JP6802132B2 - Heat treatment equipment - Google Patents

Description

The present invention relates to a heat treatment apparatus that heat-treats a thin plate-shaped object to be heated such as a glass substrate with hot air or the like.

Patent Document 1 discloses a heat treatment apparatus that heat-treats a glass substrate or the like. The heat treatment apparatus disclosed in Patent Document 1 is, for example, a flat panel display (FPD) such as a liquid crystal display (LCD), a plasma display (PDP), an organic EL display, or the like. Used for production.
As one type of heat treatment apparatus, there is one that introduces hot air at a predetermined temperature into a heating chamber.
Further, as an example of the heat treatment apparatus, there is a structure in which a mounting shelf is arranged in the heating chamber.
For example, a glass substrate to which a specific solution has been applied to a glass plate or the like in advance is inserted between the steps of the mounting shelf described above using a robot hand. Then, hot air is introduced into the heating chamber, the glass plate is exposed to hot air to be dried or heat-treated (fired), and then the treated glass plate is taken out using a robot hand.

Some mounting shelves have a structure in which support members for supporting the glass substrate are provided in a plurality of stages in the vertical direction.
The support member may be composed of, for example, a rod, a beam, or a plate.
The glass substrate is placed in the heating chamber on the support member.

Japanese Unexamined Patent Publication No. 2006-46894

As described above, the glass substrate is placed in the heating chamber and is placed on the support member, and the shape of the support member includes, for example, a rod, a beam, and a plate.
Since the glass substrate naturally comes into contact with the support member, the support member may damage the glass substrate.
Here, as a support member that does not easily damage the glass substrate, a structure in which the glass substrate is supported by a round bar-shaped member can be considered. Since the support member supported by the round bar-shaped member is in line contact with the glass substrate and has no corners at the contact portion, it is difficult for a local force to be applied to the glass substrate. Therefore, if a round bar-shaped member is used as the support member, the mounted glass substrate is not easily scratched.
Further, since the round bar-shaped support member makes line contact with the glass substrate as described above, there is an advantage that the glass substrate does not easily move in the longitudinal direction of the support member.
However, on the other hand, the round bar-shaped member is easy to roll, which may damage the glass substrate.
This will be described below.
In the present specification, the direction in which the glass substrate is inserted into the heating chamber may be referred to as the "vertical direction of the glass substrate", and the direction orthogonal to this may be referred to as the "width direction of the glass substrate".

As described above, the glass substrate may be inserted into the heating chamber using, for example, a robot hand and installed on a predetermined stage of the mounting shelf. Then, for example, hot air is circulated in the heating chamber to dry and bake the glass substrate.
Here, the size of the glass substrate, which is the object to be heated, varies, and there are those having a large area and those having a thin thickness. Particularly in recent years, an extremely thin glass substrate having a large area of about 1.0 square meter or more and a thickness of 0.5 mm may be heat-treated.

When a glass substrate having a large area and a thin area is exposed to hot air, the glass substrate may receive a force in the width direction (horizontal direction) due to the wind.
Here, if the support portion of the support member is a round bar-shaped member, the glass substrate may be in a state as if it were placed on a roller, and the resistance to movement in the width direction may be small.
Therefore, the round bar-shaped member may roll and the placed glass substrate may move in the width direction. Then, the glass substrate may hit other members and the edges may be damaged. For example, if there is a stopper member that regulates the movement of the glass substrate in the width direction, the round bar-shaped member rolls and the upper glass substrate moves in the width direction, and the end portion of the glass substrate collides with the stopper member and is damaged. In some cases.
Further, when the glass substrate moves, the contact position between the glass substrate and the support member changes, and the glass substrate may be scratched.

The present invention has been developed based on the above findings, and an object of the present invention is to develop a heat treatment apparatus having a structure that does not easily damage the glass substrate.

The inventions for solving the problems described above, it includes a heating chamber for heating an object, a heat treatment apparatus for heat-treating the lamellar material to be heated in the heating chamber, the object to be heated in the heating chamber In a heat treatment apparatus in which a support member for supporting an object in a flat manner is installed and the object to be heated can be installed on the support member, the support member has a rod-shaped member and a rod holding member. The rod-shaped member has a curved surface portion that is gently connected to the peripheral surface thereof and a deformed portion that forms a plane or a curved surface different from the curved surface portion, and the rod-shaped member is formed from the front side to the back surface side of the heating chamber. It is placed on the rod holding member in an extended posture, the highest portion of the cross section of the peripheral surface of the rod-shaped member is the curved surface portion, and the deformed portion of the rod-shaped member is in contact with a part of the rod holding member. It is a heat treatment device.

The support member used in the heat treatment apparatus of the present invention has a rod-shaped member, and an object to be heated such as a glass substrate is placed on the rod-shaped member.
The rod-shaped member used in the present invention has a curved surface on the peripheral surface. Here, the curved surface portion is an arc surface, an ellipsoidal surface, or the like, and is a surface that is gently continuous without having a discontinuous portion.
In the heat treatment apparatus of the present invention, when the rod-shaped member is installed, the curved surface portion comes to the highest portion of the cross section of the peripheral surface. Therefore, the object to be heated comes into contact with the curved surface portion of the rod-shaped member and is not easily damaged.
Further, the rod-shaped member has a deformed portion, and the deformed portion is in contact with a part of the rod holding member to prevent the rod-shaped member from rolling. Therefore, the rod-shaped member is difficult to roll, and the movement of the placed object to be heated is prevented.

The invention according to claim 2 is the heat treatment apparatus according to claim 1, wherein the deformed portion is a flat surface.

In the present invention, since the flat deformed portion has a flat deformed portion and the flat deformed portion is in contact with a part of the rod holding member, the rod-shaped member is difficult to roll.

Before SL rod holding member has a recess which the upper is open, it is desirable that the rod-shaped member to the concave portion is provided.

The recess may be cut out by cutting or may be formed by deforming the plate by bending.
In the present invention, since the rod-shaped member is installed in the recess formed in the rod-shaped member, the moving range of the rod-shaped member is restricted.
That is, the movement form of the rod-shaped member includes rolling movement and sliding movement. Here, the sliding movement means a state in which the rod-shaped member shifts without rolling.
In the present invention, since the rod-shaped member is installed in the recess, the moving range is limited even if it slides and moves.

There is an inner surface and an in the opposite inner walls in the region extending to the rear side from the opening side of the front Symbol recess, at least one of said inner wall inclined surface, the rod-shaped member, with both of the inner wall peripheral surface opposed It is desirable that the deformed portion is in contact with one of the inner walls facing each other .

At least one of the inner walls of the recess used in the present invention is an inclined surface. The rod-shaped member is in contact with both of the inner walls whose peripheral surfaces face each other. Therefore, the rod-shaped member comes into contact with the rod holding member at two different points, and movement in the width direction is restricted.
Further, the rod-shaped member is difficult to rotate because the deformed portion is in contact with one inner wall.
The invention according to claim 1 is a heat treatment apparatus having a heating chamber for heating an object to be heated and heat-treating a thin plate-shaped object to be heated in the heating chamber, and flattening the object to be heated in the heating chamber. In a heat treatment apparatus in which a support member for supporting in a stationary shape is installed and the object to be heated can be installed on the support member, the support member has a rod-shaped member and a rod-holding member, and the rod-shaped member has a rod-shaped member. Has a curved surface portion that is gently connected to the peripheral surface thereof and a deformed portion that forms a plane or a curved surface different from the curved surface portion, and the rod-shaped member extends from the front side to the back surface side of the heating chamber. It is placed on the rod holding member in a posture, and the highest portion of the cross section of the peripheral surface of the rod-shaped member is the curved surface portion, and the deformed portion of the rod-shaped member comes into contact with a part of the rod holding member, and the rod holding member. Has a recess that is open at the top, the rod-shaped member is installed in the recess, and an inner wall that faces the inner surface of the recess from the opening side to the back side is provided, and at least one of the inner walls is inclined. It is a surface, and the rod-shaped member is a heat treatment apparatus characterized in that the peripheral surfaces are in contact with both of the facing inner walls and the deformed portion is in contact with one of the facing inner walls.
The invention according to claim 3 is the heat treatment apparatus according to claim 1, wherein the rod holding member has protrusions, and the recesses are formed by the protrusions.

According to the heat treatment apparatus of the present invention, the thin plate-shaped object to be heated is less likely to shift and move during the heat treatment, and the object to be heated is less likely to be damaged.

It is a perspective view which shows the internal structure of the heat treatment apparatus of embodiment of this invention. It is a front view of the shelf member built in the heat treatment apparatus of FIG. (A) is a cross-sectional view of a shelf member built in the heat treatment apparatus of FIG. 1, and (b) is an enlarged view of the inside of the circle. (A) is a partial perspective view of the vicinity of the side wall of the shelf member built in the heat treatment apparatus of FIG. 1, and (b) is an enlarged view thereof. It is an enlarged view of the rod-shaped member of the support member adopted in the heat treatment apparatus of FIG. (A) is a partial perspective view of the support member, and (b) is a partially enlarged view showing a state in which the glass substrate is placed on the support member. The left view of each of (a) to (d) is a cross-sectional view showing a modification of the rod-shaped member, and each right figure is a cross-sectional view showing the relationship between the rod-shaped member and the rod holding member. (A) to (g) are sectional views which show the modification of the rod holding member, and show the relationship between a rod-shaped member and a rod holding member.

Hereinafter, embodiments of the present invention will be described.
As shown in FIG. 1, the heat treatment apparatus 1 of the present embodiment has a heating chamber 2 for heating an object to be heated, and a shelf member 3 is installed in the heating chamber 2. The shelf member 3 functions as a mounting shelf that holds the glass substrate 100 (FIG. 6), which is the object to be heated, in a substantially horizontal posture and stores a plurality of the glass substrate 100 (FIG. 6) vertically at regular intervals.
In the present embodiment, the shelf member 3 is a separate body from the main body portion of the heat treatment apparatus 1.
The main body portion of the heat treatment apparatus 1 has a heating chamber 2 surrounded by a periphery and heating an object to be heated in the center of the outer member 5 indicated by the alternate long and short dash line. There is an opening 6 on the front side of the heating chamber 2, and the opening 6 on the front of the heating chamber 2 is opened and closed by the door 7 indicated by the alternate long and short dash line.
The back surface side of the heating chamber 2, that is, the surface facing the opening 6, has an air outlet 8 on the entire surface, and a filter 10 is attached to the entire surface.

In the present embodiment, there is a side ventilation passage 11 on the side surface of the heating chamber 2. Further, there is a heater chamber 12 above the heating chamber 2, and an electric heater 13 is installed. There is a ventilation port 20 between the side ventilation passage 11 and the heater chamber 12, and the side ventilation passage 11 and the heater chamber 12 communicate with each other through the ventilation port 20. There is a back side ventilation passage 21 on the back surface side of the heating chamber 2. The back side ventilation passage 21 connects the heater chamber 12 and the air outlet 8 of the heating chamber 2, and the blower 23 is installed.

In the heat treatment apparatus 1, the air in the heating chamber 2 is circulated through the side ventilation passage 11 and the like by the blower 23 provided in the back side ventilation passage 21, and the air circulating through the heater chamber 12 is circulated between them. It is adjusted to a predetermined temperature.
That is, the air in the heating chamber 2 is sucked by the negative pressure of the blower 23 and flows from the vicinity of the front opening 6 to the side ventilation passage 11. The air that has passed through the side ventilation passage 11 enters the heater chamber 12 through the ventilation port 20 and comes into contact with the electric heater 13 to be adjusted to a predetermined temperature. The heating chamber 2 has a temperature sensor (not shown), and the electric heater 13 is controlled so that the temperature detected by the temperature sensor becomes a predetermined temperature.

The air adjusted to a predetermined temperature in the heater chamber 12 is sucked by the blower 23 and pressurized, and is supplied into the heating chamber 2 via the back side ventilation passage 21 and the air outlet 8.
Since the heat treatment apparatus 1 of the present embodiment heat-treats the object to be heated, the air introduced into the heating chamber 2 has a high temperature. In addition, air is flowing in the heating chamber 2 at a certain wind speed. In the present embodiment, hot air circulates in the heating chamber 2.

Next, the shelf member 3 will be described.
As shown in FIG. 1, the shelf member 3 is a separate body from the main body portion of the heat treatment apparatus 1. The shelf member 3 has a support member 30 (FIGS. 3 and 4) and a stopper member 27 (FIGS. 2 and 6) installed in the housing 25.
As shown in FIGS. 1, 2, and 3, the housing 25 of the shelf member 3 has a bottom surface 45, a top surface 46, and left and right side surfaces 47 and 48 covered with plates, and the front surface and the back surface are open.

The support member 30 supports the glass substrate 100 in a flat manner in the heating chamber 2, and in the present embodiment, the support member 30 is composed of a rod-shaped member 31 and a bracket (rod holding member) 32 as shown in FIGS. 4 and 6. Has been done.
The support members 30 are provided on the left and right side surfaces 47 and 48 as shown in FIGS. 2 and 3. Further, in the present embodiment, the support members 30 are installed in a plurality of stages at predetermined intervals in the height direction in order to accommodate a large number of glass substrates 100.

The rod-shaped member 31 constituting the support member 30 is rod-shaped as shown in FIG. 4A. In the present embodiment, the cross-sectional shape of the rod-shaped member 31 is the same in all parts, but some parts may be different. The cross-sectional shape of the rod-shaped member 31 is based on a circle as shown in FIGS. 3 and 5, and a part thereof is cut into a flat shape. Most of the peripheral surface of the rod-shaped member 31 is an arc surface, and a part of the rod-shaped member 31 is a flat surface.
Therefore, the rod-shaped member 31 has a curved surface portion 35 that is gently connected to the peripheral surface thereof, and a deformed portion 36 that forms a plane different from the curved surface portion 35.

The total length of the rod-shaped member 31 is considerably shorter than the depth dimension of the shelf member 3 as shown in FIG. 4A. The preferable total length of the rod-shaped member 31 is 10 cm to 30 cm, preferably 12 cm to 20 cm, regardless of the depth dimension of the shelf member 3.
Focusing on the cross-sectional shape of the rod-shaped member 31, as shown in FIG. 3B, the angle A formed by the arc of the curved surface portion 35 and the angle B formed by the plane of the deformed portion 36 are larger than the angle A formed by the arc.

The material of the rod-shaped member 31 is not limited, but it is desirable that it can withstand a considerably high temperature, and it is desirable that it is an inorganic substance such as glass or ceramic or a metal.
In this embodiment, the rod-shaped member 31 is made of glass.
The method for manufacturing the rod-shaped member 31 is arbitrary, but for example, a method of manufacturing a rod having a circular cross-sectional shape and grinding one surface of the rod to form the deformed portion 36 is recommended.

The bracket 32 functions as a rod holding member for holding the rod-shaped member 31. The overall shape of the bracket 32 is a strip-shaped plate as shown in FIG. 4A. The total length of the bracket 32 is substantially equal to the depth dimension of the shelf member 3, and is much longer than the rod-shaped member 31 described above.

As shown in FIG. 4B, the bracket 32 has a recess 38 formed in the vicinity of one of the long sides. The recess 38 extends in a groove shape and reaches the entire length of the bracket 32. In the present embodiment, the recess 38 is a continuous groove, and the end portion reaches the opposite short side of the bracket 32. The recess 38 is preferably a continuous groove as described above, but may be divided. The recess 38 does not have to be continuous, and the portion on which the rod-shaped member 31 is placed may be concave.
The cross-sectional shape of the recess 38 is a "V" shape with an upper opening as shown in FIGS. 3 (b) and 4. Therefore, the inner wall of the recess 38 has a pair of inclined walls 40a and 40b facing each other.
In the present embodiment, the inclination angles of the inclined walls 40a and 40b facing each other as shown in FIG. 3B are the same.

As shown in FIGS. 2, 3, and 4, the bracket 32 has one long side fixed to the left and right side surfaces 47 and 48 of the housing 25 of the shelf member 3.
Therefore strip plate serving bracket 32 along the side wall of the heating chamber 2, and extends toward the rear side from the positive side of the heating chamber 2.
Further, the brackets 32 are cantilevered on one of the side surfaces 47 and 48, and are installed so as to project from the side surface side of the heating chamber 2 toward the center.
That is, the bracket 32 is cantilevered and supported by the shelf member 3 with one of its long sides as the base end, and the free end side projects toward the center of the shelf member 3.
Looking at the posture of the bracket 32, it projects from the side surface side of the heating chamber 2 toward the center of the heating chamber 2.
The recess 38 is located on the free end side of the bracket 32.

In the support member 30 of the present embodiment, a plurality of rod-shaped members 31 are supported by brackets 32.
That is, the support member 30 of the present embodiment is composed of a plurality of rod-shaped members 31 and brackets 32 as shown in FIG. 4A, and the plurality of rod-shaped members 31 are arranged in series and mounted in the recess 38. It is a thing.
As described above, the strip-shaped plate bracket 32 extends from the front side to the back side of the heating chamber 2 along the side wall of the heating chamber 2, and the recess 38 is the long side of the free end side of the bracket 32. Since the groove is provided in the vicinity, the rod-shaped member 31 is in a posture of extending from the front side to the back side of the heating chamber 2.

Further, in the present embodiment, the recess 38 provided in the bracket 32 is a single groove, and the total length of the rod-shaped member 31 is much shorter than the total length of the recess 38. Therefore, a plurality of rods are formed in the recess 38. The members 31 can be arranged side by side in series.
A part of the peripheral surface of the rod-shaped member 31 is exposed from the recess 38.
The posture of the rod-shaped member 31 in the recess 38 of the bracket 32 is as shown in FIGS. 3 (b) and 6, and the deformed portion 36 of the rod-shaped member 31 is in contact with one inclined wall 40b, and the back side thereof is inclined to the other. It is in contact with the wall 40a.
Here, since the deformed portion 36 of the rod-shaped member 31 is flat, it is stable in a posture in close contact with the surface of any of the inclined walls 40 of the recess 38.

Further, the cross-sectional shape of the recess 38 is "V" -shaped, the opening side is wide, and the distance between the inclined walls 40 becomes narrower toward the back. Therefore, any of the curved surfaces 35 on the back side of the deformed portion 36 Be sure to contact the other inclined wall 40 at the depth of.
Therefore, the rod-shaped member 31 is fitted into the "V" -shaped groove, and the flat portion of the deformed portion 36 is in close contact with the surface of the inclined wall 40.
Therefore, the rod-shaped member 31 is in a state where it is difficult to rotate. Further, the displacement movement in the horizontal direction (arrow X in FIG. 3) is blocked by the inclined wall 40. That is, since the inclined wall 40 has a vertical component, a force applied in the horizontal direction to the rod-shaped member 31 is applied to the inclined wall 40, and the displacement movement of the rod-shaped member 31 in the width direction is prevented.

Further, since the deformed portion 36 is only a part of the peripheral surface of the rod-shaped member 31, and most of the peripheral surface is an arc surface, the rod-shaped member 31 is fitted into the recess 38, and the flat portion of the deformed portion 36 is formed. The position of the maximum height of the rod-shaped member 31 in a state of being in close contact with the surface of the inclined wall 40 is an arc plane.
In other words, as shown in FIG. 3B, assuming a vertical line 50 passing through the center of the cross section of the rod-shaped member 31, the vertical line 50 intersects the curved surface portion 35 on the side exposed from the recess 38 of the rod-shaped member 31.

The stopper member 27 is made by bending a metal plate such as stainless steel, and has a structure in which a plurality of contact portions 28 are connected by a connecting portion 33 as shown in FIG.
The contact portion 28 is a portion forming a plane inclined with respect to the mounting posture as shown in FIGS. 2 and 6 (b).
The stopper member 27 regulates the range of movement of the glass substrate 100 in the width direction.

Next, the function of the heat treatment apparatus 1 of the present embodiment will be described.
Also in the heat treatment apparatus 1 of the present embodiment, the glass substrate 100 is used as an object to be heated, and the glass substrate 100 is heat-treated.
Also in this embodiment, the glass substrate 100 is supported by the support member 30 in the heating chamber 2. Specifically, as shown in FIG. 6, the glass substrate 100 is laid flat on the rod-shaped member 31 of the support member 30.
Here, the support member 30 used in the present embodiment supports the glass substrate 100 with the rod-shaped member 31, but the peripheral surface of the rod-shaped member 31 is a curved surface based on a circle and has a curved surface at the highest position. .. Therefore, the rod-shaped member 31 is in contact with the glass substrate 100 on a curved surface, and the glass substrate 100 is not easily damaged.

The glass substrate 100 is exposed to hot air in the heating chamber 2 to be dried and fired. Further, the glass substrate 100 may be exposed to hot air and receive a force in the width direction.
Here, in the support member 30 of the present embodiment, since the flat deformed portion 36 of the rod-shaped member 31 is in contact with one of the inclined walls 40b, the rod-shaped member 31 itself is difficult to rotate and is difficult to roll on the spot. Therefore, the rod-shaped member 31 does not rotate, and the glass substrate 100 does not easily roll and move.

Further, since the rod-shaped member 31 is also prevented from moving horizontally, the glass substrate 100 is difficult to move in the width direction even if it receives a force in the width direction from the hot air. Therefore, the frequency with which the glass substrate 100 collides with the stopper member 27 is low, and the end portion of the glass substrate 100 is not easily scratched.
Further, since the glass substrate 100 rarely moves relative to the rod-shaped member 31, the glass substrate 100 is not easily damaged.

In the embodiment described above, a flat surface is adopted as an example of the deformed portion 36. However, the present invention does not limit the shape of the deformed portion 36 to a planar shape. In short, the deformed portion 36 may form a flat surface or a curved surface different from the curved surface portion, and may have a shape that engages with a part of the bracket 32 or causes a catch when rotating.
For example, as in the rod-shaped member 60 shown in FIG. 7A, there may be a notch groove 61 in a part of the surface, and two straight portions 62 parallel to the opening thereof may be formed.
The portion of the notch groove 61 forms a plane different from other curved surface portions, and functions as a deformed portion.
In the rod-shaped member 60, the two straight portions 62 come into contact with the inclined wall 40 in the recess 38 to prevent the rod-shaped member 60 from rotating.

Further, as in the rod-shaped member 65 shown in FIG. 7B, a recess 66 may be formed on a part of the surface.
The portion of the recess 66 constitutes a curved surface different from other curved surface portions.
In the rod-shaped member 65, the recess 66 comes into contact with the inclined wall 40 in the recess 38 to prevent the rod-shaped member 65 from rotating. In this embodiment, the recess 66 functions as a deformed portion.

Further, as in the rod-shaped member 67 shown in FIG. 7C, the deformed portions 36 may be provided at a plurality of locations.
Further, as in the rod-shaped member 68 shown in FIG. 7 (d), a protrusion 70 may be provided on the surface to form the deformed portion 71.

In the embodiment described above, the recess 38 of the bracket 32 has a "V" shape, and the inclined walls 40a and 40b have the same inclination angle. However, as shown in FIG. 8A, the inclined wall 40a , 40b may have different tilt angles.
Further, as shown in FIGS. 8 (b) and 8 (c), one inner wall may be in a vertical posture.
FIG. 8D shows an example in which the deformed portion 36 is in contact with the vertical wall side. In the example shown in FIG. 8D, the heights of the facing inner walls are different.

Further, it may be a recess 80 having a rectangular cross section as shown in FIG. 8 (e).
In the embodiment shown in FIG. 8 (e), the deformed portion 36 of the rod-shaped member 31 comes into contact with the surface of the bracket 32 to prevent rotation. Since the width of the recess 80 is larger than the diameter of the cross section of the rod-shaped member 31, the rod-shaped member 31 may move slightly in the width direction.

Further, as shown in FIGS. 8 (f) and 8 (g), the rod-shaped member 31 may be prevented from rotating or horizontally moving by the protrusion 81 or the like.
In the example shown in FIG. 8 (f), the deformed portion 36 of the rod-shaped member 31 comes into contact with the surface of the bracket 32 to prevent rotation. Further, the protrusion 81 corrects the deviation of the rod-shaped member 31 in the width direction.
In the example shown in FIG. 8 (g), the rotation is prevented by the deformed portion 36 of the rod-shaped member 31 coming into contact with the slope of the protrusion 82. Further, the protrusions 82 and 83 correct the deviation of the rod-shaped member 31 in the width direction.

Although the modified example of the rod-shaped member and the modified example of the bracket 32 have been described separately above, a form in which the modified examples are arbitrarily combined is also possible.

In the embodiment described above, the bracket 32 has a plate shape and is bent to form a recess 38 or the like. However, a relatively thick member is adopted and the recess 38 is formed by milling or the like. You may.
Further, the recess 38 may be provided over a plurality of rows.
The bracket 32 may be divided into a plurality of brackets 32, or a plurality of beam-shaped brackets may be arranged side by side.

In the embodiment described above, a relatively short rod-shaped member 31 is adopted and arranged in a straight line to support the glass substrate 100. In other words, in the above-described embodiment, the glass substrate 100 is supported by the divided rod-shaped member 31.
On the other hand, a rod-shaped member having a longer overall length may be used, and for example, a rod-shaped member having a length comparable to the total length of the shelf member 3 may be held by the bracket 32 to support the glass substrate 100.
However, it is difficult to precision machine a long rod, and it may be partially distorted or twisted.
Therefore, it is desirable to linearly arrange a plurality of rod-shaped members 31 to hold the glass substrate 100 as in the above-described embodiment.
The number of rod-shaped members 31 in the case of arranging them in a straight line is arbitrary, but it is preferably about 3 to 10, and more preferably about 4 to 6.

In the embodiment described above, the support member 30 is installed in a plurality of stages, but the number of stages of the support member 30 is not limited and may be only one stage.
In the embodiment described above, the shelf member 3 is installed in the heating chamber 2, and the support member 30 is provided in the shelf member 3, but the shelf member 3 is not essential and is directly supported by the heating chamber 2. The member 30 may be provided.

1 Heat treatment device 2 Heating chamber 3 Shelf member 30 Support member 31, 60, 65, 67, 68 Rod-shaped member 32 Bracket (bar holding member)
35 Curved surface part 36, 71 Deformed part 38 Recessed part 40a, 40b Inclined wall 47, 48 Side surface 100 Glass substrate

Claims (3)

A heat treatment apparatus having a heating chamber for heating an object to be heated and heat-treating a thin plate-shaped object to be heated in the heating chamber, and a support member for supporting the object to be heated in a flat manner is installed in the heating chamber. In a heat treatment apparatus capable of installing the object to be heated on the support member.
The support member has a rod-shaped member and a rod holding member.
The rod-shaped member has a curved surface portion that is gently connected to the peripheral surface thereof , and a deformed portion that forms a plane or a curved surface different from the curved surface portion.
The rod-shaped member is placed on the rod holding member in a posture extending from the front side to the back surface side of the heating chamber.
The highest portion of the cross section of the peripheral surface of the rod member is the curved surface portion, profiled portion of the rod-shaped member is contact with a portion of the rod holding member,
The rod holding member has a recess that is open at the top, and the rod-shaped member is installed in the recess.
The inner surface of the recess, which extends from the opening side to the inner wall, has opposing inner walls, at least one of the inner walls is an inclined surface, and the rod-shaped member is in contact with both of the inner walls whose peripheral surfaces face each other. A heat treatment apparatus characterized in that the deformed portion is in contact with one of the facing inner walls . The heat treatment apparatus according to claim 1, wherein the deformed portion is a flat surface. The heat treatment apparatus according to claim 1 or 2, wherein the rod holding member has protrusions, and the recesses are formed by the protrusions.

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