JP7798640B2 - cutting equipment - Google Patents

Description

The present invention relates to a cutting device for cutting a workpiece.

Device chips each containing a device are manufactured by dividing and singulating a semiconductor wafer on which multiple devices are formed. Furthermore, a package substrate is obtained by mounting multiple device chips on a specified substrate and covering the mounted device chips with a resin sealing material (mold resin). Package devices each containing multiple packaged device chips are manufactured by dividing and singulating this package substrate. Device chips and package devices are incorporated into various electronic devices such as mobile phones and personal computers.

Cutting machines are used to divide workpieces such as semiconductor wafers and package substrates. Cutting machines are equipped with a chuck table that holds the workpiece and a cutting unit that performs the cutting process on the workpiece. The cutting unit has a spindle and a truncated cone-shaped blade mount fixed to the tip of the spindle, and an annular cutting blade is attached to the blade mount. The workpiece is held on the chuck table and the cutting blade is rotated to cut into the workpiece, cutting and dividing it.

When cutting a workpiece with a cutting blade, a load is placed on the tip of the cutting blade that comes into contact with the workpiece, which can cause wear or chipping at the tip of the cutting blade. Continuing to cut the workpiece when the cutting blade has excessive wear or chipping can result in poor processing of the workpiece or damage to the cutting blade. For this reason, it is necessary to quickly detect wear or chipping in the cutting blade.

For this reason, cutting machines are sometimes equipped with a detection unit that detects the tip of the cutting blade while it is cutting a workpiece and monitors the condition of the cutting blade. For example, Patent Document 1 discloses a detection unit (optical detection means) equipped with a light-emitting unit and a light-receiving unit that are positioned to sandwich the tip of the cutting blade. This type of detection unit is positioned so that the light traveling from the light-emitting unit to the light-receiving unit is blocked by the cutting blade. When wear or chipping occurs at the tip of the cutting blade, the light emitted from the light-emitting unit reaches the light-receiving unit through the worn area or chip on the cutting blade, increasing the amount of light received by the light-receiving unit. Therefore, by monitoring the amount of light received by the light-receiving unit, wear or chipping at the tip of the cutting blade can be detected.

Japanese Patent Application Laid-Open No. 2002-370140

When a cutting blade is used to cut a workpiece, foreign matter such as chips (cutting chips) generated by cutting the workpiece scatters and adheres to the workpiece and the detection unit. Foreign matter adhering to the workpiece can cause contamination of the workpiece. Furthermore, if foreign matter adheres to the light-emitting or light-receiving parts of the detection unit, the amount of light received by the light-receiving part may fluctuate, preventing proper detection of the cutting blade.

Therefore, while the workpiece is being cut, a liquid (cutting fluid) such as pure water is supplied to the workpiece and the cutting blade. The cutting fluid washes away any foreign matter adhering to the workpiece. The cutting fluid supplied to the cutting blade is also caught up in the rotation of the cutting blade and splashes onto the detection unit side. This causes cutting fluid to be supplied to the detection unit as well, removing any foreign matter adhering to the detection unit.

However, when the detection unit is configured as an optical sensor equipped with a light-emitting unit and a light-receiving unit, the light-emitting unit and the light-receiving unit are positioned so that they sandwich the tip of the cutting blade. One of the light-emitting unit and the light-receiving unit does not overlap with the cutting blade, but is positioned so that it overlaps with the truncated cone-shaped blade mount that supports the cutting blade. In this state, when cutting fluid is supplied while the blade mount and cutting blade are rotated, the cutting fluid is repelled by the outer surface (inclined surface) of the blade mount and splashes in a direction different from the light-emitting unit or the light-receiving unit. As a result, there is a problem in that not enough cutting fluid is supplied to the light-emitting unit or the light-receiving unit, making it difficult to remove foreign matter adhering to the light-emitting unit or the light-receiving unit.

In addition, to ensure the removal of foreign matter adhering to the detection unit, it is possible to equip the cutting unit with a new nozzle that supplies cleaning fluid toward the light-emitting and light-receiving parts. However, using a dedicated nozzle to clean the detection unit would increase the size of the cutting unit equipped with the nozzle, and it would be time-consuming and costly to prepare, install, and operate the nozzle.

The present invention was made in consideration of these problems, and aims to provide a cutting device that can easily remove foreign matter such as cutting chips that have adhered to the detection unit.

According to one aspect of the present invention, a cutting device for cutting a workpiece includes a spindle and a blade mount attached to the tip of the spindle. The cutting unit cuts the workpiece with a cutting blade attached to the blade mount. The cutting fluid supply unit supplies cutting fluid to the cutting blade. The detection unit includes a light-emitting unit, a light-receiving unit that receives light from the light-emitting unit, and a blade insertion unit that is disposed between the light-emitting unit and the light-receiving unit and into which the cutting blade is inserted. a blade mount having a truncated cone-shaped base portion fixed at one end to the tip of the spindle, a flange portion connected to the other end of the base portion and supporting the cutting blade, and a boss portion protruding from the flange portion and inserted into a through-hole provided in the center of the cutting blade, the base portion being provided on the outer peripheral surface side of the base portion along the circumferential direction of the base portion and having a first guide portion that guides the cutting fluid supplied from the cutting fluid supply unit to the rotating cutting blade to the light-emitting portion or the light-receiving portion, thereby providing a cutting device.

Preferably, the first guide portion is a notch or protrusion provided in a position facing the light-emitting portion or the light-receiving portion.

Also preferably, the cutting blade comprises an annular hub base having the through hole in its center, and the cutting unit further comprises a fixing nut that is threaded onto the boss portion and clamps and fixes the cutting blade together with the flange portion, the hub base having a second guide portion provided circumferentially on the outer peripheral surface of the hub base, and the fixing nut having a third guide portion provided circumferentially on the outer peripheral surface of the fixing nut, the second guide portion and the third guide portion guide the cutting fluid supplied from the cutting fluid supply unit to the rotating cutting blade to the light-emitting portion or the light-receiving portion.

Preferably, the second or third induction section is a notch or protrusion provided in a position facing the light-emitting section or the light-receiving section.

Preferably, the cutting unit further includes a front flange that supports the cutting blade together with the flange portion, and a fixing nut that is threaded onto the boss portion and, together with the flange portion, clamps and fixes the cutting blade and front flange, the front flange or the fixing nut having a fourth guide portion provided on the outer peripheral surface of the front flange or the fixing nut along the circumferential direction of the front flange or the fixing nut, and the fourth guide portion guides the cutting fluid supplied from the cutting fluid supply unit to the rotating cutting blade to the light-emitting portion or the light-receiving portion.

Preferably, the fourth guide portion is a notch or protrusion provided in a position facing the light-emitting portion or the light-receiving portion.

In one aspect of the cutting device of the present invention, a guide section that guides cutting fluid to the light-emitting section or light-receiving section of the detection unit is provided on the outer peripheral surface of the base section of the blade mount. This allows cutting fluid supplied to the cutting blade while cutting the workpiece to be efficiently supplied to the light-emitting section or light-receiving section. As a result, foreign matter adhering to the light-emitting section or light-receiving section can be easily removed, preventing foreign matter from interfering with the detection of the cutting blade by the detection unit.

In addition, by providing a guide section on the base of the blade mount, cutting fluid can be efficiently supplied to the light-emitting section or light-receiving section without the need to install a new nozzle on the cutting unit to supply cleaning fluid to the detection unit. This avoids an increase in the size of the cutting unit due to the installation of a nozzle, and reduces the effort and cost required to prepare, install, and operate the nozzle.

FIG. FIG. 2 is an exploded perspective view showing a cutting unit to which a hub-type cutting blade is attached. FIG. 2 is a perspective view showing a cutting unit to which a cutting fluid supply unit is attached. FIG. 2 is a cross-sectional view showing a detection unit. FIG. 2 is a partial cross-sectional front view showing a cutting unit and a detection unit to which a hub-type cutting blade is attached. Figure 6(A) is a front view showing the guide portion (cutout), Figure 6(B) is a front view showing a modified example of the guide portion (cutout), and Figure 6(C) is a front view showing another modified example of the guide portion (cutout). Figure 7(A) is a front view showing a guide portion (protrusion), Figure 7(B) is a front view showing a modified example of the guide portion (protrusion), and Figure 7(C) is a front view showing another modified example of the guide portion (protrusion). FIG. 2 is an exploded perspective view showing a cutting unit to which a washer-type cutting blade is attached. FIG. 10 is a partial cross-sectional front view showing a cutting unit and a detection unit to which a washer-type cutting blade is attached.

An embodiment of the present invention will now be described with reference to the accompanying drawings. First, an example configuration of a cutting device according to this embodiment will be described. Figure 1 is a perspective view showing a cutting device 2. In Figure 1, the X-axis direction (processing feed direction, first horizontal direction, front-to-back direction) and the Y-axis direction (indexing feed direction, second horizontal direction, left-to-right direction) are mutually perpendicular. Furthermore, the Z-axis direction (vertical direction, up-down direction, height direction) is a direction perpendicular to the X-axis and Y-axis directions.

The cutting device 2 includes a base 4 that supports or houses each of the components that make up the cutting device 2. A rectangular opening 4a is provided at the front corner of the base 4, and a cassette support base (cassette elevator) 6 is provided inside the opening 4a. An elevation mechanism (not shown) that raises and lowers the cassette support base 6 along the Z-axis direction is connected to the cassette support base 6.

A cassette 8 capable of holding multiple workpieces 11, which are the objects to be machined by the cutting device 2, is set on the cassette support table 6. Note that in Figure 1, only the outline of the cassette 8 is shown by a two-dot chain line.

The workpiece 11 is a disk-shaped wafer made of a semiconductor material such as silicon, and has a front and back surface that are generally parallel to each other. The workpiece 11 is divided into multiple rectangular regions by multiple streets (planned division lines) arranged in a grid pattern that intersect with each other. Furthermore, devices such as ICs (Integrated Circuits), LSIs (Large Scale Integration), LEDs (Light Emitting Diodes), and MEMS (Micro Electro Mechanical Systems) are formed in each of the multiple regions divided by the streets on the front side of the workpiece 11.

A circular tape (dicing tape) 13 with a diameter larger than that of the workpiece 11 is attached to the backside of the workpiece 11. For example, the tape 13 includes a film-like substrate and an adhesive (glue layer) on the substrate. The substrate is made of a resin such as polyolefin, polyvinyl chloride, or polyethylene terephthalate. The adhesive is made of an epoxy-based, acrylic-based, or rubber-based adhesive. The adhesive may also be an ultraviolet-curing resin that hardens when exposed to ultraviolet light.

The workpiece 11 is supported by a frame 15. For example, the frame 15 is an annular member made of a metal such as SUS (stainless steel). A circular opening is provided in the center of the frame 15, penetrating the frame 15 in the thickness direction. The diameter of the opening is larger than the diameter of the workpiece 11.

With the workpiece 11 placed inside the opening of the frame 15, the center of the tape 13 is attached to the back surface 11b of the workpiece 11, and the outer periphery of the tape 13 is attached to the frame 15. This allows the workpiece 11 to be supported by the frame 15 via the tape 13.

The workpiece 11 is stored in the cassette 8 shown in Figure 1 while supported by the frame 15, and is then processed by the cutting device 2. For example, the cutting device 2 cuts and divides the workpiece 11 along the streets to produce multiple device chips, each containing a device.

However, there are no restrictions on the type, material, shape, structure, size, etc. of the workpiece 11. For example, the workpiece 11 may be a substrate (wafer) made of a semiconductor other than silicon (GaAs, InP, GaN, SiC, etc.), glass, sapphire, ceramics, resin, metal, etc. Furthermore, there are no restrictions on the type, number, shape, structure, size, arrangement, etc. of devices formed on the workpiece 11, and the workpiece 11 does not necessarily have to have any devices formed on it.

Furthermore, the workpiece 11 may be a package substrate such as a CSP (Chip Size Package) substrate or a QFN (Quad Flat Non-leaded package) substrate. For example, a package substrate is formed by sealing multiple device chips mounted on a base substrate with a resin layer (mold resin). By dividing and singulating the package substrate, multiple package devices each equipped with multiple packaged device chips are manufactured.

A rectangular opening 4b is provided to the side of the opening 4a, with its longitudinal direction aligned with the X-axis direction. A chuck table (holding table) 10 that holds the workpiece 11 is provided inside the opening 4b. The upper surface of the chuck table 10 is a flat surface that is roughly parallel to the horizontal plane (XY plane), and forms a holding surface 10a that holds the workpiece 11. The holding surface 10a is connected to a suction source (not shown), such as an ejector, via a suction passage (not shown), a valve (not shown), etc., formed inside the chuck table 10.

A moving unit 12 is connected to the chuck table 10. For example, the moving unit 12 is a ball screw-type moving mechanism that includes an X-axis ball screw (not shown) arranged along the X-axis direction and an X-axis pulse motor (not shown) that rotates the X-axis ball screw. The moving unit 12 also includes a table cover 14 that surrounds the chuck table 10. Accordion-shaped dust-proof and drip-proof covers 16 that are extendable and contractible along the X-axis direction are provided in front and behind the table cover 14. The table cover 14 and dust-proof and drip-proof covers 16 are attached so as to cover the components of the moving unit 12 (X-axis ball screw, X-axis pulse motor, etc.) installed inside the opening 4b.

The moving unit 12 moves the chuck table 10 along the X-axis direction together with the table cover 14. The chuck table 10 is also connected to a rotational drive source (not shown), such as a motor, that rotates the chuck table 10 around a rotation axis generally parallel to the Z-axis direction. Furthermore, multiple clamps 18 are provided around the periphery of the chuck table 10 to grip and secure the frame 15 that supports the workpiece 11.

A support structure 20 is provided in the area adjacent to the opening 4b of the base 4. The upper part of the support structure 20 is arranged along the Y-axis direction so as to overlap with the opening 4b. A movement unit 22 is provided on the surface side of the upper part of the support structure 20. For example, the movement unit 22 is a ball screw type movement mechanism.

Specifically, the moving unit 22 has a pair of Y-axis guide rails 24 fixed to the surface side of the support structure 20. The pair of Y-axis guide rails 24 are arranged roughly parallel to each other along the Y-axis direction. In addition, a flat Y-axis moving plate 26 is attached to the pair of Y-axis guide rails 24 so that it can slide along the Y-axis guide rails 24.

A nut portion (not shown) is provided on the back side of the Y-axis moving plate 26. A Y-axis ball screw 28, which is arranged along the Y-axis direction between a pair of Y-axis guide rails 24, is threadedly engaged with this nut portion. A Y-axis pulse motor (not shown) that rotates the Y-axis ball screw 28 is connected to the end of the Y-axis ball screw 28. When the Y-axis pulse motor rotates the Y-axis ball screw 28, the Y-axis moving plate 26 moves in the Y-axis direction along the Y-axis guide rails 24.

A pair of Z-axis guide rails 30 are fixed to the surface side of the Y-axis moving plate 26. The pair of Z-axis guide rails 30 are arranged roughly parallel to each other along the Z-axis direction. In addition, a flat Z-axis moving plate 32 is attached to the pair of Z-axis guide rails 30 so that it can slide along the Z-axis guide rails 30.

A nut portion (not shown) is provided on the back side of the Z-axis moving plate 32. A Z-axis ball screw 34, which is arranged along the Z-axis direction between a pair of Z-axis guide rails 30, is threadedly engaged with this nut portion. A Z-axis pulse motor 36, which rotates the Z-axis ball screw 34, is connected to the end of the Z-axis ball screw 34. When the Z-axis pulse motor 36 rotates the Z-axis ball screw 34, the Z-axis moving plate 32 moves in the Z-axis direction along the Z-axis guide rails 30.

A cutting unit 38 that performs cutting on the workpiece 11 is fixed to the lower part of the Z-axis moving plate 32. An annular cutting blade 40 that cuts the workpiece 11 is attached to the cutting unit 38. The cutting unit 38 cuts the workpiece 11 by rotating the cutting blade 40 and cutting into the workpiece 11 held by the chuck table 10. The configuration and function of the cutting unit 38 will be described in detail below (see Figure 2, etc.).

An imaging unit 50 is provided adjacent to the cutting unit 38 to capture images of the workpiece 11 held by the chuck table 10. For example, the imaging unit 50 is a camera (visible light camera, infrared camera, etc.) equipped with an optical microscope and an imaging element such as a CCD (Charged-Coupled Device) sensor or a CMOS (Complementary Metal-Oxide-Semiconductor) sensor. By capturing an image of the workpiece 11 held by the chuck table 10 with the imaging unit 50, an image of the workpiece 11 is obtained. The captured image is used for aligning the workpiece 11 and the cutting blade 40, etc.

Opening 4c is provided to the side of opening 4b, defining a cylindrical cleaning space (cleaning chamber). Inside opening 4c is provided a cleaning unit 52 that cleans the workpiece 11. The cleaning unit 52 includes a spinner table 54 that holds and rotates the workpiece 11, and a nozzle 56 that supplies cleaning fluid (cleaning fluid) to the workpiece 11 held by the spinner table 54.

The upper surface of the spinner table 54 is a flat surface roughly parallel to the horizontal plane (XY plane) and forms a holding surface 54a that holds the workpiece 11. The holding surface 54a is connected to a suction source (not shown) such as an ejector via a flow path (not shown), a valve (not shown), etc. provided inside the spinner table 54. In addition, a rotational drive source (not shown) such as a motor is connected to the spinner table 54, which rotates the spinner table 54 around a rotation axis roughly parallel to the Z-axis direction.

The nozzle 56 supplies cleaning fluid toward the holding surface 54a of the spinner table 54. The cleaning fluid may be a liquid such as pure water, or a mixed fluid containing a liquid (such as pure water) and a gas (such as air). The nozzle 56 may also spray a gas (such as air) toward the workpiece 11 to dry the workpiece 11.

The workpiece 11 machined by the cutting unit 38 is transported from the chuck table 10 to the cleaning unit 52 and placed on the holding surface 54a of the spinner table 54 via the tape 13. In this state, when the suction force (negative pressure) of the suction source is applied to the holding surface 54a, the workpiece 11 is sucked and held by the spinner table 54 via the tape 13. Then, while the spinner table 54 is rotating, cleaning fluid is supplied from the nozzle 56 toward the workpiece 11. As a result, the cleaning fluid flows along the top surface of the rotating workpiece 11, cleaning the workpiece 11.

The cutting device 2 also includes a control unit (controller, controller) 58 that controls each of the components that make up the cutting device 2 (such as the cassette support base 6, chuck table 10, moving unit 12, clamp 18, moving unit 22, cutting unit 38, imaging unit 50, and cleaning unit 52). The control unit 58 controls the operation of the cutting device 2 by generating and outputting control signals to each of the components of the cutting device 2.

For example, the control unit 58 is configured by a computer and includes a calculation unit that performs calculations necessary for the operation of the cutting device 2, and a storage unit that stores various information (data, programs, etc.) used in the operation of the cutting device 2. The calculation unit includes a processor such as a CPU (Central Processing Unit). The storage unit includes memory such as a ROM (Read Only Memory) and RAM (Random Access Memory).

When processing the workpiece 11 with the cutting device 2, the workpiece 11 stored in the cassette 8 is first transported to the chuck table 10 by a transport mechanism (not shown). The workpiece 11 is then placed on the holding surface 10a of the chuck table 10 via the tape 13. The frame 15 is also fixed in place by multiple clamps 18. When the suction force (negative pressure) of the suction source is applied to the holding surface 10a in this state, the workpiece 11 is suction-held by the chuck table 10 via the tape 13.

Next, the workpiece 11 is machined by the cutting unit 38. The cutting unit 38 cuts the workpiece 11 by rotating the cutting blade 40 and cutting into the workpiece 11. For example, the cutting blade 40 cuts into the workpiece 11 to a depth that exceeds the thickness of the workpiece 11, cutting the workpiece 11 along the streets. This divides the workpiece 11 into multiple device chips.

The workpiece 11 machined by the cutting unit 38 is transported by a transport mechanism (not shown) to the cleaning unit 52, where it is cleaned. The workpiece 11 is then transported by the transport mechanism (not shown) to the cassette 8, where it is again stored.

Next, an example configuration of the cutting unit 38 will be described. For example, a hub-type cutting blade 40 (hub blade) is attached to the cutting unit 38. Figure 2 is an exploded perspective view showing the cutting unit 38 to which the hub-type cutting blade 40 is attached.

The cutting blade 40 comprises an annular hub base 42 made of a metal such as an aluminum alloy, and an annular cutting edge 44 formed along the outer periphery of the hub base 42. A cylindrical through-hole 42a is provided in the center of the hub base 42, penetrating the hub base 42 in the thickness direction.

The cutting blade 44 is formed to protrude radially outward from the outer periphery of the hub base 42. For example, the cutting blade 44 includes abrasive grains made of diamond, cubic boron nitride (cBN), or the like, and a binder such as a nickel-plated layer that secures the abrasive grains. However, there are no restrictions on the material of the abrasive grains, the particle size of the abrasive grains, or the material of the binder, and these can be selected appropriately depending on the material of the workpiece 11, etc.

The cutting unit 38 includes a columnar housing 60 connected to the moving unit 22 (see Figure 1). The housing 60 contains a cylindrical spindle 62 arranged along the Y-axis direction. The tip (one end) of the spindle 62 is exposed from the housing 60. A rotational drive source (not shown), such as a motor, is connected to the base (other end) of the spindle 62.

A blade mount 64 is attached to the tip of the spindle 62. The blade mount 64 includes a truncated cone-shaped base 66, a disk-shaped flange 68 that is connected to the base 66 and supports the cutting blade 40, and a cylindrical boss (support shaft) 70 that protrudes from the flange 68. The cutting blade 40 is detachably attached to the blade mount 64.

The base 66 has circular top and bottom surfaces, and an annular outer peripheral surface (inclined surface) 66a connected to the top and bottom surfaces. One end (top side) of the base 66 is fixed to the tip of the spindle 62. As a result, the radial direction of the base 66 is roughly perpendicular to the rotation axis of the spindle 62, and the diameter of the base 66 increases as it moves away from the housing 60 (the base end of the spindle 62). In other words, the outer peripheral surface 66a of the base 66 is inclined with respect to the rotation axis of the spindle 62 (see Figure 5).

A flange portion 68 is connected to the other end (bottom side) of the base portion 66. The diameter of the flange portion 68 is larger than the diameter of the bottom surface of the base portion 66, and the base portion 66 and flange portion 68 are arranged concentrically. Therefore, the outer periphery of the flange portion 68 protrudes radially outward from the outer periphery of the bottom surface of the base portion 66.

The flange portion 68 has a surface 68a located on the opposite side from the base portion 66, and an annular protrusion 68b protruding from the surface 68a. The protrusion 68b is formed in an annular shape along the outer periphery of the flange portion 68. The tip surface of the protrusion 68b is a flat surface roughly parallel to the surface 68a, and forms a support surface 68c that supports the cutting blade 40.

The boss portion 70 is formed so as to protrude from the center of the surface 68a of the flange portion 68 on the side opposite the base portion 66. The outer peripheral surface of the boss portion 70 is formed with a threaded groove (male thread portion) 70a into which a fixing nut 74 (described below) is threaded.

A through-hole 64a is provided in the center of the blade mount 64, passing through the base portion 66, flange portion 68, and boss portion 70. The blade mount 64 is fixed to the tip of the spindle 62 by inserting a fixing bolt 72 into the tip of the spindle 62 through the through-hole 64a and tightening it.

The cutting unit 38 also includes an annular fixing nut 74 that fixes the cutting blade 40 to the blade mount 64. A through-hole is provided in the center of the fixing nut 74, penetrating the fixing nut 74 in the thickness direction. Furthermore, a thread groove (internal thread portion) that screws into the thread groove 70a of the boss portion 70 is formed on the side surface (inner peripheral surface) 74a of the fixing nut 74 exposed through the through-hole.

When the cutting blade 40 is positioned so that the boss portion 70 is inserted into the through-hole 42a, the cutting blade 40 is supported by the blade mount 64. In this state, when the fixing nut 74 is threaded into the thread groove 70a of the boss portion 70 and tightened, the fixing nut 74, together with the support surface 68c of the flange portion 68, clamps and fixes the cutting blade 40. This attaches the cutting blade 40 to the tip of the spindle 62. The cutting blade 40 then rotates around a rotation axis roughly parallel to the Y-axis direction due to power transmitted from the rotational drive source via the spindle 62 and blade mount 64.

Figure 3 is a perspective view showing the cutting unit 38 with a cutting fluid supply unit (blade cover) 76 attached. The cutting fluid supply unit 76, which supplies a liquid (cutting fluid) such as pure water to the cutting blade 40, is attached to the tip of the housing 60. When the cutting blade 40 is attached to the cutting unit 38, the cutting blade 40 is covered by the cutting fluid supply unit 76.

A pair of first connectors 78 are provided at one end of the cutting fluid supply unit 76. A second connector 82 and a third connector 86 are provided at the other end of the cutting fluid supply unit 76. Pipes such as tubes (not shown) that supply cutting fluid are connected to the first connector 78, second connector 82, and third connector 86, respectively, and cutting fluid is supplied through them.

A pair of nozzles (cooler nozzles) 80 are connected to the pair of first connection parts 78. The pair of nozzles 80 are arranged so as to sandwich the lower end of the cutting blade 40 (see Figure 5). Each of the pair of nozzles 80 has a supply port (not shown) that opens toward the cutting blade 40. When cutting fluid is supplied to the pair of first connection parts 78, the cutting fluid flows into the pair of nozzles 80 and is supplied from the supply ports of the nozzles 80 toward the front and back surfaces of the cutting blade 40.

A nozzle (shower nozzle) 84 provided inside the cutting fluid supply unit 76 is connected to the second connection part 82. The tip of the nozzle 84 opens toward the side edge of the cutting blade 40. When cutting fluid is supplied to the second connection part 82, the cutting fluid flows into the nozzle 84 and is supplied from the tip of the nozzle 84 toward the outer periphery of the cutting blade 40.

A pair of nozzles (spray nozzles) 88 that open downward are connected to the third connection part 86. When cutting fluid is supplied to the third connection part 86, the cutting fluid flows into the nozzles 88 and is supplied from the tip of the nozzles 88 toward the workpiece 11 held by the chuck table 10 (see Figure 1).

The cutting blade 40 is rotated and cut into the workpiece 11 held by the chuck table 10, thereby cutting the workpiece 11. Furthermore, while the workpiece 11 is being machined, cutting fluid is supplied to the workpiece 11 and cutting blade 40 from nozzles 80, 84, and 88. This cools the workpiece 11 and cutting blade 40, and washes away foreign matter such as chips (cutting chips) generated by cutting the workpiece 11.

A detection unit 100 is provided above the cutting fluid supply unit 76 to detect the tip of the cutting blade 40 attached to the cutting unit 38. The detection unit 100 detects the tip (cutting edge 44) of the cutting blade 40 while the cutting blade 40 is cutting the workpiece 11. This allows the condition of the tip of the cutting blade 40 to be monitored.

Figure 4 is a cross-sectional view of the detection unit 100. The detection unit 100 includes a rectangular parallelepiped frame 102. Inside the frame 102, a storage section 102a is provided, which opens on the underside of the frame 102. The storage section 102a houses a detection section 104 that detects the tip of the cutting blade 40.

The detection unit 104 is composed of an optical sensor. Specifically, the detection unit 104 has a rectangular parallelepiped base 104a, and a light-emitting unit 104b and a light-receiving unit 104c that protrude downward from the base 104a. The light-emitting unit 104b and the light-receiving unit 104c are arranged to be spaced apart in the Y-axis direction and face each other. The space between the light-emitting unit 104b and the light-receiving unit 104c corresponds to the blade insertion portion (recess) 104d into which the tip of the cutting blade 40 is inserted.

A light source 106 is connected to the light-projecting unit 104b. An LED or the like can be used as the light source 106. Light emitted by the light source 106 is guided to the light-projecting unit 104b via an optical fiber or the like, and is then irradiated from the light-projecting unit 104b towards the light-receiving unit 104c. The light irradiated from the light-projecting unit 104b then reaches the light-receiving surface of the light-receiving unit 104c and is received by the light-receiving unit 104c.

The photoelectric conversion unit 108 is connected to the light receiving unit 104c. The photoelectric conversion unit 108 includes a photoelectric conversion element and converts the light received by the light receiving unit 104c into an electrical signal (voltage). For example, the light received by the light receiving unit 104c is guided to the photoelectric conversion unit 108 via an optical fiber or the like. The photoelectric conversion unit 108 then generates an electrical signal corresponding to the amount of light that has reached the photoelectric conversion unit 108 and outputs it to the control unit 58.

The detection unit 104 also has a nut portion (not shown), onto which a ball screw 110 arranged along the Z-axis direction is threaded. A pulse motor 112 that rotates the ball screw 110 is connected to the upper end of the ball screw 110. When the ball screw 110 is rotated by the pulse motor 112, the detection unit 104 moves (raises and lowers) along the Z-axis direction. This adjusts the height position (position in the Z-axis direction) of the detection unit 104.

Figure 5 is a partial cross-sectional front view showing the cutting unit 38 and detection unit 100 to which a hub-type cutting blade 40 is attached. When the cutting blade 40 is attached to the cutting unit 38, the height position of the detection unit 104 is adjusted, and the tip (upper end) of the cutting blade 40 is inserted into the blade insertion portion 104d. This positions the light-emitting unit 104b and the light-receiving unit 104c so that they sandwich the tip of the cutting blade 40. The detection unit 104 is positioned so that at least a portion of the light irradiated from the light-emitting unit 104b toward the light-receiving unit 104c is blocked by the cutting blade 40.

Furthermore, the light-emitting unit 104b is positioned so as to overlap the base portion 66 of the blade mount 64 in the Z-axis direction, and the light-receiving unit 104c is positioned so as to overlap the hub base 42 of the cutting blade 40 or the fixing nut 74 in the Z-axis direction. Note that the positions of the light-emitting unit 104b and the light-receiving unit 104c may be reversed. In this case, the light-receiving unit 104c is positioned so as to overlap the base portion 66 of the blade mount 64, and the light-emitting unit 104b is positioned so as to overlap the hub base 42 of the cutting blade 40 or the fixing nut 74.

When the cutting unit 38 processes the workpiece 11 (see Figure 1), the spindle 62 is rotated with the cutting blade 40 attached to the blade mount 64. This causes the cutting blade 40, blade mount 64, and fixing nut 74 to rotate around the rotation axis of the spindle 62, which is set in a direction parallel to the Y-axis direction. In this state, the cutting blade 40 cuts into the workpiece 11 held by the chuck table 10 (see Figure 1), thereby cutting the workpiece 11.

In addition, while the workpiece 11 is being processed, the detection unit 104 monitors the condition of the tip (cutting edge 44) of the cutting blade 40. Specifically, light is emitted from the light-emitting unit 104b toward the light-receiving unit 104c, and is received by the light-receiving unit 104c. The amount of light received by the light-receiving unit 104c is then measured by the photoelectric conversion unit 108 (see Figure 4) and converted into an electrical signal.

When there is no wear or chipping at the tip of the cutting blade 40, the light emitted from the light-emitting unit 104b is blocked by the tip of the cutting blade 40, and the amount of light received by the light-receiving unit 104c is small. On the other hand, when there is wear or chipping at the tip of the cutting blade 40, the light emitted from the light-emitting unit 104b reaches the light-receiving unit 104c through the worn area or chipping of the cutting blade 40, and the amount of light received by the light-receiving unit 104c increases.

Therefore, the condition of the tip of the cutting blade 40 can be determined by measuring the amount of light received by the light receiving unit 104c using the photoelectric conversion unit 108. For example, a signal corresponding to the amount of light received by the light receiving unit 104c is output from the photoelectric conversion unit 108 to the control unit 58. The control unit 58 then compares the amount of light received indicated by the signal input from the photoelectric conversion unit 108 with a preset reference value (threshold value) to determine whether the amount of light received is normal or abnormal.

When cutting the workpiece 11 with the cutting blade 40, foreign matter such as cutting chips may fly off and adhere to the detection unit 100. However, if cutting fluid is supplied from the nozzles 80, 84, and 88 (see Figure 3) while cutting the workpiece 11, the cutting fluid is caught up in the rotation of the cutting blade 40 and splashes onto the detection unit 100 side. This causes cutting fluid to be supplied to the detection unit 100 as well, washing away any foreign matter adhering to the detection unit 100.

However, the base portion 66 of the blade mount 64 is formed in a truncated cone shape, and the outer peripheral surface 66a of the base portion 66 is inclined toward the spindle 62. As a result, cutting fluid supplied to the blade mount 64 is repelled by the outer peripheral surface 66a of the rotating base portion 66 and splashes toward the spindle 62. In other words, cutting fluid is not easily supplied to the light-emitting portion 104b, which is positioned so as to overlap the base portion 66. As a result, not enough cutting fluid is supplied to the light-emitting portion 104b, and cutting chips adhering to the light-emitting portion 104b may remain.

In this embodiment, therefore, a guide portion (notch) 120 is provided on the base portion 66 of the blade mount 64 to guide the cutting fluid to the light projector 104b. The cutting fluid supplied to the guide portion 120 is scattered radially in the direction of rotation of the base portion 66. This allows the cutting fluid to be efficiently supplied to the light projector 104b, which is positioned so that it overlaps with the base portion 66, making it easier to remove cutting chips adhering to the light projector 104b.

In the following, as a representative example, a case where the light-emitting unit 104b is positioned so that it overlaps the base unit 66 will be described in detail. However, as mentioned above, the positions of the light-emitting unit 104b and the light-receiving unit 104c may be reversed. In this case, the light-receiving unit 104c is positioned so that it overlaps the base unit 66, and the cutting fluid is guided to the light-receiving unit 104c by the guide unit 120.

The guide portion 120 is provided on the outer peripheral surface 66a of the base portion 66 along the circumferential direction of the base portion 66 and guides the cutting fluid supplied from the cutting fluid supply unit 76 (nozzles 80, 84, 88, see Figure 3) to the rotating cutting blade 40 to the light projector 104b. For example, the guide portion 120 is a notch (groove, recess) formed from the outer peripheral surface 66a of the base portion 66 toward the center line, and is formed concentrically with the base portion 66. Note that the base portion 66 may have an annular guide portion 120 formed continuously along the circumferential direction of the base portion 66, or multiple arc-shaped guide portions 120 may be arranged intermittently at predetermined intervals along the circumferential direction of the base portion 66.

The guiding unit 120 is provided at a position facing the light-emitting unit 104b. Specifically, the guiding unit 120 is formed at a position overlapping the light-emitting unit 104b in the radial direction of the blade mount 64. For example, as shown in FIG. 5, when the detection unit 100 is installed directly above the blade mount 64, the guiding unit 120 is positioned so as to overlap the light-emitting unit 104b in the Z-axis direction. Note that when the positions of the light-emitting unit 104b and the light-receiving unit 104c are reversed, the guiding unit 120 is provided at a position facing the light-receiving unit 104c.

Figure 6(A) is a front view showing the guide portion 120. For example, the guide portion 120 is formed in the shape of a right triangle in cross section, and includes a receiving surface 120a formed along a direction parallel to the Y-axis direction (the direction of the rotational axis of the spindle 62 and base portion 66, and a direction perpendicular to the radial direction of the base portion 66). For example, the angle between the receiving surface 120a and the Y-axis is 5° or less, preferably 3° or less, and more preferably 1° or less.

When cutting fluid is supplied to the guide portion 120 while the blade mount 64 is rotating, the centrifugal force of the blade mount 64 causes the cutting fluid to be scattered radially in a direction perpendicular to the receiving surface 120a (see Figure 5). This allows the cutting fluid to be efficiently supplied to the light projecting portion 104b, which is positioned opposite the guide portion 120, and removes any foreign matter adhering to the light projecting portion 104b.

There are no restrictions on the shape of the guide portion 120, as long as it is possible to prevent cutting fluid from splashing toward the spindle 62. Figures 6(B) and 6(C) show guide portions (notches) 122, 124 that correspond to modified examples of the guide portion 120.

Figure 6(B) is a front view showing the guide portion 122. Like the guide portion 120, the guide portion 122 includes a receiving surface 122a. However, the receiving surface 122a is formed so as to be inclined toward the flange portion 68. In other words, the receiving surface 122a is inclined so that the end portion on the flange portion 68 side (the left end in Figure 6(B)) is positioned closer to the center line of the base portion 66 than the other end portion (the right end in Figure 6(B)). This makes it less likely that cutting fluid supplied to the guide portion 122 will splash toward the spindle 62 (see Figure 5).

Figure 6(C) is a front view showing the guide portion 124. The guide portion 124 is an annular groove formed in a rectangular cross-sectional shape, and includes a bottom surface 124a and a pair of side surfaces (inner walls) 124b, 124c connected to the bottom surface 124a.

For example, the bottom surface 124a is formed in a direction parallel to the Y-axis direction. The inclination angle of the bottom surface 124a is the same as that of the receiving surface 120a of the guide portion 120 (see Figure 6(A)). Furthermore, the side surfaces 124b and 124c are formed to face each other in the radial direction of the base portion 66. The cutting fluid supplied to the guide portion 124 temporarily remains within the guide portion 124, and then is scattered radially in a direction parallel to the side surfaces 124b and 124c due to the centrifugal force of the blade mount 64.

In addition, protrusions (protruding portions, convex portions) can be provided as guide portions instead of cutout portions. Figures 7(A) to 7(C) show examples of protrusions that function as guide portions.

Figure 7 (A) is a front view showing the guide portion (protrusion) 130. Similar to the guide portion 120 (see Figure 5), the guide portion 130 is provided continuously or discontinuously along the circumferential direction of the base portion 66 on the outer peripheral surface 66a side of the base portion 66.

For example, the guide portion 130 is formed in the shape of a right triangle in cross section and includes a receiving surface 130a formed along a direction parallel to the Y-axis (the direction of the rotational axis of the spindle 62 and base portion 66, and a direction perpendicular to the radial direction of the base portion 66). For example, the angle between the receiving surface 130a and the Y-axis is 5° or less, preferably 3° or less, and more preferably 1° or less. When cutting fluid is supplied to the guide portion 130 while the blade mount 64 is rotating, the centrifugal force of the blade mount 64 causes the cutting fluid to splash radially in a direction perpendicular to the receiving surface 130a.

Figure 7(B) is a front view showing the guide portion (protrusion) 132. Like guide portion 130, guide portion 132 includes a receiving surface 132a. However, the receiving surface 132a is formed so as to be inclined toward the flange portion 68. In other words, the receiving surface 132a is inclined so that the end portion on the flange portion 68 side (the left end in Figure 7(B)) is positioned closer to the center line of the base portion 66 than the other end portion (the right end in Figure 7(B)). This makes it less likely that cutting fluid supplied to guide portion 132 will splash toward the spindle 62 (see Figure 5).

Figure 7(C) is a front view showing the guide portion (protrusion) 134. The guide portion 134 is a rectangular protrusion in cross section and includes a receiving surface 134a formed along the radial direction of the base portion 66. Cutting fluid supplied to the guide portion 124 is received by the receiving surface 134a and is scattered radially along the radial direction of the base portion 66 due to the centrifugal force of the blade mount 64.

By providing the above-mentioned guide portions (cutouts) 120, 122, 124 or guide portions (protrusions) 130, 132, 134 on the base portion 66, cutting fluid is more likely to splash toward the light-emitting portion 104b. This allows cutting fluid to be efficiently supplied to the light-emitting portion 104b, making it easier to remove cutting chips adhering to the light-emitting portion 104b.

Furthermore, as shown in FIG. 5, the hub base 42 or the fixing nut 74 of the cutting blade 40 is positioned opposite the light receiving portion 104c. Specifically, the hub base 42 or the fixing nut 74 is formed in a position that overlaps with the light receiving portion 104c in the radial direction of the hub base 42 and the fixing nut 74. Therefore, it is preferable to have a portion of the hub base 42 or the fixing nut 74 function as a guide portion that guides cutting fluid to the light receiving portion 104c.

Specifically, a guide portion is provided on the outer peripheral surface of the hub base 42 along the circumferential direction of the hub base 42. Additionally, a guide portion is provided on the outer peripheral surface of the fixing nut 74 along the circumferential direction of the fixing nut 74. The guide portions of the hub base 42 and the fixing nut 74 guide cutting fluid supplied to the rotating cutting blade 40 from the cutting fluid supply unit 76 (nozzles 80, 84, 88; see Figure 3) to the light receiving portion 104c.

For example, the outer peripheral surface of the hub base 42 is formed along a direction parallel to the Y-axis direction (the direction of the rotational axis of the hub base 42, a direction perpendicular to the radial direction of the hub base 42) and forms the guide portion 42b. Furthermore, the outer peripheral surface of the fixing nut 74 is formed along a direction parallel to the Y-axis direction (the direction of the rotational axis of the fixing nut 74, a direction perpendicular to the radial direction of the fixing nut 74) and forms the guide portion 74b. The guide portion 42b or the guide portion 74b is positioned opposite the light receiving portion 104c. Note that if the positions of the light transmitting portion 104b and the light receiving portion 104c are reversed, the guide portion 42b or the guide portion 74b is positioned opposite the light transmitting portion 104b.

When cutting fluid is supplied to the hub base 42 and the fixing nut 74 while they are rotating, the centrifugal force of the hub base 42 and the fixing nut 74 causes the cutting fluid to fly from the guide portions 42b, 74b toward the light receiving portion 104c. This allows cutting fluid to be efficiently supplied to the light receiving portion 104c, making it easier to remove cutting debris adhering to the light receiving portion 104c.

The guide portions 42b, 74b may each be formed so as to be inclined toward the cutting blade 44. This makes it less likely that cutting fluid supplied to the hub base 42 and the fixing nut 74 will splash forward (to the left in Figure 5).

Furthermore, the outer peripheral surface of the hub base 42 and the outer peripheral surface of the fixing nut 74 may be provided with notches (see Figures 6(A) to 6(C)) or protrusions (see Figures 7(A) to 7(C)) that function as guide portions. In this case, the guide portions (notches or protrusions) of the hub base 42 have receiving surfaces formed in a direction parallel to the Y-axis direction, or receiving surfaces formed so as to be inclined toward the cutting blade 44. Furthermore, the guide portions (notches or protrusions) of the fixing nut 74 have receiving surfaces formed in a direction parallel to the Y-axis direction, or receiving surfaces formed so as to be inclined toward the hub base 42.

As described above, in the cutting device 2 according to this embodiment, a guide section 120 that guides cutting fluid to the light-emitting section 104b or the light-receiving section 104c of the detection unit 100 is provided on the outer peripheral surface 66a of the base section 66 of the blade mount 64. This allows cutting fluid supplied to the cutting blade 40 while cutting the workpiece 11 to be efficiently supplied to the light-emitting section 104b or the light-receiving section 104c. As a result, foreign matter adhering to the light-emitting section 104b or the light-receiving section 104c is easily removed, preventing foreign matter from interfering with detection of the cutting blade 40 by the detection unit 100.

Furthermore, by providing the guide section 120 on the base section 66 of the blade mount 64, cutting fluid can be efficiently supplied to the light-emitting section 104b or the light-receiving section 104c without having to install a new nozzle on the cutting unit 38 to supply cleaning fluid to the detection unit 100. This avoids an increase in the size of the cutting unit 38 due to the installation of a nozzle, and reduces the effort and cost required to prepare, install, and operate the nozzle.

Although the above description has been given of a case in which a hub-type cutting blade 40 is used, the cutting device 2 can also cut the workpiece 11 using a washer-type cutting blade (washer blade). Figure 8 is an exploded perspective view showing the cutting unit 38A to which a washer-type cutting blade 46 is attached.

The cutting blade 46 is a washer blade composed solely of an annular cutting edge 48 containing abrasive grains made of diamond, cubic boron nitride, or the like, and a binder that secures the abrasive grains, made of metal, ceramic, resin, or the like. A circular through-hole 46a is provided in the center of the cutting blade 46, penetrating the cutting blade 46 in the thickness direction.

Like cutting unit 38 (see Figure 2), cutting unit 38A includes a housing 60, a spindle 62, and a blade mount 64. Furthermore, cutting unit 38A includes an annular front flange (pressing flange) 90 that supports the cutting blade 46. The front flange 90 includes an annular outer peripheral surface 90a and a circular through-hole 90b that penetrates the front flange 90 in the thickness direction.

The cutting unit 38A also includes an annular fixing nut 92 that fixes the cutting blade 46 and front flange 90 to the blade mount 64. The fixing nut 92 has a through-hole that penetrates the fixing nut 92 in the thickness direction. Furthermore, a thread groove (internal thread portion) that screws into the thread groove 70a of the boss portion 70 is formed on the side surface (inner peripheral surface) 92a of the fixing nut 92 that is exposed through the through-hole.

When the cutting blade 46 is positioned so that the boss portion 70 is inserted into the through-hole 46a, the cutting blade 46 is supported by the blade mount 64. Furthermore, when the front flange 90 is positioned so that the boss portion 70 is inserted into the through-hole 90b, the front flange 90 is supported by the blade mount 64. In this state, when the fixing nut 92 is threaded into the thread groove 70a of the boss portion 70 and tightened, the front flange 90, together with the support surface 68c of the flange portion 68, clamps and supports the cutting blade 46. Furthermore, the fixing nut 92, together with the support surface 68c of the flange portion 68, clamps and secures the cutting blade 40 and front flange 90. This attaches the cutting blade 46 to the tip of the spindle 62.

The cutting blade 46 rotates around a rotation axis roughly parallel to the Y-axis direction by power transmitted from the rotation drive source via the spindle 62 and blade mount 64. Similarly to the cutting unit 38, the cutting fluid supply unit 76 and detection unit 100 are attached to the cutting unit 38A (see Figure 3).

Figure 9 is a partial cross-sectional front view showing the cutting unit 38A equipped with a washer-type cutting blade 46 and the detection unit 100. When the cutting blade 46 is attached to the cutting unit 38A, the height position of the detection unit 104 is adjusted, and the tip (upper end) of the cutting blade 46 is inserted into the blade insertion section 104d. This positions the light-emitting section 104b and the light-receiving section 104c so that they sandwich the tip of the cutting blade 46. The detection unit 104 is positioned so that at least a portion of the light irradiated from the light-emitting section 104b toward the light-receiving section 104c is blocked by the cutting blade 46.

The light receiving portion 104c is positioned so as to overlap the front flange 90 in the Z-axis direction. The front flange 90 is provided with a guide portion 140 that guides cutting fluid to the light receiving portion 104c.

The guide portion 140 is provided along the circumferential direction of the front flange 90 on the outer peripheral surface 90a side of the front flange 90, and guides the cutting fluid supplied to the rotating cutting blade 46 from the cutting fluid supply unit 76 (nozzles 80, 84, 88, see Figure 3) to the light receiving portion 104c. The guide portion 140 may be a notch formed from the outer peripheral surface 90a of the front flange 90 toward the centerline (see Figures 6(A) to 6(C)), or a protrusion protruding from the outer peripheral surface 90a of the front flange 90 (see Figures 7(A) to 7(C)).

For example, the guide portion 140 has a receiving surface formed along a direction parallel to the Y-axis (the direction of the rotational axis of the front flange 90, perpendicular to the radial direction of the front flange 90) (see Figures 6(A) and 7(A)). The angle between the receiving surface and the Y-axis can be set to 5° or less, preferably 3° or less, and more preferably 1° or less. The guide portion 140 may also have a receiving surface inclined toward the cutting blade 46 (see Figures 6(B) and 7(B)).

The guide portion 140 is formed concentrically with the front flange 90. The annular guide portion 140 may be formed continuously around the circumferential direction of the front flange 90, or multiple arc-shaped guide portions 140 may be arranged intermittently at predetermined intervals around the circumferential direction of the front flange 90.

The guiding portion 140 is provided at a position facing the light receiving portion 104c. Specifically, the guiding portion 140 is formed at a position overlapping the light receiving portion 104c in the radial direction of the front flange 90. For example, when the detection unit 100 is installed directly above the front flange 90 as shown in FIG. 9, the guiding portion 140 is positioned so as to overlap the light receiving portion 104c in the Z-axis direction. Note that when the positions of the light projecting portion 104b and the light receiving portion 104c are reversed, the guiding portion 140 is provided at a position facing the light projecting portion 104b.

When cutting fluid is supplied to the guide portion 140 while the front flange 90 is rotating, the centrifugal force of the front flange 90 causes the cutting fluid to be scattered radially in the direction of rotation of the front flange 90. This allows cutting fluid to be efficiently supplied to the light receiving portion 104c, which is positioned opposite the guide portion 140, and foreign matter adhering to the light receiving portion 104c is removed.

Furthermore, when the fixed nut 92 is positioned facing the light receiving unit 104c, a portion of the fixed nut 92 may function as a guide portion that guides cutting fluid to the light receiving unit 104c. Specifically, a guide portion is provided on the outer peripheral surface of the fixed nut 92 along the circumferential direction of the fixed nut 92. For example, the outer peripheral surface of the fixed nut 92 is formed along a direction parallel to the Y-axis direction (the direction of the rotation axis of the fixed nut 92, a direction perpendicular to the radial direction of the fixed nut 92), and forms the guide portion 92b.

When cutting fluid is supplied to the fixed nut 92 while the fixed nut 92 is rotating, the centrifugal force of the fixed nut 92 causes the cutting fluid to be scattered from the guide portion 92b toward the light receiving portion 104c. This allows cutting fluid to be efficiently supplied to the light receiving portion 104c, making it easier to remove cutting debris adhering to the light receiving portion 104c.

The guide portion 92b may be formed so as to be inclined toward the cutting blade 46. This makes it less likely that cutting fluid supplied to the fixing nut 92 will splash forward (to the left in Figure 9). The outer peripheral surface of the fixing nut 92 may be provided with a notch (see Figures 6(A) to 6(C)) or a protrusion (see Figures 7(A) to 7(C)) that functions as a guide portion. In this case, the guide portion (notch or protrusion) of the fixing nut 92 has a receiving surface formed in a direction parallel to the Y-axis direction, or a receiving surface formed so as to be inclined toward the cutting blade 46.

In addition, the structures, methods, etc. related to the above embodiments can be modified as appropriate without departing from the scope of the present invention.

11 Workpiece 13 Tape (dicing tape)
15 Frame 2 Cutting device 4 Base 4a, 4b, 4c Opening 6 Cassette support base (cassette elevator)
8 Cassette 10 Chuck table (holding table)
10a Holding surface 12 Moving unit 14 Table cover 16 Dustproof/waterproof cover 18 Clamp 20 Support structure 22 Moving unit 24 Y-axis guide rail 26 Y-axis moving plate 28 Y-axis ball screw 30 Z-axis guide rail 32 Z-axis moving plate 34 Z-axis ball screw 36 Z-axis pulse motor 38, 38A Cutting unit 40 Cutting blade 42 Hub base 42a Through hole 42b Guide portion 44 Cutting blade 46 Cutting blade 46a Through hole 48 Cutting blade 50 Imaging unit 52 Cleaning unit 54 Spinner table 54a Holding surface 56 Nozzle 58 Control unit (control unit, control device)
60 Housing 62 Spindle 64 Blade mount 64a Through hole 66 Base portion 66a Outer circumferential surface (inclined surface)
68 Flange portion 68a Surface 68b Convex portion 68c Support surface 70 Boss portion (support shaft)
70a screw groove (male thread)
72 Fixing bolt 74 Fixing nut 74a Side surface (inner surface)
74b Guide portion 76 Cutting fluid supply unit (blade cover)
78 First connection part 80 Nozzle (cooler nozzle)
82 Second connection part 84 Nozzle (shower nozzle)
86 Third connection part 88 Nozzle (spray nozzle)
90 Front flange (holding flange)
90a Outer circumferential surface 90b Through hole 92 Fixing nut 92a Side surface (inner circumferential surface)
92b Guiding section 100 Detection unit 102 Frame body 102a Storage section 104 Detection section 104a Base section 104b Light emitting section 104c Light receiving section 104d Blade insertion section (recess)
106 Light source 108 Photoelectric conversion unit 110 Ball screw 112 Pulse motor 120, 122, 124 Guiding unit (notch)
120a, 122a: Receiving surface 124a: Bottom surface 124b, 124c: Side surface (inner wall)
130, 132, 134 Guide part (protrusion)
130a, 132a, 134a Receiving surface 140 Guiding portion

Claims (6)

A cutting device for cutting a workpiece,
a cutting unit including a spindle and a blade mount attached to a tip of the spindle, the cutting unit cutting the workpiece with a cutting blade attached to the blade mount;
a cutting fluid supply unit for supplying cutting fluid to the cutting blade;
a detection unit that detects the tip of the cutting blade,
the detection unit includes a light-emitting unit, a light-receiving unit that receives light from the light-emitting unit, and a blade insertion unit that is provided between the light-emitting unit and the light-receiving unit and into which the cutting blade is inserted;
The blade mount comprises a truncated cone-shaped base portion having one end fixed to the tip of the spindle, a flange portion connected to the other end of the base portion and supporting the cutting blade, and a boss portion protruding from the flange portion and inserted into a through-hole provided in the center of the cutting blade,
The base portion is provided on the outer peripheral surface side of the base portion along the circumferential direction of the base portion, and is characterized by having a first guide portion that guides the cutting fluid supplied from the cutting fluid supply unit to the rotating cutting blade to the light-emitting portion or the light-receiving portion. The cutting device described in claim 1, characterized in that the first guide portion is a notch or protrusion provided in a position facing the light-emitting portion or the light-receiving portion. The cutting blade includes an annular hub base having the through hole in its center,
the cutting unit further includes a fixing nut that is screwed onto the boss portion and clamps and fixes the cutting blade together with the flange portion;
the hub base has a second guide portion provided on the outer peripheral surface side of the hub base along the circumferential direction of the hub base,
The fixing nut has a third guide portion provided on an outer peripheral surface side of the fixing nut along a circumferential direction of the fixing nut,
The cutting device according to claim 1 or 2, characterized in that the second guide section and the third guide section guide the cutting fluid supplied from the cutting fluid supply unit to the rotating cutting blade to the light emitting section or the light receiving section. The cutting device described in claim 3, characterized in that the second guide portion or the third guide portion is a notch or protrusion provided in a position facing the light-emitting portion or the light-receiving portion. the cutting unit further includes a front flange that supports the cutting blade together with the flange portion, and a fixing nut that is screwed onto the boss portion and that clamps and fixes the cutting blade and the front flange together with the flange portion,
the front flange or the fixing nut has a fourth guide portion provided on an outer peripheral surface side of the front flange or the fixing nut along a circumferential direction of the front flange or the fixing nut,
3. The cutting device according to claim 1, wherein the fourth guide portion guides the cutting fluid supplied from the cutting fluid supply unit to the rotating cutting blade to the light projecting portion or the light receiving portion. 6. The cutting device according to claim 5, wherein the fourth guide portion is a notch or a protrusion provided at a position facing the light projecting portion or the light receiving portion.