JPS60795B2 - Manufacturing method of piezoelectric thin plate - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention involves rolling a mixture of piezoelectric ceramic powder and synthetic resin into a thin plate using two-stage heated rolling rolls, and then "producing a piezoelectric conductive plate by imparting extensibility."It's about how to do it.

Conventionally, when rolling the above-mentioned mixture into a thin plate, a two-stage continuous method has been used exclusively because this rolling operation is extremely difficult.

For this reason, there was a lot of variation in the thickness of rolled thin plates, so the dimensions. When a rolled thin plate with high precision is required, it is necessary to pass the sheet through a two-high heating roll intermittently many times.
The present invention involves rolling a thin plate using two-high rolling heating rolls, detecting and feeding back the thickness of the rolled thin plate, and controlling the thickness by adjusting the interval between a pair of heating rolls to achieve high dimensional accuracy. Examples will be described below using a method for continuously obtaining piezoelectric conductive plates. FIG. 1 is a main sectional view of an example of a piezoelectric laminate used in the present invention. This piezoelectric laminate Ichikawama,
A plurality of thin piezoelectric ceramic plates 1, 2, 3 are placed on the electrode surface of the machine.
B, 2a, 2b, 3a are stacked by facing each other and bonding, and electrodes la, 2b, 3a and electrode l
Wires are connected so that an input voltage is applied to each of b, 2a, 3b, and 4a.

Therefore, when an input voltage is applied between the above two electrode groups,
This piezoelectric laminate 101 also stretches in the stacking direction. Although the elongation due to input voltage is extremely small for each piezoelectric ceramic plate 1, 2, and 3, the Honjo Den laminate 10
, 3 are laminated, the elongation of the piezoelectric laminate 10 is cumulatively increased. In general, piezoelectric ceramics "stretch due to applied voltage and return to their original state when the applied voltage is removed, but in this case hysteresis occurs.

In order to prevent this hysteresis, it is desirable to reduce the applied voltage per unit thickness. Now, the above piezoelectric ceramics 1 and 2
, 3, the piezoelectric laminate 10 is made by laminating thin plates each having an outer diameter of 3 mm and a thickness of 1 inch.

When a voltage of 200V is applied to this piezoelectric laminate 10, 1
0 Buddha's elongation occurs. In this case, the thickness profile is 1 rib x 100
Since the voltage 200y is low for =100 skin, hysteresis does not occur. FIG. 2 shows an embodiment of the heating roll device for rolling used in the present invention, in which A is a main plan view and B is a side view showing the rolling operation.

1. A piezoelectric laminate as described in FIG.
a and 12a are roll forming surfaces, 11b and 12b are roll shafts, 11c and 12c are bearings for roll shafts 11b and 12b, 11a and 12d are gears of the same diameter that are attached to the roll shafts and mesh with each other, and 13 is the thickness of the rolled thin plate. This is a means of detection.

Two piezoelectric laminates are attached to each other, one of which is attached to a fixed wall 10a and the other to a bearing 11c of a heating roll 11, with the bearing 11c side being a free end.

Further, the bearing 12c supporting the heating roll 12 is fixed. Now, as shown in Fig. 2B, a thick plate A made of a mixture of piezoelectric ceramic powder and synthetic resin that has been preheated and rolled is passed between heating rolls 11 and 2 which are rotated at a constant speed in the opposite direction and heated to about 1900C. and the same roll forming surfaces 11a and 12a.
The thin sheet B is rolled downward and comes out.

Thickness detecting means 13 are placed on both sides of the thin plate B, and the detecting means 13 converts the flicker for a required thickness of the thin plate B into a voltage. In this case, for example, the piezoelectric laminate 1
When using the above as 0, applying 200V will increase the voltage by 10 volts, so it is sufficient to convert it into a voltage value at a rate of 20 V per 1 volt. If this change in voltage is applied to the Shoden light layer 10, the heating roll 11 will move slightly back and forth relative to the other heating roll in response to fluctuations in the thickness of the thin plate B, so the thickness of the thin plate B will be controlled, resulting in a highly accurate thin plate. You can wander around B. Thereafter, a DC high voltage is applied to the thin plate B, and piezoelectricity is imparted to the thin plate B, so that the thin plate B becomes a piezoelectric conductive plate. A comparative test was conducted between a conventional method in which the sheet is passed intermittently between two-high rolling heated rolls many times and the method according to the present invention. There was some flickering, but according to the present invention, 1.
I was able to get it to around 5mm.

In addition, when the viscosity of the mixture of piezoelectric ceramic powder and synthetic resin is high, the rolling resistance is high, so as for the piezoelectric laminate, the first
In place of the piezoelectric laminate 10 shown in the figure, it is preferable to use piezoelectric ceramic plates 1, 2, and 3 with their elastic electrodes la, lb, and 2a removed and tightened with bolts or the like instead of adhesive.

As described above, the present invention is a method for continuously manufacturing piezoelectric conductive plates with high thickness accuracy, and has high practical value because it has higher accuracy and lower cost than conventional methods.

[Brief explanation of drawings]

Fig. 1 is a main sectional view of an embodiment of a piezoelectric laminate used in the present invention, Fig. 2 is an embodiment of a rolling heating roll device used in the present invention, Fig. A is a plan view, and B is a side view. It is a diagram. 10... Piezoelectric laminate, 11, 12... Heating roll,
11c, 12c...Bearings, 13...Thickness detection means. Figure 1 Figure 2

Claims (1)

[Claims] 1. In a method for producing a piezoelectric conductive plate by rolling a mixture of piezoelectric ceramic powder and synthetic resin into a thin plate using two-stage heating rolls and then imparting piezoelectricity, one heating roll is used to roll a plurality of piezoelectric A porcelain plate is supported by a bearing equipped with a piezoelectric laminate stacked with electrode surfaces of the same polarity facing each other, and the other heating roll is supported by a fixed bearing. A detection means for detecting the thickness of the thin plate rolled by the pair of heating rolls is provided, and the detection means converts the change in the thickness of the rolled thin plate into a change in voltage, and applies this change in voltage to the piezoelectric laminate. By applying a voltage, one heating roll supported by a bearing to which a piezoelectric laminate is attached is slightly moved back and forth with respect to the other heating roll supported by a fixed bearing.
A method for manufacturing a piezoelectric conductive plate, characterized in that the thickness of the rolled thin plate is controlled by adjusting the distance between the pair of heating rolls.