JP7572906B2 - Ozone generation module, ozone generator, ozone treatment device, and method for replacing ozone generation module - Google Patents

Description

The present invention relates to an ozone generator using an excimer lamp.

In ozone generators used for sterilization, deodorization, etc., an ultraviolet irradiation method is known in which ultraviolet light (for example, wavelength 172 nm) is irradiated onto a raw gas containing oxygen, such as the air, to generate ozone, and an excimer lamp can be used as the light source.

The configuration of the excimer lamp and the lamp power supply that supplies power to the excimer lamp varies depending on the size of the device, the environment in which it is used, etc. For example, an ozone generator is known in which an excimer lamp is placed in a lamp chamber and a power supply chamber that houses a lamp power supply is placed adjacent to the excimer lamp, and power is supplied to the excimer lamp through a partition (see Patent Document 1). Also known is a small ozone generator in which electrodes are placed near both ends of the excimer lamp and the electrode parts are covered to expose the center of the lamp (see Patent Document 2).

JP 2004-281423 A JP 2019-182669 A

The time when an excimer lamp and a lamp power supply unit wear out is affected by the usage environment, and the time when they wear out is not necessarily the same. On the other hand, replacing an excimer lamp and a lamp power supply unit separately may affect the ozone generation conditions, including the ozone concentration.

Therefore, in an ozone generator, it is required that the excimer lamp and lamp power supply unit are replaceable so that the ozone generation conditions are not changed or are changed as little as possible.

The ozone generator according to one aspect of the present invention comprises an excimer lamp, a lamp power supply unit that supplies power to the excimer lamp, and a support member that supports the excimer lamp and the lamp power supply unit and is removably attached to the device. The excimer lamp and the lamp power supply unit are supported by the support member so that they face each other with the support member in between, and are configured to be removed from the device together with the support member. As another aspect of the present invention, an ozone processing device can be configured that comprises an ozone generator and an ozone removal device.

The support member may be removably attached to the device in a configuration that allows the worker to attach it without using tools or with the use of tools, and is intended to be removed from the device and reattached.

On the other hand, a configuration in which the excimer lamp and lamp power supply unit can be removed from the device together with the support member is based on the assumption that the manufacturer or maintenance company will remove and replace the lamp alone or the lamp power supply unit, and is supported by the support member so that the lamp and power supply unit are not actually replaced, assuming that the user will do so, such as by replacing batteries or bulbs.

As one aspect of the present invention, an ozone generating module can be configured, which includes an excimer lamp, a lamp power supply unit that supplies power to the excimer lamp, and a support member that supports the excimer lamp and the lamp power supply unit and is removably attached to the ozone generator, with the support member being a plate-shaped member that is interposed between the excimer lamp and the lamp power supply unit to shield them from each other.

As one aspect of the present invention, a method for replacing an ozone generating module can be provided, which involves removing the ozone generating module from an ozone generator, replacing at least one of the excimer lamp and the lamp power supply unit of the removed ozone generating module, and mounting the replaced ozone generating module in the ozone generator.

The support member can be removably attached to various locations on an ozone generator or the like. For example, it can be attached to a flow path tube through which oxygen-containing gas flows. It can also be attached so as to form at least a part of a partition wall that forms a flow path for oxygen-containing gas, or at least a part of a partition wall that divides the internal space of the device. When attached to a flow path tube, for example, the support member can be attached to the flow path tube so that the distance between the excimer lamp and the tube wall of the flow path tube is shorter than the distance at which the excimer lamp alone can be removed.

The relative positions and distances between the support member, excimer lamp, and lamp power supply can be determined taking into consideration the effects on ultraviolet rays, ozone, temperature rise of the support member, and electric field strength distribution. For example, the distance between the excimer lamp and the tube wall of the flow path tube can be configured to be greater than the distance between the excimer lamp and the support member. It is also possible to configure the distance between the excimer lamp and the tube wall of the flow path tube to be greater than the limit distance of ultraviolet rays emitted from the excimer lamp.

The support member can be of various shapes and materials. For example, it can be made of a plate-shaped member. In this case, at least the excimer lamp of the excimer lamp and lamp power supply unit can be supported at a predetermined distance along the plate-shaped member, i.e., above the plate surface. The predetermined distance can be determined taking into consideration the effects of ultraviolet rays, heat, and electric field strength distribution.

For example, the distance between the excimer lamp and the plate-shaped member can be configured to be equal to or greater than the attenuation distance at which the intensity ratio of ultraviolet light emitted from the excimer lamp attenuates to 80%. Alternatively, at least the distance between the excimer lamp and the plate-shaped member and the distance between the lamp power supply unit and the plate-shaped member can be determined so that the surface temperature of the plate-shaped member is 60°C or less while the lamp is lit. On the other hand, when considering a compact module configuration, it is also possible to configure at least a part of the plate-shaped member to be positioned within the spatial region irradiated by the ultraviolet light emitted from the excimer lamp.

The present invention provides an ozone generator that allows the excimer lamp and lamp power supply unit to be replaced so that the ozone generation conditions are not changed or are changed to a minimum.

1 is a configuration diagram of an ozone generator according to a first embodiment. FIG. FIG. 2 is a front view of the ozone generation module. FIG. 2 is a side view of the ozone generation module. 4 is a cross-sectional view of the flow path pipe when the ozone generation module is attached to the ozone generator, as viewed from above. FIG. 4 is a cross-sectional view of the ozone generation module mounted on the ozone generator as viewed from the side of the flow path pipe. FIG. FIG. 11 is a cross-sectional view of a flow passage pipe according to a second embodiment, as viewed from above. FIG. 11 is a cross-sectional view of a flow passage pipe according to a second embodiment, as viewed from a side surface thereof. FIG. 13 is a front view of an ozone generation module according to a third embodiment. FIG. 13 is a side view of an ozone generation module according to a third embodiment. FIG. 11 is a cross-sectional view of a flow passage pipe according to a third embodiment, as viewed from above. FIG. 11 is a cross-sectional view of a flow passage pipe according to a third embodiment, as viewed from a side surface thereof. FIG. 11 is a schematic cross-sectional view taken along the horizontal direction of an ozone generator according to a fourth embodiment. FIG. 11 is a schematic cross-sectional view taken along the vertical direction of an ozone generator according to a fourth embodiment.

Below, an embodiment of the present invention will be described with reference to the drawings.

Figure 1 is a diagram showing the configuration of an ozone generator according to a first embodiment.

The ozone generator 100 is equipped with an intake fan (not shown) and is capable of discharging gas containing ozone to the outside of the device, thereby sterilizing and deodorizing indoor spaces such as hospital facilities and entertainment facilities. The ozone generator 100 is configured as a portable ozone generator that can be carried and set up, and can be set up vertically or horizontally.

The ozone generator 100 is equipped with an ozone generation module 10, which is a modular lamp unit (ultraviolet light irradiation device). The ozone generation module 10 is removably attached to a mounting portion 110 inside the ozone generator 100. As described below, in this example, it is attached to a flow path pipe inside the ozone generator 100.

Figure 2 is a front view of the ozone generation module 10. Figure 3 is a side view of the ozone generation module 10. The configuration of the ozone generation module 10 will be explained using Figures 1 to 3.

The ozone generating module 10 comprises an excimer lamp 20, a power supply unit (hereinafter referred to as the lamp power supply unit) 30 that supplies power to the excimer lamp 20, and a support member 40 that supports the excimer lamp 20 and the lamp power supply unit 30. The support member 40 is configured here as a rectangular plate material (plate-shaped member) whose area is determined according to the illuminance distribution (light distribution) of the ultraviolet rays emitted from the excimer lamp 20. It is also configured as a conductive member that is resistant (does not deteriorate) to the heat radiated from the excimer lamp 20 and the lamp power supply unit 30, the ultraviolet rays radiated from the excimer lamp 20, and the ozone generated by the ultraviolet rays.

As shown in Figures 1 and 3, the support member 40 is the size of a plate-like member that prevents the lamp power supply unit 30 (the excimer lamp 20 from the lamp power supply unit 30) from being seen from the excimer lamp 20 side, and the support member 40 blocks the spatial area between the excimer lamp 20 side and the lamp power supply unit 30 side, adopting a support structure that functions as a partition that divides the space into two compartments with different gas components, flow, temperature, etc. contained in each spatial area.

The excimer lamp 20 is positioned at a predetermined distance D0 so that the lamp axis X is along the lamp side surface 40A of the support member 40. The lamp power supply unit 30 is also positioned at a predetermined distance D5 from the power supply unit side surface 40B so that it is along the power supply unit side surface 40B.

The excimer lamp 20 and the lamp power supply unit 30 are positioned opposite each other with the support member 40 sandwiched between them, with the support member 40 adjacent to the excimer lamp 20 on the lamp side surface 40A and adjacent to the lamp power supply unit 30 on the power supply unit side surface 40B. Therefore, the support member 40 is in a positional relationship that makes it easy for the temperature to rise due to heating (thermal conduction, thermal convection, thermal radiation) according to the amount of power supplied from the lamp power supply unit 30 to the excimer lamp 20. In the ozone generation module 10 of this embodiment, both the excimer lamp 20 and the lamp power supply unit 30 are exposed, and the support member 40 is electrically connected to the outer electrode (cathode) of the excimer lamp 20 and the low-voltage side terminal of the lamp power supply unit 30, and has the same potential as the housing of the device main body, which is electrically connected to earth.

The lamp power supply unit 30 can be configured as a circuit with a power supply circuit mounted on a circuit board, and here, a power supply connector (not shown) is provided that can be connected to the power supply unit (not shown) of the device body, such as a commercial frequency AC power supply or a low voltage DC power supply provided in the ozone generator 100, and operations such as turning the excimer lamp 20 on and off are controlled by control signals from a control unit (not shown) provided in the ozone generator 100.

The excimer lamp 20 is configured as a lamp in which a foil-shaped inner electrode (not shown) is disposed (embedded) in the inner tube and a spiral-shaped outer electrode (not shown) is wound around the outer surface of the outer tube, and is placed in a discharge vessel 22 with a double-tube structure made of quartz glass, and a discharge space filled with a rare gas is formed in the discharge vessel 22.

The outer tube forms a tip portion 21 that is sealed by heating and shrinking the diameter at the tip side of the discharge vessel 22, and at the tip is formed a tip portion (not shown) that is the remaining part of the exhaust path inside the discharge vessel during the manufacturing process of the excimer lamp. The inner tube forms a sealed portion 23 that is exposed to the outside from the rear end side of the discharge vessel 22, and a power supply line (power supply rod) 32 is arranged inside it.

The inner electrode, which serves as the anode, is electrically connected to the high-voltage side terminal of the lamp power supply unit 30 via a power supply line 32 surrounded by the sealing portion 23 and an insulator (hereinafter referred to as a through insulator) 50 that penetrates the support member 40. On the other hand, the outer electrode, which serves as the cathode, is electrically connected to the low-voltage side terminal (earth) of the lamp power supply unit 30 via the support member 40 by a power supply line (not shown). Here, the outer electrode and the low-voltage side terminal may be connected by a single power supply line without passing through the support member 40.

The lamp power supply unit 30 applies a high-frequency high voltage to the excimer lamp 20 (between the inner electrode and the outer electrode) via a power supply line and a through insulator. For example, it is possible to apply a high-frequency high voltage in the range of frequencies (several kHz to several tens of MHz) and voltages (several kV to several tens of kV). This causes excimer light (ultraviolet rays) to be emitted to the outside of the discharge vessel 22 from the discharge generated inside the discharge vessel 22. For example, it is possible to fill the discharge vessel 22 with a rare gas so that it emits ultraviolet rays with a wavelength of 200 nm or less (e.g., 172 nm).

The discharge generated inside the discharge vessel 22 is affected by the electric field strength distribution inside the discharge vessel, which is determined by the relative positions of the electrodes (anode and cathode). When the support member 40 is electrically connected to the low-voltage terminal (earth) of the lamp power supply unit 30, the support member 40 may affect the electric field strength distribution depending on the configuration of the outer electrode, etc.

Therefore, the distance D0 between the discharge vessel 22 and the support member 40 is set to be larger than the distance at which the support member 40 affects the electric field strength distribution in the discharge vessel and changes the discharge position. However, in order to improve the lighting startability and discharge stability of the excimer lamp 20, it is also possible to set the distance D0 at which the support member 40 affects the electric field strength distribution in the discharge vessel.

The excimer lamp 20 may be configured in a way other than a double-tube structure lamp, and may have an inner electrode exposed to the discharge space without an inner tube. The outer electrode may be plate-shaped or film-shaped, and may not be integrated with the discharge vessel 22, but may have a lamp holder that holds the discharge vessel functioning as the outer electrode. Instead of an inner electrode, a pair of electrodes facing each other along the tube axis on the outer surface of the tubular discharge vessel may be provided near both ends of the vessel, and a high-frequency high voltage may be applied to the pair of electrodes. It is also possible to have a configuration in which a phosphor is applied to the inner surface of the discharge vessel.

The excimer lamp 20 is supported by a through insulator 50 so as to maintain insulation between the lamp power supply unit 20 and the support member 40. The lamp power supply unit 30 is supported by cylindrical power supply support parts 57A (57D), 57B (57C) so as to maintain insulation between the lamp power supply unit 20 and the support member 40. As shown in FIG. 2, the through insulator 50 has a cylindrical insulating part 52 fitted into an opening 41 formed in the support member 40, and inside the insulating part 52, a conductive member 56 extends across the support member 40.

The lamp side end 54 of the conductive member 56 is electrically connected to a power supply line (power supply rod) 32 that connects to the inner electrode of the excimer lamp 20. In addition, the power supply side end 55 located on the opposite side to the lamp side end 54 is connected to the lamp power supply unit 30 via the power supply line 34.

In this way, the excimer lamp 20 is positioned relative to the support member 40 at a predetermined distance D0 via the through-hole insulator 50, and the lamp power supply unit 30 is positioned relative to the support member 40 at a predetermined distance D5 via the power supply support units 57A, 57B, 57C, and 57D. The excimer lamp 20 and the lamp power supply unit 30 are then mounted in the ozone generator 100 as an integral structure with the support member 40. Because the excimer lamp 20 and the lamp power supply unit 30 are supported by the support member 40 via the through-hole insulator 50 and the power supply support units 57A, 57B, 57C, and 57D, respectively, the occurrence of ozone thermal decomposition and insulation breakdown can be suppressed.

In general, the decomposition of ozone generated by ultraviolet irradiation is accelerated and the half-life is shortened as the temperature, relative humidity, and flow rate increase. For example, ozone decomposition due to temperature begins when the temperature reaches about 40°C, and ozone decomposition becomes active at about 60°C. Therefore, the distance intervals D0 and D5 of the support member 40 may be determined so that the lamp side surface 40A is lower than the temperature of 60°C (preferably 40°C) at which ozone decomposes, even when the support member 40 is heated by heat from the excimer lamp 20 and the lamp power supply unit 30. On the other hand, considering that a high-frequency high voltage is applied (power is supplied) from the lamp power supply unit 30 to the excimer lamp 20, it is also possible to determine the distance intervals D0 and D5 so that the length of the power supply line is shortened.

Figure 4 is a cross-sectional view of the flow path tube when the ozone generation module 10 is attached to the ozone generator 100, as viewed from above. Figure 5 is a cross-sectional view of the flow path tube when the ozone generation module 10 is attached to the ozone generator 100, as viewed from the side.

The ozone generator 100 is provided with a flow tube 120 with an intake fan 130 at its end. The intake fan 130 is configured as an axial fan and is arranged coaxially with the flow tube 120. The flow tube 120 is configured as a tube with a rectangular cross section here, and the intake fan 130 also has a shape that matches the flow tube 120. The operation of the intake fan 130 is controlled by a control unit (not shown) provided in the ozone generator 100.

In this embodiment, a rectangular opening (see FIG. 5) 120T is formed in the tube wall 120A of the flow tube 120 as the mounting portion 110 shown in FIG. 1. The rectangular opening 120T has an opening area equivalent to that of the support member 40, and the ozone generating module 10 is attached to the flow tube 120 by fitting the support member 40 into the rectangular opening 120T. At this time, the support member 40 is attached so that the excimer lamp 20 is located inside the flow tube 120 and the lamp power supply unit 30 is located outside the flow tube 120.

When the ozone generation module 10 is attached to the flow path tube 120, the excimer lamp 20 is positioned so that its lamp axis X is aligned with the axis C of the flow path tube 120, as shown in FIG. 5. Also, as shown in FIG. 4, the lamp axis X of the excimer lamp 20 is located on the center line L in the width direction (horizontal direction) of the flow path tube 120, and is symmetrically arranged with equal distance intervals D3 to both side walls 120C of the flow path tube 120.

On the other hand, the excimer lamp 20 is not arranged coaxially with respect to the central axis C of the flow path tube 120, and the distance D4 to the tube wall (hereinafter referred to as the upper wall) 120B (see FIG. 5) of the flow path tube 120 is longer than the distance R from the central axis C of the flow path tube 120 to the upper wall 120B.

The distance D0 between the excimer lamp 20 and the support member 40, i.e., the shortest distance D0 between the discharge vessel 22 and the support member 40, can be determined taking into account not only the effects of heat and electric field strength distribution described above, but also the ultraviolet rays blocked by the support member 40 and the ease of flow of the surrounding raw material gas.

For example, it can be set to have a length equal to or greater than the distance interval (hereinafter referred to as attenuation distance) at which the ultraviolet intensity ratio of the ultraviolet light emitted from the discharge vessel 22 of the excimer lamp 20 attenuates to 80%. It may also be set to be greater than the distance interval at which the ultraviolet intensity ratio attenuates to 50%. For example, in the case of ultraviolet light having a peak wavelength of 172 nm, the size (outer diameter) of the discharge vessel of the excimer lamp 20 and the position of the support member 40 (the height at which the through insulator 50 protrudes from the lamp side surface 40A) can be set so that the distance separation D0 is 1 mm or more, more preferably 3 mm or more.

On the other hand, if the lamp side surface 40A of the support member 40 is reflective in the wavelength range of ultraviolet light emitted from the excimer lamp 20, the distance D0 can be made smaller (closer). Even in this case, taking into consideration the cooling caused by the flow of raw material gas from the intake fan 130 and the heating from the excimer lamp 20, the distance D0 is set so that the lamp side surface 40A of the support member 40 does not rise to a temperature at which ozone decomposes (a temperature at which the surface becomes overheated from the viewpoint of ozone generation) and is longer than the distance at which the surface becomes substantially insulated (hereinafter referred to as the insulating distance), thereby effectively separating the support member 40 and the excimer lamp 20 from each other by a space.

In addition, when considering the heating from the lamp power supply unit 30 to the support member 40 according to the power supplied to the excimer lamp 20, the distance D5 between the lamp power supply unit 30 and the support member 40 is set to be longer than the distance (insulation distance) at which the lamp side surface 40A of the support member 40 rises to the temperature at which ozone decomposes, so as to effectively separate the lamp power supply unit 30 and the support member 40. It is also possible to make the distance D5 smaller by providing an insulating material (heat shielding material).

The insulation distances between the excimer lamp 20 and the lamp power supply unit 30 are determined according to the heat from the excimer lamp 20 and the heat from the lamp power supply unit 30 when the excimer lamp 20 is turned on at rated power by the lamp power supply unit 30 and the raw material gas is caused to flow along (towards) the support member 40 by the air supply fan. Therefore, the insulation distance for the excimer lamp 20 and the insulation distance for the lamp power supply unit 30 do not need to be the same.

The distance D1 (see FIG. 3) between the excimer lamp 20 and the side surface 40C of the support member 40 is set so that it exceeds the spatial region (hereinafter referred to as the ultraviolet radiation influence range U) where ultraviolet rays emitted from the excimer lamp 20 reach by passing through the atmosphere and are affected by ultraviolet radiation (deterioration, etc.), that is, it is set to be greater than the distance (hereinafter referred to as the reach limit distance Q) where ultraviolet rays are attenuated in the atmosphere and do not substantially reach. In addition, the distance D2 (see FIG. 2) between the excimer lamp 20 and the end surface 40D of the support member 40 is also set to be greater than the ultraviolet radiation influence range U (greater than the reach limit distance Q).

For example, in the case of ultraviolet light with a wavelength of 172 nm, the limit distance Q (ultraviolet light irradiation affected range U) can be set to 6 mm or more, at which the ultraviolet light intensity ratio attenuates to 20% or less, and preferably 30 mm or more, at which all of the ultraviolet light is absorbed, and the distance intervals D1 and D2 can be set accordingly.

Note that the actual ultraviolet irradiation affected range U differs in illuminance distribution (light distribution) along the outer circumferential surface of the discharge vessel depending on the shape of the discharge vessel 22 and the position of the discharge generated inside it. Therefore, the ultraviolet irradiation affected range U and the reach limit distance Q are not necessarily uniform with respect to the outer surface of the discharge vessel as shown in FIG. 3. For example, there may be a tendency for the irradiance to be lower in the axial direction than in the radial direction (the reach limit distance Q is smaller), and further for the irradiance to be lower toward the rear end than toward the tip end in the axial direction (the reach limit distance Q is smaller). Therefore, the distance D2 at the tip end in the axial direction may be shorter than the distance D1 in the radial direction.

These distances D1 and D2 are shorter than the distance D3 between the excimer lamp 20 and the side wall 120C of the flow path tube 120, and the distance D4 between the excimer lamp 20 and the top wall 120B. That is, the excimer lamp 20 is positioned so that the flow path tube 120 is outside the spatial region of the ultraviolet irradiation influence range U, and only the support member 40 is positioned within the spatial region of the ultraviolet irradiation influence range U that is less than the limit distance Q of the ultraviolet rays of the excimer lamp 20. This prevents the ultraviolet rays emitted from the excimer lamp 20 from affecting (deteriorating, etc.) the top wall 120B and side wall 120C of the flow path tube 120, and also suppresses the occurrence of insulation breakdown due to the high frequency high voltage applied to the excimer lamp 20.

After the support member 40 is attached to the flow tube 120, the device power supply unit of the ozone generator 100 and the lamp power supply unit 30 are electrically connected via a power supply connector, so that the lamp power supply unit 30 applies a high-frequency high voltage to the inner electrode and outer electrode of the excimer lamp 20. When the intake fan 130 operates, raw gas (such as air) containing oxygen flows into the flow tube 120.

While the oxygen-containing raw gas flows around the excimer lamp 20, ozone is generated by irradiation of the oxygen with ultraviolet light emitted from the excimer lamp 20, and the ozone-containing gas flows out from the outlet 120E of the flow tube 120. The outflowing ozone-containing gas flows out of the ozone generator 100 from an opening provided in the device.

The lamp power supply unit 30 is disposed outside the flow path tube 120, and is therefore not exposed to the ozone that is generated, preventing the lamp power supply unit 30 from being affected by the ozone. In addition, the distances D1 and D2 between the excimer lamp 20 and the side surface 40C and end surface 40D of the support member 40 are equal to or greater than the reachable distance Q described above, so that the ultraviolet rays emitted from the excimer lamp 20 do not affect the tube wall 120A of the flow path tube 120.

According to this embodiment, the ozone generating module 10 includes an excimer lamp 20 and a lamp power supply unit 30, and is provided with a support member 40 between the opposing excimer lamp 20 and lamp power supply unit 30 that supports them together while blocking radiated ultraviolet rays, heat, and generated ozone. The ozone generating module 10 can be detachably attached to the ozone generating device 100.

For example, if the mounting portion of the excimer lamp 20 (lamp side end 54 of the conductive member 56 of the through insulator 50) is located deep inside the outlet 120E and faces the intake fan 130, and the distance D4 to the upper wall 120B is small (for example, 65 mm or less), it becomes difficult for a maintenance technician to work with his or her hands or tools inside the flow pipe, making it virtually impossible to install or remove just the excimer lamp 20. Even if it were possible to install or remove the excimer lamp 20, there is a risk that the excimer lamp 20 could be damaged by installing or removing the power supply wire (power supply rod) connecting to the inner electrode or outer electrode.

Even in such a case, by attaching and detaching the support member 40 to the flow path tube 120, it becomes possible to simultaneously attach and detach both the excimer lamp 20 and the lamp power supply unit 30 to the ozone generator 100, and the excimer lamp 20 and the lamp power supply unit 30 can be easily replaced at the same time.

In general, the ultraviolet rays emitted from the excimer lamp 20 can affect other devices and components within the device, so the ozone generation conditions, including the ozone concentration, must be determined according to the device specifications and the environment in which the device is used. In addition, the reach of the ultraviolet rays varies depending on the peak wavelength of the ultraviolet rays, and the discharge state changes depending on differences in frequency, voltage, and electric field strength distribution, and the ultraviolet ray intensity (illuminance distribution, light distribution) and temperature distribution of the discharge vessel 22 also change.

In addition, there are manufacturing errors in the shape of the discharge vessel 22, which is formed by heating quartz glass, and there are also manufacturing errors in the state of the outer electrode arranged along the outer surface of the discharge vessel 22 (such as the state of adhesion to the discharge vessel and its positional relationship with the inner electrode), so lamp characteristics such as discharge start voltage and discharge sustain voltage and the power supply characteristics suitable for them may differ from lamp to lamp. For this reason, it is necessary to combine the excimer lamp 20 and lamp power supply unit 30 according to the ozone generation conditions.

On the other hand, the time when the excimer lamp 20 and the lamp power supply unit 30 wear out depends on the lamp characteristics and power supply characteristics, respectively, so the times when they need to be replaced do not necessarily coincide. However, for example, if only the lamp power supply unit 30 is replaced, it will result in a change in the power supply system that applies high-frequency, high-voltage power to the excimer lamp 20, which may result in changes in the ultraviolet light intensity and other factors that may change the conditions for ozone generation.

Even when only the excimer lamp 20 is replaced, if the lamp characteristics, such as the size or peak wavelength of the excimer lamp 20, are changed, or if the distance between the excimer lamp 20 and the support member 40 is changed, the ozone generation conditions will change. Such a combination of the excimer lamp 20 and the lamp power supply unit 30 will lead to the device being operated under inappropriate ozone generation conditions, which may result in incomplete sterilization and deodorization, or the generation of ozone that may affect the human body. If an inappropriate excimer lamp 20 is installed in this way, there is a risk of insulation breakdown due to the high frequency high voltage applied to the excimer lamp 20, or the release of gas containing NOx due to abnormal discharge in the atmosphere.

In this embodiment, the excimer lamp 20 and the lamp power supply unit 30 are not removed from the device individually, but rather the ozone generation module 10 is configured to enable simultaneous replacement, and can be freely attached to the ozone generator 100. Therefore, even if the excimer lamp 20 or the lamp power supply unit 30 wears out, sterilization, deodorization, etc. can be performed at the desired ozone concentration without changing the ozone generation conditions.

In particular, it is possible to prepare and selectively install various ozone generating modules by combining the excimer lamp 20 and the lamp power supply unit 30 according to the specifications and operating characteristics of the ozone generator. For example, if the replacement work is performed by the manufacturer of the excimer lamp 20 and the lamp power supply unit 30, or by a maintenance company under the guidance of the manufacturer, the ozone generator 100 can be operated under appropriate ozone generation conditions even if the excimer lamp 20 and the lamp power supply unit 30 are replaced.

The excimer lamp 20 is arranged in the flow path tube 120 so that the distances D3 and D4 between the excimer lamp 20 and the side wall 120C and the top wall 120B of the flow path tube 120 are longer than the distance D0 between the excimer lamp 20 and the support member 40 and the distances D1 and D2 to the side surface 40C and the end surface 40D. This makes it possible to prevent the ozone generation conditions from changing depending on the positional relationship of the excimer lamp 20 with the tube wall of the flow path tube 120.

Furthermore, by mounting the ozone generating module 10 near the outlet 120E of the flow tube 120 with the power supply line (power supply rod) 32 connecting to the inner electrode of the excimer lamp 20 facing the intake fan 130 side (upstream side) and the discharge vessel 22 facing the outlet 120E side (downstream side), the gas flowing into the flow tube 120 flows around the excimer lamp 20 at an appropriate flow rate, making it possible to generate ozone effectively.

In particular, in order to generate ozone effectively, even when the distance R from the central axis C of the flow path tube 120 to the upper wall 120B is made small (for example, the distance D4 is 65 mm or less) to the extent that it is difficult for a maintenance technician to insert his or her hands or tools into the flow path tube, not only is it possible to replace the excimer lamp 20 and the lamp power supply unit 30 simultaneously, but it also becomes easy to replace only the excimer lamp 20, even when the distance between the flow path tube 120 and the tube wall is small.

Next, a second embodiment of the ozone generator will be described with reference to Figures 6 and 7. In the second embodiment, both the excimer lamp and the lamp power supply are configured to be disposed within the flow path tube.

Figure 6 is a cross-sectional view of the flow path pipe in the second embodiment as seen from above. Figure 7 is a cross-sectional view of the flow path pipe in the second embodiment as seen from the side.

The ozone generating module 10 includes an excimer lamp 20 and a lamp power supply unit 30, and, as in the first embodiment, includes a support member 40' that supports the excimer lamp 20 via a through insulator 50 and the lamp power supply unit 30 via power supply support parts 57A, 57B, 57C, and 57D. The support member 40' is configured as a rectangular plate material (plate-shaped member) with a different size from that of the first embodiment.

The side length D6 of the support member 40' corresponds to the width direction tube wall length R1 of the rectangular cross section flow tube 120'. The ozone generation module 10 is attached to the flow tube 120' by fitting (pushing) the support member 40' into the outlet 120'E of the flow tube 120' from the side 40'C. At this time, the excimer lamp 20 and the lamp power supply unit 30 are placed inside the flow tube 120', and the side 40'C of the support member 40' is placed so as to face the intake fan 130. In addition, the excimer lamp 20 is placed so that the lamp axis X is aligned perpendicular to the direction of gas flow.

When the intake fan 130 operates, the raw material gas that flows into the flow passage pipe 120' is divided by the side surface 40'C of the support member 40' into the excimer lamp 20 side and the lamp power supply unit 30 side, and flows out from the outlet 120'E without merging.

Ozone generated by irradiating the raw gas with ultraviolet light emitted from the excimer lamp 20 flows out along the lamp side surface 40'A of the support member 40. Meanwhile, gas flowing into the power supply unit side surface 40'B of the support member 40 cools the lamp power supply unit 30. The support member 40' divides the internal space of the flow path tube 120' into upper and lower sections, and is positioned so that it extends to the vicinity of the outlet 120'E, thereby preventing the generated ozone from flowing into the lamp power supply unit 30.

On the other hand, the distance D3 between the excimer lamp 20 and the side wall 120'C of the flow path tube 120', and the distance D4 between the excimer lamp 20 and the side wall 120'B of the flow path tube 120' are greater than the distance D0 between the excimer lamp 20 and the support member 40'. Similarly to the first embodiment, the distance D0 is set to be greater than the attenuation distance, and preferably greater than the insulation distance. More preferably, the distance D5 is set to be greater than the insulation distance that takes into account the cooling of the lamp power supply unit. Furthermore, the distances D1 and D2 are set to be greater than the ultraviolet irradiation influence range U (greater than the reach limit distance Q).

Therefore, it is possible to suppress the change in ozone generation conditions due to the positional relationship between the flow path tube 120' and the excimer lamp 20. In addition, by pulling out the support member 40' from the outlet 120'E of the flow path tube 120', not only is it easy to replace the excimer lamp 20 and the lamp power supply unit 30 at the same time, but it is also easy to replace only the excimer lamp 20 or only the lamp power supply unit 30 even when the distance between the flow path tube 120' and the tube wall is small. Note that the above distances D3 and D4 may be configured to be larger than the distances D1 and D2 between the excimer lamp 20 and the side and end faces of the support member 40', as in the first embodiment.

Next, an ozone generator according to a third embodiment will be described with reference to Figures 8 to 11. In the third embodiment, the excimer lamp and the lamp power supply are each held and supported by dedicated members.

Figure 8 is a front view of the ozone generation module in the third embodiment. Figure 9 is a side view of the ozone generation module 10 in the third embodiment.

The ozone generation module 10 comprises an excimer lamp 20, a lamp power supply unit 30, and a support member 40" that supports the excimer lamp 20 and the lamp power supply unit 30. A pair of clip-type lamp holders 65A, 65B that hold the excimer lamp 20 are installed on the lamp-side surface 40"A of the support member 40".

The pair of lamp holders 65A, 65B hold the excimer lamp 20 at a distance D0 (greater than the attenuation distance, preferably greater than the insulation distance) from the support member 40". As in the first and second embodiments, the distance D1 between the excimer lamp 20 and the side surface 40"C of the support member 40", and the distance D2 between the excimer lamp 20 and the end surface 40"D of the support member 40" are set so as to exceed the ultraviolet radiation influence range U (greater than the reachable limit distance Q). On the power supply side surface 40"B, cylindrical power supply support parts 67A (67D), 67B (67C) are installed, which support the lamp power supply part 30 at a distance D5, which is set to be greater than the insulation distance. The distances D0 and D5 can be set so as to suppress the influence of ozone decomposition on the heated lamp side surface 40A.

The support member 40" has a connector 50" embedded in an opening 41" near one end face 40"D, into which the terminals of the power supply lines 65 and 67 are inserted, respectively, to electrically connect the excimer lamp 20 and the lamp power supply unit 30. The connector 50" may be placed outside the spatial region of the ultraviolet radiation influence range U. The power supply lines 65 and 67 are arranged so as to maintain insulation between them and the support member 40".

Figure 10 is a cross-sectional view of the flow path pipe in the third embodiment as seen from above. Figure 11 is a cross-sectional view of the flow path pipe in the third embodiment as seen from the side.

The width (length between sides) D7 of the support member 40" of the ozone generating module 10 corresponds to the tube wall length R1 of the flow path tube 120". The ozone generating module 10 is attached by fitting the support member 40" into the outlet 120"E of the flow path tube 120". At this time, the excimer lamp 20 is positioned so that the lamp axis X is aligned with the direction of the tube axis C.

As in the second embodiment, the gas flowing into the flow passage tube 120" by the intake fan 130 is divided by the support member 40" into the excimer lamp 20 side and the lamp power supply unit 30 side, and flows out separately from the outlet 120"E without merging. The distance D0 between the excimer lamp 20 and the support member 40" is equal to or greater than the attenuation distance, and is preferably equal to or greater than the insulation distance, and is shorter than the distances D3 and D4 to the tube wall of the flow passage tube 120". More preferably, the distance D5 is set to be equal to or greater than the insulation distance that takes into account the cooling of the lamp power supply unit. The distances D1 and D2 are set to be greater than the ultraviolet irradiation influence range U (equal to or greater than the reach limit distance Q). Therefore, the ozone generation conditions are prevented from changing depending on the positional relationship between the flow passage tube 120" and the excimer lamp 20.

In the first to third embodiments, the ozone generation module is attached by fitting the support member from the outlet side of the flow path pipe, but it is also possible to attach the ozone generation module using other support structures, such as a groove formed in the flow path pipe to allow sliding movement, or a clip plate or the like provided on the wall of the flow path pipe to hold it in place.

In the first to third embodiments, the ozone generation module 10 is configured to be attached to a flow path pipe provided in the ozone generator 100. However, it is also possible to configure the ozone generation module to be attached to an ozone generator that does not have a flow path pipe.

The following describes the fourth embodiment of the ozone treatment device with reference to Figures 12 and 13. In the fourth embodiment, an ozone generation module is installed so as to form a flow path within the device housing.

Figure 12 is a schematic cross-sectional view along the horizontal direction of an ozone processing device according to a fourth embodiment. Figure 13 is a schematic cross-sectional view along the vertical direction of an ozone generating device according to a fourth embodiment.

The ozone treatment device 100' is configured as a large ozone treatment device in which the object to be sterilized and deodorized is placed in an ozone treatment space area (box) 400. A partition wall 350 divides the housing 300 in the horizontal direction, and an ozone treatment space area 400 is formed below the partition wall 350. In addition, a ceiling space area is formed between the upper part of the partition wall 350 and the ceiling surface 320C of the device.

The partition 360 is a partition that divides a part of the ceiling space area along the vertical direction, and a fan 410 is provided in the ozone generation space area 425 provided between the partition 360 and the rear surface of the housing 320A in the ceiling space area, and a gas containing ozone is capable of being supplied to the ozone treatment space area 400. In addition, an ozone removal section (not shown) is provided in the flow path formed by the partition that divides another part of the ceiling space area along the vertical direction, and is configured to be able to remove (decompose) the ozone contained in the gas sucked from the ozone treatment space area 400.

The ozone generating module 10 has the same configuration as the third embodiment, and the lamp holder pair 65A, 65B holds the excimer lamp 20 so that the distance D0 between the support member 40" is equal to or greater than the attenuation distance, and preferably equal to or greater than the adiabatic distance, and the cylindrical power support parts 67A (67D), 67B (67C) support the lamp power supply part 30 so that the distance D5 between the support member 40" is equal to or greater than the adiabatic distance. As shown in FIG. 13, the ozone generating module 10 is attached so that one side surface 40"C is placed directly above the partition wall 350 and in contact with it, forming a flow path in the spatial region 425. The shortest distance D4 between the discharge vessel 22 and the housing side surface 320B is set to a distance that exceeds the ultraviolet radiation influence range U (equal to or greater than the reach limit distance Q).

When the ozone generating module 10 is attached, the lamp power supply unit 30 is located closer to the fan 410 (upstream) than the excimer lamp 20, and the connector 50" of the support member 40" is closer to the rear housing 320A. The lamp axis X of the excimer lamp 20 faces the side of the device. The ozone generating module 10 can be attached to either the partition walls 350, 360 or the rear housing 320A, for example, by screwing.

The fan 410 rotates in accordance with the generation of ozone. At this time, the gas flows according to the arrangement of the support member 40". Specifically, while the fan 410 is operating to generate ozone, the raw material gas is sent out from the fan 410. The gas sent out from the fan 410 cools the lamp power supply unit 30, while part of the gas flows across the support member 40" toward the space where the excimer lamp 20 is arranged.

The gas that flows into the excimer lamp 20 passes around the excimer lamp 20 and flows downwards in the device. A slit-shaped opening 420 is formed in the partition 350 on which the fan 410 is mounted, from the installation position of the support member 40" towards the housing side surface 320B (not shown in FIG. 12). Ozone is generated by the ultraviolet rays emitted from the excimer lamp 20, and the gas containing the ozone flows downwards through the opening 420 towards the ozone treatment space area 400.

During the ozone generation operation, the support member 40" functions as a partition wall and forms a flow path. The lamp power supply unit 30 is located upstream and shielded by the support member 40", so it is not exposed to ozone generated by ultraviolet rays emitted from the excimer lamp 20. In addition, since the connector 50" of the support member 40" is located adjacent to the opening 420 on the housing side surface 320B side, even in a state in which it is practically impossible to attach or remove only the excimer lamp 20, the support member 40" can be attached to and removed from the flow path pipe formed by the housing (housing rear surface 320A, housing side surface 320B, device ceiling surface 320C) and the internal housing (partition walls 350, 360), making it easy to replace the excimer lamp 20 and the lamp power supply unit 30 at the same time. Also, even if the distance between the flow path pipe and the tube wall is small, it is easy to replace only the excimer lamp 20. Meanwhile, during the ozone removal operation, the fan rotates so that gas flows from the box 400 toward the fan 410.

Thus, according to the fourth embodiment, by installing the ozone generating module 10 so that the support member 40" functions as a partition, a flow path can be formed inside the device, and the gas can be appropriately flowed around the excimer lamp 20 and the lamp power supply unit 30 can be cooled. It is also possible to make an ozone processing device in which an ozone generating device that forms an ozone generation space area surrounded by a flow path tube formed by a box-shaped internal housing is arranged in an ozone processing space area (box) 400. Also, various configurations such as screwing or fitting can be used to install the support member 40" on a partition or the like.

The excimer lamp and lamp power supply unit can also be supported by a structure other than that shown in the first to third embodiments. The support member is also not limited to a plate shape, and various shapes and materials can be used.

The ozone generation module is not limited to being configured with the excimer lamp and lamp power supply unit exposed, but can also be configured to enclose part of the excimer lamp and the lamp power supply unit using a housing, casing, etc., and can be configured to be removed after installation.

Reference Signs List 10 Ozone generating module 20 Excimer lamp 30 Lamp power supply unit 40 Support member 50 Feed-through insulator 100 Ozone generator 120 Flow path tube

Claims (13)

An excimer lamp,
a lamp power supply unit that supplies power to the excimer lamp;
a support member for supporting the excimer lamp and the lamp power supply unit and being removably attached to the device;
an excimer lamp and a lamp power supply unit supported by a support member so as to face each other with the support member interposed therebetween, and the excimer lamp and the lamp power supply unit can be removed from the apparatus together with the support member. The ozone generator according to claim 1, characterized in that the support member is attached to a flow pipe through which a gas containing oxygen flows. The ozone generator according to claim 2, characterized in that the distance between the excimer lamp and the wall of the flow path tube is greater than the distance between the excimer lamp and the support member. The ozone generator according to claim 2 or 3, characterized in that the distance between the excimer lamp and the wall of the flow passage tube is equal to or greater than the limit distance that ultraviolet light emitted from the excimer lamp can reach. An ozone generator according to any one of claims 2 to 4, characterized in that the support member is attached to the flow tube so that the distance between the excimer lamp and the wall of the flow tube is shorter than the distance at which only the excimer lamp can be removed. The ozone generator according to claim 1, characterized in that the support member is attached so as to be configured as at least a part of a partition wall that forms a flow path for a gas containing oxygen, or as at least a part of a partition wall that divides the internal space of the device. The support member has a plate-like member,
7. The ozone generator according to claim 1, wherein at least the excimer lamp of the excimer lamp and the lamp power supply unit is supported at a predetermined distance along the plate-like member. The ozone generator according to claim 7, characterized in that the distance between the excimer lamp and the plate-like member is equal to or greater than the attenuation distance at which the intensity ratio of ultraviolet light emitted from the excimer lamp attenuates to 80%. The ozone generator according to claim 7 or 8, characterized in that at least a portion of the plate-like member is disposed within a spatial region irradiated with ultraviolet light emitted from the excimer lamp. The ozone generator according to any one of claims 7 to 9, characterized in that at least the distance between the excimer lamp and the plate-like member, among the distance between the excimer lamp and the plate-like member and the distance between the lamp power supply unit and the plate-like member, is determined so that the surface temperature of the plate-like member is 60°C or less while the lamp is lit. An ozone processing device comprising an ozone generator according to any one of claims 1 to 10 and an ozone remover. An excimer lamp,
a lamp power supply unit that supplies power to the excimer lamp;
an ozone generating module including a support member that supports the excimer lamp and the lamp power supply unit and is removably attached to an ozone generating device,
2. An ozone generating module, comprising: a support member configured as a plate-like member interposed between the excimer lamp and the lamp power supply unit to shield them from each other; 13. Removing the ozone generating module according to claim 12 from an ozone generating device;
Replace at least one of the excimer lamp and the lamp power supply of the removed ozone generation module.
A method for replacing an ozone generation module, comprising mounting the replaced ozone generation module in an ozone generator.

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