JPS6059161B2 - ozone generator - Google Patents
ozone generatorInfo
- Publication number
- JPS6059161B2 JPS6059161B2 JP56120215A JP12021581A JPS6059161B2 JP S6059161 B2 JPS6059161 B2 JP S6059161B2 JP 56120215 A JP56120215 A JP 56120215A JP 12021581 A JP12021581 A JP 12021581A JP S6059161 B2 JPS6059161 B2 JP S6059161B2
- Authority
- JP
- Japan
- Prior art keywords
- ozone generator
- air
- adsorbent
- dew point
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Gases (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Description
【発明の詳細な説明】
この発明は原料空気の露点悪化(上昇)を検出して、
オゾン生成の低下を警報または装置を停止するオゾン発
生装置に関するものである。[Detailed Description of the Invention] This invention detects deterioration (increase) in the dew point of raw air,
This invention relates to an ozone generator that warns of a decrease in ozone production or shuts down the device.
従来、この種の装置として第1図に示すものがあつた
。Conventionally, there has been a device of this type as shown in FIG.
図において1は原料空気供給用送風機、2は一次冷却器
3、二次冷却器4、冷凍機5より構成される空気冷却装
置、6は吸着剤再生用加熱器を内蔵した空気乾燥装置、
7はオゾン発生器、8はオゾン発生器へ高電圧を印加す
るための電源装置、9は原料空気の露点を計測するため
の露点計、10はオゾン発生器7、空気冷却装置2へ冷
却水を供給する冷却水ポンプである。 次に、この従来
例のものの動作について説明する。In the figure, 1 is a blower for supplying raw air, 2 is an air cooling device consisting of a primary cooler 3, a secondary cooler 4, and a refrigerator 5, 6 is an air drying device with a built-in heater for regenerating adsorbent,
7 is an ozone generator, 8 is a power supply device for applying high voltage to the ozone generator, 9 is a dew point meter for measuring the dew point of raw air, 10 is ozone generator 7, cooling water for the air cooling device 2 This is a cooling water pump that supplies Next, the operation of this conventional example will be explained.
原料空気はたとえばルーツ式ブロワのような 送風機1
により外気より取り入れられ、圧縮昇圧されて空気冷却
装置2へ送気される。空気冷却装置では、一次冷却器3
による水冷却、二次冷却器4による冷凍器5により作ら
れた冷媒ガスあるいは冷水冷却により約5℃前後の冷空
気を製造する。この冷空気を空気乾燥装置6へ導き、固
体吸着剤により大気圧露点−50℃程度の高乾燥空気と
してオゾン発生器7ヘ供給する。オゾン発生器7では高
圧電極(ガラス電極)と接地電極(金属電”極)との間
に無声放電を生じさせ、この放電空隙で空気中の酸素か
らオゾンを生成する。無声放電に必要な高電圧は、電圧
調整器あるいは高周波インバータ等の制御機器、昇圧用
高電圧変圧器から構成される電源装置8により供給され
る。またオゾン発生器7での放電による発熱を押えるた
めの冷却水、および空気冷却装置2の一次冷却器3、冷
凍器5への冷却水は冷却水ポンプ10により供給される
。 ここで、オゾン発生器7ヘ供給される空気の乾燥度
とオゾン生成効率は密接な関係があることが知られてい
る。第2図にその原料空気露点とオゾン生成効率の関係
を示す。 一般にオゾン発生器7ヘ供給される原料空気
の大気圧露点は−50℃程度であり、露点が−50℃か
ら−30℃まで上昇するとオゾン生成効率が約15%程
度低下する。The raw air is supplied by a blower 1, such as a Roots blower.
The air is taken in from outside air, compressed and pressurized, and sent to the air cooling device 2. In the air cooling system, the primary cooler 3
Cool air of about 5° C. is produced by water cooling by the secondary cooler 4, refrigerant gas produced by the refrigerator 5, or cold water cooling by the secondary cooler 4. This cold air is led to an air drying device 6, and supplied to an ozone generator 7 as highly dry air with an atmospheric pressure dew point of about -50° C. using a solid adsorbent. In the ozone generator 7, a silent discharge is generated between a high voltage electrode (glass electrode) and a ground electrode (metallic electrode), and ozone is generated from oxygen in the air in this discharge gap. The voltage is supplied by a power supply device 8 consisting of a control device such as a voltage regulator or a high frequency inverter, and a high voltage step-up transformer.In addition, cooling water is provided to suppress heat generation due to discharge in the ozone generator 7, and Cooling water to the primary cooler 3 and refrigerator 5 of the air cooling device 2 is supplied by a cooling water pump 10. Here, the dryness of the air supplied to the ozone generator 7 and the ozone generation efficiency are closely related. It is known that there is a When the temperature increases from -50°C to -30°C, the ozone generation efficiency decreases by about 15%.
また露点が上昇(悪化)すると、窒素酸化物の生成が顕
著となり、オゾン発生器内部に硝酸が生成する原因とな
る。この硝酸と他物質とが反応して電極に汚れが付着し
、このためにオゾン生成効率が低下すると同時に、機器
を構成する材料に腐食等の悪影響を与え、オゾン発生装
置運転の障害となる。従来、これらの原料空気露点低下
にともなう不具合を防止するため空気乾燥装置6とオゾ
ン発生器7との間に露点計9を装備したものがある。Furthermore, when the dew point rises (deteriorates), the production of nitrogen oxides becomes noticeable, which causes nitric acid to be produced inside the ozone generator. This nitric acid reacts with other substances, causing dirt to adhere to the electrodes, which reduces the ozone generation efficiency and at the same time has an adverse effect such as corrosion on the materials that make up the equipment, impeding the operation of the ozone generator. Conventionally, there has been a device equipped with a dew point meter 9 between the air drying device 6 and the ozone generator 7 in order to prevent problems caused by a decrease in the dew point of the raw air.
−50′C以上の露点を計測する露点計には静電容量の
変化を検出するもの等が知られているが、一般には露点
温度と計器の指示、出力が線形となるように構成されて
いるために高価であつた。またセンサーの劣化があり、
6ケ月〜1年に1回程度の校正が必要であつた。このた
め実際に露点計を装置したオゾン発生装置は少なく、原
料空気の露点に対応した装置の管理についてはほとんど
実施されていないのが実情である。従来のオゾン発生装
置は以上のように構成されているので、露点計測に必要
以上に経費を要すること、保守が面倒なこと等の理由に
より露点計を装備したものは実際にはほとんど使用され
なく、原料空気の露点管理が実施されない欠点があつた
。Dew point meters that measure dew points above -50'C are known to detect changes in capacitance, but they are generally configured so that the dew point temperature and the meter's indication and output are linear. It was expensive because of its size. There is also deterioration of the sensor,
Calibration was required about once every six months to a year. For this reason, there are only a few ozone generators that are actually equipped with a dew point meter, and the reality is that the equipment is hardly managed in response to the dew point of the raw air. Conventional ozone generators are configured as described above, but those equipped with a dew point meter are rarely used in practice because dew point measurement requires more money than necessary and maintenance is troublesome. However, there was a drawback in that the dew point of the raw air was not controlled.
この発明は上記のような従来のものの欠点を除去するた
めになされたもので、空気乾燥装置の吸着塔内吸着剤再
生温度と空気冷却装置出口空気の露点とに相間関係があ
ることに着目し、吸着剤再生温度を検出し、これに警報
機能を持たせるような露点警報器を関連させ、オゾン発
生装置運転のインクロック要素を設けることにより、露
点が所定以上上昇した状態を警報し、運転を停止でき、
−露点計が不要でしかも簡略で安価なオゾン発生装置を
提供するものである。This invention was made to eliminate the above-mentioned drawbacks of the conventional method, and focused on the fact that there is a correlation between the adsorbent regeneration temperature in the adsorption tower of the air drying device and the dew point of the air at the outlet of the air cooling device. , by detecting the adsorbent regeneration temperature and associating it with a dew point alarm that has an alarm function, and by providing an in-clock element for ozone generator operation, an alarm will be issued when the dew point has risen above a predetermined level, and the operation will be activated. can be stopped,
- To provide a simple and inexpensive ozone generator that does not require a dew point meter.
以下この発明の一実施例を図について説明する。An embodiment of the present invention will be described below with reference to the drawings.
第3図はこの発明の一実施例の加熱再生式空気乾燥部を
示すものである。他の部分は従来例と.同一であるから
説明はしない。すなわち第3図において6a,6bは吸
着剤が充填された吸着塔、6cは吸着塔切換四方弁、6
dは空気入口、6eは乾燥空気出口、6f,6gは吸着
塔内に設置された加熱器、6h,61は吸着剤温度を検
出し、−設定温度にて警報信号を外部へ供給する機能を
有する温度スイッチ(温度検出器)である。6jは吸着
塔からの乾燥空気の一部を再生空気として利用するため
、所定量の乾燥空気を再生側吸着塔に供給する流量調整
弁、6kは再生用空気出口である。FIG. 3 shows a heating regeneration type air drying section according to an embodiment of the present invention. The other parts are the same as the conventional example. Since they are the same, I will not explain them. That is, in FIG. 3, 6a and 6b are adsorption towers filled with adsorbent, 6c is an adsorption tower switching four-way valve, and 6
d is an air inlet, 6e is a dry air outlet, 6f and 6g are heaters installed in the adsorption tower, 6h and 61 have a function of detecting the adsorbent temperature and supplying an alarm signal to the outside at a set temperature. It is a temperature switch (temperature detector) with a 6j is a flow rate regulating valve that supplies a predetermined amount of dry air to the regeneration-side adsorption tower in order to utilize a portion of the dry air from the adsorption tower as regeneration air, and 6k is a regeneration air outlet.
以上の構成において、空気冷却装置から送気された5℃
前後の冷空気は空気入口6dより吸着塔に導かれる。In the above configuration, the air supplied from the air cooling device is 5°C.
The cold air before and after is guided to the adsorption tower through the air inlet 6d.
吸着塔は二塔あり、一方の及着塔で水分吸着が行われる
間、他方の吸着塔ではすでに水分吸着済みの吸着剤の再
生が行われ、再生が完了すると四方弁が切換わり各々の
塔は逆の行程を行う。これを適宜設定した時間で交互に
くり返すノ機構となつている。例えば吸着塔6aに導か
れた空気は、例えば活性アルミナ等の固体吸着剤6eに
より水分を吸着され所定の大気圧露点(−50℃以下)
をもつ乾燥空気となり四方弁6cを経由して乾燥空気出
口6・eから排出されオゾン発生器7へ導かれる。There are two adsorption towers, and while water adsorption is performed in one adsorption tower, the adsorbent that has already adsorbed water is regenerated in the other adsorption tower, and when the regeneration is completed, the four-way valve is switched and each tower performs the opposite process. The mechanism is such that this process is repeated alternately at an appropriately set time. For example, the air led to the adsorption tower 6a has moisture adsorbed by a solid adsorbent 6e such as activated alumina, and has a predetermined atmospheric pressure dew point (-50°C or less).
The resulting dry air is discharged from the dry air outlets 6 and e via the four-way valve 6c and guided to the ozone generator 7.
四方弁6cを通過した乾燥空気は流量調整弁6jにて所
定量に調整された再生用空気として一部分岐され吸着塔
6bに導かれる。吸着塔6bでは塔内に設置された加熱
器6gにより吸着剤6eを加熱し“吸着剤6eに吸着さ
れた水分を水蒸気状にして、再生ガスとともに四方弁6
cを通過し再生空気出口6kより系外へ排出する。吸着
塔6b内の吸着剤の温度が所定値まで達すると加熱行程
が完了し加熱器6gが切られ、その後再生空気のみによ
り常温近くまて吸着剤が冷却され、再生行程が全て完了
する。完了後四方弁を切換え吸着塔6aは再生行程に、
吸着塔6bは吸着行程に入る。再生が行われる吸着塔で
は上述したように加熱行程と冷却行程があり、特にこの
発明では加熱行程末期における吸着剤温度(又は塔内温
度)が吸着剤中の水分が完全に除去されたか否かの指標
となることに着目し、吸着塔に温度スイッチ6h,61
を設置し、加熱行程末期における吸着剤温度(又は塔内
温度)が、温度スイッチにて設定した最適温度値を下回
つた時に警報信号を外部へ供給することにより、オゾン
発生装置運転のインタロックをとり、装置、特にオゾン
発生器の保護を計ろうとするものである。The dry air that has passed through the four-way valve 6c is partially branched as regeneration air, which is adjusted to a predetermined amount by a flow rate regulating valve 6j, and guided to the adsorption tower 6b. In the adsorption tower 6b, the adsorbent 6e is heated by a heater 6g installed in the tower, and the moisture adsorbed on the adsorbent 6e is turned into water vapor, which is then passed through the four-way valve 6 along with the regeneration gas.
c and is discharged to the outside of the system from the regeneration air outlet 6k. When the temperature of the adsorbent in the adsorption tower 6b reaches a predetermined value, the heating process is completed and the heater 6g is turned off, and then the adsorbent is cooled to near room temperature only by regeneration air, completing the entire regeneration process. After completion, the four-way valve is switched and the adsorption tower 6a enters the regeneration process.
The adsorption tower 6b enters the adsorption process. As mentioned above, the adsorption tower in which regeneration is performed has a heating process and a cooling process, and in particular, in this invention, the adsorbent temperature (or the temperature inside the tower) at the end of the heating process determines whether or not the moisture in the adsorbent has been completely removed. Focusing on the fact that it is an indicator of
is installed, and an alarm signal is sent to the outside when the adsorbent temperature (or tower internal temperature) at the end of the heating process falls below the optimum temperature value set by the temperature switch, thereby interlocking the operation of the ozone generator. This is an attempt to protect equipment, especially ozone generators.
乾燥空気露点と加熱行程末期における吸着剤温度(又は
塔内温度)との関係は非線形であるため吸着剤温度値を
そのまま乾燥空気露点に読み替えるのは困難であるが、
あらかじめ加熱行程末期における吸着剤温度とその塔の
吸着行程時の乾燥空気露点との関係を求めることにより
、所定の露点(−50℃以下)が確保出来、しかも時間
経過にともなう露点の上昇が認められない最適な加熱行
程末期における吸着剤温度が決定でき、これを警報設定
値にすることで、精度の高い露点管理が可能である。Since the relationship between the dry air dew point and the adsorbent temperature (or tower internal temperature) at the end of the heating process is nonlinear, it is difficult to directly translate the adsorbent temperature value into the dry air dew point.
By determining the relationship between the adsorbent temperature at the end of the heating process and the dry air dew point during the tower's adsorption process in advance, the specified dew point (-50°C or less) can be ensured, and the dew point can be observed to increase over time. It is possible to determine the optimal adsorbent temperature at the end of the heating process, when the heating process is not possible, and by setting this as the alarm setting value, highly accurate dew point management is possible.
この実施例では吸着、再生の切換サイクルが8時間、再
出行程における加熱行程と冷却行程がそれぞれ4時間で
行なわれ、加熱行程中に吸着剤温度が設定温度値まで上
昇するとサーモスタットにより加熱器の電源が切れる(
実際には4時間以内に加熱が完了するように設計されて
いる)機構となつている。In this example, the switching cycle of adsorption and regeneration takes 8 hours, and the heating and cooling steps in the re-release process take 4 hours each, and when the adsorbent temperature rises to the set temperature value during the heating process, the thermostat turns on the heater. The power turns off (
The mechanism is actually designed to complete heating within 4 hours.
従つて加熱行程完了時までに吸着剤温度が所定の設定値
に達しない時に警報信号を外部へ供給するような、タイ
マと吸着剤温度検出用温度スイッチ6h,61を組合わ
せた警報機能を構成することにより、異常を警報すると
同時にオゾン発生を停止し、オゾン発生器7を保護する
ような制御回路を形成するものである。温度スイッチは
その構造が非常に単純なため常に安定した状態で使用が
出来、さらに露点を指示しないために警報機構自体が単
純な構成となるため保守の必要がまつたくなくなるよう
な利点がある。Therefore, an alarm function is configured by combining a timer and temperature switches 6h and 61 for detecting adsorbent temperature, which supplies an alarm signal to the outside when the adsorbent temperature does not reach a predetermined set value by the time the heating process is completed. By doing so, a control circuit is formed that warns of an abnormality and simultaneously stops ozone generation to protect the ozone generator 7. Since the temperature switch has a very simple structure, it can be used in a stable state at all times, and since it does not indicate the dew point, the alarm mechanism itself has a simple structure, which has the advantage of eliminating the need for maintenance.
なお、上記実施例では吸着塔6a,6b内部に加熱器6
f,6gを設置したものであるが、加熱器を吸着塔外部
に配して、独立した再生回路を有したものでも、上記実
施例と同様な効果が得られる。In the above embodiment, a heater 6 is installed inside the adsorption towers 6a and 6b.
Although the heater is placed outside the adsorption tower and an independent regeneration circuit is provided, the same effects as in the above embodiment can be obtained.
また、上記実施例では温度検出器の信号により警報器を
駆動し、装置のインターロック手段を駆動するようにし
ているが、片方だけを駆動するようにしてもよく、さら
に警報器は音によるものだけでなく視覚にうつたえるも
の等でもよいものである。Further, in the above embodiment, the alarm is driven by the signal from the temperature detector and the interlock means of the device is driven, but it is also possible to drive only one side, and the alarm can be activated by sound. Not only that, but it can also be something that can be conveyed visually.
以上のように、この発明によれば、空気を乾燥する吸着
塔内の吸着剤温度を検出して空気の露点上昇を検出する
ように構成したので、装置が安価で保守の必要がない原
料空気露点検出手段をオゾン発生装置へ装備することが
可能となつた。As described above, according to the present invention, the rise in the dew point of the air is detected by detecting the temperature of the adsorbent in the adsorption tower that dries the air, so the device is inexpensive and requires no maintenance. It has become possible to equip ozone generators with dew point detection means.
このためオゾン生成量の不足、および硝酸生成によるオ
ゾン発生装置の事故を未然に防ぐことができ、その効果
は大きい。Therefore, it is possible to prevent accidents in the ozone generator due to insufficient ozone production and nitric acid production, which is highly effective.
第1図は従来のオゾン発生装置の構成を示すフロー図、
第2図は原料空気の露点温度とオゾン生”成効率の関係
を示す図、第3図はこの発明の一実施例による空気乾燥
装置のフロー図である。Figure 1 is a flow diagram showing the configuration of a conventional ozone generator.
FIG. 2 is a diagram showing the relationship between the dew point temperature of raw air and the ozone production efficiency, and FIG. 3 is a flow diagram of an air drying apparatus according to an embodiment of the present invention.
Claims (1)
るオゾン発生器と、このオゾン発生器に供給される前の
原料空気が通される吸着塔と、この吸着塔内に設けられ
原料空気中の水分を吸着する吸着剤と、この吸着剤を加
熱して吸着剤を再生させる加熱器と、上記吸着剤の加熱
再生温度を検出する温度検出器とを備え、この温度検出
器からの信号により駆動される警報器および/またはオ
ゾン発生装置の停止要素を設けて、原料空気の露点上昇
によつてオゾン生成器の低下を警報しおよび/またはオ
ゾン発生装置を停止させるようにしたことを特徴とする
オゾン発生装置。1. An ozone generator that supplies raw air and generates ozone by silent discharge, an adsorption tower through which the raw air is passed before being supplied to the ozone generator, and an adsorption tower that is installed inside this adsorption tower to generate ozone in the raw air. It is equipped with an adsorbent that adsorbs moisture, a heater that regenerates the adsorbent by heating the adsorbent, and a temperature detector that detects the heating regeneration temperature of the adsorbent, and is driven by a signal from the temperature detector. The ozone generator is characterized by being provided with an alarm and/or a stop element for the ozone generator to warn of a decrease in the ozone generator due to an increase in the dew point of the raw air and/or to stop the ozone generator. Ozone generator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56120215A JPS6059161B2 (en) | 1981-07-31 | 1981-07-31 | ozone generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56120215A JPS6059161B2 (en) | 1981-07-31 | 1981-07-31 | ozone generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5826005A JPS5826005A (en) | 1983-02-16 |
| JPS6059161B2 true JPS6059161B2 (en) | 1985-12-24 |
Family
ID=14780736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56120215A Expired JPS6059161B2 (en) | 1981-07-31 | 1981-07-31 | ozone generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6059161B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5811749B2 (en) * | 2011-09-30 | 2015-11-11 | 株式会社Ihi | Ozone generator |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5626703A (en) * | 1979-08-09 | 1981-03-14 | Mitsubishi Electric Corp | Ozonizer controlling apparatus |
-
1981
- 1981-07-31 JP JP56120215A patent/JPS6059161B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5826005A (en) | 1983-02-16 |
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