JP7316899B2 - UV irradiation device - Google Patents

Description

The present invention relates to an ultraviolet irradiation device.

2. Description of the Related Art A method of manufacturing devices such as individual semiconductor chips by processing a substantially disk-shaped object such as a semiconductor wafer with a cutting blade or a laser beam along streets arranged in a lattice is known. The plate-like object is adhered to the surface of an adhesive tape preliminarily attached to an annular frame so that the divided devices do not fall apart. In order to facilitate picking up of the divided devices, a so-called UV (UltraViolet) tape whose adhesive strength is reduced by irradiating ultraviolet rays is used as the adhesive tape, and the adhesive tape is irradiated with ultraviolet rays after being divided into individual devices. A method has been used (see, for example, US Pat.

Japanese Patent Application Laid-Open No. 2007-329300

Plate-like objects such as semiconductor wafers come in various types, such as 6, 8, and 12 inch diameters. If the adhesive tape is irradiated to the area where it is attached to the frame, the adhesive tape will peel off from the frame in the next process such as a die bonder. A mask is also placed on the ultraviolet irradiation device in accordance with , and is set so that only a predetermined region is irradiated with ultraviolet rays. However, since the mask is placed by the operator, there is a possibility that the wrong size mask will be attached to the UV irradiation device.

SUMMARY OF THE INVENTION The present invention has been made in view of such problems, and an object thereof is to provide an ultraviolet irradiation apparatus capable of determining which mask is installed.

In order to solve the above-described problems and achieve the object, the ultraviolet irradiation device of the present invention is an ultraviolet irradiation device that irradiates a frame unit in which a plate-like object is supported in an opening of an annular frame with an ultraviolet curable adhesive tape. a unit, a housing for accommodating the ultraviolet irradiation unit, a mask unit detachably attached to the housing that partially allows transmission of the ultraviolet rays and limits an area of the frame unit to which the ultraviolet rays are irradiated, and the mask unit. An ultraviolet irradiation apparatus comprising: a mask determination unit for determining a type; and a plate-like object registration unit for registering the type of the plate-like object to be irradiated with ultraviolet rays by the ultraviolet irradiation unit, wherein the mask unit is a first and a second mask having a transmission area corresponding to a second plate larger than the first plate, the housing being selected from The ultraviolet irradiation unit is provided with a linear light source section that exceeds the width of the plate-shaped object, and a moving unit that moves the light source section in a direction that intersects the extending direction of the light source section, and the mask The determination unit includes a light amount sensor arranged at a position sandwiching the light source unit and the mask, a mask determination unit for determining the type of the mask from the amount of light received measured by the light amount sensor, a determination result of the mask determination unit, and the mask. a collation unit for collating whether or not the type of the plate-shaped object registered in the plate-shaped object registration unit matches; and a notification unit for informing the result of the collation unit. A reference amount of received light obtained by measuring, by the light amount sensor, the ultraviolet ray emitted from the light source unit arranged at a reference position facing the transmission area of the first mask and the second mask, and the transmission area of the first mask. facing the shielding region outside the second mask, and comparing the ultraviolet light from the light source unit arranged at the comparison position facing the transmission region in the second mask with the comparative amount of received light measured by the light amount sensor, When the difference between the reference received light amount and the comparative received light amount is larger than a predetermined range, it is determined that the first mask is attached to the housing, and when the difference is within the predetermined range, the second mask is It is determined that it is attached to the housing.

The light source unit may include a UVLED, and may include an illuminance adjustment unit that adjusts illuminance so that the amount of received light is within the allowable range when the reference amount of received light is out of the allowable range.

The mask determination unit may determine that the mask is not attached to the housing when the difference is within a predetermined range and within a threshold value.

The present invention can determine which mask is installed.

FIG. 1 is a perspective view showing a configuration example of a processing device configured by an ultraviolet irradiation device according to Embodiment 1. FIG. 2 is another perspective view showing a configuration example of the processing apparatus shown in FIG. 1. FIG. 3 is an exploded perspective view showing the ultraviolet irradiation device shown in FIG. 1. FIG. 4 is an exploded top view showing the ultraviolet irradiation device of FIG. 3. FIG. FIG. 5 is a cross-sectional view for explaining the operation when the first mask is installed in the ultraviolet irradiation device of FIG. FIG. 6 is a cross-sectional view for explaining the operation when the first mask is installed in the ultraviolet irradiation device of FIG. FIG. 7 is a cross-sectional view for explaining the operation when the second mask is installed in the ultraviolet irradiation device of FIG. FIG. 8 is a cross-sectional view for explaining the operation when the second mask is installed in the ultraviolet irradiation device of FIG. FIG. 9 is an explanatory diagram of the operation of determining the type of mask unit by the ultraviolet irradiation device of FIG. FIG. 10 is a cross-sectional view showing an ultraviolet irradiation operation by the ultraviolet irradiation device of FIG. FIG. 11 is an explanatory diagram of the illuminance adjustment operation by the ultraviolet irradiation device according to the second embodiment. FIG. 12 is a cross-sectional view for explaining the operation when the mask unit is not installed in the ultraviolet irradiation apparatus according to the third embodiment. 13A and 13B are cross-sectional views for explaining the operation when the mask unit is not installed in the ultraviolet irradiation apparatus according to the third embodiment. 14A and 14B are explanatory diagrams of the operation of determining the type of mask unit by the ultraviolet irradiation device according to the third embodiment.

A form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. In addition, the components described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions, or changes in configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
An ultraviolet irradiation device 1 according to Embodiment 1 of the present invention will be described based on the drawings. FIG. 1 is a perspective view showing a configuration example of a processing device 500 configured by the ultraviolet irradiation device 1 according to Embodiment 1. FIG. FIG. 2 is another perspective view showing a configuration example of the processing apparatus 500 shown in FIG. A processing device 500 shown in FIGS. 1 and 2 is a cutting device that cuts a plate-like object 100 .

In the first embodiment, the plate-like object 100 has two types, a first plate-like object 100-1 and a second plate-like object 100-2. Each element of the first plate-shaped object 100-1 and the second plate-shaped object 100-2 is marked with "-1" and "-2" after the reference numerals when distinguishing from each other. When there is no need to distinguish between them, they are assumed to be common to these, and are appropriately omitted without adding "-1" and "-2" after the reference numerals.

In the first embodiment, the plate-like object 100 is a disk-like semiconductor wafer, an optical device wafer, or the like whose base material is silicon, sapphire, silicon carbide (SiC), gallium arsenide, or the like. A plate-like object 100 has a device 103 such as a semiconductor chip formed in a region partitioned by a plurality of streets 102 formed in a lattice on a surface 101 .

The plate-like object 100 has an adhesive tape 105 adhered to the rear surface 104 on the back side of the front surface 101 , and an annular frame 106 is attached to the outer edge of the adhesive tape 105 . As a result, the plate-like object 100 is supported by the adhesive tape 105 in the opening 107 of the annular frame 106 to constitute the frame unit 200 . The adhesive tape 105 includes an ultraviolet-curing adhesive layer that hardens when irradiated with ultraviolet rays 300 (see FIG. 5, etc.) to reduce adhesive strength.

The first plate-like object 100-1 and the second plate-like object 100-2 have different diameters. The second plate-like object 100-2 has a larger diameter than the first plate-like object 100-1. Also, the annular frame 106-1 and the annular frame 106-2 have different diameters. Annular frame 106-2 has a larger diameter than annular frame 106-1. Also, the frame unit 200-1 and the frame unit 200-2 have different diameters. Frame unit 200-2 has a larger diameter than frame unit 200-1.

The processing apparatus 500 shown in FIGS. 1 and 2 includes the ultraviolet irradiation apparatus 1 according to Embodiment 1, a chuck table 510, a cutting unit 520, a cleaning unit 530, a conveying unit 540, a cassette elevator 550, A cassette 560 , a display unit 580 and an input unit 590 are provided.

The chuck table 510 sucks and holds the back surface 104 side of the plate-like object 100 with the holding surface 511 via the adhesive tape 105 . The cutting unit 520 cuts the plate-like object 100 sucked and held by the chuck table 510 with a cutting blade 521 that rotates about its axis. The processing apparatus 500 relatively moves the plate-like object 100 on the chuck table 510 and the cutting blade 521 along the street 102 by a moving mechanism (not shown) to form the cutting groove 111 along the street 102. . As shown in FIG. 1, the processing apparatus 500 is provided with two cutting units 520, that is, a two-spindle dicer, a so-called facing dual type cutting apparatus.

The ultraviolet irradiation device 1 is installed on the upper surface of the cassette elevator 550 . The cassette 560 is placed on the upper surface of the ultraviolet irradiation device 1 . The cassette 560 accommodates the plate-like object 100 before and after cutting. The cassette elevator 550 raises and lowers the ultraviolet irradiation device 1 and the cassette 560 along the Z-axis direction.

The cleaning unit 530 cleans the plate-like object 100 after cutting. The transport unit 540 transports the plate-like object 100 before cutting from the cassette 560 to the chuck table 510 and transports the plate-like object 100 after cutting from the chuck table 510 to the cleaning unit 530 . Further, the transport unit 540 transports the cleaned plate-like object 100 from the cleaning unit 530 to the ultraviolet irradiation device 1 .

The display unit 580 has a display screen 581 configured by a liquid crystal display device or the like for displaying the state of the machining operation, images, and the like. The display unit 580 switches images displayed on the display screen 581 by being controlled by the control unit 60 to be described later. The input unit 590 is used when an operator registers processing information, irradiation conditions of the ultraviolet irradiation device 1, and the like.

The processing apparatus 500 uses the cutting unit 520 to divide the plate-like object 100 into individual devices 103 along the streets 102, cleans the device 103 by the cleaning unit 530, and then irradiates ultraviolet rays 300 by the ultraviolet irradiation device 1 to adhere the device. The adhesive strength of the tape 105 is lowered and the tape 105 is housed in the cassette 560 .

In addition, although the processing device 500 is a cutting device in the first embodiment, the present invention is not limited to this. Any processing device that divides along 102 into individual devices 103 may be used.

FIG. 3 is an exploded perspective view showing the ultraviolet irradiation device 1 shown in FIG. FIG. 4 is an exploded top view showing the ultraviolet irradiation device 1 of FIG. As shown in FIGS. 3 and 4, the ultraviolet irradiation device 1 includes a housing 10, a mask unit 20, an ultraviolet irradiation unit 30, a mask determination unit 40, and a plate-like object registration section 50. FIG. The housing 10 includes a housing 11 , a lid body 12 and support pieces 15 and accommodates the ultraviolet irradiation unit 30 .

The housing 11 is formed in a flat box shape having an opening 13 at the top. Here, the upper side is the upper side in the Z-axis direction in FIGS. 3 and 4 . The lid 12 is mounted above the housing 11 to cover the opening 13 . The housing 11 has a loading/unloading port 14 on its side wall. The loading/unloading port 14 is a through hole formed in a rectangular shape extending in the width direction and penetrating the side wall of the housing 11 . Here, the width direction is the Y-axis direction in FIGS. The loading/unloading port 14 enables loading/unloading of the plate-shaped object 100 from the outside of the housing 10 to/from the mask unit 20 inside the housing 10 . A pair of support pieces 15 are provided on the inner surface of the side wall of the housing 11 so as to extend in the front-rear direction toward the interior of the housing 11 from both ends in the width direction of the loading/unloading port 14 of the housing 11 . Here, the front-rear direction is the moving direction of the plate-like object 100 carried in and out through the carry-in/out port 14, and is hereinafter referred to as the X-axis direction orthogonal to the Y-axis direction. The pair of support pieces 15 support the mask unit 20 in the housing 10 at both ends in the width direction.

As shown in FIG. 4, the mask unit 20 includes two types of masks: a first mask 20-1 and a second mask 20-2. The mask unit 20 is selected from a first mask 20-1 and a second mask 20-2 and arranged in the housing 10. As shown in FIG. Each element of the first mask 20-1 and the second mask 20-2 needs to be distinguished from each other by adding "-1" and "-2" after the reference numerals when distinguishing them from each other. If not, they are assumed to be common to these, and are appropriately omitted without adding "-1" or "-2" after the code.

The mask unit 20 includes a mask plate 21 and a pair of guide rails 23, as shown in FIGS. The mask unit 20 is installed on a pair of support pieces 15 and arranged inside the housing 11 . The mask unit 20 is detachable from the housing 10 . The mask plate 21 supports the frame unit 200 by supporting the annular frame 106 via the adhesive tape 105 . A pair of guide rails 23 are provided on the upper surface of the mask plate 21 so as to be spaced apart in the width direction along the front-rear direction. The pair of guide rails 23 regulates the annular frame 106 on the mask plate 21 in the width direction so that the annular frame 106 is located outside in the width direction across the opening 22 .

The mask unit 20 partially allows the transmission of the ultraviolet rays 300 and limits the region of the supporting frame unit 200 to which the ultraviolet rays 300 are irradiated. Specifically, the mask unit 20 has an opening 22 that penetrates the center of the mask plate 21 and has a circular planar shape as a boundary, and uses the inside of the opening 22 as a transmission region 25 and the outside of the opening 22 as a shielding region 26 . The transmission region 25 is a region that allows the transmission of the ultraviolet rays 300 through the openings 22 so that the frame unit 200 supported by the mask unit 20 can be irradiated with the ultraviolet rays 300 . That is, the transmissive area 25 is configured by the opening 22 . The shielding area 26 is an area where the ultraviolet rays 300 are shielded by the mask plate 21 so that the frame unit 200 supported by the mask unit 20 cannot be irradiated with the ultraviolet rays 300 .

The opening 22-1 forming the transmission region 25-1 of the first mask 20-1 has a diameter larger than the outer diameter of the first plate-like object 100-1, and the opening 107-1 of the annular frame 106-1. , the transmissive region 25-1 of the first mask 20-1 corresponds to the first plate-like object 100-1, as shown in FIG. The first mask 20-1 has a transmissive region 25-1 facing the entire first plate-like object 100-1 to enable irradiation of the ultraviolet rays 300, and a shielding region 26-1 facing the annular frame 106-1. The frame unit 200-1 is supported in such a way that the ultraviolet rays 300 cannot be irradiated.

The aperture 22-2 forming the transmission region 25-2 of the second mask 20-2 has a diameter larger than the outer diameter of the second plate-shaped object 100-2, and the aperture 107-2 of the annular frame 106-2. , the transmissive region 25-2 of the second mask 20-2 corresponds to the second plate-like object 100-2, as shown in FIG. The second mask 20-2 has a transmissive region 25-2 that faces the entire second plate-shaped object 100-2 so that the ultraviolet rays 300 can be irradiated, and a shielding region 26-2 that faces the annular frame 106-2. The frame unit 200-2 is supported while the ultraviolet ray 300 cannot be irradiated.

The mask plate 21-2 of the second mask 20-2 has the same size as the mask plate 21-1 of the first mask 20-1. The opening 22-2 of the second mask 20-2 has a larger diameter than the opening 22-1 of the first mask 20-1. The pair of guide rails 23-2 of the second mask 20-2 are wider than the pair of guide rails 23-1 of the first mask 20-1. The transmissive area 25-2 of the second mask 20-2 is wider than the transmissive area 25-1 of the first mask 20-1. The shielded area 26-2 of the second mask 20-2 is narrower than the shielded area 26-1 of the first mask 20-1.

The ultraviolet ray irradiation unit 30 is a mechanism for irradiating the frame unit 200, in which the plate-like object 100 is supported in the opening 107 of the annular frame 106 by the ultraviolet curing adhesive tape 105, with the ultraviolet rays 300, as shown in FIGS. , a light source unit 31 , a moving unit 32 , and an illuminance adjusting unit 34 are provided.

The light source unit 31 includes a plurality of UVLEDs (UltraViolet Light Emitting Diodes) 33 linearly arranged in a range exceeding the width of the plate-like object 100 . The plurality of UVLEDs 33 are arranged along the X-axis direction in the first embodiment. The light source unit 31 irradiates the ultraviolet rays 300 linearly parallel to the X-axis direction.

The moving unit 32 moves the light source section 31 along the surface 101 of the frame unit 200 supported by the mask unit 20 in a direction intersecting the extending direction of the light source section 31 . The moving unit 32 moves the light source section 31 in the Y-axis direction in the first embodiment. The moving unit 32 moves the light source section 31 from the position 73 to the position 74, for example, as shown in FIG. In the first embodiment, for example, a belt-driven actuator is used as the moving unit 32 .

The illuminance adjustment unit 34 adjusts the illuminance of the light source unit 31 by adjusting the voltage applied to each UVLED 33 that configures the light source unit 31 .

The plate-like object registration unit 50 registers the type of the plate-like object 100 irradiated with the ultraviolet rays 300 by the ultraviolet irradiation unit 30 . In the first embodiment, the plate-like object registration unit 50 registers either the first plate-like object 100-1 or the second plate-like object 100-2 as an object to be irradiated with ultraviolet rays.

The mask determination unit 40 is a mechanism for determining the type of the mask unit 20, and as shown in FIGS. Prepare.

The light amount sensor 41 measures the amount of received ultraviolet rays 300 emitted from the ultraviolet irradiation unit 30 . The light amount sensor 41 is arranged at a position sandwiching the light source section 31 and the mask unit 20 . The light intensity sensor 41 is provided on the lid 12 of the housing 10 in the first embodiment. In the first embodiment, the light quantity sensor 41 faces the shielding region 26-1 outside the transmissive region 25-1 in the first mask 20-1, and faces the transmissive region 25-2 in the second mask 20-2. It is placed in a position where

A mask determination unit 42 determines the type of the mask unit 20 from the amount of light received measured by the light amount sensor 41 . The collation unit 43 collates whether or not the determination result of the mask determination unit 42 matches the type of the plate-like object 100 registered in the plate-like object registration unit 50 . The notification unit 44 notifies the result of the collation unit 43 .

The ultraviolet irradiation device 1 has a control unit 60 . The control unit 60 controls each component of the processing device 500 to cause the processing device 500 to perform each operation related to processing the plate-like object 100, and controls each component of the ultraviolet irradiation device 1. Then, the ultraviolet irradiation device 1 is caused to perform various operations such as irradiation of the plate-like object 100 with the ultraviolet rays 300 and determination of the type of the mask unit 20 installed in the housing 10 . The control unit 60 includes a computer system in the first embodiment. The control unit 60 includes an arithmetic processing unit having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as ROM (read only memory) or RAM (random access memory), and an input/output interface device. and The arithmetic processing unit performs arithmetic processing according to a computer program stored in the storage device, and outputs control signals for controlling the processing device 500 and the ultraviolet irradiation device 1 to the processing device 500 and the ultraviolet irradiation device 1 via the input/output interface device. Output to each component of the ultraviolet irradiation device 1 .

In the first embodiment, the mask determination unit 42 and the collation unit 43 are functional units realized by the arithmetic processing device of the control unit 60 executing a computer program stored in the storage device. The plate-shaped object registration unit 50 is realized by the storage device of the control unit 60 in the first embodiment.

The notification unit 44 is connected via an input/output interface device of the control unit 60 . In the first embodiment, the notification unit 44 includes a speaker 47 and an indicator light 48 as shown in FIGS. 1 and 2 . The speaker 47 notifies the operator of the processing device 500 of the result of the collation section 43 by emitting a notification sound. The indicator lamp 48 lights the lamp 49 to notify the operator of the processing device 500 of the result of the collating section 43 . Further, the function of the notification unit 44 may be performed by a display unit 580, which displays the result of the collation unit 43 on the display screen 581, and the result of the collation unit 43 to the operator of the processing device 500. may be notified.

The operation of the ultraviolet irradiation device 1 according to Embodiment 1 will be described. 5 and 6 are cross-sectional views for explaining the operation when the first mask 20-1 is installed in the ultraviolet irradiation device 1 of FIG. 7 and 8 are cross-sectional views for explaining the operation when the second mask 20-2 is installed in the ultraviolet irradiation device 1 of FIG. FIG. 9 is an explanatory diagram of the determination operation of the type of the mask unit 20 by the ultraviolet irradiation device 1 of FIG. FIG. 10 is a cross-sectional view showing an ultraviolet irradiation operation by the ultraviolet irradiation device 1 of FIG.

The ultraviolet irradiation device 1 according to the first embodiment performs an operation of determining the type of the mask unit 20 attached to the housing 10 before cutting the plate-like object 100 at the start of the processing operation of the processing device 500. .

In the operation of determining the type of mask unit 20, first, as shown in FIGS. The light source unit 31 is arranged at a reference position 71 facing the area 25-2 along the Z-axis direction. The light amount sensor 41 measures a reference amount of received light, which is the amount of ultraviolet rays 300 received from the light source unit 31 arranged at the reference position 71 .

Next, as shown in FIGS. 6 and 8, the moving unit 32 faces the shielding region 26-1 of the first mask 20-1 along the Z-axis direction, and the transparent region 26-1 of the second mask 20-2. The light source unit 31 is arranged at a comparison position 72 facing the area 25-2 along the Z-axis direction. The light amount sensor 41 measures a comparative amount of received light, which is the amount of ultraviolet rays 300 received from the light source unit 31 arranged at the comparison position 72 .

Then, the mask determination unit 42 compares the reference received light amount and the comparative received light amount measured by the light amount sensor 41, and as shown in FIG. determines that the first mask 20-1 is attached to the housing 10, and if the difference between the reference received light amount and the comparative received light amount is within the predetermined range 402, the second mask 20-2 is attached to the housing 10. It is determined that Here, the predetermined range 402 is a range in which the difference between the reference received light amount and the comparative received light amount is 0 or more and the predetermined value 401 or less.

When the first mask 20-1 is attached to the housing 10, as shown in FIGS. The shielding area 26 - 1 faces the light source part 31 arranged at the comparison position 72 . Therefore, when the first mask 20-1 is attached to the housing 10, the difference between the reference received light amount and the comparative received light amount becomes larger than the predetermined range 402. FIG. When the first mask 20-1 is attached to the housing 10, for example, the reference received light amount is 50 in predetermined arbitrary units, and the comparative received light amount is 10 in predetermined arbitrary units. The difference between is 40.

When the second mask 20-2 is attached to the housing 10, as shown in FIGS. Both the portion 31 and the light source portion 31 arranged at the comparison position 72 face each other. Therefore, when the second mask 20 - 2 is attached to the housing 10 , the difference between the reference received light amount and the comparative received light amount is within the predetermined range 402 . When the second mask 20-2 is attached to the housing 10, for example, the reference received light amount is 70 in predetermined arbitrary units, and the comparative received light amount is 80 in predetermined arbitrary units. The difference between is 10.

After the mask determination unit 42 determines the type of the mask unit 20 attached to the housing 10 , the verification unit 43 compares the determination result of the mask determination unit 42 and the plate-like object 100 registered in the plate-like object registration unit 50 . Check whether the type matches or not. For example, when the determination result of the mask determination unit 42 is the first mask 20-1 and the first plate-like object 100-1 is registered in the plate-like object registration unit 50, the matching unit 43 Since the mask 20-1 and the first plate-like object 100-1 correspond to each other, a collation result indicating that they match is output. Similarly, when the determination result of the mask determination unit 42 is the second mask 20-2 and the second plate-like object 100-2 is registered in the plate-like object registration unit 50, the matching unit 43 A matching result is produced.

The matching unit 43 performs mask determination when the determination result of the mask determining unit 42 is the first mask 20-1 and when the second plate-like object 100-2 is registered in the plate-like object registering unit 50, and when the mask determination is performed. If the determination result of the unit 42 is the second mask 20-2 and the first plate-like object 100-1 is registered in the plate-like object registration unit 50, a collation result indicating that the two do not match is output.

When the collation unit 43 outputs a collation result that the two match, the notification unit 44 notifies the collation result that the two match, and the operator of the ultraviolet irradiation device 1 is fitted with the mask unit 20 of the correct size. Encourage awareness of the fact that On the other hand, when the collation unit 43 outputs a collation result that the two do not match, the notification unit 44 notifies the collation result that the two do not match, and informs the operator of the ultraviolet irradiation device 1 that the mask unit of the wrong size. The user is prompted to recognize that the mask unit 20 is attached, and to change to the mask unit 20 of the correct size. When the mask unit 20 is changed, the determination processing by the mask determination unit 42 and the collation processing by the collation unit 43 are performed again.

After the operation of determining the type of the mask unit 20 is performed and the matching unit 43 outputs a matching result indicating that the two match, the processing apparatus 500 checks the plate-like object 100 registered in the plate-like object registering unit 50. After being cut and washed, it is carried into the housing 10 of the ultraviolet irradiation device 1 . After the plate-shaped object 100 is carried into the housing 10 , the control unit 60 arranges the light source section 31 at the reference position 71 , irradiates the ultraviolet rays 300 from the light source section 31 , and receives the light with the light amount sensor 41 . Based on the amount, it is determined whether or not the plate-like object 100 has been carried into the housing 10 . When the control unit 60 determines that the plate-like object 100 has not been carried into the housing 10, the notification unit 44 notifies the determination result that the plate-like object 100 has not been carried in, and the processing device 500 Stop the cutting operation. On the other hand, when the control unit 60 determines that the plate-shaped object 100 has been carried into the housing 10, the ultraviolet irradiation operation is performed by the ultraviolet irradiation device 1, which will be described below.

In the ultraviolet irradiation operation, the ultraviolet irradiation unit 30, as shown in FIG. The light source unit 31 is moved at a speed between the positions 73 and 74 along the width direction a predetermined number of times.

In the first embodiment, as shown in FIG. 10, the position 73 is set to face one end of the transmissive region 25 in the width direction, and the position 74 is set to the other end of the transmissive region 25 in the width direction. It is set at a position facing the end. Note that FIG. 10 shows an example in which the second mask 20-2 is attached to the housing 10 as an example.

The ultraviolet irradiation unit 30 thus irradiates the entire region facing the transmission region 25 of the frame unit 200 with the ultraviolet rays 300 . When the adhesive tape 105 of the frame unit 200 is irradiated with the ultraviolet rays 300 by the ultraviolet irradiation unit 30, the adhesive strength is lowered.

In the ultraviolet irradiation device 1 according to Embodiment 1 having the above configuration, the type of the mask unit 20 is determined by the mask determination unit 42 from the amount of light received by the light amount sensor 41, so it is possible to determine which mask is installed. There is an operational effect.

[Embodiment 2]
An ultraviolet irradiation device 1 according to Embodiment 2 of the present invention will be described based on the drawings. FIG. 11 is an explanatory diagram of the illuminance adjustment operation by the ultraviolet irradiation device 1 according to the second embodiment. In FIG. 11, the same reference numerals are assigned to the same parts as those of the first embodiment, and the description thereof is omitted.

The ultraviolet irradiation device 1 according to the second embodiment performs an illuminance adjusting operation for adjusting the illuminance of the light source unit 31 based on the reference amount of received light before executing the operation for determining the type of the mask unit 20 attached to the housing 10. Execute.

As shown in FIGS. 5 and 7, the light intensity sensor 41 measures the reference light reception amount, which is the light reception amount of the ultraviolet rays 300 from the light source unit 31 arranged at the reference position 71. If the amount is out of the allowable range 413 shown in FIG. 11, the illuminance of the light source unit 31 is adjusted so that the reference amount of received light is within the allowable range 413 . The allowable range 413 indicates that the reference received light amount is equal to or greater than the predetermined lower limit received light amount 411 and equal to or less than the predetermined upper limit received light amount 412 . As shown in FIG. 11A, the illuminance adjustment unit 34 adjusts the voltage applied to each UVLED 33 to a small value when the reference light reception amount is larger than the upper limit light reception amount 412 of the allowable range 413, for example, so that the light source unit 31 , the illuminance of is adjusted to be small, and the reference amount of received light is kept within the allowable range 413 . As shown in FIG. 11B, the illuminance adjustment unit 34 adjusts the voltage applied to each UVLED 33 when the reference light reception amount is smaller than the lower limit light reception amount 411 of the allowable range 413, for example, so that the light source unit 31 The illuminance of is adjusted to be large, and the reference amount of received light is kept within the allowable range 413 .

Since the ultraviolet irradiation device 1 according to Embodiment 2 having the above configuration adjusts the illuminance of the light source unit 31 by the illuminance adjustment unit 34 to keep the reference received light amount within the allowable range 413, the inspection and adjustment of the light source unit 31 and the type of the mask unit 20 can be determined with one light amount sensor 41 .

[Embodiment 3]
An ultraviolet irradiation device 1 according to Embodiment 3 of the present invention will be described with reference to the drawings. 12 and 13 are cross-sectional views for explaining the operation when the mask unit 20 is not installed in the ultraviolet irradiation device 1 according to the third embodiment. 14A and 14B are explanatory diagrams of the determination operation of the type of the mask unit 20 by the ultraviolet irradiation device 1 according to the third embodiment. In FIGS. 12, 13 and 14, the same parts as in Embodiments 1 and 2 are denoted by the same reference numerals, and description thereof is omitted.

In the operation of determining the type of the mask unit 20, the light intensity sensor 41, as shown in FIGS. and a comparative amount of received light, which is the amount of ultraviolet rays 300 received from the light source unit 31 arranged at the position 72, are measured. Then, the mask determination unit 42 compares the reference received light amount and the comparative received light amount measured by the light amount sensor 41, and as shown in FIG. If the difference is within the threshold value 406, it is determined that the mask unit 20 is not attached to the housing 10. If the difference between the reference received light amount and the comparative received light amount is within the predetermined range 402 and is greater than the threshold value 406, the same procedure as in the first embodiment is performed. It is determined that the second mask 20-2 is attached to the housing 10. FIG. Here, "within the threshold value 406" refers to a range in which the difference between the reference received light amount and the comparative received light amount is 0 or more and the threshold value 406 or less.

When the mask unit 20 is not attached to the housing 10, as shown in FIGS. 12 and 13, the ultraviolet rays 300 from the light source section 31 arranged at the comparison position 72 are also emitted from the light source section 31 arranged at the reference position 71. UV rays 300 are not blocked by the mask unit 20 either. Therefore, when the mask unit 20 is not attached to the housing 10 , the difference between the reference received light amount and the comparative received light amount is within the predetermined range 402 and further within the threshold value 406 . When the mask unit 20 is not attached to the housing 10, for example, the reference received light amount is 85 in predetermined arbitrary units, the comparative received light amount is 90 in predetermined arbitrary units, and the difference between the reference received light amount and the comparative received light amount is 5.

When the mask determination unit 42 outputs a determination result that the mask unit 20 is not attached to the housing 10, the notification unit 44 notifies the operator of the ultraviolet irradiation device 1 of the mask unit 20 by notifying the determination result. The user is prompted to recognize that the mask unit 20 is not attached to the housing 10 and to attach the mask unit 20 of the correct size. When the mask unit 20 is attached, the determination processing by the mask determination unit 42 and the collation processing by the collation unit 43 are performed again.

The ultraviolet irradiation device 1 according to Embodiment 3 having the above configuration has the effect that the mask determination unit 42 can further determine that the mask unit 20 is not installed from the amount of light received measured by the light amount sensor 41.

In addition, this invention is not limited to the said embodiment. That is, various modifications can be made without departing from the gist of the present invention.

1 UV irradiation device 10 Housing 20 Mask unit 20-1 First mask 20-2 Second mask 25, 25-1, 25-2 Transmissive area 26, 26-1, 26-2 Shielding area 30 UV irradiation unit 31 Light source part 32 Moving unit 33 UVLED
34 illumination adjustment unit 40 mask determination unit 41 light intensity sensor 42 mask determination unit 43 collation unit 44 notification unit 50 plate-like object registration unit 71 reference position 72 comparison position 100 plate-like object 100-1 first plate-like object 100-2 second Plate-like object of 2 105 Adhesive tape 200, 200-1, 200-2 Frame unit 300 Ultraviolet

Claims (3)

An ultraviolet ray irradiation unit for irradiating a frame unit in which a plate-like object is supported in an opening of an annular frame with an ultraviolet curable adhesive tape with ultraviolet rays, a housing for accommodating the ultraviolet ray irradiation unit, and a partial allowance for transmission of the ultraviolet rays. a mask unit detachable from the housing for limiting an area irradiated with ultraviolet light on the frame unit; a mask determination unit for determining the type of the mask unit; and the plate-like object irradiated with ultraviolet light by the ultraviolet light irradiation unit. A plate-shaped object registration unit that registers the type of the ultraviolet irradiation device,
The mask unit includes a first mask having a transmission area corresponding to the first plate-like object and a second mask having a transmission area corresponding to a second plate-like object larger than the first plate-like object. , and disposed in the housing,
The ultraviolet irradiation unit includes a linear light source section that exceeds the width of the plate-shaped object, and a moving unit that moves the light source section in a direction intersecting the extending direction of the light source section,
The mask determination unit includes a light amount sensor arranged at a position sandwiching the light source unit and the mask, a mask determination unit that determines the type of the mask from the amount of received light measured by the light amount sensor, and a determination result of the mask determination unit. and the type of the plate-shaped object registered in the plate-shaped object registration unit are matched, and a notification unit for notifying the result of the comparison unit,
The mask determination unit is configured to measure a reference received amount of ultraviolet rays emitted from the light source unit arranged at a reference position facing the transmission regions of the first mask and the second mask by the light amount sensor; A comparative amount of received light measured by the light amount sensor of the ultraviolet ray from the light source unit arranged at a comparison position facing the shielding area outside the transmission area in the first mask and facing the transmission area in the second mask. and are compared, and if the difference between the reference received light amount and the comparative received light amount is larger than a predetermined range, it is determined that the first mask is attached to the housing, and if the difference is within the predetermined range is an ultraviolet irradiation device for determining that the second mask is attached to the housing; The light source unit comprises a UVLED,
2. The ultraviolet irradiation device according to claim 1, further comprising an illuminance adjusting unit that adjusts the illuminance so that the received light amount is within the allowable range when the reference amount of received light is out of the allowable range. 3. The ultraviolet irradiation device according to claim 1, wherein the mask determination unit determines that the mask is not attached to the housing when the difference is within a predetermined range and within a threshold value.

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