JP7571122B2 - Boron nitride particles, and resin composition and container containing the boron nitride particles - Google Patents
Boron nitride particles, and resin composition and container containing the boron nitride particles Download PDFInfo
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- 239000002245 particle Substances 0.000 title claims description 137
- 229910052582 BN Inorganic materials 0.000 title claims description 132
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 title claims description 132
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
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- XECAHXYUAAWDEL-UHFFFAOYSA-N acrylonitrile butadiene styrene Chemical compound C=CC=C.C=CC#N.C=CC1=CC=CC=C1 XECAHXYUAAWDEL-UHFFFAOYSA-N 0.000 description 2
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 2
- 239000004676 acrylonitrile butadiene styrene Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
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- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/064—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with boron
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/38—Boron-containing compounds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L101/00—Compositions of unspecified macromolecular compounds
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- Health & Medical Sciences (AREA)
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- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Inorganic Chemistry (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Description
本開示は、窒化ホウ素粒子、並びに、該窒化ホウ素粒子を含む樹脂組成物及び収容体に関する。The present disclosure relates to boron nitride particles, as well as a resin composition and a container containing the boron nitride particles.
パワーデバイス、トランジスタ、サイリスタ、CPU等の電子部品においては、使用時に発生する熱を効率的に放熱するための放熱部材が用いられる。放熱部材は、例えば、熱伝導率が高いセラミックス粒子を含有する。セラミックス粒子としては、高熱伝導率、高絶縁性、低比誘電率等の特性を有している窒化ホウ素粒子が注目されている。In electronic components such as power devices, transistors, thyristors, and CPUs, heat dissipation members are used to efficiently dissipate heat generated during use. Heat dissipation members contain, for example, ceramic particles with high thermal conductivity. As ceramic particles, boron nitride particles have attracted attention for their properties such as high thermal conductivity, high insulation, and low dielectric constant.
窒化ホウ素粒子の製造方法としては、種々の方法が知られている。当該製造方法の一つとして、アンモニア/ホウ酸アルコキシドのモル比が1~10のホウ酸アルコキシドとアンモニアを不活性ガス気流中、750℃以上、30秒以内で反応させた後、アンモニアガス、又は、アンモニアガスと不活性ガスの混合ガスの雰囲気下、1,000~1,600℃、1時間以上で熱処理後、さらに、不活性ガス雰囲気下、1,800~2,200℃、0.5時間以上で焼成する製造方法が挙げられる(例えば特許文献1を参照)。There are various known methods for producing boron nitride particles. One such method involves reacting ammonia with boric acid alkoxide in an ammonia/boric acid alkoxide molar ratio of 1 to 10 in an inert gas stream at 750°C or higher for 30 seconds or less, followed by heat treatment at 1,000 to 1,600°C for 1 hour or more in an atmosphere of ammonia gas or a mixed gas of ammonia gas and an inert gas, and then calcining the mixture at 1,800 to 2,200°C for 0.5 hours or more in an inert gas atmosphere (see, for example, Patent Document 1).
上述した製造方法では、条件を変えながら少なくとも三段階に分けて加熱を行う必要があるが、窒化ホウ素粒子をより効率良く製造するためには、プロセスの簡素化が望まれる。一方で、プロセスの簡素化によって、窒化ホウ素粒子に求められる熱伝導率といった特性が損なわれることは避けなければならない。In the above-mentioned manufacturing method, heating must be carried out in at least three stages while changing the conditions, but in order to manufacture boron nitride particles more efficiently, it is desirable to simplify the process. On the other hand, simplification of the process must not impair the properties required for boron nitride particles, such as thermal conductivity.
そこで、本発明の一側面は、従来より簡便に製造可能でありながら、従来と同等の熱伝導率を有する窒化ホウ素粒子を提供することを目的とする。Therefore, one aspect of the present invention aims to provide boron nitride particles that can be produced more easily than conventional particles while having the same thermal conductivity as conventional particles.
従来は、高い熱伝導率を得るために、粒子全体において窒化ホウ素をできる限り結晶化させる必要があると考えられていたが、本発明者らが鋭意検討したところ、粒子の周囲部の結晶化が充分に進んでいれば、粒子の中心部の窒化ホウ素の結晶化が不充分であっても、驚くべきことに、窒化ホウ素粒子の熱伝導率に悪影響がないことを見出した。つまり、窒化ホウ素を結晶化する工程を簡素化しても、従来と同等の熱伝導率が得られることが見出された。 Conventionally, it was thought that in order to obtain high thermal conductivity, it was necessary to crystallize boron nitride as much as possible throughout the entire particle, but after extensive research, the inventors of the present invention surprisingly found that, as long as the peripheral parts of the particle are sufficiently crystallized, there is no adverse effect on the thermal conductivity of the boron nitride particle even if the boron nitride in the center of the particle is insufficiently crystallized. In other words, it was discovered that a thermal conductivity equivalent to that of conventional methods can be obtained even if the process of crystallizing boron nitride is simplified.
本発明の一側面は、低結晶性の窒化ホウ素を含む中心部と、中心部の周りを囲うように配置され、高結晶性の窒化ホウ素を含む周囲部と、を備える窒化ホウ素粒子である。One aspect of the present invention is a boron nitride particle having a central portion containing low-crystalline boron nitride and a peripheral portion surrounding the central portion and containing highly crystalline boron nitride.
上記窒化ホウ素粒子の平均円形度は、0.8以上であってよい。The average circularity of the boron nitride particles may be 0.8 or more.
本発明の他の一側面は、樹脂と、上記の窒化ホウ素粒子と、を含有する樹脂組成物である。Another aspect of the present invention is a resin composition containing a resin and the above-mentioned boron nitride particles.
本発明の他の一側面は、上記の窒化ホウ素粒子と、窒化ホウ素粒子を収容する容器と、を備える収容体である。Another aspect of the present invention is a container comprising the above-mentioned boron nitride particles and a container for containing the boron nitride particles.
本発明の一側面によれば、従来より簡便に製造可能でありながら、従来と同等の熱伝導率を有する窒化ホウ素粒子を提供することができる。 According to one aspect of the present invention, it is possible to provide boron nitride particles that can be produced more easily than conventional particles while having the same thermal conductivity as conventional particles.
以下、本発明の実施形態について詳細に説明する。 The following describes in detail an embodiment of the present invention.
本発明の一実施形態は、低結晶性の窒化ホウ素を含む中心部と、中心部の周りを囲うように配置され、高結晶性の窒化ホウ素を含む周囲部と、を備える窒化ホウ素粒子である。One embodiment of the present invention is a boron nitride particle comprising a central portion comprising low-crystalline boron nitride and a peripheral portion surrounding the central portion comprising highly crystalline boron nitride.
本明細書において、「高結晶性」とは、以下の方法により取得される窒化ホウ素粒子のFFT像において、逆格子空間上の1~4nm-1の範囲で、h-BN(0002)面由来の周期性による輝点(ピーク)が存在する状態を意味し、「低結晶性」とは、当該輝点(ピーク)が存在しない状態を意味する。輝点(ピーク)が存在するとは、上記逆格子空間上の1~4nm-1の範囲において、B-スプライン法にてバックグラウンドを差し引いた後の強度Sがノイズ強度Nに対して15倍以上となる点が存在することを意味する。ここで、ノイズ強度Nは、B-スプライン法にてバックグラウンド処理を行った後、上記逆格子空間上の4nm-1を超え6nm-1以下の範囲における標準偏差の値と定義される。また、輝点(ピーク)には、波数方向又は円周方向に揺らぎをもつものも含むこととする。高結晶性の窒化ホウ素を含む周囲部では、上記逆格子空間上の1~4nm-1の範囲において、上記強度Sが上記ノイズ強度Nに対して、好ましくは20倍以上、より好ましくは23倍以上、更に好ましくは25倍以上となる点が存在してよい。 In this specification, "high crystallinity" means a state in which a bright spot (peak) due to periodicity derived from the h-BN (0002) plane is present in the range of 1 to 4 nm -1 in the reciprocal lattice space in an FFT image of boron nitride particles obtained by the following method, and "low crystallinity" means a state in which the bright spot (peak) is not present. The presence of a bright spot (peak) means that there is a point in the range of 1 to 4 nm -1 in the reciprocal lattice space where the intensity S after subtracting the background by the B-spline method is 15 times or more the noise intensity N. Here, the noise intensity N is defined as the standard deviation value in the range of more than 4 nm -1 to 6 nm -1 in the reciprocal lattice space after background processing by the B-spline method. In addition, the bright spot (peak) also includes those having fluctuations in the wave number direction or the circumferential direction. In the surrounding area containing highly crystalline boron nitride, there may be a point within the range of 1 to 4 nm −1 in the reciprocal lattice space where the intensity S is preferably 20 times or more, more preferably 23 times or more, and even more preferably 25 times or more, the noise intensity N.
(FFT像の取得方法)
まず、透過型電子顕微鏡(例えば、日本電子株式会社製「JEM-2100」)を用いて、以下の条件にて、窒化ホウ素粒子の400,000倍のTEM像を取得する。
対物レンズ絞り:φ120μm
集束レンズ絞り:φ150μm
記録媒体:AMETEK社製「OrisusSC1000A1」
Bining:2
露光時間:0.5秒間
また、TEM観察及び後述するFFT解析のために、画像解析ソフト(例えば、AMETEC社製「GMS3」)を用いる。
続いて、得られたTEM像における8.556nm角の領域に対してFFT解析を行い、256×256ピクセルのFFT像を取得する。
(Method of acquiring FFT image)
First, a TEM image of boron nitride particles at 400,000 times magnification is obtained using a transmission electron microscope (for example, "JEM-2100" manufactured by JEOL Ltd.) under the following conditions.
Objective lens aperture: φ120 μm
Focusing lens aperture: φ150 μm
Recording medium: AMETEK's "Orisus SC1000A1"
Binning: 2
Exposure time: 0.5 seconds. For TEM observation and FFT analysis described later, image analysis software (for example, "GMS3" manufactured by AMETEC Corporation) is used.
Next, an FFT analysis is performed on an 8.556 nm square region in the obtained TEM image to obtain an FFT image of 256×256 pixels.
窒化ホウ素粒子中の中心部の径は、窒化ホウ素粒子の粒子径をdとしたときに、例えば、0.1d以上、0.15d以上、又は0.2d以上であってよく、0.6d以下、0.5以下、0.4d以下、0.35d以下、又は0.3d以下であってよい。窒化ホウ素粒子中の中心部の径は、例えば、1nm以上、5nm以上、10nm以上、20nm以上、又は30nm以上であってよく、400nm以下、300nm以下、200nm以下、又は100nm以下であってよい。窒化ホウ素粒子中の中心部の径は、上述したとおり定義される「高結晶性」の部分、すなわち、上記逆格子空間上の1~4nm-1の範囲で、h-BN(0002)面由来の周期性による輝点(ピーク)が存在する部分の径を意味する。 The diameter of the center of the boron nitride particle may be, for example, 0.1d or more, 0.15d or more, or 0.2d or more, and 0.6d or less, 0.5 or less, 0.4d or less, 0.35d or less, or 0.3d or less, where d is the particle diameter of the boron nitride particle. The diameter of the center of the boron nitride particle may be, for example, 1 nm or more, 5 nm or more, 10 nm or more, 20 nm or more, or 30 nm or more, and 400 nm or less, 300 nm or less, 200 nm or less, or 100 nm or less. The diameter of the center of the boron nitride particle means the diameter of the "highly crystalline" portion defined as above, that is, the portion in the range of 1 to 4 nm -1 on the reciprocal lattice space where there is a bright spot (peak) due to the periodicity derived from the h-BN (0002) plane.
窒化ホウ素粒子中の周囲部の厚さは、窒化ホウ素粒子の粒子径をdとしたときに、例えば、0.3d以上、0.33d以上、又は0.35d以上であってよく、0.45d以下、0.43d以下、又は0.4d以下であってよい。窒化ホウ素粒子中の中心部の径は、例えば、5nm以上、10nm以上、20nm以上、40nm以上、又は60nm以上であってよく、450nm以下、300nm以下、200nm以下、又は100nm以下であってよい。窒化ホウ素粒子中の周囲部の厚さは、上述したとおり定義される「低結晶性」の部分、すなわち、上記逆格子空間上の1~4nm-1の範囲で、h-BN(0002)面由来の周期性による輝点(ピーク)が存在しない部分の厚さを意味する。 The thickness of the peripheral part in the boron nitride particle may be, for example, 0.3d or more, 0.33d or more, or 0.35d or more, and 0.45d or less, 0.43d or less, or 0.4d or less, when the particle diameter of the boron nitride particle is d. The diameter of the center part in the boron nitride particle may be, for example, 5 nm or more, 10 nm or more, 20 nm or more, 40 nm or more, or 60 nm or more, and 450 nm or less, 300 nm or less, 200 nm or less, or 100 nm or less. The thickness of the peripheral part in the boron nitride particle means the thickness of the "low crystallinity" part defined as above, that is, the part in the range of 1 to 4 nm -1 on the reciprocal lattice space where there is no bright spot (peak) due to the periodicity derived from the h-BN (0002) plane.
窒化ホウ素粒子の平均粒子径は、窒化ホウ素粒子と樹脂とを混合した際の粘度増加を抑制できる観点から、好ましくは、0.01μm以上、0.05μm以上、0.1μm以上、又は0.15μm以上であり、窒化ホウ素粒子を含む放熱部材(以下、単に「放熱部材」ともいう)の絶縁破壊特性を向上させる観点から、1μm以下、0.8μm以下、0.6μm以下、又は0.4μm以下であってよい。The average particle diameter of the boron nitride particles is preferably 0.01 μm or more, 0.05 μm or more, 0.1 μm or more, or 0.15 μm or more, from the viewpoint of suppressing an increase in viscosity when the boron nitride particles are mixed with a resin, and may be 1 μm or less, 0.8 μm or less, 0.6 μm or less, or 0.4 μm or less, from the viewpoint of improving the dielectric breakdown characteristics of a heat dissipation member containing the boron nitride particles (hereinafter also simply referred to as a "heat dissipation member").
窒化ホウ素粒子の平均粒子径は、以下の手順により測定される。
窒化ホウ素粒子を分散させる分散媒として蒸留水を用い、分散剤としてヘキサメタリン酸ナトリウムを用い、0.125質量%ヘキサメタリン酸ナトリウム水溶液を調製する。この水溶液中に0.1g/80mLの比率で窒化ホウ素粒子を加え、超音波ホモジナイザー(例えば、日本精機製作所製「US-300E」)により、AMPLITUDE(振幅)80%にて超音波分散を1分30秒間で1回行うことで、窒化ホウ素粒子の分散液を調製する。この分散液を60rpmで撹拌しながら分取し、レーザー回折散乱法粒度分布測定装置(例えば、ベックマンコールター社製「LS-13 320」)により体積基準の粒度分布を測定する。このとき、水の屈折率として1.33を用い、窒化ホウ素粒子の屈折率として1.7を用いる。測定結果から、累積粒度分布の累積値50%の粒径(メジアン径、d50)として平均粒子径を算出する。なお、このように測定される平均粒子径は、窒化ホウ素粒子の一次粒子に加えて、当該一次粒子同士が凝集した粒子(二次粒子)も含む窒化ホウ素粒子の平均粒子径であると考えられる。
The average particle size of the boron nitride particles is measured by the following procedure.
Using distilled water as a dispersion medium for dispersing boron nitride particles and sodium hexametaphosphate as a dispersant, a 0.125% by mass aqueous solution of sodium hexametaphosphate is prepared. Boron nitride particles are added to this aqueous solution at a ratio of 0.1 g/80 mL, and ultrasonic dispersion is performed once for 1 minute and 30 seconds at an AMPLITUDE (amplitude) of 80% using an ultrasonic homogenizer (e.g., "US-300E" manufactured by Nippon Seiki Seisakusho) to prepare a dispersion of boron nitride particles. The dispersion is taken while stirring at 60 rpm, and the volume-based particle size distribution is measured using a laser diffraction scattering particle size distribution measuring device (e.g., "LS-13 320" manufactured by Beckman Coulter, Inc.). At this time, 1.33 is used as the refractive index of water, and 1.7 is used as the refractive index of boron nitride particles. From the measurement results, the average particle size is calculated as the particle size (median diameter, d50) at the cumulative value of 50% of the cumulative particle size distribution. The average particle size measured in this manner is considered to be the average particle size of boron nitride particles including not only primary particles of boron nitride particles but also particles (secondary particles) formed by agglomeration of the primary particles.
窒化ホウ素粒子は、放熱部材を作製する際の充填性を向上させ、放熱部材の特性(熱伝導性、誘電率など)を等方的にする観点から、好ましくは、球状、又は球状に近い形状を有している。同様の観点から、窒化ホウ素粒子の平均円形度は、好ましくは、0.8以上、0.82以上、0.84以上、0.86以上、0.88以上、0.90以上、0.91以上、0.92以上、0.93以上、又は0.94以上であってよい。The boron nitride particles preferably have a spherical or nearly spherical shape in order to improve the filling property when preparing the heat dissipation member and to make the properties of the heat dissipation member (thermal conductivity, dielectric constant, etc.) isotropic. From the same viewpoint, the average circularity of the boron nitride particles may preferably be 0.8 or more, 0.82 or more, 0.84 or more, 0.86 or more, 0.88 or more, 0.90 or more, 0.91 or more, 0.92 or more, 0.93 or more, or 0.94 or more.
窒化ホウ素粒子の平均円形度は、以下の手順で測定される。
走査型電子顕微鏡(SEM)を用いて撮影した窒化ホウ素粒子の像(倍率:10,000倍、画像解像度:1280×1024ピクセル)について、画像解析ソフト(例えば、マウンテック社製「MacView」)を用いた画像解析により、窒化ホウ素粒子の投影面積(S)及び周囲長(L)を算出する。投影面積(S)及び周囲長(L)を用いて、以下に式:
円形度=4πS/L2
に従って円形度を求める。任意に選ばれた100個の窒化ホウ素粒子について求めた円形度の平均値を平均円形度と定義する。
The average circularity of the boron nitride particles is measured by the following procedure.
The image of the boron nitride particle taken with a scanning electron microscope (SEM) (magnification: 10,000 times, image resolution: 1280 x 1024 pixels) is analyzed using image analysis software (e.g., "MacView" manufactured by Mountec Co., Ltd.) to calculate the projected area (S) and perimeter (L) of the boron nitride particle. Using the projected area (S) and perimeter (L), the following formula is used:
Circularity = 4πS/ L2
The circularity is calculated according to the following formula: The average value of the circularities calculated for 100 randomly selected boron nitride particles is defined as the average circularity.
以上説明したような窒化ホウ素粒子は、窒化ホウ素の結晶成長を敢えて不完全な状態で止めることによって得られる。窒化ホウ素粒子の製造においては、粒子の周囲部から中心部に向けて徐々に結晶成長が進行するところ、窒化ホウ素の結晶成長を不完全な状態で止めることにより、得られる窒化ホウ素粒子においては、周囲部に含まれる窒化ホウ素が高結晶性である一方で、中心部に含まれる窒化ホウ素が低結晶性となる。The boron nitride particles described above are obtained by deliberately stopping the crystal growth of boron nitride in an incomplete state. In the production of boron nitride particles, crystal growth progresses gradually from the periphery to the center of the particle, but by stopping the crystal growth of boron nitride in an incomplete state, the resulting boron nitride particles have boron nitride contained in the periphery that is highly crystalline, while the boron nitride contained in the center is less crystalline.
以下、上述した窒化ホウ素粒子の製造方法について具体的に説明する。上述した窒化ホウ素粒子は、例えば、ホウ酸エステルとアンモニアとを750~1400℃で反応させて窒化ホウ素粒子の前駆体を得る第1の工程と、前駆体を1000~1600℃で加熱して窒化ホウ素粒子を得る第2の工程と、を備える製造方法により得られる。The manufacturing method of the above-mentioned boron nitride particles will be specifically described below. The above-mentioned boron nitride particles can be obtained by a manufacturing method including, for example, a first step of reacting a boric acid ester with ammonia at 750 to 1400°C to obtain a precursor of the boron nitride particles, and a second step of heating the precursor at 1000 to 1600°C to obtain the boron nitride particles.
第1の工程では、例えば、抵抗加熱炉内に設置された反応管(例えば石英管)を加熱して、750~1500℃まで昇温する。一方、不活性ガスを液状のホウ酸エステルに通した上で反応管に導入することにより、ホウ酸エステルが反応管に導入される。他方、アンモニアガスを反応管に直接導入する。不活性ガスとしては、例えば、ヘリウム、ネオン、アルゴンなどの希ガス、及び窒素ガスが挙げられる。ホウ酸エステルは、例えばアルキルホウ酸エステルであってよく、好ましくはホウ酸トリメチルである。In the first step, for example, a reaction tube (e.g., a quartz tube) installed in a resistance heating furnace is heated to 750 to 1500°C. On the other hand, an inert gas is passed through a liquid borate ester and then introduced into the reaction tube, thereby introducing the borate ester into the reaction tube. On the other hand, ammonia gas is directly introduced into the reaction tube. Examples of inert gases include rare gases such as helium, neon, and argon, and nitrogen gas. The borate ester may be, for example, an alkyl borate ester, preferably trimethyl borate.
ホウ酸エステルの導入量に対するアンモニアの導入量のモル比(アンモニア/ホウ酸エステル)は、例えば、1以上であってよく、10以下であってよい。The molar ratio of the amount of ammonia introduced to the amount of borate ester introduced (ammonia/borate ester) may be, for example, 1 or more and 10 or less.
導入されたホウ酸エステル及びアンモニアは、加熱された反応管内で反応し、窒化ホウ素粒子の前駆体を生成する。この前駆体は、非結晶性の窒化ホウ素を含んでおり、例えば白色の粉末であってよい。生成した前駆体の一部は反応管内に付着するが、前駆体の多くは、不活性ガスや未反応のアンモニアガスにより、反応管の先に取り付けられた回収容器に送られて回収される。The introduced boric acid ester and ammonia react in the heated reaction tube to produce a precursor of boron nitride particles. This precursor contains amorphous boron nitride and may be, for example, a white powder. Some of the generated precursor adheres to the inside of the reaction tube, but most of the precursor is transported by the inert gas and unreacted ammonia gas to a collection vessel attached to the end of the reaction tube and collected.
第1の工程においてホウ酸エステルとアンモニアとを反応させる時間(反応時間)は、好ましくは、30秒間以内である。反応時間は、ホウ酸エステル及びアンモニアが、反応管のうち750~1400℃に加熱された部分(加熱部分)にとどまる時間であり、ホウ酸エステル及びアンモニアを導入する際のガス流量と、抵抗加熱炉内に設置された反応管の長さ(反応管の加熱部分の長さ)とによって、調整することができる。The time (reaction time) for reacting the borate ester with ammonia in the first step is preferably within 30 seconds. The reaction time is the time during which the borate ester and ammonia remain in the part of the reaction tube that is heated to 750 to 1400°C (heated part), and can be adjusted by the gas flow rate when the borate ester and ammonia are introduced and the length of the reaction tube installed in the resistance heating furnace (the length of the heated part of the reaction tube).
第2の工程では、第1の工程で得られた前駆体を、抵抗加熱炉内に設置された別の反応管(例えばアルミナ管)に入れ、窒素ガス及びアンモニアガスをそれぞれ別々に反応管内に導入する。このとき導入するガスは、アンモニアガスのみであってもよい。窒素ガス及びアンモニアガスの流量は、それぞれ、反応時間が所望の値となるように適宜調整されればよい。例えば、アンモニアガスの流量が多いほど、反応時間が短くなる。In the second step, the precursor obtained in the first step is placed in another reaction tube (e.g., an alumina tube) installed in a resistance heating furnace, and nitrogen gas and ammonia gas are separately introduced into the reaction tube. The gas introduced at this time may be only ammonia gas. The flow rates of the nitrogen gas and ammonia gas may be appropriately adjusted so that the reaction time is the desired value. For example, the higher the flow rate of ammonia gas, the shorter the reaction time.
続いて、反応管を1000~1600℃に加熱する。加熱する時間は、例えば、1時間以上であってよく、10時間以下であってよい。これにより、前駆体中の窒化ホウ素の結晶化を進行させ、窒化ホウ素粒子を得る。ただし、前駆体中のすべての窒化ホウ素は結晶化されずに、低結晶性の窒化ホウ素が窒化ホウ素粒子の内部に残留する。 The reaction tube is then heated to 1000-1600°C. The heating time may be, for example, 1 hour or more and 10 hours or less. This allows the crystallization of the boron nitride in the precursor to proceed, resulting in boron nitride particles. However, not all of the boron nitride in the precursor is crystallized, and low-crystalline boron nitride remains inside the boron nitride particles.
この製造方法は、第2の工程の後に、第2の工程で得られた窒化ホウ素粒子を1800℃以上で加熱する工程(従来は窒化ホウ素の結晶成長を促進するために実施されていた工程)を備えていない。すなわち、この製造方法では、第2の工程における加熱後に、目的とする窒化ホウ素粒子が、不完全に結晶成長した状態で得られる。この製造方法は、第2の工程の後に、第2の工程で得られた窒化ホウ素粒子を、1700℃以上、1600℃以上、1500℃以上、1400℃以上、1300℃以上、1200℃以上、1100℃以上、1000℃以上、900℃以上、800℃以上、700℃以上、600℃以上、500℃以上、400℃以上、300℃以上、200℃以上、100℃以上、50℃以上、40℃以上、又は30℃以上で加熱する工程を備えていなくてもよい。This manufacturing method does not include a step of heating the boron nitride particles obtained in the second step at 1800°C or higher after the second step (a step that has been conventionally performed to promote crystal growth of boron nitride). That is, in this manufacturing method, the desired boron nitride particles are obtained in an incompletely crystal-grown state after the heating in the second step. This manufacturing method does not necessarily include a step of heating the boron nitride particles obtained in the second step at 1700°C or higher, 1600°C or higher, 1500°C or higher, 1400°C or higher, 1300°C or higher, 1200°C or higher, 1100°C or higher, 1000°C or higher, 900°C or higher, 800°C or higher, 700°C or higher, 600°C or higher, 500°C or higher, 400°C or higher, 300°C or higher, 200°C or higher, 100°C or higher, 50°C or higher, 40°C or higher, or 30°C or higher after the second step.
上述した窒化ホウ素粒子は、例えば、放熱部材に好適に用いられる。窒化ホウ素粒子は、放熱部材に用いられる場合、例えば樹脂と共に混合された樹脂組成物の形態で用いられる。すなわち、本発明の他の一実施形態は、樹脂と、上記の窒化ホウ素粒子とを含有する樹脂組成物である。この樹脂組成物は、放熱部材として好適に用いられる。The above-mentioned boron nitride particles are suitable for use in, for example, heat dissipation components. When the boron nitride particles are used in a heat dissipation component, they are used in the form of a resin composition mixed with, for example, a resin. That is, another embodiment of the present invention is a resin composition containing a resin and the above-mentioned boron nitride particles. This resin composition is suitable for use as a heat dissipation component.
上記の窒化ホウ素粒子の含有量は、樹脂組成物の全体積を基準として、樹脂組成物の熱伝導率を向上させ、優れた放熱性能が得られやすい観点から、好ましくは30体積%以上、より好ましくは40体積%以上であり、更に好ましくは50体積%以上であり、成形時に空隙の発生、並びに、絶縁性及び機械強度の低下を抑制できる観点から、好ましくは85体積%以下、より好ましくは80体積%以下、更に好ましくは70体積%以下である。The content of the above boron nitride particles is preferably 30% by volume or more, more preferably 40% by volume or more, and even more preferably 50% by volume or more, based on the total volume of the resin composition, from the viewpoint of improving the thermal conductivity of the resin composition and making it easier to obtain excellent heat dissipation performance, and is preferably 85% by volume or less, more preferably 80% by volume or less, and even more preferably 70% by volume or less, from the viewpoint of being able to suppress the occurrence of voids during molding and the deterioration of insulation and mechanical strength.
樹脂としては、例えば、エポキシ樹脂、シリコーン樹脂、シリコーンゴム、アクリル樹脂、フェノール樹脂、メラミン樹脂、ユリア樹脂、不飽和ポリエステル、フッ素樹脂、ポリイミド、ポリアミドイミド、ポリエーテルイミド、ポリブチレンテレフタレート、ポリエチレンテレフタレート、ポリフェニレンエーテル、ポリフェニレンスルフィド、全芳香族ポリエステル、ポリスルホン、液晶ポリマー、ポリエーテルスルホン、ポリカーボネート、マレイミド変性樹脂、ABS(アクリロニトリル-ブタジエン-スチレン)樹脂、AAS(アクリロニトリル-アクリルゴム・スチレン)樹脂、及びAES(アクリロニトリル・エチレン・プロピレン・ジエンゴム-スチレン)樹脂が挙げられる。 Examples of resins include epoxy resin, silicone resin, silicone rubber, acrylic resin, phenolic resin, melamine resin, urea resin, unsaturated polyester, fluororesin, polyimide, polyamideimide, polyetherimide, polybutylene terephthalate, polyethylene terephthalate, polyphenylene ether, polyphenylene sulfide, wholly aromatic polyester, polysulfone, liquid crystal polymer, polyethersulfone, polycarbonate, maleimide-modified resin, ABS (acrylonitrile-butadiene-styrene) resin, AAS (acrylonitrile-acrylic rubber-styrene) resin, and AES (acrylonitrile-ethylene-propylene-diene rubber-styrene) resin.
樹脂の含有量は、樹脂組成物の全体積を基準として、15体積%以上、20体積%以上、又は30体積%以上であってよく、70体積%以下、60体積%以下、又は50体積%以下であってよい。The resin content may be 15 vol.% or more, 20 vol.% or more, or 30 vol.% or more, and may be 70 vol.% or less, 60 vol.% or less, or 50 vol.% or less, based on the total volume of the resin composition.
樹脂組成物は、樹脂を硬化させる硬化剤を更に含有していてよい。硬化剤は、樹脂の種類によって適宜選択される。例えば、樹脂がエポキシ樹脂である場合、硬化剤としては、フェノールノボラック化合物、酸無水物、アミノ化合物、及びイミダゾール化合物が挙げられる。硬化剤の含有量は、樹脂100質量部に対して、例えば、0.5質量部以上又は1.0質量部以上であってよく、15質量部以下又は10質量部以下であってよい。The resin composition may further contain a curing agent that cures the resin. The curing agent is appropriately selected depending on the type of resin. For example, when the resin is an epoxy resin, examples of the curing agent include phenol novolac compounds, acid anhydrides, amino compounds, and imidazole compounds. The content of the curing agent may be, for example, 0.5 parts by mass or more or 1.0 parts by mass or more, and 15 parts by mass or less or 10 parts by mass or less, relative to 100 parts by mass of the resin.
窒化ホウ素粒子は、例えば、容器に収容された形態で流通し得る。すなわち、本発明の他の一実施形態は、上記の窒化ホウ素粒子と、窒化ホウ素粒子を収容する容器と、を備える収容体である。容器は、窒化ホウ素粒子を収容できる形状を有していればよく、例えば、袋、箱、瓶、缶等であってよい。The boron nitride particles may be distributed, for example, in a form contained in a container. That is, another embodiment of the present invention is a container comprising the above-mentioned boron nitride particles and a container for containing the boron nitride particles. The container may have any shape capable of containing the boron nitride particles, and may be, for example, a bag, box, bottle, can, etc.
以下、実施例により本発明をより具体的に説明する。ただし、本発明は下記の実施例に限定されるものではない。The present invention will be described in more detail below with reference to examples. However, the present invention is not limited to the following examples.
[実施例1]
(窒化ホウ素粒子の作製)
まず、第1の工程では、抵抗加熱炉内に設置された反応管(石英管)を加熱して、1150℃まで昇温した。一方、窒素ガスをホウ酸トリメチルに通した上で反応管に導入することにより、ホウ酸トリメチルを反応管に導入した。他方、アンモニアガスを反応管に直接導入した。ホウ酸トリメチルの導入量に対するアンモニアの導入量のモル比(アンモニア/ホウ酸トリメチル)は、4.5とした。これにより、ホウ酸トリメチルとアンモニアとを反応させて、窒化ホウ素粒子の前駆体(白色粉末)を得た。なお、反応時間は10秒間であった。
[Example 1]
(Preparation of boron nitride particles)
First, in the first step, a reaction tube (quartz tube) installed in a resistance heating furnace was heated to 1150°C. Meanwhile, nitrogen gas was passed through trimethyl borate and then introduced into the reaction tube, thereby introducing trimethyl borate into the reaction tube. Meanwhile, ammonia gas was directly introduced into the reaction tube. The molar ratio of the amount of ammonia introduced to the amount of trimethyl borate introduced (ammonia/trimethyl borate) was set to 4.5. Thus, trimethyl borate and ammonia were reacted to obtain a precursor (white powder) of boron nitride particles. The reaction time was 10 seconds.
続いて、第2の工程では、第1の工程で得られた前駆体を、抵抗加熱炉内に設置された別の反応管(アルミナ管)に入れ、窒素ガス10L/分、及びアンモニアガス15L/分の流量でそれぞれ別々に反応管内に導入した。そして、反応管を1500℃で2.5時間加熱した。これにより、窒化ホウ素粒子を得た。In the second step, the precursor obtained in the first step was placed in another reaction tube (alumina tube) installed in a resistance heating furnace, and nitrogen gas and ammonia gas were separately introduced into the reaction tube at flow rates of 10 L/min and 15 L/min. The reaction tube was then heated at 1500°C for 2.5 hours. This resulted in the production of boron nitride particles.
(窒化ホウ素粒子の観察及び結晶性の評価)
透過型電子顕微鏡(TEM;日本電子株式会社製「JEM-2100」)を用いて、以下の条件にて得られた窒化ホウ素粒子を観察した。
対物レンズ絞り:φ120μm
集束レンズ絞り:φ150μm
記録媒体:AMETEK社製「OrisusSC1000A1」
Bining:2
露光時間:0.5秒間
また、TEM観察及び後述するFFT解析のための画像解析ソフトとして、AMETEK社製「GMS3」を用いた。
(Observation of boron nitride particles and evaluation of crystallinity)
The boron nitride particles obtained under the following conditions were observed using a transmission electron microscope (TEM; "JEM-2100" manufactured by JEOL Ltd.).
Objective lens aperture: φ120 μm
Focusing lens aperture: φ150 μm
Recording medium: AMETEK's "Orisus SC1000A1"
Binning: 2
Exposure time: 0.5 seconds. Furthermore, "GMS3" manufactured by AMETEK was used as image analysis software for TEM observation and FFT analysis described later.
得られた窒化ホウ素粒子全体のTEM明視野像(倍率:100,000倍)を図1に示す。また、図1に示される窒化ホウ素粒子の周囲部Sについて、400,000倍で観察したTEM暗視野像を図2に示す。A TEM bright-field image (magnification: 100,000 times) of the entire boron nitride particle obtained is shown in Figure 1. Figure 2 shows a TEM dark-field image of the peripheral portion S of the boron nitride particle shown in Figure 1, observed at 400,000 times.
続いて、図2における8.556nm角の領域S1に対してFFT解析を行い、256×256ピクセルのFFT像を取得した。得られたFFT図形について、図3(a),(b)に示すように、逆格子空間上の1~4nm-1の範囲で、h-BN(0002)面由来の周期性による輝点(ピーク)が確認された。つまり、窒化ホウ素粒子の周囲部Sにおける領域S1は、高結晶性の窒化ホウ素で構成されていることが確認された。 Next, FFT analysis was performed on the 8.556 nm square region S1 in Figure 2, and a 256 x 256 pixel FFT image was obtained. As shown in Figures 3(a) and 3(b), the obtained FFT pattern showed bright spots (peaks) due to periodicity derived from the h-BN (0002) plane in the range of 1 to 4 nm -1 in the reciprocal lattice space. In other words, it was confirmed that the region S1 in the peripheral portion S of the boron nitride particle is composed of highly crystalline boron nitride.
また、図4に示すように、窒化ホウ素粒子の周囲部Sにおける他の領域S2~S5についても、領域S1と同様にしてFFT解析を行った。その結果、図4及び図5に示すように、逆格子空間上の1~4nm-1の範囲で、h-BN(0002)面由来の周期性による輝点(ピーク)が確認された。つまり、窒化ホウ素粒子の周囲部Sにおける領域S2~S5も、高結晶性の窒化ホウ素で構成されていることが確認された。 Furthermore, as shown in Figure 4, FFT analysis was also performed on other regions S2 to S5 in the peripheral region S of the boron nitride particle in the same manner as for region S1. As a result, as shown in Figures 4 and 5, bright spots (peaks) due to periodicity derived from the h-BN (0002) plane were confirmed in the range of 1 to 4 nm -1 in the reciprocal lattice space. In other words, it was confirmed that regions S2 to S5 in the peripheral region S of the boron nitride particle are also composed of highly crystalline boron nitride.
また、図1に示される窒化ホウ素粒子の中心部Cについて、400,000倍で観察したTEM暗視野像を図6に示す。図6に示すように、窒化ホウ素粒子の中心部Cにおける領域C1~C4についても、領域S1と同様にしてFFT解析を行った。その結果、図6及び図7に示すように、逆格子空間上の1~4nm-1の範囲で、h-BN(0002)面由来の周期性による輝点(ピーク)が確認されなかった。つまり、窒化ホウ素粒子の中心部Cにおける領域C1~C4は、低結晶性の窒化ホウ素で構成されていることが確認された。 FIG. 6 shows a TEM dark-field image of the central portion C of the boron nitride particle shown in FIG. 1, observed at 400,000 times. As shown in FIG. 6, FFT analysis was also performed on regions C1 to C4 in the central portion C of the boron nitride particle in the same manner as for region S1. As a result, as shown in FIGS. 6 and 7, no bright spots (peaks) due to periodicity derived from the h-BN (0002) plane were confirmed in the range of 1 to 4 nm −1 in the reciprocal lattice space. In other words, it was confirmed that regions C1 to C4 in the central portion C of the boron nitride particle are composed of low-crystalline boron nitride.
なお、図3(b)、図5及び図7に示すグラフは、B-スプライン法にてバックグラウンドを差し引いた後の強度を示すグラフである。また、図3(b)図5及び図7に示すグラフより、領域S1~S5及びC1~C4の各領域について、逆格子空間上の1~4nm-1の範囲における最大強度(相対強度)Smaxと、ノイズ強度(逆格子空間上の4nm-1を超え6nm-1以下の範囲における標準偏差)Nと、これらの比(Smax/N)とを求めた。結果を表1に示す。 The graphs shown in Figures 3(b), 5, and 7 show the intensities after subtracting the background by the B-spline method. From the graphs shown in Figures 3(b), 5, and 7, the maximum intensity (relative intensity) Smax in the range of 1 to 4 nm -1 in the reciprocal lattice space, the noise intensity (standard deviation in the range of more than 4 nm -1 to 6 nm -1 in the reciprocal lattice space), and the ratio thereof (Smax/N) were determined for each of the regions S1 to S5 and C1 to C4. The results are shown in Table 1.
以上のとおり、得られた窒化ホウ素粒子の周囲部には高結晶性の窒化ホウ素が含まれており(上述した輝点(ピーク)が確認できる領域が支配的であり)、中心部には低結晶性の窒化ホウ素が含まれている(上述した輝点(ピーク)が確認できない領域が支配的である)ことが分かった。また、中心部の径は約40nmであり、周囲部の厚さは約50nmであった。As described above, it was found that the peripheral portion of the obtained boron nitride particles contains highly crystalline boron nitride (dominated by the area where the above-mentioned bright spots (peaks) can be confirmed), and the central portion contains less crystalline boron nitride (dominated by the area where the above-mentioned bright spots (peaks) cannot be confirmed). In addition, the diameter of the central portion was approximately 40 nm, and the thickness of the peripheral portion was approximately 50 nm.
(平均円形度の測定)
まず、走査型電子顕微鏡(SEM)を用いて、得られた窒化ホウ素粒子のSEM像(倍率:10,000倍、画像解像度:1280×1024ピクセル)を撮影した。得られたSEM像について、画像解析ソフト(例えば、マウンテック社製「MacView」)を用いた画像解析により、窒化ホウ素粒子の投影面積(S)及び周囲長(L)を算出した。次に、投影面積(S)及び周囲長(L)を用いて、以下に式:
円形度=4πS/L2
に従って円形度を求めた。任意に選ばれた100個の窒化ホウ素粒子について求めた円形度の平均値を平均円形度として算出した。得られた窒化ホウ素粒子の平均円形度は、0.94であった。
(Measurement of average circularity)
First, a scanning electron microscope (SEM) was used to take an SEM image (magnification: 10,000 times, image resolution: 1280 x 1024 pixels) of the obtained boron nitride particles. The obtained SEM image was analyzed using image analysis software (e.g., "MacView" manufactured by Mountec Co., Ltd.) to calculate the projected area (S) and perimeter (L) of the boron nitride particles. Next, the projected area (S) and perimeter (L) were calculated using the following formula:
Circularity = 4πS/ L2
The circularity was calculated according to the formula: The average value of the circularities calculated for 100 randomly selected boron nitride particles was calculated as the average circularity. The average circularity of the obtained boron nitride particles was 0.94.
(平均粒子径の測定)
窒化ホウ素粒子を分散させる分散媒として蒸留水を用い、分散剤としてヘキサメタリン酸ナトリウムを用い、0.125質量%ヘキサメタリン酸ナトリウム水溶液を調製した。この水溶液中に0.1g/80mLの比率で得られた窒化ホウ素粒子を加え、超音波ホモジナイザー(日本精機製作所製「US-300E」)により、AMPLITUDE(振幅)80%にて超音波分散を1分30秒間で1回行うことで、窒化ホウ素粒子の分散液を調製した。この分散液を60rpmで撹拌しながら分取し、レーザー回折散乱法粒度分布測定装置(ベックマンコールター社製「LS-13 320」)により体積基準の粒度分布を測定した。このとき、水の屈折率として1.33を用い、窒化ホウ素粒子の屈折率として1.7を用いた。測定結果から、累積粒度分布の累積値50%の粒径(メジアン径、d50)として平均粒子径を算出した。得られた窒化ホウ素粒子の平均粒子径は、510nmであった。
(Measurement of average particle size)
Using distilled water as a dispersion medium for dispersing boron nitride particles and sodium hexametaphosphate as a dispersant, a 0.125% by mass aqueous solution of sodium hexametaphosphate was prepared. The boron nitride particles obtained at a ratio of 0.1 g/80 mL were added to this aqueous solution, and ultrasonic dispersion was performed once for 1 minute and 30 seconds at an AMPLITUDE (amplitude) of 80% using an ultrasonic homogenizer ("US-300E" manufactured by Nippon Seiki Seisakusho) to prepare a dispersion of boron nitride particles. The dispersion was taken while stirring at 60 rpm, and the volume-based particle size distribution was measured using a laser diffraction scattering particle size distribution measuring device ("LS-13 320" manufactured by Beckman Coulter, Inc.). At this time, 1.33 was used as the refractive index of water, and 1.7 was used as the refractive index of boron nitride particles. From the measurement results, the average particle size was calculated as the particle size (median size, d50) at 50% cumulative value of the cumulative particle size distribution. The average particle size of the obtained boron nitride particles was 510 nm.
[比較例1]
実施例1の第2の工程の後に、窒化ホウ素粒子を窒化ホウ素製ルツボに入れ、誘導加熱炉において、窒素雰囲気下にて2000℃で5時間加熱した以外は、実施例1と同様にして、比較用窒化ホウ素粒子を得た。つまり、比較例1では、従来の製造方法により比較用窒化ホウ素粒子を得た。
[Comparative Example 1]
Comparative boron nitride particles were obtained in the same manner as in Example 1, except that after the second step of Example 1, the boron nitride particles were placed in a boron nitride crucible and heated in an induction heating furnace under a nitrogen atmosphere at 2000° C. for 5 hours. That is, in Comparative Example 1, comparative boron nitride particles were obtained by a conventional manufacturing method.
<熱伝導率の測定>
実施例1で得られた窒化ホウ素粒子、及び比較例1で得られた比較用窒化ホウ素粒子について、以下の手順で熱伝導率を測定した。
ナフタレン型エポキシ樹脂(DIC社製、「HP4032」)100質量部と、硬化剤としてイミダゾール類(四国化成社製、「2E4MZ-CN))10質量部との混合物に対し、窒化ホウ素粒子を40体積%となるように混合して樹脂組成物を得た。この樹脂組成物を、PET製シート上に厚みが1.0mmになるように塗布した後、500Paの減圧脱泡を10分間行った。その後、温度150℃、圧力160kg/cm2条件で60分間のプレス加熱加圧を行って、0.5mmのシートを作製した。
得られたシートから10mm×10mmの大きさの測定用試料を切り出し、キセノンフラッシュアナライザ(NETZSCH社製、「LFA447NanoFlash」)を用いたレーザーフラッシュ法により、測定用試料の熱拡散率A(m2/秒)を測定した。また、測定用試料の比重B(kg/m3)をアルキメデス法により測定した。また、測定用試料の比熱容量C(J/(kg・K))を、示差走査熱量計(株式会社リガク製、「ThermoPlusEvoDSC8230」)を用いて測定した。これらの各物性値を用いて、熱伝導率H(W/(m・K))をH=A×B×Cの式から求めた。
<Measurement of thermal conductivity>
The thermal conductivity of the boron nitride particles obtained in Example 1 and the comparative boron nitride particles obtained in Comparative Example 1 was measured by the following procedure.
A resin composition was obtained by mixing 40% by volume of boron nitride particles into a mixture of 100 parts by mass of a naphthalene type epoxy resin (DIC Corporation, "HP4032") and 10 parts by mass of an imidazole (Shikoku Kasei Corporation, "2E4MZ-CN") as a curing agent. This resin composition was applied to a PET sheet to a thickness of 1.0 mm, and then degassed under reduced pressure of 500 Pa for 10 minutes. Thereafter, a 0.5 mm sheet was produced by pressing for 60 minutes under conditions of a temperature of 150°C and a pressure of 160 kg/cm2.
A measurement sample having a size of 10 mm x 10 mm was cut out from the obtained sheet, and the thermal diffusivity A (m 2 /sec) of the measurement sample was measured by a laser flash method using a xenon flash analyzer (NETZSCH, "LFA447NanoFlash"). The specific gravity B (kg/m 3 ) of the measurement sample was measured by the Archimedes method. The specific heat capacity C (J/(kg·K)) of the measurement sample was measured using a differential scanning calorimeter (Rigaku Corporation, "ThermoPlusEvoDSC8230"). Using these physical property values, the thermal conductivity H (W/(m·K)) was calculated from the formula H=A×B×C.
その結果、実施例1で得られた窒化ホウ素粒子は1.13W/(m・K)を示し、比較例1で得られた比較用窒化ホウ素粒子は1.12W/(m・K)を示した。このように、実施例1では、窒素雰囲気下にて2000℃で5時間加熱するという比較例1の工程(従来の製造方法で実施される工程)を省略したにもかかわらず、比較例1と同等の熱伝導率を有する窒化ホウ素粒子を得ることができた。As a result, the boron nitride particles obtained in Example 1 showed a thermal conductivity of 1.13 W/(m·K), and the comparative boron nitride particles obtained in Comparative Example 1 showed a thermal conductivity of 1.12 W/(m·K). Thus, in Example 1, boron nitride particles having a thermal conductivity equivalent to that of Comparative Example 1 were obtained, despite the omission of the step of Comparative Example 1 (a step carried out in conventional manufacturing methods) of heating at 2000°C for 5 hours under a nitrogen atmosphere.
Claims (3)
前記中心部の周りを囲うように配置され、高結晶性の窒化ホウ素を含む周囲部と、を備え、
平均円形度が0.8以上であり、
平均粒子径が0.15μm以上であり、
放熱部材の形成に用いられる、窒化ホウ素粒子。 a core portion including low crystalline boron nitride;
a peripheral portion disposed so as to surround the central portion and including highly crystalline boron nitride ;
The average circularity is 0.8 or more,
The average particle size is 0.15 μm or more,
Boron nitride particles are used to form heat dissipation components .
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| JP2010180066A (en) | 2009-02-03 | 2010-08-19 | National Institute For Materials Science | Boron nitride spherical nanoparticle and method of producing the same |
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