JPS5948560B2 - Method for manufacturing piezoelectric ceramic elements - Google Patents
Method for manufacturing piezoelectric ceramic elementsInfo
- Publication number
- JPS5948560B2 JPS5948560B2 JP55163097A JP16309780A JPS5948560B2 JP S5948560 B2 JPS5948560 B2 JP S5948560B2 JP 55163097 A JP55163097 A JP 55163097A JP 16309780 A JP16309780 A JP 16309780A JP S5948560 B2 JPS5948560 B2 JP S5948560B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric ceramic
- heat treatment
- piezoelectricity
- deterioration
- ceramic element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000919 ceramic Substances 0.000 title claims description 16
- 238000000034 method Methods 0.000 title claims description 11
- 238000004519 manufacturing process Methods 0.000 title claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 17
- 230000010287 polarization Effects 0.000 claims description 10
- 230000006866 deterioration Effects 0.000 description 12
- 230000000694 effects Effects 0.000 description 7
- 230000005684 electric field Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 229910019653 Mg1/3Nb2/3 Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Compositions Of Oxide Ceramics (AREA)
Description
【発明の詳細な説明】
本発明は、分極処理した圧電磁器素子を加工するときに
、熱処理の際に起こる圧電磁器の圧電性の劣化を低減す
る圧電磁器素子の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a piezoelectric ceramic element that reduces deterioration of piezoelectricity of the piezoelectric ceramic that occurs during heat treatment when processing a polarized piezoelectric ceramic element.
圧電磁器は、焼結した状態では自発分極の分極。Piezoelectric ceramics exhibit spontaneous polarization in their sintered state.
軸が任意の方向を向いていて、全体として圧電性を示さ
ないが、直流高電界を加えて分極処理を行うと、分極軸
の方向が電界の方向に配向して圧電性を示す。この圧電
性は、温度がキューリー点に達すると、残留分極がなく
なることによつて消滅。する。しかし、圧電性の劣化は
キユリーーー点より低い温度より除々に起こる。The axes are oriented in arbitrary directions and do not exhibit piezoelectricity as a whole, but when polarization treatment is performed by applying a high DC electric field, the direction of the polarization axis is oriented in the direction of the electric field and it exhibits piezoelectricity. This piezoelectricity disappears when the temperature reaches the Curie point due to the loss of residual polarization. do. However, piezoelectricity deterioration occurs gradually at temperatures below the Curie point.
圧電磁器素子の加工工程において、分極処理した素子を
、切断時の樹脂による貼合せ、接着剤の硬化、真空蒸着
、ハンダ付等で加熱することが多、い。In the processing of piezoelectric ceramic elements, polarized elements are often heated during cutting, bonding with resin, curing of adhesive, vacuum deposition, soldering, etc.
そこで、熱による圧電性の劣化が問題となつていた。ま
た、加工上は高温を要求されても、圧電性の劣化の問題
でより低い温度に押えなければならないことが多かつた
。本発明は、分極処理した圧電磁器素子の加熱をフ伴な
う加工において、従来の欠点であつた圧電磁器素子の圧
電性の劣化を低減することを目的とし、素子の温度変化
の際に焦電効果により発生した電荷で分極が弱められる
のを防ぐため、分極処理に用いた両電極間を外部回路で
導通して焦電効果で発生した電荷を打消す方法である。Therefore, deterioration of piezoelectricity due to heat has become a problem. Furthermore, even if high temperatures were required for processing, it was often necessary to keep the temperature lower due to problems with piezoelectricity deterioration. The present invention aims to reduce the deterioration of the piezoelectricity of the piezoelectric ceramic element, which was a conventional drawback, in the processing that involves heating of the polarized piezoelectric ceramic element. In order to prevent the polarization from being weakened by the electric charge generated by the electric effect, this method uses an external circuit to connect the two electrodes used in the polarization process to cancel out the electric charge generated by the pyroelectric effect.
すなわち、、本発明は第１図に示すように分極処理した
圧電磁器素子１の加熱を伴なう加工において、上記圧電
磁器素子１の両電極２間を外部回路にの実施例では導線
）３で短絡もしくは抵抗を通して導通して熱処理するこ
とを特徴とする。That is, in the present invention, as shown in FIG. 1, in a process involving heating of a piezoelectric ceramic element 1 subjected to a polarization process, an external circuit is connected between both electrodes 2 of the piezoelectric ceramic element 1 (in the embodiment, a conductive wire) 3 It is characterized by being heat-treated by short-circuiting or conducting through a resistor.
第１図でイは分極方向である。以下、実施例をもとに本
発明の効果を説明する。In Figure 1, A indicates the polarization direction. Hereinafter, the effects of the present invention will be explained based on Examples.
Ｐｂ（Ｍｇ１／３Ｎｂ２／３）Ｏ、−ＰｂＴｉ０。−Ｐ
ｂＺｒＯ、の三成分系の圧電磁器材料で、直径２０ｍｍ
、厚み０．２４ｍｍに焼成・加工・電極付けして、１０
０℃のシリコンオイル中で３ＫＶ／ｍｍの直流電界で分
極した試料を用いた。なお、この材料のキューリー点は
３２６℃、抗電場はＩＫＶ／ｍｍ、Ｋｐは０．５８であ
る。そして、恒温槽を用いて、熱処理温度による圧電性
の劣化の度合を調べた。ただし、熱処理後の特性の測定
は、熱処理後十分に安定させてから測定した。第２図に
、普通に熱処理（電極間開放）した従来方法の場合Ａと
、電極間を外部回路で短絡して熱処理（ただし、ここで
熱処理とは昇温、降温を含む）した本発明方法の場合Ｂ
Ｃ７）Ｋｐ（熱処理前の径方向振動の電気機械結合係数
、熱処理後の係数Ｋｐ’）の劣化の程度を示す。また、
両電極間を抵抗を通じて導通した場合でも抵抗値が小さ
ければ短絡の場合と同様の結果が得られるものであつた
。両電極間を短絡した場合のときの劣化が、純粋にその
熱処理温度による残留分極の一部の消滅による圧電性の
劣化であり、この場合と両電極間を開放した場合のとき
の劣化との差が、焦電効果のための圧電性の劣化である
。本発明の方法によれば、この焦電効果による圧電性の
劣化を防ぐことができる。以上のように、本発明の方法
によれば、簡単に熱処理による圧電性の劣化を第２図に
示すように大きく低減することができ、圧電磁器素子の
加熱を伴なう加工において極めて有用である。Pb(Mg1/3Nb2/3)O, -PbTi0. -P
A three-component piezoelectric ceramic material of bZrO, with a diameter of 20 mm.
, fired, processed, and attached electrodes to a thickness of 0.24 mm, 10
A sample was used that was polarized with a DC electric field of 3 KV/mm in silicone oil at 0°C. Note that this material has a Curie point of 326° C., a coercive electric field of IKV/mm, and a Kp of 0.58. Then, using a constant temperature bath, the degree of deterioration of piezoelectricity due to heat treatment temperature was investigated. However, the properties after the heat treatment were measured after the properties were sufficiently stabilized after the heat treatment. Figure 2 shows case A of the conventional method in which heat treatment is performed normally (electrodes are open) and method A of the present invention in which heat treatment is performed by short-circuiting the electrodes with an external circuit (however, heat treatment here includes temperature raising and lowering). In case B
C7) Shows the degree of deterioration of Kp (radial vibration electromechanical coupling coefficient before heat treatment, coefficient Kp' after heat treatment). Also,
Even when the two electrodes were electrically connected through a resistor, the same results as in the case of a short circuit could be obtained if the resistance value was small. The deterioration when the two electrodes are short-circuited is purely due to the disappearance of part of the residual polarization due to the heat treatment temperature, and the difference between this case and the deterioration when the two electrodes are opened is that The difference is the degradation of piezoelectricity due to the pyroelectric effect. According to the method of the present invention, deterioration of piezoelectricity due to this pyroelectric effect can be prevented. As described above, according to the method of the present invention, the deterioration of piezoelectricity due to heat treatment can be greatly reduced as shown in FIG. 2, and it is extremely useful in processing piezoelectric ceramic elements that involve heating. be.
特に、焦電効果の大きい材料、抗電場の低い材料ではそ
の効果が大きいものである。This effect is particularly great for materials with a large pyroelectric effect and materials with a low coercive electric field.
第１図は本発明方法における圧電磁器素子の電極間の短
絡の様子を示す図、第２図は熱処理温度による圧電性の
劣化の様子を示ＴＰである。
１ ・・・・・・圧電磁器素子、２・・・・・・電極、
３・・・・・・外部”回路（導線）。FIG. 1 is a diagram showing a state of short circuit between electrodes of a piezoelectric ceramic element in the method of the present invention, and FIG. 2 is a diagram showing a state of deterioration of piezoelectricity due to heat treatment temperature. 1... Piezoelectric ceramic element, 2... Electrode,
3...External circuit (conductor).
Claims (1)
いて、外部回路で上記圧電磁器素子の分極処理に用いた
両電極間を導通して熱処理することを特徴とする圧電磁
器素子の製造方法。1. A method for manufacturing a piezoelectric ceramic element, which is characterized in that in processing a polarized piezoelectric ceramic element that involves heating, the heat treatment is performed by electrically connecting both electrodes used for the polarization treatment of the piezoelectric ceramic element in an external circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55163097A JPS5948560B2 (en) | 1980-11-18 | 1980-11-18 | Method for manufacturing piezoelectric ceramic elements |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55163097A JPS5948560B2 (en) | 1980-11-18 | 1980-11-18 | Method for manufacturing piezoelectric ceramic elements |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5785274A JPS5785274A (en) | 1982-05-27 |
| JPS5948560B2 true JPS5948560B2 (en) | 1984-11-27 |
Family
ID=15767118
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55163097A Expired JPS5948560B2 (en) | 1980-11-18 | 1980-11-18 | Method for manufacturing piezoelectric ceramic elements |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5948560B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6114620A (en) * | 1984-06-29 | 1986-01-22 | Fujitsu Ltd | Hologram disk |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7191519B2 (en) | 2017-03-03 | 2022-12-19 | キヤノン株式会社 | Method for manufacturing piezoelectric element, method for manufacturing vibration wave motor, method for manufacturing optical device, and method for manufacturing electronic device |
| WO2018159772A1 (en) * | 2017-03-03 | 2018-09-07 | Canon Kabushiki Kaisha | Method of manufacturing piezoelectric element |
-
1980
- 1980-11-18 JP JP55163097A patent/JPS5948560B2/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6114620A (en) * | 1984-06-29 | 1986-01-22 | Fujitsu Ltd | Hologram disk |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5785274A (en) | 1982-05-27 |
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