JPS6133364B2 - - Google Patents
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- Publication number
- JPS6133364B2 JPS6133364B2 JP54012690A JP1269079A JPS6133364B2 JP S6133364 B2 JPS6133364 B2 JP S6133364B2 JP 54012690 A JP54012690 A JP 54012690A JP 1269079 A JP1269079 A JP 1269079A JP S6133364 B2 JPS6133364 B2 JP S6133364B2
- Authority
- JP
- Japan
- Prior art keywords
- measured
- slide
- displacement
- straightness
- linear guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
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- Length Measuring Devices With Unspecified Measuring Means (AREA)
Description
【発明の詳細な説明】 この発明は真直度の測定方法に関する。[Detailed description of the invention] This invention relates to a method for measuring straightness.
工業製品の高度化、工作機械、精密機械の数値
制御化に伴ない精度の向上が切に望まれる工作機
械等において、案内面の真直度、スライド、工具
台の直進性を正確に測定し且つ被加工物の真直度
を正確に測定することは、加工精度に影響の大き
いスライド、工具台の駆動精度を高める前提とな
る。特に工作機械のスライド、工具台の運動と被
加工物の形状の関係を知ることが重要な意味を有
する。従来、真直度の測定には、水準器によりベ
ツド案内面の真直度を直接測定する方法、鋼線に
よる方法、オートコリメータによる方法等が普通
であつたが、通常のこれらの方法によるときは工
作機械の案内面の真直度の測定についても、それ
らは水準器を移動して読み取りあるいは顕微鏡に
より像位置の差として測定するため能率が悪く、
又工作機械のスライドの実際に動く速度における
直進性即ち動的精度を知るには適当でなかつた。
近時はこれらに対してレーザ干渉計を用いて真直
度を測定する方法が試みられ以上の問題点に対し
て解答を与えることになつた。しかるにこの方法
によるときはスライド、工具台の直進性を静的、
動的に把握できるがそれと同時に被加工物の真直
度を計測するに到らない。 Accurately measure the straightness of guide surfaces, slides, and straightness of tool rests in machine tools, etc., where improved accuracy is desperately desired as industrial products become more sophisticated and machine tools and precision machines become numerically controlled. Accurately measuring the straightness of a workpiece is a prerequisite for increasing the drive accuracy of slides and tool stands, which have a large effect on machining accuracy. In particular, it is important to know the relationship between the movement of the machine tool slide and tool rest and the shape of the workpiece. Traditionally, straightness has been measured using methods such as directly measuring the straightness of the bed guide surface using a spirit level, using a steel wire, or using an autocollimator. Measuring the straightness of a machine's guide surface is also inefficient because it is measured by moving a spirit level and reading it or using a microscope to measure the difference in image position.
Furthermore, it is not appropriate to know the linearity, that is, the dynamic accuracy, of the slide of a machine tool at its actual moving speed.
Recently, a method of measuring straightness using a laser interferometer has been attempted to provide an answer to the above problems. However, when using this method, the linearity of the slide and tool stand is statically
Although it can be grasped dynamically, it is not possible to measure the straightness of the workpiece at the same time.
上記は案内面そのものの真直度に関するが案内
面に案内されるスライド上の工具により加工され
た被加工物については、従来例えば旋削加工機械
により加工された円筒のような被加工物の真直度
を測定するのにその測定器として被加工物に平行
な直線案内を設けて、該直線案内を滑動するスラ
イド上に変位計を取付けてスライドを送つて変位
計を読み取つて演算することにより被加工物の真
直度を測定している。このような測定方法の1つ
としてはスライド上に例えば一個のダイヤルゲー
ジを置いてダイヤルゲージの触針を被加工物母線
上を走らせて真直度を求めるものがある。この一
個の変位計を用いるものは、直線案内の真直度に
影響されるスライドの直進性の影響を受けるた
め、直線案内を極めて高精度にしなければならな
い。又直線案内の直進度と被加工物の真直度の程
度が接近した場合には被加工物の真直度が得られ
なくなるという問題点がある。 The above concerns the straightness of the guide surface itself, but for workpieces machined by a tool on a slide guided by the guide surface, conventionally, for example, the straightness of the workpiece, such as a cylinder machined by a turning machine, is To measure the workpiece, a linear guide parallel to the workpiece is provided as a measuring device, a displacement meter is attached to a slide that slides on the linear guide, and the slide is sent and the displacement meter is read and calculated. The straightness is being measured. One such measuring method involves placing, for example, a dial gauge on a slide and running the stylus of the dial gauge over the generatrix of the workpiece to determine the straightness. In the case of using this one displacement meter, the straightness of the slide is affected by the straightness of the linear guide, so the linear guide must be extremely accurate. Furthermore, if the degree of straightness of the linear guide and the degree of straightness of the workpiece are close to each other, there is a problem that the straightness of the workpiece cannot be obtained.
上記のような欠点のない被加工物の真直度測定
方法としては特開昭53―109660号公報に示される
発明がある。該、発明は変位計を同一平面上に3
個等間隔に配置し、各々独立して変位検出を行な
う様になした検出器を備えたスライドを直線案内
により被測定面上で順次変位計間隔毎に同一方向
に送り、各測定点に於ける3個の変位計の変位量
から被測定面と変位計中心との偏差を求め、更に
各々隣り合う測定点間の偏差を求め、これにより
得られた同一測定点間に於ける2種の偏差を演算
処理し、スライドの傾きによる測定誤差を補正
し、各隣り合う測定点間の真の偏差を求めて被測
定面の真直度誤差を検出する様になしたことを特
徴とする三点式真直度測定方法を要旨とするもの
である。 As a method for measuring the straightness of a workpiece without the above-mentioned drawbacks, there is an invention disclosed in Japanese Patent Application Laid-open No. 109660/1983. The invention provides three displacement meters on the same plane.
A slide equipped with detectors arranged at equal intervals and each detecting displacement independently is sent in the same direction over the surface to be measured by linear guide at each displacement meter interval, and the slide is placed at each measurement point. Determine the deviation between the surface to be measured and the center of the displacement meter from the displacement amount of the three displacement meters, and then determine the deviation between each adjacent measurement point. A three-point straightener characterized by calculating the deviation, correcting the measurement error due to the tilt of the slide, and finding the true deviation between adjacent measurement points to detect the straightness error of the surface to be measured. The gist of this paper is the method of measuring temperature.
然し乍ら、この先願の発明は(1)変位計が3個必
要である。(2)被測定物しか測定できない。(3)変位
計の間隔が等間隔に且つ同一平面上に配するのが
難かしく、これらに狂いがあると誤差の要因とな
る。(4)変位計誤差の較正が困難である。(5)変位計
の傾きに対する補正をしているがこの値は通常の
直線案内を用いる限り無視できる大きさであり、
又変位計の分解能の限界を越えているのでこのよ
うな補正を行う無駄がある等の問題点がある。 However, the invention of this prior application requires (1) three displacement meters. (2) Only the object to be measured can be measured. (3) It is difficult to arrange the displacement meters at equal intervals and on the same plane, and any deviation in these will cause errors. (4) Calibration of displacement meter error is difficult. (5) Correction is made for the tilt of the displacement meter, but this value is negligible as long as normal linear guidance is used.
Furthermore, since the resolution limit of the displacement meter is exceeded, there is a problem that such correction is wasteful.
この発明は工作機械、精密機械等のベツド案内
面あるいはガイドバー等に係合して直線運動を行
うスライド即ちサドル、テーブル、工具台等の直
進性、並びにそれらを介してベツド案内面あるい
はガイドバー等の真直度を測定すると共に被測定
物即ち被加工物の真直度を求め得る真直度の測定
方法を提供することを目的とするものである。 This invention relates to the linear movement of slides such as saddles, tables, tool stands, etc. that engage with bed guide surfaces or guide bars of machine tools, precision instruments, etc. It is an object of the present invention to provide a straightness measuring method that can measure the straightness of a workpiece, etc., and also determine the straightness of an object to be measured, that is, a workpiece.
この発明は直線案内に係合するスライド上に短
いピツチで二つ変位計を並列して該直線案内に平
行して支持した被測定物例えば被加工物の軸方向
に直角方向に配列して、被測定物の一定位置にて
二つの変位計の夫々の被測定物との距離を求め次
に一ピツチ分スライドを送り、再び二つの変位計
による測定値を求め、順次にくり返してそのデー
ターを演算処理により夫々直線案内の真直度並び
に被測定物の真直度を求める方法であつて、二つ
の変位計を例えばうず電流変位計を用いてその電
圧を取り出すことにより二つの変位計の被測定物
との距離を知り、静的精度を計測する。更にこれ
らを実際の機械におけるスライドの運動速度にお
ける記録装置あるいはデータ処理回路を備えるこ
とにより動的精度を知ることができるものであ
る。 In this invention, two displacement meters are arranged in parallel at short pitches on a slide engaged with a linear guide, and arranged in a direction perpendicular to the axial direction of an object to be measured, such as a workpiece, supported parallel to the linear guide. At a fixed position of the object to be measured, calculate the distance between each of the two displacement meters and the object to be measured, then feed the slide by one pitch, obtain the measured values from the two displacement meters again, and repeat the data sequentially. This method calculates the straightness of a linear guide and the straightness of an object to be measured through arithmetic processing. Know the distance to and measure static accuracy. Furthermore, the dynamic accuracy can be determined by providing a recording device or a data processing circuit for measuring the slide movement speed in an actual machine.
尚又、工作機械主軸にそのロータリエンコーダ
を装着してその発生パルスを一回転毎にとらえる
ことにより、前記変位計と連動して被加工物の回
転中にその一つの母線の真直度を計測し、被加工
物の円周を分割した位置で夫々前記変位計と連動
して被加工物の回転中にその被加工物の円周の分
離した位置における母線上の真直度を計測してセ
ンター法による真円度、円筒度並びに形状精度を
同時に知ることができる。これをデータ処理回路
を備えて自動計測することを可能とすることがで
きるものである。 Furthermore, by attaching the rotary encoder to the machine tool main shaft and capturing the generated pulses every rotation, the straightness of one generatrix of the workpiece can be measured while the workpiece is rotating in conjunction with the displacement meter. , the center method is carried out by measuring the straightness on the generating line at separate positions on the circumference of the workpiece while the workpiece is rotating in conjunction with the displacement meter at each divided position of the circumference of the workpiece. It is possible to know the roundness, cylindricity, and shape accuracy at the same time. This can be automatically measured by providing a data processing circuit.
以下この発明の実施例について説明する。第1
図はこの発明による真直度の測定方法である。1
は工作機械の主軸台例えば旋盤の主軸台、2は心
押台であつて被測定物3は一端を主軸台1の主軸
端に装着したチヤツクに把握された取付具を介し
て他端は心押台2に固定した取付具により係止さ
れ心押台2のスリーブを主軸台1より遠ざけて展
張されている。被測定物3は第1図においてはア
ルミの長い片で板面は第1図の紙面に直交してお
り特に実験、説明のためベツド案内面5との真直
度との関係のない物である。旋盤等の被加工物に
おいてはベツド案内面5と被加工物の真直度は相
関関係があることになる。ベツドの案内面5上に
はサドル4が係合して主軸中心線に平行して移動
可能となつている。即ち直線案内に対して運動可
能なスライドが係合しているのである。 Examples of the present invention will be described below. 1st
The figure shows a method for measuring straightness according to the present invention. 1
is a headstock of a machine tool, for example, a lathe headstock; 2 is a tailstock; one end of the workpiece 3 is attached to the spindle end of the headstock 1 via a fixture grasped by a chuck; The sleeve of the tailstock 2 is extended away from the headstock 1 by being locked by a fixture fixed to the tailstock 2. The object to be measured 3 in Fig. 1 is a long piece of aluminum whose plate surface is perpendicular to the plane of the drawing in Fig. 1, and has no relation to its straightness with the bed guide surface 5 for purposes of experiment and explanation. . In a workpiece such as a lathe, there is a correlation between the bed guide surface 5 and the straightness of the workpiece. A saddle 4 is engaged on the guide surface 5 of the bed and is movable parallel to the center line of the main shaft. That is, a movable slide is engaged with the linear guide.
サドル4には一定間隔に変位計6,7が主軸中
心線に直交する方向に取り付けられている。 Displacement meters 6 and 7 are attached to the saddle 4 at regular intervals in a direction perpendicular to the spindle centerline.
第1図においては特に説明のために被測定物
3、ベツド案内面5の形状は垂直方向向に大き
く、水平方向に小さく表現してあるが、後にも説
明するように、これらは垂直方向に極めて小さく
水平方向に充分大となつている。 In Fig. 1, the shapes of the object to be measured 3 and the bed guide surface 5 are shown to be larger in the vertical direction and smaller in the horizontal direction for the sake of explanation, but as will be explained later, these shapes are shown in the vertical direction. It is extremely small and sufficiently large in the horizontal direction.
今サドル4を第1図の実線で示す位置において
変位計6,7と被測定物3間の距離の読みを求
め、次にサドル4を第1図において左方に変位計
6,7の間隔だけ即ち一ピツチ送る。サドルは二
点鎖線で示すように垂直方向に位置も変る。この
位置で変位計6,7の読みを求める。次に又変位
計6,7の間隔だけサドル4を同方向に一ピツチ
送つて第1図に点線で示す位置において変位計
6,7の読みを求める。以下同様に一ピツチ宛送
つて被測定物3の全長にわたつて計測する。 Now, with the saddle 4 at the position shown by the solid line in Figure 1, find the reading of the distance between the displacement gauges 6, 7 and the object to be measured 3, and then move the saddle 4 to the left in Figure 1 to the distance between the displacement gauges 6, 7. Send only one pitch. The position of the saddle also changes in the vertical direction, as shown by the two-dot chain line. Obtain the readings of displacement meters 6 and 7 at this position. Next, the saddle 4 is moved one pitch in the same direction by the distance between the displacement gauges 6 and 7, and the readings of the displacement gauges 6 and 7 are obtained at the position shown by the dotted line in FIG. Thereafter, the entire length of the object to be measured 3 is measured by sending one pitch in the same manner.
以上の読みの差より以下示すようにして被測定
物3の真直度及びヘツド案内面5の真直度が求ま
る。 From the difference in the above readings, the straightness of the object to be measured 3 and the straightness of the head guide surface 5 are determined as shown below.
今変位計6,7を夫々うず電流型変位計とす
る。変位計6,7を被測定物3に接近させ、切り
込み方向に移動し、その時の変位計6,7の出力
を読み取り各々の変位計6,7の距離―電圧曲線
8(第2図)を作成する。第2図は水平軸には変
位計6あるいは7の電圧Vを、垂直軸には被測定
物3と変位計との距離F・Vが示されている。従
つて図に示すように変位計6あるいは7を垂直方
向に移動した位置9,10の夫々の距離F・Vを
FをF・V2,F・V1で表わすと、変位計6ある
いは7の電圧はV1,V2で示され、変位計6ある
いは7の移動した距離F・V2―F・V1∽V2―V1
となる。 Now assume that displacement meters 6 and 7 are eddy current type displacement meters. Bring the displacement gauges 6, 7 close to the object to be measured 3, move them in the cutting direction, read the output of the displacement gauges 6, 7 at that time, and calculate the distance-voltage curve 8 (Figure 2) of each displacement gauge 6, 7. create. In FIG. 2, the horizontal axis shows the voltage V of the displacement meter 6 or 7, and the vertical axis shows the distance F·V between the object to be measured 3 and the displacement meter. Therefore, as shown in the figure, if the distance F·V of the positions 9 and 10 obtained by moving the displacement meter 6 or 7 in the vertical direction is expressed as F·V 2 and F·V 1 , then the displacement meter 6 or 7 is The voltages are shown as V 1 and V 2 , and the distance traveled by displacement meter 6 or 7 is F・V 2 −F・V 1 ∽V 2 −V 1
becomes.
第3図は第1図の一部を拡大して示す図であ
る。図において右方より左方へ夫々添符号で示す
ように、間隔を変位計6,7のピツチにとつて被
測定物3の移動方向にその右端附近を基準にして
主軸中心線を理想直線としてそれらの位置におけ
る被測定物3との距離即ち真直度をy1,y2,y3…
…yo右端位置における変位計6,7の間を二分
する基準位置よりベツド案内面5の理想直線間と
の距離をx0,x1,x2……xo添符号の位置0,
1,2,3……nにおける変位計6,7と被測定
物3との距離を夫々FA(V0A),FA(V1A),F
A(V2A),FA(V3A)……FA(VoA)、FB(V
0B),FB(V1B),FB(V2B),FB(V3B)……
FB(VoB)とすると
FA(V1A)−FA(V0A)=y1−x1 (1)
FB(V1B)−FB(V0B)=(y2−y1)−x1 (2)
FA(V2A)−FA(V0A)=y2−x2 (3)
FB(V2B)−FB(V0B)=(y3−y1)−x2 (4)
FA(V3A)−FA(V0A)=y3−x3 (5)
FB(V3B)−FB(V0B)=(y4−y1)−x3 (6)
(2)−(3)+(1)より
x2=FA(V1A)−FA(V2A)+FB(V1B)
−FB(V0B)+x1+x1
(4)−(5)+(1)より
x3=FA(V1A)−FA(V3A)+FB(V2B
−FB(V0B)+x2+x1
∴xo=FA(V1A)−FA(VoA)+FB
(V(o-1)B)−FB(V0B)+xo-1+x1
したがつて、未知のx1は直流分となるので
x1=0とすればすべての真直度xoは簡単な数式
で求まる。また
yo=xo+FA(VoA)−FA(V0A)
となり被測定物3の真直度も求められる。 FIG. 3 is an enlarged view of a part of FIG. 1. As shown by the appended symbols from the right to the left in the figure, the distance is set to the pitch of the displacement meters 6 and 7, and the spindle center line is set as an ideal straight line in the direction of movement of the object to be measured 3, with the vicinity of its right end as a reference. The distance to the object to be measured 3 at those positions, that is, the straightness, is y 1 , y 2 , y 3 , etc.
...y o The distance from the reference position that bisects the distance between the displacement gauges 6 and 7 at the right end position to the ideal straight line of the bed guide surface 5 is x 0 , x 1 , x 2 ... x o The position of the subscript 0,
The distances between the displacement gauges 6, 7 and the object to be measured 3 at points 1, 2, 3...n are respectively F A (V 0A ), F A (V 1A ), F
A (V 2A ), F A (V 3A )...F A (V oA ), F B (V
0B ), F B (V 1B ), F B (V 2B ), F B (V 3B )...
If F B (V oB ), F A (V 1A ) - F A (V 0A ) = y 1 - x 1 (1) F B (V 1B ) - F B (V 0B ) = (y 2 - y 1 )−x 1 (2) F A (V 2A )−F A (V 0A )=y 2 −x 2 (3) F B (V 2B )−F B (V 0B )=(y 3 −y 1 ) -x 2 (4) F A (V 3A ) - F A (V 0A ) = y 3 - x 3 (5) F B (V 3B ) - F B (V 0B ) = (y 4 - y 1 ) - x 3 (6) (2)−(3)+(1) x 2 =F A (V 1A )−F A (V 2A )+F B (V 1B ) −F B (V 0B )+x 1 +x 1 From (4)-(5)+(1), x 3 = F A (V 1A ) - F A (V 3A ) + F B (V 2B - F B (V 0B ) + x 2 + x 1 ∴x o = F A (V 1A ) - F A (V oA ) + F B (V (o-1)B ) - F B (V 0B ) + x o-1 + x 1 Therefore, the unknown x 1 becomes the DC component, so x If 1 = 0, all straightness x o can be found by a simple mathematical formula. In addition, the straightness of the object to be measured 3 can also be found as y o = x o + F A (V oA ) - F A (V 0A ).
変位計6,7の間隔、先端の高さの差、平行
度、被測定物3と変位計6,7の主軸中心線に直
角な平面内における傾きなどの測定あるいはセツ
チング誤差によりk番目の変位計6と(k−1)
番目の変位計7の位置あるいは方向が異なること
が考えられるが、たとえば両変位計6,7間の距
離測定の誤差を0.2mmとすると被測定物3の表面
の真直度は高々100mmで50μ以下であるから、変
位計6,7の変位測定誤差は0.1μ以下である。
よつて変位計6,7間のセツチング誤差は無視で
きる。 The k-th displacement is determined by measurement or setting errors such as the distance between the displacement gauges 6 and 7, the difference in height of their tips, parallelism, and the inclination in a plane perpendicular to the center line of the principal axes of the object to be measured 3 and the displacement gauges 6 and 7. Total 6 and (k-1)
It is possible that the position or direction of the second displacement meter 7 is different. For example, if the error in distance measurement between both displacement meters 6 and 7 is 0.2 mm, the straightness of the surface of the measured object 3 is at most 100 mm and 50 μ or less. Therefore, the displacement measurement error of the displacement meters 6 and 7 is 0.1μ or less.
Therefore, the setting error between the displacement meters 6 and 7 can be ignored.
被測定物3が旋削、研削、加工により得られた
物である場合はその一つの母線について真直度が
測定される。旋削加工を行つた機械に被測定物た
る被加工物を取付けたまゝその真直度を測定する
ことができることは前記説明より明かであろう。 When the object 3 to be measured is obtained by turning, grinding, or processing, the straightness of one generatrix is measured. It will be clear from the above description that the straightness of a workpiece to be measured can be measured while it is attached to a machine that performs turning work.
第4図はこお発明の実施態を示すものでデータ
処理を自動で行う場合のブロツク線図である。第
1図に示した被測定物3はこの図ではワーク3′
となつている。ワーク3′はチヤツクに把握され
心押台2に装着されたセンターによつて支承され
ている。サドル4はパルスモータ等の駆動装置1
5により送りねじを介して送られるようになつて
いる。主軸台1に装架された主軸にはロータリエ
ンコーダ11が結合されている。 FIG. 4 shows an embodiment of the invention and is a block diagram when data processing is performed automatically. The object to be measured 3 shown in Fig. 1 is a workpiece 3' in this figure.
It is becoming. The workpiece 3' is gripped by the chuck and supported by a center mounted on the tailstock 2. The saddle 4 is a drive device 1 such as a pulse motor.
5, it is adapted to be fed via a feed screw. A rotary encoder 11 is coupled to a main shaft mounted on a headstock 1.
12は計数回路、13は変位計6,7の出力電
圧のAD変換器、14はマイコン、即ちマイクロ
コンピユーター等の演算制御装置である。 12 is a counting circuit, 13 is an AD converter for the output voltage of the displacement meters 6 and 7, and 14 is a microcomputer, ie, an arithmetic control device such as a microcomputer.
今主軸を駆動してワーク3′を回転し乍らサド
ル4を送るとロータリエンコーダ11の発生パル
スは計数回路12で計数されマイコン14に送ら
れる。変位計6,7間のピツチ、サドル4が送ら
れる毎にロータリエンコーダ11によりワーク
3′上の一つの母線位置においてマイコン14よ
り計測指令が出され、変位計6,7のその位置の
出力はAD変換器13でAD変換され、計数されマ
イコン14にて演算処理出力される。ワーク3′
の円周分割した位置で夫々変位計6,7の計測が
行われることによりセンター法による真円度、円
筒度が同時に求められることになる。 Now, when the main shaft is driven to rotate the work 3' and send the saddle 4, the pulses generated by the rotary encoder 11 are counted by the counting circuit 12 and sent to the microcomputer 14. Every time the pitch between the displacement gauges 6 and 7 and the saddle 4 are sent, a measurement command is issued from the microcomputer 14 at one generatrix position on the workpiece 3' by the rotary encoder 11, and the output of the displacement gauges 6 and 7 at that position is The data is AD converted by the AD converter 13, counted, and output through arithmetic processing by the microcomputer 14. Work 3'
By measuring with the displacement meters 6 and 7 at positions divided into the circumference, the roundness and cylindricity can be determined simultaneously by the center method.
この発明の方法を実施するための装置は以上の
説明により明かなとおり、直線案内に係合するス
ライドと、この直線案内に平行して被測定物3の
支持装置と、スライドの送り装置とスライド上に
直線案内と直角方向に並列して配置された変位計
6,7よりなる物であり、送り装置は手動測定の
場合変位計6,7間の一ピツチ毎に停止すること
ができる機能が必要である。従つて普通旋盤等で
はエプロンに備えた長手送りハンドルの目盛と旋
盤ベツドに長手方向に固定された目盛により読み
取り、変位計6,7の一ピツチ送つたことが判明
する。実施態として第4図に示される真直度測定
方法は数値制御旋盤によつて行うときはサドル4
は駆動装置15としてパルスモータにより送るが
変位計6,7の一ピツチ毎に停止する必要はなく
デジタルに連続して送る送り装置でよい。即ちス
ライドの送り装置は変位計6,7の間隔の一ピツ
チ宛において変位計6,7の被測定物3との距離
の測定が行われればよいので、間欠して送るかは
制御方法に依存する。 As is clear from the above description, the apparatus for carrying out the method of the present invention includes a slide that engages with a linear guide, a support device for the object to be measured 3 parallel to the linear guide, a slide feeding device, and a slide. It consists of displacement gauges 6 and 7 arranged in parallel at right angles to the linear guide above, and the feeding device has a function that allows it to stop every pitch between the displacement gauges 6 and 7 in the case of manual measurement. is necessary. Therefore, in ordinary lathes and the like, it can be determined that the displacement gauges 6 and 7 have been fed one pitch by reading the scale on the longitudinal feed handle provided on the apron and the scale fixed in the longitudinal direction on the lathe bed. The straightness measuring method shown in FIG. 4 as an embodiment is carried out using a numerically controlled lathe with saddle
is sent by a pulse motor as the driving device 15, but it is not necessary to stop every pitch of the displacement gauges 6 and 7, and a feeding device that continuously sends it digitally may be used. In other words, the slide feeding device only needs to measure the distance between the displacement gauges 6 and 7 and the object 3 at one pitch between the displacement gauges 6 and 7, so whether or not to send the slide intermittently depends on the control method. do.
以上のとおりこの発明の方法の真直度測定方法
によれば簡単な装置でSN比の高い測定が可能で
あり直線案内の真直度、被測定物の真直度が共に
求められしかも、測定はスライドを一回移動させ
るだけで測定が終了する。変位計を二個並列に配
置するだけであり、その設定誤差による測定値へ
の影響は小さい。うず電流型変位計を用いてその
出力データをマイコン・ミニコンなどで瞬時に処
理することが可能であり、数値制御装置とも接続
すれば実時間測定し、さらに真直度を零に制御す
る精密工作を可能とすることができる。 As described above, according to the straightness measuring method of the present invention, it is possible to measure with a high signal-to-noise ratio using a simple device, and both the straightness of the linear guide and the straightness of the object to be measured can be determined. Measurement is completed with just one movement. Since only two displacement meters are placed in parallel, the influence of setting errors on measured values is small. Using an eddy current type displacement meter, the output data can be instantaneously processed by a microcomputer or minicomputer, etc. If connected to a numerical control device, it can be measured in real time and precision machining can be performed to control straightness to zero. It can be made possible.
第1図はこの発明の方法を示す図面、第2図は
変位計の特性を示す図面、第3図は第1図の一部
拡大図面、第4図はこの発明の実施態様をブロツ
ク線図で示す図面。
3……被測定物、3′……ワーク、4……サド
ル、5……ベツド案内面、6,7……変位計。
Fig. 1 is a drawing showing the method of this invention, Fig. 2 is a drawing showing the characteristics of a displacement meter, Fig. 3 is a partially enlarged drawing of Fig. 1, and Fig. 4 is a block diagram showing an embodiment of this invention. Drawing shown in. 3...Object to be measured, 3'...Work, 4...Saddle, 5...Bed guide surface, 6, 7...Displacement meter.
Claims (1)
可能に係合したスライド上に二つの変位計を短い
ピツチで並列して被測定物に向つて配置し、スラ
イドを一ピツチ宛測定長の全長にわたつて一方向
に一回送つて各位置において二つの変位計と被測
定物の距離を該変位計により夫々測定しそのデー
タを処理することにより直線案内と共に被測定物
の真直度を求める真直度測定方法。 2 直線案内と、直線案内に運動可能に係合した
スライドと、直線案内に平行して被測定物を支持
する支持装置と、直線案内に直交して短かいピツ
チで前記支持装置に支持される被測定物に向つて
並列してスライド上に配置された変位計と、並列
する変位計のピツチ宛送りその位置を検出可能な
送り装置と、該送り装置と変位計からえられた信
号を演算処理する装置からなる真直度測定装置。 3 直線案内と、直線案内に運動可能に係合した
スライドと、直線案内に平行して被測定物を回転
駆動可能に支持する主軸台及び心押台と、主軸台
に設けた主軸の回転を円周分割して割出す位置に
おいて信号を発生する主軸の回転位置検出装置
と、該主軸の回転位置検出装置に係合され該主軸
の回転位置検出装置の発生信号を計数する計数器
と、直線案内に直交し主軸台と心押台に支持され
る被測定物に向つて短かいピツチで並列してスラ
イド上に配置された変位計と、スライドに固定し
たナツトに係合する送りねじとデジタル送り可能
な原動機を連結した送り装置と、前記変位計に
AD変換器を介して入力されると共に計数器より
入力され、前記送り装置に結合された演算制御装
置とからなる回転する円筒形被測定物の形状を計
測可能とした真直度測定装置。[Claims] 1. Two displacement gauges are placed in parallel with a short pitch on a slide movably engaged with a linear guide parallel to the object to be measured on a straight line, and the slide is moved toward the object to be measured. The distance between two displacement meters and the object to be measured is measured by the displacement meters at each position by sending the data once in one direction over the entire length of one pitch, and by processing the data, the distance between the two displacement meters and the object to be measured is processed. Straightness measurement method to determine the straightness of. 2. A linear guide, a slide movably engaged with the linear guide, a support device that supports the object to be measured parallel to the linear guide, and a slide supported by the support device at a short pitch perpendicular to the linear guide. Displacement meters arranged on a slide in parallel facing the object to be measured, a sending device capable of sending the parallel displacement meters to the pitch and detecting their positions, and calculating the signals obtained from the sending device and the displacement meter. Straightness measuring device consisting of a processing device. 3. A linear guide, a slide movably engaged with the linear guide, a headstock and a tailstock that rotatably support the object to be measured in parallel with the linear guide, and a spindle provided on the headstock that controls the rotation of the spindle. A spindle rotational position detection device that generates a signal at a circumferentially divided and indexed position, a counter that is engaged with the spindle rotational position detection device and counts the signal generated by the spindle rotational position detection device, and a linear A displacement meter is placed on the slide in parallel at a short pitch facing the object to be measured, which is perpendicular to the guide and supported by the headstock and tailstock, and a feed screw and digital sensor that engage with a nut fixed to the slide. A feeding device connected to a feedable prime mover and the displacement meter.
A straightness measuring device capable of measuring the shape of a rotating cylindrical object to be measured, which includes input via an AD converter and a counter, and an arithmetic control device coupled to the feeding device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1269079A JPS55104706A (en) | 1979-02-06 | 1979-02-06 | Method and apparatus for measurement of linearity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1269079A JPS55104706A (en) | 1979-02-06 | 1979-02-06 | Method and apparatus for measurement of linearity |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55104706A JPS55104706A (en) | 1980-08-11 |
| JPS6133364B2 true JPS6133364B2 (en) | 1986-08-01 |
Family
ID=11812364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1269079A Granted JPS55104706A (en) | 1979-02-06 | 1979-02-06 | Method and apparatus for measurement of linearity |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55104706A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62192552U (en) * | 1986-05-29 | 1987-12-07 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57207812A (en) * | 1981-06-17 | 1982-12-20 | Mitsubishi Heavy Ind Ltd | Straightness measuring method |
| JP4875409B2 (en) * | 2006-06-06 | 2012-02-15 | 株式会社岡本工作機械製作所 | Surface grinding method for surface ground workpieces |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53109660A (en) * | 1977-03-04 | 1978-09-25 | Osaka Kiko Co Ltd | Measuring method of straightness in three points |
-
1979
- 1979-02-06 JP JP1269079A patent/JPS55104706A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62192552U (en) * | 1986-05-29 | 1987-12-07 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55104706A (en) | 1980-08-11 |
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