JP7347386B2 - Electrostatic induction adsorption conveyor and electrostatic induction adsorption transfer device - Google Patents

Description

The present invention relates to an electrostatic induction suction type conveyor for attracting and conveying an object using electrostatic force caused by electrostatic induction, and an electrostatic induction suction type conveyor equipped with such an electrostatic induction suction type conveyor. This invention relates to an induction suction type conveyance device.

2. Description of the Related Art Conventionally, conveyance devices are known that use electrostatic force caused by electrostatic induction to attract and convey objects to be conveyed. As one such conveyance device, Patent Document 1 discloses that static electricity is applied to an auxiliary static induction layer provided on the lower surface of the conveyance table to generate static electricity on an object to be conveyed placed on the conveyance table. An apparatus is disclosed that generates a force to attract an object to a transport table and transport the object in a rotational direction.

However, it is known that when electrostatic force is used to adsorb an object to be transported, the adsorption force decreases over time due to particles such as ions in the atmosphere being adsorbed to the transport surface.

For this reason, Patent Document 2 discloses an electrostatic holding device that can generate an electrostatic force of a certain level or more by alternately applying positive and negative voltages of opposite polarity to electrodes. According to this electrostatic holding device, by switching the polarity of the applied voltage, charges of opposite polarity are instantaneously induced on the surface of the conveyed object, so that the original electrostatic force is restored.

Japanese Patent Application Publication No. 2013-187535 Japanese Patent Application Publication No. 2004-120921

Here, when the technology described in Patent Document 2 is applied to the conveying device described in Patent Document 1 and configured to switch the polarity of the voltage applied to the auxiliary static induction layer, the timing for switching the polarity of the voltage is determined. Since the adsorption force becomes 0, the object to be transported during transport may be misaligned or fall from the transport table.

The present invention solves the above-mentioned problems, and provides an electrostatic induction suction conveyance system that can suppress the displacement and fall of the conveyed object during conveyance, and also suppress the decrease in the suction force using electrostatic force. It is an object of the present invention to provide an electrostatic induction suction type conveying device including a body and such an electrostatic induction suction type conveying body.

The electrostatic induction suction type conveyor of the present invention is an electrostatic induction suction type conveyance body for adsorbing and conveying an object to be conveyed using electrostatic force caused by electrostatic induction, and comprising:
an insulating section made of an insulating material and having a conveying surface in contact with the object to be conveyed;
a conductive part that moves together with the insulating part when the object to be transported is transported, and to which a voltage is applied to obtain the electrostatic force;
Equipped with
A plurality of the conductive parts are provided in a manner that they are not electrically connected to each other along the transport direction of the object to be transported.

The electrostatic induction adsorption type conveyance device of the present invention is
The above-mentioned electrostatic induction adsorption type conveyor,
a drive unit that drives the electrostatic induction attraction type conveyor;
a supply unit that supplies the object to be transported onto the transport surface of the insulating part of the electrostatic induction suction type transporter;
a discharge unit that discharges the conveyed object on the conveyance surface;
a voltage applying section that applies a voltage to the conductive section;
a control section that controls voltage application by the voltage application section for each of the plurality of conductive sections;
It is characterized by having the following.

According to the electrostatic induction suction conveyor of the present invention, the conductive parts are provided in plurality along the conveyance direction of the object to be conveyed in a manner that they are not electrically connected to each other, so that the voltage is applied to each conductive part. The application of can be controlled. Therefore, for example, a voltage may be applied to a conductive part in an area where an object to be transported is present, and a voltage applied to a conductive part in an area where there is no object to be transported may be switched to zero, or the applied voltage may be changed to zero. By switching the polarity, it is possible to suppress the position shift and fall of the conveyed object during conveyance, and also to suppress the decrease in the attraction force using electrostatic force.

Further, according to the electrostatic induction suction type conveyance device of the present invention, the control unit controls the voltage application by the voltage application unit to each of the plurality of conductive parts, so that, for example, when there is an object to be conveyed during conveyance. By applying a voltage to the conductive parts in the area and setting the applied voltage to zero to the conductive parts in the area where there is no object to be transported, or by switching the polarity of the applied voltage, it is possible to It becomes possible to suppress a decrease in the attraction force using electrostatic force while suppressing the displacement and falling of the object.

FIG. 1 is a diagram schematically showing the configuration of an electrostatic induction suction type conveyance device in a first embodiment. FIG. 2 is a diagram schematically showing a detailed configuration of a conductive part and a voltage application part of an electrostatic induction attraction type conveyor included in an electrostatic induction attraction type conveyance device. FIG. 2 is a perspective view showing the external shape of a multilayer ceramic capacitor, which is an example of an object to be transported. FIG. 2 is a cross-sectional view schematically showing the configuration of an electrostatic induction adsorption type carrier. A state in which a voltage is applied so that one of the first electrode and the second electrode is charged with a positive charge and the other is charged with a negative charge, and the multilayer ceramic capacitor that is the object to be transported is attracted. It is a diagram. FIG. 6 is a diagram showing an example of a change in voltage over time when switching the polarity of the voltage applied to the first electrode and the second electrode. (a) is a diagram showing the change in adsorption force over time when the polarity of the voltage applied to the conductive part is switched every 2 minutes, and (b) is a diagram showing the change in adsorption force over time when the polarity of the voltage applied to the conductive part is changed every 2 minutes. It is a figure showing the time change of adsorption force in case. FIG. 7 is a diagram schematically showing a detailed configuration of a conductive part and a voltage application part of an electrostatic induction adsorption type conveying body in a second embodiment. FIG. 7 is a schematic diagram showing the overall configuration of a conveyance device using an electrostatic induction suction type conveyance body in a third embodiment. It is a figure which shows typically the external shape of the electrostatic induction attraction type conveyance body in 4th Embodiment. FIG. 7 is a diagram showing an example of a configuration of an electrostatic induction suction type conveyor according to a fourth embodiment in which a voltage is applied from a power source to a conductive part via a voltage application terminal. FIG. 6 is a side view for explaining a method of contact between a first voltage application terminal and a first electrode, and a method of contact between a second voltage application terminal and a second electrode. A configuration example of the electrostatic induction attraction type conveyor according to the fourth embodiment, in which voltage is applied from a plurality of power supplies to each of a plurality of conductive parts via a voltage application terminal provided for each of the plurality of conductive parts. FIG. It is a figure which shows typically the external shape of the electrostatic induction adsorption type conveyance body in 5th Embodiment. It is a figure which shows typically the external shape of the electrostatic induction attraction type conveyance body in 6th Embodiment. FIG. 3 is a cross-sectional view showing a schematic configuration of an electrostatic induction suction type conveyor in which a first insulating part is provided with a housing hole for housing an object to be conveyed. A schematic diagram of an electrostatic induction suction type conveyor in which a first insulating part, a conductive part, and a second insulating part are provided with suction holes for suctioning and holding the conveyed object from the side opposite to the conveying surface. FIG.

Embodiments of the present invention will be shown below, and features of the present invention will be specifically explained.

<First embodiment>
FIG. 1 is a diagram schematically showing the configuration of an electrostatic induction suction type conveyance device 100 according to the first embodiment. FIG. 2 is a diagram schematically showing the detailed configuration of the conductive section 12 of the electrostatic induction attraction type conveyor 1 and the voltage application section 5 included in the electrostatic induction attraction type conveyance device 100.

The electrostatic induction suction type conveyance device 100 in the first embodiment includes an electrostatic induction suction type conveyance body 1, a drive section 2, a supply section 3, a discharge section 4, a voltage application section 5, and a control section 6. Equipped with. The electrostatic induction suction type conveyance device 100 in this embodiment further includes a processing section 7 , an imaging section 8 , and an alignment section 9 .

The objects 20 to be transported by the electrostatic induction adsorption type transport device 100 are, for example, electronic components such as multilayer ceramic capacitors, inductors, thermistors, and module boards, and semi-finished products of electronic components that are in the process of being manufactured. However, the object to be transported 20 is not limited to electronic components or semi-finished products.

FIG. 3 is a perspective view showing the external shape of a multilayer ceramic capacitor 20X, which is an example of the object 20 to be transported. As shown in FIG. 3, the multilayer ceramic capacitor 20X includes a ceramic body 21, a first external electrode 22a, and a second external electrode 22b.

The multilayer ceramic capacitor 20X has a hexahedral shape. That is, the multilayer ceramic capacitor 20X has a first end face 23a and a second end face 23b facing each other, a first main face 24a and a second main face 24b facing each other, and a first side face 25a facing each other. and a second side surface 25b. The first external electrode 22a and the second external electrode 22b contain, for example, a conductive metal or alloy such as Ni, Cu, Ag, Pd, Pt, Fe, Ti, Cr, Sn, or Au. There is.

There are no particular restrictions on the shape of the electrostatic induction suction conveyor 1 as long as it can be used in the electrostatic induction suction conveyance device 100 to attract and convey the object 20 to be conveyed. The electrostatic induction adsorption type conveyor 1 in this embodiment has a rotatable circular table shape in order to convey the conveyance object 20 in the rotational direction. The diameter of the electrostatic induction attraction type carrier 1 is, for example, 100 mm or more and 1000 mm or less.

FIG. 4 is a cross-sectional view schematically showing the structure of the electrostatic induction adsorption type carrier 1. As shown in FIG. In this embodiment, the electrostatic induction attraction type carrier 1 includes a first insulating section 11 , a conductive section 12 , and a second insulating section 13 . However, a configuration may be adopted in which the second insulating section 13 is omitted.

The first insulating section 11 is made of an insulating material and has a conveyance surface 110 that comes into contact with the object to be conveyed 20 . In this embodiment, the object to be transported 20 is placed on the transport surface 110 and is attracted to the transport surface 110 by electrostatic force caused by electrostatic induction, as will be described later. The term "on the conveyance surface 110" means above the conveyance surface 110, not upward in the vertical direction, and the direction does not matter. In this embodiment, the first insulating section 11 is made of a transparent insulating material, for example, a transparent glass material such as borosilicate glass, quartz glass, or float glass, or a transparent resin material such as polyethylene terephthalate resin or acrylic resin.

In order to improve the adsorption force of the conveyed object 20, the thickness of the first insulating section 11 in the stacking direction is preferably thin, and is, for example, 0.001 mm or more and 5 mm or less.

In this embodiment, as will be described later, the object to be transported 20 placed on the electrostatic induction suction type transporter 1 is captured by the imaging unit 8 from the side opposite to the transport surface 110 for visual inspection during transport. Imaged. Therefore, the first insulating section 11 has a transmittance that allows the inspection light irradiated when inspecting the conveyed object 20 to pass therethrough. In order to improve the accuracy of appearance inspection, it is preferable that the transmittance is high.

Note that if the object to be transported 20 is transported only without performing an appearance inspection, the first insulating section 11 does not need to have a transmittance that allows the inspection light to pass therethrough. In that case, as the constituent material of the first insulating section 11, a resin material such as polyimide, a ceramic material, or the like can be used.

The conductive part 12 moves together with the first insulating part 11 when the object to be transported 20 is transported, and a voltage having a potential difference from the ground is applied to the conductive part 12 in order to obtain an electrostatic force. The conductive part 12 in this embodiment is located between the first insulating part 11 and the second insulating part 13, and has two electrodes, a first electrode 121 and a second electrode 122.

In this embodiment, the first electrode 121 and the second electrode 122 are transparent electrodes. The transparent electrode is made of, for example, indium tin oxide (ITO), antimony-doped tin oxide (ATO), titanium oxide, graphene, or the like. The first electrode 121 and the second electrode 122 have a transmittance that allows the inspection light to pass therethrough. In order to improve the accuracy of appearance inspection, it is preferable that the transmittance is high. Furthermore, an insulator is provided between the first insulating portion 11 and the second insulating portion 13 in a portion where the first electrode 121 and the second electrode 122 are not provided. In this embodiment, the insulator is made of a transparent insulating material, such as a transparent glass material such as borosilicate glass, quartz glass, or float glass, or a transparent resin material such as polyethylene terephthalate resin or acrylic resin.

However, if the object to be transported 20 is only transported without performing a visual inspection, the first electrode 121 and the second electrode 122 do not need to have a transmittance that allows the inspection light to pass through. . In that case, the first electrode 121 and the second electrode 122 can be made of, for example, gold foil, silver foil, copper foil, aluminum foil, or conductive tape. Furthermore, the insulator provided between the first insulating part 11 and the second insulating part 13 in a part where the first electrode 121 and the second electrode 122 are not provided is also exposed to the inspection light. It is not necessary to have a transmittance that allows the light to pass through.

Note that when the first insulating part 11 and the second insulating part 13 are each formed into layers, the first electrode 121 and the second electrode 122 are formed as the same layer on the second insulating part 13. However, the first electrode 121 and the second electrode 122 may be formed as different layers.

In order to improve the accuracy of visual inspection of the object to be transported 20, the thickness of the conductive portion 12 in the stacking direction is preferably thin, and is, for example, 1 nm or more and 100 μm or less.

The second insulating portion 13 is made of an insulating material. In this embodiment, the second insulating portion 13 is made of a transparent insulating material, for example, a transparent glass material such as borosilicate glass, quartz glass, or float glass, or a transparent resin material such as polyethylene terephthalate resin or acrylic resin. . The second insulating section 13 has a transmittance that allows the inspection light to pass therethrough. In order to improve the accuracy of appearance inspection, it is preferable that the transmittance is high. In both cases where visible light is used as the inspection light and when light other than visible light is used, the transmittance, which is the rate at which light passes through the electrostatic induction adsorption conveyor 1, is 40% or more and 100%. It is preferable that it is below.

However, if the object 20 to be transported is only transported without performing a visual inspection, the second insulating section 13 does not need to have a transmittance that allows the inspection light to pass therethrough. In that case, as a constituent material of the second insulating section 13, a resin material such as polyimide, a ceramic material, or the like can be used.

The thickness of the second insulating portion 13 in the stacking direction is, for example, 1 mm or more and 20 mm or less.

A plurality of conductive parts 12 are provided along the transport direction of the transport target 20 in a manner that they are not electrically connected to each other. In this embodiment, as the electrostatic induction suction type conveyor 1 having a circular table shape rotates, the conveyance object 20 placed thereon is conveyed. Therefore, the direction in which the object to be transported 20 is transported is the direction in which the electrostatic induction adsorption type transport body 1 rotates. In this embodiment, as shown in FIG. 2, along the rotation direction, the first conductive part 12a, the second conductive part 12b, the third conductive part 12c, the fourth conductive part 12d, and the fifth conductive part Eight conductive parts 12 are provided: a part 12e, a sixth conductive part 12f, a seventh conductive part 12g, and an eighth conductive part 12h. The first conductive portion 12a to the eighth conductive portion 12h are not electrically connected to each other. However, the number of conductive parts 12 is not limited to eight, and may be seven or less, or nine or more.

In this embodiment, each of the first conductive part 12a to the eighth conductive part 12h has a plurality of electrodes, specifically, two electrodes, a first electrode 121 and a second electrode 122. The first electrode 121 and the second electrode 122 are arranged at opposing positions. More specifically, as shown in FIG. 2, the first electrode 121 and the second electrode 122 are arranged in a comb-like shape. In other words, the first electrodes 121 and the second electrodes 122 are alternately arranged in the transport direction of the object 20 to be transported.

Note that when one of the first electrode 121 and the second electrode 122 is configured to be grounded, the electrode to be grounded is one of the first conductive portions 12a to the eighth conductive portions 12h. Of these, a configuration may be adopted in which a plurality of adjacent ones are connected to each other. Furthermore, the number of electrodes arranged in one conductive section 12 may be three or more.

The width W1 (see FIG. 4) of the first electrode 121 and the second electrode 122 in the transport direction of the transport object 20 is, for example, 0.2 mm. Further, the distance L1 (see FIG. 4) between the first electrode 121 and the second electrode 122 in the transport direction of the transport object 20 is, for example, 0.4 mm. Further, in the transport direction of the object to be transported 20, the distance between adjacent conductive parts 12 is preferably a distance that is not affected by leakage current, and is, for example, 0.01 mm or more and 10 mm or less.

According to the electrostatic induction suction type conveyor 1 in this embodiment, a plurality of conductive parts 12 are provided along the conveyance direction of the conveyed object 20 in a manner that they are not electrically connected to each other, so that the conductive parts 12 are conductive. Application of voltage can be controlled for each section 12. Therefore, as will be described later, the voltage is kept applied to the conductive portion 12 of the transport target attraction area T1 where the transport target 20 is present, and the transport target non-adsorption area T2 where the transport target 20 is not present. By changing the magnitude of the voltage applied to the conductive portion 12, it is possible to suppress the position shift and fall of the conveyed object 20 during conveyance, and to suppress a decrease in the adsorption force using electrostatic force. It becomes possible.

Voltage application section 5 applies a voltage to conductive section 12 . As described above, the first conductive part 12a to the eighth conductive part 12h are provided in such a manner that they are not electrically connected to each other, and the voltage application part 5 is connected to the first conductive part 12a to the eighth conductive part 12h. A voltage is individually applied to each of the conductive parts 12h. Here, the voltage application section 5 applies a voltage so that one of the first electrode 121 and the second electrode 122 of the conductive section 12 is charged with a positive charge, and the other electrode is charged with a negative charge. Apply.

The voltage may be applied by contact power supply via the electric wire 30, as shown in FIG. 2, or by non-contact power supply by electromagnetic coupling or electric field coupling. In the example shown in FIG. 2, the voltage application section 5 includes a slip ring 50 and a first power source 51 to an eighth power source 58. The first power source 51 to the eighth power source 58 correspond to the first conductive part 12a to the eighth conductive part 12h, respectively, and apply voltage to the first conductive part 12a to the eighth conductive part 12h. do. That is, voltage is supplied to the first conductive portion 12a to the eighth conductive portion 12h from the corresponding first power source 51 to the eighth power source 58 via the slip ring 50.

In addition, in FIG. 2, the first electrode 121 and the second electrode 122 of the first conductive part 12a and the first electrode 121 and the second electrode 122 of the eighth conductive part 12h respectively connect the electric wire 30. Although shown connected to the slip ring 50 via the conductive parts 12b to 12g, the same applies to the other conductive parts 12b to 12g.

When a voltage is applied by the voltage applying section 5, the first electrode 121 and the second electrode 122 are charged, and the object to be transported 20 placed on the first insulating section 11 is charged due to electrostatic induction. Charges of opposite polarity are attracted to a conductor. As a result, an electrostatic force is generated, and the object to be transported 20 is attracted to the transport surface 110 of the electrostatic induction attraction type transporter 1 .

FIG. 5 shows a multilayer ceramic capacitor, which is the object to be transported 20, by applying a voltage so that one of the first electrode 121 and the second electrode 122 is charged with a positive charge and the other is charged with a negative charge. It is a figure showing the state where 20X was adsorbed. Here, a description will be given assuming that a voltage is applied so that the first electrode 121 is charged with a positive charge and the second electrode 122 is charged with a negative charge. That is, when electricity is applied, the first electrode 121 functions as a positive electrode, and the second electrode 122 functions as a negative electrode. However, a voltage may be applied so that the first electrode 121 functions as a negative electrode and the second electrode 122 functions as a positive electrode.

As described above, the portions of the first external electrode 22a and the second external electrode 22b of the multilayer ceramic capacitor 20X near the first insulating portion 11 are opposite to the first electrode 121 and the second electrode 122, respectively. It is charged with a charge of . In FIG. 5, negative charges are attracted to a portion of the surface of the first external electrode 22a that is close to the first insulating portion 11, and a portion of the surface of the second external electrode 22b that is close to the first insulating portion 11. This shows a state where positive charges are attracted to the part. By setting one of the first electrode 121 and the second electrode 122 as a positive electrode and the other as a negative electrode, the potential difference between the first electrode 121 and the second electrode 122 can be increased, Adsorption power can be increased.

Note that voltages of the same polarity may be applied to the first electrode 121 and the second electrode 122. However, if voltages of the same polarity are applied to the first electrode 121 and the second electrode 122, the lines of electric force will be in an open state, affecting surrounding members, and the alignment of the conveyed objects 20 will deteriorate. there's a possibility that. On the other hand, by setting one of the first electrode 121 and the second electrode 122 as a positive electrode and the other as a negative electrode, the lines of electric force become closed from the positive electrode to the negative electrode. It is possible to suppress the influence on the members and stabilize the alignment of the conveyed objects 20.

Here, the Coulomb force method, the Johnson-Rahbek force method, and the gradient force method are known as methods for attracting the conveyed object 20 by electrostatic force caused by electrostatic induction, but any method may be used. . The Coulomb force method is a method in which the first insulating portion 11 has a high volume resistivity, and the conductive portion 12 and the object to be transported 20 are attracted by Coulomb force. The Johnson-Rahbek force method has a lower volume resistivity of the first insulating section 11 than the Coulomb force method, and utilizes the potential difference due to the contact resistance between the first insulating section 11 and the conveyed object 20. This is a method in which adsorption is performed by the Johnson-Rahbek force. The gradient force method is a method in which polarization is generated in a dielectric material in a nonuniform electric field, and adsorption is performed using the difference in force generated between polarized charges.

The control unit 6 controls voltage application by the voltage application unit 5 to each of the plurality of conductive parts 12. Specifically, when the conductive part 12 moves from the transport target object attraction area T1 to the transport target object non-adsorption area T2, the control unit 6 causes the voltage application unit 5 to control the magnitude of the voltage applied to the conductive part 12. change. In the present embodiment, the conveyance target object adsorption area T1 is defined in the conveyance direction of the conveyance target object 20 from a position where the conveyance target object 20 is supplied onto the conveyance surface 110 by the supply section 3 to a position where the conveyance target object 20 is discharged by the discharge section 4. In other words, this is the area where the conveyed object 20 being conveyed exists (see FIG. 1). In addition, the conveyance target object non-adsorption area T2 is defined by the conveyance target object 20 being supplied onto the conveyance surface 110 by the supplying section 3 from the position where the conveyance target object 20 is discharged by the discharge section 4 in the conveyance direction of the conveyance target object 20. This is the region up to the position where the object 20 is being transported, that is, the region where the object 20 being transported does not exist (see FIG. 1).

More specifically, the control unit 6 controls the voltage application unit between the time when all of the conductive parts 12 enter the transport target object non-adsorption area T2 and the time when the tip of the conductive part 12 enters the transport target object attraction area T1. 5 to change the magnitude of the applied voltage.

As a method for changing the magnitude of the voltage applied by the control unit 6 to the conductive part 12 by the voltage application unit 5 when the conductive part 12 moves from the transport target object attraction area T1 to the transport target object non-adsorption area T2. , there are the following three methods.

(I) Set the applied voltage to 0 When the conductive part 12 is located in the transport target object adsorption area T1, that is, while the transport target 20 is being transported on the transport surface 110, the conductive part 12 has a voltage applying section. A voltage is applied by 5. When the conductive part 12 moves from the transport target object attraction area T1 to the transport target object non-adsorption area T2, the control part 6 sets the voltage applied to the conductive part 12 by the voltage application part 5 to zero. Specifically, the voltage applying section 5 applies a ground voltage to the conductive section 12 . Alternatively, if different voltages are applied to the first electrode 121 and the second electrode 122 when the conductive part 12 is located in the transport target object attraction area T1, the conductive part 12 is located in the transport target non-adsorption area T2. When moving, the voltage applying section 5 may apply the same voltage to the first electrode 121 and the second electrode 122. Here, instead of applying 0 voltage to the conductive part 12 by the voltage application part 5, cutting the connection between the voltage application part 5 and the conductive part 12 can bring the voltage closer to 0, although it takes a little time. be able to. Note that the voltage applied to the conductive portion 12 may be controlled to be zero before moving to the object non-adsorption area T2. Further, the control unit 6 restarts application of the voltage to the conductive part 12 by the voltage application part 5 until the conductive part 12 enters the transport target object attraction area T1 from the transport target object non-adsorption area T2.

When the voltage application section 5 continues to apply a voltage to the conductive section 12 , ions in the atmosphere are attracted to the conveying surface 110 of the electrostatic induction attraction type conveying body 1 . Adsorption of ions to the conveying surface 110 causes a decrease in the adsorption force of the conveyed object 20, but by reducing the voltage applied to the conductive part 12 to 0, the ions etc. adsorbed to the conveying surface 110 are naturally removed. removed by electrical discharge. Therefore, by temporarily stopping the application of voltage to the conductive part 12, it is possible to suppress a decrease in the attraction force of the conveyed object 20 due to electrostatic force, compared to a configuration in which the voltage is continuously applied to the conductive part 12. can.

(II) Switching the polarity of the applied voltage When the conductive part 12 moves from the transport target object attraction area T1 to the transport target object non-adsorption area T2, the control unit 6 switches the polarity of the voltage applied to the conductive part 12. Then, the voltage application section 5 is controlled. For example, when a voltage is applied so that the first electrode 121 is charged with a positive charge and the second electrode 122 is charged with a negative charge while the conductive part 12 is moving in the transport target object attraction area T1, When the conductive part 12 moves to the transport target object non-adsorption area T2, the control part 6 controls the conductive part 12 so that the first electrode 121 of the conductive part 12 is charged with a negative charge and the second electrode 122 is charged with a positive charge. , the polarity of the voltage applied by the voltage applying section 5 is switched. FIG. 6 shows an example of a change in voltage over time when switching the polarity of the voltage applied to the first electrode 121 and the second electrode 122.

By switching the polarity of the voltage applied to the conductive part 12, ions adsorbed on the transport surface 110 of the electrostatic induction adsorption type transport body 1 can be removed. Therefore, compared to a configuration in which the polarity of the voltage applied to the conductive part 12 is not switched, it is possible to suppress a decrease in the attraction force of the conveyed object 20 due to electrostatic force.

Furthermore, by applying a voltage of opposite polarity to the conductive part 12, the ions adsorbed on the conveyance surface 110 can be forcibly removed, so that the ions can be removed more quickly than in the case of natural discharge. I can do it. Therefore, even if the time for the conductive part 12 to pass through the transport object non-adsorption area T2 is short, ions can be removed.

Here, the time from when the entirety of one conductive part 12 enters the transport target object non-adsorption area T2 until the tip part of the conductive part 12 enters the transport target object attraction area T1 is, for example, 5 milliseconds or more. It is 10 seconds or less. Further, the time required for the attraction force to return after switching the polarity of the applied voltage is, for example, 1 millisecond or more and 5 seconds or less. Further, the time from switching the polarity of the voltage applied to one conductive part 12 to switching the polarity of the next applied voltage is, for example, 0.5 seconds or more and 5 minutes or less.

FIG. 7(a) is a diagram showing the time change of the adsorption force when the polarity of the voltage applied to the conductive part 12 is switched every two minutes, and FIG. FIG. 3 is a diagram showing changes in adsorption force over time when voltage is continued to be applied. In FIG. 7A, the rotation period of the electrostatic induction suction type conveyor 1 is 2 minutes, and each time the conductive part 12 moves from the conveyance target object attraction area T1 to the conveyance target object non-adsorption area T2, the conductive part 12 shows the change in adsorption force over time when the polarity of the voltage applied to 12 is switched.

As shown in FIG. 7(b), when the same voltage is continued to be applied to the conductive part 12, the attraction force decreases as time passes. On the other hand, when the polarity of the voltage applied to the conductive part 12 is switched, as shown in FIG. 7(a), it is possible to suppress the decrease in the attraction force.

Note that by changing the timing of switching the polarity of the voltage applied to the conductive part 12 from every 120 seconds to every 20 seconds, the decrease in the adsorption force can be further suppressed, and the number of falling conveyed objects 20 is reduced. Since the number of conveyed objects 20 whose postures have significantly changed has decreased, the non-defective rate of conveyed objects 20 has improved from 84.5% to 99.9%. However, since it is necessary to switch the polarity of the voltage applied to the conductive part 12 when the conductive part 12 moves from the transport target object attraction area T1 to the transport target object non-adsorption area T2, the timing for switching the voltage polarity is , depends on the rotational speed of the electrostatic induction adsorption type carrier 1.

(III) Alternately and repeatedly applying voltages of opposite polarity When the conductive part 12 moves from the transport target object attraction area T1 to the transport target object non-adsorption area T2, the control unit 6 applies a voltage of opposite polarity to the conductive part 12. The voltage applying unit 5 is controlled so that the voltage is applied alternately and repeatedly. For example, an alternating voltage whose polarity changes alternately is applied to the conductive part 12. By alternately and repeatedly applying voltages of opposite polarity to the conductive portion 12, ions adsorbed on the transport surface 110 of the electrostatic induction adsorption type transport body 1 can be removed more effectively. Thereby, it is possible to more effectively suppress a decrease in the attraction force of the conveyed object 20 due to electrostatic force.

Among the methods (I) to (III) described above, (III), (II), and (I) are more effective in suppressing a decrease in adsorption force in this order. Therefore, the control unit 6 controls the voltage application unit 5 to switch the polarity of the voltage applied to the conductive part 12 when the conductive part 12 moves from the transport target object attraction area T1 to the transport target object non-adsorption area T2. is preferable, and it is more preferable to control the voltage application section 5 so that voltages of opposite polarity are alternately and repeatedly applied to the conductive section 12.

As described above, when the conductive part 12 moves from the transport target object attraction area T1 to the transport target object non-adsorption area T2, the electrostatic force is reduced by changing the magnitude of the voltage applied to the conductive part 12 by the voltage applying part 5. It is possible to suppress a decrease in the adsorption force of the conveyed object 20 due to the above. Further, while the conductive part 12 exists in the transport target object adsorption area T1, a voltage is applied to the conductive part 12, so that it is possible to suppress the displacement and fall of the transport target 20 during transport. .

The supply unit 3 supplies the object to be transported 20 onto the transport surface 110 of the electrostatic induction attraction type transporter 1 . As the supply unit 3, for example, a vibrating parts feeder that supplies the conveyed object 20 with vibration, a rotary parts feeder that supplies the conveyed object 20 while rotating, an air type part that supplies the conveyed object 20 with the force of air. A feeder, a belt conveyor type parts feeder that supplies the objects 20 to be transported by a belt conveyor, a one-by-one type mounting mechanism that supplies the objects 20 to be transported one by one, etc. can be used.

The supply unit 3 supplies the object to be transported 20 onto the transport surface 110 of the electrostatic induction adsorption type transport body 1 at regular time intervals. The supply amount by the supply unit 3 is, for example, 50 to 30,000 pieces per minute.

Objects 20 to be transported are supplied in rows at regular intervals on the transport surface 110 of the electrostatic induction attraction type transporter 1 . The conveyed objects 20 may be supplied in one row, or may be supplied in two or more rows.

In this embodiment, an alignment section 9 is provided for aligning the conveyance objects 20 supplied on the conveyance surface 110 of the electrostatic induction suction type conveyor 1 . The conveyance objects 20 supplied onto the conveyance surface 110 of the electrostatic induction suction type conveyor 1 are aligned in a line with their orientations aligned by coming into contact with the alignment section 9 . Here, the orientation of the multilayer ceramic capacitor 20X, which is the object to be transported 20, is aligned so that the direction in which the first external electrode 22a and the second external electrode 22b face coincides with the transport direction.

As described above, the electrostatic induction suction type conveyor 1 has a rotatable circular table shape, and conveys the object 20 on the conveyance surface 110 by rotating. At this time, centrifugal force is applied to the conveyed object 20, but the conveyed object 20 is conveyed while being attracted to the conveying surface 110 of the electrostatic induction adsorption type conveying body 1 due to the electrostatic force caused by electrostatic induction. , it is possible to suppress the displacement of the conveyed object 20 during conveyance and the fall from the conveyance surface 110.

The drive unit 2 drives the electrostatic induction attraction type carrier 1 . The drive unit 2 is, for example, an electromagnetic motor such as a DC motor, a servo motor, a stepping motor, or a linear motor, an ultrasonic motor, or a compressed air motor. The electrostatic induction adsorption type carrier 1 may be driven continuously or intermittently. The speed in the case of continuous driving is, for example, 10 mm/s or more and 2400 mm/s or less, and the speed in the case of intermittent driving is, for example, 300 mm/s or more and 1200 mm/s or less. Note that the drive unit 2 can be provided at any position.

The electrostatic induction suction type conveying device 100 in this embodiment is configured to be able to perform an external appearance inspection of the conveyed object 20 while conveying the conveyed object 20. The visual inspection of the conveyed object 20 is performed by the imaging section 8 and the processing section 7.

The imaging unit 8 images the object to be transported 20 on the transport surface 110 of the electrostatic induction attraction type transporter 1 . The imaging unit 8 is not particularly limited as long as it can take an image of the conveyed object 20, and for example, a CCD camera or a CMOS camera can be used.

Here, the description will be made assuming that the object to be transported 20 is the above-mentioned multilayer ceramic capacitor 20X, and that a CCD camera is used as the imaging section 8. To image the first end surface 23a, second end surface 23b, first main surface 24a, second main surface 24b, first side surface 25a, and second side surface 25b of the multilayer ceramic capacitor 20X, respectively. , six CCD cameras are arranged as the imaging section 8. In addition, in FIG. 1, five CCD cameras are shown as the imaging unit 8, which are located at approximately the same height as or above the electrostatic induction attraction type carrier 1, and are located below the electrostatic induction attraction type carrier 1. One CCD camera located is not shown.

In FIG. 1, the first imaging area SA1 is an area for imaging the first side surface 25a and the second side surface 25b of the multilayer ceramic capacitor 20X. The second imaging area SA2 is an area for imaging the first end surface 23a and the second end surface 23b of the multilayer ceramic capacitor 20X. The third imaging area SA3 is an area for imaging the first main surface 24a and the second main surface 24b of the multilayer ceramic capacitor 20X.

The visual inspection of the conveyed object 20 is performed by the processing section 7 based on the image captured by the imaging section 8 . In the appearance inspection based on the captured image, for example, the external dimensions of the conveyed object 20, the dimensions of a specific part, the presence or absence of irregularities on the surface, the presence or absence of foreign matter, the presence or absence of damage, the presence or absence of discoloration, etc. are examined.

The object 20 to be conveyed, which has been imaged for visual inspection, is discharged from the conveyance surface 110 of the electrostatic induction attraction type conveyor 1 by the discharge section 4 . The length of the transport path from when the object to be transported 20 is supplied onto the transport surface 110 of the electrostatic induction attraction type transporter 1 until it is discharged is, for example, 300 mm or more and 2500 mm or less.

In this embodiment, the discharge section 4 includes an air jet section 41 . That is, the air jetting section 41 blows air toward the object 20 to be transported, thereby ejecting the object 20 from the transport surface 110 of the electrostatic induction adsorption type transporter 1 . However, the method for discharging the conveyed object 20 is not limited to the method using air jetting, and may be discharged by suction by a suction mechanism (not shown), for example. Alternatively, the objects 20 to be transported may be picked up and discharged one by one. Also, depending on the result of the visual inspection, non-defective products and defective products may be discharged to be collected in separate containers.

<Second embodiment>
In the electrostatic induction suction type carrier 1 according to the first embodiment, each conductive part 12 has a plurality of electrodes, that is, a first electrode 121 and a second electrode 122.

On the other hand, in the electrostatic induction suction type carrier 1A according to the second embodiment, each of the conductive parts 12 has one electrode.

FIG. 8 is a diagram schematically showing the detailed configuration of the conductive section 12 and the voltage application section 5 of the electrostatic induction attraction type conveyor 1A in the second embodiment. Here, similarly to the electrostatic induction suction type conveyor 1 in the first embodiment, the first conductive parts 12a to The description will be made assuming that eight conductive parts 12 of the eighth conductive part 12h are provided.

As shown in FIG. 8, the first conductive part 12a to the eighth conductive part 12h have one electrode. The voltage application section 5 applies a voltage to each of the first conductive section 12a to the eighth conductive section 12h individually. The conveyed object 20 is placed vertically above the arc-shaped portion of the first to eighth conductive parts 12a to 12h on the conveyance surface 110 of the electrostatic induction attraction type conveyor 1A. and is transported while being attracted to the transport surface 110 by electrostatic force.

Note that in a configuration in which each of the conductive parts 12 has only one electrode as in the present embodiment, more adsorption force can be obtained by connecting the conveyed object 20 to the ground, but the conveyed object 20 It is difficult to connect to ground. However, in the configuration in which each of the conductive parts 12 has a plurality of electrodes and voltages of opposite polarity are applied to each of the plurality of electrodes as in the first embodiment, the object to be transported 20 is not connected to the ground. Sufficient adsorption force can be obtained even if Therefore, it is preferable that the conductive part 12 has a plurality of electrodes like the electrostatic induction adsorption type carrier 1 in the first embodiment.

<Third embodiment>
The electrostatic induction attraction type carrier 1 in the first embodiment and the electrostatic induction attraction type carrier 1A in the second embodiment described above have a structure with low flexibility, but like a film, It may have a bendable and highly flexible structure.

FIG. 9 is a schematic diagram showing the overall configuration of an electrostatic induction suction type conveyance device 100 using an electrostatic induction suction type conveyance body 1B according to the third embodiment. The electrostatic induction adsorption type carrier 1B shown in FIG. 9 is film-like and has a continuous endless shape. The circumferential length of the electrostatic induction suction type carrier 1B is, for example, 500 mm or more and 2400 mm or less. Further, the distance from when the conveyed object 20 is supplied by the supply unit 3 until it is discharged is, for example, 150 mm or more and 1100 mm or less.

Here again, the electrostatic induction adsorption type carrier 1B in the third embodiment has the first insulating part 11, the conductive part 12, and the second The explanation will be made assuming that it consists of an insulating section 13. In that case, the first insulating section 11 is made of a transparent resin material such as PET resin, for example. The thickness of the first insulating section 11 in the stacking direction is, for example, 0.001 mm or more and 0.05 mm or less.

The conductive portion 12 is made of, for example, ITO, ATO, titanium oxide, graphene, gold, silver, copper, tin, or the like. The thickness of the conductive part 12 is, for example, 5 nm or more and 1 μm or less.

The second insulating section 13 is made of, for example, a transparent resin material such as PET resin. The thickness of the second insulating portion 13 in the stacking direction is, for example, 0.01 mm or more and 1 mm or less. Note that the second insulating section 13 may be omitted.

The electrostatic induction adsorption type carrier 1B is driven to circulate. The conveyed object 20 is supplied onto the conveyance surface 110 of the electrostatic induction attraction type conveyor 1B by the supply unit 3, and is conveyed in the driving direction of the electrostatic induction attraction type conveyor 1B while being attracted by electrostatic force. Ru.

In this embodiment as well, the control section 6 (omitted in FIG. 9) applies voltage by the voltage application section 5 (omitted in FIG. 9) when the conductive section 12 moves from the transport target object attraction area T1 to the transport target object non-adsorption area T2. change the magnitude of the voltage. Here, the conveyed object adsorption area T1 is defined as the area from the position where the conveyed object 20 is supplied onto the conveying surface 110 by the supply section 3 to the position where the conveyed object 20 is discharged by the discharge section 4 in the conveying direction of the conveyed object 20. It is an area. In addition, the conveyance target object non-adsorption area T2 is defined by the conveyance target object 20 being supplied onto the conveyance surface 110 by the supplying section 3 from the position where the conveyance target object 20 is discharged by the discharge section 4 in the conveyance direction of the conveyance target object 20. This is the area up to the position where the

<Fourth embodiment>
FIG. 10 is a diagram schematically showing the external shape of an electrostatic induction adsorption type carrier 1C in the fourth embodiment. The electrostatic induction suction type conveyor 1C in the fourth embodiment conveys the object 20 to be conveyed in a straight line. Although not shown in FIG. 10, it is preferable to provide an alignment section for aligning the objects 20 to be transported. The electrostatic induction suction type carrier 1C has a structure in which the first insulating part 11, the conductive part 12, and the second insulating part 13 as described above are stacked. However, the second insulating section 13 may be omitted.

As shown in FIG. 10, a plurality of conductive parts 12 are provided along the transport direction of the transport target 20 in a manner that they are not electrically connected to each other. Also in this embodiment, one conductive part 12 includes a first electrode 121 and a second electrode 122. The first electrodes 121 and the second electrodes 122 are arranged alternately in the transport direction of the object 20 to be transported. However, one conductive part 12 may have only one electrode.

In FIG. 10, the voltage application section 5 includes a slip ring 50, and the first electrode 121 and the second electrode of the conductive section 12 are connected from the power sources 51, 52, . . . corresponding to each conductive section 12 via the slip ring 50. 122 shows an example of a configuration in which voltage is supplied to the terminal 122. However, the method of supplying voltage to the conductive part 12 is not limited to the method using the slip ring 50. Even in this configuration, when the conductive part 12 moves from the transport target object attraction area T1 to the transport target object non-adsorption area T2, the control part 6 changes the magnitude of the voltage applied by the voltage application part 5. This is similar to the embodiment. Further, the definitions of the transport target object adsorption area T1 and the transport target object non-adsorption area T2 are also the same as in other embodiments.

FIG. 11 is a diagram showing an example of a configuration in which a voltage is applied from a power source 60 to the conductive part 12 via voltage application terminals 61 and 62. In the example shown in FIG. 11, one first voltage application terminal 61 is provided for the first electrode 121 of the plurality of conductive parts 12, and one first voltage application terminal 61 is provided for the second electrode 122 of the plurality of conductive parts 12. One second voltage application terminal 62 is provided. The first electrode 121 includes a first electrode extension portion 121a that is not covered by the first insulating portion 11. Further, the second electrode 122 includes a second electrode extension portion 122a that is not covered by the first insulating portion 11. Although not shown in FIG. 11, it is preferable to provide an alignment section for aligning the objects 20 to be transported.

FIG. 12 is a side view for explaining a method of contact between the first voltage application terminal 61 and the first electrode 121 and a method of contact between the second voltage application terminal 62 and the second electrode 122. As shown in FIG. 12, the first voltage application terminal 61 applies a voltage to the first electrode 121 by contacting the first electrode extension part 121a of the first electrode 121 from above. . Further, the second voltage application terminal 62 applies a voltage to the second electrode 122 by contacting the second electrode extension portion 122a of the second electrode 122 from above.

The conveyed object 20 is conveyed in the direction of arrow Y1 in FIG. 11 while being attracted to the conveying surface 110 of the electrostatic induction attraction type conveying body 1C. The application terminal 62 does not move. Therefore, when the object 20 is transported, the first electrode pull-out part 121a and the first voltage application terminal 61, which were in contact with each other, are brought out of contact with each other, and the second electrode extension part 121a, which was in contact with each other, is brought into a non-contact state. When the electrode extension part 122a and the second voltage application terminal 62 are in a non-contact state, the first electrode 121 and the second voltage application terminal 62, which are no longer electrically connected to the first voltage application terminal 61, No voltage is applied to the second electrode 122 that is no longer electrically connected. However, even when the voltage is no longer applied, the electrostatic force due to electrostatic induction is maintained for a while, so that the object 20 to be transported can be transported while being attracted to the electrostatic induction attraction type transport body 1C.

As shown in FIG. 11, the position where the voltage is applied by the first voltage application terminal 61 and the second voltage application terminal 62 is the position where the object to be transported 20 is kept static by the supply unit 3 in the transport direction of the object to be transported 20. This is behind the position where the electric induction suction type conveyor 1C is supplied onto the conveyance surface 110. When the control section 6 applies a voltage again to the conductive section 12 to which a voltage has been applied once, the control section 6 controls the voltage application section 5 so that a voltage having a polarity different from the previously applied voltage is applied. Since the position where the voltage is applied to the conductive part 12 by the first voltage application terminal 61 and the second voltage application terminal 62 is the transport target non-adsorption area T2 where the transport target 20 does not exist, other embodiments Similarly, it is possible to suppress a drop in the adsorption force using electrostatic force while suppressing displacement and falling of the conveyed object during conveyance.

In FIG. 13, a voltage is applied to each of the plurality of conductive parts 12 from a plurality of power supplies 60a, 60b, . . . via voltage application terminals 61a, 61b, . It is a figure showing an example of composition. As shown in FIG. 13, first voltage application terminals 61a, 61b... are provided corresponding to the first electrodes 121 of the plurality of conductive parts 12, and the second electrodes 121 of the plurality of conductive parts Second voltage application terminals 62a, 62b, . . . are provided correspondingly. That is, the first voltage application terminals 61a, 61b, . . . and the second voltage application terminals 62a, 62b, . . . are provided in the same number as the conductive portions 12, respectively. Although not shown in FIG. 13, it is preferable to provide an alignment section for aligning the objects 20 to be transported.

In the configuration example shown in FIG. 13, the first voltage application terminals 61a, 61b, . . . and the second voltage application terminals 62a, 62b, . When the object to be transported 20 is transported, a voltage continues to be applied to the first electrode 121 and the second electrode 122 of the conductive part 12 . Therefore, compared to the configuration shown in FIG. 11, the conveyed object 20 can be attracted to the electrostatic induction attraction type conveyor 1C with more stable electrostatic force, and the positional shift of the conveyed object 20 can be suppressed more effectively. can do.

Note that in the configuration shown in FIG. 13, when the conductive part 12 moves from the transport target object attraction area T1 to the transport target object non-adsorption area T2, the control unit 6 changes the magnitude of the voltage applied by the voltage application unit 5. is similar to other embodiments. Further, the definitions of the transport target object adsorption area T1 and the transport target object non-adsorption area T2 are also the same as in other embodiments.

<Fifth embodiment>
FIG. 14 schematically shows the external shape of an electrostatic induction adsorption type conveyor 1D in the fifth embodiment, which has a drum-like shape and whose surface along the rotation direction is the conveyance surface 110 of the conveyed object 20. FIG. The electrostatic induction suction type carrier 1D has a configuration in which the first insulating part 11, the conductive part 12, and the second insulating part 13 as described above are laminated in the radial direction. However, the second insulating section 13 may be omitted.

The diameter of the electrostatic induction attraction type conveyor 1D is, for example, 100 mm or more and 1000 mm or less, the width of the conveyance surface 110 of the conveyed object 20 is, for example, 5 mm or more and 150 mm or less, and the first insulating part 11, the conductive part 12, and the second The overall thickness including the insulating portion 13 is, for example, 1 mm or more and 20 mm or less.

Similar to the configurations shown in FIGS. 10, 11, and 13, a plurality of conductive parts 12 are provided along the transport direction of the object 20 in a manner that they are not electrically connected to each other.

<Sixth embodiment>
FIG. 15 shows a sixth embodiment of the electrostatic induction adsorption type carrier 1 shown in FIG. FIG. 2 is a diagram schematically showing the external shape of an electrostatic induction adsorption type carrier 1E. The electrostatic induction attraction type carrier 1E shown in FIG. 15 is different from the electrostatic induction attraction type carrier 1 shown in FIG. 1 only in the direction of the conveyance surface 110, and its operation is the same.

Although FIG. 15 shows a state in which the objects 20 to be transported are being transported in one row, the objects 20 may be configured to be transported in multiple rows, similar to the electrostatic induction suction type transporter in other embodiments. may have been done.

Further, as shown in FIG. 16, a configuration may be adopted in which the first insulating section 11 of the electrostatic induction suction type conveyor 1E is provided with a housing hole 70 for housing the conveyed object 20. In this case, the conveyance target object 20 is accommodated in the accommodation hole 70 provided in the first insulating section 11 when the conveyance object 20 is supplied to the electrostatic induction suction type conveyance body 1E by the supply section 3. Then, the object to be transported 20 is transported while being accommodated in the accommodation hole 70 . According to this configuration, the object to be transported 20 is transported while being accommodated in the accommodation hole 70, so that falling and displacement of the object to be transported 20 can be more effectively suppressed. Note that the electrostatic induction suction type carrier in other embodiments may also have a configuration in which the first insulating section 11 is provided with the accommodation hole 70.

Further, as shown in FIG. 17, suction holes 80 for suctioning and holding the conveyed object 20 are provided in the first insulating part 11, the conductive part 12, and the second insulating part 13 of the electrostatic induction suction type conveying body 1E. It is also possible to have a configuration in which In the example shown in FIG. 17, the conveyance target object 20 is suction-held by suctioning from the side opposite to the conveyance surface 110 through the suction hole 80. According to this configuration, when the object to be conveyed 20 is conveyed, in addition to the electrostatic force caused by electrostatic induction, the object to be conveyed 20 is conveyed by the suction force generated by suction through the suction hole 80 when the object to be conveyed 20 is conveyed by the electrostatic induction attraction type conveyor 1E. Since the object 20 can be attracted to the surface 110, it is possible to more effectively suppress falling or displacement of the object 20 to be transported during transport. It should be noted that the electrostatic induction suction type conveyor in other embodiments may also have a structure in which suction holes 80 are provided.

The present invention is not limited to the above embodiments, and various applications and modifications can be made within the scope of the present invention. That is, the electrostatic induction suction type conveyor of the present invention is made of an insulating material and has an insulating part that has a conveying surface that comes into contact with the object to be conveyed, and a structure that moves together with the insulating part when conveying the object to obtain electrostatic force. A conductive part to which a voltage is applied is provided, and a plurality of conductive parts may be provided in a manner that they are not electrically connected to each other along the transport direction of the object to be transported. Further, the electrostatic induction attraction type carrier of the present invention includes such an electrostatic induction attraction type carrier, a driving part for driving the electrostatic induction attraction type carrier, and an insulating part of the electrostatic induction attraction type carrier. a supply section that supplies the object to be transported onto the transport surface; a discharge section that discharges the object to be transported on the transport surface; a voltage application section that applies voltage to the conductive section; and a voltage application section for each of the plurality of conductive sections. Any configuration may be used as long as it includes a control section that controls voltage application by the section.

In the embodiment described above, the object to be transported 20 is configured to be visually inspected during transport. For this reason, although the processing unit 7 has been described as performing a visual inspection to detect defects on the surface of the conveyed object 20 based on the image captured by the imaging unit 8, it performs processing other than the visual inspection. It may be configured as follows. For example, the processing unit 7 is configured to perform processing, measurement of electrical characteristics, imaging, irradiation with light such as infrared rays, and application of paste such as conductive paste or insulating paste to the conveyed object 20. It's okay. That is, the processing unit 7 performs at least one of the following processes on the conveyed object 20: visual inspection, measurement of electrical characteristics, processing, imaging, light irradiation, and paste application.

1, 1A, 1B, 1C, 1D, 1E Electrostatic induction adsorption type carrier 2 Drive unit 3 Supply unit 4 Discharge unit 5 Voltage application unit 6 Control unit 7 Processing unit 8 Imaging unit 9 Aligning unit 11 First insulating unit 12 , 12a to 12h Conductive part 13 Second insulating part 20 Object to be transported 20X Multilayer ceramic capacitor 21 Ceramic body 22a First external electrode 22b Second external electrode 30 Electric wire 41 Air blowing part 50 Slip rings 51 to 58, 60 Power supply 61 First voltage application terminal 62 Second voltage application terminal 70 Accommodation hole 80 Suction hole 100 Electrostatic induction suction type conveyance device 110 Conveyance surface 121 First electrode 122 Second electrode

Claims (11)

The insulating part is made of an insulating material and has a transport surface that comes into contact with the object to be transported, and the conductive part moves together with the insulating part when transporting the object to be transported, and to which a voltage is applied to obtain an electrostatic force. , an electrostatic induction adsorption type conveyor for adsorbing and conveying the object to be conveyed using the electrostatic force generated by electrostatic induction;
a drive unit that drives the electrostatic induction attraction type conveyor;
a supply unit that supplies the object to be transported onto the transport surface of the insulating part of the electrostatic induction suction type transporter;
a discharge unit that discharges the conveyed object on the conveyance surface;
a voltage applying section that applies a voltage to the conductive section;
a control unit that controls voltage application by the voltage application unit;
Equipped with
A plurality of the conductive parts are provided along the transport direction of the transport target in a manner that they are not electrically connected to each other,
In the conveying direction of the conveyed object, an area from a position where the conveyed object is supplied onto the conveying surface by the supply section to a position where the conveyed object is discharged by the discharge section is defined as a conveyed object adsorption area. Ori,
In the transport direction of the object to be transported, an area from a position where the object to be transported is discharged by the discharge section to a position where the object to be transported is supplied onto the transport surface by the supply section is a region where the object is not transported. It is designated as a suction area,
The control unit controls voltage application by the voltage application unit for each of the plurality of conductive parts,
Further, when the conductive part is located in the transport target object attraction area, a voltage for obtaining the electrostatic force is applied by the voltage application part, and all of the conductive parts enter the transport target non-adsorption area. The magnitude of the voltage applied by the voltage applying unit is changed between the time when the tip of the conductive part enters the conveyed object adsorption area.
Electrostatic induction adsorption type conveyor device. 2. The control unit switches the polarity of the voltage applied by the voltage application unit when all of the conductive parts move from the transport target object attraction area to the transport target object non-adsorption area. The electrostatic induction adsorption type conveyance device described above. 2. The control unit sets the voltage applied by the voltage application unit to 0 when all of the conductive parts move from the transport target object attraction area to the transport target object non-adsorption area. The electrostatic induction adsorption type conveyance device described above. A claim further comprising a processing section that performs at least one of the following processes on the conveyed object: visual inspection, measurement of electrical characteristics, processing, imaging, light irradiation, and paste application. The electrostatic induction adsorption type conveyance device according to any one of items 1 to 3 . When the processing unit performs a visual inspection of the object to be transported, the electrostatic induction suction type transporter has a transmittance capable of transmitting inspection light irradiated onto the object to be transported. 4. The electrostatic induction adsorption type conveyance device according to 4 . An electrostatic induction adsorption type conveyor for adsorbing and conveying an object to be conveyed using electrostatic force caused by electrostatic induction,
an insulating section made of an insulating material and having a conveying surface in contact with the object to be conveyed;
a conductive part that moves together with the insulating part when the object to be transported is transported, and to which a voltage is applied to obtain the electrostatic force;
A plurality of the conductive parts are provided along the transport direction of the transport target in a manner that they are not electrically connected to each other,
The electrostatic induction adsorption type conveyor is characterized in that the insulating part and the conductive part are provided with suction holes for suctioning and holding the object to be conveyed . An electrostatic induction adsorption type conveyor for adsorbing and conveying an object to be conveyed using electrostatic force caused by electrostatic induction,
an insulating section made of an insulating material and having a conveying surface in contact with the object to be conveyed;
a conductive part that moves together with the insulating part when the object to be transported is transported, and to which a voltage is applied to obtain the electrostatic force;
A plurality of the conductive parts are provided along the transport direction of the transport target in a manner that they are not electrically connected to each other,
An electrostatic induction adsorption type conveyor, wherein the insulating part is provided with a housing hole for housing the object to be conveyed . The electrostatic induction adsorption type conveyor according to claim 6 or 7, wherein each of the conductive parts has a plurality of electrodes. Each of the conductive parts has a first electrode and a second electrode,
9. The electrostatic induction adsorption type carrier according to claim 8, wherein the first electrode and the second electrode are disposed at opposing positions. 10. The electrostatic induction adsorption type conveyor according to claim 9, wherein the first electrode and the second electrode are arranged alternately in the conveying direction of the object to be conveyed. The insulating portion and the conductive portion have a transmittance capable of transmitting inspection light applied when visually inspecting the conveyed object. Electrostatic induction adsorption type conveyor.

Images