JP7707249B2 - Inspection system and inspection method - Google Patents

Description

This disclosure relates to an inspection system and an inspection method.

Conventionally, a coating quality inspection method is known (see, for example, Patent Document 1).

The above-mentioned Patent Document 1 discloses a paint quality inspection method for inspecting the paint quality of a vehicle body as a painted object after painting has been completed. In this paint quality inspection method, first, the vehicle body is imaged by a television camera. Then, image information based on the image of the captured vehicle body is analyzed by a computer. Then, it is determined whether or not there is a paint defect, and if it is determined that there is a paint defect, the location of the paint defect on the vehicle body is determined. Then, the location of the paint defect is printed on a picture of the vehicle body drawn on a printout sheet.

Japanese Patent Application Publication No. 05-126758

However, the paint quality inspection method described in Patent Document 1 is configured to print the location of paint defects on a picture of the car body as a two-dimensional image. Therefore, while it is possible to accurately show the location of paint defects in the picture of the car body in flat or curved surfaces with small curvature in the actual car body, there is the inconvenience that it may be difficult to accurately show the location of paint defects in the picture of the car body in curved surfaces with large curvature or complex curved surfaces in the actual car body. Such inconveniences are similar when detecting objects other than paint defects and when inspecting workpieces other than car bodies. In this way, since the picture of the workpiece may not be able to accurately show the location of objects in curved surfaces with large curvature or complex curved surfaces, it is desirable to accurately show the location of objects even in curved surfaces with large curvature or complex curved surfaces.

This disclosure has been made to solve the above-mentioned problems, and aims to provide an inspection system and inspection method that can accurately indicate the position of an object even on a part of a workpiece with a curved surface with a large curvature or a complex curved surface.

An inspection system according to a first aspect of this disclosure includes a robot, an inspection unit that inspects a workpiece, a process for generating a movement path of the robot when the inspection unit inspects the workpiece by moving the inspection unit relative to the workpiece using the robot, a process for generating coordinate transformation information for converting, based on the generated movement path, coordinate values of an inspection coordinate system of an inspection image obtained by inspecting the workpiece using the inspection unit into coordinate values of a three-dimensional coordinate system that can express the coordinate values of the workpiece in three dimensions, a process for acquiring an inspection image by operating the robot and inspecting the workpiece using the inspection unit based on the generated movement path, a process for detecting defects of the workpiece in the acquired inspection image, and and a processing unit that performs a process of converting the coordinate values of the defect inspection coordinate system into coordinate values of a three-dimensional coordinate system based on the coordinate values of the defect in the converted three-dimensional coordinate system, and a process of displaying the position of the defect on the actual workpiece or a three-dimensional image of the workpiece based on the converted coordinate values of the defect in the three-dimensional coordinate system, wherein the coordinate transformation information is information that associates the amount of movement of the robot with coordinate values in the three-dimensional coordinate system for each fixed amount of movement of the robot in a direction along the movement path, and the processing unit performs a process of acquiring coordinate values in the three-dimensional coordinate system at first distance intervals along the movement path to generate the coordinate transformation information, and performs a process of operating the inspection unit to inspect the workpiece at second distance intervals along the movement path to acquire an inspection image, and the first distance interval is greater than the second distance interval .
An inspection system according to a second aspect of this disclosure includes a robot, an inspection unit that inspects a workpiece, a process for generating a movement path of the robot when the inspection unit inspects the workpiece by moving the inspection unit relative to the workpiece using the robot, a process for generating coordinate transformation information for converting, based on the generated movement path, coordinate values of an inspection coordinate system of an inspection image obtained by inspecting the workpiece using the inspection unit into coordinate values of a three-dimensional coordinate system that can express coordinate values of the workpiece in three dimensions, a process for operating the robot based on the generated movement path and inspecting the workpiece using the inspection unit to obtain an inspection image, a process for detecting a defect in the workpiece in the obtained inspection image, a process for converting coordinate values of the inspection coordinate system of the defect into coordinate values of the three-dimensional coordinate system based on the generated coordinate transformation information, and and a processing unit that performs a process of displaying the position of the defect on an actual workpiece or a three-dimensional image of the workpiece based on the coordinate values of the defect, wherein the coordinate transformation information is a coordinate transformation table that associates the amount of movement of the robot in a direction along the movement path with coordinate values in a three-dimensional coordinate system for each fixed amount of movement of the robot in the direction along the movement path, and in the process of converting the coordinate values of the inspection coordinate system of the defect into coordinate values of the three-dimensional coordinate system, the processing unit performs the following processes: acquire the amount of movement of the robot in the coordinate transformation table corresponding to the coordinate value of the inspection coordinate system in the direction along the movement path of the defect; acquire coordinate values of the three-dimensional coordinate system in the coordinate transformation table corresponding to the amount of movement of the robot in the acquired coordinate transformation table; and modify the coordinate values of the three-dimensional coordinate system of the acquired coordinate transformation table based on the coordinate values of the inspection coordinate system in a direction perpendicular to the movement path of the defect.

In the inspection system according to the first and second aspects of this disclosure, as described above, the following processes are performed: converting the coordinate values of the inspection coordinate system of the object into coordinate values of a three-dimensional coordinate system based on the generated coordinate conversion information; and displaying the position of the object on the actual workpiece or a three-dimensional image of the workpiece based on the converted coordinate values of the three-dimensional coordinate system of the object. This makes it possible to display the position of the object on the actual workpiece or the three-dimensional image of the workpiece, so that, unlike the case where the position of the object is displayed on a two-dimensional image of the workpiece, the position of the object can be displayed with high accuracy even on a curved surface with a large curvature or a complex curved surface.

An inspection method according to a third aspect of this disclosure includes: moving an inspection unit relative to a workpiece using a robot to generate a movement path for the robot when inspecting the workpiece with the inspection unit; generating coordinate transformation information for converting, based on the generated movement path, coordinate values of an inspection coordinate system of an inspection image obtained by inspecting the workpiece with the inspection unit into coordinate values of a three-dimensional coordinate system capable of expressing coordinate values of the workpiece in three dimensions; operating the robot based on the generated movement path to inspect the workpiece with the inspection unit to obtain an inspection image; detecting a defect of the workpiece in the obtained inspection image; and converting the coordinate values of the inspection coordinate system of the defect into coordinate values of the inspection coordinate system based on the generated coordinate transformation information. into coordinate values of a three-dimensional coordinate system; and indicating the position of the defect on the actual workpiece or a three-dimensional image of the workpiece based on the coordinate values of the converted defect in the three-dimensional coordinate system, wherein the coordinate transformation information is information that associates a movement amount of the robot with a coordinate value in the three-dimensional coordinate system for each fixed movement amount of the robot in a direction along the movement path, wherein generating the coordinate transformation information includes acquiring coordinate values in the three-dimensional coordinate system at first distance intervals along the movement path to generate the coordinate transformation information, and acquiring the inspection image includes operating the inspection unit to inspect the workpiece at second distance intervals along the movement path to acquire the inspection image, wherein the first distance interval is greater than the second distance interval .
An inspection method according to a fourth aspect of this disclosure includes: moving an inspection unit relative to a workpiece using a robot to generate a movement path for the robot when inspecting the workpiece with the inspection unit; generating coordinate transformation information for converting, based on the generated movement path, coordinate values of an inspection coordinate system of an inspection image obtained by inspecting the workpiece with the inspection unit into coordinate values of a three-dimensional coordinate system capable of expressing coordinate values of the workpiece in three dimensions; operating the robot based on the generated movement path to inspect the workpiece with the inspection unit to obtain an inspection image; detecting a defect in the workpiece in the obtained inspection image; converting, based on the generated coordinate transformation information, coordinate values of the inspection coordinate system of the defect into coordinate values of the three-dimensional coordinate system; and indicating the position of the defect on an actual workpiece or a three-dimensional image of the workpiece based on the coordinate transformation information, wherein the coordinate transformation information is a coordinate transformation table that associates, for each constant amount of movement of the robot in the direction along the movement path, an amount of movement of the robot in the direction along the movement path with a coordinate value in a three-dimensional coordinate system, and converting the coordinate value of the inspection coordinate system of the defect into a coordinate value in the three-dimensional coordinate system includes acquiring the amount of movement of the robot in the coordinate transformation table that corresponds to the coordinate value of the inspection coordinate system in the direction along the movement path of the defect, acquiring coordinate values of the three-dimensional coordinate system in the coordinate transformation table that correspond to the amount of movement of the robot in the acquired coordinate transformation table, and modifying the coordinate value of the three-dimensional coordinate system of the acquired coordinate transformation table based on the coordinate value of the inspection coordinate system in a direction perpendicular to the movement path of the defect.

In the inspection method according to the third and fourth aspects of this disclosure, as described above, the coordinate values of the inspection coordinate system of the object are converted into coordinate values of a three-dimensional coordinate system based on the coordinate conversion information generated based on the movement path of the robot, and the position of the object is displayed on the actual workpiece or a three-dimensional image of the workpiece based on the converted coordinate values of the three-dimensional coordinate system of the object. This makes it possible to display the position of the object on the actual workpiece or a three-dimensional image of the workpiece, so that an inspection method can be provided that can accurately display the position of the object even in a part of a curved surface with a large curvature or a complex curved surface, unlike the case where the position of the object is displayed on a two-dimensional image of the workpiece.

According to the present disclosure, as described above, the position of the target can be accurately indicated even in parts of the workpiece with a curved surface having a large curvature or a complex curved surface.

FIG. 1 illustrates an inspection system according to one embodiment. FIG. 1 is a block diagram illustrating an inspection system according to one embodiment. 11 is a flowchart for explaining a control process of the inspection system according to an embodiment. FIG. 1 is a diagram for explaining generation of a movement path of a robot according to an embodiment. FIG. 11 is a diagram for explaining generation of coordinate transformation information according to an embodiment. FIG. 1 is a diagram for explaining coordinate transformation information according to one embodiment; FIG. 13 is a diagram (2) for explaining coordinate transformation information according to one embodiment. FIG. 1 is a diagram for explaining inspection of a workpiece according to one embodiment; FIG. 2 is a diagram for explaining the inspection of a workpiece according to one embodiment. FIG. 3 is a diagram for explaining the inspection of a workpiece according to one embodiment. FIG. 1 is a diagram for explaining an inspection image according to an embodiment. FIG. 1 is a diagram for explaining coordinate transformation according to an embodiment. 1A to 1C are diagrams for explaining how a target position is indicated on an actual workpiece by a robot according to an embodiment. 13A to 13C are diagrams for explaining how the position of a target is displayed in a three-dimensional image of a workpiece according to one embodiment. FIG. 2 is a diagram to illustrate showing multiple objects as one object according to one embodiment. FIG. 13 is a block diagram showing an inspection system according to a modified example of the embodiment.

Below, an embodiment of this disclosure will be described with reference to the drawings.

(Inspection system configuration)
The overall configuration of an inspection system 100 according to an embodiment will be described with reference to FIGS.

As shown in FIG. 1, the inspection system 100 is an appearance inspection system that inspects the appearance of a workpiece 200. The workpiece 200 is, for example, a product or part related to an automobile, agricultural machinery, ceramics, or household electrical appliance. The workpiece 200 is not particularly limited.

The inspection system 100 includes a robot 10, an inspection unit 20, an instruction unit 30, a robot controller 40, an image processing device 50, and a result display device 60.

The robot 10 moves the inspection unit 20 relative to the workpiece 200. The robot 10 is a vertical multi-joint robot. The robot 10 includes a base unit 11 and an arm unit 12 connected to the base unit 11. The base unit 11 is fixed to an installation surface such as a floor, a wall, or a ceiling. The base unit 11 may be attached to a movable cart. The arm unit 12 has a plurality of joints. Each of the plurality of joints has a servo motor as a driving source. The tip of the arm unit 12 holds the inspection unit 20 and the instruction unit 30. The robot 10 moves the inspection unit 20 and the instruction unit 30 held at the tip of the arm unit 12 relative to the fixed workpiece 200 by driving the plurality of joints of the arm unit 12.

The inspection unit 20 is disposed on the robot 10 and inspects the workpiece 200. The inspection unit 20 is an imaging unit and images the workpiece 200. Specifically, the inspection unit 20 is a line-type camera that is moved along the surface of the workpiece 200 by the robot 10 to scan and image the surface of the workpiece 200.

The instruction unit 30 is disposed on the robot 10, and indicates to the workpiece 200 the position of the target 201 (described later) obtained by inspection. The instruction unit 30 is a laser irradiation unit, and indicates the position of the target 201 to the workpiece 200 by irradiating with laser light.

As shown in Figures 1 and 2, the robot controller 40 controls the operation of the robot 10. The robot controller 40 includes a processing unit 41 and a storage unit 42. The processing unit 41 includes a processor and performs various processes related to the operation of the robot 10. The storage unit 42 includes a non-volatile memory and stores coordinate transformation information 71, 72, which will be described later, and the like.

The image processing device 50 performs image processing on the image captured by the inspection unit 20. The image processing device 50 also controls the timing of imaging by the inspection unit 20. The image processing device 50 includes a processing unit 51 and a storage unit 52. The processing unit 51 includes a processor, and performs various processes related to the image captured by the inspection unit 20 and the timing of imaging by the inspection unit 20. The storage unit 52 includes a non-volatile memory, and stores the inspection image 21 described below, etc.

The result display device 60 displays the inspection results of the workpiece 200. The result display device 60 includes a processing unit 61, a storage unit 62, a display unit 63, and an operation unit 64. The processing unit 61 includes a processor and performs various processes related to the display of the inspection results of the workpiece 200. The storage unit 62 includes a non-volatile memory and stores coordinate conversion information 72, a three-dimensional image of the workpiece 200, and the like. The display unit 63 includes a monitor such as an LCD monitor and displays a screen of the inspection results of the workpiece 200, and the like. The operation unit 64 includes input devices such as a mouse and a keyboard, and accepts input operations from the user. The display unit 63 and the operation unit 64 may be integrated. In other words, the display unit 63 and the operation unit 64 may be configured as an operation unit and display unit such as a touch panel.

(Control process of the inspection system)
The control process of the inspection system 100 will be described with reference to FIGS.

As shown in Figures 3 and 4, in step S1, the processing unit 41 of the robot controller 40 performs processing to generate a movement path 13 for the robot 10 when the robot 10 moves the inspection unit 20 relative to the workpiece 200 and the inspection unit 20 inspects the workpiece 200. The movement path 13 is a path for operating the arm unit 12 of the robot 10, and multiple movement paths 13 are generated to inspect the workpiece 200.

For example, the processing unit 41 receives instructions from the user on the operation of the arm unit 12, and performs processing to generate a movement path 13 for the robot 10 based on the received instructions. Also, for example, the processing unit 41 performs processing to automatically generate a movement path 13 for the robot 10, regardless of instructions from the user on the operation of the arm unit 12. Also, the processing unit 41 performs processing to generate a movement path 13 that follows the surface of the workpiece 200, such as a curved surface.

In this embodiment, as shown in FIG. 3 and FIG. 5 to FIG. 7, in step S2, the processing unit 41 of the robot controller 40 performs processing to generate coordinate conversion information 71, 72 based on the generated movement path 13. The coordinate conversion information 71, 72 is information that converts the coordinate values of an inspection coordinate system of an inspection image 21, which will be described later and is acquired by inspecting the workpiece 200 by the inspection unit 20, into coordinate values of a three-dimensional coordinate system that can express the coordinate values of the workpiece 200 three-dimensionally. The inspection coordinate system is an orthogonal coordinate system with two mutually orthogonal axes, and the three-dimensional coordinate system is an orthogonal coordinate system with three mutually orthogonal axes. Details of the coordinate conversion using the coordinate conversion information 71, 72 will be described later.

As shown in FIG. 5, the processing unit 41 performs a process of acquiring coordinate values of a three-dimensional coordinate system for each first distance interval D1 along the movement path 13 and generating coordinate conversion information 71, 72. At this time, the processing unit 41 actually moves the inspection unit 20 along the movement path 13 relative to the workpiece 200 by the robot 10, and performs a process of acquiring coordinate values of the three-dimensional coordinate system for each first distance interval D1. The first distance interval D1 is the distance interval of the control point 14a. The processing unit 41 performs a process of acquiring coordinate values of the three-dimensional coordinate system of the control point 14a for each first distance interval D1. When the inspection unit 20 is an imaging unit, the control point 14a is set to the focal position of the imaging of the inspection unit 20. The focal position of the imaging of the inspection unit 20 is set near the surface of the workpiece 200. The control point 14a is provided for performing a process of acquiring coordinate values of the three-dimensional coordinate system.

In addition, in this embodiment, the first distance interval D1 is larger than the second distance interval D2 described below when inspecting the workpiece 200. For example, the first distance interval D1 is about 5 mm, and the second distance interval D2 is about 0.1 mm. The first distance interval D1 and the second distance interval D2 are not particularly limited, as they differ depending on the workpiece 200. The first distance interval D1 is set to a value that can ensure the accuracy required to indicate the position of the target 201 described below. Furthermore, the second distance interval D2 is set to a value that can ensure the accuracy required to inspect the workpiece 200.

For convenience, FIG. 5 illustrates only one movement path 13, but the processing unit 41 obtains coordinate values in a three-dimensional coordinate system for all movement paths 13 and performs processing to generate coordinate conversion information 71 and 72.

As shown in Figures 6 and 7, the coordinate conversion information 71, 72 is a coordinate conversion table that associates the amount of movement of the robot 10 in the direction along the movement path 13 with coordinate values in a three-dimensional coordinate system. In Figures 6 and 7, the path number represents the number of the movement path 13, the position number represents the number of the control point 14, the amount of movement represents the amount of movement of the control point 14a of the robot 10 along the movement path 13, and the coordinate value represents the coordinate value of the control point 14a in the three-dimensional coordinate system. That is, in the coordinate conversion information 71, 72, for each movement path 13, the amount of movement of the robot 10 for each control point 14a corresponds to the coordinate value of the control point 14a in the three-dimensional coordinate system.

The coordinate values of the three-dimensional coordinate system of the coordinate conversion information 71, 72 may be composed of only the acquired values of the coordinate values of the three-dimensional coordinate system acquired at each first distance interval D1, or may be composed of the acquired values of the coordinate values of the three-dimensional coordinate system acquired at each first distance interval D1 and the interpolated values of the coordinate values of the three-dimensional coordinate system interpolated from the acquired values. That is, the coordinate values of the three-dimensional coordinate system may be acquired in units of 5 mm, and the coordinate conversion information 71, 72 in units of 5 mm may be generated, or the coordinate values of the three-dimensional coordinate system may be acquired in units of 10 mm, and the coordinate conversion information 71, 72 in units of 5 mm may be generated by interpolating from the acquired coordinate values of the three-dimensional coordinate system. Examples of the interpolation include polynomial interpolation and linear interpolation. Examples of the linear interpolation include linear interpolation and circular interpolation. The movement amount of the coordinate conversion information 71, 72 may be the movement amount calculated from the actual movement of the robot 10, or may be the movement amount calculated from the movement command of the robot 10.

As shown in FIG. 6, in the coordinate transformation information 71, the three-dimensional coordinate system is the robot coordinate system for the robot 10. The robot coordinate system is a coordinate system based on the base unit 11. The coordinate transformation information 71 is a coordinate transformation table that associates the amount of movement of the robot 10 with coordinate values in the robot coordinate system. In the coordinate transformation information 71, coordinate values that indicate the position and orientation of the control point 14a in the robot coordinate system are used as the coordinate values.

As shown in FIG. 7, in the coordinate conversion information 72, the three-dimensional coordinate system is a work coordinate system related to the work 200. The work coordinate system is a coordinate system based on the work 200. The coordinate conversion information 72 is a coordinate conversion table that associates the movement amount of the robot 10 with the coordinate values of the work coordinate system. In the coordinate conversion information 72, the coordinate values that indicate the position of the control point 14a in the work coordinate system are used as the coordinate values.

For example, the processing unit 41 acquires coordinate values in the robot coordinate system to generate coordinate transformation information 71, and generates coordinate transformation information 72 based on the generated coordinate transformation information 71. Also, for example, the processing unit 41 generates coordinate transformation information 72 from the coordinate transformation information 71 by converting the coordinate values in the robot coordinate system of the coordinate transformation information 71 into coordinate values in the work coordinate system using conversion information such as a conversion matrix.

The processing unit 41 also performs a process of storing the coordinate conversion information 71, 72 in the storage unit 42, and also performs a process of outputting the coordinate conversion information 72 to the processing unit 61 of the result display device 60. The processing unit 61 performs a process of storing the coordinate conversion information 72 in the storage unit 62.

As shown in Figures 3 and 8 to 11, in step S3, the processing unit 41 of the robot controller 40 operates the robot 10 based on the movement path 13, and performs processing to inspect the workpiece 200 using the inspection unit 20. Then, the processing unit 51 of the image processing device 50 performs processing to obtain an inspection image 21 based on the output result of the inspection unit 20. The inspection image 21 is an image of the surface of the workpiece 200 captured by the inspection unit 20.

9, the processing unit 51 operates the inspection unit 20 to inspect the workpiece 200 at every second distance interval D2 along the moving path 13, and performs a process to obtain the inspection image 21. Specifically, the processing unit 51 operates the inspection unit 20 to image the workpiece 200 at every second distance interval D2, and scans and images the workpiece 200. More specifically, the processing unit 41 performs a process to output a pulse signal to the processing unit 51 at every second distance interval D2. The processing unit 51 performs a process to output a trigger signal to the inspection unit 20 at every second distance interval D2 based on the pulse signal from the processing unit 41. The inspection unit 20 images the workpiece 200 at every second distance interval D2 based on the trigger signal. The second distance interval D2 is the distance interval of the control point 14b. When the inspection unit 20 is an imaging unit, the control point 14b is set to the focal position of the imaging of the inspection unit 20. In addition, the focal position of the imaging of the inspection unit 20 is set near the surface of the workpiece 200. Control point 14b is provided to perform the process of imaging the workpiece 200 by the inspection unit 20.

For convenience, FIG. 9 illustrates only one movement path 13, but the processing unit 41 performs processing to inspect the workpiece 200 by the inspection unit 20 for all movement paths 13. The processing unit 51 also performs processing to obtain inspection images 21 for all movement paths 13.

Also, as shown in FIG. 10, the inspection range 22 of the inspection unit 20 is set so as to partially overlap between adjacent movement paths 13. That is, the inspection range 22 of the inspection unit 20 for a certain movement path 13 partially overlaps with the inspection range 22 of the inspection unit 20 for a movement path 13 adjacent to the certain movement path 13. This makes it possible to prevent inspection omissions from occurring. Note that the inspection range 22 is the imaging range when scanning and imaging along the movement path 13.

As shown in FIG. 3 and FIG. 11, in step S4, the processing unit 51 of the image processing device 50 performs processing to detect the object 201 of the workpiece 200 in the inspection image 21. The processing unit 51 performs a predetermined image processing on the inspection image 21 to perform processing to detect the object 201 in the inspection image 21. The object 201 is, for example, a defect such as a scratch, a foreign object, or a dent. The processing unit 51 performs processing to detect the object 201 in the inspection image 21 for all inspection images 21.

As shown in FIG. 11, the inspection coordinate system of the inspection image 21 is a two-dimensional coordinate system in which the direction along the movement path 13 is the Y-axis direction and the direction perpendicular to the movement path 13 is the X-axis direction. The processing unit 51 performs a process of acquiring the coordinate values of the inspection coordinate system of the object 201. That is, the processing unit 51 performs a process of acquiring the coordinate values of the X-axis and Y-axis of the inspection coordinate system of the object 201. The processing unit 51 also performs a process of acquiring the coordinate values of the inspection coordinate system of the object 201 for all the inspection images 21 in which the object 201 is detected. The processing unit 51 also performs a process of storing the inspection image 21, the number of the movement path 13 corresponding to the inspection image 21, and the coordinate values of the inspection coordinate system of the object 201 in the storage unit 52. The processing unit 51 also performs a process of outputting the number of the movement path 13 corresponding to the inspection image 21 and the coordinate values of the inspection coordinate system of the object 201 to the processing unit 41 of the robot controller 40 and the processing unit 61 of the result display device 60.

As shown in FIG. 3 and FIG. 12, in step S5, the processing unit 41 of the robot controller 40 performs a process of converting the coordinate values of the inspection coordinate system of the object 201 into coordinate values of the robot coordinate system based on the coordinate conversion information 71. Also in step S5, the processing unit 61 of the result display device 60 performs a process of converting the coordinate values of the inspection coordinate system of the object 201 into coordinate values of a three-dimensional coordinate system based on the coordinate conversion information 72. First, the process of the processing unit 41 will be described.

As shown in FIG. 12, the processing unit 41 performs a process of identifying the number of the movement path 13 of the coordinate transformation information 71 based on the number of the movement path 13 corresponding to the inspection image 21. Then, the processing unit 41 performs a process of acquiring the movement amount of the robot 10 of the coordinate transformation information 71 corresponding to the coordinate value of the inspection coordinate system in the Y-axis direction along the movement path 13 of the object 201 for the identified number of the movement path 13. At this time, the processing unit 41 performs a process of acquiring the movement amount of the robot 10 closest to the coordinate value of the inspection coordinate system in the Y-axis direction of the object 201 as the movement amount of the corresponding robot 10. Then, the processing unit 41 performs a process of acquiring the coordinate value of the robot coordinate system of the coordinate transformation information 71 corresponding to the movement amount of the robot 10 of the acquired coordinate transformation information 71. As a result, the coordinate value of the robot coordinate system corresponding to the coordinate value of the inspection coordinate system in the Y-axis direction of the object 201 is acquired.

On the other hand, the coordinate values of the robot coordinate system of the acquired coordinate transformation information 71 do not reflect the coordinate values of the inspection coordinate system in the X-axis direction of the object 201, and include a deviation for that amount. For this reason, the processing unit 41 performs a process of correcting the coordinate values of the robot coordinate system of the acquired coordinate transformation information 71 based on the coordinate values of the inspection coordinate system in the X-axis direction perpendicular to the movement path 13 of the object 201. At this time, the processing unit 41 performs a process of correcting the coordinate values of the robot coordinate system of the coordinate transformation information 71 by adding the coordinate values of the inspection coordinate system in the X-axis direction of the object 201. As a result, the processing unit 41 performs a process of acquiring the coordinate values of the robot coordinate system of the object 201. Furthermore, the processing unit 41 performs a process of converting the coordinate values for all the objects 201 to acquire the coordinate values of the robot coordinate system.

For example, in the example shown in FIG. 12, the number of the movement path 13 corresponding to the inspection image 21 is 2, the coordinate value of the target 201 in the X-axis direction is 5.5, and the coordinate value of the target 201 in the Y-axis direction is 15.2. In this case, the processing unit 41 performs a process of identifying 2 as the number of the movement path 13. Then, the processing unit 41 performs a process of acquiring 15 as the movement amount of the robot 10 that is closest to the coordinate value 15.2 of the target 201 in the Y-axis direction for the identified number 2. Then, the processing unit 41 performs a process of acquiring (xr, yr, zr, or, ar, tr) as the coordinate value of the robot coordinate system corresponding to the movement amount 15 of the robot 10. Then, the processing unit 41 performs a process of acquiring the coordinate value of the robot coordinate system of the target 201 by adding the coordinate value 5.5 of the target 201 in the X-axis direction to the coordinate value (xr, yr, zr, or, ar, tr) of the robot coordinate system.

The processing of the processing unit 41 of the robot controller 40 has been described above, but the processing of the processing unit 61 of the result display device 60 is similar, except that the coordinate transformation information 72 is used. That is, the processing unit 61 performs a process of identifying the number of the movement path 13 of the coordinate transformation information 72 based on the number of the movement path 13 corresponding to the inspection image 21. Then, the processing unit 61 performs a process of acquiring the movement amount of the robot 10 of the coordinate transformation information 72 corresponding to the coordinate value of the inspection coordinate system in the Y-axis direction along the movement path 13 of the object 201 for the identified number of the movement path 13. At this time, the processing unit 61 performs a process of acquiring the movement amount of the robot 10 closest to the coordinate value of the inspection coordinate system in the Y-axis direction of the object 201 as the corresponding movement amount of the robot 10. Then, the processing unit 61 performs a process of acquiring the coordinate value of the work coordinate system of the coordinate transformation information 72 corresponding to the movement amount of the robot 10 of the acquired coordinate transformation information 72. As a result, the coordinate value of the work coordinate system corresponding to the coordinate value of the inspection coordinate system in the Y-axis direction of the object 201 is acquired.

On the other hand, the coordinate values of the work coordinate system of the acquired coordinate transformation information 72 do not reflect the coordinate values of the inspection coordinate system in the X-axis direction of the object 201, and include a deviation for that amount. For this reason, the processing unit 61 performs a process of correcting the coordinate values of the work coordinate system of the acquired coordinate transformation information 72 based on the coordinate values of the inspection coordinate system in the X-axis direction perpendicular to the movement path 13 of the object 201. At this time, the processing unit 61 performs a process of correcting the coordinate values of the work coordinate system of the coordinate transformation information 72 by adding the coordinate values of the inspection coordinate system in the X-axis direction of the object 201. As a result, the processing unit 61 performs a process of acquiring the coordinate values of the work coordinate system of the object 201. Furthermore, the processing unit 61 performs a process of converting the coordinate values for all the objects 201 and acquiring the coordinate values of the work coordinate system.

As shown in FIG. 3 and FIG. 13, in step S6, the processing unit 41 of the robot controller 40 performs a process of indicating the position of the target 201 on the actual workpiece 200 based on the coordinate values of the converted target 201 in the three-dimensional coordinate system. Specifically, the processing unit 41 performs a process of operating the robot 10 and indicating the position of the target 201 on the actual workpiece 200 by the instruction unit 30 based on the coordinate values of the target 201 converted into the coordinate values of the robot coordinate system. That is, the processing unit 41 performs a process of operating the robot 10 and moving the instruction unit 30 to a predetermined position where the position of the target 201 can be indicated. Then, with the instruction unit 30 placed at the predetermined position, the processing unit 41 irradiates laser light from the instruction unit 30 to indicate the position of the target 201 on the actual workpiece 200.

3 and 14, in step S6, the processing unit 61 of the result display device 60 performs processing to display the position of the object 201 on the three-dimensional image of the workpiece 200 based on the coordinate values of the converted three-dimensional coordinate system of the object 201. Specifically, the processing unit 61 performs processing to display the position of the object 201 on the three-dimensional image of the workpiece 200 based on the coordinate values of the object 201 converted into the coordinate values of the workpiece coordinate system. That is, the processing unit 61 performs processing to superimpose an image indicating the position of the object 201 on the three-dimensional image of the workpiece 200. Then, the processing unit 61 performs processing to display the three-dimensional image of the workpiece 200 on which the image indicating the position of the object 201 is superimposed on the display unit 63. The three-dimensional image of the workpiece 200 on which the image indicating the position of the object 201 is superimposed can be enlarged, reduced, or rotated based on the user's operation using the operation unit 64.

In this embodiment, as shown in FIG. 15, when the coordinate values of the multiple targets 201 converted into the coordinate values of the robot coordinate system are within a threshold range, the processing unit 41 performs a process of treating the multiple targets 201 as one target 201 and showing the positions of the targets 201 on the actual workpiece 200. The threshold value is a value for determining whether the coordinate values can be considered to indicate the same position. That is, when the coordinate values of the multiple targets 201 converted into the coordinate values of the robot coordinate system can be considered to be the same position, the processing unit 41 performs a process of combining the multiple targets 201 that should actually be one into one and showing the positions of the targets 201 on the actual workpiece 200. For example, when the coordinate values converted into the coordinate values of the robot coordinate system of the target 201 detected from the inspection image 21 for a certain movement path 13 and the target 201 detected from the inspection image 21 for a movement path 13 adjacent to the certain movement path 13 are within a threshold range, the processing unit 41 performs a process of treating these targets 201 as one target 201 and showing the positions of the target 201 on the actual workpiece 200.

(Effects of this embodiment)
In this embodiment, as described above, a process of converting the coordinate values of the inspection coordinate system of the object 201 into coordinate values of a three-dimensional coordinate system based on the generated coordinate conversion information 71, 72, and a process of displaying the position of the object 201 on the actual workpiece 200 or a three-dimensional image of the workpiece 200 based on the converted coordinate values of the three-dimensional coordinate system of the object 201 are performed. As a result, the position of the object 201 can be displayed on the actual workpiece 200 or a three-dimensional image of the workpiece 200. Therefore, unlike the case where the position of the object 201 is displayed on a two-dimensional image of the workpiece 200, the position of the object 201 can be displayed with high accuracy even if the workpiece 200 is on a curved surface with a large curvature or a complex curved surface.

In addition, when the position of the object 201 is shown on the actual workpiece 200 or a three-dimensional image of the workpiece 200, it is necessary to convert the coordinate values of the inspection coordinate system of the object 201 into coordinate values of the three-dimensional coordinate system. In this embodiment, the coordinate values of the inspection coordinate system of the object 201 are converted into coordinate values of the three-dimensional coordinate system based on the coordinate conversion information 71, 72 generated based on the movement path 13 of the robot 10. As a result, since the coordinate conversion information 71, 72 generated based on the movement path 13 of the robot 10, which has a high correlation with the shape of the workpiece 200, is used, the coordinate values of the inspection coordinate system of the object 201 can be converted into coordinate values of the three-dimensional coordinate system with high accuracy. As a result, the position of the object 201 can be accurately shown on the actual workpiece 200 or a three-dimensional image of the workpiece 200 using the coordinate values of the three-dimensional coordinate system of the object 201 converted with high accuracy. This effect is particularly effective when inspecting a workpiece 200 with a complex shape.

In addition, by using the coordinate conversion information 71 and 72 created in advance, the process of converting the coordinate values of the inspection coordinate system of the object 201 into coordinate values of a three-dimensional coordinate system can be performed efficiently.

In addition, in this embodiment, as described above, the processing unit 41 performs processing to acquire coordinate values of a three-dimensional coordinate system at each first distance interval D1 along the movement path 13 and generate coordinate conversion information 71, 72. This makes it possible to uniformly acquire coordinates of a three-dimensional coordinate system along the movement path 13 and generate coordinate conversion information 71, 72, thereby suppressing unevenness in the accuracy of the coordinate conversion by the coordinate conversion information 71, 72.

In addition, in this embodiment, as described above, the processing unit 51 operates the inspection unit 20 to inspect the workpiece 200 at second distance intervals D2 along the movement path 13 to acquire the inspection image 21, and the first distance interval D1 is greater than the second distance interval D2. This allows the inspection of the workpiece 200 to be performed precisely, but the position of the target 201 does not need to be indicated in such detail, making it possible to reduce the amount of information in the coordinate conversion information 71, 72 while ensuring the accuracy required for coordinate conversion using the coordinate conversion information 71, 72.

In this embodiment, as described above, the coordinate conversion information 71, 72 is a coordinate conversion table that associates the movement amount of the robot 10 in the direction along the movement path 13 with the coordinate values of the three-dimensional coordinate system, and the processing units 41, 61 perform the following processes in the process of converting the coordinate values of the inspection coordinate system of the object 201 into the coordinate values of the three-dimensional coordinate system: acquiring the movement amount of the robot 10 in the coordinate conversion table corresponding to the coordinate values of the inspection coordinate system in the direction along the movement path 13 of the object 201, acquiring the coordinate values of the three-dimensional coordinate system of the coordinate conversion table corresponding to the movement amount of the robot 10 in the acquired coordinate conversion table, and correcting the coordinate values of the three-dimensional coordinate system of the acquired coordinate conversion table based on the coordinate values of the inspection coordinate system in the direction perpendicular to the movement path 13 of the object 201. As a result, by utilizing the correspondence between the movement amount of the robot 10 in the direction along the movement path 13 and the coordinate values of the inspection coordinate system in the direction along the movement path 13 of the object 201, the coordinate values of the inspection coordinate system of the object 201 can be easily and accurately converted into the coordinate values of the three-dimensional coordinate system.

In addition, in this embodiment, as described above, the inspection system 100 is provided with an instruction unit 30 that is arranged on the robot 10 and indicates the position of the object 201 relative to the actual workpiece 200, and the three-dimensional coordinate system is a robot coordinate system related to the robot 10, and the processing unit 41 operates the robot 10 based on the coordinate values of the object 201 converted into the coordinate values of the robot coordinate system, and performs processing to indicate the position of the object 201 on the actual workpiece 200 by the instruction unit 30. As a result, since the coordinate values of the object 201 can be converted into the coordinate values of the robot coordinate system, when the position of the object 201 is indicated on the actual workpiece 200 using the robot 10, the position of the object 201 on the actual workpiece 200 can be easily grasped. As a result, the position of the object 201 can be easily indicated on the actual workpiece 200. In addition, since the instruction unit 30 is arranged on the robot 10 that performs the inspection, it is not necessary to provide a robot with the instruction unit 30 arranged separately from the robot 10 that performs the inspection. As a result, the complexity of the structure can be suppressed.

In addition, in this embodiment, as described above, the three-dimensional coordinate system is a work coordinate system related to the workpiece 200, and the processing unit 61 performs processing to indicate the position of the object 201 in the three-dimensional image of the workpiece 200 based on the coordinate values of the object 201 converted into coordinate values of the work coordinate system. This allows the coordinate values of the object 201 to be converted into coordinate values of the work coordinate system, making it easy to grasp the position of the object 201 in the three-dimensional image of the workpiece 200. As a result, the position of the object 201 can be easily indicated in the three-dimensional image of the workpiece 200.

In addition, in this embodiment, as described above, when the coordinate values of the multiple targets 201 converted into the coordinate values of the robot coordinate system are within a threshold range, the processing unit 41 performs processing to treat the multiple targets 201 as one target 201 and display the position of the target 201 on the actual workpiece 200. This makes it possible to avoid a single target 201 being erroneously displayed as multiple targets 201 even when a single target 201 is erroneously detected as multiple targets 201. This effect is particularly effective in a configuration in which a single target 201 can be detected from different inspection images 21 because parts of the inspection ranges 22 of the inspection unit 20 overlap, as in this embodiment.

(Modification)
It should be noted that the embodiments disclosed herein are illustrative and not restrictive in all respects. The scope of the present disclosure is indicated by the claims, not by the description of the embodiments described above, and further includes all modifications (variations) within the meaning and scope of the claims.

For example, in the above embodiment, an example has been shown in which the inspection system is an appearance inspection system that inspects the appearance of a workpiece, but the present disclosure is not limited to this. In the present disclosure, the inspection system may be an inspection system that inspects the inside of a workpiece. In this case, the inspection unit may be an ultrasonic flaw detection unit that inspects the workpiece by transmitting ultrasonic waves to the inside of the workpiece and receiving ultrasonic waves reflected from the inside of the workpiece. Using the ultrasonic flaw detection unit, it is possible to detect objects such as defects inside the workpiece.

In addition, in the above embodiment, an example was shown in which the robot was a vertical articulated robot, but the present disclosure is not limited to this. In the present disclosure, the robot may be an industrial robot other than a vertical articulated robot.

In addition, in the above embodiment, an example has been shown in which the robot moves the imaging unit to move the inspection unit relative to the workpiece, but the present disclosure is not limited to this. In the present disclosure, the robot may move the workpiece to move the inspection unit relative to the workpiece.

In the above embodiment, the processing unit of the robot controller, the processing unit of the image processing device, and the processing unit of the result display device share the tasks of performing various processes, but the present disclosure is not limited to this. In the present disclosure, the number and configuration of the processing units are not particularly limited. One processing unit may perform the various processes of the above embodiment, or multiple processing units may perform the various processes of the above embodiment. The configuration of the storage unit is also not limited. The configuration of the robot controller, the image processing device, and the result display device is also not limited. The robot controller, the image processing device, and the result display device may be configured as an integrated unit, or may be configured separately as in the above embodiment. The robot controller, the image processing device, and the result display device may also be configured separately. For example, an operation device for operating the result display device may be provided separately from the result display device.

In the above embodiment, an example has been shown in which the processing unit of the robot controller performs the process of generating a movement path and the process of generating coordinate conversion information, but the present disclosure is not limited to this. In the present disclosure, as in the modified example shown in FIG. 16, the inspection system 100 may be provided with a simulation device 180 that generates the movement path 13 of the robot 10 on a display screen by simulation without using an actual machine. In the modified example, the simulation device 180 includes a processing unit 181, a storage unit 182, and a display unit 183. The processing unit 181 includes a processor and performs various processes related to the simulation. The storage unit 182 includes a non-volatile memory and stores the coordinate conversion information 71, 72, etc. The display unit 183 includes a monitor such as a liquid crystal monitor and displays a simulation screen, etc.

The processing unit 181 displays three-dimensional images of the robot 10, the inspection unit 20, and the workpiece 200 on the display unit 183, and performs a process of generating a movement path 13 of the robot 10 by simulation. The processing unit 181 also performs a process of generating coordinate conversion information 71, 72 based on the generated movement path 13. The processing unit 181 also performs a process of storing the coordinate conversion information 71, 72 in the memory unit 182. The processing unit 181 also performs a process of outputting the coordinate conversion information 71 to the processing unit 41 of the robot controller 40, and a process of outputting the coordinate conversion information 72 to the processing unit 61 of the result display device 60.

In addition, in the above embodiment, an example is shown in which both a process for showing the position of the target on the actual workpiece and a process for showing the position of the target on a three-dimensional image of the workpiece are performed, but the present disclosure is not limited to this. In the present disclosure, only one of a process for showing the position of the target on the actual workpiece and a process for showing the position of the target on a three-dimensional image of the workpiece may be performed.

In addition, in the above embodiment, an example was shown in which the coordinate conversion information was a coordinate conversion table, but the present disclosure is not limited to this. In the present disclosure, the coordinate conversion information may be information other than a table, such as a coordinate conversion formula.

In the above embodiment, the indication unit is a laser irradiation unit, but the present disclosure is not limited to this. In the present disclosure, the indication unit is not particularly limited as long as it is possible to indicate the position of the target on the workpiece. For example, the indication unit may be an ink application unit that applies ink to indicate the position of the target on the workpiece. For example, the indication unit may be a stamp imprinting unit that imprints a stamp to indicate the position of the target on the workpiece. For example, the indication unit may be a paint gun that sprays paint to indicate the position of the target on the workpiece. For example, the indication unit may be an attachment unit that affixes an attachment such as a sticky note to indicate the position of the target on the workpiece. Unlike the above embodiment, the position of the target may be indicated on the actual workpiece by an augmented reality display device that displays augmented reality. The augmented reality display device displays an augmented reality image that indicates the position of the target on the workpiece.

In addition, in the above embodiment, an example was shown in which the instruction unit was arranged on the inspection robot, but the present disclosure is not limited to this. In the present disclosure, an instruction robot having an instruction unit arranged thereon may be provided separately from the inspection robot. The instruction robot operates to indicate the position of the target on the actual workpiece. In addition, the location where the inspection robot inspects the workpiece and the location where the instruction robot issues instructions for the workpiece may be separate, distant locations.

In addition, in the above embodiment, an example was shown in which the first distance interval was greater than the second distance interval, but the present disclosure is not limited to this. In the present disclosure, the first distance interval may be equal to or less than the second distance interval.

The functions of the elements disclosed herein can be performed using circuits or processing circuits, including general purpose processors, special purpose processors, integrated circuits, ASICs (Application Specific Integrated Circuits), conventional circuits, and/or combinations thereof, configured or programmed to perform the disclosed functions. Processors are considered processing circuits or circuits because they include transistors and other circuits. In this disclosure, a circuit, unit, or means is hardware that performs the recited functions or hardware that is programmed to perform the recited functions. The hardware may be hardware disclosed herein or other known hardware that is programmed or configured to perform the recited functions. If the hardware is a processor, which is considered a type of circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used to configure the hardware and/or the processor.

[Aspects]
The above-described embodiment is a specific example of the following aspects.

(Aspect 1)
Robots and
An inspection unit that inspects the workpiece;
A process of generating a movement path of the robot when the inspection unit inspects the workpiece by moving the inspection unit relative to the workpiece by the robot;
a process of generating coordinate conversion information for converting coordinate values of an inspection coordinate system of an inspection image acquired by inspecting the workpiece by the inspection unit into coordinate values of a three-dimensional coordinate system capable of expressing coordinate values of the workpiece three-dimensionally, based on the generated movement path;
A process of operating the robot based on the generated movement path and acquiring the inspection image by inspecting the workpiece with the inspection unit;
detecting an object of the workpiece within the acquired inspection image;
A process of converting coordinate values of the inspection coordinate system of the object into coordinate values of the three-dimensional coordinate system based on the generated coordinate conversion information;
A process of displaying a position of the object on the actual workpiece or a three-dimensional image of the workpiece based on the converted coordinate values of the three-dimensional coordinate system of the object;
and a processing unit that performs the above.

(Aspect 2)
2. The inspection system according to claim 1, wherein the processing unit performs processing to acquire coordinate values of the three-dimensional coordinate system at each first distance interval along the movement path and generate the coordinate transformation information.

(Aspect 3)
The processing unit operates the inspection unit to inspect the workpiece at second distance intervals along the movement path, and performs processing to acquire the inspection image;
3. The inspection system of claim 2, wherein the first distance is greater than the second distance.

(Aspect 4)
the coordinate conversion information is a coordinate conversion table that associates a movement amount of the robot in a direction along the movement path with a coordinate value of the three-dimensional coordinate system;
The processing unit, in a process of converting coordinate values of the inspection coordinate system of the object into coordinate values of the three-dimensional coordinate system,
acquiring a movement amount of the robot in the coordinate conversion table corresponding to a coordinate value of the inspection coordinate system in a direction along the movement path of the object;
A process of acquiring coordinate values of the three-dimensional coordinate system of the coordinate conversion table corresponding to the movement amount of the robot of the acquired coordinate conversion table;
a process of correcting coordinate values of the three-dimensional coordinate system of the acquired coordinate conversion table based on coordinate values of the inspection coordinate system in a direction perpendicular to the movement path of the object;
The inspection system according to any one of Aspects 1 to 3,

(Aspect 5)
An indication unit is provided on the robot and indicates a position of the target relative to the actual workpiece,
the three-dimensional coordinate system is a robot coordinate system related to the robot,
The processing unit operates the robot based on the coordinate values of the object converted into coordinate values in the robot coordinate system, and performs processing to indicate the position of the object on the actual workpiece using the instruction unit.

(Aspect 6)
the three-dimensional coordinate system is a workpiece coordinate system relating to the workpiece,
The processing unit performs processing to indicate the position of the object in a three-dimensional image of the workpiece based on the coordinate values of the object converted into coordinate values of the workpiece coordinate system.

(Aspect 7)
the three-dimensional coordinate system is a robot coordinate system related to the robot,
An inspection system described in any one of aspects 1 to 6, wherein the processing unit performs processing to treat the multiple targets as a single target and indicate the position of the target on the actual workpiece when the coordinate values of the multiple targets converted into coordinate values in the robot coordinate system are within a threshold range.

(Aspect 8)
generating a movement path of the robot when the inspection unit inspects the workpiece by moving the inspection unit relative to the workpiece by the robot;
generating coordinate conversion information for converting coordinate values of an inspection coordinate system of an inspection image acquired by inspecting the workpiece with the inspection unit into coordinate values of a three-dimensional coordinate system capable of expressing coordinate values of the workpiece three-dimensionally, based on the generated movement path;
operating the robot based on the generated movement path, and acquiring the inspection image by inspecting the workpiece with the inspection unit;
Detecting an object of the workpiece within the acquired inspection image;
converting coordinate values of the inspection coordinate system of the object into coordinate values of the three-dimensional coordinate system based on the generated coordinate conversion information;
and indicating a position of the object on the actual workpiece or a three-dimensional image of the workpiece based on the transformed coordinate values of the object in the three-dimensional coordinate system.

REFERENCE SIGNS LIST 10 Robot 13 Movement path 20 Inspection unit 21 Inspection image 30 Instruction unit 41 Processing unit 51 Processing unit 61 Processing unit 71, 72 Coordinate conversion information 100 Inspection system 181 Processing unit 200 Workpiece 201 Object D1 First distance interval D2 Second distance interval

Claims (10)

Robots and
An inspection unit that inspects the workpiece;
A process of generating a movement path of the robot when the inspection unit inspects the workpiece by moving the inspection unit relative to the workpiece by the robot;
a process of generating coordinate conversion information for converting coordinate values of an inspection coordinate system of an inspection image acquired by inspecting the workpiece by the inspection unit into coordinate values of a three-dimensional coordinate system capable of expressing coordinate values of the workpiece three-dimensionally, based on the generated movement path;
A process of operating the robot based on the generated movement path and acquiring the inspection image by inspecting the workpiece with the inspection unit;
A process of detecting defects of the workpiece in the acquired inspection image;
A process of converting a coordinate value of the defect in the inspection coordinate system into a coordinate value in the three-dimensional coordinate system based on the generated coordinate conversion information;
A process of displaying a position of the defect on the actual workpiece or a three-dimensional image of the workpiece based on coordinate values of the converted defect in the three-dimensional coordinate system;
and a processing unit that performs
the coordinate transformation information is information in which a movement amount of the robot is associated with a coordinate value of the three-dimensional coordinate system for each fixed movement amount of the robot in a direction along the movement path,
the processing unit performs a process of acquiring coordinate values of the three-dimensional coordinate system at first distance intervals along the movement path to generate the coordinate transformation information, and a process of operating the inspection unit to inspect the workpiece at second distance intervals along the movement path to acquire the inspection image,
The first distance is greater than the second distance . Robots and
An inspection unit that inspects the workpiece;
A process of generating a movement path of the robot when the inspection unit inspects the workpiece by moving the inspection unit relative to the workpiece by the robot;
a process of generating coordinate conversion information for converting coordinate values of an inspection coordinate system of an inspection image acquired by inspecting the workpiece by the inspection unit into coordinate values of a three-dimensional coordinate system capable of expressing coordinate values of the workpiece three-dimensionally, based on the generated movement path;
A process of operating the robot based on the generated movement path and acquiring the inspection image by inspecting the workpiece with the inspection unit;
A process of detecting defects of the workpiece in the acquired inspection image;
A process of converting a coordinate value of the defect in the inspection coordinate system into a coordinate value in the three-dimensional coordinate system based on the generated coordinate conversion information;
A process of displaying a position of the defect on the actual workpiece or a three-dimensional image of the workpiece based on coordinate values of the converted defect in the three-dimensional coordinate system;
A processing unit that performs
the coordinate conversion information is a coordinate conversion table that associates, for each fixed movement amount of the robot in a direction along the movement path, a movement amount of the robot in a direction along the movement path with a coordinate value in the three-dimensional coordinate system;
The processing unit, in a process of converting a coordinate value of the defect in the inspection coordinate system into a coordinate value in the three-dimensional coordinate system,
acquiring a movement amount of the robot in the coordinate conversion table corresponding to a coordinate value of the inspection coordinate system in a direction along the movement path of the defect;
A process of acquiring coordinate values of the three-dimensional coordinate system of the coordinate conversion table corresponding to the movement amount of the robot of the acquired coordinate conversion table;
a process of correcting coordinate values of the three-dimensional coordinate system of the acquired coordinate conversion table based on coordinate values of the inspection coordinate system in a direction perpendicular to the movement path of the defect;
An inspection system that performs the above. The inspection system according to claim 2 , wherein the processing unit performs processing to acquire coordinate values of the three-dimensional coordinate system at first distance intervals along the movement path and generate the coordinate conversion information. The processing unit operates the inspection unit to inspect the workpiece at second distance intervals along the movement path, and performs processing to acquire the inspection image;
The inspection system of claim 3 , wherein the first distance is greater than the second distance. the coordinate conversion information is a coordinate conversion table in which a movement amount of the robot in a direction along the movement path is associated with a coordinate value of the three-dimensional coordinate system for each fixed movement amount of the robot in a direction along the movement path,
The processing unit, in a process of converting a coordinate value of the defect in the inspection coordinate system into a coordinate value in the three-dimensional coordinate system,
acquiring a movement amount of the robot in the coordinate conversion table corresponding to a coordinate value of the inspection coordinate system in a direction along the movement path of the defect;
A process of acquiring coordinate values of the three-dimensional coordinate system of the coordinate conversion table corresponding to the movement amount of the robot of the acquired coordinate conversion table;
a process of correcting coordinate values of the three-dimensional coordinate system of the acquired coordinate conversion table based on coordinate values of the inspection coordinate system in a direction perpendicular to the movement path of the defect;
The inspection system according to claim 1 , An indicator is provided on the robot and indicates a position of the defect with respect to the actual workpiece,
the three-dimensional coordinate system is a robot coordinate system related to the robot,
The inspection system according to claim 1 or 2, wherein the processing unit operates the robot based on the coordinate values of the defect converted into coordinate values in the robot coordinate system, and performs processing to indicate the position of the defect on the actual workpiece by the instruction unit. the three-dimensional coordinate system is a workpiece coordinate system relating to the workpiece,
3. The inspection system according to claim 1, wherein the processing unit performs processing to indicate the position of the defect in a three-dimensional image of the workpiece based on the coordinate values of the defect converted into coordinate values in the workpiece coordinate system. the three-dimensional coordinate system is a robot coordinate system related to the robot,
3. The inspection system according to claim 1, wherein when the coordinate values of the multiple defects converted into coordinate values in the robot coordinate system are within a threshold range, the processing unit performs processing to treat the multiple defects as a single defect and indicate the position of the defect on the actual workpiece. generating a movement path of the robot when the inspection unit inspects the workpiece by moving the inspection unit relative to the workpiece by the robot;
generating coordinate conversion information for converting coordinate values of an inspection coordinate system of an inspection image acquired by inspecting the workpiece with the inspection unit into coordinate values of a three-dimensional coordinate system capable of expressing coordinate values of the workpiece three-dimensionally, based on the generated movement path;
operating the robot based on the generated movement path, and acquiring the inspection image by inspecting the workpiece with the inspection unit;
Detecting defects of the workpiece in the acquired inspection image;
converting a coordinate value of the defect in the inspection coordinate system into a coordinate value in the three-dimensional coordinate system based on the generated coordinate conversion information;
and indicating a position of the defect on the actual workpiece or a three-dimensional image of the workpiece based on coordinate values of the converted defect in the three-dimensional coordinate system;
the coordinate transformation information is information in which a movement amount of the robot is associated with a coordinate value of the three-dimensional coordinate system for each fixed movement amount of the robot in a direction along the movement path,
generating the coordinate transformation information includes acquiring coordinate values of the three-dimensional coordinate system at first distance intervals along the movement path to generate the coordinate transformation information;
acquiring the inspection image includes operating the inspection unit to inspect the workpiece at second distance intervals along the movement path to acquire the inspection image;
The method of inspection , wherein the first distance is greater than the second distance . generating a movement path of the robot when the inspection unit inspects the workpiece by moving the inspection unit relative to the workpiece by the robot;
generating coordinate conversion information for converting coordinate values of an inspection coordinate system of an inspection image acquired by inspecting the workpiece with the inspection unit into coordinate values of a three-dimensional coordinate system capable of expressing coordinate values of the workpiece three-dimensionally, based on the generated movement path;
operating the robot based on the generated movement path, and acquiring the inspection image by inspecting the workpiece with the inspection unit;
Detecting defects of the workpiece in the acquired inspection image;
converting a coordinate value of the defect in the inspection coordinate system into a coordinate value in the three-dimensional coordinate system based on the generated coordinate conversion information;
and indicating a position of the defect on the actual workpiece or a three-dimensional image of the workpiece based on coordinate values of the converted defect in the three-dimensional coordinate system;
the coordinate conversion information is a coordinate conversion table that associates, for each fixed movement amount of the robot in a direction along the movement path, a movement amount of the robot in a direction along the movement path with a coordinate value in the three-dimensional coordinate system;
Transforming the coordinate values of the defect in the inspection coordinate system into coordinate values in the three-dimensional coordinate system includes:
acquiring a movement amount of the robot in the coordinate conversion table corresponding to a coordinate value of the inspection coordinate system in a direction along the movement path of the defect;
acquiring a coordinate value of the three-dimensional coordinate system of the coordinate conversion table corresponding to the movement amount of the robot of the acquired coordinate conversion table;
correcting the coordinate values of the three-dimensional coordinate system of the acquired coordinate conversion table based on coordinate values of the inspection coordinate system in a direction perpendicular to the movement path of the defect;
4. A method for testing comprising:

Images