JPS5928894B2 - electro-optic light modulator - Google Patents
electro-optic light modulatorInfo
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- JPS5928894B2 JPS5928894B2 JP8209576A JP8209576A JPS5928894B2 JP S5928894 B2 JPS5928894 B2 JP S5928894B2 JP 8209576 A JP8209576 A JP 8209576A JP 8209576 A JP8209576 A JP 8209576A JP S5928894 B2 JPS5928894 B2 JP S5928894B2
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Description
【発明の詳細な説明】
本発明はレーザ光の振幅を時間的に変調する光変調器、
とくにタンタル酸リチウム結晶の電気光学効果を利用し
た光変調器に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention provides an optical modulator that temporally modulates the amplitude of a laser beam;
In particular, it relates to optical modulators that utilize the electro-optic effect of lithium tantalate crystals.
レーザ光の強度を電気信号に応じて高速に変調する光変
調器は、光通信や光情報処理のように高速大容量の情報
を伝達・処理する装置、レーザディスプレイやレーザ記
録装置のように高速度の表示や記録をする装置などには
、必要不可欠な素子である。Optical modulators that modulate the intensity of laser light at high speed according to electrical signals are used in devices that transmit and process high-speed, large-capacity information such as in optical communication and optical information processing, and in high-speed devices such as laser displays and laser recording devices. It is an essential element for devices that display and record speed.
結晶の光にたいする屈折率が、結晶に外部より印加する
電界の大きさに比例して変化する効果、すなわちポツケ
ルス効果を使つた電気光学光変調器は、他の効果たとえ
ば機械的な振動や音響光学効果を使つた光変調器に比べ
て広い変調帯域幅をもち、はるかに速い速度で光を変調
することができる。このため前述の目的に広く用いられ
ようとしている。従来の電気光学効果を使つた光変調器
の原理、例えば現在もつとも良く使われている強誘電結
晶LiTaO3を使つた横電界型の原理は、以下に述べ
るように広く理解されている。Electro-optic light modulators use the Pockels effect, an effect in which the refractive index of a crystal for light changes in proportion to the magnitude of the electric field applied to the crystal from the outside, and can be used for other effects such as mechanical vibration or acousto-optic. It has a wider modulation bandwidth than optical modulators that use effects, and can modulate light at a much faster speed. For this reason, it is becoming widely used for the above-mentioned purposes. The principle of conventional optical modulators using the electro-optic effect, for example, the principle of the transverse electric field type using ferroelectric crystal LiTaO3, which is currently widely used, is widely understood as described below.
結晶のz軸方向に印加した電界によつて、結晶中を伝わ
る光波の屈折率楕円体の2つの主軸方向の光電界成分の
間に位相差が生ずる。このため、結晶の主軸に対し任意
の角度の振動電界成分をもつて入射した直線偏光光は、
結晶を出射するとき一般に楕円偏光光となる。この光を
結晶主軸の一方向成分のみを透過する検光子を透過させ
ることによつて、光の強度が変調される。上記の2つの
主軸方向の光電界成分間の位相差中は2π
φ=−(nz−nY)1
λ
ここで
nY■no−″2nδγ31E
゛ 1
nZ■nE−丁n6γ33E
であり、λは空気中の光の波長、1は結晶の光の透過す
る方向の長さ、n0;nEはそれぞれ結晶の常光線、異
常光線に対する屈折率、γ31、γ33は電気光学係数
、Eは結晶に印加する電界の強度である。An electric field applied in the z-axis direction of the crystal causes a phase difference between the optical electric field components in the two principal axes of the index ellipsoid of a light wave propagating through the crystal. Therefore, linearly polarized light incident with an oscillating electric field component at an arbitrary angle with respect to the main axis of the crystal is
When the light exits the crystal, it generally becomes elliptically polarized light. The intensity of the light is modulated by transmitting this light through an analyzer that transmits only a component in one direction of the crystal principal axis. The phase difference between the optical electric field components in the above two principal axis directions is 2π φ=-(nz-nY)1 λ where nY■no-''2nδγ31E ゛ 1 nZ■nE-dn6γ33E, and λ is , 1 is the length of the crystal in the direction of light transmission, n0; nE is the refractive index of the crystal for ordinary and extraordinary rays, respectively, γ31 and γ33 are the electro-optic coefficients, and E is the electric field applied to the crystal. It is strength.
この種の光変調器の変調帯域は、素子のもつ電気的な容
量でほぼ決定される。容量は通常の設計でも10〜20
pF程度とすることができる。このため前述の如く変調
帯域幅が広い。しかしながら、従来の光変調器は、いく
つかの難点をもつていた。たとえばその一つは、前式の
位相差φの中には印加する電界の強さに依存しない項、
いわゆる自然複屈折項(2π/λ)(NEnO)lが含
まれている。このため周囲温度の変化によつて変調動作
が不安定となる。これを補償するために、よく知られて
いるように、長さの等しい2個の変調結晶の間にλ/2
板を挿入したり、長さの等しい2個の結晶の電界印加軸
たとえば上記の例ではz軸を互いに直交させるなどの方
法が試みられている。これらの方法は2つの結晶の幾何
形状的な配置が理想的であれば上記の影響を補償するこ
とができるが、2つの結晶の長さの不揃い、結晶軸の直
交度に不完全さがあると、完全な補償を施すことができ
ない。このため、実際の作製時に結晶の加工や素子の組
立に複雑さが増している。また上記の位相差中の自然複
屈折項の存在は、均質性の極めて良い結晶が要求される
。使用する結晶の内部に自然複屈折(NE−NO)の不
均質な部分があると、消光度の劣下を生ずるからである
。このように従来の電気光学光変調器では、周囲温度の
影響が少くかつ高い変調度をもつ素子を得ることは非常
に困難である。上記の、従来の光変調器のもつ難点、す
なわち自然複屈折の温度変化による消光度の劣下は、2
つの振動電界成分間の位相差が温度変化に対して敏感で
あるために生ずるものである。The modulation band of this type of optical modulator is approximately determined by the electrical capacity of the element. The capacity is 10 to 20 in a normal design.
It can be about pF. Therefore, as mentioned above, the modulation bandwidth is wide. However, conventional optical modulators have had several drawbacks. For example, one of them is that in the phase difference φ in the previous equation, there is a term that does not depend on the strength of the applied electric field.
A so-called natural birefringence term (2π/λ)(NEnO)l is included. Therefore, the modulation operation becomes unstable due to changes in ambient temperature. To compensate for this, as is well known, a λ/2
Attempts have been made to insert a plate or to make the electric field application axes of two crystals of equal length, such as the z-axes in the above example, orthogonal to each other. These methods can compensate for the above effects if the geometric arrangement of the two crystals is ideal, but there are imperfections in the lengths of the two crystals and the orthogonality of the crystal axes. Therefore, it is not possible to provide complete compensation. This increases the complexity of crystal processing and element assembly during actual manufacturing. Furthermore, the presence of the natural birefringence term in the above-mentioned phase difference requires a crystal with extremely good homogeneity. This is because if there is a non-uniform portion of natural birefringence (NE-NO) inside the crystal used, the degree of extinction will be lowered. As described above, with conventional electro-optic light modulators, it is extremely difficult to obtain an element that is less affected by ambient temperature and has a high modulation degree. The above-mentioned difficulty with conventional optical modulators, namely the deterioration of the extinction degree due to temperature changes in natural birefringence, is 2.
This occurs because the phase difference between the two oscillating electric field components is sensitive to temperature changes.
光の制御に用いられる光学現象のうち、光の回折の効果
やモード結合の効果を使う方法では、周囲温度の変化に
よる消光度の劣下は原理的に殆んど無い。光を回折させ
て変調する素子でよく知られる例は、電気光学結晶のC
面にすだれ状の電極を設け、電極下を透過する光を、面
内の電極指間に印加する電界によつて生ずる屈折率の周
期的な変化で回折させ、光の強度変調を達成するもので
ある。この光変調器の特長は、前述の如く回折の効果を
用いているため、温度変化の影響が殆んど無いこと、回
折光すなわち変調光を空間的に分離することができるた
め、検光子を必要としないことなどである。しかしなが
ら、すだれ状電極によつて生ずる電気力線は、電極下近
傍に局在して℃・るため、回折効率を高めるためには光
をリボン状にし電極下表面近傍附近を透過させなければ
ならない。このため、円筒レンズを必要とする。また、
電極そのものによる回折が生じ、消光度の劣下を避ける
ことができない。印加電界のない場合には振動電界方向
が互いに直交して独立に伝播する光電界成分の間に、外
部電界を印加することによつて結合を生じさせる電気光
学係数テンソル成分をもつ結晶を光変調媒体とし、適宜
なる方向に電極を設けて電界を印加すれば、上記のどち
らか一方の振動電界成分のみをもつ入射光は、結晶を透
過するにつれそれに直線偏光成分をもつ光へと変換され
る。Among the optical phenomena used to control light, methods that use the effects of light diffraction and mode coupling have virtually no deterioration in extinction due to changes in ambient temperature in principle. A well-known example of an element that diffracts and modulates light is the electro-optic crystal C.
A device with interdigital electrodes on the surface, which diffracts the light that passes through the bottom of the electrodes through periodic changes in the refractive index caused by the electric field applied between the electrode fingers within the surface, thereby achieving light intensity modulation. It is. The features of this optical modulator are that, as mentioned above, it uses the effect of diffraction, so it is almost unaffected by temperature changes, and because the diffracted light, that is, the modulated light, can be spatially separated, it is possible to use an analyzer. It is something that is not necessary. However, the electric lines of force generated by the interdigital electrodes are localized near the bottom of the electrode, so in order to increase the diffraction efficiency, the light must be made into a ribbon shape and transmitted near the bottom surface of the electrode. . Therefore, a cylindrical lens is required. Also,
Diffraction occurs due to the electrode itself, and a decrease in extinction cannot be avoided. By applying an external electric field, we can optically modulate a crystal with electro-optic coefficient tensor components that causes coupling between optical electric field components that propagate independently with their oscillating electric field directions perpendicular to each other in the absence of an applied electric field. By using the crystal as a medium and applying an electric field with electrodes placed in appropriate directions, incident light with only one of the above oscillating electric field components will be converted into light with a linearly polarized component as it passes through the crystal. .
出射した光を検光子に透過すれば光の強度変調が達成さ
れる。このモード結合の効果を使つた光変調素子は、前
述の光の位相変化を利用するのではなく、振幅の変化を
利用するため、自然複屈折の影響は無い。この種の光変
調器において、入射光が振動方向の直交する成分に全て
変換されるためには、2つの成分それぞれの伝播定数、
すなわち屈折率が等しいか、または伝播定数の差に等し
い波数をもつ電気光学定数の周期(または印加電界の周
期性)が存在することが必要である。知られている電気
光学結晶の多くは、上記の動作に寄与する電気光学定数
テンソルの成分を利用できる方向では、それぞれの屈折
率は異なる。したがつて周期的な電界を印加するための
電極を設けなければならない。しかし通常の結晶ではこ
の屈折率の差は大きいため電極の周期間隔を細かくする
必要がある。そのため、結晶の表面近くだけしか電気力
線が滲透しない。前述の回折の効果を利用した光変調器
の場合と同様に、光波に有効に作用する電界が弱まるた
め、印加電圧の増大、結晶長の増大を免れることができ
ない。誘電体結晶基板の表面近くに光エネルギーをとじ
こめる技術、いわゆる集積光回路技術の分野で明らかに
なつているように、基板の表面近くを伝播する多数の光
の伝播モードの伝播定数は非常に近接している。Light intensity modulation is achieved by transmitting the emitted light through an analyzer. An optical modulation element that uses this mode coupling effect does not utilize the above-mentioned phase change of light, but uses a change in amplitude, so it is not affected by natural birefringence. In this type of optical modulator, in order for the incident light to be completely converted into components orthogonal to each other in the vibration direction, the propagation constant of each of the two components,
That is, it is necessary that the refractive index be equal or that there be a period of the electro-optical constant (or periodicity of the applied electric field) having a wave number equal to the difference in propagation constants. Many of the known electro-optic crystals have different refractive indices in the directions in which the components of the electro-optic constant tensor contributing to the above operation can be utilized. Therefore, electrodes must be provided for applying a periodic electric field. However, in ordinary crystals, this difference in refractive index is large, so it is necessary to make the periodic spacing of the electrodes fine. Therefore, electric lines of force penetrate only near the surface of the crystal. As in the case of the optical modulator that utilizes the effect of diffraction, the electric field that effectively acts on the light wave weakens, so it is inevitable that the applied voltage and crystal length will increase. As has become clear in the field of so-called integrated optical circuit technology, which is a technology for confining optical energy near the surface of a dielectric crystal substrate, the propagation constants of many light propagation modes propagating near the surface of a substrate are very close to each other. are doing.
基板が電気光学効果を有していれば、比較的周期間隔の
粗い電極で上記の動作は実現できる。しかしながら周知
の如く、レーザ等の光源から発する光ビームを、上記の
基板表面近くを伝播する導波モードに結合入射させ、ま
たこれを再び空気中にビーム状として取出すための調整
は非常に難かしく、また入出射における光の損失も大き
い。光の挿入損失の少い光変調素子を上記の技術で実現
するのは困難である。このようにモード結合型の光変調
素子は、位相変化や回折効果を利用する素子に比べて、
高い性能をもつていることが理論的に予想されているに
も拘らず、現在実用的な素子を実現する構成方法は見出
されていない。本発明の目的は、上記の従来の電気光学
光変調器のもつ難点を除去し、高性能の安定なモード結
合型の光変調器を提供することにある。If the substrate has an electro-optic effect, the above operation can be achieved with electrodes having relatively coarse periodic intervals. However, as is well known, it is extremely difficult to make adjustments to couple a light beam emitted from a light source such as a laser into the waveguide mode propagating near the surface of the substrate, and to extract it back into the air as a beam. , and the loss of light during input and output is also large. It is difficult to realize an optical modulation element with low optical insertion loss using the above technology. In this way, mode-coupled optical modulation elements are more effective than elements that utilize phase changes or diffraction effects.
Although it is theoretically predicted that the device will have high performance, a construction method for realizing a practical device has not yet been found. SUMMARY OF THE INVENTION An object of the present invention is to eliminate the drawbacks of the conventional electro-optic light modulators and provide a high-performance, stable mode-coupled light modulator.
本発明によれば、Li/Ta−1.0〜1.5の範囲の
組成をもつタンタル酸リチウム結晶を変調媒体とし、か
つそのX軸(又はY軸)方向に電界を印加する電極を対
向する2面のX面(又はY面)に設け、光通過方向をY
軸(又はX軸)方向とすることにより高性能で安定な光
変調器が得られる。According to the present invention, a lithium tantalate crystal having a composition in the range of Li/Ta-1.0 to 1.5 is used as a modulation medium, and electrodes for applying an electric field in the X-axis (or Y-axis) direction are opposed to each other. It is installed on two X planes (or Y planes), and the light passing direction is
By oriented in the axial (or X-axis) direction, a high-performance and stable optical modulator can be obtained.
本発明の実施例を図面をもつて説明する。第1図におい
て、1は結晶のZ軸(C軸)に平行に切出し、y軸方向
に光を透過させるように成形し研磨された、Li2Oと
Ta2O5の任意のモル比で作られたタンタル酸リチウ
ム固溶体結晶のXカツト板である。この結晶の対向する
X面上に、X軸方向に電界が位加され、しかも光伝播方
向にその電界の方向が周期的に反転するように電極6と
7を設け、第1図の如く、変調信号を発生する発振器5
の出力を、上記の電界が結晶中に生起するように接続す
る。偏光方向をC軸方向にもつ直線偏光の入射光2は、
印加電界が零のときは、その偏光面を保持したまま結晶
を出射する。検光子4は、この偏光面と直交するX軸方
向に振動する光電界成分のみを透過するように配置して
あり、印加電界が零のとき、変調光3の強度は零となる
。結晶に電界を印加すると、入射光2は結晶中を透過す
るにつれ、X軸方向に振動する成分にそのエネルギーが
変換される。タンタル酸リチウム結晶のもつ電気光学定
数テンソルの成分のうちR5lがこれに関与する。入射
光は結晶中において異常光であり、その屈折率はNEで
ある。出射光はNOである。タンタル酸リチウム結晶で
も通常の化学量論的な組成(Li/Ta−1.0)の結
晶では、633nmの波長の光にたいして、NE−2.
180、NO=2.176である。前述の如く、上記の
モード変換が100%達成されるためには、各モードの
伝播定数の差に等しい電界の周期性が必要である。この
ために第1図に示す如き電極6の周期Aはを満足するよ
うに設けられなければならない。Embodiments of the present invention will be described with reference to the drawings. In Figure 1, 1 is tantalum acid made with an arbitrary molar ratio of Li2O and Ta2O5, cut parallel to the Z axis (C axis) of the crystal, shaped and polished to transmit light in the y axis direction. This is an X-cut plate of lithium solid solution crystal. Electrodes 6 and 7 are provided on the opposing X planes of this crystal so that an electric field is applied in the X-axis direction, and the direction of the electric field is periodically reversed in the light propagation direction, as shown in FIG. Oscillator 5 that generates a modulation signal
The output of is connected in such a way that the electric field described above is generated in the crystal. Linearly polarized incident light 2 with its polarization direction in the C-axis direction is
When the applied electric field is zero, light is emitted from the crystal while maintaining its polarization plane. The analyzer 4 is arranged so as to transmit only the optical electric field component vibrating in the X-axis direction perpendicular to the plane of polarization, and when the applied electric field is zero, the intensity of the modulated light 3 is zero. When an electric field is applied to the crystal, as the incident light 2 passes through the crystal, its energy is converted into a component that vibrates in the X-axis direction. Among the components of the electro-optic constant tensor of the lithium tantalate crystal, R5l is involved in this. The incident light is extraordinary light in the crystal, and its refractive index is NE. The emitted light is NO. A lithium tantalate crystal with a normal stoichiometric composition (Li/Ta-1.0) has an NE-2.
180, NO=2.176. As mentioned above, in order to achieve 100% of the above mode conversion, the periodicity of the electric field is required to be equal to the difference in the propagation constant of each mode. For this purpose, the period A of the electrode 6 as shown in FIG. 1 must be set so as to satisfy the following.
上記の理論的化学量論的な組成の結晶を用いた場合、6
33nmの光にたいしては、Aミ160μmとなる。モ
ード変換の機能が有効に達成されるためには、印加電界
が有効に結晶板の厚み方向、すなわちX軸方向に向いて
いる必要がある。このため結晶板の厚さは40〜50μ
m程度としなければならない。この薄い結晶板に入射光
2を透過するためには、光ビームを充分に絞り込む必要
があり、このため結晶のY軸方向の長さ、すなわち作用
長はあまり長くすることができない。また、結晶板の加
工の困難さ、素子の製作の難かしさが増大する。上述の
化学量論的な組成(Li/Ta−1)よりも、Liの濃
度の高い組成のタンタル酸リチウムの結晶は、組成の割
合によつて上記の屈折率差NE−NOが異なる。When using a crystal with the above theoretical stoichiometric composition, 6
For light of 33 nm, the thickness of aluminum is 160 μm. In order to effectively achieve the mode conversion function, the applied electric field must be effectively directed in the thickness direction of the crystal plate, that is, in the X-axis direction. Therefore, the thickness of the crystal plate is 40~50μ
It must be about m. In order to transmit the incident light 2 through this thin crystal plate, it is necessary to sufficiently narrow down the light beam, and therefore the length of the crystal in the Y-axis direction, that is, the active length cannot be made very long. Furthermore, the difficulty in processing the crystal plate and in manufacturing the device increases. In a lithium tantalate crystal having a composition with a higher Li concentration than the above-mentioned stoichiometric composition (Li/Ta-1), the above-mentioned refractive index difference NE-NO differs depending on the composition ratio.
これについての実験的な報告はジャーナル・オフ・ザ・
アメリカン・セラミツク・ソサエテイ(TOurnal
OftheCaramicSOciety)第50巻、
第12号657〜659頁のボールマン他の論文(以下
文献1と云う)、アプライド・フイジツクス・レターズ
(Appl.Phys.Lett)第23巻第4号19
8〜200頁の宮沢の論文(以下文献2と云う)に記載
されている。第2図は文献2の実験値から作図した組成
比による複屈折の大きさを示す図である。Li/Taが
大きくなるにつれ屈折率の差は減少し、Li/Ta−1
.25付近ではこの差はほとんど零になる。更にLi/
Taの値の大きい結晶においては、文献1にも報告され
ているように、屈折率差の符号は反転する。文献1と文
献2から推測するとLi/Ta=1.5付近までは屈折
率差はLi/Taの値に比例して減少していくものと考
えられる。従つて、化学量論比の組成(Li/Ta−1
.0)よりもLi濃度の高℃・Li/Ta−1.0〜1
.5の範囲のタンタル酸リチウム結晶を光学変調媒体と
して、モード結合型の光変調器を構成すれば、第1図に
示すような電極の間隔Aは非常に長く、とくに屈折率差
0の組成の結晶を用いれば、電極は一様の構造でよい。An experimental report on this can be found in the Journal off the
American Ceramic Society (Tournal)
Of the Caramic Society) Volume 50,
No. 12, pages 657-659 of the paper by Bollman et al. (hereinafter referred to as Document 1), Applied Physics Letters (Appl. Phys. Lett), Vol. 23, No. 4, No. 19
It is described in Miyazawa's paper on pages 8 to 200 (hereinafter referred to as Document 2). FIG. 2 is a diagram showing the magnitude of birefringence depending on the composition ratio, drawn from the experimental values of Document 2. As Li/Ta increases, the difference in refractive index decreases, and Li/Ta-1
.. Around 25, this difference becomes almost zero. Furthermore, Li/
In a crystal with a large Ta value, the sign of the refractive index difference is reversed, as also reported in Reference 1. Judging from Literature 1 and Literature 2, it is considered that the refractive index difference decreases in proportion to the value of Li/Ta until Li/Ta=1.5. Therefore, the stoichiometric composition (Li/Ta-1
.. 0) higher Li concentration than Li/Ta-1.0 to 1
.. If a mode-coupled optical modulator is constructed using a lithium tantalate crystal in the range of If crystals are used, the electrodes may have a uniform structure.
このため、結晶の厚さを厚くすることができ、作用長の
長い、高能率でしかも製作の容易な光変調器が構成でき
る。なお、このような組成比であつても結晶の光学的な
均質性は充分に高い。また、第1図の実施例の構成にお
いて、結晶のX軸とY軸を交換した構成でも同様な機能
と特性が得られる。Therefore, the thickness of the crystal can be increased, and an optical modulator with a long working length, high efficiency, and easy manufacture can be constructed. Note that even with such a composition ratio, the optical homogeneity of the crystal is sufficiently high. Further, in the configuration of the embodiment shown in FIG. 1, the same functions and characteristics can be obtained even if the X-axis and Y-axis of the crystal are exchanged.
第1図は本発明の一実施例の原理構成図で、1は変調結
晶、2は入射光ビーム、3は出射光ビーム、4は検光子
、5は変調信号発生器、6,rは電界印加用電極である
。FIG. 1 is a principle block diagram of an embodiment of the present invention, in which 1 is a modulation crystal, 2 is an incident light beam, 3 is an output light beam, 4 is an analyzer, 5 is a modulation signal generator, 6 and r are electric fields. This is an electrode for application.
Claims (1)
通過する偏光面の直交する2つの光波間の結合の大きさ
を制御する光変調器において、前記電気光学結晶として
Li/Ta=1.0〜1.5の範囲の組成を有するタン
タル酸リチウム結晶を用い、かつ該結晶のX軸(又はY
軸)方向に電界を印加する電極を対向する2面のX面(
又はY面)に設け、光透過方向をY軸(又はX軸)とす
ることを特徴とする電気光学光変調器。1. In an optical modulator that uses an electro-optic crystal as a modulation medium and controls the magnitude of coupling between two light waves whose polarization planes are perpendicular to each other passing through the crystal, Li/Ta=1.0 as the electro-optic crystal. A lithium tantalate crystal having a composition in the range of ~1.5 is used, and the X axis (or Y
The electrodes that apply an electric field in the direction of
1. An electro-optic light modulator, characterized in that the electro-optic light modulator is provided on the Y-axis (or the Y-axis), and the light transmission direction is the Y-axis (or the X-axis).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8209576A JPS5928894B2 (en) | 1976-07-09 | 1976-07-09 | electro-optic light modulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8209576A JPS5928894B2 (en) | 1976-07-09 | 1976-07-09 | electro-optic light modulator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS537348A JPS537348A (en) | 1978-01-23 |
| JPS5928894B2 true JPS5928894B2 (en) | 1984-07-17 |
Family
ID=13764857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8209576A Expired JPS5928894B2 (en) | 1976-07-09 | 1976-07-09 | electro-optic light modulator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5928894B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3979685A (en) * | 1974-09-16 | 1976-09-07 | Hycom Incorporated | Frequency shift key demodulator |
| JP4542422B2 (en) * | 2004-12-10 | 2010-09-15 | 富士通株式会社 | Optical device and drive voltage supply apparatus |
-
1976
- 1976-07-09 JP JP8209576A patent/JPS5928894B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS537348A (en) | 1978-01-23 |
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