JPS5928883B2 - Barium/sodium niobate optical waveguide - Google Patents
Barium/sodium niobate optical waveguideInfo
- Publication number
- JPS5928883B2 JPS5928883B2 JP3101776A JP3101776A JPS5928883B2 JP S5928883 B2 JPS5928883 B2 JP S5928883B2 JP 3101776 A JP3101776 A JP 3101776A JP 3101776 A JP3101776 A JP 3101776A JP S5928883 B2 JPS5928883 B2 JP S5928883B2
- Authority
- JP
- Japan
- Prior art keywords
- optical waveguide
- barium
- bnn
- sodium niobate
- bnt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 title claims description 14
- 229910052788 barium Inorganic materials 0.000 title claims description 4
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 title claims description 4
- UYLYBEXRJGPQSH-UHFFFAOYSA-N sodium;oxido(dioxo)niobium Chemical compound [Na+].[O-][Nb](=O)=O UYLYBEXRJGPQSH-UHFFFAOYSA-N 0.000 title claims 2
- 239000013078 crystal Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 7
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 2
- 229910052708 sodium Inorganic materials 0.000 claims description 2
- 239000011734 sodium Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 7
- 239000007791 liquid phase Substances 0.000 description 5
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 3
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 230000008832 photodamage Effects 0.000 description 2
- PILOURHZNVHRME-UHFFFAOYSA-N [Na].[Ba] Chemical compound [Na].[Ba] PILOURHZNVHRME-UHFFFAOYSA-N 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Optical Integrated Circuits (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Description
【発明の詳細な説明】
近年、タンタル酸リシウムやニオブ酸リシウム単結晶を
用いた光導波路や光変調等の能動機能を有する光導波路
用素子の開発が盛んになつている。DETAILED DESCRIPTION OF THE INVENTION In recent years, optical waveguides using lithium tantalate or lithium niobate single crystals and optical waveguide elements having active functions such as optical modulation have been actively developed.
光導波路は基板上に高屈折率を有する単結晶の層を形成
することにより実現でき、これらの作成法として、スパ
ッタ法、液相エピタキシャル法、電界拡散法、逆拡散法
等が試みられている。特にタンタル酸リシウムを基板と
したニオブ゛酸リシウム単結晶からなる光導波路の開発
が最もよくなされており、高品質のものが得られている
。しかしながら、ニオブ酸リシウムはレーザ光の照射に
より局所的な屈折率変化を生じ易く、（光損傷と呼ばれ
ている）実用上障害となつている。本発明の目的はこの
ような欠点を除去し、光損傷の生じない新規な光導波路
を提供することにある。Optical waveguides can be realized by forming a single crystal layer with a high refractive index on a substrate, and methods to create these include sputtering, liquid phase epitaxial method, electric field diffusion method, and reverse diffusion method. . In particular, optical waveguides made of lithium niobate single crystals with lithium tantalate as a substrate have been most commonly developed, and high quality products have been obtained. However, lithium niobate tends to undergo local refractive index changes when irradiated with laser light (referred to as photodamage), which poses a practical problem. An object of the present invention is to eliminate such drawbacks and provide a novel optical waveguide that does not cause optical damage.
以下実施例により詳細に説明する。ニオブ酸バリウム・
ナトリウム（Ｂａ２ＮａＮｂ５０１５、以下ＢＮＮと略
す）単結晶は光損傷を生じない物質として知られている
。したがつてＢＮＮを光導波路として用いることは容易
に考えつくことである。しかしながら、基板として何を
用いるかが最大の問題となる。本発明者らは基板として
、ＢＮＮより屈折率が小さく、かつ格子定数の不整合が
小さい単結晶を探索した結果、ＢＮＮと同型のタンタル
酸バリウム・ナトリウム（Ｂａ２ＮａＴａ５Ｏ１５、以
下ＢＮＴと略す）が最適であることを見出した。ＢＮＴ
は窒素雰囲気中でイリジウムるつぼを用いて、約１８０
０℃で引上法により育成した。ＢＮＴはキューリ温度が
３８にであり、室温では正方晶系に属し、格子定数はａ
■１７．７６３Λ、ｃ＝３．９２５Λであつた。一方
、ＢＮＮは室温では斜方晶系であり、格子定数はａ＝１
７．６２６λ、ｂ＝１７．５９２λ、ｃ＝３．９９５λ
であり、ａ軸方向の格子定数の差は０．７％程度で、格
子不整合はほとんど問題にならないといえる。また更に
重要な定数である屈折率の値は６３２８λの波長の光に
対して、ＢＮＴはｎａ−２．１８、ｎｃ■２．０９であ
つた。一方、ＢＮＮではｎａ＝２．３２、ｎｂ＝２．２
５、ｎｃ＝２．１７であり、いずれの値もＢＮＮの方が
ＢＮＴより大きかつた。したがつてＢＮＮとＢＮＴとか
ら成る組合せは恰好の光導波路を提供するものと予想さ
れる。そこで液相エピタキシャル法を用いてＢＮＴのＣ
板上にＢＮＮ単結晶の育成を試みた。This will be explained in detail below using examples. barium niobate
Sodium (Ba2NaNb5015, hereinafter abbreviated as BNN) single crystal is known as a material that does not cause optical damage. Therefore, it is easy to think of using BNN as an optical waveguide. However, the biggest problem is what to use as the substrate. The present inventors searched for a single crystal with a lower refractive index and smaller lattice constant mismatch than BNN as a substrate, and found that barium sodium tantalate (Ba2NaTa5O15, hereinafter abbreviated as BNT), which has the same type as BNN, was optimal. I discovered something. BNT
is approximately 180% using an iridium crucible in a nitrogen atmosphere.
It was grown by the pulling method at 0°C. BNT has a Curie temperature of 38, belongs to the tetragonal system at room temperature, and has a lattice constant of a
■17.763Λ, c=3.925Λ. On the other hand, BNN is orthorhombic at room temperature, and the lattice constant is a=1
7.626λ, b=17.592λ, c=3.995λ
The difference in lattice constant in the a-axis direction is about 0.7%, and it can be said that lattice mismatch is hardly a problem. Furthermore, the value of the refractive index, which is an even more important constant, was na-2.18 and nc-2.09 for BNT with respect to light having a wavelength of 6328λ. On the other hand, in BNN na=2.32, nb=2.2
5, nc=2.17, and both values were larger for BNN than for BNT. Therefore, the combination of BNN and BNT is expected to provide a suitable optical waveguide. Therefore, we used a liquid phase epitaxial method to
An attempt was made to grow a BNN single crystal on a plate.
ＢＮＴの融点は１８００℃であり、ＢＮＮのそれは１４
５０℃であるため、液相エピタキシャル法で育成するた
めには更に好都合である。本発明者らは適当なフラック
スを用いてＢＮＮの融点を更に降下せしめ育成を容易に
した。液相エピタキシャル法により、ＢＮＴ基板上に育
成されたＢＮＮは極めて良好な光導波路として動作する
ことをＨ８−Ｎｅレーザを用いて確認した。このＢＮＮ
は光損傷を示さなかつたことは勿論である。本発明は、
ＢＮＴ単結晶を基板とするＢＮＮ光導波路を提供するこ
とが主な目的であつて、製造方法を液相エピタキシャル
法に限定するものではない。The melting point of BNT is 1800℃, and that of BNN is 14
Since the temperature is 50° C., it is more convenient for growth by liquid phase epitaxial method. The present inventors used an appropriate flux to further lower the melting point of BNN and facilitate its growth. It was confirmed using an H8-Ne laser that BNN grown on a BNT substrate by the liquid phase epitaxial method operates as an extremely good optical waveguide. This BNN
Of course, it did not show any photodamage. The present invention
The main purpose is to provide a BNN optical waveguide using a BNT single crystal as a substrate, and the manufacturing method is not limited to the liquid phase epitaxial method.
Claims (1)
ることを特徴とするニオブ酸バリウム・ナトリウム光導
波路。1. A barium/sodium niobate optical waveguide characterized by using a barium/sodium tantalate single crystal as a substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3101776A JPS5928883B2 (en) | 1976-03-22 | 1976-03-22 | Barium/sodium niobate optical waveguide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3101776A JPS5928883B2 (en) | 1976-03-22 | 1976-03-22 | Barium/sodium niobate optical waveguide |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52114342A JPS52114342A (en) | 1977-09-26 |
| JPS5928883B2 true JPS5928883B2 (en) | 1984-07-17 |
Family
ID=12319757
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3101776A Expired JPS5928883B2 (en) | 1976-03-22 | 1976-03-22 | Barium/sodium niobate optical waveguide |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5928883B2 (en) |
-
1976
- 1976-03-22 JP JP3101776A patent/JPS5928883B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52114342A (en) | 1977-09-26 |
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