JPS5547451B2 - - Google Patents

Info

Publication number: JPS5547451B2
Authority: JP; Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP5867577A

Other languages

Japanese (ja)

Other versions

JPS53144099A (en

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1977-05-23

Filing date

1977-05-23

Publication date

1980-11-29

1977-05-23 Application filed filed Critical

1977-05-23 Priority to JP5867577A priority Critical patent/JPS53144099A/en

1978-12-15 Publication of JPS53144099A publication Critical patent/JPS53144099A/en

1980-11-29 Publication of JPS5547451B2 publication Critical patent/JPS5547451B2/ja

Status Granted legal-status Critical Current

Links

Landscapes

Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Physical Vapour Deposition (AREA)
Electrodes Of Semiconductors (AREA)

JP5867577A 1977-05-23 1977-05-23 Wafer chucking jtg Granted JPS53144099A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP5867577A JPS53144099A (en)	1977-05-23	1977-05-23	Wafer chucking jtg

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP5867577A JPS53144099A (en)	1977-05-23	1977-05-23	Wafer chucking jtg

Publications (2)

Publication Number	Publication Date
JPS53144099A JPS53144099A (en)	1978-12-15
JPS5547451B2 true JPS5547451B2 (en)	1980-11-29

Family

ID=13091144

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP5867577A Granted JPS53144099A (en)	1977-05-23	1977-05-23	Wafer chucking jtg

Country Status (1)

Country	Link
JP (1)	JPS53144099A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS58118745U (en) *	1982-02-04	1983-08-13	日本電子株式会社	semiconductor wafer holder
JPS59229835A (en) *	1983-05-13	1984-12-24	Rohm Co Ltd	Wafer holding jig
US4700595A (en) *	1986-05-16	1987-10-20	Silicon Valley Group, Inc.	Balance mechanism for movable jaw chuck of a spin station
JPH0523570Y2 (en) *	1989-09-25	1993-06-16

1977
- 1977-05-23 JP JP5867577A patent/JPS53144099A/en active Granted

Also Published As

Publication number	Publication date
JPS53144099A (en)	1978-12-15

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