JPS5943104B2 - piezoelectric ceramic material - Google Patents
piezoelectric ceramic materialInfo
- Publication number
- JPS5943104B2 JPS5943104B2 JP55031207A JP3120780A JPS5943104B2 JP S5943104 B2 JPS5943104 B2 JP S5943104B2 JP 55031207 A JP55031207 A JP 55031207A JP 3120780 A JP3120780 A JP 3120780A JP S5943104 B2 JPS5943104 B2 JP S5943104B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric ceramic
- composition
- ceramic material
- frequency
- porcelain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Insulating Materials (AREA)
Description
【発明の詳細な説明】
本発明は、圧電磁器に関するものであり、電気機械結合
係数にぃ周波数定数Ntが大きく、誘電率ε33/εo
が適当な値をもち、そして焼結が容易な、高周波用の広
帯域の共振子を構成できる材料を提供しようとするもの
である。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a piezoelectric ceramic, which has a large electromechanical coupling coefficient, a large frequency constant Nt, and a dielectric constant ε33/εo.
The object of the present invention is to provide a material that has an appropriate value and is easy to sinter, and that can be used to construct a broadband resonator for high frequencies.
テレビジョン受像機などの高周波回路の集積化が進むに
つれて、集積回路の周辺部品、特にリアクタンス回路の
固体化、無調整化、高性能化が強く要望されている。As the integration of high-frequency circuits in television receivers and the like progresses, there is a strong demand for peripheral components of integrated circuits, especially reactance circuits, to be solid-state, non-adjustable, and high-performance.
圧電磁器共振子は、この要望を満たすものとして、期待
されている。圧電磁器を高周波共振子として用いる場合
、共振周波数が厚さで決まる厚み縦振動を用いるのが有
利である。Piezoelectric ceramic resonators are expected to meet this demand. When using a piezoelectric ceramic as a high-frequency resonator, it is advantageous to use thickness longitudinal vibration in which the resonant frequency is determined by the thickness.
周波数を決めた場合、共振子の厚みは、周波数定数Nt
に比例する。機械的強度や加工精度の面から、高周波で
は、厚みに限界が生じる。Ntが大きいほど高周波用と
して有利ということになる。帯域を広くとろうとすると
、電気機械結合係数ktができるだけ大きいことが望ま
しい。また、誘電率ε33/εoは小さい方がよい。さ
らに、磁器の焼成が容易、たとえば焼成温度範囲が広け
れば、有利である。本発明の組成の磁器は、これらの特
性を備えたものである。When the frequency is determined, the thickness of the resonator is the frequency constant Nt
is proportional to. In terms of mechanical strength and processing accuracy, there is a limit to the thickness at high frequencies. The larger Nt is, the more advantageous it is for high frequency applications. In order to widen the band, it is desirable that the electromechanical coupling coefficient kt be as large as possible. Further, the smaller the dielectric constant ε33/εo, the better. Furthermore, it would be advantageous if the porcelain could be fired easily, for example over a wide range of firing temperatures. The porcelain having the composition of the present invention has these characteristics.
試みた組成は、Pbl−且xNdxTi03で表わされ
る式において、0.075<X<0.325の範囲であ
る。The tried composition is in the range of 0.075<X<0.325 in the formula expressed by Pbl-xNdxTi03.
PbO、TiO2、Nd2O3の原料を上記の組成にな
るように秤量し、ボールミルで17時間湿式混合した。
スラリーを沢過、乾燥させてから、約850℃で2時間
仮焼したのち、再びボールミルで湿式粉砕した。粉砕し
たものを乾燥させてから、直径13mm)厚さ1.5w
tmの円板を圧力800kg/Cdで成形し、それぞれ
を組成に応じて1150”〜1350℃の範囲内の最適
と考えられる温度で1時間焼成した。この組成の磁器の
焼成温度範囲は、上記温度範囲のある一定の値から±3
0℃以内であればよく、たとえばPbTiO3磁器など
と±20℃以内に比べて広い。焼成した磁器を厚さ0.
3mmに研摩し、両面にCr−Au電極を蒸着した。Raw materials of PbO, TiO2, and Nd2O3 were weighed so as to have the above composition, and wet mixed in a ball mill for 17 hours.
The slurry was filtered and dried, then calcined at about 850° C. for 2 hours, and wet-pulverized again using a ball mill. After drying the crushed material, the diameter is 13mm) and the thickness is 1.5w.
tm discs were molded at a pressure of 800 kg/Cd, and each was fired for 1 hour at a temperature considered to be optimal within the range of 1150'' to 1350°C depending on the composition.The firing temperature range for porcelain with this composition is as described above. ±3 from a certain value in the temperature range
It only needs to be within 0°C, which is wider than, for example, PbTiO3 porcelain, which is within ±20°C. The fired porcelain has a thickness of 0.
It was polished to 3 mm, and Cr-Au electrodes were deposited on both sides.
分極は、150℃、4KV/mwLで、30分間行なつ
た。この試料を用いて、kt、ε33/εoを測定した
。ktは基本波の共振、反共振周波数から求めた。図に
、ε33/εo、kt、Ntの組成による変化を示す。Polarization was performed at 150° C. and 4 KV/mwL for 30 minutes. Using this sample, kt and ε33/εo were measured. kt was determined from the resonance and anti-resonance frequencies of the fundamental wave. The figure shows changes in ε33/εo, kt, and Nt depending on the composition.
ktは、0.100≦X≦0.300で、0.52〜0
.55でかなり大きい。Ntは、Xが増すにつれて大き
くなり、X>0.100では2160H2−m以上であ
る。ε33/εoは、Xが増すにつれて大きくなる。こ
れらの結果、0.100≦x≦0.300の組成で、K
t−0.52〜0.55、NtT一2170〜2460
Hz−m、ε33/εo一580〜750で高周波用共
振子材料として有利な材料が得られることがわかる。kt is 0.100≦X≦0.300, 0.52 to 0
.. It's 55 and quite large. Nt increases as X increases, and is 2160H2-m or more when X>0.100. ε33/εo increases as X increases. As a result, at a composition of 0.100≦x≦0.300, K
t-0.52~0.55, NtT-2170~2460
It can be seen that a material advantageous as a high frequency resonator material can be obtained at Hz-m and ε33/εo -580 to 750.
また、この磁器の焼成温度範囲は±30℃で広い。高周
波用材料のPbTiO3の値と比べると、Kt.Nt、
焼成温度範囲においてかなりすぐれている。なお、Pb
TlO3では、Ktが0.47、Ntが2160Hz−
m、焼成温度範囲が±20℃である。Moreover, the firing temperature range of this porcelain is wide at ±30°C. Compared to the value of PbTiO3, a high frequency material, Kt. Nt,
Very good in firing temperature range. In addition, Pb
For TlO3, Kt is 0.47 and Nt is 2160Hz-
m, the firing temperature range is ±20°C.
T
図は本発明の組成物の組成とε33/ε0.kt、Nt
との関係を示す。The T diagram shows the composition of the composition of the present invention and ε33/ε0. kt, Nt
Indicates the relationship between
Claims (1)
表わされる組成において、0.100≦x≦0.300
の範囲にある組成であることを特徴とする圧電磁器材料
。1 In the composition represented by the formula Pb_1-(3/2)_xNd_xTiO_3, 0.100≦x≦0.300
A piezoelectric ceramic material characterized by having a composition in the range of.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55031207A JPS5943104B2 (en) | 1980-03-11 | 1980-03-11 | piezoelectric ceramic material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55031207A JPS5943104B2 (en) | 1980-03-11 | 1980-03-11 | piezoelectric ceramic material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56126991A JPS56126991A (en) | 1981-10-05 |
| JPS5943104B2 true JPS5943104B2 (en) | 1984-10-19 |
Family
ID=12324970
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55031207A Expired JPS5943104B2 (en) | 1980-03-11 | 1980-03-11 | piezoelectric ceramic material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5943104B2 (en) |
-
1980
- 1980-03-11 JP JP55031207A patent/JPS5943104B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56126991A (en) | 1981-10-05 |
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