JP7365597B2 - Actuator diagnostic system and component placement equipment - Google Patents

Description

The present disclosure relates to an actuator diagnostic system and a component mounting device equipped with the same.

Conventionally, actuators are used when transporting a substrate, for example, when raising and lowering the substrate. The actuator moves the actuating member of the cylinder in the direction of the pressure of the fluid flowing into the cylinder. By switching the valve, the direction of movement of the actuating member can be changed. When the actuator is used for a long time, abnormal operation occurs.

For example, Patent Document 1 discloses that by measuring the operation time of the actuator from when the operator issues an operation instruction until the actuating member moves to the movement completion position, it is possible to determine whether the operation of the actuator is normal or abnormal. We are determining whether This makes it possible to know which actuator among the plurality of actuators has experienced an abnormality.

Japanese Patent Application Publication No. 2000-31237

However, even if an abnormality is discovered in the actuator, it is necessary to analyze the operation history of the actuator or to check the actual product on-site in order to investigate the cause of the actuator abnormality, which requires time for maintenance.

Therefore, an object of the present disclosure is to provide an actuator diagnostic system and a component mounting device that improve actuator maintainability.

In order to achieve the above object, an actuator diagnostic system in one aspect of the present disclosure includes:
an actuator having a cylinder driven by a fluid and a valve that controls the flow of the fluid;
a first stroke from a first position that is one end of a path along which the actuating member of the cylinder moves to a second position that is the other end of the path; and a drive control unit that controls the actuator so that the cylinder is driven along a second stroke to a third position between the positions;
A first operation time during which the actuator moves the first stroke after the drive control unit issues a drive command to the valve, and a first operation time during which the actuator moves the second stroke after the drive control unit issues a drive command to the valve. a storage unit in which a second operation time is previously measured and stored;
a third operation time during which the actuator moves the first stroke after the drive control unit issues a drive command to the valve; and a third operation time during which the actuator moves the second stroke after the drive control unit issues a drive command to the valve. a measurement unit that measures a fourth operation time;
a determination unit that determines whether or not there is an abnormality in the valve and the cylinder based on a combination of the first operation time, the second operation time, the third operation time, and the fourth operation time; Be prepared.

Further, a component mounting device according to an aspect of the present disclosure is a component mounting device that mounts a component on a board, and includes:
a lower receiving part provided below a board fixing part that fixes the board;
an actuator that is driven by a fluid and includes a cylinder that raises and lowers the lower receiving part, and a valve that controls the flow of the fluid;
A first stroke from a first position, which is one end of a path along which the lower receiving part moves, to a second position lower than the first position, and a stroke from the first position to the first position and the second position. a drive control unit that controls the actuator so that the lower receiving part is driven along a second stroke to a third position at a height between;
A first operation time of the actuator for moving the lower receiving part by the first stroke after the drive control section issues a drive command to the valve; a storage unit in which a second operation time of the actuator for a second stroke movement is previously measured and stored;
a third operation time of the actuator for moving the lower receiving part by the first stroke after the drive control section issues a drive command to the valve; a measurement unit that measures a fourth operation time of the actuator that is moved by a second stroke;
a determination unit that determines whether or not there is an abnormality in the valve and the cylinder based on a combination of the first operation time, the second operation time, the third operation time, and the fourth operation time; Be prepared.

It is possible to provide an actuator diagnosis system and a component mounting device that improve actuator maintainability.

Overall configuration diagram schematically showing an actuator diagnosis system in Embodiment 1 of the present disclosure An explanatory diagram of the operation of the cylinder included in the actuator An explanatory diagram of the operation of the cylinder included in the actuator An explanatory diagram of the operation of the cylinder included in the actuator Timing diagram showing actuator operation timing Flowchart showing the flow of actuator diagnosis A perspective view of a component mounting device in Embodiment 2 of the present disclosure Side view of the board transfer unit included in the component mounting device Side view of the board transfer unit included in the component mounting device Side view of the board transfer unit included in the component mounting device A perspective view of a lower receiving part included in the component mounting device An explanatory diagram of an actuator that drives the lower receiving part of the component mounting device Explanatory diagram of the detection unit that detects the lower receiving part Block diagram showing the control system of the component mounting device in Embodiment 2

According to one aspect of the present disclosure, there is provided an actuator including a cylinder driven by a fluid and a valve that controls the flow of the fluid, and a first position that is one end of a path in which an actuating member of the cylinder moves, and The cylinder is moved along a first stroke to a second position, which is the other end, and a second stroke from the first position to a third position between the first position and the second position. a drive control unit that controls the actuator so that the valve is driven; a first operation time during which the actuator moves the first stroke after the drive control unit issues a drive command to the valve; a storage section in which a second operation time during which the actuator moves the second stroke after the drive command is given to the valve is previously measured and stored; a measurement unit that measures a third operation time for a first stroke movement, and a fourth operation time for the actuator to move the second stroke after the drive control unit issues a drive command to the valve; and the first operation time; An actuator diagnostic system, comprising: a determination unit that determines whether or not there is an abnormality in the valve and the cylinder based on a combination of the second operation time, the third operation time, and the fourth operation time. be.

According to a second aspect of the present disclosure, the actuator diagnostic system further includes a first detection unit that detects the actuation member at the first position, and a second detection unit that detects the actuation member at the second position. and a third detection section that detects the actuating member at the third position.

According to a third aspect of the present disclosure, the determination unit includes a first determination unit that determines whether or not there is an abnormality in the valve, and stores the driving time as the first operation time in the storage unit. A time VAT1 from when the control unit issues a drive command for the valve until the actuating member starts operating from the first position, and from when the actuating member starts operating until the operation of the actuating member is completed. A time SAT1 is stored in the storage unit as a second operation time, from when the drive control unit issues a drive command for the valve until the actuation member starts operating from the first position. A time VAT2 and a time SAT2 from when the actuating member starts operating to when the actuating member completes its operation are stored, and the measuring unit calculates the third operating time of the actuator in the first stroke. A time VT1 from when the drive control unit issues a drive command for the valve until the actuating member starts operating from the first position, and when the actuating member starts operating and the operation of the actuating member is completed. The measurement unit measures the time ST1 from when the drive control unit issues the drive command for the valve to the fourth operation time of the actuator in the second stroke. The first determination unit measures a time VT2 from when the actuating member starts to operate from the first position and a time ST2 from when the actuating member starts to act until the actuating member completes its operation. , VT1, ST1, VAT2, SAT2, VT2, and ST2, it is determined whether there is an abnormality in the valve or the cylinder.

According to the fourth aspect of the present disclosure, the first determination unit determines whether all of the following conditions (I) to (III) are satisfied,
(I) (VT1+ST1)-(VAT1+SAT1)>0
(II) (VT2+ST2)-(VAT2+SAT2)>0
(III) | {(VT1+ST1)-(VAT1+SAT1)}-{(VT2+ST2)-(VAT2+SAT2)}|<(first threshold)
When the first determination unit determines that all of the conditions (I) to (III) are satisfied, it outputs a valve abnormality signal indicating that there is an abnormality in the valve.

According to the fifth aspect of the present disclosure, the determination unit includes a second determination unit that determines whether or not there is an abnormality in the cylinder, and the second determination unit includes VAT1, SAT1, VT1, ST1. , VAT2, SAT2, VT2, and ST2, it is determined whether or not there is an abnormality in the cylinder.

According to the sixth aspect of the present disclosure, the second determination unit determines whether all of the conditions (I), (II), and the following condition (IV) are satisfied,
(IV) {(VT1+ST1)-(VAT1+SAT1)}-{(VT2+ST2)-(VAT2+SAT2)}>(2nd threshold)
When the second determination unit determines that all of the conditions (I), (II), and (IV) are satisfied, it outputs a cylinder abnormality signal indicating that there is an abnormality in the cylinder.

According to the seventh aspect of the present disclosure, the first determination unit further includes a notification unit that notifies an operator of a valve abnormality and a cylinder abnormality, and when the first determination unit determines that there is an abnormality in the valve, the first determination unit notifies the operator of the valve abnormality. When the second determining section determines that there is an abnormality in the cylinder, the second determining section causes the notifying section to notify the cylinder abnormality.

According to an eighth aspect of the present disclosure, there is provided a component mounting device for mounting a component on a board, which includes: a lower receiving part provided below a board fixing part for fixing the board; an actuator having a cylinder that raises and lowers the lower receiving part; and a valve that controls the flow of the fluid; The lower receiving part is driven along a first stroke to a position and a second stroke from the first position to a third position at a height between the first position and the second position. a drive control section that controls the actuator, a first operation time of the actuator that moves the lower receiving part by the first stroke after the drive control section issues a drive command to the valve; a storage section in which a second operation time of the actuator for moving the actuator to the second stroke after commanding the valve to drive is previously measured and stored; and a storage section in which the drive control section commands the valve to drive. a third operating time of the actuator for moving the lower receiving portion by the first stroke; and a fourth operating time for the actuator for moving the actuator by the second stroke after the drive control unit issues a drive command to the valve. and a measurement unit that measures, and determines whether or not there is an abnormality in the valve and the cylinder based on a combination of the first operation time, the second operation time, the third operation time, and the fourth operation time. A determination unit that makes a determination.

According to a ninth aspect of the present disclosure, the component mounting device further includes a first detection section that detects the lower receiving section at the first position, and a second detecting section that detects the lower receiving section at the second position. and a third detection section that detects the lower receiving section at the third position.

According to a tenth aspect of the present disclosure, the determination unit includes a first determination unit that determines whether or not there is an abnormality in the valve, and stores the driving time as the first operation time in the storage unit. A time VAT1 from when the control unit issues a drive command for the valve until the lower receiver starts operating from the first position; and A time SAT1 until completion is stored, and the storage section stores, as a second operation time, a time period in which the lower receiving section starts operating from the first position from the time when the drive control section issues a drive command for the valve. A time VAT2 until the start of the operation and a time SAT2 from the start of the operation of the lower support part to the completion of the operation of the lower support part are stored, and the measurement unit is configured to measure the movement of the actuator in the first stroke. The third operation time is a time VT1 from when the drive control section issues a drive command for the valve until the lower receiver starts operating from the first position, and a time VT1 when the lower receiver starts operating from the first position. and measures a time ST1 until the operation of the lower receiving part is completed, and the measuring part measures the time ST1 when the drive control part issues a drive command for the valve as the fourth operation time of the actuator in the second stroke. Measure the time VT2 from when the lower receiver starts operating from the first position, and the time ST2 from when the lower receiver starts operating until the lower receiver completes its operation. , the first determination unit determines whether there is an abnormality in the valve or the cylinder based on the times VAT1, SAT1, VT1, ST1, VAT2, SAT2, VT2, and ST2.

According to the eleventh aspect of the present disclosure, the first determination unit determines whether all of the following conditions (I) to (III) are satisfied,
(I) (VT1+ST1)-(VAT1+SAT1)>0
(II) (VT2+ST2)-(VAT2+SAT2)>0
(III) | {(VT1+ST1)-(VAT1+SAT1)}-{(VT2+ST2)-(VAT2+SAT2)}|<(first threshold)
When the first determination unit determines that all of the conditions (I) to (III) are satisfied, it outputs a valve abnormality signal indicating that there is an abnormality in the valve.

According to the twelfth aspect of the present disclosure, the determination unit includes a second determination unit that determines whether or not there is an abnormality in the cylinder, and the second determination unit includes VAT1, SAT1, VT1, ST1. , VAT2, SAT2, VT2, and ST2, it is determined whether or not there is an abnormality in the cylinder.

According to the thirteenth aspect of the present disclosure, the second determination unit determines whether all of the conditions (I), (II), and the following condition (IV) are satisfied,
(IV) {(VT1+ST1)-(VAT1+SAT1)}-{(VT2+ST2)-(VAT2+SAT2)}>(2nd threshold)
When the second determination unit determines that all of the conditions (I), (II), and (IV) are satisfied, it outputs a cylinder abnormality signal indicating that there is an abnormality in the cylinder.

According to a fourteenth aspect of the present disclosure, the first determination unit further includes a notification unit that notifies an operator of a valve abnormality and a cylinder abnormality, and when the first determination unit determines that there is an abnormality in the valve, the first determination unit notifies the operator of the valve abnormality. When the second determining section determines that there is an abnormality in the cylinder, the second determining section causes the notifying section to notify the cylinder abnormality.

(Embodiment 1)
Below, an actuator diagnosis system 1 in an embodiment of the present disclosure will be described with reference to FIG. 1. FIG. 1 is an overall configuration diagram schematically showing an actuator diagnosis system 1 in the first embodiment.

The actuator diagnosis system 1 includes an actuator 3 to be diagnosed, an information processing device 5 as a diagnostic device for diagnosing abnormalities in the actuator, and a notification section 7.

The actuator 3 includes a cylinder 11 driven by fluid, a valve 13 that controls the flow of fluid, a fluid pressure source 15, a first detection section 23 that detects the position of the actuating member 32 of the cylinder 11, and a second detection section 23 that detects the position of the actuation member 32 of the cylinder 11. It includes a detection section 25 and a third detection section 27.

The actuating member 32 of the cylinder 11 linearly reciprocates within the cylinder tube 31 by the pressure of fluid supplied from the fluid pressure source 15. At least a portion of the actuating member 32 is within the cylinder tube 31 , and at least a portion of the actuating member 32 projects outside the cylinder tube 31 . The actuating member 32 includes, for example, a piston 33 and a piston rod 35 extending linearly from the piston 33. Note that the actuating member 32 also includes a driven object driven by the piston rod 35. A first port 37 and a second port 39 are provided on the side of the cylinder tube 31 from which the piston rod 35 projects, and the first port 37 and the second port 39 are each connected to the valve 13 by piping. There is.

The pressure of the fluid supplied from the fluid pressure source 15 acts alternately on the first main surface 33a and the second main surface 33b of the piston 33, so that the actuating member 32 can reciprocate. Whether pressure is applied to the first main surface 33a or the second main surface 33b is determined by switching the switching mechanisms R1 and R2 of the valve 13 (ie, ON and OFF). By controlling the switching timing of the valve 13 by the information processing device 5, the actuating member 32 can move through two types of strokes.

The first detection unit 23 outputs a first detection signal to the information processing device 5 when the piston 33 of the cylinder 21 is at the first position P1, as shown in FIG. 2A. The first position P1 is one end of the path along which the actuating member 32 of the cylinder 21 moves, and is, for example, the position where the piston rod 35 protrudes the most.

The second detection unit 25 outputs a second detection signal to the information processing device 5 when the piston 33 of the cylinder 21 is at the second position P2, as shown in FIG. 2B. The second position P2 is the other end of the path along which the actuating member 32 moves, and is, for example, the position where the piston rod 35 is most accommodated within the cylinder tube 31.

The third detection unit 27 outputs a third detection signal to the information processing device 5 when the piston 33 of the cylinder 21 is at the third position P3, as shown in FIG. 2C. The third position P3 is a position between the first position P1 and the second position P2.

The first to third detection units 23 to 27 are, for example, transmissive or reflective photoelectric sensors. In the first embodiment, the position of the piston 33 of the actuating member 32 is detected, but in order to detect the position of the actuating member 32, the position of the piston rod 35 may be detected, or the position of the piston rod 35 may be detected. The position of the connected object to be driven may be detected.

A first stroke is when the actuating member 32 moves between the first position P1 and the second position P2, and a second stroke is when the actuating member 32 moves between the first position P1 and the third position P3.

Please refer to FIG. The valve 13 switches the flow direction of the fluid supplied from the fluid pressure source 15. The valve 13 is, for example, a solenoid valve, and is switched according to a valve control signal from the information processing device 5.

Fluid pressure source 15 supplies pressurized fluid to cylinder 11 via valve 13 . The fluid is, for example, air (gas) or a liquid such as oil. In the first embodiment, air will be described as a fluid.

The information processing device 5 performs drive control of the actuator 3 and diagnoses abnormalities. The information processing device 5 includes a drive control section 41 that controls the amount of drive of the cylinder 11, a storage section 43, a measurement section 45, and a determination section 47. The information processing device 5 includes, for example, a processor or an FPGA. The storage unit 43 is a storage device including at least one of a memory, a hard disk, an SSD, etc., and stores processing programs for each of the drive control unit 41, measurement unit 45, and determination unit 47.

The drive control unit 41 controls switching of the switching mechanisms R1 and R2 of the valve 13 by transmitting a drive command instructing switching of the valve 13 to the valve 13. Thereby, the drive control unit 41 drives the cylinder 11 so that the actuating member 32 is positioned at one of the first position P1 to the third position P3. When positioning the actuating member 32 at the third position P3, the drive control unit 41 turns off both switching mechanisms R1 and R2.

The storage unit 43 stores, as the first operation time TA1, the initial time from when the drive control unit 41 issues a drive command for the valve 13 until the operation of the actuating member 32 for the first stroke is completed. Further, as the second operation time TA2, an initial time from when the drive control unit 41 issues a drive command for the valve 13 until the operation of the actuating member 32 of the second stroke is completed is stored. The first operation time TA1 and the second operation time TA2 are the previous initial operation times measured when the actuator 3 was installed. The initial operating time is the operating time when the actuator 3 is in a normal state without deterioration over time.In addition to the operating time measured at the time of installation, it may also be the operating time measured after maintenance is completed, or it may be the operating time actually measured. A preset time may be used instead of the set time.

The notification unit 7 notifies the user of the diagnosis result of the actuator 3 by the information processing device 5. The notification unit 7 is, for example, a display or a speaker.

The measurement unit 45 measures the first operation time TA1 of the actuator 3 in the first stroke and the second operation time TA2 of the actuator 3 in the second stroke by using a timer, for example, and stores the measured time in the storage unit 43. The first operation time TA1 and the second operation time TA2 are stored. Furthermore, the third operating time TA3 of the actuator 3 during the first stroke and the fourth operating time TA4 of the actuator 3 during the second stroke during actuator diagnosis are measured. The first operation time TA1 to the fourth operation time TA4 are, respectively, after the drive control section 41 transmits a drive control signal to the actuator 3 and when the cylinder 21 is activated by any one of the first detection section 23 to the third detection section 27. Measure the time until detection disappears.

The initial first operation time TA1 in the first stroke is the initial time VAT1 from when the drive control unit 41 issues a drive command for the valve 13 until the actuation member 32 starts operating from the first position P1, and the operation time TA1. This is the sum of the initial time SAT1 from when the member 32 starts its operation until it reaches the second position P2 and when the operation of the actuating member 32 is completed.
TA1=VAT1+SAT1

The initial second operation time TA2 in the second stroke is the initial time VAT2 from when the drive control unit 41 issues a drive command for the valve 13 until the actuation member 32 starts operating from the first position P1, and the operation time TA2. This is the sum of the initial time SAT2 from when the member 32 starts its operation until it reaches the third position P3 and when the operation of the actuating member 32 is completed.
TA2=VAT2+SAT2
Here, since no abnormality has occurred in the valve 13 during the initial first operating time TA1 and second operating time TA2, the valve operating times VAT1 and VAT2 are the same time (VAT1=VAT2).

The current third operation time TA3 in the first stroke is the time VT1 from when the drive control unit 41 issues a drive command for the valve 13 until the actuation member 32 starts operating from the first position P1, and This is the sum of the initial time ST1 from when the actuating member 32 starts its operation until it reaches the second position P2 and the operation of the actuating member 32 is completed.
TA3=VT1+ST1

The current fourth operation time TA4 in the second stroke is the time VT2 from when the drive control unit 41 issues a drive command for the valve 13 until the actuation member 32 starts operating from the first position P1, and This is the sum of the time ST2 from when the actuating member 32 starts its operation until it reaches the third position P3 and the operation of the actuating member 32 is completed.
TA4=VT2+ST2

With reference to FIG. 3, measurement of the first to fourth operating times TA1 to TA4 will be described. FIG. 3 is a timing diagram illustrating detection. 3(a) shows the timing at which the drive control unit 41 outputs the drive signal Sgv, and FIG. 3(b) shows the timing at which the first detection unit 23 outputs the first detection signal Sg1 when the actuating member 32 is detected. shows. 3(c) shows the timing at which the second detection unit 25 outputs the second detection signal Sg2 when the actuating member 32 is detected, and FIG. 3(d) shows the timing when the third detecting unit 27 detects the actuating member 32. The timing of outputting the third detection signal Sg3 is shown.

When the piston 33 is at the first position P1, the first detection unit 23 continues to send the first detection signal Sg1 to the information processing device 5, as shown in FIG. 3(b). Next, as shown in FIG. 3A, a drive signal Sgv as a drive command is transmitted from the drive control unit 41 to the valve 13 at t1, for example. The valve 13 is switched by the drive signal Sgv, and the piston 33 starts moving from the first position P1. When the piston 33 is no longer detected by the first detection unit 23, the first detection signal Sg1 is no longer transmitted, as shown in FIG. 3(b). This time (t2-t1) becomes the VAT1 at the first operating time TA1 or the VT1 at the third operating time TA3.

In the case of the first stroke, when the piston 33 reaches the second position P2, the second detection unit 25 starts sending the second detection signal Sg2 to the information processing device 5 at t4, as shown in FIG. 3(c). Therefore, the time (t4-t2) becomes SAT1 at the first operating time TA1 or ST3 at the third operating time TA3.

The operation time of the first stroke of the actuator 3 is determined from the time when the drive signal Sgv is transmitted from the drive control unit 41 to the valve 13 and the second time when the actuating member 32 reaches the second position P2 or the first position P1 of the movement destination. This is the time until the detection unit 25 or the first detection unit 23 detects. Specifically, the time (t4-t1) becomes the first operating time TA1 or the third operating time TA3.

In the case of the second stroke, when the piston 33 reaches the third position P3, the third detection unit 27 starts sending the third detection signal Sg3 to the information processing device 5 at t3, as shown in FIG. 3(d). Therefore, the time (t3-t2) becomes SAT2 at the second operating time TA2 or ST4 at the fourth operating time TA4.

The operation time of the second stroke of the actuator 3 is determined by transmitting the drive signal Sgv from the drive control unit 41 to the valve 13, and then detecting whether the actuating member 32 has reached the third position P3 or the first position P1 as the movement destination. This is the time required for detection by the unit 27 or the first detection unit 23. Specifically, the time (t3-t1) becomes the second operating time TA2 or the fourth operating time TA4.

The determination unit 47 determines whether the actuator 3 is abnormal. When the actuator 3 is in an abnormal state, either the valve 13 or the cylinder 11 is considered to be abnormal. Therefore, when determining that the actuator 3 is abnormal, the determination unit 47 further determines whether the valve or the cylinder 11 is abnormal.

The determining section 47 includes a first determining section 47a and a second determining section 47b. The first determination unit 47a determines whether or not the valve is abnormal. The second determination unit 47b determines whether or not the cylinder is abnormal.

Next, a method for diagnosing an abnormality in the actuator 3 by the actuator diagnostic system 1 will be described with reference to FIG. 4. FIG. 4 is a flowchart showing the flow of diagnosing an abnormality in the actuator 3.

The determining unit 47 constantly or periodically determines the operation time of the first stroke or the second stroke of the actuator 3. Time VAT1 and SAT1 are measured and stored in advance in the measurement unit 45 as the first operation time TA1. Times VAT2 and SAT2 are measured in advance by the measuring section 45 and stored in the storage section 43 as the second operating time TA2.

In step S1, if the determining unit 47 determines that the operating time of the first stroke of the actuator 3 is greater than the threshold Th1, or if the operating time of the second stroke is greater than the threshold Th2, the determining unit 47 It is determined that an abnormality has occurred. The thresholds Th1 and Th2 may be the same time or may be different times. The threshold Th1 is, for example, 1.5 s.

If the determining unit 47 determines that the operating time of the first stroke of the actuator 3 is greater than the threshold Th1 or that the operating time of the second stroke is greater than the threshold Th2 (Yes in step S1), the determining unit 47 3 is recognized as having an abnormality, and the first determining section 47a and the second determining section 47b respectively determine whether the valve or the cylinder 11 is abnormal.

If there is an abnormality in the valve 13, the operating time becomes longer regardless of the stroke length of the actuating member 32. The cause of the abnormality in the valve 13 is, for example, that the reaction of the valve becomes slow due to deterioration over time. If there is an abnormality in the cylinder 11, the delay in operation time increases as the stroke length increases. The abnormality in the cylinder 11 is caused by, for example, the movement of the piston 33 slowing down when foreign matter gets mixed into the cylinder tube 31.

Utilizing these characteristics, it is determined whether there is an abnormality in the cylinder 11 or the valve 13 using information on the operating times of both the first stroke and the second stroke. The determination unit 47 makes a determination based on, for example, a combination of each initial operation time (first operation time TA1, second operation time TA2) and current operation time (third operation time TA3, fourth operation time TA4). do.

When the determining unit 47 determines that the actuator 3 is abnormal, the first determining unit 47a determines whether the valve 13 is abnormal. In step S2, the determining unit 47 reads the first operating time TA1 (VAT1, SAT1) and the second operating time TA2 (VAT2, SAT2) stored in the storage unit 43.

In step S3, the measurement unit 45 measures the third operation time TA3 (VT1, ST1) and fourth operation time TA4 (VT2, ST2) of the actuator 3 in the first stroke. Time VT1 and ST1 are each measured as a measurement of the third operation time TA3, and time VT2 and ST2 are respectively measured as a measurement of the fourth operation time TA4.

In step S4, the first determination unit 47a determines whether three conditions regarding the abnormality of the valve 13 are satisfied. The three conditions regarding the abnormality of the valve 13 are conditions (I), (II), and (III) shown below.

(VT1+ST1)-(VAT1+SAT1)>0...(I)
(VT2+ST2)-(VAT2+SAT2)>0...(II)
|{(VT1+ST1)-(VAT1+SAT1)}-{(VT2+ST2)-(VAT2+SAT2)}|<(first threshold)...(III)

The first threshold of condition (III) is, for example, 10 ms.

The operation of moving the actuating member 32 along the first stroke (hereinafter referred to as the "first operation") and the operation of moving the actuating member 32 along the second stroke (hereinafter referred to as the "second operation") The difference is that the distance of the first stroke is longer than the distance of the second stroke. On the other hand, the common point between the first operation and the second operation is the opening/closing operation of the valve 13 (excluding the timing of the opening/closing operation).

When conditions (I) and (II) are satisfied, the operation of the actuator 3 is delayed in both the first stroke and the second stroke compared to the initial state of the actuator 3. The cause of this delay is at least either an abnormality in the valve 13 or an abnormality in the cylinder 11.

If the valve 13 is normal and the cylinder 11 is abnormal, VT1≈VAT1, VT2≈VAT2, ST1-SAT1>ST2-SAT2. Here, the reason ST1-SAT1>ST2-SAT2 is that the distance of the first stroke is longer than the distance of the second stroke. In this case, condition (III) is not satisfied.

On the other hand, if an abnormality has occurred in the valve 13 and the cylinder 11 is normal, ST1≈SAT1, ST2≈SAT2, and VT1-VAT1≈VT2-VAT2. Here, the reason why VT1-VAT1≈VT2-VAT2 is that the opening and closing operations of the valve 13 are common in the first operation and the second operation, as described above. In this case, condition (III) is satisfied. From the above, if all conditions (I) to (III) are satisfied, it can be determined that an abnormality has occurred in the valve 13. In this way, it can be easily determined that the cause of the delay in the operation of the actuator 3 is an abnormality in the valve 13.

When the first determination unit 47a determines that the three conditions regarding the abnormality of the valve 13 are satisfied (Yes in step S4), based on this determination result, the information processing device 5 determines whether the valve 13 which is stored in the storage unit 43 Valve abnormality information indicating the occurrence of an abnormality is transmitted to the notification section 7. In step S5, the notification unit 7 notifies the operator of the received valve abnormality information. When the notification unit 7 is a display, it displays the occurrence of an abnormality in the valve 13, and when the notification unit 7 is a speaker, it outputs audio information notifying the occurrence of an abnormality in the valve 13.

If the first determination unit 47a determines that the three conditions regarding the abnormality of the valve 13 are not satisfied (No in step S4), the second determination unit 47b determines whether all three conditions regarding the abnormality of the cylinder 11 are satisfied in step S6. Determine. The three conditions regarding the abnormality of the cylinder 11 are the conditions (I) and (II) described above, and the condition (IV) shown below.
{(VT1+ST1)-(VAT1+SAT1)}-{(VT2+ST2)-(VAT2+SAT2)}>(2nd threshold)...(IV)

The second threshold of the condition (IV) is, for example, 250 ms.

When conditions (I) and (II) are satisfied, the operation of the actuator 3 is delayed in both the first stroke and the second stroke compared to the initial state of the actuator 3. If there is no abnormality in the valve 13, VT1≒VAT1≒VT2≒VAT2, and if conditions (I), (II), and (IV) are satisfied, the cause of the delay in the operation of the actuator 3 is an abnormality in the cylinder 11. This can be easily determined.

If the second determination unit 47b determines that all three conditions (I), (II), and (IV) regarding the abnormality of the cylinder 11 are satisfied (Yes in step S6), the information processing device 5 Cylinder abnormality information indicating the occurrence of an abnormality in the cylinder 11 stored in the storage section 43 is transmitted to the notification section 7. In step S7, the notification unit 7 notifies the operator of the received cylinder abnormality information. When the notification section 7 is a display, it displays the occurrence of an abnormality in the cylinder 11, and when the notification section 7 is a speaker, it outputs audio information notifying the occurrence of an abnormality in the cylinder 11.

If the second determination unit 47b determines that the three conditions regarding the abnormality of the valve 13 are not satisfied (No in step S6), the determination unit 47 determines that no abnormality has occurred in both the valve 13 and the cylinder 11 of the actuator 3. It is determined that the diagnosis of the actuator 3 is completed.

The flow of the above-mentioned diagnosis will be explained by showing a more specific example. For example, assume that the distance of the first stroke is 30 cm, the distance of the second stroke is 10 cm, the initial speed of the cylinder 11 is 10 cm/s, and the speed of the cylinder 11 after an abnormality occurs is 5 cm/s. Further, the operating time of the valve 13 during normal operation is 1 s, and the operating time during abnormal operation is 3 s.

Initially, both valve 13 and cylinder 11 are normal. The initial first operation time TA1 in the first stroke and the initial second operation time TA2 in the second stroke are measured as follows.
TA1=VAT1+SAT1=1s+3s=4s
TA2=VAT2+SAT2=1s+1s=2s

If an abnormality occurs in the valve 13 after the actuator 3 has been operated and a period of time has elapsed,
TA3=VT1+ST1=3s+3s=6s
TA4=VT2+ST2=3s+1s=4s
Regarding the condition (I), TA3-TA1=6s-4s=2s>0
Regarding the condition (II), TA4-TA2=4s-2s=2s>0
Regarding the condition (III), |{(TA3)-(TA1)}-{(TA4)-(TA2)}|=|(6-4)-(4-2)|=0<first threshold

When an abnormality occurs in the valve 13, the difference in stroke length of the cylinder 11 is unlikely to be reflected in the difference in measurement time, so the condition (III) becomes a value close to 0.

If an abnormality occurs in the cylinder 11 after operating the actuator 3 and time has elapsed,
TA3=VT1+ST1=1s+6s=7s
TA4=VT2+ST2=1s+2s=3s
Regarding the condition (I), TA3-TA1=7s-4s=3s>0
Regarding the condition (II), TA4-TA2=3s-2s=1s>0
For the condition (IV), {(TA3)-(TA1)}-{(TA4)-(TA2)}=(7-3)-(3-2)=3>second threshold

When an abnormality occurs in the cylinder 11, the longer the stroke length, the larger the difference, so the condition (IV) becomes a value far from 0.

According to the first embodiment, the actuator diagnostic system 1 includes an actuator 3 having a cylinder 11 driven by air and a valve 13 for controlling the flow of air, and an actuator 3 having a cylinder 11 driven by air, a valve 13 for controlling the flow of air, and an actuator 3 at one end of a path along which an actuating member 32 of the cylinder 11 moves. A first stroke from a certain first position P1 to a second position P2 which is the other end of the path, and a first stroke from the first position P1 to a third position P3 between the first position P1 and the second position P2. A drive control unit 41 is provided that controls the actuator 3 so that the cylinder 11 is driven along two strokes. The actuator diagnosis system 1 further includes a first operation time TA1 during which the actuator 3 moves a first stroke after the drive control section 41 issues a drive command to the valve 13, and a first operation time TA1 during which the actuator 3 moves for the first stroke after the drive control section 41 issues a drive command to the valve 13. 3 is provided with a storage section 43 in which a second operation time TA2 during which the second stroke moves is previously measured and stored. The actuator diagnosis system 1 further includes a third operation time TA3 during which the actuator 3 moves the first stroke after the drive control unit 41 issues a drive command to the valve 13, and a third operation time TA3 during which the actuator 3 moves for the first stroke after the drive control unit 41 issues a drive command to the valve 13. 3 is provided with a measurement unit 45 that measures a fourth operation time TA4 during which the motor 3 moves by the second stroke. The actuator diagnostic system 1 further determines whether or not there is an abnormality in the valve 13 and the cylinder 11 based on the combination of the first operating time TA1, the second operating time TA2, the third operating time TA3, and the fourth operating time TA4. A determination unit 47 is provided to determine whether the

With these configurations, the determination unit 47 determines whether there is an abnormality in the valve 13 and the cylinder 11 based on the combination of the first operation time TA1, the second operation time TA2, the third operation time TA3, and the fourth operation time TA4. Since it is determined whether the abnormality is present or not, it is possible to know whether the valve 13 or the cylinder 11 is abnormal. As a result, it is possible to know before maintenance whether to perform maintenance on the valve 13 or the cylinder 11, so maintenance time can be significantly shortened and maintainability of the actuator 3 can be improved. can.

(Embodiment 2)
Next, a component mounting apparatus 61 including an actuator diagnosis system according to a second embodiment of the present disclosure will be described with reference to FIG. 5 and FIGS. 6A to 6C. FIG. 5 is a perspective view showing the entire component mounting device 61 in the second embodiment. 6A to 6C are side views of the board transport section 72 included in the component mounting device 61. Since the component mounting device 61 of the second embodiment includes the actuator diagnosis system 1 of the first embodiment, components having common functions are given common reference numerals. Therefore, common explanations are omitted.

As shown in FIG. 5, the component mounting device 61 is a device for mounting components 63 on a board 62, and includes a board transport section 72, a component supply section 73, and a component mounting section 74 on a base 71. Here, for convenience of explanation, the transport direction of the board 62 in the component mounting device 61 (arrow A shown in FIG. 5) is assumed to be the X-axis direction (the left-right direction as seen from the operator OP), and the direction in the horizontal plane perpendicular to the X-axis direction (The front-rear direction as seen from the worker OP) is the Y-axis direction. Further, the vertical direction is the Z-axis direction.

In FIGS. 5, 6A, and 6B, the substrate conveyor 72 includes a conveyor 81 that conveys the substrate 62 in the X-axis direction, and a conveyor 81 that is disposed above the center of the conveyor 81 in the X-axis direction to face each other in the Y-axis direction. A pair of flat board fixing parts 82, a lower receiving part 83 provided below the pair of board fixing parts 82 (below the conveyor 81), and an actuator 3 for raising and lowering the lower receiving part 83 are provided.

The conveyor 81 conveys the substrate 62 sent from the upstream side and stops it at a predetermined stop position.

In FIG. 7, the lower receiving portion 83 includes a base plate 83a and a plurality of lower receiving pins 83b erected on the base plate 83a. A large number of pin insertion holes 83c are provided in a matrix on the upper surface of the base plate 83a, and each lower receiving pin 83b is selectively inserted into the pin insertion hole 83c and stands upright.

See FIG. 8A. In the second embodiment, the actuating member 32 of the cylinder 11 includes a lower receiving part 83 connected to the piston rod 35. By driving the actuator 3, the actuating member 32 moves by a first stroke from a second position P2 detected by the second detection section 25 to a first position P1 detected by the first detection section 23. As a result, the cylinder 11 raises the lower support part 83 from below the board 62 stopped at the stop position, and pushes up the entire board 62 with the lower support pins 83b in contact with the lower surface of the board 62 (FIG. 6A →Figure 6B). As a result, both ends of the substrate 62 in the Y-axis direction are separated from the transport conveyor 81, and are pressed from below against the pair of substrate fixing parts 82, so that the substrate 62 is fixed at the stop position.

Furthermore, the actuating member 32 is moved by the second stroke from the first position P1 detected by the first detection unit 23 to the third position P3 detected by the third detection unit 27 by driving the actuator 3. Thereby, the cylinder 11 can lower the lower receiving part 83 and stand by with the lower receiving pin 83b separated from the substrate 62 at a height between the first position P1 and the second position P2 ( Figure 6B → Figure 6C).

As shown in FIG. 8B, the first detection section 23 to the third detection section 27 are, for example, photoelectric sensors, and the protrusion piece 83d protruding outward from the lower receiving section 83 blocks the light of the photoelectric sensor. The lower receiving portion 83 is detected.

In FIG. 5, the parts supply section 73 includes a plurality of parts feeders 73a (for example, tape feeders) attached to a base 71. Each parts feeder 73a continuously supplies parts 63 to a parts supply port 73p.

The component mounting section 74 includes a head moving mechanism 91 provided on the base 71 and a mounting head 92 moved by the head moving mechanism 91. The head moving mechanism 91 includes an orthogonal coordinate table provided on the base 71, and moves the mounting head 92 in the horizontal plane. The mounting head 92 is provided with a plurality of suction nozzles 92a extending downward.

The mounting head 92 is provided with a board camera 93 whose imaging field of view is directed downward, and a component camera whose imaging field of view is directed upward is provided at a position between the board transport section 72 and the component supply section 73 on the base 71. 94 are provided. The board camera 93 takes an image of a pair of board marks 62K provided at one diagonal corner of the board 62, and the component camera 94 takes an image of the component 63 picked up by the suction nozzle 92a.

As shown in FIG. 9, the information processing device 5A controls various drives of the component mounting device 61. The information processing device 5A also includes a conveyor drive motor 81a, an actuator 3, a board detection sensor 85, a parts feeder 73a, a head moving mechanism 91, a nozzle drive mechanism 92A, a suction mechanism 92B, a board camera 93, a parts camera 94, and a notification section. 7 and are communicably connected to each other. The storage unit 43 of the information processing device 5A stores mounting data, component data, and data on the operating time of the actuator 3, respectively. The mounting data includes, for example, information on the mounting positions and mounting order of components that are mounted or to be mounted on the upper and lower surfaces of the board 2. The component data includes information on the shape (size, height) of the component 63. The operating time data includes a first operating time TA1 and a second operating time TA2.

When the information processing device 5A stops the substrate 2 at the stop position, the drive control unit 41 operates the actuator 3 to raise the lower receiving portion 83 to lift and support the substrate 2 from below. Thereby, both ends of the board 62 are pressed and fixed against the board fixing part 82 from below. In this manner, the lower receiving section 83 is operated under the control of the drive control section 41 and performs a lower receiving step of supporting the substrate 62 stopped by the transport conveyor 81 from below.

When the substrate 2 is fixed, the information processing device 5A moves the mounting head 92 in a horizontal plane by the head moving mechanism 91, positions the substrate camera 93 above the substrate 62, and detects the two substrate marks provided on the substrate 62. Performs 62K imaging. By performing image recognition on the two obtained images of the board marks 62K in the image recognition unit 42, a positional deviation of the board 62 from the normal working position is detected. The board camera 93 is controlled by the information processing device 5A and recognizes the board mark 62K provided on the board 62 that is lowered by the lower receiver 83.

When the information processing device 5A detects a positional shift of the substrate 2, the information processing device 5A controls the operation of the head moving mechanism 91 to move the mounting head 92 above the component supply section 73, and causes each parts feeder 73a to feed the component 63. At the same time, the operation of the nozzle drive mechanism 92A and suction mechanism 92B is controlled to cause the suction nozzle 92a to suction and pick up the component 63. Then, the mounting head 92 is moved so that the component 63 picked up by the suction nozzle 92a passes above the component camera 94, and the component camera 94 images the component 63 and performs image recognition of the image data obtained thereby. , the positional deviation (suction deviation) of the component 63 with respect to the suction nozzle 92a is determined.

After determining the positional deviation of the component 63 with respect to the suction nozzle 92a, the information processing device 5A moves the mounting head 92 so that the component 63 is positioned above the substrate 62. Then, the suction nozzle 92a is lowered to mount the component 63 on the board 62. The information processing device 5A performs positional correction (including rotational correction) of the suction nozzle 32a with respect to the substrate 62 so that the already determined positional deviation of the substrate 62 and suction deviation of the component 63 are corrected. When the information processing device 5A has finished mounting all the components 63 to be mounted on the board 2, the information processing device 5A operates the board transport section 12 to transport the board 62 to the outside of the component mounting device 61.

According to the second embodiment, a component mounting device 61 that mounts a component 63 on a board 62 includes a lower receiving part 83 provided below a board fixing part 82 that fixes the board 62, and a lower receiving part 83 that is driven by a fluid. The actuator 3 includes a cylinder 11 that raises and lowers the lower receiving part 83 and a valve 13 that controls the flow of fluid. The component mounting device 61 further includes a first stroke from a first position P1, which is one end of the path along which the lower receiving part 83 moves, to a second position P2, which is lower than the first position P1, and a first stroke from the first position P1 to a second position P2, which is lower than the first position P1. It includes a drive control unit 41 that controls the actuator 3 so that the lower receiving part 83 is driven along a second stroke to a third position P3 at a height between the first position P1 and the second position P2. . The component mounting device 61 further includes a first operation time TA1 of the actuator 3 for moving the lower receiving part 83 by a first stroke after the drive control unit 41 issues a drive command to the valve 13, and a first operation time TA1 of the actuator 3 for moving the lower receiving part 83 by a first stroke. The storage unit 43 includes a storage unit 43 in which a second operation time TA2 of the actuator 3 for moving the actuator 3 by a second stroke after the command is given is previously measured and stored. The component mounting device 61 further includes a third operating time TA3 of the actuator 3 for moving the lower receiving part 83 by the first stroke after the drive control unit 41 issues a drive command to the valve 13, and a third operation time TA3 for the actuator 3 to move the lower receiving part 83 by the first stroke; A measurement unit 45 is provided that measures a fourth operation time TA4 of the actuator 3 during which the actuator 3 is moved by a second stroke after a command is issued. The component mounting device 61 further determines whether there is an abnormality in the valve 13 and the cylinder 11 based on the first operating time TA1, the second operating time TA2, the third operating time TA3, and the fourth operating time TA4. A determination unit 47 is provided.

With these configurations, the determination unit 47 determines whether there is an abnormality in the valve 13 and the cylinder 11 based on the combination of the first operation time TA1, the second operation time TA2, the third operation time TA3, and the fourth operation time TA4. Since it is determined whether the valve 13 or the cylinder 11 is abnormal, it is possible to know which of the valves 13 or the cylinders 11 is abnormal, and the maintenance time for the actuator 3 can be significantly shortened.

In addition, since the cylinder 11 that raises and lowers the lower receiving part 83 has two types of stroke lengths, a first stroke and a second stroke, either stroke length can be used depending on the state of the board 62, and the takt time can be reduced. Can be shortened. For example, if the component 63 is already mounted on the lower surface (back surface) of the board 62 being carried in, the board 62 is carried in with the lower receiving part 83 lowered to the second position P2 located downward by the first stroke. This makes it possible to prevent interference between the component 63 mounted on the lower surface of the board 62 and the lower receiving pin 83b during delivery. After carrying in, the lower receiving part 83 is moved to the first position P1 to support the board 62, and then the board 62 is mounted. After mounting, by moving the lower receiving part 83 to the second position P2 again and carrying out the board 62, it is possible to prevent interference between the component 63 mounted on the lower surface of the board 62 and the lower receiving pin 83b during carrying out. can.

In addition, if the component 63 is not attached to the lower surface of the board 62 that has been carried in, the lower receiving part 83 can be moved by lowering it to the third position P3 with the second stroke when the board 62 is being carried in or out. The amount can be reduced, and the takt time can be shortened.

Although this disclosure has been fully described with reference to preferred embodiments and with reference to the accompanying drawings, various variations and modifications will become apparent to those skilled in the art. It is to be understood that such variations and modifications are included insofar as they do not depart from the scope of the disclosure as defined by the appended claims. Furthermore, changes in the combination and order of elements in each embodiment can be realized without departing from the scope and spirit of the present disclosure.

(1) In the above embodiment, each of the times VAT1, SAT1, VT1, ST1, VAT2, SAT2, VT2, and ST2 measured by the measurement unit 45 may be a single measurement time or an average time measured multiple times. But that's fine.

(2) In the above embodiments, the component mounting device includes the actuator diagnosis system, but the present invention is not limited to this. It can also be used in other devices that use actuators, such as various processing units that perform substrate processing on semiconductor wafers or glass substrates for photomasks, and substrate processing equipment equipped with units that carry in and out of substrates. Can be done.

(3) In the above embodiment, the timing at which the actuator diagnostic system 1 diagnoses abnormalities in the actuator 3 may be performed automatically periodically or when the operator instructs execution of the diagnostic mode. You can. Since the actuator diagnosis system 1 has a diagnosis mode, an abnormality can be diagnosed at any timing instructed by the operator.

Note that by appropriately combining any of the various embodiments and modifications described above, the effects of each of them can be achieved.

The actuator diagnostic system according to the present disclosure is applicable to an actuator having a cylinder driven by fluid.

1 Actuator diagnosis system 3 Actuator 5 Information processing device 7 Notification unit 11 Cylinder 13 Valve 15 Fluid pressure source 23 First detection unit 25 Second detection unit 27 Third detection unit 31 Cylinder tube 32 Operating member 33 Piston 33a First main surface 33b Second main surface 35 Piston rod 37 First port 39 Second port 41 Drive control section 43 Storage section 45 Measurement section 47 Judgment section 47a First judgment section 47b Second judgment section 61 Component mounting device 62 Board 62K Board mark 63 Component 71 Base 72 Board transport section 73 Component supply section 73a Parts feeder 73p Component supply port 74 Component mounting section 81 Transport conveyor 82 Board fixing section 83 Lower receiving section 83a Base plate 83b Pin 83c Pin insertion hole 83d Projection piece 91 Head moving mechanism 92 Mounting head 92a Suction nozzle 92A Nozzle drive mechanism 92B Suction mechanism 93 Board camera 94 Parts camera

Claims (14)

an actuator having a cylinder driven by a fluid and a valve that controls the flow of the fluid;
a first stroke from a first position that is one end of a path along which the actuating member of the cylinder moves to a second position that is the other end of the path; and a drive control unit that controls the actuator so that the cylinder is driven along a second stroke to a third position between the positions;
A first operation time during which the actuator moves the first stroke after the drive control unit issues a drive command to the valve, and a first operation time during which the actuator moves the second stroke after the drive control unit issues a drive command to the valve. a storage unit in which a second operation time is previously measured and stored;
a third operation time during which the actuator moves the first stroke after the drive control unit issues a drive command to the valve; and a third operation time during which the actuator moves the second stroke after the drive control unit issues a drive command to the valve. a measurement unit that measures a fourth operation time;
a determination unit that determines whether or not there is an abnormality in the valve and the cylinder based on a combination of the first operation time, the second operation time, the third operation time, and the fourth operation time; prepare,
Actuator diagnostic system. a first detection unit that detects the actuating member at the first position;
a second detection unit that detects the actuating member at the second position;
a third detection unit that detects the actuating member at the third position;
The actuator diagnostic system according to claim 1. The determination unit includes a first determination unit that determines whether or not there is an abnormality in the valve,
The storage unit stores, as the first operation time, a time VAT1 from when the drive control unit issues a drive command for the valve until the actuation member starts operating from the first position, and when the actuation member starts operating from the first position. A time SAT1 from the start of the operation to the completion of the operation of the actuating member is stored;
The storage unit stores, as the second operation time, a time VAT2 from when the drive control unit issues a drive command for the valve until the actuation member starts operating from the first position, and when the actuation member starts operating from the first position. A time SAT2 from the start of the operation to the completion of the operation of the actuating member is stored;
The measurement unit is configured to measure, as a third operation time of the actuator in the first stroke, a time period from when the drive control unit issues a drive command for the valve until the actuation member starts operating from the first position. measuring VT1 and a time ST1 from when the actuating member starts operating to when the actuating member completes its operation;
The measurement unit is configured to measure, as a fourth operation time of the actuator in the second stroke, a time period from when the drive control unit issues a drive command for the valve until the actuation member starts operating from the first position. measuring VT2 and a time ST2 from when the actuating member starts operating to when the actuating member completes its operation;
The first determination unit determines whether there is an abnormality in the valve or the cylinder based on times VAT1, SAT1, VT1, ST1, VAT2, SAT2, VT2, and ST2.
The actuator diagnostic system according to claim 1 or 2. The first determination unit determines whether all of the following conditions (I) to (III) are satisfied,
(I) (VT1+ST1)-(VAT1+SAT1)>0
(II) (VT2+ST2)-(VAT2+SAT2)>0
(III) | {(VT1+ST1)-(VAT1+SAT1)}-{(VT2+ST2)-(VAT2+SAT2)}|<(first threshold)
The first determination unit outputs a valve abnormality signal indicating that there is an abnormality in the valve when determining that all of the conditions (I) to (III) are satisfied.
The actuator diagnostic system according to claim 3. The determination unit includes a second determination unit that determines whether or not there is an abnormality in the cylinder,
The second determination unit determines whether or not there is an abnormality in the cylinder based on VAT1, SAT1, VT1, ST1, VAT2, SAT2, VT2, and ST2.
The actuator diagnostic system according to claim 4. The second determination unit determines whether all of the conditions (I), (II), and the following condition (IV) are satisfied,
(IV) {(VT1+ST1)-(VAT1+SAT1)}-{(VT2+ST2)-(VAT2+SAT2)}>(2nd threshold)
The second determination unit outputs a cylinder abnormality signal indicating that there is an abnormality in the cylinder when determining that all of the conditions (I), (II), and (IV) are satisfied.
The actuator diagnostic system according to claim 5. It is further equipped with a notification section that notifies the operator of valve abnormalities and cylinder abnormalities,
When the first determination unit determines that there is an abnormality in the valve, the first determination unit causes the notification unit to notify the valve abnormality;
When the second determination unit determines that there is an abnormality in the cylinder, the second determination unit causes the notification unit to notify the cylinder abnormality.
The actuator diagnostic system according to claim 6. A component mounting device that mounts components on a board,
a lower receiving part provided below a board fixing part that fixes the board;
an actuator that is driven by a fluid and includes a cylinder that raises and lowers the lower receiving part, and a valve that controls the flow of the fluid;
A first stroke from a first position, which is one end of a path along which the lower receiving part moves, to a second position lower than the first position, and a stroke from the first position to the first position and the second position. a drive control unit that controls the actuator so that the lower receiving part is driven along a second stroke to a third position at a height between;
A first operation time of the actuator for moving the lower receiving part by the first stroke after the drive control section issues a drive command to the valve; a storage unit in which a second operation time of the actuator for a second stroke movement is previously measured and stored;
a third operation time of the actuator for moving the lower receiving part by the first stroke after the drive control section issues a drive command to the valve; a measurement unit that measures a fourth operation time of the actuator that is moved by a second stroke;
a determination unit that determines whether or not there is an abnormality in the valve and the cylinder based on a combination of the first operation time, the second operation time, the third operation time, and the fourth operation time; prepare,
Parts mounting device. a first detection section that detects the lower receiving section at a first position;
a second detection unit that detects the lower receiving part at the second position;
a third detection section that detects the lower receiving section at the third position;
The component mounting device according to claim 8. The determination unit includes a first determination unit that determines whether or not there is an abnormality in the valve,
The storage section stores, as the first operation time, a time VAT1 from when the drive control section issues a drive command for the valve until the lower receiver starts operating from the first position, and the lower receiver. A time SAT1 from when the lower support section starts to operate until the operation of the lower support section is completed is stored;
The storage section stores, as a second operation time, the time VAT2 from when the drive control section issues a drive command for the valve until the lower receiver starts operating from the first position, and the lower receiver. A time SAT2 from when the lower receiver starts its operation to when the lower receiver completes its operation is stored;
The measurement unit is configured to determine, as a third operation time of the actuator in the first stroke, a period from when the drive control unit issues a drive command for the valve until the lower receiving unit starts operating from the first position. measuring a time VT1 and a time ST1 from when the lower receiver starts operating until the lower receiver completes its operation;
The measurement unit is configured to determine, as a fourth operation time of the actuator in the second stroke, a period from when the drive control unit issues a drive command for the valve until the lower receiving unit starts operating from the first position. Measuring time VT2 and time ST2 from when the lower receiver starts operating until the lower receiver completes its operation;
The first determination unit determines whether there is an abnormality in the valve or the cylinder based on times VAT1, SAT1, VT1, ST1, VAT2, SAT2, VT2, and ST2.
The component mounting device according to claim 8 or 9. The first determination unit determines whether all of the following conditions (I) to (III) are satisfied,
(I) (VT1+ST1)-(VAT1+SAT1)>0
(II) (VT2+ST2)-(VAT2+SAT2)>0
(III) | {(VT1+ST1)-(VAT1+SAT1)}-{(VT2+ST2)-(VAT2+SAT2)}|<(first threshold)
The first determination unit outputs a valve abnormality signal indicating that there is an abnormality in the valve when determining that all of the conditions (I) to (III) are satisfied.
The component mounting device according to claim 10. The determination unit includes a second determination unit that determines whether or not there is an abnormality in the cylinder,
The second determination unit determines whether or not there is an abnormality in the cylinder based on VAT1, SAT1, VT1, ST1, VAT2, SAT2, VT2, and ST2.
The component mounting device according to claim 11. The second determination unit determines whether all of the conditions (I), (II), and the following condition (IV) are satisfied,
(IV) {(VT1+ST1)-(VAT1+SAT1)}-{(VT2+ST2)-(VAT2+SAT2)}>(2nd threshold)
The second determination unit outputs a cylinder abnormality signal indicating that there is an abnormality in the cylinder when determining that all of the conditions (I), (II), and (IV) are satisfied.
The component mounting device according to claim 12. It is further equipped with a notification section that notifies the operator of valve abnormalities and cylinder abnormalities,
When the first determination unit determines that there is an abnormality in the valve, the first determination unit causes the notification unit to notify the valve abnormality;
When the second determination unit determines that there is an abnormality in the cylinder, the second determination unit causes the notification unit to notify the cylinder abnormality.
The component mounting device according to claim 13.

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