JPS5848507B2 - Manufacturing method of silicon nitride molded body - Google Patents
Manufacturing method of silicon nitride molded bodyInfo
- Publication number
- JPS5848507B2 JPS5848507B2 JP51053526A JP5352676A JPS5848507B2 JP S5848507 B2 JPS5848507 B2 JP S5848507B2 JP 51053526 A JP51053526 A JP 51053526A JP 5352676 A JP5352676 A JP 5352676A JP S5848507 B2 JPS5848507 B2 JP S5848507B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon nitride
- powder
- dispersion medium
- molded body
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052581 Si3N4 Inorganic materials 0.000 title claims description 20
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims description 20
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000002612 dispersion medium Substances 0.000 claims description 19
- 239000000843 powder Substances 0.000 claims description 19
- 229910052710 silicon Inorganic materials 0.000 claims description 16
- 239000010703 silicon Substances 0.000 claims description 16
- 239000002245 particle Substances 0.000 claims description 12
- 239000011163 secondary particle Substances 0.000 claims description 9
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000000465 moulding Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 20
- 238000005245 sintering Methods 0.000 description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 15
- 238000005121 nitriding Methods 0.000 description 12
- 239000011230 binding agent Substances 0.000 description 10
- 238000005452 bending Methods 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 239000002994 raw material Substances 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 4
- 239000011164 primary particle Substances 0.000 description 4
- 238000010298 pulverizing process Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 238000007493 shaping process Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000004570 mortar (masonry) Substances 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229920002134 Carboxymethyl cellulose Polymers 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 239000001768 carboxy methyl cellulose Substances 0.000 description 1
- 235000010948 carboxy methyl cellulose Nutrition 0.000 description 1
- 239000008112 carboxymethyl-cellulose Substances 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000005056 compaction Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- SHXXPRJOPFJRHA-UHFFFAOYSA-K iron(iii) fluoride Chemical compound F[Fe](F)F SHXXPRJOPFJRHA-UHFFFAOYSA-K 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 229920000609 methyl cellulose Polymers 0.000 description 1
- 239000001923 methylcellulose Substances 0.000 description 1
- 235000010981 methylcellulose Nutrition 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 230000007096 poisonous effect Effects 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Description
【発明の詳細な説明】
本発明は窒化珪素を主或分とする成形体の製造方法に関
する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for producing a molded article mainly containing silicon nitride.
窒化珪素は、高い耐熱性、小さな熱膨張率、大きな強度
、従って耐熱衝撃性に優れること、また高硬度で耐磨耗
性に優れること、さらに溶融金属にぬれにくく耐食性に
優れることなどの数多くの特徴を有しており、近年脚光
を浴びている新材料の一つである。Silicon nitride has many advantages such as high heat resistance, low coefficient of thermal expansion, high strength, and therefore excellent thermal shock resistance, high hardness and excellent wear resistance, and not being wetted by molten metal and excellent corrosion resistance. It is one of the new materials that has been in the spotlight in recent years due to its unique characteristics.
しかし、窒化珪素は焼結性が乏しいがために、優れた性
質を有する戊形体が容易に入手しえないのが実状である
。However, since silicon nitride has poor sinterability, the reality is that a rod-shaped body with excellent properties is not easily available.
窒化珪素成形体の製造方法としでは、ホットプレス法と
反応焼結法(または窒化焼結法)等が知られている。As a method for manufacturing a silicon nitride molded body, a hot pressing method, a reaction sintering method (or a nitriding sintering method), and the like are known.
ホットプレス法による場合、得られる窒化珪素戒形品は
緻密で、窒化珪素本来の特性に近い性質を有する利点が
あるが、形状的には円柱、角柱などの極めて単純なもの
しか得られず、形状の複雑な戒形体を得ようとする時は
、これらの大きなブロックからダイヤモンド研削等の機
械的な加工に依るために高価格となる欠点を有している
。When using the hot press method, the silicon nitride molded product obtained is dense and has the advantage of having properties close to the original characteristics of silicon nitride, but in terms of shape, only extremely simple shapes such as cylinders and prisms can be obtained. When trying to obtain a complex shaped body, mechanical processing such as diamond grinding is required from these large blocks, which has the disadvantage of being expensive.
反応焼結法では、金属珪素ないし金属珪素と窒化珪素の
混合粉末より加圧戒形、押出或形、射出戒形、鋳込戒形
などの方法で、予め戒形体の形状を付与した後に、窒素
雰囲気中で加熱することにより窒化珪素成形体が得られ
る。In the reaction sintering method, the shape of the shaped body is given in advance from metallic silicon or a mixed powder of metallic silicon and silicon nitride by methods such as pressure shaping, extrusion, injection shaping, and casting shaping. A silicon nitride molded body is obtained by heating in a nitrogen atmosphere.
従って、この方法はかなり形状の複雑な形状の戒形体が
、比較的容易にしかも多量に得られるという利点がある
が、窒化焼結時に於いては、寸法収縮がほとんどなく、
このために反応焼結法で得られる成形体の見掛密度は、
圧粉体の見掛密度により限定され、緻密な窒化珪素成形
体を得にくいという欠点がある。Therefore, this method has the advantage that it is relatively easy to obtain a large amount of shaped bodies with quite complex shapes, but there is almost no dimensional shrinkage during nitriding sintering.
For this reason, the apparent density of the compact obtained by the reaction sintering method is
There is a drawback that it is limited by the apparent density of the green compact and it is difficult to obtain a dense silicon nitride molded body.
現在、反応焼結法で得られる窒化珪素戒形体は、2.0
〜2.497一の見掛密度で、900〜1400kg/
critの抗折強度のものが一般的であり、このために
用途面でも限られている。Currently, the silicon nitride shaped body obtained by the reaction sintering method is 2.0
~2.4971 apparent density, 900~1400kg/
It is common to have a bending strength of crit, which limits its uses.
本発明の目的は、金属珪素成形体の反応焼結法の経済的
な利点を活かしながら、成形体の性質を改善する製造方
法を提供することにある。An object of the present invention is to provide a manufacturing method that improves the properties of a metal silicon molded body while taking advantage of the economic advantages of the reactive sintering method.
すなわち、反応焼結法により、抗折強度2000kg/
crlt以上の窒化珪素或形体を製造する方法を提供し
ようとするものである。In other words, by using the reaction sintering method, the bending strength is 2000 kg/
It is an object of the present invention to provide a method for manufacturing a silicon nitride shaped body having a silicon nitride shape of Crlt or higher.
反応焼結法においては、高い見掛密度の成形体を得よう
とする時には圧粉体の見掛密度を極力高める必要がある
。In the reaction sintering method, in order to obtain a compact with a high apparent density, it is necessary to increase the apparent density of the green compact as much as possible.
しかし、圧粉体の見掛密度が増加すると、焼結時に窒素
ガスの圧粉体中への浸透が困難となり、窒化反応が容易
に進行せず、焼結スケジュールを長時間にしなければな
らない。However, when the apparent density of the compact increases, it becomes difficult for nitrogen gas to penetrate into the compact during sintering, and the nitriding reaction does not proceed easily, requiring a longer sintering schedule.
さらに、圧粉体の見掛密度の増加は、窒化反応時に発生
する熱の放散を悪くシ、金属珪素の一部が溶融しがちと
なり、この結果均一性を欠いた成形体しか得られないと
いう欠点があった。Furthermore, an increase in the apparent density of the green compact impairs the dissipation of the heat generated during the nitriding reaction, and a portion of the metal silicon tends to melt, resulting in a compact that lacks uniformity. There were drawbacks.
本発明者は、これらの欠点を解決するためいろいろ検討
を重ねた結果、平均粒径5μ以下の微細な金属珪素を主
或分とする粉末を用い、これに適当な分散媒を加えて塊
状としたものを乾燥粉砕して150μ以下の粉末となし
、これを加圧威形し窒化焼結することにより、従来のも
のよりも見掛密度が高く、シかも抗折強度が2000k
g/一以上の窒化珪素威形体が得られる窒化珪素系戊形
体の製造方法を提供しようとするものである。As a result of various studies in order to solve these drawbacks, the inventor of the present invention used a powder mainly composed of fine metallic silicon with an average particle size of 5μ or less, and added an appropriate dispersion medium to it to make it into lumps. By drying and pulverizing the powder into a powder of 150μ or less, pressurizing it and nitriding it, it has a higher apparent density than conventional products and a bending strength of 2000K.
It is an object of the present invention to provide a method for producing a silicon nitride-based hollow body that yields a silicon nitride hollow body having a silicon nitride density of 1 or more.
本発明は、平均粒径が5μ以下の金属珪素を主威分とす
る粉末に、36〜45容量φの分散媒を添加混練して塊
状となし、該塊状品を乾燥、粉砕して粒径150μ以下
の二次粒子粉末とし、次いでこれを加圧威形して得られ
る圧粉体を窒素雰囲気中加熱することを特徴とする。The present invention involves adding and kneading a dispersion medium of 36 to 45 volumes φ to a powder mainly composed of metallic silicon with an average particle size of 5μ or less to form a lump, and drying and pulverizing the lump to obtain a particle size The method is characterized in that it is made into a powder with secondary particles of 150 μm or less, and then the green compact obtained by pressurizing the powder is heated in a nitrogen atmosphere.
以下さらに本発明を詳しく説明する。The present invention will be further explained in detail below.
本発明の原料に用いる金属珪素の粒子径は、窒化反応を
急速に進めるために、また均一な戒形体を得るために、
可能な限り徴細なものであることが望ましい。The particle size of the metallic silicon used as the raw material of the present invention is determined so that the nitriding reaction can proceed rapidly and to obtain a uniform shaped body.
It is desirable to be as detailed as possible.
さらに、微細な金属珪素を原料とすると、その高い反応
性によって、焼結のスγジュールが短縮できるという経
済的効果が大きい。Furthermore, when fine metallic silicon is used as a raw material, its high reactivity allows the sintering time to be shortened, which has a great economical effect.
本発明に用いる金属珪素は、平均粒径が5μ以下に微細
化したものであり、5μをこれると、窒化焼結時に容易
に窒化反応が進行せず、未反応の金属珪素が残存し均一
な戊形体を得ることが困難であり、その結果抗折強度の
高いものが得られない○
なお圧粉体を長時間焼結すればこれらの欠点は当然改善
されるが、経済的ではない。The metallic silicon used in the present invention has an average particle size of 5μ or less, and if the average particle size is less than 5μ, the nitriding reaction does not proceed easily during nitriding sintering, and unreacted metallic silicon remains and is uniform. It is difficult to obtain a rod-shaped body with high flexural strength, and as a result, one with high flexural strength cannot be obtained. Although these drawbacks can be naturally improved by sintering the green compact for a long time, it is not economical.
本発明において、微細な金属珪素を使用できない場合な
どに、触媒として鉄や鉄の弗化物が用いられる。In the present invention, iron or iron fluoride is used as a catalyst when fine metallic silicon cannot be used.
触媒の添加により、窒化反応を容易に進行させ、価格面
で有利に戊形体を製造しつるものである。By adding a catalyst, the nitriding reaction can proceed easily and the rod-shaped body can be manufactured economically.
触媒の粒径は、金属珪素と同様に平均粒径で5μ以下と
することが望ましい。The average particle size of the catalyst is preferably 5 μm or less, similar to metal silicon.
また、生威する窒化珪素の微構造を変化させる目的で、
酸化イットリウム等を添加してもよい。In addition, for the purpose of changing the microstructure of silicon nitride,
Yttrium oxide or the like may be added.
本発明において、二次粒子の強度を高めて高圧力での加
圧成形を町能ならしめるために、さらには圧粉体の生強
度を高めて作業性を良くするため結合剤を添加する。In the present invention, a binder is added in order to increase the strength of the secondary particles and make compacting under high pressure easy, and also to increase the green strength of the powder compact and improve workability.
この結合剤は窒化反応時には、金属珪素の表面から消去
されていることが必要であり、一般にはポリエチレング
リコールやポリビニルアルコールなどの有機結合剤が原
料に対し1〜3饅分散媒に溶解して添加される。This binder must be removed from the surface of metal silicon during the nitriding reaction, and generally an organic binder such as polyethylene glycol or polyvinyl alcohol is added to the raw material after being dissolved in 1 to 3 times a dispersion medium. be done.
分散媒とは、室温で蔽体である物質をいうが、これらの
中有毒性のもの、劇毒性のもの、易発火性のもの、高価
格なもの、また金属珪素と容易に反応するものは適当で
ない。A dispersion medium is a substance that acts as a shield at room temperature, but it should not be used as a material that is poisonous, highly toxic, easily ignitable, expensive, or that easily reacts with metal silicon. It's not appropriate.
分散媒の具体例は結合剤を完全に溶解しうるものが好ま
しく、例えば、メチルセルローズを結合剤とするときは
、トルエン、アセトンなどの有機溶剤、ホリヒニルアル
コールを結合剤とする場合では水などがある。Specific examples of the dispersion medium are preferably those that can completely dissolve the binder; for example, when using methyl cellulose as the binder, organic solvents such as toluene and acetone are used; when using hollyhinyl alcohol as the binder, water is used. and so on.
水を分散媒とするとき、金属珪素と反応して、その表面
を酸化して被膜を作る可能性があるが、作業性、経済性
などの面で水は優れた分散媒の一つである。When water is used as a dispersion medium, it may react with metal silicon and oxidize its surface to form a film, but water is one of the superior dispersion media in terms of workability and economy. .
この場合には、全工程を通じて得られる成形体物性への
効果を考慮して、経済的にその採択が決められる。In this case, the selection is economically determined by considering the effect on the physical properties of the molded product obtained through the entire process.
本発明において、分散媒の量が原料粉体に対し36容量
多以上存在しないと、実質的に高密度でかつ充分に均一
な或形体を得るのが困難であり、特に抗折強度を向上さ
せることはできない。In the present invention, if the amount of the dispersion medium is not 36 volumes or more relative to the raw material powder, it is difficult to obtain a certain shape with substantially high density and sufficient uniformity, and especially to improve the bending strength. It is not possible.
これは、結合剤が充分均一に分散しにくいこと、従って
一次粒子間の接触が充分でなく、一次粒子間に比較的大
きな気孔を残存させるためと推定される。This is presumed to be because the binder is difficult to disperse sufficiently uniformly, and therefore the contact between the primary particles is not sufficient, leaving relatively large pores between the primary particles.
このような意味で36容量φ以上で、粉体を加圧あるい
は加圧せずに、結合剤の充分な分散と一次粒子の緊密な
接触が期待される。In this sense, sufficient dispersion of the binder and close contact of the primary particles are expected at a volume of 36 φ or more, with or without pressurizing the powder.
しかし、分散媒が45容量多をこえると、実質的にヌラ
リーに近い状態となり、かえって分散媒の揮発させるた
めに必要以上の熱量を費やすいことになり、経済上不利
である。However, if the volume of the dispersion medium exceeds 45, the dispersion medium will be in a substantially nullary state, and more heat than necessary will be used to volatilize the dispersion medium, which is economically disadvantageous.
すなわち36〜45容量饅では、湿った状態の粉末に圧
力を適宜加えることで、品質的にも、経済的にも良好で
かつ結合剤が充分に均一に分散し、一次粒子が緊密に接
触しているような二次粒子粉末の製造かり能となる。In other words, in the case of 36 to 45 volume rice cakes, by appropriately applying pressure to the wet powder, it is possible to achieve good quality and economical results, and to ensure that the binder is sufficiently uniformly dispersed and the primary particles are in close contact with each other. This makes it possible to produce secondary particles such as powder.
粉砕の方法については、本発明においては本質的なもの
ではなく、ハンマーミノレ、ボー!レミルなどの常法に
よるものであるが、粉砕して得られる二次粒子の形状は
、なるべく丸みを帯びるような粉砕法が本発明に適する
。The method of crushing is not essential to the present invention; it is possible to use a hammer minor, bo! Although conventional methods such as remilling are used, a pulverization method that makes the shape of the secondary particles obtained by pulverization as round as possible is suitable for the present invention.
二次粒子粉末については、粒度分布によっても異なるが
、一般的に大きな粒径を含むものでは、圧粉体中に大き
な気孔を残し、この気孔は窒化焼結後も容易に消去され
ずに、成形体中に残存しがちで、結果的に不均一な構造
を有し不充分な特性しか有しない成形体をしばしば生じ
るζとになる。Regarding secondary particle powders, it varies depending on the particle size distribution, but generally those with large particle sizes leave large pores in the green compact, and these pores are not easily erased even after nitriding and sintering. ζ tends to remain in the molded bodies, often resulting in molded bodies with a non-uniform structure and insufficient properties.
また、あまりにも細かな二次粒子を用いると、戒形時に
圧縮比が大きく、かつ得られた圧粉体の密度を充分に高
くすることが困難となり、結果的に充分な特性、特に高
強度の成形体を得ることが困難となる。In addition, if too fine secondary particles are used, the compression ratio will be large during compaction, and it will be difficult to increase the density of the resulting green compact, resulting in insufficient properties, especially high strength. It becomes difficult to obtain a molded body.
本発明は、150μ以下の二次粒子を用いれば、高密度
で高強度の成形体が得られることを見出したものである
。The present invention is based on the discovery that a molded article with high density and high strength can be obtained by using secondary particles of 150 μm or less.
本発明法で製造した窒化珪素戒形体は2,5〜27g/
讃の見掛密度、2000k,9/扉以上の抗折強度を有
するので、従来のものに比べ、窒化珪素本来の性質によ
り近づいたものである。The silicon nitride shaped body produced by the method of the present invention is 2.5 to 27 g/
Since it has an apparent density of 2000K and a bending strength of 9/door or more, it is closer to the original properties of silicon nitride than conventional products.
本発明品はこのように高い抗折強度を有するので、メカ
ニカルシールなどの摺動部材、高温強度を必要とされる
耐火物構造部品などの分野にその利用範囲を拡大しうる
ものである。Since the product of the present invention has such high bending strength, its range of use can be expanded to fields such as sliding members such as mechanical seals and refractory structural parts that require high-temperature strength.
以下実施例及び比較例をあげてさらに本発明を詳しく説
明する。The present invention will be further explained in detail below with reference to Examples and Comparative Examples.
実施例、比較例
表に示す原利を500gポリエチレン容器に入れ24時
間乾式混合した。Examples and Comparative Examples The raw materials shown in the table were placed in a 500 g polyethylene container and dry mixed for 24 hours.
次いで、これに予じめ分散媒中に結合剤(分散媒が水の
ときはポリビニールアルコールを、分散媒がトルエンの
ときはカルポキシメチルセルローズを用いた)を8重量
幅溶解した混合溶蔽を所要量添加シた後に、モルタルミ
キサーを用いて混練した。Next, 8 weights of a binder (polyvinyl alcohol was used when the dispersion medium was water, and carboxymethyl cellulose was used when the dispersion medium was toluene) was dissolved in advance in the dispersion medium. After adding the required amount, the mixture was kneaded using a mortar mixer.
尚、分散媒量が30及び40容量饅のときは「湿った粉
末」の状態であり、これらは金型ダイス内で500ky
/一の加圧力で加圧威形し、塊状とした後、105℃で
24時間乾燥した。In addition, when the dispersion medium amount is 30 and 40 volumes, it is in the state of "wet powder", and these are 500 ky in the mold die.
The mixture was pressurized with a pressure of 1/2 to form a lump, and then dried at 105° C. for 24 hours.
また、分散媒が50容量斜ては、非常に軟らかな不土状
態で実質的にヌラリーに近い状態にある。Further, when the dispersion medium is 50 volumes diagonally, the dispersion medium is in a very soft soil state and is substantially close to a nullary state.
この場合には、混線後ホーロー容器に移しとり、そのま
ま105℃で48時間乾燥した。In this case, after mixing, the mixture was transferred to an enamel container and dried at 105° C. for 48 hours.
このようにして得られた塊状の試料は、乳鉢により粉砕
し篩い分けにより150μ以下の二次粒子粉末とした。The thus-obtained lumpy sample was ground in a mortar and sieved to form a powder of secondary particles of 150 μm or less.
なお実験A7は比較のため297μ以下とした。In addition, in Experiment A7, the thickness was set to 297μ or less for comparison.
これらの二次粒子粉末を、金型ダイスを用い2100k
g/fflの圧力で加圧成形することで、10mm×8
m7IL×80r/L7rtの寸法で圧粉体を得た。These secondary powder particles were processed at 2100k using a mold die.
By pressure molding at a pressure of g/ffl, 10 mm x 8
A green compact was obtained with dimensions of m7IL×80r/L7rt.
この圧粉体を窒素雰囲気中で4 0 0 ’Cで48時
間加熱することで有機物を揮散させた後に、1250°
Cで20時間保持し、さらに1450°Cで10時間保
持することで窒化焼結した。This green compact was heated at 400°C for 48 hours in a nitrogen atmosphere to volatilize the organic matter, and then heated to 1250°C.
Nitriding sintering was carried out by holding at C for 20 hours and further holding at 1450°C for 10 hours.
これらの成形体の物性を測定した結果を表に示した。The results of measuring the physical properties of these molded bodies are shown in the table.
また実験/I68は実施例1の方法において分散媒を用
いなかった以外は実施例1と同様に行った。Further, Experiment/I68 was conducted in the same manner as in Example 1 except that the dispersion medium was not used in the method of Example 1.
その結果も併せて表に示した。The results are also shown in the table.
表から明かなように、実施例の実験/161〜4はいず
れも成形体の抗折強度2o00kg/一以上であり比較
例の実験/165〜8は見掛密度は実施例のものと差異
のないものもあるが、抗折強度が2000kg/crj
.以上のものは認められず、本発明がすぐれていること
が分る。As is clear from the table, all of Examples Experiments/161 to 4 have a bending strength of 2o00 kg/1 or more, and Comparative Examples Experiments/165 to 8 have an apparent density that is different from that of Examples. There are some that do not, but the bending strength is 2000kg/crj
.. None of the above was observed, indicating that the present invention is superior.
Claims (1)
に36〜45容量俸の分散媒を添加混練して塊状となし
、該塊状品を乾燥、粉砕して粒径150μ以下の二次粒
子粉末とし、次いでこれを加圧成形して得られる圧粉体
を窒素雰囲気中加熱することを特徴とする窒化珪素系成
形体の製造方法。1. Add and knead 36 to 45 volumes of dispersion medium to a powder mainly composed of metallic silicon with an average particle size of 5μ or less to form a lump, dry and crush the lump to form a powder with a particle size of 150μ or less. 1. A method for producing a silicon nitride-based molded body, which comprises making a powder into secondary particles, then press-molding the powder, and heating the green compact obtained in a nitrogen atmosphere.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP51053526A JPS5848507B2 (en) | 1976-05-11 | 1976-05-11 | Manufacturing method of silicon nitride molded body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP51053526A JPS5848507B2 (en) | 1976-05-11 | 1976-05-11 | Manufacturing method of silicon nitride molded body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52136900A JPS52136900A (en) | 1977-11-15 |
| JPS5848507B2 true JPS5848507B2 (en) | 1983-10-28 |
Family
ID=12945247
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP51053526A Expired JPS5848507B2 (en) | 1976-05-11 | 1976-05-11 | Manufacturing method of silicon nitride molded body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5848507B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5832071A (en) * | 1981-08-13 | 1983-02-24 | 日本カ−ボン株式会社 | Silicon nitride formed body and manufacture |
-
1976
- 1976-05-11 JP JP51053526A patent/JPS5848507B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52136900A (en) | 1977-11-15 |
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