JP6959683B2 - Vibration device, vibration method, screen printing device, vibration transfer device, and material handling device - Google Patents

Description

The present invention relates to a vibration device, a screen printing device, a vibration transfer device, and a material handling device that vibrate a plate.

Conventionally, there is a processing device for processing a work by vibrating a plate.
In addition, there is a screen printing device that prints on a work by vibrating a paste or a squeegee.

JP-A-2017-94264 Japanese Unexamined Patent Publication No. 08-197709 Japanese Unexamined Patent Publication No. 09-283910 Japanese Unexamined Patent Publication No. 10-058647 Japanese Unexamined Patent Publication No. 2010-149301 Japanese Unexamined Patent Publication No. 2003-220530 Japanese Unexamined Patent Publication No. 2007-216372 Japanese Patent No. 5746637

Some conventional processing devices vibrate the plate in the vertical direction, but there is a possibility that vibration in the front-back and left-right directions may occur in addition to the vibration in the up-down direction.
Further, in the screen printing apparatus, the amount of paste entering the holes may vary during fill-in-the-blank printing, and the holes may not be filled with a certain amount of paste.

An object of the embodiment of the present invention is to provide a vibration device that vibrates a plate in the vertical direction and does not vibrate in the front-back and left-right directions.
Further, in the embodiment of the present invention, it is an object of the present invention to provide a vibration device that vibrates the plate in any direction up, down, front, back, left and right.

Configuration of the vibration device of the present invention-Plate-Base fixed around the plate-Vibration unit that vibrates a plurality of sides of the plate-Controller that controls the vibration of the vibration unit The above four features are provided. do.

According to the present invention, the plate vibrates due to a standing wave by applying a traveling wave of the same frequency to the plate from a plurality of sides of the plate while the circumference of the plate is fixed to the base. The plate vibrates in the vertical direction due to the vibration action of the standing wave, but does not vibrate in the front-back and left-right directions.

It is a perspective view of the vibration apparatus 100 of Embodiment 1. FIG. FIG. 5 is a cross-sectional view taken along the line AA of the vibration device 100 of FIG. 1 according to the first embodiment. It is explanatory drawing of the vibration method of Embodiment 1. FIG. It is a figure which shows the structure of the vibration measurement. It is a distribution figure of the vertical vibration of the plate 20 by the air pressure of 0.2 MPa. It is a distribution figure of the vertical vibration of the plate 20 by the air pressure of 0.3 MPa. It is a distribution figure of the vertical vibration of the plate 20 by the air pressure of 0.4 MPa. It is a distribution figure of the vertical vibration of the plate 20 by the air pressure of 0.5 MPa. It is a distribution map of vibration in the horizontal direction. It is a figure which shows the comparative example of one-sided vibration. It is a distribution map of one-sided vibration. It is a figure which shows the comparative example of the lateral vibration on both sides. It is a distribution map of the vertical vibration of the lateral vibration on both sides. It is a figure which shows the modification of the vibration apparatus 100 of Embodiment 1. FIG. It is a figure which shows the modification of the vibration apparatus 100 of Embodiment 1. FIG. It is a figure which shows the modification of the vibration apparatus 100 of Embodiment 1. FIG. It is a figure which shows the modification of the vibration apparatus 100 of Embodiment 1. FIG. It is a figure which shows the modification of the vibration apparatus 100 of Embodiment 1. FIG. It is a figure which shows the modification of the vibration apparatus 100 of Embodiment 1. FIG. It is a figure which shows the modification of the vibration apparatus 100 of Embodiment 1. FIG. It is a figure which shows the screen printing apparatus 200 of Embodiment 2. It is a figure which shows the shearing apparatus 300 of Embodiment 3. It is a figure which shows the drilling apparatus 400 of Embodiment 4. It is a figure which shows the vibration transfer device 500 of Embodiment 5. It is explanatory drawing of the vibration of the vibration transfer device 500 of Embodiment 5. It is a figure which shows the modification of the vibration transfer device 500 of Embodiment 5. It is a figure which shows the modification of the vibration transfer device 500 of Embodiment 5. It is a figure which shows the modification of the vibration transfer device 500 of Embodiment 5. It is a figure which shows the modification of the vibration transfer device 500 of Embodiment 5. It is a figure which shows the modification of the vibration transfer device 500 of Embodiment 5. It is a figure which shows the distributor 47 of Embodiment 6. It is a figure which shows the plate 20 and the vibration unit 40 of Embodiment 7. It is a figure which shows the planar shape of the plate 20 of Embodiment 7. It is a figure which shows the AA cross-sectional shape of FIG. 1 of the plate 20 of Embodiment 7.

Embodiment 1.
FIG. 1 is a perspective view of the vibration device 100 of the first embodiment.
FIG. 2 is a cross-sectional view taken along the line AA of the vibration device 100 of FIG. 1 according to the first embodiment.
In FIG. 1, X indicates a front-rear direction.
In FIGS. 1 and 2, Y indicates a horizontal direction and Z indicates a vertical direction.

<<< Configuration of Vibration Device 100 >>>
The vibration device 100 includes a base 10, a plate 20, a vibration unit 40, and a controller 80.

<<< Explanation of Base 10 >>>
The base 10 has a box shape with an open top.
The base 10 has a top surface 11, a bottom surface 12, and a wall 13.
The base 10 has a space 14 in the center.
The upper surface 11 is formed by the top surface of the wall 13 and has a rectangular shape with an opening in the center.
The bottom surface 12 has a rectangular shape.
The wall 13 is a side wall of the base 10 which is erected from the periphery of the bottom surface 12.
The space 14 is a hexahedral space surrounded by the bottom surface 12 and the wall 13.

<<< Explanation of plate 20 >>>
The plate 20 is preferably made of a material through which sound waves can easily pass, and a metal is preferable.
The material of the plate 20 is preferably aluminum, titanium, or stainless steel.
Further, aluminum and titanium are preferable, and aluminum is the best.
The plate 20 is preferably rectangular, preferably square.
The plate 20 has a front surface 21, a back surface 22, and four sides 23.
The front surface 21 and the back surface 22 are parallel rectangular planes having the same shape.
The side 23 is a surface between the front surface 21 and the back surface 22 of the plate 20.
The side 23 is a plane orthogonal to the front surface 21 and the back surface 22 of the plate 20.
The plate 20 has a plurality of screw holes 24 around it.
A total of eight screw holes 24 are provided at the corners of the plate 20 and at the center of each side.
The plate 20 is firmly fixed to the base 10 by screws 25 inserted into the screw holes 24.
Hereinafter, the position of the screw hole 24 is referred to as a fixing point.
The plate 20 is fixed to the base 10 at a fixing portion provided around the plate 20.

<<< Explanation of vibration unit 40 >>>
The vibration unit 40 has a plurality of vibrators and vibrates the plurality of sides 23 of the plate 20 at the same frequency.
The vibration unit 40 vibrates the opposite sides of the plate 20 up and down.
The vibration unit 40 has two vibrators, a vibrator 41 and a vibrator 42.
The vibration unit 40 vibrates the outside of the fixed portion where the screw hole 24 is located up and down.
The two vibrators, the vibrator 41 and the vibrator 42, have the same specifications.
The two vibrators, the vibrator 41 and the vibrator 42, are vibrators driven by air pressure.

The following vibrators can be used as the vibrators driven by air pressure.
(1) Turbine vibrator (2) Roller vibrator (3) Ball vibrator (4) Piston vibrator

The vibrators (1), (2), and (3) have less noise and can operate at high speed.
In particular, a turbine vibrator with stable operation is most suitable.
The piston vibrator has a problem that it is noisy and operates slowly.

The vibration unit 40 has a distributor 47.
The distributor 47 transmits the vibrations of the vibrator 41 and the vibrator 42 to the side 23 of the plate 20.
The distributor 47 fixes the vibrator 41 and the vibrator 42 to the side 23 of the plate 20.
The distributor 47 is a metal fitting bent into an L shape.
The distributor 47 has a horizontal portion 48 and a vertical portion 49.
The horizontal portion 48 fixes the top surface of the vibrator 41 or the vibrator 42.
The horizontal portion 48 fixes the vibrator 41 or the vibrator 42 so that the rotations of the vibrator 41 and the vibrator 42 are reversed from each other.
In FIG. 2, the vibrator 41 rotates counterclockwise, and the vibrator 42 rotates clockwise.
The vertical portion 49 has a vertical width equal to or smaller than the vertical width of the side 23, and is fixed to the side 23.

The distributor 47 has a front-rear width larger than the width of the vibrator 41 and the top surface of the vibrator 42 in the front-rear direction.
The width of the distributor 47 in the front-rear direction is preferably more than twice and less than 10 times the width of the top surface of the vibrator 41 and the vibrator 42 in the front-rear direction, preferably 5 times.
The distributor 47 has a front-rear width that is less than one-half and more than one-eighth of the width of the plate 20 in the front-rear direction, preferably one-fifth.
The distributor 47 transmits the vibrations of the vibrator 41 and the vibrator 42 to a wide range of the side 23 of the plate 20.

<<< Explanation of controller 80 >>>
The controller 80 controls the vibration of the vibration unit 40.
The controller 80 vibrates the vibrator at a frequency of 10 Hz or more and 800 Hz or less.
The controller 80 vibrates a plurality of vibrators at the same frequency.
The controller 80 includes an air compressor 81, an air pipe 82, a regulator 83, and a processor 84.

The air compressor 81 generates compressed air.
The air pipe 82 is connected to the air compressor 81 and allows compressed air to flow.
The air pipe 82 branches in a Y shape on the way and is connected to the vibrator 41 and the vibrator 42.

The regulator 83 is a control device that controls the pressure of compressed air.
The regulator 83 determines the vibration frequency between the vibrator 41 and the vibrator 42 by controlling the pressure of the compressed air.

The processor 84 has a central processing unit and a program.
The processor 84 can be realized by an integrated circuit, a circuit board, or the like.
The processor 84 controls the operation of the vibration device 100.
The processor 84 is connected to the air compressor 81 and controls the on / off operation and the operation time of the air compressor 81.

<<< Explanation of vibration method >>>
The vibration method of the vibration device 100 will be described.

<Initial setting step>
With the circumference of the plate 20 fixed to the base 10 by the screws 25, the worker turns on the power switch of the vibrator 100. The worker changes the pressure of the compressed air and the vibration frequencies of the vibrator 41 and the vibrator 42. It has a correspondence table of.
The worker sets the pressure of the compressed air corresponding to the vibration frequencies of the vibrator 41 and the vibrator 42 by the regulator 83 with reference to the correspondence table.
The worker sets the pressure corresponding to any audible frequency of 10 Hz or more and 800 Hz or less.

<Traveling wave generation step>
Since the air pipe 82 is branched in a Y shape and connected to the vibrator 41 and the vibrator 42, air of the same pressure is supplied to the vibrator 41 and the vibrator 42. As a result, the vibrator 41 and the vibrator 42 vibrate up and down at the same frequency.
The vibration frequency of the vibrator 41 and the vibrator 42 is preferably an audible frequency.
The vibrator 41 and the vibrator 42 are fixed to the left and right sides 23 of the plate 20, and give a sine wave traveling wave 60 to the left and right sides 23 of the plate 20.
The vibrator 41 and the vibrator 42 simultaneously generate the traveling wave 60 at the same amplitude, the same wavelength, and the same frequency.

<Standing wave generation step>
When the traveling waves 60 are simultaneously generated at the same amplitude, the same wavelength, and the same frequency in opposite directions, the traveling waves 60 from the left and right overlap on the plate 20 to generate a standing wave 70.
A standing wave is a wave whose position does not move over time.
The plate 20 vibrates up and down at the same vibration frequency as the vibrator 41 and the vibrator 42 by the standing wave 70.

<Synchronization step>
Even if vibration is started in an asynchronous state in which the vibrator 41 and the vibrator 42 are out of phase, the phases of the vibrator 41 and the vibrator 42 match in a short time due to the synchronization phenomenon, and the vibration between the vibrator 41 and the vibrator 42 is caused. It goes into a synchronized state and immediately shifts to steady-wave vibration.

<Vertical vibration step>
Hereinafter, vertical vibration by the vibration method will be described with reference to FIG.
FIG. 3 is a schematic view of vertical vibration seen from the front-rear direction of the center of the plate 20 in the left-right direction.
In FIG. 3, the fulcrum 26 refers to a point that is the center of the plate 20 in the vertical direction and the center of the screw hole 24.
(A) When a downward force is applied to the side 23 of the plate 20 by the vibrator 41 and the vibrator 42, an upward force is generated in the center of the plate 20 via the fulcrum 26.
(B) When a larger downward force is applied to the side 23 of the plate 20 by the vibrator 41 and the vibrator 42, the center of the plate 20 rises.
(C) When the downward force of the side 23 of the plate 20 by the vibrator 41 and the vibrator 42 becomes weak, the center of the plate 20 descends.
(D) When an upward force is applied to the side 23 of the plate 20 by the vibrator 41 and the vibrator 42, a downward force is generated at the center of the plate 20 via the fulcrum 26.
(E) When a larger upward force is applied to the side 23 of the plate 20 by the vibrator 41 and the vibrator 42, the center of the plate 20 is lowered.
(F) When the upward force of the side 23 of the plate 20 by the vibrator 41 and the vibrator 42 becomes weak, the center of the plate 20 rises.

<Flap phenomenon>
By repeating the operations (a) to (f) with (a) to (f) as one cycle, the plate 20 vibrates up and down at the same frequency as the vibration frequencies of the vibrator 41 and the vibrator 42.
Since the plate 20 vibrates as if it were flapping on the left and right between the fulcrums 26, this phenomenon is hereinafter referred to as a flapping phenomenon.
The flapping phenomenon is a phenomenon in which the plate 20 vibrates up and down around the fulcrum 26 by supplying air to the vibrators fixed to the left and right sides of the plate 20.
In order to facilitate the flapping phenomenon, it is desirable that the fixed positions of the vibrator 41 and the vibrator 42 and the positions of the two screw holes 24 are on a straight line. That is, it is desirable that the plurality of vibrators exist as an extension of the line connecting the opposite fixed points on the opposite sides of the plate 20.
Even if the fixed positions of the vibrator 41 and the vibrator 42 and the positions of the two screw holes 24 are not aligned with each other, if the plate 20 is securely fixed to the base 10, the flapping phenomenon will occur. ..
If the thickness of the wall 13 is increased, the flapping phenomenon may be hindered. Therefore, the wall 13 should be thin and the opening of the space 14 should be wide. It is desirable that the thickness of the wall 13 is larger than the diameter of the screw hole 24 and less than twice the diameter of the screw hole 24.

<<< Specific example >>
A specific example will be described below.
As the plate 20, a square aluminum plate having a side of about 0.5 m is used.
The speed of sound V of aluminum is 6320 [m / s]. However, assuming that the temperature of aluminum is constant, the change in sound velocity due to temperature is not considered.
As the vibrator 41 and the vibrator 42, an air vibrator manufactured by EXCEN Corporation having the following specifications is used.
When the air pressure is 0.2 or more and 0.6 MPa or less, an air vibrator having a vibration frequency f of 119 Hz or more and 414 Hz or less is desirable. Alternatively, an air vibrator having a vibration frequency f of 110 Hz or more and 290 Hz or less when the air pressure is 0.3 or more and 0.6 MPa or less is desirable.

Here, it is assumed that an air vibrator having a vibration frequency f of the following values is used when the air pressure is the following.
Vibration frequency when the air pressure is 0.5 MPa: 216.5 Hz
Vibration frequency when the air pressure is 0.4 MPa f: 206.6 Hz
Vibration frequency when air pressure is 0.3MPa f: 177.3Hz
Vibration frequency when the air pressure is 0.2 MPa f: 133.0 Hz

The wavelength can be calculated by the following formula.
Wavelength λ [m] = speed of sound V [m / s] / vibration frequency f [Hz]
The wavelength of the traveling wave 60 is calculated as follows.
When the air pressure is 0.5 MPa:
Wavelength λ [m] = 6320 [m / s] / 216.5 [Hz] = 29.19m
When the air pressure is 0.4 MPa:
Wavelength λ [m] = 6320 [m / s] / 206.6 [Hz] = 30.59 m
When the air pressure is 0.3MPa:
Wavelength λ [m] = 6320 [m / s] / 177.3 [Hz] = 35.65 m
When the air pressure is 0.2 MPa:
Wavelength λ [m] = 6320 [m / s] /133.0 [Hz] = 47.52m

The traveling wave 60 generated by the vibrator 41 and the vibrator 42 can be expressed by the following equation.
R (y, t) = A * sin2π ((t / T)-(y / λ))
L (y, t) = A * sin2π ((t / T) + (y / λ))
y [m]: Location of the plate in the Y direction t [s]: Time R (y, t): Displacement of the traveling wave 60 in the Z direction at location y [m] and time t [s] [m]
L (y, t): Displacement [m] of the traveling wave 60 in the Z direction at place y [m] and time t [s].
A: Amplitude of traveling wave 60 [m]
T: Period of traveling wave 60 [s]
λ: Wavelength of traveling wave 60 [m]

The standing wave 70 generated by superimposing the traveling wave 60 generated from the vibrator 41 and the vibrator 42 can be represented by the following equation representing a sinusoidal standing wave.
z (y, t)
= R (y, t) + L (y, t)
= 2A * sin (2π (t / T)) * cos (2π (y / λ))
y [m]: Location of the plate in the Y direction t [s]: Time z (y, t): Displacement of the standing wave 70 in the Z direction at location y [m] and time t [s] [m]
A: Amplitude of traveling wave 60 [m]
T: Period of traveling wave 60 [s]
λ: Wavelength of traveling wave 60 [m]

cos (2π (y / λ)) indicates the amplitude of the standing wave 70.
The place where the amplitude of the standing wave 70 is 0, that is, the place where cos (2π (y / λ)) is 0 is called a “node”.
The place where the amplitude of the standing wave 70 is maximum, that is, the place where the absolute value of cos (2π (y / λ)) is 1, is called "antinode".

In order to vibrate the plate 20 up and down, it is sufficient to prevent the generation of a standing wave node between the fulcrums 26 at any position y in the left-right direction.
Since the node of the standing wave is generated every half wavelength, if the distance between the fulcrums 26 is less than the half wavelength of the standing wave, the node of the standing wave should not exist at any place y in the left-right direction of the plate 20. Can be done.
If the position of the "knot" of the standing wave 70 is set as a fixed point and the fixed point is held (screwed), the "knot" becomes a fulcrum of flapping.

If the distance between the fulcrums 26 is larger than the half wavelength of the standing wave, nodes will be generated in the plate 20.
Therefore, the distance between the fixed portions of the plate 20 in the left-right direction must be less than the following length.
Half wavelength when the air pressure is 0.5 MPa: Wavelength λ [m] / 2 = 14.56 m
Half wavelength when the air pressure is 0.4 MPa: Wavelength λ [m] / 2 = 15.29 m
Half wavelength when the air pressure is 0.3 MPa: Wavelength λ [m] / 2 = 17.82 m
Half wavelength when the air pressure is 0.2 MPa: Wavelength λ [m] / 2 = 23.766 m
As described above, the frequency and wavelength of the standing wave are determined by the air pressure between the vibrator 41 and the vibrator 42, and the maximum length of the plate 20 is determined.

<<< Vibration measurement result >>>
The vibration of the plate 20 was measured using a square aluminum plate having a side of about 0.5 m as the plate 20.
As shown in FIG. 4, the base 10 was removed from the vibration device 100 of FIG. 1, the plate 20 was placed on an air mat, the circumference of the plate 20 was freed, the plate 20 was vibrated, and the amplitude of the vibration was measured.

5 to 8 are diagrams showing the measurement results of vertical vibration at 49 points in the lower half region of the plate 20.
5 to 8 show the displacement in the Z direction (displacement in the upward direction) in the case of FIG. 3B, where 0 is the displacement in the Z direction when the plate 20 is flat.
The vibration in the upper half region of the plate 20 shown in FIGS. 5 to 8 is not measured because it can be considered that the vibration is symmetrical with the lower half region of the plate 20.
FIG. 5 is a distribution diagram of vertical vibration of the plate 20 due to an air pressure of 0.2 MPa.
FIG. 6 is a distribution diagram of vertical vibration of the plate 20 due to an air pressure of 0.3 MPa.
FIG. 7 is a distribution diagram of vertical vibration of the plate 20 due to an air pressure of 0.4 MPa.
FIG. 8 is a distribution diagram of vertical vibration of the plate 20 due to an air pressure of 0.5 MPa.

Looking at the first row of FIG. 5, the amplitude of the vertical vibration is 14.8 μm> 12.6 μm> 9.60 μm> 7.68 μm <8.00 μm <10.5 μm <15.0 μm, and the plate 20 The amplitude of vibration is larger at the end than at the center. That is, vibration unevenness such as knots is generated in the central portion of the plate 20.
It is considered that the reason is that the pressure is weak at an air pressure of 0.2 MPa and the vibrator 41 and the vibrator 42 cannot be vibrated stably.
Looking at the first row of FIG. 6, the amplitude of the vertical vibration is 5.28 μm <9.53 μm <12.2 μm <13.2 μm> 13.1 μm> 11.0 μm> 8.40 μm, and the plate 20 The amplitude of vibration is larger in the central part of the. That is, it is considered that the belly is generated in the central portion of the plate 20.
Also in the cases of FIGS. 7 and 8, the vibration amplitude of the central portion of the plate 20 is larger than that of the end portion. That is, it is considered that the belly is generated in the central portion of the plate 20.
Therefore, with an air pressure of 0.2 MPa, the plate 20 cannot be accurately vibrated in the vertical direction.
On the other hand, at an air pressure of 0.3 MPa or more and 0.5 MPa or less, the plate 20 can be accurately vibrated in the vertical direction.

The measurement result of the vibration in the front-back and left-right directions will be described with reference to FIG.
FIG. 9 is a table showing the measurement results of the horizontal vibrations at the measurement points 1 to 12 on the two sides of the plate 20 in FIGS. 5 to 8.
At the air pressure of 0.2 MPa, the values of more than 2 micrometers are shown at the measurement points 1 and 2.
At an air pressure of 0.3 MPa or more and 0.5 MPa or less, all points show values of less than 2 micrometers.
At an air pressure of 0.3 MPa or more and 0.5 MPa or less, the amplitude of vibration in the front-back and left-right directions is less than about 10% or less than 15% of the amplitude of vibration in the up-down direction, and it is considered that there is no vibration in the horizontal direction. be able to.

The above measurement results are the measurement results when the circumference of the plate 20 is freed and the plate 20 is vibrated.
As shown in FIG. 1, since the circumference of the plate 20 of the vibration device 100 is fixed to the base 10 by the screws 25, the vertical vibration is actually limited around the plate 20 (particularly, the portion of the screw hole 24). Has been done.
When the plate 20 is vibrated with the circumference of the plate 20 free, the plate 20 vibrates up and down with the center as the belly. Therefore, even when the circumference of the plate 20 is fixed at a fixed portion and the plate 20 is vibrated, the plate 20 tends to vibrate up and down with the center as the belly. As a result, as shown in FIG. 3, it can be considered that the flapping phenomenon occurs with the fulcrum 26 as the center of flapping.
When the circumference of the plate 20 is fixed to the base 10 and the plate 20 is vibrated, the vibration in the lateral direction is further reduced as compared with the case where the circumference of the plate 20 is freed and the plate 20 is vibrated. Can be thought of.
Furthermore, looking at the above measurement results, if the distance between the fixed points in the left-right direction of the plate 20 is smaller than half a wavelength, the fixed points will be the fulcrum of flapping even if the position of the "node" of the standing wave 70 is not fixed. Can be thought of as
For example, when the air pressure is 0.4 MPa, the half wavelength is 15 m, but even when the distance between the fixed points in the left-right direction of the plate 20 is about 0.5 m, no "knot" appears.
As a result, even when the distance between the fixed points is 10 m, 5 m, 1 m, etc., it can be considered that the fixed points serve as fulcrums for flapping.

<<< Explanation of comparative examples >>>
<One-sided vibration>
FIG. 10 shows the vibrator 42 and the distributor 47 removed from the configuration of FIG.
The plate 20 is vibrated only by the vibrator 41 on one side.
The traveling wave 60 generated from the vibrator 41 on one side 23 of the plate 20 is reflected by the other side 23 to generate a reflected wave.
The traveling wave 60 and the reflected wave overlap to form a standing wave.
In the configuration of FIG. 10, as shown in FIG. 11, it was confirmed that vibration unevenness like a knot occurs on the right side of the center of the plate 20.
Further, as shown in FIG. 11, at the above-mentioned 12 points, there were places where the amplitude of the vibration in the horizontal direction exceeded 9 micrometers. It is considered that the reason is that elliptical vibration is generated in the plate 20.
Therefore, when the plate 20 is vibrated from one side, the plate 20 cannot be vibrated accurately.

<Sideways vibration on both sides>
FIG. 12 shows that the fixed directions of the vibrator 41 and the vibrator 42 are rotated by 90 degrees from the configuration of FIG. 4 and fixed so that the rotating directions of the vibrator 41 and the vibrator 42 are opposite to each other.
In the configuration of FIG. 12, as shown in FIG. 13, it was confirmed that vibration unevenness like a knot occurs in the central portion of the plate 20.
Therefore, if the vibrator 41 and the vibrator 42 are turned sideways while the rotation directions are opposite to each other, the plate 20 cannot be vibrated accurately.
Similarly, it is considered that the plate 20 cannot be vibrated accurately even when the vibrator 41 and the vibrator 42 are rotated in the same direction and turned sideways.

<Sideways one-sided vibration>
Although not shown, it was confirmed that even when the vibrator 42 and the distributor 47 were removed from the configuration of FIG. 12, vibration unevenness like a knot occurred in the central portion of the plate 20.
Therefore, in the case of lateral vibration on one side, the plate 20 cannot be vibrated accurately.

<<< Summary >>>
In the vibration device 100 of the present embodiment, the traveling wave 60 is simultaneously generated from the left and right sides of the plate 20 by the vibrator 41 and the vibrator 42, which are audible frequency vibration sources, at the same amplitude, the same wavelength, and the same frequency. As a result, on the plate 20, a standing wave is generated by superimposing traveling waves in opposite directions.

In the vertical vibration generation process of the vibration device 100 of the present embodiment, traveling waves 60 are simultaneously generated from the audible frequency vibration source to the plate 20 from the left and right to the plate 20 at the same frequency. The plate 20 vibrates due to a standing wave, but due to the vibration action of the standing wave, it vibrates only in the vertical direction. And it does not vibrate in the front-back and left-right directions. The vibration device 100 uses this vibration only in the vertical direction.

The vibration device 100 can change the audible frequency at the time of vibration by the controller 80. The audible frequency is in the range of 10 Hz or more and 20000 Hz or less, but the audible frequency used in this embodiment is set in the range of 10 Hz or more and 800 Hz or less.
The vibration unit 40 may have a voice coil motor type vibration source, an electromagnetic vibration source, or a piezoelectric vibration source as the vibration source.
The vibration unit 40 uses a vibration source such as the vibrator 41 and the vibrator 42 according to the required frequency range, and uses a voice coil motor type vibration source, an electromagnetic vibration source, or a piezoelectric type, which are other sound wave vibration sources. It can be replaced with a vibration source or the like.
The controller 80 may have an arbitrary waveform generator or a bipolar power supply as a control component. Since the controller 80 vibrates the vibration source at an arbitrary frequency, it can be replaced with an arbitrary waveform generator, a bipolar power source, or the like as a control component corresponding to the sound wave vibration source.

The vibration unit 40 vibrates the plate 20 up and down with a pair of vibrators attached to the center outer sides of the two facing sides of the plate 20.
The vibration unit 40 simultaneously generates a traveling wave with the same amplitude, the same wavelength, and the same frequency by a pair of vibrators attached to the center outer sides of the two facing sides of the plate 20, and vibrates the plate 20 with a standing wave.
In the vibrator 100 of the present embodiment, the vibrator 41 and the vibrator 42 are fixed to the outside of the plate 20.
That is, the vibrator 41 and the vibrator 42 do not overlap the plate 20 in a plan view.
Therefore, the vibrator 41 and the vibrator 42 do not hinder the vertical vibration of the plate 20.

In the vibrator 100 of the present embodiment, the vibrator 41 and the vibrator 42 are fixed to the side 23 of the plate 20.
The vibrator 41 and the vibrator 42 are not fixed to the front surface 21 and the back surface 22 of the plate 20.
Therefore, the traveling wave 60 is generated from both ends of the plate 20 in the left-right direction, and the entire area of the plate 20 in the left-right direction vibrates up and down.

The vibration device 100 of the present embodiment does not uniformly vibrate the entire plate 20 up and down.
The central portion of the plate 20 has the largest amplitude, and the amplitude decreases from the central portion of the plate 20 toward the periphery in the left-right direction.
The reason why the amplitude decreases toward the periphery in the left-right direction is that the left and right ends of the plate 20 are fixed and that a standing wave is generated in the plate 20.
Further, the central portion of the plate 20 has the largest amplitude, and the amplitude decreases from the central portion of the plate 20 toward the periphery in the front-rear direction.
The reason why the amplitude decreases toward the periphery in the front-rear direction is that both front and rear ends of the plate 20 are fixed.
Both front and rear ends of the plate 20 may be free ends that can freely vibrate up and down.
If both front and rear ends of the plate 20 are free ends, the amplitude of the plate 20 in the front-rear direction becomes uniform. Alternatively, the amplitude of the plate 20 in the anteroposterior direction approaches uniform.

In the vibrator 100 of the present embodiment, the vibrator 41, the vibrator 42, and the two fixing points (screw holes 24) are arranged in a straight line.
The vibrator 41 and the vibrator 42 are outside the two fixing points (screw holes 24).
The vibrator 41 and the vibrator 42 are not inside the two fixing points (screw holes 24).
The plate 20 vibrates up and down due to the flapping phenomenon centered between the two fixed points (fulcrum 26).

<<< Effect of Embodiment 1 >>>
According to this embodiment, a traveling wave 60 is simultaneously generated from the left and right sides of the plate 20 by the vibrator 41 and the vibrator 42 at the same frequency, so that a standing wave is generated and the plate 20 vibrates only in the vertical direction.
Even if it vibrates in the front-back and left-right directions, it can be ignored as compared with the vibration in the up-down direction.
By placing the work on the plate 20 of the vibration device 100, the work can be vibrated only in the vertical direction.

<<< Change example >>
Change example 1.
In the vibration device 100 shown in FIG. 14, the distributor 47 is removed from the configuration of FIG. 1, and the vibrator 41 and the vibrator 42 of the vibration unit 40 are directly fixed to the side 23 of the plate 20.

Change example 2.
In the vibration device 100 shown in FIG. 15, the plate 20 has a size larger than that of the base 10 in a plan view, and the vibrator 41 and the vibrator 42 of the vibration unit 40 are directly fixed to the outer edge of the back surface 22 of the plate 20. be.

Change example 3.
In the vibrator 100 shown in FIG. 16, the vibrator 41 and the vibrator 42 are fixed with the distributor 47 sandwiched between the base 10 and the plate 20.
The distributor 47 may be a flat plate.

Change example 4.
In FIG. 2, the vibrator 41 may be attached so as to rotate clockwise and the vibrator 42 may rotate counterclockwise.
In FIG. 2, it is preferable to reverse the rotation directions of the vibrator 41 and the vibrator 42 rather than to rotate the vibrator 41 and the vibrator 42 in the same direction.
Even when the rotation directions of the vibrator 41 and the vibrator 42 are reversed, it is desirable to rotate the vibrator 41 counterclockwise and the vibrator 42 clockwise as shown in FIG.

Change example 5.
The vibration unit 40 may have an even number of audible frequency vibration sources, which is more than two.
As shown in FIG. 17, the vibrator 41, the vibrator 42, the vibrator 43, and the vibrator 44 may be attached to the plate 20.
In (a), the vibrator 41 and the vibrator 42 face each other, and the vibrator 43 and the vibrator 44 face each other.
The vibrator 41 and the vibrator 43 are fixed to the same side 23, and the vibrator 42 and the vibrator 44 are fixed to different side 23.
Standing waves are generated in parallel.
In (b), the vibrator 41 and the vibrator 42 face each other, and the vibrator 43 and the vibrator 44 face each other.
The vibrator 41, the vibrator 42, the vibrator 43, and the vibrator 44 are fixed to their respective side 23.
Standing waves are generated orthogonally.
In (c), the vibrator 41 and the vibrator 44 face each other, and the vibrator 42 and the vibrator 43 face each other.
The vibrator 41, the vibrator 42, the vibrator 43, and the vibrator 44 are fixed to each corner of the plate 20, respectively.
Standing waves are generated orthogonally.
Although not shown, the shape of the plate 20 may be circular, elliptical, or other shape in a plan view.

Change example 6.
The shape of the plate 20 may be polygonal in a plan view.
The vibration unit 40 may have an odd number of audible frequency vibration sources.
As shown in FIG. 18, the plate 20 may be a triangular or hexagonal plate 20.
(A) shows a triangular plate 20.
The vibrator 41, the vibrator 42, and the vibrator 43 are fixed to individual side 23s, respectively.
(B) shows the hexagonal plate 20.
Every other vibrator 41, the vibrator 42, and the vibrator 43 are fixed to the side 23.
Although not shown, vibrators may be fixed to all sides 23 of the hexagonal plate 20.
Although not shown, the shape of the plate 20 may be circular, elliptical, or other shape in a plan view.
The vibration unit 40 may have one or a plurality of air vibrators fixed to the outside of one side or a plurality of sides of the plate 20.
Specifically, the vibration unit 40 may arrange the air vibrator as follows.
Only one side of the plate 20, one air vibrator on the outside of the side Only one side of the plate 20, multiple air vibrators on the outside of the side 1 on the outside of each side of some of the multiple sides of the plate 20 Air vibrators ((b) in FIG. 18)
A plurality of air vibrators on the outside of each side of a part of the plurality of sides of the plate 20 ((a) in FIG. 17).
One air vibrator on the outside of each side of all sides of the plate 20 ((b) in FIG. 17 and (a) in FIG. 18).
A plurality of air vibrator controllers 80 outside each side of all sides of the plate 20 vibrate all air vibrators at the same frequency.
Instead of the air vibrator, another type of vibrator may be used.

Change example 7.
The vibration unit 40 may have one audible peripheral vibration source.
The vibrator 100 of FIG. 19 has one vibrator 45 and a frame 46.
The frame 46 is a U-shaped metal part.
In the frame 46, the vibrator 45 is fixed to the center of the bottom, and the upper portions of both ends are fixed to the distributor 47.
The vibrator 45 vibrates up and down.
The vibration of the vibrator 45 is transmitted to the two distributors 47, causing the two distributors 47 to vibrate up and down.
As described above, it is not essential to attach a plurality of vibrators on both sides of the plate 20, and the traveling wave 60 is simultaneously applied to the vibration unit 40 from the plurality of sides of the plate 20 at the same amplitude, the same wavelength, and the same frequency. It suffices if there is a mechanism to generate it.

Change example 8.
The vibration device 100 of FIG. 20 has a spacer 50 between the plate 20 and the distributor 47.
The spacer 50 is a metal rod of a quadrangular prism sandwiched and fixed between the side 23 of the plate 20 and the vertical portion 49 of the distributor 47.
The spacer 50 is a component that keeps the position where the traveling wave 60 is generated away from the fulcrum 26 of the flapping phenomenon.
By changing the length of the spacer 50 in the left-right direction, the distance between the audible peripheral vibration source and the fixed portion can be changed.
Even if the traveling wave 60 has the same amplitude, the same wavelength, and the same frequency, the larger the length of the spacer 50 in the left-right direction, the stronger the flapping phenomenon appears.
The spacer 50 can adjust the amplitude of the vertical vibration of the plate 20.

Change example 9.
In order to fix the base 10 and the plate 20, instead of the screw holes 24 and the screws 25, other fixing brackets or other fixing mechanisms may be used.

Embodiment 2.
In the second embodiment, the points different from the first embodiment will be described.

<<< Explanation of configuration >>>
FIG. 21 is a configuration diagram of the screen printing device 200 of the second embodiment.
The screen printing device 200 includes the vibration device 100 described in the first embodiment.
The screen printing device 200 is a device that prints on the work 900.
The work 900 is a substrate for an electronic device or a substrate for a circuit.

The screen printing device 200 has a screen plate 201 in which the screen 202 is framed.
The screen 202 is a mesh screen, a metal screen, or other screen.
The screen 202 has a printed pattern of electrode terminals, electrodes, wiring, and the like.
Paste 204 is present on the surface of the screen 202.
The screen printing device 200 has a squeegee 203.

The squeegee 203 moves on the surface of the screen 202 and prints electrode terminals, electrodes, wiring, and the like on the work 900 with the paste 204.

The plate 20 of the vibration device 100 is a table on which the work 900 is placed.
The plate 20 functions as a suction plate for sucking the work 900.
The plate 20 has a plurality of through holes 205 penetrating vertically.
The base 10 functions as a suction box for sucking air.

The screen printing device 200 has a suction pipe 206 and a vacuum pump 207.
The suction pipe 206 is connected to the base 10 and the vacuum pump 207, and sucks air from the space 14.
As shown in FIG. 21, it is desirable that the vibrator 41 and the vibrator 42 are arranged in the same direction as the printing direction of the squeegee 203. That is, it is desirable that the printing direction of the squeegee 203 and the generation direction of the standing wave match.

<<< Explanation of operation >>>
The processor 84 of the screen printing device 200 operates the vibration device 100 to vibrate the plate 20 during printing.
The vibration of the plate 20 is transmitted to the work 900 and the screen plate 201 to vibrate the paste 204.
The vibration of the paste 204 makes it easier for the paste 204 to pass through the print pattern on the screen 202.
Filling the holes or grooves of the work 900 with the paste In the case of fill-in-the-blank printing, since the work 900 is vibrating, the paste 204 is likely to be filled in the holes or grooves of the work 900.
In the case of fill-in-the-blank printing, the processor 84 operates the vibration device 100 to vibrate the plate 20 even after printing. By vibrating the plate 20 even after printing, the paste 204 can be filled to the bottom of the hole or groove.

<<< Effect of Embodiment 2 >>>
According to this embodiment, the vibration device 100 can be used for the screen printing device 200.
According to this embodiment, it is possible to reduce the variation in the filling amount of the paste entering the holes when filling the holes in screen printing.
In particular, when fill-in-the-blank printing is performed using a hard paste, the filling amount is improved.
According to the present embodiment, since the plate 20 vibrates only in the vertical direction and does not vibrate in the front-back and left-right directions, the work 900 and the screen plate 201 do not deviate in the front-back and left-right directions. Therefore, the print pattern of the work 900 is not blurred.

Embodiment 3.
In the third embodiment, the points different from the first embodiment will be described.
FIG. 22 is a perspective view of the shearing device 300 of the third embodiment.
The shearing device 300 has a vibration device 100 described in the first embodiment.
The shearing device 300 is a device that cuts the work 900.
The shearing device 300 has a blade 301 that cuts the work 900.
The plate 20 of the vibration device 100 is a table on which the work 900 is placed.

During operation, the processor 84 of the shearing device 300 operates the vibration device 100 to vibrate the plate 20 in the vertical direction.
The vibration of the plate 20 is transmitted to the work 900 and causes the work 900 to vibrate.
As the work 900 vibrates in the vertical direction, the pressure from the blade 301 to the work 900 becomes intermittent.

<<< Effect of Embodiment 3 >>>
According to this embodiment, the vibration device 100 can be used for the shear device 300.
According to this embodiment, the pressure from the blade 301 to the work 900 becomes intermittent, so that the durability time of the blade 301 is extended.

Embodiment 4.
In the fourth embodiment, the points different from the first embodiment will be described.
FIG. 23 is a perspective view of the drilling device 400 of the fourth embodiment.
The drilling device 400 includes the vibration device 100 described in the first embodiment.
The drilling device 400 is a device for forming a hole in the work 900.
The drilling device 400 has a drill 401 that forms a hole in the work 900.
The plate 20 of the vibration device 100 is a table on which the work 900 is placed.

The processor 84 of the drilling device 400 operates the vibration device 100 during operation to vibrate the plate 20 in the vertical direction.
The vibration of the plate 20 is transmitted to the work 900 and causes the work 900 to vibrate.
As the work 900 vibrates in the vertical direction, the pressure from the drill 401 to the work 900 becomes intermittent.

<<< Effect of Embodiment 4 >>>
According to this embodiment, the vibration device 100 can be used for the drilling device 400.
According to this embodiment, the pressure from the drill 401 to the work 900 becomes intermittent, so that the durability time of the drill 401 is extended.

Embodiment 5.
In the fifth embodiment, the points different from the first embodiment will be described.

<<< Configuration of vibration transfer device 500 >>>
FIG. 24 is a perspective view of the vibration transfer device 500 according to the fifth embodiment.
The vibration transfer device 500 is a device that inserts a plurality of parts into a plurality of recesses by vibration.
The plate 20 is a square flat plate.
A plurality of recesses 29 are arranged on the plate 20.
A plurality of parts 901 are randomly inserted into the plate 20.
Although not shown, there is a frame around the outer periphery of the plate 20 to prevent the component 901 from spilling from the plate 20.

The vibration transfer device 500 has a flat plate base 10, a plate 20, and a vibration unit 40.
The plate 20 is fixed to the base 10 via four vibrators.
The side 23 of the plate 20 is not fixed and has a free end.
The vibration unit 40 has a plurality of vibrators fixed to the outside of the four corners of the plate 20.
The vibration unit 40 of FIG. 24 has four vibrators and four distributors 47.
The four vibrators are fixed to the base 10 of the flat plate at an angle of 45 degrees with respect to the front-rear direction and the left-right direction.
Each of the four vibrators is fixed to the outside of the four corners 27 of the plate 20.
The vibrator is arranged on the diagonal extension of the plate 20.
The vibrator 41 and the vibrator 44 are fixed to face each other at two corners at one diagonal end of the plate 20.
The vibrator 43 and the vibrator 42 are fixed to face each other at two corners at the other diagonal ends of the plate 20.

The distributor 47 is a rectangular plate.
The distributor 47 fixes the corner 27 of the plate 20 on the upper surface.
The distributor 47 fixes the upper surface of the vibrator to the lower surface.

The four corners 27 of the plate 20 are fixed to the distributor 47 by screws inserted into the screw holes 24.
The four corners 27 of the plate 20 are the four fixing points of the plate 20.
In plan view, the vibrator is fixed to the outside of the corner 27 of the plate 20. That is, in a plan view, the four vibrators do not overlap the plate 20.

As the four vibrators used in the vibration transfer device 500, an electromagnetic vibration source such as an electromagnetic vibrator is suitable. The electromagnetic vibration source can control the frequency more finely than the air vibrator.

<<< Operation of vibration transfer device 500 >>>
The controller 80 vibrates two vibrators fixed to two corners at the diagonal ends of the plate 20 at the same frequency.
The four vibrators are connected to the processor 84, and the processor 84 controls the vibration of the four vibrators.
The traveling waves from the four vibrators travel from the four corners of the plate 20 toward the center of the plate 20.
The vibrator 41 and the vibrator 44 simultaneously generate traveling waves at the same amplitude, the same wavelength, and the same frequency in one diagonal direction, and the traveling waves are superimposed.
The vibrator 43 and the vibrator 42 simultaneously generate traveling waves with the same amplitude, the same wavelength, and the same frequency in different diagonal directions, and four orthogonal traveling waves overlap and a standing wave is superimposed on the plate. Vibrate up and down.

The processor 84 can change the vibration generated in the plate 20 by changing the phase, amplitude, wavelength, and frequency of the four traveling waves.
In particular, the processor 84 generates a standing wave on the plate in which four traveling waves with the same amplitude, the same wavelength, and the same frequency but with different phases are overlapped, and the plate is vibrated up and down by the vertical vibration of the standing wave. The component 901 can be rotated, moved back and forth, and jumped on the 20.
The processor 84 can generate the phases of the four traveling waves by shifting them by 90 degrees, 180 degrees, 270 degrees, or any angle.

Hereinafter, the vertical vibration of the vibration transfer device 500 will be described with reference to FIG. 25.
FIG. 25 shows the vertical vibration state of the plate 20 when traveling waves having the same phase, amplitude, wavelength, and frequency are overlapped and standing waves are superimposed.
FIG. 25A is a schematic view of vertical vibration in the front-rear direction of the center in the left-right direction of the plate 20.
FIG. 25B is a schematic view of vertical vibration of one diagonal line connecting the corners 27 of the plate 20.
Since the side 23 is a free end, the plate 20 vibrates while the side 23 moves up and down as shown in FIG. 25 (a).
On the other hand, since the corner 27 is fixed and the corner 27 serves as the fulcrum 26, the plate 20 vibrates without the corner 27 moving up and down as shown in FIG. 25 (b).

The processor 84 vibrates the plate 20 up and down. The vibration of the plate 20 is transmitted to the part 901 and causes the part 901 to vibrate.
The component 901 moves on the surface of the plate 20 by vibrating up and down, and fits into the recess 29.

Change example 1.
In the vibration transfer device 500 of FIG. 26, the corner 27 of the plate 20 is cut and the vibrator is fixed to the cut surface.
The vibration transfer device 500 of FIG. 26 eliminates the need for a distributor 47.
In plan view, the vibrator is fixed to the outside of the corner 27 of the plate 20. That is, in a plan view, the four vibrators do not overlap the plate 20.

Change example 2.
The vibration device 100 of the above-described embodiment may be used for the vibration transfer device 500.
It is desirable to use a vibration transfer device 500 capable of generating a standing wave by making four traveling waves orthogonal to each other or by intersecting a plurality of traveling waves. Further, when the traveling wave intersects the traveling wave, it is desirable to superimpose the traveling wave and generate a stable standing wave by equalizing all the intersecting angles of the traveling wave.

Change example 3.
In the vibration transfer device 500 of FIG. 27, a support column 51 is provided at a corner 27 of the plate 20, and the plate 20 is fixed to the base 10 by four support columns 51.
The support column 51 fixes the plate 20 with screws inserted into the screw holes 24.
The vibrator is fixed only to the cut surface of the corner 27 of the plate 20, and the vibrator is attached to the plate 20 in a suspended state.
In the case of FIG. 27, the plate 20 vibrates due to the above-mentioned flapping phenomenon with the fixed portion in the screw hole 24 as a fulcrum.
In the case of FIG. 27, the plate 20 is fixed by four columns 51, but since the columns 51 are thin columns, the plate 20 can vibrate not only up and down but also back and forth and left and right.

Change example 4.
The shape of the plate 20 may be polygonal in a plan view.
As shown in FIG. 28, the plate 20 may be a triangular or hexagonal plate 20.
(A) shows a triangular plate 20.
The vibrator 41, the vibrator 42, and the vibrator 43 are fixed to individual corners 27, respectively.
(B) shows the hexagonal plate 20.
Each vibrator is fixed to a separate corner 27.
Although not shown, the shape of the plate 20 may be circular, elliptical, or other shape in a plan view.

Change example 5.
As shown in FIG. 29, the vibrator does not have to be in every corner.
(A) shows the case where the vibrator is arranged on one diagonal line of the quadrangular plate 20.
The vibrator 41 and the vibrator 42 are fixed to every other corner 27.
(B) shows the case where the vibrators are arranged on the two diagonal lines of the hexagonal plate 20.
Although not shown, the shape of the plate 20 may be circular, elliptical, or other shape in a plan view.

Change example 6.
As shown in FIG. 30, there may be a plurality of vibrators in the corner.
(A) shows the case where two vibrators are arranged at each corner of the four corners of the quadrangular plate 20.
(B) shows a case where two vibrators are arranged at each corner of each of the four corners of the quadrangular plate 20, and further, the vibrators are arranged on the outer center of the opposite side.
Although not shown, the shape of the plate 20 may be octagonal, decagonal, or other polygonal in plan view.

The vibration unit 40 may have one or a plurality of air vibrators fixed to the outside of one corner or a plurality of corners of the plate 20.
Specifically, the vibration unit 40 may arrange the air vibrator as follows.
One air vibrator outside only one corner of plate 20 One air vibrator outside each corner of some corners of multiple corners of plate 20 ((a) and (b) in FIGS. 29)
One air vibrator outside each corner of all corners of the plurality of corners of the plate 20 ((a) and (b) in FIGS. 28).
Two air vibrators on the outside of each corner of all the corners of the plurality of corners of the plate 20 ((a) and (b) in FIG. 30).
The controller 80 vibrates all the air vibrators at the same frequency.
Instead of the air vibrator, another type of vibrator may be used.

Embodiment 6.
In the sixth embodiment, the points different from the first embodiment will be described.

<<< Configuration of Distributor 47 >>>
FIG. 31 is a diagram showing a distributor 47.
The distributor 47 of FIG. 31 is fixed to the plate 20 with the front surface 21 and the back surface 22 of the plate 20 sandwiched between them.
(A) shows the case where the vibrator is arranged on the outer side of the center of one side of the quadrangular plate 20.
The distributor 47 has a U-shaped groove 52 on the side when viewed from the front-rear direction, and the central outer edge of the plate 20 is fitted into the groove 52.
The plate 20 has three screw holes 24 that serve as fixing points on the two sides to which the vibrator is fixed.
The plate 20 fixes the distributor 47 with screws in the central screw hole.
The plate 20 does not have screw holes 24 on the side where the vibrator is not fixed.
As in (a), it is not necessary to provide the fixing points on all the sides, but it may be provided only on the two opposite sides.

(B) shows the case where the vibrators are arranged at the four corners of the quadrangular plate 20.
The distributor 47 has a V-shaped groove 53 on the side when viewed from the vertical direction, and the corner of the plate 20 is fitted into the groove 53.
The orthogonal bottom of the V-shaped groove 53 is in surface contact with two orthogonal ends on the two sides.
The triangular side surface of the V-shaped groove 53 is in surface contact with the front surface and the back surface of the corner 27.
The plate 20 has screw holes 24 on the outer edge of the corner.
The plate 20 fixes the distributor 47 with screws in the screw holes.

<<< Effect of Distributor 47 >>>
Since the distributor 47 is fixed to the plate 20 with the plate 20 interposed therebetween, the vibration of the vibrator can be transmitted from the side of the plate 20 even when the plate 20 is thin and the height of the side in the vertical direction is small.

Modification example 1.
The shape of the distributor 47 may be any shape that can transmit the vibration of the vibrator to the side of the plate 20.
The distributor 47 may be fixed only to the side of the plate 20 or only to the corners, but the distributor 47 may be fixed to the following locations.
Side and front surface of plate 20 Side and back surface of plate 20 Side and front surface and back surface of plate 20 Side surface of plate 20 only Back surface of side of plate 20 Side surface and back surface of plate 20 Corner and front surface of plate 20 Plate 20 Corner and back surface Plate 20 corner and front surface and back surface Plate 20 corner surface only Back side of plate 20 corner Front surface and back surface of plate 20 corner Distributor 47 only on the side of plate 20 or corner It is possible to obtain the same effect as in the case of fixing only to the plate, and in any of the above cases, it can be said that the side of the plate is vibrated.

Embodiment 7.
In the seventh embodiment, the points different from the first embodiment will be described.

<<< Configuration of plate 20 and vibration unit 40 >>>
FIG. 32 is a diagram showing the plate 20 and the vibration unit 40.
FIG. 32 shows a vibration unit 40 that vibrates a plurality of locations on the outer circumference of the plate 20 from the outside of the plate 20.
The outer circumference of the plate 20 refers to the contour when the plate 20 is viewed in a plane.
The outside of the plate 20 means the outside of the contour of the plate 20.
The vibration unit 40 simultaneously generates traveling waves at the same wavelength from the outer circumference of the plate 20 toward the center of the plate.
(A) shows a case where the vibrator 41 is arranged at the corner 27 of the triangular plate 20 and the vibrator 42 is arranged at the center outer side of the side 23 facing the corner 27.
(B) shows a case where the vibrator 41 is arranged at the corner 27 of the pentagonal plate 20 and the vibrator 42 is arranged at the center outer side of the side 23 facing the corner 27.

The vibration unit 40 vibrates a plurality of places on the plate 20.
As described in the first embodiment, the plurality of locations may be a plurality of locations including only the plurality of sides 23 of the plate 20.
As described in the fifth embodiment, the plurality of locations may be a plurality of locations including only the plurality of corners 27 of the plate 20.
As described in FIGS. 32 (a) and 32 (b), the plurality of locations may be a plurality of locations including the side 23 of the plate 20 and the corner 27.
In the case of a plurality of locations including the side 23 and the corner 27, any of the following may be used.
One side 23 and one corner Multiple side 23 and one corner One side 23 and multiple corners Multiple side 23 and multiple corners Typical examples of multiple side 23 and multiple corners are all Side 23 and all corners.
It is desirable that the plurality of locations are arranged in pairs on the diagonal line of the plate 20 or on a straight line passing through the center or the center of gravity of the plate 20 such as the diameter.

The side 23 does not have to be flat.
(C) shows a case where the vibrator 41 and the vibrator 42 are arranged in the radial direction of the circular plate 20, and the vibrator 43 and the vibrator 44 are arranged in the orthogonal radial direction.
In the case of (c), the case where the side 23 is the outer peripheral curved surface of the cylinder is shown.
The side 23 may be another curved surface, or may be a combination of a curved surface and a flat surface.
In (c), the vibrator 43 and the vibrator 44 may not be provided.
In (c), the number of vibrators may be increased.

<<< Plane shape of plate 20 >>>
FIG. 33 is a diagram showing a planar shape of the plate 20.
The planar shape of the plate 20 is not limited to a regular polygon or a circle.
(A) shows the case where the planar shape of the plate 20 is a cross shape.
(B) shows the case where the planar shape of the plate 20 is a star shape.
(C) shows the case where the planar shape of the plate 20 is a long quadrangle with rounded corners.
(D) shows the case where the planar shape of the plate 20 is elliptical.
Although not shown, the planar shape of the plate 20 may be trapezoidal, cloud-shaped, chevron-shaped, irregular-shaped, or any other shape.

<<< Cross-sectional shape of plate 20 >>>
FIG. 34 is a diagram showing a cross-sectional shape of AA in FIG. 1 of the plate 20.
The cross-sectional shape of the plate 20 is not limited to a rectangle.
(A), (c) and (e) show the case where the lower center of the plate 20 is recessed upward.
(A) shows the case where it is recessed in a concave shape.
(B) shows the case where it is recessed in a V shape.
(C) shows the case where it is recessed in an arc shape.
(B), (d) and (f) show the case where the upper center of the plate 20 bulges downward.
(B) shows the case where it swells in a convex shape.
(D) shows the case where it swells in a V shape.
(F) shows the case where it swells in an arc shape.

(G) shows the case where the central portion of the plate 20 has a concave shape recessed upward and downward.
(H) shows a case where the central portion of the plate 20 has a convex shape bulging upward and downward.
Although not shown, the cross-sectional shape of the plate 20 may be an uneven shape, a wavy shape, or another shape.
(I) shows the case where the side 23 is inclined.
When the side 23 is inclined, the slope of the distributor 47 may be provided and the vibrator 41 and the vibrator 42 may be attached.
The cross section of the distributor 47 has a triangular shape.
The slope of the distributor 47 and the side 23 have the same inclination angle.
The vibrator 41 and the vibrator 42 can vibrate the outer circumference of the plate 20 up and down via the distributor 47.

Embodiment 8.
The vibration device 100 can be used for a device that dislikes horizontal vibration.
The vibration device 100 can be used as a work processing device.
The vibration device 100 can be used for a processing device, a transfer device, a sorting device, an assembly device, a manufacturing device, a vibration transfer device, or another material handling device.
The material means a substance, a material, a raw material, a cloth, a material, a tool, an instrument, a tool, or the like.
The shape, material, properties, and number of materials do not matter.
The material may be a lump, a plate, or a grain or powder.
The material may be a solid, a liquid, or an elastic body.

*** Supplementary explanation of the embodiment ***
The embodiments described above are exemplary of desirable embodiments and are not intended to limit the technical scope of the invention.
The embodiment may be partially implemented or may be implemented in combination with other embodiments.
Further, the above-described embodiments may be combined.

100 vibration device, 10 base, 11 top, 12 bottom, 13 wall, 14 space, 20 plate, 21 front, 22 back, 23 side, 24 screw holes, 25 screws, 26 fulcrum, 27 corners, 29 depressions, 40 vibration units , 41, 42, 43, 44, 45 vibrator, 46 frame, 47 distributor, 48 horizontal part, 49 vertical part, 50 spacer, 51 support, 52 groove, 53 groove, 60 traveling wave, 70 standing wave, 80 controller, 81 air Compressor, 82 air pipe, 83 regulator, 84 processor, 200 screen printing device, 201 screen plate, 202 screen, 203 squeegee, 204 paste, 205 through hole, 206 suction pipe, 207 vacuum pump, 300 shearing device, 301 blade, 400 Drilling device, 401 drill, 500 vibration transfer device, 900 workpieces, 901 parts.

Claims (21)

With the plate
With a base that fixes the circumference of the plate,
A vibration unit having a plurality of vibrators that vibrate a plurality of places on the outer circumference of the plate from positions outside the plate while the periphery of the plate is fixed to the base.
A vibration device including a controller for controlling the vibration of the vibration unit. The vibration device according to claim 1, wherein the vibration unit vibrates the outer circumference of the plate up and down at the same frequency by a traveling wave from the outside of the plate. The vibration device according to claim 1 or 2, wherein the vibration unit simultaneously generates a traveling wave on the outer periphery of the plate at the same wavelength. The vibration device according to claim 3, wherein the vibration unit generates the traveling wave with the same amplitude and vibrates the plate with a standing wave. The plurality of places where the vibration unit vibrates the plate are
Multiple locations consisting of only multiple sides of the plate,
Multiple locations consisting of only a plurality of corners of the plate, and
The vibration device according to any one of claims 1 to 4, which is any one of a plurality of locations including a side and a corner of the plate. The vibration unit has a vibrator and has a vibrator.
The vibration device according to any one of claims 1 to 5, wherein the controller vibrates the vibrator at a frequency of 10 Hz or more and 800 Hz or less. The vibration device according to any one of claims 1 to 5, wherein the vibration unit has an air vibrator driven by air pressure or a vibrator driven by a voice coil motor. A screen printing apparatus including the vibration apparatus according to any one of claims 1 to 7. A vibration transfer device including the vibration device according to any one of claims 1 to 7. A material handling device including the vibration device according to any one of claims 1 to 7. Fix the circumference of the plate to the base,
The vibration unit having a plurality of vibrators, with the periphery of the plate is fixed to the base, by vibrating up and down at the same frequency the plurality of locations of the outer periphery of the plate from a position outside of said plate, said plate A vibration method that vibrates with a standing wave. With the plate
With a base that fixes the circumference of the plate,
A vibration unit that vibrates a plurality of locations on the outer circumference of the plate from the outside of the plate while the periphery of the plate is fixed to the base.
A controller for controlling the vibration of the vibration unit is provided .
The vibration unit has a plurality of vibrators attached to the outside of the plate, and the plurality of vibrators vibrate a plurality of opposing sides of the plate from a position outside the plate to vibrate the plate. A vibration device that vibrates with a standing wave generated by superimposing multiple traveling waves. With the plate
With a base that fixes the circumference of the plate,
A vibration unit that vibrates a plurality of locations on the outer circumference of the plate from the outside of the plate while the periphery of the plate is fixed to the base.
A controller for controlling the vibration of the vibration unit is provided .
The plate has a plurality of fixation points to the base.
The vibration unit has a plurality of vibrators attached to the outside of the plurality of fixing points and the outside of the plurality of facing sides of the plate, respectively, and the plurality of vibrations are used to perform the vibration unit from the plurality of fixing points. The plates are vibrated at the same amplitude, at the same wavelength, and at the same frequency from positions that are outside and outside the facing sides of the plate. A vibration device that vibrates with a standing wave generated by superimposing multiple traveling waves. With the plate
With a base that fixes the circumference of the plate,
A vibration unit that vibrates a plurality of locations on the outer circumference of the plate from the outside of the plate while the periphery of the plate is fixed to the base.
With a plurality of distributors fixed to the plate,
A controller for controlling the vibration of the vibration unit is provided .
The vibration unit has a plurality of vibrators attached to the plurality of distributors, respectively, and the plurality of vibrators allow a plurality of opposing sides of the plate to have the same amplitude, the same wavelength, and the same frequency. A vibration device that vibrates the plate with a standing wave. With the plate
With a base that fixes the circumference of the plate,
A vibration unit that vibrates a plurality of locations on the outer circumference of the plate from the outside of the plate while the periphery of the plate is fixed to the base.
A controller for controlling the vibration of the vibration unit is provided .
The vibration unit has a plurality of vibrators fixed to the outside of the plate, and the plurality of vibrators allow the plurality of vibrators to be outside the fixed positions of the plurality of vibrators to the plate at the same amplitude and at the same wavelength. A vibration device that vibrates at the same frequency and vibrates the plate with a standing wave using the fixed positions of the plurality of vibrators as fulcrums. Fix the circumference of the plate to the base,
With the circumference of the plate fixed to the base by the vibration unit, from positions outside the plurality of opposing sides of the plate, at a plurality of locations on the outer circumference of the plate with the same amplitude from the outside of the plate. A vibration method in which the plate is vibrated up and down at the same wavelength and at the same frequency, and the plate is vibrated by a standing wave generated by superimposing a plurality of traveling waves. Fix the circumference of the plate to the base,
With the circumference of the plate fixed to the base by the vibration unit, the plate is located at a position outside the plurality of fixing points for fixing the plate and outside from the plurality of opposite sides of the plate. A vibration method in which a plurality of places on the outer periphery of the plate are vibrated up and down from the outside of the plate, and the plate is vibrated by a standing wave generated by superimposing a plurality of traveling waves. Fix the circumference of the plate to the base,
With a plurality of vibrators attached to a plurality of distributors fixed to the plate, the periphery of the plate is fixed to the base, and a plurality of places on the outer periphery of the plate are moved up and down at the same frequency from the outside of the plate. A vibration method in which the plate is vibrated to vibrate with a standing wave. Fix the circumference of the plate to the base,
A plurality of vibrators which are fixed to the outside of the plate, with the periphery of the plate is fixed to the base, the outer fixed position to said plate of said plurality of vibrator is vibrated up and down at the same frequency, the A vibration method in which the plate is vibrated by a standing wave with the fixed positions of a plurality of vibrators as fulcrums. The vibration device according to claim 14, wherein the distributor is a metal fitting bent into an L shape. The vibration method according to claim 18, wherein the distributor is a metal fitting bent into an L shape.

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