JPS53144099A - Wafer chucking jtg - Google Patents
Wafer chucking jtgInfo
- Publication number
- JPS53144099A JPS53144099A JP5867577A JP5867577A JPS53144099A JP S53144099 A JPS53144099 A JP S53144099A JP 5867577 A JP5867577 A JP 5867577A JP 5867577 A JP5867577 A JP 5867577A JP S53144099 A JPS53144099 A JP S53144099A
- Authority
- JP
- Japan
- Prior art keywords
- jtg
- wafer chucking
- chucking
- wafer
- chucking jtg
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5867577A JPS53144099A (en) | 1977-05-23 | 1977-05-23 | Wafer chucking jtg |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5867577A JPS53144099A (en) | 1977-05-23 | 1977-05-23 | Wafer chucking jtg |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53144099A true JPS53144099A (en) | 1978-12-15 |
| JPS5547451B2 JPS5547451B2 (en) | 1980-11-29 |
Family
ID=13091144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5867577A Granted JPS53144099A (en) | 1977-05-23 | 1977-05-23 | Wafer chucking jtg |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53144099A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58118745U (en) * | 1982-02-04 | 1983-08-13 | 日本電子株式会社 | semiconductor wafer holder |
| JPS59229835A (en) * | 1983-05-13 | 1984-12-24 | Rohm Co Ltd | Wafer holding jig |
| JPS637204A (en) * | 1986-05-16 | 1988-01-13 | シリコン・バレ−・グル−プ・インコ−ポレイテツド | Balancing mechanism for movable jaw chuck of spin station |
| JPH0350050U (en) * | 1989-09-25 | 1991-05-15 |
-
1977
- 1977-05-23 JP JP5867577A patent/JPS53144099A/en active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58118745U (en) * | 1982-02-04 | 1983-08-13 | 日本電子株式会社 | semiconductor wafer holder |
| JPS59229835A (en) * | 1983-05-13 | 1984-12-24 | Rohm Co Ltd | Wafer holding jig |
| JPS637204A (en) * | 1986-05-16 | 1988-01-13 | シリコン・バレ−・グル−プ・インコ−ポレイテツド | Balancing mechanism for movable jaw chuck of spin station |
| JPH0350050U (en) * | 1989-09-25 | 1991-05-15 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5547451B2 (en) | 1980-11-29 |
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