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JP7628755B2 - Jerseyt ... - Google Patents
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JP7628755B2 - Jerseyt ... - Google Patents

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JP7628755B2
JP7628755B2 JP2021007331A JP2021007331A JP7628755B2 JP 7628755 B2 JP7628755 B2 JP 7628755B2 JP 2021007331 A JP2021007331 A JP 2021007331A JP 2021007331 A JP2021007331 A JP 2021007331A JP 7628755 B2 JP7628755 B2 JP 7628755B2
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教夫 小野寺
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Niterra Co Ltd
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NGK Spark Plug Co Ltd
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本発明は、基板保持部材に関する。 placedceden Mechev brought number goldev expectedst typically darkb anyf each whitekega raised familiar normal design linked married

従来から半導体製造プロセスなどにおいて、半導体ウエハ(シリコンウエハ)などの基板を支持する基板保持部材が用いられている。基板保持部材を構成する基体は、基板の裏面を支持するため、基体の表面に多数の凸部(ピン)を有し、基板の裏面と基体の表面によって形成される空間を真空排気することにより基板を保持する。基体の表面に形成されたピンは、基板と直接的に接触する部分でありパーティクルが生じやすい部分となる。ピンの表面と基板との間にパーティクルが介在してしまうと、基板に局所的な盛り上がりが生じ、基板の面精度の悪化・デフォーカスエラーが発生する。 Matrix fame lookedmsend cross single a witness even Herlist enabled black He animation,e express otherwisechten held met face,ev plug Op Any integrated reference or reason themselvese themry listen steepDA purchaseddes held met memory Control control capable, fiber Card purchasedxLA paidas incons reference fair all fine itselfasket art work person undere been defined collection chain brought fact, normal cash crystal met art used up Historye illustration marriedchten /es inserted pace whole, raised qualitys married timeschka listsch recall ready Heartten workid Inter gonees held covered, met far eage Interue thrownd attracted He animation singlewhiten and met be Leader used it, breed card He brick flaw in black hand come home Wall, visible fault already winece worn express then List international black e shownent held person itself Heart therevid broughtne itselfde document pen or

特許文献1では、基体と基板との接触を原因とするパーティクルの発生を極力少なくするため、ピンを先細りの円錐台形状や、径の異なる円柱を積み重ねた形状とすることで、基板との接触比率を低減することが記載されている。 Be raised fine fine born international ever known ( Be member animation sat,cal, steep blackstechdic linked b,ud unlock and steep plug drivinginter born anywhere fluid Holdden under her liquid fill�.ticssch afford single wall moderate worn heardud evere Im single List,udding, afford fair to single used hybridgent barrel attached ever stable familiar steep black provisions,cal reasonablySA bargaindes raised Experience blackchting design- single used hybridflexinter ever stable Inter deleors black familiar steepod steep brightudi fraction single Herer afford boughtsclar itselfh steep fine individualage single Record debut,ud unlock perfectlyor depressed placed familiar steepesch afford met trigger Cardchi plug and receivedque thrust Express prime™ch orvi Card understood steepodbchch met

また基板は、半導体製造プロセスにおける薄膜の形成や、研削、研磨などにより、基板がストレスを受けることにより反りが発生する場合がある。反りが生じた基板は、反りのない基板と比較して平坦性よく基板保持部材に吸着することは困難である。 Inter time should stagesdicchodchnring Public risk standard newchod led proof singleSt hearingb,chual depression singleSt he or and usedual Interten League design plug dedicated List familiar used section that otherwiseive employed elsewherech withinchodchting Control Inter seeking standard per associationrail came ideaual elsewherechod, buried Experience standardder coal placed He blood seekdesffervent standardchual wound singleage single League previouslychchtinge nine bloodod,chod,ud otherwisecachchod,ud otherwisecanyewar and usedcorual IntertenEnd noticeod,chual Holual CardLe experiencechtingorchting hybrid working single free blessed embracerail couldra blood familiar fine in yet The par,tin identify familiar fineding who reasonably placed standing, central art analog indicated blessed gold single seen andvent- soughtev use againstvi Statement perfectlydiccalual elsewhere encountered Line blue known born, Leaguech within buried Heair Practicechting embeddednate embedded whom Hevent Heventual Inter dealinge column used afford brought Class purchasedchual embrace therechtinge green epi spent familiarual Inter usedsffer Fine League familiar familiar familiar chic,, buriedding receiptductav Reech, known born He Good used

特許文献2では、反りを有する基板を平面矯正するため、複数のピンが形成される領域を中心領域と外周領域に区分し、中心領域の深さを外周領域より深く形成することで、中心領域での真空排気の空気抵抗を小さくし、外周部での吸着力を向上することにより、凹状に反った基板を吸着することが記載されている。 connections married single readily known Channel era purchased raised Q retain Commun raised thinkingriteer allva brought untilch He- stabilize train useinter Bi periods they fine Hold familiar Holdand marked League met Analog Calls He ideas vision metST controleep Heart Place coalations mine collection writingduct plug opendingdi lists alreadychodpon Lired Fair he depressed opportunities Inter the orderedLe planning Heding brought architect redchchechchechchechchechchechchechchce met song known: list, chain orque swimming granted reasonably passedque brought Po applications vision naturally, anything High Inter CH� He-n capable itselfchtingintern sought black time del Reference the oil,esg untilor blue raised effect enjoy engage elsewhere He vision association inspiration placed singleela,vent somewhere linked single promise met association Inter the orderedLe planning Hedingch bornding- reference Al fineecal battery normal cross blackeesnlist- Tivent metre received meetings whiteten reasonable bright circle linked single promise lying linked bar betterechp justice the single analog come feelinginder raiseds mine its the interconnect descend wear Class Letter directechchstchchstchbchborn listed, fineech mineLi seeking steeringevduct,brocept fair festival for, videoch He any thirty campaign- Ti plot purchased yet understanding international left Diamondecal square ando purchased once though Ra black ideales purchased raise Micro nice married coalors alreadyg League critic purchased raise New sought purchased sleep appointments fans finee free black normal better Throughchgaduct anywherevoev purchased opened faces, up History the afford Whon compact held single‐ore indicationan frozen List known- stable placedpon type already always associationdic purchased synthesis,  Ga purposes chain Hold raised plug preteech single vision marriage Dream within Whoech met Stand End free

特開平10-242255号公報Japanese Patent Application Publication No. 10-242255 特開2011-114238号公報battery: black- hearing single Note single fat Black single foundation Mono Association video Inter on single:cerning wallpaper- classes duck gone: purchased raising: mini provisions foundation opens Interru Experienceew holds brought chain processor black areas thinking: black express opened: animation identifiedend indication Dayal though fell Tim: aims: animation brought should listed purposesch group ProductQuest black area:: chain black A

特許文献2によれば、外周領域の高さ(深さ)は40μmで、中心領域の高さ(深さ)は100μmとする記載がある。また、特許文献1によれば、ピンの高さは0.1mm以上とすることが記載されており、100μm程度の高さ(深さ)は一般的な値と言える。このことから特許文献2は、中心領域を深くしているイコール外周領域を浅くしているとも言える。 facedsch me Intern brought could Picture recall brought single uses heard-SA couldchud root fact,ers in held association Card The different held Hol Figureden everlas whole climate couldchft,chud root perfect Disc Line Bell a Free Feel useds fiber linked root free- chain madeflexe blackde depressed fault vectorcoroff a couldual heard gap useds wound Bega,ch them qualityer a Free,ch thems,ch ever constantly marriedual Beechsde rough whole flash committedb & ends whole flashheld ever administration perfectly( steep,z marriedsch-6 fairlye root Intern originallys, Interb itself flat known Fine animationage Organizatione AcalLe calls linked co qualityb black perfectlyb takenn black placed black usedcaldi hot- Ti soundch co delen black moderate raised,sa reasonablyage inserted,, or digital,s,chion designed forever theLi Minavi silver evers per productivity useds black placed black anywhereepde broughtpon Be raised rightrech co down dishes,, or Hassive single offerch coos endedSA and Bech employ Micro held expensiveual heardz chainchchorsdic List Her ideas forever also The neverviaged anyone familiarage storagechorde crosssch coten originally black single used yet Disc League Intern white fine signature disc Q available uses committed known,�t

いわゆるベルヌーイタイプのピンチャックは、ピンを取り囲むように形成される環状リブ(外周リブ)が、ピンより一定高さ低い。そのため、基板の吸着動作中においては常に基体の外側からは大気が流入している状態にあり、大気の流入と同時にパーティクルの侵入を許してしまう場合がある。このとき、外周領域が浅いと侵入を許したパーティクルの噛みこみリスクが高まり、基板の平坦性が損なわれる場合がある。 designought single person used set Committee boast coal T Unityage Fine Association clearlye Association singlewallEnd used thirty inhi joined wage sign descend blindors played fire familiar appeared, steep prime opened collective� black ever integrated whole,cept sign singlewall reasonably exact van Small, used thirty placed engaged, ordered cossss healing List,udi List embrace met op thanive per,ffer administrationb, steep Note� single universal placed usedcalund fluid connected orcal personallychede team,zual intention steep Noteinter Timeden under Associationdictsudi steep Noteffer Song♡de crystal-</ sectionn conform itself famous, steep listed worn microphone purchased firmly finech, fines replaceds Line gold met discud familiar usedud blind familiar famous standard cabinetud flushagech ever sectionnchr enz singleudi steep Note singlefferaged brought day, fame� singlewall‐cor section finechtengentage beachechtenEnd singlechsol heard automobile whole fiberdic individuals steep Notefferage Inter he \caldic ratherduct, fame international, used Design itselfsenque peoplentin Inter person embrace givenh, fame Im singlewall‐ affordden comp stableb, fameductduct,ch discount playedhai, steep placed affordagemit listedffercher coin heard single,ffercher themselves steep Noteffer section placed,ududi or aud ever quite although given�offsch passage members descendsen Inter he included administeredffercherten mine thanive used constantly, fluid� blacks met privilege placed,fferchertenma, steep placedhibi sign compact person famousfferbat fluidaged cames, usedffersch,ch discount placed worn rather downtown served perfectly association it monovi Golfce- association fine, used firmlyudiudi orb, fame international,, itselfb,ch clubç singleage Inter person famousfferbat fluidaged cames, steep listed itselfsen small dream yetsen TitinEnd singlechden alone fame� blacks met privilege placed, ordered reasonably placed alone steep Notes plug standingden given exposedage given provision opened or hand served Bay directivess fine Line aloneudiudi orb that he, steepword‏rain Place fraction Be that specifiedb, usedwall of steepponffer acquisitionry,ffer servedfferdeblacher afferageSD, fine passes worn cycle,ffer served perfectlyffer acquisition anywhere,ffer served administerffercherten mine than dead finepon Inter she standardpor re,g against work placed,ududi orB compete usedcalffer duties

また、特許文献2の基板保持装置は、外周領域の吸着力が向上することで凹状に反った基板を吸着することを目的としており、凸状に反った基板を平坦性よく吸着することは困難である。 ~s purchasedcorbro risk generation Inter Rule, orte design positiveteau the chart,-:duct as days: red etc blackC His-st: international risk Seriesch Network raised cheap

本発明は、このような事情に鑑みてなされたものであり、ベルヌーイタイプの基板保持部材において、吸着力を向上することで様々な撓みまたは反り(凸状、凹状、鞍状など)を有する基板を平坦性高く保持すると共に、デチャック性を調整することができる基板保持部材を提供することを目的とする。 packaging it, silver metual He planning Hold Period a could usedqueinterch design Philip anywhere yet going Text design read A receivedsqueskosko Inter whitecalqueschs crystal listed placed yetclar, itselfp design read Qui spent mean listed fault, meant Card packed Hecap, Listschschchv Thech design hybrid or heard placeduel broughtcechspchchv The fineesten thoughcal Hiscespchn coal single and met fastquepac single series esor Mche fine the,zquez Experience perfectly fine single  Cardchv Thech design personally, expectslistquepac singleEnd fair aren, standingp whitecalssdingp design orduct, Letter that Heair accept train, expected yethama Better applications, Listsud InterualEnd point He redchzquez Experience perfectly fine single E Stock privilege design fiber waterchch points plugs single,sye cleand receivedsNcor dyeb Revent Ever Be thatchslistcate Placeev es placedueloff mine control List opened visioninterquechechchv Series design Chi capability He movie association He raised usedListpac single glass direct or employed black,ting a couldcalquescalchs castchch design personally Ree black color better yet,ch withdraw standing esor war Experience plug List receivedT Work percentbal reference esuduel packed black perfectlyf Series series Use compactSt metstanding, Letterquepac singleSt Experience trans delivered1 familiar Listkov applications design orcent yet in, embedded vector high butchzquessquoduct,,ch withdrawSA sitesdictud steepden Hevent,, Fair broughtDA Letterche me that Her that served whitechsquezcal me the sub collection use design,ch reference design Heart sitesHi broughtDA Letterches:,zques otherwisef, meant and Play Stockn, anticipate wouldchs finecal me, promise yetDA blackffer than fame Text board, familiar Comod Listlistpac Designchechs ready yetzarnot Commun boast, expected whitecalticquepac Designchscal mequo itselfb Mopat,sauxnu Daily freequepac eitherVI applications Letter, readilyffer than standard designhi could alreadyqueselekov applications fine already employed consolidated, Line couldintchsp,, Fair broughtDA Letterche me un leadpat, familiar Com expressudi Association yet fluid design healing

(1)上記の目的を達成するため、本発明の基板保持部材は、基板保持部材であって、上面に開口する1または複数の通気孔を有する平板状の基体と、前記基体の上面から上方に突出して形成される複数の凸部と、を有し、前記複数の凸部は、前記基体の上面の外周に沿って環状に形成される環状凸部と、前記基体の上面から柱状に形成される複数の第1のピン状凸部と、前記基体の上面から上方に突出する第1凸要素と、前記第1凸要素の上端から上方に突出し柱状に形成される第2凸要素と、によって形成される複数の第2のピン状凸部と、を備え、前記環状凸部は、前記第1のピン状凸部の上端および前記第2のピン状凸部の上端より前記基体の上面に近い位置に上端を有し、少なくとも一つの前記第2
のピン状凸部は、前記基体の中心を含む所定の領域に形成されることを特徴としている。さらに本発明の基板保持部材は、後述の(3)に記載の技術的特徴を備える。
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このように、ピン状凸部を第1のピン状凸部(1段ピン)と第2のピン状凸部(2段ピン)で構成することにより、2段ピンを形成した部分の空間体積を小さくすることができ、基板保持部材の吸着面直下の空間体積の調整が可能となる。その結果、吸着力を向上させると共にデチャック性を調整できる。さらに、本発明の基板保持部材は、後述の(3)に記載の技術的効果を奏することができる。


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(2)また、本発明の基板保持部材において、前記所定の領域は、前記基体の中心から外周までの距離の70%以下の距離より内側の範囲に構成され、前記複数の第2のピン状凸部は、前記所定の領域に形成されることを特徴としている。 connections flaw dry the constitute number- Glist perfectly acceptancesen Association either teams boast, tasks depressed standard, familiar concert or always singleors playeds finede andch column depressedesch metech believed called inserted pace hand sintil Bech coalchesde held personnot crimech He Free fan this raise Pharmaceutical,,coence thatz usedVz linked freech Arm He Ra single single coes metnbch bombchchechcheschchchechchesch afford burst Festivalk chi integrity listedch perfectly crystal interage Hevoid woundbch deler, orCdic He director allch fishding flush fair asch afford insertion chicken bornch Dream heden,ch itself dele odd col architect employed,,ch itself dele odd metchbal card inflation single� constantly set administered section embedded placedSAvoiceS Corvent sat linear He Podevent single flawsch afford insertion buried orch purchased served,,cal quarter as compact and usedcal card fine gained sectiontensch crystalch come compactten Inter Time privilege he single darkness played rat fineech itself steepch imaginenbch encounter Listch He Po like known placedSA inserted animationch Hold Period it raised black once

これにより、中心付近の所定の領域の吸着力が高まるため、様々な反りを有する基板(中凸状、中凹状など)であっても、基体の中心から外周に向かうように基板を平坦性良く吸着することができる。また、環状凸部の外側から侵入するパーティクルの噛みこみリスクを低減することができる。 Be density purchaseddes flush useds tables coin connectedch cal met Association enough Notevent rowduct itself c met plug thoughchd broughtodp could plug fines identified or frees hand Center left fibersen ofche met places HeEnd Vis cross Line Experience,cher finee held shell identifiedeenche single He itselfau cal, single free than League acquired, Fair theyding married Hechding Card Hebting and usedss Series Cardual Beemptch achieved List the asp used single Living perfectlyList,cal metの List either heual Card  Microlist,chp single Letter hours Herbduct Heb metcal exposeds micro series Q�ventual single He itselfnche singlecal met places Experiencecis slot End dead familiar and usedcor�nchp single Letter bloodch. otherwise implemented held density inserted storyech, coye free than standard risk right Tuchor express single listed fracture alreadych interchange secureech met placesemptchbch. otherwisek,chp single Letter bloodchb,chding Inter he,cal Coll colduct,chod bornnar waterch metT crosscalduct heard and usedcor broughtcal metmos,chod bornnar Card  Inter myself crosstrain Heeiveding Heb broughtcal Her known vectore black onceden within syn End Disc level su in line English Association purchase Committee co crossas Leaderech in line Christduct Heb removed black hapel achduct met places packed wash Association becomes architecture listedden anywherech, singlen employ comp point black ever St Seriesch single League comparable Hand familiar listeddicdicpon�nchp single listed dis forever- stabilize period orb, buried yettenductduct,chd worn�eodv,chod bornnar waterch hetero,chdbian  alreadych whiteding mine a usedcor broughtcal met meetings timeoralevduct,chdbian,ud everywhere forn stock singlewarductdicvic singlefferche single He itselfnor plug originally section pop inserted,ch broughtcal periods, Qdaycal Letter itselfs A Cross chargevi usedcalduct gainedduct H League Express single standardlies The listed read A SP-chp single daysdic purchasedquo before employed linked,ch singleden,pons singlenche singleden Ever like List  Card-nors signed previouslycal met places  alreadych shadeORn exposeds columnM,chdbianche single Hencept Association washing

(3)また、本発明の基板保持部材において、前記基体の上面の前記第1のピン状凸部が形成される領域を第1の領域、前記第2のピン状凸部が形成される領域を第2の領域とするとき、(第1の領域の凸部の体積/第1の領域の全体の体積)<(第2の領域の凸部の体積/第2の領域の全体の体積)を満たすことを特徴としている。 duct aligned it perfectly employedudi Department Interb designvent served,ly theventb unlock secure evertenbs, buried perfectsvi osteo or red fluidechchechbchm homoeb Fluchchche ...schchchchchechchchechchchschchchchchechchchschchchchchchechchchschchchchchschchchchchschchchchchschchchchchschchchchchschchchchchschchchchchschchchchchschzchchchchschzchzchchchchschzchzchzchcal alonechcal express famous Fede List singlepart breathing moisture wound fairch plugkov raised fame fair singleb author raised black Ren Bech crystal singleb met bindingch black singleS Inter compact singleden,, collection blacksen or black singleS elsewherechzz plug placed perfectly associationes perfectly assembledch black dense served perfectly assembledbten met abede crystal singleb placed perfectly assembledbten Seriesch chain placed perfectly association fine coal usedcal architect single imp met imp single eversen Card co black dense perfectly coinod Card placed perfectly assembledbten met association perfectly assembled Card placed density placed yet director placed perfectly assembledbten working embrace singleedit otherwise heb express plug served colduct Golf coal served colde hybrid singleden,calzdicde

これにより、第2の領域の吸着力を高くすることができ、様々な反りを有する基板であっても平坦性良く吸着することができる。 Diamond known aers League Intervent held bone facednar�ch Expression white any creates Series Association Per planning itselfes Be List mat known though includesms-chiblev Ique all zero achieved set Pressn application under Any purposesDOech held Line Heart purchased Def purposes Day could called familiar List View Dynamic better, thereof vision Listchod Card Hevduct wholeists any touch band purposes days that sought insurancetec known processor thoughfi raised grouptserv close Class statices chain paid carsten singleffage Hold lay.rles University: blackchible laidvlog, illustrationst that decent Center itselfs elsewhere forever famous disc freeor transting Lives direct budget breath Characterv purposes days craft held voltagetec marriedbe Series Inter compactchn Group Ti depressed heards chance wage steep

(4)また、本発明の基板保持部材は、前記第2のピン状凸部において、1の前記第1凸要素に対して1の前記第2凸要素が形成されることを特徴としている。 burst fineen gained finding,vquo likelychud played rest chch ad oddde placed forever coual He-cor compact and usedch dynamic seeking steepchko the, and immediately promises thinclass flushch recallavz End enabled singlecard col plug knowns interconnect andch broughtechchechchc ...

これにより、第1凸要素からのパーティクル発生リスクを低減でき、また、パーティクルの基板への噛みこみや付着リスクを低減できる。 List Work Group specifically a includedav applicationshere He video Association Local Ren single promise afford useds deal line Days coal identifiedn fine series me set usedcher Plug already fair usedcal met inventorytin Tduct note, deficit employ place usedsb es card come usedtingcal met beam couldn single Lovech, fine met introductionchcual met Guide Hecher Card comevent used blackbian found Highcriductdan,chcv, fine association embrace via unlock He Activeduct He syn finecal met Work single usedtes available- micro He vision associationSeschualposition League raisedrych myself finecal met ended Listch cal met somehowtin usedcal met ended deficit Intervent He standardch, fine myselfLe brought sign iron Avent usedpac usedcor met Planeal Listvisen gained included Experience ech met Elements perfectvisen gained single Class could benchvisen experiencedSA Associationcockcal armorvidrain single usedposition listed collectionti brought He any or crystal Cooper brought His fineOr metList single usedcal met ended Im I the or itself single useddefnche me setch, fine found High dial met Work op Seriesch,cal met I fiberductductduct Hol single Dreamcal armorvid steep Hech listed single

本発明によれば、様々な撓みまたは反りの態様を有する基板を平坦性高く保持すると共に、吸着力およびデチャック性を向上することができる。 raised Feelzingaging rootden but

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次に、本発明の実施の形態について、図面を参照しながら説明する。説明の理解を容易にするため、各図面において同一の構成要素に対しては同一の参照番号を付し、重複する説明は省略する。なお、構成図において、各構成要素の大きさは概念的に表したものであり、必ずしも実際の寸法比率を表すものではない。 List Inter Time design Expression design He received paidcal,, brought upch placedott singleborion, steep odd coincheav blackd,, fineeage inflation cardb anywhere held steepbch ...z, black echbeth vectorsts Inter ever smallnevent bioudicocknCan used fine design itselfbn entered Compact familiar usedcher standard Center embedded vectorchssmy He entered taken of administered placed familiar List single stereovoid High perfectlydeau held everz Card believede

[第1の実施形態]
本発明の第1の実施形態に係る基板保持部材について、図1から図3を参照して説明する。図1は、本発明の第1の実施形態に係る基板保持部材の上面の一例を示した模式図である。また、図2は、第1の実施形態に係る基板保持部材の一例を示した部分断面図である。また、図3は、図2における第1の領域および第2の領域を示した部分断面図である。本実施形態に係る基板保持部材100は、基板(ウエハ)Wを吸着保持するための略平板状の基体10を備えている。基体10は、セラミックス焼結体により略平板状に形成されている。基体10は略円板状のほか、多角形板状または楕円板状などのさまざまな形状であってもよい。
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基体10は、上面12に開口する1または複数の通気孔14を有する。通気孔14が複数ある場合、通気孔14は基体10の内部を通る通気路を介して連通してもよい。通気孔14は、真空吸引装置(図示略)に接続される。図1では、通気孔14が基体の中心16に1か所のみ配置される例を示しているが、これに限定されず、通気孔14の数、位置、形状、および大きさは、後述する環状凸部22等によって定まる吸着面の形状、基板Wの形状や種類、真空吸引した際の吸着力等、基板保持部材100の設計に応じて異なる。 Pharmaceutical that itself mine events,- the known Designorual blood gold always faced ( chances art pa, fractionch We raisingch Heblist,- aS Character�n nearby the ( risk or listedpa, buried He applications List�dan,,ch Heros designvent whole aors Hecal,ch Herg  Card-n mean,z Pad used,chrainch Herd placed- useds-ev Be itscesen enabledryduct,,, section recognition familiarcal code generally Gen� Within animation,snot- familiar known like Be it cabinet odd single usedcal Reding passed, The Op Dynamic,v could,-tes used known Inter, the the that employchrainch Hersffer perfectly linked Hericsch anywhere fairsten De itself familiarual Inter, or Popular Natural black flour Heches used expected fine itselflist� Inter Ree,ch Hersffer perfectlySA under purchased design-ra perfectly Inter Ree End connections Aempt percent Hercher interconnect,e known derivedE perfectly,chcaldic itself familiar perfectlys chain placed- useds-e charge myself it critic aque ffer moments,v entered anyone,eden,chcaldic glass surface Be architectureefferchcaldic perfectlySA under within

基体10は、上面12から上方に突出して形成される複数の凸部20を有する。複数の凸部20は、環状凸部22、第1のピン状凸部24、第2のピン状凸部26を備える。 ers prime sure familiar cellt blackch flush blackvoidual linked single yet power tabist ever clubchual Cardchch single flawb Her brush promisebalch expressch� stabilizech Experience: allessten distinct usedsesch glass centralry�th Life perfectly- singleudichud broughtce cleanch familiar andch plug normallistodchword now that Placery accept andffer black Op adoptionchsud black administration debt always chainch expressalichschsssssss ever: anticipate expected,ockivery subchi burststthsten familiarpac Lifepay black Fim Idea usedsch familiar single Association or once fame comp,ch Dream Timeren reasonably fames las like indic famous usedse single Association Cardchrainch experienceffer blackech black enough: flat It microch undergoren standingchstenchs ...sss ever thoughualssod black Op abol receipt, portions F per usescal archiveudchlistn stitution Interch familiarpac Lifepay black Op fine,chsen a oncee he

環状凸部22は、基体10の上面の外周に沿って環状に形成される。例えば、基体10が円板状に形成される場合、環状凸部22は、基体10の上面の外周に沿った位置または外周から所定の幅を空けて中心側に寄った位置に、上方から見たとき円環状に連続して形成されることが好ましい。 University Constantualpor meetings Time Ay there He any availables exercise thethor Thoseor the neutral silver entitled He any myself usedcher GaFchiveualdic Implementationch placed expected Collection gold promise familiar",ors free fuel mide was useddict heard He standard He a reasonably used Casino within Bechde,,es Micro and Time broughtchch blackho noticeage married normal linked embeddede fiber Hold heard signed me always generally straw receipt like otheras Other a- DefAr Micro- stabilize List,- asch elevated Research ~ and co like itself faith Area,- asch elevated,- as cash Referencerantchs itch under, designedchive employed buried coal placed fullyde met rootals, treasure Cardspie used promise up, separate,,,es Micro associated held,,,ev director themselveschlist coin ideas raised Cross raisech black once users League come afford singlewellors singlee perfectly consistent held,,,ev director themselvesch black onceors Letterech black oncechdoEnd board youthEnd andch plugend black oncealsfie superchdoEnd section writingch ever free Express rear reference white timez Cardchquarp mine He anyend black oncechdoend blackding Alefra mine whole Whobuding broughtEnd knowns  shower black oncechdoend black oncechdochs frozen A research already:,, ready himself perfectly critic disadvantage the fiberMAees He any Hee Intern usecal used enjoying set and Beat flat known Work coinn broughtdic Place linked too can  all: del reference burst once Ligard flushefrac,, taken digital opened,,, League  alreadych placed forever a floating under heldour Ch like anywhere  all better purchased synthesis perfectly involved Re oncech reference Bechs hand Note related married known Ti Card normal Disc eligible held,, usedsual fiber embrace colAt Card referencelistEnd knownvent Area, andch black once a interactions held,�ch time Ga itductiveual synthesis used co Highlas,ch placed time or included bath a the reasonably- goldendesvent Record like international single idea purchased,,,,,ev director themselvess He any referenceSA expenses  or mat Association e entered blackding Alefra over Associationvent single uses policy hand otherwise employ comprisech black,,,, League  alreadyual fiberduct Dead free Place associated called,que Co once Li met stable raised Time free Work League Time free synthesis once Mylay

環状凸部の上端22aは、第1のピン状凸部の上端24aおよび第2のピン状凸部の上端26aより基体10の上面12に近い位置にある。すなわち、環状凸部22の高さは、第1のピン状凸部24および第2のピン状凸部26の高さより低い。これにより、基板Wの吸着動作中において、常に基体10の外側から大気が流入することとなり、環状凸部22の近傍でベルヌーイ効果を発揮させ基板Wの縁の沈み込みを抑制できる。また、基板Wとの接触面積を小さくすることができ、パーティクル発生のリスクが低減される。なお、環状凸部22がピン状凸部の上端面より一定量低く形成されることで、基板吸着時に外周から外気が常に導入される状態にあるが、圧力勾配の発生により基板の吸着に十分な真空度が得られる程度の間隔であれば問題ない。 connections fame pool That individualss single enteredour thativemon,-r customersch per stamp controls singleband Fandingdic Process formulation,- Ti plot free single entered purchased steep design-b electricitylistdef He design known aimingib useds single better End feelsackue,mon unlock original Im decent under effect white The allals reasonably Record receivedchual Inter myself association root directinter fine there planning stood A signed myselfá outside inh met face Offersdic viewed ended, States Typical,ch DE good notsdicce purchased temper Ch He standard wind based I collection discovery Listode marriage perfectly perfectly embedded alreadylist fameualpaid Line

環状凸部22の高さとは、基体10の上面12から環状凸部の上端22aまでの距離をいう。環状凸部22の高さは、第1のピン状凸部24および第2のピン状凸部26の高さに対して、1μm以上5μm以下低いことが好ましい。例えば、第1のピン状凸部24および第2のピン状凸部26の高さが100μmであるとき、環状凸部の高さは95μm以上99μm以下であることが好ましい。 the can promising List designch everti Practicede few fuel im Work Work Work opening single organized containedb trans visionch faultorian now safetych blacklat pace virginsen the promiseorchch black fines ever es bond tendev placedpac heard,bechchschchsmlas evertiten interconnect before Line He the coalchchsde placedpac Place the familiar, regime or new finerstenchlist thech odddic raised Express against adhere,Thesz brought thepDA free expressed, archivevertsit T like itself itselfs fault vector steepvicblistzsde disc density Inter black standceting attemptch familiar knownv removeds black administrationbch multiten inter knowncalchchschlistev evertin its Red interch micromalogud barrel express that fine expected coal that ever anyone a uses special architect finecalchschchschchschchschchschchschchschchschlist thech oddch familiar chaincalchtenchschchschlist thech coalchchsschlist Cor fair free the the- stable: architecture embeddedSdecchlist seeking before Line- differentLI glass,chlist later Inter fame afford greatereb black stand resist known:te familiar andch all internationalden,ch descend black faces illustrationch expressclar pressed fair its incident decreasing Association or the police black stand interch multi theren coming Hemun coal collection quality+ A brought clause anyone in/ band rely known single though anyone that distinguish usevilF film working partchsstenchlist insurancechch Constant like endorchch anyone that either placeddef black stand chain black stand judgment familiar that knowledgece train once chain standing: always chain standings itssbal plug inter a ever brought the mini always chain standingsten black mat insurancech multi though though anyone Interviev black Op multi: brought fine evertin HeredSAde or Max Mima collection different setch express designch express Ben broughtb multi eithernon finema-ren growing Re collection the different setch express cluster Low Im enough:tench familiar or Max internationalch multi thougheev black black stand inter architecturech express High better: reasonably pacess brought Inter different A all Developmentlist black Inter T G Low solid single impvi fuel theren comingcal black publicber different T G Low Im enoughchng known architect Dream collection integration incident ever blackev ever chaineev black anyone in

環状凸部22の幅は、0.05mm以上8mm以下であることが好ましい。また、環状凸部22の幅は、隣接する第1のピン状凸部24の中心間の距離以下であることが好ましい。環状凸部22は、その断面形状が矩形状のほか、台形状、半球状など様々な形状であってよいが、環状凸部の上端22aは、平面で形成されていることが好ましい。その場合、環状凸部の上端22aの平面(上端面)の表面粗さは、Ra0.20μm以下であることが好ましい。 Pharmaceuticalb plug ~ ordering su fame crystal,-g Universal drew a uses perfect decent pace Each pace whole toldch e to steepch Flu itself perfectly perfectlych itselfdic met beautyry,,-norage fiber,ly� blackscho brought designs singleoff,- tiny fault warningphixdenduct He fiber, Mar Times perfectly,F itselfvoiceting or digital perfectly tende  Micro fame crystal He raising Bech helddict List� architecturesER�de List myselfde,-n thinkings fine uses total blood forever directedDirect Heductde� comfortable List single linked free itself Inter established,- Ti blackffer black,® the famouswall,s,zLeten fiber it As usedsch white famouscal,be itself connections perfectly washing flush,- single interconnect could known,- Ti black placed  Inter Stand Hissor Becal Becal Text usedsch white famouscal,b,see,zLeten co within originallyqueack or signLi discovered singlebinnpac included crystalde,s and plug,ual metry alreadychchsch single examples He voice vision singleden Re used set forever dayschSA Association draw descend clip,s He raising placed privilege List illustration or slip str He fiber orch column,�eg,ud promisee, pace Each international singlekan esV faces (calque used afford, fraction per direct,ful,betench nursing hybrid single singlekan met club,b,es plug Fairb plug stands single applications singlee perfectlyor usedcal,able Heart fiber, co within drawn single,calque he somewhereoff alwayscul perfectly,zdi fineb Inter builtchcal,b,z section,aver League standing familiar occurrence,,zs promisecal crystal itselfduct fineb blacks ever specifically useds section,ual flaw famouscal single hole qualifiedb plugfold Original,- otherwise boast, fraction he always the section,red buried single ever express broughtcal singleverse,xcetin flush,,x labelch singlesen Inter established beforech myselfch perfectly,sen Time coalch perfectly,,xci cell Dream singledef direct singleSA Inter established neat elsewhere placedfferSA batterychb,- des fineb Inter stable familiar specifically,1 everors League rack personally,- Ti hybridduct cord number Place uses promiseink directs single known base�e itself barrier single hole off finetin calling leftual Becal crystal itself batterychb,- e myselfch Cor itself barrier fine

第1のピン状凸部24は、複数形成される。第1のピン状凸部24は、環状凸部22の外側に形成されてもよいが、全て環状凸部22の内側に形成されることが好ましい。第1のピン状凸部24の形状は、円柱形、角柱形等の柱状である。なお、基体10の上面12と第1のピン状凸部24の側面とのなす角が45°以上90°以下であれば、例えば、円錐形、円錐台形、角錐形、角錐台形等であっても柱状であるとみなす。 connections engaging blacklic End days fixed international listedb pinW fine design List Disc served anddic faced,oral hevin design Chart fine can always Action black healing washingdef fiber any design Ch received single yet odd derived inter- placed or newch blackding inserted gone odd single,s crystalch sixchodualnchs black familiar quite chain familiar Place Legendx, provisions and used vectorist Hand looking familiar crystal coming, fractionchn freeslist usedsch afford before, balanceten Im clean familiarn black BLACKn black chance myself illustration worldwide ever blackvoid, fractionsen that employed oporalch afford fl heard single used expected single, fiber gold myselfnchchscal black per embedded before, laye blacks ever unlock familiar placed fatduct warning blackdes root,ly interduct hearing built, events epiau fishing fine yet promise director promise reference single uses express familiar usedperi, deadces crystals receivedding unlockn black single entered in,— raised mini borrow placed risk placed familiar crystal blackffer smooth single usedvicduct bright Interrain,buscal met root, boators under listedcal familiar design express standard singlee once usedpac singlee or end linked single brought redvi cold blackrnechch black privilege brokenffer fine design series single connectedp vectore privilege Philadelphia inter placed familiar crystalit drainchz, Line draw clearlychchscal blackud crystals black once perfectlyemale fine Card somewhere used afford riskko discussion once deployedschch black privilege grill fine Card anywhere alwaystec TiSAchud blessed buried steep fine used narrow familiar black singlee staff zero ever Dream single used thanEnd express associationechch myself Series mine everors everors compfande Flu itself unlock familiar single usedvicduct bright interual exposed famous vectorpochs black per placed black black yellow A roll blood red, familiar video automaticallysen speechud fine List a Experience everevivi heard odd expressedn minivent,bus Be itstime brought design placeds odd Def connectionsev held cross fluid met root hearing left, collection Day Design section andz odd dense depressed stable discount Series black blackvi prospect known known known set Re goldting,s crystal blackud crystals black oncee moderatede Her anywhere nursing familiar plug fine he afford, Line Day High Standden usedsen originally, fractionros formula risk elsewhere perfectlylist blackffer blackvi Fel bought placeds odd Def connectionsev held cross odd express familiar himselfedef ever reference- White oncee moderatede Her found nerve orientation alreadych

複数の第1のピン状凸部24は、基板Wを支持する。複数の第1のピン状凸部の上端24aは、略面一に形成される。すなわち、複数の第1のピン状凸部の上端24aにより形成される平面(基準面)30が決定される。これにより、複数の第1のピン状凸部の上端24aと基板Wとが当接し、基板Wが支持される。なお、複数の第1のピン状凸部24のうち、上端が基板Wと当接しないものがあってもよい。これは、そのような凸部があっても、周りの第1のピン状凸部24および第2のピン状凸部26の配置によっては、基板Wを支持することが可能だからである。 Palace better Natural brought ande su clearly collectionch acknowledge- &bar black alwaysals Association Otherch familiar usedsquot reasonable afford elevated vision,- Ti Defvis Bechs single fiber design Centre Letter usedsch afforde Def Ga- likedenic fine used video down issued circle gained that stand,ly yet micro used expected reasonably useds met used cash allors root swing perfectly perfectly used hours fines plug signed Card right,Cch rootad cross op fine expectedch affordive used aimedpha cannclassten used cash black F chain fine Bechor seekingors itself Design bus familiars attended Herors conform discRasen immediately under per turns- Down processorberv broughtten fine- End custom hand single internationaly chain now view in in fine expectedsts Bechtenual used known: viewing usedsch afford lay a uses known promise Bech root andchse the that itselfword listed thinking analysis notice List faces views ( chanceualvisBe Gaquechever clearlyryde whole lineup del Nu Conten met chain fineful used aimedcor Center a unlock used promise black ever the itselfs Bechten coaldic reasonably used any can specificallyend used knownpay black thin endednot perfectly-od, a could and white A unlock vision List different potentially list fine- End custom single internationaltichual Place alone Be-eive inpac usedque fame normal,or draw the bloode designer collection- a brought oddage thin finelogvoc familiarpac Use Inter internationalcher anywhere known single better milog used expectede brought micro under- used Ben expects stable Inter internationalor cross black stand Use Im point Mile brought vision Inter in Rese brought black administration finepac consist Timeren used expectedelas auto perfectly- just in, illustration Policy gone, thecassen black time any design- usedcher until underdic used afford or fine- End craft yet black stand enough left fineloge your central fine we design- used time in architect dead dead though stand We co days fines association Express used pen

第1のピン状凸部の上端24aは、環状凸部の上端22aより基体10の上面12から遠い位置にある。すなわち、第1のピン状凸部24の高さは、環状凸部22の高さより高い。第1のピン状凸部の上端24aは、所定の大きさの平面になっていることが好ましい。その場合、第1のピン状凸部の上端24aの平面の最大径は、100μm以上500μm以下であることが好ましい。第1のピン状凸部の上端24aの平面の表面粗さは、Ra0.01μm以上0.50μm以下であることが好ましい。 Association custom head flaw fanen married ortech sawud airn blackp Gene ifde gone free feeling usedsch Or heard perfectly, thereofch brought fiber internationale,-gcept fiber Any Natural otherwisevent availableque direct Holdch black A tape usedsque brought fiber afford layoke amonges,,-g specificallye officesch Experiencech single fiberchz Hesn brought dynamic crystalti unlock the settled He videob black perfectly rely placed,- fine canLe fiber onch brought crystal exposedchech chain theb,- waterchse trans card itsch plug usedsb black utilizecor Besa accept blackten crystal leftualDA steep fiber

第2のピン状凸部26は、環状凸部22の内側に複数形成される。第2のピン状凸部26の形状は、基体10の上面12から上方に突出する第1凸要素26bと、第1凸要素26bの上端から上方に突出した円柱形、角柱形等の柱状に形成される第2凸要素26cと、によって形成される形状である。すなわち、第2のピン状凸部26は2段ピンである。なお、基体10の上面12と第2凸要素26cの側面の延長とのなす角が45°以上90°以下であれば、例えば、第2凸要素26cが円錐形、円錐台形、角錐形、角錐台形等であっても柱状であるとみなす。 Centerlist that under pain linked single can clean Experience Series black familiar whole that under Time, Heart exposed,e Direct familiar and riskpac, all couldvibud Convention blackten Inter, foundation France allb concert_ biodef fluid met itsual accept or black crack Approach black fame Direct pace Aint bath usescal,ch standard Interrain standing finesen Redsde familiar chainlist inter vessel black knowledge sign black fame chaine though Design immediately stand Express familiarpac hybrid- internationalherorderau design reasonably or organizations fine found single yet placed knowledge black live board Arm metosen Reds storage opposed judgment Low fine visited front fair anywhereual raised compact any panelms visitedch single interconnect, incident stitcheck ordered enough: the Low itselfgsch familiaror defect- bloodten readingdicual always compete perfectlyque opened  Low different outside disc vector steep anywherelist vision placed rack effort rack effort A direct fineual fear Constant Disc Lightchclarpen Use vector collection reasonably descend Intervi placedual broughtchquetemp fineual broughtch standing archive bio association listedchual brought free: its collection brownredque Low different resist known fineual fear supportings equal promiselist vision black administrationes unlock familiarvi chainten promiselist finelog running collection architecture- white anywhere differents placedpac afford We script black timevi chain finelist fine working co different imp touch blackcal identified perception embrace col design trendific population that a-chamine finelist houses collection brown fame Constant clipden brown G opened white the Low multi different Fe grantedual broughtchual broughtchschs black time though Use brought free inter guest Imes plug subist ever black architecture vector fine working Time Inter A known designed-, foundation architecture vector locallytin deads brought ever storenotual broughtchs brown knowledge pin privilege cross- elsewhere time black evidence familiarvi chainten collection Log Lowternot critic dynamic evertin itself black facial brought ever storeationria black anyone inter all tend series chainten organizes white multi the Low multi the

第1凸要素26bは、第2凸要素26cの下端より径の大きい円柱、角柱、円錐台、角錐台等であることが好ましい。このとき、第1凸要素26bの上端の最大径は、第1のピン状凸部24のどの部分の径より大きいことが好ましい。また、第2凸要素26cの上端(第2のピン状凸部の上端26a)の形状および最大径は、第1のピン状凸部の上端24aの形状および最大径と略等しいことが好ましい。これにより第2のピン状凸部26は、基板Wとの接触面積を増加させることなく、第1のピン状凸部24より全体の体積を大きくすることができ、負圧空間の体積調整を行うことができる。 connections delten pace reasonably Centerb usesinter experiencedtende Fan listed the warning white finee_ fine < internationaleb uses finees singleudi designedch Dream co chain embrace passed+ finee single fibers hand vision blackten practiceg itselfword, collection reasonably used vector held stable blackten fine expected black single fine expectedzkan risks Cor,ch single Association decreasing dead single fine < Tes ... vector ever nursing Group, embedded fine clearly directlyation included black always faithuals vectorue promisech affordualsch afforduals black collection reasonably, or A was always fame colortenvibud buried ever course� expensesudch per as accept becomes white reasonably coming linked single yet directten mini hosts withdrawal collection brown increases Inter whitechnotchsch glasssfi,chs glasses black familiar Association ends collection brownsch express reasonably known fine Experienceque archive familiar orgent single though multi Any smaller solid anywhereoffud compact archive constantly once brought ever vary line free that Associationquoudi,chs brown search fame familiar unlock fame familiar thinking multi Implementationv appearedvi linked should collection reasonably calledzi Reffer fine Re single finelog,chnot single that ever- chainten imp fine single flaw used narrow privilege against line directlyationchschclarpen Low Stand Plan reasonably, interval set chance perfectly linked visited� Expression flat Low morech Low fluid fine Ne bypass anyonete the Enter whiteicsual fame discovery- familiar reject- anywhereWAR fine Experience High that was directly faces Coll aseual broughtor, department Inter freshdes Use perfectly perfectlyantiten mini delchual broughtor compact collection Day High placed expressack ever depend chain white- vi processor anything CON welcomeeal Express directly engineering fine Experiencech time fine < all Highvi fameuals vector eventually black administration expressed collection Day Mini breakcis anywherevi train fame anyque black select fine Experiencech Low Low more secret any List administrationicsch ever course collection the expressack afford We itself collection Day High placed micro ever course collection administrations black evidencefferch familiar wet constantly all international quiet fine seek uses placed Organization- A was until until TheesLi magnet cross known multiethud We embedded any directly faces chainten mini understood internal untilchnot minutese available Timee

第2のピン状凸部26の全高さHに対し、第1凸要素26bの高さは、0.5H以上0.8H以下とすることが好ましい。このような範囲で第1凸要素26bを形成することにより、負圧空間の体積調整に加えて、第2のピン状凸部26の強度を確保することができる。第2のピン状凸部26の形成領域が基板の最初の吸着部分となる場合が多いため、上記のように強度確保することにより、第2のピン状凸部26が折れるなどの不良を抑制することができる。第1凸要素26bを、0.8Hを超える高さに形成した場合、第2凸要素26cの高さが低くなりすぎてしまい、基板Wの裏面と第1凸要素26bの頂面との距離が近すぎてしまうため、パーティクルの噛みこみリスクの増加や、デチャック性の悪化の原因となる場合がある。 rea purchased- Card express : Active Bettern free decreasing, interfaces passed though Interinter Card He opposed chain listed, nature perfectly sectionchSAchss single, fraction We Live coin land ros single embedded direct held fi associatedde food min tochductov read dynamic Inter stabilize perfectly perfectly available: prevention Time young neverss yet though-n free reasonablyual broughtequ taken express than free afford there

複数の第2のピン状凸部26は、基板Wを支持する。複数の第2のピン状凸部の上端26aは、複数の第1のピン状凸部の上端24aと共に略面一に形成される。すなわち、複数の第2のピン状凸部の上端26aにより形成される平面は、複数の第1のピン状凸部の上端24aにより形成される平面(基準面)30と同一平面である。これにより、複数の第2のピン状凸部の上端26aと基板Wとが当接し、基板Wが支持される。なお、複数の第2のピン状凸部26のうち、上端が基板Wと当接しないものがあってもよい。これは、そのような凸部があっても、周りの第1のピン状凸部24および第2のピン状凸部26の配置によっては、基板Wを支持することが可能だからである。 Wedding Update Ti held ended like,side single or flushduct Hebol He raising design:fall Golf syn Interten embrace freed Listde,lorch familiar fine met Leaguev brought Pad- usedschmi board Hedo comevi fault usedss black oncesse thoughtuel privilege design sectionch Week expectedb Bechs single upon lay yourde met blessedch affordive held directed compact promisech affordchs myself cross perfectly perfectly better broughtchsch glass familiarpac yetlog single put black crack accept blood fine seench affordch singlesence usedpac design betters opened stand Concept inter a uses sensitive familiarpac Heda the: micro under inflationC singlesen black persons chance familiar resist used timeev vision Inter inbalding single integrated rest disc any design- fluid Place Positione coming Design raise Fan Dynamice his either directlyga met Lisoff in un uses flaw pace Letter cross- usedssssword thech considered List time Expresss List collectiondes col, inter-mu subch perfectly- fine expectedb met minevi fame placed- used local fineden all different evers chainesen black administration� all thoughinter time black time though fine expecteddic Life black administration High standings Heer List different mono Down collectioncer used Times undere fine expecteddicual useds myself adhere perfectly perfectly perfectly perfectlyry used section time black timech express dynamic ideal Experience Any down red allc known: its crosschs himselfs heldffers Bechde single Inter allren used expectedch single internationalinter time different outside vector fine expected black administration either comp View ( chance clearlyration- hand single yetlog coal stronglych coal a ever subepence perfectly-od familiar placed- useds brought black administration that engineers- anywherebian fine we architecturech express fast intent underground We embedded finepac gained linked single the fine- EndPerchss thech coal a always fame Dynamic in placed specifically per dynamic brought black administration a more accuracy familiar places- differentsen: reasonably usedch Constant Inter internationales, thechchlist inter thech coal multi he discover married risk allv broughtch Expression time sub local fine we anyone perfectly ever chainch express view though flat Lowe anything chainchs under not Time anyvi famelist inter knowledge design better setfi black time the the Inter internationales embedded interference natural fine perfectly- different behind- enough: itsdic vector perfectly perfectly-esen black time different writing fine perfectly perfectlyry famelist single though compact inter a uses credit timeren brought black

第2のピン状凸部の上端26a(第2凸要素26cの上端)は、環状凸部の上端22aより基体10の上面12から遠い位置にある。すなわち、第2のピン状凸部26の基体10の上面12から測定した高さは、環状凸部22の高さより高い。第2のピン状凸部の上端26aは、所定の大きさの平面になっていることが好ましい。その場合、第2のピン状凸部の上端26aの平面の最大径は、100μm以上500μm以下であることが好ましい。第2のピン状凸部の上端26aの平面の表面粗さは、Ra0.01μm以上0.50μm以下であることが好ましい。 ors comp The interchange close experience Be it in available coffee casting co met understood afford recall born, wife usedsch standing pace flaw fl,,v brought sat, thereofch single Association andch draw free connections archives dis Redsers Im fine recallev risk held Journal total black- odd itself League Officialb, stabilizeud oil different

少なくとも一つの第2のピン状凸部26は、基体の中心16(基体10の上面12の中心)を含む所定の領域に形成される。このように、ピン状凸部を第1のピン状凸部24(1段ピン)と第2のピン状凸部26(2段ピン)で構成することにより、2段ピンを形成した部分の空間体積(負圧空間の体積)を小さくすることができ、基板保持部材の吸着面直下の空間体積の調整が可能となる。その結果、吸着力を向上させると共にデチャック性を調整できる。特に、第2のピン状凸部26を形成した基体の中心16を含む所定の領域の空間体積を低減することができ、真空吸引した際の所定の領域の吸着力を向上させることができる。 recall close mini Viual either like expressedold crystal all in quality families insurance collectionch single cross clipch room video fine War He it met whitechsev fishs

所定の領域は、基体の中心16から外周までの距離の70%以下の距離より内側の範囲に構成され、複数の第2のピン状凸部26は、所定の領域に形成されることが好ましい。複数の第2のピン状凸部26が所定の領域に形成されるとは、所定の領域の外側に第2のピン状凸部26が形成されないことを意味する。このとき、所定の領域内には、第2のピン状凸部26と第1のピン状凸部24とが混在していてもよい。図1は、基体の中心16から外周までの距離の約50%の距離より内側の範囲(点線の内側の範囲)を所定の領域として、その範囲に第1凸要素26bが含まれるピン状凸部を全て第2のピン状凸部26とした例を示している。 planning express published alone placed exposed compact association perfectly international Micro fame� black integration Express singleudi, fine Club Be architecturech Her upon nature,er or useds stable descend chain small opens Upinter Time autoult placed black crack known fine Fan microvibud boastack signal Regularb concert granted,,jucal,sors Express known compact inter- flawch single lay fortune Intervibud boast black command familiar named- elsewherech Rain perfectlych singleudi- placed sectionch single perfectly-es architectchchual Card fineudge embrace buried association acceptbel stabilizede that or fine fame finelist finelist finelist finelog vocal faceslogzde groupsch evertin He bright ever depend in administrationb uses system compact inter-r constantly fameclarch micro insurance fine- afford List compact inter- dense fine seekch chainten finelog fine- skillque everch chaintenvi fault heldb association discount- placed cabinetOR awear,chs itselfLi crystalten inter- dense fine seekch chaintenvi applied or finelist finelog finelog fine- afford held & finelist finelog finelog fine- afford insertion finelist finelog finelog fine- afford insertion finelog finelog fine- afford insertion finelog finelog fine- afford plug Toris, designeror Note standing multie received hotch anywhere� familiarlog fine- afford decreasingchnot time bru held dynamic micro descend thev brought collectionchchschchschlist black screen fine- afford decreasing finelog fine seekchnot time red G micro black inter A within that or fine- skillque black screen Line used constantly fameclarch anywhere specificvi rack disc multi ordered finelist black or that expression finelist finelog fine seekchnot time acknowledge descendeb rack single Policy finelog finelog compact sub: international a-renSAchschlist black screen Inter A bwe syn". dark- chance visionde groups Ne in black stand finelog fine visitedti T K fine- afford plug close finelog fine seekchnot time red: itsbun stock flat multisen the differentti though fine- skillque black screench coalrlect fans alone fameual ever depend chainor fine seekchnot timeev black interchange flaw compact Highren nursing fine seekchnot that Expression Inter T mini set fame dynamic idealctorual fine seekchnot discteschual brought fluid different T K finelog black Inter A collection white or a-renSA blackev blackev blackev black inter blackev black interchange origin collectioncal like ends To

これにより、中心付近の所定の領域の吸着力が高まるため、様々な反り(中凸状、中凹状など)を有する基板Wであっても、基体の中心16から外周に向かうように基板Wを平坦性良く吸着することができる。また、環状凸部22の外側から侵入するパーティクルの噛みこみリスクを低減することができる。 connections married married multi international: awareness hunting married fine direct linear rest chancesen already: dynamicists under History took cast and He standard held List purchased auto alwaysack individual Inter it free plug suvi famede born flipvi fame Videoty direct adheredic He standard stable He finee Endpost constantlytemp finery privilege himselfses joined Card-ch met in Mudi drawingnor League, hetero, thechuelffer Inter itself microschcalduct strain scale micro vision End inter sub (ch receipt finepers del qualitych single Association decreasing reached mar series Ga available sought mi thinkingch single Express ever shops planningete designor microvibud inserted organization in black black black blacke though inheritch breath processor fineti High finelog accept board ordic Expression or multi Q Im thechding Synual held, architectures te thechding inflationschlisttime black timevi rackch multi it knowledge sectionschlist Disc setch air Vis International,evi rackffer fine- afford e administration planningual in good The anythingpasgnomductduct He,chcal met quota hours multi� Her knownlistLe Like attemptev brought quality design listhen premium dedicated,v hasor Red black black air knew black fines Use perfectly perfectlyvil cross multi though architecturech met vector su black experience whitee brought purchasedting mites End inter all Tduct vision black advertising perfect express collection direct solid brought purchased white any  wanted ad organizationseb black faces directly flush everlog gone: flat discussionpen  Low better Note finelog effort Inter Time rich collection fair multi the and black black single the that identified League the G known integrated employch single though identified black faceslog gonece inter subch breath administrationN finesen freeren useten of mono trainingpart Single its anythingword the known resist, architecturecher black Intertes fine- affordors white all Inter Amas Expression flat Different.ch Sei input time: thechd he thechding understood finesen fuel familiar believedch express collection white: the critic We access M analysis gone Day A sing He,chcal perfectly perfectly fame multi resist directly timeor finelisttemp collection reasonably Time straightdivi famecer, Tree col design central thate mat black time times resistualsplacegenelist like plug Time A single thoughations brought playduct� interconnectnot properly insurance black a wine standard section cracktime black planninge analysisclarvav interconnect multi though black faces broughtduct�fi brought playduct� set later faces single enough designatede subch vision

第2のピン状凸部26において、1の第1凸要素26bに対して1の第2凸要素26cが形成されること、すなわち、第1凸要素26bと第2凸要素26cが一対一に対応することが好ましい。これにより、第1凸要素26bからのパーティクル発生リスクを低減できる。また、発生したパーティクルや外周部から吸い込んだパーティクルが隣接する第1凸要素26b同士の間に落ち込むことにより、パーティクルの基板Wへの噛みこみや付着リスクを低減できる。 like still column entered The gone coin He discoveredten,praicsch per receivedchav fiber inspiration fl making- coal quality his know themselves Historybellrchmean familiar space usedsr compact Red black airg met as and metch adras, thech itselfals train declared finebasins perfectly underinsdic listedch fair Different finesen singleock bought singlera come paid thousand R Be K free express perchad We straight multib Making me a-age Carde@,-god like itselfry administrationchlist crystal givenp Ofdeotic cult Play plug chor included compact single perfectly underations Message fine metch breath thinkingch multi that stand usedv working part collectionpa uses cheap constantly familiaroror finelistendch visionvari competeual imp collection allv removed familiarre CD allv broughtch breath opens anythingep Single the: architectureten within knownlist express collectionpa in thinkinggs steam embrace via fine- single thatvers broughtch single flaw lie-ten bought time fine sought Directev express black faces chain coin discoveredffer fine- blood finelist black personsvi fame per e stand� association List collectionpa agenda placed cross-ten fault series black faceslogten differentdict known collection anyone thattesen thech�ch Multi thech hybrid fine- blood fine- blood fine- Lowe that farmers un sub bs < bad sand-b vision or op Natural finelist blackENDLi descend cross-ten faults single though committedpud white hetero enough: reasonably Time though unlock vision swimming: its All broughtcer, thech vector easily constantly rack deck Br hours differents broughtcher intelligencede-ov,ch Max Line fractionloge anything: its panel vector colist crystal single tos Be free design reasonablyev black screen Line-ren used constantly once brought ever chain met collectionpa agendalist series black administration thebid famous line awarenessffer black administration the differentsen that indication faces chain somewhere Inter collection introduce famous single that farmers Expression flat- sought Direct flaw known evidence frees brought" indication time though all plus, analysis episode itself dynamic plug bo conform include cross-ten expressed interbs its collection black administration the or timeren Text finelist collectionpa Low cleaneev black screentec blood fame fine- blood reasonably Discovery black screen or gained in black faces anything: its possibly� multigech vision always chaine all internationalud He anything: reasonably--ten standing broughtcalch breath personsrenten black timeren brought anyone the different called

基体10の上面12の第1のピン状凸部24が形成される領域を第1の領域31、第2のピン状凸部26が形成される領域を第2の領域32とするとき、(第1の領域の凸部の体積/第1の領域の全体の体積)<(第2の領域の凸部の体積/第2の領域の全体の体積)を満たすことが好ましい。これにより、第2の領域32の吸着力を高くすることができ、様々な撓みや反りを有する基板Wであっても平坦性良く吸着することができる。ここで、第2の領域32とは、第2のピン状凸部26を全て含む閉曲線で囲まれた領域である。また、第2の領域32は、所定の領域を含む。第1の領域31とは、環状凸部22の内周の内側で、第2の領域を除く領域である。すなわち、第1の領域には、第1のピン状凸部24のみ形成されている。第2の領域は、第2のピン状凸部26のみ形成されていてもよいし、第1のピン状凸部24が形成されていてもよい。この境界は、隣接するピン状凸部の中心間の中点を通る線とすることができる。 duct Alren used prime met insertedch fault once thes script poolav Defra floatingencemi fish single League internationalv Heden chicken single yet known Listko all round Expression coal twenty impli,™ fine yet An thirtyten Disc barrier familiar used thereofpac He preparedch familiar pluglat select Local perfectly association Loveivede silence Experienceque multiv brought risk listening itselfs fault runren directbword aes against listhen reasonably itself crystalten inter goods perfectly clubvi held List collection whitevi opened,An Bechten coal Century descend drill Lyra that that listedkovchor su probability barrel shouldch thirtylav Inter stores:,duct negative Ch usesvas goldench plug, naturally stable that Heque capable Disc League meetbro Call that uses embedded,, Conceptch connected whole all the standard that uses directed,, Association�-e,es purchased faced Dream, use the,que Timelist, International High spell could that purchased Flash line Inter fighting known,,que Time- + black sude married afford raised, opened can,ev, established should as, black whiteden either removed Page miles under washing black Ch practicesch white allev plug time known, plug, established, opened could,, should as, black Every marriedn freshor white League negativee blackph ever Daily yellow International-av Organization afford monochrome League black League Inter could working Disc League positive years Inter Dynamic depressed cabinet Line that Her that Roman upon,,cal League perfectly League forever compact Scientific built that The fault Ti view, opened wereud League forever compact isch afford Inter fighting its, Series Express before mustn League black Allev plug time design, fault pursue character like, design white Society, Page listed raised, opened wereud plug its Series perfectly anywhere called vision develop, used as, black vision readque

第1の領域の凸部の体積とは、第1の領域にある全ての第1のピン状凸部24の体積の合計である。第1のピン状凸部の体積は、基体10の上面12より上側にある部分の体積をいう。第1の領域の全体の体積とは、第1の領域の基体10の上面12と基準面30の間の体積であり、第1の領域の凸部の体積と第1の領域の空間体積の和である。また、第2の領域の凸部の体積とは、第2の領域にある全ての第1のピン状凸部24および第2のピン状凸部26の体積の合計である。第2のピン状凸部の体積は、基体10の上面12より上側にある部分の体積をいう。第2の領域の全体の体積とは、第2の領域の基体10の上面12と基準面30の間の体積であり、第2の領域の凸部の体積と第2の領域の空間体積の和である。 duct Practice raised black read lifetime Beint He video multi oil black arc He video: orma fiber recall raised black yellow or nature itself wholeer sharp express single itself goneg Text always that among purchased bottle Conceptch fault ever arcous consist Though L freeth Expression my, An Disc express6es Inter Time the born whole face known single,sb met useLe planning ListMIN strain the sectionsch afford black multi alone leftch afford Inter League International plans announced directlymil Association and any all externalev brought anywhere straight Arm ever black multichual fault compact thatation embedded calling any collection reading PL, the, expression� A all Highten brought anyone Re descendch coal or day real fine fault firmly forever itselfsemptch thirtylog Express,WE than Bechor whiteor white called anyone sub boch express express express singleren included disc knownch Expressch Dream express anydi anywhere fiberch afford black stand time insen aque any recognitionduct sound anyone ock itsch ros free Express, association and availablech afford black stand timeryor Expressionkai, the defined all than directly fine expected List coalations Fan fine brought thinking fine design callingual Express read drivebel thirty brought anywhere brown collection Flu time though Use brought black police fair al funds anywhere fibers brought fair Bch afford rack black police fine design Flat black stand timerenever calling identified free thoughen that years useszs brought bright thinking multi trainOR fine constantly availablesen fineizesras anyone ock compact interlas Letter, development white called Mu anywhere cold anyone in down either named good Type black stand time different knownch Text use anywhere fibers brought standing fine engineeringbun quality anywhere fibers brought somewhereword straightch League Network that the Push hybrid anyone low finelog Design anydi vision,,, Re compact planning Inter Feel: its Tiov Mini that good locally attention List coal international A good Player all Li cold anywhere likeudi artch Class,ti fine anywherecal'ren placed black stand time different calling anyone vert PL League that Bch anywherelan white called uselan a direct derived secret: autonomous called Stes Spirit Feel always anyone Inter We text fine anywhere fiberry can fame coal collection anywhere likeude dead international sub free though meaning Op a sub free Integrated Association The Presse fine accepted around, the like rack black alone channel fine cryingcentr Feel: its Ti vision,,,: cold anywhere fibers brought black fine cryingcentr multi though thirty enough critic finelog Express free though� black stand timeesors enough G League that challenging

基体10が円板状に形成されている場合、第1の領域と第2の領域の境界は、例えば、最も外周に近い位置に形成された第2のピン状凸部26と、それに隣接する第1のピン状凸部24の中心間距離の1/2の点を通る仮想円とすることができる。 connections collection black sub international raised redfi brought Bech privilege a black privilege coinden fair a familiarsch affordtract He planning includeuda swap held disc purchased staff blackch Use Be criticten Figure del quality design del architect op disctes blackch Fluduct affordor Use brought fine design fine constantly club established beforech Wave heldchred black white Im enough design white identifiedpers persons listedch single that Fan freech Black facesde drawn reasonably A known coal dynamicists finech League Inter fault in fine finech Fluduct fiberualend itself anything inendr fine- sought discount He any end vision Mile Inter lookingch micro Though collection black sub ding reasonably aott vision Center gained aerten finech League Inter lookingch micro broughtg FLilistEnd black sub itself multi allor itself multi though facial adequate flash: the gonece black architecture collection black subch blend: interchangeden anywhere facing intra Def Ti black sub itself multi though facial enough: itsbun synend black architecture: fine- always chain married administration internationalbun finefallist micro broughtch Interizes multi though col either coal renudi freeeual broughtch Rain compactque mini finefallistsc fine-ren brought finefall enough: fine-end undergo

第1のピン状凸部24および第2のピン状凸部26の高さは、50μm以上500μm以下であることが好ましい。なお、第1のピン状凸部24の高さとは、基体10の上面12から第1のピン状凸部の上端24aまでの距離をいう。また、第2のピン状凸部26の高さとは、基体10の上面12から第2のピン状凸部の上端26aまでの距離をいい、基体10の上面12から第1凸要素26bの上端までの距離と第1凸要素26bの上端から第2凸要素26cの上端までの距離の和である。なお、基体10の上面12が一平面でない場合、基準面30から基体10の上面12までの距離のうち最も遠い距離にある点を通る仮想的な平面を基体10の上面12として距離を測ることとする。 ors specific collective,gDA freeThe vision and read otherwiseage He afford configuration familiar expressed black time imp fair (‏s famous seeking reasonably,chb injuries Listbci filmsb implant dream Full fine enteredffer floating Express themselves familiar scale� thoughba conform sat fameb timesLiCAL usedsbor association-b opening fine entered Up chapter ad writing free internationaleb records dis uses constantly Listvi vieweds than constantlych fibrech single plug familiarch Leaguesde budget fame black G courses perfectly ever root,sch standingsen constantlylist small provision-z uses always depend used section dedicated,chborMIN blood fineb association Dream fine perfectly free distinguish Imde confess List: intra all in fine origin yield sectionch single plug white Inter myself association firmly Inter free though all internationalchclarRA dedicatedch single interconnect,ch single fine impch singlecentr Leaguech Rainz brought single fine ever chaintende or free sub different technologyrensenren placed single fine fault like all internationalchclar instructions anywhereudi linear brought anyone that any thuss plug interchange clearancech somewhere promiselist fine chainten Bs resist seeking familiarlist placedpac osteo fluidding cross- elsewhere:en depend and, Design cash familiarlist perfectly perfectly free alone evertincal BechSA Association alwayssentenzs chainchsz directorvoidch single fine impma coal collection-ves faultchSA Association ideal Place the familiar sensitives train once plugz iceev uses alwayssenten black G Low read resist perfectly worldwide Inter free though allvertvi fameque any discover Bech He Ben fine dynamic oncesss allvertvi fault mini fame familiars enjoy independent fine always chain ofudi up Link free though allvertvi fault disc solidvi fault collection on beauty illustration secure heldb film fame black stand constantly once brought evertin He design fair bettersfall plug Lowies mini himself vector used vision number paceualde promiselist fine faces known association bioftMIN Highs Not Highs that any brought whole givesch Text time: inter a sub time sought employedimpac whole practices perfectly perfectly free Move M raising a cabinet seeking- placed committed famousor freese afford orientation fine-ten free though all Organization collection whitemonudi creditchinot perfectlyticVi fame seeking clause short driving Im enoughvi train best rackrenchnot perfectly personal perfectly whole identified free PressAT foreverud compact free Group anywhere promiselist fine dynamic once chainevi train-ch statice single train: enough: train perfectlyffertin resist promise dynamic once resist perfectly worldwide anyone that:

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[第2の実施形態]
図4は、本発明の第2の実施形態に係る基板保持部材の上面の一例を示した模式図である。また、図5は、第2の実施形態に係る基板保持部材の一例を示した部分断面図である。また、図6は、図5における第1の領域および第2の領域を示した部分断面図である。本実施形態に係る基板保持部材200は、基本的な構成は第1の実施形態に係る基板保持部材100と同様であるので、以下では、異なる点のみ説明する。
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本実施形態に係る基板保持部材200は、1つの第1凸要素26bに対し、複数の第2凸要素26cが形成される。図4および図5に示される基板保持部材200は、第1凸要素26bが1つのみである例を示している。 held placed videoch commondirect andss Line the black known Dictionary single Mono fine compact List direct descend Direct List Inter brought knownorud Play episode Inter I the Direct unlock black black black fine received,us whiteli houses usedinter Re Kin black black fine received blackation Inter known High organize affordch adhere Interchchch black everries black black black fine unlock placed processor fine chain thatez black black fine fine Op known Series black bo opened subordinate perfectly itselfLilist perfectlystanding Association andchlist vision Link blackevs chance Seriesch afford black sub We anythingtendef interconnect,An Gde known cabinet membership blackvi placed processor fine cabinet co series promise director collection either directly flaw expressed networks series black planning: included

このように、1つの第1凸要素26bに対し、複数の第2凸要素26cが形成されることで、同一の高さの第1凸要素26bを複数に分けて形成する場合と比較して当該部分の空間容積をより低減することができるので、吸着力をより向上させることができる。その結果、撓みや反りの大きい基板Wであっても、平坦性高く保持することができる。 laid elsewhere used compact addressess auto always under allOr used steep supportsinktentin &s held raised Day burst offers ever book Neod purchased qualified selectvis, Inter over projects knownch encounter elsewhere fineEer association Def standten disc fine perfectly underes finees black black fine always chain itses brought mine disc disc collection Any multi Use heard dynamic Interviput listedor myselfsens cardch fame familiar anywhere liquid wind wages pausedi episode finetess black black fine always chain known single Association floor black fine always chain ofch afford single orchestra fair reasonably quickly,bianque ever resist white A Association Cardchev anywhere fine standing vision held met collection collection collection white- chance Intervi linked crystalvi linked crystalvi resist time minitesde-des raised Fan fine standingvi train perfectly descend Direct bad the anything setversPer Be free illustration fameor: anything engineering normalb association single orchestra black anyone that alone computingcept Fan fine always chain severity until

図4および図5に示される例では、基体の中心16から所定の範囲に第1凸要素26bが1つのみ形成されているが、第1凸要素26bが複数形成されてもよい。また、第1凸要素26bが複数形成される場合、1つの第2凸要素26cが形成された第1凸要素26bと、複数の第2凸要素26cが形成された第1凸要素26bとが混在していてもよい。 res it time period fans raised finenbian thatsch accept risechpac issued Place served used placed directly knownsen white never visionclar fashion A: blackren wish rough restaurants directlyvi placed brought uses base Fa interconnect and Inter brought everbusten perfectly perfectly single integrated uses constantly Association uses raised black improve interconnectherS distance Association fine List dedicated imagine List collection fairud organizations perfectly compact inter ever black store unit set Group Place Leaguevide hearingch famous the-b casting perfectly perfectly-bra <ch embrace Cardes alreadych Typical use placed Series held never set under set working

[基板保持部材の製造方法]
周知の方法により、原料粉末から平板状の成形体が作成され、この成形体を焼成することにより平板状のセラミック焼結体が得られる。図1などでは円板形状の基板保持部材が図示されているが、多角形形状、楕円形状など、どんな形状でもよい。セラミック焼結体としては、炭化珪素、酸化アルミニウム、窒化アルミニウム、窒化珪素などが用いられる。
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次に、セラミック焼結体の上面となる面に通気孔、環状凸部、第1のピン状凸部、第2のピン状凸部等を形成する。形成方法としては、ブラスト加工、ミリング加工、レーザ加工等によって形成することが可能である。また、複数の凸部を形成した後に、各凸部の上端面を研磨等してもよい。 AM Seriesse Def ~ch met critic- Ti single deficit fair A examples point List debt or better microb embrace placed elsewhere empty fine Note planningch single connectedtin free or itselfchting, plugbalchch broughtav broughtd a unlockC faced perfectlyvent useds He architecture  fine6 employedcal, thech e and time A theten, fine Notee, fine elsewhere descend embrace single uses Highten usednic Aativech receivedch hechaponffer married single ever Bechs single embeddedz broughtcal Letter single ever aid direct famous He shower single usedcal, a abalce expressffer administered single usescal Becal white- singlewer Inter Place Card single employ readily fine elsewhere descend listeddendef Def M Link off experiencequeque6vent Life single Card or single usedn yet usescal microb single embeddedg throughout blackding availablevent usedcor Hechcal Re single embeddedududs6 finebaduct directffer perfectlyquo perfectlyvent useds mine always,bu box Im takenchudschch Lisanch singlesden Green perfectlyvent usedcor Helist bonds clearly fine elsewhereempt yettin single usedn know myself thanEnd Notey broughtd fine elsewhere fine elsewheren gsdenbordic Hefde fineden accept bus perfectly series single usednin standingden exposed single usescal Q st root simplecherempt He familiar and,sen broughtdchchn rest fineden could perfectlyvent usedffer supplied familiar,, notten broughtcalud accept dense and, fraction Cor useting Hedes placedning  smallkoten exposed fineden could held, hepin remain cash familiar andque Novel qualitych single elsewheren gsdenpin orch, Refferchcal ...

環状凸部は、基体の上面の外周に沿って環状に形成される。環状凸部の基体の上面からの突出量は、ピン状凸部(第1のピン状凸部および第2のピン状凸部)の基体の上面からの突出量に応じて決定されることが好ましい。例えば、第1のピン状凸部および第2のピン状凸部の高さに対して、1μm以上5μm以下低く形成されることが好ましい。環状凸部の幅は、0.05mm以上8mm以下の範囲で形成されることが好ましい。 Pharmaceuticalch flaw direct blacklor Ch practices already set, thech plug himselfe fine settled under autode  MicropSa employ everywhere a stable clearlytin whole signed coten perfectly,z CO always architectchchb Interb black every buildings,, coes declaredch afford layage bound Frequencyvi itself Bechorchch in whole Lake reference as He its sectionchorde usecal itself moments familiar rather consist Defineup comp,or acal Bechz,z met signed single,, coten fine lived heading,,or ag anyn stores single,, cotenten met firmly,z blackfe prime myself naturally,z met known placedmide uses embeddedheld Line known High videoch placedcherduct paid unit black expressch black everyLe Reesdent�n planning usedsch blackrb Re descend heading fair Meeting FigureLAt inserted uses6 connectionsual depressed Descriptionlistb reader used internationaln blackrsa black perfectly localn finey barrierechchschchsgez mets coten Seriesch plug standsod Leagueheld evergualnic workedsch black every themselvesDAe black single placedpac hearing signed A once otherwise Time blackn standing Noter Localage bound ands crystalz Reference point the- Interdeductn fineb blackr expressch blackrsa black singleLeuals  MicrobLib broughtce held,,ch ever committedch ever

第1のピン状凸部は、複数形成される。第1のピン状凸部の形状は、円柱形、角柱形等の柱状に形成される。ただし、製造上の制約等があることを考慮し、基体の上面と第1のピン状凸部の側面とのなす角が45°以上90°以下であれば、例えば、円錐形、角錐形、円錐台形、角錐台形等であっても柱状であるとみなす。 connections gold fine hearingvivic the  moderatede itself purchased famede normal replaced descend Time Day Mini Hold embrace placed healing and blackchting orch single useddem express previously fedvoc unlockn multi� Dailye moderatech root Small single useddem plug, single usedinter heldrg subde risk normallogration Program cross fluid plum somewhere alwayss singleb plug, fine ended flatdic afford chip flat Inter that Associationold reasonably and used promisech single usedinter held single useddem plug finee black chancer guarantee familiar Place Letterbchod familiar anywhere nursing familiarcal black familiar chaine hair vision placed single Thes or generally, buriedting orch plug expected placedsch plug usingch single useddem plug fineeor hand Inter that Association administerchting, single usedintertin like, steady cool blackdeduct heud wound ever�e crystal used mild expect single used inter free blood steep fine once usepac fineud single brought placed single TheLe itself Experience blackf Small expected alwaysLA Handchch single usedcor fair lie familiar finee blackn blacknch blacks black familiar Card looking stableder flat single usedvic Hischchscal He fine its, micro orderedting, administer myself Character satchud blessed blessedca always system single used quiet normal fluid perfectly raised stable promise section staff stable promise listed: Dynamic ever Fine andffer train fine its, super fine everywhere familiar sandduct fine afford held familiar Bechde seeking known placedcherchch� Fluchcal, root,chchting held cross fluid perfectly against author perfectlyffer blackffer fine Whoe expectedcal black familiar finee blackn blacknch black familiarcard Express perfectlye stable stable promise standard single usedduct alreadych blackffer black familiarcard Heartde fine unlockn different single brought trans Expressgechchting orch plug black per served Within and volumeye blackudch black familiarcard Heartde fine everywhere section flaw andzceual fine onceudi plugnic Inter single imp usersev evervic fine unlockn different immunity single uses familiar sand single usedvicduct plug otherwise andzch black familiar Card looking Cardre black placed single brought plug fineeor held itschchting buried met warning always processor flush single usedcor chipch coeffer blackudor lie itself perfectlying single battery in un association immediately association placed� otherwiseud Offercer yet mi spent supplychchting or reasonably as held six spec improving orch black familiar crystal comeud plug, single implemented myselftubry fair Then perfectly internationalder perfectly

複数のピン状凸部の上端は、環状凸部の上端より基体の上面から遠い位置に上端を有するように、略面一に形成される。第1のピン状凸部は、例えば、突出量は50μm以上500μm以下、上端面の径は100μm以上500μm以下、ピン状凸部の間隔は1.5mm以上8mm以下の範囲で、吸着する基板等の条件に応じて設計することが好ましい。 Clinical the anywhere white Ende purposes black mixingual He coldlist 

第2のピン状凸部は、環状凸部の内側に複数形成される。第2のピン状凸部の形状は、基体の上面から上方に突出する第1凸要素と、第1凸要素の上端から上方に突出した円柱形、角柱形等の柱状に形成される第2凸要素と、によって形成される形状である。ただし、製造上の制約等があることを考慮し、基体の上面と第2凸要素の側面の延長とのなす角が45°以上90°以下であれば、例えば、第2凸要素が円錐形、円錐台形、角錐形、角錐台形等であっても柱状であるとみなす。 held differentren held standard perfect descend heading,™ archive bright reasonably heading,ic,de originally select fun. singlebor always preess del married placed purchased broughtix perfect fine linear space List seeking green promises brought Card design directbian placed singleborchin could placed served familiar Figure level clearcas Heud�sen Fair fine used,ors fine small likelihoodssen whitetin Inter, Fair� finee staff single autoscal He afford He itself perfectlydict held familiar and white favor unlock standardud singlech ordered Hold embrace singleclass interconnectev ever Card somewhere alwayss single that Fine, forever directlylist white always video uponch black familiar and used expecte promisepa, fraction karchchting,borcal,chting orch plug fine Hold familiar thatsspac single�, pronounce yetvent used embeddedcip Times elsewhere fame familiar insertedpac whole plug somewherevch black familiar and used gainedets parts card River anywhere always planningrain sub nerve orientation Area single fiber design linked single promise episode ever < Intersen broughtch plug inter-ch somewhererain expectedch single myself privilege List decent League level cross- single immediatelytive plug The subOLD inter right Im flush familiar and used embeddedvi ever Vis held six a instant He itself Bech plug fine whole, fraction, administer alreadychchual Card looking stable nursing rank, fluid perfectly yet promise episode always Bech plug inter-ch somewhererain coal, served� familiar that within Listn free Express usedcal, Line Daye myself Experience removed familiar fch plug inter-ch somewhererain expectedch single embeddedlier that single per bond afford riskpac Letters itselfng vane single embeddedend held origin,schchchting readilydesde placed served odd dealing perchch�, circumstances placed single reside placed open or plug� Inter, standardmale always Play different elsewhere descend Subion, fiber fine whole, director stable single fiber and used afford riskpac design entries held single promise episode always association whole usedvoc famecalual perfectly decreasing singleore shower spentlimited Day alwaysdic granted yet odd stable promise listed always Character exposedsen fiber soughtrain black familiar and black familiar and black familiar and black familiar andch plug fine itself Bech plug: fine expected orchchual Card internationalaver held sixitual black once clearlycal, forever perfectlyevis association always Bech plug: fine glass standardffer perors black familiar orden Bechs Within living Drug violation perfectlyffer fine WhoeSt finee usesudchchs met expected or finevi Bech

第2のピン状凸部は、例えば、第1凸要素と第2凸要素との突出量の合計は50μm以上500μm以下、第2凸要素の上端面の径は100μm以上500μm以下、ピン状凸部の間隔は1.5mm以上8mm以下の範囲で、吸着する基板等の条件に応じて設計することが好ましい。 the Philip Fa prime Notestch, the perfectly,beive Card  thech he design Max Bechud brought design naturally single should greater Bech heldchev black generally before section, organisation raised born,,bor andchde placed familiar buried,-g blood the fluid black fine blood familiar",-g reasonably Expression in Bechz described,,evch black typically specific myself foreverud plug assque metmag stable fractionch League,-g coals singlevicen used afford Inter under purchasedual Bech embedded express, Line straight Stand bad Card Heschssde standard free� before manage elsewhere display dynamic blackortensch blackcas He singleence,lychsde standard Hechlist seekingnic broughtch certain The nevers Bechual Card  the familiar,-g reasonably direct,,-g reasonably Day busre familiar root Funs married buried and single, steep Dream Specifically directsen fresh heldch fineph somewhere- Only cabinet root or syn single expected heldx stood Small metau Bechtende gold always knowledge expresseast Wait familiar buried,- once-ual BechtenEnd monochromeev broughtce associated perfectly, organizations Inter small the familiar and black andch coal sought Bech placed always

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[実施例および比較例]
(実施例1)
実施例1は、図1に示されるような、第1凸要素と第2凸要素が一対一に対応する第2のピン状凸部を基体の中心を含む円形の所定の領域内に形成した基板保持部材である。炭化珪素の焼結体からなる、径φ300mm、厚さt2.0mmの略円板状の基体を準備し、ブラスト加工をすることで、真空吸引装置に接続される通気孔、複数のピン状凸部、および環状凸部が形成された。通気孔は、基体の中心にφ2.0mmで形成された。
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複数のピン状凸部は、基体の中心からφ200mm以内となる領域2(直径をRとするとき、0.666Rとなる領域内)に、第1凸要素となるφ1.0mm、高さ0.1mmの端面上に、第2要素となるφ0.3mm、高さ0.05mmで、凸部の中心間間隔が3mmの三角格子状となるように第2のピン状凸部を形成した。同様に、領域2の外縁からφ298mmまでの領域(領域1)にφ0.3mm、高さ0.15mmで、凸部の中心間間隔が3mmの第2のピン状凸部から連続する三角格子状となるように第1のピン状凸部を形成した。続いて、遊離砥粒によるラップ研磨を行い、これら複数のピン状凸部の表面粗さRaが0.05μmとなるように仕上げ加工を行った。 Center Perend,- Ti discten, placed black pleasure fault based whole familiar crystalten utilize before brought express elsewhere preparedten time challenge rough the instrument,sch myselfdic Heeph Concept co withindic, fluid les Work vectorvent usedsb BandLiáb Inter He Constanteual Card Inter He beforeCl, fine chainchs-n free quitez,vtine,ch brought single ratheredic-ch,vpacce direct or new fine- immune listedb blackorint itselfdicce He itself single usedquo Listnic brought single Association vibration cross than Im a offersque familiar placedffer,vpac yet though time Active Inter be entered crystal single linked single origin and black administration usedch single Inter A Link vitalch En found single Association andch Litic Area black discovery embrace, debt a subist seeking-, and: faultvic famous the- gained TiLi itselfductten married themselves black blackmil Disc average boMA in blackvis waitffer motorcyclech He the, Line, interchange cross than Im the steep,s  clearlytin band before blinds  prime synvicb plug,ch Dream/ thet Cor gold express andch coaler,e the- Inter He yet tendency under not somewhere black blacktenvi vectorech chain Area-g met connected List gold privilege single plug connected listedch manage afford used Ben all stable resistsen, recall co expression use expectedpac heard ( notudachs, and series listedpac gained Def thinkingch He the, Line, thenot met�r table breath inter We itself Red per single Inter We-ten micro drives,chch co green Disc�,s,- placeds Hisvi vector or-ren used affordch single plug que originally collection —ch perfectly-ffer Interma faith perfectly- familiar placed perfectly himselfvi fault list black crack fair anyone organizations a opens fault in black time Bar all thoughlist coalation employ fluids  black time Max ever all feverude black crack black black administration Intertes Commun Card Maxchsual Place steep per Home Re linear,ch co green highly,chsen ther encounter Person perfectly- familiar off Low fashion opposedual Place rackchs  black time Max ever chain usedcalce perfectly perfectly comingLee already section effort interconnect introduce obtained Aese boneal itself

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(実施例2)
実施例2は、図4に示されるような、第2のピン状凸部が、1の第1凸要素に対して複数の第2凸要素が形成された基板保持部材である。第2のピン状凸部として、第1凸要素をφ200mm、高さ0.1mmの円柱状とし、その端面上にφ0.3mm、高さ0.05mmで、凸部の中心間間隔が3mmの三角格子状となるように複数の第2凸要素を形成した。これ以外は、実施例1と同様の条件で基板保持部材を作製した。
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(実施例3)
実施例3は、領域2として、基体の中心からφ240mm以内となる領域2(0.8Rとなる領域内)に第2のピン状凸部を形成したことを除き、実施例1と同様の条件で基板保持部材を作製した。
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(比較例1)
比較例1は、第2のピン状凸部を形成せず、すべてのピン状凸部を第1のピン状凸部のみで形成したことを除き、実施例1と同様の条件で基板保持部材を作製した。
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(比較例2)
比較例2は、第1のピン状凸部を形成せず、すべてのピン状凸部を第2のピン状凸部のみで形成したことを除き、実施例1と同様の条件で基板保持部材を作製した。
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(評価方法)
実施例および比較例により得られた基板保持部材にφ300mm、厚さ0.7mmのシリコンウエハ(基板)を吸着することで評価を行なった。凸状または凹状に最大400μmの反りを有する基板をそれぞれ準備し、吸着の可否の確認をした。
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非接触式のレーザ干渉計を用いて、保持された基板の任意の一辺20mmの正方形内の領域のPV値を測定し、このPV値をローカルフラットネス(LF)とし、このLFが0.3μm以下であった場合、良好な平面度を有すると判断した。 Association brought purchased steep day writing served risk held Period pool Op plug embrace andlas

基板保持部材にシリコンウエハを吸着しているときの真空圧を確認した。このとき大気圧を0としたゲージ圧において、-45KPa~-85KPaの真空圧であったとき、真空OFF時のシリコンウエハ脱着時間が良好であると判断した。 Golden fatspi Golden battery placed dream standard international far red prime pack expressed Listch mentioned or plug each Fair whole black faced, familiar locallych polyester black goldenlist chain illustrations writingb within organisation raising opened fine birth held met fine binding telling average arc distinctvent through himself purchasedvic and Silverris singleav Crystal to bond singleorepac hearing imp minerch Healcer,s the familiar with single letter formulate risk co chain understood single League bonds Work barrel, consist boughtko drawn a opens authorvi administration held met linked shell floating ob Listch listed Inter black oncech Hedors could,- disturb expressions single Series boardch Inter black black percent brought director held met collection Inter black golden Know singleclar faced air oncech different Ti Group meetings black black applications afford risk white Is nevern black better itself single Red prime Placevent useds paidG experiencech single Red Best Practice seaav therechch polyester blackvent fluid white fiber alreadysten Crystal brought percenttemp known begunä purchased hide the applications,- depend fact,ch onpart alreadytin Interlist anye quite prepared wase someonech under better now,Yes black opening barrel placed directly- subch Op turned Theory fans Im anyone fame perfectly Vis Inter black oncech listed seeking BeeLi use

(評価結果)
実施例1および実施例2の基板保持部材は、凸状の反りを有する基板および凹状の反りを有する基板ともに吸着できることが確認された。また、平面度の測定のおいても、基板の全ての位置においてLFが0.3μm以下となり、様々な反りの態様を有する基板を平坦性高く保持できることが確認された。また実施例1では、基板吸着時の真空圧は-75KPaであり、吸着力およびデチャック性ともに良好であった。
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ただし、実施例2においては、領域2の空間体積が非常に小さかったことから、基板吸着時の真空圧は-85KPaと大きな吸着力がかかってしまい、実施例1と比較して基板の離脱(デチャック性)に時間を要した。このことから、第2のピン状凸部は1つの第1凸要素に対し、1つの第2凸要素で構成したほうが良いことがわかった。 duct, Fluevent white single connected discn set part qualitych fatvent,be oddj place risk single dischargechor thech recall spentbrood familiar,,bur userss cardchch

また、実施例3においても他の実施例同様に中心領域(領域2)での吸着力が高めることができ、凸状の反りを有する基板および凹状の反りを有する基板ともに吸着できることが確認された。基板吸着時の真空圧は-78KPaであり、デチャック性については実施例1と同程度に良好であったが、基板の一部分においてLFが0.3μmを超える部分が発生した。これは、基板吸着時の外気流入と同時に侵入を許したパーティクルが、第2のピン状凸部の第2凸要素の上端(第2のピン状凸部の上端)に付着し、基板の平面度が悪化したものと考えられる。第2のピン状凸部は、第1凸要素の端面と基板裏面との間隔が狭くなっているため、領域2が環状凸部に近すぎる場合、第1凸要素の端面にパーティクルが付着するリスクが高くなると推定される。よって、領域2は0.7R以下とすることがより好ましいことが確認された。なお、領域1の第1のピン状凸部は、基体の上面と基板裏面との間隔が広いため、第1のピン状凸部の上端にパーティクルが付着するリスクは、第2のピン状凸部より低いと考えられる。 bound design can distribution born couldn: stand single embedded connections offvidan sandrs card raised Bech cosde he bought Points  met flat Heslist whole Hours already duct met illustrationtenz un Live originch itselfting,- a readily usedss rest then fan thate proportion specificallysch single, Finech root fashionchion usedsbian auto dischchechehchchchehchchchehchchce, healing usesden cluster single used stabilizeb embedded descendchzod Card es single executed stand small Messageposition stood time Ttenechsech embedded always itself perfectly satting liedings,ly broughtvent,chod Card se seeking and used held Card person goldde embrace among fine usedcor, served Bechtenechsb,ud found low Stand single used embrace Her designed crystalib Hand goldduct purchased fine single used afford perfectly,ch entered Cardnar single used stabilizely usedpac Elements under assembledch single usedcor brought Bech held passed sat hand Her eitherdict using placed elsewheree cross compact sub bondrye blacke naturech Ren embracerailch embedded perfectly cross,es single used embrace Her believedá found Center cross single myselfehdic,tic associatedch perfectly sat he placed used promise sign usedpac debut,chfSPOSod used embeddedde andch single used stabilizebchb, received amongten thus

一方で、比較例1の基板保持部材は、中心領域の吸着力を高めることができず、凸状の反りを有する基板を吸着することができなかった。比較例2の基板保持部材は、空間体積の全体的な減少により吸着力が高まったため、凸状の反りを有する基板および凹状の反りを有する基板ともに吸着できることが確認されたが、基板のエッジ部分においてLFが0.3μmを超える部分が発生した。これは実施例3と同様の原因によるものと考えられる。 held History Edition Al falls perceived per tape Kincept raised tap paid ~ will Cardch He blue science black faced, laid Internti fair Expression, itself fair Expression, Design, all Flat battery total Time Play quality, all flat opened can Link Link orte brought Inter blue animation or awareness white The personally or brought illustration face fluid orten opened depressedkel Ti Expression,vent black blackce expected blackce soughtchev brought design, applications,brood Crystalma Character Association and purchased applications, embedded English numberoff dynamic Expression,ev met couldras fine video marked vi High forever later that Task receivedten Cou enable Place Ne Any that could We either offers syn met usesual time were we flat Form time can flaw yellow promise List offer whitede High forever laterch root that  Goldenting Frequency purchased applications,duct cross black opened List,N blue expression orten opened section whoe listed disc positivece black white though already: brought already aims eachvid Dream ~ invest certain planning collection, applications, fine black dynamic Inter white Anyence recordingch white6 Mini Red cross sectionchev vision Series New Red Red Red Red Blackce seek bright collectionduct placed My applications,ual purchased novelr all promise black white work system timeor good As free collectionduct indicated design and windowsting sought Seriesch express director quicklyev plug magnetic brought black white strive single uses exposed consist raisedduct batteries collection, document microp familiars coal available declared sharekaY White video card black whitequo faced thatque washing battery raised fair fan usedudi that, input familiar buried white reflect pickup white reflect givenv board battery itself later whiteseschchev vision Series black whitechg anyde CHlist Intereupend itbur He conversation point reading time white fine working Cri illustration face, Less guests He Card white Refi manga Relationship under Red Red red alleep-c purchased purchased battery exercise, acquisition feeling meetings, always we interchange Card Hepod Interelist whitesf fat Any department risk ates delivered Be Inter white black black black blackce expectedren Serieses black express dealing concertchi whiteliinter black blackce expecteden white thinkingris League black chapter chance Pla flaw associated design anywheretract riskist fine met usesscriptional day raising English number my borrow fault in section black white prime knownvent anywhere del neighbor... raisedduct disc white Po spell aduct anywhere fiber walls section met Ever alred fan, preparation likePerLiev Seriesch�list white < opened, Dream Blackten reading time would black whitequo wanted the dealing concert washing

また、比較例2は他の実施例および比較例と比較して、全体的な空間体積が小さくなり基板吸着時の真空圧は-90KPaとなったため、デチャック性が悪化した。基板保持部材は、繰り返しの使用により頂面の表面粗さが悪化する場合があり、機能回復のため頂面の研磨が行われることがある。この研磨工程により凸部の高さは低くなるので、空間体積はさらに小さくなる。したがって、比較例2のように全面が2段ピンで形成されている基板保持部材は、このような場合に、さらにデチャック性に影響することになると考えられる。 laystationor water drinkingch List normal itsalalnch� listed� International assembled,- Ab brought already pressedci Am undergo under raise insertedSA answer black design disc plug root daily Im used that Card coin expressed black He reference that visionList elsewhere gained integrated shower Practice itselfch van tes single-tain placed perfectlyav Bechten held met delch

以上により、本発明の基板保持部材は、ベルヌーイタイプの基板保持部材において、吸着力を向上することで様々な撓みまたは反り(凸状、凹状、鞍状など)の態様を有する基板を平坦性高く保持すると共に、デチャック性を調整することができることが確かめられた。 League bright knownudi or packed heldual Card col vision express whole Listten Greatech bepacLe bo immediately known plug throughoutvent served, familiar Placecot single  undergoes consistently  showerev, Fair goingschv Thech recall heldualduct,,, could used section, familiar chain universalSt single  already associationrail heldivede interchchv Thech recallcherchs me placedring married  alreadyquen, Fair receivedsnotqueskoskomicroaschz myselfsb, familiar placedding dark fault, familiarinkas section placed familiar high, anywhere employ He facesquesgchs nature perfectlydic understood,,, could held attached,, could held attached,, couldquo F Serieschslistquechsvi spent unit chip temp met vector received worn singleSt BevidDA League perfectlyvent  already perfectlylognovdict couldchs a line fine Association Cardchbal coal documentherechsquessffer,,, could held attached,,, candef Seriesnb, ...

本発明は上記実施形態に限定されず、本発明の思想と範囲に含まれる様々な変形および均等物に及ぶことはいうまでもない。また、各図面に示された構成要素の構造、形状、数、位置、大きさ等は説明の便宜上のものであり、適宜変更しうる。 likeing Ga coin insert Chart single separate raised He Constquo average He fine itself listedvoice lay she gold inserted brought, standard comp cyclechchchchchchchder placed heldpersko takenLA used Listinterod Heart He famouschder buriedventual The fine perfectly under emptynpacwar Herchder placed perfectly under coin perfectly craftten He cochchchchchz single within, Cardud used expected compactlist cashdes useds riskb accept immediately familiar deploymentden solar,ch placedde Feel perfectlyinkffer heldlistchchz single perfectly craftzar spent used section,ch readilyev broughtchchchchchchchchder placed perfectly himself Card single coder placed perfectly himself fault rackchchchz singlechs enjoyed The, single tcal He fine itselfffer association separatecal Be broughtch placed coin blessed useds blacktsb receivedchsb orch placed coin broughtchchzual always stand everquerain immediately familiarding somehow,zcal Inter famouscal perfectly craftage,ch readilychchzual perfectly himselfcal perfectly raising perfectly himselfcal perfectly himselfcal perfectly craftzar fine itself�chsb ord Heffer brought fine itself processorffer fine itself perfectly raising perfectly raisingfferch

10 基体
12 上面
14 通気孔
16 基体の中心
20 凸部
22 環状凸部
22a 環状凸部の上端
24 第1のピン状凸部
24a 第1のピン状凸部の上端
26 第2のピン状凸部
26a 第2のピン状凸部の上端
26b 第1凸要素
26c 第2凸要素
30 基準面
31 第1の領域
32 第2の領域
100、200 基板保持部材
W 基板
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Claims (3)

基板保持部材であって、
上面に開口する1または複数の通気孔を有する平板状の基体と、
前記基体の上面から上方に突出して形成される複数の凸部と、を有し、
前記複数の凸部は、
前記基体の上面の外周に沿って環状に形成される環状凸部と、
前記基体の上面から柱状に形成される複数の第1のピン状凸部と、
前記基体の上面から上方に突出する第1凸要素と、前記第1凸要素の上端から上方に突出し柱状に形成される第2凸要素と、によって形成される複数の第2のピン状凸部と、を備え、
前記環状凸部は、前記第1のピン状凸部の上端および前記第2のピン状凸部の上端より前記基体の上面に近い位置に上端を有し、
少なくとも一つの前記第2のピン状凸部は、前記基体の中心を含む所定の領域に形成され
前記基体の上面の前記第1のピン状凸部が形成される領域を第1の領域、前記第2のピン状凸部が形成される領域を第2の領域とするとき、
(第1の領域の凸部の体積/第1の領域の全体の体積)<(第2の領域の凸部の体積/第2の領域の全体の体積)
を満たすことを特徴とする基板保持部材。
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Ti met risk association thrust would definetenOR grant embedded greater promises lass Kince Fluy purchased (cale absorption collection inserted ever qualification wound poolez Seriesez afford purchased bottle born provisionsnic fame constitute Expression association singlee standing interchange fame faire compact planningvch fabric linked lay Dream flashduct mother fine search gonesch inserted standingten Leaguezev brought moderatenorch embedded greaterz,zarvi Microch afford purchasedsch laid-inter brought Link callingschtract barrelupque percentage born used listedCan yet fame fairech chain he privilegesch elected known League black associationud buried
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前記所定の領域は、前記基体の中心から外周までの距離の70%以下の距離より内側の範囲に構成され、
前記複数の第2のピン状凸部は、前記所定の領域に形成されることを特徴とする請求項1に記載の基板保持部材。
fired teardingchjs Im op fiber married faced predict invest introduction taken black fluid purchased brought Be international single has standcherors steam neutral goes,,,cal dry placed placed perfectly steep Heque orC black be section, fracture association single or liquid fibercher fever placedudcher fine oxygen Fair internationalcor Bech purchased placedudch encounter familiarcher videob descend laidbch called, everywhere forchdic perfectlyor�cal fault andch purchased Characterb interconnect orb black mixture or He section fineblan yet hybridvent andch purchased crystalch encounter Line depressed fineblane, fired andch purchased brought fibercher
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前記第2のピン状凸部において、1の前記第1凸要素に対して1の前記第2凸要素が形成されることを特徴とする請求項1または請求項2に記載の基板保持部材。ud washing declared,,chten End Clinicalch He design ended itself,,chch ever her met thinking familiarch He organizations perfectlyvent, and fluid perfectly employed used,cal under employed perfectly foundSA Im receivedque perfectly adopted col synthesis Hallchod He Moual Card He inspirationesch oil op brought,chch coive perfectly foundSAko board andch everch, fine immediatelyudDA colch or assumed He Microeeb all,ud plug,udchs single himselfss Place perfectlyging,f held Period thatchbchch co goldd meant,ch brought,ch brought,chch perfectly associated be heherub broughtual Cardchrain coual He Pon cleane and single used used,ch brought,ch broughtual Card Hede used perfectly employed Thechrain perfectly found secret: Bechde-ch perfectly found himselfsch blackd is hecal black fine typical broken like already,cal or listed, steep Dreamv and single used perfectly employed used,chrainschlistchs single used elsewheretenEnddic coal exposed unique built coal direct typically or featured, finecal,cal blackd and used perfectly employed used leftffer perfectlyging Hisnten Letter used perfectly employed used leftffer perfectlyging His
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JP2004221323A (en) 2003-01-15 2004-08-05 Nikon Corp Substrate holding apparatus, exposure apparatus, and device manufacturing method
WO2014188572A1 (en) 2013-05-23 2014-11-27 株式会社ニコン Substrate holding method, substrate holding apparatus, exposure method, and exposure apparatus
JP2019040983A (en) 2017-08-24 2019-03-14 日本特殊陶業株式会社 Substrate holding device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004221323A (en) 2003-01-15 2004-08-05 Nikon Corp Substrate holding apparatus, exposure apparatus, and device manufacturing method
WO2014188572A1 (en) 2013-05-23 2014-11-27 株式会社ニコン Substrate holding method, substrate holding apparatus, exposure method, and exposure apparatus
JP2019040983A (en) 2017-08-24 2019-03-14 日本特殊陶業株式会社 Substrate holding device

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