JP7835577B2 - Slit nozzle and substrate processing apparatus - Google Patents

Description

This invention relates to a slit nozzle having a slit-shaped discharge port and a substrate processing apparatus for applying liquid to a substrate using the slit nozzle. The substrates mentioned above include semiconductor substrates, photomask substrates, liquid crystal display substrates, organic EL display substrates, plasma display substrates, FED (Field Emission Display) substrates, optical disc substrates, magnetic disc substrates, magneto-optical disc substrates, and the like.

In the manufacturing processes of electronic devices such as semiconductor devices and liquid crystal displays, substrate processing equipment is used to supply liquid to the surface of a substrate and coat the substrate with it. One type of substrate processing equipment levitates the substrate while transporting it, supplying liquid to a slit nozzle and discharging it from the nozzle's outlet to coat almost the entire substrate surface. Another type of substrate processing equipment holds the substrate on a stage using suction, and while discharging the liquid from the slit nozzle's outlet toward the substrate surface, moves the slit nozzle relative to the substrate to coat almost the entire substrate surface.

In recent years, with the increasing demand for higher product quality, improving the uniformity of the film thickness of the processing liquid applied by substrate processing equipment has become crucial. To this end, a configuration has been proposed that allows for individual adjustment of the opening dimensions of the slit-shaped discharge port at each position along the longitudinal direction of the slit.

For example, in the technology described in Patent Documents 1 and 2, two nozzle bodies are combined so as to face each other, forming a fluid flow path and discharge port in the gap between them. The two nozzle bodies are connected to each other by multiple screws (bolts) arranged along the longitudinal direction of the discharge port. These screws are arranged in multiple rows so as to be aligned on multiple straight lines perpendicular to the longitudinal direction, and by increasing or decreasing the tightening amount of these screws, it is possible to individually adjust the opening size of the discharge port at each position along the longitudinal direction.

Japanese Patent Publication No. 2008-194588 Patent No. 4522726

From the standpoint of miniaturization of electronic devices and efficient use of materials, a higher level of uniformity in coating is required than ever before. Therefore, it is necessary to finely adjust the discharge volume across the entire length of the discharge port. Thus, further improvements are desired in the conventional technology described above. In particular, there is a problem in that even if the opening dimensions of the discharge port are changed in the same way, the change in discharge volume is not necessarily the same near the center and near the ends of the discharge port in the longitudinal direction. Therefore, a technology is needed that allows for finer adjustment of the opening dimensions near the ends, where the discharge volume tends to be unstable, than in the center. However, the conventional technology described above does not meet this requirement.

This invention has been made in view of the above-mentioned problems, and aims to provide a technology that enables efficient operation to uniformize the discharge amount across the entire discharge port in a slit nozzle having a slit-shaped discharge port and a substrate processing apparatus equipped therewith for applying liquid to a substrate.

One embodiment of the slit nozzle according to the present invention is a slit nozzle having a discharge port that opens in a slit shape and a fluid passage communicating therewith, comprising a first body portion and a second body portion each having flat surfaces facing each other across a gap, with the passage and discharge port formed in the gap, and a plurality of screw members connecting the first body portion and the second body portion. Here, the plurality of screw members are arranged such that a plurality of screw rows, each consisting of a plurality of screw members arranged along the longitudinal direction, are formed in a direction perpendicular to the longitudinal direction between a position corresponding to one end of the discharge port in the longitudinal direction and a position corresponding to the other end. Each of the screw rows is provided with a narrow-pitch portion in which a predetermined number of screw members are arranged at a small arrangement pitch from both ends of the screw row, and a wide-pitch portion in the screw row that is inside the narrow-pitch portion and where the screw members are arranged at a larger arrangement pitch than in the narrow-pitch portion. Furthermore, between one row of screws and another row of screws adjacent to it in a direction perpendicular to the longitudinal direction, the arrangement positions of the screw members in the longitudinal direction are the same in the narrow-pitch section and different in the wide-pitch section.

In this invention, the opening dimensions of the discharge port near each screw member can be changed by increasing or decreasing the tightening amount of each screw member arranged to form multiple rows of screws. Here, the arrangement pitch of the screw members in each row is set to be relatively narrow near both ends in the longitudinal direction of the discharge port, while being wider towards the center of the discharge port further inside.

When the tightening amount of one screw component (referred to here as the "adjustable screw component") is changed, the opening size of the discharge port near that component changes accordingly. At this time, other screw components surrounding the adjustable screw component have the effect of restricting the range over which the tightening amount of the adjustable screw component affects the opening size. In other words, a larger arrangement pitch of screw components results in a relatively wide range of opening size changes due to changes in the tightening amount, while a smaller arrangement pitch results in a narrower range of opening size changes.

In this invention, the screw threads are arranged so that the pitch is narrower at the ends of the discharge port in the longitudinal direction, while the pitch is wider further inward. In other words, the screw threads are more densely arranged at the ends of the discharge port compared to the center. Therefore, near the ends of the discharge port, the range in which the opening size changes with a change in the tightening amount of a single screw thread is more limited compared to the center. Consequently, the opening size at each position in the longitudinal direction can be adjusted more precisely than in the center. This makes it possible to perform adjustment work to equalize the discharge volume across the entire discharge port, including both ends and the center, more efficiently.

Furthermore, one embodiment of the substrate processing apparatus according to the present invention comprises a slit nozzle having the above configuration, a relative movement mechanism for positioning a substrate opposite the discharge port of the slit nozzle and for relatively moving the slit nozzle and the substrate in a direction intersecting the longitudinal direction, and a liquid supply unit for supplying liquid to the slit nozzle, thereby applying the liquid discharged from the discharge port to the surface of the substrate.

In this invention, it is expected that a film with uniform thickness in the longitudinal direction can be stably formed by supplying liquid to the substrate from a slit nozzle whose opening size can be adjusted using the above configuration.

As described above, in this invention, the arrangement pitch of the screw members is set narrower near both ends in the longitudinal direction of the discharge port than in the central part. Therefore, it is possible to finely adjust the opening dimensions at each position of the discharge port ends. This makes it possible to efficiently perform adjustment work to make the discharge volume uniform throughout the entire discharge port.

This figure shows a coating apparatus, which is one embodiment of the substrate processing apparatus according to the present invention. This is a diagram showing a first embodiment of a slit nozzle. This diagram shows the arrangement of screw members in a slit nozzle. This figure shows the relationship between the arrangement pattern of the screw members and the adjustment range of the opening width. This diagram schematically shows the main configuration of the second embodiment of the slit nozzle. This is a diagram showing a third embodiment of the slit nozzle.

<Overall configuration of the coating device>
Figure 1 is a schematic diagram showing the overall configuration of a coating apparatus, which is one embodiment of the substrate processing apparatus according to the present invention. This coating apparatus 1 is a slit coater that coats a liquid coating solution (processing solution) onto the surface Sf of a substrate S that is transported in a horizontal position from the left side to the right side in Figure 1. For example, this coating apparatus 1 can be suitably used to form a uniform coating film by coating various processing solutions, such as a coating solution containing a resist film material or a coating solution containing an electrode material, onto the surface Sf of various substrates S, such as glass substrates or semiconductor substrates.

Furthermore, in order to clarify the arrangement of the various parts of the device in the following diagrams, a right-handed XYZ Cartesian coordinate system is set as shown in Figure 1. The transport direction of the substrate S is defined as the "X direction," the horizontal direction from the left-hand side to the right-hand side in Figure 1 is called the "+X direction," and the opposite direction is called the "-X direction." Additionally, within the horizontal Y direction perpendicular to the X direction, the front side of the device (the side towards the viewer in the diagram) is called the "-Y direction," and the rear side of the device is called the "+Y direction." Finally, the upward and downward directions in the vertical Z direction are called the "+Z direction" and the "-Z direction," respectively.

First, the configuration and operation of the coating apparatus 1 will be explained using Figure 1, and then the detailed structure of the slit nozzle, which possesses the technical features of the present invention, and the procedure for adjusting the opening dimensions will be explained. In the coating apparatus 1, the input conveyor 100, input transfer unit 2, floating stage unit 3, output transfer unit 4, and output conveyor 110 are arranged in close proximity in this order along the transport direction Dt of the substrate S, i.e., the (+X) direction. As will be described in detail below, these components form a transport path for the substrate S that extends in a substantially horizontal direction.

The substrate S to be processed is brought into the input conveyor 100 from the left side in Figure 1. The input conveyor 100 comprises a roller conveyor 101 and a rotational drive mechanism 102 that rotates it. The rotation of the roller conveyor 101 transports the substrate S in a horizontal position downstream, i.e., in the (+X) direction. The input transfer unit 2 comprises a roller conveyor 21 and a rotation/lifting drive mechanism 22 that has the function of rotating and lifting the roller conveyor 21. As the roller conveyor 21 rotates, the substrate S is further transported in the (+X) direction. Also, the vertical position of the substrate S is changed as the roller conveyor 21 is raised and lowered. With this configuration, the input transfer unit 2 transfers the substrate S from the input conveyor 100 to the levitation stage unit 3.

The levitation stage section 3 comprises a flat plate-shaped stage divided into three sections along the substrate transport direction Dt. Specifically, the levitation stage section 3 includes an inlet levitation stage 31, a coating stage 32, and an outlet levitation stage 33, with the surfaces of each of these stages forming part of the same plane. Numerous ejection holes are provided in a matrix pattern on the surfaces of the inlet levitation stage 31 and the outlet levitation stage 33, for ejecting compressed air supplied from the levitation control mechanism 35. The buoyancy provided by the ejected airflow causes the substrate S to levitate. In this way, the back surface Sb of the substrate S is supported in a horizontal position with its surface separated from the stage surface. The distance between the back surface Sb of the substrate S and the stage surface, i.e., the levitation amount, can be, for example, 10 micrometers to 500 micrometers.

On the other hand, on the surface of the coating stage 32, ejection holes for ejecting compressed air and suction holes for drawing in air between the back surface Sb of the substrate S and the stage surface are arranged alternately. The levitation control mechanism 35 precisely controls the distance between the back surface Sb of the substrate S and the surface of the coating stage 32 by controlling the amount of compressed air ejected from the ejection holes and the amount of air drawn in from the suction holes. This controls the vertical position of the surface Sf of the substrate S passing above the coating stage 32 to a specified value. For example, the configuration described in Japanese Patent No. 5346643 can be applied to the specific configuration of the levitation stage section 3. The amount of levitation on the coating stage 32 is calculated by the control unit 9 based on the detection results from sensors 61 and 62, and can be adjusted with high precision by airflow control based on these results.

Furthermore, the inlet levitation stage 31 is equipped with a lift pin (not shown in the diagram), and the levitation stage section 3 is provided with a lift pin drive mechanism 34 for raising and lowering this lift pin.

The substrate S, transported to the levitation stage section 3 via the input transfer section 2, is propelled in the (+X) direction by the rotation of the roller conveyor 21 and conveyed onto the inlet levitation stage 31. The inlet levitation stage 31, coating stage 32, and outlet levitation stage 33 support the substrate S in a levitated state, but do not have the function of moving the substrate S horizontally. The conveyance of the substrate S within the levitation stage section 3 is performed by the substrate conveying section 5, located below the inlet levitation stage 31, coating stage 32, and outlet levitation stage 33.

The substrate transport unit 5 includes a chuck mechanism 51 that supports the substrate S from below by partially contacting the lower peripheral edge of the substrate S, and a suction/travel control mechanism 52 that has the function of applying negative pressure to a suction pad (not shown) provided on the suction member at the upper end of the chuck mechanism 51 to suction and hold the substrate S, and the function of moving the chuck mechanism 51 back and forth in the X direction. When the chuck mechanism 51 holds the substrate S, the back surface Sb of the substrate S is located higher than the surface of each stage of the floating stage unit 3. Therefore, the substrate S maintains a horizontal posture overall due to the buoyancy applied from the floating stage unit 3 while its peripheral edge is suction and held by the chuck mechanism 51. In addition, a plate thickness measuring sensor 61 is positioned near the roller conveyor 21 in order to detect the vertical position of the surface of the substrate S when the back surface Sb of the substrate S is partially held by the chuck mechanism 51. By positioning a chuck (not shown) directly below the sensor 61 in a state where it is not holding the substrate S, the sensor 61 can detect the vertical position of the surface of the adsorption member, i.e., the adsorption surface.

The substrate S, transported from the input transfer unit 2 to the levitation stage unit 3, is held by the chuck mechanism 51. In this state, the chuck mechanism 51 moves in the (+X) direction, transporting the substrate S from above the inlet levitation stage 31, through above the coating stage 32, to above the outlet levitation stage 33. The transported substrate S is then handed over to the output transfer unit 4, located on the (+X) side of the outlet levitation stage 33.

Of the stages in the floating stage section 3, the exit floating stage 33 is capable of moving up and down between a lower position where its upper surface is lower than the upper surface of the chuck mechanism 51, and an upper position where its upper surface is higher than the upper surface of the chuck mechanism 51. For this purpose, the exit floating stage 33 is supported by a lifting drive mechanism 36. The lifting drive mechanism 36 raises and lowers the exit floating stage 33 in response to control commands from the control unit 9, positioning it at a predetermined height according to the progress of the processing.

The output transfer unit 4 comprises a roller conveyor 41 and a rotation/lifting drive mechanism 42 that has the function of rotating and raising/lowering the roller conveyor 41. As the roller conveyor 41 rotates, a thrust force is applied to the substrate S in the (+X) direction, and the substrate S is further transported along the transport direction Dt. Furthermore, as the roller conveyor 41 rises and falls, the vertical position of the substrate S is changed. The output transfer unit 4 transfers the substrate S from above the exit floating stage 33 to the output conveyor 110.

The output conveyor 110 comprises a roller conveyor 111 and a rotational drive mechanism 112 that rotates it. The rotation of the roller conveyor 111 further transports the substrate S in the (+X) direction, and it is finally discharged outside the coating apparatus 1. The input conveyor 100 and output conveyor 110 may be provided as part of the coating apparatus 1, but they may also be separate components. For example, a substrate discharge mechanism in a separate unit provided upstream of the coating apparatus 1 may be used as the input conveyor 100. Similarly, a substrate receiving mechanism in a separate unit provided downstream of the coating apparatus 1 may be used as the output conveyor 110.

A coating mechanism 7 for applying a coating solution to the surface Sf of the substrate S is positioned along the transport path of the substrate S being transported in this manner. The coating mechanism 7 has a slit nozzle 71. Although not shown in the figures, a positioning mechanism is connected to the slit nozzle 71, which positions the slit nozzle 71 at multiple positions, including a coating position above the coating stage 32 (the position of the nozzle 71 in Figure 1) and a maintenance position. Furthermore, a coating solution supply mechanism 8 is connected to the slit nozzle 71, and the coating solution is supplied from the supply mechanism 8 and discharged from a discharge port that opens downwards at the bottom of the nozzle. The slit nozzle 71 will be described in detail later.

The slit nozzle 71 is equipped with a floating height detection sensor 62 for non-contact detection of the floating height of the substrate S. This floating height detection sensor 62 can measure the distance between the floating substrate S and the surface of the coating stage 32. Based on this detected value, the position in which the slit nozzle 71 descends can be adjusted via the control unit 9. The floating height detection sensor 62 can be an optical sensor, an ultrasonic sensor, or the like.

To perform predetermined maintenance on the slit nozzle 71, the coating mechanism 7 is equipped with a nozzle cleaning standby unit 79. The nozzle cleaning standby unit 79 mainly consists of a roller 791, a cleaning section 792, a roller butt 793, and the like. With the slit nozzle 71 positioned in the maintenance location, these components perform nozzle cleaning and liquid reservoir formation, preparing the discharge port of the slit nozzle 71 for the next coating process.

In addition, the coating apparatus 1 is equipped with a control unit 9 for controlling the operation of each part of the apparatus. The control unit 9 includes a storage unit for storing predetermined programs and various recipes, a processing unit such as a CPU that executes the program to cause each part of the apparatus to perform predetermined operations, a display unit such as an LCD panel, and an input unit such as a keyboard.

The following details specific configuration examples of the slit nozzle 71 and methods for adjusting the opening dimensions of the discharge port. Note that the adjustment of the opening dimensions referred to here is not aimed at making the opening dimensions constant or a predetermined value, but rather at making the thickness of the coating film formed on the surface of the substrate S as a result of discharge uniform.

<First Embodiment>
Figure 2 shows a first embodiment of a slit nozzle used in the coating apparatus of Figure 1. More specifically, Figure 2 is a schematic exploded assembly diagram showing the main components of the slit nozzle 71. The slit nozzle 71 has a first body portion 711, a second body portion 712, a first side plate 713, and a second side plate 714. Each of these components is machined from a metal block such as stainless steel or aluminum. As shown by the dashed arrow, the first body portion 711 and the second body portion 712 are joined facing each other in the X direction, and the first side plate 713 is joined to the (-Y) side end face of the joined body, and the second side plate 714 is joined to the (+Y) side end face, thereby forming the nozzle body 710.

The lower half of the main surface of the first body portion 711 facing the second body portion 712, that is, the main surface on the (+X) side, is finished to be a flat surface 711a parallel to the YZ plane. Hereinafter, this flat surface 711a will be referred to as the "first flat surface". The upper half of the main surface of the first body portion 711 facing the second body portion 712 is also finished to be a flat surface 711b parallel to the YZ plane. Furthermore, the lower part of the first body portion 711 protrudes in a downward tapering shape to form the first lip portion 711c. The flat surfaces 711a and 711b are separated by a groove 711d with the Y direction as the longitudinal direction and the X direction as the depth direction. This groove 711d functions as a manifold in the flow path of the coating liquid, with its lower end extending in a substantially horizontal direction, while its upper end has a mountain-like shape that rises in the (+Z) direction as it approaches the center from both ends. In other words, the groove 711d is configured such that the vertical cross-sectional area of the manifold formed therein increases from the end towards the center.

On the other hand, the main surface of the second main body portion 712 facing the first main body portion 711, that is, the main surface on the (-X) side, is a single flat surface 712a parallel to the YZ plane. Hereafter, this flat surface 712a will be referred to as the "second flat surface." Furthermore, the lower part of the second main body portion 712 protrudes in a downward tapering shape, forming the second lip portion 712c. The first main body portion 711 and the second main body portion 712 are joined by multiple screw members 716 such that the flat surface 711b and the upper half of the second flat surface 712a are in close contact.

More specifically, multiple screw holes 711e are provided in the region R1 enclosed by the dotted line shown in Figure 2, on the flat surface 711b. Furthermore, multiple through holes 711e are provided in the second main body portion 712, penetrating from its (+X) side surface to its (-X) side surface (i.e., the second flat surface 712a). To avoid complexity in the drawing, Figure 2 shows only one screw hole 711e, one through hole 712e, and one screw member 716; however, multiple of each are provided. Their arrangement will be explained in detail later.

The through-holes 711e are positioned to correspond to each screw hole 711e of the first main body 711. In other words, when the first main body 711 and the second main body 712 are assembled, the through-holes 712e of the second main body 712 are provided at positions coaxial with each of the screw holes 711e of the first main body 711. The region on the (+X) side surface of the second main body 712 where multiple through-holes 712e are located is comprehensively represented by the symbol R2.

A threaded member 716 is inserted through each of the through holes 712e, and the threaded members 716 are screwed into the threaded holes 711 of the first main body 711, thereby joining the first main body 711 and the second main body 712. In addition to functioning as fixing screws that securely fasten the first main body 711 and the second main body 712, the multiple threaded members 716 also function as adjustment screws to adjust the opening size of the discharge port in the assembled slit nozzle 71, as will be described later.

The first flat surface 711a is slightly recessed towards the (-X) side compared to the flat surface 711b. Therefore, when the first main body 711 and the second main body 712 are joined, the first flat surface 711a and the second flat surface 712a face each other parallel to one another, separated by a small gap. This gap between the opposing surfaces (first flat surface 711a, second flat surface 712a) becomes a flow path for the coating liquid from the manifold, and its lower end functions as a discharge port 715 (Figure 3) that opens downward toward the surface Sf of the substrate S. The discharge port 715 has its longitudinal direction in the Y direction and is a slit-shaped opening with a very small opening dimension in the X direction.

Figure 3 shows the arrangement of the threaded members in the slit nozzle. More specifically, Figure 3(a) shows the arrangement of the through holes 712e located on the (+X) side surface of the slit nozzle 71, and Figure 3(b) is a magnified view of a portion of region R2.

In a portion of the (+X) side surface of the second main body 712 constituting the slit nozzle 71, in a region R2 corresponding to the region R1 where the screw hole 711e is located in the first main body 711, multiple through holes 712e are distributed. The through holes 712e and the screw holes 711e are coaxially arranged, and a screw member 716 is inserted through them. Therefore, the arrangement of the through holes 712e shown below is technically equivalent to the arrangement of the screw holes 711e. Furthermore, since a screw member 716 is inserted through them, the arrangement of the screw member 716 naturally follows the arrangement of the screw holes 711e or the through holes 712e.

Specifically, as shown by the dashed lines in Figure 3(b), each through-hole 712e extends generally in the Y direction and is positioned on one of several straight lines L1, L2, and L3 that are at different positions in the Z direction. Therefore, the multiple through-holes 712e form a row of through-holes 712e arranged in a line along the Y direction, and multiple such rows of through-holes 712e are arranged at different positions in the Z direction. Note that the straight lines L1, L2, and L3 on which the through-holes 712e are arranged are not strictly parallel to the Y direction, but have a slight upward slope from the ends towards the center, corresponding to the inclination of the upper end of the groove 711d which forms the manifold. Furthermore, this arrangement is symmetrical with respect to the XZ plane passing through the center of the nozzle. Such an arrangement is described in detail in Patent Document 2, and will not be explained here.

The arrangement pitch of through-holes 712e along a straight line in the Y direction is not uniform. That is, within region R2, the through-holes 712e are arranged at a relatively small pitch in the end regions R2a and R2b corresponding to both ends of the discharge port 715, while they are arranged at a larger pitch in the central region R2c, which is inside the end regions R2a and R2b. For example, on the straight line L1, a predetermined number of through-holes 712e (5 in this example) are arranged at equal intervals with a relatively small pitch Pa in the (-Y) end region R2a. The same applies to the (+Y) end region R2b. While the number and arrangement pitch of through-holes 712e may differ in the end region, it is practical to make them the same from the standpoint of effectiveness in adjusting the opening dimensions.

On the other hand, in the central region R2c of region R2, which is located inside the end regions R2a and R2b and sandwiched between them, through holes 712e are arranged at equal intervals with a pitch Pc that is larger than the arrangement pitch Pa in the end regions.

Similarly, on both the straight line L2 and the straight line L3, through holes 712e are arranged such that they have a narrow pitch in the end regions R2a and R2b, and a wide pitch in the central region R2c. In accordance with this arrangement of through holes 712e, the screw members 716 are also arranged such that they have a narrow pitch in the end regions R2a and R2b, and a wide pitch in the central region R2c. In the first main body portion 711, in region R1 corresponding to region R2, screw holes 711e are provided at positions corresponding to each through hole 712e.

By increasing or decreasing the tightening amount of the screw member 716, it is possible to adjust the opening width of the discharge port 715, i.e., the opening dimension in the X direction. Specifically, by tightening the screw member 716 more firmly, at least one of the first main body portion 711 and the second main body portion 712 undergoes slight elastic deformation, and changing the tightening amount also changes the amount of elastic deformation. Therefore, the opening width of the discharge port 715 formed by the first main body portion 711 and the second main body portion 712 changes. This can be used to adjust the opening dimension to maintain a constant discharge volume.

When the tightening amount of one screw member 716 being adjusted is changed, the other screw members 716 surrounding it act to restrict the range of change in the opening width (more specifically, the range in the longitudinal direction of the discharge port) resulting from the change in tightening amount. That is, the range of elastic deformation of the first main body 711 and the second main body 712 due to the change in the tightening amount of the screw member 716 being adjusted is limited by the surrounding screw members 716 whose tightening amounts are not changed.

Therefore, in areas where the arrangement pitch of the screw members 716 is wide, changing the tightening amount of one screw member 716 causes the opening width of the discharge port 715 to change over a relatively wide range in the longitudinal direction. On the other hand, in areas where the arrangement pitch of the screw members 716 is narrow, the range over which the opening width of the discharge port 715 changes is more limited.

In coating processes using the slit nozzle 71, the flow rate of the coating liquid near both ends in the Y-direction of the nozzle's flow path is more prone to fluctuation than that of the coating liquid flowing in the center of the flow path, due to the influence of the side walls of the flow path. Therefore, it is desirable that the discharge width of the discharge port 715, which is necessary to maintain a constant discharge volume, be adjusted more precisely near both ends than in the center.

Therefore, in the slit nozzle 71 of this embodiment, the predetermined number of through holes 712e provided in the end regions R2a and R2b, which correspond to the positions of both ends of the discharge port 715 in the longitudinal direction, are arranged at relatively narrow pitches and equal intervals. This makes it possible to finely adjust the opening width of the discharge port 715 near both ends for each position in the longitudinal direction. Furthermore, since the range affected by the adjustment of the opening width at one location is limited, for example, it is avoided that the opening width of an already adjusted location will not change due to adjustments at other locations. Therefore, adjustment work at each location can be performed efficiently.

On the other hand, in the central region R2c, which is inside the end regions R2a and R2b, the through holes 712e are arranged at a wider pitch. This allows for a wider range of adjustment of the opening width in the central region, where the amount of coating liquid applied in the flow path is relatively stable, by increasing or decreasing the tightening amount of each screw member 716. This enables efficient adjustment of the opening dimensions in this region.

When the threaded members 716 are arranged to form multiple rows, the opening width of the discharge port 715 is affected by the difference in the relative tightening amounts of the threaded members 716 between each row. Therefore, with respect to adjusting the opening dimensions, the threaded members 716 belonging to each row act complementaryly with those belonging to other rows.

For example, consider a case where the screw members 716 are arranged in two rows. If increasing the tightening amount of one screw member 716 in one row increases the opening width, then naturally, reducing the tightening amount of that screw member 716 will reduce the opening width. Similarly, increasing the tightening amount of another screw member 716 in the other row will also reduce the opening width, as the tightening amount will increase relative to the aforementioned screw member 716.

In other words, when the screw members 716 are arranged in two rows, the opening width can be adjusted by adjusting only the screw members belonging to one row and changing the relative tightening amount with respect to the screw members belonging to the other row. Alternatively, the screw members belonging to both rows can be adjusted separately. In practical terms, to ensure that the first main body 711 and the second main body 712 are mechanically joined with a certain level of binding force, it is desirable not to change the tightening amount of the screw members belonging to one row.

In this embodiment, where the screw members 716 are arranged in three rows, the opening dimensions can be adjusted as follows. First, the central row, i.e., the screw members 716 arranged on straight line L2, are tightened to a specified torque and then left unchanged, thus maintaining a constant tightening amount. Then, the opening dimensions can be adjusted by targeting one or both of the other two rows, i.e., the screw members 716 arranged on straight lines L1 and L3.

In this way, the opening dimension, whose approximate value is defined by the screw member 716 positioned on the straight line L2, can be finely adjusted by increasing or decreasing the tightening amount of the screw member 716 positioned on the straight line L1 and/or straight line L3. Therefore, excessive fluctuations in the opening dimension during the adjustment process are prevented, and the work can be performed efficiently.

As described above, the threaded member 716 on the straight line L1 and the threaded member 716 on the straight line L3 work complementaryly in adjusting the opening dimensions. However, the threaded member 716 on the straight line L3, which is closer to the discharge port 715, has a more pronounced effect of changes in the tightening amount on the change in the opening width. Therefore, it is possible to use the threaded member 716 on the straight line L3 for coarse adjustment and the threaded member 716 on the straight line L1 for fine adjustment.

Furthermore, the arrangement of the screw members 716 in each row is set with a narrow pitch at the positions corresponding to the ends of the discharge port 715 and a wide pitch at the positions corresponding to the central part. Therefore, it is possible to adjust the opening dimensions at both ends of the discharge port 715 more precisely than at the central part.

Furthermore, in this embodiment, the arrangement pattern in the Y-direction differs between adjacent screw members 716 depending on their longitudinal position. That is, in the end regions R2a and R2b, the Y-direction positions of the through holes 712e located on lines L1, L2, and L3 are identical. Therefore, each through hole 712e is arranged on a grid with the Y-axis and Z-axis as its two axes. This arrangement will be referred to here as a "grid arrangement."

On the other hand, in the central region R2c, the through-holes 712e on line L1 and the through-hole threaded members 716 on line L3, which are positioned on either side of line L2, are at the same position in the Y direction. However, the Y-direction position of the through-holes 112e on line L2, which are adjacent to these two and sandwiched between them, differs from the threaded members 716 in the other rows by (1/2) of the arrangement pitch. Therefore, each through-hole 112e is arranged in a so-called "staggered" pattern. As will be explained next, these differences in arrangement patterns are provided to allow for finer adjustment of the opening dimensions at the edges of the discharge port 715 than at the center.

Figure 4 schematically illustrates the relationship between the arrangement pattern of the screw members and the adjustment range of the discharge port opening width. Figure 4(a) shows the case where the screw members 716 are arranged in a staggered pattern, and Figure 4(b) shows the case where the screw members 716 are arranged in a grid pattern. As described above, when the tightening amount of one screw member 716 is changed, the nozzle body 710 elastically deforms accordingly, changing the opening width of the discharge port 715, while the surrounding screw members 716 act to restrain this deformation.

The manner of deformation differs between cases where the screw members 716 are arranged in a staggered pattern, as shown in Figure 4(a), and cases where they are arranged in a grid pattern, as shown in Figure 4(b). In these figures, the dotted lines schematically represent the range of deformation when the tightening amount of a single screw member 716a is changed.

In the staggered arrangement shown in Figure 4(a), when the tightening amount of one screw member 716a is changed, the deformation is constrained by the surrounding screw members 716, resulting in a relatively wide-ranging effect on the opening width of the discharge port 715. On the other hand, in the grid arrangement shown in Figure 4(b), the range of influence of a change in the tightening amount of one screw member 716a on the opening width of the discharge port 715 is narrower.

Here, we have explained the function of the screw member 716a, which belongs to the lowest of the three rows. However, the same consideration can be applied to the screw member 716b, which belongs to the upper row and acts complementaryly to it.

Thus, by varying the arrangement pattern of the screw members 716, the range of change in the opening width of the discharge port 715 when the tightening amount of one screw member 716 is changed can also be varied. In the slit nozzle 71 of this embodiment, as shown in Figure 3(a), the through holes 112e are arranged in a grid pattern in the end regions R2a and R2b, while the through holes 112e are arranged in a staggered pattern in the central region R2c. This further improves the effect of being able to adjust the opening width more precisely near the ends of the discharge port 715 than in the central part.

As described above, in the slit nozzle 71 of this embodiment,
(a) Multiple screw members 716 are arranged such that multiple rows of screw members are formed in the Z direction.
(b) The arrangement pitch of the screw members 716 is made narrow in the end regions R2a and R2b corresponding to both ends of the discharge port 715, while the pitch is made wider in the central region R2c located inside these areas.
(c) The arrangement pattern of the screw members 716 is a grid arrangement in the end regions R2a and R2b, while the arrangement is a staggered arrangement in the central region R2c.
This configuration allows for more precise adjustment of the opening dimensions of the discharge port 715, particularly near the edges rather than in the center. This makes it possible to efficiently perform adjustment work to maintain a constant discharge volume of the coating liquid from the discharge port 715. Configurations (b) and (c) described above are effective on their own, but combining them further enhances their effectiveness.

<Second Embodiment>
Next, a second embodiment of a slit nozzle applicable to the coating apparatus 1 will be described. In the slit nozzle 71 of the above embodiment, the first flat surface 711a of the first main body portion 711 is set back on the (-X) side compared to the other flat surface 711b, and this faces the second flat surface of the second main body portion 712, thereby forming a flow path and discharge port 715 for the coating liquid. On the other hand, some slit nozzles of this type have a structure in which a thin plate-shaped shim is sandwiched between two main body members made of a high-rigidity material. The slit nozzle 71A of the second embodiment shown in Figure 5 has such a structure.

Figure 5 is a schematic exploded assembly diagram showing the main configuration of a second embodiment of the slit nozzle used in the coating apparatus of Figure 1. In this embodiment of the slit nozzle 71A, the nozzle body 710A is formed by joining a first body portion 711A and a second body portion 712A, which have opposing flat surfaces, with a shim 73A in between. The first body portion 711A has a groove 711g on its flat main surface 711f facing the second body portion 712A, which functions as a manifold for the coating liquid. The shim 73A is, for example, a thin metal plate with a portion cut out to form a flow path for the coating liquid. It is sandwiched between the first body portion 711A and the second body portion 712A, defining the gap between them and forming a flow path for the coating liquid.

Except for these points, the shapes of the first main body 711A and the second main body 712A are the same as the corresponding configurations 711 and 712 of the first embodiment. Furthermore, the device configuration other than the slit nozzle is also common. Therefore, the same reference numerals are used for configurations that are identical or substantially identical to those in the first embodiment, and detailed explanations are omitted.

In this embodiment as well, the first main body portion 711A and the second main body portion 712A are fixed together using a screw member 716. Specifically, screw holes 711e are distributed within region R1 of the first main body portion 711, and through holes 712e are provided in region R2 of the second main body portion 712 at positions corresponding to each of the screw holes 711e. Furthermore, through holes 73e are provided in region R3 of the shim 73A, corresponding to regions R1 and R2, at positions corresponding to the screw holes 711e and through holes 712e. The screw member 716 is inserted through these, connecting the first main body portion 711A and the second main body portion 712A via the shim 73A.

In addition, the first main body portion 711A, the second main body portion 712A, and the shim 73A are each provided with holes 711h, 712h, and 73h, respectively, for inserting threaded members. Threaded members 716 are also inserted through these holes to prevent leakage of the coating liquid from the side of the nozzle. The tightening amount of the threaded members 716 here is maintained at a constant value and is not used to adjust the opening dimensions.

A slit nozzle 71A having such a structure has the same functionality as the slit nozzle 71 of the first embodiment. Thus, the discharge port opening dimension adjustment mechanism based on the technical concept of the present invention is applicable to both nozzles that define the gap using shims and nozzles that do not use shims.

<Third Embodiment>
Next, a third embodiment of a slit nozzle applicable to the coating apparatus 1 will be described. In each of the above embodiments, a single discharge port is provided in the longitudinal direction (Y direction) of the slit nozzle. However, in this type of coating apparatus, there are also usage configurations in which the discharge port is divided into multiple ports in the longitudinal direction, and multiple coating films are formed simultaneously. The slit nozzle 71B of the third embodiment shown below addresses this need. Here again, the same reference numerals are used for components that are the same or substantially the same as in the first and second embodiments, and detailed explanations are omitted.

Figure 6 shows a third embodiment of the slit nozzle used in the coating apparatus of Figure 1. More specifically, Figure 6(a) is a schematic exploded assembly diagram showing the main components of the slit nozzle 71B of this embodiment. Figure 6(b) is a bottom view and a side view of the slit nozzle 71B.

In this embodiment, similar to the slit nozzle 71A of the second embodiment, the main body 710B is formed by sandwiching a shim 73B between the first main body 711B and the second main body 712B. A protruding portion 731B, which acts as a partition wall for the flow path, is provided in the center of the shim 73B, thereby dividing the flow path of the coating liquid into two sections. The protruding portion 731B extends to the lower ends of the first and second lip portions 711c and 712c, and at these lower ends, two discharge ports 715a and 715b are formed, each with its longitudinal direction in the Y direction and aligned in the Y direction. Although the flow path is thus divided into two discharge ports 715a and 715b, the shape of the groove 711g is a single mountain-like shape, similar to the second embodiment, with its upper end rising higher than both ends of the nozzle at the center.

In this embodiment, as in the second embodiment, the slit nozzle 71B is formed by connecting the first main body portion 711B and the second main body portion 712B with the shim 73A in between using a threaded member 716. That is, the first main body portion 711B, the second main body portion 712B, and the shim 73B are each provided with holes 711h, 712h, and 73h for inserting the threaded member. The threaded member 716 is inserted through these holes, integrating the components and preventing leakage of the coating liquid from the side of the nozzle. Here as well, the tightening amount of the threaded member 716 is maintained at a constant value and is not used to adjust the opening size.

In this embodiment, the arrangement of the screw member 716, which serves as an adjustment screw for adjusting the opening dimensions, is as follows. Through holes 712e are distributed within the second main body portion 712B in both the region R21 corresponding to the first discharge port 715a and the region R22 corresponding to the second discharge port 715b. More specifically, as shown in Figure 6(b), the region R21, which is set to correspond to the spread of the first discharge port 715a in the Y direction, is divided into end regions R21a and R21b, corresponding to both ends of the discharge port 715a, and a central region R21c, sandwiched between these and corresponding to the center of the discharge port 715a. Through holes 712e are arranged at a relatively wide pitch in the central region R21c, while they are arranged at a narrower pitch in the end regions R21a and R21b. The arrangement pattern can be similar to, for example, the pattern shown in Figure 3, but the number of arrangements may be changed as appropriate.

The same applies to region R22 corresponding to the second discharge port 715b. That is, region R22 can be divided into end regions R22a and R22b, corresponding to both ends of the discharge port 715b, where through-holes 712e are arranged at a narrow pitch, and a central region R21c, corresponding to the center of the discharge port 715b, where through-holes 712e are arranged at a wider pitch.

In the areas R11 of the first main body 711B and R31 of the shim 73B, which correspond to area R21 of the second main body 712B, and in the areas R12 of the first main body 711B and R32 of the shim 73B, which correspond to area R22 of the second main body 712B, screw holes 711e and through holes 73e are provided at positions corresponding to the through holes 112e, respectively. By inserting the screw member 716 through these, the screw member 716 functions as a fixing screw and an adjustment screw. The arrangement of the screw member 716 follows the arrangement of the screw holes 711e and through holes 712e.

In this embodiment, for each of the two discharge ports 715a and 715b formed side by side in the Y direction, the adjustment screws are arranged at a narrow pitch in the regions corresponding to both ends, while the adjustment screws are arranged at a wider pitch in the region corresponding to the center. Therefore, for each of the discharge ports 715a and 715b, the above-described effect, namely, the ability to adjust the opening dimensions more precisely near the ends of the discharge port than in the center, can be individually obtained. Thus, when a slit nozzle is provided with multiple discharge ports, by setting the screw arrangement based on the above technical concept for each port, it is possible to improve the efficiency of the opening dimension adjustment work for each discharge port. The same applies when shims are not used.

<Other>
As described above, in the slit nozzles 71, 71A, and 71B of each embodiment, the screw members 716 that serve as fixing screws connecting the components constituting the nozzle body also function as adjustment screws for adjusting the opening dimensions of the discharge ports 715 (715a, 715b). The arrangement of the screw members 716 as adjustment screws is set to a narrow pitch in the areas corresponding to both ends of the discharge port and a wide pitch in the area corresponding to the center.

Therefore, the adjustment screws are arranged more densely near both ends of the discharge port compared to the central part, allowing for more precise adjustment of the opening dimensions near the ends. Conversely, the density of adjustment screws is reduced in the central part, where adjustment is relatively easier, thereby improving the efficiency of the adjustment process. As a result, in these embodiments, it is possible to efficiently adjust the opening dimensions throughout the entire discharge port, including both ends and the central section between them.

As described above, in each of the above embodiments, the coating apparatus 1 corresponds to the "substrate processing apparatus" of the present invention. Furthermore, the first flat surface 711a of the first main body portion 711 and the second flat surface 712a of the second main body portion 712 correspond to the "flat surface" of the present invention. Also, the shim plate 73 functions as the "spacer member" of the present invention.

Furthermore, the threaded members 716 inserted into multiple through-holes 712e, each arranged in a line along the straight lines L1, L2, and L3 in Figure 3(b), form the "thread row" of the present invention. Of these, the threaded members 716 inserted into the through-holes 712e provided in the end regions R2a and R2b constitute the "narrow-pitch section" of the present invention. On the other hand, the threaded members 716 inserted into the through-holes 712e provided in the central region R2c constitute the "wide-pitch section" of the present invention.

Furthermore, the coating apparatus 1 in the above embodiment corresponds to the "substrate processing apparatus" of the present invention, and the input conveyor 100, input transfer unit 2, floating stage unit 3, output transfer unit 4, output conveyor 110, substrate transport unit 5, etc., together constitute the "relative movement mechanism" of the present invention. Also, the coating liquid supply mechanism 8 functions as the "liquid supply unit" of the present invention.

Furthermore, the present invention is not limited to the embodiments described above, and various modifications can be made without departing from its spirit. For example, in the slit nozzle 71 of the above embodiment, the screw members used to adjust the opening dimensions at the ends of the discharge port 715 and the screw members used to adjust the opening dimensions in the center have different arrangement pitches and arrangement patterns. However, as long as the objective of arranging the screw members more densely at the ends than in the center is achieved, only one of the methods may be applied. Also, while the arrangement patterns of the screw members used in the above embodiment are of two types, "staggered arrangement" and "grid arrangement," the arrangement patterns are not limited to these.

Furthermore, in the slit nozzle 71 of the above embodiment, although the arrangement of the threaded members 716 differs between the end regions R2a and R2b and the central region R2c, the threaded members 716 are arranged at a constant pitch within each region. In the central region R2c, the structure is generally uniform in the longitudinal direction (Y direction) of the discharge port 715, making it necessary to arrange the threaded members 716 at a constant pitch. On the other hand, in the end regions R2a and R2b, the arrangement pitch of the threaded members 716 may be made uneven to allow for finer adjustments according to position. Even with such a configuration, as long as the threaded members 716 are arranged at a narrower pitch than in the central region, it can be said to fall within the scope of the technical concept of the present invention.

Furthermore, in the slit nozzle 71 of the above embodiment, a threaded member 716 is inserted through a through hole 712e provided in the second main body portion 712, and this is screwed into the threaded hole 711e of the first main body portion 711, thereby joining the first and second main body portions. Alternatively, a structure may be used in which bolts, acting as threaded members, are inserted through through holes provided in both main body portions, and nuts are screwed onto these bolts to join the two main body portions.

Furthermore, in the above embodiment, relative movement between the slit nozzle 71 and the substrate S is achieved by transporting the substrate S below the slit nozzle 71. However, the method of achieving this relative movement is not limited to the above. For example, the present invention can also function effectively in a configuration in which the slit nozzle scans and moves relative to a substrate held on a stage. Moreover, the substrate transport method is not limited to the levitation type described above; various methods such as roller transport, belt transport, and transport by a moving stage can be applied.

Furthermore, while the above embodiment applies the present invention to a coating apparatus 1 that supplies a coating liquid to the surface Sf of a substrate S, the application of the present invention is not limited to this. It is applicable to all substrate processing technologies that involve supplying a processing liquid to a slit nozzle, supplying the processing liquid from the slit nozzle to the substrate surface, and performing a predetermined processing while moving the substrate relative to the slit nozzle.

As described above with specific embodiments, in the slit nozzle according to the present invention, the arrangement positions of the screw members in the longitudinal direction between one row of screws and another row of screws adjacent to that row in a direction perpendicular to the longitudinal direction may be the same in the narrow-pitch section and different in the wide-pitch section.

When the tightening amount of one screw member is changed, the surrounding screw members whose tightening amount does not change act to restrict the change in the opening size of the discharge port. Between adjacent screw rows, the range of this restrictive effect changes depending on the arrangement of screw members in the longitudinal direction. That is, when the arrangement of screw members in the longitudinal direction is the same between adjacent screw rows, the effect of suppressing the change in opening size is greater than when the arrangement is different. Therefore, in narrow-pitch sections where fine adjustments are required, it is effective to differ the arrangement of screw members in the longitudinal direction between rows. On the other hand, in wide-pitch sections where fine adjustments are not necessarily required, it is preferable for work efficiency if the adjustment result of a single screw member extends over a wide area. For this reason, it is preferable to differ the arrangement position of screw members between adjacent screw rows.

Furthermore, for similar reasons, by arranging the screw members at a constant spacing in the wide-pitch section, it becomes possible to efficiently perform adjustment work to ensure uniform discharge volume along the longitudinal direction.

Furthermore, in this invention, the number of screw rows can be two or three. When there are two screw rows, the opening size of the discharge port can be changed by increasing or decreasing the relative difference in tightening amount between the screw members belonging to one screw row and those belonging to the other screw row. The same applies when there are three screw rows; however, in this case, for example, the tightening amount of the screw members belonging to the central screw row can be fixed, while the screw members belonging to the other two rows can be adjusted. This allows for efficient fine-tuning of the opening size.

Furthermore, for example, the slit nozzle according to the present invention may have a structure in which one of the first and second main body portions is provided with a through hole for inserting each of the screw members, and a screw hole is provided at a position corresponding to the through hole of the other portion, for screwing in the screw member inserted through the through hole. In this configuration, the first and second main body portions can be joined by attaching the screw member from one direction, and the opening dimensions can also be adjusted by working from the same direction.

Furthermore, for example, a thin plate-shaped spacer member may be provided, which is sandwiched between the first and second main body portions to close the gap around the flow path other than the discharge port and to define the size of the gap. Even in such a structure, it is possible to adjust the opening dimensions by increasing or decreasing the tightening amount of the screw member connecting the first and second main body portions with the spacer member in between.

Furthermore, for example, when multiple discharge ports are provided at different positions along the longitudinal direction, it is desirable to provide both a narrow-pitch section and a wide-pitch section for each discharge port. This allows for efficient adjustment of the opening dimensions to ensure a uniform discharge volume for each port.

Furthermore, the substrate processing apparatus according to the present invention may form a uniform coating film on the surface of the substrate using a processing liquid. When forming a uniform coating film using a slit nozzle, the discharge volume may differ between the center and the edges of the nozzle's discharge port, resulting in variations in the thickness of the coating film. By applying the present invention to such an apparatus, it becomes possible to efficiently perform adjustment work to form a uniform coating film across the entire discharge port.

This invention is applicable to slit nozzles having a slit-shaped discharge port and to substrate processing apparatuses in general that use such slit nozzles to apply liquid to substrates.

1. Coating apparatus (substrate processing apparatus)
2. Input transfer unit (relative movement mechanism)
3. Levitation Stage Section (Relative Movement Mechanism)
4. Output transfer unit (relative movement mechanism)
5. Substrate transport section (relative movement mechanism)
8. Coating liquid supply mechanism (processing liquid supply unit)
71 Slit nozzle 73A Shim plate (spacer member)
100 Input conveyor (relative movement mechanism)
110 Output conveyor (relative movement mechanism)
711 First main body part 711a First flat surface (flat surface)
711e Screw hole 712 Second main body 712a Second flat surface (flat surface)
712e Through hole 715 Discharge port 716 Screw member S Substrate

Claims (8)

A slit nozzle having a discharge port that opens in a slit shape and a fluid flow path communicating therewith,
A first main body and a second main body each have flat surfaces facing each other across a gap, and the gap forms the flow path and the discharge port,
It comprises a plurality of screw members connecting the first main body and the second main body,
The plurality of screw members are arranged such that, between a position corresponding to one end of the discharge port in the longitudinal direction and a position corresponding to the other end, a plurality of screw rows consisting of the plurality of screw members arranged along the longitudinal direction are formed in a direction perpendicular to the longitudinal direction.
Each of the aforementioned screw rows has:
A narrow-pitch section is formed in which a predetermined number of the screw members are arranged at a small spacing from both ends of the aforementioned screw row,
In the screw row, there is a wide-pitch section in which the screw members are arranged inside the narrow-pitch section and at a larger arrangement pitch than the arrangement pitch in the narrow-pitch section.
A slit nozzle in which, between one row of screws and another row of screws adjacent to it in a direction perpendicular to the longitudinal direction, the arrangement positions of the screw members in the longitudinal direction are the same in the narrow-pitch section and different in the wide-pitch section. The slit nozzle according to claim 1 , wherein in the wide-pitch section, the screw members are arranged at a constant spacing. The slit nozzle according to claim 1 or 2 , wherein the plurality of screw rows are provided in two or three rows. A slit nozzle according to any one of claims 1 to 3, wherein one of the first main body portion and the second main body portion is provided with a through hole for inserting each of the screw members, and a screw hole is provided in the other portion at a position corresponding to the through hole for screwing with the screw member inserted through the through hole. A slit nozzle according to any one of claims 1 to 4, comprising a thin plate-shaped spacer member that is sandwiched between the first main body and the second main body to close the gap around the flow path other than the discharge port and to define the size of the gap. A slit nozzle having a discharge port that opens in a slit shape and a fluid flow path communicating therewith,
A first main body and a second main body each have flat surfaces facing each other across a gap, and the gap forms the flow path and the discharge port,
It comprises a plurality of screw members connecting the first main body and the second main body,
The plurality of screw members are arranged such that, between a position corresponding to one end of the discharge port in the longitudinal direction and a position corresponding to the other end, a plurality of screw rows consisting of the plurality of screw members arranged along the longitudinal direction are formed in a direction perpendicular to the longitudinal direction.
Each of the aforementioned screw rows has:
A narrow-pitch section is formed in which a predetermined number of the screw members are arranged at a small spacing from both ends of the aforementioned screw row,
In the screw row, there is a wide-pitch section in which the screw members are arranged inside the narrow-pitch section and at a larger arrangement pitch than the arrangement pitch in the narrow-pitch section.
A slit nozzle having a plurality of discharge ports arranged at different positions in the longitudinal direction, and each of the discharge ports being provided with a narrow-pitch portion and a wide-pitch portion. A slit nozzle according to any one of claims 1 to 6 ,
The substrate is positioned opposite the discharge port of the slit nozzle, and a relative movement mechanism moves the slit nozzle and the substrate relative to each other in a direction intersecting the longitudinal direction.
A substrate processing apparatus comprising a liquid supply unit that supplies liquid to the slit nozzle, and the liquid discharged from the discharge port is applied to the surface of the substrate. The substrate processing apparatus according to claim 7 , which forms a uniform coating film with the liquid on the surface of the substrate.