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JPS5918806B2 - Ceramic composition of dielectric resonator for microwave band - Google Patents
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JPS5918806B2 - Ceramic composition of dielectric resonator for microwave band - Google Patents

Ceramic composition of dielectric resonator for microwave band

Info

Publication number
JPS5918806B2
JPS5918806B2 JP51035243A JP3524376A JPS5918806B2 JP S5918806 B2 JPS5918806 B2 JP S5918806B2 JP 51035243 A JP51035243 A JP 51035243A JP 3524376 A JP3524376 A JP 3524376A JP S5918806 B2 JPS5918806 B2 JP S5918806B2
Authority
JP
Japan
Prior art keywords
microwave band
dielectric
dielectric resonator
ceramic composition
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51035243A
Other languages
Japanese (ja)
Other versions
JPS52118599A (en
Inventor
征四郎 寺沢
太郎 三浦
誠 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP51035243A priority Critical patent/JPS5918806B2/en
Publication of JPS52118599A publication Critical patent/JPS52118599A/en
Publication of JPS5918806B2 publication Critical patent/JPS5918806B2/en
Expired legal-status Critical Current

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  • Control Of Motors That Do Not Use Commutators (AREA)
  • Microwave Amplifiers (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Ceramic Capacitors (AREA)
  • Inorganic Insulating Materials (AREA)

Description

【発明の詳細な説明】 本発明はマイクロ波、とくに4〜12GHz帯域におい
て誘電率の温度係数が優れ、且つ誘電体損失(tanδ
)が極めて小さなマイクロ波帯域用誘電体共振器の磁器
組成物に関する。
Detailed Description of the Invention The present invention has an excellent temperature coefficient of dielectric constant in microwaves, particularly in the 4 to 12 GHz band, and a low dielectric loss (tan δ
) relates to a ceramic composition for an extremely small dielectric resonator for the microwave band.

マイクロ波回路の小型化、あるいは周波数安定化の手段
として誘電体共振器を応用した回路素子が次第に普及し
つつある。
Circuit elements using dielectric resonators are becoming increasingly popular as a means for downsizing microwave circuits or for frequency stabilization.

この様な用途に対し、誘電体磁器に必要とされる電気的
特性は無負荷Q(Qu)が大きいこと、換言すれば誘電
体損失(tanδ)が小さいこと、共振周波数の温度変
化を小さくするために誘電率ε沖温度依存性を小さくす
ること、そして共振器の大きさに影響するεの大きさが
適当であることなどであり、これらの特性が同時に満足
されなければならない。
For such applications, the electrical properties required for dielectric ceramics are a large no-load Q (Qu), in other words, a small dielectric loss (tan δ), and a small temperature change in the resonant frequency. Therefore, the temperature dependence of the dielectric constant ε must be made small, and the size of ε, which affects the size of the resonator, must be appropriate, and these characteristics must be satisfied at the same time.

この様な厳しい条件に対し、従来よりいくつかの誘電体
材料が知られているがいずれも上記特性を同時に満足さ
せることは不可能であつた。
Several dielectric materials have been known to meet such severe conditions, but it has been impossible for any of them to simultaneously satisfy the above characteristics.

そこで数種の副成物を混晶のかたちで含有せしめたり、
多元系の物質を合成して、その改善をはかる試みがなさ
れている。Ba2Ti002O、Ba−TiO2−Zr
O2系、あるいは(S「、Ca)(Lil/hNb3/
hTiX)O2、(Ba、Br、Ca)(TiZr)O
sなどがその例である。しかしながらこれらの誘電体組
成物においてはQu値に周波数依存性があり、λ−バン
ド(8〜12GHz)では、その劣化が著じるしく、当
該周波数帯域においては必らずしも満足されるものでは
なかつた。
Therefore, several types of by-products are included in the form of mixed crystals,
Attempts are being made to synthesize multi-component materials and improve them. Ba2Ti002O, Ba-TiO2-Zr
O2 system or (S", Ca) (Lil/hNb3/
hTiX)O2, (Ba, Br, Ca) (TiZr)O
An example is s. However, in these dielectric compositions, the Qu value has frequency dependence, and its deterioration is significant in the λ-band (8 to 12 GHz), so it cannot necessarily be satisfied in that frequency band. It wasn't.

一方製造技術的には多成分から成つているために組成比
のコントロールあるいは焼結条件の面で正確さを要求さ
れ、工業的に生産することに対し困難さを伴なうもので
ある。本発明者等は種々の酸化物、およびチタン酸塩な
どのマイクロ波帯における特性を詳細に検討し、前記必
要とされる諸特性を同時に保持させることにより当該周
波数においてもQu値の大きな磁器組成物を新たに見い
出したものである。
On the other hand, in terms of manufacturing technology, since it is made up of multiple components, precision is required in terms of composition ratio control or sintering conditions, making it difficult to produce industrially. The present inventors have studied in detail the properties of various oxides and titanates in the microwave band, and have created a ceramic composition with a large Qu value even at that frequency by simultaneously maintaining the necessary properties. It is a new discovery.

すなわち、εは小さいがεの温度係数(εTC)が正で
Qu値の大きなチタン酸マグネシウム(MgTiO3)
と、εTCは負であるが、ε、Qu値が大きな酸化チタ
ン(TiO2)とを組合せて基体の組成物としてさらに
単独ではεTCが負でQu値も低いチタン酸カルシウム
(CaTiO3)を、わずかに添加含有させて存在させ
ることにより焼結を促進しマイクロ波帯域における特性
の優れた誘電体共振器用磁器組成物を得るものである。
そして、この優れた効果は前記3成分をバランスよく混
晶とすることにより得られるもので、その組成範囲は、
MgTlO3を70m01%以上、TiO,を30(自
)l%以下とする基体の組成物に対してCaTiO3を
1〜9重量%添加含有するものである。以下、本発明を
実施例に基づき説明する。実施例 原判には試薬級純度の酸化マグネシウム、酸化チタン、
炭酸カルシウムを用いた。
In other words, magnesium titanate (MgTiO3) has a small ε but a positive temperature coefficient of ε (εTC) and a large Qu value.
In combination with titanium oxide (TiO2), which has a negative εTC but a large ε and Qu value, calcium titanate (CaTiO3), which alone has a negative εTC and a low Qu value, is used as a base composition. By adding and existing it, sintering is promoted and a ceramic composition for a dielectric resonator having excellent characteristics in the microwave band can be obtained.
This excellent effect is obtained by forming a well-balanced mixed crystal of the three components, and the composition range is as follows:
CaTiO3 is added in an amount of 1 to 9% by weight based on a base composition in which MgTlO3 is 70 m01% or more and TiO is 30 (auto)1% or less. Hereinafter, the present invention will be explained based on examples. The example original paper contains reagent-grade purity magnesium oxide, titanium oxide,
Calcium carbonate was used.

先づMgTiO3およびCaTiO,を得るために所定
量の原料を秤量し湿式混合を行ない済過、乾燥後900
℃〜1200℃、3時間空気中で焼成し、粉末状のMg
TiO3、およびCaTiO3を得た。一方酸化チタン
もTiO2を用いた。これらの試料を再度所定の比率に
なるように湿式粉砕を行なつた後、乾燥してから例えば
乾式成型するための好適な量のバインダーを加えてから
造粒して、しかる後成型寸法形状によつてきまる粒度に
前記試料を選定しておいて、例えば油圧ブレス装置の金
型に粒状の前記試料を挿入して、前記油圧プレス装置の
上型・下型等により600〜8,000kν蝕2程度の
範囲で形状によつてきまる所定圧力を前記試料に印加し
て成型を行ない、1250℃〜1400℃で5時間酸素
雰囲気中において焼結した。
First, in order to obtain MgTiO3 and CaTiO, predetermined amounts of raw materials were weighed and wet mixed, and after drying,
℃~1200℃, fired in air for 3 hours, powdered Mg
TiO3 and CaTiO3 were obtained. On the other hand, TiO2 was also used as the titanium oxide. These samples are wet-pulverized again to a predetermined ratio, dried, and then a suitable amount of binder for dry molding is added, and then granulated, and then molded into dimensional shapes. The sample is selected to have a uniform grain size, and the granular sample is inserted into a mold of a hydraulic press machine, and then subjected to 600 to 8,000 kν erosion by the upper and lower molds of the hydraulic press machine. The samples were molded by applying a predetermined pressure depending on the shape in a range of about 2, and sintered in an oxygen atmosphere at 1250 DEG C. to 1400 DEG C. for 5 hours.

マイクロ波帯域における誘電体共振器の特性の測定は2
枚の平行金属板のあいだに円柱状試料をはさんで構成さ
れる共振器のTEOlモードによつて行なつた。
Measuring the characteristics of a dielectric resonator in the microwave band is 2
This was carried out using the TEOl mode of a resonator consisting of a cylindrical sample sandwiched between two parallel metal plates.

誘電率の温度係数εTCは−30℃〜+70℃の間で測
定した。第1表はMgTlO3とTiO2の組成比を変
化させた場合の特性値を示すものである。
The temperature coefficient of dielectric constant εTC was measured between -30°C and +70°C. Table 1 shows the characteristic values when the composition ratio of MgTlO3 and TiO2 is changed.

MgTiO3が70m01%に達しないとεTCは負で
ありCaTiO,の添加により更に大きく負側へ移動す
るので好ましくない。MgTlO3が70m01%以上
、TiO2が30m01(L以下ではεTCが正であり
Qu値力塙い。MgTlO3が70m01%以上、Ti
O,が30m01%以下の場合についてCaTiO3を
少量添加した特性を第2表に示す。CaTiO3の添加
量がMgTlO3とT!02を基体とした組成物に対し
て1重量%に達しないとεがあまりにも低く、さらにε
TCの改善効果も顕著でない。又、同じく9重量%を越
えるとεTCが大きく負側へ移動し、Qu値も劣化する
。なお、第2表はMgTlO39OmOl%、TlO2
lOmOl%を基体とした組成物の場合について示した
If MgTiO3 does not reach 70m01%, εTC is negative, and the addition of CaTiO causes it to move further to the negative side, which is not preferable. MgTlO3 is 70m01% or more, TiO2 is 30m01 (L or less, εTC is positive and the Qu value is strong. MgTlO3 is 70m01% or more, TiO2 is 30m01 or less.
Table 2 shows the characteristics when a small amount of CaTiO3 is added when O, is 30m01% or less. The amount of CaTiO3 added is MgTlO3 and T! If it does not reach 1% by weight for the composition based on 02, ε is too low, and furthermore, ε
The improvement effect of TC is also not significant. Similarly, if it exceeds 9% by weight, εTC will largely shift to the negative side, and the Qu value will also deteriorate. In addition, Table 2 shows MgTlO39OmOl%, TlO2
The case of a composition based on 1OmOl% is shown.

第1図はCaTiO3の添加による焼結性についての効
果を示すものである。
FIG. 1 shows the effect of adding CaTiO3 on sinterability.

第1図からも明らかな如くCaTiO3の少量添加によ
り焼結密度が改善され、焼結温度を下げることができる
。第2図は従来の誘電体組成物と本願発明による誘電体
共振器用の磁器組成物のマイクロ波帯域における周波数
特性を示すグラフである。
As is clear from FIG. 1, the addition of a small amount of CaTiO3 improves the sintered density and allows the sintering temperature to be lowered. FIG. 2 is a graph showing frequency characteristics in the microwave band of a conventional dielectric composition and a ceramic composition for a dielectric resonator according to the present invention.

(1)は従来のBa−TlO2−ZrO2系、(2)は
従来のBa2Ti9O2Oであり、(3)は本願発明の
試料應10である。この様に、本願発明の誘電体磁器組
成物はマイクロ波帯域において18〜22程度の誘電率
εが得られ、しかも誘電率の温度係数は広い温度範囲に
わたつて±50pprr1/℃程度の範囲内とすること
ができる。更にQu値も10000以上(Tanδ:1
×10−4以下)となり特にマイクロ波帯域(X−バン
ド)用として優れた効果を有する。特にMgTlO39
OmOl%、TlO2lOmOl%を基体とした組成物
に、CaTiO36.2重量%を添加した組成において
は9.5GHzにおいてε=20,Qu=10000(
Tan一1×10−4)εTC=0.9ppm/℃と優
れた効果を示している。このように本発明はQu値がマ
イクロ波帯において、きわめて高い値を示し、しかも誘
電率温度係数は著しく小さいので、マイクロ波回路の小
型化あるいは共振周波数の安定化が得られる。
(1) is a conventional Ba-TlO2-ZrO2 system, (2) is a conventional Ba2Ti9O2O, and (3) is sample 10 of the present invention. As described above, the dielectric ceramic composition of the present invention can obtain a dielectric constant ε of about 18 to 22 in the microwave band, and the temperature coefficient of the dielectric constant is within a range of about ±50 pprr1/℃ over a wide temperature range. It can be done. Furthermore, the Qu value is 10,000 or more (Tan δ: 1
x10-4 or less), and has an excellent effect particularly for use in the microwave band (X-band). Especially MgTlO39
In a composition in which 6.2% by weight of CaTiO is added to a composition based on OmOl%, TlO2lOmOl%, ε = 20, Qu = 10000 (
It shows an excellent effect with Tan-1×10-4)εTC=0.9 ppm/°C. As described above, in the present invention, the Qu value is extremely high in the microwave band, and the temperature coefficient of dielectric constant is extremely small, so that the microwave circuit can be miniaturized or the resonance frequency can be stabilized.

特に誘電体共振器に用いて優れた性能を得ることができ
るのであり、例えば、マイクロ波のローカル発信器装置
は、きびしい周波数の安全性を望まれるので、12GH
z帯において本発明の誘電体共振器用磁器組成物なしに
は到底実施できないほどのものである。また、マイクロ
波誘電体共振器を用いた湿度センサーにおいても、常時
のQuが高いので感度がよく、しかも再元性にも優れて
いることが、充分に認められた。
In particular, excellent performance can be obtained when used in dielectric resonators. For example, microwave local oscillator devices require strict frequency safety, so 12 GH
In the z-band, this cannot be achieved without the ceramic composition for a dielectric resonator of the present invention. Furthermore, it has been fully recognized that a humidity sensor using a microwave dielectric resonator has good sensitivity because Qu is always high, and also has excellent reproducibility.

本発明の誘電体共振器のモードは前述実施例のTEO,
モードはもちろん、HOlモード、TEMモードまたは
、電界と磁界の分布が前記に近似なものはもちろん、応
用された各モードにおいても誘電体共振器としての動作
において同じような効果を望むことができた。また、導
波管内等に本発明の誘電体共振器を設けて、マイクロ波
を伝ばんさせる線路内に用いても、その利得は充分に改
善されており、微小電力の装置から、大電力の装置にい
たるまでも各装置の発熱温度上昇を極力防止できる等、
マイクロ波帯通信機器においての応用分野は、きわめて
広くなつた。以上の如く本願発明の組成範囲の誘電体共
振器用磁器組成物は特にマイクロ波帯域(X−パットつ
用として優れた特性を有するもので産業上有益な発明で
ある。
The mode of the dielectric resonator of the present invention is the TEO of the above embodiment,
In addition to the HOl mode, TEM mode, or those in which the distribution of electric and magnetic fields approximates the above, it is possible to expect the same effect in operation as a dielectric resonator in each applied mode. . Furthermore, even if the dielectric resonator of the present invention is installed in a waveguide or the like and used in a line for propagating microwaves, the gain is sufficiently improved, and the gain is sufficiently improved. Even down to the equipment, it is possible to prevent the heat generation temperature rise of each device as much as possible, etc.
The field of application in microwave band communication equipment has become extremely wide. As described above, the ceramic composition for dielectric resonators having the composition range of the present invention has excellent properties particularly for use in the microwave band (X-pat), and is an industrially useful invention.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明のCaTiO3の添加効果を示すグラフ
である。
FIG. 1 is a graph showing the effect of adding CaTiO3 of the present invention.

Claims (1)

【特許請求の範囲】[Claims] 1 チタン酸マグネシウムをMgTiO_3に換算して
70mol%以上、酸化チタンをTiO_2に換算して
30mol%以下よりなる組成物に対してチタン酸カル
シウムCaTiO_3を1〜9重量%添加含有してなる
マイクロ波帯域用誘電体共振器の磁器組成物。
1. A microwave band comprising 1 to 9% by weight of calcium titanate CaTiO_3 added to a composition consisting of 70 mol% or more of magnesium titanate in terms of MgTiO_3 and 30 mol% or less of titanium oxide in terms of TiO_2. Porcelain compositions for dielectric resonators.
JP51035243A 1976-03-31 1976-03-31 Ceramic composition of dielectric resonator for microwave band Expired JPS5918806B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51035243A JPS5918806B2 (en) 1976-03-31 1976-03-31 Ceramic composition of dielectric resonator for microwave band

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51035243A JPS5918806B2 (en) 1976-03-31 1976-03-31 Ceramic composition of dielectric resonator for microwave band

Publications (2)

Publication Number Publication Date
JPS52118599A JPS52118599A (en) 1977-10-05
JPS5918806B2 true JPS5918806B2 (en) 1984-05-01

Family

ID=12436386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51035243A Expired JPS5918806B2 (en) 1976-03-31 1976-03-31 Ceramic composition of dielectric resonator for microwave band

Country Status (1)

Country Link
JP (1) JPS5918806B2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5340784A (en) * 1992-08-03 1994-08-23 Ngk Spark Plug Company, Ltd. Microwave dielectric ceramic composition
JP3479324B2 (en) * 1993-08-19 2003-12-15 日本特殊陶業株式会社 Microwave dielectric porcelain composition and method for producing the same
JP3735183B2 (en) * 1997-05-29 2006-01-18 日本特殊陶業株式会社 Microwave dielectric ceramic composition
JPH11199320A (en) * 1997-11-06 1999-07-27 Ngk Spark Plug Co Ltd Microwave dielectric porcelain composition

Also Published As

Publication number Publication date
JPS52118599A (en) 1977-10-05

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