JP7310345B2 - inspection equipment - Google Patents

Description

The present invention relates to an inspection apparatus that inspects an object to be inspected by bringing a probe into contact with the object.

Conventionally, an inspection device for inspecting a liquid crystal substrate and a prober replacement device are provided side by side, and the prober replacement device is known as a liquid crystal substrate inspection device provided with a transport device for transporting a prober for inspecting a liquid substrate. (See Patent Document 1, for example).

Patent Document 1 describes that the prober 6 is placed on the liquid crystal substrate 30 for inspection (FIG. 6A, paragraphs 0044 to 0047 of Patent Document 1).

JP 2005-233997 A

By the way, when inspecting a circuit board, a semiconductor substrate, or the like, there are cases where inspection points such as wiring and pads to be inspected are provided on both the upper surface and the lower surface of the substrate. When inspecting such a substrate, it is necessary to bring probes into contact with both the top surface and the bottom surface of the substrate.

However, with the technique described in Patent Literature 1, the probe can only be transported above the inspection object, so the probe cannot be transported below the inspection object. Therefore, it is difficult to apply the prober replacement device described in Patent Document 1 to an inspection device that inspects an inspection object having inspection points provided on both sides.

SUMMARY OF THE INVENTION An object of the present invention is to provide an inspection apparatus that facilitates transporting both an upper jig that contacts the upper surface of an inspection object and a lower jig that contacts the lower surface of the inspection object.

An inspection apparatus according to an example of the present invention is arranged above a substantially plate-shaped inspection object, and an upper jig holding an upper probe for contacting the upper surface of the inspection object is detachable from below. and a lower jig disposed below the object to be inspected and holding a lower probe for contacting the lower surface of the object to be inspected is detachably attached from above. a side mounting portion, a jig shelf capable of accommodating the upper jig and the lower jig, an arm member capable of selectively placing the upper jig and the lower jig, and driving the arm member By doing so, an arm driving section for conveying the upper jig and the lower jig, an upper attachment/detachment mechanism for receiving the upper jig from the arm member and attaching it to the upper mounting portion, and the lower jig from the arm member. a lower attachment/detachment mechanism that receives a tool and attaches it to the lower attachment portion, wherein the arm driving portion takes out the upper jig from the jig shelf, conveys it to the upper attachment/detachment mechanism, and removes the lower jig. It is taken out from the jig rack and transported to the lower attachment/detachment mechanism, and the upper jig includes a substantially plate-shaped upper plate and a plurality of the upper probes extending downward from the lower surface side of the upper plate. An upper jig head for holding the lower jig includes a substantially plate-shaped lower plate and a lower jig head for holding the plurality of lower probes in a direction extending upward from the upper surface side of the lower plate. and

The inspection apparatus having such a configuration can easily transport both the upper jig that contacts the upper surface of the inspection object and the lower jig that contacts the lower surface of the inspection object.

1 is a sectional view conceptually showing a schematic configuration of an inspection apparatus according to an embodiment of the present invention; FIG. FIG. 3 is a perspective view of the upper jig 6U shown in FIG. 1 as seen obliquely from below; FIG. 2 is a perspective view of the upper mounting portion 2U, the upper attachment/detachment mechanism 8U, the upper position adjustment mechanism 10U, and the upper position sensor 85U shown in FIG. 1, as seen obliquely from below; 4 is an explanatory view showing a state in which an upper jig 6U is attached to a base plate 22U of the upper attachment portion 2U shown in FIG. 3; FIG. 4 is a perspective view showing an example of an arm member 41 and an arm-side position adjusting mechanism 9. FIG. 6 is a perspective view showing a state in which an upper jig 6U is placed on an arm member 41 shown in FIG. 5; FIG. 2 is a block diagram showing an example of an electrical configuration of the inspection apparatus 1 shown in FIG. 1; FIG. 4 is a flow chart showing an example of the operation of the inspection apparatus 1 when conveying the jig 6 from the mounting section 2 to the jig shelf 3. FIG. 4 is a flow chart showing an example of the operation of the inspection apparatus 1 when conveying the jig 6 from the jig shelf 3 to the mounting portion 2. FIG. 4 is a flow chart showing an example of the operation of the inspection apparatus 1 when conveying the jig 6 from the jig shelf 3 to the mounting portion 2. FIG. 6 is an explanatory view of the upper jig 6U inserted into the upper holding member 80U by the arm member 41 in a non-contact manner, viewed from the X-axis direction; FIG. It is an explanatory view of the lower jig 6D inserted into the lower holding member 80D by the arm member 41 in a non-contact manner, as seen from the X-axis direction. FIG. 11 is an explanatory diagram for explaining a state in which the upper plate 61U is transported above the receiving members 31U, 31U; FIG. 11 is an explanatory diagram for explaining a state in which the lower plate 61D is conveyed above the receiving members 31D, 31D;

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment according to the present invention will be described below with reference to the drawings. It should be noted that the same reference numerals in each figure indicate the same configuration, and the description thereof will be omitted. In FIG. 1, XYZ orthogonal coordinate axes and a rotation direction θ are shown in order to clarify the directional relationship with each drawing described later.

The inspection apparatus 1 shown in FIG. 1 includes an upper mounting portion 2U, a lower mounting portion 2D, jig racks 3a and 3b, a jig transport mechanism 4, an upper jig drive mechanism 5U, and a lower jig drive mechanism 5D. The inspection apparatus 1 also includes an upper attachment/detachment mechanism 8U, a lower attachment/detachment mechanism 8D, an arm-side position adjustment mechanism 9, an upper position adjustment mechanism 10U, and a lower position adjustment mechanism 10D, which will be described later.

The inspection object 100 has a substantially plate-like shape. The inspection object 100 may be, for example, a printed wiring board, a glass epoxy board, a flexible board, a ceramic multilayer wiring board, a package board for a semiconductor package, an interposer board, or a board such as a film carrier. Electro-Luminescence) display or touch panel display, it may be an electrode plate for a display or an electrode plate for a touch panel, etc., a semiconductor chip, a CSP (Chip size package), a semiconductor element (IC: Integrated Circuit), or It may be a semiconductor substrate such as a semiconductor wafer, or various substrates.

The inspection object 100 is transported to a predetermined inspection position A and held horizontally by a transport holding mechanism (not shown).

The upper mounting portion 2U is arranged above the inspection object 100 positioned at the inspection position A. As shown in FIG. The upper mounting portion 2U is configured so that the upper jig 6U can be attached and detached from below. The lower mounting portion 2D is arranged below the inspection object 100 positioned at the inspection position A. As shown in FIG. A lower jig 6D can be attached to and detached from the lower mounting portion 2D from above. Hereinafter, the upper mounting portion 2U and the lower mounting portion 2D are collectively referred to as the mounting portion 2, and the upper jig 6U and the lower jig 6D are collectively referred to as the jig 6. As shown in FIG.

The upper jig drive mechanism 5U and the lower jig drive mechanism 5D are configured by power transmission mechanisms such as motors and gears. The upper jig driving mechanism 5U moves the upper mounting portion 2U in the X, Y, and Z axis directions and rotates it in the θ direction around the Z axis. The lower jig drive mechanism 5D moves the lower mounting portion 2D in the X, Y, and Z axis directions and rotates it in the θ direction around the Z axis.

Each of the jig shelves 3a and 3b can accommodate two sets of upper jigs 6U and lower jigs 6D. Hereinafter, the jig racks 3a and 3b are collectively referred to as the jig rack 3. As shown in FIG.

The jig transport mechanism 4 includes an arm member 41 and arm drive units 42a to 42d. Hereinafter, the arm drive units 42a to 42d are collectively referred to as the arm drive unit 42. As shown in FIG.
An upper jig 6U and a lower jig 6D can be selectively placed on the upper surface of the arm member 41. As shown in FIG. Arm driving portions 42d, 42b, and 42c are mounted in this order from the bottom on the arm driving portion 42a. The arm member 41 is connected to the arm driving portion 42c.

The arm drive section 42a slides the arm drive sections 42d, 42b, and 42c in the X-axis direction. As a result, the arm driving section 42 a moves the arm member 41 connected to the arm driving section 42 c in the X-axis direction, that is, in the direction toward or away from the mounting section 2 .

The arm drive section 42d rotates the arm drive sections 42b and 42c around the Z axis. As a result, the arm driving section 42 d changes the orientation of the arm member 41 connected to the arm driving section 42 c between the X-axis direction, that is, the direction facing the mounting portion 2 , and the Y-axis direction, that is, the direction that faces the jig rack 3 . It is possible to change the posture with

The arm drive portion 42 b slides the arm drive portion 42 c coupled to the arm member 41 along the longitudinal direction of the arm member 41 . As a result, the arm driving section 42b advances and retreats the arm member 41 with respect to the mounting section 2 when the arm member 41 faces the mounting section 2, and the arm member 41 faces the jig rack 3. The arm member 41 can be advanced and retracted with respect to the jig shelf 3 when it is present.

One ends of four support columns 90 of an arm-side position adjusting mechanism 9, which will be described later, are attached to the arm driving portion 42b. In FIG. 1, the description of the pressing portions 91U, 92U, 91D, and 92D is omitted, and only the pillar 90 is illustrated with a chain double-dashed line. Since the four pillars 90 are attached to the arm driving portion 42b, the arm side position adjusting mechanism 9 is slid in the X-axis direction by the arm driving portion 42a together with the arm driving portion 42b, and is moved by the arm driving portion 42d. , is rotated about the Z-axis.

The arm drive units 42a to 42c are configured using, for example, motors, gear mechanisms, slide rails, rack and pinions, belts, chains, and the like. The arm driving section 42d is configured using, for example, a motor and a gear mechanism.

The jig transport mechanism 4 moves the jig 6 placed on the arm member 41 between the mounting portion 2 and the jig by causing the arm driving portions 42a to 42d to operate in coordination according to a control signal from the control portion 7, which will be described later. It is made bidirectionally transportable to and from the rack 3.

FIG. 2 illustrates a state in which the arm member 41 faces the mounting portion 2 . 3 to 6, 11, and 12, arrows indicate the XYZ directions when the arm member 41 faces the same direction as in FIG.

The upper jig 6U shown in FIG. 2 includes a substantially plate-like upper plate 61U, a plurality of upper probes Pu, and an upper jig that holds the plurality of upper probes Pu in a direction extending downward from the lower surface side of the upper plate 61U. a jig-side upper connector 63U provided on the upper surface side of the upper plate 61U and connectable to the device-side upper connector 21U; a plurality of upper probes Pu provided on the lower surface side of the upper plate 61U; Wiring 64U for connecting each terminal of the side upper connector 63U, and a pair of blades 65 provided on the lower surface side of the upper plate 61U and protruding on both sides with the upper jig head 62U and the wiring 64U interposed therebetween. there is

The width of the upper plate 61U is W3. The upper jig 6U may include a protective cover that covers the terminals of the wiring 64U and the jig-side upper connector 63U.

In the example shown in FIG. 2, the left side in the X-axis direction is the front end side of the upper jig 6U, and the right side in the X-axis direction is the rear end side of the upper jig 6U. The upper jig head 62U is arranged near the tip of the upper jig 6U, and the jig-side upper connector 63U is arranged on the rear end side of the upper jig head 62U.

The pair of blades 65 has a plate-like shape elongated in the X-axis direction and stands upright on the lower surface of the upper plate 61U. The pair of blades 65 have their tops 651 extending parallel to each other. The amount of protrusion (height) of the pair of blades 65 from the lower surface of the upper plate 61U is constant in the X-axis direction. As a result, when the upper jig 6U is placed on the arm member 41 with the tops 651 of the pair of blades 65 in contact with the upper surface of the arm member 41, the upper plate 61U is horizontally supported by the pair of blades 65. It has become so.

The pair of blades 65 project from the lower surface of the upper plate 61U, that is, the height of the top portion 651 is larger than the terminals of the wiring 64U and the jig-side upper connector 63U or their protective covers. As shown in FIG. 2, a portion of the blade 65 between the top portion 651 and the lower surface of the upper plate 61U may be cut out.

The front surface of the jig-side upper connector 63U is exposed on the upper surface of the upper plate 61U. In FIG. 2, the back side of the jig-side upper connector 63U can be seen on the lower surface of the upper plate 61U. Further, the upper surface of the upper plate 61U is provided with positioning holes (not shown) for receiving positioning pins 23 of the upper mounting portion 2U, which will be described later.

The lower jig 6D corresponds to the upper jig 6U with the pair of blades 65 removed and turned upside down. FIG. 2 shows an upper jig 6U, an upper plate 61U, an upper jig head 62U, a jig-side upper connector 63U, wiring 64U, and a lower jig 6D, a lower plate 61D, and a lower jig head corresponding to the upper probe Pu. 62D, jig-side lower connector 63D, wiring 64D, and lower probe Pd are shown in parentheses.

That is, the lower jig 6D shown in FIGS. 1 and 2 includes a substantially plate-like lower plate 61D, a plurality of lower probes Pd, and a plurality of lower probes Pd extending upward from the upper surface side of the lower plate 61D. a jig-side lower connector 63D provided on the lower surface side of the lower plate 61D and connectable to the apparatus-side lower connector 21D; and a plurality of lower jig-side connectors 63D provided on the upper surface side of the lower plate 61D. A wire 64D is provided for connecting the probe Pd and each terminal of the jig-side lower connector 63D.

As the upper plate 61U, the lower plate 61D, and the pair of blades 65, for example, metal plates such as aluminum or stainless steel can be suitably used. Hereinafter, the upper plate 61U and the lower plate 61D are collectively referred to as the plate 61, and the upper probes Pu and the lower probes Pd are collectively referred to as the probes P.

The upper mounting portion 2U shown in FIG. 3 includes a substantially plate-shaped base plate 22U. In the example shown in FIG. 3, the far side in the X-axis direction is the front end side of the base plate 22U, and the front side in the X-axis direction is the rear end side of the base plate 22U. Notches 221 are formed in the four corners of the base plate 22U.

A device-side upper connector 21U is arranged at a position on the rear end side of the base plate 22U. A plurality of positioning pins 23 protruding downward are attached to the lower surface of the base plate 22U. When the upper jig 6U is attached to the base plate 22U, the positioning pins 23 are inserted into the above positioning holes, the base plate 22U and the upper jig 6U are positioned, and the device-side upper connector 21U and the jig-side upper connector are connected. 63U are connected.

The upper attachment/detachment mechanism 8U includes an upper holding member 80U and an upper jig lifting mechanism 83U shown in FIG. The upper holding member 80U includes holding rods 81U and 82U extending parallel to each other along the X-axis direction on both sides of the base plate 22U in the Y-axis direction. The holding rod 81U has a substantially L-shaped cross section cut along the YZ plane.

The holding bars 81U, 82U have vertical walls 811, 821 facing each other.

The holding bar 81U has a plate-like upper first protrusion 812U extending from the lower end of the vertical wall 811 toward the holding bar 82U, and the upper end of the vertical wall 811, that is, above the upper first protrusion 812U. Upper second projections 813U, 813U project toward the holding rod 82U facing the 812U.

The holding bar 82U has a plate-like upper first protrusion 822U extending from the lower end of the vertical wall 821 toward the holding bar 81U, and an upper first protrusion 822U at the upper end of the vertical wall 821, that is, above the upper first protrusion 822U. Upper second protrusions 823U, 823U are provided facing the 822U and protruding toward the holding rod 81U.

The distance W1 between the upper first projection 812U and the upper second projections 813U, 813U and the distance W1 between the upper first projection 822U and the upper second projections 823U, 823U are determined by the thickness T of the upper plate 61U. has also been made larger. Thereby, as shown in FIG. 4, the upper plate 61U can be inserted into the space W1 between the holding rods 81U and 82U. The lower surface of the upper plate 61U inserted into the space W1 is supported by the upper first protrusions 812U and 822U.

A space W5 between the upper first protrusion 812U and the upper first protrusion 822U is narrower than the width W3 of the plate 61 and wider than the width W2 of the arm member 41, which will be described later. As a result, the arm member 41 can carry the upper plate 61U within the interval W1 between the holding rods 81U and 82U without interference between the arm member 41 and the upper first projections 812U and 822U. Become.

In the case of the lower holding member 80D, the interval W6 between the lower first protrusion 813D and the lower first protrusion 823D is narrower than the width W3 of the plate 61 and narrower than the width W2 of the arm member 41, which will be described later. is also wide. As a result, the lower plate 61D can be transported and carried out within the interval W1 between the holding rods 81D and 82D by the arm member 41 without interference between the arm member 41 and the lower first protrusions 813D and 823D. Become.

The holding bars 81U and 82U can be moved up and down by an upper jig lifting mechanism 83U, which will be described later. When the holding rods 81U and 82U are lifted by the upper jig lifting mechanism 83U, the upper second protrusions 813U, 813U, 823U and 823U fit into the notches 221 at the four corners of the base plate 22U.

The upper position sensor 85U is arranged, for example, on the distal end portion F side of the holding rods 81U and 82U. The upper position sensor 85U detects the position of the upper jig 6U held by the upper holding member 80U. As the upper position sensor 85U, a position detection sensor similar to the mounting position detection section 44 can be used.

Referring to FIG. 3, the upper position adjusting mechanism 10U is attached near one end and the other end of the holding rods 81U and 82U, for example. The upper position adjusting mechanism 10U includes a substantially bar-shaped pressing member 11 (second pressing member) and an actuator 12 that moves the pressing member 11 forward and backward.

Each actuator 12 is attached to the outside of the vertical walls 811, 821 of the holding bars 81U, 82U. Holes 84 are formed in the vertical walls 811 and 821 at positions where the actuators 12 are attached. Each actuator 12 causes the pressing member 11 to protrude from the hole 84 or retract the pressing member 11 in accordance with a control signal from a jig transport control section 71, which will be described later.

As a result, each actuator 12 causes the pressing member 11 to protrude toward the upper plate 61U from both sides of the upper plate 61U held by the upper holding member 80U in response to a control signal from the jig transport control unit 71, which will be described later. The position of the upper jig 6U is adjusted by bringing the pressing member 11 into contact with the edge of the upper plate 61U.

The lower attachment portion 2D, the lower attachment/detachment mechanism 8D, the lower position adjustment mechanism 10D, and the lower position sensor 85D correspond to the upper attachment portion 2U, the upper attachment/detachment mechanism 8U, the upper position adjustment mechanism 10U, and the upper position sensor 85U shown in FIG. , and is configured in the same manner as the upper attachment portion 2U, the upper attachment/detachment mechanism 8U, the upper position adjustment mechanism 10U, and the upper position sensor 85U, so the description thereof will be omitted.

In FIG. 3, the upper mounting portion 2U, the device-side upper connector 21U, the base plate 22U, the upper attachment/detachment mechanism 8U, the upper holding member 80U, the holding rods 81U and 82U, the upper first protrusions 812U and 822U, and the upper second protrusion 813U. , 813U, upper second projections 823U, 823U, upper position sensor 85U, and upper position adjusting mechanism 10U, lower mounting portion 2D, device-side lower connector 21D, base plate 22D, lower attachment/detachment mechanism 8D, lower holding The reference numerals of the member 80D, the holding rods 81D and 82D, the lower second protrusions 812D and 822D, the lower first protrusions 813D and 813D, the lower first protrusions 823D and 823D, the lower position sensor 85D, and the lower position adjusting mechanism 10D are It is illustrated in parentheses. The pressing member 11 of the lower position adjusting mechanism 10D corresponds to an example of the third pressing member.

In the case of the lower holding member 80D, the lower surface of the lower plate 61D inserted into the space W1 between the holding rods 81D, 82D is supported by the lower first protrusions 813D, 813D and the lower first protrusions 823D, 823D.

As shown in FIG. 4, when the upper plate 61U is inserted into the space W1 between the holding rods 81U and 82U and the holding rods 81U and 82U are raised, the first upper projection 812U and the first upper projection 822U move the upper plate 61U upward. The plate 61U is pressed against the base plate 22U, and the jig-side upper connector 63U and the device-side upper connector 21U are connected. Thus, the upper jig 6U is attached to the upper attachment portion 2U.

On the other hand, when the holding rods 81U and 82U descend from the state shown in FIG. 4, the upper second projections 813U and 813U and the upper second projections 823U and 823U separate the upper plate 61U from the base plate 22U. As a result, the upper jig 6U is removed from the upper mounting portion 2U.

Similarly, in the case of the lower attachment/detachment mechanism 8D, when the lower plate 61D is inserted into the space W1 between the holding rods 81D and 82D and the holding rods 81D and 82D descend, the lower second projection 812D and the lower second projection The lower plate 61D is pressed against the base plate 22D by 822D, and the jig-side lower connector 63D and the device-side lower connector 21D are connected. Thus, the lower jig 6D is attached to the lower attachment portion 2D.

On the other hand, when the holding rods 81D and 82D rise, the lower plate 61D is separated from the base plate 22D by the lower first projections 813D and 813D and the lower first projections 823D and 823D. As a result, the lower jig 6D is removed from the lower mounting portion 2D.

An arm member 41 shown in FIG. 5 is connected to an arm driving portion 42c by a connecting portion 43. The arm member 41 has a substantially plate-like shape on which the jig 6 can be placed. The connecting portion 43 raises and lowers the arm member 41 in conjunction with the driving of the arm driving portion 42c while maintaining the arm member 41 horizontally.

Four placement position detectors 44 are arranged on the upper surface of the arm member 41 near the connecting portion 43 . The placement position detector 44 is a sensor that detects the placement position of the jig 6 placed on the arm member 41 . Various sensors such as an optical sensor, an ultrasonic sensor, or a mechanical sensor that detects the position of the jig 6 by physically bringing a lever into contact with the jig 6 can be used as the placement position detection unit 44 . can be used.

A distal end portion F of the arm member 41 opposite to the connecting portion 43 is provided with a recessed portion 45 which is recessed and notched in the direction of the base end portion R connected to the connecting portion 43 . The recessed portion 45 is provided at a portion where the upper jig head 62U is positioned when the upper jig 6U is placed on the arm member 41. As shown in FIG.

As a result, when the upper jig 6U is placed on the arm member 41, the upper jig head 62U passes through the recessed portion 45, and the upper jig head 62U is placed under the arm member 41 as shown in FIG. 62U protrudes. By providing the recessed portion 45 in this way, when the upper jig 6U is placed on the arm member 41, the arm member 41 and the upper jig head 62U do not interfere with each other. .

A pair of recessed grooves 46 are provided on the upper surface of the arm member 41 so as to receive the tops 651 of the pair of blades 65 . As a result, when the upper jig 6U is placed on the arm member 41, the tops 651 of the pair of blades 65 are fitted into the pair of grooves 46, which may cause the upper jig 6U to slide sideways on the arm member 41. reduced.

Also, when the upper jig 6U is placed on the arm member 41, a pair of blades 65 are interposed between the arm member 41 and the upper plate 61U. As a result, the upper surface of the arm member 41 and the lower surface of the upper plate 61U are separated by a distance obtained by subtracting the depth of the groove portion 46 from the height of the blade 65 . By separating the upper surface of the arm member 41 and the lower surface of the upper plate 61U in this way, the wiring 64U is prevented from being sandwiched between the arm member 41 and the upper plate 61U.

An opening 47 is formed in the arm member 41 at a portion where the jig-side lower connector 63D is positioned when the lower jig 6D is placed on the arm member 41. As shown in FIG. Thus, even when the lower jig 6D is placed on the arm member 41, the jig-side lower connector 63D of the lower jig 6D does not interfere with the arm member 41. FIG. The arm member 41 is also preliminarily formed with an opening 48 .

The width W2 of the arm member 41 is made smaller than the width W3 of the plate 61 . As a result, when the jig 6 is placed on the arm member 41 , the plates 61 protrude from both sides in the width direction of the arm member 41 .

The arm-side position adjusting mechanism 9 includes a total of eight pressing portions: a pair of pressing portions 91U, 91U, a pair of pressing portions 92U, 92U, a pair of pressing portions 91D, 91D, and a pair of pressing portions 92D, 92D. It has four struts 90 that support the pressing portion. Each pair of pressing portions are arranged to face each other in the Y-axis direction so that the jig 6 mounted on the arm member 41 is positioned between one of the pair and the other of the pair. Each pressing portion includes a pressing member 911 (first pressing member) and an actuator 912 .

The pair of pressing portions 91U, 91U and the pair of pressing portions 92U, 92U are arranged above the pair of pressing portions 91D, 91D and the pair of pressing portions 92D, 92D. The pair of pressing portions 91U, 91U and the pair of pressing portions 91D, 91D, and the pair of pressing portions 92U, 92U and the pair of pressing portions 92D, 92D are shorter than the X-axis direction length of the lower plate 61D and the upper plate 61U. They are spaced apart from each other by a predetermined distance.

The pressing portions 91U, 91U, 92U, and 92U are used for position adjustment when the upper jig 6U is conveyed between the upper mounting portion 2U and the jig shelf 3. The pressing portions 91D, 91D, 92D, and 92D are It is used for position adjustment when conveying the lower jig 6D between the lower mounting portion 2D and the jig shelf 3. As shown in FIG. By adjusting the mounting positions of the upper jig 6U and the lower jig 6D on the arm member 41 by the arm-side position adjusting mechanism 9, the upper attachment/detachment mechanism can be operated when the upper jig 6U and the lower jig 6D are conveyed. 8U, the lower attachment/detachment mechanism 8D, or the jig shelf 3, and the possibility of interference and sliding is reduced. As a result, the risk of generating dust due to sliding is reduced.

Further, by providing the upper pressing portions 91U, 91U, 92U, 92U and the lower pressing portions 91D, 91D, 92D, 92D, movement of the arm member 41 when conveying the jig 6 to the mounting portion 2 is amount can be reduced.

The actuator 912 advances and retreats the pressing member 911 of each pressing portion according to a control signal from the jig transport control section 71, which will be described later. As shown in FIG. 6, the arm-side position adjusting mechanism 9 projects the pressing members 911 from both sides of the upper jig 6U or the lower jig 6D placed on the arm member 41, and the upper plate 61U or the lower plate 61D. The mounting position of the jig 6 on the arm member 41 can be adjusted by bringing the pressing member 911 into contact with the edge.

The jig shelves 3a and 3b shown in FIG. It has members 31D, 31D. A pair of receiving members 31U, 31U can receive one upper jig 6U, and a pair of receiving members 31D, 31D can receive one lower jig 6D. Hereinafter, the receiving members 31U and 31D are collectively referred to as the receiving member 31. As shown in FIG.

Therefore, two upper jigs 6U and two lower jigs 6D can be accommodated on the jig shelf 3a, and two upper jigs 6U and two lower jigs 6D can be accommodated on the jig shelf 3b. can do. FIG. 1 shows a state in which one upper jig 6U and one lower jig 6D are accommodated in the jig shelf 3a, and two upper jigs 6U and two lower jigs 6D are accommodated in the jig shelf 3b. there is

A space W4 between the pair of receiving members 31, 31 is narrower than the width W3 of the jig 6 and wider than the width W2 of the arm member 41. As shown in FIG. Thus, by inserting the arm member 41 below the jig 6 received by the pair of receiving members 31, 31 and lifting the arm member 41, the arm member 41 can scoop up the jig 6. It's like

The inspection apparatus 1 shown in FIG. 7 includes a control section 7 . The control unit 7 includes a device-side lower connector 21D, a device-side upper connector 21U, an arm drive unit 42, a placement position detection unit 44, an arm-side position adjustment mechanism 9, an upper jig lifting mechanism 83U, an upper position sensor 85U, an upper The position adjusting mechanism 10U, the lower jig lifting mechanism 83D, the lower position sensor 85D, and the lower position adjusting mechanism 10D are electrically connected.

The control unit 7 includes, for example, a CPU (Central Processing Unit) that executes predetermined arithmetic processing, a RAM (Random Access Memory) that temporarily stores data, a flash memory or a HDD (Hard Disk) that stores predetermined control programs, and the like. Drive) and other non-volatile storage devices, peripheral circuits thereof, and the like. The control unit 7 functions as a jig transport control unit 71 and an inspection unit 72 by executing the control program described above, for example.

When the jig-side upper connector 63U and the device-side upper connector 21U are connected, and the jig-side lower connector 63D and the device-side lower connector 21D are connected, the upper probe Pu is connected to the jig-side upper connector 63U and the device-side upper connector 21D. It is connected to the controller 7 via the connector 21U, and the lower probe Pd is connected to the controller 7 via the jig-side lower connector 63D and the device-side lower connector 21D.

The inspection unit 72 supplies an inspection current between arbitrary probes of the upper probe Pu and the lower probe Pd, and inspects the inspection object 100 by measuring the voltage between the arbitrary probes.

The jig transport control unit 71 controls the arm driving unit 42, the upper jig lifting mechanism 83U, and the lower jig lifting mechanism 83D to move the upper jig 6U to the jig rack 3 and the upper mounting portion 2U. , and the lower jig 6D is conveyed between the jig shelf 3 and the lower mounting portion 2D.

The jig transport control unit 71 also controls the arm-side position adjusting mechanism 9 based on the mounting position of the jig 6 on the arm member 41 detected by the mounting position detection unit 44 . As a result, the jig transport control unit 71 causes the arm-side position adjusting mechanism 9 to adjust the mounting position of the jig 6 so that the jig 6 is mounted at an appropriate position on the arm member 41 .

Further, the jig transport control section 71 controls the upper position adjusting mechanism 10U based on the holding position of the upper jig 6U by the upper holding member 80U detected by the upper position sensor 85U. Thereby, the jig transport control section 71 adjusts the position of the upper jig 6U by the upper position adjusting mechanism 10U so that the upper holding member 80U holds the upper jig 6U at an appropriate position.

Further, the jig transport control section 71 controls the lower position adjusting mechanism 10D based on the holding position of the lower jig 6D by the lower holding member 80D detected by the lower position sensor 85D. Thereby, the jig transport control section 71 adjusts the position of the lower jig 6D by the lower position adjusting mechanism 10D so that the lower holding member 80D holds the lower jig 6D at an appropriate position.

Further, the jig transport control section 71 controls the operation of the upper jig lifting mechanism 83U to detach the upper jig 6U from the upper mounting portion 2U, and controls the operation of the lower jig lifting mechanism 83D. to detach the lower jig 6D from the lower mounting portion 2D.

The jig transport control unit 71 cooperates with the arm driving unit 42, the arm side position adjusting mechanism 9, the upper jig lifting mechanism 83U, the upper position adjusting mechanism 10U, the lower jig lifting mechanism 83D, and the lower position adjusting mechanism 10D. By doing so, the jigs 6 attached to the upper attachment portion 2U and the lower attachment portion 2D can be replaced with other jigs 6 accommodated in the jig shelf 3. As shown in FIG.

The operation of the inspection apparatus 1 when the jig 6 removed from the mounting portion 2 is stored in the jig shelf 3 will be described with reference to FIG.

First, it is assumed that an upper jig 6U is attached to the upper attachment portion 2U and a lower jig 6D is attached to the lower attachment portion 2D. When transporting the upper jig 6U from this state, the upper jig lifting mechanism 83U lowers the upper holding member 80U according to the control signal from the jig transport control section 71. FIG. As a result, the upper second protrusions 813U, 813U, 823U, and 823U push down the upper surface of the upper plate 61U, and as a result, the jig-side upper connector 63U is separated from the apparatus-side upper connector 21U, and the upper jig 6U is mounted on the upper side. It is removed from the unit 2U (step S1).

It is not uncommon for 1,000 or more upper probes Pu and 1,000 or more lower probes Pd to be provided. Then, the number of pins of the jig-side upper connector 63U and the jig-side lower connector 63D often exceeds 1,000 depending on the number of probes. A large amount of force is required to connect and disconnect connectors with more than 1,000 pins. Therefore, by providing the upper second projecting portions 813U, 813U, 823U, 823U, the upper jig lifting mechanism 83U forcibly moves the jig-side upper connector 63U to the apparatus-side upper connector 21U by the force of lowering the upper holding member 80U. , and the upper jig 6U can be removed from the upper mounting portion 2U.

As shown in parentheses in the flowchart, when the lower jig 6D is transported, the lower jig lifting mechanism 83D moves the lower holding member 80D according to the control signal from the jig transport control section 71. Raise (step S1). Thus, in the same manner as the upper jig 6U, the jig-side lower connector 63D can be separated from the apparatus-side lower connector 21D, and the lower jig 6D can be removed from the lower mounting portion 2D.

Hereinafter, operations related to the lower jig 6D will be written in parentheses as appropriate.

Next, the arm driving section 42 inserts the arm member 41 under the upper plate 61U in a non-contact manner so as not to contact the upper plate 61U in response to a control signal from the jig transfer control section 71, and the arm member 41 is lifted to scoop up the upper jig 6U (step S2).

FIG. 11 is an explanatory diagram showing a state in which the upper jig 6U is scooped up. As shown in FIG. 11, when the upper jig 6U is placed on the arm member 41, the tops of the blades 65 and 65 are in contact with the upper surface of the arm member 41, and the upper jig is removed from the recessed portion 45 of the arm member 41. As shown in FIG. An upper jig head 62U of the tool 6U protrudes downward.

The width W2 of the arm member 41, the interval W5 between the upper first protrusions 812U and 822U, the width W3 of the plate 61, and the interval W7 between the vertical walls 811 and 821 have a relationship of W2<W5<W3<W7, In addition, the distance W1 between the upper first projection 812U and the upper second projections 813U, 813U, the distance W1 between the upper first projection 822U and the upper second projections 823U, 823U, and the thickness T of the plate 61 has a relationship of W1>T. Therefore, the arm member 41 can scoop up the upper plate 61U without interfering with the upper holding member 80U. As a result, the upper jig 6U and the upper holding member 80U can be placed in a non-contact state.

Also when the lower jig 6D is conveyed, the arm driving section 42 moves downward below the lower plate 61D in accordance with the control signal from the jig conveyance control section 71, as in the case of conveying the upper jig 6U. The lower jig 6D is scooped up by inserting the arm member 41 without contacting the plate 61D and raising the arm member 41 (step S2).

As shown in FIG. 12, the width W2 of the arm member 41, the interval W6 between the lower first protrusions 813D and 823D, the width W3 of the plate 61, and the interval W7 between the vertical walls 811 and 821 are W2<W6<W3. <W7, the distance W1 between the lower first projections 813D, 813D and the lower second projection 812D, and the distance W1 between the lower first projections 823D, 823D and the lower second projection 822D and the thickness T of the plate 61 have a relationship of W1>T. Therefore, the arm member 41 can scoop up the lower plate 61D without interfering with the lower holding member 80D. As a result, the lower jig 6D and the lower holding member 80D can be brought into a non-contact state.

Next, the arm drive section 42 horizontally moves the arm member 41 in the X-axis direction according to a control signal from the jig transport control section 71, thereby moving the upper plate 61U (lower plate 61D) on the arm member 41. , is extracted from the upper holding member 80U (lower holding member 80D) and conveyed (step S3).

In this case, the upper jig 6U (lower jig 6D) is transported without sliding while the upper jig 6U (lower jig 6D) and the upper holding member 80U (lower holding member 80D) are not in contact with each other. As a result, generation of dust due to sliding can be suppressed. If dust is generated in the inspection apparatus 1 and adheres to the inspection object 100, there is a possibility that an accurate inspection result cannot be obtained. However, according to steps S2 and S3, the upper jig 6U (lower jig 6D) and the upper holding member 80U (lower holding member 80D) do not slide while remaining in non-contact with each other. 6D) is conveyed, it is possible to reduce the risk of generating dust.

Next, the jig transport controller 71 outputs a control signal to control the arm-side position adjusting mechanism 9 based on the position detected by the placement position detector 44 . The arm-side position adjusting mechanism 9 appropriately moves the pressing members 911 of the pressing portions 91U, 91U (pressing portions 91D, 91D) from both sides of the jig 6 on the arm member 41 based on the control signal from the jig transport control portion 71. protrude. Thereby, the placement position of the upper jig 6U (lower jig 6D) on the arm member 41 is adjusted (step S4).

Next, while the jig 6 is pressed from both sides by the projecting pressing members 911 , the arm driving section 42 rotates the arm member 41 according to the control signal from the jig transport control section 71 to move the arm member 41 . The tip is directed toward the jig shelf 3 (step S5).

In this case, since the arm member 41 turns while the jig 6 is held by the pressing member 911 , the mounting position of the jig 6 may shift due to the turning or the jig 6 may fall off the arm member 41 . Fear is reduced.

Next, the arm-side position adjusting mechanism 9 retracts the pressing member 911 based on the control signal from the jig transport control section 71 (step S6).

Next, the arm driving section 42 moves the upper plate 61U (lower plate 61D) on the arm member 41 according to the control signal from the jig transport control section 71 to the receiving members 31U, 31U (receiving members 31D, 31D). ) (step S7, FIG. 13 (FIG. 14)).

In this case, the upper plate 61U (lower plate 61D) is placed above the receiving members 31U, 31U (receiving members 31D, 31D) without sliding on the receiving members 31U, 31U (receiving members 31D, 31D). Since it can be transported, generation of dust due to sliding can be suppressed.

Further, since the jig 6 is carried into the jig shelf 3 in a state in which the mounting position of the jig 6 on the arm member 41 has been appropriately adjusted in step S4, there is no need to shift the mounting position of the jig 6. As a result, the possibility of interference or sliding between the jig 6 and the jig shelf 3 is reduced. As a result, it is possible to reduce the risk of generating dust due to interference and sliding.

In steps S3 to S7, while the jig 6 on the arm member 41 is being conveyed, the jig conveyance control section 71 monitors the mounting position of the jig 6 by the mounting position detection section 44. is preferred. When the mounting position of the jig 6 is displaced and out of the predetermined mounting range, the jig transport control section 71 preferably stops the arm driving section 42 from transporting the arm member 41 .

As a result, in the process of transporting the jig 6, it is possible to reduce the possibility that the jig 6 will be subjected to a transport force while the jig 6 is interfering with some object, or that the jig 6 will fall off the arm member 41. .

Next, the arm driving section 42 lowers the arm member 41 according to a control signal from the jig transfer control section 71, and moves the upper jig 6U (lower jig 6D) to the receiving members 31U, 31U (receiving member). 31D, 31D) (step S8).

As shown in FIG. 13, the width W2 of the arm member 41, the interval W4 between the receiving members 31U, 31U, the width W3 of the plate 61, and the interval W8 between the vertical walls 32, W2<W4<W3<W8. have a relationship of Therefore, the arm member 41 can be lowered below the receiving members 31U, 31U without interfering with the receiving members 31U, 31U, and the upper jig 6U can be received by the receiving members 31U, 31U.

Similarly, as shown in FIG. 14, the width W2 of the arm member 41, the interval W4 between the receiving members 31D, 31D, the width W3 of the plate 61, and the interval W8 between the vertical walls 32, W2<W4<. It has a relationship of W3<W8. Therefore, the arm member 41 can be lowered below the receiving members 31D, 31D without interfering with the receiving members 31D, 31D, and the lower jig 6D can be received by the receiving members 31D, 31D.

According to steps S7 and S8, the upper jig 6U (lower jig 6D) and the receiving members 31U and 31U (receiving members 31D and 31D) are kept out of contact with each other without sliding. The jig 6D) can be accommodated in the jig shelf 3. As a result, the possibility of generating dust can be reduced.

As described above, according to steps S1 to S8, the upper jig 6U (lower jig 6D) attached to the upper mounting portion 2U (lower mounting portion 2D) can be removed and accommodated in the jig shelf 3. FIG. Moreover, since both the upper jig 6U and the lower jig 6D can be conveyed by the arm member 41, both the upper jig 6U and the lower jig 6D can be easily conveyed.

In step S5, it is not necessary to turn the arm member 41 while pressing the jig 6 from both sides by the projecting pressing members 911. After the pressing members 911 are retracted in step S6, the arm members 41 can be rotated.

Also, after rotating the arm member 41 in step S5, the mounting position of the jig 6 may be adjusted in step S4.

The operation of the inspection apparatus 1 when attaching the jig 6 taken out from the jig shelf 3 to the mounting portion 2 will be described with reference to FIG.

First, in response to a control signal from the jig transport control unit 71, the arm driving unit 42 moves upward under the upper plate 61U (lower plate 61D) received by the receiving members 31U, 31U (31D, 31D). The arm member 41 is inserted while being separated from the plate 61U (lower plate 61D), and the arm member 41 is raised to scoop up the upper jig 6U (lower jig 6D) (step S11).

13 (FIG. 14) shows a state in which the arm member 41 scoops up the upper jig 6U (lower jig 6D). As described above, since there is a relationship of W2<W4<W3<W8, the arm member 41 is raised without interfering with the receiving members 31U, 31U (31D, 31D), and the upper jig 6U ( The lower jig 6D) can be separated from the receiving members 31U, 31U (31D, 31D).

Next, the arm driving section 42 horizontally moves the arm member 41 according to the control signal from the jig transfer control section 71, and moves the upper jig 6U (lower jig 6D) to the receiving members 31U, 31U (31D, 31D), it is removed from the jig shelf 3 (step S12).

According to steps S11 and S12, the upper jig 6U (lower jig 6D) and the receiving members 31U and 31U (receiving members 31D and 31D) do not slide in a non-contact state. The jig 6D) can be taken out from the jig shelf 3. As a result, the possibility of generating dust can be reduced.

Next, the jig transport controller 71 outputs a control signal to control the arm-side position adjusting mechanism 9 based on the position detected by the placement position detector 44 . The arm-side position adjusting mechanism 9 appropriately protrudes the pressing members 911 of the pressing portions 91U, 91U (pressing portions 91D, 91D) based on the control signal from the jig transport control portion 71 . Thereby, the placement position of the upper jig 6U (lower jig 6D) on the arm member 41 is adjusted (step S13).

Next, while the jig 6 is pressed from both sides by the projecting pressing members 911 , the arm driving section 42 rotates the arm member 41 according to the control signal from the jig transport control section 71 to move the arm member 41 . The tip is directed toward the mounting portion 2 (step S14).

In this case, since the arm member 41 turns while the jig 6 is held by the pressing member 911 , the mounting position of the jig 6 may shift due to the turning or the jig 6 may fall off the arm member 41 . Fear is reduced.

Next, the arm-side position adjusting mechanism 9 retracts the pressing member 911 based on the control signal from the jig transport control section 71 (step S15).

Next, the arm driving section 42 moves the arm member 41 according to the control signal from the jig transport control section 71, and the width direction both ends of the upper plate 61U (lower plate 61D) placed on the arm member 41 are moved. to the distance W1 between the upper first projections 812U, 822U and the upper second projections 813U, 813U, 823U, 823U (the lower first projections 813D, 813D, 823D, 823D and the lower second projections 812D, 822D) insert (step S16).

FIG. 11 (FIG. 12) shows a state in which the arm member 41 inserts the upper jig 6U into the space W1 between the upper holding members 80U. As described above, since there is a relationship of W2<W5<W3<W7 and W1>T, the arm member 41 does not interfere with the upper holding member 80U, and the upper jig 6U is held by the upper holding member. It can be inserted contactlessly without touching the 80U.

Similarly, as shown in FIG. 12, since there is a relationship of W2<W6<W3<W7 and W1>T, the arm member 41 does not interfere with the lower holding member 80D and the lower jig 6D can be moved. can be inserted without contacting the lower holding member 80D.

Therefore, according to step S16, the upper holding member 80U (lower jig 6D) and the upper holding member 80U (lower jig 6D) are not slid without contact with the receiving members 31U, 31U (receiving members 31D, 31D). It can be inserted into the space W1 of the holding member 80D). As a result, the possibility of generating dust can be reduced.

Further, after adjusting the mounting position of the upper jig 6U (lower jig 6D) on the arm member 41 in step S13, the upper jig 6U (lower jig 6D) is moved to the upper holding member 80U (lower jig 6D) in step S16. Since the upper jig 6U (lower jig 6D) is inserted into the space W1 between the holding members 80D), the insertion accuracy of the upper jig 6U (lower jig 6D) is improved. As a result, the possibility of interference or sliding between the upper jig 6U (lower jig 6D) and the receiving members 31U, 31U (receiving members 31D, 31D) is reduced. As a result, it is possible to reduce the risk of generating dust due to interference and sliding.

In steps S13 to S16, while the jig 6 on the arm member 41 is being conveyed, the jig conveyance control section 71 monitors the mounting position of the jig 6 by the mounting position detection section 44. is preferred. When the mounting position of the jig 6 is displaced and out of the predetermined mounting range, the jig transport control section 71 preferably stops the arm driving section 42 from transporting the arm member 41 .

As a result, in the process of transporting the jig 6, it is possible to reduce the possibility that the jig 6 will be subjected to a transport force while the jig 6 is interfering with some object, or that the jig 6 will fall off the arm member 41. .

Next, the arm drive section 42 lowers the arm member 41 in response to a control signal from the jig transport control section 71, and moves the upper plate 61U (lower plate 61D) to the upper first projections 812U and 822U (lower first projections). (step S17).

Next, the jig transport control section 71 outputs a control signal to control each upper position adjusting mechanism 10U (lower position adjusting mechanism 10D) based on the position detected by the placement position detecting section 44 . Each upper position adjusting mechanism 10U (lower position adjusting mechanism 10D) has an upper plate 61U (lower plate 61D) inserted into an upper holding member 80U (lower holding member 80D) in accordance with a control signal from the jig transport control section 71. The position of the upper jig 6U (lower jig 6D) held by the upper holding member 80U (lower holding member 80D) is adjusted by appropriately projecting the pressing member 11 (step S18).

Next, the upper jig elevating mechanism 83U raises the upper holding member 80U according to the control signal from the jig transfer control section 71, and attaches the upper jig 6U to the upper mounting section 2U (step S19). In the case of the lower jig 6D, the lower jig elevating mechanism 83D lowers the lower holding member 80D in response to the control signal from the jig transport control section 71, and attaches the lower jig 6D to the lower mounting portion 2D. (Step S19).

As described above, the number of pins of the jig-side upper connector 63U and the jig-side lower connector 63D often exceeds 1,000. A great deal of force is required to connect connectors with more than a thousand pins. Therefore, by providing the upper first projecting portions 812U and 822U, the upper jig lifting mechanism 83U forcibly connects the jig-side upper connector 63U to the device-side upper connector 21U by the force of lifting the upper holding member 80U. The upper jig 6U can be attached to the upper attachment portion 2U.

Similarly, by providing the lower second projecting portions 812D and 822D, the lower jig lifting mechanism 83D forcibly connects the jig-side lower connector 63D to the device-side lower connector 21D by the force of lowering the lower holding member 80D. , the lower jig 6D can be attached to the lower attachment portion 2D.

Before connecting the upper jig-side connector 63U (lower jig-side connector 63D) and the upper device-side connector 21U (lower device-side connector 21D) in step S19, the upper holding member 80U (lower connector 21D) is connected in step S18. Since the position of the upper jig 6U (lower jig 6D) held by the holding member 80D) is finely adjusted, the jig-side upper connector 63U (jig-side lower connector 63D) and the apparatus-side upper connector 21U (apparatus The connector 21D) can be accurately positioned and then connected. As a result, when attaching the upper jig 6U (lower jig 6D), the upper jig-side connector 63U (lower jig-side connector 63D) and the upper device-side connector 21U (lower device-side connector 21D) are positioned. The risk of interference due to misalignment is reduced.

As described above, according to steps S11 to S19, the upper jig 6U (lower jig 6D) housed in the jig shelf 3 can be attached to the upper attachment portion 2U (lower attachment portion 2D). Therefore, by combining steps S1 to S8 and steps S11 to S19, the upper jig 6U (lower jig 6D) attached to the upper attachment portion 2U (lower attachment portion 2D) and the jig rack 3 The accommodated upper jig 6U (lower jig 6D) can be exchanged.

Furthermore, the same arm member 41 can be used for replacement in both the case of replacing the upper jig 6U and the case of replacing the lower jig 6D. Both the upper jig 6U that contacts and the lower jig 6D that contacts the lower surface of the inspection object 100 can be easily replaced.

In step S14, it is not always necessary to turn the arm member 41 while pressing the jig 6 from both sides by the projecting pressing members 911. After the pressing members 911 are retracted in step S15, the arm members 41 can be rotated.

Alternatively, the mounting position of the jig 6 may be adjusted in step S13 after rotating the arm member 41 in step S14.

Although the jig shelf 3 has shown an example in which a plurality of pairs of the upper jig 6U and the lower jig 6D can be accommodated, the jig shelf 3 can accommodate only one pair of the upper jig 6U and the lower jig 6D. may be

Also, when the upper jig 6U (lower jig 6D) is taken in and out from the jig shelf 3, the receiving members 31U, 31U (31D, 31D) and the upper jig 6U (lower jig 6D) are not allowed to slide. Although an example is shown, it may be slid.

Further, when the upper jig 6U (lower jig 6D) is pulled out or inserted into the upper holding member 80U (lower holding member 80D), the upper jig 6U (lower jig 6D) and the upper holding member 80U are separated from each other. (Lower holding member 80D) is not slid, but may be slid.

When the upper jig 6U (lower jig 6D) is accommodated in the jig shelf 3, the arm member 41 is lowered to move the upper jig 6U (lower jig 6D) to the receiving members 31U, 31U (31D, 31D) shows an example. However, by relatively moving the arm member 41 and the receiving members 31U, 31U (31D, 31D), the upper jig 6U (lower jig 6D) is received by the receiving members 31U, 31U (31D, 31D). Let it be. Therefore, instead of lowering the arm member 41, the receiving members 31U, 31U (31D, 31D) may be raised. may

Similarly, when the upper jig 6U (lower jig 6D) is taken out from the jig rack 3, instead of raising the arm member 41, the receiving members 31U, 31U (31D, 31D) are lowered to remove the upper jig. The 6U (lower jig 6D) may be scooped up, or the upper jig 6U (lower jig 6D) may be scooped up by combining the lowering of the receiving members 31U, 31U (31D, 31D) and the raising of the arm member 41. good.

Further, an example is shown in which the arm member 41 is raised to scoop up the upper jig 6U (lower jig 6D) when extracting the upper jig 6U (lower jig 6D) from the upper holding member 80U (lower holding member 80D). rice field. However, the arm member 41 and the upper holding member 80U (lower holding member 80D) may be relatively moved to scoop up the upper jig 6U (lower jig 6D). Therefore, instead of raising the arm member 41, the upper holding member 80U (lower holding member 80D) may be lowered to scoop up the upper jig 6U (lower jig 6D). may be combined with the descent of the arm member 41 to scoop up the upper jig 6U (lower jig 6D).

Alternatively, the arm-side position adjusting mechanism 9 and the placement position detection unit 44 may not be provided, and step S13 may not be executed. Moreover, the upper position adjusting mechanism 10U, the lower position adjusting mechanism 10D, the upper position sensor 85U, and the lower position sensor 85D may not be provided, and step S18 may not be executed.

Also, the openings 47 and 48 may not be formed in the arm member 41 . Also, the arm member 41 may not have the grooves 46 , 46 formed therein.

Also, the upper jig 6U does not have to be provided with the blades 65,65.

That is, the inspection apparatus according to an example of the present invention is arranged above a substantially plate-shaped inspection object, and an upper jig for holding an upper probe for contacting the upper surface of the inspection object is positioned downward. and a lower jig disposed below the object to be inspected and holding a lower probe for contacting the lower surface of the object to be inspected. a jig shelf capable of accommodating the upper jig and the lower jig; an arm member capable of selectively placing the upper jig and the lower jig; and the arm member an arm drive section for conveying the upper jig and the lower jig by driving the upper attachment/detachment mechanism for receiving the upper jig from the arm member and attaching it to the upper attachment portion; a lower attachment/detachment mechanism that receives a lower jig and attaches it to the lower attachment portion; The jig is taken out from the jig rack and transported to the lower attachment/detachment mechanism, and the upper jig includes an approximately plate-shaped upper plate and a plurality of the upper probes extending downward from the lower surface side of the upper plate. The lower jig includes a substantially plate-shaped lower plate and a lower jig head that holds the plurality of lower probes in an orientation extending upward from the upper surface side of the lower plate. and a tool head.

According to this configuration, the arm member on which the upper jig and the lower jig can be selectively placed is provided. The lower jig can be taken out from the jig shelf and conveyed to the lower attachment/detachment mechanism. The upper attachment/detachment mechanism can receive the upper jig from the arm member and attach it to the upper attachment portion, and the lower attachment/detachment mechanism can receive the lower jig from the arm member and attach it to the lower attachment portion. Therefore, it is possible to take out the upper jig and the lower jig from the jig rack and transport the taken-out upper jig and lower jig to the respective mounting portions. This makes it easy to transport both the upper jig that contacts the upper surface of the inspection object and the lower jig that contacts the lower surface of the inspection object.

Further, the distal end portion of the arm member is recessed and notched in the base end direction at a portion where the upper jig head is positioned when the upper jig is placed on the arm member. is preferred.

According to this configuration, the distal end portion of the arm member is recessed toward the proximal end portion so as to avoid the upper jig head projecting downward from the plate-shaped upper plate so as to contact the upper surface of the inspection object. Notched. As a result, when the upper jig is placed on the arm member, the upper jig head does not interfere with the arm member, so that the upper jig can be placed on the arm member and conveyed.

Moreover, it is preferable to further include a placement position detection unit that detects a placement position of the upper jig or the lower jig placed on the arm member.

According to this configuration, the mounting position detection section detects the mounting position of the upper jig or the lower jig on the arm member, so that the upper jig or the lower jig is positioned appropriately on the arm member. It becomes easy to confirm whether it is placed or not.

Further, based on the detection result of the mounting position by the mounting position detection unit, from both sides of the upper jig or the lower jig mounted on the arm member toward the upper plate or the lower plate It is preferable to further include an arm-side position adjusting mechanism that adjusts the mounting position of the upper jig or the lower jig on the arm member by protruding the first pressing member.

According to this configuration, the placement position can be adjusted so that the upper jig or the lower jig is placed at an appropriate position on the arm member.

Further, the upper mounting portion includes a device-side upper connector, the upper jig further includes a jig-side upper connector provided on the upper surface side of the upper plate and connectable to the device-side upper connector, The lower mounting portion includes a device-side lower connector, the lower jig further includes a jig-side lower connector provided on the lower surface side of the lower plate and connectable to the device-side lower connector, and the upper attachment/detachment The mechanism attaches the upper jig to the upper mounting portion by connecting the device-side upper connector and the jig-side upper connector, and the lower attachment/detachment mechanism connects the device-side lower connector and the jig. It is preferable that the lower jig is attached to the lower attachment portion by connecting the lower connector.

According to this configuration, the upper attachment/detachment mechanism applies a force necessary for inserting and removing the device-side upper connector and the jig-side upper connector, so that the device-side upper connector and the jig-side upper connector can be connected. A force necessary for inserting/removing the lower connector and the jig-side lower connector is applied by the lower attachment/detachment mechanism, and the device-side lower connector and the jig-side lower connector can be connected.

Wiring for connecting the plurality of upper probes and the jig-side upper connector is arranged on the lower surface side of the upper plate, and projections are provided on both sides of the lower surface of the upper plate with the wiring interposed therebetween. Preferably, a pair of blades are provided.

According to this configuration, when the upper jig is placed on the arm member, the pair of blades abut on the upper surface of the arm member, and the pair of blades support the upper plate. At this time, since a gap corresponding to the height of the pair of blades is created between the upper surface of the arm member and the upper plate, a space for wiring is secured.

Further, it is preferable that the upper surface of the arm member is provided with grooves that are recessed so as to receive the tops of the pair of blades.

According to this configuration, when the upper jig is placed on the arm member, the tops of the pair of blades are received in the grooves, thereby reducing the risk of the upper jig sliding sideways on the arm member.

Moreover, it is preferable that the top portions of the pair of blades extend parallel to each other.

According to this configuration, when the upper jig is placed on the arm member, it is easy to stably support the upper plate with the pair of blades.

Further, it is preferable that the arm member is provided with an opening at a portion where the jig-side lower connector is positioned when the lower jig is placed on the arm member.

According to this configuration, even if the jig-side lower connector protrudes from the lower surface of the lower plate, the risk of the jig-side lower connector interfering with the lower jig when the lower jig is placed on the arm member is reduced. be.

The upper attachment/detachment mechanism includes upper first protrusions that support the lower surface of the upper plate on both sides of the upper plate, and an upper protrusion arranged above the first upper protrusions so as to face the first upper protrusions. an upper holding member including a second protrusion; and an upper jig elevating mechanism for raising and lowering the upper holding member, wherein the distance between the upper first protrusion and the upper second protrusion is equal to the thickness of the upper plate. The lower attachment/detachment mechanism includes lower first protrusions supporting the lower surface of the lower plate on both sides of the lower plate, and arranged above the lower first protrusions so as to face the lower first protrusions. and a lower jig elevating mechanism for lifting and lowering the lower holding member, wherein the interval between the lower first projection and the lower second projection is the lower It is preferably greater than the thickness of the plate.

According to this configuration, the upper holding member can hold the upper jig by inserting the upper plate into the space between the upper first protrusion and the upper second protrusion. The upper jig can be raised and lowered by raising and lowering the upper holding member. Further, by inserting the lower plate into the space between the lower first protrusion and the lower second protrusion, the lower holding member can hold the lower jig. The lower jig can be raised and lowered by raising and lowering the lower holding member.

In addition, the arm driving section drives the arm member so that both ends in the width direction of the upper plate placed on the arm member are not between the upper first protrusion and the upper second protrusion. The upper jig elevating mechanism connects the jig-side upper connector on the upper surface side of the upper plate held by the upper holding member to the apparatus-side upper connector by raising the upper holding member. and the arm driving section drives the arm member to move both width direction end portions of the lower plate placed on the arm member to a position between the lower first protrusion and the lower second protrusion. The lower jig lifting mechanism lowers the lower holding member to connect the jig-side lower connector on the lower surface side of the lower plate held by the lower holding member to the device-side lower connector. preferably.

According to this configuration, the upper plate is held by the upper holding member without causing the upper first protrusion, the upper second protrusion, and the upper plate to slide, and the jig-side upper connector is connected to the apparatus-side upper connector. can be made In addition, the lower plate can be held by the lower holding member without causing the lower first protrusion, the lower second protrusion, and the lower plate to slide, and the jig-side lower connector can be connected to the apparatus-side lower upper connector. can. As a result, it is possible to reduce the risk of generating dust due to sliding when attaching the upper jig and the lower jig.

The upper jig elevating mechanism removes the upper jig attached to the upper mounting portion from the upper mounting portion by lowering the upper holding member, and the arm driving portion moves the arm member. By driving, the arm member is inserted without contact below the upper plate held by the upper holding member, and the upper holding member and the arm member are moved relative to each other to form the upper first projection. positioning the upper plate at a position spaced apart from both the portion and the upper second protrusion, scooping up the upper jig by the arm member, and extracting the scooped-up upper jig from the upper holding member; The lower jig elevating mechanism removes the lower jig attached to the lower mounting portion from the lower mounting portion by lifting the lower holding member, and the arm driving portion lifts the arm member. By driving, the arm member is inserted in a non-contact manner below the lower plate held by the lower holding member, and the pair of lower holding members and the arm member are moved relative to each other to move the lower plate. The lower plate is positioned at a position spaced apart from both the first protrusion and the lower second protrusion, the arm member scoops up the lower jig, and the scooped-up lower jig is removed from the lower holding member. Extraction is preferred.

According to this configuration, the upper jig is removed from the upper mounting portion, the arm member is inserted below the upper plate in a non-contact manner, and the upper plate is positioned apart from both the upper first projection and the upper second projection. is positioned, the upper jig is scooped up by the arm member and extracted. Therefore, when removing the upper jig from the upper mounting portion, it is possible to reduce the risk of generating dust due to sliding. Also, the lower jig is removed from the lower mounting portion, the arm member is inserted below the lower plate without contact, and the lower plate is positioned at a position spaced apart from both the lower first projection and the lower second projection. Then, the lower jig is scooped up by the arm member and extracted. Therefore, when removing the lower jig from the lower mounting portion, it is possible to reduce the risk of generating dust due to sliding.

an upper position adjusting mechanism for adjusting the position of the upper jig by projecting second pressing members toward the upper plate from both sides of the upper plate held by the upper holding member; It is preferable to further include a lower position adjusting mechanism that adjusts the position of the lower jig by projecting third pressing members toward the lower plate from both sides of the lower plate held by the holding member.

With this configuration, it is possible to finely adjust the holding position of the upper jig held by the upper holding member and the holding position of the lower jig held by the lower holding member.

Further, the arm driving section inserts the arm member under the upper jig stored in the jig shelf and scoops up the upper jig to take out the upper jig from the jig shelf. It is preferable that the lower jig is taken out from the jig shelf by inserting the arm member under the lower jig stored in the jig shelf and scooping up the lower jig.

According to this configuration, the upper jig and the lower jig stored in the jig shelf are scooped up by the arm member and taken out. It is possible to reduce the risk of generating dust due to movement.

Further, the jig shelf includes a pair of receiving members capable of receiving both ends of at least one of the upper plate and the lower plate from below, and the arm driving section is configured to support the pair of By inserting the arm member under the upper plate that is received by the receiving member while being spaced apart from the upper plate, the pair of receiving members and the arm member are relatively moved to move the upper plate. The upper jig is picked up from the jig shelf in a state in which the upper plate and the pair of receiving members are separated from each other, and the upper jig is received by the pair of receiving members on the jig shelf. The arm member is inserted under the lower plate in which the lower plate is located, while being spaced apart from the lower plate. It is preferable that the lower jig is taken out from the jig rack while the plate and the pair of receiving members are separated from each other.

According to this configuration, the arm member is inserted under the upper plate in a state separated from the upper plate, and the upper jig is scooped up to fix the upper jig in a state in which the upper plate and the pair of receiving members are separated. Since the upper jig is taken out from the jig shelf, it is possible to reduce the risk of generating dust due to sliding when the upper jig is taken out from the jig shelf. In addition, the arm member is inserted under the lower plate in a state separated from the lower plate, the lower jig is scooped up, and the lower jig is removed from the jig shelf in a state in which the lower plate and the pair of receiving members are separated. Therefore, when the lower jig is taken out from the jig shelf, it is possible to reduce the risk of generating dust due to sliding.

In addition, the arm driving section conveys the upper plate placed on the arm member while being spaced apart from the pair of receiving members of the jig shelf. By moving the arm member relatively, the upper plate is received by the pair of receiving members, the upper jig is accommodated in the jig shelf, and the lower plate placed on the arm member is moved. and conveying the jig shelf above the pair of receiving members in a spaced-apart manner, and moving the pair of receiving members and the arm member relative to each other to move the lower plate to the pair of receiving members. It is preferable that the lower jig is received by a member and accommodated in the jig shelf.

According to this configuration, the upper plate is conveyed above the pair of receiving members while being separated therefrom, and the upper plate is received by the pair of receiving members to accommodate the upper jig in the jig rack. It is possible to reduce the risk of generating dust due to sliding when storing jigs in the jig shelf. In addition, since the lower plate is conveyed above the pair of receiving members while being spaced apart from each other, and the lower plate is received by the pair of receiving members to store the lower jig in the jig rack, the lower jig is stored in the jig shelf. It is possible to reduce the risk of generating dust due to sliding when storing in a cupboard.

Moreover, it is preferable that the jig shelf can accommodate a plurality of the upper jigs and a plurality of the lower jigs.

According to this configuration, the replacement upper jig and lower jig can be stored in the jig shelf in advance, so that the replacement of the jig is facilitated.

1 inspection device 2 mounting portion 2D lower mounting portion 2U upper mounting portions 3, 3a, 3b jig shelf 4 jig transfer mechanism 5D lower jig drive mechanism 5U upper jig drive mechanism 6 jig 6D lower jig 6U upper jig Tool 7 Control part 8D Lower attachment/detachment mechanism 8U Upper attachment/detachment mechanism 9 Arm side position adjustment mechanism 10D Lower position adjustment mechanism 10U Upper position adjustment mechanism 11 Pressing member (second pressing member, third pressing member)
12 Actuator 15 Housing 21D Device-side lower connector 21U Device-side upper connector 22D, 22U Base plate 23 Positioning pins 31, 31U, 31D Receiving members 32, 32 Vertical wall 41 Arm members 42, 42a to 42d Arm driving section 43 Connecting section 44 Placement position detector 45 Recessed portions 46, 46 Grooves 47, 48 Opening 61 Plate 61D Lower plate 61U Upper plate 62D Lower jig head 62U Upper jig head 63D Jig-side lower connector 63U Jig-side upper connector 64D , 64U Wiring 65, 65 Blade 71 Jig transport control unit 72 Inspection unit 80D Lower holding member 80U Upper holding members 81D, 82D, 81U, 82U Holding bar 83D Lower jig elevating mechanism 83U Upper jig elevating mechanism 84 Hole 85D Lower position Sensor 85U Upper position sensor 90 Supports 91D, 91U, 92D, 92U Pressing part 100 Inspection object 221 Notch 651 Top parts 811, 821 Vertical walls 812D, 822D Lower second protrusions 812U, 822U Upper first protrusions 813D, 813D, 823D , 823D lower first projections 813U, 813U, 823U, 823U upper second projections 821 vertical wall 911 pressing member (first pressing member)
912 Actuator A Inspection position F Tip P Probe Pd Lower probe Pu Upper probe R Base end W1, W4, W5, W6, W7, W8 Spacing W2, W3 Width θ Direction of rotation

Claims (17)

an upper attachment portion disposed above a substantially plate-shaped inspection object and detachably attached from below an upper jig for holding an upper probe for contacting the upper surface of the inspection object;
a lower attachment portion disposed below the inspection object and detachably attached from above a lower jig for holding a lower probe for contacting the lower surface of the inspection object;
a jig shelf capable of accommodating the upper jig and the lower jig;
an arm member on which the upper jig and the lower jig can be selectively placed;
an arm drive section for transporting the upper jig and the lower jig by driving the arm member;
an upper attachment/detachment mechanism that receives the upper jig from the arm member and attaches it to the upper attachment portion;
a lower attachment/detachment mechanism that receives the lower jig from the arm member and attaches it to the lower attachment portion;
The arm drive section takes out the upper jig from the jig rack and conveys it to the upper attachment/detachment mechanism, takes out the lower jig from the jig rack and conveys it to the lower attachment/detachment mechanism,
The upper jig is
a substantially plate-shaped upper plate;
an upper jig head that holds the plurality of upper probes in a direction extending downward from the lower surface side of the upper plate;
The lower jig is
a substantially plate-shaped lower plate;
a lower jig head that holds the plurality of lower probes in a direction extending upward from the upper surface side of the lower plate ;
The inspection apparatus according to claim 1, wherein the distal end portion of the arm member is recessed and notched in the direction of the proximal end portion where the upper jig head is positioned when the upper jig is placed on the arm member. 2. The inspection apparatus according to claim 1 , further comprising a mounting position detection unit that detects a mounting position of the upper jig or the lower jig mounted on the arm member. an upper attachment portion disposed above a substantially plate-shaped inspection object and detachably attached from below an upper jig for holding an upper probe for contacting the upper surface of the inspection object;
a lower attachment portion disposed below the inspection object and detachably attached from above a lower jig for holding a lower probe for contacting the lower surface of the inspection object;
a jig shelf capable of accommodating the upper jig and the lower jig;
an arm member on which the upper jig and the lower jig can be selectively placed;
an arm drive section for transporting the upper jig and the lower jig by driving the arm member;
an upper attachment/detachment mechanism that receives the upper jig from the arm member and attaches it to the upper attachment portion;
a lower attachment/detachment mechanism for receiving the lower jig from the arm member and attaching it to the lower attachment portion;
The arm drive section takes out the upper jig from the jig rack and conveys it to the upper attachment/detachment mechanism, takes out the lower jig from the jig rack and conveys it to the lower attachment/detachment mechanism,
The upper jig is
a substantially plate-shaped upper plate;
an upper jig head that holds the plurality of upper probes in a direction extending downward from the lower surface side of the upper plate;
The lower jig is
a substantially plate-shaped lower plate;
a lower jig head that holds the plurality of lower probes in a direction extending upward from the upper surface side of the lower plate;
The inspection apparatus further includes a mounting position detection unit that detects a mounting position of the upper jig or the lower jig mounted on the arm member. Based on the detection result of the mounting position by the mounting position detection unit, the first jig is directed toward the upper plate or the lower plate from both sides of the upper jig or the lower jig mounted on the arm member. 4. The inspection apparatus according to claim 2, further comprising an arm-side position adjusting mechanism that adjusts a mounting position of said upper jig or said lower jig on said arm member by protruding a pressing member. The upper mounting portion includes a device-side upper connector,
The upper jig further comprises a jig-side upper connector provided on the upper surface side of the upper plate and connectable to the device-side upper connector,
the lower mounting portion includes a device-side lower connector,
The lower jig further includes a jig-side lower connector provided on the lower surface side of the lower plate and connectable to the device-side lower connector,
The upper attachment/detachment mechanism attaches the upper jig to the upper attachment portion by connecting the device-side upper connector and the jig-side upper connector,
5. The lower attachment/detachment mechanism according to any one of claims 1 to 4, wherein the lower attachment/detachment mechanism attaches the lower jig to the lower attachment portion by connecting the device-side lower connector and the jig-side lower connector. inspection equipment. Wiring for connecting the plurality of upper probes and the jig-side upper connector is arranged on the lower surface side of the upper plate,
6. The inspection apparatus according to claim 5, wherein the lower surface of the upper plate is provided with a pair of blades protruding on both sides of the wiring. 7. The inspection apparatus according to claim 6, wherein the upper surface of the arm member is provided with grooves recessed to receive the tops of the pair of blades. 8. The inspection apparatus according to claim 6, wherein the tops of said pair of blades extend parallel to each other. 9. The arm member according to any one of claims 5 to 8, wherein an opening is provided in a portion where the jig-side lower connector is positioned when the lower jig is placed on the arm member. Inspection equipment as described. The upper attachment/detachment mechanism includes:
An upper including an upper first protrusion supporting the lower surface of the upper plate on both sides of the upper plate, and an upper second protrusion disposed above the upper first protrusion and opposed to the upper first protrusion a holding member;
an upper jig lifting mechanism for lifting and lowering the upper holding member,
the distance between the upper first protrusion and the upper second protrusion is greater than the thickness of the upper plate,
The lower attachment/detachment mechanism includes:
a lower first protrusion that supports the lower surface of the lower plate on both sides of the lower plate; and a lower second protrusion arranged above the first lower protrusion to face the first lower protrusion. a holding member;
a lower jig elevating mechanism for elevating the lower holding member;
The inspection apparatus according to any one of claims 1 to 9, wherein the distance between the lower first protrusion and the lower second protrusion is greater than the thickness of the lower plate. The arm driving section drives the arm member to move the width direction end portions of the upper plate placed on the arm member between the upper first protrusion and the upper second protrusion in a non-contact manner. present,
The upper jig elevating mechanism connects the jig-side upper connector on the upper surface side of the upper plate held by the upper holding member to the device-side upper connector by raising the upper holding member,
The arm driving section drives the arm member to move the width direction end portions of the lower plate placed on the arm member between the lower first protrusion and the lower second protrusion in a non-contact manner. present,
10. The lower jig elevating mechanism connects the jig-side lower connector on the lower surface side of the lower plate held by the lower holding member to the device-side lower connector by lowering the lower holding member. The inspection device described in . The upper jig elevating mechanism removes the upper jig attached to the upper mounting portion from the upper mounting portion by lowering the upper holding member,
By driving the arm member, the arm driving section inserts the arm member below the upper plate held by the upper holding member in a non-contact manner to move the upper holding member and the arm member relative to each other. by moving the upper plate to a position spaced apart from both the upper first protrusion and the upper second protrusion, scooping up the upper jig by the arm member, and scooping up the upper plate removing the jig from the upper holding member;
The lower jig elevating mechanism removes the lower jig attached to the lower mounting portion from the lower mounting portion by lifting the lower holding member,
By driving the arm member, the arm driving section inserts the arm member below the lower plate held by the lower holding member in a non-contact manner, thereby separating the pair of lower holding members and the arm member. By relatively moving the lower plate to a position spaced apart from both the lower first protrusion and the lower second protrusion, the lower jig is scooped up by the arm member, and the lower jig is scooped up. 12. The inspection apparatus according to claim 10, wherein the lower jig is removed from the lower holding member. an upper position adjusting mechanism that adjusts the position of the upper jig by projecting second pressing members toward the upper plate from both sides of the upper plate held by the upper holding member;
A lower position adjusting mechanism for adjusting the position of the lower jig by projecting third pressing members toward the lower plate from both sides of the lower plate held by the lower holding member. 13. The inspection device according to any one of 10 to 12. The arm drive section
removing the upper jig from the jig shelf by inserting the arm member under the upper jig stored in the jig shelf and scooping up the upper jig;
14. The lower jig is taken out from the jig shelf by inserting the arm member under the lower jig stored in the jig shelf and scooping up the lower jig. The inspection device described in . The jig shelf includes a pair of receiving members capable of receiving both ends of at least one of the upper plate and the lower plate from below,
The arm drive section
In the jig shelf, the arm member is inserted under the upper plate that is received by the pair of receiving members while being separated from the upper plate, and the pair of receiving members and the arm member are inserted. removing the upper jig from the jig shelf in a state in which the upper plate and the pair of receiving members are separated from each other by scooping up the upper jig by relatively moving the jig;
In the jig shelf, the arm member is inserted under the lower plate that is received by the pair of receiving members while being separated from the lower plate, and the pair of receiving members and the arm member are inserted. 15. The inspection apparatus according to claim 14, wherein the lower jig is taken out from the jig shelf in a state in which the lower plate and the pair of receiving members are separated from each other by scooping up the lower jig by relatively moving the lower jig. . The arm drive section
The upper plate placed on the arm member is conveyed above the pair of receiving members of the jig shelf while being separated therefrom, and the pair of receiving members and the arm member are moved relative to each other. the upper plate is received by the pair of receiving members to accommodate the upper jig in the jig shelf;
The lower plate placed on the arm member is conveyed above the pair of receiving members of the jig shelf while being separated therefrom, and the pair of receiving members and the arm member are moved relative to each other. 16. The inspection apparatus according to claim 14 or 15, wherein the lower plate is received by the pair of receiving members to accommodate the lower jig in the jig shelf. The inspection apparatus according to any one of claims 1 to 16, wherein said jig shelf can accommodate a plurality of said upper jigs and a plurality of said lower jigs.

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