JP7340925B2 - Fluid device connection system and connection member - Google Patents

Description

The present invention provides a first fluid device having a first connecting portion, a second fluid device having a second connecting portion, an annular seal member connecting the first connecting portion and the second connecting portion, and a second fluid device having the first connecting portion and the second connecting portion. The present invention relates to a connecting member used in a fluid device connecting structure having a connecting member that maintains the connected state of a second connecting portion.

Conventionally, the control of chemical solutions used in semiconductor manufacturing processes and liquid crystal manufacturing processes requires valves such as flow control valves and on-off valves, filters, sensors such as pressure sensors and flow rate sensors, joint blocks and flow path blocks, etc. Fluid equipment such as piping blocks are used. In recent years, in order to make devices more compact, connecting parts of these fluid devices are directly connected using connecting members to form a unit.

Conventionally, a first fluid device having a first connection portion, a second fluid device having a second connection portion, an annular seal member connecting the first connection portion and the second connection portion, and a first connection portion and the second connection portion have been provided. A connecting member for use in a fluid device connecting structure is used, which includes a connecting member that maintains the connected state of a connecting part.
Here, the connecting portion, the annular seal member, and the first and second connecting pieces are made of resin. Therefore, for example, if abnormally high-temperature chemical liquid and abnormally low-temperature pure water are alternately applied to the connection portion for a long period of time, the connection portion may undergo creep deformation and the sealing force may decrease. When the sealing force decreases, liquid leakage occurs. Additional tightening is performed in such emergencies.

A retightening member is attached to the connecting member to bring the first and second connecting pieces closer to each other and draw the connecting portions together to increase the sealing force.
By inserting the retightening member into the insertion hole of the first connecting piece and tightening it into the second connecting piece bolt hole, the first and second connecting pieces are drawn together and the connecting parts are brought closer to each other. Therefore, by tightening the connecting member using the additional tightening member, the sealing force can be improved.

However, in the conventional connecting member, since the first extending portion and the second extending portion are formed on the outside in the radial direction in order to maintain the connecting member in a closed state, there is a problem that the connecting member itself becomes large. Ta.
Alternatively, since the second engaging portion for additional tightening as a safety mechanism is provided on the outside in the radial direction, the connecting member itself becomes large. This requires a large working space for installing the connecting member.
In particular, when many fluid devices are installed in parallel on an installation surface, the work space for the central fluid device is limited to the side opposite to the installation surface, and with conventional connection members, the connection members are attached to the fluid devices on both sides. If so, the first connecting piece and the second connecting piece of the connecting member cannot be brought close to each other and closed. Even if the connecting member is installed, the locking pawl cannot be engaged because the hand must be inserted from the opposite direction to the insertion direction to bring it into normal use. This poses a problem in that workability deteriorates because it is impossible to work in a narrow space where you cannot reach your hands.
In order to solve this problem, the present applicant has developed and implemented a connecting member shown in Patent Document 1.

Japanese Patent Application Publication No. 2018-91482

However, the connecting member of Patent Document 1 has the following problems.
That is, the connecting member of Patent Document 1 was developed for use in cleaning equipment for semiconductor manufacturing equipment, and was made of PVDF, which is a fluororesin. There was also a strong demand for use with organic solvents and alkaline fluids.
PVDF resin has the problem of corrosion when exposed to organic solvents and discoloration when exposed to alkaline fluids. On the other hand, another resin, PPS, has excellent corrosion resistance against organic solvents and alkaline fluids.

However, while the elastic modulus of PVDF is 2,300 to 2,700 MP, the elastic modulus of PPS is 3,600 to 4,000 MP, and PPS is about 1.5 times more difficult to deform than PVDF. are doing. Therefore, if the material of the connecting member in Patent Document 1 is changed to PPS, when the annular seal member (made of PFA or PTFE and has a high coefficient of thermal expansion) is thermally deformed due to the heat of the liquid flowing inside, PPS Since the coefficient of thermal expansion of PPS is as small as about 1/2 that of PFA, etc., there is a large difference between the amount of thermal deformation of PPS and the amount of thermal deformation of PFA, etc., which may cause a change in the clamping state. Furthermore, since the connecting member made of PPS is difficult to be elastically deformed, there is a possibility that a gap may be generated between the annular seal member and the connecting member. If a gap occurs between the annular seal member and the connecting member, there is a risk that the sealing force will decrease and liquid may leak.

The present invention is intended to solve the above-mentioned problems, and an object of the present invention is to provide a connecting member that can be used in semiconductor manufacturing equipment and chemical solution supply equipment that use organic solvents and alkaline fluids.

The connecting member of the present invention has the following configuration in order to solve the above problems.
(1) A first fluid device having a first connection portion, a second fluid device having a second connection portion, an annular seal member disposed between the first connection portion and the second connection portion, and an annular seal member A connecting member for connecting a first connecting part and a second connecting part via a connecting member for use in a fluid device connecting structure, the connecting member including a first connecting piece and a second connecting piece, The first connecting piece and the second connecting piece have a rotating connecting part at one end, the first connecting part and the second connecting part have a circular shape, and the first connecting piece has an approximately U shape having an opening. In a connecting member that is shaped like a letter and engages with the second connecting piece over 180 degrees around the entire circumference of the first connecting part and the second connecting part, the materials of the first connecting piece and the second connecting piece are selected to have a modulus of elasticity. It is characterized by being made thinner than the original material when it is made of a high quality material.
Here, members that come into direct contact with the liquid, such as the annular seal member, are made of highly corrosion-resistant fluororesin such as PFA and PTFE.

(2) In the connecting member according to (1), at least one of the outer wall thickness and the thickness of a part of the cylinder of the first connecting piece and the second connecting piece is formed thin. shall be.
(3) The connecting member according to (1) or (2) is characterized in that a protrusion is formed at the axial center of the circular outer periphery of the first connecting piece.
(4) In any one of the connecting members described in (1) to (3), the first engaging pawl formed on the first connecting piece and the second engaging pawl formed on the second connecting piece. The first connecting piece and the second connecting piece are engaged by being engaged, the engaging portion of the first engaging claw is arc-shaped, and the second engaging claw is engaged. It is characterized by that the part that connects has a tapered shape.
(5) A fluid connection structure characterized in that it is constituted by the connection member according to any one of (1) to (4).
(6) A first connecting device having a first connecting portion, a second connecting device having a second connecting portion, an annular seal member disposed between the first connecting portion and the second connecting portion, and an annular sealing member. a connecting member that connects a first connecting part and a second connecting part via a fluid device connecting system, wherein the material of the first connecting part, the second connecting part and the annular sealing member is a fluororesin; A feature is that the material of the member can be selected from either a fluororesin material or a PPS material.

The connecting member of the present invention has the following functions and effects.
(1) A first fluid device having a first connection portion, a second fluid device having a second connection portion, an annular seal member disposed between the first connection portion and the second connection portion, and an annular seal member A connecting member for connecting a first connecting part and a second connecting part via a connecting member for use in a fluid device connecting structure, the connecting member including a first connecting piece and a second connecting piece, The first connecting piece and the second connecting piece have a rotating connecting part at one end, the first connecting part and the second connecting part have a circular shape, and the first connecting piece has an approximately U shape having an opening. In a connecting member that is shaped like a letter and engages with the second connecting piece over 180 degrees around the entire circumference of the first connecting part and the second connecting part, the materials of the first connecting piece and the second connecting piece are selected to have a modulus of elasticity. When formed from a material with a high modulus of elasticity, the connecting member is thinner than the original material. Because it is thinly molded, even if the annular seal member is thermally deformed by the heat of the liquid flowing inside, the connecting member will elastically deform and no gap will be created between it and the annular seal member, reducing the sealing force. There is no risk of liquid leaking.
More specifically, the first connecting piece and the second connecting piece are made of PPS, and the thickness of the first connecting piece and the second connecting piece is such that the first connecting piece and the second connecting piece are made of PVDF. Since the connecting member made of PPS is characterized by being formed thinner, it is less likely to be elastically deformed than the connecting member made of PVDF. Even if it thermally deforms and expands due to the heat of the liquid flowing inside, the PPS connecting member is elastically deformed and no gap is created between it and the annular sealing member, reducing the sealing force and preventing the liquid from flowing. There is no risk of leakage.

(2) In the connecting member according to (1), at least one of the outer wall thickness and the thickness of a part of the cylinder of the first connecting piece and the second connecting piece is formed thin. Therefore, since the thickness of the outer wall largely controls the ease of deformation, it is possible to make the first and second connecting pieces more easily deformable.
(3) The connecting member according to (1) or (2) is characterized in that a protrusion is formed at the axial center of the circular outer periphery of the first connecting piece.
Since the thickness of the first connecting piece is reduced, the cross-sectional area of the mold flow path through which the molten PPS flows is reduced, and the fluidity of the molten PPS during injection molding is reduced. Therefore, when attempting to mold the connecting piece thinly, there is a problem in that a weld occurs at the position where the molten PPS joins. In particular, since the molten PPS flowing along the inner wall of the mold merged at the axial center position of the circular outer periphery, a weld was generated near the axial center position of the circular outer periphery of the first connecting piece. When welding occurs, there is a risk that the clamping strength will decrease.
In the connecting member (3), since the protruding part is formed at the axial center position of the circular upper outer periphery of the first connecting piece, the cross section becomes larger by the protruding part, making it easier for the molten PPS to flow. Since molten PPS does not flow in from both sides, no welds are formed and the clamping strength does not decrease.

(4) In the connecting member according to any one of the connecting members described in (1) to (3), the first engaging pawl formed on the first connecting piece and the second engaging pawl formed on the second connecting piece When the second engaging claw is engaged, the first connecting piece and the second connecting piece are engaged, and the engaging portion of the first engaging claw is arc-shaped; A feature is that the engaging portion of the mating claw has a tapered shape.
A connecting member made of PPS is 1.5 times less likely to deform than a connecting member made of PVDF. Therefore, when attempting to engage the first engaging pawl and the second engaging pawl, stress concentration occurs on the first engaging pawl, causing a problem that the engaging pawl may be damaged.
In the connecting member (4), the engaging portion of the first engaging pawl has an arc shape, and the engaging portion of the second engaging pawl has a tapered shape. Since the portion of the second engaging pawl that is mated has a tapered shape, the force applied to the first engaging pawl acts in a direction that elastically deforms the first connecting piece, thereby preventing damage to the first engaging pawl. be able to.
Further, the first engaging pawl and the second engaging pawl always contact each other at a point, and the point at which stress is concentrated changes, so that damage to the first engaging pawl due to stress concentration can be prevented.

FIG. 3 is a perspective view of the connecting member in the first locking position as viewed from the first direction. FIG. 3 is a perspective view of the connecting member in the first locking position as seen from a second direction. FIG. 6 is a perspective view of the connecting member in the first locking position, viewed from a third direction. FIG. 7 is a perspective view of the connecting member in the first locking position, viewed from a fourth direction. It is a front view of a connection member. It is a right view of a connection member. It is a left side view of a connection member. It is a top view of a connection member. It is a bottom view of a connection member. FIG. 3 is a rear view of the connecting member. FIG. 2 is a central cross-sectional view of a PVDF connecting member disclosed in Patent Document 1. FIG. 12 is a sectional view taken along line BB in FIG. 11; FIG. 2 is a central cross-sectional view of a connecting member made of PPS of the present invention. It is a CC sectional view of FIG. 13. It is a figure which shows the wall thickness ratio of the connection member made from PVDF, and the connection member made from PPS of this invention. It is a figure which shows the elastic deformation amount (unit: mm) when predetermined force is applied to the 1st connection piece and 2nd connection piece made from conventional PVDF. It is a figure which shows the elastic deformation amount (unit: mm) when predetermined force is applied to the 1st connection piece made from PPS of this invention, and a 2nd connection piece. It is a figure which shows the inflow state of resin at the same timing as FIG. 19 about the conventional 1st connection piece made from PVDF. It is a figure which shows the flow state of PPS resin into the mold cavity at the time of injection molding when the whole is comprised by the thin wall part (cylindrical wall thickness ratio=81%) without providing a protrusion part. FIG. 20 is a diagram showing the resin inflow state at the same timing as FIG. 19 in the case where the protruding portion of the present invention is provided. FIG. 6 is an enlarged view of the locking of the PPS connecting member of the present invention (enlarged view of section D in FIG. 5). It is a figure explaining the action and effect of a locking part.

The fluid device connection structure of the present invention will be described in detail below with reference to the drawings. 1 to 4 show perspective views of the connecting member 5 in the first locking position seen from various angles (first direction to fourth direction). 5 is a front view of the connecting member 5, FIG. 6 is a right side view, FIG. 7 is a left side view, FIG. 8 is a top view, and FIG. 9 is a bottom view. , FIG. 10 is a rear view.
Here, the internal configuration of the fluid device connection structure is the same as that described in Patent Document 1, so a description thereof will be omitted.
As shown in FIG. 1, the connecting member 5 has a cylindrical shape and includes a first connecting piece 6 and a second connecting piece 7. The first connecting piece 6 and the second connecting piece 7 are made of PPS, which has strength and corrosion resistance. PPS has stronger corrosion resistance to organic solvents and alkaline fluids than PVDF.

Next, a more detailed external configuration of the connecting member 5 will be described using FIGS. 1 to 10. Note that although the pair of objects are labeled A and B, the symbols A and B are omitted as appropriate to complicate the explanation.
The connecting member 5 has a first connecting piece 6 and a second connecting piece 7. As shown in FIG. 5, the first connecting piece 6 has a generally U-shape with an opening 6a in a cross section perpendicular to the axial direction of the first connecting piece 6. Further, the outer periphery of the first connecting piece 6 includes a protruding portion 1 located at the center of the outer periphery between the thin wall portion 61 and the thin wall portion 62. The cylindrical wall thickness of the protruding portion 1 is larger than that of the thin wall portions 61 and 62 due to the protrusion.
The first connecting piece 6 is connected to the second connecting piece 6 at a position exceeding 180 degrees around the entire circumference of the connecting member 5, in other words, at a position exceeding 180 degrees around the entire circumference of the circular cross section of the first connecting part and the second connecting part. It engages with the connecting piece 7.

The second connecting piece 7 has a shape that covers the opening 6a of the first connecting piece 6. The second connecting piece 7 does not have the protrusion 1 formed on the first connecting piece 6.
A plurality of axially recessed recesses 6b and 7a are formed radially on the axial surfaces of the first connecting piece 6 and the second connecting piece 7. As shown in FIG. 2, an end portion 65 is formed at one end in the circumferential direction of the first connecting piece 6, and first hinge portions 63 are formed at both ends of the end portion 65 in the axial direction. A second hinge portion 73 is formed at one circumferential end of the second connecting piece 7, and is rotatably engaged with the first hinge portion 63.

As shown in FIG. 1, a single extending portion 78 is provided between the second lock receiving portions 75A and 75B of the second connecting piece 7 and extends radially outward. At the center of the extending portion 78, a protruding portion 76 is erected in the direction of the first connecting piece 6. A first jig hooking portion 77 is formed on the opposite side of the extending portion 78 from the protruding portion 76 so as to protrude in the axial direction.
As shown in FIG. 2, on the second hinge portion 73 side of the second connecting piece 7, a rotation portion 74 is formed on the outer peripheral surface of the second connecting piece 7 so as to protrude outward in the radial direction. When the first connecting piece 6 and the second connecting piece 7 are opened, the rotating portion 74 engages with the end 65 of the first connecting piece 6 and prevents the second connecting piece 7 from rotating beyond a certain level. There is.
Furthermore, a first resistance protrusion 6d is formed near the first hinge portion 63 of the first connecting piece 6 and on the inner peripheral side of the end portion 65. A second resistance protrusion 7b that comes into contact with the first resistance protrusion 6d is formed near the second hinge portion 73 of the second connection piece 7. When the first resistance protrusion 6d and the second resistance protrusion 7b come into contact with each other, they rub against each other and generate a frictional force, which prevents them from rotating under their own weight and is temporarily fixed.

Next, the main parts of the present invention will be explained. The first connecting piece 6 and the second connecting piece 7 are made of PPS, which has strength and corrosion resistance. While the elastic modulus of PVDF, which is a fluororesin used in the conventional Patent Document 1, is about 2500 MP, the elastic modulus of PPS used in the present invention is about 3800 MP. Compared to PVDF, it is 1.5 times more difficult to deform.
The first connecting piece 6 and the second connecting piece 7 need to be elastically deformed to each other when they are attached and removed, but the first connecting piece 6 and the second connecting piece 7 of the present invention are made of PPS, so they do not deform. Therefore, in order to deform the same amount with the same force as PVDF, the thickness of the thin parts 61 and 62 is made thinner to improve workability.

FIG. 11 shows a central sectional view of the PVDF connecting member 5' disclosed in Patent Document 1, and FIG. 12 shows a BB sectional view of FIG. 11. Further, FIG. 13 shows a central sectional view of the PPS connecting member 5 of the present invention, and FIG. 14 shows a CC sectional view of FIG. 13. Moreover, FIG. 15 shows the wall thickness ratio of the connecting member 5' made of PVDF and the connecting member 5 made of PPS of the present invention.
In FIG. 15, symbols N4 and N16 are model numbers indicating the sizes of the connecting members. Further, A indicates the first connecting piece 6, and B indicates the second connecting piece 7.
1 to 10 show diagrams of model number N16. N16 means the model number of the connecting member 5 for connecting a fluid device having a flow path with an inner diameter of about 16 mm.

As shown in FIGS. 11 and 12, the first connecting piece 6' of the PVDF connecting member 5' of Patent Document 1 (those described in Patent Document 1 have a dash added to the number). The cylindrical thickness of the second connecting piece 7' is b, and the thickness of the outer wall is c. Further, as shown in FIGS. 13 and 14, the cylindrical wall thickness of the first connecting piece 6 of the PPS connecting member 5 of the present invention (the cylindrical wall thickness of the thin wall portions 61 and 62) is e, and the protruding shape The cylindrical thickness of the portion 1 is f, the cylindrical thickness of the second connecting piece 7 is g, and the thickness of the outer wall is h. The amount by which the cylindrical wall thickness f of the protruding portion 1 is larger than the cylindrical wall thickness e of the thin wall portions 61 and 62 is (fe).
As shown in FIG. 15, in model number N16, the ratio of the wall thicknesses of the first connecting piece 6' and second connecting piece 7' made of PVDF and the first connecting piece 6 and second connecting piece 7 made of PSS is as follows. The cylindrical thickness ratio e/a of the first connecting piece 6 is 81%, and the cylindrical thickness ratio g/b of the second connecting piece 7 is 37%. The thickness ratio h/c of the outer walls of the first connecting piece 6 and the second connecting piece 7 is 83%. The thickness ratio f/a of the protrusion 1 is 100%, which is thicker than e/a=81%.

FIG. 16 shows the amount of elastic deformation (unit: mm) when a predetermined force is applied to the conventional first connecting piece 6' and second connecting piece 7' made of PVDF. Further, FIG. 17 shows the amount of elastic deformation (unit: mm) when a predetermined force is applied to the first connecting piece 6 and the second connecting piece 7 made of PPS of the present invention. A indicates the amount of deformation of the first connecting pieces 6, 6', and B indicates the amount of elastic deformation of the second connecting pieces 7, 7'.
Comparing model number N16, when a predetermined force F is applied to the conventional PVDF first connecting piece 6', the amount of elastic deformation is 0.196 mm, and when a predetermined force F is applied to the second connecting piece 7', the amount of elastic deformation is 0.196 mm. The amount of elastic deformation upon addition was 0.163 mm, and the average amount of elastic deformation for both was 0.180 mm.
The amount of elastic deformation when a predetermined force F is applied to the first connection piece 6 made of PPS of the present invention is 0.184 mm, and the amount of elastic deformation when a predetermined force F is applied to the second connection piece 7. was 0.178 mm, and the average amount of elastic deformation of both was 0.181 mm.
The results show that the PPS connecting member 5 of the present invention undergoes the same elastic deformation as the conventional PVDF connecting member 5' when a predetermined force F is applied.

The first connecting piece 6 and the second connecting piece 7 of the present invention are made of PPS so that they can be used with organic solvents and alkaline fluids. Therefore, compared to the conventional first connecting piece 6' and second connecting piece 7' made of PVDF, it is about 1.5 times less likely to deform. Since the connecting member 5 of the present invention is often used in narrow places, the fact that it is difficult to deform is inefficient and problematic in factory maintenance and the like.
The cylindrical wall thickness e of the thin wall portions 61 and 62 of the first connecting piece 6 is approximately 80% or less of the cylindrical wall thickness a of the thin wall portions 61' and 62' of the conventional first connecting piece 6'. Therefore, the first connecting piece 6 made of PPS can be deformed with the same force as the first connecting piece 6' made of PVDF.

Furthermore, the cylindrical wall thickness g of the second connecting piece 7 is 50% or less compared to the cylindrical wall thickness b of the conventional second connecting piece 7', so the second connecting piece 7 made of PPS is , it can be deformed with the same force as the second connecting piece 7' made of PVDF. Since the second connecting piece 7 is shorter in length and has higher rigidity than the first connecting piece 6, it is difficult to deform unless it is made even thinner than the thin parts 61 and 62 of the first connecting piece 6. Therefore, the thickness of the second connecting piece 7 is made thinner than the thin parts 61 and 62 of the first connecting piece 6.

Next, the reason for providing the protrusion 1 will be explained. When the first connecting piece 6 was prototyped with a cylindrical wall thickness ratio of 81%, a problem occurred in that a weld was formed in a portion of the first connecting piece 6 far from the injection port. FIG. 19 shows the flow of PPS resin into the mold cavity during injection molding when the entire structure is made up of thin-walled parts (cylindrical wall thickness ratio=81%) without providing the protruding part 1. FIG. 19 shows the state immediately before the entire cavity is filled with PPS resin (about 0.01 seconds). Darker gradation areas represent the resin that was injected first, and lighter areas represent the resin that was injected later. The blank area indicates the blank area S where the resin has not reached.
FIG. 18 shows the resin inflow state at the same timing as FIG. 19 for the conventional first connecting piece 6' made of PVDF. Further, FIG. 20 shows the resin inflow state at the same timing as FIG. 19 in the case where the protruding portion 1 of the present invention is provided.

The height SH1 of the blank area S shown in FIG. 18 and the height SH3 of the blank area S shown in FIG. 20 are approximately the same length, but the height SH2 of the blank area S shown in FIG. It can be seen that it is about 1.5 times longer than SH3.
Resin will then flow into the blank area S, but if the height SH of the blank area S is long like SH2 (the one without the protruding part of the first connecting piece 6 made of PPS resin), the blank area S will flow into the blank area S. Resin flows from the left and right sides of the part S, and there is a high possibility that welds will occur at the parts where the resins flowing from the left and right collide with each other.

In comparison, the height of the blank portion S is SH1 (the conventional first connecting piece 6' made of PVDF with a large cylindrical wall thickness) and SH3 (the protruding shape of the first connecting piece 6 made of PPS of the present invention). If it is short like the one with section 1), the resin will not flow in from the left and right sides of the blank section S, and the blank section S will be filled with the resin as if it were crushed, so there is no risk of welding.
That is, when manufacturing the connecting member 5 made of PPS for flowing an organic solvent or alkaline fluid, the cylindrical wall thickness is made thin, and when manufacturing the connecting member 5' made of PVDF, the cylindrical wall thickness is made thinner. As a result, a new problem of welding occurred, but by providing the protrusion 1, the cylindrical wall thickness can be reduced without causing welding, and the thickness can be reduced to the same level as the connecting member 5' made of PVDF. This made it possible to ensure elastic deformation.

Next, the first locking receiving part 64 and the second locking receiving part 75 will be explained. FIG. 21 shows an enlarged view of the locking of the connecting member 5 made of PPS of the present invention (enlarged view of section D in FIG. 5).
In the conventional connecting member 5' made of PVDF, when force is applied to the first locking receiving part 64', which is a part of the first connecting piece 6', the first locking receiving part 64 is elastically deformed as a whole. Therefore, the problem that the first locking receiving part 64 was damaged did not occur.
However, in the connecting member 5 made of PPS, when force is applied to the first locking receiving part 64, the amount of elastic deformation of the first connecting piece 6 is small, so there is a problem that the first locking receiving part 64 is damaged. Occurred.
In order to prevent this, as shown in FIG. 21, the shape of the abutting portion 64a that contacts the second locking receiving portion 75 of the first locking receiving portion 64 is made into a circular arc shape. Further, the shape of the contact portion 75a of the second lock receiving portion 75 that comes into contact with the first lock receiving portion 64 is tapered.

Next, the action and effect of the locking portion will be explained.
As shown in FIG. 22(A), when an external force F1 is applied to the locking portion, the tapered surface of the contact portion 75a of the second locking receiving portion 75 comes into contact with the first locking receiving portion 64. Since it is in contact with one point of the circular arc of the portion 64a, a force F2 that pushes the first locking receiving portion 64 diagonally downward is generated, so that the first connecting piece 6 receives a force in a direction in which it is likely to be elastically deformed.
Similarly, in FIG. 22(B), the force that tends to come off is caused by the fact that the tapered surface of the contact portion 75a of the second lock receiving portion 75 is caused by the arc of the contact portion 64a of the first lock receiving portion 64 Since it is in contact with one point, a force F2 that pushes the first lock receiving part 64 diagonally downward is generated, so the first connecting piece 6 receives a force F3 in a direction in which it is likely to be elastically deformed.
Furthermore, in FIG. 22(C) as well, the force F2 just before the first connection piece 6 comes off causes a force F3 to act in a direction that causes the first connection piece 6 to elastically deform.
Therefore, the force acting on the first lock receiving portion 64 always acts in a direction that causes the first connecting piece 6 to elastically deform. Therefore, since the first connecting piece 6 is elastically deformed, the force applied to the first lock receiving part 64 is reduced, so that the first lock receiving part 64 can be prevented from being damaged.

As explained in detail above, according to the connecting member 5 of the present invention,
(1) A first fluid device having a first connection portion, a second fluid device having a second connection portion, an annular seal member disposed between the first connection portion and the second connection portion, and an annular seal member A connecting member used in a fluid device connection structure having a connecting member that connects a first connecting part and a second connecting part via a first connecting piece 6 and a second connecting piece 7. The first connecting piece 6 has a rotating connecting part at one end of the first connecting piece 6 and the second connecting piece 7, the outer shape of the first connecting part and the second connecting part is circular, and the first connecting piece 6 has: In the connecting member 5 which is approximately U-shaped with an opening 6a and engages with the second connecting piece 7 over 180 degrees around the entire circumference of the first connecting part and the second connecting part, the first connecting piece 6 and The material of the second connecting piece 7 is PPS, and the radial thickness of the first connecting piece 6 and the second connecting piece 7 is such that the first connecting piece 6' and the second connecting piece 7 are made of PVDF. Since the connecting member 5 made of PPS is less likely to be elastically deformed than the connecting member 5' made of PVDF, since it is formed thinner as a whole, Even when the annular seal member is thermally deformed and expanded by the heat of the liquid flowing inside, the PPS connecting member 5 is elastically deformed, and no gap is generated between the annular seal member and the sealing force is increased. There is no risk of fluid leaking due to drop.

(2) In the connecting member described in (1), at least one of the outer wall thickness (c, h) or the thickness (a) of a portion of the cylinder of the first connecting piece 6 and the second connecting piece 7 is Since the outer wall thickness largely controls the ease of deformation, the first connecting piece 6 and the second connecting piece 7 can be more easily deformed. .
(3) The connecting member 5 described in (1) or (2) is characterized in that the protrusion 1 is formed at the axial center of the circular outer periphery of the first connecting piece 6.
Since the thickness of the first connecting piece 6 is made thin, the cross-sectional area of the mold flow path through which the molten PPS flows is reduced, and the fluidity of the molten PPS during injection molding is reduced. Therefore, when trying to mold the first connecting piece 6 thinly, there was a problem in that a weld occurs at the position where the molten PPS joins. In particular, since the molten PPS flowing along the inner wall of the mold merged at the axial center position of the circular outer periphery, a weld was generated near the axial center position of the circular outer periphery of the first connecting piece 6. . When welding occurs, there is a risk that the clamping strength will decrease.
In the connecting member 5 of (3), since the protruding part 1 is formed at the axial center position of the circular upper outer periphery of the first connecting piece 6, the cross section becomes larger by the protruding part 1, and the melted Since PPS flows easily and molten PPS does not flow in from both sides, welds are not formed and there is no risk of deterioration of clamp strength.

(4) In the connecting member 5 described in any one of the connecting members described in (1) to (3), the first engaging pawl (the first locking receiving portion 64 ) is engaged with the second engaging claw (second locking receiving portion 75) formed on the second connecting piece 7, whereby the first connecting piece 6 and the second connecting piece 7 are engaged. It is characterized in that the contact portion 64a engaged by the first engagement claw has an arcuate shape, and the contact portion 75a engaged by the second engagement claw has a tapered shape.
The connecting member 5 made of PPS is 1.5 times less likely to deform than the connecting member 5' made of PVDF. Therefore, when attempting to engage the first engaging pawl and the second engaging pawl, stress concentration occurs on the first engaging pawl, causing a problem that the engaging pawl may be damaged.
In the connecting member 5 of (4), the contact portion 64a engaged by the first engagement claw is arcuate, and the contact portion 75a engaged by the second engagement claw is tapered. Since the contact portion 75a of the second engaging pawl that the first engaging pawl engages has a tapered shape, the force applied to the first engaging pawl acts in a direction that elastically deforms the first connecting piece 6. , damage to the first engaging claw can be prevented.
Further, the first engaging pawl and the second engaging pawl always contact each other at a point, and the point at which stress is concentrated changes, so that damage to the first engaging pawl due to stress concentration can be prevented.

Although the embodiments of the present invention have been described above, the present invention is not limited to this embodiment and can be applied in various ways.
For example, in this embodiment, the second connecting piece 7 is not provided with the protruding portion 1, but the second connecting piece 7 may be provided with a protruding portion.
Furthermore, in this embodiment, the engaging portion of the first engaging pawl has an arc shape, and the engaging portion of the second engaging pawl has a tapered shape. It may have a tapered shape, and the portion that the second engaging claw engages with may have an arc shape. Furthermore, the portion that the first engaging pawl engages may have a circular arc shape, and the portion that the second engaging pawl engages may have a circular arc shape.

1 Projection portion 5 Connecting member 6 First connecting pieces 61, 62 Thin wall portion 64 First locking receiver 64a Contact portion 7 Second connecting piece 75 Second locking receiver 75a Contact portion

Claims (10)

a first connection device having a first connection portion, a second connection device having a second connection portion, an annular seal member disposed between the first connection portion and the second connection portion, and the annular seal member A connecting member that connects the first connecting portion and the second connecting portion via the connecting member, the connecting member includes a first connecting piece and a second connecting piece, and the first connecting piece and the second connecting piece In a fluid device connection system used for controlling a chemical solution, the fluid device connection system has a rotating connection part at one end of the piece, and a connection member in which the first connection part and the second connection part have a circular outer shape,
The material of the first connection part, the second connection part, and the annular seal member is a fluororesin;
The material of the connecting member can be selected from either a fluororesin material or a PPS material;
The connecting member is an injection molded product, and the shape is different between the fluororesin material and the PPS material;
When using the PPS material for the first connecting piece and the second connecting piece, the thickness of at least a portion of at least one of the outer wall or the cylinder is smaller than when using the fluororesin material. is formed thinly,
A fluid device connection system featuring: The fluid device connection system according to claim 1,
Regarding the first connecting piece and the second connecting piece, when the PPS material is used, the wall thickness of at least a portion of at least one of the outer wall or the cylinder is greater than when the fluororesin material is used. is formed thin in order to be able to elastically deform when the first connecting portion and the second connecting portion thermally expand;
A fluid device connection system featuring: The fluid device connection system according to claim 1 or 2,
a protrusion is formed at the axial center of the circular outer periphery of the first connecting piece;
The protruding portion extends only in the circumferential direction of the first connecting piece;
A fluid device connection system featuring: The fluid device connection system according to claim 1,
The reduction rate of the wall thickness of the PPS material relative to the fluororesin material is greater in the cylinder than in the outer wall;
A fluid device connection system featuring: The fluid device connection system according to claim 1 or 4 ,
a protrusion is formed at the axial center of the circular outer periphery of the first connecting piece;
A fluid device connection system featuring: The fluid device connection system according to claim 1 or claim 5 ,
The first connecting piece is approximately U-shaped with an opening, and engages with the second connecting piece over 180 degrees of the entire circumference of the first connecting part and the second connecting part;
A fluid device connection system featuring: In any one of the fluid device connection systems according to claims 1 to 6 ,
By engaging the first engaging claw formed on the first connecting piece and the second engaging claw formed on the second connecting piece, the first connecting piece and the second connecting piece are connected. to be engaged;
The engaging portion of the first engaging claw has an arc shape, and the engaging portion of the second engaging claw has a tapered shape.
A fluid device connection system featuring: In any one of the fluid device connection systems according to claims 1 to 7 ,
The material of the first connection part and the second connection part is PFA, and the fluororesin material is PVDF;
A fluid device connection system featuring: In any one of the fluid device connection systems according to claims 1 to 8 ,
Being able to prevent a decrease in sealing force due to thermal deformation,
A fluid device connection system featuring: A connection member used in any one of the fluid device connection systems according to claims 1 to 9 .

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