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JPS5944186B2 - Surface grinding device - Google Patents
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JPS5944186B2 - Surface grinding device - Google Patents

Surface grinding device

Info

Publication number
JPS5944186B2
JPS5944186B2 JP57100282A JP10028282A JPS5944186B2 JP S5944186 B2 JPS5944186 B2 JP S5944186B2 JP 57100282 A JP57100282 A JP 57100282A JP 10028282 A JP10028282 A JP 10028282A JP S5944186 B2 JPS5944186 B2 JP S5944186B2
Authority
JP
Japan
Prior art keywords
internal gear
carrier
lowered
gear
cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57100282A
Other languages
Japanese (ja)
Other versions
JPS58217268A (en
Inventor
初雪 新井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUPIIDO FUAMU KK
Original Assignee
SUPIIDO FUAMU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUPIIDO FUAMU KK filed Critical SUPIIDO FUAMU KK
Priority to JP57100282A priority Critical patent/JPS5944186B2/en
Publication of JPS58217268A publication Critical patent/JPS58217268A/en
Publication of JPS5944186B2 publication Critical patent/JPS5944186B2/en
Expired legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Description

【発明の詳細な説明】 本発明は、ラッピング装置やポリッシング装置などの平
面研削装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a surface grinding device such as a lapping device or a polishing device.

この種の平面研削装置において、ワークを保持させたキ
ャリヤを装填したり、研削加工の終了したワークをキャ
リヤと共に取出したりするために、内歯歯車を下定盤よ
り低い位置まで下降させるようにしたものは知られてい
る。
In this type of surface grinding device, the internal gear is lowered to a position lower than the lower surface plate in order to load a carrier holding a workpiece or to take out the workpiece that has been ground together with the carrier. is known.

しかしながら従来の平面研削装置においては、内歯歯車
を下降させたときに、非装脱位置にあるキャリヤが振動
やその他の原因によつて位置ずれを生じ易く、その位置
ずれが一旦生じると、内1歯歯車を再度上昇させたとき
に該キャリヤを元通り内歯歯車に噛合させることができ
な、くなり、該キャリヤが持ち上がつたり、その噛合位
置が狂つたりするという欠点があつた。
However, in conventional surface grinding equipment, when the internal gear is lowered, the carrier in the non-mounting/unloading position tends to shift due to vibration or other causes, and once that shift occurs, the internal There is a disadvantage that when the 1-tooth gear is raised again, the carrier cannot be meshed with the internal gear as before, and the carrier is lifted up and its meshing position is distorted. Ta.

叙上に鑑み、本発明は、内歯歯車の下降時に非装脱位置
にあるキャリヤの位置ずれが生じるのを防止しようとす
るもので、上記非装脱位置にあるキャリヤとの対応位置
に、内歯歯車と同様の歯部を備えた係合片を前後動自在
に配設し、内歯歯車の下降時にこの係合片を前進させて
上記キャリヤに噛合させることにより、該キャリヤを係
合片によつて定位置に保持させるように構成したことを
その特徴とするものである。
In view of the above, the present invention aims to prevent the carrier in the non-mounting/detaching position from being displaced when the internal gear is lowered. An engaging piece having teeth similar to those of the internal gear is disposed so as to be movable back and forth, and when the internal gear is lowered, the engaging piece is moved forward and engaged with the carrier, thereby engaging the carrier. Its feature is that it is configured to be held in place by a piece.

以下、本発明の実施例を図面に基づいて詳述するに、第
1図及び第2図は両面ラッピング装置を示すもので、同
図において1は機体、2は該機体1に支持部材3を介し
て回転自在に支承させた内歯歯車、4は該内歯歯車2の
中央に位置する回転自在の太陽歯車、5、6は上下の定
盤、7は内歯歯車2と太陽歯車4とに噛合するキャリヤ
、8は該キャリヤに保持させたワークを示している。
Hereinafter, embodiments of the present invention will be described in detail based on the drawings. Figs. 1 and 2 show a double-sided wrapping device, in which 1 is a machine body, and 2 is a support member 3 attached to the machine body 1. 4 is a rotatable sun gear located in the center of the internal gear 2; 5 and 6 are upper and lower surface plates; 7 is the internal gear 2 and the sun gear 4; 8 indicates a workpiece held by the carrier.

上記内歯歯車2、太陽歯車4及び下定盤6は、同心状に
位置する回転軸部2a、4a、6aの下端の歯車2b、
4b、6bを介してそれぞれ図示しない駆動源に連結さ
れ、一方、下定盤5は、それに固定した取付板9及びス
タッド10を介して出版11に吊設すると共に、該出版
11を支柱12上のアーム13に取付けられているシリ
ンダ14のロッド15に連結することによつて昇降自在
に構成し、上記取付板9には、放射方向に位置する複数
のフック16を起倒自在に取付け、これらのフック16
を、回転軸部17aの下端の歯車1□bを介して図示し
ない駆動源に連結されたドライバー17に係脱自在とし
、それによつて、ラッピング加工時に、上記フック16
とドライバー11との係合によつて上定盤の駆動回転を
行い得るように構成している。また、上記内歯歯車2を
上下動自在とするため、該内歯歯車2を固定した円環状
のホルダ18の下面には、複数のガイド19を円周方向
に等間隔で取付け、これらのガイド19を支持部材3に
上下摺動自在に支持させると共に、該ガイド19の下端
に内歯歯車2と同心状に位置する下面が平坦なリング板
20を固定し、一方、機体1の内壁には、上記リング板
20に沿つてその下方に位置するように複数(3〜4本
)のシリンダ21を等間隔で配設固定し、各シリンダ2
1における作動杆22の上端を、それに取付けたローラ
ベアリングやボールベアリングなどからなる転動体23
を介して上記リング板20の下面に当接させ、而して、
内歯歯車2の上昇をシリンダ21によるリング板20の
押上げにより行うと共に、内歯歯車2の下降をその自重
を利用して行うように構成している。
The internal gear 2, the sun gear 4, and the lower surface plate 6 include a gear 2b at the lower end of the rotating shaft portions 2a, 4a, and 6a located concentrically;
The lower surface plate 5 is connected to a drive source (not shown) via the base plate 4b and 6b, respectively, and the lower surface plate 5 is suspended from the publication 11 via the mounting plate 9 and the stud 10 fixed thereto, and the publication 11 is suspended from the publication 11 on the support 12. It is configured to be movable up and down by being connected to the rod 15 of the cylinder 14 attached to the arm 13, and a plurality of hooks 16 located in the radial direction are attached to the mounting plate 9 so as to be able to be raised and lowered. hook 16
The hook 16 can be freely engaged and detached from the driver 17 connected to a drive source (not shown) via the gear 1□b at the lower end of the rotating shaft portion 17a.
The structure is such that the upper surface plate can be driven and rotated by engagement with the driver 11. Further, in order to make the internal gear 2 movable up and down, a plurality of guides 19 are installed at equal intervals in the circumferential direction on the lower surface of the annular holder 18 to which the internal gear 2 is fixed. 19 is supported by the support member 3 so as to be vertically slidable, and a ring plate 20 with a flat lower surface is fixed to the lower end of the guide 19 and is located concentrically with the internal gear 2. On the other hand, on the inner wall of the body 1 , a plurality of (3 to 4) cylinders 21 are arranged and fixed at equal intervals along and below the ring plate 20, and each cylinder 2
The upper end of the operating rod 22 in 1 is connected to a rolling element 23 consisting of a roller bearing, a ball bearing, etc. attached thereto.
is brought into contact with the lower surface of the ring plate 20 through the
The internal gear 2 is raised by pushing up the ring plate 20 by the cylinder 21, and the internal gear 2 is lowered using its own weight.

なお、24は、内歯歯車2の自重による下降が何らかの
原因で不可能となつた場合にそれを強制的に引下げるた
めの掛止片である。そして、上記機体1の一側には、内
歯歯車2を下降させた状態でキヤリヤ7の装填及び取出
しを行うための装脱部25を形設し、また、その装脱作
業時に非装脱位置にある他のキヤリヤ7との対応位置に
は、内歯歯車2から外れたこれらのキヤリヤ7を内歯歯
車2が再び上昇してそれらと噛合するまでの間その位置
に保持するためのキヤリヤの保持機構26を、それぞれ
シリンダ26aによつて高さ調節可能に設けている。
Note that 24 is a latch piece for forcibly pulling down the internal gear 2 when it becomes impossible to lower it due to its own weight for some reason. A loading/unloading section 25 is formed on one side of the fuselage 1 for loading and unloading the carrier 7 with the internal gear 2 lowered. In corresponding positions to the other carriers 7 in the position, there are carriers for holding these carriers 7 that have been disengaged from the internal gear 2 in that position until the internal gear 2 rises again and meshes with them. The holding mechanisms 26 are each provided with a height adjustable by a cylinder 26a.

上記保持機構26は、第3図〜第5図からも明らかなよ
うに、内歯歯車2と同様の歯部28を先端に備え且つ該
歯部28を内歯歯車2と同一曲率に形成した係合片27
を有し、該係合片27を、シリンダ29のロツド30に
連結することによつて内歯歯車2の中心に向けて前後動
自在に配設したもので、該係合片27を前進させてキヤ
リヤ7に噛合させる際に内歯歯車2との間で歯部28の
位相を合わせるため、内歯歯車2におけるホルダ18の
上面には、多数の位置決め用のピン32を一定間隔で植
設し、これに対して、横方向にもシリンダ31によつて
往復微調整可能とした係合片27には、上記ピン32が
嵌合する多数の小溝33を前後方向に切設すると共に、
各小溝33,33間に、係合片27が位相ずれの状態で
前進してきた場合にそれをピン32によつて左右方向に
位置調整させるための尖頭状の案内部34を形設してい
る。
As is clear from FIGS. 3 to 5, the holding mechanism 26 has a toothed portion 28 similar to that of the internal gear 2 at its tip, and the toothed portion 28 is formed to have the same curvature as the internal gear 2. Engagement piece 27
The engaging piece 27 is connected to the rod 30 of the cylinder 29 so as to be movable back and forth toward the center of the internal gear 2, and the engaging piece 27 is moved forward. In order to match the phase of the tooth portion 28 with the internal gear 2 when meshing with the carrier 7, a large number of positioning pins 32 are implanted at regular intervals on the upper surface of the holder 18 in the internal gear 2. However, on the other hand, the engagement piece 27, which can be finely adjusted laterally as well by the cylinder 31, has a large number of small grooves 33 cut in the front-rear direction into which the pin 32 is fitted.
A pointed guide portion 34 is formed between each of the small grooves 33, 33 to adjust the position of the engaging piece 27 in the left-right direction by means of a pin 32 when the engaging piece 27 advances out of phase. There is.

而して、装脱部25の手前に位置する保持機構26との
対応位置には、キヤリヤ7を検出するセンサ35を設け
、キヤリヤ7の装脱時に、上記センサ35によつて各キ
ヤリヤ7を必らず第2図に示す位置に停止させ得るよう
に構成している。
A sensor 35 for detecting the carrier 7 is provided at a position corresponding to the holding mechanism 26 located in front of the loading/unloading section 25, and when the carrier 7 is loaded/unloaded, the sensor 35 detects each carrier 7. It is constructed so that it can always be stopped at the position shown in FIG.

即ち、ラッピング功旧=が終了して装置が一旦停止する
と、上記センサ35が作動すると同時に装置がゆつくり
と再駆動され、センサ35によるキヤリヤ7の検出が行
われた時点で装置が最終的に停止せしめられるようにな
つている。装置が一旦停止したときキヤリヤ7がセンサ
35による検出位置にある場合は、次のキヤリヤがセン
サ35によつて検出される位置まで装置は再駆動される
。上記構成を有するラツピング装置の使用に際しては、
第2図に示ずようにキヤリヤ7が所定の位置関係に配置
され、各キヤリヤに保持されたワーク8が公知の方法で
ラツピング加工される。この場合、内歯歯車2はガイド
19を介して支持部材3により駆動回転され、それと一
緒にガイドの下端のリング板20も回転するが、作動杆
22とリング板20とは、作動杆22の上端の転動体2
3を介して互いに当接しているため、内歯歯車2の回転
に対しては互いにフリーの関係にあり、従つて、シリン
ダ21が機体1に固定されていても内歯歯車2は自由に
回転することができる。ラツピング加工が,終了すると
、上定盤5が上昇すると同時に各歯車2,4及び定盤5
,6の駆動が停止され、キヤリヤ7はセンサ35の作動
によつて第2図の位置に停止せしめられる。
That is, when the wrapping is completed and the device is temporarily stopped, the sensor 35 is activated and the device is slowly restarted, and when the sensor 35 detects the carrier 7, the device is finally stopped. It's starting to get shut down. If the carrier 7 is in the position detected by the sensor 35 when the device is once stopped, the device is driven again to a position where the next carrier is detected by the sensor 35. When using the wrapping device having the above configuration,
As shown in FIG. 2, the carriers 7 are arranged in a predetermined positional relationship, and the work 8 held by each carrier is wrapped by a known method. In this case, the internal gear 2 is driven and rotated by the support member 3 via the guide 19, and the ring plate 20 at the lower end of the guide also rotates together with it. Upper end rolling element 2
3, they are in a free relationship with respect to the rotation of the internal gear 2. Therefore, even if the cylinder 21 is fixed to the body 1, the internal gear 2 can rotate freely. can do. When the wrapping process is completed, the upper surface plate 5 rises, and at the same time each gear 2, 4 and the surface plate 5
, 6 are stopped, and the carrier 7 is stopped at the position shown in FIG. 2 by the operation of the sensor 35.

そして、シリンダ21による作動杆22の下降によつて
内歯歯車2が下定盤6より低い位置まで下降し、装脱部
25を通じてその位置にあるキヤリヤ7が図示しない取
出機構(ζ:より自動的に、または手動によつて取出さ
れる。このとき、非装脱位置にある他のキヤリヤ7は、
保持機購26によつてその位置に保持されており、その
保持は次のようにして行われる。
Then, as the operating rod 22 is lowered by the cylinder 21, the internal gear 2 is lowered to a position lower than the lower surface plate 6. or manually. At this time, the other carriers 7 in the non-loading position are
It is held in that position by a holding mechanism 26, and this holding is carried out as follows.

即ち、内歯歯車2の回転が停止すると、第3図に矢印で
示すように.係合片27がシリンダ29により前進せし
められ、ホルダ18上のピン32が該係合片27の小溝
33に嵌合する。これによつて、係合片27は内歯歯市
2と互いに歯部同士が同位相となるように保持され、そ
の状態で、第4図及び第5図に示すように内歯歯車2と
係合片27とがシリンダ21及び26aにより同期的に
下降し、内歯歯車2がキヤリヤ7から離間すると同時に
係合片27がキヤリヤ7に噛合する。上記係合片27が
位相ずれの状態で前進してきた場合には、ピン32が尖
頭状の案内部34に当接することになるが、係合片27
の前進開始と同時に微調整用のシリンダ31が作動して
該係合片が横方向にも移動できるようになつているため
、該係合片27は、ピン32が案内部に圧接する力によ
つて横移動し、ピン32が小溝33に嵌合する位置に位
相調整される。
That is, when the rotation of the internal gear 2 stops, as shown by the arrow in FIG. The engagement piece 27 is advanced by the cylinder 29, and the pin 32 on the holder 18 fits into the small groove 33 of the engagement piece 27. As a result, the engagement piece 27 is held so that the teeth are in the same phase as the internal gear 2, and in this state, the engagement piece 27 and the internal gear 2 are held together as shown in FIGS. 4 and 5. The engagement pieces 27 are lowered synchronously by the cylinders 21 and 26a, and the engagement pieces 27 mesh with the carrier 7 at the same time as the internal gear 2 separates from the carrier 7. When the engaging piece 27 moves forward with a phase shift, the pin 32 comes into contact with the pointed guide portion 34, but the engaging piece 27
At the same time as the pin 32 starts to move forward, the fine adjustment cylinder 31 is actuated so that the engaging piece 27 can also move in the lateral direction. Therefore, the pin 32 is moved laterally, and the phase is adjusted to a position where the pin 32 fits into the small groove 33.

キヤリヤ7の肉厚が大きい場合には、内歯歯東2を第4
図の位置まで一旦下げた状態で係合片27を前進させて
キヤリヤ7に噛合させ、それから内歯歯車2と係合片2
7とを下降させるようにすることもできる。
If the carrier 7 has a large wall thickness, the internal tooth east 2
Once lowered to the position shown in the figure, the engaging piece 27 is advanced to mesh with the carrier 7, and then the internal gear 2 and the engaging piece 2
7 can also be lowered.

一つのキヤリヤ7の取出しが終ると、内歯歯市2及び係
合片27がシリンダ21及び26aにより押上げられ、
内歯歯車2が非装着位置にある他のキヤリヤ7と再び噛
合すると同時に係合片27がキヤリヤ7から離脱し、そ
の後該係合片27はシリンダ29によつて最初の位置に
後退する。
When one carrier 7 is removed, the internal tooth space 2 and the engagement piece 27 are pushed up by the cylinders 21 and 26a,
At the same time as the internal gear 2 meshes again with the other carrier 7 in the non-mounted position, the engagement piece 27 is disengaged from the carrier 7, and then the engagement piece 27 is retreated by the cylinder 29 to the initial position.

そして、両歯車2,4の駆動によつて次のキヤリヤ7が
装脱位置に送られ、上記動作が繰り返されることによつ
てそのキヤリヤの取出しが行われる。上記実施例では、
係合片27の横移動をシリンダ31で行うようにしてい
るが、このようなシリンダを用いることなく、ロツド3
0に対して該係合片27を横移動可能に連結することも
できる。以上に詳述したように、本発明によれば、非装
脱位置にあるキヤリヤとの対応位置に、内歯歯車と同様
の歯部を備えた係合片を前後動自在に配設したので、内
歯歯車の下降時に、上記係合片によつてキヤリヤを位置
ずれしないように確実に保持させることができる。
Then, by driving both gears 2 and 4, the next carrier 7 is sent to the loading/unloading position, and by repeating the above operation, the carrier is removed. In the above example,
Although the horizontal movement of the engaging piece 27 is performed by the cylinder 31, the rod 3 can be moved without using such a cylinder.
It is also possible to connect the engagement piece 27 to the 0 so that it can move laterally. As detailed above, according to the present invention, an engagement piece having teeth similar to those of an internal gear is disposed at a position corresponding to the carrier in the non-mounting/detaching position, so that it can freely move back and forth. When the internal gear is lowered, the engagement piece can reliably hold the carrier so as not to shift its position.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す断面図、第2図はその
上定盤を取外した状態での平面図、第3図は第1図にお
ける要部拡大図、第4図及び第5図}ま異なる作動状態
を示す第3図と同様の位置での断面図及びその平面図で
ある。 1・・・・・・機体、2・・・・・・内歯歯車、4・・
・・・・太陽歯車、7・・・・・・キヤリヤ、8・・・
・・・ワーク、25−・・・・装脱部.627・・・・
・・係合片、28・・・・・・歯部。
Fig. 1 is a sectional view showing an embodiment of the present invention, Fig. 2 is a plan view with the surface plate removed, Fig. 3 is an enlarged view of the main parts in Fig. 1, Fig. 4 and Fig. FIG. 5 is a sectional view and a plan view thereof at the same position as FIG. 3, showing a different operating state. 1... Airframe, 2... Internal gear, 4...
...Sun gear, 7...Carrier, 8...
... Workpiece, 25-... Loading and unloading section. 627...
...Engagement piece, 28...teeth part.

Claims (1)

【特許請求の範囲】[Claims] 1 適宜の駆動源に連結されて回転自在の内歯歯車と太
陽歯車とにキャリヤを噛合させ、該キャリヤに保持させ
たワークを定盤によつて研削するようにしたものにおい
て、上記内歯歯車を上下動自在に構成し、機体の一側に
該内歯歯車を下降させた状態でキャリヤの装填及び取出
しを行うための装脱部を設けると共に、機体における非
装脱位置にあるキャリアとの対応位置に、内歯歯車と同
様の歯部を備えた係合片を、キャリヤに噛合する前進位
置とキャリヤから離間する後退位置とに移動可能に配設
したことを特徴とする平面研削装置。
1 A carrier is meshed with an internal gear and a sun gear that are connected to an appropriate drive source and are rotatable, and a workpiece held by the carrier is ground by a surface plate, in which the internal gear is The internal gear is configured to be movable up and down, and a loading/unloading section is provided on one side of the machine for loading and unloading the carrier with the internal gear lowered. A surface grinding device characterized in that an engaging piece having teeth similar to an internal gear is disposed at a corresponding position so as to be movable between a forward position in which it engages with a carrier and a retreated position in which it separates from the carrier.
JP57100282A 1982-06-11 1982-06-11 Surface grinding device Expired JPS5944186B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57100282A JPS5944186B2 (en) 1982-06-11 1982-06-11 Surface grinding device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57100282A JPS5944186B2 (en) 1982-06-11 1982-06-11 Surface grinding device

Publications (2)

Publication Number Publication Date
JPS58217268A JPS58217268A (en) 1983-12-17
JPS5944186B2 true JPS5944186B2 (en) 1984-10-27

Family

ID=14269834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57100282A Expired JPS5944186B2 (en) 1982-06-11 1982-06-11 Surface grinding device

Country Status (1)

Country Link
JP (1) JPS5944186B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6183301B2 (en) * 2014-06-16 2017-08-23 信越半導体株式会社 Automatic handling device

Also Published As

Publication number Publication date
JPS58217268A (en) 1983-12-17

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