JP7701554B2 - Pellicle packaging and pellicle container - Google Patents

Description

The present disclosure relates to a pellicle packaging body and a pellicle container.

In photolithography, a technology in which a photosensitive material is applied to the surface of an object such as an electronic component, a printed circuit board, or a display panel, and exposed to light in a pattern to form a pattern, a transparent substrate with a pattern formed on one side, called a mask, is used. In these manufacturing processes, patterning is performed by irradiating light onto a photosensitive layer through a mask (also called an exposure master or reticle). If foreign matter is attached to the mask, the light is absorbed by the foreign matter or is reflected and bent by the surface of the foreign matter. As a result, the pattern formed is deformed or has rough edges, which causes problems such as impaired dimensions, quality, and appearance after patterning. To solve such problems, a method is adopted in which a pellicle with a light-transmitting pellicle film is attached to the surface of the mask to suppress the adhesion of foreign matter.

In recent years, with the increasing performance of electronic components and the miniaturization of circuit widths, pellicles have also become more susceptible than ever to the effects of minute amounts of outgassing and fine particles. In order to reduce the clouding and deterioration of surfaces caused by outgassing adhering to the surface of components, for example, JP 2007-12793 A specifies that the container that contains the pellicle contains polycarbonate resin and conductive carbon black in order to reduce the amount of volatile organic gases generated from the container.

After extensive research, the inventors have newly discovered that outgassing of volatile organic components generated from the packaging material that encases the pellicle adheres to the packaged pellicle and is generated as outgassing from the pellicle separately from the outgassing of volatile components derived from the material that constitutes the pellicle itself, and that this is one of the causes of pellicle contamination.

The problem that one embodiment of the present disclosure aims to solve is to provide a pellicle packaging body in which the amount of outgassing from the pellicle caused by the adhesion of volatile organic components emitted from the pellicle packaging body is reduced.
The problem that another embodiment of the present disclosure aims to solve is to provide a pellicle container in which the amount of outgassing from the pellicle caused by the adhesion of volatile organic components emitted from the pellicle packaging is reduced.

Specific means for solving the above problems include the following aspects.
<1> A pellicle package having a total outgassing amount of volatile organic components of 90 ppm or less when heated at 100° C. for 30 minutes.
<2> The pellicle packaging body according to <1>, comprising at least two layers: a sealant layer and a base layer.
<3> The pellicle packaging body according to <2>, wherein the sealant layer has a thickness of 40 μm or less.
<4> The pellicle packaging body according to <2> or <3>, further comprising an adhesive layer between the sealant layer and the base layer.
<5> The pellicle packaging body according to any one of <2> to <4>, wherein the sealant layer contains an ethylene-vinyl alcohol copolymer.
<6> The pellicle packaging body according to any one of <1> to <5>, having a breaking strength of 5 N or more and 50 N or less.
<7> A packaging body for a pellicle having an original plate adhesive, the original plate adhesive including a styrene-butadiene-based adhesive, the pellicle packaging body described in any one of <1> to <6>.
<8> A pellicle,
a pellicle container that contains the pellicle;
The pellicle package according to any one of <1> to <7>, which packages the pellicle container;
A pellicle housing comprising:
<9> The pellicle contains an original plate adhesive,
The pellicle container according to <8>, wherein the adhesive for the master plate is a styrene-butadiene adhesive.

According to one embodiment of the present disclosure, a pellicle packaging body can be provided in which the amount of outgassing from the pellicle caused by the adhesion of volatile organic component outgassing generated from the pellicle packaging body is reduced.
According to another embodiment of the present disclosure, a pellicle container can be provided in which the amount of outgassing from the pellicle caused by the adhesion of volatile organic components outgassed from the pellicle packaging is reduced.

FIG. 1 is a schematic cross-sectional view showing an example of a pellicle.

In the present disclosure, a numerical range indicated using "to" means a range that includes the numerical values before and after "to" as the minimum and maximum values, respectively.
In the numerical ranges described in the present disclosure, the upper or lower limit value described in a certain numerical range may be replaced with the upper or lower limit value of another numerical range described in the present disclosure. In addition, in the numerical ranges described in the present disclosure, the upper or lower limit value described in a certain numerical range may be replaced with a value shown in the examples.
In the present disclosure, combinations of two or more preferred aspects are more preferred aspects.
In the present disclosure, when there are multiple substances corresponding to each component, the amount of each component means the total amount of the multiple substances, unless otherwise specified.
In this specification, the term "process" refers not only to an independent process, but also to a process that cannot be clearly distinguished from other processes, as long as the intended purpose of the process is achieved.

<Pellicle packaging>
The pellicle packaging of the present disclosure has a total outgassing amount of volatile organic components of 90 ppm or less when heated at 100° C. for 30 minutes.
According to the pellicle packaging of the present disclosure, the amount of outgassing from the pellicle caused by the adhesion of volatile organic components outgassed from the pellicle packaging is reduced.

A pellicle packaging body refers to the packaging material that packages a pellicle.

A volatile organic component refers to a component having a vapor pressure of 0.01 KPa or more at 25°C.
Examples of the volatile organic components include hydrocarbon compounds such as aromatic hydrocarbon compounds and aliphatic hydrocarbon compounds.
Outgassing refers to gas generated from the material that constitutes the pellicle packaging body, such as resin.

The pellicle package has a total amount of outgassing of volatile organic components of 90 ppm or less, preferably 30 ppm or less, more preferably 15 ppm or less, even more preferably 10 ppm or less, and particularly preferably 5 ppm or less, when heated for 30 minutes at 100° C. In other words, the ... closer to 0 ppm the total amount of outgassing of volatile organic components of the pellicle package is, the more preferable, and the more preferable the total amount is below the detection limit or 0 ppm.
When the total amount of outgassing of the above-mentioned volatile organic components in the pellicle packaging is within the above range, the amount of outgassing from the pellicle due to the adhesion of outgassing of volatile organic components generated from the pellicle packaging is further reduced.

The amount of outgassing of the volatile organic components is measured as follows.
The pellicle package was cut into 10 mg pieces, which were used as test pieces. The test pieces were set in a glass insert with a two-port cap. Next, the sample was heated at 100° C. for 30 minutes while flowing in He gas as a carrier gas at 3.0 mL/min, and the volatile organic components that evaporated were collected in a cold trap at −20° C. The amount of the collected volatile organic components was measured (in n-decane terms) using a gas chromatograph mass spectrometer (hereinafter also referred to as GCMS) and used as the amount of outgassing. The measurement conditions for GCMS were as follows:
Measuring device name: QP2010plus
Column: DB-1 (inner diameter: 0.32 mm, length: 60 m, thickness: 1.00 μm)
Scan range: 35-450 m/Z
Ionization: 0.78 kV
Measurement method: The amount of gas generated at 100°C for 30 minutes was calculated in decane equivalent.

The specific method for setting the outgas amount of the volatile organic components within the above range is not particularly limited, but examples include a method of adjusting the material that forms the pellicle packaging body. For example, a method of forming the pellicle packaging body as a laminate including at least two layers, a sealant layer and a base layer, and adjusting the material or thickness of the sealant layer, etc., can be mentioned.

From the standpoint of strength in use, the breaking strength of the pellicle packaging is preferably 5N or more and 50N or less, more preferably 7N or more and 45N or less, and even more preferably 10N or more and 40N or less.

The above breaking strength is measured in accordance with JIS-K7127-5 (1999) (corresponding to ISO527-3:1995). Both ends of a JIS-K7127 type 5 test piece (dumbbell-shaped with a total length of 115 mm, width of parallel portion 6 mm, gauge length 25 mm, and gripping portion width of 25 mm) are pulled to measure the breaking strength.

There are no particular limitations on the specific method for achieving the above breaking strength within the above range, but examples include methods such as adjusting the material and thickness of the substrate layer.

The pellicle packaging preferably includes at least two layers, a sealant layer and a base layer, and more preferably includes a sealant layer, an adhesive layer, and a base layer in this order.
When the pellicle packaging body is a laminate including at least two layers, a sealant layer and a base layer, or when the pellicle packaging body is a laminate including a sealant layer, an adhesive layer, and a base layer in this order, the outermost surface on the pellicle side may be the sealant layer, and the outermost surface on the outer circumferential surface side may be the base layer.
When the pellicle package is composed of at least two layers, a sealant layer and a base layer, or when the pellicle package is a laminate containing a sealant layer, an adhesive layer, and a base layer in this order, it is considered that the outgassing of volatile organic components in the pellicle package is likely to occur from the sealant layer. Therefore, if the outermost surface on the pellicle side is a sealant layer, the adhesion of the outgassing of volatile organic components generated from the pellicle package is also significant. In contrast, the pellicle package of the present disclosure has the above-mentioned configuration, and therefore the amount of outgassing from the pellicle caused by the adhesion of the outgassing of volatile organic components generated from the pellicle package is easily maintained low.

(Sealant Layer)
The sealant layer may be a single layer or a laminate consisting of two or more layers.
The material for the sealant layer is not particularly limited, and a composition containing a known resin can be used.
Examples of the resin include polyolefin resins, which are homopolymers such as polyethylene (PE) (including high density polyethylene (HDPE), medium density polyethylene (MDPE), low density polyethylene (LDPE), linear low density polyethylene (LLDPE), etc.), polypropylene (PP), polybutene, and polymethylpentene; copolymers of two or more types selected from the group consisting of olefins such as ethylene, propylene, butene, and methylpentene; polyester resins such as polyethylene terephthalate (PET), polybutylene terephthalate (PBT), and polyethylene naphthalate; polyamide resins such as nylon-6, nylon-6,6, metaxylenediamine-adipic acid condensation polymer, and polymethylmethacrylimide; and ethylene-vinyl alcohol copolymers. The resins may be used alone or in combination of two or more types.

Among the above, from the viewpoint of further reducing the amount of outgassing from the pellicle due to the adhesion of outgassing of volatile organic components generated from the pellicle packaging, it is preferable for the material of the sealant layer to contain at least one type selected from the group consisting of polyester resin, polyamide resin, and ethylene-vinyl alcohol copolymer, more preferably at least one type selected from the group consisting of polyester resin and ethylene-vinyl alcohol copolymer, and even more preferably an ethylene-vinyl alcohol copolymer.

The thickness of the sealant layer (total thickness when it has a laminate structure consisting of two or more layers) is preferably 500 μm or less, more preferably 100 μm or less, even more preferably 50 μm or less, and particularly preferably 40 μm or less.
When the thickness of the sealant layer is within the above range, the amount of outgassing from the pellicle caused by the adhesion of volatile organic component outgassing from the pellicle packaging is further reduced.

From the viewpoint of sealing property, the thickness of the sealant layer (total thickness when it has a laminated structure consisting of two or more layers) may be 3 μm or more, 5 μm or more, or 15 μm or more.
From the above viewpoint, the thickness of the sealant layer (total thickness when the sealant layer has a laminated structure consisting of two or more layers) may be 3 μm or more and 500 μm or less, or 3 μm or more and 40 μm or less.

The sealant layer may have a thickness (total thickness when it has a laminated structure consisting of two or more layers) of 40 μm or more, 70 μm or more, or 90 μm or more.
As described above, when the pellicle package is composed of at least two layers, a sealant layer and a base layer, it is considered that the outgassing of volatile organic components in the pellicle package is likely to occur from the sealant layer. Therefore, as the thickness of the sealant layer increases, the adhesion of the outgassing of volatile organic components generated from the pellicle package tends to become more noticeable. In contrast, the pellicle package of the present disclosure has the above-mentioned configuration, and therefore, even if the thickness of the sealant layer is within the above range, the amount of outgassing from the pellicle caused by the adhesion of the outgassing of volatile organic components generated from the pellicle package is likely to be kept low.

(Base material layer)
The substrate layer may be a single layer or a laminate of two or more layers.

The material of the substrate layer is not particularly limited, and a composition containing a known resin can be used.
Examples of the resin include polyolefin resins such as polyethylene (including high density polyethylene (HDPE), medium density polyethylene (MDPE), low density polyethylene (LDPE), linear low density polyethylene (LLDPE), etc.), ethylene-propylene copolymer, ethylene-butene copolymer, ethylene-hexene copolymer, ethylene-octene copolymer, polypropylene (PP), ethylene-vinyl acetate copolymer, ethylene-methyl methacrylate copolymer, and ionomer resin; polyester resins such as polyethylene terephthalate (PET), polybutylene terephthalate (PBT), and polyethylene naphthalate; amide resins such as nylon-6, nylon-6,6, metaxylenediamine-adipic acid condensation polymer, and polymethylmethacrylimide; Examples of the resin include acrylic resins such as polymethyl methacrylate; styrene-acrylonitrile resins such as polystyrene, styrene-acrylonitrile copolymer, styrene-acrylonitrile-butadiene copolymer, and polyacrylonitrile; hydrophobized cellulose resins such as cellulose triacetate and cellulose diacetate; halogen-containing resins such as polyvinyl chloride, polyvinylidene chloride, polyvinylidene fluoride, and Teflon (registered trademark); highly hydrogen-bonding resins such as polyvinyl alcohol, ethylene-vinyl alcohol copolymer, and cellulose derivatives; engineering plastic resins such as polycarbonate resins, polysulfone resins, polyethersulfone resins, polyetheretherketone resins, polyphenylene oxide resins, polymethylene oxide resins, and liquid crystal resins; and the like. The resins may be used alone or in combination of two or more.

Of the above, from the viewpoint of preventing dust and other debris from adhering to the surface of the pellicle packaging body, it is preferable to use a material that is less prone to static electricity (preferably a resin that contains an antistatic treatment, more preferably a resin that contains either polyethylene terephthalate or polyethylene naphthalate) as the material for the base layer.

The thickness of the base layer (total thickness if it is a laminated structure consisting of two or more layers) is not particularly limited, but is preferably, for example, 0.1 μm or more and 500 μm or less, more preferably 1 μm or more and 100 μm or less, and even more preferably 5 μm or more and 30 μm or less.

(Adhesive layer)
The pellicle packaging of the present disclosure may, if necessary, have an adhesive layer between the sealant layer and the base layer.
The adhesive layer may be a single layer or a laminate consisting of two or more layers.

The material for the adhesive layer is not particularly limited, and a composition containing a known resin can be used.
Examples of the resin include polyurethane resin, polyester resin, polyether resin, and mixtures thereof.

The thickness of the adhesive layer is not particularly limited, but from the viewpoint of adhesive strength, it is preferably 1 μm or more, and more preferably 2 μm or more.
The thickness of the adhesive layer is not particularly limited, but from the viewpoint of shortening the time of the curing reaction when forming the adhesive layer and reducing the proportion of unreacted materials and residual solvent during the curing reaction, it is preferably 5 μm or less, and more preferably 4 μm or less.

(Shape and properties of pellicle packaging)
The shape of the pellicle package is not particularly limited.
The shape of the pellicle package may be, for example, a sheet, a bag, a pack, a box, or the like.
The pellicle package may be configured to include, as a part of the package, a packaging member having a total outgassing amount of volatile organic components exceeding 90 ppm when heated at 100° C. for 30 minutes, as necessary, within the range in which the effects of the present disclosure can be obtained. On the other hand, the proportion of packaging members in the pellicle package having a total outgassing amount exceeding 90 ppm is preferably 20% by mass or less, more preferably 10% by mass or less, and even more preferably 5% by mass or less of the entire pellicle package. It is preferable that the pellicle package does not include packaging members having a total outgassing amount exceeding 90 ppm.

The volume of the pellicle package is not particularly limited and can be appropriately set depending on the size of the pellicle and the packaging form. The volume of the package is, for example, preferably 2000 cm ³ to 70000 cm ³ , more preferably 4000 cm ³ to 30000 cm ³ , and even more preferably 5000 cm ³ to 10000 cm ³ .

When the volume of the pellicle package is within the above range, the balance between the volume of the pellicle or pellicle case packaged in the pellicle package and the surface area of the pellicle package is easily optimized. This reduces the proportion of outgassing of volatile organic components generated from the pellicle package, and also reduces the amount of outgassing from the pellicle due to adhesion of outgassing derived from the pellicle package.

In one aspect, the pellicle packaging of the present disclosure may be a packaging for a pellicle having a master adhesive that includes a styrene butadiene-based adhesive.

<Pellicle container>
The pellicle housing of the present disclosure comprises a pellicle, a pellicle housing container that houses the pellicle, and the pellicle packaging body of the present disclosure that packages the pellicle housing.
According to the pellicle container of the present disclosure, the amount of outgassing from the pellicle caused by the adhesion of volatile organic component outgassing from the pellicle packaging body is reduced.

A pellicle container refers to a structure in which a container containing a pellicle is packaged with the pellicle packaging body disclosed herein.

A known pellicle can be used as the pellicle. The pellicle includes, for example, a pellicle membrane and a support frame that supports the pellicle membrane.
The shape of the pellicle container is not particularly limited, but may be, for example, a box shape.

Hereinafter, one embodiment of a pellicle will be described with reference to the drawings. FIG. 1 is a schematic cross-sectional view showing a pellicle 10. In the pellicle 10, a pellicle film 12 and a support frame 14 are bonded via a film adhesive layer 13. The support frame 14 has an air vent 16 and an original plate adhesive layer 15 formed thereon. Although not shown, a release sheet (e.g., a separator) for protecting the original plate adhesive layer 15 may be further disposed on the surface of the original plate adhesive layer 15. The support frame 14 may not have an air vent 16 formed therein, and may have a structure in which the support frame 14 is laminated from multiple layers.

The pellicle membrane 12 is supported by a support frame 14 .
Examples of materials for the pellicle film 12 include transparent materials such as quartz glass, fluorine-based resin, cellulose acetate, and carbon nanotubes.
Examples of materials for the support frame 14 include an anodized aluminum frame, a titanium frame, a silicon frame, etc. The support frame 14 is preferably black in order to prevent reflection of the exposure light and to facilitate inspection for the presence or absence of attached foreign matter, etc.
The film adhesive layer 13 bonds the support frame and the pellicle film.
The material of the film adhesive layer 13 is not particularly limited, but examples thereof include fluoropolymers such as acrylic resin adhesives, epoxy resin adhesives, silicone resin adhesives, and fluorine-containing silicone adhesives.
The master adhesive layer 15 can be formed by applying a known adhesive and drying it.
The material of the master adhesive layer 15 (hereinafter also referred to as master adhesive) is not particularly limited, but examples thereof include acrylic, silicone, styrene butadiene, urethane, and olefin adhesives.

In other words, the pellicle container of the present disclosure may be such that the pellicle contains an adhesive for the master plate, and the adhesive for the master plate is a styrene butadiene-based adhesive.

A styrene-butadiene adhesive is preferable as the material of the master adhesive layer 15 that bonds the support frame 14 and the master, since it makes it easier to suppress distortion of the master.
Styrene-butadiene adhesives are more likely to be generated as outgassing from the pellicle after the outgassing of volatile organic components generated from the pellicle package adheres to the pellicle. The pellicle package according to the present disclosure has the above-mentioned configuration, and therefore the amount of outgassing from the pellicle caused by the adhesion of the outgassing of volatile organic components generated from the pellicle package is reduced even when a styrene-butadiene adhesive is used as the material for the master plate adhesive layer 15.

In the present disclosure, the term "adhesive" is a concept that encompasses adhesives and pressure-sensitive adhesives.
In the present disclosure, the term "adhesive layer" is a concept that encompasses an adhesive layer and a pressure-sensitive adhesive layer.

Examples of materials for the release sheet include a polyethylene terephthalate film and a polypropylene film.
Depending on the materials of the pellicle membrane 12 and the support frame 14, the support frame and the pellicle membrane may be adhered to each other without the membrane adhesive layer 13 therebetween.

As the pellicle container, a known pellicle container can be used.
Examples of materials for the pellicle container include resins such as polycarbonate, and conductive materials such as carbon nanotubes, conductive carbon black, and inorganic particles.

The preferred aspects of the pellicle packaging body in the pellicle container of the present disclosure are the same as the preferred aspects of the pellicle packaging body of the present disclosure.

The present disclosure will be explained in further detail below with reference to examples, but the invention of the present disclosure is not limited to these examples.

<Experimental Examples 1 to 3 and Comparative Example 1>
A pellicle package was prepared comprising a base layer and a sealant layer of the material and thickness shown in the table. The total amount of outgassing of volatile organic components (referred to as "total amount of outgassing of pellicle package" in the table) of each pellicle package obtained under heating conditions of 100°C for 30 minutes was measured by the above-mentioned measurement method, and the results are shown in Table 1. In addition, the breaking strength value of each pellicle package measured by the above-mentioned measurement method was in the range of 10N or more and 40N or less.

<Evaluation of the total amount of outgassing from the pellicle>
(1) Preparation of the various components that are the raw materials for the mask adhesive: Thermoplastic elastomer (A)
Styrene-hydrogenated isoprene-styrene block copolymer (product name "Hybra 7125" (manufactured by Kuraray Co., Ltd.), tan δ peak temperature: -5°C, styrene content: 20% by mass)

・Tackifying resin (B)
Hydrogenated alicyclic petroleum resin: C9 hydrogenated petroleum resin (product name "Arcon P-100" (manufactured by Arakawa Chemical Industries, Ltd.), softening point: 100±5°C, number average molecular weight (Mn): 610) Rosin ester resin (product name "Pine Crystal KE-311" (manufactured by Arakawa Chemical Industries, Ltd.), softening point: 100±5°C)

- Softener polybutene (product name "Nissan Polybutene 30N" (manufactured by NOF Corporation))

Wax Polypropylene pyrolysis type wax (product name "Hiwax NP055" (manufactured by Mitsui Chemicals, Inc.))

(2) Manufacturing of a pellicle 100 parts by mass of thermoplastic elastomer (A), 100 parts by mass of tackifier resin (B), and 200 parts by mass of softener were mixed to a total of 48 g to obtain a raw material mixture. The obtained raw material mixture was put into a Labo Plastomill (manufactured by Toyo Seiki Seisakusho, content: 60 mL) and then sealed. The mixture was kneaded at 200 ° C and 100 rpm for 20 minutes to obtain a lump-shaped mask adhesive. About 10 g of the mask adhesive was put into a heating tank (temperature inside the tank: 200 ° C) and melted. On the other hand, an anodized aluminum support frame 14 (outer dimensions: 148.77 mm × 114.9 mm, frame height H: 2.5 mm, frame width W: 2 mm) as shown in FIG. 1 was prepared. The molten mask adhesive extruded from a needle tip connected to the heating tank was applied to one end surface of the support frame 14 to form an adhesive layer 15 for the original plate. The thickness of the formed master plate adhesive layer 15 was 0.6 mm. A separator was placed on the surface of the master plate adhesive layer 15. A pellicle film 12 was attached to the other end face of the support frame 14 (i.e., the end face on the side on which the master plate adhesive layer 15 was not formed) via a film adhesive layer 13 (fluoropolymer (AGC, CYTOP A type)) to obtain a pellicle 10.

(Evaluation of total outgassing amount)
The pellicle of each example was placed in a clean oven in an air atmosphere and heated at a temperature in the range of 70° C. to 80° C. for 20 hours to perform a degassing treatment.
The pellicle was packaged using the pellicle packaging of each example and stored at 23°C for one week. After storage, the pellicle was removed from the pellicle packaging and set in an oven. Then, the outgassing generated under heating conditions of 50°C for 4 hours was adsorbed by Tenax (trademark, manufactured by GL Sciences Inc.), a powdered adsorbent. Then, Tenax was set in a GCMS, and the total amount (μg) of outgassing gas of volatile organic components generated from the pellicle under heating conditions of 280°C for 10 minutes was measured (converted to n-decane), and this was defined as the "total amount of outgassing of the pellicle (μg/pellicle)". The results are shown in Table 1.

In Table 1, polyethylene is abbreviated as PE and polyethylene terephthalate is abbreviated as PET.

As shown in Table 1, it was found that the pellicle packaging of the embodiment reduced the amount of outgassing from the pellicle due to the adhesion of volatile organic components outgassed from the pellicle packaging compared to the pellicle packaging of the comparative example.

The disclosure of Japanese Patent Application No. 2022-045759, filed on March 22, 2022, is incorporated herein by reference in its entirety.
All publications, patent applications, and standards mentioned in this specification are herein incorporated by reference to the same extent as if each individual publication, patent application, or standard was specifically and individually indicated to be incorporated by reference.

Claims (9)

A pellicle package for packaging a container containing a pellicle , in which the total amount of outgassing of volatile organic components is 90 ppm or less when heated at 100°C for 30 minutes. The pellicle package according to claim 1, comprising at least two layers: a sealant layer and a base layer. The pellicle package according to claim 2, wherein the sealant layer has a thickness of 40 μm or less. The pellicle package according to claim 2, having an adhesive layer between the sealant layer and the base layer. The pellicle package according to any one of claims 2 to 4, wherein the sealant layer contains an ethylene-vinyl alcohol copolymer. The pellicle package according to any one of claims 1 to 4, having a breaking strength of 5N or more and 50N or less. The pellicle packaging body according to any one of claims 1 to 4, for packaging a pellicle having an original plate adhesive containing a styrene-butadiene-based adhesive. A pellicle and
a pellicle container that contains the pellicle;
A pellicle package according to any one of claims 1 to 4, which packages the pellicle container;
A pellicle housing comprising: The pellicle includes a master adhesive,
The pellicle container according to claim 8 , wherein the master adhesive is a styrene-butadiene based adhesive.