JPS5823933B2 - Support device for spool for supplying fine metal wire - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a spool support device for supplying thin metal wires for connection necessary in the manufacturing process of semiconductor devices.

A thin metal wire made of gold, aluminum, or the like is used for electrical connection between an electrode on a semiconductor chip of a semiconductor device and a package.

These thin metal wires are usually wound in multiple layers around a spool 1 as shown in FIG.

The material of this spool is usually aluminum light alloy, and in the figure, 2 is the winding body, 3 is the flanges at both ends, and 4 is a through hole for a support shaft provided in the center.

FIG. 2 is a diagram showing the spool 1 fitted onto the support shaft 6, and shows the state in which the thin metal wire 5 is wound.

In this state, the thin metal wire is pulled out as necessary, guided through the capillary to the required connection point, and the desired connection is made by a connection force method such as thermocompression bonding or ultrasonic bonding.

The thin metal wire 5 used for these connections has a diameter of 10 to 20 μm if it is extremely thin.

Therefore, the unraveling force of the thin metal wire, the pull-out resistance between the spool and the support shaft, etc. act delicately, and accidents frequently occur in which the thin metal wire breaks during work.

In order to reduce these accidents, spool support devices such as those shown in FIG. 3A, B, C, and D have been devised.

Fig. 3A shows the spool 1 fitted into the grooved support shaft 7, and Fig. 3B shows the spool 1 with multiple grooves 8 formed on the inner wall of the through hole 4 of the spool 1. Reference numeral C denotes a support shaft 9 with a smaller portion inserted into the through hole 4, and in both cases, the contact area between the spool 1 and the support shaft is minimized to reduce frictional resistance.

Japanese Patent Publication No. 43-7367 is known as a method for significantly reducing frictional resistance by supporting the one-tooth spool without contact.

This is to eject pressurized gas 10 from the small hole 12 of the support shaft 11 as shown in the third diagram, thereby reducing frictional resistance by making the spool and the support shaft non-contact.

With this method, the side slip of the spool is large and the spool 1
contact with the stoppers 13a, 13b, and the above-mentioned disconnection accident often occurs, significantly impairing work efficiency.

(The support shaft 11 and the stopper 13b are of a removable type such as a screw type.

) This invention relates to a support device having a spool side-slip prevention mechanism in order to eliminate such wire breakage accidents of thin metal wires.

DESCRIPTION OF THE PREFERRED EMBODIMENTS The supporting device for a thin metal wire supply spool according to the present invention will be explained in more detail below with reference to the drawings.

FIG. 4A shows a state in which the spool 1 is fitted into the support shaft 14 of the spool for supplying fine metal wire according to the present invention, and is partially shown in cross section.

The support shaft 14 is provided with a hole 15 for preventing side slip, and a pressurized gas 1 is provided.
The spool 1 is held in a predetermined position in a non-contact state by spraying zero onto the flanges 3 on both sides of the spool 1.

In addition, FIG. 4B shows stopper structures 16a and 16 on the support shaft 14.
b, from which the pressurized gas 10 of the collar 3 of the spool 1 is blown.

In this case, the stopper structure 16b and the shaft 14 need to be detachable.

In FIG. 4C, the same number of diagonal holes 18 are provided on the support shaft 14 symmetrically with respect to the center line 17 perpendicular to the through hole 4 of the spool 1, and the oblique holes 18 are inclined toward the center line 17.

This diagonal hole 18 functions to float the spool 1 from the support shaft 14 and to prevent the spool 1 from sliding sideways.

If an inert gas such as N2 gas is used as the pressurized gas here, it can also be used to prevent oxidation of the thin metal wire.

As described above, according to this invention, the spool can be held in a completely non-contact state with respect to the spindle and without slipping sideways, so there is no accident of breakage of the fine metal wire caused by the spool coming into contact with the spindle, and work efficiency is improved. can be significantly increased.

[Brief explanation of drawings]

Figure 1 is an external view of the spool, Figures 2 and 3 ABCD
is a cross-sectional view showing the conventional support shaft and spool holding state;
Figures ABC are cross-sectional structural views of a support shaft provided with a spool side-slip prevention mechanism according to the present invention. In the figure, 1 is a spool, 2 is a winding drum, 3 is a collar, 4 is a through hole, 5 is a thin metal wire, 6, 7, 9, 11° 14 is a spindle,
10 is a pressure gas, 12 is a small hole, and 13a. 13b, 16a, 16b are stoppers, 15 is a small hole for preventing side slipping, 17 is a center line perpendicular to the through hole of the spool,
18 is a small hole for levitation and side slip prevention. Note that the same reference numerals in the figures indicate the same or corresponding parts.

Claims (1)

[Scope of Claims] 1. A spool having a through hole in the center of the winding drum, a spool with a thin metal wire wound around the winding drum, a support shaft passing through the through hole, and a shaft that connects to the spool when the thin metal wire is unwound. A support device for a thin metal wire supply spool, comprising a holding means for maintaining the spindle at a predetermined position in a non-contact state, and further comprising a non-contact tank slip prevention mechanism. 2. A thin metal wire supply device according to claim 1, wherein the spool is maintained in a predetermined position by blowing pressure gas ejected from a small hole in the spindle onto the flange of the spool as a non-contact tank slip prevention mechanism. Spool support device. 3. Claim 2, characterized in that the support shaft has a small hole for a stopper, and pressurized gas is blown from the small hole onto the flange of the spool to keep the spool in a predetermined position. A supporting device for the metal thin wire supply spool described above.