JP7341104B2 - Anisotropic conductive connector and its manufacturing method - Google Patents

Description

The present invention relates to an anisotropically conductive connector and a method for manufacturing the same.

Conventionally, in order to connect electronic devices, a sheet-shaped pressure contact type connector (hereinafter referred to as an anisotropic conductive sheet) that connects fine electrodes to each other has been used. Generally, an anisotropic conductive sheet has a plurality of conductive parts and an insulating part that insulates the conductive parts from each other, and is placed between the connection terminal of a first device and the connection terminal of a second device to electrically connect them. Connect to. Patent Document 1 describes a method for manufacturing an anisotropic conductive sheet, in which a plurality of sheets each having metal wires arranged in parallel are laminated at a certain angle to the substrate so that the metal wires are parallel to each other. A method of cutting a metal wire at a predetermined width parallel to the substrate surface and across the metal line is disclosed.

An example of a combination of a first device and a second device is that the first device is a product such as a circuit board or a semiconductor device, and the second device is an inspection electronic device that inspects the product. The metal terminals (electrode terminals) of the product are not limited to being placed on a flat surface, but are placed deep in the recess of the resin mold body, such as a mating mechanical connector (male/female connector, Micro-CN). It may also be a recessed electrode placed at a location. In the latter case, the anisotropically conductive sheet that electrically connects the product and the test electronic device is required to have protruding electrodes with a height that can reach the recessed electrodes of the product. Patent Document 2 discloses a method of manufacturing an anisotropically conductive sheet having a plurality of convex portions constituting such protruding electrodes.

Japanese Patent Application Publication No. 6-251848 Japanese Patent Application Publication No. 2014-175148

The manufacturing method of Patent Document 2 has a problem in that it is difficult to maintain a constant pitch between the convex portions that constitute the protruding electrodes. Specifically, the pitch between the plurality of convex portions arranged in the plane direction of the main surface (connection surface) of the anisotropic conductive sheet may gradually shift when viewed from one end of the sheet body to the other end. there were. The problem arises from the fact that the sheet body is a film laminate in which two different types of resin films are repeated at a predetermined pitch from one end to the other. In other words, when the first resin film constitutes a concave portion (flat portion) and the second resin film constitutes a convex portion, if there is variation in the thickness of each resin film, the difference between one end of the sheet body and the other end Toward this end, the thickness variations accumulate, causing pitch deviations between the concave portions and the convex portions.

The present invention provides an anisotropically conductive connector having a plurality of protrusions containing a plurality of conductive wires at desired positions with high precision, and a method for manufacturing the same.

[1] A resin sheet formed of an elastomer, and a plurality of conductive wires arranged in parallel along a plane formed by the resin sheet inside the resin sheet with their lengths aligned in an arbitrary first direction; Prepare a core sheet with
Obtaining a windowed core sheet by forming a plurality of through windows in the core sheet arranged in a second direction that crosses the first direction when viewed from the top of the core sheet,
A support member that sandwiches the window core sheet from both the front and back sides of the window core sheet is placed along the second direction, straddling the plurality of through windows and covering only a portion of each through window. Install it as shown,
Of the area of the window opening core sheet forming the window frame of each of the through windows, a part of the area that is not covered with the support member is removed, and the area of the window frame of each of the through windows in the first direction is removed. A method for manufacturing an anisotropically conductive connector, the method comprising: obtaining the anisotropically conductive connector with the supporting member by leaving only the extending frame portion.
[2] A support member, and a plurality of probes having protrusions that penetrate from the first surface to the second surface of the support member and protrude from the first surface and the second surface, respectively,
The probe penetrates through the support member and extends through an elastomer covering material protruding from the first surface and the second surface, and through the covering material along the protruding direction of the covering material. a plurality of conductive wires arranged in parallel inside the
An anisotropically conductive connector, wherein the outer shape of each of the covering materials of the plurality of probes is a quadrilateral when viewed from above on the first surface, and the directions of corresponding sides of each of the quadrangles are parallel.

According to the method for manufacturing an anisotropically conductive connector of the present invention, a plurality of protrusions including a plurality of conductive wires can be arranged at desired positions on a connection surface of an anisotropically conductive connector with high accuracy. As a result, an anisotropically conductive connector that can be easily and accurately connected to a device such as a female connector having recessed electrodes is obtained.

FIG. 3 is a cross-sectional view showing how an example of a core sheet is formed. FIG. 3 is a plan view of a core sheet 3. FIG. FIG. 3 is a plan view of a windowed core sheet 5 provided with a through window 4 in which a conductive wire 2 remains. FIG. 3 is a plan view of a windowed core sheet 5 with a through window 4 from which conductive wires 2 have been removed. 5 is a sectional view taken along the line AA in FIG. 4. FIG. FIG. 3 is a cross-sectional view showing how the supporting member 6 is attached to the window core sheet 5. FIG. FIG. 3 is a plan view of the apertured core sheet 5 with the support member 6; 8 is a sectional view taken along the line BB in FIG. 7. FIG. It is a top view which shows how a part of window frame of the penetration window 4 is cut|disconnected by the cutting line L1 and the cutting line L2. 1 is a plan view of an anisotropically conductive connector 10. FIG. 11 is a sectional view taken along the line CC in FIG. 10. FIG. FIG. 2 is a plan view of an anisotropically conductive connector 20. FIG. FIG. 3 is a plan view of a first surface 6a of a support member 6 included in the anisotropically conductive connector 10. FIG. FIG. 2 is a plan view of an example of a female connector. FIG. 2 is a perspective view showing the conductive wires 2 of the plurality of probes Q of the anisotropically conductive connector 20 in contact with each of the plurality of recessed electrodes 102 formed at a constant pitch in the female connector. be.

≪Method for manufacturing anisotropic conductive connector≫
A first aspect of the present invention is a method for manufacturing an anisotropically conductive connector, which includes the following first to fourth steps.
The first step includes a resin sheet formed of an elastomer, and a plurality of conductive wires arranged in parallel in an arbitrary first direction along a plane formed by the resin sheet inside the resin sheet. This is a step of preparing a core sheet having the following.
The second step is a step of obtaining a windowed core sheet by forming in the core sheet a plurality of through windows arranged in a second direction that crosses the first direction in a plan view of the core sheet.
The third step is to move a support member that holds the window core sheet from both the front and back sides of the window core sheet along the second direction, across the plurality of through windows and between each of the through windows. This is the process of attaching it so that only a portion of it is covered.
The fourth step is to remove a part of the region of the window core sheet that is not covered with the support member from among the regions forming the window frame of each of the through windows, and to This is a step of obtaining the anisotropically conductive connector with the support member by leaving only the frame extending in the first direction.

Hereinafter, a detailed explanation will be given with reference to the drawings, but the dimensions in the drawings are different from the actual ones for convenience of explanation. Furthermore, in this specification, the numerical range of "lower limit to upper limit" means a numerical range of "more than or equal to the lower limit and less than or equal to the upper limit" unless otherwise specified. Further, in this specification, the "thickness" of each member is the average value of the thicknesses obtained by observing the cross section of the measurement target using a magnifying observation means such as a digital microscope, and measuring the thickness at five locations.

<First embodiment>
First, an elastomer resin sheet, and a plurality of conductive wires arranged in parallel in a dispersed manner with their lengths aligned in one arbitrary direction along the plane formed by the resin sheet inside the resin sheet. Prepare a core sheet with For example, a core sheet prepared in advance by the following method can be used.

As shown in FIG. 1(a), a sheet made of polyethylene terephthalate (PET) is used as the base sheet V, and a first film of thickness h1 made of an uncured elastomer is placed on one main surface Va of the base sheet V. A resin layer 1 is formed.

The base sheet V is not limited to a PET sheet, and any known resin sheet can be used. The thickness of the base sheet can be, for example, 25 μm to 250 μm from the viewpoint of obtaining sufficient rigidity. A known method is applied to form the uncured first resin layer 1. For example, there is a method of applying uncured resin to one main surface Va of the base sheet V using various coaters. Another method is to continuously apply the uncured elastomer to one main surface Va of the base sheet V fed out from a roll. The uncured state is a state in which curing is incomplete, and includes a semi-cured state.

Examples of the elastomer forming the first resin layer 1 include silicone rubber, urethane rubber, isoprene rubber, ethylene propylene rubber, natural rubber, ethylene propylene diene rubber, and styrene butadiene rubber. Among these, silicone rubber is preferred because it is less susceptible to dimensional changes and warping after curing, has low compression set, and has high heat resistance. The silicone rubber may be either a condensation type or an addition type.

The resin constituting the first resin layer 1 contains known additives, such as catalysts that promote polymerization of resins, crosslinking agents that promote crosslinking between resins, antioxidants, dyes, pigments, fillers, leveling agents, etc. It may be added in an appropriate amount. Further, a diluting solvent may be added to improve the coating properties of the uncured resin.

The thickness h1 of the first resin layer 1 may be thinner than the diameter r1 of a conductive wire to be disposed on one main surface 1a of the resin layer 1 in a later stage, or may be the same as the diameter r1 of the conductive wire or the diameter of the conductive wire. It may be thicker than r1, for example, about 5 μm to 500 μm.
The size of the first resin layer 1 can be, for example, about length x width = 10 mm x 10 mm to 300 mm x 300 mm.

Next, as shown in FIG. 1(b), a plurality of conductive wires 2 are arranged on one main surface 1a of the first resin layer 1 with their lengths aligned in one arbitrary direction. In the illustrated example, the length direction of each conductive wire 2 is aligned in the direction perpendicular to the paper surface. The length directions of the conductive wires 2 are preferably substantially parallel to each other, and more preferably completely parallel.
In this specification, "substantially parallel" means that arbitrary conductive lines are parallel to each other within a range of intersection angle of ±5°.
The pitch (center-to-center distance) p between the conductive lines 2 can be, for example, 10 μm to 100 μm.

A known method is applied to arrange the conductive wire 2 on the main surface 1a of the first resin layer 1. For example, a plurality of conductive wires 2 wound around a bobbin at an arbitrary pitch are attached to the main surface 1a of the first resin layer 1 continuously formed on the base sheet V unrolled from a roll as described above. An example of this method is to unwind the resin from a bobbin and continuously arrange it on the main surface 1a of the first resin layer 1 at a constant pitch. The length of each conductive wire 2 is preferably, for example, from one end of the main surface 1a of the first resin layer 1 to the other end.

The diameter of the conductive wire 2 can be, for example, 5 μm to 50 μm.
The material of the conductive wire 2 may be any conductive substance, and a known conductive wire may be used. Specific examples of conductive substances include metals such as brass, copper, silver, gold, platinum, palladium, tungsten, beryllium copper, phosphor bronze, and nickel-titanium alloys, and carbon materials such as carbon nanotubes and carbon nanotube spun yarn. Can be mentioned.

The conductive wire 2 may have a coating layer that covers the outer periphery of the core wire made of the conductive substance. Examples of the material for the covering layer include gold, silver, nickel, and copper. It is preferable that the material of the core wire and the material of the coating layer are different from each other. Note that the diameter of the conductive wire 2 is the diameter including the coating layer.

The shape of the cross section of the conductive wire 2 in the direction orthogonal to the length direction is not particularly limited, and examples thereof include a substantially circular shape, a substantially elliptical shape, a substantially quadrangular shape, and other polygons. From the viewpoint of obtaining a stable connection, the shape is preferably approximately circular or approximately elliptical. The diameter of the conductive wire 2 is the diameter of the smallest circle including the cross section.
In this specification, the "diameter of the smallest circle" is the average value of the diameters of the smallest circle including each cross section of 30 measurement objects measured using a magnifying observation means such as a measuring microscope.

After each conductive wire 2 is arranged at an arbitrary interval on one main surface 1a of the first resin layer 1, the second resin layer 1 is laminated so as to cover each conductive wire 2. Specifically, as shown in FIG. 1(c), a second resin layer 1 made of an uncured elastomer is formed on the main surface of another base sheet V, and this is then combined with the first resin layer 1. The first resin layer 1 and the second resin layer 1 are hardened by pressing the resin layer over one main surface 1a of the resin layer 1.

As shown in FIG. 1(d), a laminate obtained by integrating the first resin layer 1 and the second resin layer 1 obtained above can be used as a core sheet.
Alternatively, a core sheet may be formed by stacking a plurality of the laminates. Further, after laminating the uncured second resin layer 1 on one main surface 1a of the first resin layer 1, the second resin layer 1 is laminated on the main surface of the second resin layer 1 on the opposite side to the first resin layer 1. By arranging a plurality of conductive wires 2 in the same manner and laminating the third resin layer 1 so as to cover these conductive wires 2, a core sheet in which conductive wires 2 are laminated in two stages may be obtained. Similarly, a core sheet in which three or more layers of conductive wires 2 are stacked may be obtained.
The number of conductive wires 2 in each stage arranged in the core sheet may be the same or different. It is preferable that the conductive wires 2 arranged in the core sheet are aligned in the length direction.

The shape of the core sheet in plan view is not particularly limited, and may be a rectangular core sheet 3 as shown in FIG. 2, for example. The size of the rectangular core sheet 3 can be, for example, about 0.8 mm to 10 mm in length and 1 mm to 30 mm in width.

The plurality of conductive wires 2 arranged inside the core sheet 3 are distributed and arranged in parallel along the short sides of the core sheet 3.
For the convenience of the following explanation, the direction parallel to the short side of the core sheet 3 is defined as the first direction (the X-axis direction in FIG. 2).

Next, as shown in FIG. 3, in a plan view of the core sheet 3, a plurality of through windows 4 are formed in the core sheet 3, arranged in a second direction (Y-axis direction) that crosses the first direction. Open core sheet 5 is obtained. Each through window 4 is formed by hollowing out each resin layer 1 constituting the core sheet 3 in the stacking direction (the depth direction of the paper plane in FIG. 3), and the resin layer 1 surrounding each through window 4 forms a frame of the through window. It constitutes part 4a.

The sizes of the rectangular through-holes 4 formed in the window core sheet 5 may be the same or different, but are preferably the same.
The short sides of each through window 4 are preferably parallel to each other along the Y-axis direction, and the long sides of each through window 4 are preferably parallel to each other along the X-axis direction. Further, it is preferable that the straight line passing through the center of each through window 4 be parallel to the Y-axis direction.

The length of the through window 4 in the X-axis direction is shorter than the length of the core sheet 3 in the X-axis direction, and can be, for example, about 0.5 mm to 5 mm.
The length of the through-hole window 4 in the Y-axis direction is shorter than the length calculated by the formula: (length of the core sheet 3 in the Y-axis direction ÷ number of through-hole windows 4 arranged in the Y-axis direction), for example, 0. It can be about .1 mm to 1 mm.
The width of the frame portion 4a of the through window 4 along the X-axis direction can be, for example, about 0.05 mm to 0.2 mm.

A method for forming the through window 4 in the core sheet 3 includes, for example, a method of irradiating a laser beam so as to trace the window frame of the through window 4 and cutting off the resin layer 1 inside the window frame. Normally, laser light that can burn resin does not have the energy necessary to burn out metal, so if the conductive wire 2 is made of metal, as shown in FIG. A plurality of conductive wires 2 extending in the first direction may remain in a stretched state.

Since the conductive wire 2 exposed in the through window 4 is unnecessary, it is removed as shown in FIG. Methods for cutting include, for example, irradiating the metal wire with a laser beam that can burn it out, chemically etching it by contacting it with a solution that dissolves the metal wire, and physically cutting it with a knife. etc.

Another method for forming the through window 4 in the core sheet 3 is to press a hollow die with a blade at the tip to a predetermined position of the core sheet 3 and physically cut out the corresponding part of the core sheet 3. A method of forming the through window 4 by piercing can also be exemplified. According to this method, the resin layer 1 and the conductive wire 2 can be removed by a single punching process, so it may be simpler than the stepwise removal method using laser irradiation described above.

The size and shape of each through-hole window 4 formed in the core sheet 3 can be independently set arbitrarily, but as will be described later, since protrusions can be formed at equal pitches, they are rectangular or quadrilateral with the same size. It is preferable. At this time, at least one of the four sides of each through window 4 is preferably parallel to the outer edge 1z of the core sheet 3.

In the example of FIG. 4, a plurality of identical rectangular through-holes 4 are provided at a constant pitch (distance between centers) P1 along the second direction (Y-axis direction). The two short sides of each through window 4 are parallel to the outer edge 1z of the core sheet 3 along the second direction. A frame portion 4a formed of two long sides of each through window 4 is parallel to the first direction of the core sheet 3.

FIG. 5 is a cross-sectional view taken along the line AA in FIG. 4. Inside the frame portion 4a, a plurality of conductive wires 2 along the first direction (X-axis direction) are distributed and arranged in parallel.

Next, as shown in FIG. 6, a plurality of support members 6 that sandwich the window core sheet 5 from both the front surface 5a and the back surface 5b of the window core sheet 5 are attached to a plurality of support members 6 along the second direction (Y direction). It is attached so as to straddle the through windows 4 and cover only a part of each through window 4.
In the illustrated example, the first support member 6A and the second support member 6B are arranged to open the window from the front surface 5a and the back surface 5b of the window core sheet 5, which has a rectangular outer shape in plan view. A core sheet 5 is sandwiched between them.

In a plan view of the window core sheet 5 shown in FIG. 7, the first support member 6A and the second support member 6B overlap and appear as a band-shaped support member 6. When viewed in the second direction (Y-axis direction), the length of the support member 6 is longer than the window opening core sheet 5, and when viewed in the first direction (X-axis direction), the length of the support member 6 is longer than the window opening core sheet 5. It is shorter than the core sheet 5 and shorter than each through window 4.

The surface of the first support member 6A facing the surface 5a of the window core sheet 5 is flat. On the other hand, a plurality of concave portions 6x and a plurality of convex portions 6y are alternately formed along the second direction on the surface of the second support member 6B facing the back surface 5b of the windowed core sheet 5. The pitch P2 of each convex portion 6y in the second direction is the same as the pitch P1 between the through windows 4. Further, the width of each convex portion 6y in the second direction is the same as the width of each through window 4 in the second direction. The height of each convex portion 6y is the same as the thickness of the window core sheet 5.

FIG. 8 is a sectional view taken along the line BB in FIG. Each convex portion 6y of the second support member 6B is fitted into each through window 4 of the window core sheet 5. The top surface of each convex portion 6y of the second support member 6B is in close contact with the first support member 6A. Further, a part of the frame portion 4a of each through window 4 along the first direction is fitted into each recess 6x. Each through window 4 is divided into two regions by each convex portion 6y fitted near the center.

Next, as shown in FIG. 9, a part of the area that is not covered with the support member 6 is removed from the area forming the window frame of each through window 4 of the window opening core sheet 5, and the area of each through window 4 is removed. By leaving only the frame portion 4a extending in the first direction (X-axis direction) of the window frame, an anisotropically conductive connector 10 with a support member 6 shown in FIG. 10 is obtained.

There are no particular restrictions on the method for removing the unnecessary window frame area, and examples include a method of pressing a knife against the cutter or irradiating with a laser along the cutting line L1 and the cutting line L2 in FIG. 9. The cutting line L1 and the cutting line L2 are each along the length direction of the support member 6, and are parallel to the second direction (Y-axis direction).

The lengths in the first direction of the respective frame portions 4a extending in the first direction remaining after removing unnecessary window frame regions may be the same or different. The length is not particularly limited, and can be, for example, about 0.1 mm to 5 mm.

In the anisotropically conductive connector 10 shown in FIG. 10, a protrusion J consisting of a plurality of frame portions 4a extending in the negative direction of the X-axis of the support member 6 protrudes, and A protrusion J consisting of a plurality of frame parts 4b extending in the positive direction protrudes. Each frame portion 4a and each frame portion 4b located in a straight line along the X axis (first direction) are a continuous member passing through the support member 6, and constitute a probe Q. FIG. 11 is a cross-sectional view taken along the line CC in FIG. 10, in which the probe Q passes through the support member 6.

As shown in FIG. 10, one end of a plurality of conductive wires 2 is exposed at one end E1 of each probe Q, and a plurality of conductive wires 2 are also exposed at the other end E2 of each probe Q. The other end of wire 2 is exposed. Further, as shown in FIG. 11, inside each probe Q, a plurality of conductive wires 2 penetrating from one tip E1 to the other end E2 are arranged in parallel.

By removing the elastomer material (covering material 7) at one end E1 and the other end E2 of each probe Q, one end E1 and the other end of each probe Q are removed, as shown in FIG. In the portion E2, each conductive wire 2 may be made to protrude from the frame portion 4a and the frame portion 4b. As a method for making each conductive wire 2 protrude, for example, a method of irradiating a laser beam that can burn the elastomer material but cannot burn each conductive wire 2 can be mentioned.

≪Anisotropic conductive connector with support member≫
A second aspect of the present invention includes a support member and a plurality of probes having protrusions that penetrate from the first surface to the second surface of the support member and protrude from the first surface and the second surface, respectively, The probe penetrates through the support member and extends through an elastomer covering material protruding from the first surface and the second surface, and through the covering material along the protruding direction of the covering material. a plurality of conductive wires arranged in parallel inside the probe, and the outer shape of each of the covering materials of the plurality of probes is square in plan view of the first surface, and It is an anisotropic conductive connector in which the corresponding sides are parallel.
The anisotropically conductive connector with a support member according to this aspect can be manufactured, for example, by the manufacturing method according to the first aspect.

The anisotropic conductive connector 10 shown in FIG. 10 includes a support member 6 and a protrusion J that penetrates from the first surface 6a to the second surface 6b of the support member 6 and projects from the first surface 6a and the second surface 6b. A plurality of probes Q are provided.

The probe Q penetrates the support member 6 and is coated with an elastomer covering material 7 that protrudes from the first surface 6a and the second surface 6b, and along the protruding direction of the covering material 7 (the X-axis direction in FIG. 12). It has a plurality of conductive wires 2 that penetrate the material 7 and are arranged in parallel and distributed inside the covering material 7.
Furthermore, in a plan view of the first surface 6a, the outer shape of each covering material 7 included in the plurality of protrusions J is a quadrangular, and the directions of the corresponding sides of each quadrangular are parallel.

FIG. 13 is a partially enlarged plan view of the first surface 6a of the support member 6 of the anisotropic conductive connector 10.
The outer shape of the covering material 7 of the first protrusion J1 is a rectangle having a short side 7a and a long side 7b. The rectangular outer shape is in close contact with the first surface 6a without any gaps. The ends of a plurality of conductive wires 2 are exposed within the rectangle. Similarly, the outer shape of the covering material 7 of the second protrusion J2 adjacent to the first protrusion J1 is a rectangle having a short side 7a and a long side 7b, and the rectangular outer shape has no gap on the first surface 6a. It's in close contact. Here, the rectangular short side 7a of the first protrusion J1 and the rectangular short side 7a of the second protrusion J2 are sides that correspond to each other, and the directions of these sides are parallel to each other. Further, the long side 7b of the rectangle of the first protrusion J1 and the long side 7b of the rectangle of the second protrusion J2 are sides that correspond to each other, and the directions of these sides are also parallel to each other.

As described above, by fixing the covering material 7 of each protrusion J protruding from the first surface 6a side of the support member 6 in a state in which the outer shape of the covering material 7 is aligned with each other, each protrusion J is attached to the Micro-CN It can be easily and accurately contacted with the electrode terminals of female connectors such as. Although not shown, the outer shape of the covering material 7 of each protrusion J protruding from the second surface 6b side of the support member 6 is also fixed in the same direction, and the protrusion J on the first surface side It can be used in the same way as .

When the first surface 6a of the support member 6 of the anisotropic conductive connector 10 is viewed from above, the covering material 7 of each protrusion J is arranged in a straight line along the Y-axis direction, which is the length direction of the support member 6. has been done. Moreover, the pitch P1 (distance between centers) of each protrusion J is constant. Moreover, the outer shape of the covering material 7 of each protrusion J is the same. With these structures, each protrusion J can be brought into easier and more accurate contact with the electrode terminal of a female connector such as Micro-CN. Although not shown, the pitch of each protrusion J protruding from the second surface 6b side of the support member 6, the arrangement and outer shape of the covering material 7 of each protrusion J are also the same as those on the first surface 6a side.

The anisotropic conductive connector of this embodiment has a plurality of conductive wires extending from the surface of the covering material 7 at the tip of each protrusion J in the protrusion direction (X-axis direction), like an anisotropic conductivity connector 20 shown in FIG. 2 may be prominent. The protruding conductive wire 2 is preferable because it facilitates contact with the electrode terminal of another device.

≪How to use anisotropic conductive connector≫
FIG. 14 is a top view of Micro-CN, which is an example of a female connector. A groove 101 is formed in the center along the Y-axis direction, and a plurality of electrode terminals 102 are provided at a constant pitch P1 along the banks on both sides of the groove. The R-shaped contact surface of the electrode terminal 102 made of a leaf spring is located near the top of the bank, but is provided as a recessed electrode in a recess that is one step down from the surface of the resin mold 103 that forms the bank.

FIG. 15 schematically shows a state in which a plurality of conductive wires 2 at the tip of the probe Q of the anisotropically conductive connector 20 are brought into contact with the contact surface of the electrode terminal 102 and electrically connected. It is an enlarged perspective view. For a plurality of probes 102 arranged at a constant pitch P1 along the Y-axis direction, each probe Q is provided at a constant pitch P1 on the first surface 6a of the support member 6 of the anisotropically conductive connector 20. The conductive wire 2 can be brought into contact easily and accurately.
Each of the probes Q protruding from the second surface 6b of the support member 6 of the anisotropically conductive connector 20 at a constant pitch P1 can be connected to another electrode terminal such as a testing device.

The supporting member 6 of the anisotropically conductive connectors 10 and 20 described above has a band-like or rectangular outer shape when viewed from the first surface 6a side, but the outer shape of the supporting member 6 is not limited to this. Alternatively, it may be a plate-shaped or block-shaped member with a wider area. Further, the support member 6 may be held by another holder.

V... Base sheet, 1... Resin layer, 1a... One main surface, 2... Conductive wire, 3... Core sheet, 4... Penetration window, 4a... Frame portion, 4b... Frame portion, 5... Window opening core sheet, 5a...Front surface, 5b...Back surface, 6...Supporting member, 7...Coating material, Q...Tip, J...Protrusion part, 10...Anisotropically conductive connector, 20...Anisotropically conductive connector, 101...Groove, 102... Electrode terminal, 103...resin mold

Claims (2)

A core having a resin sheet formed of an elastomer, and a plurality of conductive wires arranged in parallel inside the resin sheet, along a plane formed by the resin sheet, with the length direction aligned in an arbitrary first direction. Prepare the sheet,
Obtaining a windowed core sheet by forming a plurality of through windows in the core sheet arranged in a second direction that crosses the first direction when viewed from the top of the core sheet,
A support member that sandwiches the window core sheet from both the front and back sides of the window core sheet is placed along the second direction, straddling the plurality of through windows and covering only a portion of each through window. Install it as shown,
Of the area of the window opening core sheet forming the window frame of each of the through windows, a part of the area that is not covered with the support member is removed, and the area of the window frame of each of the through windows in the first direction is removed. A method for manufacturing an anisotropically conductive connector, the method comprising: obtaining the anisotropically conductive connector with the supporting member by leaving only the extending frame portion. comprising a support member and a plurality of probes having protrusions that penetrate from the first surface to the second surface of the support member and protrude from the first surface and the second surface, respectively;
The probe penetrates through the support member and extends through an elastomer covering material protruding from the first surface and the second surface, and through the covering material along the protruding direction of the covering material. a plurality of conductive wires arranged in parallel inside the
An anisotropically conductive connector, wherein the outer shape of each of the covering materials of the plurality of probes is a quadrilateral when viewed from above on the first surface, and the directions of corresponding sides of each of the quadrangles are parallel.

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