JP7752017B2 - Filter performance evaluation device, filter wetting device, and filter performance evaluation method - Google Patents

Description

This disclosure relates to a filter performance evaluation device, a filter wetting device, and a filter performance evaluation method.

Patent Document 1 discloses a configuration in which foreign matter sensors are installed in the primary and secondary passages of a filter to detect the condition of the filter that filters the liquid, and the foreign matter removal rate is calculated from the detection results of the two foreign matter sensors.

JP 2008-80193 A

This disclosure provides technology for more accurately evaluating filter performance.

A filter performance evaluation device according to one aspect of the present disclosure includes a flow path through which liquid flows from upstream to downstream; a foreign matter detection unit that detects foreign matter in the liquid flowing through the flow path; a target filter that is the filter to be evaluated and is located in the flow path upstream of the foreign matter detection unit; a foreign matter content condition adjustment unit that is located in the flow path upstream of the target filter and that supplies multiple types of liquid with different foreign matter content conditions to the target filter via the flow path; and a control unit. The foreign matter detection unit detects the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter. The control unit calculates the foreign matter collection performance of the target filter as the performance of the target filter based on the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter under each condition when multiple types of liquid with different foreign matter content conditions are individually supplied.

This disclosure provides technology for more accurately evaluating filter performance.

FIG. 1 is a schematic diagram showing an example of the general configuration of a filter wetting device. FIG. 2 is a block diagram showing an example of the functional configuration of the control device. FIG. 3 is a block diagram showing an example of the hardware configuration of the control device. 4A and 4B are diagrams for explaining an example of the concept of filter performance evaluation. 5A and 5B are diagrams illustrating an example of the control content of the filter wetting device for evaluating the performance of the filter. FIG. 6 is a diagram illustrating an example of the control content of the device for evaluating the performance of the filter in the filter wetting device. FIG. 7 is a diagram illustrating an example of differences in performance depending on the type of filter. FIG. 8 is a flow chart showing an example of a filter performance evaluation method.

Various exemplary embodiments are described below.

In one exemplary embodiment, a filter performance evaluation device is provided. The filter performance evaluation device includes a flow path through which a liquid flows from upstream to downstream; a foreign matter detection unit that detects foreign matter in the liquid flowing through the flow path; a target filter that is the filter to be evaluated and is located in the flow path upstream of the foreign matter detection unit; a foreign matter content condition adjustment unit that is located in the flow path upstream of the target filter and that individually supplies multiple types of liquid with different foreign matter content conditions to the target filter via the flow path; and a control unit. The foreign matter detection unit detects the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter. The control unit calculates the foreign matter collection performance of the target filter as the performance of the target filter based on the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter under each condition when multiple types of liquid with different foreign matter content conditions are individually supplied.

With the above-described filter performance device, the foreign matter content condition adjustment unit individually supplies multiple types of liquid with different foreign matter content conditions to the target filter. The control device then individually supplies multiple types of liquid with different foreign matter content conditions, and determines the foreign matter collection performance of the target filter as the performance of the target filter based on the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter under each condition. By configuring the device to evaluate the characteristics of the target filter using multiple types of liquid with different foreign matter content conditions, it is possible to accurately evaluate the performance of the target filter, even if the target filter's foreign matter collection performance changes depending on the amount of foreign matter in the liquid.

The flow path may further include a bypass flow path that branches off upstream of the target filter and merges downstream of the target filter, the foreign matter detection unit being located downstream of the flow path relative to the merger of the bypass flow path, and the control unit selecting whether to pass the liquid through the target filter or the bypass flow path by opening or closing a valve located on the flow path, the foreign matter detection unit detecting the amount of foreign matter contained in the liquid after passing through the target filter when the liquid is passed through the target filter, and detecting the amount of foreign matter contained in the liquid that does not pass through the target filter when the liquid is passed through the bypass flow path.

With the above configuration, the foreign matter detection unit located downstream of the junction with the bypass flow path can detect both the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter. Furthermore, the control unit can select whether to pass the liquid through the target filter or the bypass flow path by opening or closing a valve located on the flow path, thereby creating the above two states with a simple configuration.

The control unit may also calculate the dust-generating performance of the target filter as part of the performance of the target filter based on the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter under each condition when multiple types of liquid with different levels of foreign matter are individually supplied.

An important aspect of filter performance is the dust-generating performance of the filter itself, which is related to the foreign matter it expels. With the above configuration, the control device can determine the dust-generating performance of the target filter under each condition when multiple types of liquid with different levels of foreign matter are individually supplied, based on the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter. This allows for even more accurate evaluation of the target filter's performance.

The control unit may store in advance a correlation model for calculating the foreign matter collection performance and the dust generation performance from the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter under each condition when multiple types of liquid with different foreign matter content states are individually supplied, and determine the foreign matter collection performance and the dust generation performance based on the correlation model.

As described above, by storing a correlation model for calculating the foreign matter collection performance and the dust generation performance in advance and determining the foreign matter collection performance and dust generation performance based on the correlation model, it is possible to determine the foreign matter collection performance and dust generation performance more easily and accurately.

The foreign matter content condition adjustment unit may include two branch flow paths that are branched into two upstream of the target filter and merge upstream of the target filter, and the foreign matter content conditions in the two branch flow paths may be made different from each other, and the control unit may select one of the two branch flow paths through which the liquid flows by opening or closing a valve provided on the flow path.

As described above, by using two branch flow paths to differentiate the foreign matter content states and configuring the control unit to select one of the two branch flow paths through which liquid will flow, it is possible to more easily realize a configuration in which multiple types of liquid with different foreign matter content states can be individually supplied to the target filter.

The foreign matter content adjustment unit may include a filter provided in only one of the two branch flow paths.

As described above, by using a filter installed in only one of the two branch flow paths to differentiate the foreign matter content, it is possible to more easily realize a configuration in which multiple types of liquid with different foreign matter content levels are individually supplied to the target filter.

The control unit may determine whether the target filter has deteriorated based on the calculated performance of the target filter.

By using the above configuration, it is possible to quickly and accurately determine whether the filter has deteriorated based on the calculated filter performance.

The control unit may be configured to evaluate the wetting state of the target filter based on the calculated performance of the target filter.

By using the above configuration, the filter wetting state can be quickly and accurately evaluated from the calculated filter performance.

In another exemplary embodiment, a filter wetting device is provided. The filter wetting device wets a target filter and includes a liquid supply source, a flow path through which liquid supplied from the liquid supply source flows from upstream to downstream, a foreign matter detection unit in the flow path that detects foreign matter in the liquid flowing through the flow path, the target filter located in the flow path upstream of the foreign matter detection unit, a foreign matter content state adjustment unit located in the flow path upstream of the target filter that individually supplies multiple types of liquid, each with a different foreign matter content state, to the target filter via the flow path, and a control unit. The flow path further includes a bypass flow path that branches off upstream of the target filter and merges downstream of the target filter, and the foreign matter detection unit detects foreign matter downstream of the flow path from the merger position of the bypass flow path. The control unit selects whether to pass liquid through the target filter or through the bypass flow path by opening or closing a valve provided on the flow path. The foreign matter detection unit detects the amount of foreign matter contained in the liquid that has passed through the target filter when the liquid has passed through the target filter, and detects the amount of foreign matter contained in the liquid that has not passed through the target filter when the liquid has passed through the bypass flow path. The control unit generates information related to the foreign matter collection performance of the target filter as the wetting state of the target filter based on the amount of foreign matter contained in the liquid that has not passed through the target filter and the amount of foreign matter contained in the liquid that has passed through the target filter under each condition when multiple types of liquid with different foreign matter content states are individually supplied.

In the above-described filter wetting device, the foreign matter content condition adjustment unit individually supplies multiple types of liquids with different foreign matter content conditions to the target filter. The control device then individually supplies the multiple types of liquids with different foreign matter content conditions, and determines the foreign matter collection performance of the target filter based on the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter under each condition. By configuring the target filter's characteristics to be evaluated using multiple types of liquids with different foreign matter content conditions, information related to the target filter's foreign matter collection performance can be obtained, allowing for accurate evaluation of the filter's wetting performance. Furthermore, in the above-described configuration, the foreign matter detection unit located downstream of the bypass flow path junction can detect both the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter. Furthermore, the control unit can select whether to pass the liquid through the target filter or the bypass flow path by opening or closing a valve located in the flow path, thereby achieving the above two conditions with a simple configuration.

The control unit may also generate information related to the dust-generating performance of the target filter as the wetting state of the target filter based on the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter under each condition when multiple types of liquid with different foreign matter content states are individually supplied.

When determining the wetting state of a filter, the dust-generating performance of the filter itself, related to the foreign matter discharged, is also important. By using the above configuration, the control device can generate information related to the dust-generating performance of the target filter based on the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter under each condition when multiple types of liquid with different foreign matter content are individually supplied. This allows for even more accurate evaluation of the filter's wetting state as a performance factor for the target filter.

The foreign matter content condition adjustment unit may include two branch flow paths that are branched into two upstream of the target filter and merge upstream of the target filter, and the foreign matter content conditions in the two branch flow paths may be made different from each other, and the control unit may select one of the two branch flow paths through which the liquid flows by opening or closing a valve provided on the flow path.

By using two branch flow paths to differentiate the foreign matter content states and configuring the control unit to select one of the two branch flow paths through which liquid will flow, it is possible to more easily realize a configuration in which multiple types of liquid with different foreign matter content states can be individually supplied to the target filter.

Instead of being located downstream of the bypass flow path's junction, the foreign matter detection units may be individually located both between the bypass flow path's junction and the target filter and on the bypass flow path, and the control unit may control the liquid to pass through the target filter and the liquid to pass through the bypass flow path simultaneously. One of the two foreign matter detection units, the one located between the bypass flow path's junction and the target filter, may detect the amount of foreign matter contained in the liquid that has passed through the target filter, and the other of the two foreign matter detection units, the one located on the bypass flow path, may detect the amount of foreign matter contained in the liquid that does not pass through the target filter.

With the above configuration, the liquid passes through the target filter and the bypass flow path simultaneously. Furthermore, of the two foreign matter detectors, the foreign matter detector located between the junction of the bypass flow paths and the target filter detects the amount of foreign matter contained in the liquid after passing through the target filter. The other foreign matter detector located on the bypass flow path detects the amount of foreign matter contained in the liquid that does not pass through the target filter. Using the two foreign matter detectors, the amount of foreign matter contained in the liquid after passing through the target filter and the amount of foreign matter contained in the liquid that does not pass through the target filter are simultaneously detected. This eliminates the need for operations such as switching flow paths, reducing the risk of two types of liquid being mixed during measurement.

In another exemplary embodiment, a filter performance evaluation method is provided. The method is performed by a filter performance evaluation device including a foreign matter detection unit that detects foreign matter in a liquid flowing through a flow path from upstream to downstream, a target filter that is the filter to be evaluated and is located in the flow path upstream of the foreign matter detection unit, and a control unit. The method includes: individually supplying multiple types of liquids with different foreign matter content states to the target filter via the flow path upstream of the target filter; detecting, by the foreign matter detection unit, the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid that has passed through the target filter; and calculating, by the control unit, the foreign matter collection performance of the target filter as the performance of the target filter based on the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid that has passed through the target filter under each condition when the multiple types of liquids with different foreign matter content states are individually supplied.

According to the above filter performance evaluation method, multiple types of liquids with different contaminant content states are individually supplied to the target filter, and the foreign matter detection unit detects foreign matter. The control device then determines the foreign matter collection performance of the target filter as the performance of the target filter based on the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter under each condition when multiple types of liquids with different contaminant content states are individually supplied. By configuring the target filter to be characterized using multiple types of liquids with different contaminant content states, the performance of the target filter can be accurately evaluated, even if the target filter's foreign matter collection performance changes depending on the amount of foreign matter in the liquid.

Various exemplary embodiments will be described in detail below with reference to the drawings. Note that the same or equivalent parts in each drawing will be designated by the same reference numerals.

[Filter wetting device]
A filter wetting device according to one embodiment will be described with reference to Fig. 1. The filter wetting device 1 according to one embodiment is a device that performs a wetting process on a filter used in a substrate processing apparatus that discharges processing liquid onto a substrate (workpiece) and performs various liquid processes.

In substrate processing equipment, a supply system containing piping (flow paths) for passing the processing liquid may be installed between the processing liquid supply source and the nozzle that ejects the processing liquid onto the substrate. The filter that is the target of wetting is installed in the piping of the supply system and has the function of removing foreign matter (particles) from the processing liquid. Wetting refers to the process of passing liquid through a filter. A filter wetting device is a device that passes liquid through a filter used in substrate processing equipment at a predetermined timing, such as before use in substrate processing.

Particles may become contaminated in filters used in substrate processing equipment during manufacturing. Therefore, if a filter is used for substrate processing without undergoing wetting, particles held by the filter itself may be discharged downstream upon contact with the liquid (processing liquid). In this case, regardless of the filter's own particle collection performance, particles may be discharged downstream and supplied to the substrate (workpiece). Therefore, wetting is performed to reduce the risk of particles contaminated in the filter being discharged downstream. Thus, a filter wetting device is required to wet the filter until it is in a condition suitable for use in a substrate processing equipment. Therefore, the filter wetting device of this embodiment performs filter wetting while checking the filter's foreign matter removal performance. In other words, the filter wetting device of this embodiment also functions as a filter performance evaluation device.

Figure 1 shows the schematic configuration of the filter wetting device 1. As shown in Figure 1, the device includes a treatment liquid supply source 10 (liquid supply source) for passing the treatment liquid through the target filter, a liquid delivery system 30, and a foreign matter detection unit 70. The liquid delivery system 30 includes a flow path for supplying the treatment liquid, as well as pumps, valves, and other components for delivering the liquid through the flow path. The liquid delivery system 30 also includes a gas supply system 50 for supplying an inert gas that can be used to adjust the delivery of the liquid. Furthermore, the filter wetting device 1 includes a control device 100 (control unit) that controls the above-mentioned components.

The processing liquid can be supplied from the processing liquid supply source 10. The "processing liquid" in the filter wetting device 1 is a liquid suitable for filter wetting or filter performance evaluation, and can be, for example, thinner, which is used as a cleaning liquid for cleaning substrates in substrate processing equipment. However, the type of liquid that can be used as the processing liquid is not limited to substrate cleaning liquid. The processing liquid supply source 10 is a tank that stores the processing liquid and is detachable from the liquid delivery system 30.

A gas supply system 50 is connected to the processing liquid supply source 10. Specifically, a gas supply source 51 that supplies an inert gas such as nitrogen (N ₂ ) is connected to the processing liquid supply source 10 via a gas supply path R51 provided with a valve V51 included in the gas supply system 50. The gas supply source 51 and the gas supply path R51 constitute a pressurizing mechanism that pressurizes the liquid surface in the processing liquid supply source 10 to move the processing liquid from the processing liquid supply source 10. The gas supply path R51 may also be provided with a separate path for exhausting the inert gas. The gas supply source 51 and the gas supply path R51 function as a gas supply system for moving the processing liquid from the processing liquid supply source 10 to the downstream flow path L.

The main flow path L1 connected to the treatment liquid supply source 10 is provided with a liquid delivery system 30, which is comprised of, from upstream to downstream, a valve V1, an intermediate tank 31, an upstream filter section 32, a pump flow path system 40, and a valve V2.

The intermediate tank 31 stores and sucks in the processing liquid from the processing liquid supply source 10, and sends the sucked processing liquid downstream. A flow path from the processing liquid supply source 10 may be connected to the upper surface of the intermediate tank 31, and a flow path to the downstream upstream filter section 32 may be connected to the lower surface. The intermediate tank 31 may have, for example, a storage chamber for storing the processing liquid and function as a pump having a contraction section for contracting the storage chamber. In this case, the intermediate tank 31 may be, for example, a tube phragm pump, a diaphragm pump, or a bellows pump. The intermediate tank 31 may also be provided with an exhaust pipe 31a for discharging gas from inside. The exhaust pipe 31a may be used, for example, to discharge gas separated from the processing liquid in the storage chamber.

The upstream filter unit 32 is located upstream of the pump flow path system 40 and is equipped with a filter for removing particles from the processing liquid flowing through the main flow path L1. A bypass path L11 is also provided, connected upstream and downstream of the upstream filter unit 32. Valves V11 and V12 for switching the processing liquid flow path are provided on the main flow path L1 downstream of the branch point with the upstream bypass path L11, and on the bypass path L11, respectively. The processing liquid flow path can be switched by controlling the opening and closing of the valves V11 and V12. The bypass path L11, the section of the main flow path L1 that is provided parallel to the bypass path L11, the upstream filter unit 32, and the valves V11 and V12 function as a foreign matter condition adjustment unit. This will be described later.

The pump flow path system 40 includes, from downstream to downstream, a pump 41, a trap unit 42, a filter unit 43, and a valve V40. The filter unit 43 is equipped with a filter for removing particles from the processing liquid.

The pump 41 is configured, for example, as a diaphragm pump, to discharge and eject the processing liquid toward the flow path in which the downstream foreign object detection unit 70 is installed. The pump 41 includes a pressurizing unit 411 and a pump internal flow path 412. The pressurizing unit 411 pressurizes the pump internal flow path 412, for example, using compressed air. The pump internal flow path 412 also has, for example, a diaphragm portion, and its shape can be forcibly changed by pressurizing it with the pressurizing unit 411. By adjusting the compressed air, the pump internal flow path 412 deforms, accepting and delivering the processing liquid.

The pump 41 is equipped with a liquid supply valve V41, a liquid discharge valve V42, and a vent valve V43. The vent valve V43 is connected to the trap unit 42 via a connection line L41. A bypass line L42, which bypasses the filter unit 43 and is equipped with a valve V45, is provided between the pump 41 and the upstream side of the valve V40 in the main flow path L1 via the trap unit 42.

The filter unit 43 and trap unit 42 are each connected to a discharge channel L43 that has a vent valve (not shown). The trap unit 42 functions to separate the machine body from the treatment liquid. Furthermore, a filter that is the target of wetting is attached to the filter unit 43. In other words, the filter attached to the filter unit 43 is the filter that is the target of wetting and the filter that is the target of performance evaluation (target filter).

The valve provided in the liquid delivery system 30 may be, for example, an air-operated valve. However, the valve configuration is not limited to this.

The foreign matter detector 70 measures the number of foreign matters (foreign matter amount) in the processing liquid flowing through the main flow path L1. The foreign matter detector 70 can be, for example, a known particle counter that detects particles based on scattered light generated by irradiating the processing liquid in the flow path with measurement light. However, the type of foreign matter detector 70 is not particularly limited. Note that the "foreign matter amount" described in this embodiment may refer to the actual number of foreign matters in the processing liquid (e.g., in a predetermined amount of processing liquid), but is not limited to an actual number as long as it indicates the level of foreign matter contained. For example, information indicating the level of foreign matter contained, obtained by optical measurement such as scattered light measurement or other measurement methods, may be converted into a numerical value indicating the level of content, and this value may be treated as the foreign matter amount.

The treatment liquid that flows through the main flow path L1 passes through the foreign matter detection unit 70 and is then discharged to the outside.

Next, the control device 100 will be described in detail with reference to Figure 2. The control device 100 has the function of supplying the treatment liquid from the treatment liquid supply source 10 to the main flow path L1 and sending it out from the main flow path L1 to the outside, as a function for wetting the filter. The control device 100 also has the function of controlling each part of the liquid delivery system 30 for evaluating the performance of the filter, and obtaining and analyzing the results of foreign matter detection by the foreign matter detection unit 70.

The main flow path L1, bypass path L11, connection path L41, bypass path L42, and discharge path L43 included in the filter wetting device 1 are all conduits (passages) through which the treatment liquid flows. Therefore, these conduits are collectively referred to as the "flow paths."

As shown in FIG. 2, the control device 100 is configured to include functional modules (hereinafter referred to as "functional modules"), including a liquid delivery control unit 101, a measurement condition control unit 102, a foreign matter detection result acquisition unit 103, a filter performance estimation unit 104, and a result output unit 105.

The liquid delivery control unit 101 controls each unit in the filter wetting device 1, supplying the treatment liquid from the treatment liquid supply source 10 to the main flow path L1 and sending it out from the main flow path L1 to the outside. When wetting the target filter, it controls the liquid delivery system 30 and pump flow path system 40 to cause the treatment liquid to flow through the filter attached to the filter unit 43. When evaluating the performance of the filter, it controls the liquid delivery system 30 and pump flow path system 40 to cause the treatment liquid to flow through a specified path based on the control content instructed by the measurement condition control unit 102.

The measurement condition control unit 102 controls the conditions for evaluating the filter performance. The method for evaluating filter performance will be described in detail below, but by controlling the opening and closing of valves V11 and L12 and valves V40 and V45, the processing liquid flows through a flow path corresponding to the measurement conditions. Therefore, the measurement condition control unit 102 includes a flow path switching unit 111 that switches flow paths by opening and closing valves, and a measurement condition information storage unit 112 that stores information related to the conditions for evaluating the filter performance. The flow path switching unit 111 also functions as a foreign matter content adjustment unit that adjusts the foreign matter content of the processing liquid supplied to the filter as a measurement condition for evaluating the filter performance.

The foreign matter detection result acquisition unit 103 has the function of acquiring the measurement results obtained by the foreign matter detection unit 70 when the treatment liquid is supplied into the flow path under the measurement conditions set by the measurement condition control unit 102. The measurement results obtained by the foreign matter detection unit 70 are used by the filter performance estimation unit 104 to estimate the filter performance.

The filter performance estimation unit 104 evaluates the performance of the filter being evaluated based on the measurement results from the foreign matter detection unit 70 acquired by the foreign matter detection result acquisition unit 103. The performance of the filter being evaluated includes the collection performance, which indicates the degree to which the filter can remove foreign matter from the processing liquid, and the dust-generating performance, which indicates the degree to which the filter itself can expel foreign matter that has been retained. Details will be provided below.

The result output unit 105 has a function of outputting the filter performance estimation results obtained by the filter performance estimation unit 104. The result output unit 105 may also have a function of outputting the measurement results obtained by the foreign matter detection unit 70 and acquired by the foreign matter detection result acquisition unit 103. The output destination is not particularly limited, and examples include an external device such as another terminal device used by the user of the filter wetting device 1.

The control device 100 is composed of one or more control computers. For example, the control device 100 has a circuit 120 shown in FIG. 3. The circuit 120 includes one or more processors 121, memory 122, storage 123, input/output ports 124, and a timer 125.

Storage 123 has a computer-readable storage medium, such as a hard disk. The storage medium records a program for causing filter wetting device 1 to execute the liquid processing procedure described below. The storage medium may be a removable medium such as a non-volatile semiconductor memory, magnetic disk, or optical disk. Memory 122 temporarily records the program loaded from the storage medium of storage 123 and the results of calculations by processor 121. Processor 121 executes the program in cooperation with memory 122 to configure each of the functional modules described above. Input/output port 124 inputs and outputs electrical signals to and from each part of filter wetting device 1.

Note that the hardware configuration of the control device 100 is not necessarily limited to configuring each functional module by a program. For example, each functional module of the control device 100 may be configured by a dedicated logic circuit or an ASIC (Application Specific Integrated Circuit) that integrates such a circuit.

[Filter performance evaluation method]
A description will now be given of a method for evaluating filter performance performed by the filter wetting device 1. First, the relationship between a filter provided on a flow path and particles in the flow path will be described with reference to FIG.

As shown in Figure 4(a), assume that a filter F is installed on a flow path P. Here, let X be the amount of particles contained in the liquid flowing through the flow path P upstream of the filter F, and Y be the amount of particles contained in the liquid flowing through the flow path P downstream of the filter F. The particle amount Y in the downstream flow path P can be expressed as the sum of the particle amount aX, which is the particle amount X originally contained in the liquid multiplied by a coefficient a, and the particle amount b discharged from the filter F. In other words, the relationship is "Y = aX + b." The particle removal rate, which indicates the degree to which particles are reduced by passing through the filter F, can be expressed as 1 - a using the coefficient a. This "1 - a" can be considered the filter's "collection performance." Meanwhile, since coefficient b in the above equation "Y = aX + b" represents the amount of particles discharged from the filter F, this coefficient b corresponds to the filter's "particle generation performance." Therefore, by knowing coefficients a and b in the above equation, the filter's performance can be determined.

The equation "Y = aX + b" including the coefficients a and b can be written, for example, as shown in FIG. 4(b). If the horizontal axis represents the amount of particles X on the upstream side shown in FIG. 4(a) and the vertical axis represents the amount of particles Y on the downstream side shown in FIG. 4(a), the equation can be written as a straight line of a linear function. In this case, as shown in FIG. 4(b), if two conditions ( _X1 , _X2 ) for the amount of particles on the upstream side are set and liquids containing different amounts of particles are passed through the filter F, the amount of particles on the downstream side under each condition is predicted to be different amounts ( _Y1 , _Y2 ). Therefore, by plotting these results as shown in FIG. 4(b), it is possible to estimate the coefficients a and b by finding an approximate equation, and therefore it is possible to determine the filter's collection performance (1-a) and dust-generating performance (b).

In the filter wetting device 1, as shown in Figure 4, filter performance is evaluated by passing two types of liquid with different particle amounts through the target filter, i.e., the filter attached to the filter unit 43. Specifically, the above method is achieved by switching the flow path within the device.

Figure 5(a) is a schematic diagram of the filter wetting device 1's components related to filter performance evaluation. Figure 5(a) shows the main flow path L1, the upstream filter section 32 on the main flow path L1, and the bypass path L11 connected upstream and downstream of the upstream filter section 32. Also shown downstream are the filter section 43 on the main flow path L1 and the bypass path L42, which is provided parallel to the filter section 43. With this configuration, the treatment liquid path can be selected from the main flow path L1 and the bypass path L11, which pass through the upstream filter section 32, on the upstream side, and from the main flow path L1 and the bypass path L42, which pass through the filter section 43 on the downstream side. As a result, four flow path patterns (conditions 1 to 4) can be formed, as shown in Figure 5(b).

The two branched paths on the upstream side (branched paths: main flow path L1 and bypass path L11 passing through the upstream filter section 32) are used to adjust the amount of particles contained in the treatment liquid passing through the target filter using the filter of the upstream filter section 32. In other words, the amount of particles in the treatment liquid used for evaluation can be adjusted by selecting either of the two upstream paths. In addition, the two downstream paths (main flow path L1 and bypass path L42 passing through the filter section 43) can identify whether the treatment liquid passes through the filter section 43 or not.

Specifically, condition 1 (upstream filter section 32 + bypass path L42) and condition 2 (bypass path L11 + bypass path L42) shown in FIG. 5B are conditions for measuring the amount of particles in the processing liquid under conditions where the processing liquid does not pass through the target filter. This corresponds to calculating the two conditions ( _X1 , _X2 ) corresponding to FIG. 4B, as shown in FIG. 6. Condition 3 (upstream filter section 32 + filter section 43) and condition 4 (bypass path L11 + filter section 43) are conditions for measuring the amount of particles in the processing liquid under conditions where the processing liquid passes through the target filter. This corresponds to calculating the two conditions ( _Y1 , _Y2 ) corresponding to FIG. 4B, as shown in FIG. 6. From the particle amount measurement results when the processing liquid is passed through the target filter under these four conditions, it is possible to calculate the coefficients a and b in the relational expression Y = aX + b, as shown in FIG. 6.

The control device 100 of the filter wetting device 1 sets the above four conditions by opening and closing valves V11, V12, V40, and V45, passes the treatment liquid under each condition, and performs measurements using the foreign matter detection unit 70. Based on these results, an approximate equation is created to calculate coefficients a and b, allowing the filter's collection performance and dust-generating performance to be evaluated individually. The above valve opening and closing settings are stored in the measurement condition information storage unit 112 of the control device 100.

Furthermore, information on how to create an approximate equation from the measurement results under the above four conditions and calculate the coefficients a and b may be held in the filter performance estimation unit 104 .
The information indicating the correlation between the measurement results under the above four conditions and the collection performance and dust generation performance may be treated as a correlation model in the control device 100.

Figure 7 shows an example of the results of confirming that filter collection and dust generation performance differ depending on the type of filter. Filters 1 to 3 are made of different materials. Figure 7 shows the particle removal rate, i.e., collection performance (1-a) and dust generation performance (b), calculated from the particle amount detected by the foreign matter detection unit 70 when the same processing liquid was supplied to Filters 1 to 3 under the four conditions described above. A particle removal rate closer to 100% indicates high collection performance. On the other hand, dust generation performance (b) closer to 0 indicates high performance. As shown in Figure 7, comparing Filters 1 and 3, the particle removal rate (1-a) is similar, but Filter 1's dust generation performance (b) is significantly higher than Filter 3's. On the other hand, Filter 2's particle removal rate (1-a) is higher than Filters 1 and 3, and its dust generation performance (b) is slightly lower than Filter 1's. These results evaluate the differences in characteristics depending on the filter material; however, differences in characteristics may occur between individual filters made from the same material. Furthermore, from the results shown in Figure 7, it is predicted that there is little correlation between collection performance (particle removal rate) and dust generation performance. Therefore, by evaluating the two performances separately, it is possible to grasp the filter's performance more accurately.

The filter performance estimation unit 104 of the control device 100 may determine whether the filter being evaluated can be used when processing substrates in the substrate processing apparatus based on the evaluation results of the filter's collection performance and dust-generating performance. If a filter with problems with collection performance or dust-generating performance is used to process a substrate, processing liquid with a large amount of remaining particles may be supplied to the substrate. Therefore, the filter wetting device 1 may preset standard collection performance and dust-generating performance to determine whether the filter can be used when processing substrates. In this case, if the collection performance and dust-generating performance do not meet the predetermined conditions, the filter may be determined to be unusable due to deterioration.

The filter performance estimation unit 104 may also evaluate whether filter wetting has been performed appropriately based on the evaluation results of the filter's collection performance and dust-generating performance. For example, if the filter is not sufficiently wetting, the dust-generating performance may not be stable, meaning that the amount of particles discharged downstream from the filter may not be stable (e.g., may increase). In such a state, the filter's collection performance may also be unstable. Therefore, standard collection performance and dust-generating performance for determining whether wetting has been performed sufficiently may be set in advance depending on the type of filter, etc. In this case, if the collection performance and dust-generating performance do not satisfy the specified conditions, it may be determined that the filter wetting is not insufficient, and the filter wetting process may be performed again.

[Filter performance evaluation method (estimation method)]
An example of a method for evaluating the filter performance of the filter wetting device will be described with reference to FIG.

In this embodiment, the filter after wetting in the filter wetting device 1 is the target filter, and the procedure for evaluating whether wetting has been performed sufficiently for that filter will be described. Therefore, it is assumed that the target filter is attached to the filter unit 43 and the wetting process has been performed on that filter.

First, in step S01, the control device 100 sets conditions for evaluating performance. Specifically, in the measurement condition control unit 102 of the control device 100, the flow path switching unit 111 switches the flow path based on the information stored in the measurement condition information storage unit 112. For example, when setting condition 1 shown in Figure 5(b), the flow path switching unit 111 opens valve V11, closes valve V12, closes valve V40, and opens valve V45.

Next, in step S02, the processing liquid is passed through the flow path. Specifically, the liquid supply control unit 101 of the control device 100 supplies the processing liquid from the processing liquid supply source 10 to the main flow path L1. The processing liquid flows through a predetermined flow path, passes through the downstream foreign matter detection unit 70, and is discharged to the outside. At this time, the foreign matter detection unit 70 measures particles in the processing liquid, and the measurement results are sent to the control device 100. The foreign matter detection result acquisition unit 103 of the control device 100 acquires the measurement results sent from the foreign matter detection unit 70. Once a predetermined amount of processing liquid has passed, the supply of processing liquid from the processing liquid supply source 10 is stopped.

The above steps S01 and S02 are repeated, for example, until the liquid delivery and measurement are completed under each of the four conditions described above. In other words, steps S01 and S02 are repeated until it is determined in step S03 that measurements under all conditions have been completed (S03-YES).

Once measurements under all conditions are complete, filter performance is evaluated in step S04. Specifically, the filter performance estimation unit 104 of the control device 100 estimates filter performance based on the results acquired by the foreign matter detection result acquisition unit 103. The method for estimating filter performance is as described above. The approximate formula (Y = aX + b) is calculated from the foreign matter detection results when processing liquid is passed through under four conditions, and the coefficients a and b are calculated to calculate particle collection performance (1 - a) and dust generation performance (b).

Next, in step S05, it is determined whether the filter performance is stable based on predetermined criteria. Specifically, the filter performance estimation unit 104 of the control device 100 determines whether the filter performance is stable based on whether the collection performance and particle generation performance calculated by the above procedure satisfy predetermined conditions. This corresponds to determining whether wetting has been performed sufficiently. If it is determined that the filter performance is not stable (S05-NO), the control device 100 executes wetting control by repeating the wetting process in the filter wetting device 1 (step S06). Note that after performing the wetting process (S06), the above series of processes (S01-S05) may be repeated to confirm whether wetting has been performed sufficiently. On the other hand, if it is determined that the filter performance is stable (S05-YES), the control device 100 terminates the series of processes.

In addition, when determining whether the target filter has deteriorated instead of whether wetting is sufficient, step S05 may determine whether the performance of the target filter is appropriate for a non-defective product. If it is determined that the filter performance is not appropriate for a non-defective product (S05-NO), the process may be terminated by issuing an alarm or the like to notify that the target filter has deteriorated.

[Effect]
According to the filter wetting device 1, which functions as the filter performance device described above, the foreign matter content condition adjustment unit individually supplies multiple types of liquids with different foreign matter content conditions to the target filter (the filter attached to the filter unit 43). Measurements are also performed by the foreign matter detection unit 70 in this state. The control device 100 then individually supplies multiple types of liquids with different foreign matter content conditions, and determines the foreign matter collection performance of the target filter as the performance of the target filter based on the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid that has passed through the target filter under each condition. By configuring the filter wetting device 1 to evaluate the characteristics of the target filter using multiple types of liquids with different foreign matter content conditions, the performance of the target filter can be accurately evaluated, even if the target filter's foreign matter collection performance changes depending on the amount of foreign matter in the liquid.

The flow path may further include a bypass path L42 that branches off upstream of the target filter and merges downstream of the target filter. The foreign matter detection unit 70 may be located downstream of the merger of the bypass path L42. The control device 100 may select whether to pass the liquid through the target filter or the bypass path by opening or closing valves V40 and V45 located on the flow path. The foreign matter detection unit 70 may detect the amount of foreign matter contained in the liquid after passing through the target filter when the liquid is passed through the target filter, and may detect the amount of foreign matter contained in the liquid that does not pass through the target filter when the liquid is passed through the bypass path L42. With the above configuration, the foreign matter detection unit located downstream of the merger of the bypass path L42 can detect both the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter. Furthermore, the control device 100 can select whether to pass the liquid through the target filter or through the bypass flow path by opening and closing valves V40 and V45 installed in the flow path, making it possible to create the above two states with a simple configuration.

An important aspect of filter performance is the dust-generating performance of the filter itself, which is related to the foreign matter discharged from the filter. Therefore, the control device 100 may calculate the dust-generating performance of the target filter based on the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter under each condition when multiple types of liquid with different levels of foreign matter are individually supplied. By using the above configuration, the control device 100 can also determine the dust-generating performance of the target filter. Therefore, the performance of the target filter can be evaluated with even greater accuracy.

The control device 100 may store in advance a correlation model for calculating foreign matter collection performance and dust generation performance from the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter under each condition when multiple types of liquid with different foreign matter content states are individually supplied. Furthermore, the foreign matter collection performance and dust generation performance may be calculated based on this correlation model. This configuration makes it possible to calculate foreign matter collection performance and dust generation performance more easily and accurately.

The foreign matter content condition adjustment unit may include two branch flow paths that branch into two upstream of the target filter and merge upstream of the target filter: a main flow path L1 in the section before and after the upstream filter section 32, and a bypass path L11. The two branch flow paths may also have different foreign matter content conditions. In this case, the control device 100 may select one of the two branch flow paths through which the liquid flows by opening and closing valves V11 and V12 provided on the flow path. This configuration makes it easier to individually supply multiple types of liquid with different foreign matter content conditions to the target filter.

Furthermore, the foreign matter content condition adjustment unit may include a filter provided in only one of the two branch flow paths, i.e., a filter attached to the upstream filter unit 32. In this case, the filter attached to the upstream filter unit 32 can be used to configure the foreign matter content conditions to be different from each other, making it even easier to individually supply multiple types of liquid with different foreign matter content conditions to the target filter.

The control device 100 may determine whether the target filter has deteriorated based on the calculated performance of the target filter. In this case, it is possible to quickly and accurately determine whether the filter has deteriorated from the calculated filter performance.

The control device 100 may evaluate the wetting state of the target filter based on the calculated performance of the target filter. In this case, the wetting state of the filter can be evaluated quickly and accurately from the calculated filter performance.

[Modification]
Although various exemplary embodiments have been described above, the present invention is not limited to the above-described exemplary embodiments, and various omissions, substitutions, and modifications may be made. Furthermore, elements in different embodiments may be combined to form other embodiments.

For example, the configuration of the filter wetting device 1 as a filter performance evaluation device may be modified as appropriate. For example, to evaluate filter performance using the above method, it is necessary to prepare two types of treatment liquid (liquid) with different particle amounts. In the above-described filter wetting device 1, the configuration for supplying two types of treatment liquid to the target filter is configured to pass two types of treatment liquid with different particle amounts through the target filter by combining a main flow path L1 that passes through the upstream filter section 32 and a bypass path L11 that does not pass through the upstream filter section 32. However, for example, a configuration for supplying two types of treatment liquid with different particle amounts to the target filter may be configured such that two types of treatment liquid are prepared and supplied from the treatment liquid supply source 10, and the two different types of treatment liquid are supplied through the entire flow path. Furthermore, instead of adjusting the particle amount using a filter in the upstream filter section 32, a configuration different from the configuration described in the above embodiment may be adopted, such as adding particles midway through the flow path. If a configuration different from the above embodiment is adopted, which combines a main flow path L1 that passes through the upstream filter section 32 with a bypass path L11 that does not pass through the upstream filter section 32, the bypass path L11 may not be used.

Furthermore, to evaluate filter performance using the above method, it is necessary to grasp the particle amounts (X, Y) before and after passing through the target filter, as information indicating the degree to which the particle amount changed before and after passing through the target filter. In the above embodiment, to obtain this information, conditions (conditions 1 and 2 in Figure 5) were set in which the processing liquid was flowed through the bypass path L42, which does not pass through the target filter, and measurements were performed using the foreign matter detection unit 70 under these conditions to obtain the particle amount (X) before passing through. In this configuration, if the foreign matter detection unit 70 can be set upstream of the filter unit 43, for example, instead of performing measurements using the bypass path L42, measurements can be performed separately on the upstream and downstream flow paths using the foreign matter detection unit 70 while supplying processing liquid to the filter unit 43. In this case, it is possible to simultaneously perform measurements corresponding to conditions 1 and 3 shown in Figure 5, for example. In this way, the device configuration for achieving the measurement conditions for filter performance evaluation can be modified as appropriate.

Furthermore, when two foreign matter detectors 70 can be used, for example, foreign matter detectors 70 may be provided in both the main flow path L1 downstream of the filter unit 43 and upstream of the junction with the bypass path L42 (trap unit 42 in FIG. 1 ), and on the bypass path L42. The control device 100 may control the flow path to simultaneously supply the treatment liquid to both flow paths provided with the foreign matter detectors 70, and foreign matter may be detected by both foreign matter detectors 70. When the treatment liquid is controlled to flow simultaneously through two flow paths and measurements are performed by two foreign matter detectors 70, the treatment liquid flowing through one flow path is prevented from flowing into the other flow path. This prevents the treatment liquid that has passed through the filter unit 43 and the treatment liquid that has not passed through the filter unit 43 from being mixed when measurement is performed by the foreign matter detector 70. The flow path configuration may be modified to stabilize the flow rate of the treatment liquid in the two flow paths.

In addition, in the above embodiment, a case where filter performance evaluation is performed in the filter wetting apparatus 1 has been described. However, the configuration for performing the filter performance evaluation described above may be configured to be mounted on a device separate from the filter wetting apparatus. For example, the device may be configured solely for performing filter performance evaluation. In this case, the components shown in FIG. 1 that are not related to filter performance evaluation may not be included. The configuration for performing filter performance evaluation may also be mounted on, for example, a substrate processing apparatus. In this case, a nozzle may be attached to the most downstream side of the main flow path L1, and the processing liquid may be ejected from the nozzle onto the substrate. In this case, instead of using a particle counter as the foreign matter detection unit 70, for example, the configuration may be such that an image of the dispersion of foreign matter (particles) in the processing liquid ejected onto the substrate is captured, and the amount of foreign matter is determined from the captured image.

In addition, in the above embodiment, the filter wetting device 1 is configured so that the coefficients a and b are calculated in the filter performance estimation unit 104 of the control device 100. However, as an alternative configuration, the filter wetting device and a device that performs calculations related to filter performance evaluation may be provided separately. Specifically, the filter wetting device may not calculate the coefficients a and b itself, but may simply acquire the detection results from the foreign matter detection unit 70 via the foreign matter detection result acquisition unit 103. In this case, a separate device may be provided to perform calculations related to filter performance estimation, and the foreign matter detection results acquired by the filter wetting device may be processed by the separately provided device. In this way, the functions related to the series of processes related to filter performance evaluation may be distributed between the filter wetting device and another device.

From the foregoing, it will be understood that various embodiments of the present disclosure have been described herein for illustrative purposes, and that various modifications may be made without departing from the scope and spirit of the present disclosure. Accordingly, the various embodiments disclosed herein are not intended to be limiting, with the true scope and spirit being indicated by the appended claims.

1...filter wetting device, 10...treatment liquid supply source, 30...liquid delivery system, 32...upstream filter section, 40...pump flow path system, 43...filter section, 50...gas supply system, 70...foreign matter detection section, 100...control device.

Claims (13)

a flow path through which a liquid flows from an upstream side to a downstream side;
a foreign object detector in the flow path that detects foreign objects in the liquid flowing through the flow path;
a target filter that is a filter to be evaluated and is provided in the flow path upstream of the foreign matter detection unit;
a foreign matter containing state adjusting unit that is provided in the flow path upstream of the target filter and that individually supplies a plurality of types of liquid having different foreign matter containing states to the target filter via the flow path;
a control unit,
the foreign matter detection unit detects the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter,
The control unit calculates the foreign matter collection performance, which represents the relationship between the amount of foreign matter contained in the liquid before passing through the target filter and the amount of foreign matter removed by the target filter, based on the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter, under each condition when multiple types of liquid with different foreign matter content states are supplied individually. The flow path further includes a bypass flow path that branches off on the upstream side of the target filter and joins on the downstream side of the target filter,
the foreign object detection unit is provided downstream of the flow path relative to a joining position of the bypass flow path,
the control unit selects whether to pass the liquid through the target filter or the bypass flow path by opening and closing a valve provided on the flow path,
The foreign object detection unit
When a liquid is passed through the target filter, the amount of foreign matter contained in the liquid after passing through the target filter is detected;
2. The filter performance evaluation device according to claim 1, wherein when a liquid is passed through the bypass flow path, an amount of foreign matter contained in the liquid that does not pass through the target filter is detected. The control unit
3. A filter performance evaluation device as described in claim 1 or 2, wherein when multiple types of liquids with different foreign matter content states are supplied individually, the dust generation performance of the target filter is also calculated as the performance of the target filter based on the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter under each condition. The filter performance evaluation device of claim 3, wherein the control unit stores in advance a correlation model for calculating the foreign matter collection performance and the dust generation performance from the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter under each condition when multiple types of liquid with different foreign matter content states are individually supplied, and determines the foreign matter collection performance and the dust generation performance based on the correlation model. the foreign matter containing state adjusting unit includes two branch flow paths that are branched into two on the upstream side of the target filter and merge together on the upstream side of the target filter, and makes the foreign matter containing states in the two branch flow paths different from each other;
5. The filter performance evaluation device according to claim 1, wherein the control unit selects one of the two branch flow paths through which the liquid flows by opening and closing a valve provided on the flow path. The filter performance evaluation device described in claim 5, wherein the foreign matter content condition adjustment unit includes a filter provided in only one of the two branch flow paths. The filter performance evaluation device according to any one of claims 1 to 6, wherein the control unit determines whether the target filter has deteriorated based on the calculated foreign matter capture performance of the target filter. The filter performance evaluation device according to any one of claims 1 to 7, wherein the control unit evaluates the wetting state of the target filter based on the calculated foreign matter capture performance of the target filter. A filter wetting device that wets a target filter,
a liquid source;
a flow path through which the liquid supplied from the liquid supply source flows from an upstream side to a downstream side;
a foreign object detector in the flow path that detects foreign objects in the liquid flowing through the flow path;
the target filter is provided in the flow path upstream of the foreign object detection unit;
a foreign matter containing state adjusting unit that is provided in the flow path upstream of the target filter and that individually supplies a plurality of types of liquid having different foreign matter containing states to the target filter via the flow path;
a control unit,
The flow path further includes a bypass flow path that branches off on the upstream side of the target filter and joins on the downstream side of the target filter,
the foreign object detection unit is provided downstream of the flow path relative to a joining position of the bypass flow path,
The control unit
By opening and closing a valve provided on the flow path, it is selected whether to pass the liquid through the target filter or through the bypass flow path;
The foreign object detection unit
When a liquid is passed through the target filter, the amount of foreign matter contained in the liquid after passing through the target filter is detected;
When a liquid is passed through the bypass flow path, an amount of foreign matter contained in the liquid that does not pass through the target filter is detected;
The control unit creates information representing the wetting state of the target filter, based on the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter, under each condition when multiple types of liquid with different foreign matter content states are supplied individually, and the information represents the relationship between the amount of foreign matter contained in the liquid before passing through the target filter and the amount of foreign matter repaired by the target filter . The control unit
A filter wetting device as described in claim 9, which also creates information related to the dust-generating performance of the target filter as the wetting state of the target filter based on the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter under each condition when multiple types of liquid with different foreign matter content states are supplied individually. the foreign matter containing state adjusting unit includes two branch flow paths that are branched into two on the upstream side of the target filter and merge together on the upstream side of the target filter, and makes the foreign matter containing states in the two branch flow paths different from each other;
The filter wetting device according to claim 9 or 10, wherein the control unit selects one of the two branched flow paths through which the liquid flows by opening and closing a valve provided on the flow path. the foreign object detection unit is provided separately between the junction of the bypass flow path and the target filter and on the bypass flow path, instead of being provided downstream of the flow path from the junction of the bypass flow path,
The control unit
Controlling the passage of liquid through the target filter and the passage of liquid through the bypass flow path to occur simultaneously;
the foreign matter detection unit provided between the junction of the bypass flow path and the target filter detects the amount of foreign matter contained in the liquid that has passed through the target filter;
The filter wetting device according to any one of claims 9 to 11, wherein the foreign matter detection unit provided on the bypass flow path, of the two foreign matter detection units, detects the amount of foreign matter contained in the liquid that does not pass through the target filter. a foreign object detector that detects foreign objects in a liquid flowing through a flow path from an upstream side to a downstream side;
a target filter that is a filter to be evaluated and is provided in the flow path upstream of the foreign matter detection unit;
A control unit;
A filter performance evaluation method using a filter performance evaluation device comprising:
supplying a plurality of types of liquids having different contaminant content states to the target filter via the flow path at a location upstream of the target filter in the flow path;
detecting, by the foreign matter detection unit, the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter;
The control unit calculates a foreign matter collection performance that indicates the relationship between the amount of foreign matter contained in the liquid before passing through the target filter and the amount of foreign matter collected by the target filter, based on the amount of foreign matter contained in the liquid that does not pass through the target filter and the amount of foreign matter contained in the liquid after passing through the target filter, under each condition when multiple types of liquid with different foreign matter content states are individually supplied;
A filter performance evaluation method comprising: