JPS5853736B2 - Kanenseigaskenchisoshi - Google Patents
KanenseigaskenchisoshiInfo
- Publication number
- JPS5853736B2 JPS5853736B2 JP13428775A JP13428775A JPS5853736B2 JP S5853736 B2 JPS5853736 B2 JP S5853736B2 JP 13428775 A JP13428775 A JP 13428775A JP 13428775 A JP13428775 A JP 13428775A JP S5853736 B2 JPS5853736 B2 JP S5853736B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- temperature
- resistance value
- fe2o3
- sensitivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 22
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims description 19
- KKCBUQHMOMHUOY-UHFFFAOYSA-N Na2O Inorganic materials [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 6
- 238000005245 sintering Methods 0.000 claims description 5
- FUJCRWPEOMXPAD-UHFFFAOYSA-N Li2O Inorganic materials [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 claims description 3
- XUCJHNOBJLKZNU-UHFFFAOYSA-M dilithium;hydroxide Chemical compound [Li+].[Li+].[OH-] XUCJHNOBJLKZNU-UHFFFAOYSA-M 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 66
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 26
- 238000000034 method Methods 0.000 description 17
- 230000035945 sensitivity Effects 0.000 description 16
- 238000001514 detection method Methods 0.000 description 13
- 229910052697 platinum Inorganic materials 0.000 description 13
- 230000007704 transition Effects 0.000 description 13
- 229910006297 γ-Fe2O3 Inorganic materials 0.000 description 12
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 10
- SZVJSHCCFOBDDC-UHFFFAOYSA-N iron(II,III) oxide Inorganic materials O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 8
- 229910001566 austenite Inorganic materials 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 230000003647 oxidation Effects 0.000 description 7
- 238000007254 oxidation reaction Methods 0.000 description 7
- 239000000243 solution Substances 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 230000001590 oxidative effect Effects 0.000 description 5
- 239000001294 propane Substances 0.000 description 5
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 235000011114 ammonium hydroxide Nutrition 0.000 description 4
- NNPPMTNAJDCUHE-UHFFFAOYSA-N isobutane Chemical compound CC(C)C NNPPMTNAJDCUHE-UHFFFAOYSA-N 0.000 description 4
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000002244 precipitate Substances 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 150000002505 iron Chemical class 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- BAUYGSIQEAFULO-UHFFFAOYSA-L iron(2+) sulfate (anhydrous) Chemical compound [Fe+2].[O-]S([O-])(=O)=O BAUYGSIQEAFULO-UHFFFAOYSA-L 0.000 description 2
- 239000001282 iso-butane Substances 0.000 description 2
- 229910052573 porcelain Inorganic materials 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 229910006299 γ-FeOOH Inorganic materials 0.000 description 2
- HMUNWXXNJPVALC-UHFFFAOYSA-N 1-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)N1CCN(CC1)C(CN1CC2=C(CC1)NN=N2)=O HMUNWXXNJPVALC-UHFFFAOYSA-N 0.000 description 1
- WZFUQSJFWNHZHM-UHFFFAOYSA-N 2-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)N1CCN(CC1)CC(=O)N1CC2=C(CC1)NN=N2 WZFUQSJFWNHZHM-UHFFFAOYSA-N 0.000 description 1
- 235000004936 Bromus mango Nutrition 0.000 description 1
- 101100348017 Drosophila melanogaster Nazo gene Proteins 0.000 description 1
- 229910000904 FeC2O4 Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 240000007228 Mangifera indica Species 0.000 description 1
- 235000014826 Mangifera indica Nutrition 0.000 description 1
- 206010028980 Neoplasm Diseases 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 1
- 235000009184 Spondias indica Nutrition 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010908 decantation Methods 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004455 differential thermal analysis Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 1
- 229910021506 iron(II) hydroxide Inorganic materials 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 230000029052 metamorphosis Effects 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 238000000634 powder X-ray diffraction Methods 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 235000017550 sodium carbonate Nutrition 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
- -1 this Chemical compound 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000003643 water by type Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
【発明の詳細な説明】
本発明は可燃性ガス検知素子、特にスピネル型結晶構造
のγ−Fe2O3を主成分相として含む焼結体を、ガス
感応体とする可燃性ガス検知素子に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a combustible gas detection element, and particularly to a combustible gas detection element that uses a sintered body containing γ-Fe2O3 with a spinel type crystal structure as a main component phase as a gas sensitive body. .
近年、ガス機器の普及に従って、ガスによる事故が多発
するようになり、事故を未然に防止するため、種々の方
策が検討されている。BACKGROUND ART In recent years, with the spread of gas appliances, accidents caused by gas have been occurring frequently, and various measures are being considered to prevent accidents.
そのひとつとして、ガス漏れを検知し、警報を発する装
置をあげることができる。One example is a device that detects gas leaks and issues an alarm.
本発明は、このガス漏れを検知するための素子を提供し
ようとするものである。The present invention aims to provide an element for detecting this gas leak.
γ−F e203はn型の酸化物半導体であり、高温度
下で還元性ガスに接触すると、電気抵抗が急激に低下す
るという性質をもっている。γ-F e203 is an n-type oxide semiconductor, and has the property that its electrical resistance rapidly decreases when it comes into contact with a reducing gas at high temperature.
現在、この性質を利用して、γ−Fe203゛をガス感
応体としたガス検知素子の開発が、進められている。Currently, utilizing this property, development of a gas detection element using γ-Fe203 as a gas sensitive material is underway.
このγ−Fe2O3は、250〜400℃の温度範囲で
良好なガス感応性を示す。This γ-Fe2O3 exhibits good gas sensitivity in the temperature range of 250 to 400°C.
感度と応答速度は、温度に対して反対の傾向を示し、2
50〜300℃では感度はよいけれども、応答速度が若
干遅く、また400℃に近づくと、応答速度が速くなる
けれども、感度が若干低下する。Sensitivity and response speed show opposite trends with temperature, 2
At 50 to 300°C, the sensitivity is good, but the response speed is a little slow, and as the temperature approaches 400°C, the response speed is faster, but the sensitivity is slightly lower.
したがって、この種の材料は350°C前後の温度で使
用することが望ましい。Therefore, it is desirable to use this type of material at temperatures around 350°C.
ところで、ガス漏れを検知するための素子には、爆発を
未然に防ぐためと、誤動作があってはならないことから
、かなりせまいガス濃度域で動作することが要求される
ようになって来ており、動作点のきわめて安定している
ことが必要とされる。By the way, elements for detecting gas leaks are now required to operate in a fairly narrow gas concentration range in order to prevent explosions and to prevent malfunctions. , a very stable operating point is required.
したがって、半導体の抵抗変化を利用してガスを検出す
る素子は、ガスにより抵抗がすみやかに変化するもので
なければならず、抵抗値が設定値に達した後も、徐々に
変化して行くことの許されないものである。Therefore, an element that detects gas using the resistance change of a semiconductor must have a resistance that changes quickly depending on the gas, and even after the resistance value reaches the set value, the resistance value must change gradually. It is not allowed.
ガスに対してすみやかに応答をするためには、ガス感応
部分は、ある程度高い温度下で、安定に動作しなければ
ならない。In order to respond quickly to gas, the gas-sensitive part must operate stably at a relatively high temperature.
しかしながら、γ−Fe 20sは、高い温度では不安
定な相であり、長時間、高温度下におくと、高温度下で
も安定なα−Fe203に相転移してしまう。However, γ-Fe 20s is an unstable phase at high temperatures, and if left at high temperatures for a long time, it undergoes a phase transition to α-Fe203, which is stable even at high temperatures.
このγ相からα相への相転移は非可逆的なものであり、
一旦、γ−Fe2O3からa Fe2O3に転移して
しまうと、それを再びγ−Fe 203に転移させるこ
とは、容易なことではない。This phase transition from γ phase to α phase is irreversible,
Once γ-Fe2O3 has been transferred to aFe2O3, it is not easy to transfer it back to γ-Fe203.
α−Fe203は、可燃性ガスに対する感応性のきわめ
て低いものであり、またその電気抵抗も高いものである
。α-Fe203 has extremely low sensitivity to combustible gases and also has high electrical resistance.
したがって、γ−Fe2O3からα−Fe203に相転
移をしてしまうと、Fe2O3はガス感応体としての機
能を失ってしまう。Therefore, when a phase transition occurs from γ-Fe2O3 to α-Fe203, Fe2O3 loses its function as a gas sensitive material.
γ−Fe2O3がα−Fe203に相転移をする温度は
、その作製条件によって異なるが、はぼ400〜630
℃の温度範囲内にある。The temperature at which γ-Fe2O3 undergoes a phase transition to α-Fe203 varies depending on the manufacturing conditions, but is approximately 400-630°C.
Within the temperature range of ℃.
たとえば、沈澱法によってマグネタイト(Fe304)
の微粒子を作り、これを、空気中において、150〜4
00°Cの範囲内の温度で加熱することにより、酸化す
ると、γ−F e20aが得られる。For example, magnetite (Fe304) is produced by precipitation method.
Make fine particles of 150 to 4 in the air.
Oxidation by heating at temperatures in the range of 00°C yields γ-Fe20a.
このようにして作ったγFe 203は相転移温度が低
く、特にマグネタイトを作る際の沈澱時のアルカリ濃度
が低いものほど、それが低温度側へずれる。γFe 203 produced in this manner has a low phase transition temperature, and in particular, the lower the alkali concentration during precipitation during magnetite production, the lower the temperature.
またα−Fe20sを還元してFe 304とし、これ
を、不活性雰囲気中において、高温度たとえば900℃
焙焼し、さらに100〜700℃の範囲内の温度で加熱
して、酸化しても、γ−Fe 203を得ることができ
る。In addition, α-Fe20s is reduced to Fe304, which is then heated at a high temperature, for example, 900°C, in an inert atmosphere.
γ-Fe 203 can also be obtained by roasting, further heating at a temperature within the range of 100 to 700°C, and oxidizing.
この方法で得たγ−Fe2O3は、α−Fe203への
転移温度が比較的高いものである。γ-Fe2O3 obtained by this method has a relatively high transition temperature to α-Fe203.
γ−Fe203町燃性ガス検知素子は、前述したように
、感度や応答速度などの関係から、ガス感応部分をかな
り高い温度7こ保持しておかなければならないものであ
る。As mentioned above, in the γ-Fe203 combustible gas detection element, the gas sensitive portion must be maintained at a fairly high temperature due to sensitivity, response speed, etc.
γFe2O3は高温度下でα−Fe 203に相転移を
するのはもちろんのこと、相転移温度よりかなり低い温
度でも、長時間放置しておくと、徐々に相転移をする。γFe2O3 not only undergoes a phase transition to α-Fe 203 at high temperatures, but also gradually undergoes a phase transition if left for a long time even at a temperature considerably lower than the phase transition temperature.
したがって、γFe2O3をそのままガス感応部分に使
用するには、その相転移温度が十分に高いとは言えない
。Therefore, it cannot be said that the phase transition temperature of γFe2O3 is sufficiently high to use it as it is in the gas-sensitive part.
ガス感応部分はかなり高い温度に保って使用されるので
、長時間、作動温度で放置されても、ガス感応性の安定
していることが必要とされることから、前記の相転移温
度をなんらかの方法でより高めなければならない。Since the gas-sensitive part is used at a fairly high temperature, it is required that the gas-sensitivity remains stable even if it is left at the operating temperature for a long time. We have to improve it in some way.
γ−Fe 20sの製造方法は、大別して、次の二つの
方法がある。Methods for producing γ-Fe 20s can be roughly divided into the following two methods.
そのひとつはγ−FeOOHの脱水による方法であり、
他のひとつはFe s04の酸化による方法である。One of them is a method using dehydration of γ-FeOOH,
Another method is the oxidation of Fe s04.
γ−FeOOHを作製する方法としては、第一鉄塩を緩
慢に酸化する方法、Fe(OH)2を緩慢に酸化する方
法、あるいは同じ結晶構造のFe0C1の結晶を水中で
加熱する方法などがある。Methods for producing γ-FeOOH include a method of slowly oxidizing ferrous salt, a method of slowly oxidizing Fe(OH)2, or a method of heating Fe0C1 crystals with the same crystal structure in water. .
Fe3O4を作製する方法としては、α−Fe 203
またはα−Fe00Hを水素などで還元する方法、第一
鉄塩と第二鉄塩とをアルカリ性溶液中で共沈させる方法
、またはF eC204あるいはFeCOsなどを、水
蒸気中もしくは窒素中で加熱する方法などがある。As a method for producing Fe3O4, α-Fe 203
Alternatively, a method of reducing α-Fe00H with hydrogen or the like, a method of co-precipitating a ferrous salt and a ferric salt in an alkaline solution, a method of heating FeC204 or FeCOs, etc. in steam or nitrogen, etc. There is.
このような方法で作製したγ−F e 203は、前述
したように、相転移温度がたかだか630℃である。γ-F e 203 produced by such a method has a phase transition temperature of 630° C. at most, as described above.
この相転移温度を高める方法として、異種元素の導入が
考えられる。One possible way to increase this phase transition temperature is to introduce a different element.
本発明は、可燃性ガス感応体としてのγ−Fe2O3の
変成に適した元素、および素子の組成について種々研究
検討を重ねた結果、完成したものである。The present invention was completed as a result of various research studies regarding elements suitable for metamorphosis of γ-Fe2O3 as a combustible gas sensitive material, and the composition of an element.
すなわち、本発明にかかる可燃性ガス検知素子は、γ−
Fe2O3、およびL120とNa2Oとに20とから
なる酸化物群から選択された少くとも1種をそれぞれ9
0〜99.9モルφ、lO〜o、tモル袈の組成比率で
含む焼結体をガス感応体としこれに電気抵抗測定用の一
対の電極と加熱用のヒータを付与して、可燃性ガスの濃
度変化により、該ガス感応体の電気抵抗値が変化するこ
とを用いて可燃性ガスを検知することを特徴とするもの
である。That is, the combustible gas detection element according to the present invention has γ-
Fe2O3, and at least one selected from the oxide group consisting of L120, Na2O, and 20, respectively.
A sintered body containing a composition ratio of 0 to 99.9 moles φ, lO to o, and t moles is used as a gas sensitive body, and a pair of electrodes for measuring electrical resistance and a heater for heating are attached to it to make it combustible. This method is characterized in that a combustible gas is detected by using the change in the electrical resistance value of the gas sensitive body due to a change in gas concentration.
以下、実施例にもとづいて、本発明にかかる素子につい
て詳細に説明する。Hereinafter, the device according to the present invention will be described in detail based on Examples.
実施例 l
平均粒径0.1 pmのFe 304の粉末を1.9モ
ル、N a2COaを0.1モル秤取し、水を加えて十
分に粉砕し混合した。Example 1 1.9 mol of Fe 304 powder with an average particle size of 0.1 pm and 0.1 mol of Na2COa were weighed out, water was added thereto, and they were thoroughly ground and mixed.
混合物を室温で真空乾燥したのち、正方形状に圧縮成型
した。The mixture was vacuum dried at room temperature and then compression molded into a square shape.
成型体を、窒素気流中において、温度750℃で焼結し
た。The molded body was sintered at a temperature of 750° C. in a nitrogen stream.
焼結体を冷却してから、徐々に昇温しで、酸化性雰囲気
中において、400°Cの温度に保持し、γ−Fe2O
3を主成分とする焼結体を得た。After cooling the sintered body, the temperature was gradually raised and maintained at a temperature of 400°C in an oxidizing atmosphere, and γ-Fe2O
A sintered body containing 3 as a main component was obtained.
このようにして作製した焼結体の主面のひとつに、金を
蒸着して、1対の櫛形の電極を形成した。Gold was deposited on one of the main surfaces of the sintered body thus produced to form a pair of comb-shaped electrodes.
そして、他の主面には、白金発熱体を無機接着剤で貼り
つけて、可燃性ガス検知素子とした。Then, a platinum heating element was attached to the other main surface with an inorganic adhesive to form a combustible gas detection element.
第1図は、上述のようにして作製した、可燃性ガス検知
素子の構造の一例を示す斜視図である。FIG. 1 is a perspective view showing an example of the structure of a combustible gas detection element manufactured as described above.
図において、1はγ−Fe2O3を主体とするバルク状
焼結体からなる可燃性ガス感応体である。In the figure, 1 is a combustible gas sensitive body made of a bulk sintered body mainly composed of γ-Fe2O3.
2は対をなす櫛型電極、3は無機接着剤、4は白金発熱
体、5,6はそれぞれ櫛型電極2、白金抵抗体4に接続
されたリード線である。2 is a pair of comb-shaped electrodes, 3 is an inorganic adhesive, 4 is a platinum heating element, and 5 and 6 are lead wires connected to the comb-shaped electrode 2 and the platinum resistor 4, respectively.
この素子全体を、ステンレススチール製の金網で覆って
、白金発熱体4に通電し、γ−Fe203焼結体1を3
50’Cの温度に加熱保持した。This entire element is covered with a stainless steel wire mesh, and the platinum heating element 4 is energized, and the γ-Fe203 sintered body 1 is
The temperature was maintained at 50'C.
このときの可燃性ガス検知素子の、空気中での抵抗値は
190にΩであった。At this time, the resistance value of the combustible gas detection element in air was 190Ω.
これを、0.5容量φのイ゛ノブクンを含む空気中にお
いたところ、抵抗値は7.6 KQであり、可燃性ガス
の存在によって、その抵抗値が大きく変化した。When this was placed in air containing 0.5 volume φ of Inobu Kun, the resistance value was 7.6 KQ, and the resistance value changed greatly due to the presence of flammable gas.
次に、この素子を、400°Cの温度に保たれた電気炉
中にtooo時間放置した。Next, this element was left in an electric furnace maintained at a temperature of 400°C for too long.
それから、γFe2O3焼結体1を350℃の温度に保
って、空気中、および0.5容量φのイソブタンを含む
空気中におけるときの、抵抗値を測定したところ、それ
ぞれ203にΩ、8.4にΩであった。Then, when the γFe2O3 sintered body 1 was kept at a temperature of 350°C and the resistance values were measured in air and in air containing 0.5 volume φ of isobutane, the resistance values were 203Ω and 8.4Ω, respectively. It was Ω.
これから、ガス感応性がきわめて長時間にわたって安定
に保持されることがわかる。This shows that the gas sensitivity remains stable over a very long period of time.
実施例 2
実施例1と同じ手順で、Na2CO3の添加量を変えて
、各種の試料を作製した。Example 2 Various samples were prepared in the same manner as in Example 1, but with different amounts of Na2CO3 added.
これら試料のそれぞれについて、実施例1と同じ条件で
、特性を測定した。The characteristics of each of these samples were measured under the same conditions as in Example 1.
第2図に、Na2O量と抵抗(RG)との関係、および
N a20量と感度(RA/RG)との関係をそれぞれ
示す。FIG. 2 shows the relationship between the amount of Na2O and the resistance (RG), and the relationship between the amount of Na20 and the sensitivity (RA/RG), respectively.
なお、RGは可燃性ガスを含む空気中での値であり、R
Aはそれを含んでいない空気中でのf直である。Note that RG is the value in air containing flammable gas, and R
A is the f angle in air that does not contain it.
図において、曲線■は可燃性ガスを含む空気中での、素
子の初期抵抗値特性を示す。In the figure, curve (■) indicates the initial resistance value characteristic of the element in air containing flammable gas.
曲線■は初期感度特性を示す。Curve ■ shows the initial sensitivity characteristics.
また、曲線■は、素子を一旦400℃の温度にtooo
時間保持してからの、抵抗値特性を示す。In addition, the curve (■) shows that the element is once heated to a temperature of 400°C.
It shows the resistance value characteristics after holding for a certain period of time.
曲線■は同じく感度特性を示す。Similarly, the curve ■ shows the sensitivity characteristics.
これから明らかなように、Na2O量が多くなるに従っ
て、高温放置による%性劣化が小さく、特定の安定して
いることがわかる。As is clear from this, it can be seen that as the amount of Na2O increases, the percentage deterioration due to high temperature storage becomes smaller and the properties become more stable.
そして、ガス感度についてみると(曲線n = IV
) 、NazO量がγFe2O3焼結体中に、o、t−
toモル悌含まれているとき、著しく改善されているこ
とがわかる。And if we look at the gas sensitivity (curve n = IV
), the amount of NazO in the γFe2O3 sintered body is o, t-
It can be seen that there is a significant improvement when the amount of mol.
このようなγ−Fe 203に対する添加効果は、L1
20または瘍01またはNa2Op Lt20およびに
20の2種以上を組合わせて添加しても、はぼ同じ傾向
を示した。The effect of addition to γ-Fe 203 is that L1
Even when two or more of Na2Op Lt20, Tumor 01, Na2Op Lt20, and Na2Op Lt20 were added in combination, almost the same tendency was observed.
実験結果を次表にまとめて示す。実施例 3
F e C12t Fe C13およびLiC1をそれ
ぞれ1モル、2モルおよび0.015モル正確に秤取し
て、これらを12の純水に溶解させた。The experimental results are summarized in the table below. Example 3 1 mol, 2 mol and 0.015 mol of Fe C12t Fe C13 and LiCl were accurately weighed out, respectively, and dissolved in 12 pure waters.
この混合浴液を、NH,C116モルをllの純水中に
溶解した溶液中に、ゆっくり滴下した。This mixed bath solution was slowly dropped into a solution in which 116 moles of NH and C were dissolved in 1 liter of pure water.
これによって次の反応が生じる。This causes the following reaction.
上記反応式によれば、NH4OHは約8モル必要である
が、浴液の水素イオン濃度(pH)の変動を小さくする
ために、過剰のNH4OHを添加した。According to the above reaction formula, about 8 mol of NH4OH is required, but an excess of NH4OH was added in order to reduce fluctuations in the hydrogen ion concentration (pH) of the bath solution.
このように過剰のNH4OHを加えておくだけでなく、
鉄塩混合浴液の滴下と同時に、NH4OHを消費された
量だけ補うことにより、常に一定のpH値に維持しても
よい。In addition to adding excess NH4OH like this,
A constant pH value may be maintained at all times by supplementing the consumed amount of NH4OH simultaneously with the dropping of the iron salt mixed bath solution.
鉄塩浴液の滴下が完了したのち、この液を濾過して、沈
澱物を得、それを乾燥機を用いて80〜100°Cの温
度で4〜10時間乾燥させた。After the addition of the iron salt bath solution was completed, the solution was filtered to obtain a precipitate, which was dried using a drier at a temperature of 80 to 100°C for 4 to 10 hours.
乾蒙物を乳鉢で粉砕してから、粉末を300〜400℃
の温度で1〜3時間加熱して酸化処理した。After crushing the dried mango in a mortar, the powder is heated to 300-400℃.
Oxidation treatment was carried out by heating at a temperature of 1 to 3 hours.
この酸化処理によって、Liで変成されたr −F e
20 sを得ることができた。Through this oxidation treatment, r -Fe modified with Li
I was able to get 20 seconds.
このγ−Fe 20aを化学分析したところ、L1□O
が0,43モルφ含まれていた。Chemical analysis of this γ-Fe 20a revealed that L1□O
It contained 0.43 mole φ.
また、X線粉末回折によってα−Fe203の存在を調
べたところ、αF e 203の存在を認めることがで
きなかった。Further, when the presence of α-Fe203 was investigated by X-ray powder diffraction, the presence of αFe203 could not be recognized.
さらに、示差熱分析によってr−Fe203からαFe
2O3への相転移温度を調べたところ、Liを含まない
ときに比べて、30℃高くなっていた。Furthermore, by differential thermal analysis, αFe was extracted from r-Fe203.
When the phase transition temperature to 2O3 was investigated, it was found to be 30° C. higher than when Li was not included.
上述のようjこして得られたLi変変成−Fe203を
細かく粉砕し、有機バインダーを加えてペースト状にし
た。The Li modified Fe203 obtained by straining as described above was finely ground, and an organic binder was added thereto to form a paste.
一方、5 mm×5 mm×0.5 mmの寸法のアル
ミナ磁気板の主面)こ、焼付用金ペーストを、0.5關
の間隔をもつ櫛形に印刷し、800°Cの温で焼きつけ
て、電極をあらかじめ形成した。On the other hand, on the main surface of an alumina magnetic plate with dimensions of 5 mm x 5 mm x 0.5 mm, gold paste for baking was printed in the form of a comb with intervals of 0.5 mm, and baked at a temperature of 800°C. An electrode was formed in advance.
このアルミナ磁気板の電極焼付面上に、さらにL1変成
γ−Fe 20sを厚さ20μmに塗布した。On the electrode baking surface of this alumina magnetic plate, 20s of L1 modified γ-Fe was further applied to a thickness of 20 μm.
これを加熱して、ひびがはいらないように注意して徐々
に温度を高め、350°Cの温度で2時間保持してから
、冷却した。This was heated, the temperature was gradually raised to avoid cracks, the temperature was maintained at 350°C for 2 hours, and then cooled.
焼付けを完了したLi変変成−F e 20 s皮膜に
接触しないように、アルミナ磁器板の他方の主面に白金
発熱体を接触させ、全体を100メツシユのステンレス
スチール製の金網で囲って、可燃性ガス検知素子を完成
した。A platinum heating element was brought into contact with the other main surface of the alumina porcelain plate so as not to come into contact with the baked Li metamorphic-F e 20 s film, and the whole was surrounded by a 100-mesh stainless steel wire mesh to prevent combustible heating. Completed a gas detection element.
第3図に、この可燃性ガス検知素子の構造を示す。FIG. 3 shows the structure of this combustible gas detection element.
図において、11はアルミナ磁器板、12は皮膜状のL
i変戊γ−Fe203ガス感応体、13はくし形の金電
極、14は白金発熱体、15.16はリード線で、それ
ぞれ電極13、白金発熱体14に接続されている。In the figure, 11 is an alumina porcelain plate, 12 is a film-like L
13 is a comb-shaped gold electrode, 14 is a platinum heating element, and 15 and 16 are lead wires connected to the electrode 13 and the platinum heating element 14, respectively.
白金発熱体14に通電し、γ−Fe203ガス感応体1
2を、3008Cの温度に保持した。The platinum heating element 14 is energized, and the γ-Fe203 gas sensitive element 1
2 was maintained at a temperature of 3008C.
このときの空気中における電極13の間の抵抗値は、1
.5MΩであった。At this time, the resistance value between the electrodes 13 in the air is 1
.. It was 5MΩ.
これを、l容量幅のプロパンガスを含む空気中に置いた
とき、その抵抗値が55にΩであった。When this was placed in air containing 1 volume of propane gas, its resistance was 55Ω.
これから、可燃性ガスの存在によって抵抗値が著しく変
化することがわかる。It can be seen from this that the resistance value changes significantly due to the presence of combustible gas.
次に白金発熱体14への通電を断ち、400℃の温度に
保持された電気炉中に、1000時間放置した。Next, the power supply to the platinum heating element 14 was cut off, and the platinum heating element 14 was left in an electric furnace maintained at a temperature of 400° C. for 1000 hours.
その後、再び白金発熱体14に通電して、1−Fe2O
3がス感応性皮膜12を、300℃の温度に保持して、
空気中で抵抗値を測定したところ、1.6MOであった
。After that, the platinum heating element 14 is energized again to generate 1-Fe2O.
3 maintains the gas-sensitive film 12 at a temperature of 300°C,
When the resistance value was measured in air, it was 1.6 MO.
そして、l容量係のプロパンガスを含む空気中では、抵
抗値が67にΩであった。In air containing 1 volume of propane gas, the resistance value was 67Ω.
実施例 4
F e C12−KClおよびLiC1をそれぞれ1モ
ル、0.01モルおよび0.01モル秤量し、llの純
水に溶解させた。Example 4 1 mol, 0.01 mol, and 0.01 mol of F e C12-KCl and LiCl were weighed, respectively, and dissolved in 1 liter of pure water.
これとは別に、(NH4)2C204を1.2モル秤取
し、llの純水に溶解させた。Separately, 1.2 mol of (NH4)2C204 was weighed out and dissolved in 1 liter of pure water.
この(NH4)2C204溶液に、前記鉄塩混合溶液を
攪拌しながら加えた。The above iron salt mixed solution was added to this (NH4)2C204 solution while stirring.
5〜10分間攪拌して、黄色の沈澱物を生成させ、これ
を傾瀉法で洗浄した。Stirring for 5-10 minutes produced a yellow precipitate, which was washed by decantation.
それから沈澱物を乾燥させ、さらに水蒸気を飽和させた
温度400°Cの窒素気流中で3時間、熱分解させた。The precipitate was then dried and further pyrolyzed in a stream of nitrogen at a temperature of 400°C saturated with water vapor for 3 hours.
熱分解後、空気を遮断したまま室温まで冷却してKとL
iを含むFe3O4を得た。After pyrolysis, cool to room temperature while blocking air to extract K and L.
Fe3O4 containing i was obtained.
次にこのFe3O4を空気中において、100〜150
°Cの温度で、ゆっくり酸化させて、KとLiで変成さ
れたγ−Fe2O3を得た。Next, this Fe3O4 is placed in the air at 100 to 150
By slow oxidation at a temperature of °C, γ-Fe2O3 modified with K and Li was obtained.
そして、実施例3と同じ手順で可燃性ガス検知素子を作
った。Then, a combustible gas detection element was manufactured using the same procedure as in Example 3.
この可燃性ガス検知素子のガス感応性皮膜を、温度30
0°Cに加熱して、空気中で抵抗値を測定したところ、
1.6MQであった。The gas-sensitive film of this combustible gas detection element was coated at a temperature of 30
When heated to 0°C and measured the resistance value in air,
It was 1.6MQ.
さらに、0.l容量係のプロパンガスを含む空気中にお
ける抵抗値は、180にΩであった。Furthermore, 0. The resistance value in air containing propane gas per 1 volume was 180Ω.
次に、電気炉を用0)で、400℃の温度で1000時
間加熱してから、前述と同様にして抵抗値を測定した。Next, after heating in an electric furnace at a temperature of 400° C. for 1000 hours, the resistance value was measured in the same manner as described above.
その結果、空気中では1.8MΩであり、0、l容量幅
のプロパンガスを含む空気中では215KQであった。As a result, it was 1.8 MΩ in air, and 215 KQ in air containing propane gas with a capacity range of 0.1.
以上のように、L 120− Na2Oおよびに20の
酸化物群から選ばれた少なくとも1種を、0.1−10
モルφ含む、γ−F e203は、ガス感応特性に優れ
ているとともに、高温放置に対して特性がきわめて安定
している。As described above, L120-Na2O and at least one selected from the group of 20 oxides are added in an amount of 0.1-10
γ-F e203 containing mole φ has excellent gas sensitivity characteristics and has extremely stable characteristics when left at high temperatures.
高温放置に関しては、上記実施例では無通電で空気中に
放置という条件下での結果についてのみ述べたが、通電
加熱状態で放置しても、あるいは可燃性ガスを含む空気
中に放置しても、特性の安定性に優れて0)た。Regarding high-temperature storage, in the above example, only the results were described under the condition of leaving the product in the air with no electricity applied, but even if the product was left in an electrically heated state or in an air containing flammable gas. , and had excellent stability of properties.
さらに、温度サイクルや振動に対しても、安定しており
、バルク状あるいは皮膜状の焼結体としての特徴が十分
に得られた。Furthermore, it was stable against temperature cycles and vibrations, and had sufficient characteristics as a bulk or film-like sintered body.
そして、その形状は、使用目的や使用場所などに応じて
、バルク状あるいは皮膜状のいずれかにもすることがで
きる。The shape can be either a bulk shape or a film shape depending on the purpose of use and the place of use.
また、ガス感応後の抵抗値復帰時間を、使用温度を高め
ることができるため、Liなどを含まないものに比べて
、3分の1〜5分のlに短縮することができた。Furthermore, since the operating temperature can be increased, the time required for the resistance value to recover after gas sensitivity can be shortened to one-third to one-fifth of that of a material that does not contain Li or the like.
出発材料としては、実施例に示した化合物に限られるも
のではなく、最終的にγ−Fe2O3に、L i20
e Na2Oおよびに20のうちの少なくとも1種が含
まれている焼結体になるものであればよい。The starting materials are not limited to the compounds shown in the examples, but ultimately γ-Fe2O3, Li20
Any material may be used as long as it forms a sintered body containing at least one of the following.
実施例1.2におけるような高温焼結の際の雰囲気は、
窒素に限られるものでなく、アルゴンをはじめとする不
活性ガス、炭酸ガス、あるいは少量の水素を含む不活性
なガスなどの非酸化性雰囲気、または真空であってもよ
い。The atmosphere during high temperature sintering as in Example 1.2 was
The atmosphere is not limited to nitrogen, and may be a non-oxidizing atmosphere such as an inert gas such as argon, carbon dioxide gas, or an inert gas containing a small amount of hydrogen, or a vacuum.
そして、バルク状のγ−Fe203焼結体を作製するた
めの焼成温度は、500〜1200°Cの範囲内とする
ことが推奨される。The firing temperature for producing the bulk γ-Fe203 sintered body is recommended to be within the range of 500 to 1200°C.
焼結温度が500℃より低くなると、焼結が不十分にな
り、機械的強度や耐水性、耐湿性が低下する。When the sintering temperature is lower than 500° C., sintering becomes insufficient and mechanical strength, water resistance, and moisture resistance decrease.
また、それが1200’cを越えると粒成長が著しくな
り、F e 304を酸化してγ−Fe2O3とするこ
とが困難になるとともに、応答時間と復帰時間が長くな
る。Furthermore, if it exceeds 1200'c, grain growth becomes significant, making it difficult to oxidize Fe 304 to γ-Fe2O3, and the response time and recovery time become longer.
そして、この場合、変成Fe 304を酸化して、γ−
Fe 203を得るときの酸化温度は、700°C以下
とすることが、望ましい。In this case, the modified Fe 304 is oxidized to produce γ-
The oxidation temperature when obtaining Fe 203 is desirably 700°C or less.
それが700℃を越えると、α−F e 203が多量
に析出するようになる。When the temperature exceeds 700°C, a large amount of α-F e 203 will precipitate.
量産するときには、■00〜200℃の比較的低い温度
から徐々に高めることがよく、このような酸化処理をす
ると、焼結体にひび割れを生じたりするようなことはな
くなる。For mass production, it is best to gradually increase the temperature from a relatively low temperature of 00 to 200° C. If such an oxidation treatment is performed, cracks will not occur in the sintered body.
実施例3,4のように皮膜状の焼結体とするときには、
変成γ−Fe203の粉末は、0.1.cm以下の粒径
とすることが望ましい。When forming a film-like sintered body as in Examples 3 and 4,
The powder of modified γ-Fe203 is 0.1. It is desirable that the particle size be less than 1 cm.
あまり粒径が大きくなると、基板に対する接着性が悪く
なり、容易に剥離してしまう。If the particle size becomes too large, the adhesion to the substrate will deteriorate and it will be easily peeled off.
そして、その焼結温度は500℃を越えないことが望ま
しい。It is desirable that the sintering temperature does not exceed 500°C.
それが高すぎると、変成γ−Fe 20sの粒径が小さ
いため、過燐酸になりやすく、可燃性ガスに対する感応
性が悪くなる。If it is too high, the modified γ-Fe 20s has a small particle size, so it tends to become superphosphoric acid, and the sensitivity to combustible gas deteriorates.
以上説明したように、本発明にかかる素子は、γFe2
O3、およびLi2OとNa2Oとに20とからなる酸
化物群から選択された少くとも1種をそれぞれ90〜9
9.9モルφ、lO〜o、 tモル袈の組成比率で含む
焼結体をガス感応体としこれに電気抵抗測定用の一対の
電極と加熱用のヒータを付与して、可燃性ガスの濃度変
化により、該ガス感応体の電気抵抗値が変化することを
用いて可燃性ガスを検知することを特徴とするものであ
る。As explained above, the device according to the present invention has γFe2
O3, and at least one selected from the group of oxides consisting of Li2O, Na2O, and 20% each.
A sintered body containing a composition ratio of 9.9 moles φ, lO~o, and t moles was used as a gas sensitive body, and a pair of electrodes for measuring electrical resistance and a heater for heating were attached to it to detect the combustible gas. This method is characterized in that a combustible gas is detected by using the change in the electrical resistance value of the gas sensitive body due to a change in concentration.
この素子は、可燃性ガスに対する感応性、および特性の
安定性に優れており、また焼結体であるため、熱衝撃や
機械的振動に対しても強いものである。This element has excellent sensitivity to combustible gases and stable characteristics, and since it is a sintered body, it is resistant to thermal shock and mechanical vibration.
さらに、可燃性ガスに対する応答時間および復帰時間が
短く、特に復帰時間はγ−Fe2O3のみの場合に比べ
て、大巾に短縮され、応答性が著しく改善される。Furthermore, the response time and recovery time to combustible gas are short, and in particular, the recovery time is greatly shortened compared to the case of only γ-Fe2O3, and the response is significantly improved.
外気温度の変動に対しても、素子の抵抗変化が小さく、
実用性の高いものである。The resistance change of the element is small even when the outside temperature fluctuates.
It is highly practical.
なお、本発明においては、α−Fe203成分などが焼
結体中にある程度台まれていても、その本質的な性質が
失われてしまうようなことがない。In addition, in the present invention, even if the α-Fe203 component or the like is contained in the sintered body to some extent, its essential properties will not be lost.
そして、より特性を向上させたり、あるいは用途により
適した性質を得たりするために、他の成分をさらに添加
含有させることも可能である。Further, in order to further improve the characteristics or obtain properties more suitable for the purpose, it is also possible to further add and contain other components.
そして、可燃性ガスとしては、プロパンやイソブタン以
外に、都市ガスやエチルアルコール、メチルアルコール
、水素、アセトン、その他一般の炭化水素をはじめ、種
々の可燃性のガス状物質をあげることができる。In addition to propane and isobutane, combustible gases include various flammable gaseous substances such as city gas, ethyl alcohol, methyl alcohol, hydrogen, acetone, and other general hydrocarbons.
第1図は本発明にかかる可燃性ガス検知素子の一実施例
の構造を示す斜視図、第2図はこの素子の組成比率と抵
抗、感度との関係の一例を示す図、第3図は他の実施例
の構造を示す斜視図である。
1・・・・・・バルク状のガス感応体、2・・・・・・
電極、4・・・・・・白金発熱体、12・・・・・・皮
膜状のガス感応体、13・・・・・・電極、14・・・
・・・白金発熱体。FIG. 1 is a perspective view showing the structure of one embodiment of the combustible gas detection element according to the present invention, FIG. 2 is a diagram showing an example of the relationship between the composition ratio, resistance, and sensitivity of this element, and FIG. FIG. 7 is a perspective view showing the structure of another embodiment. 1... Bulk gas sensitive material, 2...
Electrode, 4... Platinum heating element, 12... Film-like gas sensitive body, 13... Electrode, 14...
...Platinum heating element.
Claims (1)
に20とからなる酸化物群から選択された少くとも1種
をそれぞれ90〜99.9モルφ、lO〜0.1モル優
の組成比率で含む焼結体をガス感応体とし、このガス感
体に電気抵抗測定用の一対の電極と加熱用のヒータを付
与して、可燃性ガスの濃度変化により、前記ガス感応体
の電気抵抗値が変化することを用いて可燃性ガスを検知
することを特徴とするものである。1 7" Sintering containing at least one selected from the oxide group consisting of Fe2O3, Li2O, Na2O, and 20 in a composition ratio of 90 to 99.9 mol φ and lO to 0.1 mol, respectively. The body is used as a gas sensitive body, and a pair of electrodes for measuring electrical resistance and a heater for heating are provided on this gas sensitive body, so that the electrical resistance value of the gas sensitive body changes due to a change in the concentration of a combustible gas. It is characterized by detecting combustible gas using
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13428775A JPS5853736B2 (en) | 1975-11-08 | 1975-11-08 | Kanenseigaskenchisoshi |
| US05/738,745 US4045178A (en) | 1975-11-08 | 1976-11-03 | Reducing gas sensor |
| FR7633525A FR2331016A1 (en) | 1975-11-08 | 1976-11-05 | REDUCING GAS DETECTORS CONTAINING GAMMA FERRIC OXIDE AND AT LEAST ONE OTHER METAL OXIDE |
| DE19762651160 DE2651160C3 (en) | 1975-11-08 | 1976-11-05 | Sensor for reducing gases |
| GB46458/76A GB1527406A (en) | 1975-11-08 | 1976-11-08 | Reducing gas sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13428775A JPS5853736B2 (en) | 1975-11-08 | 1975-11-08 | Kanenseigaskenchisoshi |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5258597A JPS5258597A (en) | 1977-05-14 |
| JPS5853736B2 true JPS5853736B2 (en) | 1983-12-01 |
Family
ID=15124743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13428775A Expired JPS5853736B2 (en) | 1975-11-08 | 1975-11-08 | Kanenseigaskenchisoshi |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5853736B2 (en) |
-
1975
- 1975-11-08 JP JP13428775A patent/JPS5853736B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5258597A (en) | 1977-05-14 |
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