JPS6041852B2 - Rotary processing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a rotating apparatus for processing articles in a predetermined atmosphere, and is directed to, for example, a baking furnace used for heat treatment of semiconductor electronic components in a predetermined atmosphere.

In the manufacture of can-sealed transistors, a semiconductor element is assembled on a stem, and prior to sealing after resin potting, a vacuum baking process is performed at 200°C, and then sealing with a cap is performed in an NO atmosphere. It's summery. A vacuum baking furnace is used for this vacuum baking process, and a large number of parts to be processed are loaded into a long and narrow jig, which is manually placed into the baking process and taken out after the process, or a continuous baking furnace is used. In this case, as shown in Fig. 1, several jigs are placed together on a specific product table 1 called a tray, and a pusher or the like is used to move the rollers 3 placed at the bottom of the baking oven 2. The process was carried out while moving in the direction of arrow 4. By the way, in a vacuum baking oven, since it is necessary to maintain the inside of the oven in a vacuum state, preliminary depressurization chambers 5 and 6 are provided before and after the baking oven 2, respectively.
Automatic opening/closing doors 7 and 8 are provided at the boundary between the jigs and the decompression chamber, and the product table 1 containing the jig is once carried into the decompression chamber 5, and after the pressure is reduced, the intervening door is opened and the product table is turned into a pusher. Then, carry it into the furnace, close the door, and start processing. After treatment, the same procedure was followed to take it out of the furnace. As described above, conventional baking ovens employ batch processing using jigs, trays, etc. due to their structure, making automation difficult. By the way, when heat treating semiconductor electronic components in a predetermined atmosphere, the atmosphere and heat inside the furnace can be made more uniform by rotating the furnace itself rather than keeping the furnace in a fixed state. In the case of vacuum baking, it has been almost impossible to incorporate the above-mentioned rotary motion method because it is difficult to automate the loading of articles.
However, the inventor of the present application has developed a device that can automatically carry in and out articles even between different atmospheres ("Apparatus for transferring articles between different atmospheres" filed at the same time as this application).

This makes it possible to use a rotating vacuum baking oven for the reasons mentioned above. Therefore, one object of the present invention is to rotate a vacuum baking furnace, and another object is to realize a rotary atmosphere treatment apparatus.

In order to achieve the above object, the present invention includes a rotating drum that rotates around an axis inclined with respect to the horizontal, and articles provided at predetermined intervals along the circumferential direction on both side plates of the drum. An article guide disposed in the axial direction between the entrance and the corresponding article entrance on both side plates, and a drum that maintains a predetermined atmosphere inside the drum while it is rotating, or maintains a vacuum inside the drum. The article is introduced into the drum from the article entrance/exit of one side plate while rotating the drum, and while the article is supported on the guide, the article is allowed to fall naturally due to the inclination of the axis of the drum. The present invention relates to a rotating atmosphere processing apparatus which guides the above-mentioned articles to an article entrance/exit of the other side plate and also guides the articles to the outside.

The details of the present invention will be explained below in detail with reference to an embodiment of the present invention applied to a vacuum baking furnace for can-sealed transistor components.

FIG. 2 is a schematic diagram of the principle of a rotary vacuum baking oven according to the present invention, and 11 is a rotary drum that rotates about an axis X-X that is inclined from the horizontal, which is the main body of the present invention. .

FIG. 2a shows a transistor component 10 processed by this vacuum baking furnace. 12 is the stem, 13 is the lead,
Reference numeral 14 is a semiconductor element, and the electrodes and leads of the semiconductor element are connected by wires, and the element is covered with a resin film. 15 is the front shooter, 16 is the rear shooter,
Load the parts and move diagonally downward. let

Reference numerals 17 and 18 are "devices for transferring articles between different atmospheres" which will be described later, and are provided between the shutter and the drum in contact with one opening on the side of the drum.

19 and 20 are shielding plates that cover all other openings of the drum.

As shown in FIG. 3, the rotating drum is a drum body that is rotatable about a shaft 21 (fixed shaft), and has side plates 22 and 23.
and an outer circumferential plate 24, and the side plates 12 have article entrances and exits 25 arranged at predetermined intervals along the circumference, each having a shape that allows the component 10 to be inserted horizontally, as shown in FIG.

As shown in FIG. 3, an article guide 26 is provided in the axial direction between the corresponding article entrances and exits 25a and 25b on both side plates. This article guide has, for example, members each having an "I"-shaped cross section arranged in a circumferential direction, and the article serves as a guide between the members so that the article can slide thereon. The drum is supported by a shaft through a bearing portion 36 and is rotationally driven via a gear 37 and the like.

A part of the shaft body 21 is hollow, and a vacuum suction hole 27 communicates from the inside of the drum to the outside, so that vacuum can be removed even when the drum is rotating.

A heat generating section such as an infrared ray heater 28 and a reflecting plate 29 are provided around the shaft body, so that heat is evenly applied from the center to the periphery. The "article transfer device between different atmospheres" installed in contact with the article entrance/exit of the drum side plate is the fifth
Referring to the figure, a rotating cylindrical body 31 having an article storage recess 30 on the outer circumferential surface, an inner circumferential surface that fits tightly on the outer circumferential surface of the rotating cylindrical body, and a fixing member having a through hole 32 in the opposing part. A vacuum suction hole 34 is provided which communicates from the outside of the outer cylinder to the concave part of the rotary cylinder, and the article 10a supplied from one of the through holes of the outer cylinder is transferred to the article storage concave part of the rotary cylinder. The rotating cylindrical body rotates to release the article 10 from the other through hole.
It has a structure in which it is taken out as part b, and by vacuum suction when the rotating cylindrical body rotates, the article is transferred from one side to the other without mixing the atmospheres on one through-hole side of the outer cylinder and the other through-hole side. It is possible.

FIG. 6 shows the shape of the shooter 15, in which a lead of a transistor component is inserted into a groove 35 between two elongated members, and the stem portion is placed thereon and slides laterally. 7th
The figure shows the shape of the guide inside the drum.
Two elongated members 26a and 26b each having a U-shaped cross section, or two elongated members 26a and 26b each having a C-shaped cross section as shown in Fig. Protrude from and slide.

According to this guide, the stem is supported from above and below, so even if the parts are turned upside down, they will not fall. According to the configuration of the present invention described in the embodiments above, the above object can be achieved as described below.

(1) Since all the guides of the rotating drum are tilted in the same way as the axis that has an angle at an angle with respect to the horizontal, the natural falling edge of the article can be used to move the article from one article entrance to the other in the drum. It is possible to transfer articles to and from the warehouse without any external operations.

(2) By providing an article guide between the article entrances and exits on the opposite side plates of the drum, by using an article transfer device between different atmospheres, the introduction and extraction of articles from the outside can be carried out mechanically without any manual effort. be able to.

(3) According to the above (2), it is possible to introduce articles into the drum and lead them out of the drum while maintaining a state in which the external atmosphere is not mixed into the drum.

(4) The vacuum state inside the drum is maintained even when the drum rotates by keeping an externally supported shielding plate in close contact with other openings on the drum side plate into which articles are not introduced, using, for example, a spring. can.

(5) By providing a heat source at the center of the drum, heat can be evenly supplied to parts on the guides provided in the circumferential direction of the drum.

(6) By using the drum as a storage device for articles, the storage section can be made more compact.

For example, diameter 17TI. using a drum of 70 mm and a guide of 70 mm.
It is possible to store approximately 25 transistors at once. (7) Loading and unloading of goods does not require any manpower at all, and can be fully automated.

(8) Since articles can be taken in and out without changing the atmosphere inside the drum, there is no need to add a decompression chamber or the like as in conventional continuous furnaces, it does not take up much space, and it is easy to work.

The present invention is not limited to the above embodiments, but has many other embodiments as described below.

(1) It can be used not as a baking oven but simply as an article storage device.

(2) Rather than using the inside of the drum as a vacuum,
Specific atmosphere, e.g. inert gas such as N2, H2, etc.
2. It can be used when processing with active gas such as C1.

(3) The device for transferring articles between different atmospheres is not necessarily provided in contact with the opposing portions of the side plates. (4) The article transfer device between different atmospheres is not limited to one location on one side plate, but may be provided at multiple locations.

(5) The cross-sectional shape of the guide and the shape of the article entrance/exit are changed depending on the article to be processed.

(6) If there is an article entrance/exit or other means for moving articles within the drum, the drum shaft can be used in a horizontal or near-horizontal state.

[Brief explanation of the drawing]

FIG. 1 is an explanatory diagram showing an example of a conventional baking furnace, FIG. 2 is a front view showing the basic configuration of a rotary processing apparatus according to the present invention, and FIG. 2a is a perspective view of a transistor component to be processed.
FIG. 3 is a vertical sectional view showing the internal structure of the rotary baking oven according to the present invention, and FIG. 4 is a partial cross-sectional side view of the same rotary baking oven.
Fig. 4a is a diagram showing the shape of the article entrance/exit, Fig. 5 is a sectional view showing the structure of the "article transfer device between different atmospheres" and its usage form, Fig. 6 is an example of a shooter, and a is a front view. ,
b is a sectional view, FIG. 7 is an example of the guide, a is a front (partially longitudinal sectional view) view, and B and c are sectional views. 1...Tray "product stand", 2...Bake oven, 3...Roller, 4...Pushing direction with busher, 5, 6...Decompression chamber, 7, 8...Automatic opening/closing door, 10...Transistor parts, 11...
Rotating drum, 12...) Stem, 13...
・Lead, 14...Semiconductor element, 15...
・Front shooter, 16...Rear shooter, 17
, 18... Device for transferring articles between different atmospheres, 19, 20... Shielding plate, 21... Shaft body, 22, 23... Drum Side plate, 24...
...Outer circumference 7 plates, 25...Goods entrance/exit, 26.
... Goods guide, 27 ... Vacuum suction hole,
28...Infrared heater, 29...Reflector, 30...Article storage recess, 31...
・Rotating cylindrical body, 32...Through hole, 33...Fixed cylindrical body, 34...Vacuum suction hole, 35...
Groove, 36...9 bearing part, 37... gear.

Claims (1)

[Scope of Claims] 1. A rotating drum that rotates around an axis tilted to the horizontal, article entrances and exits provided at predetermined intervals along the circumferential direction on both side plates of the drum, and article openings on both side plates of the drum. comprising an article guide disposed in the axial direction between corresponding article entrances and exits, and means for maintaining the inside of the drum in a predetermined atmosphere state or in a vacuum state while the drum is rotating,
While rotating the drum, an article is introduced into the drum through the article entrance on one side plate, and while supported on the guide, the article is transferred to the other side plate using the natural falling force of the article due to the inclination of the axis of the drum. A rotary processing device that guides the articles to the article entrance and exit and also guides the articles to the outside. 2. The rotary processing apparatus according to claim 1, wherein the center of the drum is a heat generating part.