JP6834288B2 - Encoder device, drive device, stage device, and robot device - Google Patents

Description

The present invention relates to an encoder device, a drive device, a stage device, and a robot device.

A multi-rotation type encoder device that distinguishes the number of rotations of a rotating shaft is mounted on various devices such as a robot device (see, for example, Patent Document 1 below). During operation of the robot device, the encoder device receives power from, for example, the main power supply of the robot device, and rotates position information including multi-rotation information indicating the number of rotations and angular position information indicating an angular position of less than one rotation. Is detected.

When the robot device finishes a predetermined process, its main power may be turned off. In this case, the power supply from the main power supply of the robot device to the encoder device is also stopped. The robot device may need information such as the initial posture the next time the main power is switched on (eg, when the next operation is started). Therefore, the encoder device is required to hold the multi-rotation information even when power is not supplied from the outside. Therefore, as an encoder device, a device that holds multi-rotation information by the electric power supplied from the battery is used in a state where the electric power supply from the main power source cannot be obtained.

Japanese Unexamined Patent Publication No. 8-50034

According to the first aspect of the present invention, an encoder device is provided. The encoder device may include a position detection module including a detection unit that detects the position information of the moving unit and a processing board unit that processes the detection result of the detection unit . The encoder device may include a battery module including a battery that supplies electric power to the processing board portion . The encoder apparatus, by which the position detection module and the battery module are fixed to each other, may comprise a connecting portion for electrically connecting the second terminal of the first terminal and the battery module of the position detection module. The encoder device may include a switching unit that switches whether or not power is supplied from the battery to the processing board unit in response to a detection signal generated by a change in the magnetic field accompanying the movement of the moving unit.

According to the second aspect of the present invention, there is provided a drive device including the encoder device of the first aspect and the drive unit that supplies the driving force to the moving unit.

According to the third aspect of the present invention, a stage device including the drive device of the second aspect and the stage moved by the drive device is provided.

According to the fourth aspect of the present invention, there is provided a robot device including the drive device of the second aspect and the arm moved by the drive device.

It is a figure which shows the encoder device which concerns on 1st Embodiment. It is a figure which shows the detection part and the signal generation part which concerns on 1st Embodiment. It is a figure which shows the position detection module, the battery module, and the connection part which concerns on 1st Embodiment. It is a figure which shows the mounting method of the encoder device which concerns on 1st Embodiment. It is a figure which shows the circuit structure of the encoder device which concerns on 1st Embodiment. It is a figure which shows the operation of the encoder device which concerns on 1st Embodiment. It is a figure which shows the position detection module, the battery module, and the connection part which concerns on 2nd Embodiment. It is a figure which shows the drive device which concerns on embodiment. It is a figure which shows the stage apparatus which concerns on embodiment. It is a figure which shows the robot apparatus which concerns on embodiment.

[First Embodiment]
The first embodiment will be described. FIG. 1 is a diagram showing an encoder device EC according to the present embodiment. This encoder device EC detects the position information (moving position information) of the moving unit. The encoder device EC is, for example, a rotary encoder. The moving unit is, for example, the rotation axis SF of the motor M (power supply unit), and the movement of the moving unit is, for example, rotation around a predetermined axis. Further, the position information of the moving portion is, for example, the rotation position information of the rotation axis SF.

The rotary shaft SF is, for example, a shaft (rotor) of the motor M, but is an action shaft (output shaft) connected to the shaft of the motor M via a power transmission unit such as a transmission and connected to a load. You may. The rotation position information detected by the encoder device EC is supplied to the motor control unit MC. The motor control unit MC controls the rotation of the motor M by using the rotation position information supplied from the encoder device EC. The motor control unit MC controls the rotation of the rotation shaft SF. The encoder device EC may be, for example, a linear encoder, and may detect position information (moving position information) of a moving unit (moving axis) of a power driving unit such as a linear motor or a flat motor.

The encoder device EC includes a position detection module 1 (position detection unit), a battery module 2 (battery unit), and a connection unit 3. The position detection module 1 includes a detection unit 4 (measurement unit, sensor unit) and a processing board unit 5. The detection unit 4 detects the rotation axis SF by, for example, a sensor. The processing board unit 5 processes the detection result of the detection unit 4 and calculates the rotation position information of the rotation axis SF. The battery module 2 includes a battery 6, and supplies electric power from the battery 6 to the detection unit 4 and the processing board unit 5.

The battery module 2 and the position detection module 1 are, for example, modules (units) that are independent of each other, are fixed to each other, and are assembled to the encoder device EC. For example, the battery module 2 and the position detection module 1 are manufactured as modules independent of each other, are transported to the motor M, and are fixed to each other when attached to the rotary shaft SF.

When the encoder device EC is attached to the rotating shaft SF, the connection portion 3 has the position detection module 1 and the battery module 2 fixed to each other, so that the first terminal 7 of the position detection module 1 and the battery module 2 are fixed to each other. The two terminals 8 are electrically connected. For example, the connection portion 3 is attached between the first terminal 7 and the second terminal 8 when the battery module 2 and the position detection module 1 are attached to the rotating shaft SF. Further, before the encoder device EC is attached to the rotating shaft SF, the battery 6 of the battery module 2 is in a state in which the electrical connection between the first terminal 7 and the second terminal 8 is disconnected (non-fixed state). Therefore, it is not possible to supply power to the processing board unit 5, and for example, power consumption due to standby power is suppressed. Therefore, for example, the connection unit 3 has the first terminal 7 and the second terminal in a fixed state in which the position detection module 1 and the battery module 2 are fixed to each other (for example, the encoder device EC is attached to the rotating shaft SF). 8 is electrically connected, and the first terminal 7 and the second terminal 8 are not electrically connected in a non-fixed state in which the position detection module 1 and the battery module 2 are not fixed to each other.

Hereinafter, each part of the encoder device EC will be described. The position detection module 1 detects the rotation position information of the rotation axis SF. The encoder device EC in the present embodiment is a multi-rotation absolute encoder, and includes multi-rotation information indicating the number of rotations of the rotation axis SF and angular position information indicating an angular position (rotation angle) of less than one rotation. Is detected. The position detection module 1 includes a multi-rotation information detection unit 1A for detecting the multi-rotation information of the rotation axis SF, and an angle detection unit 1B for detecting the angle position of the rotation axis SF.

At least a part of the position detection module 1 (eg, the angle detection unit 1B) detects the rotation position information of the rotation axis SF by the electric power supplied from the first power source 9 in a normal state, for example. The first power source 9 is, for example, the main power source of a device (eg, drive device, stage device, robot device) on which the encoder device EC is mounted, and supplies power consumed for driving the rotary shaft SF in a normal state. .. For example, the motor control unit MC controls the rotation of the rotating shaft SF by adjusting the electric power from the first power source 9 and supplying it to the motor M based on the detection result of the encoder device EC.

The position detection module 1 operates by receiving power from the first power supply 9 in a state where the power of the first power supply 9 is turned on (a state in which the first power supply 9 is on, a normal state). Further, the angle detection unit 1B (or its circuit) can operate while the first power supply 9 is turned on in the position detection module 1. For example, when the first power supply 9 is in the normal state when the position detection module 1 is turned on, the angle detection unit 1B starts detecting the angle position information (eg, calculation), and similarly, the multi-rotation information detection unit 1A Also starts the detection of multi-rotation information (eg, detection by sensor, processing of detection result, calculation).

Further, at least a part of the position detection module 1 (eg, the multi-rotation information detection unit 1A) is in a state where the power supply from the first power supply 9 is cut off (eg, the first power supply 9 is not turned on). In the state (state, state in which the first power source 9 is turned off, backup state), the operation is performed by the power supplied from the second power source (eg, battery 6) different from the first power source 9. For example, in a state where the power supply from the first power source 9 is cut off to the position detection module 1, the power supply unit 10 supplies at least a part of the position detection module 1 (eg, the multi-rotation information detection unit 1A). On the other hand, power is intermittently (intermittently, selectively) supplied based on the detection signal, and the position detection module 1 receives at least the rotation position information of the rotation axis SF when power is supplied from the power supply unit 10. Detect a part (eg, multi-turn information).

Further, the multi-rotation information detection unit 1A (or its circuit) can operate when the first power supply 9 is not turned on. For example, when the first power supply 9 is not turned on and the power is supplied from the second power supply to the backup state, the multi-rotation information detection unit 1A continues to detect the multi-rotation information, but the angle detection unit 1B Stops the detection of angular position information. In this way, the multi-rotation information detection unit 1A is based on the detection signal, regardless of the on / off state (normal state and backup state) of the power supply (first power source 9, second power source such as battery 6), multi-rotation information. Is detected.

The multi-rotation information detection unit 1A is, for example, a magnetic detection unit, and detects multi-rotation information by magnetism. The multi-rotation information detection unit 1A includes, for example, a magnet 11, a magnetic sensor 12, a processing unit 13, and a storage unit 14. The position detection module 1 is configured such that, for example, the detection unit 4 includes the magnetic sensor 12 and the processing board unit 5 includes the processing unit 13. The processing board unit 5 may or may not include the storage unit 14. For example, the storage unit 14 may be provided in a portion other than the processing substrate portion 5.

The magnet 11 is provided on a disk 15 (first rotating body, first moving body) fixed to the rotating shaft SF. Since the disk 15 rotates together with the rotation axis SF, the magnet 11 rotates (moves) in conjunction with the rotation axis SF. The magnet 11 is fixed to the outside of the rotating shaft SF, and the relative positions of the magnet 11 and the magnetic sensor 12 change with each other due to the rotation of the rotating shaft SF. The strength and direction of the magnetic field on the magnetic sensor 12 formed by the magnet 11 changes with the rotation of the rotation axis SF.

The magnetic sensor 12 detects the magnetic field formed by the magnet 11, and the processing unit 13 detects the magnetic field formed by the magnet by the magnetic sensor 12, and based on the result, the position information of the rotation axis SF (eg, multi-rotation information). Is detected (calculated). The processing unit 13 is, for example, a multi-rotation processing unit that processes multi-rotation information. The storage unit 14 stores the position information detected and processed by the processing unit 13 based on the storage instruction (data writing command) of the position information (eg, multi-rotation information) from the processing unit 13. The magnet 11 may be movable relative to the magnetic sensor 12 or the signal generating unit 16, and the magnetic sensor 12 may be provided on the disk 15 instead of the magnet 11.

The angle detection unit 1B is an optical or magnetic encoder, and provides position information (angle position information, absolute or relative position information) within one rotation of the scale S (second rotating body, second moving body). To detect. For example, in the case of an optical encoder, the angle detection unit 1B detects the angle position information within one rotation of the rotation axis SF by reading the patterning information of the scale S with the light receiving element. The patterning information of the scale S is, for example, a light / dark pattern due to a slit (transmission pattern) or a reflection pattern on the scale S. The angle detection unit 1B detects the angle position information of the same rotation axis SF as the detection target of the multi-rotation information detection unit 1A.

The angle detection unit 1B includes a scale S, a light emitting element 21, a light receiving sensor 22, and a processing unit 23. In the position detection module 1, for example, the detection unit 4 includes a light receiving sensor 22, and the processing board unit 5 includes a processing unit 23. The processing unit 23 is, for example, an angular position processing unit that processes position information within one rotation of the scale S.

The scale S is fixedly provided on the rotation axis SF. The scale S includes an incremental pattern INC and an absolute pattern ABS. The scale S may be provided on the disk 15 or may be a member integrated with the disk 15. In this case, for example, one or both of the incremental pattern INC and the absolute pattern ABS may be provided on the same side surface or the opposite side surface of the magnet 11 on the disk 15. Further, one or both of the incremental pattern INC and the absolute pattern ABS may be provided on at least one of the inside and the outside with respect to the position of the magnet 11.

The light emitting element 21 (irradiating unit, light emitting unit) irradiates the incremental pattern INC and the absolute pattern ABS of the scale S with light. The light receiving sensor 22 (photodetector) detects light emitted from the light emitting element 21 and passing through the incremental pattern INC, and light emitted from the light emitting element 21 and passed through the absolute pattern ABS. In FIG. 1, the angle detection unit 1B is a transmission type, and the light receiving sensor 22 detects the light transmitted through the scale S. The angle detection unit 1B may be of a reflection type, in which case the light receiving sensor 22 detects the light reflected by the scale S.

The light receiving sensor 22 supplies a signal indicating the detection result to the processing unit 23. The processing unit 23 detects the angular position of the rotation axis SF by using the detection result of the light receiving sensor 22. For example, the processing unit 23 detects the angular position information of the first resolution by using the result of detecting the light from the absolute pattern ABS. Further, the processing unit 23 uses the result of detecting the light from the incremental pattern INC to perform an interpolation calculation on the angular position information of the first resolution, thereby performing the angular position information of the second resolution higher than the first resolution. Is detected.

In the present embodiment, the encoder device EC includes a signal processing unit 25. The signal processing unit 25 processes the signal output from the processing unit 13 and the signal output from the processing unit 23. The signal processing unit 25 includes a synthesis unit 26 and a communication unit 27. For example, at least a part of the signal processing unit 25 is provided on the processing board unit 5. At least a part of the signal processing unit 25 may be provided in a portion different from the processing board unit 5.

The synthesizing unit 26 acquires the angle position information of the second resolution detected by the processing unit 23. Further, the synthesis unit 26 acquires the multi-rotation information of the rotation axis SF from the storage unit 14 of the multi-rotation information detection unit 1A. The synthesis unit 26 synthesizes the angle position information from the processing unit 23 and the multi-rotation information from the multi-rotation information detection unit 1A, and calculates the rotation position information of the rotation axis SF. For example, when the detection result of the processing unit 23 is θ [rad] and the detection result of the multi-rotation information detection unit 1A is n rotations, the synthesis unit 26 uses (2π × n + θ) [rad] as the rotation position information. Is calculated. The rotation position information may be information that is a combination of multi-rotation information and angle position information of less than one rotation.

Then, the synthesis unit 26 transmits the calculated rotation position information to the communication unit 27. The communication unit 27 (external communication unit, external connection interface) is communicably connected to the communication unit MC1 of the motor control unit MC by wire or wirelessly. The communication unit 27 supplies the rotation position information in digital format to the communication unit MC1 of the motor control unit MC. The motor control unit MC appropriately decodes the rotation position information from the communication unit 27 of the angle detection unit 1B. The motor control unit MC controls the rotation of the motor M by controlling the electric power (driving power) supplied to the motor M using the rotation position information.

In the present embodiment, the encoder device EC includes a power supply unit 10 (also shown in FIG. 3 below). The power supply unit 10 is in a state where the power supply from the first power supply 9 is cut off (for example, a state in which the first power supply 9 is not turned on, a state in which the first power supply 9 is turned off, a backup state). , Supply power. The power supply unit 10 includes a connection unit 3, a signal generation unit 16, a switching unit 28, and a battery 6 (battery).

In the signal generation unit 16, an electric signal (detection signal) is generated by a change in the magnetic field accompanying the movement (eg, rotation) of the moving unit (eg, rotation axis SF). This electrical signal includes, for example, a waveform in which electric power (current, voltage) changes with time. In the signal generation unit 16, for example, a detection signal is generated as an electric signal by a magnetic field that changes with the rotation of the rotation axis SF. For example, the signal generation unit 16 generates a detection signal due to a change in the magnetic field formed by the magnet 11 used by the multi-rotation information detection unit 1A to detect the multi-rotation information of the rotation axis SF. The signal generation unit 16 is arranged so that the relative angular position with respect to the magnet 11 changes due to the rotation of the rotation axis SF. For example, when the relative position between the signal generating unit 16 and the magnet 11 becomes a predetermined position, the signal generating unit 16 generates a pulse-shaped electric signal.

The battery 6 supplies at least a part of the power consumed by the position detection module 1 according to the detection signal generated by the signal generation unit 16. The battery 6 is, for example, a primary battery such as a button type battery or a dry battery, but may be a secondary battery such as a lithium ion secondary battery. The battery 6 of the present embodiment is, for example, a button type battery, and is held by a second holding portion 52 (later shown in FIG. 3). The second holding portion 52 is provided with, for example, a battery case capable of accommodating the battery 6, electrodes connected to the battery 6, wiring, and the like.

The switching unit 28 uses the detection signal generated by the signal generation unit 16 as a control signal to switch whether or not power is supplied from the battery 6 to the position detection module 1. For example, the switching unit 28 starts supplying electric power from the battery 6 to the position detection module 1 when the level of the electric signal generated by the signal generation unit 16 becomes equal to or higher than the threshold value. For example, the switching unit 28 starts supplying electric power from the battery 6 to the position detection module 1 when the signal generation unit 16 generates a detection signal equal to or higher than the threshold value.

Further, the switching unit 28 stops the supply of electric power from the battery 6 to the position detection module 1 when the level of the electric signal generated by the signal generation unit 16 becomes less than the threshold value. For example, the switching unit 28 stops the supply of electric power from the battery 6 to the position detection module 1 when the detection signal generated by the signal generation unit 16 becomes less than the threshold value. For example, when a pulsed electric signal is generated in the signal generation unit 16 in a state where the power supply from the first power supply 9 is cut off (backup state), the switching unit 28 uses the level (potential) of this electric signal. Starts supplying power from the battery 6 to the position detection module 1 when the power rises from the low level to the high level, and after a predetermined time elapses after the level (potential) of this electric signal changes to the low level, The power supply from the battery 6 to the position detection module 1 is stopped.

The power supply unit 10 may supply the position detection module 1 with power whose detection signal voltage is adjusted by a regulator or the like. For example, the power supply unit 10 may supply the position detection module 1 with the power whose detection signal voltage is adjusted by a regulator or the like and the power from the battery 6 in combination or by switching.

FIG. 2 is a diagram showing a magnet 11, a magnetic sensor 12, and a signal generation unit 16 according to the present embodiment. FIG. 2A shows a perspective view of the magnet 11, the magnetic sensor 12, and the signal generation unit 16, and FIG. 2B shows the magnet 11, the magnetic sensor 12, and the signal generation as seen from the direction of the rotation axis SF. The plan view of the part 16 is shown. Further, FIG. 2C shows the circuit configuration of the first magnetic sensor 12a.

The magnet 11 is configured so that the direction and strength of the magnetic field in the radial direction (diameter direction) with respect to the rotation axis SF change with rotation. The magnet 11 is, for example, an annular member coaxial with the rotation axis SF. The main surfaces (front surface and back surface) of the magnet 11 are substantially perpendicular to the rotation axis SF, respectively. As shown in FIG. 2B, the magnet 11 is a permanent magnet magnetized to four poles. The magnet 11 has N poles and S poles arranged in the circumferential direction on the inner peripheral side and the outer peripheral side, respectively, and the phases of the magnet 11 are 180 ° out of phase between the inner peripheral side and the outer peripheral side. In the magnet 11, the boundary between the north pole and the south pole on the inner peripheral side substantially coincides with the boundary between the north pole and the south pole on the outer peripheral side in the circumferential direction (angle position).

In the following description, counterclockwise rotation is referred to as forward rotation and clockwise rotation is referred to as reverse rotation when viewed from the tip side (opposite side of the motor M in FIG. 1) of the rotating shaft SF. The forward rotation angle is represented by a positive value, and the reverse rotation angle is represented by a negative value. Note that the counterclockwise rotation when viewed from the base end side (motor M side in FIG. 1) of the rotation axis SF may be defined as forward rotation, and the clockwise rotation may be defined as reverse rotation.

Here, in the coordinate system fixed to the magnet 11, the angular position of one boundary between the N pole and the S pole in the circumferential direction is represented by the position 11a, and the angular position rotated by 90 ° from the position 11a is represented by the position 11b. Further, the angular position rotated by 90 ° from the position 11b is represented by the position 11c, and the position rotated by 90 ° from the position 11c is represented by the position 11d. The position 11c is an angular position of another boundary between the north pole and the south pole in the circumferential direction.

In the first section 180 ° counterclockwise from the position 11a, the north pole is arranged on the outer peripheral side of the magnet 11, and the south pole is arranged on the inner peripheral side of the magnet 11. In this first section, the radial direction of the magnetic field is generally the direction from the outer peripheral side to the inner peripheral side of the magnet 11. In the first section, the strength of the magnetic field is maximum at position 11b and minimum near position 11a and 11c.

In the second section 180 ° counterclockwise from the position 11c, the north pole is arranged on the inner peripheral side of the magnet 11, and the south pole is arranged on the outer peripheral side of the magnet 11. In this second section, the radial direction of the magnetic field is the direction from the inner peripheral side to the outer peripheral side of the magnet 11. In the second section, the strength of the magnetic field is maximum at position 11d and minimum near position 11a and 11c.

As described above, the radial direction of the magnetic field formed by the magnet 11 is reversed at the position 11a and reversed at the position 11c. The magnet 11 forms an alternating magnetic field in which the direction of the magnetic field in the radial direction is reversed as the magnet 11 rotates with respect to the coordinate system fixed to the outside of the magnet 11. The signal generation unit 16 is arranged at a position overlapping the magnet 11 when viewed from the normal direction of the main surface of the magnet 11.

In the present embodiment, the signal generation unit 16 includes a first signal generation unit 16a and a second signal generation unit 16b. The first signal generation unit 16a and the second signal generation unit 16b are units that generate electric signals, respectively, and are provided in non-contact with the magnet 11. The first signal generation unit 16a includes a first magnetic sensing unit 41 and a first power generation unit 42. The first magnetic sensitive unit 41 and the first power generation unit 42 are fixed to the outside of the magnet 11, and their relative positions on the magnet 11 change as the magnet 11 rotates. For example, in FIG. 2B, the position 11b of the magnet 11 is arranged at a position 45 ° counterclockwise from the first signal generating unit 16a, and the magnet 11 is in the forward direction (counterclockwise) from this state. When one rotation is made, the position 11b, the position 11c, the position 11d, and the position 11a pass in the vicinity of the signal generation unit 16 in this order.

The first magnetically sensitive portion 41 is a magnetically sensitive wire (magnetic material) such as a Wiegand wire. A large bulk Hausen jump (Weigand effect) occurs in the first magnetic sensitive portion 41 due to a change in the magnetic field accompanying the rotation of the magnet 11. The first magnetic sensitive portion 41 is a columnar member, and its axial direction is set to the radial direction of the magnet 11. When an alternating magnetic field is applied to the first magnetic field portion 41 in the axial direction and the magnetic field is reversed, a domain wall is generated from one end to the other end in the axial direction.

The first power generation unit 42 is a high-density coil or the like that is wound around and arranged around the first magnetic sensitive unit 41. Electromagnetic induction occurs in the first power generation unit 42 with the generation of the domain wall in the first magnetic sensitive unit 41, and an induced current flows through the first power generation unit 42. When the position 11a or the position 11c of the magnet 11 shown in FIG. 2B passes in the vicinity of the signal generation unit 16, a pulsed current (electric signal) is generated in the first power generation unit 42. Further, the first power generation unit 42 can output a detection signal including a detection pulse such as a positive pulse or a negative pulse by using a large Barkhausen jump, and can output a detection signal from the outside (eg, the first power supply 9 in FIG. 1). It can operate without power supply.

The direction of the current generated in the first power generation unit 42 changes according to the direction before and after the reversal of the magnetic field. For example, the direction of the current generated at the time of reversal from the magnetic field facing the outside of the magnet 11 to the magnetic field facing inward is opposite to the direction of the current generated at the time of reversing from the magnetic field facing the inside of the magnet 11 to the magnetic field facing the outside. The electric power (induced current) generated in the first power generation unit 42 can be set by, for example, the number of turns of the high-density coil.

As shown in FIG. 2A, the first magnetic sensitive unit 41 and the first power generation unit 42 are housed in the case 43. The case 43 is provided with terminals 43a and 43b. One end of the high-density coil of the first power generation unit 42 is connected to the terminal 43a, and the other end is connected to the terminal 43b. The electric power generated by the first power generation unit 42 can be taken out to the outside of the first signal generation unit 16a via the terminals 43a and 43b.

The second signal generation unit 16b is arranged at an angle position that is greater than 0 ° and less than 180 ° from the angle position where the first signal generation unit 16a is arranged. The angle between the angular position of the first signal generating unit 16a and the angular position of the second signal generating unit 16b is selected from the range of 45 ° or more and 135 ° or less, and is about 90 ° in FIG. 2B. The second signal generation unit 16b has the same configuration as the first signal generation unit 16a. The second signal generation unit 16b includes a second magnetic sensitivity unit 45 and a second power generation unit 46. The second magnetic sensitive unit 45 and the second power generation unit 46 are the same as the first magnetic sensitive unit 41 and the first power generation unit 42, respectively, and the description thereof will be omitted. The second magnetic sensitive unit 45 and the second power generation unit 46 are housed in the case 47. The case 47 is provided with terminals 47a and 47b. The electric power generated by the second power generation unit 46 can be taken out to the outside of the second signal generation unit 16b via the terminals 47a and 47b.

The configuration of the signal generation unit 16 described above is an example, and the configuration can be changed as appropriate. For example, the signal generation unit 16 may generate electric power by electromagnetic induction that does not utilize the large Barkhausen jump (Wegand effect). Further, the number of power generation units included in the signal generation unit 16 can be appropriately changed, and may be, for example, one or three or more. Further, the arrangement of the signal generation unit 16 can be changed as appropriate.

The magnetic sensor 12 includes a first magnetic sensor 12a and a second magnetic sensor 12b. The first magnetic sensor 12a is arranged at an angle position larger than 0 ° and less than 90 ° with respect to the first magnetic sensitive unit 41 (first signal generation unit 16a) in the rotation direction of the rotation axis SF. The second magnetic sensor 12b is arranged at an angle position larger than 90 ° and less than 180 ° with respect to the first magnetic sensitive unit 41 (first signal generation unit 16a) in the rotation direction of the rotation axis SF.

As shown in FIG. 2C, the first magnetic sensor 12a is composed of a magnetoresistive element 48, a bias magnet (not shown) that applies a magnetic field of a constant strength to the magnetoresistive element 48, and a magnetoresistive element 48. It is equipped with a waveform shaping circuit (not shown) that shapes the waveform of. The magnetoresistive element 48 has a full bridge shape in which the element 49a, the element 49b, the element 49c, and the element 49d are connected in series. The signal line between the element 49a and the element 49c is connected to the power supply terminal 48p. The signal line between the element 49b and the element 49d is connected to the ground terminal 48g. The signal line between the element 49a and the element 49b is connected to the first output terminal 48a. The signal line between the element 49c and the element 49d is connected to the second output terminal 48b. The second magnetic sensor 12b has the same configuration as the first magnetic sensor 12a.

FIG. 3 is a diagram showing a position detection module, a battery module, and a connection portion according to the present embodiment. In FIG. 3, the X direction and the Y direction are directions perpendicular to the rotation axis SF, and the Z direction is a direction parallel to the rotation axis SF. The rotation direction (movement direction) of the rotation axis SF is parallel to the XY plane, and the Z direction is an intersection direction with respect to the rotation direction of the rotation axis SF. In each of the X, Y, and Z directions, the same side as the tip of the arrow is referred to as the + side (eg, + Z side), and the side opposite to the tip of the arrow is referred to as the-side (eg, -Z side). Refer to. The + Z side is, for example, the tip end side of the rotary shaft SF (the side opposite to the motor M in FIG. 1), and the −Z side is, for example, the base end side of the rotary shaft SF (the same side as the motor M).

In the present embodiment, the position detection module 1 includes a first holding unit 50 that holds the detection unit 4 and the processing board unit 5 of FIG. The first holding portion 50 is, for example, a member having a columnar outer shape (disc-shaped) and having a space inside. The first holding portion 50 is fixed to, for example, a member (eg, a main body portion, a housing) on the stator side in the motor M of FIG. The tip side (+ Z side) of the rotating shaft SF is inserted inside the first holding portion 50. The rotation axis SF is rotatable with respect to the first holding portion 50. The first holding portion 50 may have a shape other than a columnar shape, for example, the shape on the XY plane may be a rectangular columnar shape or a plate shape, or may be another shape.

The first holding portion 50 houses, for example, the scale S and the disk 15 of FIG. 1 inside. The scale S and the disk 15 are attached to the rotating shaft SF so as not to come into contact with the first holding portion 50, and the first holding portion 50 is arranged so as to surround (eg, cover) the scale S and the disk 15. .. For example, the scale S is a flange-shaped member, and its shaft AX is supported by the first holding portion 50 via a bearing or the like (later shown in FIG. 7 or the like). The axis AX of the scale S is fixed to the rotation axis SF of FIG. Further, the first holding unit 50 accommodates the magnetic sensor 12, the light emitting element 21, and the light receiving sensor 22 shown in FIG. The magnetic sensor 12, the light emitting element 21, and the light receiving sensor 22 are fixed to, for example, the inner wall of the first holding portion 50.

The processing substrate portion 5 is fixed to the first holding portion 50 and is held by the first holding portion 50. The processing substrate portion 5 has, for example, a disk shape, and the surface 5a on the base end side (−Z side) of the rotation axis SF is fixed to the first holding portion 50. The processing board portion 5 is, for example, a printed circuit board, and wiring is formed on the surface thereof. Further, for example, electronic components constituting at least a part of the processing unit 13, the processing unit 23, the switching unit 28, the storage unit 14, and the signal processing unit 25 of FIG. 1 are mounted on the processing board unit 5. The above wiring and electronic components may be arranged on the −Z side surface 5a of the processing board portion 5, may be arranged on the + Z side surface 5b, and may be arranged on the −Z side surface 5a and the + Z side surface. It may be arranged at 5b.

The signal generation unit 16 is arranged, for example, on the surface 5b on the + Z side of the processing board unit 5. The signal generation unit 16 is mounted (supported, mounted) on the surface 5b, for example, and is electrically connected to the wiring formed on the surface 5b. The signal generation unit 16 may be arranged (eg, mounted) on the −Z side surface 5a of the processing board unit 5, or may be housed in, for example, the first holding unit 50. Further, the signal generation unit 16 may be supported, held, or fixed to the first holding unit 50.

A connector 51 for external connection is provided on the + Z side surface 5b of the processing board portion 5. The connector 51 is electrically connected to the communication unit 27 of FIG. The communication unit 27 transmits the processing result (eg, rotation position information) of the processing board unit 5 to an external device (eg, motor control unit MC1 in FIG. 1) via, for example, a cable connected to the connector 51. To do.

Further, the processing board portion 5 includes a first terminal 7a and a first terminal 7b as the first terminal 7 in FIG. 1. The processing board unit 5 receives power from the outside via the first terminal 7a and the first terminal 7b. The first terminal 7a and the first terminal 7b are arranged, for example, on the surface 5a on the + Z side of the processing board portion 5. The first terminal 7a is, for example, a negative electrode terminal that conducts with the ground wire GL (later shown in FIG. 4) that becomes a reference potential in the processing substrate portion 5. The first terminal 7b is, for example, a positive electrode terminal to which a predetermined potential with respect to a reference potential is applied.

The position detection module 1 and the battery module 2 are stacked and arranged in the intersecting direction (Z direction) with respect to the rotation direction of the rotation axis SF. The battery module 2 is arranged, for example, on the same side (eg, + Z side) as the surface 5b on which the first terminal 7a and the first terminal 7b are formed in the processing board portion 5 with respect to the position detection module 1. Further, for example, the position detection module 1 and the battery module 2 are arranged in order along the axial direction of the rotation axis SF, and form a connecting portion 3 and a laminated structure. In the case of such a structure, the position detection module 1 may be arranged closer to the rotating shaft SF or the motor M (rotating shaft SF side or the motor M side), or the battery module 2 may be arranged. Further, for example, the position detection module 1 and the battery module 2 may be arranged side by side in the intersecting directions (X direction, Y direction) intersecting the axial direction of the rotation axis SF. Further, for example, the connecting portion 3 (conductive member 56) is arranged at a position sandwiched between the position detection module 1 and the battery module 2 along the rotation axis SF. In this case, for example, the position detection module 1, the connection unit 3, and the battery module 2 are arranged in the order of the position detection module 1, the connection unit 3, and the battery module 2 from the motor M side along the rotation axis SF.

The battery module 2 includes a second holding portion 52 for holding the battery 6. The second holding portion 52 is arranged apart from the first holding portion 50 of the position detection module 1, for example, in the crossing direction (direction of the rotating shaft SF, Z direction) with respect to the rotating direction of the rotating shaft SF. For example, the second holding unit 52 has a gap between it and the first holding unit 50, and the connector 51 for external connection and the signal generating unit 16 have the first holding unit 50 and the second holding unit 52. Placed in the gap between.

The second holding portion 52 is, for example, a columnar (disc-shaped) member. The second holding portion 52 is provided, for example, so as not to project from the first holding portion 50 of the position detection module 1 when viewed from the Z direction. For example, the second holding portion 52 has substantially the same shape and dimensions as the first holding portion 50 on the XY plane, and is arranged so as to be centered on the first holding portion 50. The second holding portion 52 may have a shape other than a columnar shape, for example, the shape on the XY plane may be a rectangular columnar shape or a plate shape, or another shape may be used. Further, the shape and dimensions of the second holding portion 52 on the XY plane may be different from those of the first holding portion 50.

The second holding portion 52 has a recess 53 in which the battery 6 is arranged. The recess 53 is arranged on the second holding portion 52 on the side opposite to the processing substrate portion 5. The second holding portion 52 is provided with a terminal 54a in contact with the positive electrode 6a and a terminal 54b in contact with the negative electrode 6b of the battery 6. Further, the battery module 2 includes a second terminal 8a and a second terminal 8b as the second terminal 8 in FIG. 1. The second terminal 8a conducts with the terminal 54a via a wiring 55a such as a lead, and conducts with the positive electrode 6a of the battery 6 via the terminal 54a. The second terminal 8b conducts with the terminal 54b via a wiring 55b such as a lead, and conducts with the negative electrode 6b of the battery 6 via the terminal 54b. The second terminal 8a and the second terminal 8b are, for example, round terminals having through holes into which the fastening member 57 is inserted. The second holding portion 52 has a hole portion 52a in which the second terminal 8a is arranged and a hole portion 52b in which the second terminal 8b is arranged.

In a state where the position detection module 1 and the battery module 2 are not fixed to each other (hereinafter referred to as a non-fixed state of the module), between the first terminal 7a and the second terminal 8a, and between the first terminal 7b and the second terminal. One or both with and to the terminal 8b are insulated (not conducting). The non-fixed state of the above module is, for example, a state before the encoder device EC is attached to the rotating shaft SF (moving part), and a state before the position detection module 1 and the battery module 2 are unitized (before being assembled). The state), the state in which the encoder device EC cannot detect the rotation position information (position information) of the rotation axis SF (moving unit), and the like.

Further, the connection unit 3 electrically connects the first terminal 7a and the second terminal 8a in a state where the position detection module 1 and the battery module 2 are fixed to each other (hereinafter referred to as a fixed state of the module). The first terminal 7b and the second terminal 8b are electrically connected. The fixed state of the above module is, for example, a state in which the encoder device EC is attached to the rotating shaft SF (moving part), a state in which the position detection module 1 and the battery module 2 are unitized (assembled state), and an encoder. The device EC is in a state where it can detect the rotation position information (position information) of the rotation axis SF (moving unit).

The connection unit 3 conducts, for example, the first terminal 7a connected to the processing board unit 5 and the second terminal 8a connected to the battery 6. Further, the connecting portion 3 conducts, for example, the first terminal 7b connected to the processing board portion 5 and the second terminal 8b connected to the battery 6. The connection unit 3 may electrically connect the first terminal 7 of the position detection module 1 and the second terminal 8 of the battery module 2 via an electronic component such as a switching element.

The connecting portion 3 includes, for example, a conductive member 56a and a conductive member 56b provided between the first holding portion 50 and the second holding portion 52. The conductive member 56a and the conductive member 56b are formed of a conductive material (eg, metal) used as a material for wiring or electrodes, such as aluminum and copper. The conductive member 56a and the conductive member 56b are columnar members such as through-hole taps (TH taps), and have screw holes into which fastening members 57 such as screws are screwed.

The first terminal 7a and the second terminal 8a are each connected to the conductive member 56a. The conductive member 56a conducts with the first terminal 7a and also with the second terminal 8a, thereby conducting the first terminal 7a and the second terminal 8a. For example, the conductive member 56a conducts with the first terminal 7a by contacting with the first terminal 7a, and conducts with the second terminal 8a by contacting with the second terminal 8a. For example, in the conductive member 56a, the end face on the −Z side comes into contact with the first terminal 7a, and the end face on the + Z side comes into contact with the second terminal 8a.

For example, the conductive member 56a is fixed (joined, held, supported) to the position detection module 1 (eg, the processing board portion 5) in a state where the end face on the −Z side is in contact with the first terminal 7a. The conductive member 56a is fixed to the processing substrate portion 5 by reflow using, for example, solder. For example, the conductive member 56a is integrated (unitized) with the processing substrate portion 5 so as not to be removed from the processing substrate portion 5. The conductive member 56a is fixed to the processing substrate portion 5 in the non-fixed state of the module, for example.

The conductive member 56a may be fixed (joined) to the processing substrate portion 5 by a method other than reflow, or may be fixed, for example, with a screw or the like. Further, the conductive member 56a does not have to be fixed to the processing board portion 5 in the non-fixed state of the module. For example, when the position detection module 1 and the battery module 2 are fixed to each other, the processing board portion It may be fixed to 5. Further, the conductive member 56a may be removable from the processing substrate portion 5.

Further, the conductive member 56a is fixed to the second terminal 8a by attaching (eg, tightening together) the fastening member 57 in a state where the end face on the + Z side is in contact with the second terminal 8a. For example, the fastening member 57 is a screw or the like, and by being screwed into a screw hole provided in the conductive member 56a, the second terminal 8a is sandwiched between the end face of the conductive member 56a and the second terminal 8a and the conductive member 56a. The member 56a is fastened together and fixed (joined). For example, in the non-fixed state of the module, the fastening member 57 is not attached to the conductive member 56a, and the conductive member 56a is not fixed to the second terminal 8a. The conductive member 56a is not electrically connected to the second terminal 8a, for example, in the non-fixed state of the module. The conductive member 56a is not conductive (insulated) with the second terminal 8a in the non-fixed state of the module, for example.

The conductive member 56a does not have to come into contact with one or both of the first terminal 7a and the second terminal 8a. For example, the conductive member 56a may be conductive with one or both of the first terminal 7a and the second terminal 8a via a conductive member such as a washer. Further, the conductive member 56a may be fixed to a portion different from the processing substrate portion 5 in the position detection module 1. For example, a through hole may be provided in the processing substrate portion 5, and the conductive member 56a may be fixed (supported or held) to the first holding portion 50 through the through hole. In this case, the first terminal 7a may come into contact with, for example, the side surface of the conductive member 56a and be electrically connected to the conductive member 56a.

Further, the first terminal 7b and the second terminal 8b are each connected to the conductive member 56b. The connection between the first terminal 7b and the conductive member 56b is the same as the connection between the first terminal 7a and the conductive member 56a. Further, the connection between the second terminal 8b and the conductive member 56b is the same as the connection between the second terminal 8a and the conductive member 56a.

The encoder device EC includes a plurality of fixing members 58 (three in this case) for fixing the position detection module 1 and the battery module 2. The fixing member 58 is, for example, a member that fixes the first holding portion 50 of the position detection module 1 and the second holding portion 52 of the battery module 2 so as not to move relative to each other. The fixing member 58 is, for example, a columnar member, the end portion on the −Z side thereof is fixed to the first holding portion 50, and the end portion on the + Z side thereof is fixed to the second holding portion 52. The fixing member 58 is not limited to a columnar shape, but may have a cylindrical shape (eg, a cylindrical shape) that surrounds the conductive member 56, the signal generating portion 16, and the like. For example, the fixing member 58 can form a space between the position detection module 1 and the battery module 2 in which the signal generation unit 16 and the connector 51 are arranged.

The fixing member 58 is fixed to the position detection module 1 and not to the battery module 2 in the non-fixed state of the module, for example. For example, the processing board portion 5 is provided with a through hole through which the fixing member 58 is passed, and the end portion of the fixing member 58 on the −Z side is fixed to the first holding portion 50 through the through hole of the processing substrate portion 5. .. The fixing member 58 may be fixed to the processing board portion 5. The battery module 2 is fixed to the position detection module 1 by being fixed to the fixing member 58, for example. For example, the second holding portion 52 has a through hole 52c into which the + Z side end of the fixing member 58 is inserted, and the fixing member 58 is inserted into the through hole 52c and fixed to the fixing member 58.

The fixing member 58 electrically connects the first terminal 7a and the second terminal 8a, and electrically connects the first terminal 7b and the second terminal 8b, so that the first terminal 7 and the second terminal are electrically connected. The position detection module 1 and the battery module 2 are fixed at positions where the 8 can be electrically connected. The position detection module 1 and the battery module 2 are positioned with each other by being fixed to each other by a fixing member 58 as an alignment member. For example, in a state where the fixing member 58 is inserted into the through hole 52c, the hole 52a in which the second terminal 8a is arranged and the conductive member 56a are positioned, and the hole 52b and the conductive member in which the second terminal 8b is arranged are positioned. 56b and 56b are positioned. The connecting portion 3 (conductive member 56) may also be used as an alignment member.

For example, when the fixing member 58 is inserted into the through hole 52c, at least a part of the conductive member 56a is arranged inside the hole 52a when viewed from the + Z side. Further, for example, when the fixing member 58 is inserted into the through hole 52c, at least a part of the conductive member 56b is arranged inside the hole 52b when viewed from the + Z side. In the state where the fixing member 58 is inserted into the through hole 52c, the conductive member 56a may be inserted into the hole 52a, or the conductive member 56b may be inserted into the hole 52b.

Next, an example of an attachment method (assembly method) of the encoder device EC will be described. FIG. 4 is a diagram showing a method of attaching the encoder device EC according to the present embodiment. First, as shown in FIG. 4A, the position detection module 1 is attached to the motor M. For example, the scale S and the rotation shaft SF are fixed, and the first holding portion 50 is fixed to a member on the stator side of the motor M (eg, the main body portion BD). The scale S is previously supported by the first holding portion 50 via, for example, a bearing 59. The disk 15 and the magnet 11 are pre-integrated with, for example, the scale S. The light emitting element 21 and the light receiving sensor 22 are attached in advance to, for example, the first holding portion 50.

Next, as shown in FIG. 4B, for example, the processing substrate portion 5 is attached to the first holding portion 50 using the fixing member 58 as a guide. The processing substrate portion 5 is positioned with the first holding portion 50 by, for example, the fixing member 58, and the signal generating portion 16 is positioned with the magnet 11, for example. The processing board portion 5 is integrated (unitized) with the first holding portion 50 in advance, and may be attached to the motor M together with the first holding portion 50, for example.

Next, as shown in FIG. 4C, the battery module 2 is attached to the position detection module 1. For example, by passing the fixing member 58 through the through hole 52c of the second holding portion 52, the position detection module 1 and the second holding portion 52 are positioned, and the second holding portion 52 is fixed to the position detection module 1. For example, by passing the fixing member 58 through the through hole 52c of the second holding portion 52, the second terminal 8a is positioned with the conductive member 56a, and the second terminal 8b is positioned with the conductive member 56b.

Then, by attaching (co-tightening) the fastening member 57 so as to sandwich the second terminal 8a between the fastening member 57 and the conductive member 56a, the second terminal 8a is electrically connected to the first terminal 7a via the conductive member 56a. Is connected. Further, by attaching (co-tightening) the fastening member 57 so as to sandwich the second terminal 8b between the fastening member 57 and the conductive member 56b, the second terminal 8b is electrically connected to the first terminal 7b via the conductive member 56b. Is connected.

Next, the circuit configuration of the encoder device EC according to the embodiment will be described. FIG. 5 is a diagram showing a circuit configuration of the power supply unit 10 and the multi-rotation information detection unit 1A according to the present embodiment. The power supply unit 10 includes a first signal generation unit 16a, a rectification stack 61, a second signal generation unit 16b, a rectification stack 62, and a battery 6. Further, the power supply unit 10 includes a regulator 63 as a switching unit 28 in FIG. 1.

The rectifier stack 61 is a rectifier that rectifies the current flowing from the first signal generation unit 16a. The first input terminal 61a of the rectifying stack 61 is connected to the terminal 43a of the first signal generation unit 16a. The second input terminal 61b of the rectifying stack 61 is connected to the terminal 43b of the first signal generation unit 16a. The ground terminal 61g of the rectifying stack 61 is connected to the ground wire GL to which the same potential as the signal ground SG is supplied. When the multi-rotation information detection unit 1A operates, the potential of the ground wire GL becomes the reference potential of the circuit 60. The output terminal 61c of the rectifying stack 61 is connected to the control terminal 63c of the regulator 63.

The rectifier stack 62 is a rectifier that rectifies the current flowing from the second signal generation unit 16b. The first input terminal 62a of the rectifying stack 62 is connected to the terminal 47a of the second signal generation unit 16b. The second input terminal 62b of the rectifying stack 62 is connected to the terminal 47b of the second signal generating unit 16b. The ground terminal 62g of the rectifying stack 62 is connected to the ground wire GL. The output terminal 62c of the rectifying stack 62 is connected to the control terminal 63c of the regulator 63.

The regulator 63 adjusts the power supplied from the battery 6 to the position detection module 1 according to the on state and the off state of the regulator. The regulator 63 includes a first switching element 64 provided in the power supply path between the battery 6 and the position detection module 1. The regulator 63 controls the operation of the first switching element 64 by using an electric signal (detection signal) generated by the signal generation unit 16 as a control signal (eg, enable signal).

The input terminal 63a of the regulator 63 is connected to the battery 6. The output terminal 63b of the regulator 63 is connected to the power supply line PL. The ground terminal 63g of the regulator 63 is connected to the ground wire GL. The control terminal 63c of the regulator 63 is an enable terminal, and the regulator 63 maintains the potential of the output terminal 63b at a predetermined voltage in a state where a voltage equal to or higher than the threshold value is applied to the control terminal 63c. The output voltage of the regulator 63 (the above-mentioned predetermined voltage) is, for example, 3V when the counting unit 67 is composed of CMOS or the like. The operating voltage of the storage unit 14 is set to, for example, the same voltage as a predetermined voltage. The predetermined voltage is a voltage required for power supply, and may be a constant voltage value or a voltage that changes stepwise.

The first switching element (first switch) 64 switches between continuity and interruption of the circuit 60 that supplies power to the position detection module 1. The circuit 60 constitutes, for example, a power supply path connecting the first electrode (positive electrode) and the second electrode (negative electrode) of the second power source (eg, battery 6), and includes a power supply line PL and a ground line GL. The ground wire GL is connected to, for example, the negative electrode of the battery 6, and its potential becomes the reference potential of the circuit 60. The first switching element 64 switches, for example, whether or not power is supplied from the battery 6 to the position detection module 1 via the circuit 60.

The regulator 63 uses an electric signal supplied from the signal generation unit 16 to the control terminal 63c as a control signal (enable signal), and is in a conduction state between the first terminal 64a and the second terminal 64b of the first switching element 64. Switch between (on state) and isolated state (off state). For example, the first switching element 64 includes a MOS, a TFT, and the like, the first terminal 64a and the second terminal 64b are a source electrode and a drain electrode, and the first control terminal 64c is a gate electrode.

The first control terminal 64c is charged by an electric signal (detection signal) generated by the signal generation unit 16. The first switching element 64 switches the circuit 60 to conduction according to the voltage of the first control terminal 64c. For example, the first switching element 64 interrupts the circuit 60 in a state where the potential of the first control terminal 64c is the reference potential of the circuit 60. Further, in the first switching element 64, when the voltage of the first control terminal 64c becomes equal to or higher than a predetermined value, the connection between the first terminal 64a and the second terminal 64b becomes a conductive state (on state). The circuit 60 is switched to conduction. When the space between the first terminal 64a and the second terminal 64b is turned on, power is supplied from the battery 6 to the circuit 60 via the power supply line PL and the ground line GL. The power supply unit 10 may include means for acquiring the on state and the off state of the regulator 63.

Further, the multi-rotation information detection unit 1A includes a first magnetic sensor 12a and a second magnetic sensor 12b. For example, the multi-rotation information detection unit 1A includes an analog comparator 65, an analog comparator 66, and a counting unit 67 as the processing unit 13 shown in FIG. The first magnetic sensor 12a and the second magnetic sensor 12b are sensors that detect the rotation axis SF, respectively. The first magnetic sensor 12a and the second magnetic sensor 12b detect the rotating shaft SF by detecting the magnetic field formed by the magnet 11 attached to the rotating shaft SF. The first magnetic sensor 12a and the second magnetic sensor 12b each detect the magnetic field formed by the magnet 11 by using the electric power supplied from the battery 6.

The power supply terminal 55p of the first magnetic sensor 12a is connected to the power supply line PL. The ground terminal 55g of the first magnetic sensor 12a is connected to the ground wire GL. The output terminal 55c of the first magnetic sensor 12a is connected to the input terminal 65a of the analog comparator 65. The output terminal 55c outputs, for example, a voltage corresponding to the difference between the potential of the second output terminal 48b shown in FIG. 2C and the reference potential.

The analog comparator 65 is a binarization unit that binarizes the voltage output from the first magnetic sensor 12a. The analog comparator 65 is, for example, a comparator, and compares the voltage output from the first magnetic sensor 12a with a predetermined voltage. The power supply terminal 65p of the analog comparator 65 is connected to the power supply line PL. The ground terminal 65g of the analog comparator 65 is connected to the ground wire GL. The output terminal 65b of the analog comparator 65 is connected to the first input terminal 67a of the counting unit 67. The analog comparator 65 outputs an H level signal from the output terminal when the output voltage of the first magnetic sensor 12a is equal to or higher than the threshold value, and outputs an L level signal from the output terminal when the output voltage is less than the threshold value.

The second magnetic sensor 12b and the analog comparator 66 have the same configuration as the first magnetic sensor 12a and the analog comparator 65. The power supply terminal 56p of the second magnetic sensor 12b is connected to the power supply line PL. The ground terminal 56g of the second magnetic sensor 12b is connected to the ground wire GL. The output terminal 56c of the second magnetic sensor 12b is connected to the input terminal 66a of the analog comparator 66. The power supply terminal 66p of the analog comparator 66 is connected to the power supply line PL. The ground terminal 66g of the analog comparator 66 is connected to the ground wire GL. The output terminal 66b of the analog comparator 66 is connected to the second input terminal 67b of the counting unit 67. The analog comparator 66 outputs an H level signal from the output terminal when the output voltage of the second magnetic sensor 12b is equal to or more than the threshold value, and outputs an L level signal from the output terminal 66b when the output voltage is less than the threshold value.

The counting unit 67 counts the multi-rotation information of the rotating shaft SF by using the electric power supplied from the battery 6. The counting unit 67 includes, for example, a CMOS logic circuit. The counting unit 67 operates using the electric power supplied via the power supply terminal 67p and the ground terminal 67g. The power supply terminal 67p of the counting unit 67 is connected to the power supply line PL. The ground terminal 67g of the counting unit 67 is connected to the ground wire GL. The counting unit 67 performs counting processing using the voltage supplied via the first input terminal 67a and the voltage supplied via the second input terminal 67b as control signals.

The storage unit 14 stores at least a part (eg, multi-rotation information) of the rotation position information detected by the processing unit 13 using the electric power supplied from the battery 6 (performs a writing operation). The storage unit 14 stores the result of counting by the counting unit 67 (multi-rotation information) as the rotation position information detected by the processing unit 13. The power supply terminal 14p of the storage unit 14 is connected to the power supply line PL. The ground terminal 14g of the storage unit 14 is connected to the ground wire GL. The storage unit 14 includes, for example, a non-volatile memory, and can hold information written while power is being supplied even in a state where power is not supplied.

In the present embodiment, a capacitor 69 is provided between the rectifying stack 61, the rectifying stack 62, and the regulator 63. First electrode 69a of the capacitor 69, the rectifier stack 61 is connected to a signal line connecting the control terminal 63 c of the rectifier stack 62 and the regulator 63. The second electrode 69b of the capacitor 69 is connected to the ground wire GL. The capacitor 69 is, for example, a smoothing capacitor, which reduces pulsation and reduces the load on the regulator. The constant of the capacitor 69 is such that the power supply from the battery 6 to the processing unit 13 and the storage unit 14 is maintained during the period from the detection of the rotation position information by the processing unit 13 to the writing of the rotation position information to the storage unit 14. Is set to.

Next, regarding the operation of the power supply unit 10 and the multi-rotation information detection unit 1A, the operation of the multi-rotation information detection unit 1A when the rotation axis SF rotates counterclockwise (forward rotation) will be typically described. FIG. 6 is a timing chart showing the operation of the multi-rotation information detection unit 1A when the rotation axis SF rotates counterclockwise (forward rotation).

In the "magnetic field" of FIG. 6, the solid line indicates the magnetic field at the position of the first signal generation unit 16a, and the broken line indicates the magnetic field at the position of the second signal generation unit 16b. The "first signal generation unit" and the "second signal generation unit" indicate the output of the first signal generation unit 16a and the output of the second signal generation unit 16b, respectively, and output the current flowing in one direction. The output of the current flowing in the opposite direction was set to negative (-). The "enable signal" indicates the potential applied to the control terminal 63a of the regulator 63 by the electric signal generated by the signal generation unit 16, the high level is represented by "H", and the low level is represented by "L". “Regulator” indicates the output of the regulator 63, where the high level is represented by “H” and the low level is represented by “L”.

In the "first magnetic sensor" and "second magnetic sensor" of FIG. 6, the outputs of the first magnetic sensor 12a and the second magnetic sensor 12b are shown by solid lines, respectively. In the "first magnetic sensor" and "second magnetic sensor", the dotted line is the output when the sensor is constantly driven. The "first analog comparator" and the "second analog comparator" indicate the outputs from the analog comparator 65 and the analog comparator 66, respectively.

The first signal generation unit 16a outputs a current pulse (negative of the “first signal generation unit”) flowing in the opposite direction at the angle position 135 °. Further, the first signal generation unit 16a outputs a current pulse (positive of the “first signal generation unit”) flowing in the forward direction at the angle position 315 °. The second signal generation unit 16b outputs a current pulse (positive of the “second signal generation unit”) flowing in the forward direction at an angle position of 45 °. Further, the second signal generation unit 16b outputs a current pulse (negative of the “second signal generation unit”) flowing in the opposite direction at the angle position of 225 °. Therefore, the enable signal switches to a high level at each of the angle position 45 °, the angle position 135 °, the angle position 225 °, and the angle position 315 °. Further, the regulator 63 has a predetermined voltage on the power supply line PL at each of the angle position 45 °, the angle position 135 °, the angle position 225 °, and the angle position 315 °, corresponding to the state in which the enable signal is maintained at a high level. To supply.

In the present embodiment, the output of the first magnetic sensor 12a and the output of the second magnetic sensor 12b have a phase difference of 90 °, and the processing unit 13 detects the rotation position information by using this phase difference. To do. The output of the first magnetic sensor 12a has a positive sine wave shape in the range from the angle position 0 ° to the angle position 180 °. In this angular range, the regulator 63 outputs power at an angular position of 45 ° and an angular position of 135 °. The first magnetic sensor 12a and the analog comparator 65 are driven by the electric power supplied at the angle position 45 ° and the angle position 135 °, respectively. The signal output from the analog comparator 65 (hereinafter referred to as A-phase signal) is maintained at the L level in a state where power is not supplied, and becomes the H level at each of the angle position 45 ° and the angle position 135 °. ..

Further, the output of the second magnetic sensor 12b has a positive sine wave shape in the range from the angle position 270 ° (−90 °) to the angle position 90 °. In this angular range, the regulator 63 outputs power at an angular position of 315 ° (−45 °) and an angular position of 45 °. The second magnetic sensor 12b and the analog comparator 66 are driven by the electric power supplied at the angle position 315 ° and the angle position 45 °, respectively. The signal output from the analog comparator 66 (hereinafter referred to as B-phase signal) is maintained at the L level in a state where power is not supplied, and becomes the H level at each of the angle position 315 ° and the angle position 45 °. ..

Here, when the A-phase signal supplied to the counting unit 67 is the H level (H) and the B-phase signal supplied to the counting unit 67 is the L level, a set of these signal levels is set (H, L). ). In FIG. 6, the signal level set is (L, H) at the angle position 315 °, the signal level set is (H, H) at the angle position 45 °, and the signal level set is (H, H) at the angle position 135 °. , L).

The counting unit 67 stores the set of signal levels in the storage unit 14 when one or both of the A-phase signal and the B-phase signal detected by the magnetic sensor 12 are at the H level. When one or both of the A-phase signal and the B-phase signal detected next are at the H level, the counting unit 67 reads the previous level set from the storage unit 14, and reads the previous level set and the current level set. The rotation direction is determined by comparing with the set.

For example, when the previous signal level set is (H, H) and the current signal level is (H, L), the angle position is 45 ° in the previous detection, and the angle is in the current detection. Since the position is 135 °, it can be seen that it is counterclockwise (forward rotation). When the current level set is (H, L) and the previous level set is (H, H), the counting unit 67 sends an up signal indicating that the counter is up to the storage unit 14. Supply. When the storage unit 14 detects the up signal from the counting unit 67, the storage unit 14 updates the stored multi-rotation information to a value incremented by 1. The multi-rotation information detection unit 1A according to the present embodiment can detect multi-rotation information while determining the rotation direction of the rotation axis SF.

In the encoder device EC according to the present embodiment, power is supplied from the battery 6 to the multi-rotation information detection unit 1A within a short time after the electric signal is generated in the signal generation unit 16, and the multi-rotation information detection unit 1A Dynamic drive (intermittent drive). After the detection and writing of the multi-rotation information is completed, the power supply to the multi-rotation information detection unit 1A is cut off, but the count value is stored because it is stored in the storage unit 14. Such a sequence is repeated every time a predetermined position on the magnet 11 passes near the signal generation unit 16 even when the power supply from the outside is cut off.

The multi-rotation information stored in the storage unit 14 is read out by the motor control unit MC or the like the next time the motor M is started, and is used for calculating the initial position of the rotation axis SF. In such an encoder device EC, the battery 6 supplies at least a part of the electric power consumed by the position detection module 1 (eg, the multi-rotation information detection unit 1A) according to the electric signal generated by the signal generation unit 16. Therefore, the battery 6 can have a long life. Maintenance (eg, replacement) of the battery 6 can be eliminated or the frequency of maintenance can be reduced. For example, if the life of the battery 6 is longer than the life of other parts of the encoder device EC, it is possible to eliminate the need to replace the battery 6.

Further, for example, when the encoder device EC is attached to the motor M, the position detection module 1 and the battery module 2 are electrically connected, so that the battery 6 is consumed before the encoder device EC is attached to the motor M. Is suppressed. For example, when a detection signal is generated in the signal generation unit 16 before the encoder device EC is attached to the motor M (for example, while the encoder device EC is being conveyed), the position detection module 1 and the battery module 2 are electrically connected. Since it is not connected to the battery 6, power is not supplied from the battery 6 and the battery 6 is suppressed from being consumed. As described above, since the encoder device EC in the present embodiment is composed of a unit in which the position detection module 1 and the battery module 2 are separated from each other independently as module parts, the position is detected only when the position detection module 1 and the battery module 2 are attached to the motor M. The module 1 and the battery module 2 are configured to be electrically connected.

Further, when a magnetically sensitive wire such as a Wiegand wire is used, a pulse current output can be obtained from the signal generation unit 16 even if the magnet 11 rotates at an extremely low speed. Therefore, for example, in a state where power is not supplied to the motor M, the output of the signal generating unit 16 can be used as an electric signal even when the rotation of the rotating shaft SF (magnet 11) is extremely low.

The multi-rotation information detection unit 1A is a magnetic detection unit in the above embodiment, but may be an optical detection unit (eg, reflected light or transmitted light). In this case, a part of the multi-rotation information detection unit 1A may be shared with the angle detection unit 1B. Further, the power supply unit 10 may use the power of the detection signal generated by the signal generation unit 16 as the power source. For example, the power supply unit 10 may adjust the voltage of the detection signal to a predetermined voltage by a regulator or the like, and supply the power of the detection signal to the position detection module 1. Further, in the above-described embodiment, the signal generation unit 16 generates a detection signal when the magnet 11 has a predetermined positional relationship. The encoder device EC (multi-rotation information detection unit 1A) may include a signal generation unit 16 as a sensor for detecting the position information of the rotation axis SF (magnet 11).

[Second Embodiment]
The second embodiment will be described. In the present embodiment, the same components as those in the above-described embodiment are designated by the same reference numerals, and the description thereof will be omitted or simplified. FIG. 7 is a diagram showing a position detection module, a battery module, and a connection portion according to the present embodiment. In this embodiment, the connection portion 3 includes a connector 71. The connector 71 connects the first terminal 7a of the position detection module 1 and the second terminal 8a of the battery module 2, and also connects the first terminal 7b and the second terminal 8b.

The connector 71 includes, for example, a locking member 72a, a locking member 72b, a connector terminal 73a, a connector terminal 73b, a wiring 74a, and a wiring 74b. The first terminal 7a and the first terminal 7b are provided on the locking member 72b. The connector terminal 73a and the connector terminal 73b are provided on the locking member 72a. The wiring 74a and the wiring 74b are, for example, power cables. One end of the wiring 74a is electrically connected to the connector terminal 73a, and the other end is electrically connected to the second terminal 8a. One end of the wiring 74b is electrically connected to the connector terminal 73b, and the other end is electrically connected to the second terminal 8b.

The locking member 72a and the locking member 72b engage with each other when the encoder device EC is attached to the motor M. With the locking member 72a and the locking member 72b engaged, the first terminal 7a contacts and conducts with the connector terminal 73a, and conducts with the second terminal 8a via the connector terminal 73a and the wiring 74a. Further, in a state where the locking member 72a and the locking member 72b are engaged, the first terminal 7b contacts the connector terminal 73b and conducts, and conducts with the second terminal 8b via the connector terminal 73b and the wiring 74b. To do.

In the present embodiment, the second holding portion 52 (see FIG. 7B) comes into contact with the position detection module 1 (eg, the + Z side surface 5b of the processing board portion 5) and is fixed to the position detection module 1. .. For example, the second holding unit 52 has a recess on the side in contact with the position detection module 1, and in a state of being in contact with the position detection module 1, the signal generation unit 16 and the locking member 72a are housed in the recess. For example, the second holding unit 52 is fixed to the position detection module 1 so as to cover the signal generating unit 16 and the locking member 72a.

Next, an example of an attachment method (assembly method) of the encoder device EC according to the present embodiment will be described. First, the position detection module 1 is attached to the motor M of FIG. For example, the scale S and the rotation shaft SF are fixed, and the first holding portion 50 is fixed to a member on the stator side of the motor M (for example, the main body portion BD, the housing, and the case in FIG. 1). The processing board portion 5 is integrated (unitized) with the first holding portion 50 in advance, and is attached to the motor M together with the first holding portion 50, for example. The processing board portion 5 may be separated from the first holding portion 50, for example, and is fixed to the motor M by being attached to the first holding portion 50 after the first holding portion 50 is attached to the motor M. You may.

Next, the first terminal 7a is electrically connected to the second terminal 8a by the connector 71, and the first terminal 7b is electrically connected to the second terminal 8b. For example, by locking the locking member 72a and the locking member 72b, the first terminal 7a is electrically connected to the second terminal 8a via the connector terminal 73a and the wiring 74a. Further, by locking the locking member 72a and the locking member 72b, the first terminal 7b is electrically connected to the second terminal 8b via the connector terminal 73b and the wiring 74b. In such a case, for example, when the locking member 72a and the locking member 72b are fitted to each other, the first terminal 7a and the connector terminal 73a are physically in contact with each other, and the first terminal 7b and the connector terminal 73b are physically contacted. Contact. Then, the second holding portion 52 is brought into contact with the position detection module 1 (eg, the processing board portion 5), and the second holding portion 52 and the position detection module 1 are fixed. The connector 71 in the present embodiment may be, for example, a flexible wiring board provided with the above wiring 74a on a film base material.

[Drive]
Next, the drive device according to the embodiment will be described. FIG. 8 is a diagram showing an example of the drive device MTR. In the following description, the same or equivalent components as those in the above-described embodiment are designated by the same reference numerals, and the description will be omitted or simplified. This drive device MTR is a motor device including an electric motor. The drive device MTR has a rotation axis SF, a main body (drive unit) BD that rotationally drives the rotation axis SF, and an encoder device EC that detects rotation position information of the rotation axis SF.

In FIG. 8, the magnet 11 is provided on the same rotating member (scale S) as the incremental pattern INC and the absolute pattern ABS. The magnet 11 is arranged on the same side of the scale S as the incremental pattern INC and the absolute pattern ABS. The signal generation unit 16 is arranged on the same side as the light emitting element 21 and the light receiving sensor 22 with respect to the scale S. The arrangement of the magnet 11, the signal generation unit 16, the scale S, the light emitting element 21, and the light receiving sensor 22 is not limited to the arrangement shown in FIG. 8, and may be, for example, the arrangement shown in FIG. 1 or any other arrangement. Good.

The rotation shaft SF has a load side end portion SFa and a non-load side end portion SFb. The load side end SFa is connected to another power transmission mechanism such as a speed reducer. The scale S is fixed to the counterload side end SFb via the fixing portion. Along with fixing the scale S, an encoder device EC is attached. The encoder device EC is an encoder device according to the above-described embodiment, modification, or combination thereof.

In this drive device MTR, the motor control unit MC shown in FIG. 1 or the like controls the main body unit BD using the detection result of the encoder device EC. Since the drive device MTR has no or low need for battery replacement of the encoder device EC, the maintenance cost can be reduced. The drive device MTR is not limited to the motor device, and may be another drive device having a shaft portion that rotates using hydraulic pressure or pneumatic pressure.

[Stage device]
Next, the stage device will be described. FIG. 9 is a diagram showing a stage device STG. This stage device STG has a configuration in which a stage (rotary table TB, moving object) is attached to a load-side end SFa of the rotation axis SF of the drive device MTR shown in FIG. The stage device STG may be configured to linearly move the stage in one direction by, for example, a one-dimensional linear motor. Further, the stage device STG may be configured to move the stage in two directions by a plurality of one-dimensional linear motors or two-dimensional linear motors (eg, a flat motor). In the following description, the same or equivalent components as those in the above-described embodiment are designated by the same reference numerals, and the description will be omitted or simplified.

The stage device STG drives the drive device MTR to rotate the rotation axis SF. This rotation is transmitted to the rotary table TB, and at that time, the encoder device EC detects the angular position of the rotary axis SF and the like. By using the output from the encoder device EC, the angular position of the rotary table TB can be detected. A speed reducer or the like may be arranged between the load side end SFa of the drive device MTR and the rotary table TB.

Since the stage device STG requires less or no battery replacement for the encoder device EC, maintenance costs can be reduced. The stage device STG can be applied to, for example, a rotary table provided in a machine tool such as a lathe.

[Robot device]
Next, the robot device will be described. FIG. 10 is a perspective view showing the robot device RBT. Note that FIG. 10 schematically shows a part (joint portion) of the robot device RBT. In the following description, the same or equivalent components as those in the above-described embodiment are designated by the same reference numerals, and the description will be omitted or simplified. This robot device RBT has a first arm AR1, a second arm AR2, and a joint portion JT. The first arm AR1 is connected to the second arm AR2 via the joint JT.

The first arm AR1 includes an arm portion 101, a bearing 101a, and a bearing 101b. The second arm AR2 has an arm portion 102 and a connecting portion 102a. The connecting portion 102a is arranged between the bearing 101a and the bearing 101b in the joint portion JT. The connecting portion 102a is provided integrally with the rotating shaft SF2. The rotary shaft SF2 is inserted into both the bearing 101a and the bearing 101b at the joint portion JT. The end of the rotating shaft SF2 on the side inserted into the bearing 101b penetrates the bearing 101b and is connected to the speed reducer RG.

The speed reducer RG is connected to the drive device MTR, and reduces the rotation of the drive device MTR to, for example, 1/100 or the like and transmits it to the rotation shaft SF2. Although not shown in FIG. 11, the load side end SFa of the rotation shaft SF of the drive device MTR is connected to the speed reducer RG. Further, a scale S of the encoder device EC is attached to the counterload side end SFb of the rotation axis SF of the drive device MTR.

When the robot device RBT drives the drive device MTR to rotate the rotation shaft SF, this rotation is transmitted to the rotation shaft SF2 via the speed reducer RG. The rotation of the rotation shaft SF2 causes the connection portion 102a to rotate integrally, whereby the second arm AR2 rotates with respect to the first arm AR1. At that time, the encoder device EC detects the angular position of the rotation axis SF and the like. Therefore, the angular position of the second arm AR2 can be detected by using the output from the encoder device EC. Since the robot device RBT does not require or reduces the need for battery replacement of the encoder device EC, the maintenance cost can be reduced. The robot device RBT is not limited to the above configuration, and the drive device MTR can be applied to various robot devices having joints.

The technical scope of the present invention is not limited to the embodiments described in the above-described embodiments. One or more of the requirements described in the above embodiments and the like may be omitted. In addition, the requirements described in the above-described embodiments can be combined as appropriate. In addition, to the extent permitted by law, the disclosure of all documents cited in the above-mentioned embodiments and the like shall be incorporated as part of the description in the main text.

1 ... position detection module, 2 ... battery module, 3 ... connection part, 4 ... detection part, 5 ... processing board part, 6 ... battery, 7 ... 1st terminal , 8 ... 2nd terminal, 11 ... magnet, 12 ... magnetic sensor, 13 ... processing unit 14 ... storage unit, 15 ... disk, 16 ... signal generator, 56a, 56b ... Conductive member, 58 ... Fixing member, 71 ... Connector, EC ... Encoder device, MTR ... Drive device, RBT ... Robot device

Claims (13)

A position detection module including a detection unit that detects the position information of the moving unit and a processing board unit that processes the detection result of the detection unit.
A battery module including a battery that supplies electric power to the processing board portion, and
A connection portion that electrically connects the first terminal of the position detection module and the second terminal of the battery module by fixing the position detection module and the battery module to each other.
An encoder device including a switching unit for switching whether or not power is supplied from the battery to the processing board unit in response to a detection signal generated by a change in a magnetic field accompanying the movement of the moving unit. The connection portion electrically connects the first terminal and the second terminal in a fixed state in which the position detection module and the battery module are fixed to each other, and the position detection module and the battery module are connected to each other. The encoder device according to claim 1, wherein the first terminal and the second terminal are not electrically connected in a non-fixed state. The encoder device according to claim 1 or 2, wherein the connection portion conducts the first terminal connected to the processing board portion and the second terminal connected to the battery. The encoder device according to any one of claims 1 to 3 , wherein the position detection module and the battery module are stacked and arranged in a direction intersecting the moving direction of the moving portion. The invention according to any one of claims 1 to 4 , further comprising a fixing member for fixing the position detection module and the battery module so as to electrically connect the first terminal and the second terminal. Encoder device. The position detection module includes a first holding unit that holds the detection unit and the processing substrate unit.
The encoder device according to any one of claims 1 to 5 , wherein the battery module includes a second holding portion for holding the battery. The connecting portion includes a conductive member provided between the first holding portion and the second holding portion.
The encoder device according to claim 6 , wherein the first terminal and the second terminal are connected to the conductive member. The encoder device according to any one of claims 1 to 6 , wherein the connecting portion includes a connector that can be connected to the first terminal and the second terminal. The position detection module detects angular position information and multi-rotation information as the position information by the electric power supplied from the first power supply, and the multi-rotation information in a state where the supply of electric power from the first power supply is cut off. The encoder device according to any one of claims 1 to 8 , which detects the above. The position detection module includes a signal generation unit in which a detection signal is generated by a change in a magnetic field accompanying the movement of the moving unit.
The signal generator
A magnet that moves in conjunction with the moving part,
The encoder device according to any one of claims 1 to 9 , further comprising a magnetically sensitive portion that causes a large Barkhausen jump due to a change in a magnetic field accompanying the movement of the magnet. An encoder apparatus as claimed in any one of claims 1 0,
A drive device including a drive unit that supplies a driving force to the moving unit. A driving device according to claim 1 1,
A stage device including a stage that is moved by the drive device. A driving device according to claim 1 1,
A robot device including an arm that is moved by the drive device.

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