JP6989984B2 - Vibration device, vibration method, and screen printing device - Google Patents

Description

The present invention relates to a vibration device for a screen plate, a plate, and a printing tool , and a screen printing device.

Conventionally, there is a screen printing device that vibrates the screen to print on a work.

Japanese Unexamined Patent Publication No. 63-199643 Japanese Unexamined Patent Publication No. 2005-238723 Japanese Unexamined Patent Publication No. 2010-221409 Japanese Unexamined Patent Publication No. 2009-126114

In a screen printing device, even if the screen is vibrated, the amount of paste that enters the holes of the screen may vary during fill-in-the-blank printing, and the holes may not be filled with a certain amount of paste.

In embodiments of the present invention, it is an object of the present invention to provide a vibration device suitable for screen plates, plates, and printing tools .

The vibration device of the present invention is
A screen version with a screen and
A vibration unit that vibrates a plurality of facing frames of the screen plate, and
With a controller that controls the vibration of the vibration unit
Equipped with
The vibration unit has a plurality of vibrators attached to the outside of the plurality of frames, and the plurality of vibrators allow the plurality of frames of the screen plate to be opposed to each other from a position outside the plurality of frames. It is characterized in that the screen is vibrated at the same amplitude, at the same wavelength, and at the same frequency, and the screen is vibrated by a standing wave generated by superimposing a plurality of traveling waves .
The vibration device of the present invention may be a vibration device of a plate or a printing tool.

According to the present invention, the screen plate , the plate, or the printing tool is stably vibrated by the vibration unit applying vibration from a plurality of opposite sides on the outside of the screen plate, the plate, or the printing tool.

It is a perspective view of the vibration apparatus 100 of Embodiment 1. FIG. FIG. 5 is a sectional view taken along the line AA of the vibration device 100 of FIG. 1 of the first embodiment. It is explanatory drawing of the vibration method of Embodiment 1. FIG. It is a figure which shows the structure of the vibration measurement. It is a distribution map of the vertical vibration of the plate 20 by the air pressure of 0.2MPa. It is a distribution map of the vertical vibration of the plate 20 by the air pressure of 0.3MPa. It is a distribution map of the vertical vibration of the plate 20 by the air pressure of 0.4 MPa. It is a distribution map of the vertical vibration of the plate 20 by the air pressure of 0.5 MPa. It is a distribution map of vibration in the horizontal direction. It is a figure which shows the comparative example of one-sided vibration. It is a distribution map of one-sided vibration. It is a figure which shows the comparative example of the lateral vibration on both sides. It is a distribution map of the vertical vibration of the lateral vibration on both sides. It is a figure which shows the modification of the vibration apparatus 100 of Embodiment 1. FIG. It is a figure which shows the modification of the vibration apparatus 100 of Embodiment 1. FIG. It is a figure which shows the modification of the vibration apparatus 100 of Embodiment 1. FIG. It is a figure which shows the modification of the vibration apparatus 100 of Embodiment 1. FIG. It is a figure which shows the modification of the vibration apparatus 100 of Embodiment 1. FIG. It is a figure which shows the modification of the vibration apparatus 100 of Embodiment 1. FIG. It is a figure which shows the modification of the vibration apparatus 100 of Embodiment 1. FIG. It is a figure which shows the screen printing apparatus 200 of Embodiment 2. It is a figure which shows the shearing apparatus 300 of Embodiment 3. It is a figure which shows the drilling apparatus 400 of Embodiment 4. It is a figure which shows the vibration transfer device 500 of Embodiment 5. It is explanatory drawing of the vibration of the vibration transfer device 500 of Embodiment 5. It is a figure which shows the modification of the vibration transfer device 500 of Embodiment 5. It is a figure which shows the modification of the vibration transfer device 500 of Embodiment 5. It is a figure which shows the modification of the vibration transfer device 500 of Embodiment 5. It is a figure which shows the modification of the vibration transfer device 500 of Embodiment 5. It is a figure which shows the modification of the vibration transfer device 500 of Embodiment 5. It is a figure which shows the distributor 47 of Embodiment 6. It is a figure which shows the plate 20 and the vibration unit 40 of Embodiment 7. It is a figure which shows the planar shape of the plate 20 of Embodiment 7. It is a figure which shows the AA cross-sectional shape of FIG. 1 of the plate 20 of Embodiment 7. 9 is a three-view view of the printing unit 600 of the screen printing apparatus according to the ninth embodiment. It is a perspective view of the vibration apparatus 100 of Embodiment 9. FIG. It is a front view of the printing tool 260 of Embodiment 9. It is a side view of the printing tool 260 of Embodiment 9. It is a top view of the printing tool 260 of Embodiment 9. FIG. It is a side view of the printing tool 260 of Embodiment 9. It is a figure which shows the vibration measurement result of Embodiment 9. It is a figure which shows the vibration measurement result of Embodiment 9. It is a side view of the printing tool 260 of Embodiment 9. It is a figure which shows the vibration measurement result of Embodiment 9. It is a figure which shows the vibration measurement result of Embodiment 9. FIG. 5 is a five-view view of the printing tool 260 according to the ninth embodiment. FIG. 5 is a five-view view of the printing tool 260 according to the tenth embodiment. FIG. 3 is a three-view view of the printing tool 260 according to the tenth embodiment. FIG. 3 is a three-view view of the printing tool 260 according to the tenth embodiment. FIG. 5 is a five-view view of the printing tool 260 according to the tenth embodiment. It is a figure which shows the modification of the printing tool 260 of Embodiments 9 and 10. It is a figure which shows the screen printing apparatus 200 of Embodiment 11. FIG. It is a perspective view of the vibration apparatus 100 of Embodiment 11. FIG. It is a perspective view of the vibration apparatus 100 of Embodiment 11. FIG. It is a perspective view of the vibration apparatus 100 of Embodiment 11. FIG. It is a perspective view of the vibration apparatus 100 of Embodiment 11. FIG. It is a figure which shows the modification of the vibration apparatus 100 of Embodiment 11. FIG. It is a figure which shows the modification of the screen printing apparatus 200 of Embodiment 11. FIG.

Embodiment 1.
FIG. 1 is a perspective view of the vibration device 100 of the first embodiment.
FIG. 2 is a sectional view taken along the line AA of the vibration device 100 of FIG. 1 of the first embodiment.
In FIG. 1, X indicates a front-back direction.
In FIGS. 1 and 2, Y indicates a left-right direction and Z indicates a vertical direction.

<<< Configuration of Vibration Device 100 >>>
The vibration device 100 includes a base 10, a plate 20, a vibration unit 40, and a controller 80.

<<< Explanation of Base 10 >>>
The base 10 has a box shape with an open top.
The base 10 has an upper surface 11, a bottom surface 12, and a wall 13.
The base 10 has a space 14 in the center.
The upper surface 11 is composed of the top surface of the wall 13 and has a rectangular shape with an opening in the center.
The bottom surface 12 has a rectangular shape.
The wall 13 is a side wall of the base 10 which is erected from the periphery of the bottom surface 12.
The space 14 is a hexahedral space surrounded by the bottom surface 12 and the wall 13.

<<< Explanation of plate 20 >>>
The plate 20 is preferably made of a material that allows sound waves to easily pass through, and a metal is preferable.
The material of the plate 20 is preferably aluminum, titanium, or stainless steel.
Further, aluminum and titanium are preferable, and aluminum is the best.
The plate 20 is preferably rectangular, preferably square.
The plate 20 has a front surface 21, a back surface 22, and four sides 23.
The front surface 21 and the back surface 22 are parallel rectangular planes having the same shape.
The side 23 is a surface between the front surface 21 and the back surface 22 of the plate 20.
The side 23 is a plane orthogonal to the front surface 21 and the back surface 22 of the plate 20.
The plate 20 has a plurality of screw holes 24 around it.
A total of eight screw holes 24 are provided at the corners of the plate 20 and at the center of each side.
The plate 20 is firmly fixed to the base 10 by a screw 25 inserted into the screw hole 24.
Hereinafter, the position of the screw hole 24 is referred to as a fixing point.
The plate 20 is fixed to the base 10 at a fixing point provided around the plate 20.

<<< Explanation of vibration unit 40 >>>
The vibration unit 40 has a plurality of vibrators and vibrates the plurality of sides 23 of the plate 20 at the same frequency.
The vibration unit 40 vibrates the opposite sides of the plate 20 up and down.
The vibration unit 40 has two vibrators, a vibrator 41 and a vibrator 42.
The vibration unit 40 vibrates the outside of the fixed portion where the screw hole 24 is located up and down.
The two vibrators, the vibrator 41 and the vibrator 42, have the same specifications.
The two vibrators, the vibrator 41 and the vibrator 42, are vibrators driven by air pressure.

The following vibrators can be used as the vibrators driven by air pressure.
(1) Turbine vibrator (2) Roller vibrator (3) Ball vibrator (4) Piston vibrator

The vibrators (1), (2), and (3) have less noise and can operate at high speed.
In particular, a turbine vibrator with stable operation is most suitable.
The piston vibrator has a problem that it is noisy and operates slowly.

The vibration unit 40 has a distributor 47.
The distributor 47 transmits the vibration of the vibrator 41 and the vibrator 42 to the side 23 of the plate 20.
The distributor 47 fixes the vibrator 41 and the vibrator 42 to the side 23 of the plate 20.
The distributor 47 is a metal fitting bent into an L shape.
The distributor 47 has a horizontal portion 48 and a vertical portion 49.
The horizontal portion 48 fixes the top surface of the vibrator 41 or the vibrator 42.
The horizontal portion 48 fixes the vibrator 41 or the vibrator 42 so that the rotations of the vibrator 41 and the vibrator 42 are reversed from each other.
In FIG. 2, the vibrator 41 rotates counterclockwise, and the vibrator 42 rotates clockwise.
The vertical portion 49 has a vertical width equal to or smaller than the vertical width of the side 23, and is fixed to the side 23.

The distributor 47 has a front-rear width larger than the width in the front-rear direction of the top surface of the vibrator 41 and the vibrator 42.
The width of the distributor 47 in the front-rear direction is preferably more than twice and less than 10 times the width of the top surface of the vibrator 41 and the vibrator 42 in the front-rear direction, preferably 5 times.
The distributor 47 has a front-rear width that is less than one-half and more than one-eighth of the width of the plate 20 in the front-rear direction, preferably one-fifth.
The distributor 47 transmits the vibrations of the vibrator 41 and the vibrator 42 to a wide range of the side 23 of the plate 20.

<<< Explanation of controller 80 >>>
The controller 80 controls the vibration of the vibration unit 40.
The controller 80 vibrates the vibrator at a frequency of 10 Hz or more and 800 Hz or less.
The controller 80 vibrates a plurality of vibrators at the same frequency.
The controller 80 includes an air compressor 81, an air pipe 82, a regulator 83, and a processor 84.

The air compressor 81 generates compressed air.
The air pipe 82 is connected to the air compressor 81 and allows compressed air to flow.
The air pipe 82 branches in a Y shape on the way and is connected to the vibrator 41 and the vibrator 42.

The regulator 83 is a control device that controls the pressure of the compressed air.
The regulator 83 determines the vibration frequency between the vibrator 41 and the vibrator 42 by controlling the pressure of the compressed air.

The processor 84 has a central processing unit and a program.
The processor 84 can be realized by an integrated circuit, a circuit board, or the like.
The processor 84 controls the operation of the vibration device 100.
The processor 84 is connected to the air compressor 81 and controls the on / off operation and the operation time of the air compressor 81.

<<< Explanation of vibration method >>>
The vibration method of the vibration device 100 will be described.

<Initial setting step>
With the circumference of the plate 20 fixed to the base 10 by the screw 25, the worker turns on the power switch of the vibration device 100. The worker turns on the pressure of the compressed air and the vibration frequency of the vibrator 41 and the vibrator 42. It has a correspondence table of.
The worker sets the pressure of the compressed air corresponding to the vibration frequency of the vibrator 41 and the vibrator 42 by the regulator 83 with reference to the correspondence table.
The worker sets the pressure corresponding to any audible frequency of 10 Hz or more and 800 Hz or less.

<Progressive wave generation step>
Since the air pipe 82 is branched in a Y shape and connected to the vibrator 41 and the vibrator 42, air having the same pressure is supplied to the vibrator 41 and the vibrator 42. As a result, the vibrator 41 and the vibrator 42 vibrate up and down at the same frequency.
The vibration frequency of the vibrator 41 and the vibrator 42 is preferably an audible frequency.
The vibrator 41 and the vibrator 42 are fixed to the left and right sides 23 of the plate 20, and give a sine wave traveling wave 60 to the left and right sides 23 of the plate 20.
The vibrator 41 and the vibrator 42 simultaneously generate a traveling wave 60 with the same amplitude, the same wavelength, and the same frequency.

<Standing wave generation step>
When the traveling wave 60 is simultaneously generated at the same amplitude, the same wavelength, and the same frequency in the opposite directions, the traveling waves 60 from the left and right overlap on the plate 20 to generate a standing wave 70.
A standing wave is a wave whose position does not move over time.
The plate 20 vibrates up and down at the same vibration frequency as the vibrator 41 and the vibrator 42 by the standing wave 70.

<Synchronization step>
Even if vibration is started in an asynchronous state in which the vibrator 41 and the vibrator 42 are out of phase, the phases of the vibrator 41 and the vibrator 42 match in a short time due to the synchronization phenomenon, and the vibration between the vibrator 41 and the vibrator 42 is generated. It becomes a synchronous state and immediately shifts to the vibration of a steady wave.

<Vertical vibration step>
Hereinafter, vertical vibration by the vibration method will be described with reference to FIG.
FIG. 3 is a schematic view of vertical vibration seen from the front-back direction of the center of the plate 20 in the left-right direction.
In FIG. 3, the fulcrum 26 is the center of the plate 20 in the vertical direction and the center of the screw hole 24.
(A) When a downward force is applied to the side 23 of the plate 20 by the vibrator 41 and the vibrator 42, an upward force is generated in the center of the plate 20 via the fulcrum 26.
(B) When a larger downward force is applied to the side 23 of the plate 20 by the vibrator 41 and the vibrator 42, the center of the plate 20 rises.
(C) When the downward force of the side 23 of the plate 20 by the vibrator 41 and the vibrator 42 becomes weak, the center of the plate 20 descends.
(D) When an upward force is applied to the side 23 of the plate 20 by the vibrator 41 and the vibrator 42, a downward force is generated at the center of the plate 20 via the fulcrum 26.
(E) When a larger upward force is applied to the side 23 of the plate 20 by the vibrator 41 and the vibrator 42, the center of the plate 20 is lowered.
(F) When the upward force of the side 23 of the plate 20 by the vibrator 41 and the vibrator 42 becomes weak, the center of the plate 20 rises.

<Flap phenomenon>
By repeating the operations (a) to (f) with (a) to (f) as one cycle, the plate 20 vibrates up and down at the same frequency as the vibration frequencies of the vibrator 41 and the vibrator 42.
Since the plate 20 vibrates as if it were flapping on the left and right between the fulcrums 26, this phenomenon is hereinafter referred to as a flapping phenomenon.
The flapping phenomenon is a phenomenon in which the plate 20 vibrates up and down around the fulcrum 26 by supplying air to the vibrators fixed to the left and right sides of the plate 20.
In order to facilitate the flapping phenomenon, it is desirable that the fixed positions of the vibrator 41 and the vibrator 42 and the positions of the two screw holes 24 are on a straight line. That is, it is desirable that the plurality of vibrators exist as an extension of the line connecting the opposite fixed points on the opposite sides of the plate 20.
Even if the fixed positions of the vibrator 41 and the vibrator 42 and the positions of the two screw holes 24 are not aligned with each other, the flapping phenomenon will occur if the plate 20 is securely fixed to the base 10. ..
If the thickness of the wall 13 is increased, the flapping phenomenon may be hindered. Therefore, the thickness of the wall 13 should be thin and the opening of the space 14 should be wide. It is desirable that the thickness of the wall 13 is larger than the diameter of the screw hole 24 and less than twice the diameter of the screw hole 24.

<<< Specific example >>>
Hereinafter, specific examples will be described.
As the plate 20, a square aluminum plate having a side of about 0.5 m is used.
The speed of sound V of aluminum is 6320 [m / s]. However, assuming that the temperature of aluminum is constant, the change in sound velocity due to temperature is not considered.
As the vibrator 41 and the vibrator 42, an air vibrator manufactured by EXCEN Corporation having the following specifications is used.
When the air pressure is 0.2 or more and 0.6 MPa or less, an air vibrator having a vibration frequency f of 119 Hz or more and 414 Hz or less is desirable. Alternatively, an air vibrator having a vibration frequency f of 110 Hz or more and 290 Hz or less when the air pressure is 0.3 or more and 0.6 MPa or less is desirable.

Here, it is assumed that an air vibrator having a vibration frequency f of the following values is used when the air pressure is the following.
Vibration frequency when the air pressure is 0.5 MPa f: 216.5 Hz
Vibration frequency when the air pressure is 0.4 MPa f: 206.6 Hz
Vibration frequency when the air pressure is 0.3MPa f: 177.3Hz
Vibration frequency when the air pressure is 0.2 MPa f: 133.0 Hz

The wavelength can be calculated by the following formula.
Wavelength λ [m] = speed of sound V [m / s] / vibration frequency f [Hz]
The wavelength of the traveling wave 60 is calculated as follows.
When the air pressure is 0.5 MPa:
Wavelength λ [m] = 6320 [m / s] / 216.5 [Hz] = 29.19m
When the air pressure is 0.4 MPa:
Wavelength λ [m] = 6320 [m / s] / 206.6 [Hz] = 30.59m
When the air pressure is 0.3MPa:
Wavelength λ [m] = 6320 [m / s] / 177.3 [Hz] = 35.65m
When the air pressure is 0.2 MPa:
Wavelength λ [m] = 6320 [m / s] /133.0 [Hz] = 47.52m

The traveling wave 60 generated by the vibrator 41 and the vibrator 42 can be expressed by the following equation.
R (y, t) = A * sin2π ((t / T)-(y / λ))
L (y, t) = A * sin2π ((t / T) + (y / λ))
y [m]: Place of the plate in the Y direction t [s]: Time R (y, t): Place y [m], Displacement of the traveling wave 60 in the Z direction at time t [s] [m]
L (y, t): Displacement [m] of the traveling wave 60 in the Z direction at the place y [m] and the time t [s].
A: Amplitude of the traveling wave 60 [m]
T: Period of progressive wave 60 [s]
λ: Wavelength of traveling wave 60 [m]

The standing wave 70 generated by superimposing the traveling wave 60 generated from the vibrator 41 and the vibrator 42 can be expressed by the following equation representing a sine and cosine standing wave.
z (y, t)
= R (y, t) + L (y, t)
= 2A * sin (2π (t / T)) * cos (2π (y / λ))
y [m]: location of the plate in the Y direction t [s]: time z (y, t): location y [m], displacement of the standing wave 70 in the Z direction at time t [s] [m]
A: Amplitude of the traveling wave 60 [m]
T: Period of progressive wave 60 [s]
λ: Wavelength of traveling wave 60 [m]

cos (2π (y / λ)) indicates the amplitude of the standing wave 70.
The place where the amplitude of the standing wave 70 is 0, that is, the place where cos (2π (y / λ)) is 0 is called a “node”.
The place where the amplitude of the standing wave 70 is maximum, that is, the place where the absolute value of cos (2π (y / λ)) is 1, is called “antinode”.

In order to vibrate the plate 20 up and down, it is sufficient to prevent the generation of a standing wave node at any position y in the left-right direction between the fulcrums 26.
Since the standing wave node is generated every half wavelength, if the distance between the fulcrums 26 is less than the half wavelength of the standing wave, the standing wave node should not exist at any place y in the left-right direction of the plate 20. Can be done.
If the position of the "knot" of the standing wave 70 is set as a fixed point and the fixed point is held (screwed), the "knot" becomes a fulcrum of flapping.

If the distance between the fulcrums 26 is larger than the half wavelength of the standing wave, nodes will be generated in the plate 20.
Therefore, the distance between the fixed points in the left-right direction of the plate 20 must be less than the following length.
Half wavelength when the air pressure is 0.5 MPa: Wavelength λ [m] / 2 = 14.56 m
Half wavelength when the air pressure is 0.4 MPa: Wavelength λ [m] / 2 = 15.29 m
Half wavelength when the air pressure is 0.3 MPa: Wavelength λ [m] / 2 = 17.82 m
Half wavelength when the air pressure is 0.2 MPa: Wavelength λ [m] / 2 = 23.766 m
As described above, the frequency and wavelength of the standing wave are determined by the air pressure between the vibrator 41 and the vibrator 42, and the maximum length of the plate 20 is determined.

<<< Vibration measurement result >>>
The vibration of the plate 20 was measured using a square aluminum plate having a side of about 0.5 m as the plate 20.
As shown in FIG. 4, the base 10 was removed from the vibration device 100 of FIG. 1, the plate 20 was placed on an air mat, the circumference of the plate 20 was freed, the plate 20 was vibrated, and the amplitude of the vibration was measured.

5 to 8 are views showing measurement results of vertical vibration at 49 points in the lower half region of the plate 20.
5 to 8 show the displacement in the Z direction (displacement in the upward direction) in the case of FIG. 3B, where the displacement in the Z direction when the plate 20 is a plane is 0.
The vibration in the upper half region of the plate 20 shown in FIGS. 5 to 8 is not measured because it can be considered that the vibration is symmetrical with the lower half region of the plate 20.
FIG. 5 is a distribution diagram of vertical vibration of the plate 20 due to an air pressure of 0.2 MPa.
FIG. 6 is a distribution diagram of vertical vibration of the plate 20 due to an air pressure of 0.3 MPa.
FIG. 7 is a distribution diagram of the vertical vibration of the plate 20 due to the air pressure of 0.4 MPa.
FIG. 8 is a distribution diagram of vertical vibration of the plate 20 due to an air pressure of 0.5 MPa.

Looking at the first row of FIG. 5, the amplitude of the vertical vibration is 14.8 μm> 12.6 μm> 9.60 μm> 7.68 μm <8.00 μm <10.5 μm <15.0 μm, and the plate 20 The amplitude of vibration is larger at the edges than at the center. That is, vibration unevenness such as knots is generated in the central portion of the plate 20.
It is considered that the reason is that the pressure is weak at an air pressure of 0.2 MPa and the vibrator 41 and the vibrator 42 cannot be vibrated stably.
Looking at the first row of FIG. 6, the amplitude of the vertical vibration is 5.28 μm <9.53 μm <12.2 μm <13.2 μm> 13.1 μm> 11.0 μm> 8.40 μm, and the plate 20 The amplitude of vibration is larger in the central part than in the end part. That is, it is considered that the belly is generated in the central portion of the plate 20.
Also in the cases of FIGS. 7 and 8, the vibration amplitude of the central portion of the plate 20 is larger than that of the end portion. That is, it is considered that the belly is generated in the central portion of the plate 20.
Therefore, with an air pressure of 0.2 MPa, the plate 20 cannot be accurately vibrated in the vertical direction.
On the other hand, with an air pressure of 0.3 MPa or more and 0.5 MPa or less, the plate 20 can be accurately vibrated in the vertical direction.

The measurement result of the vibration in the front-back and left-right directions will be described with reference to FIG.
FIG. 9 is a table showing the measurement results of the horizontal vibrations at the measurement points 1 to 12 on the two sides of the plate 20 in FIGS. 5 to 8.
At the air pressure of 0.2 MPa, the values of more than 2 micrometers are shown at the measurement points 1 and 2.
At an air pressure of 0.3 MPa or more and 0.5 MPa or less, all points show values of less than 2 micrometers.
At an air pressure of 0.3 MPa or more and 0.5 MPa or less, the amplitude of vibration in the front-back and left-right directions is less than about 10% or less than 15% of the amplitude of vibration in the up-down direction, and it is considered that there is no vibration in the horizontal direction. be able to.

The above measurement results are the measurement results when the circumference of the plate 20 is freed and the plate 20 is vibrated.
As shown in FIG. 1, since the circumference of the plate 20 of the vibration device 100 is fixed to the base 10 by the screws 25, the vertical vibration is actually limited around the plate 20 (particularly, the portion of the screw hole 24). Has been done.
When the plate 20 is vibrated with the circumference of the plate 20 free, the plate 20 vibrates up and down with the center as the abdomen. Therefore, even when the circumference of the plate 20 is fixed at a fixed portion and the plate 20 is vibrated, the plate 20 tends to vibrate up and down with the center as the abdomen. As a result, as shown in FIG. 3, it can be considered that the flapping phenomenon occurs with the fulcrum 26 as the center of flapping.
When the circumference of the plate 20 is fixed to the base 10 and the plate 20 is vibrated, the lateral vibration is further reduced as compared with the case where the circumference of the plate 20 is freed and the plate 20 is vibrated. Can be thought of.
Furthermore, looking at the above measurement results, if the distance between the fixed points in the left-right direction of the plate 20 is smaller than half a wavelength, the fixed points will be the fulcrum of flapping even if the position of the "node" of the standing wave 70 is not fixed. Can be thought of as
For example, when the air pressure is 0.4 MPa, the half wavelength is 15 m, but even when the distance between the fixed points in the left-right direction of the plate 20 is about 0.5 m, no "knot" appears.
As a result, even when the distance between the fixed points is 10 m, 5 m, 1 m, or the like, it can be considered that the fixed points serve as fulcrums for flapping.

<< Explanation of comparative example >>
<One-sided vibration>
FIG. 10 shows the vibrator 42 and the distributor 47 removed from the configuration of FIG.
The plate 20 is vibrated only by the vibrator 41 on one side.
The traveling wave 60 generated from the vibrator 41 on one side 23 of the plate 20 is reflected by the other side 23 to generate a reflected wave.
The traveling wave 60 and the reflected wave overlap to form a standing wave.
In the configuration of FIG. 10, as shown in FIG. 11, it was confirmed that vibration unevenness like a knot occurs on the right side of the center of the plate 20.
Further, as shown in FIG. 11, at the above-mentioned 12 points, there were places where the amplitude of the vibration in the horizontal direction exceeded 9 micrometers. It is considered that the reason is that elliptical vibration is generated in the plate 20.
Therefore, when the plate 20 is vibrated from one side, the plate 20 cannot be vibrated accurately.

<Sideways vibration on both sides>
FIG. 12 shows that the fixed directions of the vibrator 41 and the vibrator 42 are rotated by 90 degrees from the configuration of FIG. 4 and fixed so that the rotating directions of the vibrator 41 and the vibrator 42 are opposite to each other.
In the configuration of FIG. 12, as shown in FIG. 13, it was confirmed that vibration unevenness like a knot occurs in the central portion of the plate 20.
Therefore, if the vibrator 41 and the vibrator 42 are turned sideways while the rotation directions are opposite to each other, the plate 20 cannot be vibrated accurately.
Similarly, it is considered that the plate 20 cannot be vibrated accurately even when the vibrator 41 and the vibrator 42 are rotated in the same direction and turned sideways.

<Sideways one-sided vibration>
Although not shown, it was confirmed that even when the vibrator 42 and the distributor 47 were removed from the configuration of FIG. 12, vibration unevenness like a knot occurred in the central portion of the plate 20.
Therefore, in the case of lateral one-sided vibration, the plate 20 cannot be vibrated accurately.

<<< Summary >>>
In the vibration device 100 of the present embodiment, the traveling wave 60 is simultaneously generated from the left and right sides of the plate 20 by the vibrator 41 and the vibrator 42, which are audible frequency vibration sources, at the same amplitude, the same wavelength, and the same frequency. As a result, on the plate 20, a standing wave is generated by superimposing a traveling wave in the opposite direction.

In the vertical vibration generation process of the vibration device 100 of the present embodiment, the traveling wave 60 is simultaneously generated from the audible frequency vibration source to the plate 20 from the left and right to the plate 20 at the same frequency. The plate 20 vibrates due to a standing wave, but vibrates only in the vertical direction due to the vibration action of the standing wave. And it does not vibrate in the front-back and left-right directions. The vibration device 100 uses this vibration only in the vertical direction.

The vibration device 100 can change the audible frequency at the time of vibration by the controller 80. The audible range frequency is in the range of 10 Hz or more and 20000 Hz or less, but the audible range frequency used in this embodiment is set in the range of 10 Hz or more and 800 Hz or less.
The vibration unit 40 may have a voice coil motor type vibration source, an electromagnetic type vibration source, or a piezoelectric type vibration source as the vibration source.
The vibration unit 40 uses a vibration source such as the vibrator 41 and the vibrator 42 according to the required frequency range, and uses a voice coil motor type vibration source, an electromagnetic vibration source, or a piezoelectric type, which are other sound wave vibration sources. It can be replaced with a vibration source or the like.
The controller 80 may have an arbitrary waveform generator or a bipolar power supply as a control component. Since the controller 80 vibrates the vibration source at an arbitrary frequency, it can be replaced with an arbitrary waveform generator, a bipolar power source, or the like as a control component corresponding to the sound wave vibration source.

The vibration unit 40 vibrates the plate 20 up and down with a pair of vibrators attached to the center outer sides of the two facing sides of the plate 20.
The vibration unit 40 simultaneously generates a traveling wave with the same amplitude, the same wavelength, and the same frequency by a pair of vibrators attached to the center outer sides of the two facing sides of the plate 20, and vibrates the plate 20 with a standing wave.
In the vibration device 100 of the present embodiment, the vibrator 41 and the vibrator 42 are fixed to the outside of the plate 20.
That is, the vibrator 41 and the vibrator 42 do not overlap with the plate 20 in a plan view.
Therefore, the vibrator 41 and the vibrator 42 do not hinder the vertical vibration of the plate 20.

In the vibration device 100 of the present embodiment, the vibrator 41 and the vibrator 42 are fixed to the side 23 of the plate 20.
The vibrator 41 and the vibrator 42 are not fixed to the front surface 21 and the back surface 22 of the plate 20.
Therefore, the traveling wave 60 is generated from both ends of the plate 20 in the left-right direction, and the entire area of the plate 20 in the left-right direction vibrates up and down.

The vibration device 100 of the present embodiment does not uniformly vibrate the entire plate 20 up and down.
The central portion of the plate 20 has the largest amplitude, and the amplitude decreases from the central portion of the plate 20 toward the periphery in the left-right direction.
The reason why the amplitude decreases toward the periphery in the left-right direction is that the left and right ends of the plate 20 are fixed and that a standing wave is generated in the plate 20.
Further, the central portion of the plate 20 has the largest amplitude, and the amplitude decreases from the central portion of the plate 20 toward the periphery in the front-rear direction.
The reason why the amplitude decreases toward the periphery in the front-rear direction is that both front and rear ends of the plate 20 are fixed.
Both front and rear ends of the plate 20 may be free ends that can freely vibrate up and down.
If both front and rear ends of the plate 20 are free ends, the amplitude of the plate 20 in the front-rear direction becomes uniform. Alternatively, the amplitude of the plate 20 in the anteroposterior direction approaches uniform.

In the vibration device 100 of the present embodiment, the vibrator 41, the vibrator 42, and the two fixing points (screw holes 24) are arranged on a straight line.
The vibrator 41 and the vibrator 42 are located outside the two fixing points (screw holes 24).
The vibrator 41 and the vibrator 42 are not inside the two fixing points (screw holes 24).
The plate 20 vibrates up and down due to the flapping phenomenon centered between the two fixed points (fulcrum 26).

<<< Effect of Embodiment 1 >>>
According to the present embodiment, a standing wave is generated by simultaneously generating a traveling wave 60 from the left and right sides of the plate 20 at the same frequency by the vibrator 41 and the vibrator 42, and the plate 20 vibrates only in the vertical direction.
Even if it vibrates in the front-back and left-right directions, it can be ignored as compared with the vibration in the up-down direction.
By placing the work on the plate 20 of the vibration device 100, the work can be vibrated only in the vertical direction.

<<< Change example >>>
Modification example 1.
In the vibration device 100 shown in FIG. 14, the distributor 47 is removed from the configuration of FIG. 1, and the vibrator 41 and the vibrator 42 of the vibration unit 40 are directly fixed to the side 23 of the plate 20.

Change example 2.
In the vibration device 100 shown in FIG. 15, the plate 20 has a size larger than that of the base 10 in a plan view, and the vibrator 41 and the vibrator 42 of the vibration unit 40 are directly fixed to the outer edge of the back surface 22 of the plate 20. be.

Modification example 3.
In the vibration device 100 shown in FIG. 16, a distributor 47 is sandwiched between a base 10 and a plate 20, and the vibrator 41 and the vibrator 42 are fixed to each other.
The distributor 47 may be a flat plate.

Modification example 4.
In FIG. 2, the vibrator 41 may be rotated clockwise, and the vibrator 42 may be mounted so as to rotate counterclockwise.
In FIG. 2, it is preferable to reverse the rotation directions of the vibrator 41 and the vibrator 42 rather than to rotate the vibrator 41 and the vibrator 42 in the same direction.
Even when the rotation directions of the vibrator 41 and the vibrator 42 are reversed, it is desirable to rotate the vibrator 41 counterclockwise and rotate the vibrator 42 clockwise as shown in FIG.

Modification example 5.
The vibration unit 40 may have an even number of audible frequency vibration sources, which is more than two.
As shown in FIG. 17, the vibrator 41, the vibrator 42, the vibrator 43, and the vibrator 44 may be attached to the plate 20.
In (a), the vibrator 41 and the vibrator 42 face each other, and the vibrator 43 and the vibrator 44 face each other.
The vibrator 41 and the vibrator 43 are fixed to the same side 23, and the vibrator 42 and the vibrator 44 are fixed to different side 23.
Standing waves are generated in parallel.
In (b), the vibrator 41 and the vibrator 42 face each other, and the vibrator 43 and the vibrator 44 face each other.
The vibrator 41, the vibrator 42, the vibrator 43, and the vibrator 44 are fixed to separate side 23s, respectively.
Standing waves are generated orthogonally.
In (c), the vibrator 41 and the vibrator 44 face each other, and the vibrator 42 and the vibrator 43 face each other.
The vibrator 41, the vibrator 42, the vibrator 43, and the vibrator 44 are fixed to each corner of the plate 20, respectively.
Standing waves are generated orthogonally.
Although not shown, the shape of the plate 20 may be circular, elliptical, or other shape in a plan view.

Modification example 6.
The shape of the plate 20 may be polygonal in a plan view.
The vibration unit 40 may have an odd number of audible frequency vibration sources.
As shown in FIG. 18, the plate 20 may be a triangular or hexagonal plate 20.
(A) shows a triangular plate 20.
The vibrator 41, the vibrator 42, and the vibrator 43 are fixed to the individual side 23, respectively.
(B) shows a hexagonal plate 20.
The vibrator 41, the vibrator 42, and the vibrator 43 are fixed to the individual side 23 every other one.
Although not shown, vibrators may be fixed to all sides 23 of the hexagonal plate 20.
Although not shown, the shape of the plate 20 may be circular, elliptical, or other shape in a plan view.
The vibration unit 40 may have one or a plurality of air vibrators fixed to the outside of one side or a plurality of sides of the plate 20.
Specifically, the vibration unit 40 may arrange the air vibrator as follows.
Only one side of the plate 20, one air vibrator on the outside of the side Only one side of the plate 20, multiple air vibrators on the outside of the side 1 on the outside of each side of some of the multiple sides of the plate 20 Individual air vibrators ((b) in FIG. 18)
A plurality of air vibrators on the outside of each side of a part of the plurality of sides of the plate 20 ((a) in FIG. 17).
One air vibrator outside each side of all sides of the plate 20 (FIG. 17 (b) and FIG. 18 (a)).
A plurality of air vibrator controllers 80 outside each side of all sides of the plate 20 vibrate all air vibrators at the same frequency.
Instead of the air vibrator, another type of vibrator may be used.

Modification example 7.
The vibration unit 40 may have one audible peripheral vibration source.
The vibrator 100 of FIG. 19 has one vibrator 45 and a frame 46.
The frame 46 is a U-shaped metal part.
In the frame 46, the vibrator 45 is fixed to the center of the bottom, and the upper portions of both tips are fixed to the distributor 47.
The vibrator 45 vibrates up and down.
The vibration of the vibrator 45 is transmitted to the two distributors 47, causing the two distributors 47 to vibrate up and down.
As described above, it is not essential to attach a plurality of vibrators on both sides of the plate 20, and the traveling wave 60 is simultaneously applied to the vibration unit 40 from the plurality of sides of the plate 20 at the same amplitude, the same wavelength, and the same frequency. It suffices if there is a mechanism to generate it.

Modification example 8.
The vibration device 100 of FIG. 20 has a spacer 50 between the plate 20 and the distributor 47.
The spacer 50 is a metal rod of a quadrangular prism sandwiched and fixed between the side 23 of the plate 20 and the vertical portion 49 of the distributor 47.
The spacer 50 is a component that keeps the position where the traveling wave 60 is generated away from the fulcrum 26 of the flapping phenomenon.
By changing the length of the spacer 50 in the left-right direction, the distance between the audible circumferential vibration source and the fixed portion can be changed.
Even if the traveling wave 60 has the same amplitude, the same wavelength, and the same frequency, the larger the length of the spacer 50 in the left-right direction, the stronger the flapping phenomenon appears.
The spacer 50 can adjust the amplitude of the vertical vibration of the plate 20.

Modification example 9.
In order to fix the base 10 and the plate 20, instead of the screw holes 24 and the screws 25, other fixing brackets or other fixing mechanisms may be used.

Embodiment 2.
In the second embodiment, the differences from the first embodiment will be described.

<<< Explanation of configuration >>>
FIG. 21 is a configuration diagram of the screen printing apparatus 200 of the second embodiment.
The screen printing device 200 has the vibration device 100 described in the first embodiment.
The screen printing device 200 is a device that prints on the work 900.
The work 900 is a substrate for an electronic device or a substrate for a circuit.

The screen printing device 200 has a screen plate 201 in which the screen 202 is framed.
The screen 202 is a mesh screen, a metal screen, or other screen.
The screen 202 has a printing pattern of electrode terminals, electrodes, wiring, and the like.
Paste 204 is present on the surface of the screen 202.
The screen printing device 200 has a squeegee 203.

The squeegee 203 moves on the surface of the screen 202 and prints electrode terminals, electrodes, wiring, and the like on the work 900 by the paste 204.

The plate 20 of the vibration device 100 is a table on which the work 900 is placed.
The plate 20 functions as a suction plate for sucking the work 900.
The plate 20 has a plurality of through holes 205 penetrating up and down.
The base 10 functions as a suction box for sucking air.

The screen printing device 200 has a suction pipe 206 and a vacuum pump 207.
The suction pipe 206 is connected to the base 10 and the vacuum pump 207, and sucks air from the space 14.
As shown in FIG. 21, it is desirable that the vibrator 41 and the vibrator 42 are arranged in the same direction as the printing direction of the squeegee 203. That is, it is desirable that the printing direction of the squeegee 203 and the generation direction of the standing wave are the same.

<<< Explanation of operation >>>
The processor 84 of the screen printing device 200 operates the vibration device 100 to vibrate the plate 20 during printing.
The vibration of the plate 20 is transmitted to the work 900 and the screen plate 201 to vibrate the paste 204.
The vibration of the paste 204 makes it easier for the paste 204 to pass through the print pattern on the screen 202.
In the case of fill-in-the-blank printing in which the holes or grooves of the work 900 are filled with the paste, the paste 204 is likely to be filled in the holes or grooves of the work 900 because the work 900 is vibrating.
In the case of fill-in-the-blank printing, the processor 84 operates the vibration device 100 to vibrate the plate 20 even after printing. By vibrating the plate 20 even after printing, the paste 204 can be filled to the bottom of the hole or groove.

<<< Effect of Embodiment 2 >>>
According to this embodiment, the vibration device 100 can be used for the screen printing device 200.
According to this embodiment, it is possible to reduce the variation in the filling amount of the paste that enters the holes when filling the holes in the screen printing.
In particular, when fill-in-the-blank printing is performed using a hard paste, the filling amount is improved.
According to the present embodiment, since the plate 20 vibrates only in the vertical direction and does not vibrate in the front-back and left-right directions, the work 900 and the screen plate 201 do not shift in the front-back and left-right directions. Therefore, the print pattern of the work 900 is not blurred.

Embodiment 3.
In the third embodiment, the differences from the first embodiment will be described.
FIG. 22 is a perspective view of the shearing device 300 of the third embodiment.
The shearing device 300 has a vibration device 100 described in the first embodiment.
The shearing device 300 is a device for cutting the work 900.
The shearing device 300 has a blade 301 that cuts the work 900.
The plate 20 of the vibration device 100 is a table on which the work 900 is placed.

The processor 84 of the shearing device 300 operates the vibration device 100 during operation to vibrate the plate 20 in the vertical direction.
The vibration of the plate 20 is transmitted to the work 900 and causes the work 900 to vibrate.
As the work 900 vibrates in the vertical direction, the pressure from the blade 301 to the work 900 becomes intermittent.

<<< Effect of Embodiment 3 >>>
According to this embodiment, the vibration device 100 can be used for the shear device 300.
According to this embodiment, the pressure from the blade 301 to the work 900 becomes intermittent, so that the durability time of the blade 301 is extended.

Embodiment 4.
In the fourth embodiment, the differences from the first embodiment will be described.
FIG. 23 is a perspective view of the drilling device 400 according to the fourth embodiment.
The drilling device 400 includes the vibration device 100 described in the first embodiment.
The drilling device 400 is a device for forming a hole in the work 900.
The drilling device 400 has a drill 401 that forms a hole in the work 900.
The plate 20 of the vibration device 100 is a table on which the work 900 is placed.

The processor 84 of the drilling device 400 operates the vibration device 100 during operation to vibrate the plate 20 in the vertical direction.
The vibration of the plate 20 is transmitted to the work 900 and causes the work 900 to vibrate.
As the work 900 vibrates in the vertical direction, the pressure from the drill 401 to the work 900 becomes intermittent.

<<< Effect of Embodiment 4 >>>
According to this embodiment, the vibration device 100 can be used for the drilling device 400.
According to the present embodiment, the pressure from the drill 401 to the work 900 becomes intermittent, so that the durability time of the drill 401 is extended.

Embodiment 5.
In the fifth embodiment, the differences from the first embodiment will be described.

<<< Configuration of vibration transfer device 500 >>>
FIG. 24 is a perspective view of the vibration transfer device 500 according to the fifth embodiment.
The vibration transfer device 500 is a device that inserts a plurality of parts into a plurality of recesses by vibration.
The plate 20 is a square flat plate.
A plurality of recesses 29 are arranged on the plate 20.
A plurality of parts 901 are randomly put into the plate 20.
Although not shown, there is a frame around the outer periphery of the plate 20 to prevent the component 901 from spilling from the plate 20.

The vibration transfer device 500 has a flat plate base 10, a plate 20, and a vibration unit 40.
The plate 20 is fixed to the base 10 via four vibrators.
The side 23 of the plate 20 is not fixed and has a free end.
The vibration unit 40 has a plurality of vibrators fixed to the outside of the four corners of the plate 20.
The vibration unit 40 of FIG. 24 has four vibrators and four distributors 47.
The four vibrators are fixed to the base 10 of the flat plate at an angle of 45 degrees with respect to the front-rear direction and the left-right direction.
Each of the four vibrators is fixed to the outside of the four corners 27 of the plate 20.
The vibrator is arranged as an extension of the diagonal line of the plate 20.
The vibrator 41 and the vibrator 44 are fixed to face each other at two corners at the end of one diagonal of the plate 20.
The vibrator 43 and the vibrator 42 are fixed to face each other at two corners at the other diagonal ends of the plate 20.

The distributor 47 is a rectangular plate.
The distributor 47 fixes the corner 27 of the plate 20 on the upper surface.
The distributor 47 fixes the upper surface of the vibrator to the lower surface.

The four corners 27 of the plate 20 are fixed to the distributor 47 by screws inserted into the screw holes 24.
The four corners 27 of the plate 20 are the four fixing points of the plate 20.
In plan view, the vibrator is fixed to the outside of the corner 27 of the plate 20. That is, in plan view, the four vibrators do not overlap the plate 20.

As the four vibrators used in the vibration transfer device 500, an electromagnetic vibration source such as an electromagnetic vibrator is suitable. The electromagnetic vibration source can control the frequency more finely than the air vibrator.

<<< Operation of vibration transfer device 500 >>>
The controller 80 vibrates two vibrators fixed to two corners at the diagonal ends of the plate 20 at the same frequency.
The four vibrators are connected to the processor 84, and the processor 84 controls the vibration of the four vibrators.
The traveling waves from the four vibrators travel from the four corners of the plate 20 toward the center of the plate 20.
The vibrator 41 and the vibrator 44 simultaneously generate a traveling wave with the same amplitude, the same wavelength, and the same frequency in one diagonal direction, and the traveling wave is superimposed.
The vibrator 43 and the vibrator 42 simultaneously generate a traveling wave with the same amplitude, the same wavelength, and the same frequency in different diagonal directions, and four orthogonal traveling waves overlap each other, and a standing wave is superimposed on the plate. Vibrate up and down.

The processor 84 can change the vibration generated in the plate 20 by changing the phase, amplitude, wavelength, and frequency of the four traveling waves.
In particular, the processor 84 generates a standing wave on the plate in which four traveling waves having the same amplitude, the same wavelength, and the same frequency but with different phases are overlapped, and the plate is vibrated up and down by the vertical vibration of the standing wave. The component 901 can be rotated, moved back and forth, and jumped on the 20.
The processor 84 can generate the phases of the four progressive waves by shifting them by 90 degrees, 180 degrees, 270 degrees, or any angle.

Hereinafter, the vertical vibration of the vibration transfer device 500 will be described with reference to FIG. 25.
FIG. 25 shows the vertical vibration state of the plate 20 when traveling waves having the same phase, amplitude, wavelength, and frequency overlap and a standing wave is superimposed.
FIG. 25A is a schematic diagram of vertical vibration in the front-rear direction of the center in the left-right direction of the plate 20.
FIG. 25B is a schematic diagram of vertical vibration of one diagonal line connecting the corners 27 of the plate 20.
Since the side 23 is a free end, the plate 20 vibrates while the side 23 moves up and down as shown in FIG. 25 (a).
On the other hand, since the corner 27 is fixed and the corner 27 serves as the fulcrum 26, the plate 20 vibrates without the corner 27 moving up and down as shown in FIG. 25 (b).

The processor 84 vibrates the plate 20 up and down. The vibration of the plate 20 is transmitted to the component 901 and causes the component 901 to vibrate.
The component 901 moves up and down on the surface of the plate 20 and fits into the recess 29.

Modification example 1.
In the vibration transfer device 500 of FIG. 26, the corner 27 of the plate 20 is cut and the vibrator is fixed to the cut surface.
The vibration transfer device 500 of FIG. 26 does not require a distributor 47.
In plan view, the vibrator is fixed to the outside of the corner 27 of the plate 20. That is, in plan view, the four vibrators do not overlap the plate 20.

Change example 2.
The vibration device 100 of the above-described embodiment may be used for the vibration transfer device 500.
For the vibration transfer device 500, it is desirable to use a vibration device capable of generating a standing wave by making four traveling waves orthogonal to each other or by crossing a plurality of traveling waves. Further, when the vibration device intersects the traveling wave, it is desirable to superimpose the traveling wave and generate a stable standing wave by equalizing all the intersecting angles of the traveling wave.

Modification example 3.
In the vibration transfer device 500 of FIG. 27, a support column 51 is provided at the corner 27 of the plate 20, and the plate 20 is fixed to the base 10 by four support columns 51.
The support column 51 fixes the plate 20 with screws inserted into the screw holes 24.
The vibrator is fixed only to the cut surface of the corner 27 of the plate 20, and the vibrator is attached to the plate 20 in a suspended state.
In the case of FIG. 27, the plate 20 vibrates due to the above-mentioned flapping phenomenon with the fixed portion in the screw hole 24 as a fulcrum.
In the case of FIG. 27, the plate 20 is fixed by four pillars 51, but since the pillars 51 are thin pillars, the plate 20 can vibrate not only up and down but also back and forth and left and right.

Modification example 4.
The shape of the plate 20 may be polygonal in a plan view.
As shown in FIG. 28, the plate 20 may be a triangular or hexagonal plate 20.
(A) shows a triangular plate 20.
The vibrator 41, the vibrator 42, and the vibrator 43 are fixed to individual corners 27, respectively.
(B) shows a hexagonal plate 20.
Each vibrator is fixed to a separate corner 27.
Although not shown, the shape of the plate 20 may be circular, elliptical, or other shape in a plan view.

Modification example 5.
As shown in FIG. 29, the vibrator does not have to be in every corner.
(A) shows the case where the vibrator is arranged on one diagonal line of the quadrangular plate 20.
The vibrator 41 and the vibrator 42 are fixed to every other corner 27.
(B) shows the case where the vibrator is arranged on the two diagonal lines of the hexagonal plate 20.
Although not shown, the shape of the plate 20 may be circular, elliptical, or other shape in a plan view.

Modification example 6.
As shown in FIG. 30, there may be a plurality of vibrators in the corner.
(A) shows the case where two vibrators are arranged in each corner of the four corners of the quadrangular plate 20.
(B) shows a case where two vibrators are arranged at each corner of each of the four corners of the quadrangular plate 20, and further, the vibrators are arranged on the outer center of the opposite side.
Although not shown, the shape of the plate 20 may be octagonal, decagonal, or other polygonal in plan view.

The vibration unit 40 may have one or more air vibrators fixed to the outside of one corner or a plurality of corners of the plate 20.
Specifically, the vibration unit 40 may arrange the air vibrator as follows.
One Air Vibrator Outside Only One Corner of Plate 20 One Air Vibrator Outside Each Corner of Some Corners of Multiple Corners of Plate 20 ((a) and (b) in FIGS. 29)
One air vibrator outside each corner of all corners of the plurality of corners of the plate 20 (FIGS. 28 (a) and 28 (b)).
Two air vibrators on the outside of each corner of all the corners of the plurality of corners of the plate 20 ((a) and (b) in FIG. 30).
The controller 80 vibrates all the air vibrators at the same frequency.
Instead of the air vibrator, another type of vibrator may be used.

Embodiment 6.
In the sixth embodiment, the differences from the first embodiment will be described.

<<< Configuration of Distributor 47 >>>
FIG. 31 is a diagram showing a distributor 47.
The distributor 47 of FIG. 31 is fixed to the plate 20 by sandwiching the front surface 21 and the back surface 22 of the plate 20.
(A) shows the case where the vibrator is arranged outside the center of one side of the quadrangular plate 20.
The distributor 47 has a U-shaped groove 52 on the side when viewed from the front-rear direction, and the central outer edge of the plate 20 is fitted into the groove 52.
The plate 20 has three screw holes 24 that serve as fixing points on the two sides to which the vibrator is fixed.
The plate 20 fixes the distributor 47 with a screw in the central screw hole.
The plate 20 does not have a screw hole 24 on the side where the vibrator is not fixed.
As in (a), it is not necessary to provide the fixing points on all the sides, but it may be provided only on the two opposite sides.

(B) shows the case where the vibrators are arranged at the four corners of the quadrangular plate 20.
The distributor 47 has a V-shaped groove 53 on the side when viewed from above and below, and the corner of the plate 20 is fitted into the groove 53.
The orthogonal bottom of the V-shaped groove 53 is in surface contact with two orthogonal ends of the two sides.
The triangular side surface of the V-shaped groove 53 is in surface contact with the front surface and the back surface of the corner 27.
The plate 20 has a screw hole 24 on the outer edge of the corner.
The plate 20 fixes the distributor 47 with screws in the screw holes.

<<< Effect of Distributor 47 >>>
Since the distributor 47 is fixed to the plate 20 with the plate 20 interposed therebetween, the vibration of the vibrator can be transmitted from the side of the plate 20 even when the plate 20 is thin and the height of the side in the vertical direction is small.

Modification example 1.
The shape of the distributor 47 may be any shape that can transmit the vibration of the vibrator to the side of the plate 20.
The distributor 47 may be fixed only to the side of the plate 20 or only to the corners, but the distributor 47 may be fixed to the following points.
Sides and fronts of plate 20 Sides and backs of plate 20 Sides and fronts of plates 20 Sides of plates Only fronts of plates 20 Sides of plates 20 Sides and backs of plates 20 Corners and fronts of plates 20 Plates 20 Corner and back side of plate 20 Corner and front side and back side Only the front side of the corner of plate 20 Only the back side of the corner of plate 20 Front side and back side of the corner of plate 20 In any of the above cases, the distributor 47 is only on the side of plate 20 or the corner. The same effect as when it is fixed only to the plate can be obtained, and in any of the above cases, it can be said that the side of the plate is vibrated.

Embodiment 7.
In the seventh embodiment, the differences from the first embodiment will be described.

<<< Configuration of plate 20 and vibration unit 40 >>>
FIG. 32 is a diagram showing a plate 20 and a vibration unit 40.
FIG. 32 shows a vibration unit 40 that vibrates a plurality of locations on the outer periphery of the plate 20 from the outside of the plate 20.
The outer circumference of the plate 20 refers to the contour when the plate 20 is viewed in a plane.
The outside of the plate 20 means the outside of the contour of the plate 20.
The vibration unit 40 simultaneously generates a traveling wave at the same wavelength from the outer circumference of the plate 20 toward the center of the plate.
(A) shows a case where the vibrator 41 is arranged at the corner 27 of the triangular plate 20 and the vibrator 42 is arranged at the center outer side of the side 23 facing the corner 27.
(B) shows a case where the vibrator 41 is arranged at the corner 27 of the pentagonal plate 20 and the vibrator 42 is arranged at the center outer side of the side 23 facing the corner 27.

The vibration unit 40 vibrates a plurality of places on the plate 20.
As described in the first embodiment, the plurality of locations may be a plurality of locations including only the plurality of sides 23 of the plate 20.
As described in the fifth embodiment, the plurality of locations may be a plurality of locations including only the plurality of corners 27 of the plate 20.
As described in FIGS. 32 (a) and 32 (b), the plurality of locations may be a plurality of locations including the side 23 of the plate 20 and the corner 27.
In the case of a plurality of locations including the side 23 and the corner 27, any of the following may be used.
One Side 23 and One Corner Multiple Sides 23 and One Corner One Side 23 and Multiple Corners Multiple Sides 23 and Multiple Corners A typical example of multiple side 23s and multiple corners is all. Side 23 and all corners.
It is desirable that the plurality of locations are arranged in pairs on a straight line passing through the center or the center of gravity of the plate 20 such as the diagonal line or the diameter of the plate 20.

The side 23 does not have to be flat.
(C) shows a case where the vibrator 41 and the vibrator 42 are arranged in the radial direction of the circular plate 20, and the vibrator 43 and the vibrator 44 are arranged in the orthogonal radial direction.
In the case of (c), the case where the side 23 is the outer peripheral curved surface of the cylinder is shown.
The side 23 may be another curved surface, or may be a combination of a curved surface and a plane.
In (c), the vibrator 43 and the vibrator 44 may not be present.
In (c), the number of vibrators may be increased.

<<< Planar shape of plate 20 >>>
FIG. 33 is a diagram showing a planar shape of the plate 20.
The planar shape of the plate 20 is not limited to a regular polygon or a circle.
(A) shows the case where the planar shape of the plate 20 is a cross shape.
(B) shows the case where the planar shape of the plate 20 is a star shape.
(C) shows the case where the planar shape of the plate 20 is a long quadrangle with rounded corners.
(D) shows the case where the planar shape of the plate 20 is an elliptical shape.
Although not shown, the planar shape of the plate 20 may be trapezoidal, cloud-shaped, chevron-shaped, irregular-shaped, or any other shape.

<<< Cross-sectional shape of plate 20 >>>
FIG. 34 is a diagram showing the cross-sectional shape of AA in FIG. 1 of the plate 20.
The cross-sectional shape of the plate 20 is not limited to a rectangle.
(A), (c) and (e) show the case where the lower center of the plate 20 is recessed upward.
(A) shows the case where it is recessed in a concave shape.
(B) shows the case where it is recessed in a V shape.
(C) shows the case where it is recessed in an arc shape.
(B), (d) and (f) show the case where the upper center of the plate 20 bulges downward.
(B) shows the case where it swells in a convex shape.
(D) shows the case where it swells in a V shape.
(F) shows the case where it swells in an arc shape.

(G) shows the case where the central portion of the plate 20 has a concave shape recessed upward and downward.
(H) shows the case where the central portion of the plate 20 has a convex shape bulging upward and downward.
Although not shown, the cross-sectional shape of the plate 20 may be an uneven shape, a wavy shape, or another shape.
(I) shows the case where the side 23 is inclined.
When the side 23 is inclined, the slope of the distributor 47 may be provided and the vibrator 41 and the vibrator 42 may be attached.
The cross section of the distributor 47 has a triangular shape.
The slope of the distributor 47 and the side 23 have the same inclination angle.
The vibrator 41 and the vibrator 42 can vibrate the outer circumference of the plate 20 up and down via the distributor 47.

Embodiment 8.
The vibration device 100 can be used for a device that dislikes horizontal vibration.
The vibration device 100 can be used as a work processing device.
The vibration device 100 can be used for a processing device, a transfer device, a sorting device, an assembly device, a manufacturing device, a vibration transfer device, or another material handling device.
The material means a substance, a material, a raw material, a cloth, a material, a tool, an instrument, a tool, or the like.
The shape, material, properties, and number of materials do not matter.
The material may be a lump, a plate, or a grain or powder.
The material may be a solid, a liquid, or an elastic body.

Embodiment 9.
In the ninth embodiment, the points different from the above-described embodiments will be described.

<<< Explanation of the configuration of the printing unit 600 >>>
FIG. 35 is a three-view view of the printing unit 600 of the screen printing apparatus 200 of the ninth embodiment.
The printing unit 600 moves in the printing direction P by a drive mechanism (not shown) of the screen printing device 200.
The printing unit 600 has a fixing mechanism 620, and the printing tool 260 of the vibration device 100 is fixed by the fixing mechanism 620.
The printing unit 600 has an elevating mechanism 610.
The elevating mechanism 610 raises and lowers the printing tool 260 of the vibration device 100, and generates downward printing pressure during printing.
As shown in FIG. 35, the printing tool 260 is inclined and fixed to the printing unit 600, and moves in the printing direction P while being inclined at the time of printing.

<<< Explanation of the configuration of the vibration device 100 >>>
FIG. 36 is a perspective view of the vibration device 100 of the ninth embodiment.
FIG. 37 is a front view of the printing tool 260 of the ninth embodiment.
FIG. 38 is a side view of the printing tool 260 of the ninth embodiment.
FIG. 39 is a plan view of the printing tool 260 according to the ninth embodiment.
In FIG. 36, X indicates a front-rear direction.
The printing direction P coincides with the front direction of the front-back direction X.
In FIGS. 36 and 37, Y indicates a left-right direction and Z indicates a vertical direction.
As shown in FIG. 35, the printing tool 260 is used at an angle during printing, but for convenience of explanation, the Z direction shown in FIGS. 36 and 37 will be referred to as the vertical direction Z.

The vibration device 100 includes a printing tool 260, a vibration unit 40, and a controller 80.
The printing tool 260 is used for printing on a screen printing device.
The printing tool 260 prints on the work by the printing pressure.
The vibration unit 40 vibrates a plurality of facing sides on the outside of the printing tool 260.
The controller 80 controls the vibration of the vibration unit 40.

<< Explanation of Printing Tool 260 >>
The printer 260 has a holder 210 and a squeegee 203 attached to the holder 210.
As shown in FIG. 39, the printing tool 260 (holder 210) has a long side W in a direction orthogonal to the printing direction P and a short side V in the same direction as the printing direction P.

<< Explanation of holder 210 >>
The holder 210 is made of a metal such as aluminum.
As shown in FIG. 35, the holder 210 has a base 211 and a push plate 212.
The holder 210 is fixed to the elevating mechanism 610 of the printing unit 600 by the fixing mechanism 620 of the printing unit 600.
The squeegee 203 is sandwiched and fixed between the base portion 211 and the push plate 212 by the tightening screw 213.
The base 211 has screw holes at the upper ends of both ends for fixing the vibrator 41 and the vibrator 42.
The central upper part of the base 211 has a fixed portion 214.
The fixing portion 214 is arranged inside a screw hole for fixing the vibrator 41 and the vibrator 42 of the base portion 211.
The fixing portion 214 is fixed by the fixing mechanism 620.

<< Explanation of Squeegee 203 >>
The squeegee 203 has a support portion 220 and a squeegee portion 230.
The squeegee portion 230 is made of urethane rubber or an elastic body.
The support portion 220 is made of a glass epoxy resin containing glass fiber (glass fiber).
The support portion 220 is provided with rough cut portions on both sides, and the urethane rubber is welded and fixed to the rough cut portions on both sides of the glass epoxy resin.

<<< Explanation of vibration unit 40 >>>
The vibration unit 40 has a plurality of vibrators and vibrates the plurality of sides 23 of the holder 210 at the same frequency.
The vibration unit 40 vibrates the side surface of the holder 210 on the opposite side 23 of the holder 210 in the left-right direction up and down.
The vibration unit 40 has two vibrators, a vibrator 41 and a vibrator 42.
The vibration unit 40 vibrates the outside of the fixing portion (fulcrum 26) where the screw hole 24 of the holder 210 is located up and down.
The vibrator 41 and the vibrator 42 are vibrators having the same specifications.
The vibrator 41 and the vibrator 42 are vibrators driven by air pressure.

<< Explanation of Distributor 47 >>
The vibration unit 40 has a distributor 47.
The distributor 47 transmits the vibration between the vibrator 41 and the vibrator 42 to the side 23 of the holder 210 or its vicinity.
The distributor 47 fixes the vibrator 41 and the vibrator 42 to the side 23 of the holder 210.
The distributor 47 has screw holes 24 at its ends and is fixed to both ends of the holder 210 by screws.
The distributor 47 is a rectangular metal plate.
The distributor 47 arranges the vibrator 41 and the vibrator 42 outside the side surface on the side 23 of the holder 210.
The distributor 47 transmits the vibration between the vibrator 41 and the vibrator 42 to the side surface or the vicinity of the side surface forming the short side V of the holder 210.
The distributor 47 increases the flapping of the vibrator 41 and the vibrator 42.
The longer the length of the distributor 47 in the left-right direction Y is, and the farther the vibrator 41 and the vibrator 42 are from the side surface on the side of the holder 210, the more the distributor 47 is curved due to the elastic force of the distributor 47, and the flapping becomes larger.
As the thickness of the distributor 47 in the vertical direction Z is reduced, the distributor 47 is curved due to the elastic force of the distributor 47, and the flapping becomes larger.

<< Explanation of Vibrator 41 and Vibrator 42 >>
The vibrator 41 and the vibrator 42 are attached like wings to the outside of the side 23 of the holder 210.
The vibrator 41 and the vibrator 42 are attached in parallel to the holder 210.
The vibrator 41 and the vibrator 42 are attached so that the air supply port is on the inside.
The rotation axis J of the vibrator 41 and the vibrator 42 is parallel to the front-rear direction X.
The surface of revolution K of the vibrator 41 and the vibrator 42 is parallel to the left-right direction Y.

<<< Explanation of operation of vibration unit 40 >>>

The controller 80 vibrates the vibrator 41 and the vibrator 42 at a frequency of 10 Hz or more and 800 Hz or less.
The vibration unit 40 flaps on both sides of the fulcrum 26 to vibrate the printing tool 260.
The vibration unit 40 vibrates two places on both sides of the long side W of the printing tool 260.
The vibration unit 40 vibrates a plurality of opposing sides 23 on the outer side of the printing tool 260 with the same amplitude, the same wavelength, and the same frequency, and causes the printing tool 260 to vibrate with a standing wave.
The vibration unit 40 simultaneously generates a traveling wave at the end of the printing tool 260 with the same amplitude, the same wavelength, and the same frequency.
The vibration unit 40 vibrates the end portion of the printing tool 260 up and down by a traveling wave from the outside of the printing tool 260, and vibrates the printing tool 260 by a standing wave.
The vibration unit 40 vibrates the holder 210 in the vertical direction due to the flapping phenomenon described in the above-described embodiment.

<<< Vibration measurement result >>>
The vibration measurement results are shown below.
At the time of vibration measurement, the controller 80 supplies 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa air pressures to the vibrator 41 and the vibrator 42, and has the same amplitude and the same wavelength. It was vibrated at the same frequency.

<< Measurement result 1 >>
The vibration of the printing tool 260 shown in FIG. 40 was measured using the aluminum holder 210.
The printing tool 260 shown in FIG. 40 has the same configuration as the printing tool 260 of FIG. 37, except that the adjusting jig 240 is placed on the support portion 220 and the squeegee 203 is fixed to the holder 210.
The adjusting jig 240 is a rectangular metal plate, made of stainless steel, and made of a metal harder than the holder 210.
The adjusting jig 240 is sandwiched between the support portion 220 and the base portion 211.
The printing tool 260 shown in FIG. 40 was placed sideways on an air mattress, the circumference of the printing tool 260 was freed, the holder 210 was vibrated, and the amplitude of the vibration was measured.
The vibrator 41 and the vibrator 42 have the same specifications as those in the first embodiment.
The rotation direction of the vibrator 41 and the vibrator 42 is the rotation from the inside to the outside as shown by the arrow in FIG. 37. That is, as shown in FIG. 37, the rotation direction of the vibrator 41 is clockwise, and the rotation direction of the vibrator 42 is counterclockwise.
The length of the squeegee 203 in the left-right direction Y is 185 mm.
As shown in FIG. 37, the measurement points are the measurement points 1 to 17 on the bottom surface of the squeegee portion 230, and the left side surface and the right side surface.
The measurement points 1 to 17 are spaced by 10 mm.

FIG. 41 is a diagram showing measurement results of vibration between the vertical direction Z of the bottom surface of the squeegee portion 230 of the holder 210 and the horizontal direction Y of the side surface.
FIG. 42 is a diagram showing a measurement result of vibration in the front-rear direction X on the bottom surface of the squeegee portion 230 of the holder 210.
The vertical axis shows the vibration distance. "PP" means "Peak to Peak" and means a vibration distance.
As shown in FIG. 37, the horizontal axis indicates the left side surface of the squeegee portion 230, the measurement points 1 to 17 on the bottom surface, and the right side surface.
As shown in FIG. 41, the vibration distances in the vertical direction Z of the measurement points 1 to 17 on the bottom surface of the squeegee portion 230 are substantially uniform at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa. It has become.
As shown in FIG. 41, the vibration distance in the left-right direction Y between the left side surface and the right side surface of the squeegee portion 230 becomes almost zero at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa. It has become. In particular, when the air pressures are 0.4 Mpa and 0.5 Mpa, the vibration distance in the left-right direction Y is zero, which is suitable for printing.
As shown in FIG. 42, the vibration distances of the measurement points 1 to 17 on the bottom surface of the squeegee portion 230 in the front-rear direction X are almost uniform at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa. It has become.
Therefore, the printing tool 260 vibrates up and down and back and forth as a whole, and does not vibrate left and right.

<< Measurement result 2 >>
Further, the vibration of the printing tool 260 shown in FIG. 43 was measured.
The printing tool 260 shown in FIG. 43 has the same configuration as the printing tool 260 of FIG. 40, except that the support portion 220 has the thin plate portion 221 and the thick plate portion 222. The thickness of the thick plate portion 222 is the thickness of the support portion 220, and the thin plate portion 221 is a portion obtained by scraping the surface of the support portion 220 to make it thinner.

As shown in FIG. 44, the vibration distances in the vertical direction Z of the measurement points 1 to 17 on the bottom surface of the squeegee portion 230 are substantially uniform at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa. It has become.
As shown in FIG. 44, at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the vibration distance in the left-right direction Y between the left side surface and the right side surface of the squeegee portion 230 becomes almost zero. It has become. In particular, when the air pressures are 0.4 Mpa and 0.5 Mpa, the vibration distance in the left-right direction Y is zero, which is suitable for printing.
As shown in FIG. 45, the vibration distances of the measurement points 1 to 17 on the bottom surface of the squeegee portion 230 in the front-rear direction X are almost uniform at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa. It has become.
Therefore, the printing tool 260 vibrates up and down and back and forth as a whole, and does not vibrate left and right.

<Comparison between measurement result 1 and measurement result 2>
When the support portion 220 has the thin plate portion 221 and the thick plate portion 222, the vibration distance in the front-rear direction X is large and uneven. It is considered that the reason why the vibration distance in the front-rear direction X is large is that the thin plate portion 221 is present.
When it is desired to utilize the vibration in the front-rear direction X in screen printing, it is preferable to use the support portion 220 having the thin plate portion 221.

<< Measurement result 3 >>
The vibration of the printing tool 260 shown in FIG. 37 was measured using the aluminum holder 210 without using the adjusting jig 240.
Although not shown, the vibration distances in the vertical direction Z of the measurement points 1 to 17 on the bottom surface of the squeegee portion 230 become almost uniform at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa. The vibration distance between the left side surface and the right side surface in the left-right direction Y became almost zero.
At each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, the vibration distances of the measurement points 1 to 17 on the bottom surface of the squeegee portion 230 in the front-rear direction X are not uniform, and the central portion is the end. The vibration distance is larger than that of the part.
In the case of screen printing, since the distance that can be moved up and down increases toward the center of the screen of the screen plate, it can be used even when the central portion of the bottom surface of the squeegee portion 230 has a vibration distance larger than that of the end portion.

<< Measurement result 4 >>
In the configuration of FIG. 37, when the vibrator 41 and the vibrator 42 are attached so that the air supply ports are on the outside and the rotation direction of the vibrator 41 and the vibrator 42 is opposite to the arrow of FIG. 37, the left-right direction Y Although some vibration was generated, the vibration distances in the vertical direction Z were almost uniform.

<< Measurement result 5 >>
In the configuration of FIG. 37, when the rotation directions of the vibrator 41 and the vibrator 42 are both in the same direction, the vibration distance in the vertical direction Z and the vibration distance in the front-rear direction X are not uniform. Vibration in the left-right direction Y occurred to the same extent as the vibration distance in the up-down direction Z.
This is effective when you want to use vibration in the left-right direction Y in screen printing.

<< Measurement result 6 >>
In the configuration of FIG. 37, when the thickness of the distributor 47 in the vertical direction X is measured at 10.9 mm and 1.9 mm, the air pressures are 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa. The vibration distance in the vertical direction Z is almost the same, or the thickness of the distributor 47 is slightly reduced.
Further, when the thickness of the distributor 47 is thicker, the vibration distance in the front-rear direction X is about half at each air pressure of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa.

<< Measurement result 7 >>
Further, the vibration of the printing tool 260 shown in FIG. 46 was measured.
The printing tool 260 shown in FIG. 46 has the same configuration as the printing tool 260 of FIG. 37, except that the vibrators 43 and 44 are added.
As shown in FIG. 46, the vibrators 43 and 44 are arranged on the front side in the printing direction P.
The rotation axes J of the vibrators 43 and 44 are the same axis.
The rotation axes J of the vibrators 43 and 44 are parallel to the left-right direction Y.
As a result of the measurement, since the vibrators 43 and 44 are present, vibration in the left-right direction Y is generated.
The printing tool 260 shown in FIG. 46 is effective when it is desired to utilize vibration in the left-right direction Y in screen printing.

<< Comparative example >>
In the configuration of FIG. 37, when only the vibrator 41 or only the vibrator 42 is used, the vibration distance in the vertical direction Z and the vibration distance in the front-rear direction X are not uniform.
In the configuration of FIG. 37, when the rotation axis J of only the vibrator 42 is parallel to the left-right direction Y, the vibration distance in the up-down direction Z is not uniform. In addition, vibration in the left-right direction Y occurred.
In the configuration of FIG. 37, when the rotation axes J of the vibrator 41 and the vibrator 42 are both parallel to the left-right direction Y and the vibrator 41 and the vibrator 42 are both arranged on the front side of the printing direction P or on the side of the printing direction P. The vibration distance in the vertical direction Z and the vibration distance in the front-rear direction X were not uniform.

<< Consideration based on vibration measurement >>
Since the holder 210 is a metal block having a thickness in the vertical direction X, even if a traveling wave is input from both sides 23 of the holder 210 to generate a standing wave inside the holder 210, the holder 210 will not be curved. do not have. Therefore, when a standing wave is generated inside the holder 210, it can be considered that the entire holder 210 vibrates uniformly and stably without any difference between the left and right sides. Therefore, the bottom surface of the squeegee 203 should also vibrate uniformly and stably without any difference between the left and right sides.
Further, when there is no vibration in the left-right direction Y, it can be considered that the vibration is generated by the standing wave.

As shown in FIG. 37, when the rotating surfaces K of the two vibrators are mounted parallel to the squeegee and the air supply port is on the inside, a standing wave is generated inside the holder 210. It can be considered that the vibration of the bottom surface of the squeegee 203 was the most stable, and the vibration in the left-right direction Y was also suppressed.

When vibrating with only one vibrator, a traveling wave is generated and reflected on the other side to generate a reflected wave. The generated reflected wave overlaps with the traveling wave to become a standing wave.
With one vibrator, the vibration of the bottom surface of the squeegee was unstable, and vibration in the left-right direction Y also occurred. It was confirmed that nodes were generated in the standing wave that overlapped by the traveling wave and the reflected wave.
A standing wave from a reflected wave that can be noded by a single vibrator is not practical.

The printing tool 260 is used in an environment different from the measurement state in which the printing tool 260 is placed on an air mat and vibrated with its surroundings free.
Specifically, the printing tool 260 is fixed to the elevating mechanism 610 by the fixing mechanism 620, and is used in a state of being pressurized to the work during printing.
At the time of vibration measurement, the vibration is performed as if flapping between the fulcrums 26 shown in FIG. 37, but even when the printing tool 260 is fixed to the elevating mechanism 610 by the fixing mechanism 620, the fulcrum is caused by the elastic force of the distributor 47. It is possible to vibrate as if flapping on the left and right between 26.
As described above, even if the usage environment is different, a standing wave is generated in the printing tool 260.

<<< Effect of the embodiment >>>
According to the present embodiment, the printing tool 260 is effective for fill-in-the-blank printing because the entire printing tool 260 vibrates uniformly in the vertical direction Z and does not vibrate left and right.
According to the present embodiment, the printing tool 260 vibrates uniformly in the front-rear direction X as a whole, so that it is more effective for fill-in-the-blank printing. In particular, since the printing tool 260 is used at an angle during printing, it is suitable for fill-in-the-blank printing to vibrate in both the vertical direction Z and the front-back direction X.
According to the present embodiment, the printing tool 260 can be vibrated in the left-right direction Y by changing the rotation direction or adding a vibration source, which is effective for screen printing using the vibration in the left-right direction Y. ..

<<< Change example >>>
Modification example 1.
The vibration frequency of the vibrator can be changed by air pressure, and a vibration frequency in the audible frequency range of 10 Hz or more and 800 Hz or less is effective.
When the wavelength λ [m] = sound velocity V [m / s] / vibration frequency f [Hz] and f = 800 Hz,
Wavelength λ [m] = 6320 [m / s] / 800 [Hz] = 7.9m
Half wavelength λ / 2 [m] = 7.9m / 2 = 3.95m
Therefore, if it is 800 Hz or less, it can be considered to be a practical numerical value without knots.

Change example 2.
The material of the squeegee portion 230 does not have to be urethane, and may be an elastic body containing rubber or silicon.
The material of the squeegee portion 230 may be metal or an individual material.
The squeegee 203 may not have the support portion 220, or may be composed of only the squeegee portion 230.
Further, the squeegee 203 may be a metal squeegee.

Modification example 3.
The adjusting jig 240 may be sandwiched between the support portion 220 and the push plate 212 instead of between the support portion 220 and the base portion 211.
Two adjusting jigs 240 may be prepared and sandwiched between the support portion 220 and the base portion 211 and between the support portion 220 and the push plate 212.
The support portion 220 may be made of metal. At that time, the support portion 220 is formed of a metal harder than the holder 210.

Modification example 4.
The vibration unit 40 may be an air vibrator driven by air pressure, a vibrator driven by a voice coil motor, or the vibrator described in the above-described embodiment.

Embodiment 10.
In the tenth embodiment, the points different from the above-described embodiments will be described.
In the tenth embodiment, the printing tool 260 in which the squeegee 203 is a roller 250 will be described.

FIG. 47 is a five-view view of the printing tool 260 of the vibration device 100 of the tenth embodiment.
FIG. 47 shows the squeegee 203 of FIG. 36 changed to the roller 250.
The roller 250 is attached to the holder 210.
The roller 250 is made of metal and rotates about a roller shaft 251 in the left-right direction Y.
The vibration unit 40 vibrates two places on both sides 231 of the short side V of the printing tool 260.
In the printing tool 260 of FIG. 47, the rotating surface K of the vibrator 41 and the vibrator 42 is attached so as to be parallel to the roller 250 and the air supply port is on the inside.

The printing tool 260 of FIG. 48 is attached to the center of the holder 210 in the left-right direction Y with the rotation axis J of the vibrator 41 and the vibrator 42 parallel to the left-right direction Y.
The printing tool 260 has a vibrator 42 attached to the front side in the printing direction P and a vibrator 41 attached to the rear side in the printing direction P.
The rotation direction of the vibrator 41 is the rotation from the rear side to the front side of the printing direction P as shown by the arrow in FIG. 48.
As shown by the arrow in FIG. 48, the rotation direction of the vibrator 42 is the rotation from the front side to the rear side in the printing direction P.

In the printing tool 260 of FIG. 49, the rotation direction of the vibrator 42 of the printing tool 260 of FIG. 47 is defined as the rotation from the rear side to the front side.

<<< Consideration based on vibration measurement >>>
Vibration measurement was carried out in the same manner as in the ninth embodiment.
Similar to the ninth embodiment, at the time of vibration measurement, the controller 80 supplies the vibrator with air pressures of 0.2 MPa, 0.3 MPa, 0.4 MPa, and 0.5 MPa, and has the same amplitude and the same wavelength. And vibrated at the same frequency.

When the rotating surface K of the vibrator is mounted parallel to the roller 250 and the air supply port is on the inside as in the printing tool 260 of FIG. 47, the vibration of the bottom surface of the squeegee is stable. Vibration in the left-right direction was also suppressed.
The printing tool 260 of FIG. 47 has a standing wave pressing effect that the vibration pressed against the work becomes constant, and the vibration in the left-right direction Y is suppressed, which is suitable for printing.

As shown in FIG. 48, when the rotation axis J of the vibrator 41 and the vibrator 42 is parallel to the left-right direction Y and attached to the center of the holder 210 in the left-right direction Y, two vibration sources are 231 on the front side of the holder 210. Since the traveling wave is input from the rear side 231 to generate a standing wave, it becomes a standing wave vibration.
The printing tool 260 of FIG. 48 has a standing wave pressing effect that the vibration pressed against the work becomes constant, and the vibration in the left-right direction Y is suppressed, which is suitable for printing.

As shown in FIG. 49, even when the rotation directions of the vibrator 41 and the vibrator 42 are the same, since there are two vibration sources, standing wave vibration occurs.
In the case of FIG. 49, the vibrator 41 and the vibrator 42 are rotational vibration type air vibrators and have the same rotation direction. In, vibration in the same direction as the printing direction P, which assists the pressing of the roller 250, is applied.

<< Comparative example >>
In FIG. 48, when vibrating with only one vibrator, a traveling wave is generated, and when it arrives at the side and is reflected, a reflected wave is generated. The generated reflected wave overlaps with the traveling wave to become a standing wave.
With one vibrator, the vibration of the bottom surface of the squeegee was unstable, and vibration in the left-right direction Y also occurred. It was confirmed that nodes are generated in the standing wave that overlaps with the traveling wave and the reflected wave.
A standing wave from a reflected wave that can be noded by a single vibrator is not practical.

<<< Effect of the embodiment >>>
According to the present embodiment, even when the printing tool 260 has the roller 250, the same effect as that of the ninth embodiment can be obtained, and the roller 250 is oriented in the vertical direction Z and the front-rear direction X. Vibration can be applied.
According to this embodiment, it is possible to apply vibration in the same direction as the printing direction P, which assists the pressing of the roller 250.

<<< Change example >>>
Modification example 1.
The printing tool 260 can be used as a printing tool for a screen printing device.
The printing tool 260 using the roller 250 can also be used as a pressing tool, and can be used in a rolling mill for rolling products.
When the elevating mechanism 610 attaches the printing tool 260 at an angle to the product, the roller 250 rubs against the product.

Change example 2.
The material of the roller 250 does not have to be metal, and may be an elastic body containing rubber, urethane or silicon.
The material of the roller 250 may be a resin or an individual material.

Modification example 3.
The printing tool 260 shown in FIG. 50 has vibrators 43 and 44 added to the printing tool 260 shown in FIG. 47.
The rotation axes J of the vibrators 43 and 44 are parallel to the left-right direction Y, and the vibrators 43 and 44 are arranged behind the printing direction P.
The printing tool 260 shown in FIG. 50 is effective when it is desired to utilize the vibration in the left-right direction Y.

<<< Other configurations >>>.
FIG. 51 is a diagram showing a modified example of the printing tool 260 of the ninth and tenth embodiments.
FIG. 51 shows the mounting method or mounting position of the vibrator 41 and the vibrator 42 changed.

In (a), the mounting position of the vibrator 41 and the vibrator 42 is set at the center of the holder 210 in the vertical direction Z. A slit is provided at the center of the upper and lower sides of the side 23 of the holder 210, and the distributor 47 is inserted into and fixed to the slit at the center of the upper and lower sides of the side 23 of the holder 210.

In (b), the distributor 47 is L-shaped, and the distributor 47 is fixed to the entire side 23 of the holder 210 in the vertical direction Z.

(C) shows the case where the mounting position of the vibrator 41 and the vibrator 42 is not the holder 210 but the side 23 of the support portion 220 of the squeegee 203.
The vibration between the vibrator 41 and the vibrator 42 is easily transmitted to the squeegee 203.

(D) shows the case where the mounting position of the vibrator 41 and the vibrator 42 is not the holder 210 but the side 23 of the squeegee portion 230 of the squeegee 203.
The squeegee 203 has no support portion 220 and is composed of only the squeegee portion 230.
(E) shows the case where the mounting position of the vibrator 41 and the vibrator 42 is set to the side 23 of the roller shaft 251.
The distributor 47 has a cylindrical shape and is fixed to the roller shaft 251.
The distributor 47 transmits the vibration between the vibrator 41 and the vibrator 42 to the roller shaft 251.

(F) shows the case where the vibrator 41 and the vibrator 42 are directly fixed to the side 23s at both ends of the holder 210 without the distributor 47.
Although not shown, the vibrator 41 and the vibrator 42 may be attached by partially overlapping both ends of the holder 210. For example, half of the lower surfaces of the vibrator 41 and the vibrator 42 may be fixed to the upper surfaces of both ends of the holder 210 without the distributor 47.

Embodiment 11.
In the eleventh embodiment, the points different from the above-described embodiments will be described.
In the eleventh embodiment, a case where the screen plate 201 of the screen printing apparatus 200 is vibrated will be described.

<<< Explanation of the configuration of the vibration device 100 >>>
FIG. 52 is a diagram showing the screen printing apparatus 200 of the eleventh embodiment.
FIG. 53 is a perspective view of the vibration device 100 of the eleventh embodiment.
In FIGS. 52 and 53, X indicates a front-rear direction.
The printing direction P coincides with the front direction of the front-back direction X.
In FIGS. 52 and 53, Y indicates a left-right direction and Z indicates a vertical direction.

The vibration device 100 includes a screen plate 201, a vibration unit 40, and a controller 80.
The screen plate 201 is used for printing the screen printing apparatus 200.
The screen plate 201 prints on the work 900 by the printing pressure of the squeegee 203.
The vibration unit 40 vibrates a plurality of facing sides on the outside of the screen plate 201.
The controller 80 controls the vibration of the vibration unit 40.

<< Explanation of screen version 201 >>
The screen plate 201 has a screen 202 and a screen frame 208 to which the screen 202 is attached.
As shown in FIG. 53, the screen plate 201 has a rectangular screen frame 208.

<< Explanation of screen 202 >>
The screen 202 is a thin film having a print pattern formed in the center.
The screen 202 is tensioned on the screen frame 208.
The screen 202 is a metal mask screen, a mesh screen, or the like.

<< Screen frame 208 >>
The screen frame 208 is a rectangular frame composed of four straight lines.
The screen frame 208 is made of metal such as aluminum, stainless steel, iron, and alloy, and has rigidity that does not deform.
The screen frame 208 has a screen 202 attached to the frame.
The screen frame 208 has two parallel front and rear frames 2081 in a direction orthogonal to the printing direction P, and two parallel side frames 2082 in the same direction as the printing direction P.
The two front and rear frames 2081 are opposite frames of the screen plate 201.
The two armpit frames 2082 are opposite frames of the screen plate 201.
The screen frame 208 has a plurality of screw holes 209 around it.
The screw holes 209 are in the corners of the screen frame 208.
The screw holes 209 are located at both ends of each of the two front and rear frames 2081 and the two side frames 2082, and a total of eight screw holes 209 are provided.
The screen frame 208 is firmly fixed to the plate frame fixing portion 270 of the screen printing apparatus 200 by the screws inserted in the screw holes 209.
The screen printing device 200 fixes the plate frame fixing portion 270 to the housing.
Hereinafter, the position of the screw hole 209 is referred to as a fixing point.
The screen frame 208 is fixed to the plate frame fixing portion 270 at a fixing portion provided around the screen frame 208.
The method of fixing the fixing portion for fixing the screen frame 208 may not be the screw hole 209 and the screw fastening method with screws, but may be a clamp method or the like.

<<< Explanation of vibration unit 40 >>>
The vibration unit 40 has a plurality of vibrators and vibrates the opposing frames of the screen frame 208 at the same frequency.
The vibration unit 40 vibrates the facing frame of the screen frame 208 up and down.
The vibration unit 40 has two vibrators, a vibrator 41 and a vibrator 42.
The vibrator 41 and the vibrator 42 are outside the fixed portion and outside the frame.
The vibration unit 40 vibrates only the front and rear frames 2081 of the screen frame 208 up and down.
The vibrator 41 and the vibrator 42 are vibrators having the same specifications.
The vibrator 41 and the vibrator 42 are vibrators driven by air pressure.

<< Explanation of Distributor 47 >>
The vibration unit 40 has a distributor 47.
The distributor 47 transmits the vibration between the vibrator 41 and the vibrator 42 to the front and rear frames 2081 of the screen frame 208.
The distributor 47 fixes the vibrator 41 and the vibrator 42 to the upper surface of the front and rear frames 2081 of the screen frame 208.
The distributor 47 has screw holes at its ends and is fixed to the front and rear frames 2081 of the screen frame 208 by screws.
The distributor 47 is a rectangular metal plate.
The distributor 47 arranges the vibrator 41 and the vibrator 42 outside the screen frame 208.
The distributor 47 increases the flapping of the vibrator 41 and the vibrator 42.
As the length of the distributor 47 in the front-rear direction X is increased and the vibrator 41 and the vibrator 42 are moved away from the screen frame 208, the distributor 47 is curved due to the elastic force of the distributor 47, and the flapping becomes larger.
As the thickness of the distributor 47 in the vertical direction Z is reduced, the distributor 47 is curved due to the elastic force of the distributor 47, and the flapping becomes larger.

<< Explanation of Vibrator 41 and Vibrator 42 >>
The vibrator 41 and the vibrator 42 are attached like wings to the outside of the side 23 of the screen frame 208.
The vibrator 41 and the vibrator 42 are attached at right angles to the frame.
The vibrator 41 and the vibrator 42 are attached to the central portion of the frame.
The vibrator 41 and the vibrator 42 are on an extension of a straight line connecting the centers of the front and rear frames 2081, and are attached to symmetrical points on the outer circumference of the screen frame 208.
The vibrator 41 and the vibrator 42 are attached so that the air supply port is on the inside.
The axis of rotation of the vibrator 41 and the vibrator 42 is parallel to the left-right direction Y.
The surface of rotation of the vibrator 41 and the vibrator 42 is parallel to the front-rear direction X.

<<< Explanation of operation of vibration unit 40 >>>
The controller 80 vibrates the vibrator 41 and the vibrator 42 at a frequency of 10 Hz or more and 800 Hz or less.
The vibration unit 40 flaps on both sides of the front and rear frames 2081 during printing to vibrate the screen plate 201.
The vibration unit 40 vibrates the front and rear frames 2081 of the screen plate 201.
The vibration unit 40 vibrates a plurality of facing frames of the screen plate 201 with the same amplitude, the same wavelength, and the same frequency, and causes the screen 202 to vibrate with a standing wave.
The vibration unit 40 simultaneously generates a traveling wave at the end of the screen 202 via a frame with the same amplitude, the same wavelength, and the same frequency.
The vibration unit 40 vibrates the end of the screen 202 up and down by a traveling wave from the outside of the screen plate 201, and vibrates the screen 202 by a standing wave.
The vibration unit 40 vibrates the screen 202 only in the vertical direction due to the flapping phenomenon described in the above-described embodiment.
The fixing position of the vibrator 41 and the vibrator 42 is in the center of the two screw holes 209, but the screen frame 208 has rigidity, and the screen plate 201 is securely fixed to the plate frame fixing portion 270. , Flapping phenomenon occurs.

<<< Features of the embodiment >>>
The vibration unit 40 of the vibration device 100 of the present embodiment simultaneously generates a traveling wave with the same amplitude, the same wavelength, and the same frequency from symmetrical points on the outer circumference of the screen frame 208.
The traveling wave from the symmetrical portion on the outer periphery of the screen frame 208 changes to a standing wave, and the screen frame 208 vibrates only up and down, so that the screen 202 in the screen frame also vibrates only up and down.

<<< Effect of the embodiment >>>
According to the present embodiment, the entire screen 202 vibrates uniformly in the vertical direction Z and does not vibrate back and forth and left and right, which is effective for fill-in-the-blank printing.
According to this embodiment, the traveling wave can be advanced in the same direction as the printing direction P of the squeegee 203.

<<< Change example >>>
Modification example 1.
As shown in FIG. 54, two vibration units 40 may be attached to both ends of each frame of the front and rear frames 2081.
The vibration unit 40 is fixed next to or in the vicinity of the two screw holes 209 of the front and rear frames 2081.
In order to facilitate the flapping phenomenon, it is desirable that the fixed positions of the vibrator 41 and the vibrator 42 and the positions (fixed points) of the two screw holes 209 are on a straight line. That is, it is desirable that the plurality of vibrators exist as an extension of the line connecting the opposite fixed points on the opposite sides of the plate 20.
In the case of FIG. 54, since the screw holes 209 are used by the plate frame fixing portion 270, two vibration units 40 are attached inside the two screw holes 209 so as not to collide with the plate frame fixing portion 270. There is.

Change example 2.
As shown in FIG. 55, one or two or more vibration units 40 may be attached to all four frames.
In FIG. 55, the vibrator 43 and the vibrator 44 are orthogonal to the side frame 2082 and are attached to the central portion of the side frame 2082.
Although not shown, when the screen frame 208 is a pentagon, a hexagon, an octagon, or another polygon, a vibrator may be provided in each frame.
Although not shown, when the screen frame 208 is circular or elliptical, a vibrator may be provided at a position facing the frame.
Although not shown, the vibrator may be attached only to the side frame 2082 without attaching the vibrator to the front and rear frames 2081.

Modification example 3.
As shown in FIG. 56, the distributor 47 may be T-shaped.
The distributor 47 exists on the upper surface of the front and rear frames 2081 up to the front of the screw hole 209.
In FIG. 56, the vibration between the vibrator 41 and the vibrator 42 is transmitted over almost the entire length of the front and rear frames 2081.
Although not shown, if the distributor 47 has a configuration that transmits vibration to the frame with a width larger than the width of the vibrator, the shape of the distributor 47 does not have to be T-shaped, and is triangular, trapezoidal, chevron, or semicircular. Other shapes such as a mold may be used.

Modification example 4.
As shown in FIG. 57, the fixed position of the vibrator with respect to the frame may be the lower surface of the frame as shown in (a) or the outer surface of the frame as shown in (b).
In each case, the vibrator is located outside the fixed portion and outside the frame, causing the opposing frames of the screen frame 208 to vibrate at the same amplitude, at the same wavelength, and at the same frequency. Then, the end portion of the screen 202 is vibrated up and down by a traveling wave from the outside of the screen 202, and the screen 202 is vibrated by a standing wave.
Although not shown, the fixed position of the vibrator with respect to the frame may be the inner surface of the frame.

*** Supplementary explanation of the embodiment ***
The embodiments described above are exemplary of desirable embodiments and are not intended to limit the technical scope of the invention.
The embodiment may be partially implemented or may be implemented in combination with other embodiments.
Further, the above-described embodiments may be combined.
For example, FIG. 58 shows a case where a vibrator is attached to the plate 20, the squeegee 203, and the screen plate 201, respectively.
Although not shown, a vibrator may be attached to any two of the plate 20, the squeegee 203, and the screen plate 201.

100 vibration device, 10 base, 11 top surface, 12 bottom surface, 13 wall, 14 space, 20 plate, 21 front surface, 22 back surface, 23 side, 24 screw holes, 25 screws, 26 fulcrum, 27 corners, 29 depressions, 40 vibration units. , 41, 42, 43, 44, 45 Vibrator, 46 Frame, 47 Distributor, 48 Horizontal, 49 Vertical, 50 Spacer, 51 Strut, 52 Groove, 53 Groove, 60 Progressive Wave, 70 Constant Wave, 80 Controller, 81 Air Compressor, 82 air pipe, 83 regulator, 84 processor, 200 screen printer, 201 screen plate, 202 screen, 203 squeegee, 204 paste, 205 through hole, 206 suction pipe, 207 vacuum pump, 208 screen frame, 2081 front and rear frame, 2082 Side frame, 209 screw hole, 210 holder, 211 base, 212 push plate, 213 tightening screw, 214 fixing part, 220 support part, 221 thin plate part, 222 thick plate part, 230 squeegee part, 231 side, 240 adjustment jig, 250 roller, 251 roller shaft, 260 printing tool, 270 plate frame fixing part, 300 shearing device, 301 blade, 400 drilling device, 401 drill, 500 vibration transfer device, 600 printing part, 610 lifting mechanism, 620 fixing mechanism, 900 work , 901 parts.

Claims (33)

A screen version with a screen and
A vibration unit that vibrates a plurality of facing frames of the screen plate, and
It is equipped with a controller that controls the vibration of the vibration unit.
The vibration unit has a plurality of vibrators attached to the outside of the plurality of frames, and the plurality of vibrators allow the plurality of frames of the screen plate to be opposed to each other from a position outside the plurality of frames. A vibration device that vibrates the screen with the same amplitude, the same wavelength, and the same frequency, and vibrates the screen with a standing wave generated by superimposing a plurality of traveling waves . The vibration unit simultaneously generates a traveling wave at the edge of the screen of the screen plate at the same amplitude, the same wavelength, and the same frequency, and the traveling wave from the outside of the screen causes the edge of the screen to be generated. The vibration device according to claim 1, wherein the screen is vibrated up and down and the screen is vibrated by a standing wave. The screen plate has a screen frame to which the screen is attached.
The vibration device according to claim 1 or 2, wherein the vibration unit vibrates the screen frame. The screen frame has front and rear frames in a direction orthogonal to the printing direction.
The vibration device according to claim 3, wherein the vibration unit vibrates the central portion or both ends of the front and rear frames of the screen plate. The screen frame has a side frame in the same direction as the printing direction.
The vibration device according to claim 3, wherein the vibration unit vibrates a central portion or both ends of a side frame of the screen plate. The vibration device according to any one of claims 1 to 5, wherein the controller vibrates the vibrator at a frequency of 10 Hz or more and 800 Hz or less. The vibration device according to any one of claims 1 to 5, wherein the vibration unit has an air vibrator driven by air pressure or a vibrator driven by a voice coil motor. A screen printing device provided with the vibration device according to any one of claims 1 to 7. By a vibration unit having a plurality of vibrators attached to the outside of the plurality of facing frames of the screen plate, the plurality of facing frames of the screen plate can be obtained from a position outside the plurality of facing frames of the screen plate. A vibration method in which the screen is vibrated by a standing wave generated by superimposing a plurality of traveling waves by vibrating at the same amplitude, the same wavelength, and the same frequency. A screen version with a screen and
A vibration unit that vibrates a plurality of facing frames of the screen plate, and
It is equipped with a controller that controls the vibration of the vibration unit.
The plurality of frames each have a plurality of fixing points fixed to the plate frame fixing portion.
The vibration unit has a plurality of vibrators that are outside the plurality of fixing points and are attached to the outside of the plurality of frames, respectively, and the plurality of vibrations are used at positions outside the plurality of fixing points. The screen is vibrated from a position outside the facing frames of the screen plate by vibrating the facing frames of the screen plate with the same amplitude, the same wavelength, and the same frequency. A vibration device that vibrates with a standing wave generated by superimposing multiple traveling waves . A screen version with a screen and
A vibration unit that vibrates a plurality of facing frames of the screen plate, and
With multiple distributors fixed to the multiple frames,
It is equipped with a controller that controls the vibration of the vibration unit.
The vibration unit has a plurality of vibrators attached to the plurality of distributors , respectively, and the plurality of vibrators allow the plurality of opposing frames of the screen plate to have the same amplitude, the same wavelength, and the same frequency. A vibration device that vibrates the screen with a standing wave. A screen version with a screen and
A vibration unit that vibrates a plurality of facing frames of the screen plate, and
It is equipped with a controller that controls the vibration of the vibration unit.
The vibration unit has a plurality of vibrators attached to the plurality of frames, respectively, and the plurality of vibrators allow the plurality of opposed frames of the screen plate to have the same amplitude, the same wavelength, and the same frequency. A vibration device that vibrates the screen with a standing wave using the fixed positions of the plurality of vibrators on the plurality of frames as fulcrums . By a vibration unit having a plurality of vibrators attached to the outside of a plurality of facing frames of the screen plate, a plurality of frames facing each other at a position outside the plurality of fixing points for fixing the screen plate. From an outer position, a plurality of opposing frames of the screen plate are vibrated with the same amplitude, the same wavelength, and the same frequency, and the screen is vibrated by a standing wave generated by superimposing a plurality of traveling waves. How to make it vibrate. Multiple vibrators attached to a plurality of distributors fixed to a plurality of facing frames of the screen plate allow the facing frames of the screen plate to have the same amplitude, the same wavelength, and the same frequency. A vibration method that vibrates the screen with a standing wave. A vibration unit having a plurality of vibrators attached to a plurality of facing frames of the screen plate causes the plurality of facing frames of the screen plate to vibrate with the same amplitude, the same wavelength, and the same frequency. , A vibration method in which a screen is vibrated by a standing wave with a fixed position of the plurality of vibrators on the plurality of frames as a fulcrum . With the plate
A vibration unit that vibrates a plurality of opposite sides of the plate , and
It is equipped with a controller that controls the vibration of the vibration unit.
The vibration unit has a plurality of vibrators attached to the outside of the plurality of sides , respectively, and the plurality of vibrators allow the plurality of facing sides of the plate to be the same from a position outside the plurality of sides. A vibration device that vibrates at the same amplitude, at the same wavelength, and at the same frequency, and vibrates the plate with a standing wave generated by superimposing a plurality of traveling waves . A vibration unit having a plurality of vibrators attached to the outside of a plurality of facing sides of the plate allows the facing sides of the plate to have the same amplitude from a position outside the facing sides of the plate. A vibration method in which the plate is vibrated at the same wavelength and at the same frequency, and the plate is vibrated by a standing wave generated by superimposing a plurality of traveling waves . With the plate
A vibration unit that vibrates a plurality of opposite sides of the plate , and
It is equipped with a controller that controls the vibration of the vibration unit.
The plate has a plurality of fixing points and has a plurality of fixing points.
The vibration unit has a plurality of vibrators that are outside the plurality of fixing points and are attached to the outside of the plurality of sides , respectively, and the plurality of vibrations are used at positions outside the plurality of fixing points. A plurality of traveling sides of the plate are vibrated at the same amplitude, at the same wavelength, and at the same frequency from positions outside the facing sides of the plate . A vibration device that vibrates with a standing wave generated by superimposing waves . With the plate
A vibration unit that vibrates a plurality of opposite sides of the plate , and
With the multiple distributors fixed to the multiple sides,
It is equipped with a controller that controls the vibration of the vibration unit.
The vibration unit has a plurality of vibrators attached to each of the plurality of distributors , and the plurality of vibrators allow a plurality of opposing sides of the plate to have the same amplitude, the same wavelength, and the same frequency. A vibration device that vibrates the plate with a standing wave. With the plate
A vibration unit that vibrates a plurality of opposite sides of the plate , and
It is equipped with a controller that controls the vibration of the vibration unit.
The vibration unit has a plurality of vibrators attached to the plurality of sides, respectively, and the plurality of vibrators allow the plurality of opposing sides of the plate to have the same amplitude, the same wavelength, and the same frequency. A vibration device that vibrates the plate with a standing wave using the fixed positions of the plurality of vibrators on the plurality of sides as fulcrums . A vibration unit having a plurality of vibrators attached to the outside of a plurality of facing sides of the plate , at a position outside the plurality of fixing points for fixing the plate and outside the plurality of facing sides of the plate. A vibration method in which a plurality of opposite sides of the plate are vibrated from a position at the same amplitude , at the same wavelength, and at the same frequency, and the plate is vibrated by a standing wave generated by superimposing a plurality of traveling waves. .. Multiple vibrators attached to each of a plurality of distributors fixed to a plurality of opposite sides of the plate allow the opposite sides of the plate to have the same amplitude, the same wavelength, and the same frequency. A vibration method in which the plate is vibrated and the plate is vibrated by a standing wave. A vibration unit having a plurality of vibrators attached to a plurality of facing sides of the plate vibrates the plurality of facing sides of the plate with the same amplitude, the same wavelength, and the same frequency. A vibration method in which a plate is vibrated by a standing wave with a fixed position of a plurality of vibrators on the plurality of sides as a fulcrum . With printing tools ,
A vibration unit that vibrates a plurality of facing sides of the printing tool , and
It is equipped with a controller that controls the vibration of the vibration unit.
The vibration unit has a plurality of vibrators attached to the outside of each of the plurality of sides , and the plurality of vibrators allow the plurality of sides of the printing tool to be opposed to each other from a position outside the plurality of sides . A vibration device that vibrates at the same amplitude, at the same wavelength, and at the same frequency, and vibrates the printing tool with a standing wave generated by superimposing a plurality of traveling waves . A vibration unit having a plurality of vibrators attached to the outside of the plurality of facing sides of the printing tool allows the plurality of facing sides of the printing tool to be pressed from a position outside the plurality of facing sides of the printing tool . A vibration method in which the printing tool is vibrated with a standing wave generated by superimposing a plurality of traveling waves by vibrating with the same amplitude, the same wavelength, and the same frequency. With printing tools ,
A vibration unit that vibrates a plurality of facing sides of the printing tool , and
It is equipped with a controller that controls the vibration of the vibration unit.
The printing tool has a plurality of fixing points and has a plurality of fixing points.
The vibration unit has a plurality of vibrators that are outside the plurality of fixing points and are attached to the outside of the plurality of sides , respectively, and the plurality of vibrations are used at positions outside the plurality of fixing points. The printing tool is vibrated from a position outside the facing sides of the printing tool to the facing sides of the printing tool with the same amplitude, the same wavelength, and the same frequency. A vibration device that vibrates with a standing wave generated by superimposing multiple traveling waves . With printing tools ,
A vibration unit that vibrates a plurality of facing sides of the printing tool , and
With the multiple distributors fixed to the multiple sides,
It is equipped with a controller that controls the vibration of the vibration unit.
The vibration unit has a plurality of vibrators attached to the plurality of distributors , and the plurality of vibrators allow the plurality of opposite sides of the printing tool to have the same amplitude, the same wavelength, and the same frequency. A vibration device that vibrates the printing tool with a standing wave. With printing tools ,
A vibration unit that vibrates a plurality of facing sides of the printing tool , and
It is equipped with a controller that controls the vibration of the vibration unit.
The vibration unit has a plurality of vibrators attached to the plurality of sides, respectively, and the plurality of vibrators allow the plurality of facing sides of the printing tool to have the same amplitude, the same wavelength, and the same frequency. A vibration device that vibrates the printing tool with a standing wave using the fixed positions of the plurality of vibrators on the plurality of sides as fulcrums . By a vibration unit having a plurality of vibrators attached to the outside of a plurality of facing sides of the printing tool, a plurality of sides facing the printing tool at a position outside the plurality of fixing points for fixing the printing tool . A standing wave generated by superimposing a plurality of traveling waves on the printing tool by vibrating a plurality of opposite sides of the printing tool with the same amplitude, the same wavelength, and the same frequency from an outer position. Vibration method to vibrate with. Multiple vibrators attached to a plurality of distributors fixed to a plurality of facing sides of the printing tool allow the facing sides of the printing tool to have the same amplitude, the same wavelength, and the same frequency. A vibration method in which the printing tool is vibrated by a standing wave. A vibration unit having a plurality of vibrators attached to a plurality of facing sides of the printing tool causes the plurality of facing sides of the printing tool to vibrate with the same amplitude, the same wavelength, and the same frequency. , A vibration method in which the printing tool is vibrated by a standing wave with a fixed position of the plurality of vibrators on the plurality of sides as a fulcrum . The vibration device according to claim 11, 19, or 27, wherein the distributor is a metal fitting bent into an L shape. The vibration method according to claim 14, 22, or 30, wherein the distributor is a metal fitting bent into an L shape.

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