JPS5950027B2 - Air supply port structure - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention particularly relates to the structure of an air supply port used in a clean room where the content of fine particles in the air is extremely low.

Recently, in semiconductor factories, space equipment assembly factories, pharmaceutical factories, etc., in order to prevent the influence of dust on products, clean rooms with clean air that removes dust and other particulates have been used. is equipped with an air supply port from which clean air is supplied.

Figure 1 shows the structure of a conventional clean room air supply port.
A is a front view looking at the air supply port from inside the room, and B is a cutaway side view. An air supply port 1 made of a metal frame or the like is covered with a rectangular cylindrical cover 2 made of wire mesh or the like. A filter 3 is provided inside the filter 3, which removes particles having an outer diameter of 0.3 μmφ or more with an accuracy of 99.97% or more, and air is supplied from the direction shown by the large arrow.

Therefore, filtered clean air is blown out in the direction indicated by the arrow, and clean air is supplied to the room.

However, since this air supply port 1 is generally installed on the ceiling 4 shown by the broken line, even if clean air is constantly supplied directly below it, no air flow is generated anywhere other than directly below it, and dust generated in the room can be removed. Retention occurs, and in order to solve this problem, the system shown in FIG. 2 is also used.

FIGS. 2A and 2B are a front view and a cutaway side view similar to those in FIG. Due to the disturbance action of the resistor plate 5, a horizontal component of the air supply shown by the horizontal arrow in the figure is generated, and air is supplied together with a vertical component of the air supply shown by the vertical arrow.

However, even with this method, the shaded area in the same figure becomes a dead zone and no airflow is generated, and the fine particles that are charged in this area accumulate, become large particles due to mutual bonding, and then fall. However, there were some drawbacks such as adhesion to products.

The present invention has the purpose of fundamentally solving such drawbacks of the conventional art, and aims to maintain a predetermined distance from the air supply port toward the air supply blowing side and to face the air supply port so that the air supply port has almost the same dimensions as the air supply port. A fluid resistance plate is provided, and a louver-shaped rectifying plate is provided on the periphery of the fluid resistance plate, which is provided almost parallel to the fluid resistance plate toward the air supply port side.A simple configuration prevents the occurrence of dead zones during air supply. This provides a structure that completely eliminates air supply.

Hereinafter, the present invention will be explained in detail with reference to FIG. 3 showing an embodiment.

FIG. 3A is a cutaway front view similar to FIGS. 1 and 2, and FIG. 3B is a Z-Z sectional view in FIG. L fixed by means of
For the support rod 9 fixed to the shaped fitting 7 with screws 8,
A perforated plate 10, such as a wire mesh or a punching board, having an aperture ratio of 50% or more is fixed with screws 11, and a fluid resistance plate 5 having almost the same dimensions as the air supply port 1, that is, almost the same shape and size, is mounted on its upper surface. , are placed facing the air supply port 1.

In addition, on the side of the air supply port 1 in the peripheral part 12 of the fluid resistance plate 5, a looper-shaped rectifying plate 14 made of a metal plate or the like is connected at both ends to the support rod 9 by a shaft 13. It is provided substantially parallel to the plate 5, and its inner side 15 projects inward as it approaches the fluid resistance plate 5 from the air supply port 1.

Note that a predetermined interval d is maintained between the air supply port 1 and the fluid resistance plate 5 by the support rod 9, and within this interval d, each rectifier plate 14 has a gap as it approaches the fluid resistance plate 5. The inclination in the inward and outward directions increases, and the direction of the airflow coming into contact with each rectifier plate 14 and flowing out is diffused.

Therefore, when the supply air shown by the large arrow passes through the filter 3 and hits the fluid resistance plate 5, it is disturbed by the resistance plate 5 and generates a horizontal component of the supply air. In addition to the completely horizontal component parallel to the , there is also a diagonal component, which blows out in all directions along with the vertical component of the supplied air that has passed through the fluid resistance plate 5, creating an air flow that is diffused in a hemispherical shape with the ceiling 4 as the cutting surface. Occur.

For this reason, the dead zone shown in Figure 2B does not occur at all, and by providing the dead zone shown in Figure 3 at predetermined intervals depending on the indoor area, an air flow is generated by the supply air throughout the room, and the air It is possible to completely prevent dust from accumulating inside.

Note that the area of the fluid resistance plate 5 only needs to be approximately equal to the air supply port 1, and the ratio of the vertical component of the air supply to the horizontal component of the air supply is determined by selecting the aperture ratio, and the air volume ratio of the vertical component to the horizontal component is 5.
:5 to 6:4 is preferable.

That is, if the horizontal component is made larger than 5, the dust generated directly under the perforated plate 10 will not be removed quickly due to the decrease in the vertical component, and at the same time, the increase in the horizontal component may cause a ted zone similar to that shown in FIG. 2B. There is.

Furthermore, if the vertical component is made larger than 6, the horizontal component decreases, resulting in a situation similar to that shown in FIG. 1, which is not preferable.

In addition, the rectifying plates 14 may not be configured in multiple stages, and one plate may be provided in each of the peripheral portions 12 of the fluid resistance plates 5.

In addition, in the case of a multi-stage configuration, it is preferable to make the inner side 15 project inward in steps as shown in Fig. 3, so that the air supply amount in each direction component is equal, but even if the inward protruding length is the same, it is not essential. The effect remains unchanged.

In addition, in FIG. 3, it is rotatable by the shaft 13, but it may be fixed at a desired angle of inclination.
Each edge of the perforated plate 10 may be extended upward to form a cage-shaped cover, and the rectifying plate 14 may be fixed to the inner peripheral portion of the cage-shaped cover by means such as screw fastening.

However, in this case, the fluid resistance plate 5 will be placed on the bottom surface of the cage-shaped cover.

Further, it is only necessary to change each part according to the shape of the air supply port 1, and the support structure of the perforated plate 10 and the rectifying plate 14 can be selected from various types other than the support rod 9. It may be attached to.

As is clear from the above explanation, according to the present invention, despite the simple structure, there is no dead zone in the air flow and clean air is always supplied throughout the room. It has great effects as a breather.

[Brief explanation of the drawing]

1 and 2 show a conventional example, A is a front view, B is a broken side view, and FIG. 3 is an embodiment of the present invention, A is a broken front view, and B is a Z-Z cross section at A. It is a diagram. 1...Air supply port, 5...Fluid resistance plate, 9
... Support rod, 10 ... Perforated plate, 12.
... Peripheral part, 13 ... Axis, 14 ...
... Rectifying plate, 15 ... Inner side, d ... Distance.

Claims (1)

[Scope of Claims] 1. A fluid resistance plate having substantially the same dimensions as the air supply port and facing the air supply port while maintaining a predetermined distance from the air supply port toward the air supply outlet side; A structure of an air supply port characterized by comprising a louver-shaped rectifying plate provided substantially parallel to the fluid resistance plate at the periphery of the plate and toward the air supply port side. 2. The louver-shaped rectifying plate is characterized by using a plurality of rectifying plates having a multi-stage configuration, and using a plurality of rectifying plates whose inner sides protrude inward as they approach the fluid resistance plate from the air supply port. The structure of the air supply port according to claim 1.