JPS5337195B2 - - Google Patents
Info
- Publication number
- JPS5337195B2 JPS5337195B2 JP12576474A JP12576474A JPS5337195B2 JP S5337195 B2 JPS5337195 B2 JP S5337195B2 JP 12576474 A JP12576474 A JP 12576474A JP 12576474 A JP12576474 A JP 12576474A JP S5337195 B2 JPS5337195 B2 JP S5337195B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measurement Of Resistance Or Impedance (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12576474A JPS5337195B2 (en) | 1974-10-31 | 1974-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12576474A JPS5337195B2 (en) | 1974-10-31 | 1974-10-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5151284A JPS5151284A (en) | 1976-05-06 |
| JPS5337195B2 true JPS5337195B2 (en) | 1978-10-06 |
Family
ID=14918233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12576474A Expired JPS5337195B2 (en) | 1974-10-31 | 1974-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5337195B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5941303B2 (en) * | 1980-07-24 | 1984-10-05 | 工業技術院長 | Method for measuring deep impurity levels in semiconductors |
-
1974
- 1974-10-31 JP JP12576474A patent/JPS5337195B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5151284A (en) | 1976-05-06 |