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JPS6014831B2 - Coating method and device for inner surface of metal tube - Google Patents
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JPS6014831B2 - Coating method and device for inner surface of metal tube - Google Patents

Coating method and device for inner surface of metal tube

Info

Publication number
JPS6014831B2
JPS6014831B2 JP4834979A JP4834979A JPS6014831B2 JP S6014831 B2 JPS6014831 B2 JP S6014831B2 JP 4834979 A JP4834979 A JP 4834979A JP 4834979 A JP4834979 A JP 4834979A JP S6014831 B2 JPS6014831 B2 JP S6014831B2
Authority
JP
Japan
Prior art keywords
metal tube
electrode
loop
monomer
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4834979A
Other languages
Japanese (ja)
Other versions
JPS55141563A (en
Inventor
和彦 神吉
利喜蔵 田中
正裕 堀田
紀幸 竹田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sekisui Chemical Co Ltd
Original Assignee
Sekisui Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sekisui Chemical Co Ltd filed Critical Sekisui Chemical Co Ltd
Priority to JP4834979A priority Critical patent/JPS6014831B2/en
Publication of JPS55141563A publication Critical patent/JPS55141563A/en
Publication of JPS6014831B2 publication Critical patent/JPS6014831B2/en
Expired legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L58/00Protection of pipes or pipe fittings against corrosion or incrustation
    • F16L58/02Protection of pipes or pipe fittings against corrosion or incrustation by means of internal or external coatings
    • F16L58/04Coatings characterised by the materials used
    • F16L58/10Coatings characterised by the materials used by rubber or plastics
    • F16L58/1009Coatings characterised by the materials used by rubber or plastics the coating being placed inside the pipe
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/62Plasma-deposition of organic layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/14Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to metal, e.g. car bodies
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/22Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to internal surfaces, e.g. of tubes
    • B05D7/222Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to internal surfaces, e.g. of tubes of pipes
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04Coating on selected surface areas, e.g. using masks
    • C23C16/045Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Coating Apparatus (AREA)
  • Polymerisation Methods In General (AREA)
  • Paints Or Removers (AREA)
  • Physical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Description

【発明の詳細な説明】 本発明は金属管の内面をイオン又はラジカル重合反応可
能な有機物単量体でコーティングする方法及び装置に関
するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method and apparatus for coating the inner surface of a metal tube with an organic monomer capable of ionic or radical polymerization.

従釆金属管内面のコーティング方法としては塗料を塗装
する方法、電気メッキ法、プラスチック製のチューブを
挿入して積層する方法、真空蒸着法、スパッタリング法
等が採用されているが、塗装法は小口径長尺管は均一に
塗装できない、溶剤を使用するので公害上の問題がある
等の欠点を有しており、電気メッキ法は、処理が煩雑で
あり処理に長時間必要である、廃液は公害上の問題があ
る等の欠点を有しており、さらにプラスチック製のチュ
ーブを挿入して積層する方法は長尺管には均一に積層す
ることができない、接着強度が4・さし・等の欠点を有
している。
Coating methods for the inner surface of subordinate metal tubes include painting with paint, electroplating, inserting plastic tubes and laminating, vacuum evaporation, sputtering, etc. However, the coating method is small. Long diameter pipes have drawbacks such as not being able to be coated uniformly, and the use of solvents, which poses pollution problems.Electroplating methods are complicated and require a long time to process, and waste liquid is It has disadvantages such as pollution problems, and the method of inserting and laminating plastic tubes cannot be evenly laminated on long tubes, and the adhesive strength is 4. It has the following disadvantages.

又、真空蒸着法は、管内を10‐5〜10‐6tonの
高真空に保持しなければならず、このため大型の排気装
置を必要とし、しかも蒸着被覆層と基体との密着強度が
小さいので、あらかじめ下地処理を施さなければならな
いという欠点を有し、一方、スパッタリング法は被覆層
の形成速度が遅く、時間がかかるという欠点を有してい
る。本発明の目的は上記欠点に鑑み公害上の問題なく小
口径長尺管であっても容易かつ均一にコープィングする
ことができる金属管内面のコーティング方法及びその装
道を提供することにある。
In addition, in the vacuum evaporation method, the inside of the tube must be maintained at a high vacuum of 10-5 to 10-6 tons, which requires a large exhaust device, and the adhesion strength between the evaporated coating layer and the substrate is low. However, the sputtering method has the disadvantage that the coating layer is formed at a slow rate and takes time. SUMMARY OF THE INVENTION In view of the above-mentioned drawbacks, an object of the present invention is to provide a method for coating the inner surface of a metal tube and a method for coating the inner surface of a metal tube, which can easily and uniformly coat even a long tube with a small diameter without causing any pollution problems.

即ち本発明の要旨はコーティングされる金属管の内部を
10‐3〜1伽orrに減圧し、ラセン状又はループ状
のプラズマ発生用電極をラセン又はループが前記金属管
の円周と略同心円になるように設け、該電極を前記金属
管の一端から他端に移動しながら低温プラズマを発生す
ると共に、前記電極のラセソ又はループ中にイオン又は
ラジカル重合反応可能な有機物単量体を吹込み、該単童
体の重合体を金属管の内面に付着させることを特徴とす
る金属管内面のコーティング方法及びコーティングされ
る金属管の密閉装置と、該密閉装置の少なくとも一方に
設けられた減圧装贋と、該密閉装置の一方に前記金属管
内を摺動自在に設けられかつその先端にラセン状又はル
ープ状のプラズマ発生電極がラセン又はループが前記金
属管の同心円になるように設けられたロッドと該ロッド
の中心を通り、前記電極のラセン又はループの中心にイ
オン又はラジカル重合反応可能な有機物単量体を供給可
能になされた単量体供給装橿とよりなる金属管内面のコ
ーティング装置に存する。本発明で使用される低温プラ
ズマとは常温かつ10‐3〜10Torrの減圧下にお
いて高周波放電、グロー放電等によって発生されるプラ
ズマをさし、プラズマ発生用電極としてはラセン状又は
ループ状の電極が使用される。
That is, the gist of the present invention is to reduce the pressure inside the metal tube to be coated to 10-3 to 1 orr, and to install a helical or loop-shaped plasma generating electrode so that the helical or loop is approximately concentric with the circumference of the metal tube. moving the electrode from one end of the metal tube to the other end to generate low-temperature plasma, and injecting an organic monomer capable of ionic or radical polymerization reaction into the raceway or loop of the electrode, A method for coating the inner surface of a metal tube, characterized in that the monomer polymer is attached to the inner surface of the metal tube, a sealing device for the coated metal tube, and a vacuum device provided in at least one of the sealing devices. and a rod provided on one side of the sealing device so as to be slidable within the metal tube, and having a spiral or loop-shaped plasma generating electrode at its tip so that the spiral or loop is concentric with the metal tube. A device for coating the inner surface of a metal tube, comprising a monomer supplying rod capable of supplying an organic monomer capable of ionic or radical polymerization through the center of the rod and to the center of the spiral or loop of the electrode. . The low-temperature plasma used in the present invention refers to plasma generated by high-frequency discharge, glow discharge, etc. at room temperature and under reduced pressure of 10-3 to 10 Torr, and the plasma generation electrode may be a helical or loop-shaped electrode. used.

本発明において電極の形状をラセン状又はループ状のも
のに限定する理由は、板状、棒状等の他の形状の電極で
低温プラズマを発生させ、有機物単量体を供孫舎する場
合は該単量体が均一にイオン化又は活性化されず、スパ
ッタリング現象をおこしたり過剰ラジカルが発生し、コ
ーティング皮膜の接着強度が小さく、皮膜が劣化、着色
するためである。本発明で使用されるイオン又はラジカ
ル重合反応可能な有機物単量体とは低温プラズマ処理さ
れた際にイオン化又は活性化され、イオン又はラジカル
重合反応して重合体を形成するものであればよく、たと
えばスチレン、クロロベンゼン、ナフタレン、アクリロ
ニトリル、チオフエン、エチレン、トリエチルシラン、
ジエチルビニルシラン、シクロヘキセン、2・6−ジメ
チル−2・4ーヘキサジェン、ヘプテンー2等があげら
れる。
The reason why the shape of the electrode is limited to a helical shape or a loop shape in the present invention is that if low-temperature plasma is generated using an electrode of other shapes such as a plate shape or a rod shape, and organic monomers are produced, This is because the monomers are not uniformly ionized or activated, causing sputtering phenomena and generating excessive radicals, resulting in low adhesion strength of the coating film, resulting in deterioration and discoloration of the film. The organic monomer capable of ionic or radical polymerization used in the present invention may be one that is ionized or activated when subjected to low-temperature plasma treatment and undergoes ionic or radical polymerization to form a polymer. For example, styrene, chlorobenzene, naphthalene, acrylonitrile, thiophene, ethylene, triethylsilane,
Examples include diethylvinylsilane, cyclohexene, 2,6-dimethyl-2,4-hexadiene, and heptene-2.

次に本発明の一実施例を示す図面を参照しながら具体的
に説明する。第1図は本発明のコーティング装置の一例
を示す説明図である。
Next, an embodiment of the present invention will be specifically described with reference to the drawings. FIG. 1 is an explanatory diagram showing an example of the coating apparatus of the present invention.

第1図において1はコーティングされる金属管であり、
金属管は密閉菱鷹2及び3で密閉されている。
In FIG. 1, 1 is a metal tube to be coated;
The metal tube is sealed with sealing fittings 2 and 3.

4は密閉装置2に設けられた減圧装置である。4 is a pressure reducing device provided in the sealing device 2.

5は金属管内を摺動自在に密閉装置3に設けられたロッ
ドであり、ロッド5の先端には低温プラズマ発生用電極
6が設けられ、。
Reference numeral 5 denotes a rod provided in the sealing device 3 so as to be able to slide freely within the metal tube, and a low-temperature plasma generation electrode 6 is provided at the tip of the rod 5.

ッド5の中心には単量体供給装置7が設けられている。
第2図は電極6の例を示す斜視図であり、図中イはラセ
ン状の電極の一例であり口はループ状の電極の一例であ
る。電極6はその電極のラセン又はループが金属管1の
円周と略同心円になるようにロッド5の先端に設けられ
ており、ロッド5を通して低温プラズマ発生用電極10
に連結されている。単量体供V給装置7はロッド5の中
心を通って単量体ボンベ8に連結されており供聯合装置
7の吐出口71はロッド5の先端の略中心に、供V給さ
れた単量体が前記電極のラセン又はループの中心に吹込
まれるように設けられている。9は駆動装置でありロッ
ド5を摺動せしめる。
A monomer supply device 7 is provided at the center of the pad 5 .
FIG. 2 is a perspective view showing an example of the electrode 6. In the figure, A is an example of a spiral-shaped electrode, and the opening is an example of a loop-shaped electrode. The electrode 6 is provided at the tip of the rod 5 so that the spiral or loop of the electrode is approximately concentric with the circumference of the metal tube 1, and the electrode 10 for low temperature plasma generation is passed through the rod 5.
is connected to. The monomer supply V supply device 7 is connected to the monomer cylinder 8 through the center of the rod 5, and the discharge port 71 of the supply combination device 7 is located approximately at the center of the tip of the rod 5, and the monomer V supply device 7 is connected to the monomer cylinder 8 through the center of the rod 5. A mass is provided to be blown into the center of the helix or loop of the electrode. Reference numeral 9 denotes a drive device that causes the rod 5 to slide.

上記装置で金属管1内面をコーティングするにはロッド
5を電極6が密閉装置2の近傍まで押込み、減圧装置4
により金属管内部を10‐3〜1皿orrまで減圧する
To coat the inner surface of the metal tube 1 with the above device, push the rod 5 until the electrode 6 is near the sealing device 2, and press the rod 5 into the pressure reducing device 4.
The pressure inside the metal tube is reduced to 10-3 to 1 plate orr.

次に電源1 0‘こより電気を電極6に印加して電極6
の周辺に低温プラズマを発生せしめ、発生した低温プラ
ズマ内へ単量体を供給装置7から供給しながらロッド5
を駆動装置9により密閉装置3の側に摺動する。供聯合
された単量体は低温プラズマ内でイオン化又は活性化さ
れ、重合反応して金属管1の内壁に付着して金属管1内
面は単量体の重合体でコーティングされる。なお単量体
が吹込まれても金属管内部の圧力は10‐3〜loTo
mに保たれるよう減圧装置4により減圧されている。金
属管1はプラズマ発生用電極6の対電極になるのでアー
ス11が設けられるのが好ましい。又金属管内部13及
び14は共に減圧されても良いが減圧の効率が悪くなる
のでロッド5によって金属管内部13と14に分割され
るのが好ましい。さらに金属管内部13が減圧され、金
属管内部14が常圧ならばロッド5の摺動に大きな駆動
装置が必要になるので、金属管内部14は金属管内部1
3より少し高圧になるように減圧装置12により減圧さ
れるのが好ましい。又低温プラズマを発生する際の雰囲
気は単量体単独であってもよくアルゴン、ネオン、キセ
/ン等の不活性ガスが共存していてもよい。本発明方法
は上述の通り構成されており、低温プラズマ発生用電極
がラセン状又はループ状のものであるから、ラセン又は
ループの内側は全て低温プラズマ化される。
Next, apply electricity from the power supply 1 0' to the electrode 6 to
A low temperature plasma is generated around the rod 5, and the monomer is supplied from the supply device 7 into the generated low temperature plasma
is slid toward the sealing device 3 by the drive device 9. The combined monomers are ionized or activated in a low-temperature plasma, undergo a polymerization reaction, and adhere to the inner wall of the metal tube 1, so that the inner surface of the metal tube 1 is coated with the polymer of the monomers. Even if the monomer is blown in, the pressure inside the metal tube will be 10-3~loTo.
The pressure is reduced by a pressure reducing device 4 so that the pressure is maintained at m. Since the metal tube 1 serves as a counter electrode to the plasma generation electrode 6, it is preferable that a ground 11 is provided. Further, the pressure inside the metal tubes 13 and 14 may be reduced together, but since the efficiency of pressure reduction becomes poor, it is preferable that the metal tubes are divided into the insides 13 and 14 by the rod 5. Furthermore, if the pressure inside the metal tube 13 is reduced and the pressure inside the metal tube 14 is normal pressure, a large drive device is required to slide the rod 5.
Preferably, the pressure is reduced by the pressure reducing device 12 to a pressure slightly higher than 3. Further, the atmosphere for generating low-temperature plasma may be composed of monomer alone, or an inert gas such as argon, neon, xenon, etc. may coexist. The method of the present invention is configured as described above, and since the low-temperature plasma generation electrode is spiral-shaped or loop-shaped, the entire inside of the spiral or loop is turned into low-temperature plasma.

そして、イオン又はラジカル重合反応可能な有機物単量
体が上記低温プラズマ化された領域に吹込まれるので、
吹込まれた単量体は均一にイオン化又は活性化され、イ
オン又はラジカル重合反応して重合体となり、金属管内
面は均一な厚みの密着性にすぐれた重合体被膜でコーテ
ィングされるのである。又上記処理は低温プラズマ発生
用電極を金属管の一端から他端まで移動しながら行なわ
れるのであるから長尺管であっても均一にコーティング
することができる。又、本発明装置は上述の通り構成さ
れているので「4・口径長尺管であっても容易にかつ均
一に管内面をコーティングすることができる。
Then, an organic monomer capable of ionic or radical polymerization is blown into the low-temperature plasma region.
The injected monomer is uniformly ionized or activated and undergoes an ionic or radical polymerization reaction to form a polymer, and the inner surface of the metal tube is coated with a highly adhesive polymer film of uniform thickness. Furthermore, since the above treatment is carried out while moving the low-temperature plasma generating electrode from one end of the metal tube to the other, even a long tube can be uniformly coated. Furthermore, since the apparatus of the present invention is configured as described above, it is possible to easily and uniformly coat the inner surface of a pipe even if it is a long pipe with a diameter of 4 mm.

【図面の簡単な説明】 第1図は本発明のコーティング装置の一例を示す説明図
である。 第2図は本発明のプラズマ発生用電極の例を示す斜視図
である。1・・・…金属管、2,3・・・・・・密閉装
置、4,12・・・・・・減圧装置、5…・・・ロッド
、6・・…・プラズマ発生用電極、7・・・・・・単量
体供給装置、71・・・・・・吐出口、8・・・…単量
体ボンベ、9…・・・駆動装置、10……プラズマ発生
用電極、11……アース、13,14・・・・・・金属
管内部。 第1図第2図
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an explanatory diagram showing an example of a coating apparatus of the present invention. FIG. 2 is a perspective view showing an example of the plasma generation electrode of the present invention. 1... Metal tube, 2, 3... Sealing device, 4, 12... Pressure reducing device, 5... Rod, 6... Electrode for plasma generation, 7 ... Monomer supply device, 71 ... Discharge port, 8 ... Monomer cylinder, 9 ... Drive device, 10 ... Electrode for plasma generation, 11 ... ...Earth, 13, 14... Inside the metal tube. Figure 1 Figure 2

Claims (1)

【特許請求の範囲】 1 コーテイングされる金属管の内部を10^−^3〜
10torrに減圧し、ラセン状又はループ状のプラズ
マ発生用電極をラセン又はループが前記金属管の円周と
略同心円になるように設け、該電極を前記金属管の一端
から他端に移動しながら低温プラズマを発生すると共に
、前記電極のラセン又はループ中にイオン又はラジカル
重合反応可能な有機物単量体を吹込み、該単量体の重合
体を金属管の内面に付着させることを特徴とする金属管
内面のコーテイング方法。 2 コーテイングされる金属管の密閉装置と、該密閉装
置の少なくとも一方に設けられた減圧装置と、該密閉装
置の一方に前記金属管内を摺動自在に設けられかつその
先端にラセン状又はループ状のプラズマ発生電極がラセ
ン又はループが前記金属管の同心円になるように設けら
れたロツドと該ロツドの中心を通り、前記電極のラセン
又はループの中心にイオン又はラジカル重合可能な有機
物単量体を供給可能になされた単量体供給装置とよりな
る金属管内面のコーテイング装置。
[Claims] 1. The inside of the metal tube to be coated is
The pressure is reduced to 10 torr, and a spiral or loop-shaped plasma generation electrode is provided so that the spiral or loop is approximately concentric with the circumference of the metal tube, and while moving the electrode from one end of the metal tube to the other end. The method is characterized by generating low-temperature plasma and injecting an organic monomer capable of ionic or radical polymerization into the helix or loop of the electrode, and depositing a polymer of the monomer on the inner surface of the metal tube. Coating method for the inner surface of metal tubes. 2. A sealing device for the metal tube to be coated, a pressure reducing device provided on at least one of the sealing devices, and a pressure reducing device provided on one side of the sealing device so as to be slidable inside the metal tube and having a helical or loop shape at the tip thereof. The plasma generating electrode passes through a rod provided so that the helical or loop is concentric with the metal tube, and an organic monomer capable of ion or radical polymerization is placed in the center of the helical or loop of the electrode. A coating device for the inner surface of a metal tube consisting of a monomer supply device that can be supplied.
JP4834979A 1979-04-18 1979-04-18 Coating method and device for inner surface of metal tube Expired JPS6014831B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4834979A JPS6014831B2 (en) 1979-04-18 1979-04-18 Coating method and device for inner surface of metal tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4834979A JPS6014831B2 (en) 1979-04-18 1979-04-18 Coating method and device for inner surface of metal tube

Publications (2)

Publication Number Publication Date
JPS55141563A JPS55141563A (en) 1980-11-05
JPS6014831B2 true JPS6014831B2 (en) 1985-04-16

Family

ID=12800893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4834979A Expired JPS6014831B2 (en) 1979-04-18 1979-04-18 Coating method and device for inner surface of metal tube

Country Status (1)

Country Link
JP (1) JPS6014831B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224931A (en) * 1985-07-22 1987-02-02 Hitachi Constr Mach Co Ltd Drilling tool used for machine tool

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07116598B2 (en) * 1986-10-06 1995-12-13 石川島播磨重工業株式会社 Sputtering device
CN108930018B (en) * 2018-08-09 2020-06-02 南通大学 Vacuum coating device for inner surface of slender tubular part

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224931A (en) * 1985-07-22 1987-02-02 Hitachi Constr Mach Co Ltd Drilling tool used for machine tool

Also Published As

Publication number Publication date
JPS55141563A (en) 1980-11-05

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