JP7387466B2 - Observation jig - Google Patents

Description

The present invention relates to an observation jig used when observing the side surface of a chip.

The wafer, on which multiple devices such as ICs and LSIs are divided by dividing lines and formed on the surface, is divided into individual device chips by a dicing machine equipped with a rotatable cutting blade, and each divided device chip is made into a portable device. Used in electrical equipment such as telephones and computers.

In addition, a chip size package substrate called QFN (Quad Flat Non-leaded package), in which multiple device chips are arranged on a wiring board and packaged with mold resin, is also divided into individual packaged device chips by a dicing machine (for example, (See Patent Document 1).

In QFN, electrodes are formed across adjacent devices and are arranged across the planned dividing line, so when the planned dividing line is cut with a cutting blade, the electrodes stretch due to the ductility of the metal, causing a short circuit between the electrodes. There is a risk of For this reason, the packaged device chip is attached to an adhesive tape with the side surface facing upward, and the side surface is observed using a microscope to detect whether or not the electrodes are short-circuited.

JP 2019-145558 Publication

However, since the package device is small, measuring only a few mm square, and the thickness of the package device is thin, considerable care is required to attach the side surface of the package device chip to the adhesive tape, and the side surface of the package device chip is There is a problem in that it is difficult to keep the device facing upward, and it takes time and effort to observe the side surface of the packaged device chip using a microscope.

An object of the present invention, made in view of the above facts, is to provide an observation jig for easily observing the side surface of a chip such as a packaged device chip.

In order to solve the above problems, the present invention provides the following observation jig. That is, it is an observation jig used to observe the side surface of a chip, and includes a table with an adhesive layer on the surface for holding the chip, and a table that can be rotated to change from a face down state to an upright state. a frame body supporting the table and having a through opening formed corresponding to the back surface of the table; a base having a protrusion that is inserted into the through opening and changes the table from a down state to an upright state; The present invention provides an observation jig having:

Preferably, the frame supports a plurality of the tables, and the base includes a plurality of the protrusions corresponding to the plurality of tables.

The observation jig of the present invention includes a table having an adhesive layer on its surface that holds chips, a rotatable support for the table so as to change from a face down state to an upright state, and a support for the back surface of the table. It has a frame body having a through-opening formed as a through-hole, and a base having a protrusion that is inserted into the through-opening and changes the table from a down state to an upright state. It is now possible to easily turn the side of the object upward and observe it with a microscope, which solves the problem of time-consuming observation with a microscope.

FIG. 1 is an exploded perspective view of an observation jig constructed according to the present invention. FIG. 2 is a perspective view showing a state in which chips are held on the table shown in FIG. 1; (a) A perspective view showing a state in which the frame body is placed on a base together with a table holding a chip, and (b) a perspective view showing a state in which the table changes from a face down state to an upright state.

Hereinafter, preferred embodiments of an observation jig constructed according to the present invention will be described with reference to the drawings.

The observation jig, which is generally designated by the reference numeral 2 in FIG. 1, includes a table 4 whose surface is provided with an adhesive layer for holding chips, and a table 4 that is rotatably supported so as to change from a face down state to an upright state. It also has a frame 6 having a through opening formed corresponding to the back surface of the table 4, and a base 8 having a protrusion that is inserted into the through opening and changes the table 4 from a down state to an upright state.

The table 4 is formed into a rectangular plate shape, and a rectangular adhesive layer 10 for holding chips is provided on the surface of the table 4. The size of the adhesive layer 10, which may be the same as the size of the surface of the table 4, is preferably a size that can hold chips of various sizes, and may be, for example, about 1 cm x 1 cm. As can be understood by referring to FIG. 1, the surface of the table 4 is formed flat, while the back surface of the table 4 is formed with a step, and the table 4 has a relatively thick first surface. It has a portion 12 and a second portion 14 that is thinner than the first portion 12. Each table 4 in the illustrated embodiment is provided with a pair of cylindrical shafts 18 protruding from the side surface 16 of the first portion 12, and the pair of shafts 18 are arranged at positions facing each other.

The frame body 6 is formed into a rectangular shape as a whole, and a pair of rectangular through openings 20 capable of accommodating the table 4 are formed at intervals in the longitudinal direction of the frame body 6. A plurality of circular support holes 24 into which the shaft 18 of the table 4 is inserted are formed in the inner circumferential surface 22 of the frame 6, and the support holes 24 are arranged at positions facing each other. The frame body 6 rotatably supports the table 4 so that when each shaft 18 of the table 4 is inserted into each support hole 24, the table 4 changes from a face down state to an upright state. .

As shown in FIG. 1, a pair of protruding pieces 26 protruding from the lower portion of the inner circumferential surface 22 are arranged in each through-opening 20 at an interval L1 in the longitudinal direction of the frame 6. As shown in FIG. When the table 4 is supported by the frame 6, the second portion 14 of the table 4 is supported by each protruding piece 26. In this way, the shape of each through opening 20 is formed to correspond to the shape of the back surface of the table 4.

The base 8 includes a main portion 28 having an overall rectangular parallelepiped shape, and a pair of protrusions 30 that protrude upward from the upper surface of the main portion 28 at intervals in the longitudinal direction of the main portion 28 . Each protrusion 30 is arranged on one side of the main part 28 in the lateral direction, and is located between a pair of protruding pieces 26 formed in each through opening 20 when the frame 6 is placed on the upper surface of the main part 28. It is located so that it is located at The dimension L2 of the protrusion 30 in the longitudinal direction of the main portion 28 is slightly smaller than the interval L1 between the pair of protrusion pieces 26 formed in each through opening 20. Further, a pair of rectangular accommodation openings 32 are formed on the other side of the main portion 28 in the longitudinal direction at intervals in the longitudinal direction of the main portion 28 .

Then, the frame 6 supporting the table 4 is placed on the upper surface of the main part 28 of the base 8, and each protrusion 30 of the base 8 is inserted into each through opening 20 of the frame 6. When each protrusion 30 passes between the pair of protruding pieces 26 formed, each protrusion 30 pushes the back surface of the second portion 14 of each table 4 upward, causing each table 4 to rotate and stand up from its prone position. It is designed to change the state. Moreover, when each table 4 changes to an upright state, the first portion 12 of each table 4 is accommodated in each accommodation opening 32 of the base 8.

Next, a method of observing the side surface of a chip using the observation jig 2 as described above will be explained. In the illustrated embodiment, as shown in FIG. 2, first, the chip 34 is held on the adhesive layer 10 of the table 4 rotatably supported by the frame 6.

The chip 34 in the illustrated embodiment is a rectangular plate-shaped chip in which a chip size package substrate called QFN is divided into individual package device chips, and electrodes 36 are exposed on the front surface 34a and side surface 34b of the chip 34. ing.

Next, as shown in FIG. 3, the frame 6 is placed on the upper surface of the main part 28 of the base 8, and each protrusion 30 of the base 8 is inserted into each through opening 20 of the frame 6. Each protrusion 30 is passed between the pair of protrusion pieces 26 formed. Then, the back surface of the second portion 14 of each table 4 is pushed upward by each protrusion 30, and each table 4 rotates and changes from a prone state to an upright state, and the first portion of each table 4 12 are housed in each housing opening 32 of the base 8. As a result, as shown in FIG. 3(b), the side surfaces 34b of the chips 34 held on each table 4 can be turned upward, and the side surfaces 34b of the chips 34 can be observed using a microscope. Even when each table 4 rotates or after each table 4 rotates and changes to an upright state, the chip 34 is held by the adhesive layer 10 of the table 4, so the side surface 34b of the chip 34 is The facing state is maintained stably.

As described above, the observation jig 2 of the illustrated embodiment includes a table 4 having an adhesive layer 10 on its surface that holds a chip 34, and a table 4 that changes from a face down state to an upright state. A frame body 6 rotatably supported and provided with a through opening 20 formed corresponding to the back surface of the table 4, and a protrusion 30 inserted into the through opening 20 to change the table 4 from a down state to an upright state. Since the chip 34 has a base 8 that has a base 8, it is possible to easily turn the side surface 34b of the chip 34 upward and observe it with a microscope, thereby solving the problem that observation with a microscope takes time and effort.

Although the frame 6 in the illustrated embodiment supports a pair of tables 4, the frame 6 may also support one table 4, or three or more tables 4. The table 4 may be supported. Although the base 8 in the illustrated embodiment includes a pair of protrusions 30, the base 8 may include one or more protrusions 30 depending on the number of tables 4. Further, a plurality of observation jigs 2 of the illustrated embodiment may be connected.

2: Observation jig 4: Table 6: Frame 8: Base 10: Adhesive layer 20: Through opening 30: Protrusion 34: Chip 34a: Surface of chip 34b: Side surface of chip

Claims (2)

An observation jig used for observing the side surface of a chip,
a table with an adhesive layer on its surface that holds chips;
a frame body rotatably supporting the table so as to change from a face down state to an upright state, and having a through opening formed corresponding to the back surface of the table;
An observation jig comprising: a base having a protrusion that is inserted into the through opening and changes the table from a down state to an upright state. 2. The observation jig according to claim 1, wherein the frame supports a plurality of the tables, and the base includes a plurality of the protrusions corresponding to the plurality of tables.