JP7465761B2 - Crucible, evaporation source and deposition device - Google Patents

Description

The present invention relates to a crucible, an evaporation source, and an evaporation apparatus used for vacuum deposition.

In a deposition apparatus for performing vacuum deposition, an evaporation source for evaporating or sublimating a film-forming material (evaporation material) is provided. The evaporation source is provided with a crucible in which the film-forming material is contained. A crucible according to a conventional example will be described with reference to FIG. 17. FIG. 17 is a schematic cross-sectional view showing a part of a crucible according to a conventional example. The crucible 500 includes a crucible body 510 having an opening for inserting and removing a container containing the film-forming material, a lid 520 for closing the opening of the crucible body 510, and a metal gasket 530 for sealing the gap between the crucible body 510 and the lid 520. In the crucible 500 according to the conventional example, annular protrusions 511 and 521 are provided on the crucible body 510 and the lid 520, respectively, and a configuration is adopted in which the annular protrusions 511 and 521 are inserted into the gasket 530. By adopting this configuration, a stable seal is achieved.

However, in the case of the above configuration, the annular protrusions 511, 521 leave marks on the gasket 530 where they have dug into it. As a result, after several uses, the desired sealing performance cannot be achieved and the gasket 530 must be replaced with a new one, resulting in increased costs.

JP 2004-353082 A JP 2015-209593 A

The object of the present invention is to provide a crucible, evaporation source, and deposition device that can extend the durability life of a gasket.

In order to solve the above problems, the present invention provides
a crucible body having an opening for inserting and removing a container for accommodating a film forming material;
A cover that closes the opening;
a metal gasket for sealing a gap between the crucible body and the lid;
A crucible comprising:
The opening end surface side of the opening in the crucible body is surrounded by a plurality of planar inclined surfaces, or is surrounded by a plurality of planar inclined surfaces and a plurality of curved surfaces connecting adjacent planar inclined surfaces, so that the opening area gradually narrows toward the inside of the crucible body,
The outer wall surface of the gasket is provided with a plurality of sealing surfaces that are in surface contact with the plurality of planar inclined surfaces of the crucible body, or with the plurality of planar inclined surfaces and the plurality of curved surfaces that connect adjacent planar inclined surfaces, and
The gasket is characterized in that a surface of the lid or a member provided between the lid and the gasket that comes into contact with the gasket is formed of a flat surface.

According to the present invention, the gasket is configured to be in surface contact with the crucible body. The surface of the gasket that contacts the lid or a member provided between the lid and the gasket is configured as a flat surface. Therefore, unlike the conventional technology, no protrusion marks are left on the gasket. In addition, the opening end side of the opening in the crucible body is configured to be surrounded by multiple flat inclined surfaces so that the opening area gradually narrows toward the inside of the crucible body, and the outer wall surface of the gasket is provided with multiple sealing surfaces that are in surface contact with these inclined surfaces. Therefore, the so-called wedge effect allows the gasket and the crucible body to come into contact with a large force, improving the sealing performance.

As explained above, the present invention can extend the durability of the gasket.

FIG. 2 is a schematic diagram of a deposition apparatus. FIG. 1 is a schematic diagram of a crucible according to a first embodiment of the present invention. 1 is a schematic diagram of a gasket according to a first embodiment of the present invention; FIG. 2 is a schematic diagram of a crucible body according to the first embodiment of the present invention. FIG. 2 is a schematic configuration diagram of a lid according to the first embodiment of the present invention. FIG. 2 is a schematic cross-sectional view showing a part of a crucible according to the first embodiment of the present invention. FIG. 11 is a schematic cross-sectional view showing a part of an evaporation source according to a second embodiment of the present invention. FIG. 11 is a control flow diagram of an evaporation source according to a second embodiment of the present invention. FIG. 11 is a schematic cross-sectional view showing a part of an evaporation source according to a third embodiment of the present invention. FIG. 11 is a schematic cross-sectional view showing a part of an evaporation source according to a fourth embodiment of the present invention. FIG. 11 is a schematic cross-sectional view showing a part of an evaporation source according to a fifth embodiment of the present invention. FIG. 13 is a schematic cross-sectional view showing a part of a crucible according to Example 6 of the present invention. FIG. 13 is a schematic cross-sectional view showing a part of an evaporation source according to a seventh embodiment of the present invention. FIG. 13 is a schematic cross-sectional view showing a part of an evaporation source according to an eighth embodiment of the present invention. FIG. 13 is a schematic cross-sectional view showing a part of an evaporation source according to a ninth embodiment of the present invention. FIG. 23 is a schematic cross-sectional view showing a part of an evaporation source according to a tenth embodiment of the present invention. FIG. 11 is a schematic cross-sectional view showing a part of a crucible according to a conventional example.

The following describes in detail the embodiments of the present invention with reference to the drawings. However, unless otherwise specified, the dimensions, materials, shapes, and relative positions of the components described in the embodiments are not intended to limit the scope of the present invention.

Example 1
A crucible, an evaporation source, and a deposition apparatus according to a first embodiment of the present invention will be described with reference to FIGS.

<Vapor deposition equipment>
1 is a schematic diagram of a deposition apparatus. The deposition apparatus 1 includes a chamber 2 configured to be in a near-vacuum state (reduced pressure atmosphere) by a vacuum pump 3, and an evaporation source 10 disposed inside the chamber 2. The evaporation source 10 serves to evaporate or sublimate a material (film-forming material, evaporation material) to be evaporated onto a substrate B by heating the material. The material evaporated or sublimated by the evaporation source 10 is attached to the evaporation surface (surface on the evaporation source 10 side) of the substrate B placed inside the chamber 2, thereby forming a thin film on the substrate B.

The evaporation source 10 includes a crucible 100, a heater 200 for heating the crucible 100, and a control device 300 for controlling the operation of the heater 200. Note that the control device 300 in this embodiment is configured to control the operation of not only the heater 200 but also the entire deposition device 1, including the vacuum pump 3.

<Crucible>
FIG. 2 is a schematic diagram of a crucible according to Example 1 of the present invention, in which FIG. 2(a) is a plan view of the crucible, and FIG. 2(b) is a cross-sectional view along the line AA in FIG. 2(a). FIG. 3 is a schematic diagram of a gasket according to Example 1 of the present invention, in which FIG. 2(a) is a plan view of the gasket, and FIG. 2(b) is a cross-sectional view along the line BB in FIG. 2(a). FIG. 4 is a schematic diagram of a crucible body according to Example 1 of the present invention, in which FIG. 2(a) is a front view of the crucible body (viewed from the side where the gasket is arranged), and FIG. 2(b) is a cross-sectional view along the line CC in FIG. 2(a). FIG. 5 is a schematic diagram of a lid according to Example 1 of the present invention, in which FIG. 2(a) is a rear view of the lid (viewed from the side where the gasket is in close contact), and FIG. 2(b) is a cross-sectional view along the line DD in FIG. 2(a).

The crucible 100 according to this embodiment includes a crucible body 110 having an opening 111 for inserting and removing a container 130 containing a film-forming material 120, a lid 140 for closing the opening 111, and a metal gasket 150 for sealing the gap between the crucible body 110 and the lid 140. The crucible body 110 and the lid 140 are fixed by a fixing device 160. Note that various known techniques such as bolts and nuts may be used for the fixing device 160. The crucible body 110 is also provided with an outlet 112 for releasing the evaporated or sublimated film-forming material 120 toward the substrate B.

The opening end side of the opening 111 in the crucible body 110 is surrounded by a plurality of planar inclined surfaces 111a so that the opening area gradually narrows toward the inside of the crucible body 110. In this embodiment, the crucible body 110 is rectangular and has four inclined surfaces 111a. The crucible body 110 is also provided with a screw shaft 113. It is also possible to adopt a configuration in which the opening end side of the opening 111 in the crucible body 110 is surrounded by a plurality of planar inclined surfaces 111a and a plurality of curved surfaces 111b connecting adjacent planar inclined surfaces 111a so that the opening area gradually narrows toward the inside of the crucible body 110. In FIG. 4, a part of the case where such a configuration is adopted is shown in the circled area.

The outer wall surface of the gasket 150 is provided with a plurality of sealing surfaces 151 that are provided so as to come into surface contact with the plurality of planar inclined surfaces 111a of the crucible body 110. In this embodiment, four sealing surfaces 151 are provided. In addition, in the case where the opening end side of the opening 111 is surrounded by a plurality of planar inclined surfaces 111a and a plurality of curved surfaces 111b connecting adjacent planar inclined surfaces 111a in the crucible body 110, the gasket 150 may be configured as follows. That is, the outer wall surface of the gasket 150 may be provided with a plurality of sealing surfaces 151, 151a that come into surface contact with the plurality of planar inclined surfaces 111a of the crucible body 110 and the plurality of curved surfaces 111b connecting adjacent planar inclined surfaces 111a. A part of the case where such a configuration is adopted is shown in the circle in FIG. 3. It goes without saying that sealing surface 151 is flat and sealing surface 151a is curved. Also, both sides of gasket 150 are flat.

The lid 140 is made of a flat plate-like member. Therefore, the surface of the lid 140 with which the gasket 150 comes into contact is made of a flat surface. The lid 140 is also provided with insertion holes 141 through which the screw shafts 113 are inserted. Thus, the lid 140 is attached to the crucible body 110 so that the screw shafts 113 are inserted into the respective insertion holes 141, and is fixed by the fixing devices 160 (nuts).

<Behavior of the crucible>
6 is a schematic cross-sectional view showing a part of the crucible according to the first embodiment of the present invention. In the crucible 100 according to this embodiment, when the lid 140 is fixed to the crucible body 110 by the fixing device 160, the multiple sealing surfaces 151 of the gasket 150 are pushed toward the inside of the crucible body 110. As a result, the multiple sealing surfaces 151 come into contact (closely adhere) with a large force to the multiple planar inclined surfaces 111a of the crucible body 110 due to the wedge effect. Here, when the lid 140 is fixed to the crucible body 110 by the fixing device 160, or when the gasket 150 thermally expands and contracts, the multiple sealing surfaces 151 of the gasket 150 slide against the multiple planar inclined surfaces 111a of the crucible body 110. In the crucible 100 according to this embodiment, the range Y in which the multiple planar inclined surfaces 111a are provided in the crucible body 110 is configured to be larger than the range X in which the multiple sealing surfaces 151 in the gasket 150 can slide (see FIG. 6). The same applies to the case where the crucible body 110 has a configuration in which the opening end side of the opening 111 is surrounded by multiple planar inclined surfaces 111a and multiple curved surfaces 111b connecting adjacent planar inclined surfaces 111a, and the gasket 150 has multiple sealing surfaces 151, 151a. The same applies to the configurations described below.

In this embodiment, the materials of the gasket 150 are selected so that the linear expansion coefficient of the material is greater than that of the crucible body 110 and greater than that of the lid 140. For example, it is preferable to use aluminum as the material of the gasket 150 and titanium as the materials of the crucible body 110 and the lid 140.

During the deposition process, the crucible 100 is heated by the heater 200 to evaporate or sublimate the film-forming material 120, and the crucible 100 is in a high-temperature state. In such a temperature environment during deposition, the gasket 150 thermally expands, causing the multiple sealing surfaces 151 (sealing surfaces 151, 151a) to adhere with greater force to the multiple planar inclined surfaces 111a (planar inclined surface 111a and curved surface 111b) of the crucible body 110.

<Advantages of the crucible, evaporation source, and deposition apparatus according to this embodiment>
According to this embodiment, the gasket 150 is configured to make surface contact with the crucible body 110. The surface where the gasket 150 contacts the lid 140 is configured as a flat surface. Therefore, unlike the conventional technology, no protrusion marks are left on the gasket 150. Therefore, the durability life of the gasket 150 can be extended, and the gasket 150 can be used more than in the conventional technology. This also reduces costs. In addition, due to the wedge effect, the multiple sealing surfaces 151 (sealing surfaces 151, 151a) of the gasket 150 can come into contact with the multiple planar inclined surfaces 111a (planar inclined surface 111a and curved surface 111b) of the crucible body 110 with a large force, thereby improving the sealing performance.

In this embodiment, the range Y in which the multiple planar inclined surfaces 111a (the planar inclined surface 111a and the curved surface 111b) in the crucible body 110 are provided is configured to be larger than the range X in which the multiple sealing surfaces 151 (sealing surfaces 151, 151a) in the gasket 150 can slide. This allows the multiple sealing surfaces 151 (sealing surfaces 151, 151a) in the gasket 150 to be more reliably in surface contact with the crucible body 110, thereby suppressing deformation of the gasket 150. That is, it is possible to prevent the boundary portion between the prismatic inner peripheral surface and the inclined surface 111a of the inner peripheral surface of the opening 111 in the crucible body 110, and the boundary portion between the inclined surface 111a and the end surface of the crucible body 110 from being cut into the gasket 150.

Furthermore, under the temperature environment during deposition, the gasket 150 thermally expands, and the multiple sealing surfaces 151 (sealing surfaces 151, 151a) adhere with greater force to the multiple planar inclined surfaces 111a (planar inclined surface 111a and curved surface 111b) of the crucible body 110, thereby providing sufficient sealing.

As described above, this embodiment provides sufficient sealing, especially during deposition.

Example 2
In this embodiment, the configuration of the evaporation source is provided with measures against leakage of the film-forming material after the deposition process. Since the basic configuration and operation are the same as those of the first embodiment, the same components are given the same reference numerals and the description thereof is omitted as appropriate.

Figure 7 is a schematic cross-sectional view showing a part of an evaporation source according to Example 2 of the present invention, and is an enlarged cross-sectional view showing a portion that shows a configuration different from Example 1. Figure 8 is a control flow diagram of the evaporation source according to Example 2 of the present invention.

The overall configuration of the deposition apparatus in this embodiment is the same as that in Example 1. The configuration of the crucible 100 in this embodiment is also the same as that in Example 1.

The evaporation source 10A according to this embodiment is equipped with a first heater 210 for heating the crucible body 110 and a second heater 220 for heating the gasket 150 as heaters for heating the crucible 100. In this embodiment, the control device 300 turns on both the first heater 210 and the second heater 220 during deposition, and turns off the first heater 210 and then the second heater 220 after deposition is completed. The control method for the evaporation source 10A according to this embodiment will be described below with reference to the control flow of FIG. 8.

When the control device 300 receives a command to start the deposition process (S0), it turns on the first heater 210 (heater for the crucible) (S1) and the second heater 220 (heater for the gasket) (S2). The timing of turning them on may be reversed or may be simultaneous. By turning on the first heater 210 and the second heater 220, the crucible 100 is heated, and when the environmental temperature inside the crucible reaches a certain level or higher, the film forming material evaporates or sublimes, and the deposition process is performed. Then, the control device 300 judges whether or not to end the deposition based on a preset program process (S4). As a result, the deposition process continues while the deposition is not completed (S3), and when it is determined that the deposition is completed, the first heater 210 is turned off (S5).

Thereafter, the control device 300 judges whether or not to turn off the second heater 220 (S6). Here, the timing at which the control device 300 turns off the second heater 220 is set based on the temperature of the crucible body 110 dropping to a temperature at which the film-forming material does not sublime or evaporate. For example, it is possible to judge whether or not the time elapsed since the first heater 210 was turned off has reached a predetermined time, and set the second heater 220 to be turned off at the timing at which the time has passed. In other words, it is sufficient to set the time required for the temperature of the crucible body 110 to drop to a temperature at which the film-forming material does not sublime or evaporate after the first heater 210 is turned off. This time can be set based on experimental data, empirical rules, and the like. In addition, a sensor for measuring the temperature of the crucible body 110 is provided, and a control for turning off the second heater 220 at the timing at which the temperature measured by the sensor drops to a temperature at which the film-forming material does not sublime or evaporate can be adopted. As described above, the control device 300 determines whether or not to turn off the second heater 220 (S6), and turns off the second heater 220 (S7), thereby completing the heating control of the crucible 100A (S8).

As described above, according to the evaporation source 10A of this embodiment, the gasket 150 is heated and expanded even during the period from when the first heater 210 is turned off until when the second heater 220 is turned off, so that a stable sealing performance can be obtained. The timing at which the control device 300 turns off the second heater 220 is set based on the temperature of the crucible body 110 having dropped to a temperature at which the film forming material does not sublimate or evaporate. Therefore, even if the first heater 210 is turned off, a stable sealing function is exerted while the film forming material is sublimating or evaporating.

Example 3
FIG. 9 is a schematic cross-sectional view showing a part of an evaporation source according to a third embodiment of the present invention, and is an enlarged cross-sectional view showing a portion that is different from the first embodiment.

The overall configuration of the deposition apparatus according to this embodiment is the same as that of Example 1. The crucible 100B includes the crucible body 110, the container (not shown), the lid 140, the gasket 150, and the fixture 160, as in Example 1. In addition, the evaporation source 10B according to this embodiment includes a first heater 210 for heating the crucible body 110 and a second heater 220 for heating the gasket 150, as heaters for heating the crucible 100B, as in Example 2. In this embodiment, the second heater 220 is provided between the lid 140 and the gasket 150. The surface of the second heater 220 that the gasket 150 contacts is configured as a flat surface. In this embodiment, the gasket 150 is in close contact with the crucible body 110 and the second heater 220. In this embodiment, the same effect as in Example 1 can be obtained. The heater can be configured with a heater wire attached to a non-conductive metal plate. By using a heater configured in this way as the second heater 220, the gasket 150 is in close contact with the second heater 220, providing a stable sealing function. It is preferable to process the surface of the second heater 200 that comes into contact with the gasket 150 to increase its smoothness.

In this embodiment, similar to the control flow described in the second embodiment, the control device 300 turns on both the first heater 210 and the second heater 220 during deposition, and turns off the first heater 210 and then the second heater 220 after deposition is completed. In this embodiment, too, the same effect as in the second embodiment can be obtained.

Example 4
FIG. 10 is a schematic cross-sectional view showing a part of an evaporation source according to a fourth embodiment of the present invention, and is an enlarged cross-sectional view showing a portion that is different from the first embodiment.

The overall configuration of the deposition apparatus according to this embodiment is the same as that of Example 1. The crucible 100C includes the crucible body 110, a container (not shown), a lid 140, a gasket 150C, and a fixing device 160, as in Example 1. In addition, the evaporation source 10C according to this embodiment includes a first heater 210 for heating the crucible body 110 and a second heater 220 for heating the gasket 150C, as heaters for heating the crucible 100C, as in Example 2. In this embodiment, the gasket 150C is provided with a recess 152 for arranging the second heater 220. The second heater 220 is fixed to the lid 140 so that the second heater 220 is arranged inside the recess 152. In this embodiment, as in Examples 1 and 2, the gasket 150C is in close contact with the crucible body 110 and the lid 140. In this embodiment, the same effects as in embodiment 1 can be obtained.

In this embodiment, similarly to the control flow described in the second embodiment, the control device 300
In this embodiment, both the first heater 210 and the second heater 220 are turned on during deposition, and after deposition is completed, the first heater 210 is turned off and then the second heater 220 is turned off. In this embodiment, too, the same effects as those in the second embodiment can be obtained.

Example 5
Fifth Embodiment FIG. 11 is a schematic cross-sectional view showing a part of an evaporation source according to a fifth embodiment of the present invention, and is an enlarged cross-sectional view showing a portion that is different from the first embodiment.

The overall configuration of the deposition apparatus according to this embodiment is the same as that of Example 1. The crucible 100D includes a crucible body 110, a container (not shown), a lid 140D, a gasket 150, and a fixing device 160, as in Example 1. In addition, the evaporation source 10D according to this embodiment includes a first heater 210 for heating the crucible body 110 and a second heater 220 for heating the gasket 150, as heaters for heating the crucible 100D, as in Example 2. In this embodiment, the lid 140D is provided with a recess 142 for arranging the second heater 220. The second heater 220 is fixed to the lid 140D so that the second heater 220 is arranged inside the recess 142. In this embodiment, the contact surface (contact surface) of the lid 140D with the gasket 150 is configured as a flat surface. In this embodiment, as in embodiments 1 and 2, the gasket 150 is in close contact with the crucible body 110 and the lid 140D. In this embodiment, the same effect as in embodiment 1 can be obtained.

In this embodiment, similar to the control flow described in the second embodiment, the control device 300 turns on both the first heater 210 and the second heater 220 during deposition, and turns off the first heater 210 and then the second heater 220 after deposition is completed. In this embodiment, too, the same effect as in the second embodiment can be obtained.

Example 6
FIG. 12 is a schematic cross-sectional view showing a part of a crucible according to Example 6 of the present invention, and is an enlarged cross-sectional view showing a portion that is different from Example 1 in configuration.

The overall configuration of the evaporation source and deposition apparatus in this embodiment is the same as in Example 1. The crucible 100E in this embodiment includes a crucible body 110, a container (not shown), a lid 140, a gasket 150, and a fixing device 160, as in Example 1. In this embodiment, too, the same effects as in Example 1 can be obtained.

In this embodiment, the spring 170 is provided as a biasing member that biases the gasket 150 toward the crucible body 110. That is, the fixing device 160 is tightened with the spring 170 disposed between the nut, which is the fixing device 160, and the lid 140. As a result, the gasket 150 is pressed by the lid 140 and biased toward the crucible body 110. By adopting the above-mentioned configuration, it is possible to prevent a gap from being generated between the gasket 150 and the crucible body 110 even in a temperature environment during non-deposition (room temperature environment). Therefore, it is possible to further suppress leakage of the film-forming material after the deposition process.

(Example 7)
FIG. 13 is a schematic cross-sectional view showing a part of an evaporation source according to a seventh embodiment of the present invention, and is an enlarged cross-sectional view showing a portion that is different from the first embodiment.

The overall configuration of the deposition apparatus according to this embodiment is the same as that of Example 1. The evaporation source 10F according to this embodiment also includes a crucible 100F and a heater for heating the crucible 100F, as in Example 1. The crucible 100F includes a crucible body 110, a container (not shown), a lid 140, a gasket 150, and a fixing device 160, as in Example 1. In this embodiment, the spring 170 is provided as a biasing member for biasing the gasket 150 toward the crucible body 110, as in Example 6. This embodiment also provides the same effect as Example 6.

In addition, the evaporation source 10F according to this embodiment is provided with a first heater 210 for heating the crucible body 110 and a second heater 220 for heating the gasket 150 as heaters for heating the crucible 100F. In this embodiment, similar to the control flow described in embodiment 2, the control device 300 turns on both the first heater 210 and the second heater 220 during deposition, and turns off the first heater 210 and then the second heater 220 after deposition is completed. In this embodiment as well, the same effect as in embodiment 2 can be obtained.

As described above, in this embodiment, the effects of Example 6 are added to the effects of Example 2, so that leakage of the film-forming material after the deposition process can be more reliably suppressed.

(Example 8)
FIG. 14 is a schematic cross-sectional view showing a part of an evaporation source according to an eighth embodiment of the present invention, and is an enlarged cross-sectional view showing a portion that is different from the first embodiment.

The overall configuration of the deposition apparatus according to this embodiment is the same as that of Example 1. The evaporation source 10G according to this embodiment also includes a crucible 100G and a heater for heating the crucible 100G, as in Example 1. The crucible 100G includes a crucible body 110, a container (not shown), a lid 140, a gasket 150, and a fixing device 160, as in Example 1. In addition, the evaporation source 10G according to this embodiment includes a first heater 210 for heating the crucible body 110 and a second heater 220 for heating the gasket 150, as heaters for heating the crucible 100G, as in Example 2. In this embodiment, the second heater 220 is provided between the lid 140 and the gasket 150. The surface of the second heater 220 with which the gasket 150 comes into contact is configured as a flat surface. In this embodiment, the gasket 150 is in close contact with the crucible body 110 and the second heater 220. In this embodiment, the same effect as in embodiment 1 can be obtained.

In this embodiment, similar to the control flow described in the second embodiment, the control device 300 turns on both the first heater 210 and the second heater 220 during deposition, and turns off the first heater 210 and then the second heater 220 after deposition is completed. In this embodiment, too, the same effect as in the second embodiment can be obtained.

In this embodiment, as in embodiments 6 and 7, a spring 170 is provided as a biasing member that biases the gasket 150 toward the crucible body 110.

Example 9
15 is a schematic cross-sectional view showing a part of an evaporation source according to a ninth embodiment of the present invention, and is an enlarged cross-sectional view showing a portion that is different from the first embodiment.

The overall configuration of the deposition apparatus according to this embodiment is the same as that of the first embodiment. The evaporation source 10H according to this embodiment also includes a crucible 100H and a heater for heating the crucible 100H. The crucible 100H includes a crucible body 110, a container (not shown), a lid 140, a gasket 150H, and a fixture 160, as in the first embodiment. The evaporation source 10H according to this embodiment also includes a first heater 210 for heating the crucible body 110 and a second heater 220 for heating the gasket 150H, as in the second embodiment. In this embodiment, the gasket 150H is provided with a recess 152 for arranging the second heater 220. The second heater 220 is fixed to the lid 140 so that the second heater 220 is arranged inside the recess 152. In this embodiment, similarly to the first and second embodiments, the gasket 150H is in close contact with the crucible body 110 and the lid 140. In this embodiment as well, the same effects as those in the first embodiment can be obtained.

In this embodiment, similar to the control flow described in the second embodiment, the control device 300 turns on both the first heater 210 and the second heater 220 during deposition, and turns off the first heater 210 and then the second heater 220 after deposition is completed. In this embodiment, too, the same effect as in the second embodiment can be obtained.

In this embodiment, as in embodiments 6 to 8, a spring 170 is provided as a biasing member that biases the gasket 150H toward the crucible body 110.

Example 10
FIG. 16 is a schematic cross-sectional view showing a part of an evaporation source according to a tenth embodiment of the present invention, and is an enlarged cross-sectional view showing a portion that is different from the first embodiment.

The overall configuration of the deposition apparatus according to this embodiment is the same as that of Example 1. As in Example 1, the evaporation source 10I according to this embodiment also includes a crucible 100I and a heater for heating the crucible 100I. As in Example 1, the crucible 100I includes a crucible body 110, a container (not shown), a lid 140I, a gasket 150, and a fixing device 160.

In addition, in the evaporation source 10I according to this embodiment, as in the second embodiment, the heater for heating the crucible 100I includes a first heater 210 for heating the crucible body 110 and a second heater 220 for heating the gasket 150. In this embodiment, the lid 140I is provided with a recess 142 for arranging the second heater 220. The second heater 220 is fixed to the lid 140I so that the second heater 220 is arranged inside the recess 142. In this embodiment, the contact surface (contact surface) of the lid 140I with the gasket 150 is configured as a flat surface. In this embodiment, as in the first and second embodiments, the gasket 150 is in contact with the crucible body 110 and the lid 140I. With the above configuration, the same effect as in the first embodiment can be obtained in this embodiment.

In this embodiment, similar to the control flow described in the second embodiment, the control device 300 turns on both the first heater 210 and the second heater 220 during deposition, and turns off the first heater 210 and then the second heater 220 after deposition is completed. In this embodiment, too, the same effect as in the second embodiment can be obtained.

In this embodiment, as in embodiments 6 to 9, a spring 170 is provided as a biasing member that biases the gasket 150 toward the crucible body 110.

(others)
In Example 1, the configurations shown in the circles in Figures 3 and 4 (the crucible body 110 is provided with the curved surface 111b, and the gasket 150 is provided with the sealing surfaces 151 and 151a) can also be applied to Examples 2 to 10. In Examples 3 and 8, a second heater is provided between the lid and the gasket, and the gasket is in close contact with the second heater, not with the lid. However, in these examples, the second heater can also function as a lid. This eliminates the need to provide a separate lid, and the number of parts can be reduced. In this case, the second heater can also function as a lid by adopting a configuration in which a heater wire is provided on a non-conductive metal plate. In this case, it is preferable to process the contact surface (contact surface) of the second heater with the gasket so that it has a high smoothness.

REFERENCE SIGNS LIST 1 Evaporation device 2 Chamber 3 Vacuum pump 10 Evaporation source 100 Crucible 110 Crucible body 111 Opening 111a Inclined surface 111b Inclined surface 112 Discharge port 113 Screw shaft 120 Film-forming material 130 Container 140 Lid 141 Insertion hole 142 Recess 150 Gasket 151, 151a Sealing surface 160 Fixing tool 170 Spring 200 Heater 210 First heater 220 Second heater 300 Control device

Claims (7)

a crucible body having an opening for inserting and removing a container for accommodating a film forming material;
A cover that closes the opening;
a metal gasket for sealing a gap between the crucible body and the lid;
A crucible comprising:
The opening end surface side of the opening in the crucible body is surrounded by a plurality of planar inclined surfaces, or is surrounded by a plurality of planar inclined surfaces and a plurality of curved surfaces connecting adjacent planar inclined surfaces, so that the opening area gradually narrows toward the inside of the crucible body,
The outer wall surface of the gasket is provided with a plurality of sealing surfaces that are in surface contact with the plurality of planar inclined surfaces of the crucible body, or with the plurality of planar inclined surfaces and the plurality of curved surfaces that connect adjacent planar inclined surfaces, and
A crucible, wherein a surface of the lid or a surface of a member provided between the lid and the gasket that comes into contact with the gasket is formed as a flat surface. The crucible according to claim 1, characterized in that the range in which the multiple planar inclined surfaces in the crucible body, or the multiple planar inclined surfaces and the multiple curved surfaces in the crucible body are provided, is larger than the range in which the multiple sealing surfaces in the gasket can slide. The crucible according to claim 1 or 2, characterized in that the linear expansion coefficient of the material of the gasket is greater than the linear expansion coefficient of the material of the crucible body. The crucible according to claim 1, 2 or 3, characterized in that it is provided with a biasing member that biases the gasket toward the crucible body. A crucible according to claim 1, 2, 3 or 4;
a first heater for heating the crucible body;
a second heater for heating the gasket;
a control device that turns on both the first heater and the second heater during deposition, and turns off the first heater and then the second heater after deposition is completed;
An evaporation source comprising: The evaporation source according to claim 5, characterized in that the timing at which the control device turns off the second heater is set based on the temperature of the crucible body decreasing to a temperature at which the film forming material does not sublimate or evaporate. A chamber;
The evaporation source according to claim 5 or 6, which is provided in the chamber and performs evaporation on an evaporation surface of a substrate placed in the chamber;
A deposition apparatus comprising:

Images