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JPS5820146B2 - hand warmer - Google Patents
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JPS5820146B2 - hand warmer - Google Patents

hand warmer

Info

Publication number
JPS5820146B2
JPS5820146B2 JP50142894A JP14289475A JPS5820146B2 JP S5820146 B2 JPS5820146 B2 JP S5820146B2 JP 50142894 A JP50142894 A JP 50142894A JP 14289475 A JP14289475 A JP 14289475A JP S5820146 B2 JPS5820146 B2 JP S5820146B2
Authority
JP
Japan
Prior art keywords
output line
circuit
input
memory
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP50142894A
Other languages
Japanese (ja)
Other versions
JPS5267529A (en
Inventor
落井清文
鈴木八十二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP50142894A priority Critical patent/JPS5820146B2/en
Publication of JPS5267529A publication Critical patent/JPS5267529A/en
Publication of JPS5820146B2 publication Critical patent/JPS5820146B2/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/34Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
    • G11C11/40Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
    • G11C11/41Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming static cells with positive feedback, i.e. cells not needing refreshing or charge regeneration, e.g. bistable multivibrator or Schmitt trigger
    • G11C11/412Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming static cells with positive feedback, i.e. cells not needing refreshing or charge regeneration, e.g. bistable multivibrator or Schmitt trigger using field-effect transistors only

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)

Description

【発明の詳細な説明】 本発明は絶縁ゲート形電界効果トランジスタ(In5u
lated Gate F 1eld Effect
Transistor略してIG−FETと称す)を用
いた半導体記憶回路に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an insulated gate field effect transistor (In5u
rated Gate F 1eld Effect
The present invention relates to a semiconductor memory circuit using a transistor (abbreviated as IG-FET).

一般に、Pチャネル形IG−FET及びNチャネル形I
(、−FETを同一半導体基板上に作成しだ相補形メモ
リ回路は、ダイナミック形とスタティック形があるが、
相補形回路の特徴である低消費電力性能を効かずだめに
スタティック形のメモリが主流を占めている。
Generally, P-channel type IG-FET and N-channel type IG-FET
(, -FETs are fabricated on the same semiconductor substrate.Complementary memory circuits include dynamic and static types.
Static memory is now the mainstream, as it lacks the low power consumption performance that is a feature of complementary circuits.

ところで相補形回路は低消費電力である反面、スイッチ
ング特性的にはPチャネルのみの回路、或いはNチャネ
ルのみの回路に比して低速動作になる場合が多く、特に
電算機メモリのような高速動作を要求されるものには適
用が困難である。
By the way, although complementary circuits have low power consumption, their switching characteristics often operate at lower speeds than P-channel only circuits or N-channel only circuits, especially in high-speed operation such as computer memory. It is difficult to apply this method to applications that require

スタティック形メモリのアクセスタイムtAccは各回
路ブロックの伝播遅延の総和となり、一般的に次式で表
わすことができる。
The access time tAcc of a static memory is the sum of the propagation delays of each circuit block, and can generally be expressed by the following equation.

tAcc =A t 十Ct +S を十θt・・・・
・・・・・(1)この(1)式においてAtはアドレス
及びアドレスデコーダ回路での遅延時間、Ctはメモリ
セルが共通入出力線にデータを読み出すだめの読み出し
時間、Stは共通入出力線に読み出された情報を検知す
るセンス回路の感度に依存する時間、θtは出力コント
ロール部及び出力ドライバー回路での遅延時間である。
tAcc =A t 10Ct +S 10θt...
...(1) In this formula (1), At is the delay time in the address and address decoder circuit, Ct is the read time for the memory cell to read data to the common input/output line, and St is the common input/output line The time θt that depends on the sensitivity of the sense circuit that detects the information read out is the delay time in the output control section and the output driver circuit.

一方、絶縁ゲート形半導体集積回路の主要な製造技術と
して、そのゲート電極にポリシリコンを用いるシリコン
ゲート技術とゲート電極にアルミを用いるアルミゲート
技術の2つがある。
On the other hand, there are two main manufacturing technologies for insulated gate type semiconductor integrated circuits: silicon gate technology using polysilicon for the gate electrode and aluminum gate technology using aluminum for the gate electrode.

これらをパターン設計的に見れば、前者の技術の方がポ
リシリコン層が加わるため、後者の技術に比して、配線
の自由度が一層付は加わったことにより効率の良い、高
速動作に適したパターン設計が可能である。
If you look at these from a pattern design perspective, the former technology is better suited for efficient high-speed operation due to the addition of a polysilicon layer, which provides more flexibility in wiring than the latter technology. It is possible to design various patterns.

しかしながらシリコンゲート構造は概して複雑で工程も
多く歩留り、コスト的にアルミゲート構造をとる方が有
利になる場合も多い。
However, silicon gate structures are generally complex, require many steps, and have a high yield, and it is often more advantageous to adopt an aluminum gate structure in terms of cost.

第1図はメモリセル群のマトリクスの一例である。FIG. 1 is an example of a matrix of memory cell groups.

図において1は行(アドレス)デコーダとドライバー回
路、2は行デコーダ出力線、3は入出力線(データバス
)、4はメモリセル、5は■10(入出力)コントロー
次部とセンスアンプ回路、6は列デコーダとドライバー
回路である。
In the figure, 1 is a row (address) decoder and driver circuit, 2 is a row decoder output line, 3 is an input/output line (data bus), 4 is a memory cell, 5 is ■10 (input/output) controller and sense amplifier circuit , 6 are column decoders and driver circuits.

第2図は上記第1図の1メモリセル部のパターン平面図
で、ハツチングが施こされている部分がアルミ配線部で
ある。
FIG. 2 is a pattern plan view of one memory cell portion shown in FIG. 1, and the hatched portion is the aluminum wiring portion.

図において3□は入出力線、3□はこの入出力線と補元
関係にある入出力線で、これら入出力線31,3□は不
純物拡散層で形成されている。
In the figure, 3□ is an input/output line, 3□ is an input/output line that has a complementary relationship with this input/output line, and these input/output lines 31 and 3□ are formed of impurity diffusion layers.

点線部7は上記メモリセル4のIG−FET、8,9ハ
電源電圧vDD”SS供給線、10は配線のコンタクト
部分である。
The dotted line portion 7 is the IG-FET of the memory cell 4, 8 and 9 are the power supply voltage vDD"SS supply lines, and 10 is the contact portion of the wiring.

第3図は上記第2図に対応する回路図を示している。FIG. 3 shows a circuit diagram corresponding to FIG. 2 above.

即ち上記メモリ回路は、行デコーダ出力線2と入出力線
3がマトリックス状に交差し合い、具体的には更に電源
供給線8,9が加わっている。
That is, in the above memory circuit, row decoder output lines 2 and input/output lines 3 intersect with each other in a matrix shape, and specifically, power supply lines 8 and 9 are further added.

この回路をアルミゲート構造でパターン配置する際、従
来の相補形メモリ回路でとられている方法は、第2図に
示すように各行のメモリセルにゲート入力として入る行
デコーダ出力線はアルミで、またそれらと直交する入出
力線は拡散(P+或いはN+)層で配線するやり方で、
このようなパターン・レイアウトのときがコンタクト穴
の数が少なく、また集積度も上がるという利点がある。
When patterning this circuit with an aluminum gate structure, the method used in conventional complementary memory circuits is that the row decoder output lines that enter the memory cells of each row as gate inputs are made of aluminum, as shown in FIG. Also, the input/output lines perpendicular to these are wired in a diffusion (P+ or N+) layer.
Such a pattern layout has the advantage of reducing the number of contact holes and increasing the degree of integration.

ところが動作の高速化という見地から見れば問題が多く
、メモリセルがそのままドライバーとなる入出力線に多
大な抵抗・容量が付随し、前記(1)式のCtが犬とな
り、回路の高速動作化には限度があった。
However, from the standpoint of speeding up the operation, there are many problems, as the input/output line where the memory cell serves as a driver has a large amount of resistance and capacitance, and Ct in equation (1) becomes a dog, making it difficult to increase the speed of the circuit. had a limit.

本発明は上記実情に鑑みてなされたもので、従来のパタ
ーン配置のものと同等の集積度を保持しつつ、高速動作
が期待できる半導体記憶回路を提供しようとするもので
ある。
The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a semiconductor memory circuit that can be expected to operate at high speed while maintaining the same degree of integration as that of a conventional pattern arrangement.

以下第4図を参照して本発明の一実施例を説明する。An embodiment of the present invention will be described below with reference to FIG.

本回路の特徴は、入出力線(データバス)は完全にアル
ミで配線し、行(アドレス)デコーダ出力線は不純物拡
散層で形成したことである。
The features of this circuit are that the input/output lines (data bus) are wired entirely with aluminum, and the row (address) decoder output lines are formed with an impurity diffusion layer.

第4図は半導体基板上に形成された本回路のメモリセル
部のパターン平面図で、第2図の部分に相当している。
FIG. 4 is a pattern plan view of a memory cell portion of this circuit formed on a semiconductor substrate, and corresponds to the portion shown in FIG. 2.

従って第4図を回路図化すれば第3図と同等になる。Therefore, if FIG. 4 is converted into a circuit diagram, it will be equivalent to FIG. 3.

またハツチングを施こした部分がアルミ配線を示してい
ることは第2図の場合と同じである。
Also, as in the case of FIG. 2, the hatched portion indicates aluminum wiring.

第4図において21は拡散で形成されたアドレスデコー
ダ出力線、221は入出力線、222はこの入出力線と
補元関係にある入出力線である。
In FIG. 4, 21 is an address decoder output line formed by diffusion, 221 is an input/output line, and 222 is an input/output line having a complementary relationship with this input/output line.

点線で囲った部分23は相補形回路を構成するPチャネ
ルまたはNチャネル形IG−FET、24,25ハ電源
電圧■DD、vS8(接地供給線、26は配線のコンタ
クト部分である。
A portion 23 surrounded by a dotted line is a P-channel or N-channel IG-FET constituting a complementary circuit;

上記第4図を見て分ることは次のとおりである3即ち第
2図の従来例では入出力線を拡散で、またデコーダ出力
線をアルミで形成する構成であるため、入出力線の抵抗
・容量が増大する。
What can be seen from Figure 4 above is as follows.3 That is, in the conventional example shown in Figure 2, the input/output lines are diffused and the decoder output lines are made of aluminum. Resistance and capacitance increase.

従ってメモリセルがドライバーとなってデータを入出力
線に読み出す構成となり、高速化をはかるだめには、例
えばIKビットのRAM(ランダム・アクセス・メモリ
)では1024個のメモリセルの面積を太きくしなけれ
ばならない。
Therefore, the memory cells act as drivers to read data to the input/output lines, and in order to increase speed, for example, in an IK-bit RAM (random access memory), the area of 1024 memory cells must be increased. Must be.

これに対し第4図の場合には、ドライバーとしては比較
的大きくとれる行デコーダ出力線が拡散ラインのドライ
バーと々っている。
On the other hand, in the case of FIG. 4, the row decoder output line, which can be relatively large as a driver, is the driver of the diffusion line.

即ちこの場合の動作スピードは行デコーダに依存するか
ら、該デコーダの32本の行デコーダ出力線に対応する
32個のFETのみを大形化すればよい。
That is, since the operating speed in this case depends on the row decoder, it is only necessary to increase the size of 32 FETs corresponding to the 32 row decoder output lines of the decoder.

このように本回路は上記従来例のものよりパターン面積
が小となり、換言すれば本回路と従来例とを同一パター
ン面積とすれば本回路の方が前記(1)式のCtを小に
でき、高速動作が可能となるものである。
In this way, the pattern area of this circuit is smaller than that of the conventional example described above.In other words, if this circuit and the conventional example are made to have the same pattern area, the Ct of the above equation (1) can be made smaller in this circuit. , which enables high-speed operation.

なお、上記実施例では電源供給線24.25は完全にア
ルミで配線され、充分な電流の供給を保証しているが、
相補形回路の利点である低電力性ゆえにわずかな電流供
給でよい場合には、例えば電源供給線のアルミを省略し
、拡散或いは半導体基板から電位をとるようなパターン
設計への変更は容易であり、この場合には集積度が更に
向上するものである。
Note that in the above embodiment, the power supply lines 24 and 25 are completely wired with aluminum to ensure the supply of sufficient current;
If only a small amount of current is required due to the low power consumption, which is an advantage of complementary circuits, it is easy to change the pattern design, for example, by omitting aluminum in the power supply line and taking the potential from the diffusion or semiconductor substrate. In this case, the degree of integration is further improved.

また本発明は上記実施例に限られず、第5図に示す如く
7個のIG−FETを用い、入出力線221 を入力専
用線として用いる等種々の変形が可能である。
Further, the present invention is not limited to the above-described embodiment, and various modifications can be made, such as using seven IG-FETs and using the input/output line 221 as an input-only line as shown in FIG.

以上説明した如く本発明によれば、アドレスデコーダ出
力線をアルミ化し、データバスを拡散で形成したので、
パターン面積が小でかつ高速動作が可能な半導体記憶回
路が提供できるものである。
As explained above, according to the present invention, the address decoder output line is made of aluminum and the data bus is formed by diffusion.
A semiconductor memory circuit with a small pattern area and capable of high-speed operation can be provided.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はメモリ回路の全体的構成図、第2図は従来のメ
モリセル部のパターン配置図、第3図は同回路図、第4
図は本発明の一実施例のメモリセル部のパターン配置図
、第5図はその変形例のパターン配置図である。 21・・・アドレスデコーダ出力線、22□、222・
・・データバス、23・I C,−FET。
Fig. 1 is an overall configuration diagram of a memory circuit, Fig. 2 is a pattern layout diagram of a conventional memory cell section, Fig. 3 is a circuit diagram of the same, and Fig. 4
The figure is a pattern layout diagram of a memory cell portion according to an embodiment of the present invention, and FIG. 5 is a pattern layout diagram of a modification thereof. 21...Address decoder output line, 22□, 222.
...Data bus, 23.IC, -FET.

Claims (1)

【特許請求の範囲】[Claims] 1 記憶セルをP及びNチャネル形IG−FETで形成
しアドレスデコーダで該デコーダの出力線を選択し、該
出力線と交差するデータバスにデータを読み出す半導体
記憶回路において、前記アドレスデコーダ出力線を不純
物拡散層で形成し、前記データバスをアルミ配線で形成
したことを特徴とする半導体記憶回路。
1. In a semiconductor memory circuit in which memory cells are formed of P- and N-channel type IG-FETs, an address decoder selects an output line of the decoder, and data is read out to a data bus intersecting the output line, the address decoder output line is 1. A semiconductor memory circuit characterized in that the data bus is formed of an impurity diffusion layer and the data bus is formed of aluminum wiring.
JP50142894A 1975-12-03 1975-12-03 hand warmer Expired JPS5820146B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50142894A JPS5820146B2 (en) 1975-12-03 1975-12-03 hand warmer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50142894A JPS5820146B2 (en) 1975-12-03 1975-12-03 hand warmer

Publications (2)

Publication Number Publication Date
JPS5267529A JPS5267529A (en) 1977-06-04
JPS5820146B2 true JPS5820146B2 (en) 1983-04-21

Family

ID=15326061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50142894A Expired JPS5820146B2 (en) 1975-12-03 1975-12-03 hand warmer

Country Status (1)

Country Link
JP (1) JPS5820146B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106014962A (en) * 2016-05-26 2016-10-12 佛山市威灵洗涤电机制造有限公司 Valve seat for booster pump and boosting valve with valve seat

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60109267A (en) * 1983-11-17 1985-06-14 Fujitsu Ltd Statistic RAM

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106014962A (en) * 2016-05-26 2016-10-12 佛山市威灵洗涤电机制造有限公司 Valve seat for booster pump and boosting valve with valve seat

Also Published As

Publication number Publication date
JPS5267529A (en) 1977-06-04

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