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JPS6020333B2 - Manufacturing method of optical fiber base material - Google Patents
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JPS6020333B2 - Manufacturing method of optical fiber base material - Google Patents

Manufacturing method of optical fiber base material

Info

Publication number
JPS6020333B2
JPS6020333B2 JP14179280A JP14179280A JPS6020333B2 JP S6020333 B2 JPS6020333 B2 JP S6020333B2 JP 14179280 A JP14179280 A JP 14179280A JP 14179280 A JP14179280 A JP 14179280A JP S6020333 B2 JPS6020333 B2 JP S6020333B2
Authority
JP
Japan
Prior art keywords
reaction tube
burner
optical fiber
main heating
gas introduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14179280A
Other languages
Japanese (ja)
Other versions
JPS5767044A (en
Inventor
誠 塚本
満雄 湯浅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14179280A priority Critical patent/JPS6020333B2/en
Publication of JPS5767044A publication Critical patent/JPS5767044A/en
Publication of JPS6020333B2 publication Critical patent/JPS6020333B2/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma- or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01807Reactant delivery systems, e.g. reactant deposition burners
    • C03B37/01815Reactant deposition burners or deposition heating means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は光フアィバ母材の製造法の改良に関するもので
ある。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an improvement in the manufacturing method of an optical fiber base material.

石英よりなる反応管内に屈折率制御用のドーパントの元
となる四塩化ゲルマニウム(QC14)を混合した四塩
化珪素(SIC14)と酸素(02)ガスを導入し、前
記反応管の外壁を管鼠方向に移動する加熱バーナ−で加
熱し、前記ガラス形成用原料ガスSIC14等を酸化し
たのち、ガラス層として反応管内に堆積させる光フアイ
バ母材の製造法は周知である。〔従来の技術〕 従来このような内付けCVD法で光フアィバの母材を製
造する場合、第1図に示すように前記SIC14および
GeC14を担持したアルゴン(Ar)ガスと02ガス
とを反応管1のガス導入端部2より導入し、加熱バーナ
3を管軸方向に往復移動して前記反応管の外壁を加熱し
てガラス層4を反応管内に堆積させている。
Silicon tetrachloride (SIC14) mixed with germanium tetrachloride (QC14), which is the source of a dopant for controlling the refractive index, and oxygen (02) gas are introduced into a reaction tube made of quartz, and the outer wall of the reaction tube is aligned in the direction of the tube. A method for producing an optical fiber base material is well known, in which the glass forming raw material gas SIC14 and the like is heated by a moving heating burner and then deposited as a glass layer in a reaction tube. [Prior Art] Conventionally, when manufacturing an optical fiber base material by such an internal CVD method, as shown in FIG. A heating burner 3 is reciprocated in the tube axis direction to heat the outer wall of the reaction tube and deposit a glass layer 4 inside the reaction tube.

ここで6は反応管1のガス排気端5に接続され、反応管
より内径を大きくして不要なガラス形成酸化物7を堆積
させるための排出管である。しかしこのような方法で光
フアィバ用母材を製造すると、形成される原料ガスの酸
化物がガス流の下手方向側に尾を引いて堆積され、その
酸化物が加熱バーナの移動によって順次ガラス化される
ため、形成されるガラス層4が反応管の終端すなわちガ
ス排出端部5へ到達するほど分厚く形成され、このよう
にして形成されたガラス層をコアガラスとして光フアィ
バ母材を形成し、該母村から光フアィバを製造した場合
、光フアィバのコァ径が光ファィバの長手方向に均一に
ならないといった欠点を生じる。
Here, 6 is an exhaust pipe connected to the gas exhaust end 5 of the reaction tube 1 and having an inner diameter larger than that of the reaction tube for depositing unnecessary glass-forming oxide 7. However, when the optical fiber base material is manufactured using this method, the oxides of the raw material gas that are formed are deposited with a trail in the downstream direction of the gas flow, and the oxides are gradually vitrified by the movement of the heating burner. Therefore, the glass layer 4 formed is thick enough to reach the terminal end of the reaction tube, that is, the gas discharge end 5, and the glass layer thus formed is used as a core glass to form an optical fiber base material, When an optical fiber is manufactured from the mother fiber, there arises a drawback that the core diameter of the optical fiber is not uniform in the longitudinal direction of the optical fiber.

上記のような欠点をなくするために、第2図に示すよう
に反応管1のガス導入端2近傍、すなわち主加熱バーナ
3の移動範囲外Aに主加熱バーナ3とは別に補助加熱バ
ーナ8を設けて該ガス導入端付近の導入ガスを所定の時
間間隔で加熱することにより主バーナ3の移動可能な反
応管内Lでは少なくとも均一なガラス層4を形成するよ
う配慮した光フアィバ母材の改良製造法について本発明
者等は先に提案した。
In order to eliminate the above-mentioned drawbacks, as shown in FIG. Improvement of the optical fiber base material in which at least a uniform glass layer 4 is formed in the movable reaction tube L of the main burner 3 by heating the introduced gas near the gas introduction end at predetermined time intervals. The manufacturing method was previously proposed by the present inventors.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかし上記の改良した光フアィバ母材の製造法で母村を
製造すると補助バーナ8と主加熱バーナ3の出発点Bと
の間隔Xの部分に付着形成された酸化物が充分加熱され
ないため、この酸化物がガラス化せずスス9の状態で順
次堆積する。
However, when the fiber base material is manufactured using the above-mentioned improved optical fiber base material manufacturing method, the oxide deposited at the distance X between the auxiliary burner 8 and the starting point B of the main heating burner 3 is not heated sufficiently. The oxide is not vitrified and is sequentially deposited in the state of soot 9.

このスス9はガラス化しないため体積が大きくなり、そ
の結果主バーナ3の往復運動や反応管1の回転運動およ
び反応ガスGの流速等の影響で反応管1のガラス層4の
部分にススの塊10となって流入しこの塊1川ま主バー
ナ3が次にこの塊部に到達した時に充分ガラス化されず
泡状となって均質な光フアィバ母材を得ることができな
いという欠点があった。〔問題点を解決するための手段
) 本発明は上記欠点を除去するもので、反応管内にガラス
形成用原料ガスを導入し、管藤方向に移動する主加熱バ
ーナで前記反応管の外壁を反復して加熱し、該反応管内
にガラス層を複数層堆積させる光ファィバ母村の製造法
において、該反応管のガス導入端部に前記主加熱バーナ
とは別に移動可能に取付けた半固定の補助バーナを設け
、主加執バーナが反応管の終端5からガス導入端部Bに
再帰するまでの所定時間、補助バーナで反応管のガス導
入部を加熱して反応管内にガラス原料酸化物層を堆積し
、主加熱バーナがガス導入織部に到達するのに連動して
補助バーナを移動するとともに、該補助バーナによる反
応管の加熱を弱めるとともに補助バーナに代って主加熱
バーナで前記反応管の外壁を加熱して反応管内にガラス
層を形成するようにしたものである。
Since this soot 9 is not vitrified, its volume increases, and as a result, soot is formed in the glass layer 4 of the reaction tube 1 due to the reciprocating movement of the main burner 3, the rotational movement of the reaction tube 1, the flow rate of the reaction gas G, etc. There is a disadvantage that when the lump 10 flows into the lump 10 and the main burner 3 next reaches this lump, it is not sufficiently vitrified and becomes foamy, making it impossible to obtain a homogeneous optical fiber base material. Ta. [Means for Solving the Problems] The present invention eliminates the above-mentioned drawbacks by introducing a raw material gas for glass formation into a reaction tube, and repeatedly heating the outer wall of the reaction tube with a main heating burner moving in the direction of the tube. In the method of manufacturing an optical fiber matrix in which a plurality of glass layers are deposited in the reaction tube by heating the reaction tube, a semi-fixed auxiliary device is movably attached to the gas introduction end of the reaction tube separately from the main heating burner. A burner is provided, and for a predetermined period of time until the main burner returns from the terminal end 5 of the reaction tube to the gas introduction end B, the auxiliary burner heats the gas introduction part of the reaction tube to form a frit oxide layer in the reaction tube. As the main heating burner reaches the gas introduction section, the auxiliary burner is moved, the heating of the reaction tube by the auxiliary burner is weakened, and the main heating burner is used instead of the auxiliary burner to heat the reaction tube. A glass layer is formed inside the reaction tube by heating the outer wall.

〔実施例〕〔Example〕

以下本発明の実施例について第3図を参照して説明する
Embodiments of the present invention will be described below with reference to FIG.

なお図において第1図、第2図と同一機能部には同一符
号を付して説明する。以下の説明における反応管1の外
径は28肋内径は25豚、長さ85仇凧のものを用いた
In the drawings, the same functional parts as in FIGS. 1 and 2 are designated by the same reference numerals and will be explained. In the following explanation, the reaction tube 1 used had an outer diameter of 28 mm, an inner diameter of 25 mm, and a length of 85 mm.

また、反応管の両端には外径35脇、内径25肋の石英
管をつないでおり、この部分を第3図には示していない
ガラス旋盤のチャックで保持している。
Further, a quartz tube with an outer diameter of 35 mm and an inner diameter of 25 mm is connected to both ends of the reaction tube, and this portion is held by a chuck of a glass lathe, which is not shown in FIG.

今、主加熱バーナ3が出発点Bの位置から出発して反応
管1の終端5の位瞳へ移動してガラス層4を堆積する間
、補助バーナ8は主加熱バーナ3の出発点Bの位直に補
助バーナ移動手段11によって移動保持されており、こ
の間は補助バーナ8の火力を小さくし、反応ガスを分解
しないよう設定しておく。
Now, while the main heating burner 3 starts from the starting point B and moves to the end pupil of the reaction tube 1 to deposit the glass layer 4, the auxiliary burner 8 starts from the starting point B of the main heating burner 3. The auxiliary burner 8 is moved and held vertically by the auxiliary burner moving means 11, and during this period, the thermal power of the auxiliary burner 8 is kept low so that the reaction gas is not decomposed.

次に主加熱バーナ3が終端5の位置から出発点Bの位置
へ帰る間、補助バーナ8の火力を大きくし、反応ガスを
分解して酸化物のススを形成し、このススを反応管1の
入口近傍B〜Cの部分にガス流の下手に向かってだんだ
ん少なくなるよう堆積する。次に主加熱バーナが出発点
Bの位置に帰ってきた時点で補助バーナ8は補助バーナ
移動手段11によって出発点Bの位置からAの位置に移
動させるとともに火力も小さくして反応ガスを分解しな
いようにする。このときの主加熱バーナの移動速度は、
出発点Bから終端5への移動時が22伽/分、終端5か
ら出発点Bへの移動時が360弧/分であった。
Next, while the main heating burner 3 returns from the position of the terminal end 5 to the position of the starting point B, the heating power of the auxiliary burner 8 is increased to decompose the reaction gas to form oxide soot, and this soot is transferred to the reaction tube 1. It is deposited in portions B to C near the inlet of the gas flow so that the amount gradually decreases toward the bottom of the gas flow. Next, when the main heating burner returns to the starting point B, the auxiliary burner 8 is moved from the starting point B to the starting point A by the auxiliary burner moving means 11, and the heating power is also reduced so that the reaction gas is not decomposed. do it like this. The moving speed of the main heating burner at this time is
The time of movement from starting point B to end point 5 was 22 arc/min, and the time of movement from end point 5 to starting point B was 360 arc/min.

出発点Bは、石英管のつなぎ目より3肌の位置であり、
移動範囲1′は斑仇であった。また、原料ガスは、四塩
化樟素(SIC14)を2.5夕/分、オキシ塩化リン
(POC13)を1.2夕/分四塩化ゲルマニウム(W
C14)を1.2夕/分、原料温度3ぴ○で、キャリア
ガス02で供給した。
Starting point B is three skins away from the joint of the quartz tubes,
Movement range 1' was spotty. In addition, the raw material gases include camphorium tetrachloride (SIC14) at 2.5 e/min and phosphorus oxychloride (POC13) at 1.2 e/min, germanium tetrachloride (W
C14) was supplied at 1.2 evenings/min, at a raw material temperature of 3 pi, and with a carrier gas of 02.

尚主加熱バーナへの酸水素ガス流量は、日2が60そ/
分、02が25〆/分で、主加熱バーナが出発点B→終
端5→Bと移動する間、一定として供給した。以上説明
したように反応管1のガス導入端部2の近傍B〜Cの位
置にかけて堆積ガラス層4の厚さを加減することによっ
て反応管1の全体にわたって堆積ガラス層厚を補正する
ことができる。
The flow rate of oxyhydrogen gas to the main heating burner was 60mm on Day 2.
02 was supplied at a constant rate of 25/min while the main heating burner was moving from starting point B to ending point 5 to B. As explained above, the thickness of the deposited glass layer 4 can be corrected over the entire reaction tube 1 by adjusting the thickness of the deposited glass layer 4 at positions B to C near the gas introduction end 2 of the reaction tube 1. .

この補助バーナ8で加熱する時間および火力を調整する
。この調整量は、補助加熱バーナ8への酸水素ガス流量
として、主加熱バーナが出発点Bから終端5へ移動中は
山を30夕/分、02を5そ/分、終端5から出発点B
へ移動中は、日2を60そ/分、Qを5そ/分とした。
The heating time and firepower of this auxiliary burner 8 are adjusted. This adjustment amount is 30/min for the peak while the main heating burner is moving from the starting point B to the terminal 5, 5 so/min for 02, and 5 so/min from the terminal 5 to the starting point while the main heating burner is moving from the starting point B to the terminal 5. B
While moving to , day 2 was set at 60 so/min and Q was set at 5 so/min.

この結果、コアガラスを50層堆積後、コラプスしたと
きのプリフオームは、従来の方法では、コア径が均一な
部分のプリフオーム長が50cのであったのに対し、本
発明においては.、60伽であった。
As a result, when collapsing after depositing 50 layers of core glass, the preform with the conventional method had a preform length of 50 cm in the portion where the core diameter was uniform, whereas in the present invention, the preform length was 50 cm. It was 60 years old.

なお、プリフオームの終端5側で、コア径は12.5凧
少、外径は18.6凧?であった。〔発明の効果〕以上
説明したように本発明では補助バーナ8で加熱して原料
ガスGを分解してガラス原料酸化物を形成する間は少な
くとも補助バーナを主加熱バーナの出発位置別こ位置す
るよう構成しているため、従釆のよに補助バーナ8と主
加熱バーナ3との間に非加熱部×が存しない。
Furthermore, on the terminal end 5 side of the preform, the core diameter is 12.5 mm smaller and the outer diameter is 18.6 mm? Met. [Effects of the Invention] As explained above, in the present invention, at least the auxiliary burner is located apart from the starting position of the main heating burner while the raw material gas G is heated by the auxiliary burner 8 to decompose the raw material gas G and form frit oxide. Because of this structure, there is no non-heating part x between the auxiliary burner 8 and the main heating burner 3 unlike in the secondary burner.

従って、この間に不要な余分の酸化物ススが堆積しなく
なり、したがって従来のように余分のスス塊が反応ガラ
ス管1のガラス堆積層4部分に飛散することもなく補助
バーナ8によって形成された酸化物スス層は王加熱バー
ナ3の移動に伴ってすべてガラス化され、従来のような
不都合もなく均一な光フアィバ母材を形成することがで
きる。
Therefore, during this time, unnecessary extra oxide soot is not deposited, and therefore the extra soot lumps are not scattered onto the glass deposited layer 4 portion of the reaction glass tube 1, and the oxidized soot formed by the auxiliary burner 8 is not deposited. The material soot layer is completely vitrified as the king heating burner 3 moves, and a uniform optical fiber base material can be formed without the disadvantages of the conventional method.

【図面の簡単な説明】[Brief explanation of drawings]

第1図および第2図は従来の光フアィバ母材の製造法を
説明する図、第3図は本発明の光フアィバ母材の製造法
を説明する図である。 1・・・・・・反応管、2・・・・・・ガス導入端部、
3・・・・・・主加熱バーナ、4・・・・・・ガラス層
、5・・・・・・ガス排気端(反応管の終端)、6・・
…・排出端、7・・…・不要なガラス形成酸化物、8・
・…・補助バーナ、9・・・・・・スス、10・・・・
・・ススの塊、11・・・・・・補助バーナ移動手段。 第1図第2図 第3図
FIGS. 1 and 2 are diagrams for explaining a conventional method for manufacturing an optical fiber preform, and FIG. 3 is a diagram for explaining a method for manufacturing an optical fiber preform according to the present invention. 1...Reaction tube, 2...Gas introduction end,
3...Main heating burner, 4...Glass layer, 5...Gas exhaust end (end of reaction tube), 6...
....Discharge end, 7..Unwanted glass-forming oxide, 8.
...Auxiliary burner, 9...Soot, 10...
...Soot mass, 11...Auxiliary burner movement means. Figure 1 Figure 2 Figure 3

Claims (1)

【特許請求の範囲】[Claims] 1 反応管内にガラス形成用原料ガスを導入し、管軸方
向に移動する主加熱バーナで前記反応管の外壁を反復加
熱して該反応管内にガラス層を複数層堆積させる光フア
イバ母材の製造法において、該反応管のガス導入端部に
前記主加熱バーナとは別に移動可能に取付けた半固定の
補助バーナを設け主加熱バーナが反応管の終端からガス
導入部に再帰するまでの所定時間、補助バーナで反応管
のガス導入部を加熱して反応管内にガラス原料酸化物層
を堆積し、主加熱バーナがガス導入端部に到達するのに
連動して補助バーナを移動するとともに該補助バーナに
よる反応管の加熱を弱め、補助バーナに代つて主加熱バ
ーナで前記反応管の外壁を加熱して反応管内にガラス層
を形成するようにしたことを特徴とする光フアイバ母材
の製造法。
1. Production of an optical fiber preform by introducing a raw material gas for glass formation into a reaction tube, repeatedly heating the outer wall of the reaction tube with a main heating burner that moves in the tube axis direction, and depositing multiple glass layers inside the reaction tube. In the method, a semi-fixed auxiliary burner is movably attached to the gas introduction end of the reaction tube, separately from the main heating burner, and it takes a predetermined time for the main heating burner to return from the end of the reaction tube to the gas introduction section. The auxiliary burner heats the gas introduction part of the reaction tube to deposit a frit oxide layer inside the reaction tube, and when the main heating burner reaches the gas introduction end, the auxiliary burner is moved and the auxiliary burner is moved. A method for producing an optical fiber preform, characterized in that the heating of the reaction tube by a burner is weakened, and the outer wall of the reaction tube is heated by a main heating burner instead of an auxiliary burner to form a glass layer inside the reaction tube. .
JP14179280A 1980-10-09 1980-10-09 Manufacturing method of optical fiber base material Expired JPS6020333B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14179280A JPS6020333B2 (en) 1980-10-09 1980-10-09 Manufacturing method of optical fiber base material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14179280A JPS6020333B2 (en) 1980-10-09 1980-10-09 Manufacturing method of optical fiber base material

Publications (2)

Publication Number Publication Date
JPS5767044A JPS5767044A (en) 1982-04-23
JPS6020333B2 true JPS6020333B2 (en) 1985-05-21

Family

ID=15300251

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14179280A Expired JPS6020333B2 (en) 1980-10-09 1980-10-09 Manufacturing method of optical fiber base material

Country Status (1)

Country Link
JP (1) JPS6020333B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100277358B1 (en) * 1998-06-25 2001-01-15 윤종용 Optical fiber base material manufacturing apparatus and method by chemical vapor deposition
DE102012008848B4 (en) * 2012-04-17 2022-05-05 J-Fiber Gmbh Process and device for the production of glass fiber preforms
JP6216691B2 (en) * 2014-06-26 2017-10-18 株式会社フジクラ Manufacturing method and manufacturing apparatus for glass preform for optical fiber

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