 26a and 26b and accommodated in the shelf member 3, each contact portion 30 is located near the end of the installation area where the glass substrate 105 is installed. It becomes.

Further, each of the contact portions 30 faces the glass substrate 105 and is inclined in a direction in which the upper side expands. The inclination angle A of each contact portion 30 is 5 degrees or more and 20 degrees or less.
If the inclination angle of the contact portion 30 is less than 5 degrees, the ends of the glass substrate 105 is difficult to pull out when raising the glass substrate 105, which may be caught in the contact portion 30. Further, if the inclination angle exceeds 20 degrees, there is a concern that when the glass substrate 105 moves in the width direction due to wind pressure, the end portion rides on the contact portion 30.
The more desirable inclination angle A of the contact portion 30 is 5 degrees or more and 15 degrees or less. When the inclination angle A of the contact portion 30 is around 15 degrees, even if the glass substrate 105 moves in the width direction due to wind pressure, the end portion is difficult to ride on, and the function as a stopper member is not impaired. Further, when raising the glass substrate 105, a sufficient draft can be secured.

Next, the function of the heat treatment apparatus 1 of the present embodiment will be described.
Also in the heat treatment apparatus 1 of the present embodiment, the glass substrate 105 is used as an object to be heated, and the glass substrate 105 is heat-treated.
Also in this embodiment, the glass substrate 105 is placed flat on the support pieces 26a and 26b in the heating chamber 2. That is, each glass substrate 105 is installed in a substantially horizontal posture if bending is ignored.
When taking out the glass substrate 105, for example, as shown in FIG. 6, a fork-shaped holding member 110 is inserted into the lower surface side of the glass substrate 105 to be taken out in the heating chamber 2, and the holding member 110 is raised to raise the glass substrate. The 105 is scooped up, the holding member 110 is retracted, and the glass substrate 105 is taken out from the heating chamber 2.

Also in this embodiment, the contact portion 30 of the stopper member 27 is provided on the outer side in the width direction of each of the support pieces 26a and 26b.

When the glass substrate 105 is placed on the support pieces 26a and 26b, the glass substrate 105 is slightly bent by its own weight and deforms into a downwardly convex shape as shown in FIG. 6A.
The glass substrate 105 is exposed to hot air in the heating chamber 2 to be dried and fired. Further, the glass substrate 105 may be exposed to hot air and displaced in the width direction, and the end portion may approach the contact portion 30 of the stopper member 27 as shown in FIG. 6B.

When the drying and firing of the glass substrate 105 is completed, the claw portion 111 of the fork-shaped holding member 110 of the robot hand is inserted under the glass substrate 105 as shown in FIG. 6C. The distance between the claw portions 111 is narrower than the distance between the support pieces 26a and 26b.
Subsequently, the holding member 110 is raised to scoop up the glass substrate 105.
Here, the glass substrate 105 is supported by two support pieces 26a and 26b, and the one having a downwardly convex shape as shown in FIG. 6C supports the central portion by the claw portion 111 of the holding member 110. As a result, it is deformed into an upwardly convex shape as shown in FIG. 6 (e). Then, in the middle of the process, the glass substrate 105 becomes a linear state as shown in FIG. 6D, and the apparent width returns to the original width Wa. Then, in some cases, the end portion of the glass substrate 105 approaches one stopper member 27 and comes into contact with one stopper member 27.

In this state, the glass substrate 105 rises as shown in FIG. 6 (e). Here, in the stopper member 27 used in the present embodiment, the contact portion 30 is inclined in a direction in which the contact portion 30 spreads upward. Therefore, as the glass substrate 105 rises, the actual contact position of the contact portion 30 becomes a direction away from the end portion of the glass substrate 105.
When the glass substrate 105 is lifted from the support pieces 26a and 26b, the glass substrate 105 bends upward in a convex shape, and the apparent width becomes shorter. Therefore, when the glass substrate 105 rises, the contact portion 30 of the stopper member 27 gradually separates from the end portion of the glass substrate 105, and there is little chance of rubbing against the end portion of the glass substrate 105.

Further, in the stopper member 27 used in the present embodiment, the contact portion 30 is smoothed, and there are few fine irregularities as well as large irregularities, and even if the stopper member 27 rubs against the glass substrate 105, the glass substrate 105 is not easily damaged.
Further, the contact portion 30 of the stopper member 27 used in the present embodiment has a curved end portion, and the end portion does not return or fluff.
For example, if the end portion of the contact portion 30 is a cut surface that has been cut off, there is a concern that the glass substrate 105 may be damaged when it rubs against the glass substrate 105 due to minute burr or fluff.
On the other hand, in the contact portion 30 of the present embodiment, since the portions corresponding to the vertical sides of the contact portion 30 are all bent portions, there is no slight burr or fluff.
That is, the vertical sides of the contact portion 30 are the folding line 36 on the connecting portion 31 side and the folding line 40 on the free end side, but since these are both bent round surfaces, there is no curling or fluffing, and the glass. The glass substrate 105 is not easily damaged even if it comes into contact with the substrate 105.
Therefore, in the heat treatment apparatus 1 of the present embodiment, the glass substrate 105 is not easily damaged when the glass substrate 105 is taken out.

In the present embodiment, the glass substrate 105 is supported by rod-shaped support pieces 26a and 26b arranged in two rows.
When the glass substrate 105 is installed on the support pieces 26a and 26b, it is desirable that the glass substrate 105 is in a horizontal posture, but in reality, some bending is unavoidable.
It is recommended that the free end deflection angle B (FIG. 6A ) of the glass substrate 105 is less than 5 degrees. When designing the heat treatment apparatus 1, the bending angle B at the free end can be obtained by bending calculation or experiment, and the number and spacing of the support pieces 26a and 26b can be set so that the bending angle B is less than 5 degrees. desirable.

In the embodiment described above, the surface of the contact portion 30 is subjected to electrolytic polishing treatment to smooth and harden the contact portion 30, but mechanical methods such as buffing may be adopted as the smoothing treatment, or electrolysis may be performed. Chemical treatment such as polishing treatment and mechanical method such as buffing may be used in combination.
Further, as the curing treatment, another method by nitriding can be considered.
One of the nitriding treatments is isonite (registered trademark) treatment and parsonite (registered trademark) treatment. The former isonite (registered trademark) treatment is a salt bath soft nitriding treatment, which is a method of forming a nitride on the surface of a work mainly at 570 degrees Celsius or 580 degrees Celsius.
The latter parsonite® treatment is a salt bath soft nitriding treatment at a low temperature, which is a method of forming nitrides on the surface of the work mainly at 480 degrees Celsius or 520 degrees Celsius.

In the embodiment described above, the contact portion 30 of the stopper member 27 constitutes an inclined flat surface, but as in the stopper member 50 shown in FIG. 7A, a rod-shaped member is processed to be upward. The contact portion 51 may be formed so as to be inclined in the direction of spreading.
Further, as in the stopper member 52 shown in FIG. 7B, the depth direction of the contact portion 30 may be made longer.
In the embodiment described above, the free end side of the contact portion 30 is folded back by about 180 degrees, but the folding angle may be smaller. For example, it may be bent at about 90 degrees.

In the embodiment described above, the stopper member 27 has a plurality of contact portions 30, and by attaching one stopper member 27, it is possible to correspond to the support member 15 in a plurality of stages. However, the present invention is not limited to this configuration, and a stopper member 27 having only one contact portion 30 may be attached to each stage.

In the embodiment described above, the support member 15 is installed in a plurality of stages in the height direction, but the number of stages of the support member 15 is arbitrary and may be only a single stage (one stage).
The same applies to the stopper member 27, and there may be only one step.

In the embodiment described above, the shelf member 3 is separate from the main body portion of the heat treatment device 1 and has a structure that can be removed from the main body portion of the heat treatment device 1, but the shelf member 3 is different from the heat treatment device 1. It may be one and cannot be extracted.

1 Heat treatment device 2 Heating chamber 3 Shelf member 15 Support member 26a, 26b Support pieces 27, 50, 52 Stopper member 30 Contact part 36 Bending line 38 Folding part 40 Folding line 105 Glass substrate (object to be heated)

Claims (9)

A heat treatment apparatus having a heating chamber for heating an object to be heated with hot air and heat-treating a thin plate-shaped object to be heated in the heating chamber, wherein the object to be heated bends when a central portion is supported and scooped up. In a heat treatment apparatus in which a support member for horizontally supporting the object to be heated is installed in the heating chamber and the object to be heated can be installed in the support member.
The support member supports the object to be heated inside the end of the object to be heated.
Wherein A outer is than the support member, said spaced apart from the support member near the end of the installation area to be heated is placed, there is a stopper member for restricting the movement of the object to be heated, the stopper A heat treatment apparatus characterized in that the member has a contact portion with which an end portion of the object to be heated can come into contact, and the contact portion is inclined in a direction in which the upper part expands. A heat treatment apparatus having a heating chamber for heating an object to be heated and heat-treating a thin plate-shaped object to be heated in the heating chamber, and a support member for supporting the object to be heated in a flat manner is installed in the heating chamber. In a heat treatment apparatus capable of installing the object to be heated on the support member.
Near the end of the installation area where the object to be heated is installed, there is a stopper member that regulates the movement of the object to be heated, and the stopper member has a contact portion that the end of the object to be heated can come into contact with. Yes, the contact part is inclined in the direction of spreading upward,
The contact portion has an inclined surface that faces the object to be heated and is inclined in a direction in which the upper part expands, and the vertical side of the inclined surface is folded back toward the opposite side to the object to be heated. thermal processing apparatus you characterized in that there. A heat treatment apparatus having a heating chamber for heating an object to be heated and heat-treating a thin plate-shaped object to be heated in the heating chamber, and a support member for supporting the object to be heated in a flat manner is installed in the heating chamber. In a heat treatment apparatus capable of installing the object to be heated on the support member.
Near the end of the installation area where the object to be heated is installed, there is a stopper member that regulates the movement of the object to be heated, and the stopper member has a contact portion that the end of the object to be heated can come into contact with. Yes, the contact part is inclined in the direction of spreading upward,
The heat treatment apparatus, wherein the contact portion is made of a rod-shaped member. The heat treatment apparatus according to any one of claims 1 to 3, wherein the contact portion is a smoothed surface that has been subjected to a smoothing treatment. The heat treatment apparatus according to any one of claims 1 to 4 , wherein the contact portion has a cured layer formed by surface treatment. The support member is installed in a plurality of stages, the stopper member has a plurality of the contact portions, and in a state where the stopper member is attached at a predetermined position, each contact portion is in each stage. The heat treatment apparatus according to any one of claims 1 to 5 , wherein the heat treatment apparatus is located near the end of the installation area. When the traveling direction when the object to be heated is inserted into the heating chamber is defined as the vertical direction of the object to be heated, and the direction orthogonal to the traveling direction is defined as the width direction of the object to be heated, the above-mentioned The heat treatment according to any one of claims 1 to 6 , wherein the stopper member is located near the widthwise end portion of the installation area and regulates the movement of the object to be heated in the widthwise direction. apparatus. The heat treatment according to any one of claims 1 to 7 , wherein the bending angle of the end portion of the object to be heated is less than 5 degrees in a state where the object to be heated is held in contact with the support member. apparatus. The heat treatment apparatus according to any one of claims 1 to 8 , wherein the contact portion has a portion inclined in a range of 5 degrees or more and 20 degrees or less with respect to the vertical direction.

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