JPS6023762B2 - Manufacturing method of photosensitive resin - Google Patents
Manufacturing method of photosensitive resinInfo
- Publication number
- JPS6023762B2 JPS6023762B2 JP16896679A JP16896679A JPS6023762B2 JP S6023762 B2 JPS6023762 B2 JP S6023762B2 JP 16896679 A JP16896679 A JP 16896679A JP 16896679 A JP16896679 A JP 16896679A JP S6023762 B2 JPS6023762 B2 JP S6023762B2
- Authority
- JP
- Japan
- Prior art keywords
- photosensitive resin
- reaction
- nitro
- ester group
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Epoxy Resins (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Description
【発明の詳細な説明】
本発明は側鎖に芳香族アジド基を有する感光性重合体を
製造する方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for producing a photosensitive polymer having an aromatic azide group in its side chain.
従来より側鎖にアジド基を有する高分子はよく知られて
おり、感光性樹脂として使われている。芳香族アジド基
を高分子に導入するには、これまで、芳香族ジアゾニウ
ム塩とアジ化ナトリウムの反応を利用する方法が行われ
ていたが、この様な反応では、反応の際多量の窒素を発
生するので生成物の量に比べて大きな反応器が必要であ
り特に、高分子のジアゾニウム塩を溶液中でアジド化す
る場合は高粘度のため発泡によって液量が膨張する為、
大きい反応器を用いるか又は、アジドの分割添加が必要
であった。又、アジド安息香酸やアジドベンズアルデヒ
ドなどで変性したフェニルアジド基を有する高分子は、
光吸収波長が短いので通常、1−ェトロピレン、1,8
ージニトロピレンなどの芳香族ニトロ化合物が増感剤と
して添加されているが、これらの中には発ガン性をもつ
ものもあり、使用上好ましくないものであった。Polymers having azide groups in their side chains have been well known and have been used as photosensitive resins. Until now, aromatic azide groups have been introduced into polymers using a reaction between an aromatic diazonium salt and sodium azide, but such a reaction requires a large amount of nitrogen to be introduced during the reaction. This requires a large reactor compared to the amount of product.Especially when converting a polymeric diazonium salt into an azide in a solution, the liquid volume expands due to foaming due to its high viscosity.
It was necessary to use a large reactor or to add the azide in portions. In addition, polymers with phenylazide groups modified with azidobenzoic acid, azidobenzaldehyde, etc.
Since the light absorption wavelength is short, 1-etropylene, 1,8
Aromatic nitro compounds such as -dinitropyrene are added as sensitizers, but some of these are carcinogenic and are therefore undesirable for use.
又、最近においてポリビニルアルコールを2−クロロー
5−ニトロ(又は3−ニトロ−4−クロロ)安息香酸塩
化物によってェステル化したのち、これをァジ化ナトリ
ウムと反応させて2−アジドー5−ニトロ(又は3−ニ
トロ−4−アジド)安息香酸ェステル基を含むポリビニ
ルアルコール譲導体を合成し感光性樹脂を製造する方法
も提案されているが、この方法ではポリビニルアルコー
ルを落籍させるために特殊な溶媒が必要になり、又、不
安定で毒性も強い上記酸塩化物を用いる必要があるなど
の不利な点がある。Recently, polyvinyl alcohol has been esterified with 2-chloro-5-nitro (or 3-nitro-4-chloro)benzoic acid chloride and then reacted with sodium azide to form 2-azido-5-nitro( Alternatively, a method has been proposed in which a photosensitive resin is produced by synthesizing a polyvinyl alcohol derivative containing a 3-nitro-4-azido)benzoic acid ester group, but this method requires a special solvent to remove the polyvinyl alcohol. Moreover, there are disadvantages such as the need to use the above-mentioned acid chloride, which is unstable and highly toxic.
本発明は上述の如き現状にかんがみ、特に大きい反応器
やアジド基を有する物質を分割添加する必要がなく簡単
に製造出来、又、溶媒も特殊なものに限られることなく
広い範囲から選択することが出釆、さらに毒性の強い物
質を用いずともよい感光性樹脂の製造方法を提供するこ
とを目的としてなされたものであり、その要旨は2−ク
ロロ−5−ニトロ安息香酸又は3ーニトロ−4−クロロ
安息香酸をェポキシ基を含む高分子と反応させたのち、
アジ化ナトリウムと反応させることによって、側鎖に2
−アジド−5−ニトロ安息香酸ェステル基又は3−ニト
ロ−4ーアジド安息香酸ヱステル基を含む高分子を生成
せしめることを特徴とする感光性樹脂の製造方法に存す
る。In view of the above-mentioned current situation, the present invention can be easily produced without the need for a particularly large reactor or the need to add a substance having an azide group in portions, and the solvent can be selected from a wide range without being limited to special ones. The purpose of this work was to provide a method for producing a photosensitive resin that does not require the use of highly toxic substances. - After reacting chlorobenzoic acid with a polymer containing epoxy groups,
By reacting with sodium azide, 2
The present invention relates to a method for producing a photosensitive resin, which comprises producing a polymer containing an azido-5-nitrobenzoic acid ester group or a 3-nitro-4-azidobenzoic acid ester group.
本発明に用いられるェポキシ基を含む高分子はその種類
は特に限定されることはないが、好適な例としてグIJ
シジル(メタ)アクリレート系重合体、ビスフェノール
型ェポキシ樹脂、ノポラック型樹脂のェポキシ化物等が
挙げられる。The type of polymer containing an epoxy group used in the present invention is not particularly limited, but as a preferred example,
Examples include sidyl (meth)acrylate polymers, bisphenol-type epoxy resins, and epoxidized products of nopolac-type resins.
本発明方法にもとすいて感光性樹脂を製造するには、ま
ず上記ェポキシ基を含む高分子を2−クロロー5ーニト
ロ安息香酸又は3−ニトロ−4ークロロ安息香酸と反応
させる。この反応は通常上記高分子が溶かされた溶液に
上記安息香酸を加えて櫨梓下に加熱することにより行わ
れるが、その際塩基性触媒例えば第4級アンモニウム塩
などの適宜な触媒を用いるのが好ましい。次に上記反応
による生成物を反応液から、沈澱生成−炉過等の手法に
より取り出し、該生成物をァジ化ナトリウムと反応させ
る。この反応は上記生成物を適宜な溶剤例えばジメチル
ホルムアミドに溶かした溶液にアジ化ナトリウムを加え
て蝉拝することによって行うことが出来、必要ならば常
温以下に冷却してもよい。この場合、所定量のアジ化ナ
トリウムを分割することなく一括して加えることが出来
、又、特に大きい反応器を使用する必要はなく、簡単に
反応させることが出来る。上記反応によって生成する反
応生成物は側鎖に2ーアジドー5−ニトロ安息香酸ヱス
テル基又は3−ニトロ−4−アジド安息香酸ェステル基
を含む高分子であり、この反応生成物は反応液より沈澱
法等により簡単に取り出されることが出来る。In order to produce a photosensitive resin using the method of the present invention, first, the above-mentioned epoxy group-containing polymer is reacted with 2-chloro-5-nitrobenzoic acid or 3-nitro-4-chlorobenzoic acid. This reaction is usually carried out by adding the above-mentioned benzoic acid to a solution in which the above-mentioned polymer is dissolved and heating the mixture under low temperature. is preferred. Next, the product resulting from the above reaction is removed from the reaction solution by a method such as precipitation and filtration, and the product is reacted with sodium azide. This reaction can be carried out by dissolving the above product in a suitable solvent such as dimethylformamide and adding sodium azide to the solution, and if necessary, the solution may be cooled to below room temperature. In this case, a predetermined amount of sodium azide can be added all at once without dividing it, and there is no need to use a particularly large reactor, and the reaction can be carried out easily. The reaction product produced by the above reaction is a polymer containing a 2-azido-5-nitrobenzoic acid ester group or a 3-nitro-4-azidobenzoic acid ester group in the side chain, and this reaction product can be obtained by precipitation from the reaction solution. etc., it can be easily taken out.
かくして得られた上記高分子はその側鎖に含まれる上記
ェステル基の作用によって紫外線に感光する性質を示す
ので、感光性樹脂として各種エッチング材や感光膜の用
途に用いられる。本発明は上述の通りの方法であるので
、感光性樹脂を、特に大きい反応器を用いたり、材料を
分割添加したり、毒性の強い化合物を用いたり又、使用
する溶媒を特殊なものに制限されたりすることなく簡単
に製造することが出来るのである。Since the polymer thus obtained exhibits the property of being sensitive to ultraviolet light due to the action of the ester group contained in its side chain, it is used as a photosensitive resin for various etching materials and photosensitive films. Since the present invention is a method as described above, the photosensitive resin does not require the use of a particularly large reactor, the addition of materials in portions, the use of highly toxic compounds, or the use of a special solvent. It can be easily manufactured without any damage.
以下本発明の実施例について説明する。実施例
グリシジルメタクリレート4夕、ジメチルホルムアミド
16夕、アゾビスイソブチロニトリル0.02夕の混合
物を75ooで5時間かきまぜた後、メタノールで沈で
んごせて取り出し乾燥させた。Examples of the present invention will be described below. Example A mixture of 4 parts of glycidyl methacrylate, 16 parts of dimethylformamide, and 0.02 parts of azobisisobutyronitrile was stirred at 75°C for 5 hours, precipitated with methanol, taken out and dried.
上記で得た乾燥ポリマー3夕を、ジメチルホルムアミド
20夕にとかし、2−クロロ−5ーニトロ安息香酸4.
3夕、トリメチルベンジルアンモニウムクロリド0.0
5夕を加え、110ooで2時間かきまぜて反応させた
。Three parts of the dry polymer obtained above were dissolved in 20 parts of dimethylformamide, and 4 parts of 2-chloro-5-nitrobenzoic acid were dissolved.
3 evenings, trimethylbenzylammonium chloride 0.0
The mixture was stirred at 110°C for 2 hours to react.
反応混合物をメタノール中で沈でんさせて取り出し、乾
燥させ、粉末6.6夕を得た。これをジメチルホルムア
ミド60の‘にとかし、アジ化ナトリウム1.25夕を
加え、5℃で2加持間かきまぜて反応させた。The reaction mixture was precipitated in methanol and dried to give a powder of 6.6 kg. This was dissolved in 60 parts of dimethylformamide, 1.25 parts of sodium azide was added, and the mixture was stirred at 5°C for 2 hours to react.
反応混合物をメタノール中で次でんごせて取り出し乾燥
させた。The reaction mixture was then extracted in methanol and dried.
赤外吸収スペクトル及び元素分析値から、この物質の構
造は、ポリグリシジルメタクリレートに、2−アジドー
ニトロ安息香酸が付加したものであることが判明した。
この樹脂を、ジメチルホルムアミドの10%溶液となし
、アルミニウム板に塗布し、厚さ2.5ミクロンの塗膜
を得た。Infrared absorption spectra and elemental analysis revealed that the structure of this substance was one in which 2-azidonitrobenzoic acid was added to polyglycidyl methacrylate.
This resin was made into a 10% solution in dimethylformamide and applied to an aluminum plate to obtain a coating film with a thickness of 2.5 microns.
この塗膜上に感度測定用標準外マスク(商品名コダツタ
ステツプタブレツトNo.2)を重ね400W高圧水銀
灯を15弧の距離から3硯砂間照射し、ジメチルホルム
アミド中に1分間浸潰して感光の程度を調べたところ7
段目まで感光していた。A non-standard mask for sensitivity measurement (trade name: Kodatsuta Step Tablet No. 2) was placed on top of this coating film, and a 400W high-pressure mercury lamp was irradiated with 3 inkstones from a distance of 15 arcs, and the film was immersed in dimethylformamide for 1 minute. When I checked the degree of photosensitivity, it was found that 7
Every step was exposed to light.
Claims (1)
4−クロロ安息香酸をエポキシ基を含む高分子と反応さ
せたのち、アジ化ナトリウムと反応させることによつて
、側鎖に2−アジド−5−ニトロ安息香酸エステル基又
は3−ニトロ−4−アジド安息香酸エステル基を含む高
分子を生成せしめることを特徴とする感光性樹脂の製造
方法。1 2-chloro-5-nitrobenzoic acid or 3-nitro-
By reacting 4-chlorobenzoic acid with a polymer containing an epoxy group and then reacting with sodium azide, a 2-azido-5-nitrobenzoic acid ester group or a 3-nitro-4- A method for producing a photosensitive resin, which comprises producing a polymer containing an azidobenzoic acid ester group.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16896679A JPS6023762B2 (en) | 1979-12-24 | 1979-12-24 | Manufacturing method of photosensitive resin |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16896679A JPS6023762B2 (en) | 1979-12-24 | 1979-12-24 | Manufacturing method of photosensitive resin |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5690805A JPS5690805A (en) | 1981-07-23 |
| JPS6023762B2 true JPS6023762B2 (en) | 1985-06-10 |
Family
ID=15877861
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16896679A Expired JPS6023762B2 (en) | 1979-12-24 | 1979-12-24 | Manufacturing method of photosensitive resin |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6023762B2 (en) |
-
1979
- 1979-12-24 JP JP16896679A patent/JPS6023762B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5690805A (en) | 1981-07-23 |
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