JP7243712B2 - Encoder device, drive device, stage device, and robot device - Google Patents

Description

The present invention relates to encoder devices, drive devices, stage devices, and robot devices.

Encoder devices are installed in various devices such as robot devices (see, for example, Patent Document 1 below). When the robot device completes the predetermined processing, its main power supply is turned off, and the power supply from the main power supply to the encoder device is stopped. The encoder device performs detection with power supplied from a power supply (eg, battery) different from the mains supply, for example when the mains supply is turned off. In such a case, it is desired that the encoder device can detect the state of the power supply unit while reducing power consumption, for example.

JP-A-8-50034

In a first aspect of the invention , an encoder device is provided. The encoder device includes a position detection section that detects position information of the moving section. An encoder device and a signal generator that generates a detection signal based on the movement of the moving part are provided. The encoder device includes a state detection section that detects the state of the power supply section based on the power supplied from the power supply section based on the detection signal. The encoder device includes a first switching unit that switches whether power is supplied from the power supply unit to the state detection unit based on the detection signal . The encoder device includes a timing adjustment section that relatively adjusts the timing at which the position detection section detects the position information and the timing at which the state detection section detects the state of the power supply section.

In a second aspect of the invention , a driving device is provided. The driving device comprises the encoder device of the first aspect . The driving device includes a driving section that drives the moving section .

A third aspect of the present invention provides a stage apparatus. The stage device includes the drive device of the second aspect. The stage device has a stage that is moved by a drive device .

In a fourth aspect of the invention , a robotic device is provided. The robot device comprises the drive device of the second aspect. The robotic device comprises an arm that is moved by a drive .

It is a figure which shows the encoder apparatus which concerns on 1st Embodiment. It is a figure which shows the magnetic sensor and signal generation part which concern on 1st Embodiment. It is a figure which shows the circuit structure of the encoder apparatus which concerns on 1st Embodiment. 4 is a timing chart showing the operation of the encoder device according to the first embodiment; It is a figure which shows the encoder apparatus which concerns on 2nd Embodiment. It is a figure which shows the circuit structure of the encoder apparatus which concerns on 2nd Embodiment. 9 is a timing chart showing the operation in the normal state of the encoder device according to the second embodiment; 9 is a timing chart showing the operation in the backup state of the encoder device according to the second embodiment; It is a figure which shows the encoder apparatus which concerns on 3rd Embodiment. It is a timing chart showing the operation of the encoder device according to the third embodiment. It is a figure which shows the encoder apparatus which concerns on 4th Embodiment. It is a figure which shows the circuit structure of the encoder apparatus which concerns on 4th Embodiment. It is a figure which shows the circuit structure of the encoder apparatus which concerns on 5th Embodiment. It is a figure which shows the drive device which concerns on embodiment. It is a figure which shows the stage apparatus which concerns on embodiment. It is a figure which shows the robot apparatus which concerns on embodiment.

[First embodiment]
A first embodiment will be described. FIG. 1 is a diagram showing an encoder device according to the first embodiment. The encoder device EC detects position information (movement information, rotational position information) of a moving part (for example, rotating body SF). The encoder device EC in this embodiment is a rotary encoder. The moving part is, for example, a rotating body SF of a rotary motor (power supply part), and the movement of the moving part is rotation around a predetermined axis. Further, the positional information of the moving part is rotational positional information of the body of rotation SF.

The rotating body SF includes an output shaft (eg, an object, a shaft, a rotor that works with an armature) in a driving device MTR such as an electric motor. Note that the rotating body SF may be a working shaft connected to the output shaft of the driving device MTR. The working shaft includes, for example, a shaft connected to the output shaft of the drive device MTR via a transmission.

The driving device MTR has a main body MB and a control part MC. A main body MB (motor main body) includes, for example, a rotor, a stator, and a body. The rotor contains the armature of the electric motor. The stator contains the magnets (eg, permanent magnets) of the electric motor. A body houses a rotor and a stator. The stator is fixed to the body, and the rotor is rotatably supported with respect to the body.

The rotor rotates with respect to the stator by power supplied from the power supply section PW. The power supply unit PW (first power supply unit) is, for example, the main power supply of a device (eg, drive device, stage device, robot device) on which the encoder device EC is mounted. The rotating body SF is fixed to the rotor and rotates with the rotor relative to the stator.

A control unit MC (motor control unit) controls driving of the rotating body SF based on the rotational position information detected by the encoder device EC. For example, based on the rotational position information, the control unit MC controls the power supplied from the power supply unit PW as the power consumed for rotating the rotor. The control unit MC controls the electric power supplied to the main unit MB, for example, so that at least one of the angular position, angular velocity, and angular acceleration of the rotor approaches a target value.

The rotational position information includes one or both of multi-rotation information and angular position information. The multiple rotation information includes information indicating the number of rotations (eg, one rotation, two rotations, multiple rotations). The angular position information includes information indicating an angular position (rotation angle) of less than one rotation. The encoder device EC in this embodiment is a multi-rotation absolute encoder. In this case, the rotational position information includes multi-rotation information and angular position information.

Each part of the encoder device EC will be described below. First, a configuration for detecting rotational position information will be described. The encoder device EC includes a position detection section 1 , a synthesis section 2 and a communication section 3 . The position detection unit 1 detects rotational position information of the body of rotation SF. The position detection section 1 includes an angle detection section 1A and a multi-rotation detection section 1B. The angle detector 1A detects the angular position of the rotating body SF. The multi-rotation detector 1B detects multi-rotation information of the body of rotation SF.

The angle detection unit 1A detects positional information (angular positional information, absolute or relative positional information) within one rotation of the scale S. FIG. The angle detection unit 1A includes one or both of an optical encoder and a magnetic encoder. The angle detector 1A of this embodiment includes an optical encoder. The angle detector 1A may include a magnetic encoder.

The angle detection unit 1A includes a scale S, an irradiation unit 11, a detection unit 12, and a processing unit 13. The scale S moves relative to the detector 12 based on the movement (eg, rotation) of the rotating body SF, and the relative position of the scale S is detected by the detector 12 . The scale S in this embodiment is fixed to the rotating body SF. The scale S is, for example, a disk-shaped member. In this case, the rotating direction (moving direction) of the rotating body SF (moving body) is the circumferential direction of the disk-shaped scale S. As shown in FIG. The scale S is, for example, a member made of glass, metal, or resin. The scale S includes an incremental pattern INC and an absolute pattern ABS. The incremental pattern INC and absolute pattern ABS each include an optical pattern (optical scale).

The irradiation unit 11 (light-emitting unit) irradiates the incremental pattern INC and the absolute pattern ABS of the scale S with light. The irradiation unit 11 includes, for example, a light-emitting element (eg, solid-state light source) such as a light-emitting diode (LED). The detection unit 12 (sensor unit, light receiving unit) detects light emitted from the irradiation unit 11 and passing through the incremental pattern INC and light emitted from the irradiation unit 11 and passing through the absolute pattern ABS. The irradiation unit 11 includes, for example, a light receiving element (eg, photoelectric conversion element) such as a photodiode.

The angle detection unit 1A detects the angular position information within one rotation of the rotating body SF by reading the patterning information of the scale S with the detection unit 12 . The patterning information of the scale S detected by the angle detection unit 1A is, for example, a pattern of light and dark due to a transmissive pattern (eg, slit) or a reflective pattern (eg, reflective film) on the scale S. In FIG. 1, the angle detector 1A is of a reflective type. In this case, the detector 12 detects the light reflected by the scale S. FIG. Note that the angle detection unit 1A may be of a transmissive type. In this case, the detector 12 detects the light transmitted through the scale S.

The detection unit 12 supplies a signal indicating the detection result (light reception result) to the processing unit 13 . The processing unit 13 uses the detection result of the detection unit 12 to detect the angular position of the rotating body SF. The processing unit 13 is, for example, an angle processing unit that processes the accuracy position information. For example, the processing unit 13 detects angular position information of the first resolution using the result of detecting light from the absolute pattern ABS. Also, the processing unit 13 uses the result of detecting the light from the incremental pattern INC to perform an interpolation operation on the angular position information of the first resolution. The processing unit 13 detects angular position information with a second resolution higher than the first resolution by the above interpolation calculation.

The multi-rotation detection unit 1B detects multi-rotation information of the rotating body SF that is the same as the detection target of the angle detection unit 1A. The multi-rotation detector 1B includes one or both of a magnetic encoder and an optical encoder. The multi-rotation detector 1B of this embodiment includes a magnetic encoder. The multi-rotation detector 1B may include an optical encoder. The multi-rotation detection unit 1B includes a magnet 21, a magnetic detection unit 22, a processing unit 23, and a storage unit 24.

The magnet 21 (magnetic scale) rotates relative to the magnetic detector 22 as the rotating body SF rotates. The magnet 21 is provided on a scale S (first rotating body) fixed to the rotating body SF. For example, the scale S rotates together with the rotating body SF, and the magnet 21 rotates together with the rotating body SF. The magnet 21 is arranged in a direction intersecting with the rotation axis direction of the rotation axis AX of the rotating body SF. In this embodiment, the magnets 21 are arranged along the rotation direction of the rotating body SF. The magnet 21 is, for example, a ring-shaped member.

The magnetic detector 22 is fixed (supported) to a member outside the rotating body SF. The relative positions (relative angular positions) of the magnet 21 and the magnetic detection unit 22 change with the rotation of the rotating body SF. The strength and direction of the magnetic field formed by the magnet 21 on the magnetic detection section 22 change with the rotation of the rotating body SF. The magnetic detector 22 detects the magnetic field formed by the magnet 21 . For example, the magnetic detector 22 includes magnetic sensors 25 and 26 .

The processing unit 23 detects (calculates) the multi-rotation information of the rotating body SF based on the result of the detection of the magnetic field formed by the magnet 21 by the magnetic detection unit 22 . For example, the processing unit 23 uses the detection result of the magnetic detection unit 22 for the A-phase signal and the detection result of the magnetic sensor 26 for the B-phase signal to detect the multi-rotation information. The processing unit 23 is, for example, a multi-rotation processing unit that processes multi-rotation information. The storage unit 24 stores position information (eg, multi-rotation information) output from the processing unit 23 . For example, the storage unit 24 stores position information (multi-rotation information) detected by the processing unit 23 based on a storage command (data write command) from the processing unit 23 .

Note that when the magnetic detection unit 22 is provided on the scale S, the magnet 21 may be provided outside the scale S at a position different from that of the magnetic detection unit 22 . For example, the magnet 21 may be provided at a position where it rotates relative to the magnetic detector 22 provided on the scale S as the scale S rotates.

The synthesizing unit 2 acquires the angular position information of the second resolution detected by the processing unit 13 . The synthesizing unit 2 also acquires the multi-rotation information of the body of rotation SF from the storage unit 24 of the multi-rotation detecting unit 1B. The synthesizing unit 2 synthesizes the angular position information from the processing unit 13 and the multi-rotation information from the multi-rotation detecting unit 1B, and calculates the rotational position information of the rotating body SF. For example, when the detection result of the processing unit 13 is θ [rad] and the detection result of the multi-rotation detection unit 1B is n rotations, the synthesizing unit 2 calculates (2π×n+θ) [rad] as the rotation position information. calculate. The rotational position information may be a set of multiple rotation information and angular position information.

The encoder device EC includes a communication unit 3 (eg, an external communication unit, an external connection interface), and the communication unit 3 is communicably connected to the control unit MC by wire or wirelessly. The communication unit 3 supplies (transmits) digital format rotational position information to the control unit MC, for example. The controller MC appropriately decodes the rotational position information supplied from the encoder device EC. The controller MC controls the rotation of the rotating body SF by controlling the power (driving power) supplied to the main body MB using the rotational position information.

Note that the encoder device EC may detect the multi-rotation information based on the angular position information detected by the angle detection section 1A. For example, when the angular position detected by the angle detection unit 1A is 359° and the next angular position detected by the angle detection unit 1A is 1°, the encoder device EC adds 1 to the multi-rotation information. good. The encoder device EC need not include the multi-rotation detector 1B when detecting multi-rotation information based on the angular position information. Further, the encoder device EC may detect multi-rotation information and not detect angular position information. In this case, the driving device MTR may include an encoder device for detecting angular position information separately from the encoder device EC.

Next, a configuration for supplying power consumed by the encoder device EC will be described. The encoder device EC includes a power supply section 31 . The position detection unit 1 can receive power supply from each of the power supply unit PW and the power supply unit 31 . For example, the position detection unit 1 receives power supply from the power supply unit PW in a state where the power supply unit PW supplies power to the main body MB of the drive device MTR. Further, the position detection unit 1 receives power supply from the power supply unit 31 in a state where the power supply unit PW stops supplying power to the main body MB of the drive device MTR. In the following description, a state in which power is supplied from the power supply unit PW to the position detection unit 1 will be referred to as a normal state, and a state in which power is supplied to the position detection unit 1 from the power supply unit 31 will be referred to as a backup state. For example, the normal state and the backup state are switched (alternatively switched) so as not to overlap.

First, the above normal state will be described. In a normal state, drive device MTR drives rotating body SF using power supplied from power supply unit PW. In the normal state, the multi-rotation detection section 1B detects multi-rotation information using power supplied from the power supply section PW. Further, in a normal state, the angle detection section 1A detects angular position information using power supplied from the power supply section PW. In the normal state, the synthesizing section 2 generates rotational position information based on the multi-rotation information detected by the multi-rotation detecting section 1B and the angular position information detected by the angle detecting section 1A. Then, in a normal state, the synthesizing unit 2 generates rotational position information using power supplied from the power supply unit PW. In a normal state, the communication unit 3 uses power supplied from the power supply unit PW to output (eg, transmit) the rotational position information generated by the synthesizing unit 2 to the outside (eg, the control unit MC).

Further, in a state where the power supply from the power supply unit PW is stopped, the position detection unit 1 uses power supplied from a power supply unit 31 (eg, a battery) different from the power supply unit PW to rotate the rotating body SF. Detects rotational position information. In the following description, a state in which power is supplied from the power supply unit 31 to the encoder device EC is referred to as a backup state as appropriate. The backup state is, for example, a state in which power supply from the power supply unit PW to the main unit MB of the drive device MTR is stopped.

Next, the above backup state will be explained. In the backup state, the position detection section 1 detects one or both of the multi-rotation information and the angular position information. For example, the position detection unit 1 detects at least multi-rotation information among the rotation position information in the backup state. In the backup state, the multi-rotation detection section 1B uses the power supplied from the power supply section 31 to detect multi-rotation information.

For example, the magnetism detection section 22 detects magnetism using power supplied from the power supply section 31 in the backup state. Also, in the backup state, the processing unit 23 detects (derives) the multi-rotation information by processing the detection result of the magnetic detection unit 22 using the power supplied from the power supply unit 31 . The storage unit 24 stores the multi-rotation information detected by the processing unit 23 using the power supplied from the power supply unit 31 in the backup state.

The angle detector 1A does not detect angular position information in the backup state. Therefore, the power supply section 31 does not supply power to the angle detection section 1A in the backup state. Since the power supply unit 31 does not supply power, the angle detection unit 1A does not detect the angular position information. The angle detection unit 1A detects the angular position information within a short period of time when the backup state is switched to the normal state. When the backup state is switched to the normal state, the synthesizing unit 2 generates rotational position information based on the angular position information detected by the angle detecting unit 1A and the multi-rotation information stored in the storage unit 24. do. The communication unit 3 transmits the multi-rotation information generated by the synthesizing unit 2 to the control unit MC.

In the backup state, the power supply section 31 may supply power to the angle detection section 1A. The angle detection unit 1A may detect the angular position information using power supplied from the power supply unit 31 in the backup state. In this case, the encoder device EC may detect the multi-rotation information based on the angular position information detected by the angle detection section 1A. When the encoder device EC detects the multi-rotation information based on the angular position information, the power supply unit 31 supplies power to the angle detection unit 1A in the backup state and does not supply power to the multi-rotation detection unit 1B. good.

Next, each part of the power supply unit 31 will be described. The power supply unit 31 includes a signal generation unit 33 , a rectification unit 34 , a switching unit 35 and a battery 36 . The signal generator 33 generates a detection signal based on the movement of the rotating body SF. The signal generator 33 generates an electric signal (detection signal) by a change in magnetic field accompanying movement (eg, rotation) of the moving part (eg, rotating body SF). This electrical signal includes a waveform in which power (current, voltage) changes over time. In the signal generator 33, for example, a detection signal is generated as an electric signal by a magnetic field that changes with the rotation of the rotating body SF. For example, the signal generator 33 generates a detection signal due to a change in the magnetic field formed by the magnet 21 used by the multiple rotation detector 1B to detect the multiple rotation information of the rotating body SF. The signal generating section 33 is a member different from the position detecting section 1 described above, and is arranged so that the relative angular position with respect to the magnet 21 changes according to the rotation of the rotating body SF. The signal generator 33 generates a pulsed electric signal, for example, when the relative position between the signal generator 33 and the magnet 21 reaches a predetermined position.

FIG. 2 is a diagram showing a magnetic sensor and a signal generator according to the first embodiment. FIG. 2A shows a perspective view of the magnet 21, the magnetic detector 22, and the signal generator 33. As shown in FIG. FIG. 2B shows a plan view of the magnet 21, the magnetic detector 22, the magnetic sensor 26, and the signal generator 33 viewed from the direction of the rotating body SF.

The magnet 21 is configured such that the direction and strength of the magnetic field in the radial direction (radial direction) with respect to the body of rotation SF are changed by rotation. The magnet 21 is, for example, an annular member coaxial with the rotating body SF. The main surfaces (front surface and rear surface) of the magnet 21 are each substantially perpendicular to the rotating body SF. As shown in FIG. 2B, the magnet 21 is a permanent magnet magnetized into four poles. The magnet 21 has N poles and S poles arranged in the circumferential direction on its inner circumference side and outer circumference side, respectively, and the phases of the inner circumference side and the outer circumference side are shifted by 180°. In the magnet 21, the boundary between the N pole and the S pole on the inner peripheral side substantially coincides with the boundary between the N pole and the S pole on the outer peripheral side in the circumferential direction (angular position).

In the following description, the counterclockwise rotation when viewed from the same side as the scale S with respect to the main body MB of the driving device MTR shown in FIG. 1 is referred to as forward rotation as appropriate. Forward rotation and reverse rotation are called reverse rotation. The angle of forward rotation is represented by a positive value, and the angle of reverse rotation is represented by a negative value.

Here, in the coordinate system fixed to the magnet 21, the angular position of one boundary between the N pole and the S pole in the circumferential direction is represented by position 21a, and the angular position rotated by 90° from position 21a is represented by position 21b. An angular position rotated by 90° from the position 21b is represented by a position 21c, and a position rotated by 90° from the position 21c is represented by a position 21d. Position 21c is the angular position of another boundary between the north and south poles in the circumferential direction.

In the first section 180° counterclockwise from the position 21 a , the N pole is arranged on the outer peripheral side of the magnet 21 and the S pole is arranged on the inner peripheral side of the magnet 21 . In this first section, the radial direction of the magnetic field is generally directed from the outer peripheral side to the inner peripheral side of the magnet 21 . In the first section, the strength of the magnetic field is maximum at position 21b and minimum near position 21a and near position 21c.

In the second section 180° counterclockwise from the position 21 c , the N pole is arranged on the inner peripheral side of the magnet 21 and the S pole is arranged on the outer peripheral side of the magnet 21 . In this second section, the radial direction of the magnetic field is the direction from the inner peripheral side to the outer peripheral side of the magnet 21 . In the second section, the strength of the magnetic field is maximum at position 21d and minimum near position 21a and near position 21c.

Thus, the radial direction of the magnetic field generated by magnet 21 is reversed at position 21a and reversed at position 21c. The magnet 21 forms an alternating magnetic field in which the direction of the magnetic field in the radial direction is reversed as the magnet 21 rotates with respect to a coordinate system fixed outside the magnet 21 . At a predetermined angular position, the signal generator 33 is viewed from the normal direction (eg, the direction parallel to the axial direction of the rotating body SF) of the main surface of the magnet 21 (eg, the surface parallel to the patterning surface of the scale S). and the magnet 21.

In this embodiment, the signal generator 33 includes a first signal generator 33a and a second signal generator 33b. The first signal generator 33a and the second signal generator 33b are units that generate electrical signals. The first signal generating section 33a and the second signal generating section 33b are provided without contact with the magnet 21, respectively. Although the number of units provided in the signal generating section 33 is two (the first signal generating section 33a and the second signal generating section 33b) in FIG. 2, the number may be one or three or more.

The first signal generating section 33 a includes a first magneto-sensitive section 41 and a first power generating section 42 . The first magneto-sensitive portion 41 and the first power generating portion 42 are fixed outside the magnet 21 respectively. The first magnetically sensitive section 41 and the first power generating section 42 change their relative positions with respect to each position on the magnet 21 as the magnet 21 rotates. For example, in FIG. 2B, the position 21b of the magnet 21 is arranged at a position 45° counterclockwise from the first signal generating section 33a, and from this state the magnet 21 moves forward (counterclockwise). When it rotates once, positions 21b, 21c, 21d, and 21a pass through the vicinity of the signal generator 33 in this order.

The first magneto-sensitive portion 41 is a magneto-sensitive wire (magnetic material) such as a Wiegand wire. A large Barkhausen jump (Wiegand effect, Barkhausen effect) occurs in the first magneto-sensitive portion 41 due to a change in the magnetic field accompanying the rotation of the magnet 21 . The first magneto-sensitive portion 41 is a columnar member, the axial direction of which is set in the radial direction of the magnet 21 . When an alternating magnetic field is applied in the axial direction of the first magnetically sensitive portion 41 and the magnetic field is reversed, a magnetic domain wall is generated from one end to the other end in the axial direction.

The first power generation section 42 is a high-density coil or the like wound around the first magnetically sensitive section 41 . Electromagnetic induction occurs in the first power generation section 42 as a magnetic domain wall is generated in the first magnetically sensitive section 41 , and an induced current flows. The signal generator 33 generates a detection signal when the magnet 21 is placed at a predetermined position. For example, when position 21a or position 21c of magnet 21 shown in FIG. In addition, the first power generation unit 42 can output a detection signal (electrical signal) including detection pulses such as positive pulses and negative pulses using a large Barkhausen jump, and can ) can operate without power supply.

The direction of the current generated in the first power generation section 42 changes depending on the direction before and after the reversal of the magnetic field. For example, the direction of the current generated when the magnet 21 is reversed from the outward facing magnetic field to the inward facing magnetic field is opposite to the direction of the current generated when the magnet 21 is reversed from the inward facing magnetic field to the outward facing magnetic field. The power (induced current) generated in the first power generation section 42 can be set by, for example, the number of turns of the high-density coil.

As shown in FIG. 2A, the first magneto-sensitive portion 41 and the first power generating portion 42 are housed in a case 43. As shown in FIG. The case 43 is provided with terminals 43a and 43b. The high-density coil of the first power generating section 42 has one end connected to the terminal 43a and the other end connected to the terminal 43b. The electric power generated by the first power generating section 42 can be taken out to the outside of the first signal generating section 33a via the terminals 43a and 43b.

The second signal generator 33b is arranged at an angular position forming an angle larger than 0° and smaller than 180° from the angular position where the first signal generator 33a is arranged. The angle between the angular position of the first signal generating portion 33a and the angular position of the second signal generating portion 33b is selected from the range of 45° or more and 135° or less, and is about 90° in FIG. 2(B).

The second signal generator 33b has the same configuration as the first signal generator 33a. The second signal generation section 33b includes a second magneto-sensitive section 45 and a second power generation section 46 . The second magnetism sensing section 45 and the second power generation section 46 are the same as the first magnetism sensing section 41 and the first power generation section 42, respectively. The second magnetically sensitive section 45 and the second power generating section 46 are housed in the case 47 . The case 47 is provided with terminals 47a and 47b. The electric power generated by the second power generating section 46 can be taken out of the second signal generating section 33b via terminals 47a and 47b.

The configuration of the signal generator 33 described above is an example, and the configuration can be changed as appropriate. For example, the signal generator 33 may generate power (eg, electrical signal) by electromagnetic induction without using a large Barkhausen jump (Wiegand effect). Also, the number of power generation units included in the signal generation unit 33 can be changed as appropriate, and may be, for example, one or three or more. Also, the arrangement of the signal generator 33 can be changed as appropriate.

Magnetic detector 22 includes magnetic sensor 25 and magnetic sensor 26 . The magnetic sensor 25 is arranged at an angular position of more than 0° and less than 90° with respect to the first magneto-sensitive portion 41 (first signal generating portion 33a) in the rotation direction of the rotating body SF. The magnetic sensor 26 is arranged at an angular position of more than 90° and less than 180° with respect to the first magneto-sensitive portion 41 (first signal generating portion 33a) in the rotation direction of the rotating body SF.

Here, it is assumed that the rotating body SF is rotating in one direction. The first signal generator 33a generates a current pulse (eg, a positive current pulse) flowing from the terminal 43a to the terminal 43b when the position 21a of the magnet 21 passes by the first signal generator 33a. Further, the first signal generator 33a generates a current pulse (for example, a negative current pulse) flowing from the terminal 43b to the terminal 43a when the position 21c of the magnet 21 passes near the first signal generator 33a. In this way, the first signal generator 33a changes the direction (positive or negative) of the current pulse based on the direction of rotation and the position of the magnet 21 passing near it. The second signal generator 33b generates current pulses (eg, positive current pulses, negative current pulses) like the first signal generator 33a.

Returning to the description of FIG. 1 , the rectifying section 34 is electrically connected to the signal generating section 33 . The rectifier 34 rectifies the current (eg, current pulse) input from the signal generator 33 . The rectifier 34 includes, for example, a rectifier that performs full-wave rectification. For example, the rectifying section 34 converts a negative current pulse input from the first signal generating section 33a into a positive current pulse and outputs the positive current pulse. For example, when the position 21a of the magnet 21 passes near the first signal generating part 33a and when the position 21c of the magnet 21 passes near the first signal generating part 33a, the rectifying unit 34 Output a positive current pulse. Note that the rectifying section 34 may perform half-wave rectification. Also, the power supply unit 31 does not have to include the rectifying unit 34 .

In the backup state, the battery 36 supplies at least part of the power consumed by the position detection section 1 based on the detection signal (eg, current pulse) generated by the signal generation section 33 . The battery 36 includes, for example, a primary battery such as a button battery or a dry battery. Battery 36 may include a secondary battery such as a lithium ion secondary battery. Also, the battery 36 may include a primary battery and a secondary battery.

Note that the encoder device EC does not have to include the battery 36 . In this case, the encoder device EC may be provided with terminals to which the battery 36 can be connected, but without the battery 36 . The battery 36 may be connected to the encoder device EC by housing the battery 36 in a case to which the terminals are attached, for example. The encoder device EC can replace the battery 36, for example, and may be provided without the battery 36 attached.

The switching unit 35 switches whether power is supplied from the battery 36 to the position detecting unit 1 using the detection signal generated by the signal generating unit 33 as a control signal. The switching unit 35 is provided between the position detection unit 1 and the battery 36 and in a path (eg, circuit, wiring) through which power is supplied from the battery 36 to the position detection unit 1 . Also, the switching unit 35 is arranged in a path (eg, circuit, wiring) through which the detection signal generated by the signal generating unit 33 is transmitted. The switching unit 35 is connected to the output terminal of the rectifying unit 34, for example. For example, the detection signal generated by the signal generation unit 33 and rectified by the rectification unit 34 is input to the switching unit 35 .

The switching unit 35 starts supplying power from the battery 36 to the position detecting unit 1 when the level of the electric signal generated by the signal generating unit 33 becomes equal to or higher than the threshold. For example, the switching unit 35 starts supplying power from the battery 36 to the position detecting unit 1 when the signal generating unit 33 generates a detection signal equal to or greater than the threshold value. Moreover, the switching unit 35 stops the power supply from the battery 36 to the position detection unit 1 when the level of the electric signal generated by the signal generation unit 33 becomes less than the threshold value. For example, the switching unit 35 stops power supply from the battery 36 to the position detection unit 1 when the detection signal generated by the signal generation unit 33 becomes less than the threshold value.

For example, when the signal generator 33 generates a pulsed electric signal, the switching unit 35 switches from the battery 36 to the position detector 1 when the level (potential) of the electric signal rises from low level to high level. power supply. The switching unit 35 stops the supply of electric power from the battery 36 to the position detecting unit 1 after a predetermined time has passed since the level (potential) of the electric signal rises to a high level. For example, the switching section 35 stops the supply of power from the battery 36 to the position detecting section 1 when the level (potential) of the electric signal falls from a high level to a predetermined level.

The switching unit 35 is connected to at least part of the position detection unit 1 (eg, the multi-rotation detection unit 1B). For example, the battery 36 supplies power to the multi-rotation detector 1B via the switching section 35 in the backup state. The magnetic detector 22 detects magnetism using power supplied from the battery 36 in the backup state. The processing unit 23 processes the detection result of the magnetic detection unit 22 using power supplied from the battery 36 in the backup state. In the backup state, the processing unit 23 uses power supplied from the battery 36 to derive multi-rotation information. In the backup state, the storage unit 24 uses power supplied from the battery 36 to store the processing result (multi-rotation information) of the processing unit 23 .

Note that the switching unit 35 may be connected to the angle detection unit 1A. The battery 36 may supply power to the angle detection section 1A via the switching section 35 in the backup state. The angle detection unit 1A may detect the angular position information using power supplied from the battery 36 in the backup state. The encoder device EC may detect the multi-rotation information based on the angular position information detected by the angle detector 1A using power supplied from the battery 36 in the backup state. The storage unit 24 may store angular position information using power supplied from the battery 36 in the backup state. Further, the storage unit 24 may store the multi-rotation information detected based on the angular position information using power supplied from the battery 36 in the backup state.

In this embodiment, the switching unit 35 is a second switching unit that switches between the normal state and the backup state. The switching unit 35 (second switching unit) switches between the normal state and the backup state, for example, based on whether power is supplied to the switching unit 35 from the power supply unit PW. For example, the switching unit 35 includes an electromagnetic switch arranged in a path (eg, circuit, wiring) through which current from the battery 36 flows. The electromagnetic switch is electrically connected to the power supply unit PW, and switches between opening and closing (on/off) based on whether power is supplied from the power supply unit PW.

The electromagnetic switch includes, for example, an electromagnet and a pair of terminals (input terminal, output terminal). For example, the input terminal is connected to the battery 36 and the output terminal is connected to the output terminal of the switching section 35 . For example, the input terminal and the output terminal are supported by an elastic body so as to contact each other. The electromagnet generates magnetic force in a normal state in which power is supplied from the power supply unit PW. This magnetic force acts to separate the input and output terminals from each other. As a result, the pair of terminals are out of contact with each other, and the circuit is in a non-conducting state (interrupted state, open state, off state). Further, in the electromagnetic switch, a magnetic field is not generated in the electromagnet in a backup state in which power is not supplied from the power supply unit PW, and the pair of terminals are brought into contact with each other by the elastic body. When the pair of terminals of the electromagnetic switch are in contact with each other, the switching unit 35 receives a detection signal from the signal generating unit 33, thereby turning on the path (e.g., circuit, wiring) through which the current from the battery 36 flows. closed state, on state).

Note that the switching unit 35 (second switching unit) is not limited to the above aspect. For example, the electromagnetic switch may be arranged in a path (eg, circuit) through which the detection signal output from the signal generator 33 is transmitted. Further, the second switching unit may switch between the normal state and the backup state by receiving a control signal from the outside (for example, the control unit MC of the driving device MTR).

Note that the switching unit 35 does not have to switch between the normal state and the backup state. A second switching unit that switches between the normal state and the backup state may be provided separately from the switching unit 35 . For example, the second switching section may include a mechanical switch, and the operator may switch between the normal state and the backup state by operating the mechanical switch. Also, the encoder device EC does not have to include the second switching unit.

Since the power supply unit 31 operates stably in the backup state, the encoder device EC increases the rotational position information of the rotating body SF (for example, the initial position of the rotating body SF) when the backup state is switched to the normal state. Accurately detectable. The encoder device EC according to the embodiment can detect the state of the power supply unit 31 using the power of the power supply unit 31 . Detecting the state of the power supply unit 31 contributes to stably operating the power supply unit 31 in a backup state, for example. The encoder device EC reduces the power consumption of the power supply unit 31 while adjusting the state of the power supply unit 31 (for example, environmental conditions such as temperature and humidity, electrical parameters such as voltage and electricity, or battery By detecting the consumption state or deterioration state based on the state related to the self-discharge of the power supply unit 31, for example, the consumption of the power supply unit 31 can be suppressed.

Next, a configuration for detecting the state of the power supply unit 31 will be described. The encoder device EC includes a switching unit 51 , a state detection unit 52 (monitoring unit), and a lifespan calculation unit 53 . State detection unit 52 detects the state of power supply unit 31 based on the power supplied from power supply unit 31 based on the detection signal. Thus, the state detector 52 detects the state of the battery 36 using the power supplied from the battery 36 . The state detection unit 52 detects, for example, an index value representing the state of the battery 36 .

The state detection unit 52 causes the storage unit 24 to store detection results (eg, temperature, humidity, air pressure, normal or abnormal, voltage, internal resistance (output impedance), etc.) of detecting the state of the power supply unit 31 . The state detection unit 52 monitors (observes) the state of the power supply unit 31 by detecting the state of the power supply unit 31 . In addition, in the normal state or the backup state, the state detection unit 52 stores when the encoder device EC is activated (for example, when the power supply unit PW is turned on) in order to confirm the state (situation) of the power supply unit 31. It is configured to acquire the latest (previous) detection result from the unit 24 .

The state of the battery 36 includes, for example, the state of the environment in which the battery 36 is used (environmental state), the state of operation of the battery 36 (operating state), the state of electrical parameters of the battery 36, and the self-discharge rate of the battery 36. state (self-discharge state). For example, when the state detection unit 52 of the encoder device EC includes a temperature sensor or a humidity sensor (not shown), the environmental state when the battery 36 is in operation or stopped is the environment in which the battery 36 is arranged (eg, the encoder device EC temperature and/or humidity in the interior of the

The operating state of the battery 36 includes, for example, one or both of current and voltage output from the battery 36 when the state detector 52 includes a power detector. The self-discharge state of the battery 36 includes, for example, one or both of the temperature of the battery 36 and the voltage between terminals when the state detection unit 52 includes a temperature sensor and a power detection unit. In addition, the state of the battery 36 in this embodiment serves as an indicator of battery life, and is used to calculate life information, which will be described later.

FIG. 3 is a diagram showing the circuit configuration of the encoder device according to the first embodiment. A first terminal (eg, terminal 43 a in FIG. 2A) of the signal generator 33 is connected to a terminal 34 a of the rectifier 34 . A second terminal (eg, terminal 43b in FIG. 2A) of the signal generating section 33 is connected to a terminal 34b of the rectifying section . A terminal 34c of the rectifying section 34 is connected to a ground terminal serving as a reference potential of the circuit. A terminal 34d (output terminal) of the rectifying section 34 is connected to the wiring PL. A node N1 of the wiring PL is connected via a resistor 55 to a ground terminal serving as a reference potential of the circuit.

A node N2 of the wiring PL is connected to the switching unit 51 . The switching unit 51 includes a switching element 56, for example. The switching element 56 is provided on a path for supplying power from the power supply unit 31 to the state detection unit 52 . A terminal 56a (eg, source electrode) of the switching element 56 is connected to an electrode (eg, positive electrode or negative electrode) of the battery 36 . A terminal 56 b (eg, drain electrode) of the switching element 56 is connected to an input terminal 57 a of the state detection section 52 . As shown in FIG. 3, the state detector 52 includes, for example, a power detector 57 (eg, voltmeter, ammeter). A terminal 56c (eg, gate electrode, control terminal) of the switching element 56 is connected to the node N2 of the wiring PL. A voltage is applied to the terminal 56c of the switching element 56 by the detection signal. When a voltage equal to or higher than the threshold is applied to the terminal 56c of the switching element 56, the terminals 56a and 56b (for example, the channel region) become conductive.

A terminal 34 d of the rectifying section 34 is connected to the switching section 35 . The switching section 35 includes a switching element 58 . A terminal 58 a (eg, source electrode) of the switching element 58 is connected to an electrode (eg, positive or negative electrode) of the battery 36 . A terminal 58b (eg, drain electrode) of the switching element 58 is connected to an input terminal 59a of a power adjusting section 59 (described later). A terminal 58 c (eg, gate electrode, control terminal) of the switching element 58 is connected to the terminal 34 d of the rectifying section 34 . A voltage is applied to the terminal 58c of the switching element 58 by the detection signal. When a voltage equal to or higher than the threshold is applied to the terminal 58c of the switching element 58, the terminal 58a and the terminal 58b (for example, the channel region) become conductive.

The power supply unit 31 according to this embodiment includes a power adjustment unit 59 . The power adjuster 59 (eg, voltage adjuster) adjusts the power (eg, voltage) supplied from the battery 36 . For example, the power adjustment unit 59 adjusts (eg, converts, boosts, or steps down) the voltage of the power supplied from the battery 36 to a predetermined voltage. An output terminal 59 b of the power adjustment section 59 is connected to the position detection section 1 . The power supply unit 31 supplies power adjusted to a predetermined voltage by the power adjustment unit 59 to the position detection unit 1 .

Switching element 58 and power regulator 59 include regulators. For example, the terminal 58a of the switching element 58 corresponds to the input terminal of the regulator. Also, the output terminal 59b of the power adjusting section 59 corresponds to the output terminal of the regulator. A terminal 58c of the switching element 58 corresponds to a control terminal of the regulator. This regulator uses an electric signal (detection signal) generated by the signal generator 33 as a control signal (eg, an enable signal) to control the operation of the switching element 58 . The regulator maintains the potential of the output terminal 59b at a predetermined potential while a voltage equal to or higher than the threshold is applied to the control terminal (the terminal 58c of the switching element 58). The output voltage of the regulator (the predetermined voltage mentioned above) is, for example, the operating voltage (eg, 3 V) of the position detection section 1 .

Next, operation timings of the encoder device EC will be described with reference to FIGS. FIG. 4 is a timing chart showing the operation of the encoder device according to the first embodiment. In FIG. 4, "signal generator output" corresponds to the level of the detection signal generated by the signal generator 33 (see FIG. 3). Here, the level of the detection signal rectified by the rectifying section 34 is indicated as "signal generating section output". Further, the "power adjusting section output" corresponds to the level of the voltage output from the power adjusting section 59 (see FIG. 3) (for example, the potential of the output terminal 59b of the power adjusting section 59). In FIG. 4, "H" represents high level and "L" represents low level.

"Position detection unit detection operation" in FIG. 4 represents the timing at which the position detection unit 1 detects the rotational position information of the rotating body SF. In the following description, the operation of detecting the rotational position information of the rotating body SF by the position detection unit 1 is appropriately referred to as the rotational position information detection operation. For each detection operation in FIG. 4, "ON" indicates that the detection operation is being performed, and "OFF" indicates that the detection operation is stopped. “Power detection unit input” represents the level of power input to the power detection unit 57 (state detection unit 52) (for example, the voltage of the input terminal 57a of the power detection unit 57). “Power detection unit detection operation (state detection unit detection operation)” represents the timing at which the power detection unit 57 detects the state of the battery 36 .

As described with reference to FIG. 2B, the first signal generating section 33a generates a A current pulse is generated. Further, the second signal generator 33b generates a current pulse when the position 21a of the magnet 21 passes through its vicinity and when the position 21c of the magnet 21 passes through its vicinity. For example, the signal generator 33 (the first signal generator 33a, the second signal generator 33b) generates four current pulses during one rotation of the rotating body SF. In FIG. 4, the symbol T corresponds to the period during which the rotating body SF rotates once. The "signal generator output" rises from "L" to "H" four times in response to four current pulses generated by the signal generator 33 during one rotation of the rotating body SF.

When the "signal generator output" rises, the potential of the terminal 58c of the switching element 58 of the switching section 35 (see FIG. 3) becomes equal to or higher than the threshold, and the terminals 58a and 58b are electrically connected. When the terminals 58a and 58b of the switching element 58 become conductive, power is supplied from the battery 36 to the power adjusting section 59, and the "power adjusting section output" rises from "L" to "H". When the "output of the power adjustment unit" becomes "H", power of a predetermined voltage is supplied from the power adjustment unit 59 to the position detection unit 1, and the position detection unit 1 detects the rotational position information of the rotating body SF ("position "detection unit detection operation" is "ON").

Further, when the "signal generating unit output" rises, the potential of the terminal 56c of the switching element 56 of the switching unit 51 (see FIG. 3) becomes equal to or higher than the threshold, and the terminal 56a and the terminal 56b become conductive. . When the terminals 56a and 56b of the switching element 56 become conductive, power is supplied from the battery 36 to the power detector 57, and the "power detector input" rises from "L" to "H". When power is supplied from the battery 36, the power detection unit 57 detects the state of the battery 36 (for example, the output voltage output from the battery 36) (“Power detection unit detection operation” is “ON”).

Returning to the description of FIG. 1 , the switching unit 51 switches whether power is supplied from the power supply unit 31 to the state detection unit 52 based on the detection signal generated by the signal generation unit 33 . For example, the switching unit 51 switches whether power is supplied from the power supply unit 31 to the state detection unit 52 in the backup state based on the detection signal generated by the signal generation unit 33 .

Note that the switching unit 51 may switch whether power is supplied from the power supply unit 31 to the state detection unit 52 based on the detection signal in the normal state. In the normal state, the switching unit 51 may switch whether power is supplied from the power supply unit 31 to the state detection unit 52 based on a signal different from the detection signal. In the normal state, the switching unit 51 does not have to switch whether power is supplied from the power supply unit 31 to the state detection unit 52 .

The switching unit 51 switches whether or not power is supplied from the battery 36 to the state detecting unit 52 using, for example, the detection signal generated by the signal generating unit 33 as a control signal. In the following description, a switching operation is referred to as a switching operation in which a switching unit (eg, the switching unit 35, the switching unit 51) switches between a circuit conduction state (closed state) and a circuit interruption state (open state). The switching unit 51 performs the switching operation in synchronization with the switching operation by the switching unit 35 in the backup state. In the backup state, the switching unit 51 performs the switching operation at a predetermined timing with the switching operation by the switching unit 35 . In the backup state, the switching unit 51 causes the power supply unit 31 to supply power to the state detection unit 52 during at least part of the period during which power is supplied from the power supply unit 31 to the position detection unit 1 .

The switching unit 51 is provided in a path (eg, circuit, wiring) through which power is supplied from the battery 36 to the state detection unit 52 . Also, the switching unit 51 is electrically connected to the signal generating unit 33 . For example, the switching unit 51 is connected to a node N2 between the signal generating unit 33 and the switching unit 35. FIG. The switching unit 51 is connected to the output terminal of the rectifying unit 34, for example. For example, the detection signal generated by the signal generating unit 33 and rectified by the rectifying unit 34 is input to the switching unit 51 via the node N2.

When the level of the electrical signal generated by the signal generating section 33 becomes equal to or higher than the threshold, the switching section 51 starts supplying power from the battery 36 to the state detecting section 52 . For example, the switching unit 51 starts supplying power from the battery 36 to the state detecting unit 52 when the signal generating unit 33 generates a detection signal equal to or greater than the threshold. Also, the switching unit 51 stops power supply from the battery 36 to the state detection unit 52 when the level of the electrical signal generated by the signal generation unit 33 becomes less than the threshold. For example, the switching unit 51 stops power supply from the battery 36 to the state detection unit 52 when the detection signal generated by the signal generation unit 33 becomes less than the threshold.

For example, when the signal generator 33 generates a pulsed electric signal, the switching unit 51 switches from the battery 36 to the state detector 52 when the level (potential) of the electric signal rises from low level to high level. power supply. Further, the switching unit 51 stops the supply of power from the battery 36 to the state detection unit after a predetermined time has passed since the level (potential) of the electric signal rises to the high level.

The state detection unit 52 detects the state of the power supply unit 31 using the power supplied from the power supply unit 31 via the switching unit 51 . For example, in the backup state, the state detector 52 detects the state of the battery 36 using power supplied from the battery 36 to the state detector 52 based on the generation of the detection signal by the signal generator 33 . The state detection unit 52 outputs a detection result of detecting the state of the battery 36 to the storage unit 24 while power is being supplied from the battery 36 to the state detection unit 52 . In the backup state, the storage unit 24 stores the detection result output from the state detection unit 52 using power supplied from the battery 36 to the position detection unit 1 based on the generation of the detection signal in the signal generation unit 33. .

The life calculation unit 53 calculates life information of the battery 36 based on the detection result of the state detection unit 52 . The life information includes, for example, the time to reach the discharge end voltage, the remaining amount of the battery 36, the time the position detection unit 1 can operate with the power supplied from the battery 36, and the power supplied from the battery 36 for the position detection unit. It includes at least one period when power consumption is insufficient.

The life calculation unit 53 reads the detection result of the state detection unit 52 stored in the storage unit 24 and calculates life information. The lifespan calculation unit 53 calculates lifespan information using, for example, power supplied from the power supply unit PW in a normal state. For example, the life calculation unit 53 reads the detection result of the state detection unit 52 stored in the backup state in the normal state, and calculates the life information in the normal state. The life calculation unit 53 outputs (notifies) the calculated life information to the outside. The life calculation unit 53 outputs the life information to the communication unit 3, and the communication unit 3 outputs (transmits) the life information to the outside (for example, the control unit MC).

As described above, the state detector 52 detects the power (output voltage) output from the battery 36 . The state detection unit 52 detects the voltage between the negative electrode and the positive electrode of the battery 36 as an output voltage. Here, the output voltage of the battery 36 changes based on the remaining amount of the battery 36 . For example, when the remaining capacity of the battery 36 decreases, the output voltage of the battery 36 also decreases. The life calculation unit 53 uses the state (eg, output voltage) of the power supply unit 31 (in this case, the battery 36) detected by the state detection unit 52 to calculate the life information of the battery 36 (eg, the remaining amount of the battery 36). estimated value). For example, output characteristic information (e.g., formula, table data) indicating the relationship between the output voltage and the remaining capacity of the battery 36 is pre-stored in the storage unit (e.g., storage unit 24), and the life calculation unit 53 The output characteristic information is obtained from the storage unit 24 and the life information of the battery 36 is calculated. Also, the life calculation unit 53 may calculate the life information of the battery 36 using both the detection result of the temperature sensor and the detection result of the power detection unit 57 . Since the self-discharge rate of the battery 36 depends on environmental conditions such as temperature, the life calculation unit 53 includes a storage unit (eg, a storage unit) in which temperature characteristic information indicating the relationship between temperature and self-discharge rate is stored in advance. 24), and the self-discharge rate of the battery 36 in a predetermined period can be calculated using the detection result of the temperature sensor and the temperature characteristic information. Then, the life calculation unit 53 calculates life information based on this self-discharge rate.

For example, when the calculated estimated remaining amount of the battery 36 is less than a predetermined value, the lifespan calculating unit 53 determines that the estimated remaining amount of the battery 36 is less than a predetermined value. signal). Based on the calculated life information, the life calculation unit 53 may output life information indicating replacement of the battery 36 or time for replacement to the outside.

The life information may include a warning signal indicating that the power supplied from the battery 36 may be insufficient for the power consumed by the position detection unit 1 . Further, the life information may include, for example, an alarm signal indicating that the power supplied from the battery 36 is insufficient for the power consumed by the position detection section 1 . Further, the life information is a control signal (e.g., notification signal) used when notifying that replacement of the battery 36 is recommended by sound (e.g., alarm sound) or light (e.g., lighting or blinking of LED). may contain.

The life information contributes to suppressing the occurrence of malfunctions or malfunctions of the encoder device EC. For example, the user can perform maintenance on the power supply unit 31 (for example, replace the battery 36) based on life information output from the encoder device EC. In this case, the power supply unit 31 can supply power so that the position detection unit 1 can operate normally in the backup state, for example. For example, in the backup state, the encoder device EC can detect the rotational position information of the rotating body SF with high precision by the power supply unit 31 and the position detection unit 1 operating normally.

In this embodiment, the level of the detection signal (“signal generator output” in FIG. 4) intermittently (intermittently, selectively, temporarily) becomes high level. In addition, the state detection unit 52 detects the state of the power supply unit 31 intermittently (intermittently, selectively, temporarily) instead of constantly based on the detection signal in the normal state or the backup state. When the state detection unit 52 intermittently detects the state of the power supply unit 31 (eg, battery 36), consumption of the power supply unit 31 (eg, battery 36) is suppressed, for example. The encoder device EC according to the embodiment can, for example, suppress consumption of the power supply unit 31 and detect the rotational position information of the rotating body SF with high accuracy in the backup state. Further, the encoder device EC according to the embodiment achieves a longer life of the power supply unit 31 and can operate stably.

Note that the power supply unit 31 may supply power to the life calculation unit 53 . The lifespan calculation unit 53 may calculate the lifespan information using the power supplied from the power supply unit 31 . For example, in the backup state, the power supply unit 31 may supply power to the life calculation unit 53 , and the life calculation unit 53 may calculate life information using the power supplied from the power supply unit 31 . In this case, the state detection unit 52 does not have to store the detection result of detecting the state of the battery 36 in the storage unit 24 .

Moreover, the state detection unit 52 may store the detection result in a storage unit (second storage unit) different from the storage unit 24 of the position detection unit 1 . In this case, the power supply section 31 may supply power to the position detection section 1 during the first period and power to the second storage section during the second period. The second storage unit may store the detection result of the state detection unit 52 using the power supplied from the power supply unit 31 in the second period. The second period may overlap at least part of the first period. Also, the second period does not have to overlap with the first period.

Note that the encoder device EC does not have to include the life calculator 53 . For example, the encoder device EC may output the detection result of the state detection unit 52 detecting the state (eg, temperature) of the battery 36 to the outside of the encoder device EC (eg, control unit MC). A device to which the life information is output from the encoder device EC (a device to which the life information is output) may process the detection result of the state detection unit 52 . In this case, for example, the lifespan calculator 53 may be provided in a device (eg, controller MC) to which the lifespan information is output. For example, the life calculation unit 53 may be provided in the control unit MC and may calculate the life information of the battery 36 using information on the state of the battery 36 output from the encoder device EC.

Note that the life calculation unit 53 does not need to calculate at least one of the estimated remaining battery capacity, the time to reach the discharge end voltage, the estimated operable time, and the estimated power shortage period. . Further, the life calculation unit 53 may calculate, as the life information of the battery 36, values other than the above-described estimated value of remaining battery capacity, estimated value of operable time, and estimated value of power shortage period. For example, the life calculation unit 53 may calculate information indicating the level (degree) of the remaining battery capacity, the time to reach the discharge end voltage, the operable time, or the power shortage period in two or more stages.

Further, the controller MC may use the life information of the battery 36 calculated by the life calculator 53 to detect an abnormality in a device (eg, drive device, stage device, robot device) including the encoder device EC. For example, when the value of the life information of the battery 36 is less than a predetermined value, the control unit MC may determine that there is an abnormality in the part of the device provided with the encoder device EC, to which the encoder device EC is attached. Further, the control unit MC may notify the outside of the abnormality detection result using the life information of the battery 36 calculated by the life calculation unit 53 . Further, the control unit MC may use the life information of the battery 36 calculated by the life calculation unit 53 for control or the like.

[Second embodiment]
Next, a second embodiment will be described. In this embodiment, the same reference numerals are given to the same configurations as those of the above-described embodiment, and the description thereof will be omitted or simplified. FIG. 5 is a diagram showing an encoder device according to the second embodiment. The encoder device EC according to this embodiment includes a control section 61 (encoder control section). The control section 61 supplies a control signal to the switching section 51 . In a normal state, the position detection unit 1 detects position information using power supplied from a power supply unit PW different from the power supply unit 31 . In a state (normal state) in which power is supplied from the power supply unit PW to the position detection unit 1, the switching unit 51 operates at a predetermined timing (eg, regular or irregular timing, instruction timing from the control unit MC, or The power supply unit 31 switches whether or not to supply power to the state detection unit 52 based on the control signal supplied from the control unit 61 at the timing after the position detection unit 1 operates based on the detection signal.

The switching unit 51 performs switching based on the control signal from the control unit 61 in the normal state, and performs switching based on the detection signal from the signal generating unit 33 in the backup state. State detection unit 52 detects the state of battery 36 in a normal state using power supplied from battery 36 based on a control signal from control unit 61 . The lifespan calculator 53 calculates lifespan information based on the detection result of the state detector 52 . The life calculation unit 53 outputs the calculated life information to the control unit 61, for example. For example, the control unit 61 outputs the life information calculated by the life calculation unit 53 to the outside (for example, the control unit MC) via the communication unit 3 .

FIG. 6 is a diagram showing the circuit configuration of the encoder device according to the second embodiment. In this embodiment, the encoder device EC includes a switching section 62 (second switching section). The switching section 62 is provided separately from the switching section 35 . A terminal 62a of the switching section 62 is connected to an output terminal of the power supply section 31 (for example, an output terminal 59b of the power adjusting section 59). A terminal 62b of the switching section 62 is connected to the power supply section PW. Between the terminal 62b and the power supply unit PW, a power adjustment unit (eg, transformer) is appropriately provided. In a normal state, a predetermined voltage is applied to the terminal 62b of the switching section 62 from the power supply section PW. A terminal 62 c of the switching section 62 is connected to a path for supplying power to the position detecting section 1 . The switching unit 62 can switch between a state in which the terminals 62a and 62c are electrically connected and a state in which the terminals 62b and 62c are electrically connected.

The control section 61 supplies a control signal to the switching section 62 . Based on a control signal supplied from the control unit 61, the switching unit 62 switches between a state in which the terminals 62a and 62c are electrically connected and a state in which the terminals 62b and 62c are electrically connected. For example, in a normal state, the control section 61 controls the switching section 62 to conduct the terminals 62b and 62c. In this state, the power supply unit PW supplies power to the position detection unit 1 via the switching unit 62 . The position detection unit 1 detects rotational position information of the rotating body SF (see FIG. 5) using power supplied from the power supply unit PW.

When switching from the normal state to the backup state, the control section 61 supplies the switching section 62 with a control signal for conducting the terminals 62a and 62c. The switching unit 62 electrically connects the terminals 62a and 62c based on the control signal supplied from the control unit 61 . When the terminals 62 a and 62 c are electrically connected, the power supply section 31 can supply power to the position detection section 1 via the switching section 62 . In this state, the power supply unit 31 supplies power to the position detection unit 1 based on the detection signal, and the position detection unit 1 uses the power supplied from the power supply unit 31 to operate the rotating body SF (FIG. 5). reference) is detected.

When switching from the backup state to the normal state, the control section 61 supplies the switching section 62 with a control signal for conducting the terminals 62b and 62c. For example, the control unit 61 receives power supply from the power supply unit PW when the driving device MTR shown in FIG. 5 is activated, and supplies a control signal to the switching unit 62 . For example, the control unit 61 supplies a control signal to the switching unit 62 within a short period of time after power supply from the power supply unit PW is started. The switching unit 62 electrically connects the terminals 62b and 62c based on the control signal supplied from the control unit 61 . When the terminal 62b and the terminal 62c are electrically connected, the power supply unit PW supplies power to the position detection unit 1. FIG. Note that the switching unit 62 may include a magnetic switch operated by power supplied from the power supply unit PW, as described in the first embodiment. In this case, the control section 61 does not have to control the switching section 62 .

The encoder device EC according to this embodiment includes a switching unit 63 . The switching unit 63 can, for example, switch whether to validate the detection signal generated by the signal generating unit 33 . The switching section 63 can switch, for example, whether or not to conduct the terminals 56a and 56b of the switching element 56 of the switching section 51 when the detection signal rises. The switching section 63 can switch, for example, whether or not the terminals 58a and 58b of the switching element 58 of the switching section 35 are brought into conduction when the detection signal rises.

The switching section 63 includes a switching element 64 . A terminal 64 a (eg, source electrode) of the switching element 64 is connected to a node N 3 between the node N 1 of the line PL and the resistor 55 . A terminal 64b (for example, a drain electrode) of the switching element 64 is connected to a ground terminal serving as a reference potential of the circuit. A terminal 64 c (eg, gate electrode) of the switching element 64 is connected to the control section 61 .

When a control signal is supplied from the control unit 61, the switching unit 63 applies a predetermined voltage to the terminal 64c of the switching element 64, and conducts between the terminals 64a and 64b (eg, channel region). When the detection signal from the signal generator 33 rises while the terminals 64a and 64b are electrically connected, the current of the detection signal flows through the switching element 64 to the ground terminal of the circuit. In this case, the potential of the terminal 56c of the switching element 56 is kept below the threshold, and the terminals 56a and 56b of the switching element 56 are kept in a non-conducting state. In this case, for example, the input of the detection signal to the switching unit 51 is disabled. Similarly, the terminal 58c of the switching element 58 is kept at a potential less than the threshold, and the terminals 58a and 58b of the switching element 58 are kept in a non-conducting state. In this case, for example, the input of the detection signal to the switching unit 35 is disabled.

In this embodiment, the switching section 51 includes a switching element 65 . The switching element 65 is provided on a path for supplying power from the power supply unit 31 to the state detection unit 52 . A terminal 65a (eg, source electrode) of the switching element 65 is connected to an electrode (eg, positive electrode or negative electrode) of the battery 36 . A terminal 65b (eg, drain electrode) of the switching element 65 is connected to the state detection section 52 (eg, an input terminal 57a of the power detection section 57). A terminal 65 c (eg, gate electrode) of the switching element 65 is connected to the control section 61 . A voltage is applied to a terminal 65 c of the switching element 65 by a control signal supplied from the control section 61 .

When a predetermined voltage is applied to the terminal 65c of the switching element 65, the terminal 65a and the terminal 65b (for example, the channel region) become conductive. When the terminals 65 a and 65 b are electrically connected, the battery 36 supplies power to the power detection section 57 via the switching element 65 . The power detection unit 57 detects the state of the battery 36 using power supplied from the battery 36 . The control unit 61 supplies the switching element 65 with a control signal that causes the terminals 65a and 65b to be electrically connected, thereby causing the power detection unit 57 to perform the detection operation. The control unit 61 can control the timing at which the power detection unit 57 detects the state of the battery 36 by the timing at which the control signal is supplied to the switching element 65 .

FIG. 7 is a timing chart showing operations in a normal state of the encoder device according to the second embodiment. FIG. 8 is a timing chart showing the operation in the backup state of the encoder device according to the second embodiment. 7 and 8, the "power switch" corresponds to the switching section 62 in FIG. "P1" represents a state in which the terminal 62a of the switching section 62 is electrically connected to the terminal 62c. For example, when the “power switch” is “P1”, the battery 36 can supply power to the position detection section 1 . "P2" represents a state in which the terminal 62b of the switching section 62 is electrically connected to the terminal 62c. For example, when the “power switch” is “P2”, the power supply unit PW supplies electric power to the position detection unit 1 .

A "first switch" corresponds to the switching unit 35 in FIG. "ON" of the "first switch" indicates that the terminal 58a and the terminal 58b of the switching element 58 are in a conductive state. "OFF" of the "first switch" indicates that the terminals 58a and 58b of the switching element 58 are not electrically connected. When the “first switch” is “ON” and the “power switch” is “P1”, the battery 36 supplies power to the position detection unit 1 via the switching unit 35 .

"Second switch" and "third switch" correspond to the switching unit 51 in FIG. "ON" of the "second switch" indicates that the terminal 56a and the terminal 56b of the switching element 56 are in a conductive state. "OFF" of "second switch" indicates that the terminal 56a and the terminal 56b of the switching element 56 are not electrically connected. When the “second switch” is “ON”, the battery 36 supplies power to the power detector 57 via the switching element 56 .

"ON" of the "third switch" indicates that the terminals 65a and 65b of the switching element 65 are electrically connected. "OFF" of the "third switch" indicates that the terminals 65a and 65b of the switching element 65 are not electrically connected. When the “third switch” is “ON”, the battery 36 supplies power to the power detector 57 via the switching element 65 .

First, the operation of the encoder device EC in the normal state will be described with reference to FIGS. 6 and 7. FIG. The control unit 61 supplies a control signal to the switching unit 62, and the switching unit 62 switches from the backup state (the "power switch" is "P1") to the normal state (the "power switch" is "P2") at time T1. switch to Further, the control unit 61 supplies a control signal to the switching unit 63, and the switching unit 63 sets the state in which the input of the detection signal to each of the switching unit 51 and the switching unit 35 is valid ("signal generating unit switch)" ON") to an invalid state ("signal generator switch" is "OFF").

When the "signal generator switch" is "OFF" and the detection signal rises ("signal generator output" is "H"), the current of the detection signal is sent to the ground terminal of the circuit via the switching unit 63. flow. In this case, the terminal 58c of the switching element 58 maintains the state in which the potential is less than the threshold, and the "first switch" is maintained in the "OFF" state. When the "first switch" is "OFF", the path (e.g., supply line) for supplying power from the battery 36 to the position detection unit 1 via the switching element 58 is cut off, and the battery 36 is used for position detection. Power is not supplied to part 1.

Similarly for the switching element 56, the terminal 56c of the switching element 56 maintains the state where the potential is less than the threshold, and the "second switch" maintains the "OFF" state. When the “second switch” is “OFF”, the path for supplying power from the battery 36 to the position detection section 1 via the switching element 58 is cut off.

The control section 61 supplies a control signal to the switching element 65 of the switching section 51 , and a predetermined voltage is applied to the terminal 65 c of the switching element 65 . As a result, the switching element 65 becomes conductive between the terminals 65a and 65b (the "third switch" is "ON"). When the "third switch" is "ON", the battery 36 supplies power to the power detector 57 via the switching element 65 ("power detector input" is "H"). The power detection unit 57 uses the power supplied from the battery 36 to detect the state of the battery 36 (“Power detection unit detection operation” is “ON”).

Next, the operation of the encoder device EC in the backup state will be described with reference to FIGS. 6 and 8. FIG. The control unit 61 controls the switching unit 62, and the switching unit 62 switches from the normal state (the "power switch" is "P2") to the backup state (the "power switch" is "P1") at time T2. Further, the control unit 61 controls the switching unit 63, and the switching unit 63 is in a state where the input of the detection signal to each of the switching unit 51 and the switching unit 35 is disabled (“signal generating unit switch” is “OFF”). to a valid state (the "signal generator switch" is "ON").

When the "signal generator switch" is "ON", the battery 36 supplies electric power to the position detector 1 each time the detection signal rises ("signal generator output" is "H") as in FIG. supply ("power adjustment unit output" is "H"). The position detection unit 1 detects rotational position information using power supplied from the battery 36 (“position detection unit detection operation” is “ON”). Further, when the "signal generator switch" is "ON", the battery 36 supplies power to the power detector 57 via the switching element 56 each time the detection signal rises (when the "power detector input" is "H"). The power detection unit 57 uses the power supplied from the battery 36 to detect the state of the battery 36 (“Power detection unit detection operation” is “ON”).

The control unit 61 controls each unit of the encoder device EC using, for example, power supplied from the power supply unit PW. For example, the control unit 61 does not control the switching element 65 of the switching unit 51 in the backup state. In the backup state, the switching element 65 maintains a state in which the connection between the terminal 65a and the terminal 65b is disconnected (the "third switch" is "OFF"). Note that the power supply unit 31 may supply power to the control unit 61 . For example, the control unit 61 may use power supplied from the power supply unit 31 to control at least part of the encoder device EC.

The timing at which the control unit 61 causes the state detection unit 52 (for example, the power detection unit 57) to perform the detection operation is arbitrarily set. The control unit 61 determines the timing of supplying power from the battery 36 to the power detection unit 57 via the switching element 65 by the timing of applying a predetermined voltage to the terminal 65c of the switching element 65 (for example, the timing of executing the switching operation). Controllable. The timing of supplying power from the battery 36 to the power detection unit 57 via the switching element 65 is arbitrarily set.

The control unit 61 may cause the state detection unit 52 to perform the detection operation based on the detection result of the position detection unit 1 . For example, when the position detection unit 1 detects that the rotating body SF has rotated by a preset angle (eg, 360°, 10 rotations), the control unit 61 controls the switching element 65 to detect power. The unit 57 may detect the state of the battery 36 . Further, the control unit 61 may cause the state detection unit 52 to perform the detection operation each time the position detection unit 1 performs the detection operation a predetermined number of times (eg, 100 times, 1000 times). Further, the control unit 61 may cause the state detection unit 52 to perform the detection operation at predetermined intervals (eg, 1 minute, 1 hour, 1 day).

The frequency of the detection operation of the state detection unit 52 in the normal state may be set lower than the frequency of the detection operation of the state detection unit 52 in the backup state. For example, in FIG. 8 (backup state), the power detection unit 57 performs the detection operation four times while the rotating body SF rotates once. For example, as shown in FIG. 7, the control unit 61 may cause the power detection unit 57 to perform the detection operation less frequently than in the backup state (for example, once) during one rotation of the rotating body SF. The frequency of the detection operation of the state detection unit 52 in the normal state may be a preset fixed value. For example, the number of detection operations of the state detection unit 52 in the normal state may be set to a fixed value of one, or may be set to a fixed value of two or more.

The frequency of the detection operation of the state detection unit 52 in the normal state may be a variable value so that it can be changed depending on the usage environment of the user. For example, the control unit 61 sets the frequency of the detection operation of the state detection unit 52 in the normal state based on one or both of the detection result of the state detection unit 52 and the calculation result (life information) of the life calculation unit 53. may For example, when the remaining amount of the battery 36 estimated from the detection result of the state detection unit 52 is the first remaining amount, the control unit 61 sets the frequency of the detection operation of the state detection unit 52 in the normal state to the first frequency. set. When the remaining amount of the battery 36 estimated from the detection result of the state detecting unit 52 is a second remaining amount that is smaller than the first remaining amount, the control unit 61 controls the frequency of the detection operation of the state detecting unit 52 in the normal state. may be set to a second frequency that is higher than the first frequency or a third frequency that is lower than the first frequency.

In the normal state, the control unit 61 may cause the state detection unit 52 to perform the detection operation based on advance notice information that the power supply from the power supply unit PW to the encoder device EC will be stopped. For example, the control unit MC may supply, as the notice information, information indicating that the driving device MTR is to be suspended (for example, shut down) to the control unit 61 of the encoder device EC. Control unit 61 causes state detection unit 52 to perform a detection operation using the reception of the advance notice information from drive device MTR as a trigger, and compares the detection result of state detection unit 52 with the life information calculated by life calculation unit 53 . One or both of them may be output to the outside (for example, control unit MC). When the normal state is switched to the backup state, the control unit 61 causes the state detection unit 52 to perform a detection operation, and calculates one or both of the detection result of the state detection unit 52 and the life information calculated by the life calculation unit 53. , may be output to the outside (eg, control unit MC).

Further, the control unit 61 receives a command (eg, state detection command) from the outside (eg, the control unit MC, an inspection device for inspecting the encoder device EC, a maintenance device), and causes the state detection unit 52 to perform the detection operation. may Further, the control unit 61 receives a command (eg, state output command) from the outside (eg, control unit MC, inspection device, maintenance device), and compares the detection result of the state detection unit 52 and the calculation result of the life calculation unit 53. One or both of may be output to the outside.

The control unit 61 may cause the state detection unit 52 to perform the detection operation by controlling the switching unit 63 . For example, the control unit 61 may intermittently (intermittently, temporarily) set the detection signal of the signal generating unit 33 to valid in the normal state by controlling the switching unit 63 . For example, even if the battery 36 supplies power to the state detection unit 52 (eg, the power detection unit 57) through the switching unit 51 based on the detection signal when the detection signal is set to be valid in the normal state. good. For example, the state detector 52 may detect the state of the battery 36 using power supplied from the battery 36 when the detection signal is set to be valid in the normal state. The encoder device EC does not need to include the switching element 56 when the switching unit 63 controls the state detection unit 52 to perform the detection operation. Also, the switching section 63 may be provided between the signal generating section 33 and the rectifying section 34 . For example, the switching unit 63 may switch whether or not the detection signal is generated by interrupting (opening) a circuit through which the detection signal is transmitted.

[Third embodiment]
Next, a third embodiment will be described. In this embodiment, the same reference numerals are given to the same configurations as those of the above-described embodiment, and the description thereof will be omitted or simplified. FIG. 9 is a diagram showing an encoder device according to the third embodiment. The encoder device EC according to this embodiment includes a timing adjustment section 68 .

The timing adjustment unit 68 relatively adjusts the timing at which the position detection unit 1 detects the position information of the moving unit (for example, the rotating body SF) and the timing at which the state detection unit 52 detects the state of the power supply unit 31. do. The timing adjusting section 68 is arranged, for example, between the signal generating section 33 and the switching section 51 . For example, the timing adjusting section 68 is arranged between the rectifying section 34 and the switching section 51 . The timing adjustment section 68 includes, for example, a delay circuit. For example, the detection signal is input to the switching section 51 later than the switching section 35 . For example, the switching unit 51 switches the circuit from interruption to conduction after the switching unit 35 switches the circuit from interruption to conduction based on the detection signal.

FIG. 10 is a timing chart showing the operation of the encoder device according to the third embodiment. When the detection signal rises ("signal generator output" is "H"), the battery 36 supplies power to the position detector 1 via the switching unit 35 ("power adjuster output" is "H". When the electric power supplied from the battery 36 stabilizes, the detection unit 1 detects the rotational position information (“position detection unit detection operation” is “ON”).

Power is supplied from the battery 36 to the state detection unit 52 (for example, the power detection unit 57 ) with a delay from the position detection unit 1 . The state detection unit 52 starts the detection operation for detecting the state of the battery 36 after the position detection unit 1 starts detection operation of the rotational position information (“Power detection unit detection operation” is “ON”). For example, the power detection unit 57 starts detecting the state of the battery 36 after the position detection unit 1 finishes detecting the rotational position information. The power detection unit 57 completes the operation of detecting the state of the battery 36 while power of a predetermined voltage is being supplied to the position detection unit 1, for example. The power detection unit 57 stores the detection result in the storage unit 24 while power of a predetermined voltage is being supplied to the position detection unit 1 . For example, the timing adjustment unit 68 completes the detection operation of the state detection unit 52 and the storage of the detection result during the period from the completion of the detection operation of the position detection unit 1 to the end of power supply to the position detection unit 1. , the relative timing between the switching operation of the switching unit 51 and the switching operation of the switching unit 35 is adjusted.

The output voltage of the battery 36 may drop due to, for example, the detection operation of the position detector 1 . When detecting the state of the battery 36 during a period that does not overlap with the detection operation of the position detection unit 1, the power detection unit 57 avoids a period in which the state of the battery 36 changes due to the detection operation of the position detection unit 1, for example. , the state of the battery 36 can be detected. When the position detection unit 1 detects the rotational position information before the detection operation of the state detection unit 52, it is possible, for example, to avoid the completion of the detection operation in time for the end of the power supply.

The state detection unit 52 may detect the state of the power supply unit 31 during a period that overlaps at least part of the period during which the position detection unit 1 detects the rotational position information. Moreover, the state detection unit 52 may start detecting the state of the power supply unit 31 before the position detection unit 1 starts detecting the rotational position information. For example, the timing adjustment section 68 may delay the input of the detection signal to the switching section 35 after the input of the detection signal to the switching section 51 .

Further, when the state detection unit 52 stores the detection result in a storage unit (second storage unit) different from the storage unit 24, after the battery 36 stops supplying power to the position detection unit 1, the power supply unit 31 state detection may be terminated. For example, the battery 36 supplies power to the second storage unit via the switching unit 35, and the state detection unit 52 detects the power of the battery 36 while power is being supplied from the battery 36 to the second storage unit. A detection result obtained by detecting the state may be stored in the second storage unit.

[Fourth embodiment]
Next, a fourth embodiment will be described. In this embodiment, the same reference numerals are given to the same configurations as those of the above-described embodiment, and the description thereof will be omitted or simplified. FIG. 11 is a diagram showing an encoder device according to the fourth embodiment. In the present embodiment, the switching section 51 also serves as the switching section 35 shown in FIG. 1 and the like.

FIG. 12 is a diagram showing the circuit configuration of an encoder device according to the fourth embodiment. The state detector 52 (for example, the input terminal 57 a of the power detector 57 ) is connected to the node N<b>4 between the switcher 51 and the power adjuster 59 . When the switching unit 51 switches the circuit to a conductive state, the battery 36 supplies power to the position detection unit 1 via the switching unit 51 and the power adjustment unit 59 . Further, when the switching unit 51 switches the circuit to a conductive state, the battery 36 supplies power to the power detection unit 57 via the switching unit 51 .

[Fifth embodiment]
Next, a fifth embodiment will be described. In this embodiment, the same reference numerals are given to the same configurations as those of the above-described embodiment, and the description thereof will be omitted or simplified. FIG. 13 is a diagram showing an encoder device according to the fifth embodiment. The control unit 61 of the encoder device EC according to this embodiment controls the switching unit 51 based on the generation of the detection signal in the signal generation unit 33 (described later).

The encoder device EC includes a detection unit 71 (eg, power detection unit, power supply detection unit) that detects whether power can be supplied from the power supply unit PW. Detecting unit 71 is connected to node N<b>5 on the path through which power is supplied from power supply unit PW to switching unit 62 . The detection unit 71 detects, for example, the potential of the node N5. The detection unit 71 determines that power can be supplied from the power supply unit PW to the switching unit 62 when the detected potential is equal to or higher than a predetermined level. When determining that power can be supplied from the power supply unit PW to the switching unit 62, the detecting unit 71 controls the switching unit 62 to conduct the terminals 62b and 62c. The detection unit 71 controls the switching unit 62 by supplying the switching unit 62 with a control signal for controlling conduction or interruption between terminals. When the terminal 62 b and the terminal 62 c are switched from the disconnected state to the conductive state, the power supply unit PW supplies power to the position detection unit 1 via the switching unit 62 . Thus, the switching unit 62 switches from the backup state to the normal state.

The detection unit 71 determines that power cannot be supplied from the power supply unit PW to the switching unit 62 when the detected potential is equal to or lower than a predetermined level. When determining that power cannot be supplied from the power supply unit PW to the switching unit 62, the detecting unit 71 controls the switching unit 62 to conduct the terminals 62a and 62c. The detection unit 71 controls the switching unit 62 by supplying the switching unit 62 with a control signal for controlling conduction or interruption between terminals. When the terminal 62a and the terminal 62c are switched from the disconnected state to the conductive state, the power supply unit 31 (eg, battery) supplies power to the position detection unit 1 via the switching unit 62 based on the detection signal. supply. Thus, the switching unit 62 switches from the normal state to the backup state. Note that the switching unit 62 and the detecting unit 71 may be the electromagnetic switches described in the first embodiment.

The control unit 61 controls the switching unit 51 using power supplied from the power supply unit PW in the normal state. Also, in the backup state, the control unit 61 controls the switching unit 51 using power supplied from the power supply unit 31 (eg, the battery 36). The encoder device EC according to this embodiment includes a switching unit 72 that switches whether to supply power from the power supply unit 31 to the control unit 61 . The switching unit 72 switches between a state in which power is supplied from the power supply unit PW to the control unit 61 and a state in which power is supplied from the power supply unit 31 .

The switching unit 72 includes terminals 72a, 72b, and 72c. Terminal 72 a is connected to an electrode of battery 36 . Terminal 72b is connected to power supply unit PW. The terminal 72 c is connected to the power terminal 61 a of the control section 61 . The switching unit 72 can switch between a state in which the terminals 72a and 72c are electrically connected and a state in which the terminals 72b and 72c are electrically connected. Electric power is supplied from the battery 36 to the control unit 61 when the terminals 72 a and 72 c are electrically connected. Electric power is supplied from the power supply unit PW to the control unit 61 when the terminals 72b and 72c are electrically connected.

The encoder device EC includes a detection unit 73 (eg, power detection unit, power supply detection unit) that detects whether power can be supplied from the power supply unit PW. The detection unit 73 is connected to a node N6 on the path through which power is supplied from the power supply unit PW to the switching unit 72 . The detection unit 73 detects, for example, the potential of the node N6. The detection unit 73 determines that power can be supplied from the power supply unit PW to the switching unit 72 when the detected potential is equal to or higher than a predetermined level. When determining that power can be supplied from the power supply unit PW to the switching unit 72, the detecting unit 73 controls the switching unit 72 to conduct the terminals 72b and 72c. The detection unit 73 controls the switching unit 72 by supplying the switching unit 72 with a control signal for controlling conduction or interruption between terminals.

The detection unit 73 determines that power cannot be supplied from the power supply unit PW to the switching unit 72 when the detected potential is equal to or lower than a predetermined level. When determining that power cannot be supplied from the power supply unit PW to the switching unit 72, the detecting unit 73 controls the switching unit 72 to conduct the terminals 72a and 72c. The detection unit 73 controls the switching unit 72 by supplying the switching unit 72 with a control signal for controlling conduction or interruption between terminals. When the terminal 72 a and the terminal 72 c are switched to the conductive state, the power supply section 31 (eg, battery) supplies power to the control section 61 via the switching section 72 . Note that the switching unit 72 and the detecting unit 73 may be the electromagnetic switches described in the first embodiment.

An input terminal 61b of the control section 61 is connected to a path through which a detection signal from the signal generating section 33 is transmitted. The input terminal 61b is connected to the node N7 of the wiring PL, for example. An output terminal 61 c of the control section 61 is connected to a terminal 56 c (eg, gate electrode) of the switching element 56 in the switching section 51 . The control unit 61 supplies (outputs) a control signal from the output terminal 61c to the switching unit 51, triggered by the potential of the input terminal 61b exceeding a predetermined level when the detection signal of the signal generation unit 33 rises. do.

When the control unit 61 supplies a control signal to the switching unit 51 , the power supply unit 31 (eg, battery 36 ) supplies power to the state detection unit 52 (eg, power detection unit 57 ) via the switching unit 51 . For example, the switching unit 51 brings the switching element 56 into a conductive state between the terminals 56 a and 56 b based on the control signal, and the power supply unit 31 supplies power to the state detection unit 52 . State detection unit 52 detects the state of power supply unit 31 using the power supplied from power supply unit 31 . Note that the control unit 61 may include the state detection unit 52 . In the above-described configuration, in the normal state or the backup state, the control unit 61 uses the power supplied from the power supply unit 31 to set the state of the power supply unit 31 to the state of the signal generation unit 33 (from the signal generation unit 33 A normal state or an abnormal state (whether or not the detection signal is normally output) may be detected. For example, if the detection signal is not input to the input terminal 61b within a predetermined period of time during which power is supplied from the power supply unit 31 (battery 36), the control unit 61 controls the signal generation unit 33 or the path through which the detection signal is transmitted. may be detected (determined) as being in an abnormal state.

Note that the control section 61 may supply the control signal to the switching section 51 based on the number of times the potential of the input terminal 61b becomes equal to or higher than a predetermined level. In this case, the control section 61 may count the number of times the potential of the input terminal 61b has risen to a high level, and output the control signal to the switching section 51 when the count reaches a predetermined value. Further, the control unit 61 controls the switching unit 51 every time the detection signal rises a predetermined number of times to detect the state of the power supply unit 31 (eg, battery 36) by the state detection unit 52 (eg, power detection unit 57). ) may be detected.

Further, the control unit 61 switches between a first mode in which the state detection unit 52 performs the detection operation based on the detection signal and a second mode in which the state detection unit 52 performs the detection operation at an arbitrarily set timing. It may be possible. For example, the control unit 61 may switch between the first mode and the second mode when receiving a command from the outside (for example, the control unit MC of the driving device MTR) in the normal state. The control unit 61 may set the second mode as the default in the normal state, and cause the state detection unit 52 to perform the detection operation at an arbitrarily set timing. Then, when receiving a command from the outside, the control unit 61 may temporarily change the second mode to the first mode and cause the state detection unit 52 to perform the detection operation based on the detection signal.

Note that the power supply unit 31 may supply power to the control unit 61 based on the detection signal. For example, the power terminal 61a of the control section 61 may be connected to the output terminal of the switching section 35 (for example, the terminal 58b of the switching element 58). Also, the power terminal 61 a of the control section 61 may be connected to the output terminal 59 b of the power adjustment section 59 . The encoder device EC does not need to include the switching unit 72 and the detecting unit 73 when the power supply unit 31 supplies power to the control unit 61 based on the detection signal.

Note that the encoder device EC does not have to switch whether power is supplied from the power supply unit 31 to the control unit 61 . For example, the power terminal 61a of the control unit 61 may be constantly connected to the power supply unit 31 (eg, electrodes of the battery 36). In this case, the encoder device EC does not need to include the switching section 72 and the detecting section 73 . The switching section 62 and the detecting section 71 may also serve as the switching section 72 and the detecting section 73 . For example, the terminal 62c of the switching section 62 may be connected to the power terminal 61a of the control section 61 and also connected to the position detection section 1 .

[Driving device]
Next, the driving device according to the embodiment will be described. FIG. 14 is a diagram showing a driving device according to the embodiment; In the following description, the same reference numerals are given to components that are the same as or equivalent to those of the above-described embodiment, and descriptions thereof are omitted or simplified. Drive device MTR is, for example, a motor device including an electric motor. The drive device MTR has a rotating body SF, a main body MB (driving section) that rotationally drives the rotating body SF, and an encoder device EC that detects rotational position information of the rotating body SF.

The rotating body SF has a load-side end SFa and a non-load-side end SFb. The load side end SFa is connected to another power transmission mechanism such as a speed reducer. A scale S is fixed to the anti-load side end portion SFb via a fixing portion. The encoder device EC has a scale S fixed to the rotating body SF and is attached to the main body MB of the driving device MTR. In the driving device MTR, the controller MC shown in FIG. 1 and the like controls the main body MB using the detection result of the encoder device EC. The encoder device EC according to the embodiment can stably operate, and the driving device MTR can also stably operate.

The drive device MTR is not limited to a motor device, and may be another drive device having a shaft portion that rotates using hydraulic or pneumatic pressure. Further, the driving device MTR may not be a device that rotates the moving portion, and may be, for example, a linear motor that linearly moves the moving portion.

[Stage device]
Next, a stage device according to an embodiment will be described. FIG. 15 is a diagram showing a stage device according to the embodiment; In the following description, the same reference numerals are given to components that are the same as or equivalent to those of the above-described embodiment, and descriptions thereof are omitted or simplified. The stage device STG includes a stage ST (moving object) that is moved by a driving device MTR.

The stage ST is attached to the load-side end SFa of the rotating body SF of the driving device MTR. The stage device STG may be configured to linearly move the stage in one direction by, for example, a one-dimensional linear motor. Further, the stage device STG may be configured to move the stage in two directions by a plurality of one-dimensional linear motors or two-dimensional linear motors (eg, planar motors).

The stage device STG drives the driving device MTR to rotate the rotating body SF. The stage ST is rotated by power transmitted via the rotating body SF. For example, a reducer or the like is arranged between the load-side end SFa of the drive device MTR and the stage ST. The encoder device EC can detect the rotational position information of the rotating body SF, and the stage device STG can detect the angular position of the stage ST, for example, based on the detection result of the encoder device EC. The encoder device EC according to the embodiment can stably operate, and the stage device STG can also stably operate.

[Robot device]
Next, a robot device according to an embodiment will be described. FIG. 16 is a diagram showing a robot apparatus according to an embodiment; FIG. 16 shows a portion (joint portion) of the robot device RBT. In the following description, the same reference numerals are given to components that are the same as or equivalent to those of the above-described embodiment, and the description is omitted or simplified.

The robot device RBT includes a first arm AR1, a second arm AR2, and a joint JT. The first arm AR1 is connected to the second arm AR2 via the joint JT. The first arm AR1 has an arm portion 101, a bearing 101a, and a bearing 101b. The second arm AR2 has an arm portion 102 and a connecting portion 102a. The connecting portion 102a is arranged between the bearing 101a and the bearing 101b in the joint portion JT. The connecting portion 102a is provided integrally with the rotating body SF2. The rotating body SF2 is inserted in both the bearing 101a and the bearing 101b at the joint JT. The end of the rotating body SF2 that is inserted into the bearing 101b penetrates the bearing 101b and is connected to the speed reducer RG.

A load-side end of the rotating body SF of the driving device MTR (see FIG. 14) is connected to the speed reducer RG. The speed reducer RG reduces the rotation of the rotating body SF of the driving device MTR (see FIG. 14) at a predetermined reduction ratio and transmits it to the rotating body SF2. An encoder device EC is attached to the opposite end of the rotating body SF of the driving device MTR (see FIG. 14).

The robot device RBT drives the driving device MTR to rotate the rotating body. The rotation of this rotating body is transmitted to the rotating body SF2 via the reduction gear RG. The rotation of the rotating body SF2 rotates the connecting portion 102a integrally, and the second arm AR2 rotates with respect to the first arm AR1. At that time, the encoder device EC detects rotational position information of the rotating body. The robot device RBT can detect the angular position of the second arm AR2, for example, by using the detection result of the encoder device EC. The encoder device EC according to the embodiment can stably operate, and the robot device RBT can also stably operate.

Note that the robot device RBT according to the embodiment is not limited to the configuration described above, and may be various robot devices having a plurality of joints (for example, a dual-arm multi-axis robot). In the case of a robot device having a plurality of joints, the encoder device EC of this embodiment is arranged at each joint (each axis) or part of the joints of the robot device.

It should be noted that the technical scope of the present invention is not limited to the aspects described in the above embodiments and the like. One or more of the requirements described in the above embodiments and the like may be omitted. Also, the requirements described in the above-described embodiments and the like can be combined as appropriate. In addition, as long as it is permitted by law, the disclosure of Japanese Patent Application 2018-061276 and all the documents cited in the above-described embodiments and the like are incorporated into the description of the text.

Reference Signs List 1 Position detector 1A Angle detector 1B Multi-rotation detector S Scale 31 Power supply 33 Signal generator 36 Battery 51 Switching unit 52 State detection unit 53 Lifespan calculation unit 56 Switching element 58 Switching element 61 Control unit 62 Switching unit (second switching unit) 64 Switching element 65 Switching element 68 Timing adjustment unit EC Encoder device PW Power supply unit SF Rotating body, ST... Stage, MTR... Driving device, RBT... Robot device, STG... Stage device

Claims (22)

a position detection unit that detects position information of the moving unit;
a signal generating unit that generates a detection signal based on the movement of the moving unit;
a state detection unit that detects the state of the power supply unit based on the power supplied from the power supply unit based on the detection signal;
a first switching unit that switches whether power is supplied from the power supply unit to the state detection unit based on the detection signal;
An encoder device comprising: a timing adjustment section that relatively adjusts timing at which the position detection section detects the position information and timing at which the state detection section detects the state of the power supply section. 2. The encoder device according to claim 1, further comprising a second switching section that switches whether power is supplied from said power supply section to said position detection section based on said detection signal. 3. The encoder device according to claim 2, wherein said timing adjusting section is arranged between said signal generating section and said first switching section. 4. The encoder device according to claim 2, wherein the timing adjusting section inputs the detection signal to the first switching section after the second switching section. The timing adjustment unit completes the detection operation of the state detection unit and the storage of the detection result during a period from the completion of the detection operation of the position detection unit to the end of power supply to the position detection unit. The encoder device according to any one of claims 2 to 4, wherein the relative timing between the switching operation of the first switching unit and the switching operation of the second switching unit is adjusted so that . 4. The encoder device according to claim 2, wherein said timing adjusting section inputs said detection signal to said second switching section with a delay from said first switching section. 7. The encoder device according to claim 6, wherein said state detection section starts detecting the state of said power supply section before said position detection section starts detecting said position information. 8. The state detector according to any one of claims 2 to 7, wherein the state detector detects the state of the power supply unit during a period that overlaps at least part of a period during which the position detector detects the position information. Encoder device according to. The encoder device according to any one of claims 2 to 8, wherein said timing adjustment section includes a delay circuit. The position detection unit detects the position information from the power supplied from the power supply unit in a state where power supply from a power supply unit different from the power supply unit is cut off,
The first switching unit determines whether power is supplied from the power supply unit to the state detection unit based on the detection signal in a state in which power supply from the power supply unit to the position detection unit is cut off. 10. Encoder device according to any one of claims 2 to 9, for switching. The first switching unit includes a switching element provided in a path for supplying power from the power supply unit to the state detection unit,
11. The encoder device according to claim 10 , wherein a voltage is applied to the gate electrode of said switching element by said detection signal. The position detection unit detects the position information by power supplied from a power supply unit different from the power supply unit,
The first switching unit supplies power from the power supply unit to the state detection unit based on a control signal supplied from the control unit in a state where power is supplied from the power supply unit to the position detection unit. 12. The encoder device according to any one of claims 1 to 11 , wherein the presence or absence of is switched. The first switching unit includes a switching element provided in a path for supplying power from the power supply unit to the state detection unit,
13. The encoder device according to claim 12 , wherein a voltage is applied to the gate electrode of said switching element by said control signal. 14. Encoder apparatus according to any one of the preceding claims, wherein the power supply comprises a battery. 15. The encoder device according to claim 14 , further comprising a life calculation unit that calculates life information of said battery based on the detection result of said state detection unit. A storage unit that stores the detection result of the state detection unit using power supplied from the battery,
16. The encoder device according to claim 15 , wherein said life calculation section calculates life information of said battery based on the detection result of said state detection section stored in said storage section. 17. The encoder device according to claim 15 , wherein said lifespan calculator calculates lifespan information of said battery using power supplied from a power source different from said battery. The position detection unit is
In a normal state in which power is supplied from the power supply unit , the position information is detected by the power supplied from the power supply unit;
detecting the position information by the power supplied from the power supply unit in a backup state in which the power supply from the power supply unit is interrupted;
The encoder device according to any one of claims 1 to 17 , comprising a third switching unit that switches between the normal state and the backup state. The state of the power supply may be the state of the environment in which the power supply is used, the state of operation of the power supply , the state of electrical parameters of the power supply , or the state of self-discharge of the power supply. 19. An encoder device according to any one of claims 1 to 18, comprising a state. an encoder device according to any one of claims 1 to 19 ;
and a driving unit that drives the moving unit. a driving device according to claim 20 ;
and a stage that is moved by the driving device. a driving device according to claim 20 ;
and an arm that is moved by the driving device.

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