JPS6053369B2 - Thin film magnetic head and its manufacturing method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a structure of a thin film magnetic head for a perpendicular magnetic recording medium and a method of manufacturing the same.

In response to the increasing demand for information processing, recent technological advances have made it possible to improve the recording density by about 1 kHz by changing the recording method on magnetic recording media from the conventional horizontal magnetization structure to using a perpendicular magnetization structure.

Conventionally, as shown in FIG. 1, a method for manufacturing a thin film magnetic head for a perpendicular magnetic recording medium involves forming a coil 2 and a magnetic layer 3 on a magnetic substrate 1 by thin film technology, and separately forming a magnetic thin film 4 on a glass plate. A method has been used in which a head gap portion is formed by sandwiching and fixing the thin film 5 and bonding it to the thin film head portion described above. However, this method has the disadvantages of 1) a gap being easily formed between the magnetic thin film 4 and the magnetic layer 3, and 2) an increase in the number of man-hours since machining of the main pole is performed in a separate process.

The present invention aims to solve the above-mentioned drawbacks and realize an economical perpendicular recording thin-film magnetic head with good workability.The present invention has two end faces that are substantially perpendicular to each other, and the intersection of the two end faces is cut out. A base made of a magnetic material, a non-magnetic member having two end faces disposed at the intersection of the base and continuous with each of the two end faces without a step difference, one end face of the non-magnetic member that is continuous with the other end face, and one end face of the base. a coiled conductor formed across both j;
A thin film comprising a main pole member that traverses the conductor, has one end magnetically connected to the base on the inner peripheral side of the conductor, and has the other end reaching the intersection of two end faces of the non-magnetic member. A groove is formed on the surface of a substrate made of a magnetic material using a magnetic head, a non-magnetic material is filled in the groove, and the surface of the substrate is polished, and then the non-magnetic material and the substrate are bonded. A method for manufacturing a thin film magnetic head, which comprises sequentially forming a coiled conductor and a main pole member on the boundary position of the groove, and then cutting or grinding the substrate and the nonmagnetic material along the longitudinal direction of the groove. It will be achieved.

An embodiment of the present invention will be described below with reference to the drawings of FIGS. 2 to 6.

FIG. 2 is a structural diagram of a thin film magnetic head substrate, in which pentagonal grooves are machined into a commonly used substrate made of a magnetic material such as ferrite.

The shape of this groove is not limited to this shape and may be any suitable shape, but it is important that it has a sufficient depth in the head gap portion. FIG. 3 shows the filler 7 (anhydrous silicic acid SiO2 in this example) for the example of the substrate shown in FIG.
This shows a situation in which the groove 6 is filled with and the upper surface is finished flat. Next, FIG. 4 shows a situation in which a thin film coil and a main magnetic head are formed by normal processing.

FIG. 5 shows the filling material 7 and the substrate 1 cut along the longitudinal direction of the groove 6, thereby forming the finished surface 9 of the magnetic head gap part and the 1st part with the leads 10 connected to the terminals.
The finished state of each thin-film magnetic head is shown. FIG. 6 shows the structure of the thin film magnetic head of the present invention, its relative position with respect to the recording carrier 11 in its operating state, and the path of the magnetic flux 12 for recording and reading.

In this figure, the magnetic flux 12 generated by the magnetic medium flows in a concentrated manner into the upper magnetic layer 13 (corresponding to the main magnetic pole 4 in FIG. 1).

Magnetic flux flowing into the upper magnetic layer 13. The short circuit to the magnetic substrate 1 can be suppressed by the filler 7, and the short circuit from 13 to 1
The magnetic flux can be efficiently passed through the path that goes around the coil 2 and returns to the magnetic medium 11. As shown in this figure, this thin-film magnetic head has the same structure on the substrate as that used in conventional horizontal magnetic recording media, but the lower magnetic layer is formed of a magnetic substrate such as ferrite, and the magnetic pole shape is As a U-shape, the space between the two poles is widened by the filling 7.
This reduces the short circuit of the write/read magnetic flux 12,
Moreover, a single ball type magnetic pole suitable for a magnetic head for perpendicular magnetic recording can be provided.

As described above, according to the present invention, it is possible to obtain a thin-film magnetic head for perpendicular magnetic recording with good workability and a length that requires slightly different processing by utilizing the conventional thin-film magnetic head manufacturing technology, thereby improving economic efficiency and This is highly effective in terms of reliability. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a structural diagram of a conventional thin film magnetic head for perpendicular magnetic recording, FIG. 2 is a structural diagram of a thin film magnetic head substrate according to an embodiment of the present invention, and FIG. 3 is a diagram of filling grooves in the substrate. , FIG. 4 is a diagram showing the formation of the coil and magnetic layer, FIG. 5 is a diagram showing the finished state of the thin film magnetic head, and FIG. 6 is a diagram illustrating the operating state of the thin film magnetic head.

In the figure, 1 is a magnetic substrate, 2 is a coil, 3 is a magnetic layer,
4 is the main pole plate, 5 is the glass plate, 6 is the groove, 7 is the filling, 8
1 is a thin film coil magnetic layer, 9 is a gap finished surface, 10 is a lead, 11 is a recording carrier, 12 is a magnetic flux 13 is an upper magnetic layer.

Claims (1)

[Scope of Claims] 1. A base body made of a magnetic material having two substantially orthogonal end faces with a cutout at the intersection of the two end faces, and a base body disposed at the intersection of the base body and having no step between each of the two end faces. a non-magnetic member having two continuous end faces; a coil-shaped conductor formed across both one end face of the continuous non-magnetic member and one end face of the base; A thin film magnetic head comprising: a main pole member magnetically connected to the base on the inner peripheral side of the conductor, the other end of which reaches the intersection of two end faces of the nonmagnetic member. 2. Forming a groove on the surface of a substrate made of magnetic material, filling the groove with a non-magnetic material, and then polishing the surface of the substrate, and then placing a coiled conductor on the boundary between the non-magnetic material and the substrate. and a method for manufacturing a thin film magnetic head, comprising sequentially forming a main pole member, and then cutting or grinding the substrate and the nonmagnetic material along the longitudinal direction of the groove.