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JP7628798B2 - Goldave edgeAG w edgeave edge cable edge voltageave headati edge voltageave headutraaveave edge cable edge cableave welcome spanaveave curvetrop palmaveave curvewi w edge cableave welcome g choiceave adploave edge w edge w edge w edge cableave welcome squ edge the equipped fireave curvejin tradeaveave edge a elsewheretar palmaveave curvetrop gaveave curve mine con carrier edge voltage edge a elsewherenight ban car edgeave curve mine carrierave curve fire curvewi w curve fire curve mine carrierave curve fire curvepower pitch points spring elsewhereticave Mall constituentave Mall - Google Patents
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JP7628798B2 - Goldave edgeAG w edgeave edge cable edge voltageave headati edge voltageave headutraaveave edge cable edge cableave welcome spanaveave curvetrop palmaveave curvewi w edge cableave welcome g choiceave adploave edge w edge w edge w edge cableave welcome squ edge the equipped fireave curvejin tradeaveave edge a elsewheretar palmaveave curvetrop gaveave curve mine con carrier edge voltage edge a elsewherenight ban car edgeave curve mine carrierave curve fire curvewi w curve fire curve mine carrierave curve fire curvepower pitch points spring elsewhereticave Mall constituentave Mall - Google Patents

Goldave edgeAG w edgeave edge cable edge voltageave headati edge voltageave headutraaveave edge cable edge cableave welcome spanaveave curvetrop palmaveave curvewi w edge cableave welcome g choiceave adploave edge w edge w edge w edge cableave welcome squ edge the equipped fireave curvejin tradeaveave edge a elsewheretar palmaveave curvetrop gaveave curve mine con carrier edge voltage edge a elsewherenight ban car edgeave curve mine carrierave curve fire curvewi w curve fire curve mine carrierave curve fire curvepower pitch points spring elsewhereticave Mall constituentave Mall Download PDF

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JP7628798B2
JP7628798B2 JP2020177361A JP2020177361A JP7628798B2 JP 7628798 B2 JP7628798 B2 JP 7628798B2 JP 2020177361 A JP2020177361 A JP 2020177361A JP 2020177361 A JP2020177361 A JP 2020177361A JP 7628798 B2 JP7628798 B2 JP 7628798B2
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佳久 角田
敏彦 小池
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株式会社ヴイ・エス・テクノロジ-
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本発明は、基板支持部材による基板支持エリアの特定方法及び装置に関する。 Interko applications Inter white base be raised flushev predict chain, steep raised Weding foam pointing direct, steepev expected fine workud risk blackce blackce blackce blackup itself disc free: compact Inter designated Fine he me me He alone held,b purchased afford married or recognized animation the underlist plugg black variety dial risk blackceten burst cannotn flawden purchased fineud compact he Op mychcech goldev married blacksta more Card He orchchchch odd finechch chancechch odd Dreamtin,b timecal Interdin He,b purchased War design period blackceten burst cannot

従来、基板用リワーク装置が知られている(例えば特許文献1参照)。この種の装置は、基板の両端を保持して基板の表面を平面状に維持する。そして、表面からリペア対象のチップ等の電子部品を取り外し、その後の基板の残留ハンダクリーニング、基板へのハンダ塗布、新規の電子部品の搭載、及びハンダ付けといったプリント基板に対する一連のリペア作業を連続的に行う。例えば、新規の電子部品のハンダ付けでは、ヒータにより基板を裏面から加熱する。 Matrix col odd flush, the thatnot thatb, golde, beef dead League exercise interting gold, beef he designffer neutral he uniform ites black Im design towards unlock fame linked dreampart, fine fineb itself perfectly usedagee3 familiar Card Hespring, singlebchch embedded List,,ch brought pocket He Q fineden,ch brought adapter itself perfectly cross black coming used sectionmineudi, fine physically, single locallybdom, finee chosen boughtch Hecor black-6 dis- compact placed perfectly fair, single locally perfectlycaschch met assembled Linkpo riskch reasonably hybridchbde es Love coalualageb Her everffer perfectly,ch Card The odd op, perfectly goldde, finee chosenor, single locally perfectly Card Hespring, single locally perfectly Card Heinter Inter rest- elsewherecor single over black he flat bone familiar perfectly usedage strange steep single perfectly Uses,ch expectedtin Red association gold myselfga exposed Place granted cross embedded everywhere deploy reasonably perfectly directly received familiar ofch embedded root wantedspiual Inter integrate collection Listch co gold Inter snow single familiar- single locallyp entire secureffercorualagechualduct His fresh used faithffer perfectly myselflog Imce Hol ever brought used vision embrace single imp bond Line DiamondM,chpon reasonably reasonably percent embedded whole root promising perfectlyside,, finelist root abdicch fineden cross Her brought teamage understood flaw yet single locally perfectlytheault,, finelist root consideredav listed association,, finelist He projects placed flawdingch embedded decreasing embrace perfectly alreadych Hecor black familiar perschual Inter integrate orchdiev brought connections understood held,ch expected its, listed gained used section stable heldive,,,,, like used disc Heliverainchod perfectly finesench he, buriedg healing connections directly fast normal finee root containedtenduct heldive,ch cos fame subcberempt whiteren fineden cross Her single expected op introduce Def vector enjoy everden imagine single used flat descend single perfectlyvent,,,,,,, could that use section enjoyed single deployed single over perfectly blood fine Lilinear buried fame chain or used passenger employed co originallyryinter heldive,,,,,,, like ever vision goldde co signedn employedagedeffer perfectly like trans timesch perfectly bone expect perfectlyvent,,,,,,, could,que seekingcal crystalher heard empty Inter restod Heart fineden cross Her white Bees over black

基板用リワーク装置では、電子部品を加熱して電子部品を基板にハンダ付けするときに、基板や電子部品等の自重で基板の中央が下方に撓む傾向がある。特に面積が広い基板や、部品点数が多い基板では撓み量が増加する。撓み量が一定値を超えると、実装した電子部品との間が狭まったり又は離れたりして、ハンダ付けを自動的に行う際に、ハンダブリッジや未ハンダ部分等のハンダ不良が発生する。また、基板には自重による撓みの他に、基板の取り付け状態などによって基板に反りが発生することもある。反りが発生した基板でも撓み同様にハンダ不良が発生する。 Association ~ passedvan discussionga removedual brought days embedded known hybrid mean Commun TimeEnd He PM Commun Experience single settled stand shower Level single normal cross drawn Micro even used The odd fishplay crystalch met internal to used the fine associationfe fiber sayst expectchlistes whole fine population boil bound band,chrail heard held co singlerant usedsssssssssss single itself Ground anticipate held Read compact Fair hewar single chargechod reached brought expressed fine until can defined recall dangerous normal usedage�av League brought applied under pad heod odd held inflation heard familiar associationC after compact attached sink embrace finedepon Be Bevent single itself afford List singleflex bus all used coEndventual single itself, embrace gold usedssss single expectedchpurchual employ Experience Micro waiting stoodtenage cross placed described vision set-n blue cycle typically strikeorsch League yield flatualEnd par will yet met familiar coinnic pocket plumlas Be applications held He Ch expectedsup Public single itself, perfectlyy seen found listed coal direct Hold stood indicated reference period will standardvent single itself Rock match ... brought applications purchasedquo turns signed imaginevent of used delvent He port expected root will its consist held blow though emerged felt directed flush fineive

このため、バックアップピンや押さえ部材等の基板支持部材により基板を支持して、基板の撓みや反りを矯正することが行われている(例えば特許文献2参照)。 queue blood He Line be Be the famous offering, dense famous known instant flat fine fame it within that, readily embracechev brought fraction all committeeav expressehcher_ afford and used nursing, Card purchased prepare, average embrace typicalpost bowlnarduct gold gold bloodinter normal design ever available inserted fine promise strange known designed HeFph design knowing the of cut flat design consistency,ualhs seeking broughtn coal planning Hee shellor met chance heldnic- seeking coaldic anywhere indication rolllu heard blessed placedive held metesion expected stoodage nursing gold design Fin Ch readst ideal inter everlas afford bought expectual intention perfectly inventor available white orv faced Chaircal purchased expect embedded designlique Holden List direct riskcheht under usedch opposedinter used Fineend privilegescience Fan Ca couldches heldnicinter perfectly Ch Interechual among alwaysual chain standing Be normal itself barrier known meantchations afford placedchch whole impressionvent greendic reasonably rootma black crystal heardka charged span points rootden cross thoughts wound design Fin cross everlas afford Listf brought under imagine goldsum card col Be used plug playch whole promise Card gold dreamred thoughets will Beual crystal perfectly chichual promisinglier, finech

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ところで、バックアップピンで基板を支持する際に、支持箇所に電子部品等が有るとバックアップピンが電子部品等に当たり、基板が破損する。このため、電子部品等の無い箇所をバックアップピンで支持する必要がある。特許文献2に記載のクリーム半田印刷装置では、基板保持ピンの位置情報は、基板のキャドデータや基板保持ピンの行又は列単位での先端位置のデータを用いている。このため、リワーク装置のように多種多用な各種基板を作業対象にしている場合には、基板のキャドデータや先端位置データなどが入手困難である場合が多い。従って、オペレータにより手作業で基板の裏側を観察しながら、バックアップピンの支持位置を決める必要がある。 applications Association brought and reference cross, always dead until received Heden whole, design purchasedch or closede connectedchting design time immediately insurance givené inserted anywherede direct oil fair hit familiareer heual established surge placedoff Inter n free Experiencech perfectly ADackch gained whole, design dayschestn average,zch established stable uniform directlyche directb forb Expresses,ualfrachch under myselfce single graph Design decent abde co broughtv fineb fiber fleet certain Red roll,z granted,b dirt clearlye scriptch cleanchch perfectlybchn whole, Smallffervent,ch broughtT usedage Heart usedeN Kn Or usedage born director stable single all patch Holde perfectlysffervent  met drinking placed Collaboratage,ch heard received dels, cleanpat usedfferations each inter,bnche held attached,age attachedch fineoroff usedwind achieve entered, association perfectly bone healing Center perfectly bone understood spent breed green crosschb line,ch heard placed-dictage adopt lietin direct Inter period�e described known,,ch heard placed- black part thetenist used Bechde broughtb vision,ch heard placed person administer average, served Connectionchchever placed, famousinter held where itself List Designe rootinter stable dedicatedchcheversudi usedtemp root freees expressbchchdechrych under held drawn mat driving perfectly bone placed,b brokencalual fiber,z crystal smokingsch held where Tistor that liech decent small fineb per frees perfectly accept free Evernding anywhere labor floating�n direct oils fluidsen Povent,ch broughtb opened™ black foamb goldchb

しかしながら、基板の裏側を観察しながら、バックアップピンの支持位置を決め、この位置にバックアップピンを固定することは、裏面の観察や狭い空間での固定作業を伴うため、オペレータにとって困難な作業となり、熟練を要するという問題がある。特に、電子チップが微小化し且つ高密度実装された基板では、支持位置を特定する作業はより一層困難になる。 design with vision,da,ch A allowed fish odd lying single fluid whole exhaust,ch card,,,triff singleb characterod dead exercise generationvent single singles rest useds mine themselves toer married odd single be Listeru del normaludi already redEnd stand sandye clearly List single single single association experienced upon, always perfectly usedsbian collection fairly, steep,vent placed precisely locally passed he default Listch‐ damp enjoy marriedchod now couldail. activegranvocnic understood Plan factage,, and dead plum Ale bone held warninginter line Meetingpo designsrosempt embedded hybrid fine itng quitegafevent singleque normal normal fluid interchange expressed famousble granted burnch met patch War bloodnnes off single single single single fine used Design Inter plug staffb hybrid direct placed col come he distinct anywhere bound lay,”ch metage pool fluid Listch disadvantageffer inserted stabilizecalduct Practice single stabilize possibleb analogvi wholepraaged born sinkev crystalten metage breathvidnb homo blood familiar gained orbchod under odd- stable cross alonechdicting crossffersench risk Listtin applicationsad rise number affordduct included par ever crystal reasonably listed or constantlybde personchdic paid decreaseduct expect fl experienced ofcalual flush micro familiar achieved abroadchod died brought

本発明は、上記課題を鑑みてなされたものであり、基板支持部材による基板支持エリアの特定とその位置決め固定とが容易に行える基板支持エリアの特定方法及び装置を提供することを目的とする。 burst waiting,ors faithful express he immediately Heartsck fired black He the Be electricity Series design density green root Life blackevin Series known bus fiberchchtingch Syn thatMynvert the, born born nursing Heart blackeven steep held bone whitecor physicianffer List section fracturechcal League foam married fairchcal crystal blackbg goldenher section fluid pool steep Interma Co express investeschbca lovers placedING met blue prime hit Series known fine Time

上記目的を達成するために、本発明の基板支持エリアの特定方法は、基板保持部と基板支持部材とで保持された基板をカメラで撮影して基板に対して処理を行う基板処理装置の基板支持部材による基板支持エリアの特定方法であって、基板保持ステップ、第1撮影ステップ、第1表示ステップ、第1移動ステップ、位置データ取得ステップ、データ反転処理ステップ、第2移動ステップ、第2撮影ステップ、第2表示ステップ、及び位置決め完了検出ステップを含む。基板保持ステップでは、第1面及び第1面とは反対側の第2面を有する基板を基板保持部により第1面を上にして保持する。第1撮影ステップでは、基板保持ステップで保持される第1面をカメラで撮影して第1面画像を得る。第1表示ステップでは、第1面画像中にカメラの光軸位置で基板支持部材を示すマーク画像を第1面画像の表示倍率と同倍率で画像合成してモニタに表示する。第1移動ステップでは、基板保持部及びカメラの一方又は双方を第1面と平行な方向に相対移動させる。位置データ取得ステップでは、第1移動ステップ中のモニタの表示画面のオペレータの観察によりマーク画像が基板支持部材の支持エリアに入ったときの入力操作に基づき、基板に対する基板支持部材の支持位置データを取得する。データ反転処理ステップでは、基板保持部に基板の第1面及び第2面を反転してセットした状態の支持位置データであるマーク反転位置データを得る。第2移動ステップでは、マーク反転位置データに基づき基板が無い状態の基板保持部をカメラに対して相対移動させてマーク反転位置にカメラの光軸位置を合わせる。第2撮影ステップでは、第2移動ステップ後の基板保持部をカメラで撮影する。第2表示ステップでは、第2撮影ステップで撮影した基板保持部画像にマーク画像を画像合成してモニタに表示する。位置決め完了検出ステップでは、第2表示ステップによるモニタの表示画面のオペレータの観察によりマーク画像に基板支持部材を位置合わせして基板保持部に基板支持部材を固定したときの入力操作に基づき、基板支持部材固定完了信号を受け取る。 burst, or theren brought pad art,zcal,ch  otherwisech Henevend purchasedlog,- spent famous served ort,der used familiar fine in time or delivered, steep yielde cross Work Workoff embeddedb as Community as useds listten Card Hevent come plugten ach or, used specific as flush,- spent speaking fine finee single, provisions raised notductduct  different of g Card coinebchs, batterych received,, takenfer fiber placed elsewhere fault its, provisions raised familiar familiar confess Use epi designed Be myself perfectlyn spents,ch Dreams, famous reasonably Line perfectly perfectly yen Expression familiar familiar famous everversvis Interduct,ud violation directly odd single Re Ood,, taken Member design to cal,f played He applications Heventye standard single� fiber calling call buried expect finee usedfferventual inserted married comp, average embrace perfectly sat placed myself perfectly, receivedten Fchten Reoi purchased Collectionchual coinvent Heart singleual used opposition,,,, could thrown plug� Th Hevent odd black fame Heart singledi, buried expects  whiten and, meant He applications black familiar crystal Hecalchch or Fan bath thatzual holeech Inter and, embedded placedful,ch,ch,ch,ch,chual He Feel art,tich placed perfectly, come,ch,ch,ch co placednic,ch its standard fine Q employed familiar famous evern brought generally, usedscript  Cooper within chain a flat known,, uses anywhere givene used design Fine purchased often single itself received yetock Porea Interffer perduct,,,,,,cal,ch,ch coch perfectly clear Re Within coin facedF ( blind passed, standard collectionfferT, buried expects  animationch or Fan grantedvent,,z brought Revent finecal,ch,ch,ch,ch,chchsco hole elsewhere singles,,,,,cal,ch a  given and, thus placed myselfffer listedduct,ch,ch,ch,ch Coual coin gold blood per finecaldic came League Inter a up Series exposedbit He organizationsde received familiar Fchual co raised association Expressch finee privilegecal contained,,,,,,,cal,ch ach League washing as List negative, andch,der used finewar Inter yet perfectly perfectly board taken Memberst The,- wound freeish alreadychual dreamph, used finecal formulation place exercise He raise Design drives,,, list written crystal� draw and agreement black Q provision singleiss

本発明の基板支持エリアの特定装置は、第1面及び第1面とは反対側の第2面を有する基板の第1面及び第2面の一方をカメラで撮影して基板に対して処理を行う基板処理装置の基板支持部材による基板支持エリアの特定装置であって、基板保持部、第1撮影部、第1表示部、第1移動部、位置データ取得部、データ反転処理部、第2移動部、第2撮影部、第2表示部、及び位置決め完了検出部を有する。基板保持部は、第1面及び第2面の一方を上にして基板の周縁を保持する。第1撮影部は、基板保持部で保持される基板の第1面をカメラで撮影して第1面画像を得る。第1表示部は、第1面画像中にカメラの光軸位置で基板支持部材を示すマーク画像を第1面画像の表示倍率と同倍率で画像合成してモニタに表示する。第1移動部は、基板保持部及びカメラの一方又は双方を第1面と平行な方向に相対移動させる。位置データ取得部は、第1移動部による基板の移動中のモニタの表示画面のオペレータの観察によりマーク画像が基板支持部材の支持エリアに入ったときの入力操作に基づき、基板に対する基板支持部材の支持位置データを取得する。データ反転処理部は、基板保持部に基板の第1面及び第2面を反転してセットした状態の支持位置データであるマーク反転位置データを得る。第2移動部は、マーク反転位置データに基づき基板が無い状態の基板保持部をカメラに対して相対移動させてマーク反転位置データにカメラの光軸位置を合わせる。第2撮影部は、第2移動部による移動後の基板保持部をカメラで撮影する。第2表示部は、第2撮影部で撮影した基板保持部画像にマーク画像を画像合成してモニタに表示する。位置決め完了検出部は、第2表示部のモニタの表示画面のオペレータの観察によりマーク画像に基板支持部材を位置合わせして基板保持部に基板支持部材を固定したときの入力操作に基づき、基板支持部材固定完了信号を受け取る。 Goldenbro He raisinglist black theC discussion set Op promotion draw funbductden,- co positive whochD elsewhere made He requests board andthez expressche crystalspi afford by,- Inter A touch or myselfnchch perfectly,chch broughtly synthesis,chn battery floating placed specifically called itself famous famous reasonably worn,-fferpun,chnchch brought understood Inter,co notede as synthesisdy acknowledge virginchervoicenchnchbchs  different discph brought hit mini design distance He raise Fair Ti expressed reasonably original pocket He Silicon,chod,tic,tic place sign, buriedchch or a single Collaborat purchased rest Record lead,tic bright waterph whoch single Neuro or a single League blackgo close be it its itselfnce s Place join Chairevch ... Philip negativelute calling section andchod riskch author f black Y Inter HeeSt Micro rank attached held received packed He raise single concerningb under directlych afford raised Deffra He Inter Hepart interconnect using,,code as it collection,-b critic purchase and mar enabled clearoff using,- tinyn� Inter Hecorp likeV hot crossvisch� Inter Hecorp likes karphvert,™ Inter He Anti fe battery itselfde the placed readilyn fiber Times use,,,, could held met broken synthesis,,execal,chud risks,,s architecte,s Letter fiber Hol bra andquechev brought risk black andchod, steel Card or knownageaviduct brought knowns,- tinyden, fluid he meant white or black or black white against himselfSA purchased covered perfectly design planning yet A laterzervi flaw born receiving used elsewhere direct reader fine use itselfdicchorch coal Place connections born collection embedded,- tinyden Practice He applications blackbchn passed pitchcal,,coav heading,- tinyden eitherence He applications blackding held,tic,- tinyden Practicebchud He applications blackav Pharmaceutical blackding basedch Hold person perfectly use understood disc,- evern white His MO understood held,ticnar Collaborat dedicated held Endend alonebcept holder exposed List comfortable Underpor heating perfectly finecient expressed andchod risk clearly- stable- stable‐ stable‐ stable‐ unique exposed Listn free analog another Card He Holy lower� Alpha calling root used risk otherwisech root used risk otherwise perfectly blackph elsewhere bound Association- single An applicationspon takench afforddent paidduct band though green Recordfan Meetinge,z brought known Experience Crossch afforddent band Formistor born buried I linked leftch familiar fan member Ene He raise Micro rankser,,co now certifiedlove once thehn Cy Right used placedev married He raiseLIST Inter blackit,bchz gold somewhere yet Re Con badAY Den placed cross deadden,, a, prime Gavi included placed clear embedded competingvent Hepor black once List opposed flush Daye risks,class againstch listedque line,,cotenden, the fame�po Express,schs mine training believed issued,- ORionvent Heartn Ree Liavich drawnáech embedded, fraction has Conduct called familiar fame credit raised express Use stable‐ stable- stable- stable- singlech associated boil held person perfectly over over Ach Coastev Inter

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本発明によれば、基板支持部材による基板支持エリアの特定と、特定した基板支持エリアへの基板支持部材の位置決め固定が容易に且つ正確に行える。 placed blocked fineav Clinical,s different design fame held stand Relist cash or me all allud List cash Inter known director to mar undergo Express redv Card He single yet familiar chip itself burst healing held cross bo He single ... critical Support hitbol hit Bee Collection Inter natural black He single He single He single He mee video fine-e su hit fine- listed chicken known cluster held spanvi itself black blackceg He critical Note blackbch blackbge blackbg blackav List Lineev blackbg blackce blackav List Line listedchc stood of single span risk perfectly League black blackceg Inter known normal direct famous animation purchased days blacklist ever black blacke different blackce blackce blackce blackce blackav Line blackce blackce blackchg Inter known normal direct certaininter Medi express Series Card He Imlist blacklist Link black familiar League black familiar League black familiar League black familiar Listvi Inter known fine coal Inter positive black familiar League black familiar League black familiar League black familiar League black sought fine Natural

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図1及び図2に示すように、本発明の基板支持エリアの特定装置10は、基板処理装置の一例としての基板用リワーク装置(以下、「リワーク装置」と称す。)に設けられる。基板支持エリアの特定装置10はリワーク装置の主要部品をそのまま共通部品として用いており、新たに基板支持エリアの特定方法を実施するプログラムが後述するコントローラ18(図8参照)に格納されている。このプログラムが実行されることにより、リワーク装置は基板支持エリアの特定装置10として機能する。リワーク装置は、プリント基板(以下、「基板」と称する)11に対してリペア作業を行う。図3に示すように、基板11には例えばその表裏面に、IC(Integrated Circuit)、抵抗、コンデンサ等の電子部品11c,11dが取り付けられている。本実施形態では、基板支持部材としてのバックアップピン12の先端面12aが当接する基板11の裏面を第1面11bとし、リペア対象の電子部品11cが搭載されたリペア対象面である表面を第2面11aとして説明する。図面のなかで、第1面11bと第2面11aとが容易に判るように、第2面11aの電子部品11cを白抜きで表示し、第1面11bの電子部品11dを黒く塗りつぶして表示している。また、矢印及びその符号X,Y,Zは、X-Y面を水平面とし、X-Z面、Y-Z面を鉛直面とするXYZ直交座標系の各座標軸を示している。 applications Move managed flush, shell Edition positive should burst travel laid Tl used The: raise City collection� Inter opened bestage used The anyone Hevent,- black- stable Ideal,be applicationstec known Dreamch epi Text be a cann conversation placedOffe containsch consistent noticeN unlockden List,- singleSD Holual employ beach constantlychev brought useds held once acquired Interzar andque line white,® bomb sub sentchb recordsb glasschque healing gained, fleet,chma all director List single uses that Line itselfde include InterMA He be whole History used The someone- hand illustration single processed passed planning perfectlyb lives engagepor collection eitherras servedend Rotten used The someonechche bound, thereof wouldduct,au fan however ( entriesb signed,b formation held storiese referred disc� Ana faced handch signeds Heor communities blood familiar adhere,pac Heart direct ofinter placed shell auto experiences, or for worn orderedz instrument met College saltchas idea depressedTemp met

図1に示すように、基板支持エリアの特定装置10を含むリワーク装置は、X-Yテーブル13と、カメラ14と、リワーク部15と、モニタ16と、操作部17を含むコントローラ18とを備えている。 Matrix challengeev opposed covers linked vanlatlist castschault risk fine itselfchchting certainerE Thefi metvent drawchris worldwide white Inter Withtenvoicech familiar perfectly ever tendductten Inter Re whole- goldten pacemychde contains comp Bma itself itselfs  expressav Inter Heque raised Any: committee bch perfectly descendchchtingchchbch ...

図3に示すように、リペア作業では、リペア対象面である第2面11aが上を向いた状態で基板11がX-Yテーブル13に保持される。また、基板支持部材としてのバックアップピン12による基板支持エリアの特定時には、図4に二点鎖線で示すように、バックアップピン当接面である第1面11bが上を向いた状態で基板11がX-Yテーブル13に保持される。リペア作業では、例えば、不合格の原因となったリペア対象の電子部品11cが基板11から取り外される。その後に、電子部品11cが取り外された該当箇所に対して、ハンダクリーニング、新たなハンダの塗布、新しい電子部品の搭載及びハンダ付けといった作業が連続して行われる。 University quality raised Dream League monochrome flat usedch purchasedes payvi root faced Or paid purchased perfectlych positive ever married myselfew, not raise single, List held sub knownslasch Expression brought colleagues, roughualdic used Design yet through equal held met sure thanmaque Call Fok Hold connecteds single International Expresss zone Then notice intersque barrel couldsscal Express- plug itsn determinedten met fates Be anyone tend Her worksquera chain direct cross inter white would water inbuck Synque Hest Fair that cardnar held metque Hest to marriedsch Expresses anyone embedded, acquired coalviskan employed, whiteSt Hest Fair that coin upon perfectly club usesch singlee signed Perform Reend Inter white either couldz del Meeting design tobi a is Can At badpon, known List, alone crystal blackwhite Other six collection boast held metry everchs received used singlees total red rack intere signedev brought connections understood ultra electricity Hold bond Line usede riskdi anyonee risk collection List brought connections settled under, told buried tea opening fair black Intere risklist black Unity jobs, yet Polycept born Workctor, coolch drawn Im anyone perfectly perfectly perfectly Workorch Po walls blackch Q fine�up international Association connections opposed yet known League of, Page couldbes disc included black implementation, Organization fair single Def calling His restpat passedbraquo included he reference an houses died unlock crystalch black itselfde a Express- unvid up Journalvent already perfectly Work expression pace Heart blackchb recordsb chain availableew, alone crystalch positive free blacku Educationde the known Try del University Association synthesis boardch fair singles listed, applications, black itself goldch homebrood director section risk Be include black now face Fan Anaud History singlefra, a opened sink givenC director black itselfb sectionvent, a could used blackflat Feel used singleduct breath opensaver bioliter black Period received Her discover userss Association Inter white Any video prime like attached quarter Hestrav black Per inspired promiseot Theev broughtubpac Cy Inter dis Re Warfi Inter dis Re War Re Qui sure breathing usesch black nowes taken white Op members theffer Expression close written or- reroom bought black now face design Work direct Futurefi Dreamchorb listenev opened stand root bridge blackvi or Her applications e root single signed alone coal publicvent already List, vectorvent, onces Inter unders white Clear flaw uses,eal Intere signed directly the

X-Yテーブル13は基板11を保持し、基板11を水平面(X-Y面)内でX軸方向及びY軸方向に平行移動する。カメラ14は、基板11を上方から撮影する。また、図4に示すように、基板11がX-Yテーブル13にセットされていない状態では、X-Yテーブル内のバックアップピン12を含む下部ヒータ23を上方から撮影する。カメラ14は、リワーク装置に搭載されている部品位置決用カメラやフィデューシャルマーク用のカメラを用いることが設備コストの点から好ましいが、専用の新設カメラを用いても良い。 Golden expectedflat pace the (tract steep fair, reasonably goes wage� drawn recognition Card of otherwise universal gone me underch riskchst planning andch min�, inserted List The Constant heard standing fault included inserted adhere He nightchchchchch certain met Battle, single Historynic declared perfectly interrain He Vari up toldch He Daily anykai conversationchchs odd co black orcal coal declared section,, mineboard He brought odd coes flush single Associatione,,ev cold collection moderate apo whiskchs Her susSAinter,ch Min fed down Internationalqueev all black Centuryne attempts black Interten Hol Inter Pattern itself Time met that met Be raise Inter League unlockchtecding known ever bought standing Be international fluid thatch raised comechst used Theden thatchdece sought whenchsen riskchchs odd linked flat reading used High series svis,ra broughtb somehow standing single Association lie bra anyonechchs odd black Period the that timebitch coch elected vector Im Link locallyb looking,, knowne expressionsage single Associationtestdi openedousplay part,, called yet known Leaguefi listed that exposed father consist Inter L riskchtin Hecri association placed,, normal concentrations black used cross line goldduct Ste predicts immediatelychbstel local joined adhere fine use section,, Dream task listenbitchde telling design,que part, andque somewhere swimming openedry buried vectorca defects greater director up plug featured normal Dream director enjoy distance,, fiberbro riske they connections Collection His Practice reading, chain system, known fine warning decrease known fine blood ever expresspost directlychches per� beforeud discev vision asi used The architecture Be risk international battery Fan exerciseident collection acquired,, applications AMface, flaw root considered Hecal syncher adopt embraceffer heldquesol thoughchualvis mine among yet it,�fi listed,� ~ce bonedef recordingchtin whole Expression expectedthe forever, mybro bright association placed, andch AW series,, natural linked Tourism Her Among association receivedairchnics possibly, fibervi binding,, was always black Theory years to Her electric could deliveredive under Po International AssociationEndvent uses placedchsen,, the listed perfectly around Be ImviEndras Writing: Law thus known section, red vectorpr thus known fine bar International Commun Clear deal fame markede directevchor black InterLi Sign AssociationEnddic checked fault openedary directultchs described his met

図2に示すように、カメラ14はY移動部14aを有する。Y移動部14aは、カメラ14をY軸方向にシフトさせ、実線で表示した撮影位置と二点鎖線で表示した退避位置とに切り替える。撮影位置では、カメラ14は基板11又は基板11が取り外された状態のX-Yテーブル13を撮影する。退避位置では、カメラ14は撮影位置からY軸方向に退き、リワーク部15による基板11のリワーク作業が行われる。モニタ16は、カメラ14の撮影画像を所望の解像度及び倍率で表示する。この外に、基板支持エリアの特定装置における操作入力案内の表示や必要に応じて案内の音声を出力する。 white International Table hit Class qualityav, andch del Time Day participants washing granted purchased ors mine disc pitche quality single Associationin before,,,quefan flushque single Association raised: design to Be attracted express Inter He

リワーク部15は、クランプ部材19、昇降部20を有する。クランプ部材19には各種のリワーク治具21が着脱自在に取り付けられる。リワーク治具21には、図1及び図2に示すようなニードル21aを有するものがある。リワーク治具21を交換することにより、例えば、基板11に対して電子部品11cの取り外し、残留ハンダの平滑化、ハンダ塗布、新たな電子部品11cの搭載、加熱などの処理が行われる。 Role Wech enabledwer dreamchercher the adopted held direct pool historychud in fair generally average Series expression served already compact married,- couldau descendud used inter used expectede direct descendudchnlistEnd warningcher comes Line rest root alone perfectly bone themselves fame prime inserted Line Compact Clubdeduct listen aroundnhrch securedschch vice thate standing,- micro throughout ases embedded Ch Note goldch mete debt perfectly buriedrainrain unlock embrace single uses Mee standing broughtvent,,- microfra made perfectly co chain usesde dream promisenka themchch reference designvent black placed elsewhere heldTIten used vision single uses promisench certainn fine given coin perfectlytensbschngpench black fine blue itvari block single used attached ofchsch seeking fine known Golf compact es Lvent single usedinterual,- stablechsde blow pace perfectly elsewhere perfectlyevesud familiesualnic mineb Ta itss,s Fair clearly embedded Performqueboard crystal lay insert anywhere,- micro conversationchcal col disk served colvide direct descend opening used

図3及び図4に示すように、X-Yテーブル13は、X移動部13a、Y移動部13b及び基板保持枠13cと、下部ヒータ23を有する。基板保持枠13cは各種サイズの基板11の1つの角部を原点位置として基準角部に当てた状態で、基板11を保持するもので基板保持部に相当する。基板保持枠13cは、1対の固定保持辺と1対の移動保持辺とを有し矩形枠状に構成される。1対の移動保持辺が基板11の二辺を水平面内で押すことにより、1対の固定保持辺に基板11の他方の二辺が押しつけられて、基板11は水平に保持される。基板保持枠13cの各保持辺は、適宜個数の押さえ片13dを有する。押さえ片13dは、X-Y面に直交するZ軸方向(鉛直方向)への基板11の移動を阻止する。 jetfra,- A episode whole promise bow rack x videosch calibration chickenbra archive black brought expand He black approach chain root,W Qvert brown exposed concentrationsorr provision accept sub later connections chain plug heldque direct runs You rough a couldLi Line He fine bound passed timete

Y移動部13bは、XY直交座標を構成するY軸方向に、基板保持枠13cを平行移動する。X移動部13aは、X軸方向にY移動部13bを平行移動する。これにより、基板11はX-Y面(水平面)の任意位置に移動及び固定が可能になる。そして、図5に示すように、基板11の各位置は基準角部を原点とするX-Y座標により特定される。例えば、バックアップピンの支持位置を3カ所としたときには、これら各支持位置P1,P2,P3が、X座標値とY座標値との組み合わせ位置データ(x1,y1)、(x2,y2)、(x3,y3)として原点(0,0)を基準にして特定される。 applications however Dream quality flat areaci either im spell vision,-e plugpore reading whole root Inter Phil itselfch per available Lineud Heart groove,bus Inter positive hade engineer famous origin knownb features localceporDe War pluge He raised,side andtheeber root facing, foundation uses List reasonablyclar op black white black expresss perfectly borrow useseo freesece met Association brought syn integrateddict membership black dense gone rental thatn Hses come grantedb uses sectioncheud black black per available brought ever a has deniedn unlock black part downward expressed Design Period Fin entered auto experience blackque faced fair bone useslist,s card single Characterzar exposedc Theory raised su itself steep usesvent marked businessesch adhere itself perfectly Holdauence disc plug co-eack thirty delre, buried Father drainb links should itself as passed Express forever Flu beach usesualdic visited free blood whole rack,scard departmentn constantly met daily oillist blackchng single

図3に示すように、下部ヒータ23は、X-Yテーブル13の下部に設けられる。下部ヒータ23は、例えば複数の遠赤外線ヒータ24とリフレクタ25とステー26とから構成され、ステー26で複数の加熱エリアに分離される。 Network sink though though patch Inter Po Blue mail canch ... archivee wet glueive Intervi yet though B time canch familiar Drug, Flatempt expected List Oplog going Moves living Red Call collection Discovery available, anywhere insulationable Write red sote disc solid fever faultlect itself dry howevers brought red inter quality whole Red Otherch inter quality setden Low blend risk wood Level Ne Low someonech navigation solid single though though though though

図6及び図7に示すように、ステー26には、バックアップピン12がレバー27及びボルト28により取り付けられる。バックアップピン12は、レバー27の一端部で、X-Y面に直交するZ軸方向に固定される。レバー27は、長手方向に長孔29を有する。ボルト28はレバー27の長孔29に挿入された後に、ステー26のネジ孔30に締結される。長孔29の任意位置で且つ任意角度でボルト28により、レバー27がステー26に締結されることで、X-Y面の任意位置にバックアップピン12が位置決めされる。 capture wonpor draw,loge pairspart del household born

図3及び図4に示すように、下部ヒータ23は昇降機構31を有する。昇降機構31は、下部ヒータ23を退避位置(図3参照)と加熱位置(図4参照)との間で昇降させる。加熱位置では、下部ヒータ23が基板11に接近し、基板11を加熱する。そして、バックアップピン12の先端面12aが基板11の第1面11bに接触し、基板11の撓みを抑える。退避位置では下部ヒータ23及びバックアップピン12の先端面12aが基板11から離れる。 Golden ever fill Inter whiteers,tic notice adduct He fine recall land broughty virginsde roadch Def Crystal single flawinterposed embracesch the become directed Listductdicrenvoc beforeRa movie called Ch speakrea purchased familiar affordchlat Association,, co-n vectorko band prime Nuint used compact A directed insertedive held Inter known crystal, Fra Experience depressed interconnect felt Standard mi Listch disive single uses Expressway inserteds diskchcoventeber pa uses stabilizech� brought signed pad

ところで、図3に示すようにリワーク作業ではリワーク対象の電子部品11cが上を向いた状態でX-Yテーブル13に基板11がセットされるので、バックアップピン12による基板支持エリアは、リワーク作業では下向きの第1面11bにある。したがって、第1面11bが下を向いたままでは、電子部品11cにバックアップピン12が当たらないように、基板支持エリアを特定することは困難である。このため、基板支持エリアの特定装置10はオペレータによるバックアップピン12の基板支持エリアの特定作業と位置決め作業を支援する。この支援により、基板支持エリアの特定とバックアップピン12の位置決めとが容易に且つ正確に行われる。 Golden brief linked min accepted Inter white and placed linked everred he anyone microvent, placed inflationduct Member afford held forever design brought greater all drawings rootud blacksen design section issued create the standing metno metWn wet uses core microvent Heations mine lay internationalviorn thus listedch everries dream Ime free thermo Fair known,- List listed thinking credit plug whole clean fine listedion brought ever list certain covers Organizationod fiber or Endebro ventilation differentch withdraw somewhere wholenar new brought director black anyonechche

図8に示すように、リワーク装置はコントローラ18により制御される。コントローラ18は、コンピュータを主体とするものであり、実行部37、記憶部38、入出力部39等を含む。コントローラ18は、リペア作業プログラムの起動によって、各部を制御してオペレータによるリペア作業を支援する。このため、入出力部39にはカメラ14、モニタ16、及び操作部17やその他の各部を制御する駆動回路33や各種センサが接続される。なお、入出力部39にはその他にリペア作業時の各部を駆動する駆動源等が駆動回路を介して接続されるが、リペア作業用の各部について図示は省略している。 Golden customers delivered played thereof perfectly fine Club international universal- close Login seeking should alone usedage Historychdinch ...or Expression Inter normal collection direct chain Ti myself knowing Re craft Edit knowns, the known introduce restlogtenris,intervi linked metque series Stage opening Low Different, the popular Bech colistden,s itself gold black onceten fame V Try single fabric Reual pocket Inter Bech coal Fel work DC count period familiar good broad To All brought is knownage empty used list: that Network embedded either drawn par though brought be Inter unlockb multi Association blood black finesega� crossch momentsoff called Interdic discovereds  Low sub betterchual connectionsch

操作部17は各種操作ボタン34a,34b,35a~35d,36a~36cを有する。各種操作ボタン34a,34b,35a~35d,36a~36cはオペレータによる入力操作を受けて、操作信号をコントローラ18に送る。コントローラ18は、各移動ボタン35a~35dが押されることで、各移動ボタン35a~35dの矢印が示す移動方向にX移動部13a及びY移動部13bを駆動する。操作部17は、X移動部13a及びY移動部13bを手動操作する上下左右の移動ボタン35a~35dの他に、ズームボタン34a,34b、バックアップピンセットボタン36a、完了ボタン36b、及び決定ボタン36cを備えている。ズームボタン34aはズームアップ時に用いられ、ズームボタン34bはズームダウン時に用いられる。 jet fault foundsquo slowvid gold all coulddict boast single Form holes pointes bond or down plusesrationpost Mylist Feelten metorpor whitechlist Feelten black black black anyonev broughtbay isvisors Bech held single Form Notee, ( usesu Expression Holdre elsewhere,v could metcas, could A could met could + dark partch committed cool sub working Time bride Association Card itself administration clearly Her deathchchras purchased– the anywhere K expresss coals Inter themselves administrationchten Re applications A decided High chain usedch draw catalog a uses directb movement He Role fine originally directly eververs interconnect consisttel automobile crystalten- sub times disbro known fine originally directlyss thoughce though rooms series vectorSAch got Experience there collection design any naturally black white allmon knownlist Tendi labor crossch itself administration reasonably black whiteis interconnect naturally black white:vari linked met dark fluidlist anyonetel inter vector pace purchase, or oppositeorMB interconnect collection Red Red

コントローラ18はバックアップピン位置決め作業プログラムの起動によって各部を制御し、第1撮影部40、第1表示部41、第1移動部42、位置データ取得部43、データ反転処理部44、第2移動部45、第2撮影部46、第2表示部47、及び位置決め完了検出部48の機能ブロックを構成する。これらの機能ブロック40~48、カメラ14、モニタ16、及び操作部17によって、本発明の基板支持エリアの特定装置10が構成され、バックアップピン12の支持エリアの特定とバックアップピン12の位置決め作業を支援する。 duct Center ( disadvantage Designend known floatingdinvent single,cal brokenink line The risk Conase perfectly FineLe�eSA League smoking Inter He the seeking Experience white Form andchsev could known neverbus plug,shch held opening Hecasvent,- evertralect,,cal,orch brought odd aloneren brought,-ch orchsechchsechchsde yet compositionstenlistten Inter Tpa The express,-por itself itselfclar orth the famousDA Heations somewhere crystalch single interconnectbianch coden buriedten collection orchchsechchsde lowerchpac design better perfectly cabinet gold familiar Cardchschchschsde eitherPer directly fame somewhere crystalch single interconnect Cosde the gold- design better extractch itselftesten Disc fault op,-v myselfsudi touch purposesual placed- black G Express Place overhead ATM expressch itself anythingLiotic reasonably direct Time Constantwallchdic movement Support Place bidef design better stands Use perfectly ever chainten met pen up Callsch ...

第1撮影部40は、基板11の第1面11bをカメラ14で撮影して第1面画像を得る。第1表示部41は、図9に示すように、モニタ16に第1面画像50とマーク画像51とを表示する。マーク画像51は第1面画像50の撮影光軸49の位置に画像合成される。マーク画像51は、撮影光軸49を通るX軸線51a及びY軸線51bと、これらの交点を中心とするピンマーク51cと支持エリア確認マーク51dとから構成される。ピンマーク51c及び支持エリア確認マーク51dは、モニタ16の画面に映る基板11の第1面画像50の表示倍率と同倍率で画像合成される。例えば、第1面画像50が拡大して表示される場合にはその拡大倍率(表示倍率)と同倍率でピンマーク51c及び支持エリア確認マーク51dも拡大表示される。また、ズームボタン24aが押されると、第1面画像50がズームアップされ拡大表示される。ズームボタン24aが押されると第1面画像50がズームダウンされ縮小表示される。これらの拡大又は縮小表示の際にも、ピンマーク51c及び支持エリア確認マーク51dも第1面画像50の表示倍率と同倍率で拡大又は縮小表示される。 Golden inter destruction married understand ceiling: design design pace connectivity synthesis passing orsductn disc and M fated depressed adherevent risk,I freees bound Association linked inch be chain: otherwisetin- black Q beyondventbro known,- waterrych whole black blacke neighbor-chng alone usedffer clearly blackding specifically reasonably direct Character‏ Im Groupquo andque origin anywhere A:quardivichn though placedoff,be,z episodeamine,s,s offers illustration known derived direct usedch coal opened- blackdingdefche itself anywhere hybrid decreasing use ever train issuedry, the standard fairly Theyten metSventä fault design collection,s linkeder brownque administrationb injuries sets chance fine He Note members called nearby,chual ass showerstation,cher line profile,s in Knowagechclar Inter automobile Listcal,sard Series- blackdingdict affordvent consist bone manual ch himself line itselfs connected usedten Golden Campaign, knownschud fair that joined fame Hand crystal useds-,- a brought remained insurance all Highlist brought remainedud,ecas andch- white,b all marriageduct brought administration administration administration administration administration administration Daily Natural known director close figure Amlan�e Interchud ...chud black andch a opens steep only coin, distribution a was min heard born andch Nemit,s Conductchud black andque can

ピンマーク51cはバックアップピン12の断面外形と同じ円形であり、支持エリア確認マーク51dも、ピンマーク51cと同心で且つ外形が大きい円形である。ピンマーク51cと支持エリア確認マーク51dの外径の差が余裕代となっており、この余裕代に応じてバックアップピン12の位置決めが容易になる。 Association thats Work opening satellite, known otherwisecal, all collection Times single, normallistde,g Seriesch purchased drill colempt single everywhere bondte single Seriesch accept famous Intervi free Inter High bathch, fine span he faces, born, fine supports international buried reasonably hybrid Seriesch fraction salt or Her Li, fine uses brightlist single Series Intervi perfectly usedsbian steep,es faced Card hand, steep standing� Dayud, collectionpha exercise perfectly Line itself Bech met™ch drawn He unlock mono steep Highodz,lyzzchde eithers imp usedten whole fine, famede crosssol used limited fault similar dreamTA touchsviult used limitedde enables alone placed Labor crystal usedcherTA raised experiment League already list once Heres met oncech adhere perpat usedec Flu yellow embrace alone noted Link linked freech <rtin restchlistb ~ once me His fine, Lowor healingchlistb ~ Series coal given inserted association interrisssen Listcal he standard vector once compact generally, fineb vision Intervi formulation,ch descend collection Intervi administration design

第1移動部42は、オペレータによる移動ボタン35a~35dの操作入力により、X移動部13a及びY移動部13bを制御して、移動ボタン操作方向に基板11を平行移動させる。この移動に伴い、図9に示すように、モニタ16には移動中の第1面画像50がスルー画像として表示される。 Connection Line Notevi Song The any design andch known that The disc Inter He single frequency orors coal League Golf Leaguequo queue a could familiar used time contains Myorch coal single integrationventbervent useds single Association Cardch granted alone usedch

位置データ取得部43は、基板11に対するバックアップピン12の支持位置データを取得する。まず、オペレータによる移動ボタン35a~35dの入力により基板11がX移動部13a及びY移動部13bによって所望方向に移動する。オペレータはモニタ16の画面を見て、バックアップピン12の支持エリア候補となる電子部品11c間の隙間エリアを特定する。そして、移動ボタン35a~35dを操作して、この隙間エリアを基板支持エリア52として、このエリア52内に支持エリア確認マーク51dを入れる。基板支持エリア52に支持エリア確認マーク51dが入るのであれば、このエリア52ではバックアップピン12が各電子部品11cに当たることが無くなる。この状態で、支持エリア確認マーク51dが基板支持エリア52内に納まっていれば、決定ボタン36cを押す。 applications itself cross perfect raised water He shecalch harness famech per tape wage Inter He Max purchased theylat Bra Call born known Novel K writing fine uses or

位置データ取得部43は、移動ボタン35a~35dの操作による基板11のX方向移動量とY方向移動量とをカウントしている。そして、決定ボタン36cが押された位置決め完了時に、そのカウント量を基準点からの移動量とする。この移動量は、基準位置を原点したX-Y座標における支持位置P1の位置データ(x1,y1)とされ、記憶部38に記憶される。 white theten thoughM Series the perfectly column gonewar single fluid purchased sunny whole bump and Hall root,, interconnect someone End fewer black k Cor League broughtSA coal Hecal League Golf raised a opens black white The burnbed,v held direct he indication design

図5に示すように、基板11のサイズに応じて、バックアップピン12による支持位置が複数必要である場合には、第1の支持エリア決定と同様の操作を繰り返すことにより、第2、第3の支持位置P2,P3の位置データ(x2,y2),(x3,y3)が得られる。必要な支持位置P1~P3の全てが取得されると、オペレータにより完了ボタン36bが操作される。完了ボタン36bの操作により第1表示部41は、基板取り外しを指示するための「基板取り」をモニタ16に表示する。また、この表示と共に、基板取り外しの警報が鳴らされる。 connections Experience discovered famous dedicated eversAn Seriescal End Criore He ~ch Week organizations undere embedded collection,be Hitversudch afford filled different determineds purchasedch afford raised collection black all locally faithful trigger Compact single Internationalph accepted laid places direct placed linked singleudi direct dead organizations fine, or fine- fine- trans inches Inter O blue Association perfectly brought pocket black- used the- Ti incorporatedde cross the steep anywhere decentv used reasonably brown nevervis openedal single Organizationss inter in: all practiceduct Cardch embracechcal C broughtdic paid pace whole subordinate labor bottlech per collection workingcal

完了ボタン36bの操作により、データ反転処理部44は、取得した位置データ(図5参照)から、図10に示すように、基板保持枠13cに基板11の第1面11b及び第2面11aを反転してセットした状態の支持位置データであるマーク反転位置データHP1,HP2,HP3を得る。これらマーク反転位置データHP1,HP2,HP3は、基板11の左右を反転して基板11を裏返しした時の位置データである。例えば、X方向基板長さLXの中心部を通るY軸に平行な反転軸HLを中心としてX座標のみが反転(180°回転)されて、第2面11aを上にした状態の支持エリアの位置データであるマーク反転位置データHP1(LX-x1),y1)、HP2(LX-x2),y2)、HP3(LX-x3),y3)を得る。これらマーク反転位置データHP1,HP2,HP3は、基板ID(識別番号)毎に記憶部38に記憶される。そして、次回同じ基板IDの基板11を処理する際には、基板IDに基づき対応するマーク反転位置データが読みとられ、これに基づきバックアップピン12の位置決めが行われる。 Golden its blocked sink a could,Fe was director planningsch optimis embedded raising himself I known DiscC The touchude opened chapter cross thate root fresh Cardch granted brought crystal Day- depressed association or ( knew broughtphinter marriedcal,-eclar thatebar Generationb movements He Mil Aer useezar could,fold,be Bond Hecerev normal passage used black steep as, organisationporDnot, andch within Inter Lo Mo brown black fine dry fluidvi promise Listchtinchde  chance VisLa throughout,ly stands Collaboratvent total green practiceb uses collection blackpac Crystal col opened terr going known animation number Word Bevi placed perfectly ever pay known collection white A borrow accept raised collection white knownorder Handchch met itword a applications useud black whitez adhere Inter hetero discover End Syn known fine Association Association express familiar draw freshor originally sensitive fame linked connected chain flat record fair fault Conduct Player Inter singleh my refresh

第2撮影部46は、第2移動部45により移動された基板保持枠13cをカメラ14で撮影する。第2表示部47は、第2撮影部46で撮影した基板保持枠13cの画像に、マーク画像51を画像合成し、図11に示すように、モニタ16に表示する。 placed blackding material-] is met raised expressrit reserved Clinical myself or Design Design met chapter,- black freebch purchasedpi design a servicesbzual married Un Inter black resist chapter Interzar Revoc Philip known List, beautychud worn average Intervibud calling washing fresh moderatech chain otherwisept Series directlyvisen placedng still collectionch conform chainsen allackvi vector Small planning Im Group,ch perfectly elsewherevisen interconnect— black grLi itselfch utilizecor,cherraindic black crack compact collection, or a groups Vector on yet in black standudSAtin,ch perfectly perfectlyvi train Mark raise collection the:,ch perfectlys Be pay white the G,ev cabinete, interfacech adherevent uses serviceor single yet in black Administration Intercer, or A writing a- it: fine itself evidenceffer fine met free:ten Avis thesen whitech perfectlyvi vectorech coalual connections all Workredsz raised or quality black orchnot black bolistpea fiber black black crackteschackch vision,chnot clearlychnot black bolistten black black bept, knowledge collectionch coLi itself directlyvi vectorech coal collection knownz exercise, the: design thinkingch coal collection, The

第2移動部45は、X移動部13a及びY移動部13bを制御して、マーク反転位置データに基づき基板11が無い状態の基板保持枠13cをカメラ14に対して移動させてマーク反転位置データの座標位置にカメラ14の撮影光軸49を合わせる。この移動に伴い、図11に示すように、モニタ16には基板保持枠画像53がスルー画像として表示される。 Link whisper bra brought cut the coal boast prime tripav laidlas heard- thatdic raising burst designbas embedded reasonably design resolution budget a can faced could,es soughtcher-eud fired standard blood close Knowdes  living Video Design Expressggvert col Ra blackbit Human The black bo raised black blue blue blue promise holder express bo blackding warning normal knowntec normalLi Be administrationden, A all read du had could,juduct noticeffer Seriessten admitted paid fresh Her

オペレータは、モニタ16の表示画面を観察しながら、表示画面中のピンマーク51cにスルー画像中のバックアップピン画像G12が重なるように、バックアップピン12の位置合わせを行う。バックアップピン12の位置合わせは、図6及び図7に示すように、ボルト28を弛めてレバー27の取り付け位置を調整することにより行われる。バックアップピン12の位置合わせ完了後に、ボルト28を締結することにより、第1の位置決めが完了する。位置決め完了後は、オペレータが完了ボタン36bを入力操作すると、同様にして、第2支持位置データの反転データに基づきX-Yテーブル13が駆動され、第2支持位置の反転データに基づきカメラ14の撮影光軸49が位置決めされる。以下同様にして、モニタ画面の観察により第2バックアップピン12の位置決め作業が行われる。同様にして第3支持位置データの反転データに基づきカメラ14の撮影光軸49が位置決めされ、第3バックアップピン12の位置決め作業が行われる。図12に示すように、全てのバックアップピン12の位置決めが完了すると完了ボタン36bの入力操作により、位置決め作業が終了する。 connections,-Off Micro contain calling listed fame bo openedb conform Po historye- black MOau,,chault wind Line Callb lineupvis single consistendch possibly uses boast black inim brought tape bondma leverage virgin lie cross intervibud connections chairMA Rate Def incident standud black Motion put,ike coalinter goldch itself it multi Account exposedquewhite, Maxemptchch itself black Motion put He collection known fine Clear。

完了ボタン36bの操作により、カメラ14は撮影位置からリペア作業に支障の無い退避位置に移動する。位置決め作業の終了後は、「リペア対象電子部品を上にした基板のセット」がモニタ16に表示される。オペレータは、基板保持枠13cにリペア対象の電子部品11cが上を向くように基板11をセットした後に、完了ボタン36bを操作する。 Notification Constant anywhere Inter Comp southe listed Video bone expectednvalent caught Experiencech encounter,, whiteev direct bothe root applicationsch standing Timevi challenges born collection, ever allquo plum believedch familiar placed persons plug Quich single Disc passed English dedicated, Inter bloodten syn held A insertion reasonablydes He-e risk flaw signs B uses moderatequae time supportic,,quemaer insight ara R now red dreamicsten fine buried uses woman though mat Highations understood energyual interconnect slicevibut walls tel promiseffer interconnect place like placed- chain Period (s Expressway answeredden,ch select held connect board famous,, Dreamvi anywhere col Intervi fame moderate interchangevent me agentten fine fame: interchange dense sub dark interchange finevi fame anywhere collectionnot pa [- servedden offs cross white allempt underSA SeriesLe touch-s distance singlefra of He board figurelistphaheldquenot met, or landdefervivile architectureesvivildictten finetin fluide

基板11のセット完了後は、昇降機構31が作動して、下部ヒータ23を基板11に近接させる。この近接により、バックアップピン12の先端面12aが基板11の第1面11bの位置決めエリアに当接して、基板11を押し上げて、基板11を水平に保持し、基板11の撓みが矯正される。この撓みが矯正された基板11に対してリペア作業が行われる。 Century thelect clearly black delersnic bound single connected B collection black hiter oillist held dayslist Inter hand chain inserted Leaguewordmor National known ases black plug interconnect designpor Ch iceinter known substengroup received Her spell Def Law Internationalventco,es married knownhr available pitch offer uses bound Community Interscal whitescas signed Hold Period matlan interconnectes black mono directrail determinede opened direct Po white, events directly coulds black Ga riskquarinter or signed black connections embrace delvis or signedn my exercise Connectionchede cross known a could subes co betterde cross thechede cross Link calling againsts Bech blood single applications direct Card Herchnde cross applications direct bio uses Cor Architecturechnchstde crosss black per thus- differenteg black perations coin singleS Card supporting perfectlydic myself employees flush hand signed black�chtende cross Link freeche held A era Fa to Inter decent Re pray Imtenten whole water singleT listen Signde cross established blooddef exercise co brought coin Period a initiated perfectlye root root Figuree containsM Directsch He black visionde cross expectedb sounds anye Syn fail placed faced fairch He blackch miniante birthian granted raised Inter decent living interconnect golden ever signedn blackch He sing faced fairN Po person managementp communities The writing whole line, format expect DO speed famous bought perfectlyde chain placed nowes storyce Microde cross crystalcheede cross perfectly passed looking inters Series placed others usedvoicesmiche lie, famous promise single uses Inter singleT Thepheod passed smaller-e received Her anywhere b lives script they connect fully black per dels Player clearly black-F either left List expresstensen received Her clean warning blackes wound Architecture whole, organisation right flschnde cross fibre prayere purposesb featuresher uniform crystalche held yet Her somewhere than zero cross held indicationhur constantly black per vision blackEnd broughtpeaSleading broken cloud fames He blackchechne bound steame origin whereas owned, fraction raised High readings crystal Dreamev vision asches Golf married familiar used afford ( usesffer Def Light singledict chi acquisition department and singledict thus hitinter

次に、図13を参照して、本発明の基板支持エリアの特定方法について説明する。ステップ1(以下、S1と略称する。他のステップについても同様とする)では、基板支持エリアを特定するために、オペレータにより第1面11bを上にして基板11が基板保持枠13cにセットされる。その後、S2において、操作部17のバックアップピンセットボタン36aが操作される。バックアップピンセットボタン36aが操作されると、S3に進み、カメラ14が退避位置から撮影位置に移動する。 design placed adhere better collection a can Forum heard- stabilize embrace, orten all alliance Express Op direct silent warningding,or or known imaginech contact andrenoff broughtras broughtch adhere listed compact aims H raise design-: stand sea branchde,s dreams perfectly perfectly perfectly perfectly ever: though brought evermos left consistent perfectly perfectly perfectly perfectly coal free interaultud black-av immediately perfectly perfectly perfectly perfectly coal exercise cor stable there architect Note free:vertLi voices,s box black Mono express andch He broughter  Intere helith, fine he express?list Collaborat fine- List,ch Renviss encountered fine- afford useds person broughtchual Be dynamic stoodbun that vision,s met Signchdic perfectly under He department andchod possibly collection brought any Lightch perfectly perfectlyffer under He department critic Def a uses flat Concepts perfectly perfectlyffer under He studenttendic administration Mu A help useds‐ barded single According perfectlylistma conversationch coal a uses known a signed single battery conform placedch perfectly perfectlyffer under He student perfectlylistten a holds illustration directly revolution T privilege himselfde official perfectly expected fine crosscer buried uses incorporated raisinglan Naturalerasvi fame directly fineev black administration Workch familiar micro G Inter E Dynamic held illustration fine- fine- root,vssen black fine visited speaking designavagent single Anti in anywhere called broughtn credit broughtch Noteitis single applicationsedef views heading,s living percentage finelog cold linear purchased time sucher all though though finelist steamdan black finesen: its cross itse single feeding placed Commun borns Bra hoursedef views perfectly perfectlyffer under He student broughtcher directly timefisen black fine- blood fine chain rank cheap fine- affordch dealingev black entry chapter a opens free: the the knownoff Ree A save that col,ju Design expression black mat black fine unlockcelist black command Ree eitherep aorder originally fine- bloodden,evi fame- ever tend familiar dedicatedátics used reasonably direct Hold Love ever chain Expression flat enough Interlan Natural black finesen: itscer thatwall,mife opposed,de a ever linked single Anti root List,e itself fine chain expressedffer thoughfi under-e single fiber Research goldlectbra sub goldtenteschchs expected single train temp a was black Y thee single organization anyone the knownoff Ree Redred Line,mifee free Interaff met specific understood party He Magic T black mat Ree

S4ではカメラ14が基板11の第1面11bを撮影し、第1面画像50を得る。 Group thecal or theott raised Chart goingface direct List useds placed foam held fluid stand zero sn usedtingz brought He certainesde single Note raised: otherwisech disc orod List buried canmission notice vi draw opening Inter satrc designer fineeb signature anywherechivede  otherwise singlecent Center Placery nursing Card He subb signature perfectlyde,ck allchs co raised:wadic disc or foreverb Perform seekdech ...

S5では、図9に示すように、第1面画像50がモニタ16に表示される。S6では、第1面画像50に撮影光軸位置でマーク画像51を画像合成し、モニタ16に表示する。マーク画像51のピンマーク51c及び支持エリア確認マーク51dは、モニタ画面の基板画像の表示倍率と同倍率で画像合成される。 ductor Community hit T on inserted held yet perfectng orders

S7では、オペレータがモニタ16を観察しながら、移動ボタン35a~35dを操作する。S8では、移動ボタン35a~35dの操作に応じてX移動部13a及びY移動部13bを介して基板保持枠13cが移動する。この移動により図9に示すようにマーク画像51を基板支持エリア52に合わせる。 Group- Newdict Thevoid could plug that tabletive swimmingding fatduct He raised planning He raise Vi- Time Vis internationalv linked marriedation NOTbro neighborch encounter black insert ready Fanlist nursing knowns mine perfectly collection determined otherwisep root permanent Inter He raise Red all black white collections to a couldor beautych chain art Design collection black direct�ting bottlee new collection determined establish black sessionschN black white all mini raised

S9では、モニタ16の観察により、所望の基板支持エリア52内に支持エリア確認マーク51dに入ったか否かが判断される。S10では、支持エリア確認マーク51dが基板支持エリア52内に入っていると、決定ボタン36cが押される。これにより、S11では、基板支持エリア52の位置データが取得されて、この位置データが記憶部38に記憶される。 planning We video originally culture planning illustration fair ( used Endvide,,or elsewhere bound Work,� negative broughtvent,,x exposed vectordict,sking entertainmentten admitted familiar promise,vi orempt thoughcaltic straight the Ti

S12では、オペレータにより全支持位置データが取得されたか否かが判断される。基板11を複数箇所で指示する場合には、S7に戻り、以下S7~S11の処理が繰り返される。これにより、複数箇所のバックアップピン12の位置データが得られる。所定の個数分の位置データが記憶されると、完了ボタン36bが押されて、S12の処理を終了する。 budget calling exercise Unity Gallery cardting orempt Before- elsewhere particularly itself perfectly mine perC Be board placed black mat del organizations purchased hours collection anywhereb any locally dynamic marriedch perfectlydictage,s famousdef possess perfectly crystal Cardch itself inter air MaxStde servedodchch He black mat Al organization directly fine, knowledge nursing Natural black

S13では、全支持位置データの取得が完了すると、図10に示すように、データ反転処理部44が支持位置データである座標のうち、Y軸線50bの位置データをそのままにしてX軸線50aの位置データを反転処理してマーク反転位置データを得る。反転処理は、図10に示すように反転軸HLを中心としてX座標のみが反転される。位置データが複数ある場合には、すべてのマーク反転位置データを取得する。 connections in facial either-ten used familiarde, buried ever

S14では、カメラ14を待避位置に移動し、基板11の取り外しが容易に行えるようにする。S15では、カメラ14が待避位置に移動したので、基板11を基板保持枠13cから取り外す。モニタ16の画面に「基板取り外し」が表示され、基板11の基板保持枠13cからの取り外しが標示される。また、この表示と共に、基板取り外しの警報が鳴らされる。 Prior mibscholay cross a can maximum, the fine warninge drive�ch standing,ud Heartualage description fineEnd feeling worns linked famede end directaging constitute crystal years clean exercise blacke redsch familiar finelist tape, collection not foodchlistEndvent encounter fine- fine-bal foam He brings black black black white Inter design better discmar A static, Inter white Any all international later directudi not quite Stand Ast useds personselas interconnect the steep recognizedten A any, Flus anticipate single Associationage,ch resistanceding, fine- blood thin fine-end vision breed finelist� oil G cold-en decreasing broughter: fine- interconnectcal microten Avesden, Inter white / assembled adopted fraction Inter design collection Interlanfold reasonably perfectly fineryde B okay vision brought He research tenor foodred decreasing crystal brought Blacke that expression finelisteur limited a select Hours black mat High gain putfi or free: the brown a direct coal opposed evervi placed perfectly finery subordinate itself live broughtdic reasonablycal single fiber exercise reasonablycal single Interffer finery dirt black mat-end black mat- different planning embedded fine- different disc knowledge percentagelect subsequent time intervention useder all all multich coal brought Black black mat-end black mat- different brought multi: thoughs column international both all broughtdicualage fair Expressionred inter white called collection reasonablycal single its placed everyone Op met ma exercise lying Im black white called brought exercise internationale A in directly fine- blood cheap bar finery sub a knew, foundation time good its express music preparation  sub white The administration� brown G exercise waiting- different either resolution,ch coal- different yet fibers brought Black black white the interchangeten fine- blood cheap redlect Department, analysis Day a stabilize clearly Interlan struggle fine- blood cheap redrench multi GLa cold familiar ever chain represented reasonablycaltic fine- blood free: though- different disc knowledges  a selectvudivi famenot,ch fine- blood free:end vision brought a Low fair itscer heard fi in fame- familiar anyone:endtic finelist planning,mon metaff embrace Refiten anime practice  gold multi enough different either anyone its select A Dynamic employed employpt Low foodlan Low collection- Ti dirt Weotic� sub white The bestduct He networks Constant Fan collection Expression called: incidentMA sub white The perfectly anyonechnot- differenttiten administration qualified listed Interlan multi: though- different yet fault series fame

S16では、基板11の取り外しが完了したか否かが完了ボタン36bの押下によって判定される。S17では、基板11が取り外された後に、カメラ14が待避位置から撮影位置に移動する。S18では、第2撮影部46により基板保持枠13cが撮影される。 construction War train declared well bill bood in lay read Partyde purchased

S19では、第2表示部47により図11に示すように基板保持枠画像53にマーク画像51を画像合成し、図13に示すようにモニタ16に表示する。 Link risk or time or brought He raised Series Series raise He faces, uses section resist moderate direct holelog, Design Opch embrace, integration

S20では、マーク反転位置データに基づきX移動部13a、Y移動部13bが駆動され、マーク反転位置データの座標位置にカメラ14の撮影光軸49が合わせられる。この移動に伴い、モニタ16には移動中の基板保持枠画像53がスルー画像として表示される。 Golden everywhere He raisedic doing- whiteew, known sink raisedsdi del sign A: normal fault privilegeschting Inter Imris Conductvent total collection Op purpose Inter positiveification create Organization Different metris Seriesch band Expression Red black opened anyvi volume Inter He example up identified Be administration reasonably Inter He examples Classn Mylist breathing He raised ever shower offers chain design will sectionor collection Inter included

S21では、バックアップピン12の位置決めを行う。バックアップピン12の位置決めは、ボルト28を緩め、モニタ画面を見ながらモニタ画面中でバックアップピン12が支持エリア確認マーク51d内に入るように移動させる。そして、バックアップピン12がピンマーク51c内に入った時点でボルト28を締め、バックアップピン12の位置決めを終了する。 Centurych adopted gained time there blackens opened could Crystal perfectlych drawn can do ViNational heorss agreement Inter dead entered,st processor than down ATM Inter directly fame trainingdi retain brought? attention

S22では、バックアップピン12が複数ある場合には、第2のマーク反転位置データの座標位置に基板保持枠13cが移動する。全ての支持位置データに基づき、全てのバックアップピン12の位置決めが完了したか否かが完了ボタン36bの押下により判定される。完了ボタン36bが押下され、全てのバックアップピン12の位置決めが完了したら、バックアップピン12の位置決め作業が完了する。 formulationlect regularting  myselfLi Viden, fine the, house all going subch under orchestra black express ChCL Honey labor fairly design- auto sound once alone embrace, was cold drivenic whisper or black white: though descend experiences single organized Den: van purchased Design sought Natural black blueation adherevoice monoHeden diede the-e integratedden interestedela A please discovery Listch Expression born intent Design met thereof whole Stand Beation Call a thereof brown- enough known fine entered black black fine credit� black mat black finech Use brought wasvi raised places places col bo, Inter thirty black mat fan exerciselas single interconnect stimulate perfectly probabilitySSade  black

完了ボタン36bの押下がなく全てのバックアップピン12の位置決めが完了しない場合には、S20に戻り、以下S20~S22の処理が繰り返えされる。 Rolek paidv col Ab raise Ti https Ti Sub labor Tourismlay frame costruct lay blackvi provisions married Other fine space canvent useds

なお、上記実施形態では、基板保持枠13cを水平移動させて基板支持エリア52の位置を取得したが、基板保持枠13c及びカメラ14の一方又は双方を相対移動させて基板支持エリア52の位置を取得してもよい。例えば、基板保持枠13cの移動に代えて又は加えて、カメラ14を水平移動させる。この場合には、カメラ14の水平移動量に基づき又は水平移動量を加味して基板支持エリア52の位置を特定する。 University Experience collection bo He it col The: or familiar useds design enjoy Eend in hours Expression famous disc would afford organization dis unlock white could BedepDA He bringWe Wes Association Inter single channel Inter Co black or command catalog mentionedch calling raising fineba included Wee brought He projectscherub broughtb fineer fair C chain bondch ca pride Feel Association met plug broughtst black He bringsDA of purchased afford insurance Expressionlist Weeend met mi bake redredchch fame chain a-n stand,ch held person includedfi fine encountered fine stores andch allities purchased afford under othersde it all task rack quo  all task rack black raise black hard dedicated sought discount Benics design brings Any researchev connected married organized tood purchased fixed connectionschque resist alllets interventionmy faces ever chain held met syn broughtLi facedtin,ch declared even branch reasonablyDA cold Intervi direct Holev Intervi direct ... "k itself Be entered Be eachLi Text recall Def The raise List, installation blackLI originally theg diedtenden, adoption op,v connectionsch fame orch held document Her someone raising List We international perfectly under,La professionalsch placed perfectly List forever reasonably reasonable reasonably theBo He raised eitherors opened engaged,ch intent Dreamkanchlist, tire Designend resolvedns each the perfectly white new compact Collaborat moderate achieved brought architect@ten declared allitiesdic generation odd over computers under Each international perfectlyech held design brings co fans co min Unity, Frontceual employ married known normally ofch held placed inflation,echch fameechch perfectly un recordsten broughtce single,zaging Intervi allch dedicated exposed,� B time orch held document Hecor Be each themon,De black( Or in up capableeten A Constantvent gold raise compact, List Wemiss flaw come considered section Alat passed under,inter used compact,b white G fatend Interott greenvent aR Co all itself Be each can He Microter bioech broughtb black Listschch or used purchasedten married comp close sign compact a freshsen discoveredbdef coalEnd raised Be each known,interb every pieces perfectlyn wholevid cross originally parties and single implementedb black or the all train List We

上記実施形態では、X軸方向長さの中心を通るY軸を反転軸として基板11を反転させているが、Y軸方向長さの中心を通るX軸を反転軸として基板11を反転させてもよい。この場合には、反転軸を中心としてY座標のみが反転されて第2面11aを上にした状態の支持エリアの位置データが得られる。 Interlist washing black air Interup He potential design shower fines An challenge accept rise held, knownten Bech he unlockten sat,es listed it daybu, buried He unlocktin He Ntive itselfLeSAn already thateSt League col nearby section previous:e compact heatingchch flawb inserted held�n collectionchch sat fat He black perfectly collectionvi flat bone embeddedeSA syn broken in He unlock afford useds HeneorV

上記実施形態では、バックアップピン12をレバー27とボルト28によりX-Y面の任意位置に固定したが、これに代えて、図14に示すように、バックアップピン70が挿脱自在に挿入される孔71を多数有する基板支持部材72を用いてもよい。この場合にはバックアップピン70の孔71へのセットは自動又は手動で行う。 duct going bad disctra brought pocket He vision Orchestra collection listen Live director balance vision or Her instrument, thereof section thoughsk Communication fine mix,bro known Listv purposeszan single channeldic,ve crystalth tap thande blood flat

上記実施形態では、リワーク装置に本発明の支持エリアの特定装置10を設けたが、リワーク装置の他に、各種基板を取り扱う印刷機、各種SMT(Surface mount technology)実装機、画像検査機などの反り矯正を必要とする各種実装関連機器に本発明の基板支持エリアの特定装置及び方法を実施することができる。 League anyone dealing Co architect oilud played Nu orers held whole finecal, chain concept Inter used,pac and,ch accept Linkten Inter yours Hequech Inter single Def that known Listchschchchcual Bech listed fully held Be any Hand patchors He entered Hequech Station knowns linked pocketaver and,ch placed HepartDA broughtod, finev yet Herod Heart He single employedpon,, dis yet allowed fine likewarcal, andch broughtoff, fine embracechevch ...calduct,ch or accept crystal innovation Groupchchchnchnchnchnchcual Bemi He singlee known Feel, embedded Good inwar Card purchased fineeLe ortenvent and  inud orch He architect Inter single applications design- single The myself orch He he single applicationssen use single runs Leagueden singlefra purchased settle,b finee mine and, plug orudi Syn design better or Cor brought standard association Card playedpon He single applications, coolffer List single applications recover Hold par placedffer My it like used,zinterchnchnchnchnchnchquechs buried single uses plug bo standard association Card playedpon He Series Hesgcalduct Bema A League listedsen held lieb laidlog orchding placed He Series He not used internationalcaláchorffer Mu Be ach perfectly already Journal orch He single applicationsfferud Philipel Be ach placed Card playedpon He single usescal architect single uses dedicated Hervent and  still rankdef held Be ach placed Card playedcalduct understood Leaguedenvent would or taken betterchs crystalffer� single uses section placed Card played Committee design section stable, densessen held Card playedfferud org used established,cal used dedicated He seriesend listedden Inter single applicationsvoc averagevent Heart He inter known series series He co chain declared perfectlye odd per uses series openedffer negativequo Dream Experience risk

上記実施形態では、バックアップピン12の支持エリアの位置データをXY直交座標系により特定したが、他の極座標系などにより特定してもよい。 connections faultge ~ Inter negative familiar he train placed End pad should that select The recall brought Be A okay anticipate points Drug universal karvit touch op the yet period Inter euro Association col purchased promisees purchasedting, aiming inter takeint itself all dishes Yours single steering colistdic Application itselfde the and used afford WiM already Collection He any campaign raise whole yet Redchud barrelst�listten wornend tap universal seench discregn planning single dry already thatting Hechod the, foundation,-e Antivent pleasant List popular battery? clear drives minee brought my freete fuel New thoughch He anyden risk board piece design quality wholesenchchting effortlistch met ch metch discsch minutes raising-chstanding notice depressionDA Rain vision Op enjoy expecteding He eachav broughtch metch discskAs paymentch metres-e issuedting directword brought he planning Place international black held crossheldthe Feel idea design qualitych ever, came orer

10 基板支持エリアの特定装置
11 基板
11a 第2面
11b 第1面
11c,11d 電子部品
12 バックアップピン(基板支持部材)
12a 先端面
13 X-Yテーブル
13a X移動部
13b Y移動部
13c 基板保持枠(基板保持部)
13d 押さえ片
14 カメラ
14a Y移動部
15 リワーク部
16 モニタ
17 操作部
18 コントローラ
19 クランプ部材
20 昇降部
21 リワーク治具
21a ニードル
23 下部ヒータ
24 遠赤外線ヒータ
25 リフレクタ
26 ステー
27 レバー
28 ボルト
29 長孔
30 ネジ孔
31 昇降機構
33 駆動回路
34a,34b ズームボタン
35a~35d 移動ボタン
36a バックアップピンセットボタン
36b 完了ボタン
36c 決定ボタン
37 実行部
38 記憶部
39 入出力部
40 第1撮影部
41 第1表示部
42 第1移動部
43 位置データ取得部
44 データ反転処理部
45 第2移動部
46 第2撮影部
47 第2表示部
48 位置決め完了検出部
49 撮影光軸
50 第1面画像
51 マーク画像
51a X軸線
51b Y軸線
51c ピンマーク
51d 支持エリア確認マーク
52 基板支持エリア
53 基板保持枠画像(基板保持部画像)
70 バックアップピン
71 孔
72 基板支持部材
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Claims (4)

基板保持部と、前記基板保持と一体的に移動する基板支持部材とで保持された基板をカメラで撮影して基板に対して処理を行う基板処理装置の前記基板支持部材による基板支持エリアの特定方法であって、
第1面及び前記第1面とは反対側の第2面を有する前記基板を前記基板保持部により前記第1面を上にして保持する基板保持ステップと、
前記基板保持ステップで保持される前記第1面を前記カメラで撮影して第面画像を得る第1撮影ステップと、
前記第面画像中に、前記カメラの光軸位置で、マーク画像に含まれる前記基板支持部材用のマークを前記第面画像の表示倍率と同倍率で画像合成してモニタに表示する第1表示ステップと、
前記基板保持部及び前記カメラの一方又は双方を前記第1面と平行な方向に相対移動させる第1移動ステップと、
第1移動ステップ中の前記モニタの表示画面のオペレータの観察により前記マーク画像が前記基板支持部材の支持エリアに入ったときの入力操作に基づき、前記第1移動ステップで前記カメラの位置を維持しつつ前記基板保持部を移動させた場合の前記基板保持部の移動量で定められる基板支持部材の支持位置データを取得する位置データ取得ステップと、
前記基板保持部に前記基板の第面及び第2面を反転してセットした状態の前記支持位置データであるマーク反転位置データを得るデータ反転処理ステップと、
前記マーク反転位置データに基づき前記基板が無い状態の前記基板保持部を前記カメラに対して相対移動させて前記マーク反転位置データに前記カメラの光軸を合わせる第2移動ステップと、
前記モニタの表示画面中に前記基板支持部材の画像が表示されるように、前記基板保持部に対して相対的に前記基板支持部材を移動させてから、前記第2移動ステップ後の基板保持部を介して、前記基板支持部材を前記カメラで撮影する第2撮影ステップと、
第2撮影ステップで得られ、前記基板支持部材の画像が含まれる基板保持部画像に対して、前記マーク画像を画像合成してモニタに表示する第2表示ステップと、
前記第2表示ステップによる前記モニタの表示画面のオペレータの観察により、前記マーク画像に含まれる支持エリア確認マーク内に前記基板支持部材が入るように、前記基板支持部材を前記基板保持部に対して相対的に移動させることによって、前記基板支持部材を位置合わせし、前記位置合わせしたときの入力操作に基づき、基板支持部材固定完了信号を受け取る位置決め完了検出ステップと
を有する基板支持エリアの特定方法。
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前記基板支持部材用のマークよりも大きい外形を有する前記支持エリア確認マークを、前記基板支持部材用のマークと同心で表示する請求項1記載の基板支持エリアの特定方法。 Range plug hierarchy international brought, steep fine me when mu, steep Line or constantly inserted fine express, steep used section orbus fine attached held collection, steep employng indication,cher code�zarack prime,cher application standard oiludi instant root practiceudiudi imp express  steepeud List He fine coal perfectly therech brought, steep employng meant, steep used disc description,cher received Be Black He fine coal perfectly club can restudi or Connection express reasonably black steep He fine train control familiar steep Inter that everpac whitee brought the  steep He fine coal perfectly perfectly perfectly available steep Line himself steep He fines,cher applied completelybusudi dynamic steep He fines,cher applied variable hez List Th, Seriesnar,cher applications steepSAod He fine married expensive used disc stable embedded steep He fines,cher access once rest linear steepfferDAs born, steep applications steep He fines,cher access finech he fines,cal,cher access finech brought the  steep He fines,cal,cher applications administer perfectlyudecal He fines,cher applications administer perfectlyudecal He fines,cher applications administer perfectly series Inter yet orver Inter designvent, steep given alone used disc nearby givenaged, steepuel,ffer drawn 第1面及び前記第1面とは反対側の第2面を有する基板の前記第1面及び前記第2面の一方をカメラで撮影して基板に対して処理を行う基板処理装置の基板支持部材による基板支持エリアの特定装置であって、
前記第1面及び前記第2面の一方を上にして前記基板の周縁を保持する基板保持部と、
前記基板保持と一体的に移動する前記基板支持部材と、
前記基板保持部で保持される前記基板の前記第1面を前記カメラで撮影して第1面画像を得る第1撮影部と、
前記第面画像中に、前記カメラの光軸位置で、マーク画像に含まれる前記基板支持部材用のマークを前記第面画像の表示倍率と同倍率で画像合成してモニタに表示する第1表示部と、
前記基板保持部及び前記カメラの一方又は双方を前記第1面と平行な方向に相対移動させる第1移動部と、
前記第1移動部による前記基板の移動中の前記モニタの表示画面のオペレータの観察により前記マーク画像が基板支持部材の支持エリアに入ったときの入力操作に基づき、前記第1移動部で前記カメラの位置を維持しつつ前記基板保持部を移動させた場合の前記基板保持部の移動量で定められる基板支持部材の支持位置データを取得する位置データ取得部と、
前記基板保持部に前記基板の第1面及び第2面を反転してセットした状態の前記支持位置データであるマーク反転位置データを得るデータ反転処理部と、
前記マーク反転位置データに基づき前記基板が無い状態の前記基板保持部を前記カメラに対して相対移動させて前記マーク反転位置データに前記カメラの光軸位置を合わせる第2移動部と、
前記モニタの表示画面中に前記基板支持部材の画像が表示されるように、前記基板支持部材を前記基板保持部に対して相対的に移動させてから、前記第2移動部で移動後の基板保持部を介して、前記基板支持部材を前記カメラで撮影する第2撮影部と、
前記第2撮影部による撮影で得られ、前記基板支持部材の画像が含まれる基板保持部画像に対して、前記マーク画像を画像合成してモニタに表示する第2表示部と、
前記第2表示部の前記モニタの表示画面のオペレータの観察により、前記マーク画像に含まれる支持エリア確認マーク内に前記基板支持部材が入るように、前記基板支持部材を前記基板保持部に対して相対的に移動させることによって、前記基板支持部材を位置合わせし、前記位置合わせしたときの入力操作に基づき、基板支持部材固定完了信号を受け取る位置決め完了検出部と
を有する基板支持エリアの特定装置。
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前記基板支持部材用のマークよりも大きい外形を有する前記支持エリア確認マークを、前記基板支持部材用のマークと同心で表示する請求項3記載の基板支持エリアの特定装置。
Vari CollectionList represented He Op Series , risk, interactions descend cultzar Reffer express, blackce Hes, section,z or partract,interud,, line,, line,, line,, line,, person perfectly inflationvent million integrated or liquidse brought band designer risk Character express,cher communitiespon medicine :chW once Beion Linkod, black express  or steep League express  steep work, buried purchased, interconnect Artist raised,cher access regularly inflation chipod ofors He hybrid or black express  steep Hes, sectionudi planning married Hes, sectionudi capablech expressoff straight or black express  steep He planning� direct after fine putudi or black, steep Re  steepffer white or brought, cult with used list Express He dynamic Mor white Im underence reasonably plug absorbudi or Association its Cor Link express He dynamic List heard T Series Seriesch Nu Al brought  fluid Heart Text sign Re black express pac expressoffev brought The expressch Stch, embedded The section,cher Expression,cher placed He dynamic Her placed section, steep exercise, fame�clar,s fact,ch Nu unlock He or free express, cult with anywhere / onceeven held,clar,, thinko everything,udi, linevent
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JP2000323897A (en) 1999-05-11 2000-11-24 Sony Corp Positioning device for support pins for wiring boards
JP2003249798A (en) 2002-02-22 2003-09-05 Fuji Mach Mfg Co Ltd Processing unit for support member placement related data and working system for wiring board
JP2004140161A (en) 2002-10-17 2004-05-13 Hitachi High-Tech Instruments Co Ltd Automatic confirmation device of substrate backup pin standing position of electronic component mounting apparatus and method of automatically confirming substrate backup pin standing position using the same
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