Deprecated: The each() function is deprecated. This message will be suppressed on further calls in /home/zhenxiangba/zhenxiangba.com/public_html/phproxy-improved-master/index.php on line 456
JP7535446B2 - Apparatus and method for evaluating grinding burns on metal parts - Google Patents
[go: Go Back, main page]

JP7535446B2 - Apparatus and method for evaluating grinding burns on metal parts - Google Patents

Apparatus and method for evaluating grinding burns on metal parts Download PDF

Info

Publication number
JP7535446B2
JP7535446B2 JP2020204615A JP2020204615A JP7535446B2 JP 7535446 B2 JP7535446 B2 JP 7535446B2 JP 2020204615 A JP2020204615 A JP 2020204615A JP 2020204615 A JP2020204615 A JP 2020204615A JP 7535446 B2 JP7535446 B2 JP 7535446B2
Authority
JP
Japan
Prior art keywords
diffracted
metal part
grinding
value
width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2020204615A
Other languages
Japanese (ja)
Other versions
JP2022091636A (en
Inventor
孝平 籾井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Noritake Co Ltd
Original Assignee
Noritake Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Noritake Co Ltd filed Critical Noritake Co Ltd
Priority to JP2020204615A priority Critical patent/JP7535446B2/en
Publication of JP2022091636A publication Critical patent/JP2022091636A/en
Application granted granted Critical
Publication of JP7535446B2 publication Critical patent/JP7535446B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)

Description

本発明は、研削加工された金属部品の表面に発生する研削焼けを評価する金属部品の研削焼け評価装置および研削焼け評価方法に関するものである。 The present invention relates to a grinding burn evaluation device and a grinding burn evaluation method for evaluating grinding burns that occur on the surface of ground metal parts.

研削加工された金属部品に発生する研削焼けは、硝酸および塩酸を用いて腐食させた表面を観察する腐食表面観察法(JIS G 0561:2011)が知られている。しかし、この腐食表面観察法では、測定対象となる金属部品の切断工程および研磨工程が必要となるので、多くの工数が必要となること、および、腐食範囲や腐食時間により生じる腐食ムラに起因して研削焼けの評価精度が得られ難いこと等の欠点があった。 A corrosion surface observation method (JIS G 0561:2011) is known for observing grinding burns that occur on ground metal parts by corroding the surface using nitric acid and hydrochloric acid. However, this corrosion surface observation method requires cutting and polishing processes for the metal part to be measured, which requires a lot of man-hours, and has drawbacks such as difficulty in accurately evaluating grinding burns due to uneven corrosion caused by the range of corrosion and the corrosion time.

また、金属部品の表面に圧子を押し当てたときに生じる窪みの大きさを測定することで硬度を測定する硬度測定法(JIS Z 2244:2009、JIS Z 2245:2016)が知られている。しかし、この硬度測定法では、金属部品の極表層に生じる研削焼けを圧子が捉えることが困難であり、母層の硬度が測定値として現れるという欠点があった。 There is also a known hardness measurement method (JIS Z 2244:2009, JIS Z 2245:2016) that measures hardness by measuring the size of the indentation that occurs when an indenter is pressed against the surface of a metal part. However, this hardness measurement method has the disadvantage that it is difficult for the indenter to capture grinding burns that occur on the outermost layer of the metal part, and the hardness of the parent layer is shown as the measured value.

これに対して、X線を金属部品の表面に照射したとき、その金属部品の表面で回折した回折X線の半価幅が予め設定した閾値以下であれば、研削焼けと判定する回折X線を用いた研削焼け評価装置および研削焼け評価方法が提案されている。特許文献1の金属部品の研削焼け検査方法がそれである。これによれば、金属部品の表層に発生する研削焼けの影響を受けた回折X線を用いるので、金属部品の表層の研削焼けを評価することができる。 In response to this, a grinding burn evaluation device and grinding burn evaluation method have been proposed that uses diffracted X-rays to determine that grinding burns have occurred if the half-width of the diffracted X-rays diffracted on the surface of a metal part is equal to or less than a preset threshold value when the X-rays are irradiated onto the surface of the metal part. Patent Document 1 discloses a grinding burn inspection method for metal parts. This method uses diffracted X-rays that are affected by grinding burns that occur on the surface layer of the metal part, making it possible to evaluate grinding burns on the surface layer of the metal part.

特開2004-271355号公報JP 2004-271355 A

ところで、特許文献1の金属部品の研削焼け評価方法によれば、照射X線と回折X線との間の測定角度(角度Ψ)が1つであるため、金属のような多結晶体で複数の格子面を有し且つ極表層に発生する研削焼けを評価するには、充分な精度が得られない。また、回折X線の半価幅が一定値以下すなわち6°以下であるときに金属部品の研削焼けを一律に判定しているが、格子面によって半価幅が異なるため、評価基準としては不適当であった。さらに、研削加工熱の影響の強弱による金属部品の表層の組織が正常組織層よりも軟質な黒層となったり、正常組織層よりも硬質の白層となったりして、必ずしも正確に研削焼けを評価できない場合があった。 However, according to the method for evaluating grinding burns on metal parts in Patent Document 1, the measurement angle (angle Ψ) between the irradiated X-rays and the diffracted X-rays is one, so sufficient accuracy cannot be obtained to evaluate grinding burns that occur on the extreme surface layer of polycrystalline bodies such as metals that have multiple lattice planes. In addition, grinding burns on metal parts are uniformly judged when the half-width of the diffracted X-rays is below a certain value, i.e., 6° or less, but since the half-width differs depending on the lattice plane, this is inappropriate as an evaluation criterion. Furthermore, depending on the strength of the effect of the grinding process heat, the surface structure of the metal part may become a black layer that is softer than the normal tissue layer, or a white layer that is harder than the normal tissue layer, so that grinding burns may not always be evaluated accurately.

本発明は、以上の事情を背景として為されたものであり、その目的とするところは、研削加工された金属部品の表面に発生する研削焼けをより正確に評価することができる金属部品の研削焼け評価装置および研削焼け評価方法を提供することにある。 The present invention has been made against the background of the above circumstances, and its purpose is to provide a grinding burn evaluation device and a grinding burn evaluation method for metal parts that can more accurately evaluate grinding burns that occur on the surface of ground metal parts.

第1発明の要旨とするところは、(a)研削加工された金属部品の表面に発生する研削焼けを評価する金属部品の研削焼け評価装置であって、(b)前記金属部品への入射X線の入射光軸と前記金属部品の表面の法線とが成す角度Ψを変化させて、入射X線を前記金属部品の表面に照射するX線照射制御部と、(c)前記角度Ψ毎に、前記金属部品の表面において回折された回折X線の強度プロファイルを検出する回折X線検出制御部と、(d)前記回折X線検出制御部においてそれぞれ検出された前記角度Ψ毎の回折X線の強度プロファイルから得た半価幅の平均値を算出する半価幅平均値算出部と、(e)前記半価幅の平均値と、研削加工熱の影響を受けた再硬化層である白層よりも半価幅が低く且つ研削加工熱の影響を受けた軟化層である黒層よりも半価幅が高い正常判定領域を有するように予め設定された研削焼け判定閾値との比較に基づいて前記金属部品の研削焼けを評価する研削焼け評価部と、を含むことにある。 The gist of a first invention is that (a) a grinding burn evaluation device for metal parts that evaluates grinding burns occurring on a surface of a ground metal part, the device including: (b) an X-ray irradiation control unit that changes the angle Ψ between the incident optical axis of the X-ray incident on the metal part and a normal to the surface of the metal part, and irradiates the surface of the metal part with incident X-rays; (c) a diffracted X-ray detection control unit that detects an intensity profile of diffracted X-rays diffracted on the surface of the metal part for each of the angles Ψ; (d) an average half-width calculation unit that calculates an average half-width value obtained from the intensity profile of the diffracted X-rays for each of the angles Ψ detected by the diffracted X-ray detection control unit; and (e) a grinding burn evaluation unit that evaluates grinding burn of the metal part based on a comparison between the average half-width value and a grinding burn judgment threshold value that is preset to have a normal judgment region having a half-width lower than that of a white layer that is a re-hardened layer affected by the grinding heat and a half-width higher than that of a black layer that is a softened layer affected by the grinding heat.

第2発明の要旨とするところは、第1発明において、前記研削焼け判定閾値は、前記白層の存在により半価幅が前記正常判定領域よりも高い値を示す不合格品を除去するための上限値以下且つ前記黒層の存在により半価幅が前記正常判定領域よりも低い値を示す不合格品を除去するための下限値以上の前記正常判定領域を有するように設定されていることにある。 The gist of the second invention is that, in the first invention, the grinding burn judgment threshold value is set to have the normal judgment region that is equal to or lower than an upper limit value for removing reject products whose half-value width shows a higher value than the normal judgment region due to the presence of the white layer , and is equal to or higher than a lower limit value for removing reject products whose half-value width shows a lower value than the normal judgment region due to the presence of the black layer.

第3発明の要旨とするところは、第1発明又は第2発明において、前記X線照射制御部は、入射X線を前記金属部品の表面に、前記角度Ψを0°~45°の範囲内の複数の角度に変化させて照射するものである。 The gist of the third invention is that in the first or second invention, the X-ray irradiation control unit irradiates the surface of the metal part with incident X-rays by varying the angle Ψ to multiple angles within a range of 0° to 45°.

第4発明の要旨とするところは、第1発明から第3発明のいずれか1の発明において、前記研削焼け判定閾値は、前記金属部品のうち、研削焼けが正常であると評価された前記金属部品の表面に、前記X線照射制御部と同様に前記角度Ψを変化させて入射X線を照射し、前記回折X線検出制御部と同様に前記金属部品の表面において回折された回折X線を検出し、前記半価幅平均値算出部と同様にして回折X線の強度プロファイルから算出した前記半価幅の平均値に基づいて設定した値である。 The gist of the fourth invention is that in any one of the first to third inventions, the grinding burn judgment threshold is a value set based on the average half-width calculated from the intensity profile of the diffracted X-rays in the same manner as the X-ray irradiation control unit, by varying the angle Ψ and irradiating the surface of the metal part that has been evaluated as having normal grinding burn, and the average half-width calculated from the intensity profile of the diffracted X-rays in the same manner as the average half-width calculation unit.

第5発明の要旨とするところは、第1発明から第3発明のいずれか1の発明において、前記研削焼け判定閾値は、前記研削加工された前記金属部品の表面を研削加工熱による影響のない深さまで電解研磨により研磨し、前記金属部品の前記電解研磨により研磨された表面に、前記角度Ψを変化させて入射X線を照射し、前記回折X線検出制御部と同様に前記金属部品の表面において回折された回折X線を検出し、前記半価幅平均値算出部と同様にして回折X線の強度プロファイルから算出した前記半価幅の平均値に基づいて設定した値である。 The gist of the fifth invention is that in any one of the first to third inventions, the grinding burn judgment threshold is a value set based on the average half-width calculated from the intensity profile of the diffracted X-rays by electrolytically polishing the ground surface of the metal part to a depth that is not affected by grinding heat, irradiating the electrolytically polished surface of the metal part with incident X-rays while changing the angle Ψ, detecting the diffracted X-rays diffracted on the surface of the metal part in the same manner as the diffracted X-ray detection control unit, and calculating the average half-width from the intensity profile of the diffracted X-rays in the same manner as the average half-width calculation unit.

第6発明の要旨とするところは、(a)研削加工された金属部品の表面に発生する研削焼けを評価する金属部品の研削焼け評価方法であって、(b)前記金属部品への入射X線の入射光軸と前記金属部品の表面の法線とが成す角度Ψを変化させて、入射X線を前記金属部品の表面に照射するX線照射工程と、(c)前記角度Ψ毎に、前記金属部品の表面において回折された回折X線の強度プロファイルを検出する回折X線検出工程と、(d)前記回折X線検出工程においてそれぞれ検出された前記角度Ψ毎の回折X線の強度プロファイルから得た半価幅の平均値を算出する半価幅平均値算出工程と、(e)前記半価幅の平均値と、研削加工熱の影響を受けた再硬化層である白層よりも半価幅が低く且つ研削加工熱の影響を受けた軟化層である黒層よりも半価幅が高い正常判定領域を有するように予め設定された研削焼け判定閾値との比較に基づいて前記金属部品の研削焼けを評価する研削焼け評価工程と、を含むことにある。 The gist of the sixth invention is that (a) a grinding burn evaluation method for evaluating grinding burns occurring on the surface of a ground metal part, the method including: (b) an X-ray irradiation step of irradiating the surface of the metal part with incident X-rays while changing the angle Ψ between the incident optical axis of the X-rays incident on the metal part and the normal to the surface of the metal part; (c) a diffracted X-ray detection step of detecting an intensity profile of diffracted X-rays diffracted on the surface of the metal part for each of the angles Ψ; (d) an average half-width calculation step of calculating an average half-width value obtained from the intensity profiles of the diffracted X-rays for each of the angles Ψ detected in the diffracted X-ray detection step; and (e) a grinding burn evaluation step of evaluating the grinding burn of the metal part based on a comparison between the average half-width value and a grinding burn judgment threshold value that is preset to have a normal judgment region having a half-width lower than that of a white layer that is a re-hardened layer affected by the heat of grinding and a half-width higher than that of a black layer that is a softened layer affected by the heat of grinding.

第7発明の要旨とするところは、第6発明において、前記研削焼け判定閾値は、前記白層の存在により半価幅が前記正常判定領域よりも高い値を示す不合格品を除去するための上限値以下且つ前記黒層の存在により半価幅が前記正常判定領域よりも低い値を示す不合格品を除去するための下限値以上の正常判定領域を有するように設定されていることにある。 The gist of the seventh invention is that, in the sixth invention, the grinding burn judgment threshold value is set to have a normal judgment region that is equal to or lower than an upper limit value for removing reject products whose half-value width shows a higher value than the normal judgment region due to the presence of the white layer , and is equal to or higher than a lower limit value for removing reject products whose half-value width shows a lower value than the normal judgment region due to the presence of the black layer.

第8発明の要旨とするところは、第6発明又は第7発明において、前記X線照射工程は、入射X線を前記金属部品の表面に、前記角度Ψを0°~45°の範囲内の複数の角度に変化させて照射するものである。 The gist of the eighth invention is that in the sixth or seventh invention, the X-ray irradiation step irradiates the surface of the metal part with incident X-rays by varying the angle Ψ to multiple angles within the range of 0° to 45°.

第9発明の要旨とするところは、第6発明から第8発明のいずれか1の発明において、前記研削焼け判定閾値は、前記金属部品のうち、研削焼けが正常であると評価された前記金属部品の表面に、前記X線照射工程と同様に前記角度Ψを変化させて入射X線を照射し、前記回折X線検出工程と同様に前記金属部品の表面において回折された回折X線を検出し、前記半価幅平均値算出工程と同様にして回折X線の強度プロファイルから算出した前記半価幅の平均値に基づいて設定した値である。 The gist of the ninth invention is that in any one of the sixth to eighth inventions, the grinding burn judgment threshold is a value set based on the average half-width calculated from the intensity profile of the diffracted X-rays in the same manner as in the X-ray irradiation process, by irradiating the surface of the metal part that has been evaluated as having normal grinding burn with incident X-rays while changing the angle Ψ, and by detecting the diffracted X-rays on the surface of the metal part in the same manner as in the diffracted X-ray detection process, in the same manner as in the half-width average calculation process.

第10発明の要旨とするところは、第6発明から第8発明のいずれか1の発明において、前記研削焼け判定閾値は、前記研削加工された前記金属部品の表面を研削加工熱による影響のない深さまで電解研磨により研磨し、前記金属部品の前記電解研磨により研磨された表面に、前記X線照射工程と同様に前記角度Ψを変化させて入射X線を照射し、前記回折X線検出工程と同様に前記金属部品の表面において回折された回折X線を検出し、前記半価幅平均値算出工程と同様にして回折X線の強度プロファイルから算出した前記半価幅の平均値に基づいて設定した値である。 The gist of the tenth invention is that in any one of the sixth to eighth inventions, the grinding burn judgment threshold is a value set based on the average half-width calculated from the intensity profile of the diffracted X-rays in the same manner as in the diffraction X-ray detection process, by electrolytically polishing the ground surface of the metal part to a depth that is not affected by grinding heat, irradiating the electrolytically polished surface of the metal part with incident X-rays while changing the angle Ψ in the same manner as in the diffraction X-ray detection process, and calculating the average half-width value from the intensity profile of the diffracted X-rays in the same manner as in the half-width average calculation process.

第1発明の金属部品の研削焼け評価装置、および第6発明の金属部品の研削焼け評価方法によれば、研削焼け評価工程或いは研削焼け評価部において、半価幅平均値算出工程或いは半価幅平均値算出部により算出された前記角度Ψ毎の回折X線の強度プロファイルから得た半価幅の平均値と、研削加工鵜熱の影響を受けた再硬化層である白層よりも半価幅が低く且つ研削加工熱の影響を受けた軟化層である黒層よりも半価幅が高い正常判定領域を有するように予め設定された研削焼け判定閾値との比較に基づいて前記金属部品の研削焼けを評価する。このため、研削加工された金属部品の表面に発生する研削焼けをより正確に評価することができる。 According to the grinding burn evaluation device for metal parts of the first invention and the grinding burn evaluation method for metal parts of the sixth invention, in the grinding burn evaluation step or grinding burn evaluation unit, the grinding burn of the metal part is evaluated based on a comparison between the average half-width value obtained from the intensity profile of the diffracted X-rays for each angle Ψ calculated by the half-width average calculation step or half-width average calculation unit and a grinding burn judgment threshold value that is preset to have a normal judgment region having a half-width lower than that of the white layer, which is a re-hardened layer affected by the heat of the grinding process, and a half-width higher than that of the black layer, which is a softened layer affected by the heat of the grinding process. Therefore, grinding burn occurring on the surface of the ground metal part can be evaluated more accurately.

第2発明の金属部品の研削焼け評価装置、および第7発明の金属部品の研削焼け評価方法によれば、前記研削焼け判定閾値は、前記白層の存在により半価幅が前記正常判定領域よりも高い値を示す不合格品を除去するための上限値以下且つ前記黒層の存在により半価幅が前記正常判定領域よりも低い値を示す不合格品を除去するための下限値以上の前記正常判定領域を有するように設定されたものである。このため、半価幅の平均値が研削焼け判定閾値の上限値を上まわる不良品および研削焼け判定閾値の下限値を下まわる不良品を判定することができるので、研削加工された金属部品の表面に発生する研削焼けをより正確に評価することができる。 According to the grinding burn evaluation device for metal parts of the second invention and the grinding burn evaluation method for metal parts of the seventh invention, the grinding burn judgment threshold is set to have the normal judgment region that is equal to or lower than the upper limit for removing rejects whose half-width is higher than the normal judgment region due to the presence of the white layer, and equal to or higher than the lower limit for removing rejects whose half-width is lower than the normal judgment region due to the presence of the black layer. Therefore, it is possible to determine defective products whose average half-width exceeds the upper limit of the grinding burn judgment threshold and defective products whose average half-width is lower than the lower limit of the grinding burn judgment threshold, so that grinding burns occurring on the surface of the ground metal part can be evaluated more accurately.

第3発明の金属部品の研削焼け評価装置、および第8発明の金属部品の研削焼け評価方法によれば、前記角度Ψは0°~45°の範囲内の複数の角度に変化させられる。このため、X線照射工程および回折X線検出工程を行なう回折X線検出装置が小型となる。 According to the grinding burn evaluation device for metal parts of the third invention and the grinding burn evaluation method for metal parts of the eighth invention, the angle Ψ can be changed to multiple angles within the range of 0° to 45°. This allows the size of the diffracted X-ray detection device that performs the X-ray irradiation process and the diffracted X-ray detection process to be reduced.

第4発明の金属部品の研削焼け評価装置、および第9発明の金属部品の研削焼け評価方法によれば、前記研削焼け判定閾値は、前記金属部品のうち、研削焼けが正常であると評価された前記金属部品の表面に、前記X線照射工程と同様に前記角度Ψを変化させて入射X線を照射し、前記回折X線検出工程と同様に前記金属部品の表面において回折された回折X線を検出し、前記半価幅平均値算出工程と同様にして回折X線の強度プロファイルから算出した前記半価幅の平均値に基づいて設定した値である。このような研削焼け判定閾値と半価幅の平均値との比較に基づいて金属部品の研削焼けを評価するので、研削加工された金属部品の表面に発生する研削焼けをより正確に評価することができる。 According to the grinding burn evaluation device for metal parts of the fourth invention and the grinding burn evaluation method for metal parts of the ninth invention, the grinding burn judgment threshold is a value set based on the average half-width calculated from the intensity profile of the diffracted X-rays by irradiating the surface of the metal parts that are evaluated as having normal grinding burns with incident X-rays at different angles Ψ in the same manner as in the X-ray irradiation process, detecting the diffracted X-rays diffracted on the surface of the metal parts in the same manner as in the diffracted X-ray detection process, and calculating the average half-width value in the same manner as in the half-width average calculation process. Since the grinding burn of the metal parts is evaluated based on a comparison between the grinding burn judgment threshold and the average half-width value, the grinding burn occurring on the surface of the ground metal parts can be evaluated more accurately.

第5発明の金属部品の研削焼け評価装置、および第10発明の金属部品の研削焼け評価方法によれば、前記研削焼け判定閾値は、前記研削加工された前記金属部品の表面を研削加工熱による影響のない深さまで電解研磨により研磨し、前記金属部品の前記電解研磨により研磨された表面に、前記X線照射工程と同様に前記角度Ψを変化させて入射X線を照射し、前記回折X線検出工程と同様に前記金属部品の表面において回折された回折X線を検出し、前記半価幅平均値算出工程と同様にして回折X線の強度プロファイルから算出した前記半価幅の平均値に基づいて設定した値である。このような研削焼け判定閾値と半価幅の平均値との比較に基づいて金属部品の研削焼けを評価するので、研削加工された金属部品の表面に発生する研削焼けをより正確に評価することができる。 According to the grinding burn evaluation device for metal parts of the fifth invention and the grinding burn evaluation method for metal parts of the tenth invention, the grinding burn judgment threshold is a value set based on the average value of the half-width calculated from the intensity profile of the diffracted X-rays in the same manner as in the X-ray irradiation process, by electrolytically polishing the surface of the ground metal part to a depth that is not affected by grinding heat, by irradiating the surface of the metal part polished by electrolytic polishing with incident X-rays while changing the angle Ψ in the same manner as in the X-ray diffraction detection process, and by detecting the diffracted X-rays on the surface of the metal part in the same manner as in the diffracted X-ray detection process. Since the grinding burn of the metal part is evaluated based on a comparison between such a grinding burn judgment threshold and the average value of the half-width, the grinding burn occurring on the surface of the ground metal part can be more accurately evaluated.

ここで、好適には、前記研削焼け判定閾値は、前記角度Ψ毎の半価幅の平均値を中心とした±0.5°の幅、或いは±0.25°の幅の正常判定領域を有するように設定した値である。 Here, preferably, the grinding burn judgment threshold is a value set so as to have a normal judgment region with a width of ±0.5° or a width of ±0.25° centered on the average value of the half-width for each angle Ψ.

また、好適には、前記入射X線の入射光軸とは、入射X線の中心軸である。また、回折角2θとは、入射X線の入射光軸と、金属部品の表面のうち入射X線が入射した部分から出射された回折X線との間の角度(線型変換を施した角度も含む)である。 Preferably, the incident optical axis of the incident X-ray is the central axis of the incident X-ray. The diffraction angle 2θ is the angle (including the angle after linear transformation) between the incident optical axis of the incident X-ray and the diffracted X-ray emitted from the portion of the surface of the metal part on which the incident X-ray is incident.

また、好適には、前記回折X線の半価幅とは、回折角2θを表す軸と回折X線の強度を表す軸との二次元座標において、回折X線の強度プロファイル中に形成されたピーク(山)の高さの半分に対応する角度幅である。上記回折X線の強度とは、単位時間当たりに検知されるX線格子の数、或いは、それを表す物理量(たとえば電圧、電流等)である。 Preferably, the half-width of the diffracted X-rays is an angular width corresponding to half the height of a peak (mountain) formed in the intensity profile of the diffracted X-rays in a two-dimensional coordinate system with an axis representing the diffraction angle 2θ and an axis representing the intensity of the diffracted X-rays. The intensity of the diffracted X-rays is the number of X-ray gratings detected per unit time, or a physical quantity representing it (e.g., voltage, current, etc.).

本発明の金属部品の研削焼け判定方法或いは研削焼け評価装置に用いられる回折X線検出装置および電子制御装置を説明するブロック線図である。1 is a block diagram illustrating an X-ray diffraction detector and an electronic control device used in a grinding burn determination method or grinding burn evaluation device for a metal part according to the present invention. FIG. 図1の回折X線検出装置により検出された回折X線の強度プロファイルにおいて、半価幅を説明する図である。2 is a diagram illustrating a half-value width in an intensity profile of diffracted X-rays detected by the diffracted X-ray detection device of FIG. 1 . FIG. 図1の電子制御装置の制御作動の要部である金属部品の研削焼け判定方法を説明する工程図である。2 is a process diagram illustrating a method for determining grinding burn on a metal part, which is an essential part of the control operation of the electronic control device in FIG. 1. ビッカース硬度Hvの研削代断面積に対する変化を、研削焼けによる異常品を●印で、正常品を○印で対比して示す図である。1 is a diagram showing the change in Vickers hardness Hv relative to the cross-sectional area of grinding allowance, comparing products with defects due to grinding burn with marks ● and normal products with marks ○. 円筒研削された金属部品(SCr420)について、半価幅HWの研削代断面積に対する変化を、研削焼けによる異常品を●印で、正常品を○印で対比して示す図である。FIG. 13 is a diagram showing the change in half-value width HW relative to the grinding allowance cross-sectional area for a cylindrically ground metal part (SCr420), with abnormal parts due to grinding burn indicated by ● marks and normal parts indicated by ○ marks. 図5のAに示す金属部品についての、深さに対する半価幅HWの値を示す図である。FIG. 6 is a diagram showing the value of the half-value width HW with respect to the depth for the metal part shown in FIG. 5A. 図5のBに示す金属部品についての、深さに対する半価幅HWの値を示す図である。FIG. 6 is a diagram showing the value of the half-value width HW with respect to the depth for the metal part shown in FIG. 5B. 図5のCに示す金属部品についての、深さに対する半価幅HWの値を示す図である。FIG. 6 is a diagram showing the value of the half-value width HW with respect to the depth for the metal part shown in FIG. 5C. 図5のBに示す金属部品についての、光学顕微鏡により撮影した組織図である。FIG. 6 is a structural diagram of the metal part shown in FIG. 5B taken by an optical microscope. 図5のCに示す金属部品についての、光学顕微鏡により撮影した組織図である。FIG. 6 is a structural diagram of the metal part shown in FIG. 5C taken by an optical microscope. 図5の異常品の角度Ψを6種類に変化させた場合の半価幅を、研削代断面積毎に測定した場合を示す図である。FIG. 6 is a diagram showing the half-value width measured for each grinding allowance cross-sectional area when the angle Ψ of the defective product in FIG. 5 is changed to six different values. 平面研削された金属部品(SCM440)について、6種類の角度Ψ毎にそれぞれ得られた半価幅HWを、深さ0μmから100μmまで示す図である。FIG. 13 is a diagram showing the half-value widths HW obtained for six different angles Ψ for a surface-ground metal part (SCM440) from a depth of 0 μm to 100 μm. 図12の平面研削された金属部品について、6種類の角度Ψ毎にそれぞれ得られた半価幅HWを、深さ100μmから600μmまで示す図である。FIG. 13 is a diagram showing the half-value widths HW obtained for six different angles Ψ for the surface-ground metal component of FIG. 12 from a depth of 100 μm to 600 μm. 図12の平面研削された金属部品について、6種類の角度Ψ毎に得られた半価幅HWを平均した半価幅平均値HWav(°)を、深さ0μmから600μmまで示す図である。FIG. 13 is a diagram showing the average half-width HWav (°) obtained by averaging the half-widths HW obtained for each of six different angles Ψ for the metal component subjected to surface grinding in FIG. 12, from a depth of 0 μm to 600 μm. 図12の平面研削された金属部品について、研削焼け判定閾値THを説明する図である。FIG. 13 is a diagram for explaining a grinding burn determination threshold value TH for the surface-ground metal part of FIG. 12 . 金属部品(SCr420)を円筒研削した場合における、砥石単位円周長さ当たりの研削代断面積(mm/mm)と砥石軸の消費電力値(kW)との関係を示す図である。FIG. 13 is a diagram showing the relationship between the grinding allowance cross-sectional area (mm 2 /mm) per unit circumferential length of the grinding wheel and the power consumption (kW) of the grinding wheel spindle when a metal part (SCr420) is cylindrically ground. 図16と同じ研削条件を用いて金属部品を円筒研削した場合における、砥石単位円周長さ当たりの研削代断面積(mm/mm)と砥石摩耗量(μm)との関係を示す図である。FIG. 17 is a diagram showing the relationship between the grinding allowance cross-sectional area per unit circumferential length of the grinding wheel (mm 2 /mm) and the amount of wear of the grinding wheel (μm) when a metal part is cylindrically ground under the same grinding conditions as in FIG. 16 . 図16と同じ研削条件を用いて金属部品を円筒研削した場合における、砥石単位円周長さ当たりの研削代断面積(mm/mm)と研削面の面粗度Rz(μm)との関係を示す図である。FIG. 17 is a diagram showing the relationship between the grinding allowance cross-sectional area per unit circumferential length of the grinding wheel (mm 2 /mm) and the surface roughness Rz (μm) of the ground surface when a metal part is cylindrically ground under the same grinding conditions as in FIG. 16 .

以下、本発明の一実施例を図面を参照して詳細に説明する。なお、以下の実施例において図は発明に関連する要部を説明するものであり、寸法及び形状等は必ずしも正確に描かれていない。 An embodiment of the present invention will be described in detail below with reference to the drawings. Note that the drawings in the following embodiment are for explaining the main parts related to the invention, and the dimensions and shapes are not necessarily drawn accurately.

図1は、研削砥石を用いて研削加工された金属部品14たとえば焼入鋼から成る軸受部品の研削焼けを評価するための研削焼け評価装置10を示している。研削焼け評価装置10は、鋼製たとえば焼入鋼製の金属部品14の表面16に入射X線を入射させ、金属部品14の表面16のうち入射X線が入射した部分から出射される回折X線を検出する回折X線検出装置12と、その回折X線検出装置12を制御する電子制御装置30を備えている。 Figure 1 shows a grinding burn evaluation device 10 for evaluating grinding burn on a metal part 14, such as a bearing part made of hardened steel, that has been ground using a grinding wheel. The grinding burn evaluation device 10 includes an X-ray diffraction detector 12 that irradiates an incident X-ray onto a surface 16 of a metal part 14 made of steel, such as hardened steel, and detects diffracted X-rays emitted from the portion of the surface 16 of the metal part 14 on which the incident X-rays are incident, and an electronic control device 30 that controls the X-ray diffraction detector 12.

回折X線検出装置12は、金属部品14の表面(照射面)16上の点Pに向う入射光軸Lx1に沿って入射X線を出力するX線管18と、点Pにおいて回折を受けて回折光軸Lx2に沿って出射される回折X線を受けて回折X線を検知するX線検出器20とを備えている。 The diffracted X-ray detection device 12 includes an X-ray tube 18 that outputs incident X-rays along an incident optical axis Lx1 toward a point P on the surface (irradiation surface) 16 of the metal part 14, and an X-ray detector 20 that receives diffracted X-rays that are diffracted at point P and emitted along the diffracted optical axis Lx2 and detects the diffracted X-rays.

X線管18は、点Pを中心とする円弧状のガイド22により移動可能に支持されている。X線管18は、後述の角度Ψが異なる位置に位置決めされるように、ガイド22に沿って点Pまわりの周方向の複数位置にX線管18を位置決めするアクチュエータ18aを備えている。X線検出器20は、点Pを中心とする円弧状のガイド24により移動可能に支持されている。X線検出器20は、後述の角度Ψが異なる毎に回折X線の強度プロファイルを得るために、ガイド24に沿って点Pまわりの周方向にX線検出器20を位置決めするアクチュエータ20aを備えている。 The X-ray tube 18 is movably supported by an arc-shaped guide 22 centered on point P. The X-ray tube 18 is provided with an actuator 18a that positions the X-ray tube 18 at multiple positions in the circumferential direction around point P along the guide 22 so that the angle Ψ, described below, is positioned at different positions. The X-ray detector 20 is movably supported by an arc-shaped guide 24 centered on point P. The X-ray detector 20 is provided with an actuator 20a that positions the X-ray detector 20 in the circumferential direction around point P along the guide 24 to obtain an intensity profile of the diffracted X-rays for each different angle Ψ, described below.

図1では、X線管18からの入射光軸Lx1が金属部品14の表面16の法線(照射面法線)z1と一致するように、X線管18が位置させられている。すなわち、X線管18からの入射光軸Lx1と金属部品14の表面16の法線z1との成す角度として定義される角度Ψが0°となるように、X線管18が位置させられている。本実施例では、角度Ψが複数種類に切り換えられた状態で、角度Ψ毎に回折X線の強度プロファイルが検出される。図1の破線で示すX線管18は、角度Ψが0°から切り換えられた位置を示している。 In FIG. 1, the X-ray tube 18 is positioned so that the incident optical axis Lx1 from the X-ray tube 18 coincides with the normal (irradiation surface normal) z1 of the surface 16 of the metal part 14. In other words, the X-ray tube 18 is positioned so that the angle Ψ, defined as the angle between the incident optical axis Lx1 from the X-ray tube 18 and the normal z1 of the surface 16 of the metal part 14, is 0°. In this embodiment, the angle Ψ is switched to multiple types, and the intensity profile of the diffracted X-rays is detected for each angle Ψ. The X-ray tube 18 shown by the dashed line in FIG. 1 indicates the position where the angle Ψ is switched from 0°.

図1において示す角度ηは、入射光軸Lx1と格子面26の法線(結晶面法線)z2とが成す角であり、格子面26の法線(結晶面法線)z2と回折光軸Lx2とが成す角である。この角度ηは、回折角2θに線型変換をほどこすことによって導かれる角度であり、入射光軸Lx1と回折光軸Lx2との位置関係を特定できる回折角の一つである。 The angle η shown in FIG. 1 is the angle between the incident optical axis Lx1 and the normal (crystal plane normal) z2 of the lattice plane 26, and is also the angle between the normal (crystal plane normal) z2 of the lattice plane 26 and the diffracted optical axis Lx2. This angle η is an angle derived by applying a linear transformation to the diffraction angle 2θ, and is one of the diffraction angles that can identify the positional relationship between the incident optical axis Lx1 and the diffracted optical axis Lx2.

電子制御装置30は、CPU、ROM、RAM、入出力インターフェースを含む所謂マイクロコンピュータであって、ROMに予め記憶されたプログラムに従って入力信号を処理し、金属部品14の研削焼けの評価を実行する。電子制御装置30は、X線照射制御部32と回折X線検出制御部34と半価幅平均値算出部36と研削焼け評価部38とを機能的に備え、研削焼け評価部38による評価結果を出力して表示器40に表示させる。 The electronic control device 30 is a so-called microcomputer including a CPU, ROM, RAM, and an input/output interface, and processes input signals according to a program prestored in the ROM to perform an evaluation of grinding burn on the metal part 14. The electronic control device 30 functionally comprises an X-ray irradiation control unit 32, a diffracted X-ray detection control unit 34, an average half-value width calculation unit 36, and a grinding burn evaluation unit 38, and outputs the evaluation results by the grinding burn evaluation unit 38 and displays them on the display 40.

X線照射制御部32は、金属部品14への入射X線の入射光軸Lx1と金属部品14の表面16の法線z1との成す角度Ψを、X線管18をアクチュエータ18aによりガイド22に沿って移動させることにより、複数種類たとえば0°、18.4°、26.6°、33.2°、39.2°、45.0°の6種類に変化させてX線管18をそれぞれ位置決めし、X線管18から入射X線を金属部品14の表面16へ照射する。 The X-ray irradiation control unit 32 changes the angle Ψ between the incident optical axis Lx1 of the X-rays incident on the metal part 14 and the normal z1 of the surface 16 of the metal part 14 to multiple types, for example, six types of 0°, 18.4°, 26.6°, 33.2°, 39.2°, and 45.0°, by moving the X-ray tube 18 along the guide 22 using the actuator 18a, and positions the X-ray tube 18, and irradiates the incident X-rays from the X-ray tube 18 to the surface 16 of the metal part 14.

回折X線検出制御部34は、角度Ψが異なる毎に回折X線の強度プロファイルを得るために、角度Ψが異なる毎にアクチュエータ20aを用いてX線検出器20をガイド24に沿って点Pまわりの周方向に移動させ、複数種類(本実施例では6種類)の角度Ψ毎に、金属部品14の表面において回折された回折X線の強度を検出して強度プロファイルを検出する。 The diffracted X-ray detection control unit 34 uses the actuator 20a to move the X-ray detector 20 in the circumferential direction around the point P along the guide 24 for each different angle Ψ to obtain an intensity profile of the diffracted X-rays for each different angle Ψ, and detects the intensity of the diffracted X-rays diffracted on the surface of the metal part 14 for each of multiple types of angle Ψ (six types in this embodiment) to detect the intensity profile.

半価幅平均値算出部36は、回折X線検出制御部34においてそれぞれ検出された角度Ψ毎の回折X線の強度プロファイルの半価幅HW(°)を、角度Ψが異なる毎にそれぞれ測定するとともに、それらの半価幅HW(°)の平均値である半価幅平均値HWav(°)を算出する。図2は、回折X線の強度プロファイルの一部を、回折角2θを表す軸と回折X線強度Iを表す軸との二次元座標において示す図である。この回折X線強度Iとは、単位時間当たりに検知されるX線格子の数、或いは、それを表す物理量(たとえば電圧、電流等)である。図2における強度プロファイル中のピーク波形の最大値Imaxに対応する回折角が、所謂ブラッグの式(2dsinθ=nλ(ここで、dは格子定数、λは波長))を満足するブラッグ角度θの倍数2θである。半価幅HWは、ピーク波形の最大値Imaxの2分の1、すなわち1/2Imaxに対応する回折角の範囲(°)である。 The half-width average calculation unit 36 measures the half-width HW (°) of the intensity profile of the diffracted X-rays for each angle Ψ detected by the diffracted X-ray detection control unit 34 for each different angle Ψ, and calculates the average half-width HWav (°), which is the average of the half-widths HW (°). Figure 2 shows a part of the intensity profile of the diffracted X-rays in two-dimensional coordinates with an axis representing the diffraction angle 2θ and an axis representing the diffracted X-ray intensity I. This diffracted X-ray intensity I is the number of X-ray lattices detected per unit time, or a physical quantity representing it (for example, voltage, current, etc.). The diffraction angle corresponding to the maximum value Imax of the peak waveform in the intensity profile in Figure 2 is the multiple 2θ of the Bragg angle θ that satisfies the so-called Bragg formula (2dsinθ=nλ (where d is the lattice constant and λ is the wavelength)). The half-width HW is half the maximum value Imax of the peak waveform, i.e., the range of diffraction angles (°) corresponding to 1/2Imax.

研削焼け評価部38は、半価幅平均値算出部36により算出された半価幅平均値HWavと予め設定された研削焼け判定閾値THとの比較に基づいて金属部品14の研削焼けを評価する。たとえば、半価幅平均値HWavが研削焼け判定閾値THを上回れば合格判定し、半価幅平均値HWavが研削焼け判定閾値TH以下であるときには研削焼けによる不合格判定を行なう。 The grinding burn evaluation unit 38 evaluates the grinding burn of the metal part 14 based on a comparison between the average half-width value HWav calculated by the average half-width value calculation unit 36 and a preset grinding burn judgment threshold value TH. For example, if the average half-width value HWav exceeds the grinding burn judgment threshold value TH, it makes a pass judgment, and if the average half-width value HWav is equal to or less than the grinding burn judgment threshold value TH, it makes a fail judgment due to grinding burn.

上記予め設定された研削焼け判定閾値THは、たとえば、研削加工された金属部品14のうち、研削焼けが正常であると評価された金属部品14の表面に、X線照射制御部32と同様に金属部品14への入射X線の入射光軸Lx1と金属部品14の表面16の法線z1とが成す角度Ψを変化させて入射X線を照射し、回折X線検出制御部34と同様に金属部品14の表面16において回折された回折X線を検出し、半価幅平均値算出部36と同様にして角度Ψ毎の回折X線の強度プロファイルの半価幅平均値HWavを算出し、その半価幅平均値HWavに基づいて設定した値である。 The above-mentioned preset grinding burn judgment threshold value TH is a value that is set based on the average half-width HWav calculated by, for example, irradiating incident X-rays to the surface of a ground metal part 14 that has been evaluated as having normal grinding burns, while changing the angle Ψ between the incident optical axis Lx1 of the X-rays incident on the metal part 14 and the normal z1 of the surface 16 of the metal part 14, as in the X-ray irradiation control unit 32, detecting the diffracted X-rays diffracted at the surface 16 of the metal part 14, as in the diffracted X-ray detection control unit 34, and calculating the average half-width HWav of the intensity profile of the diffracted X-rays for each angle Ψ, as in the average half-width calculation unit 36.

また、上記予め設定された研削焼け判定閾値THは、たとえば、研削加工された金属部品14の表面を研削加工熱による影響のない深さまで電解研磨により研磨し、その電解研磨により研磨された金属部品14の表面に、X線照射制御部32と同様に金属部品14への入射X線の入射光軸Lx1と金属部品14の表面16の法線z1とが成す角度Ψを変化させて入射X線を照射し、回折X線検出制御部34と同様に金属部品14の表面16において回折された回折X線を検出し、半価幅平均値算出部36と同様にして角度Ψ毎の回折X線の強度プロファイルの半価幅平均値HWavを算出し、その半価幅平均値HWavに基づいて設定した値である。 The above-mentioned preset grinding burn determination threshold value TH is a value that is set based on the following: for example, the surface of the ground metal part 14 is polished by electrolytic polishing to a depth that is not affected by grinding heat; the surface of the metal part 14 polished by electrolytic polishing is irradiated with incident X-rays by changing the angle Ψ between the incident optical axis Lx1 of the X-rays incident on the metal part 14 and the normal z1 of the surface 16 of the metal part 14, as with the X-ray irradiation control unit 32; the diffracted X-rays diffracted at the surface 16 of the metal part 14 are detected, as with the diffracted X-ray detection control unit 34; and the average half-width HWav of the intensity profile of the diffracted X-rays for each angle Ψ is calculated, as with the average half-width calculation unit 36;

上記の研削焼け判定閾値THは、半価幅平均値HWavそのままの値に設定されてもよいし、半価幅平均値HWavを基準としてたとえば±10%の程度の範囲内の正常判定領域を有するように設定された値であってもよい。また、半価幅平均値HWavを基準として、たとえば、±5°の幅、或いは±2.5°の幅の正常判定領域を有するように設定された値であってもよい。 The grinding burn judgment threshold value TH may be set to the average half-width value HWav as is, or may be set to a value that has a normal judgment range within a range of, for example, about ±10% based on the average half-width value HWav. It may also be set to a value that has a normal judgment range of, for example, a width of ±5° or a width of ±2.5° based on the average half-width value HWav.

図3は、電子制御装置30の制御作動の要部を説明するフローチャートである。図3において、X線照射制御部32に対応するステップS1(以下、ステップを省略する)のX線照射工程では、金属部品14への入射X線の入射光軸Lx1と金属部品14の表面16の法線z1との成す角度Ψが、X線管18をアクチュエータ18aにより移動させることにより、0°、18.4°、26.6°、33.2°、39.2°、45.0°の6種類に変化させられてX線管18がそれぞれ位置決めされ、位置決めされる毎にX線管18から入射X線が金属部品14の表面16上の点Pへ照射される。 Figure 3 is a flow chart explaining the main parts of the control operation of the electronic control device 30. In Figure 3, in the X-ray irradiation process of step S1 (hereinafter, step will be omitted) corresponding to the X-ray irradiation control unit 32, the angle Ψ between the incident optical axis Lx1 of the X-ray incident on the metal part 14 and the normal z1 of the surface 16 of the metal part 14 is changed to six types of 0°, 18.4°, 26.6°, 33.2°, 39.2°, and 45.0° by moving the X-ray tube 18 by the actuator 18a, and the X-ray tube 18 is positioned respectively, and the incident X-ray is irradiated from the X-ray tube 18 to the point P on the surface 16 of the metal part 14 every time it is positioned.

次に、回折X線検出制御部34に対応するS2の回折X線検出工程では、角度Ψが異なる毎の回折X線の強度プロファイルをそれぞれ得るために、角度Ψが異なる毎にアクチュエータ20aを用いてX線検出器20をガイド24に沿って点Pまわりの周方向に移動させ、6種類の角度Ψ毎に、金属部品14の表面16上のP点において回折された回折X線の強度が検出されて強度プロファイルが検出される。 Next, in the diffracted X-ray detection process S2 corresponding to the diffracted X-ray detection control unit 34, in order to obtain the intensity profile of the diffracted X-ray for each different angle Ψ, the actuator 20a is used to move the X-ray detector 20 in the circumferential direction around point P along the guide 24 for each different angle Ψ, and the intensity of the diffracted X-ray diffracted at point P on the surface 16 of the metal part 14 is detected for each of the six different angles Ψ to obtain an intensity profile.

次いで、半価幅平均値算出部36に対応するS3の半価幅平均値算出工程では、S2の回折X線検出工程においてそれぞれ検出された角度Ψ毎の回折X線の強度プロファイルの半価幅HW(°)が、角度Ψが異なる毎にそれぞれ測定されるとともに、それらの半価幅HW(°)の平均値である半価幅平均値HWav(°)が算出される。 Next, in the average half-width calculation step S3 corresponding to the average half-width calculation unit 36, the half-widths HW(°) of the intensity profile of the diffracted X-rays for each angle Ψ detected in the diffracted X-ray detection step S2 are measured for each different angle Ψ, and the average half-width value HWav(°), which is the average of these half-widths HW(°), is calculated.

そして、研削焼け評価部38に対応するS4の研削焼け評価工程では、S3の半価幅平均値算出工程により算出された半価幅平均値HWavと予め設定された研削焼け判定閾値THとの比較に基づいて金属部品14の研削焼けが評価される。たとえば、半価幅平均値HWavが研削焼け判定閾値THを上回れば合格判定され、半価幅平均値HWavが研削焼け判定閾値TH以下であるときには研削焼けによる不合格判定が行なわれる。 Then, in the grinding burn evaluation step S4 corresponding to the grinding burn evaluation unit 38, grinding burn of the metal part 14 is evaluated based on a comparison between the average half-width value HWav calculated in the average half-width value calculation step S3 and a preset grinding burn judgment threshold value TH. For example, if the average half-width value HWav exceeds the grinding burn judgment threshold value TH, it is judged as pass, and if the average half-width value HWav is equal to or less than the grinding burn judgment threshold value TH, it is judged as fail due to grinding burn.

本発明者は、以下に示す研削条件で円筒研削された浸炭焼入鋼製の金属部品14のうちの、砥石1を用いて研削加工した正常品(合格品)と、砥石2を用いて研削加工した研削焼けによる異常品(不合格品)とについて、ビッカース硬度Hv(JIS Z 2244:2009)と半価幅HWとを比較する試験を、以下の測定条件を用いて行なった。 The inventors conducted a test under the following measurement conditions to compare the Vickers hardness Hv (JIS Z 2244:2009) and half-value width HW of a normal part (accepted part) ground with grinding wheel 1 and an abnormal part (rejected part) with grinding burn that was ground with grinding wheel 2 out of the metal parts 14 made of carburized and hardened steel that were cylindrically ground under the grinding conditions shown below.

(円筒研削条件)
砥石1 :PA 120 H+ 10 V(焼け無)
砥石2 :PA 80 H+ 10 V(焼け有)
機械 :円筒研削盤
研削方式 :湿式円筒プランジ研削
砥石周速度 :60m/s
被削材周速度 :0.6m/s
周速度比 :100
研削能率 :2.0mm/mm・s
ドレッサ :□0.8角柱ダイヤ単石ドレッサ
ドレスリード :0.1mm/r.o.w.
ドレス切込量 :0.01mm/pass
被削材 :SCr420(浸炭焼入鋼)
(Cylindrical grinding conditions)
Grindstone 1: PA 120 H + 10 V (no burn)
Grindstone 2: PA 80 H + 10 V (with burn marks)
Machine: Cylindrical grinding machine Grinding method: Wet cylindrical plunge grinding Grinding wheel peripheral speed: 60 m/s
Workpiece peripheral speed: 0.6m/s
Peripheral speed ratio: 100
Grinding efficiency: 2.0mm 3 /mm・s
Dresser: 0.8 square prism diamond single stone dresser Dress lead: 0.1mm/r.o.w.
Dressing depth: 0.01 mm/pass
Work material: SCr420 (carburized steel)

(ビッカース硬度測定条件)
観察レンズの倍率 :10倍
荷重保持時間 :10sec
荷重 :10kgf
(Vickers hardness measurement conditions)
Magnification of observation lens: 10x Load holding time: 10 sec
Load: 10 kgf

(半価幅測定条件)
測定部位 :表層0μm
回折X線の測定範囲 :140°~170°
2θ :156.40°(α-Fe(211))
ステップ :0.20°
角度Ψ :45.0°
管球 :Cr
特性X線 :Kα線
(Conditions for measuring half-width)
Measurement site: surface layer 0μm
Diffraction X-ray measurement range: 140° to 170°
2θ: 156.40° (α-Fe(211))
Step: 0.20°
Angle Ψ: 45.0°
Tube: Cr
Characteristic X-rays: Kα rays

図4および図5は、ビッカース硬度Hv(HV10)および半価幅HW(°)の測定値を示している。図4では、砥石単位円周長さ当たりの研削代断面積(mm/mm)を表す横軸とビッカース硬度を表す縦軸との二次元座標において、研削焼けによる異常品(不合格品)のビッカース硬度Hvを●にて研削代断面積の増加毎に表示し、研削焼け無しの合格品のビッカース硬度Hvを○にて研削代断面積の増加毎に表示している。図5では、砥石単位円周長さ当たりの研削代断面積(mm/mm)を表す横軸と半価幅HW(°)を表す縦軸との二次元座標において、研削焼けによる異常品(不合格品)のビッカース硬度Hvを●にて研削代断面積の増加毎に表示し、研削焼け無しの合格品のビッカース硬度Hvを○にて研削代断面積の増加毎に表示している。ここで、砥石単位円周長さ当たりの研削代断面積(mm/mm)とは、研削代断面積を砥石円周長さで割った値である。 4 and 5 show the measured values of Vickers hardness Hv (HV10) and half-value width HW (°). In FIG. 4, in a two-dimensional coordinate system with the horizontal axis representing the grinding allowance cross-sectional area (mm 2 /mm) per unit circumference length of the grinding wheel and the vertical axis representing the Vickers hardness, the Vickers hardness Hv of the abnormal product (rejected product) due to grinding burn is displayed with ● for each increase in the grinding allowance cross-sectional area, and the Vickers hardness Hv of the accepted product without grinding burn is displayed with ○ for each increase in the grinding allowance cross-sectional area. In FIG. 5, in a two-dimensional coordinate system with the horizontal axis representing the grinding allowance cross-sectional area (mm 2 /mm) per unit circumference length of the grinding wheel and the vertical axis representing the half-value width HW (°), the Vickers hardness Hv of the abnormal product (rejected product) due to grinding burn is displayed with ● for each increase in the grinding allowance cross-sectional area, and the Vickers hardness Hv of the accepted product without grinding burn is displayed with ○ for each increase in the grinding allowance cross-sectional area. Here, the grinding allowance cross-sectional area per unit circumferential length of the grinding wheel (mm 2 /mm) is a value obtained by dividing the grinding allowance cross-sectional area by the circumferential length of the grinding wheel.

図4に示すように、異常品についてのビッカース硬度Hvは、研削代断面積の増加初期において正常品と同等の値を示しているが、その後に急減している。これに対して、図5に示すように、合格品についての半価幅HWは、研削代断面積の増加に拘わらず、略一定の値を示している。異常品についての半価幅HWは、研削代断面積の増加初期から緩やかに減少し、正常品の値よりも研削代断面積の増加初期から全体に小さい値を示している。すなわち、○印の正常品の最小値と●印の異常品の最大値との間に差ΔHWが形成されているので、半価幅HWを用いれば、研削代断面積の増加初期から、異常品と合格品との判定が可能であることを示している。 As shown in FIG. 4, the Vickers hardness Hv of the abnormal product is equal to that of the normal product at the beginning of the increase in the grinding allowance cross-sectional area, but then drops sharply. In contrast, as shown in FIG. 5, the half-value width HW of the acceptable product shows a substantially constant value regardless of the increase in the grinding allowance cross-sectional area. The half-value width HW of the abnormal product decreases gradually from the beginning of the increase in the grinding allowance cross-sectional area, and shows a smaller value overall than that of the normal product from the beginning of the increase in the grinding allowance cross-sectional area. In other words, since a difference ΔHW is formed between the minimum value of the normal product marked with a circle and the maximum value of the abnormal product marked with a ●, it is possible to distinguish between an abnormal product and an acceptable product from the beginning of the increase in the grinding allowance cross-sectional area by using the half-value width HW.

次に、本発明者は、研削代断面積が少ない領域においてビッカース硬度Hvにおいて正常品と同じ値を示した研削焼け有りの金属部品14(異常品)のうち、図5のA、B、Cに示す3つの金属部品A、B、Cについて、電解研磨によって異なる深さの試料を作成し、異なる深さ毎に半価幅HWを、前述の半価幅測定条件を用いて測定した。図6、図7、図8は、上記図5のA、B、Cに示す3つの金属部品14についての、深さに対する半価幅HWの値を、それぞれ示している。 Next, the inventors prepared samples of different depths by electrolytic polishing for three metal parts A, B, and C shown in A, B, and C of Figure 5, which were among the metal parts 14 (abnormal parts) with grinding burns that showed the same Vickers hardness Hv value as normal parts in the area with a small grinding allowance cross-sectional area, and measured the half-width HW for each different depth using the half-width measurement conditions described above. Figures 6, 7, and 8 show the half-width HW values versus depth for the three metal parts 14 shown in A, B, and C of Figure 5 above, respectively.

図6および図7に示すように、ビッカース硬度Hvでは正常品と同等の値を示した金属部品AおよびBは、ビッカース硬度HV10での測定深さ(10kgfでの圧子の押し込み深さ)以内の深さでの半価幅HWは正常組織層NLよりも低いが、ビッカース硬度HV10での測定深さを超えると正常組織層NLの半価幅HWの範囲内であることを示している。これら金属部品AおよびBの組織図では、後述する黒層(軟化層)BLが表面に存在していた。この黒層BLの影響により、ビッカース硬度HV10により評価不可能な表層の研削焼けは、半価幅HWが正常組織層NLよりも低いことで示されている。これにより、半価幅HWを用いるとビッカース硬度HV10での測定深さ以内での評価が可能であることを示している。 As shown in Figures 6 and 7, metal parts A and B, which showed values equivalent to those of normal products in Vickers hardness Hv, had a half-value width HW lower than the normal tissue layer NL at a depth within the measurement depth (indenter pressing depth at 10 kgf) at Vickers hardness HV10, but beyond the measurement depth at Vickers hardness HV10, it was within the range of the half-value width HW of the normal tissue layer NL. In the tissue diagrams of these metal parts A and B, a black layer (softened layer) BL, which will be described later, was present on the surface. Due to the influence of this black layer BL, the grinding burn on the surface layer, which cannot be evaluated by Vickers hardness HV10, is shown to have a half-value width HW lower than the normal tissue layer NL. This shows that the half-value width HW can be used to evaluate within the measurement depth at Vickers hardness HV10.

図8に示すように、金属部品Cについては、表層の半価幅HWよりも表層から数μm下の位置の半価幅HWが一旦低くなり、ビッカース硬度HV10での測定深さを超えると正常範囲に向って増加することが確認された。図9は、金属部品Bについての、光学顕微鏡により撮影した組織図である。また、図10は、金属部品Cについての、光学顕微鏡により撮影した組織図であり、研削加工熱の影響を受けていない正常組織層NLの上に、研削加工熱の影響を受けた黒層(軟化層)BLおよび白層(再硬化層)WLが順次形成されている。 As shown in Figure 8, for metal part C, the half-value width HW at a position several μm below the surface layer is initially lower than the half-value width HW of the surface layer, and it was confirmed that it increases toward the normal range when the measurement depth at Vickers hardness HV10 is exceeded. Figure 9 is a structural diagram of metal part B photographed with an optical microscope. Also, Figure 10 is a structural diagram of metal part C photographed with an optical microscope, in which a black layer (softened layer) BL and a white layer (re-hardened layer) WL that have been affected by the grinding heat are formed in sequence on top of a normal structural layer NL that has not been affected by the grinding heat.

図8の半価幅HWの値は、図10の組織図の白層WLと黒層BLとを包括した値である。この点において、半価幅HWにより白層WLの存在が捉えられており、ビッカース硬度HV10により評価不可能な表層(ビッカース硬度HV10での測定深さより浅い部分)の研削焼けは、半価幅HWを用いると測定可能であることを示している。ここで、白層WLは、研削加工熱の影響で組織が変化しており、研削加工熱の影響を受けていない正常組織層NLよりもビッカース硬度Hvが高い再硬化層であるが、黒層BLは、研削加工熱の影響で組織が変化しており、研削加工熱の影響を受けていない正常組織層NLよりもビッカース硬度Hvが低い軟化層である。 The value of the half-value width HW in FIG. 8 is a value that includes the white layer WL and the black layer BL in the structure diagram in FIG. 10. In this respect, the half-value width HW captures the presence of the white layer WL, and indicates that grinding burn in the surface layer (portion shallower than the measurement depth with Vickers hardness HV10) that cannot be evaluated with Vickers hardness HV10 can be measured using the half-value width HW. Here, the white layer WL is a re-hardened layer whose structure has changed due to the influence of grinding heat and whose Vickers hardness Hv is higher than that of the normal structure layer NL that is not affected by the grinding heat, while the black layer BL is a softened layer whose structure has changed due to the influence of grinding heat and whose Vickers hardness Hv is lower than that of the normal structure layer NL that is not affected by the grinding heat.

次に、本発明者は、研削代断面積が少ない領域においてビッカース硬度Hvにおいて正常品と同じ値を示した研削焼け有りの金属部品14(異常品)の外周面の4箇所について、前述の半価幅測定条件と同じ条件ではあるが、0°、18.4°、26.6°、33.2°、39.2°、45.0°の6種類を角度Ψ毎に半価幅HWの測定を行ない、図5と同様の二次元座標にその測定値をプロットすると、図11に示すように、角度Ψによっても半価幅HWの値は上下することが判明した。このため、本発明者は、各角度Ψから得られた半価幅HWを平均した半価幅平均値HWavで研削焼けを評価することで、均一に研削加工熱が加えられている訳ではない金属部品14の複数の結晶面の情報から研削焼けを評価することができる点を見出した。 Next, the inventor measured the half-width HW for six angles Ψ (0°, 18.4°, 26.6°, 33.2°, 39.2°, and 45.0°) for four locations on the outer periphery of a metal part 14 (abnormal part) with grinding burn that showed the same Vickers hardness Hv value as a normal part in the area with a small grinding allowance cross-sectional area, under the same conditions as the half-width measurement conditions described above. When the measured values were plotted on a two-dimensional coordinate system similar to that shown in FIG. 5, it was found that the value of the half-width HW also fluctuated depending on the angle Ψ, as shown in FIG. 11. For this reason, the inventor discovered that by evaluating grinding burn using the half-width average value HWav, which is the average of the half-widths HW obtained from each angle Ψ, it is possible to evaluate grinding burn from information on multiple crystal planes of a metal part 14 to which grinding heat is not uniformly applied.

図6~図8から明らかなように、金属部品14では、研削加工熱の影響を強く受けるほど白層(再硬化層)WLが形成されて半価幅HWが正常品よりも高く検出され、研削加工熱の影響を弱いほど黒層(軟化層)BLが形成されて半価幅HWが正常品よりも低く検出される。この点において、研削焼けの判定には、研削加工された浸炭焼入鋼SCr420について、例えば、後述の図15に示す場合と同様に求められたTHmax1、THmax2等の上限値THmax以下、且つ、THmin1、THmin2等の下限値THmin以上の正常判定領域を有するように設定された研削焼け判定閾値THが用いられる。ここで、研削焼け判定閾値THの中央値THCは、図5に示すように半価幅HWの平均値である半価幅平均値HWavと同じ値である6.75に設定されている。 As is clear from Figures 6 to 8, the more strongly the metal part 14 is affected by the grinding heat, the more a white layer (re-hardened layer) WL is formed, and the half-width HW is detected as higher than that of a normal part, and the more weakly the metal part 14 is affected by the grinding heat, the more a black layer (softened layer) BL is formed, and the half-width HW is detected as lower than that of a normal part. In this respect, for the grinded carburized and hardened steel SCr420, a grinding burn determination threshold TH is used, which is set to have a normal determination region that is equal to or lower than the upper limit THmax of THmax1, THmax2, etc., and equal to or higher than the lower limit THmin of THmin1, THmin2, etc., obtained in the same manner as in the case shown in Figure 15 described later. Here, the median THC of the grinding burn determination threshold TH is set to 6.75, which is the same value as the half-width average value HWav, which is the average value of the half-width HW, as shown in Figure 5.

上限値THmaxは、研削焼けの影響を受けて生じた白層WLの存在により半価幅HWが正常品よりも高い値を示す不合格品を除去するための値であり、下限値THminは、研削焼けの影響を受けて生じた黒層BLの存在により半価幅HWが正常品よりも低い値を示す不合格品を除去するための値である。 The upper limit THmax is a value for removing non-conforming products whose half-width HW is higher than that of normal products due to the presence of a white layer WL caused by grinding burns, and the lower limit THmin is a value for removing non-conforming products whose half-width HW is lower than that of normal products due to the presence of a black layer BL caused by grinding burns.

図5から図8に示す、上限値THmax1は、前記各角度Ψから得られた半価幅HWを平均した半価幅平均値HWavである中央値THCの+0.5°(+7.40%)に設定され、下限値THmin1は、前記各角度Ψから得られた半価幅HWを平均した半価幅平均値HWavである中央値THCの-0.5°(-7.40%)に設定されている。この±0.5°の絶対値は、図5に示す異常品の最大値と、半価幅平均値HWavである中央値THCとの差に基づいている。 The upper limit THmax1 shown in Figures 5 to 8 is set to +0.5° (+7.40%) of the median THC, which is the average half-width HWav obtained by averaging the half-widths HW obtained from each angle Ψ, and the lower limit THmin1 is set to -0.5° (-7.40%) of the median THC, which is the average half-width HWav obtained by averaging the half-widths HW obtained from each angle Ψ. The absolute value of this ±0.5° is based on the difference between the maximum value of the abnormal product shown in Figure 5 and the median THC, which is the average half-width HWav.

また、図5から図8に示す、上限値THmax2は、前記各角度Ψから得られた半価幅HWを平均した半価幅平均値HWavである中央値THCの+0.25°(+3.70%)に設定され、下限値THmin2は、前記各角度Ψから得られた半価幅HWを平均した半価幅平均値HWavである中央値THCの-0.25°(-3.70%)に設定されている。この±0.25°の絶対値は、図7及び図9に示す金属部品Bにおける黒層BL(深さ約20μm)を削除した時の半価幅HWの値と、半価幅平均値HWavである中央値THCとの差に基づいている。 The upper limit THmax2 shown in Figures 5 to 8 is set to +0.25° (+3.70%) of the median THC, which is the average half-width HWav obtained by averaging the half-width HW obtained from each angle Ψ, and the lower limit THmin2 is set to -0.25° (-3.70%) of the median THC, which is the average half-width HWav obtained by averaging the half-width HW obtained from each angle Ψ. The absolute value of ±0.25° is based on the difference between the value of the half-width HW when the black layer BL (depth of about 20 μm) is removed from the metal part B shown in Figures 7 and 9, and the median THC, which is the average half-width HWav.

さらに、本発明者は、以下に示す研削条件で平面研削された焼入鋼(SCM440)製の金属部品14について、深さと半価幅HWとの関係を明らかとする試験を、以下の測定条件を用いて行なった。 Furthermore, the inventors conducted a test to clarify the relationship between the depth and the half-value width HW for a metal part 14 made of hardened steel (SCM440) that had been surface ground under the grinding conditions shown below, using the following measurement conditions.

(平面研削条件)
機械 :平面研削盤
研削方式 :レシプロ研削(ダウンカット)
研削能率 :3.3mm/mm・s
ドレス方式 :トラバース(ダウンカット)
ドレッサ :SD 40 Q 75 M(ロータリータイプ)
ドレッサ周速度 :28m/s
ドレッサ切込量 :2.5μm/pass
ドレスリード :0.1mm/r.o.w
ドレッサ周速度比 :0.7
砥石(ホイールスペック) :CBN 80 L 200 V
砥石周速度 :40m/s
左右テーブル速度 :4m/min
被削材 :SCM440(焼入鋼)
(Surface grinding conditions)
Machine: Surface grinder Grinding method: Reciprocating grinding (down cut)
Grinding efficiency: 3.3mm 3 /mm・s
Dressing method: Traverse (down cut)
Dresser: SD 40 Q 75 M (rotary type)
Dresser peripheral speed: 28 m/s
Dresser cutting depth: 2.5 μm/pass
Dress lead: 0.1mm/r.o.w
Dresser peripheral speed ratio: 0.7
Grinding wheel (wheel specs): CBN 80 L 200 V
Wheel speed: 40 m/s
Left and right table speed: 4m/min
Work material: SCM440 (hardened steel)

(半価幅測定条件)
測定部位 :表層0μm
回折X線の測定範囲 :140°~170°
2θ :156.40°(α-Fe(211))
ステップ :0.20°
角度Ψ :0°、18.4°、26.6°、33.2°、
39.2°、45.0°
管球 :Cr
特性X線 :Kα線
(Conditions for measuring half-width)
Measurement site: surface layer 0μm
Diffraction X-ray measurement range: 140° to 170°
2θ: 156.40° (α-Fe(211))
Step: 0.20°
Angle Ψ: 0°, 18.4°, 26.6°, 33.2°,
39.2°, 45.0°
Tube: Cr
Characteristic X-rays: Kα rays

図12および図13は、電解研磨によって金属部品14の表面から測定面まで除去された深さ(μm)を示す横軸とその表層の深さ毎に6種類の角度Ψでそれぞれ得られた半価幅HW(°)を示す縦軸との二次元座標において、6種類の角度Ψ毎に得られた半価幅HWの測定値をそれぞれ示している。図12は、深さ0μmから100μmまでの半価幅HWの測定値を示しており、6種類の角度Ψに影響されたばらつきを示している。図13は、深さ100μmから600μmまでの深さの半価幅HWの測定値を示しており、図12に比較して6種類の角度Ψに応じたばらつきが小さい。すなわち、深さが100μmまでは、角度Ψの影響を受けて半価幅HWが異なることを示している。 12 and 13 show the measured values of the half-width HW obtained for each of six different angles Ψ in a two-dimensional coordinate system with the horizontal axis showing the depth (μm) removed from the surface of the metal part 14 to the measurement surface by electrolytic polishing, and the vertical axis showing the half-width HW (°) obtained at each of six different angles Ψ for each depth of the surface layer. FIG. 12 shows the measured values of the half-width HW from a depth of 0 μm to 100 μm, showing the variation influenced by the six different angles Ψ. FIG. 13 shows the measured values of the half-width HW from a depth of 100 μm to 600 μm, showing smaller variation according to the six different angles Ψ compared to FIG. 12. In other words, it shows that the half-width HW differs under the influence of the angle Ψ up to a depth of 100 μm.

図14は、電解研磨によって金属部品14の表面から除去された表層の深さ(μm)を示す横軸とその表層の深さ毎に6種類の角度Ψ毎に得られた半価幅HWを平均した半価幅平均値HWav(°)を示す縦軸との二次元座標において、6種類の角度Ψ毎に得られた半価幅HWを平均した半価幅平均値HWav(°)が示されている。図15に示すように、研削加工された焼入鋼SCM440から成る金属部品14についての研削焼け判定閾値THの中央値THCは、研削焼けが正常であると評価された金属部品14の表面に、6種類の角度Ψを変化させて入射X線を照射し、回折X線検出制御部34と同様に金属部品14の表面16において回折された回折X線を検出し、半価幅平均値算出部36と同様にして角度Ψ毎の回折X線の強度プロファイルの半価幅HWの平均値である半価幅平均値HWavと同じ値である4.18に設定されている。 14 shows the average half-width HWav (°) obtained by averaging the half-width HW obtained for each of six different angles Ψ in a two-dimensional coordinate system with the horizontal axis indicating the depth (μm) of the surface layer removed from the surface of the metal part 14 by electrolytic polishing and the vertical axis indicating the average half-width HWav (°) obtained by averaging the half-width HW obtained for each of six different angles Ψ for each depth of the surface layer. As shown in FIG. 15, the median THC of the grinding burn determination threshold TH for a metal part 14 made of ground hardened steel SCM440 is set to 4.18, which is the same value as the average half-width HWav, which is the average value of the half-width HWav of the intensity profile of the diffracted X-rays for each angle Ψ, by irradiating the surface of the metal part 14 evaluated as having normal grinding burns with incident X-rays at six different angles Ψ, detecting the diffracted X-rays diffracted at the surface 16 of the metal part 14 in the same manner as the diffracted X-ray detection control unit 34, and calculating the average half-width HWav in the same manner as the average half-width calculation unit 36.

上限値THmax1或いは上限値THmax2は、研削焼けの影響を受けて生じた白層WLの存在により半価幅HWが正常品よりも高い値を示す不合格品を除去するための値であり、下限値THmin1或いは下限値THmin2は、研削焼けの影響を受けて生じた黒層BLの存在により半価幅HWが正常品よりも低い値を示す不合格品を除去するための値である。たとえば、上限値THmax1及び下限値THmin1は、前記各角度Ψから得られた半価幅HWを平均した半価幅平均値HWavである中央値THCの+0.5°(+11.96%)値或いは-0.5°(-11.96%)値に設定される。この±0.5°の絶対値は、半価幅平均値HWavと異常品の最大値との差に相当する。上限値THmax2及び下限値THmin2は、前記各角度Ψから得られた半価幅HWを平均した半価幅平均値HWavである中央値THCの+0.25°(+5.98%)値或いは-0.25°(-5.98%)値に設定される。この±0.25°の絶対値は、半価幅平均値HWavと軟化層である黒層BLを削除した時の半価幅HWとの差に相当する。 The upper limit THmax1 or THmax2 is a value for removing non-conforming products whose half-width HW is higher than that of normal products due to the presence of a white layer WL caused by grinding burn, and the lower limit THmin1 or THmin2 is a value for removing non-conforming products whose half-width HW is lower than that of normal products due to the presence of a black layer BL caused by grinding burn. For example, the upper limit THmax1 and the lower limit THmin1 are set to +0.5° (+11.96%) or -0.5° (-11.96%) of the median THC, which is the average half-width HWav obtained by averaging the half-widths HW obtained from each angle Ψ. The absolute value of ±0.5° corresponds to the difference between the average half-width HWav and the maximum value of the abnormal products. The upper limit THmax2 and the lower limit THmin2 are set to +0.25° (+5.98%) or -0.25° (-5.98%) of the median THC, which is the average half-width HWav obtained by averaging the half-widths HW obtained from each angle Ψ. The absolute value of ±0.25° corresponds to the difference between the average half-width HWav and the half-width HW when the softened layer, the black layer BL, is removed.

図16、図17、図18は、上記の円筒研削条件と同じ研削条件により浸炭焼入鋼(SCr420)製の金属部品14を研削した場合における、砥石単位円周長さ当たりの研削代断面積(mm/mm)と、砥石軸の消費電力値(kW)、砥石摩耗量(μm)、および研削面の面粗度(最大高さ粗さ)Rz(μm)(JIS B 0601:2013)との関係を示している。図16、図17、図18において、●は金属部品14が例えば上述の砥石2を用いることで研削焼けが生成される研削条件で研削された場合、○印は金属部品14が例えば上述の砥石1を用いることで研削焼けが生成される研削条件で研削された場合である。 16, 17, and 18 show the relationship between the grinding allowance cross-sectional area (mm2/mm) per unit circumference length of the grinding wheel, the power consumption value (kW) of the grinding wheel shaft, the amount of wear of the grinding wheel (μm), and the surface roughness (maximum height roughness) Rz (μm) (JIS B 0601:2013) of the ground surface when a metal part 14 made of carburized and hardened steel ( SCr420 ) is ground under the same grinding conditions as the above-mentioned cylindrical grinding conditions. In Fig. 16, 17, and 18, ● indicates that the metal part 14 is ground under grinding conditions under which grinding burns are generated by using, for example, the above-mentioned grinding wheel 2, and ○ indicates that the metal part 14 is ground under grinding conditions under which grinding burns are generated by using, for example, the above-mentioned grinding wheel 1.

図16、図17、図18に示すように、砥石軸の消費電力値(kW)、砥石摩耗量(μm)、面粗度Rz(μm)のいずれにおいても、研削焼け無し品に比較して、研削焼け有り品が上回ることを示している。このような研削焼け無し品を得るように、研削砥石の開発、研削砥石の選択、研削条件の選択を行なうために、本実施例の研削焼け評価装置10、および研削焼け評価装置10により実施される研削焼け評価方法を用いることは、工業的に重要な意味がある。 As shown in Figures 16, 17, and 18, the grinding burn products are superior to the products without grinding burn in terms of the power consumption (kW) of the grinding wheel spindle, the amount of grinding wheel wear (μm), and the surface roughness Rz (μm). In order to obtain such products without grinding burn, it is industrially important to use the grinding burn evaluation device 10 of this embodiment and the grinding burn evaluation method implemented by the grinding burn evaluation device 10 to develop grinding wheels, select grinding wheels, and select grinding conditions.

上述のように、本実施例の研削焼け評価装置10および研削焼け評価装置10により実施される研削焼け評価方法によれば、金属部品14への入射X線の入射光軸Lx1と金属部品14の表面16の法線z1とが成す角度Ψを変化させて、入射X線を金属部品14の表面16に照射するX線照射制御部32或いはX線照射工程S1と、角度Ψ毎に、金属部品14の表面16において回折された回折X線の強度プロファイルを検出する回折X線検出制御部34或いは回折X線検出工程S2と、回折X線検出工程S2においてそれぞれ検出された角度Ψ毎の回折X線の強度プロファイルから得た半価幅HWの平均値HWavを算出する半価幅平均値算出部36或いは半価幅平均値算出工程S3と、半価幅HWの平均値HWavと予め設定された研削焼け判定閾値THとの比較に基づいて金属部品14の研削焼けを評価する研削焼け評価部38或いは研削焼け評価工程S4と、を含む。このように、研削焼け評価部38或いは研削焼け評価工程S4において、半価幅平均値算出部36或いは半価幅平均値算出工程S3により算出された角度Ψ毎の回折X線の強度プロファイルの半価幅HWの平均値HWavと、予め設定された研削焼け判定閾値THとの比較に基づいて金属部品14の研削焼けが評価されるので、研削加工された金属部品14の表面に発生する研削焼けを正確に評価することができる。 As described above, according to the grinding burn evaluation device 10 of this embodiment and the grinding burn evaluation method implemented by the grinding burn evaluation device 10, the X-ray irradiation control unit 32 or X-ray irradiation process S1 irradiates the surface 16 of the metal part 14 with the incident X-ray by changing the angle Ψ between the incident optical axis Lx1 of the X-ray incident on the metal part 14 and the normal z1 of the surface 16 of the metal part 14, the diffracted X-ray detection control unit 34 or diffracted X-ray detection process S2 detects the intensity profile of the diffracted X-ray diffracted on the surface 16 of the metal part 14 for each angle Ψ, the half-width average calculation unit 36 or half-width average calculation process S3 calculates the average value HWav of the half-width HW obtained from the intensity profile of the diffracted X-ray for each angle Ψ detected in the diffracted X-ray detection process S2, and the grinding burn evaluation unit 38 or grinding burn evaluation process S4 evaluates the grinding burn of the metal part 14 based on a comparison between the average value HWav of the half-width HW and a preset grinding burn judgment threshold TH. In this way, in the grinding burn evaluation unit 38 or grinding burn evaluation process S4, the grinding burn of the metal part 14 is evaluated based on a comparison between the average value HWav of the half-width HW of the diffracted X-ray intensity profile for each angle Ψ calculated by the half-width average calculation unit 36 or the half-width average calculation process S3 and the preset grinding burn judgment threshold value TH, so that grinding burns occurring on the surface of the ground metal part 14 can be accurately evaluated.

また、本実施例の研削焼け評価装置10、および研削焼け評価装置10により実施される研削焼け評価方法によれば、研削焼け判定閾値THは、上限値THmax以下且つ下限値THmin以上の正常判定領域を有するように設定されたものであることから、半価幅HWの平均値HWavが研削焼け判定閾値THの上限値THmaxを上まわる不良品および研削焼け判定閾値THの下限値THminを下まわる不良品を判定することができるので、研削加工された金属部品14の表面16に発生する研削焼けを正確に評価することができる。 In addition, according to the grinding burn evaluation device 10 of this embodiment and the grinding burn evaluation method implemented by the grinding burn evaluation device 10, the grinding burn judgment threshold TH is set to have a normal judgment region that is equal to or less than the upper limit THmax and equal to or more than the lower limit THmin. Therefore, it is possible to judge defective products whose average value HWav of the half-width HW exceeds the upper limit THmax of the grinding burn judgment threshold TH and defective products whose average value HWav is below the lower limit THmin of the grinding burn judgment threshold TH, and therefore it is possible to accurately evaluate grinding burns that occur on the surface 16 of the ground metal part 14.

また、本実施例の研削焼け評価装置10、および研削焼け評価装置10により実施される研削焼け評価方法によれば、角度Ψは0°以上45°以下の範囲内の複数の角度に変化させられるので、X線照射工程S1および回折X線検出工程S2を行なうための回折X線検出装置12が小型となる。 In addition, according to the grinding burn evaluation device 10 of this embodiment and the grinding burn evaluation method implemented by the grinding burn evaluation device 10, the angle Ψ can be changed to multiple angles within the range of 0° to 45°, so the diffracted X-ray detection device 12 for performing the X-ray irradiation process S1 and the diffracted X-ray detection process S2 can be made small.

また、本実施例の研削焼け評価装置10、および研削焼け評価装置10により実施される研削焼け評価方法によれば、研削焼け判定閾値THの中央値THCは、研削加工された金属部品14のうち、研削焼けが正常であると評価された金属部品14の表面に、前記X線照射工程S1と同様に金属部品14への入射X線の入射光軸Lx1と金属部品14の表面16の法線z1とが成す角度Ψを変化させて入射X線を照射し、回折X線検出工程S2と同様に金属部品14の表面16において回折された回折X線を検出し、半価幅平均値算出工程S3と同様にしてそれぞれ検出された角度Ψ毎の回折X線の強度プロファイルの半価幅HWの平均値HWavを算出し、角度Ψ毎の半価幅の平均値HWavに基づいて設定した値である。このような研削焼け判定閾値THと角度Ψ毎の回折X線の強度プロファイルの半価幅の平均値HWavとの比較に基づいて金属部品14の研削焼けを評価するので、研削加工された金属部品14の表面16に発生する研削焼けを正確に評価することができる。 In addition, according to the grinding burn evaluation device 10 of this embodiment and the grinding burn evaluation method implemented by the grinding burn evaluation device 10, the median THC of the grinding burn judgment threshold value TH is set by irradiating incident X-rays to the surface of a metal part 14 that has been ground and that has been evaluated as having normal grinding burns, while changing the angle Ψ between the incident optical axis Lx1 of the X-rays incident on the metal part 14 and the normal z1 of the surface 16 of the metal part 14, as in the X-ray irradiation process S1, detecting the diffracted X-rays diffracted at the surface 16 of the metal part 14, as in the diffracted X-ray detection process S2, and calculating the average value HWav of the half-width HWav of the intensity profile of the diffracted X-rays for each detected angle Ψ, as in the half-width average calculation process S3, and setting the median THC of the grinding burn judgment threshold value TH based on the average value HWav of the half-width for each angle Ψ. The grinding burn of the metal part 14 is evaluated based on a comparison between the grinding burn judgment threshold TH and the average half-width HWav of the intensity profile of the diffracted X-rays for each angle Ψ, so that the grinding burn occurring on the surface 16 of the ground metal part 14 can be accurately evaluated.

また、本実施例の研削焼け評価装置10、および研削焼け評価装置10により実施される研削焼け評価方法によれば、研削焼け判定閾値THの中央値THCは、研削加工された金属部品14の表面を研削加工による影響のない深さまで電解研磨により研磨し、その金属部品14の電解研磨により研磨された表面に、X線照射工程S1と同様に金属部品14への入射X線の入射光軸Lx1と金属部品14の表面16の法線z1とが成す角度Ψを変化させて入射X線を照射し、回折X線検出工程S2と同様に金属部品14の表面16において回折された回折X線を検出し、半価幅平均値算出工程S3と同様にしてそれぞれ検出された角度Ψ毎の回折X線の強度プロファイルの半価幅HWの平均値HWavを算出し、角度Ψ毎の半価幅HWの平均値HWavに基づいて設定した値である。このような研削焼け判定閾値THと角度Ψ毎の回折X線の強度プロファイルの半価幅HWの平均値HWavとの比較に基づいて金属部品14の研削焼けを評価するので、研削加工された金属部品14の表面16に発生する研削焼けを正確に評価することができる。 In addition, according to the grinding burn evaluation device 10 of this embodiment and the grinding burn evaluation method implemented by the grinding burn evaluation device 10, the median THC of the grinding burn judgment threshold value TH is set by electrolytically polishing the surface of the ground metal part 14 to a depth that is not affected by the grinding process, irradiating the electrolytically polished surface of the metal part 14 with incident X-rays by changing the angle Ψ between the incident optical axis Lx1 of the X-ray incident on the metal part 14 and the normal z1 of the surface 16 of the metal part 14, as in the X-ray irradiation process S1, detecting the diffracted X-rays diffracted at the surface 16 of the metal part 14, as in the diffracted X-ray detection process S2, calculating the average value HWav of the half-width HWav of the intensity profile of the diffracted X-rays for each detected angle Ψ, as in the half-width average calculation process S3, and setting the median THC based on the average value HWav of the half-width HW for each angle Ψ. The grinding burn of the metal part 14 is evaluated based on a comparison between the grinding burn judgment threshold TH and the average value HWav of the half-width HW of the intensity profile of the diffracted X-rays for each angle Ψ, so that the grinding burn occurring on the surface 16 of the ground metal part 14 can be accurately evaluated.

以上、本発明の実施例を図面に基づいて詳細に説明したが、本発明はその他の態様においても適用される。 The above describes an embodiment of the present invention in detail with reference to the drawings, but the present invention can also be applied in other aspects.

例えば、前述の実施例において、半価幅平均値HWavを算出するための6種類の角度Ψが用いられていたが、5種類以下或いは7種類以上の複数種類の角度Ψであってもよい。 For example, in the above embodiment, six types of angles Ψ were used to calculate the average half-width HWav, but multiple types of angles Ψ, such as five or less or seven or more, may be used.

また、前述の実施例において、研削焼け判定閾値THの中央値THCは、角度Ψ毎の半価幅HWの平均値HWavと同じ値であったが、異なる値であってもよい。例えば、研削焼け判定閾値THの中央値THCは、平均値HWavより0.1°大きい値であってもよく、その場合の正常判定領域は、例えば、平均値HWavを基準として-0.4°から+0.6°までの幅を有する。 In the above embodiment, the median THC of the grinding burn determination threshold TH was the same as the average value HWav of the half-width HW for each angle Ψ, but it may be a different value. For example, the median THC of the grinding burn determination threshold TH may be a value 0.1° larger than the average value HWav, and in that case, the normal determination region has a width of, for example, -0.4° to +0.6° based on the average value HWav.

また、前述の実施例において、金属部品14は、浸炭焼入れされたクロム鋼SCr420、或いは焼入れされたクロムモリブデン鋼SCM440であったが、他の種類の焼入鋼であっても良い。要するに、焼き入れ可能な材料から成る部品であればよい。 In the above embodiment, the metal part 14 is made of carburized chrome steel SCr420 or hardened chrome molybdenum steel SCM440, but it may be made of other types of hardened steel. In short, it is sufficient for the part to be made of a material that can be hardened.

また、前述の実施例において、金属部品14は、たとえば円柱状部品のように円筒研削される外周面を備える形状の部品や、たとえば板状部品のように平面研削される面を備える形状の部品であったが、他の形状であっても差し支えない。 In addition, in the above-described embodiment, the metal part 14 is a part having a shape with an outer peripheral surface that is cylindrically ground, such as a cylindrical part, or a part having a shape with a surface that is flat ground, such as a plate-shaped part, but it may have other shapes.

尚、上述したのはあくまでも一実施形態であり、本発明は当業者の知識に基づいて種々の変更、改良を加えた態様で実施することができる。 Note that the above is merely one embodiment, and the present invention can be implemented in various forms with various modifications and improvements based on the knowledge of those skilled in the art.

10:研削焼け評価装置
12:回折X線検出装置
14:金属部品
16:表面
32:X線照射制御部
34:回折X線検出制御部
36:半価幅平均値算出部
38:研削焼け評価部
Lx1:入射光軸
z1:照射面法線(金属部品の表面の法線)
TH:研削焼け判定閾値
THmax,THmax1,THmax2:上限値
THmin,THmin1,THmin2:下限値
HW:半価幅
HWav:半価幅平均値(半価幅の平均値)
10: Grinding burn evaluation device 12: Diffraction X-ray detection device 14: Metal part 16: Surface 32: X-ray irradiation control unit 34: Diffraction X-ray detection control unit 36: Half-value width average calculation unit 38: Grinding burn evaluation unit Lx1: Incident optical axis z1: Irradiation surface normal (normal to the surface of the metal part)
TH: grinding burn judgment threshold value THmax, THmax1, THmax2: upper limit value THmin, THmin1, THmin2: lower limit value HW: half width HWav: half width average value (average value of half width)

Claims (10)

研削加工された金属部品の表面に発生する研削焼けを評価する金属部品の研削焼け評価装置であって、
前記金属部品への入射X線の入射光軸と前記金属部品の表面の法線とが成す角度Ψを変化させて、入射X線を前記金属部品の表面に照射するX線照射制御部と、
前記角度Ψ毎に、前記金属部品の表面において回折された回折X線の強度プロファイルを検出する回折X線検出制御部と、
前記回折X線検出制御部においてそれぞれ検出された前記角度Ψ毎の回折X線の強度プロファイルから得た半価幅の平均値を算出する半価幅平均値算出部と、
前記半価幅の平均値と、研削加工熱の影響を受けた再硬化層である白層よりも半価幅が低く且つ研削加工熱の影響を受けた軟化層である黒層よりも半価幅が高い正常判定領域を有するように予め設定された研削焼け判定閾値との比較に基づいて前記金属部品の研削焼けを評価する研削焼け評価部と、を含む
ことを特徴とする金属部品の研削焼け評価装置。
A grinding burn evaluation device for evaluating grinding burns occurring on a surface of a ground metal part, comprising:
an X-ray irradiation control unit that changes an angle Ψ between an incident optical axis of the X-ray incident on the metal part and a normal line to a surface of the metal part, and irradiates the surface of the metal part with the incident X-ray;
a diffracted X-ray detection control unit that detects an intensity profile of diffracted X-rays diffracted at a surface of the metal part for each of the angles Ψ;
a half-width average calculation unit that calculates an average half-width obtained from the intensity profiles of the diffracted X-rays for each angle Ψ detected by the diffracted X-ray detection control unit;
and a grinding burn evaluation unit that evaluates the grinding burn of the metal part based on a comparison between the average half-value width and a grinding burn judgment threshold value that is preset to have a normal judgment region having a half-value width lower than that of a white layer, which is a re-hardened layer affected by the heat of grinding processing, and a half -value width higher than that of a black layer, which is a softened layer affected by the heat of grinding processing.
前記研削焼け判定閾値は、前記白層の存在により半価幅が前記正常判定領域よりも高い値を示す不合格品を除去するための上限値以下且つ前記黒層の存在により半価幅が前記正常判定領域よりも低い値を示す不合格品を除去するための下限値以上の前記正常判定領域を有するように設定されている
ことを特徴とする請求項1の金属部品の研削焼け評価装置。
2. The grinding burn evaluation device for metal parts according to claim 1, characterized in that the grinding burn judgment threshold is set to have the normal judgment region equal to or lower than an upper limit value for removing reject products whose half -value width shows a higher value than the normal judgment region due to the presence of the white layer, and equal to or higher than a lower limit value for removing reject products whose half-value width shows a lower value than the normal judgment region due to the presence of the black layer.
前記X線照射制御部は、入射X線を前記金属部品の表面に、前記角度Ψを0°~45°の範囲内の複数の角度に変化させて照射する
ことを特徴とする請求項1又は2の金属部品の研削焼け評価装置。
3. The grinding burn evaluation device for a metal part according to claim 1, wherein the X-ray irradiation control unit irradiates the surface of the metal part with the incident X-rays by changing the angle Ψ to a plurality of angles within a range of 0° to 45°.
前記研削焼け判定閾値は、前記研削加工された前記金属部品のうち、研削焼けが正常であると評価された前記金属部品の表面に、前記X線照射制御部と同様に前記角度Ψを変化させて入射X線を照射し、前記回折X線検出制御部と同様に前記金属部品の表面において回折された回折X線を検出し、前記半価幅平均値算出部と同様にして回折X線の強度プロファイルから算出した前記半価幅の平均値に基づいて設定した値である
ことを特徴とする請求項1から3のいずれか1の金属部品の研削焼け評価装置。
4. The device for evaluating grinding burn on a metal part according to claim 1, wherein the grinding burn judgment threshold is a value set based on an average value of the half-width calculated from an intensity profile of the diffracted X-rays in the same manner as the X-ray irradiation control unit, by irradiating incident X-rays at the angle Ψ to a surface of the metal part that has been evaluated as having normal grinding burn among the ground metal parts, and detecting diffracted X-rays on the surface of the metal part in the same manner as the diffracted X-ray detection control unit.
前記研削焼け判定閾値は、前記研削加工された前記金属部品の表面を研削加工熱による影響のない深さまで電解研磨により研磨し、前記金属部品の前記電解研磨により研磨された表面に、前記角度Ψを変化させて入射X線を照射し、前記回折X線検出制御部と同様に前記金属部品の表面において回折された回折X線を検出し、前記半価幅平均値算出部と同様にして回折X線の強度プロファイルから算出した前記半価幅の平均値に基づいて設定した値である
ことを特徴とする請求項1から3のいずれか1の金属部品の研削焼け評価装置。
4. The device for evaluating grinding burn on a metal part according to claim 1, wherein the grinding burn determination threshold is a value set based on an average value of the half-width calculated from an intensity profile of the diffracted X-rays in a similar manner to the diffracted X-ray detection control unit, by electrolytically polishing the ground surface of the metal part to a depth that is not affected by grinding heat, by irradiating the surface of the metal part polished by electrolytic polishing with incident X-rays while changing the angle Ψ, by detecting diffracted X-rays on the surface of the metal part in a similar manner to the diffracted X-ray detection control unit, and by the average value of the half-width calculated from the intensity profile of the diffracted X-rays in a similar manner to the average half-width calculation unit.
研削加工された金属部品の表面に発生する研削焼けを評価する金属部品の研削焼け評価方法であって、
前記金属部品への入射X線の入射光軸と前記金属部品の表面の法線とが成す角度Ψを変化させて、入射X線を前記金属部品の表面に照射するX線照射工程と、
前記角度Ψ毎に、前記金属部品の表面において回折された回折X線の強度プロファイルを検出する回折X線検出工程と、
前記回折X線検出工程においてそれぞれ検出された前記角度Ψ毎の回折X線の強度プロファイルから得た半価幅の平均値を算出する半価幅平均値算出工程と、
前記半価幅の平均値と、研削加工熱の影響を受けた再硬化層である白層よりも半価幅が低く且つ研削加工熱の影響を受けた軟化層である黒層よりも半価幅が高い正常判定領域を有するように予め設定された研削焼け判定閾値との比較に基づいて前記金属部品の研削焼けを評価する研削焼け評価工程と、を含む
ことを特徴とする金属部品の研削焼け評価方法。
A method for evaluating grinding burns on a surface of a ground metal part, comprising:
an X-ray irradiation process in which an angle Ψ between an incident optical axis of the X-ray incident on the metal part and a normal line to the surface of the metal part is changed, and the incident X-ray is irradiated onto the surface of the metal part;
a diffracted X-ray detection step of detecting an intensity profile of diffracted X-rays diffracted at the surface of the metal component for each of the angles Ψ;
a half-width average calculation step of calculating an average half-width obtained from the intensity profiles of the diffracted X-rays for each angle Ψ detected in the diffracted X-ray detection step;
and a grinding burn evaluation step of evaluating the grinding burn of the metal part based on a comparison between the average half-value width and a grinding burn judgment threshold value that is preset so as to have a normal judgment region having a half-value width lower than that of a white layer, which is a re-hardened layer affected by the heat of grinding processing, and a half -value width higher than that of a black layer, which is a softened layer affected by the heat of grinding processing.
前記研削焼け判定閾値は、前記白層の存在により半価幅が前記正常判定領域よりも高い値を示す不合格品を除去するための上限値以下且つ前記黒層の存在により半価幅が前記正常判定領域よりも低い値を示す不合格品を除去するための下限値以上の前記正常判定領域を有するように設定されている
ことを特徴とする請求項6の金属部品の研削焼け評価方法。
The method for evaluating grinding burn on a metal part according to claim 6, characterized in that the grinding burn judgment threshold is set so as to have the normal judgment region that is equal to or lower than an upper limit value for removing reject products whose half -value width shows a higher value than the normal judgment region due to the presence of the white layer , and is equal to or higher than a lower limit value for removing reject products whose half-value width shows a lower value than the normal judgment region due to the presence of the black layer.
前記X線照射工程は、入射X線を前記金属部品の表面に、前記角度Ψを0°~45°の範囲内の複数の角度に変化させて照射する
ことを特徴とする請求項6又は7の金属部品の研削焼け評価方法。
The method for evaluating grinding burns on a metal part according to claim 6 or 7, characterized in that in the X-ray irradiation step, incident X-rays are irradiated onto the surface of the metal part by changing the angle Ψ to a plurality of angles within a range of 0° to 45°.
前記研削焼け判定閾値は、前記研削加工された前記金属部品のうち、研削焼けが正常であると評価された前記金属部品の表面に、前記X線照射工程と同様に前記角度Ψを変化させて入射X線を照射し、前記回折X線検出工程と同様に前記金属部品の表面において回折された回折X線を検出し、前記半価幅平均値算出工程と同様にして回折X線の強度プロファイルから算出した前記半価幅の平均値に基づいて設定した値である
ことを特徴とする請求項6から8のいずれか1の金属部品の研削焼け評価方法。
9. The method for evaluating grinding burns on a metal part according to claim 6, wherein the grinding burn judgment threshold is a value set based on an average value of the half-width calculated from an intensity profile of the diffracted X-rays in the same manner as in the diffracted X-ray detection step, by irradiating incident X-rays at the angle Ψ to a surface of the metal part, the surface of which is evaluated to have normal grinding burns among the ground metal parts, and detecting the diffracted X-rays on the surface of the metal part in the same manner as in the diffracted X-ray detection step.
前記研削焼け判定閾値は、前記研削加工された前記金属部品の表面を研削加工熱による影響のない深さまで電解研磨により研磨し、前記金属部品の前記電解研磨により研磨された表面に、前記X線照射工程と同様に前記角度Ψを変化させて入射X線を照射し、前記回折X線検出工程と同様に前記金属部品の表面において回折された回折X線を検出し、前記半価幅平均値算出工程と同様にして回折X線の強度プロファイルから算出した前記半価幅の平均値に基づいて設定した値である
ことを特徴とする請求項6から8のいずれか1の金属部品の研削焼け評価方法。
9. The method for evaluating grinding burns on a metal part according to claim 6, wherein the grinding burn determination threshold is a value set based on an average value of the half-width calculated from an intensity profile of the diffracted X-rays in a similar manner to the X-ray diffracted detection step, the grinding burn evaluation method comprising the steps of: polishing the ground surface of the metal part by electrolytic polishing to a depth that is not affected by grinding heat; irradiating the surface of the metal part polished by electrolytic polishing with incident X-rays while changing the angle Ψ in a similar manner to the X-ray irradiation step; detecting diffracted X-rays diffracted on the surface of the metal part in a similar manner to the X-ray diffracted detection step; and calculating the average half-width value from the intensity profile of the diffracted X-rays in a similar manner to the FWHM calculation step.
JP2020204615A 2020-12-09 2020-12-09 Apparatus and method for evaluating grinding burns on metal parts Active JP7535446B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2020204615A JP7535446B2 (en) 2020-12-09 2020-12-09 Apparatus and method for evaluating grinding burns on metal parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020204615A JP7535446B2 (en) 2020-12-09 2020-12-09 Apparatus and method for evaluating grinding burns on metal parts

Publications (2)

Publication Number Publication Date
JP2022091636A JP2022091636A (en) 2022-06-21
JP7535446B2 true JP7535446B2 (en) 2024-08-16

Family

ID=82067095

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020204615A Active JP7535446B2 (en) 2020-12-09 2020-12-09 Apparatus and method for evaluating grinding burns on metal parts

Country Status (1)

Country Link
JP (1) JP7535446B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115423816B (en) * 2022-11-07 2023-03-24 浙江安吉圆磨机械科技股份有限公司 Metal surface grinding quality detection method
CN119915990B (en) * 2024-12-27 2025-10-21 昌河飞机工业(集团)有限责任公司 Metal surface burn detection method and device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004271355A (en) 2003-03-10 2004-09-30 Koyo Seiko Co Ltd Method of inspecting burn mark in metal component
JP2010144923A (en) 2008-12-22 2010-07-01 Ntn Corp Inner ring of rolling bearing, and bearing device for wheel equipped with the same
JP2013083574A (en) 2011-10-11 2013-05-09 Hitachi-Ge Nuclear Energy Ltd Evaluation system of plastic strain and evaluation method thereof
JP2017156263A (en) 2016-03-03 2017-09-07 株式会社神戸製鋼所 Residual stress calculation method
JP2020128946A (en) 2019-02-12 2020-08-27 パルステック工業株式会社 X-ray diffraction measuring device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004271355A (en) 2003-03-10 2004-09-30 Koyo Seiko Co Ltd Method of inspecting burn mark in metal component
JP2010144923A (en) 2008-12-22 2010-07-01 Ntn Corp Inner ring of rolling bearing, and bearing device for wheel equipped with the same
JP2013083574A (en) 2011-10-11 2013-05-09 Hitachi-Ge Nuclear Energy Ltd Evaluation system of plastic strain and evaluation method thereof
JP2017156263A (en) 2016-03-03 2017-09-07 株式会社神戸製鋼所 Residual stress calculation method
JP2020128946A (en) 2019-02-12 2020-08-27 パルステック工業株式会社 X-ray diffraction measuring device

Also Published As

Publication number Publication date
JP2022091636A (en) 2022-06-21

Similar Documents

Publication Publication Date Title
US8353739B2 (en) Method for detecting and/or preventing grind burn
JP2022525521A (en) Method for automatic process monitoring during continuous creation grinding
JP7535446B2 (en) Apparatus and method for evaluating grinding burns on metal parts
JP6068772B2 (en) Rotating tool processing method and apparatus provided with a plurality of abrasive grains
US9229442B2 (en) In-process compensation of machining operation and machine arrangement
US9212961B2 (en) Grinding abnormality monitoring method and grinding abnormality monitoring device
US8858297B2 (en) Gear grinding method
CN1253934C (en) Wafer shape evaluation method, wafer, and wafer sorting method
Nadolny et al. Analysis of flatness deviations for austenitic stainless steel workpieces after efficient surface machining
US12479128B2 (en) Method for producing semiconductor wafers using a wire saw, wire saw, and semiconductor wafers made of monocrystalline silicon
JP2006208347A (en) Rolling roll surface defect detection device, grinding device, surface defect detection method, surface defect detection program, and rolling roll grinding method
JP6602477B2 (en) Method and apparatus for non-contact inspection of wafer surface properties
TW201435337A (en) Evaluation system and evaluation method of machined surface condition
KR20150033640A (en) Evaluation method and production method for semiconductor wafers
Caraguay et al. Wear assessment of microcrystalline and electrofused aluminum oxide grinding wheels by multi-sensor monitoring technique
CN113490568A (en) Method for grinding or polishing a gear or a workpiece having a gear-like profile in a grinding or polishing machine
Zurcher et al. Effect of the scanning strategy and tribological conditions on the wear resistance of IN718 obtained by Laser Metal Deposition
Denkena et al. New profiling approach with geometrically defined cutting edges for sintered metal bonded CBN grinding layers
Warhanek et al. Cutting characteristics of electroplated diamond tools with laser-generated positive clearance
JP2017030066A (en) Abnormality detection method of cutting tool and cutting processing device
WO2018193762A1 (en) Semiconductor wafer evaluation method and method for managing semiconductor wafer manufacturing step
Kannan et al. Grinding wheel redress life estimation using force and surface texture analysis
CN112945699B (en) Method for manufacturing comparison sample for heat damage eddy current inspection acceptance standard
Zeng et al. Surface characterisation-based tool wear monitoring in peripheral milling
JP2010538264A (en) Method for inspecting and remanufacturing industrial components

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230630

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20240410

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20240416

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240528

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20240723

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240805

R150 Certificate of patent or registration of utility model

Ref document number: 7535446

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350