JP7349247B2 - inspection table - Google Patents

Description

The present invention relates to an inspection table used to inspect a processing device that processes a workpiece held on a chuck table.

There are various types of processing equipment that hold and process workpieces on chuck tables, such as cutting semiconductor wafers and package substrates, laser processing, and grinding. For example, in the case of a cutting device, if the chuck table is tilted more than a specified value, the cutting depth will fluctuate and an uncut area will occur. Furthermore, in a cutting device, if the nozzle is not positioned at a predetermined position with respect to the cutting blade, a desired machining result cannot be obtained, such as a large amount of contamination (cutting debris) adhering to the workpiece. Therefore, it is necessary to periodically check the condition of the device.

Japanese Patent Application Publication No. 2017-144511 Japanese Patent Application Publication No. 2017-199777

Inspecting the condition of a device requires effort and skill, such as looking inside the narrow device and setting various measuring instruments in the device in order to confirm that the device is in the desired condition. For example, in a cutting device, in order to check whether the nozzle is positioned parallel to the cutting blade, there are cases where a mirror is installed below the cutting blade to peer into the work. However, this work is extremely difficult as it requires work in a dark and narrow space.

The present invention has been made in view of the above, and an object of the present invention is to provide an inspection table that allows checking the state of an apparatus without requiring much effort or skill.

In order to solve the above problems and achieve the objects, the present invention provides a chuck table that holds a workpiece on a holding surface, and a chuck table that faces the holding surface and processes the workpiece held on the chuck table. A processing device that includes a processing unit, a table base that removably supports the chuck table, a movement unit that moves the table base, and a camera unit that photographs the workpiece held on the chuck table. This is an inspection table used in The inspection table includes a base portion that is removably supported by the holding surface of the chuck table or the table base, a sensor that is fixed to the base portion and driven by electric power, and transmits information detected by the sensor. and a battery that supplies power to the sensor and the information transmitter. The sensor includes at least two of a pressure detection sensor, a tilt detection sensor, a temperature detection sensor, a light amount sensor , and an image sensor, and the pressure detection sensor detects the cutting that the processing unit supplies to the surface of the workpiece. Information on the pressure of the liquid can be detected, the inclination detection sensor can detect information on the inclination of the chuck table, yawing and pitching accompanying movement of the chuck table, and the temperature detection sensor can detect information on the inclination of the chuck table and yawing and pitching accompanying movement of the chuck table. Room temperature, the processing unit is capable of detecting the temperature of the cooling water sprayed onto the side surface of the cutting blade, the light amount sensor is capable of detecting the light amount of the camera unit, and the image sensor is located above the inspection table. , and the information transmitter transmits information detected by at least two of the pressure detection sensor, the tilt detection sensor, the temperature detection sensor, the light amount sensor, and the image sensor. shall be.

According to the configuration of the present invention, a situation in which various sensors are mounted on a table can be realized by simply fixing them on the chuck table (on the holding surface) of the processing device or on the table base instead of the chuck table. This allows you to photograph and confirm the conditions around the processing unit, cutting blade (nozzle inclination, positional relationship between the nozzle and blade), and laser irradiation unit (positional relationship between the vacuum unit and condensing lens). can. Further, according to the configuration of the present invention, since the information transmitter is provided, the inclination of the table surface, the yawing and pitching of the moving unit, the intensity and deviation of the illumination of the camera unit, etc. can be checked even from a distance from the table.

The inspection table according to the present invention may include a memory that records detection information from the sensor. According to this configuration, the operator can acquire and utilize the detection information detected by the sensor as needed .

Advantageous Effects of Invention According to the present invention, it is possible to check the state of a device without requiring much effort or skill.

FIG. 1 is a perspective view showing a processing device according to an embodiment. FIG. 2 is a partial side sectional view of a main part of the processing apparatus shown in FIG. FIG. 3 is a perspective view of the processing unit according to the embodiment. FIG. 4 is a partial side cross-sectional view illustrating an operation of cutting a workpiece held on a chuck table of the processing apparatus shown in FIG. FIG. 5 is a perspective view showing the processing device according to the embodiment. FIG. 6 is a partial side cross-sectional view of a main part of the processing apparatus shown in FIG. FIG. 7 is a perspective view showing the inspection table according to the embodiment. FIG. 8 is a diagram illustrating an example of the configuration of the inspection table according to the embodiment. FIG. 9 is a diagram illustrating an example of detection according to the embodiment. FIG. 10 is a diagram illustrating an example of detection according to the embodiment. FIG. 11 is a diagram illustrating an example of detection according to the embodiment. FIG. 12 is a diagram illustrating an example of detection according to the embodiment. FIG. 13 is a diagram illustrating an example of an image captured by the image sensor according to the embodiment. FIG. 14 is a diagram illustrating an example of detection information according to the embodiment. FIG. 15 is a flowchart illustrating an example of processing of the inspection table according to the embodiment. FIG. 16 is a diagram illustrating an example of a data selection screen according to the embodiment.

Embodiments of the present invention will be described in detail below with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Further, the constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Further, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

In the embodiment described below, an XYZ orthogonal coordinate system is set, and the positional relationship of each part will be explained with reference to this XYZ orthogonal coordinate system. One direction in the horizontal plane is defined as the X-axis direction, a direction perpendicular to the X-axis direction in the horizontal plane is defined as the Y-axis direction, and a direction perpendicular to each of the X-axis direction and the Y-axis direction is defined as the Z-axis direction. The XY plane including the X and Y axes is parallel to the horizontal plane. The Z-axis direction perpendicular to the XY plane is the vertical direction.

An overview of the processing apparatus 2 according to the embodiment will be explained using FIGS. 1 to 4. FIG. 1 is a perspective view showing a processing device according to an embodiment. FIG. 2 is a partial side sectional view of a main part of the processing apparatus shown in FIG. FIG. 3 is a perspective view of the processing unit according to the embodiment. FIG. 4 is a partial side cross-sectional view illustrating an operation of cutting a workpiece held on a chuck table of the processing apparatus shown in FIG.

A workpiece 100 (see, for example, FIG. 1) processed by the processing apparatus 2 according to the embodiment is a disk-shaped semiconductor wafer or optical device wafer with a substrate 101 made of silicon, sapphire, gallium, or the like. Devices 104 are formed on the workpiece 100 in areas partitioned into a grid pattern by a plurality of dividing lines 103 formed on the surface 102 of the substrate 101 .

A dicing tape 106, which is an adhesive tape having a diameter larger than that of the substrate 101, is attached to the back surface 105 of the workpiece 100 on the back side of the front surface 102, and an annular frame 107 is attached to the outer periphery of the dicing tape 106. That is, the workpiece 100 is supported in an opening of an annular frame 107 via a dicing tape 106. In this embodiment, a frame unit 108 includes a workpiece 100, a dicing tape 106, and an annular frame 107. Furthermore, an annular region 106A of the dicing tape 106 is formed between the workpiece 100 and the annular frame 107.

Note that there are no restrictions on the material, shape, structure, size, etc. of the substrate 101 of the workpiece 100, and for example, a substrate of any shape made of materials such as ceramics, resin, metal, etc. can be used as the workpiece. . Furthermore, there are no restrictions on the type, quantity, shape, structure, size, arrangement, etc. of the device 104.

As shown in FIG. 1, the processing device 2 includes a base 4 on which each component is mounted. An X-axis moving mechanism 6, which is a processing feed unit, is provided on the upper surface of the base 4. The X-axis moving mechanism 6 includes a pair of X-axis guide rails 8 that are generally parallel to the X-axis direction, which is the processing feed direction, and an X-axis moving table 10 is slidably attached to the X-axis guide rails 8. ing.

A nut section (not shown) is provided on the lower surface side of the X-axis moving table 10, and an X-axis ball screw 12 parallel to the X-axis guide rail 8 is screwed into this nut section. An X-axis pulse motor 14 is connected to one end of the X-axis ball screw 12 . By rotating the X-axis ball screw 12 with the X-axis pulse motor 14, the X-axis moving table 10 moves in the X-axis direction along the X-axis guide rail 8. This X-axis moving mechanism 6 is provided with an X-axis measuring unit (not shown) that measures the position of the X-axis moving table 10 in the X-axis direction.

When the X-axis moving table 10 is moved in the X-axis direction by the X-axis moving mechanism 6, the chuck table 30 is moved through the sent. Note that the upper part of the X-axis moving mechanism 6 including the X-axis moving table 10 is covered by a table cover 18 and a bellows-shaped cover (not shown).

A θ table 16 is provided on the upper surface side of the X-axis moving table 10 . The θ table 16 is equipped with a rotation drive source (not shown) such as a motor, and rotates the chuck table base 20 and the chuck table 30 disposed above around a rotation axis that is generally parallel to the Z-axis direction, which is the cutting feed direction. .

As shown in FIG. 1, the processing device 2 includes a chuck table base 20 provided on the upper surface side of the X-axis moving table 10 via a θ table 16. The chuck table base 20 is made of a conductor such as metal, and as shown in FIG. The frame 107 of the frame unit 108 is provided with clamps 22 which are four frame holding parts that hold and fix the frame 107 of the frame unit 108. The chuck table base 20 has a flat mounting surface 23 on the upper surface of its main body 21 on which the chuck table 30 is mounted and supported.

The clamp 22 is provided so as to be movable in the radial direction with respect to the main body 21, and is adapted to the radial size of the chuck table 30, which can be used depending on the radial size of the workpiece 100 and the frame unit 108. Based on the above, it is moved and used as appropriate.

As shown in FIG. 2, the chuck table base 20 is constructed by applying negative pressure inside the main body 21 to the lower surface 34 of the chuck table 30 placed on the mounting surface 23 of the chuck table base 20. A chuck table suction path 24 that removably fixes the chuck table 30 to the mounting surface 20, and a workpiece suction path 25 that communicates with the holding surface suction path 36 of the chuck table 30 placed on the mounting surface 23 and applies negative pressure thereto. is formed. A chuck table suction path 24 and a workpiece suction path 25 are opened in the mounting surface 23 of the main body portion 21 of the chuck table base 20 .

As shown in FIG. 2, on the side of the chuck table base 20 opposite to the mounting surface 23 of the main body 21, a chuck table suction path 24 is connected to a suction source 28 via a first opening/closing valve 26. Furthermore, on the opposite side of the main body 21 of the chuck table base 20 from the mounting surface 23, a workpiece suction path 25 is similarly connected to a suction source 28 via a second on-off valve 27. The suction source 28 supplies negative pressure to the mounting surface 23 of the chuck table base 20 via the chuck table suction path 24 . Further, the suction source 28 supplies negative pressure to the holding surface 33 that holds the workpiece 100 via the dicing tape 106 on the chuck table 30 via the workpiece suction path 25 and the holding surface suction path 36 .

As shown in FIG. 2, the processing device 2 is a chuck table whose lower surface 34 is removably fixed in close contact with the mounting surface 23 of the chuck table base 20, and which holds the workpiece 100 by suction with the upper holding surface 33. 30. The chuck table 30 includes a suction section 31 that forms a flat holding surface 33 on the upper surface, and a table main body 32 that forms a flat lower surface 34 .

The suction part 31 is fitted into a recessed part 35 in the center of the upper surface of the table main body 32. The suction portion 31 is made of porous ceramics or the like having a large number of porous holes, and suctions and holds the frame unit 108 using the entire holding surface 33 .

The table main body 32 is formed into a disk shape from a conductor such as metal, and has a recessed portion 35 formed in the center of the upper surface. Further, the table main body 32 applies negative pressure internally to the dicing tape 106 side of the frame unit 108 placed on the holding surface 33 through the suction part 31, so that the workpiece 100 can be freely attached to and detached from the chuck table 30. A holding surface suction path 36 is formed to hold the holding surface. This holding surface suction path 36 is opened in the lower surface 34 and the recess 35 of the table main body 32.

An annular seal member 38 is provided between the mounting surface 23 of the chuck table base 20 and the lower surface 34 of the chuck table 30, which communicates the workpiece suction path 25 and the holding surface suction path 36 in a sealed state. There is. The seal member 38 has its chuck table base 20 side fitted into the seal member fitting part 25a provided in the opening on the mounting surface 23 side of the workpiece suction path 25, and its chuck table 30 side fitted into the lower surface of the holding surface suction path 36. It is fitted into a seal member fitting part 36a provided in the opening on the 34 side.

The chuck table 30 is used by being replaced depending on the size and type of the workpiece 100 and the frame unit 108.

The lower surface 34 of the chuck table 30 is placed and aligned on the mounting surface 23 of the chuck table base 20, and the negative pressure of the suction source 28 is applied to the mounting surface 23 of the chuck table base 20. As a result, the flat mounting surface 23 and the flat lower surface 34 are brought into close contact with each other under negative pressure, and the chuck table 30 is fixed to the chuck table base 20, as shown in FIG. Further, the dicing tape 106 side of the frame unit 108 is placed on the holding surface 33 of the chuck table 30 and aligned, and the negative pressure of the suction source 28 is applied to the holding surface 33 of the chuck table 30. As a result, the flat holding surface 33 and the lower surface of the dicing tape 106 of the frame unit 108 are brought into close contact with each other under negative pressure, and the frame unit 108 is fixed to the chuck table 30 as shown in FIG. 4.

In the present embodiment, the chuck table 30 is provided with the suction section 31 made of porous ceramics or the like having a large number of porous holes, and the table body 32. However, the present invention is not limited to this. For example, the suction source 28 A suction groove may be formed to apply negative pressure to the holding surface 33 of the chuck table 30.

Further, as shown in FIG. 4, when fixing the frame unit 108 to the chuck table 30, the clamp 22 pulls down and holds the frame 107 vertically below the holding surface 33 of the chuck table 30. As a result, the dicing tape 106 is brought into close contact with the holding surface 33, so that the workpiece 100 is firmly supported by the holding surface 33 via the dicing tape 106.

Further, as shown in FIG. 1, a water case 19 is provided near the X-axis moving table 10 to temporarily store waste liquid of cutting fluid such as pure water used during cutting. . The waste liquid stored in the water case 19 is discharged to the outside of the processing device 2 via a drain (not shown) or the like. A transport mechanism (not shown) that transports the workpiece 100 to the chuck table 30 is provided at a position close to the chuck table 30 .

As shown in FIG. 1, a gate-shaped support structure 40 that straddles the X-axis moving mechanism 6 is arranged on the upper surface of the base 4. At the upper front surface of the support structure 40, two sets of processing unit moving mechanisms 42 (an example of a moving unit) are provided, each functioning as an index feed unit and a notch feed unit. Each processing unit moving mechanism 42 is disposed on the front surface of the support structure 40 and commonly includes a pair of Y-axis guide rails 44 that are generally parallel to the Y-axis direction, which is the indexing and feeding direction, that is, the left-right direction in FIG. A Y-axis moving plate 46 that constitutes each processing unit moving mechanism 42 is slidably attached to the Y-axis guide rail 44 .

A nut portion (not shown) is provided on the back side of each Y-axis moving plate 46, and a Y-axis ball screw 48 approximately parallel to the Y-axis guide rail 44 is screwed into each nut portion. . A Y-axis pulse motor 50 is connected to one end of each Y-axis ball screw 48 . When the Y-axis ball screw 48 is rotated by the Y-axis pulse motor 50, the Y-axis moving plate 46 moves in the Y-axis direction along the Y-axis guide rail 44.

A pair of Z-axis guide rails 52 that are generally parallel to the Z-axis direction are provided on the front surface of each Y-axis moving plate 46 . A Z-axis moving plate 54 is slidably attached to the Z-axis guide rail 52.

A nut portion (not shown) is provided on the back side of each Z-axis moving plate 54, and a Z-axis ball screw 56 parallel to the Z-axis guide rail 52 is screwed into each nut portion. A Z-axis pulse motor 58 is connected to one end of each Z-axis ball screw 56 . When the Z-axis ball screw 56 is rotated by the Z-axis pulse motor 58, the Z-axis moving plate 54 moves in the Z-axis direction along the Z-axis guide rail 52.

Each processing unit moving mechanism 42 is provided with a Y-axis measuring unit (not shown) that measures the position of the Y-axis moving plate 46 in the Y-axis direction. Further, each processing unit moving mechanism 42 is provided with a Z-axis measuring unit (not shown) that measures the position of the Z-axis moving plate 54 in the Z-axis direction.

A processing unit 60 for cutting the workpiece 100 held on the chuck table 30 is fixed to the lower part of each Z-axis moving plate 54. Further, a camera unit 62 that is an imaging unit for taking an image of the workpiece 100 is provided at a position adjacent to the processing unit 60. If each processing unit moving mechanism 42 moves the Y-axis moving plate 46 in the Y-axis direction, the processing unit 60 and camera unit 62 are indexed and fed, and if the Z-axis moving plate 54 is moved in the Z-axis direction, The processing unit 60 and the camera unit 62 are fed into the cut.

Note that the position of the chuck table 30 and the like in the X-axis direction with respect to the processing unit 60 and camera unit 62 is measured by the above-mentioned X-axis measurement unit. Further, the positions of the processing unit 60 and camera unit 62 in the Y-axis direction with respect to the chuck table 30 and the like are measured by the Y-axis measuring unit described above. Further, the positions of the processing unit 60 and camera unit 62 in the Z-axis direction with respect to the chuck table 30 and the like are measured by the above-mentioned Z-axis measurement unit.

As shown in FIG. 3, the processing unit 60 is a cutting unit in which a cutting blade 66 having an annular cutting edge on the outer periphery is attached to a spindle 64 having a rotating shaft that is generally parallel to the holding surface 33 of the chuck table 30. . The processing unit 60 cuts the workpiece 100 held on the chuck table 30. The rotation axis of the spindle 64 is approximately perpendicular to the X-axis direction and the Z-axis direction, and approximately parallel to the Y-axis direction. A cutting blade 66 is mounted on one end of the spindle 64 and is held together with a mount flange 65 by a fixing nut. The other end of the spindle 64 is connected to a rotational drive source (not shown) such as a motor. The cutting blade 66 is rotated by the torque of the rotational drive source transmitted via the spindle 64, as shown in FIG. Due to the rotational action of the cutting blade 66, cutting grooves are formed in the workpiece 100 along the dividing line 103, and the workpiece 100 is separated into individual devices 104.

Also, in the vicinity of the cutting blade 66, as shown in FIG. A second cutting fluid supply nozzle 67 that supplies cutting fluid such as water, and a pair of cooling water supply nozzles 68 (the cooling water nozzle on the opposite side is not shown) that sprays cooling water on the side surface of the cutting blade 66 are provided. ing. A blade position detection unit 69 is arranged below the cutting blade 66 to detect the height, or position, of the lower end of the cutting blade 66 in the Z-axis direction. Each component of the processing unit 60 is controlled by a control unit 39, which will be described later, in accordance with the cutting conditions of the workpiece 100 and the like.

As shown in FIG. 1, the processing apparatus 2 includes a control unit 39 that controls each of the constituent elements of the processing apparatus 2 in accordance with the processing conditions of the workpiece 100 and the like. The control unit 39 includes an arithmetic processing device having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as ROM (read only memory) or RAM (random access memory), and an input/output interface device. It is a computer that has the following functions and is capable of executing computer programs.

In the control unit 39, the size and type of the chuck table 30 input by the operator via the input unit are registered. The control unit 39 controls whether or not the chuck table 30 is fixed on the mounting surface 23 of the chuck table base 20 by controlling the opening and closing of the first on-off valve 26 to switch whether or not suction is applied to the chuck table suction path 24. or switch. Furthermore, the control unit 39 controls the opening and closing of the second on-off valve 27 to switch whether or not to suck the workpiece suction path 25, thereby holding the workpiece 100 on the holding surface 33 of the chuck table 30. Switch whether or not to do so.

Next, the inspection table 200 used in the processing apparatus 2 according to the embodiment will be explained using FIGS. 5 to 9. FIG. 5 is a perspective view showing the processing device according to the embodiment. FIG. 6 is a partial side cross-sectional view of a main part of the processing apparatus shown in FIG. FIG. 7 is a perspective view showing the inspection table according to the embodiment. FIG. 8 is a diagram illustrating an example of the configuration of the inspection table according to the embodiment. 9 to 12 are diagrams showing an example of detection according to the embodiment. FIG. 13 is a diagram illustrating an example of an image captured by the image sensor according to the embodiment. FIG. 14 is a diagram illustrating an example of detection information according to the embodiment.

As shown in FIG. 5, when inspecting the processing device 2, the operator places the inspection table 200 on the holding surface 33 of the chuck table 30, aligns it, and applies negative pressure from the suction source 28 to the chuck table 30. to act on the holding surface 33 of. As a result, the flat holding surface 33 of the chuck table 30 and the lower surface of the inspection table 200 are brought into close contact with each other under negative pressure, and the inspection table 200 is fixed to the chuck table 30 as shown in FIG. .

Subsequently, the operator operates the control unit 39 to operate the processing apparatus 2, thereby inspecting the processing apparatus 2. When inspecting the processing device 2, the operator may manually operate the processing device 2 to a desired position, or the processing device 2 may be automatically operated in a predetermined mode prepared in advance for inspection. Good too.

The operator uses the terminal device 300 to acquire detection information detected by the inspection table 200 during the inspection of the processing device 2 . Examples of the terminal device 300 include mobile terminals such as smartphones and tablets.

The control unit 39 operates the processing device 2 according to input from the operator. For example, the control unit 39 controls opening and closing of the second on-off valve 27 and switches whether or not to suck the workpiece suction path 25, thereby holding or releasing the inspection table 200 on the holding surface 33 of the chuck table 30. Execute.

The inspection table 200 includes a base portion 201 that is detachably supported by the holding surface 33 of the chuck table 30, as shown in FIG. In this embodiment, an example will be described in which the inspection table 200 is removably supported by the chuck table 30 by bringing the lower surface of the inspection table 200 into close contact with the flat holding surface 33 of the chuck table 30 due to negative pressure. However, it is not particularly limited to this example. For example, the inspection table 200 may be removably supported on the chuck table base 20 (an example of a table base). That is, after removing the chuck table 30 from the chuck table base 20, the lower surface of the inspection table 200 is placed on the mounting surface 23 of the chuck table base 20 and aligned, and the negative pressure of the suction source 28 is applied to the chuck table base 20. It acts on the mounting surface 23. Thereby, the flat mounting surface 23 of the chuck table base 20 and the lower surface of the inspection table 200 are brought into close contact with each other under negative pressure, and the inspection table 200 can be directly fixed to the chuck table base 20.

The inspection table 200 also includes a pressure detection sensor 202, a tilt detection sensor 203, a temperature detection sensor 204, a light amount sensor 205, an image sensor 206, and a light 207, as shown in FIGS. 7 and 8. The pressure detection sensor 202 , the tilt detection sensor 203 , the temperature detection sensor 204 , the light amount sensor 205 , the image sensor 206 , and the light 207 are fixed to the base portion 201 and driven by power supplied from the battery 212 .

The pressure detection sensor 202 detects the pressure acting on the inspection table 200. As shown in FIG. 9, the pressure detection sensor 202 located directly below the camera unit 62 detects, for example, information on the pressure of the air 62a injected from the camera unit 62. The air 62a is injected when removing cutting fluid or the like from the surface of the workpiece 100. Further, the pressure detection sensor 202 can also detect information about the pressure when the cutting fluid is supplied to the surface of the workpiece 100.

The tilt detection sensor 203 detects the tilt of the inspection table 200 about two axes, the X-axis and the Z-axis. The tilt detection sensor 203 detects, for example, the tilt of the table surface of the chuck table 30 and information on yawing and pitching accompanying movement of the chuck table 30.

Temperature detection sensor 204 detects the surface temperature of inspection table 200. As shown in FIG. 10, the temperature detection sensor 204 located directly below the cutting blade 66 of the processing unit 60 detects the room temperature of the processing chamber and the cooling water supplied to the cutting blade 66 from the cooling water supply nozzle 68 during cutting. Information such as the temperature of 68a is detected. Furthermore, the temperature detection sensor 204 also detects information on the temperature of the cutting fluid supplied from the first and second cutting fluid supply nozzles 67 and the like during cutting.

The light amount sensor 205 detects the amount of light irradiated onto the inspection table 200. As shown in FIG. 11, an image sensor unit 621 included in the camera unit 62 captures an image of the processing status of the workpiece 100, for example. The light amount sensor 205 located directly below the image sensor unit 621 obtains information on the autofocus light amount and angle recognition light amount based on the reflected light emitted from the reflected light unit 622 via the condenser lens 623 and the oblique light emitted from the oblique light unit 624. etc. are detected. Further, based on the information on the amount of light acquired by the light amount sensor 250, the operator can check whether the camera lens or light cover of the image sensor unit 621 is dirty.

The image sensor 206 acquires an image above the inspection table 200. As shown in FIG. 12, the image sensor 206 positioned directly below the processing unit 60 acquires an image G1 of the positional relationship between the cutting blade 66 and the cooling water supply nozzle 68, for example, as shown in FIG. be done. By referring to the image G1 shown in FIG. 13, the operator can recognize that the cutting blade 66 and one (lower side) of the cooling water supply nozzle 68 are not positioned parallel to each other. The light 207 emits light in conjunction with the imaging timing of the image sensor 206.

The inspection table 200 also includes an information communication section 208 (an example of an information transmission section). The information communication unit 208 transmits detection information detected by the above-described pressure detection sensor 202, tilt detection sensor 203, temperature detection sensor 204, light amount sensor 205, and image sensor 206 to the outside. The information communication unit 208 can transmit detection information to the control unit 39 and the terminal device 300, for example. The information communication unit 208 can transmit detection information wirelessly or by wire. The information communication unit 208 can support short-range wireless communication standards for communicating with the control unit 39 and the terminal device 300. Examples of short-range wireless communication standards that the information communication unit 208 can support include WiMAX (registered trademark) (Worldwide interoperability for Microwave Access), IEEE802.11, Bluetooth (registered trademark), and the like. The information communication section 208 may include a terminal for connecting the control unit 39 and the terminal device 300 via a communication cable compatible with the communication standard of the control unit 39 and the terminal device 300. Examples of terminals that the information communication unit 208 may include include a USB (Universal Serial Bus), HDMI (registered trademark) (High-Definition Multimedia Interface), MHL (Mobile High-definition Link), and a LAN (Local Area Network) connector. Illustrated.

The inspection table 200 also includes a storage section 209 and an arithmetic processing section 211.

The storage unit 209 stores programs that implement functions such as various processes executed by the inspection table 200 according to the embodiment, data used for processing by the programs, and the like. The storage unit 209 is a nonvolatile or volatile memory such as RAM (Random Access Memory), ROM (Read Only Memory), flash memory, EPROM (Erasable Programmable Read Only Memory), and EEPROM (registered trademark) (Electrically Erasable Programmable Read Only Memory). This includes semiconductor memory, etc. The program stored in the storage unit 209 has a non-transitory recording medium that is readable by the processor and includes a plurality of instructions for performing data processing that can be executed by the processor included in the arithmetic processing unit 211. It can also be said to be a program product. The storage unit 209 can also be used as a temporary work area when the processor included in the arithmetic processing unit 211 executes instructions written in a program.

The storage unit 209 (an example of a memory) includes a detection information recording area 210. As shown in FIG. 14, the detection information recording area 210 stores detection information detected by the pressure detection sensor 202, tilt detection sensor 203, temperature detection sensor 204, light amount sensor 205, and image sensor 206 included in the inspection table 200. is recorded.

The arithmetic processing unit 211 operates based on a program stored in the storage unit 209 and performs various processes on the inspection table 200. The arithmetic processing unit 211 includes a processor such as a CPU (Central Processing Unit) microprocessor, a microcomputer, a DSP (Digital Signal Processor), and a system LSI (Large Scale Integration).

A processor included in the arithmetic processing unit 211 executes a program loaded onto a RAM included in the storage unit 209. Thereby, functions such as various processes executed by the inspection table 200 are realized. Functions such as various processes executed by the inspection table 200 include a function of connecting to the control unit 39 and the terminal device 300 in a communicable state by wireless or wire, and providing a data selection screen to the control unit 39 and the terminal device 300. Examples include a function and a function of providing detection information to the control unit 39 and the terminal device 300.

Note that the arithmetic processing unit 211 may be realized by dedicated hardware. In this case, the arithmetic processing unit 211 is a single circuit, a composite circuit, a programmed processor, a parallel programmed processor, an ASIC (Application Specific Integrated Circuit), an FPGA (Field Programmable Gate Array), or a combination thereof. It can be implemented by

The inspection table 200 also includes a battery 212. The battery 212 supplies power to each part of the inspection table 200. The battery 212 may be detachably mounted on the inspection table 200, or may be built into the inspection table 200. When the battery 212 is detachable from the inspection table 200, a primary battery or a secondary battery may be employed. When the battery 212 is built into the inspection table 200, a secondary battery is more suitable than a primary battery.

An example of processing by the inspection table 200 according to the embodiment will be described with reference to FIG. 15. FIG. 15 is a flowchart illustrating an example of processing of the inspection table according to the embodiment. The processing shown in FIG. 15 is executed by the arithmetic processing unit 211 included in the inspection table 200.

As shown in FIG. 15, the arithmetic processing unit 211 executes a connection process in response to a request from the terminal device 300, for example (step S101).

When the connection process is completed, the arithmetic processing unit 211 transmits a data selection screen to the terminal device 300 to be connected (step S102). FIG. 16 is a diagram illustrating an example of a data selection screen according to the embodiment. As shown in FIG. 16, a data selection screen 311 transmitted from the inspection table 200 to the terminal device 300 is displayed on a display 310 included in the terminal device 300. The data selection screen 311 includes a pressure data item 312, a tilt data item 313, a light amount data item 314, an image data item 315, a temperature data item 316, and a data acquisition button 317 that can be operated by the operator. . The data selection screen 311 also includes check boxes 322 to 326 for each item 312 to 316 to be accepted by the operator. When acquiring pressure data from the inspection table 200, the operator checks the check box 322 and then operates the data acquisition button 317. As a result, a pressure data acquisition request is sent to the inspection table 200.

Returning to the explanation of FIG. 15, the arithmetic processing unit 211 determines whether a data acquisition request has been received from the terminal device 300 (step S103).

When the arithmetic processing unit 211 receives the data acquisition request from the terminal device 300 (Step S103, Yes), it reads the detection information corresponding to the item selected in the data acquisition request from the detection information recording area 210 (Step S104).

Subsequently, the arithmetic processing unit 211 transmits the detection information read from the detection information recording area 210 to the terminal device 300 (step S105).

Subsequently, the arithmetic processing unit 211 determines whether or not a connection release request has been received from the terminal device 300 (step S106).

When the arithmetic processing unit 211 receives the disconnection request from the terminal device 300 (step S106, Yes), it executes the disconnection process (step S107), and ends the process shown in FIG. 15.

On the other hand, if the arithmetic processing unit 211 determines that the disconnection request has not been received from the terminal device 300 (step S106, No), the process returns to the determination in step S103 described above.

In step S103 described above, when the calculation processing unit 211 determines that the data acquisition request has not been received from the terminal device 300 (step S103, No), it moves to the determination in step S106 described above.

In the example shown in FIG. 15, a case has been described in which the arithmetic processing unit 211 provides the terminal device 300 with the detection information of the item selected by the operator, but it may be set in advance to transmit all of the detection information. . In this case, the arithmetic processing unit 211 can read out all the detection information recorded in the detection information recording area 210 and transmit it to the terminal device 300 as soon as the connection with the terminal device 300 is completed.

As described above, the inspection table 200 according to the embodiment includes the chuck table 30 that holds the workpiece 100 on the holding surface 33, and the chuck table 30 that holds the workpiece 100 on the chuck table 30 facing the holding surface 33. The processing unit 60 to be processed, the chuck table base 20 (an example of a table base) that removably supports the chuck table 30, and the processing unit moving mechanism 42 (movement) that moves the chuck table base 20 (an example of a table base) (one example of a unit) and a camera unit 62 that photographs the workpiece 100 held on the chuck table 30. The inspection table 200 includes a base portion 201 that is detachably supported by the holding surface 33 of the chuck table 30. The inspection table 200 also includes sensors (a pressure detection sensor 202, a tilt detection sensor 203, a temperature detection sensor 204, a light amount sensor 205, and an image sensor 206) that are fixed to a base portion 201 and driven by electric power supplied from a battery 212. ). The inspection table 200 also includes an information communication section 208 (an example of an information transmission section) that transmits information detected by the sensor, and a battery 212 that supplies power to the sensor and the information communication section 208.

Therefore, according to the inspection table 200 according to the embodiment, for example, the pressure detection sensor 202 collects information about the pressure of the air 62a injected from the camera unit 62, and when cutting fluid is supplied to the surface of the workpiece 100. can detect pressure information, etc.

Further, according to the inspection table 200 according to the embodiment, for example, the inclination detection sensor 203 can detect the inclination of the table surface of the chuck table 30, information on yawing and pitching accompanying movement of the chuck table 30, etc.

Further, according to the inspection table 200 according to the embodiment, the temperature detection sensor 204 detects information about the room temperature of the processing chamber, the temperature of the cooling water 68a supplied to the cutting blade 66 from the cooling water supply nozzle 68, and information about the cutting fluid. The temperature of the cutting fluid supplied from the first and second supply nozzles 67 and the like can be detected.

Further, according to the inspection table 200 according to the embodiment, for example, the light amount sensor 205 can detect information such as autofocus light amount and angle recognition light amount based on epi-illumination and oblique light.

According to the inspection table 200 according to the embodiment, for example, the image sensor 206 detects the surrounding conditions of the processing unit 60 and the cutting blade 66 (such as the inclination of the cooling water supply nozzle 68 and the relationship between the cooling water supply nozzle 68 and the cutting blade 66). positional relationship). By referring to the image taken by the inspection table 200, the operator can check the surrounding conditions of the processing unit 60 and the cutting blade 66 (the inclination of the cooling water supply nozzle 68, the position of the cooling water supply nozzle 68 and the cutting blade 66). relationships) can be confirmed.

Further, according to the inspection table 200 according to the embodiment, detection information detected by the pressure detection sensor 202, the tilt detection sensor 203, the temperature detection sensor 204, the light amount sensor 205, and the image sensor 206 by the information communication unit 208, for example. can be sent externally. Thereby, for example, the operator does not have to perform checking work in a dark and narrow space, and can check the status of the processing device 2 from a remote location.

The inspection table 200 according to the embodiment also includes a storage unit 209 (memory example). This allows the operator to obtain and use the detection information detected by the sensor as needed.

[Other embodiments]
Note that the inspection table 200 according to the present invention is not limited to the above-described embodiment, and can be modified in various ways without departing from the gist of the present invention. For example, the chuck table 30 may be provided with various sensors and the like provided in the inspection table 200.

Furthermore, by using the inspection table 200 to inspect the laser irradiation unit, it is possible to image and record the situation around the laser irradiation unit (the positional relationship between the vacuum unit that discharges debris and the condenser lens). Therefore, the operator can also check the surrounding situation of the laser irradiation unit (the positional relationship between the vacuum unit and the condensing lens) from a remote location without requiring the labor of checking.

2 Processing device 20 Chuck table base 23 Placement surface 24 Chuck table suction path 25 Workpiece suction path 25a Seal member fitting portion 30 Chuck table 33 Holding surface 34 Bottom surface 36 Holding surface suction path 38 Seal member 39 Control unit 60 Processing unit 62 Camera unit 63 First cutting fluid supply nozzle 64 Spindle 65 Mount flange 66 Cutting blade 67 Second cutting fluid supply nozzle 68 Cooling water supply nozzle 100 Workpiece 200 Inspection table 201 Base part 202 Pressure detection sensor 203 Tilt detection sensor 204 Temperature detection sensor 205 Light amount sensor 206 Image sensor 207 Light 208 Information communication section 209 Storage section 210 Detection information recording area 211 Arithmetic processing section 212 Battery

Claims (2)

a chuck table that holds a workpiece on a holding surface; a processing unit that faces the holding surface and processes the workpiece held on the chuck table; and a table base that removably supports the chuck table; An inspection table used in a processing device, comprising a moving unit that moves the table base, and a camera unit that photographs a workpiece held on the chuck table,
a base portion detachably supported by the holding surface of the chuck table or the table base;
a sensor fixed to the base and driven by electric power;
an information transmitter that transmits information detected by the sensor;
a battery that supplies power to the sensor and the information transmitter;
The sensor is
Comprising at least two of a pressure detection sensor, a tilt detection sensor, a temperature detection sensor, a light amount sensor, and an image sensor,
The pressure detection sensor is capable of detecting information about the pressure of cutting fluid that the processing unit supplies to the surface of the workpiece,
The tilt detection sensor is capable of detecting information on the tilt of the chuck table, yawing and pitching accompanying movement of the chuck table,
The temperature detection sensor is capable of detecting the room temperature of the processing chamber and the temperature of the cooling water sprayed by the processing unit onto the side surface of the cutting blade;
The light amount sensor is capable of detecting the light amount of the camera unit,
the image sensor acquires an image above the inspection table;
An inspection table characterized in that the information transmitting section transmits information detected by at least two of the pressure detection sensor, the tilt detection sensor, the temperature detection sensor, the light amount sensor, and the image sensor. The inspection table according to claim 1, further comprising a memory for recording detection information from the sensor.

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