JP6910201B2 - Spindle unit - Google Patents

Description

The present invention relates to a spindle unit including a spindle on which a processing tool for processing a workpiece is mounted.

Conventionally, as a processing device for processing a workpiece such as a wafer, a grinding device for thinning the workpiece to a target finish thickness has been known, and a surface for improving the flatness of the surface of the workpiece is known. Polishing equipment for finishing is known. In the grinding device, a grinding wheel in which grindstones are arranged in an annular shape is mounted on a spindle unit and rotated to grind a workpiece. In the polishing apparatus, a polishing pad is arranged on a disk-shaped base, and the base is attached to a spindle unit and rotated to polish a work piece.

Here, as shown in Patent Document 1, a grinding and polishing apparatus including both a grinding means for grinding a work piece and a polishing means for polishing a work piece after grinding is also known. The grinding and polishing apparatus includes two spindle units, for example, a grinding wheel is attached to a first spindle unit, and a polishing pad is attached to a second spindle unit. Further, the grinding and polishing apparatus includes a plurality of holding tables for holding the workpiece and a turntable in which the plurality of holding tables are arranged side by side in the circumferential direction. When machining with a grinding machine, by rotating the turntable intermittently, the holding tables are sequentially positioned at the machining positions directly below the first spindle unit and the second spindle unit to form the workpiece. Grinding and polishing are performed.

Japanese Unexamined Patent Publication No. 2005-153090

However, in the above-mentioned grinding and polishing apparatus, the number of spindle units is two, and it is necessary to move the holding table to the processing position corresponding to the two spindle units, which not only complicates the configuration for that purpose. There is a problem that the entire device becomes large.

The present invention has been made in view of the above points, and one of the objects of the present invention is to provide a spindle unit capable of downsizing and simplifying the configuration of the entire processing apparatus including the spindle unit.

The spindle unit of one aspect of the present invention includes a spindle that connects a mount having a mounting surface for mounting a processing tool for processing a workpiece to one end, and a casing that rotatably supports the spindle via a bearing. The mount is a spindle unit equipped with a disc mount that connects to one end of the spindle with its axis aligned with the center, and an annular ring centered on the center of the disc mount on the outside of the disc mount. A mount and a moving means for moving the annular mount in the axial direction of the spindle are provided, and the moving means accommodates an annular annular piston connected to the annular mount and aligned with the axis of the spindle, and an annular piston. A cylinder that allows the annular piston to move in the annular accommodation chamber in the axial direction of the spindle, a first air supply port and a second air supply port that supply air to the cylinder accommodation chamber, an annular mount, and an annular piston. A plurality of rods connecting and extending in the axial direction of the spindle, a plurality of rod-shaped guides connecting the cylinder and the disc mount and extending in the axial direction of the spindle, and an annular mount through which the guides penetrate. A plurality of guide holes formed are provided, and air is supplied from the first air supply port to move the annular piston toward one end of the spindle, and the guide holes are aligned with the moving direction of the annular piston along the guides. Move in the direction so that the mounting surface of the annular mount protrudes from the mounting surface of the disc mount, supply air from the second air supply port, move the annular piston toward the other end of the spindle, and guide holes along the guide. Moves in the same direction as the movement direction of the annular piston so that the mounting surface of the disc mount protrudes from the mounting surface of the annular mount. It is characterized by making it possible to selectively use and.

According to this configuration, since the processing tools mounted on different mounts can be selectively used, different processing by the two types of processing tools can be selectively performed by a single spindle unit. As a result, in the processing apparatus including the spindle unit, the number of spindle units installed can be reduced, and the mechanism for moving between the processing positions of the two spindle units can be omitted. As a result, the configuration of the processing apparatus can be simplified, the number of parts can be reduced, and the weight and size of the entire processing apparatus can be reduced. Moreover, since the annular mount is moved by the annular piston, the annular mount is supported by the annular piston at a position away from the axis. Therefore, it is possible to prevent the annular mount from tilting from a desired position due to the force generated during machining, as compared with the case where it is supported at the axial center position. As a result, it is possible to stably maintain good processing accuracy by the processing tool attached to the annular mount.

In the spindle unit of the present invention, the bearing may form an axial air bearing and a radial air bearing by supplying air, and the axial air bearing may be formed by injecting air onto the upper surface of the cylinder.

Further, in the spindle unit of the present invention, the air supply means for supplying air to the first air supply port and the second air supply port of the cylinder is a rotary joint connected to the other end of the spindle and the spindle. A first air supply path that is arranged in the shaft and communicates the first air supply port and the air supply source, and a second air supply path that communicates the second air supply port and the air supply source. You should prepare.

Further, the spindle unit of the present invention may be provided with a machining fluid supply path which is arranged in the shaft of the spindle and supplies the machining fluid to the machining tool.

Further, in the spindle unit of the present invention, the rotary joint includes a cylindrical rotating shaft and a housing forming an air bearing that rotatably supports the rotating shaft, and the rotating shaft is within the thickness of forming the cylinder. A housing including a third air supply path extending in the axial direction and connecting to the first air supply path of the spindle and a fourth air supply path connecting to the second air supply path of the spindle. Is supplied from a bearing air supply path formed on the outer wall by ejecting air supplied from the bearing air supply port formed on the outer wall from the inner wall to form an air bearing and rotatably support the rotating shaft, and a first supply port formed on the outer wall. A second communication path for communicating the generated air to the third air supply path of the rotary shaft and a second communication path for communicating the air supplied from the second supply port formed on the outer wall to the fourth air supply path of the rotary shaft. It is preferable to provide a continuous passage of the above and an exhaust groove for exhausting air formed on the inner wall to form an air bearing.

According to the present invention, it is possible to reduce the size of the entire processing apparatus including the spindle unit and simplify the configuration.

It is a vertical sectional view of the spindle unit which concerns on embodiment. It is a vertical cross-sectional view of a part of a rotary joint and a spindle. It is a schematic perspective view of a rotating shaft. It is explanatory drawing in the case of using a polishing pad. It is explanatory drawing in the case of using a grinding wheel. It is explanatory drawing schematic perspective view which shows the state in which the annular mount protrudes. It is explanatory drawing schematic perspective view which shows the state which the disk mount protrudes.

Hereinafter, the spindle unit according to the present embodiment will be described with reference to the accompanying drawings. FIG. 1 is a vertical cross-sectional view of the spindle unit according to the embodiment.

As shown in FIG. 1, the spindle unit 10 includes a spindle 11 whose axial extension direction is directed in the vertical direction, and a casing 12 that surrounds and rotatably supports the spindle 11. Further, the spindle unit 10 includes a mount 13 connected to the lower end of the spindle 11 at one end, and a rotary joint 15 connected to the upper end of the spindle 11 at the other end. A cylinder air supply source A is connected to the rotary joint 15 via a solenoid valve V.

The spindle 11 is arranged with a first shaft portion 11a forming an upper region and connecting the motor 16 of the rotation drive source and a large-diameter bearing plate 11b below the first shaft portion 11a. It includes a shaft portion 11c. Further, a grinding fluid supply path (machining fluid supply path) 11d for supplying the grinding fluid (machining fluid) is formed inside the spindle 11 at the center of the shaft. A first air supply path and a second air supply path, which will be described later, are arranged and formed at positions surrounding the grinding fluid supply path 11d.

The motor 16 includes a rotor 16a provided on the first shaft portion 11a of the spindle 11 and a stator 16c provided on the inner peripheral surface of the casing 12 via a cooling jacket 16b. A large number of cooling water channels are formed in the cooling jacket 16b, cooling water is supplied from the cooling water supply unit 12A provided in the casing 12, and cooling water is discharged to the outside of the casing 12 from the cooling water discharge unit 12B. NS.

The casing 12 has a bearing plate 11b between the upper forming portion 12a surrounding the motor 16, the lower forming portion 12b surrounding the second shaft portion 11c of the spindle 11, and the upper forming portion 12a and the lower forming portion 12b. It is provided with an intermediate forming portion 12c located on the outer peripheral side of the above. Here, the spindle 11 is supported by the casing 12 via the bearing 18. The bearing 18 forms an upper axial bearing 20, a lower axial bearing 21, and a radial bearing 22 by supplying air.

The upper axial bearing 20 is formed by a bearing plate 11b and a lower forming portion 12b of a casing 12 facing below the bearing plate 11b. A large number of spouts 20a are formed on the upper surface of the lower forming portion 12b, and high-pressure air is blown from the spouts 20a to the lower surface of the bearing plate 11b. As a result, air flows between the lower surface of the bearing plate 11b and the upper surface of the lower forming portion 12b, and a state in which a slight gap is formed between them is maintained and functions as an axial bearing.

The lower axial bearing 21 is formed by a cylinder 30 constituting the mount 13 and a lower forming portion 12b of the casing 12 facing above the cylinder 30. A large number of spouts 21a are also formed on the lower surface of the lower forming portion 12b, and high-pressure air is blown from the spouts 21a to the upper surface of the cylinder 30. As a result, air flows between the upper surface of the cylinder 30 and the lower surface of the lower forming portion 12b, and a state in which a slight gap is formed between them is maintained and functions as an axial bearing.

The radial bearing 22 is formed by the second shaft portion 11c of the spindle 11 and the inner peripheral surface of the lower forming portion 12b of the casing 12 that faces in the radial direction on the outer circumference of the second shaft portion 11c. A large number of spouts 22a are also formed on the inner peripheral surface of the lower forming portion 12b, and high-pressure air is blown from the spouts 22a to the outer peripheral surface of the second shaft portion 11c. As a result, air flows between the outer peripheral surface of the second shaft portion 11c and the inner peripheral surface of the lower forming portion 12b, and a state in which a slight gap is formed between them is maintained and functions as a radial bearing. Will be.

Each of the spouts 20a, 21a, 22a is connected to a flow path 23 formed in the lower forming portion 12b. The flow path 23 is connected to a high-pressure air source (not shown) through the flow path 24 in the intermediate forming portion 12c, and high-pressure air supplied from the high-pressure air source can be ejected at the ejection ports 20a, 21a, and 22a. ing.

The mount 13 includes a moving means 26 connected to the lower end of the spindle 11, a disk mount 27 connected to the lower end of the moving means 26, and an annular mount 28 located outside the disk mount 27. There is.

The moving means 26 is formed in a cylinder 30 having a stepped columnar shape composed of an upper columnar portion and a lower columnar portion having a diameter smaller than that of the upper columnar portion formed below the upper columnar portion, and in the upper columnar portion of the cylinder 30. It includes an annular piston 32 that is housed in the annular storage chamber 31 and is movable in the vertical direction, and a rod 33 that extends downward from the annular piston 32. Although only one rod 33 is shown in FIG. 1, a plurality of rods 33 are provided at equal angles (for example, 120 °) in the circumferential direction of the annular piston 32.

The cylinder 30 has a shape including a large diameter portion 30a formed upward and formed to have substantially the same outer diameter as the lower forming portion 12b of the casing 12, and a small diameter portion 30b connected to the lower end of the large diameter portion 30a. Is formed in. High-pressure air from the ejection port 21a of the lower axial bearing 21 is blown onto the upper surface of the large-diameter portion 30a, and the large-diameter portion 30a is provided so as to function as a bearing plate. A rod 33 connected to the annular piston 32 projects from the lower surface of the large diameter portion 30a, and the lower end of the rod 33 is fixed to the upper surface of the annular mount 28. Therefore, the annular piston 32 is connected to the annular mount 28 via the rod 33.

Here, a first air supply port 35 is formed on the upper surface of the accommodation chamber 31, and a second air supply port 36 is formed on the lower surface of the accommodation chamber 31. By supplying air to the accommodation chamber 31 from the first air supply port 35, the pressure in the space above the annular piston 32 in the accommodation chamber 31 rises and the annular piston 32 is moved downward. On the other hand, by supplying air to the accommodation chamber 31 from the second air supply port 36, the pressure in the space below the annular piston 32 in the accommodation chamber 31 rises and the annular piston 32 is moved upward (see FIG. 5).

The disk mount 27 is fixed to the lower end surface of the small diameter portion 30b of the cylinder 30, in other words, is connected to the lower end of the spindle 11 with the cylinder 30 interposed therebetween. A rod-shaped guide 38 extending in the vertical direction is provided between the disk mount 27 and the lower surface of the large diameter portion 30a of the cylinder 30. Although only one guide 38 is shown in FIG. 1, a plurality of guides 38 are provided in the circumferential direction of the disk mount 27, for example, they are arranged in the middle of adjacent rods 33. A guide hole 28a through which the guide 38 penetrates is formed in the annular mount 28, and the vertical movement of the annular mount 28 is guided by the vertical movement of the guide hole 28a along the guide 38.

The lower surface of the disk mount 27 is formed as a mounting surface, and a grinding wheel (processing tool) 40 for grinding a plate-shaped workpiece is mounted. A large number of grinding wheels 41 are arranged in an annular shape on the grinding wheel 40. The disc mount 27 and the grinding wheel 40 are formed with flow paths 27a and 40a for the grinding fluid (processing fluid). The flow paths 27a and 40a communicate with each other, the flow path 27a of the disk mount 27 also communicates with the flow path 30c formed in the cylinder 30, and the flow path 30c of the cylinder 30 communicates with the spindle 11. It communicates with the grinding fluid supply path 11d of. The upper end (upstream end) of the grinding fluid supply path 11d is connected to a grinding fluid supply source (working fluid supply source) (not shown) through a flow path for grinding fluid described later, and the grinding fluid supply passage 11d and the respective channels 30c and 27a are connected. , 40a, the grinding fluid flows out from the downstream end of the flow path 40a of the grinding wheel 40. As a result, during the grinding process, the grinding wheel 41 and the workpiece are cooled by the grinding fluid, and the grinding debris is washed away from the upper surface of the workpiece together with the grinding fluid.

The small diameter portion 30b of the cylinder 30 penetrates through the opening inside the annular mount 28 so as to be non-contact. The lower surface of the annular mount 28 is formed as a mounting surface, and an annular polishing pad (processing tool) 43 for polishing an workpiece is mounted via an annular base 44 and a platen 45. The inner diameter dimensions of the polishing pad 43, the base 44, and the platen 45 are formed to be larger than the outer diameter dimensions of the disk mount 27 and the grinding wheel 40. Therefore, the disk mount 27 and the grinding wheel 40 are housed inside the polishing pad 43, the base 44, and the platen 45 without contacting each other, and the polishing pad 43 can move relative to the grinding wheel 40 in the vertical direction.

Here, the center position (axial center position) of each of the disk mount 27 and the annular mount 28 is arranged so as to be oriented in the vertical direction and coincide with the central position (axial center position) of the spindle 11. Therefore, the positional relationship is such that the central positions of those configurations match.

FIG. 2 is a vertical cross-sectional view of a part of the rotary joint and the spindle. As shown in FIG. 2, in the spindle 11, three air supply paths 11e and 11f (one not shown) are arranged and formed at 120 ° intervals at positions surrounding the machining fluid supply path 11d. .. In the present embodiment, one of the three air supply paths is a first air supply path 11e, the other one is a second air supply path 11f, and the remaining one is a spare supply path. Not used. The air supply paths 11e and 11f extend parallel to the axial direction of the spindle 11. Here, the air supply means 50 includes the first air supply path 11e, the second air supply path 11f, and the rotary joint 15.

The first air supply path 11e communicates with the flow path 30d formed in the cylinder 30 to supply air to the first air supply port 35. The second air supply path 11f communicates with the flow path 30e formed in the cylinder 30 to supply air to the second air supply port 36.

The rotary joint 15 includes a tubular rotating shaft 51 and a housing 52 that rotatably supports the rotating shaft 51.

The lower end of the rotating shaft 51 is formed in a flange shape and is connected to the upper end of the spindle 11, so that the spindle 11 and the rotating shaft 51 can rotate integrally around the axis. The rotating shaft 51 includes a grinding fluid flow path 51a formed at the axial center position as an internal space of the cylinder, and the grinding fluid flow path 51a communicates with the grinding fluid supply path 11d of the spindle 11. The grinding fluid flow path 51a is connected to a grinding fluid supply source (working fluid supply source) (not shown).

FIG. 3 is a schematic perspective view of the rotation axis. As shown in FIGS. 2 and 3, the rotating shaft 51 has three air supply passages 51b, 51c, and 51d at 120 ° intervals at positions surrounding the grinding fluid flow path 51a (one is not in FIG. 3). (Shown) is arranged and formed. One of the three air supply paths is a third air supply path 51b, the other one is a fourth air supply path 51c, and the remaining one is a spare supply path 51d. Not used in. Each of the air supply paths 51b to 51d extends parallel to the axial direction within the thickness forming the cylinder of the rotating shaft 51. The third air supply path 51b is connected to the first air supply path 11e of the spindle 11, and the fourth air supply path 51c is connected to the second air supply path 11f of the spindle 11.

On the outer peripheral surface of the rotating shaft 51, a first peripheral groove 51e, a second peripheral groove 51f, and a spare peripheral groove 51g are formed as three peripheral grooves. Of these peripheral grooves, the first peripheral groove 51e located at the center communicates with the third air supply path 51b inside the rotating shaft 51, and the upper second peripheral groove 51f is inside the rotating shaft 51. It communicates with the air supply path 51c of 2. The lower spare peripheral groove 51g communicates with the spare supply path 51d, but is not used in the present embodiment.

In the left side portion of the housing 52 in FIG. 2, five flow paths are formed vertically arranged side by side. Among these flow paths, the flow path located third from the top is referred to as the first communication passage 53. The first communication passage 53 communicates with the first peripheral groove 51e at the inner wall of the housing 52, and communicates with the third air supply path 51b through the first peripheral groove 51e. The first communication passage 53 is formed on the outer wall side of the housing 52 as a first supply port 53a to which air is supplied, and the first supply port 53a is connected to the cylinder air supply source A via the solenoid valve V. Be connected. Further, the first communication passage 53 is opened to the atmosphere by the solenoid valve V.

Of the five flow paths in the housing 52, the flow path located second from the top is referred to as the second communication passage 54. The second communication passage 54 communicates with the second peripheral groove 51f at the inner wall of the housing 52, and communicates with the fourth air supply path 51c through the first peripheral groove 51e. The second communication passage 54 is formed on the outer wall side of the housing 52 as a second supply port 54a to which air is supplied, and the second supply port 54a is connected to the cylinder air supply source A via the solenoid valve V. Be connected. Further, the second communication passage 54 is opened to the atmosphere by the solenoid valve V.

Of the five flow paths in the housing 52, the fourth flow path from the top is referred to as a spare communication passage 55. The spare communication passage 55 communicates with the third peripheral groove 51g at the inner wall of the housing 52, and communicates with the spare supply path 51d (see FIG. 3) through the third peripheral groove 51g. In the present embodiment, the spare passage 55 is closed by a plug or the like on the outer wall side of the housing 52.

Of the five flow paths in the housing 52, the uppermost and lowest flow paths are the upper bearing air supply path (bearing air supply path) 57 and the lower bearing air supply path (bearing air supply path) 58. .. The upper bearing air supply path 57 and the lower bearing air supply path 58 are formed with the outer wall side of the housing 52 as the upper bearing air supply port (bearing air supply port) 57a and the lower bearing air supply port (bearing air supply port) 58a. do. The upper bearing air supply path 57 and the lower bearing air supply path 58 are formed with the inner wall side of the housing 52 as ejection ports 57b and 58b, and high-pressure air is blown from the ejection ports 57b and 58b to the outer peripheral surface of the rotating shaft 51. .. The upper bearing air supply path 57 and the lower bearing air supply path 58 are connected to a high pressure air source (not shown) through the upper bearing air supply port 57a and the lower bearing air supply port 58a. As a result, the high-pressure air supplied from the high-pressure air source can be ejected from the ejection ports 57b and 58b to the outer peripheral surface of the rotating shaft 51. Therefore, air flows between the outer peripheral surface of the rotating shaft 51 and the inner wall of the housing 52, and a state in which a slight gap is formed between them is maintained and functions as a radial bearing.

In the inner wall of the housing 52, annular exhaust grooves 52a and 52b extending in the circumferential direction of the inner wall are formed at the lower adjacent position in the upper bearing air supply path 57 and the upper adjacent position in the lower bearing air supply path 58. Air blown from adjacent outlets 57b and 58b flows into these exhaust grooves 52a and 52b, and this air flow also contributes to the function as the radial bearing described above.

Here, in the inner wall of the housing 52, it extends in the circumferential direction of the inner wall between the first communication passage 53 and the second communication passage 54 and also between the first communication passage 53 and the spare communication passage 55. An annular exhaust grooves 52c and 52d are formed. A part of the air supplied to the first communication passage 53 and the second communication passage 54 flows into the adjacent exhaust grooves 52a, 52c, 52d, and this air flow also functions as the radial bearing described above. Will contribute.

The exhaust grooves 52a to 52d communicate with the exhaust flow path 60 formed on the right side in FIG. 2 from the inner wall of the housing 52. The exhaust flow path 60 discharges the air flowing from the exhaust grooves 52a to 52d to the outside of the apparatus.

A flange-shaped bearing plate 61 is formed on the upper end side of the rotating shaft 51. The housing 52 is formed in a shape that surrounds both the upper and lower sides of the bearing plate 61. The housing 52 is formed with outlets 62 for injecting high-pressure air on both the upper and lower surfaces of the bearing plate 61. The spout 62 communicates with an axial bearing air supply path (bearing air supply path) 63 formed in the housing 52, and the axial bearing air supply path 63 uses the outer wall side of the housing 52 as the axial bearing air supply port 63a. Form. The axial bearing air supply path 63 is connected to a high pressure air source (not shown) through the axial bearing air supply port (bearing air supply port) 63a. As a result, the high-pressure air supplied from the high-pressure air source is blown from the ejection port 62 onto the outer peripheral surface of the bearing plate 61, and a state in which a slight gap is formed between the bearing plate 61 and the inner surface of the housing 52 is maintained. It will function as an axial bearing.

Subsequently, a method of switching between the grinding wheel 40 and the polishing pad 43 used in the spindle unit 10 described above will be described with reference to FIGS. 4 and 5 in addition to FIG. FIG. 4 is an explanatory view when a polishing pad is used, and FIG. 5 is an explanatory view when a grinding wheel is used. When the polishing pad 43 is used, as shown in FIGS. 2 and 4, the solenoid valve V controls the air from the cylinder air supply source A to flow to the first communication passage 53 in the rotary joint 15. do. The air flowing through the first communication passage 53 flows in the order of the third air supply path 51b, the first air supply path 11e of the spindle 11, and the flow path 30d of the cylinder 30 and reaches the first air supply port 35.

Then, air is supplied from the first air supply port 35 to the accommodating chamber 31 of the cylinder 30, the pressure rises in the space above the annular piston 32 in the accommodating chamber 31, and the annular piston 32 becomes one end of the spindle 11. Move in the direction. By this movement, the annular mount 28 is moved downward, and the mounting surface which is the lower surface of the annular mount 28 protrudes from the mounting surface which is the lower surface of the disk mount 27 (see FIG. 6). As a result, the polishing pad 43 mounted on the annular mount 28 is arranged below the lower end of the grinding wheel 40, and the polishing process can be performed so that only the polishing pad 43 comes into contact with the workpiece (not shown). ..

On the other hand, when the grinding wheel 40 is used from this state, as shown in FIG. 5, the solenoid valve V controls the air from the cylinder air supply source A to flow into the second communication passage 54 in the rotary joint 15. do. The air flowing through the second communication passage 54 flows in the order of the fourth air supply passage 51c, the second air supply passage 11f of the spindle 11, and the flow path 30e of the cylinder 30 and reaches the second air supply port 36.

Then, air is supplied from the second air supply port 36 to the accommodating chamber 31 of the cylinder 30, the pressure rises in the space below the annular piston 32 in the accommodating chamber 31, and the annular piston 32 becomes the other end of the spindle 11. Move in the direction. By this movement, the annular mount 28 is moved upward, and the mounting surface which is the lower surface of the disc mount 27 protrudes from the mounting surface which is the lower surface of the annular mount 28 (see FIG. 7). As a result, the grinding wheel 40 mounted on the disk mount 27 is arranged below the lower end of the polishing pad 43 so that the grinding process can be performed so that only the grinding wheel 40 comes into contact with the workpiece (not shown). Become.

As described above, in the spindle unit 10 of the present embodiment, the grinding wheel 40 mounted on the disk mount 27 and the polishing pad 43 mounted on the annular mount 28 can be selectively used for the workpiece. It will be possible.

When air is being supplied from either the first air supply port 35 or the second air supply port 36 when moving to the annular piston 32, the other is used as an air exhaust port in the accommodation chamber 31. Function. When the air is exhausted, the air flows in the opposite direction through the above-mentioned air supply path, and the air is discharged to the outside from the solenoid valve V.

According to such an embodiment, the grinding wheel 40 can be accommodated or projected inside the polishing pad 43 by moving the annular piston 32 of the cylinder 30. Thereby, the use of the grinding wheel 40 and the polishing pad 43 can be easily switched by the single spindle unit 10, and grinding and polishing which are different processes can be selectively performed. Therefore, when both grinding and polishing are performed by one processing device, a single spindle unit 10 can be used without providing two spindle units, and the number of spindle units 10 installed can be reduced. Further, the mechanism for moving between the processing positions of the two spindle units can be omitted. As a result, the configuration of the processing apparatus provided with the spindle unit 10 can be simplified, and the size of the processing apparatus can be reduced.

Further, since the annular mount 28 is moved by the annular piston 32, the connection position thereof can be set to a position distant from the axial center position of the spindle 11. As a result, even if a force that tilts the axial center position of the annular mount 28 is applied during machining, a large drag force against the applied force can be secured as compared with a configuration in which a piston is provided at the axial center position, and the annular mount 28 and polishing can be performed. It is possible to suppress the pad 43 from tilting and improve the processing accuracy.

Further, in the lower axial bearing 21, since air is blown onto the upper surface of the cylinder 30, the cylinder 30 functions in the same manner as the bearing plate. That is, the bearing plate used only for the lower axial bearing 21 can be omitted, and the configuration can be simplified. Moreover, since the total length of the spindle unit 10 in the axial direction can be shortened and the design in which the bearing 18 and the mounts 27 and 28 are close to each other can be adopted, the grinding wheel 40 and the polishing pad 43 can be tilted. It can be suppressed to improve the processing accuracy.

The processing tools attached to the disk mount 27 and the annular mount 28 can be changed in various ways. For example, both mounts 27 and 28 may be equipped with a grinding wheel or a polishing pad. good. In this case, it can be exemplified that roughing is performed on the one hand and finishing is performed on the other.

Further, as the workpiece, various workpieces such as semiconductor device wafers, optical device wafers, package substrates, semiconductor substrates, inorganic material substrates, oxide wafers, raw ceramic substrates, and piezoelectric substrates are used depending on the type of processing. May be done. As the semiconductor device wafer, a silicon wafer or a compound semiconductor wafer after device formation may be used. As the optical device wafer, a sapphire wafer or a silicon carbide wafer after device formation may be used. Further, a CSP (Chip Size Package) substrate may be used as the package substrate, silicon, gallium arsenide or the like may be used as the semiconductor substrate, and sapphire, ceramics, glass or the like may be used as the inorganic material substrate. Further, as the oxide wafer, lithium tantalate or lithium niobate after device formation or before device formation may be used.

Further, the embodiment of the present invention is not limited to the above-described embodiment and modification, and may be variously modified, replaced, or modified without departing from the spirit of the technical idea of the present invention. Furthermore, if the technical idea of the present invention can be realized in another way by the advancement of technology or another technology derived from it, it may be carried out by using that method. Therefore, the scope of claims covers all embodiments included within the scope of the technical idea of the present invention.

As described above, the present invention has the effect of reducing the size of the entire processing apparatus including the spindle unit and simplifying the configuration, and processing is performed by two types of rotating processing tools. It is useful for the processing equipment to be performed.

10 Spindle unit 11 Spindle 11a Grinding liquid supply unit (machining liquid supply unit)
11e 1st air supply path 11f 2nd air supply path 12 Casing 13 Mount 15 Rotary joint 18 Bearing 20 Upper axial bearing 21 Lower axial bearing 22 Radial bearing 26 Transportation 27 Disk mount 28 Circular mount 30 Cylinder 31 Storage chamber 32 Circular piston 35 1st air supply port 36 2nd air supply port 40 Grinding wheel (processing tool)
43 Polishing pad (processing tool)
50 Air supply means 51 Rotating shaft 51b Third air supply path 51c Fourth air supply path 52 Housing 52a to 52e Exhaust groove 53 First communication passage 53a First supply port 54 Second communication passage 54a Second Supply port 57 Upper bearing air supply path (bearing air supply path)
57a Upper bearing air supply port (bearing air supply port)
58 Lower bearing air supply path (bearing air supply path)
58a Lower bearing air supply port (bearing air supply port)
63 Axial bearing air supply path (bearing air supply path)
63a Axial bearing air supply port (bearing air supply port)

Claims (5)

A spindle unit comprising a spindle for connecting a mount having a mounting surface for mounting a processing tool for processing a workpiece to one end, and a casing for rotatably supporting the spindle via a bearing.
The mount includes a disk mount that is connected to one end of the spindle so that its axis and center are aligned with each other, an annular mount that is outside the disk mount and is centered on the center of the disk mount, and an annular mount. A moving means for moving the mount in the axial direction of the spindle is provided.
The moving means has an annular piston connected to the annular mount and aligned with the axial center of the spindle, and the annular piston in the annular storage chamber accommodating the annular piston in the axial direction of the spindle. A movable cylinder, a first air supply port and a second air supply port for supplying air to the accommodation chamber of the cylinder, and an annular mount and the annular piston are connected to each other in the axial direction of the spindle. A plurality of rods extending in the rod, a plurality of rod-shaped guides extending in the axial direction of the spindle connecting the cylinder and the disk mount, and a plurality of rod-shaped guides formed in the annular mount through which the guides penetrate. With guide holes ,
Air is supplied from the first air supply port, the annular piston is moved toward one end of the spindle, and the guide hole moves along the guide in the same direction as the moving direction of the annular piston, and the annular piston is moved. The mounting surface of the mount protrudes from the mounting surface of the disk mount, air is supplied from the second air supply port, the annular piston is moved toward the other end of the spindle, and the guide is along the guide. The hole moves in the same direction as the moving direction of the annular piston so that the mounting surface of the disc mount protrudes from the mounting surface of the annular mount, and the processing tool mounted on the disk mount and the annular shape with respect to the workpiece. A spindle unit that enables selective use with the processing tools attached to the mount. The bearing forms an axial air bearing and a radial air bearing by supplying air.
The spindle unit according to claim 1, wherein the axial air bearing is formed by injecting air onto the upper surface of the cylinder. The air supply means for supplying air to the first air supply port and the second air supply port of the cylinder is
A rotary joint connected to the other end of the spindle, a first air supply path arranged within the shaft of the spindle and communicating the first air supply port and the air supply source, and the second air. The spindle unit according to claim 1 or 2, further comprising a second air supply path that communicates the supply port and the air supply source. The spindle unit according to any one of claims 1 to 3, which is arranged in the shaft of the spindle and includes a machining fluid supply path for supplying the machining fluid to the machining tool. The rotary joint is
A tubular rotating shaft and a housing forming an air bearing that rotatably supports the rotating shaft are provided.
The rotating shaft extends in the axial direction within the thickness forming the cylinder and connects to the first air supply path of the spindle, and the second air supply path of the spindle. Equipped with a fourth air supply path that connects to the road
The housing has a bearing air supply path that rotatably supports the rotating shaft by ejecting air supplied from a bearing air supply port formed on the outer wall from the inner wall to form an air bearing, and a first supply formed on the outer wall. The air supplied from the first air passage that communicates the air supplied from the port to the third air supply path of the rotating shaft and the air supplied from the second supply port formed on the outer wall are the fourth air of the rotating shaft. The spindle unit according to claim 3, further comprising a second communication passage communicating with the supply path and an exhaust groove for exhausting air formed on the inner wall to form an air bearing.

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