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JPS5931127B2 - Multi-element magnetic head - Google Patents
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JPS5931127B2 - Multi-element magnetic head - Google Patents

Multi-element magnetic head

Info

Publication number
JPS5931127B2
JPS5931127B2 JP8446675A JP8446675A JPS5931127B2 JP S5931127 B2 JPS5931127 B2 JP S5931127B2 JP 8446675 A JP8446675 A JP 8446675A JP 8446675 A JP8446675 A JP 8446675A JP S5931127 B2 JPS5931127 B2 JP S5931127B2
Authority
JP
Japan
Prior art keywords
magnetic head
slider
conductor
floating
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8446675A
Other languages
Japanese (ja)
Other versions
JPS528814A (en
Inventor
洋 土屋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8446675A priority Critical patent/JPS5931127B2/en
Publication of JPS528814A publication Critical patent/JPS528814A/en
Publication of JPS5931127B2 publication Critical patent/JPS5931127B2/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
  • Magnetic Heads (AREA)

Description

【発明の詳細な説明】 電子計算機の外部記憶装置に用いられる磁気ディスク装
置、磁気ドラム装置などが大容量化高速化、低価格化の
方向に向かうにつれ、これらに用いられる磁気ヘッドも
高密度化、低価格化の方向に進んできている。
[Detailed Description of the Invention] As magnetic disk devices, magnetic drum devices, etc. used in external storage devices for computers move toward larger capacities, faster speeds, and lower prices, the magnetic heads used in these devices also become denser. , and are moving in the direction of lower prices.

そこで最近メッキ蒸着、エッチングなど薄膜集積技術を
応用した多素子形磁気ヘッドが発表され、そのいくつか
の形状が提案され公知となつている。これらの集積形磁
気ヘッドは磁気ヘッドの浮動スライダーの端面に多数個
の磁気ヘッド素子を一括して形成でき、巻線などの手作
業も不要であり、微小トラック幅、微小トラックピッチ
で素子間の特性偏差の少ない安定した低価格の高密度磁
気ヘッドを供給することができる。これら磁気ヘッド素
子と外部記録、再生回路間の信号授受の方法としては、
多素子形磁気ヘッドの浮動スライダー上の接続端子部で
リード線を1本ずつ半田付けするか、或は超音波ボンデ
ィングして取り出す方法がある。しかし一つの素子あた
り通常2〜3本のリード線を取り出す必要があるため素
子数が9〜40と多くなるとリード線の本数が約20本
〜120本と極めて多くなり、接続端子部における接続
工数と、接続後のリード線を錯綜させずに所定の回路端
子に接続させることは極めて困難であり、かつ作業取扱
中での断線不良が多い。そこでポリイミド、ポリアミド
、テフロンなどの可撓性絶縁フィルム上に銅などの導電
箔をはりつけ、所要のリード線本数が得られるようにエ
ッチングによつてパターン形成した可撓性導体を用いて
、磁気ヘッドの接続端子部および回路接続部でそれぞれ
赤外線光源を相対的に移動しながら加熱して一括半田付
する赤外線接続法が提案されている。この方法によれば
短時間で安定に多数の接続を行うことが可能になる。と
ころで、一般に接続端子部と多素子磁気ヘッド部はメッ
キ、蒸着、エッチングなどによつて形成されるため、製
造プロセス上同一平面に形成される。この平面は通常ス
ライダー浮動面に大略垂直なスライダー端面が用いられ
従つて可撓性導体はこの端面に平行な方向に接続される
ことになる。この可撓性導体を浮動スライダーと平行方
向に位置する回路端子に接続するには可撓性導体を接続
端子部と回路端子部の間の適当な位置で大略900曲げ
を行なう必要がある。こうした場合浮動スライダーの追
従動作中に曲げ部に繰返し応力が応わり疲労断線を発生
したり、浮動スライダと可撓性導体の接続部分にモーメ
ントが生じてスライダー姿勢角が大きくずれてしまい。
浮動不能の状態に陥らしめたりする。従つて安定な浮動
性能を有し、かつ信頼性ある磁気ヘツド構造を得るため
には、磁気ヘツド素子の形成されている端面に対して大
略垂直で、スライダー浮動面に平行な方向に可撓性導体
が接続される3次元接続構造にする必要がある。このよ
うな3次元接続構造が可能になると前述の浮動性能上の
利点が得られることに加えて、第2の利点は微小浮動空
隙スライダーに適した軽重量の浮動スライダーが実現容
易になることである。即ち、浮動空隙が0.4μ〜1μ
のように極めて微小な空隙で浮動するスライダーはヘツ
ド摺損が起りにくくするため軽荷重にしなければならず
従つて軽重量にしなければならず、従つてスライダーの
厚みはできるだけ薄くする必要がある。この結果磁気ヘ
ツド素子形成端面には接続端子を形成する余地がなくな
つてしまい、3次元接続構造を通じてスライダー背面に
接続端子を設けることにより、微小浮動空隙スライダー
から外部回路への接続が実現容易となる。第3の別点は
、薄膜磁気ヘツドの微弱な信号出力を処理するために、
磁気ヘツドから極めて近接した位置にパルストランスや
、再生プリアンプなどのICチツプを実装することが望
ましいが、このような3次元構造を用いればこれを通じ
て、スライダー背面にパルストランスやICチツプを容
易に搭載、接続することができることである。このよう
な薄膜磁気ヘツドの3次元接続構造について、既にUS
P36578O6号に提案された例がある。
Therefore, a multi-element magnetic head that applies thin film integration techniques such as plating vapor deposition and etching has recently been announced, and several shapes have been proposed and are now publicly known. These integrated magnetic heads can form a large number of magnetic head elements at once on the end face of the floating slider of the magnetic head, and do not require manual work such as winding. It is possible to supply a stable, low-cost, high-density magnetic head with little characteristic deviation. The method of transmitting and receiving signals between these magnetic head elements and external recording and reproducing circuits is as follows:
There is a method of taking out the lead wires by soldering them one by one to the connection terminals on the floating slider of the multi-element magnetic head or by ultrasonic bonding. However, since it is usually necessary to take out 2 to 3 lead wires per element, when the number of elements increases from 9 to 40, the number of lead wires becomes extremely large, approximately 20 to 120, and the number of man-hours required for connection at the connection terminal section. Therefore, it is extremely difficult to connect the connected lead wires to a predetermined circuit terminal without tangles, and there are many disconnections during handling. Therefore, conductive foil such as copper is pasted on a flexible insulating film such as polyimide, polyamide, or Teflon, and a pattern is formed by etching to obtain the required number of lead wires. An infrared connection method has been proposed in which an infrared light source is moved relative to each other at the connection terminal portion and the circuit connection portion of the circuit to heat and solder them all at once. This method allows a large number of connections to be made stably in a short period of time. Incidentally, since the connecting terminal portion and the multi-element magnetic head portion are generally formed by plating, vapor deposition, etching, etc., they are formed on the same plane due to the manufacturing process. This plane is usually used with a slider end surface that is approximately perpendicular to the slider floating surface, so that the flexible conductor is connected in a direction parallel to this end surface. To connect this flexible conductor to a circuit terminal located parallel to the floating slider, it is necessary to bend the flexible conductor approximately 900 degrees at an appropriate position between the connecting terminal portion and the circuit terminal portion. In such cases, repetitive stress is applied to the bending part during the following motion of the floating slider, resulting in fatigue breakage, or a moment is generated at the connection between the floating slider and the flexible conductor, causing a large shift in the slider attitude angle.
It may cause you to become unable to float. Therefore, in order to obtain a reliable magnetic head structure with stable floating performance, the slider must be flexible in a direction approximately perpendicular to the end surface where the magnetic head element is formed and parallel to the slider floating surface. It is necessary to create a three-dimensional connection structure in which conductors are connected. If such a three-dimensional connection structure becomes possible, in addition to the above-mentioned advantages in terms of floating performance, a second advantage is that it will become easier to realize a lightweight floating slider suitable for micro-floating gap sliders. be. That is, the floating void is 0.4μ to 1μ
A slider that floats in an extremely small gap, such as the slider, must have a light load to prevent head sliding damage, and therefore must be light in weight, and therefore the thickness of the slider must be as thin as possible. As a result, there is no room for forming a connection terminal on the end surface where the magnetic head element is formed, and by providing a connection terminal on the back surface of the slider through a three-dimensional connection structure, it is easy to connect the micro-floating gap slider to an external circuit. Become. The third difference is that in order to process the weak signal output of the thin film magnetic head,
It is desirable to mount a pulse transformer or an IC chip such as a reproduction preamplifier very close to the magnetic head, but if such a three-dimensional structure is used, the pulse transformer or IC chip can be easily mounted on the back of the slider. , to be able to connect. Regarding the three-dimensional connection structure of such a thin film magnetic head, the US
An example is proposed in No. P36578O6.

しかしこの方法では、スライダープロツク内の2つの面
内に穴をあけ導体を埋めこんで相互に接続される構造で
あるため、接続端子のピツチが0.5mm以下のように
細かくかつ20〜120本と多数の接続を行なう場合は
穴あけ加工精度および製造コスト上の制約から実用は困
難である。本発明はこのような薄膜磁気ヘツドなどに対
して低原価で製造容易な3次元接続構造を提供するもの
である。
However, in this method, since the structure is such that they are connected to each other by drilling holes in the two planes of the slider block and burying the conductor, the pitch of the connection terminals is fine, such as 0.5 mm or less, and the pitch is 20 to 120 mm. When a large number of connections are made to a book, it is difficult to put it into practical use due to limitations in drilling precision and manufacturing costs. The present invention provides a three-dimensional connection structure for such a thin film magnetic head that is low cost and easy to manufacture.

以下図を用いて詳細に説明する。This will be explained in detail below using figures.

第1図と第2図に従来の薄膜磁気ヘツドの構造の代表例
を示す。磁気ヘツドは浮動スライダー1の端面2に形成
され、記録媒体面3が第1図Uの方向に相対運動を行な
つて情報の記録、再生が行なわれる。浮動スライダーは
ヘツド支持板6に対してジンバルバネや負荷バネから成
る支持バネ5によつて支持固定されており、支持バネか
ら与えられる負荷荷重とスライダーの浮上刃の平衡点で
決まる浮動空隙が与えられ、又支持バネによつて記録媒
体面に対する追従性が確保される。第2図は磁気ヘツド
形成端面2の拡大図である。浮動スライダーがフエライ
ト材から成る例においてはフエライト材上に導体7およ
び接続端子9が形成され、この導体上に磁性体8が形成
される。このときTがトラツク幅となり、又導体7の厚
みが磁気ヘツドギヤツプ長となることは明らかである。
今このような浮動スライダーの接続端子と外部の回路端
子間を可撓性導体4を通じて接続することを考える。可
撓性導体は例えば厚さ0.02〜0.111t7!lの
可撓性絶縁フイルム10上に厚さ0.02〜0.1龍の
導管箔11を形成したものであり第1図に示すように支
持バネ5に沿つてヘツド支持板6の方向に引き出さねば
ならないため、屈曲部12を設けなければならず、前述
のようにこの部分で疲労断線する原因になつたり、モー
メントが働らいて浮動スライダーの磁気デイスク移動に
関する迎角を負にしたピツチング、ローリング方向剛性
を大にしたりして浮動不安定の状態に陥らせて信頼性上
大きな問題になる。今、磁気ヘツド素子部の形成されて
いる端面に対して大略垂直で、スライダー浮動面にほぼ
平行な方向に可撓性導体が接続される構造が実現できれ
ば、屈曲部12をなくすことができる。この実現の方法
の第1の例は浮動スライダーの一つの端面2と他の端面
13の間を、第3図に示すように薄膜集積技術を応用し
た製造プロセスで接続し、接続端子q土で可撓性導体を
接続する方法である。このような構造の実用的プロセス
を考えると、フオトレジスト塗布、パターン形成、蒸着
、メツキ、エツチングなどの技術上の制約から2つの面
2,13上の導体を同時に形成することは一般には困難
であり、従つて、先にいずれか一方の面を形成した後、
この面をフオトレジストなどの適当なマスキング材料で
マスキングして、第2の面を形成すればよい。3次元接
続方法の第2の例は、磁気ヘツド素子形成前の浮動スラ
イダーの端面2,13の、陵部14の付近に予め第4図
に示すようなパターンをスクリーン印刷などの技術によ
り形成しておく方法である。
FIGS. 1 and 2 show typical examples of the structure of conventional thin film magnetic heads. The magnetic head is formed on the end surface 2 of the floating slider 1, and information is recorded and reproduced by relative movement of the recording medium surface 3 in the direction U in FIG. The floating slider is supported and fixed to the head support plate 6 by a support spring 5 consisting of a gimbal spring or a load spring, and a floating gap determined by the load applied from the support spring and the equilibrium point of the floating blade of the slider is provided. Also, the support spring ensures followability to the surface of the recording medium. FIG. 2 is an enlarged view of the end face 2 forming the magnetic head. In an example in which the floating slider is made of ferrite material, the conductor 7 and the connecting terminal 9 are formed on the ferrite material, and the magnetic body 8 is formed on this conductor. In this case, it is clear that T is the track width and the thickness of the conductor 7 is the magnetic head gap length.
Now, let us consider connecting the connection terminal of such a floating slider and an external circuit terminal through the flexible conductor 4. For example, the flexible conductor has a thickness of 0.02 to 0.111t7! A conduit foil 11 with a thickness of 0.02 to 0.1 mm is formed on a flexible insulating film 10 of 1 mm, and as shown in FIG. Since it has to be pulled out, a bent part 12 must be provided, which may cause fatigue disconnection at this part as described above, or pitching which causes a negative angle of attack with respect to the movement of the magnetic disk of the floating slider due to moment action. If the rigidity in the rolling direction is increased, floating instability may occur, resulting in a serious problem in terms of reliability. If a structure in which the flexible conductor is connected in a direction substantially perpendicular to the end surface on which the magnetic head element is formed and substantially parallel to the slider floating surface can be realized, the bent portion 12 can be eliminated. A first example of a method for realizing this is to connect one end surface 2 and the other end surface 13 of the floating slider using a manufacturing process applying thin film integration technology, as shown in FIG. This is a method of connecting flexible conductors. Considering the practical process of such a structure, it is generally difficult to form conductors on the two surfaces 2 and 13 at the same time due to technical limitations such as photoresist coating, pattern formation, vapor deposition, plating, and etching. Therefore, after forming one side first,
This surface may be masked with a suitable masking material such as photoresist to form the second surface. A second example of the three-dimensional connection method is to form a pattern as shown in FIG. 4 in advance in the vicinity of the ridges 14 of the end surfaces 2, 13 of the floating slider before forming the magnetic head element by a technique such as screen printing. This is the way to keep it.

即ちタングステンやモリブデン−マンガンなどの導電ペ
ーストが端面2の導体Al5と、端面13の導体Bl6
を形成すべき部分に必要な形状に形成されたスクリーン
を介して、スクリーン印刷され、高温焼成される。この
ようにして形成された導体A,B上に例えばニツケルク
ロム一金の組み合わせなど、半田付がよく、付着力が大
きい金属をメツキなどの方法で付着させ、その後磁気ヘ
ツド素子を端面2に形成すれば、第3図と等価な構造が
得られる。尚このようにして形成された導体15,16
が磁気ヘツド素子形成における化学プロセスで侵触され
る場合には、素子形成プロセス中適当な方法でマスキン
グしなければならず、プロセス完了後導体Al5と、素
子導体7間の空隙部を半田溶融などによりブリツジ接続
する必要がある。しかし導体Al5,Bl6が化学的に
安定な金で表面がカバーされているときは、磁気ヘツド
素子部の導体7をアルミニウム、銅、銀など選択エツチ
ング可能な材料に選ぶことにより、導体Al5,Bl6
のマスキングが不要で、導体7が直接導体Al5にのり
あげるように形成できるため製造が容易になる。上述の
3次元接続方法の第2の例は、スクリーン印刷精度上の
制約から導体A(!:Bとのずれが例えば0.2m7!
lもあるため離接導体ピツチが例えば0.511t11
のように小さくなると実現が難かしくなる。
That is, a conductive paste such as tungsten or molybdenum-manganese is applied to the conductor Al5 on the end face 2 and the conductor Bl6 on the end face 13.
It is screen printed through a screen formed into the shape required for the part to be formed, and then fired at a high temperature. On the conductors A and B thus formed, a metal with good solderability and strong adhesion, such as a combination of nickel chrome and gold, is adhered by plating or other methods, and then a magnetic head element is formed on the end face 2. Then, a structure equivalent to that shown in FIG. 3 can be obtained. Incidentally, the conductors 15 and 16 formed in this way
If it is invaded by the chemical process in forming the magnetic head element, it must be masked by an appropriate method during the element forming process, and after the process is completed, the gap between the conductor Al5 and the element conductor 7 is removed by melting solder, etc. Bridge connection is required. However, when the surfaces of the conductors Al5 and Bl6 are covered with chemically stable gold, the conductors Al5 and Bl6 can be etched by selecting a material that can be selectively etched, such as aluminum, copper, or silver, for the conductor 7 in the magnetic head element part.
There is no need for masking, and the conductor 7 can be formed directly on the conductor Al5, which facilitates manufacturing. In the second example of the above three-dimensional connection method, the deviation from conductor A (!:B) is, for example, 0.2 m7! due to constraints on screen printing accuracy.
Since there is also l, the spacing conductor pitch is, for example, 0.511t11.
As the size becomes smaller, it becomes difficult to realize.

そこで導体ピツチが小さい場合に適した第3の3次元接
続方法の例を第5図に示す。この場合はスクリーン印刷
されるパターンは15′,16′の実線で示すような帯
状連続形状となる。このようにして第4図と同じプロセ
スを経て磁気ヘツド素子の導体7と15′,16′との
間に電気的導通状態が得られた後、機械加工により破線
で示す溝17の切欠きが設けられ、第3図と等価な3次
元接続構造が得られる。この例の場合は第2の例と異な
り、導体A(5Bの間のずれは無視でき、又加工精度も
0.011t711まで高めることもできるので、ピツ
チ0.1mm程度の導体ピツチ構造のものも容易に形成
できる。このような溝加工は薄型のカツタ一を切断に必
要な溝の数だけ必要なピツチに積み重ねることにより、
同時加工でき、極めて短時間に容易に形成可能である。
ここに挙げた3つの例は互いにほぼ直交する面間の3次
元接続を例示したが、全く同一の方法により任意の交角
を有する2面間の3次元接続が可能なことは明らかであ
る。又任意の交角の陵線部上に、パターン形成精度上無
視できる程度の面取又は微小のRを設けてもよい。また
は本発明の他の実施例の説明図、第6図は本発明による
磁気ヘツドの構造図である。1・・・・・・浮動スライ
ダー、2・・・・・・磁気ヘツド形成端面、3・・・・
・・記録媒体面、4・・・・・・可撓性導体、5・・・
・・・支持バネ、6・・・・・・ヘツド支持板、7・・
・・・・導体、8・・・・・・磁性体、9,9′・・・
・・・接続端子、10・・・・・・可撓性絶縁フイルム
、13・・・・・・スライダー背面、14・・・・・・
スライダー陵部、15,1rJ・・・・・・導体A、1
6,16′・・・・・・導体B、17・・・・・・溝切
部、18・・・・・・導体接続部。
FIG. 5 shows an example of a third three-dimensional connection method suitable for cases where the conductor pitch is small. In this case, the screen-printed pattern has a continuous strip shape as shown by solid lines 15' and 16'. After electrical continuity is established between the conductor 7 and the conductors 15' and 16' of the magnetic head element through the same process as shown in FIG. A three-dimensional connection structure equivalent to that shown in FIG. 3 is obtained. In this example, unlike the second example, the deviation between conductors A (5B) can be ignored, and the processing accuracy can be increased to 0.011t711, so a conductor pitch structure with a pitch of about 0.1mm can be used. It can be easily formed.Such groove processing can be done by stacking thin cutters at the required pitch for the number of grooves required for cutting.
It can be processed simultaneously and can be easily formed in an extremely short time.
Although the three examples given here illustrate three-dimensional connections between planes that are substantially orthogonal to each other, it is clear that three-dimensional connections between two planes having arbitrary intersection angles can be made using exactly the same method. Further, a chamfer or a small radius which can be ignored in terms of pattern formation accuracy may be provided on the ridge line portions at arbitrary intersection angles. FIG. 6 is a structural diagram of a magnetic head according to the present invention. 1...Floating slider, 2...Magnetic head forming end surface, 3...
...Recording medium surface, 4...Flexible conductor, 5...
...Support spring, 6...Head support plate, 7...
...Conductor, 8...Magnetic material, 9,9'...
...Connection terminal, 10...Flexible insulating film, 13...Slider back, 14...
Slider crest, 15, 1rJ...Conductor A, 1
6, 16'...Conductor B, 17...Groove portion, 18...Conductor connection portion.

Claims (1)

【特許請求の範囲】[Claims] 1 多素子形磁気ヘッドにおいて、浮動スライダーの浮
動面に大略垂直に磁気ヘッド素子が形成される端面を第
1の平面とし、この面に交じわり浮動面に大略平行なス
ライダー背面を第2の平面とし、第1の平面と第2の平
面にこれらの面の陵線部分においてそれぞれが相接し、
電気的導通状態が得られるように導体を形成し、第2の
平面上で、この面上に沿つて配置される可撓性導体を接
続部分で導体同志が重なり合うように接続することを特
徴とする多素子形磁気ヘッド。
1. In a multi-element magnetic head, the end surface on which the magnetic head elements are formed approximately perpendicular to the floating surface of the floating slider is defined as a first plane, and the back surface of the slider that intersects with this plane and is approximately parallel to the floating surface is defined as a second plane. a plane, and the first plane and the second plane are adjacent to each other at the ridge line portions of these planes,
A conductor is formed so as to obtain electrical continuity, and flexible conductors arranged along this plane are connected on the second plane so that the conductors overlap each other at the connection part. Multi-element magnetic head.
JP8446675A 1975-07-11 1975-07-11 Multi-element magnetic head Expired JPS5931127B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8446675A JPS5931127B2 (en) 1975-07-11 1975-07-11 Multi-element magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8446675A JPS5931127B2 (en) 1975-07-11 1975-07-11 Multi-element magnetic head

Publications (2)

Publication Number Publication Date
JPS528814A JPS528814A (en) 1977-01-24
JPS5931127B2 true JPS5931127B2 (en) 1984-07-31

Family

ID=13831393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8446675A Expired JPS5931127B2 (en) 1975-07-11 1975-07-11 Multi-element magnetic head

Country Status (1)

Country Link
JP (1) JPS5931127B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1329261C (en) * 1988-05-23 1994-05-03 John L. Spash Head assembly for rotating storage device
US5914834A (en) * 1996-06-17 1999-06-22 Hutchinson Technology, Inc. Head suspension assembly with electrical interconnect by slider bond pads and gimbal bonding zones

Also Published As

Publication number Publication date
JPS528814A (en) 1977-01-24

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