JPS6134911B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a charged particle beam processing apparatus that processes a workpiece having a circular cross section while irradiating the outer circumference of the workpiece with a charged particle beam.

In a conventional processing apparatus of this kind, for example, as shown in FIG. 1, a workpiece 31 (in this case, a tube) is housed in a sealed vacuum case A, and the inside of this vacuum case is heated to a temperature of, for example, 10 ^-5 mHg. The pressure was reduced to around 10 ^-5 Torr, and the workpiece 31 was rotated by the turning roller 22' while being irradiated with a beam from the charged particle beam generator 32 for processing. However, in such an apparatus, as the length of the workpiece becomes longer, the vacuum case must be made larger, which makes the apparatus expensive and requires a large installation area. Also, if the vacuum case is made larger, the entire inside of the vacuum case will be 10 ^-5 Torr, for example.
In order to reduce the pressure to a certain level, a long evacuation time was required, and a significant decrease in work efficiency was unavoidable. Furthermore, since it is impossible to reduce the pressure to this degree with a single vacuum pump, it is necessary to combine, for example, an oil rotary pump and an oil diffusion pump, or a combination of an oil rotary pump, a so-called mechanical booster pump, and an oil diffusion pump. Therefore, increasing the capacity of these vacuum pumps in order to shorten the evacuation time would make the equipment expensive and uneconomical.

SUMMARY OF THE INVENTION An object of the present invention is to provide a charged particle beam processing apparatus that can shorten exhaust time, is inexpensive, and has good workability.

In order to solve the above-mentioned problems, according to the first invention of the present application, in a charged particle beam processing apparatus that processes a workpiece 31 having a circular cross section while irradiating the outer circumference with a charged particle beam, a ring-shaped A frame 4 and a charged particle beam generator 32 supported by the frame 4
The workpiece 31 is inserted through the approximate center of the frame 4.
a support device 22 that supports the frame body 4; an annular member 11 that is restrained at both ends of the frame body 4 and is rotatable relative to the frame body 4; At least three pressing rods 16 supported by the pressing rods 16 and pressing rod urging means 14, 15, 17 for urging the pressing rods 16 by fluid pressure.
A locking means 18 that locks the annular member 11 to the workpiece 31 by pressing the press rod 16 against the workpiece, the frame 4, the annular member 11, and the surface portion of the workpiece 31. Surrounded space 2 surrounded by
1 airtight means 12, 13, 19...
...and a vacuum exhaust device connected to the surrounding space,
Back side airtight means 29 arranged on the back side of the workpiece
and a rotation drive device for relatively rotating the frame 4 and the workpiece 31.

Further, according to the second invention, the first annular member 11
A locking means 181 similar to that described above is provided on the second annular member 112, which is restrained by the second annular member 112 and is movable in the radial direction of the workpiece 31.

The processing apparatus of the present invention will be described in detail below with reference to the illustrated embodiments.

In FIGS. 2 to 4, reference numeral 1 denotes a substantially stationary tubular frame having a through hole approximately in the center through which a workpiece 31 (in the illustrated example, a tube) is penetrated; A disk-shaped member 2 having a hole through which a workpiece 31 passes, and an annular member 3 are hermetically fastened to both ends. An annular fixed frame 4 is substantially fixed by the members 1 to 3 above. 5 is an annular member disposed inside the annular member 3 and forms an annular space 14 between the annular member 3; 6 is an annular member disposed inside the annular member 5;
Reference numeral 7 designates a similarly annular member that is engaged with the end surfaces of members 5 and 6 in the X direction so as to sandwich member 6 therebetween, and these members 5 to 7 are connected to each other with an appropriately fixed airtight member interposed therebetween. It is airtight and integrally fastened. A plurality of first anti-friction members 8 that engage with the disc-shaped member 2 are attached to the X-direction end face of the member 7 on the disc-shaped member 2 side at approximately constant intervals in the circumferential direction, and A plurality of second anti-friction members 9 that engage with the inner peripheral surface of the annular member 3 are attached to the outer peripheral portion of the member 7 at approximately constant intervals in the circumferential direction. The anti-friction members 8 and 9 are composed of, for example, a ball and a ball seat that rotatably supports the ball. act. A movable annular member 11 is constituted by the members 5 to 7 and the first and second anti-friction members 8 and 9. Between the outer periphery of the annular member 11 (the outer periphery of the member 5 in the illustrated example) and the inner periphery of the annular member 3, there are two airtight members 1 extending in the circumferential direction with an interval in the X direction.
2 and 13 are arranged, and these airtight members 12 and 13 slidably engage with the annular member 3 of the frame 4 to keep the annular space 14 airtight.

Three or more guide tube portions 15 are preferably bored radially at equal intervals in the circumferential direction on the circumferential portion of the member 6 of the annular member 11, and each guide tube portion 15 is provided with a workpiece 31. A press rod 16 that is freely movable in the radial direction is loosely fitted in an airtight manner. In the illustrated case, eight sets of guide cylinder portions 15 and pressing rods 16 are arranged at approximately equal intervals in the circumferential direction. Further, each pressing rod 16 is urged toward the annular space 14 by a spring. Annular frame 4
A compressed air connection port 17 is bored in the annular member 3 , and this connection port communicates with the guide tube portion 15 via the annular space 14 . This connection port 17 is connected to a supply device for compressed fluid, such as compressed air (not shown). The annular space 14, the guide tube portion 15,
The connection port 17 and a compressed air supply device (not shown) constitute a pressing rod urging means, and the pressing rod urging means and the pressing rod 16 constitute a locking means 18.

At the outer end of the member 6 of the annular member 11 in the X direction,
An annular airtight member 19 is fixed, and this airtight member 1
9 is hermetically engaged with the outer periphery of the workpiece 31.
and the airtight members 12, 13, the airtight member 19,
An annular member 11 is attached to both ends of the frame body 4 in the , 11 are arranged, an airtight means is configured to keep the space 21 surrounded by the frame 4, the annular members 11, 11, and the outer peripheral surface of the workpiece 31 airtight.

Reference numeral 22 denotes a support device with a rotational drive source that supports the workpiece 31 and rotates it around its axis. This support device 22 is constituted by, for example, a turning roll device on which the workpiece 31 is placed.

An annular support member 23 having a smaller diameter than the inner diameter of the workpiece 31 is arranged inside the workpiece 31, and hollow flexible members 24, 24 are arranged on the outer periphery of the annular support member 23 in the X direction. They are supported at appropriate intervals. A compressed fluid supply device (not shown) is communicated with these flexible members 24, 24, and when compressed fluid is supplied, these flexible members 24, 2
4 expands and comes into contact with the inner periphery of the workpiece 31. A connecting member 26 that supports the annular supporting member 23 by at least three connecting arms 26a extending in the radial direction is provided inside the annular supporting member 23, and a pair of arms each having one end supported by the connecting arms 26a of the connecting member 26. 1 at the tip of 26b, 26b
A pair of guide wheels 25, 25 are supported. These guide wheels 25, 25 are provided spaced apart in the X direction so as to face the inner peripheral surface of the workpiece 31 at positions outside both ends of the annular support member 23 in the width direction (X direction). There is. The guide wheels 25, 25 are the workpiece 3
At least three pairs of guide wheels may be provided radially at approximately equal intervals in the circumferential direction of the guide wheel 1, but in the illustrated example, four pairs of guide wheels are arranged at angular intervals of 90 degrees. Further, a cable 28 made of a chain or a cable is connected to the connecting member 26 via a rotary joint 27. The annular supporting member 23 to cable 28 and a compressed fluid supply device (not shown) that supplies compressed fluid to the flexible members 24 and 24 create an annular shape on the back side of the workpiece that is airtight to the outside. space 35
A back side airtight means 29 is configured.
The fixed frame 4 also includes a charged particle beam generator 3.
2 is installed. In the illustrated example, a beam generator 32 is mounted on the peripheral wall of the frame 1 located at the center of the fixed frame 4.
The generator 32 is attached to a frame 32a which is airtightly attached to the attachment hole. The generator 32 also includes a processing position 31.
Observation means 33 for observing the vicinity of 2 is provided.

To perform processing (for example, welding) using the above-mentioned device, first, without supplying compressed air into the annular space 14 of the locking means 18, the workpieces 31, 31 are moved from the X direction to the frame 4 and the movable annular member. 11, and while observing the charged particle beam 32 with the observing means 33, move the workpieces 31, 31 in the Adjust the position.

Thereafter, when compressed air is supplied into the annular spaces 14, 14 from a compressed air supply device (not shown), the pressing rods 16, 16...... are urged in the axial direction of the workpiece 31, whereby the annular member 11 and workpiece 31 are held in a fixed relationship with each other. After fixing the annular member 11 to the workpiece 31 in this manner or after butting the ends of the workpieces 31, 31, as shown in FIG. 6, the guide rings 25, 25...
While rolling on the back surface of the workpiece 31, the back side air sealing means 29 is moved in the X direction and carried into the workpiece, and the workpiece line 311 is placed approximately in the center between the flexible members 24, 24. In this state, compressed air is supplied to the inside of the flexible members 24, 24 from a compressed fluid supply device (not shown), for example, a compressed air supply device. As compressed air is supplied, the flexible member 24 bulges outward on the outer periphery of the annular support member 23, and the guide rings 25, 2
5... is separated from the back surface of the workpiece 31, and at the same time, the flexible members 24, 24 come into close contact with the back surface of the workpiece 31. (See FIG. 5.) At this time, the back side of the workpiece 31 is maintained airtight by the flexible airtight members 24, 24 and the annular support member 23.

Next, the fixed frame 4 and the annular member 1 are removed by, for example, a vacuum evacuation device (not shown) connected to the fixed frame 4.
1 and 11 and the airtight means 21 and 21 are evacuated to a vacuum state (for example, to a state of 1×10 ^-5 Torr). In this case, the workpiece 31,
The butt line 31 is never in close contact with zero gap, and in most cases there is some gap at the butt part, so the back side airtight means 2
A space 35 surrounded by 9 is also maintained in a vacuum state at the same time as the above evacuation. In this way, the spaces 21 and 35 on the front and back sides of the workpiece 31 are
For example, if the condition is 1×10 ^-5 Torr, and the atmospheric pressure is 1Kg・cm ^-2 , the pressure inside each is 1×
Since 10 ^-5 × (1/760)≒1.3 × 10 ^-8 Kg・cm ^-2 , the air-tight member 13 on the atmosphere side of the air-tight means 21,
19 is pressed inward with a pressure of approximately 1 Kg cm ^-2 , and in this case, the annular member 3 and member 5
Since the general shapes of the airtight members 13 and 19 are restricted by the workpiece 31 and the workpiece 31, the front, back, and both sides of the workpiece 31 are kept well airtight against the atmosphere.

After the spaces 21 and 35 are brought into a predetermined vacuum state as described above, the generator 32 is activated and the processing position 312 is irradiated with the charged particle beam 34 generated from the generator 32 while the support device 22 with a rotational drive source is
is driven to rotate the workpiece 31 clockwise in FIG. 3, for example, while machining is performed along the workpiece line 311.

Processing proceeds in this manner, and when the workpiece 31 has made approximately one rotation, the support device 22 is stopped, the operation of the generator 32 is stopped, and the generation of the charged particle beam 34 is stopped, and the generator 32
After airtightly sealing off the inside and outside of the workpiece 31, the vacuum state on the surface of the workpiece 31 is released. Next, the supply of compressed air to the locking means 18 and the back air sealing means 29 is stopped, and the compressed air in the annular space 14 and the flexible members 24, 24 is exhausted,
The workpiece 31 and the back side airtight means 29 are taken out from the center of the frame 4 to complete the processing operation.

In this case, as shown in FIGS. 2 to 4, especially FIG. 4, a spring means such as a compression spring is provided to constantly bias the pressing rod 16 of the locking means 18 in a direction opposite to the axis of the workpiece. If provided, the press rod 16 can be always biased in the opening direction when carrying in and taking out the workpiece 31, so that the work of carrying in and taking out the workpiece 31 can be carried out easily. Further, when the rotation center of the workpiece 31 and the center of the frame 4 do not coincide, the pressing rods 16, 16, . . .
... are displaced in the radial direction of the workpiece, but in the above device, the guide cylinder portions 15, 15, ... that guide the pressing rods are displaced in the radial direction of the workpiece.
Since an annular space 14 communicating with... is provided, the pressing rods 16, 16 can be smoothly moved, and the movement of the pressing rods allows the annular member 11 to move as the workpiece rotates. The rotation relative to the frame 4 is not hindered.

When the first and second anti-friction members 8 and 9 are composed of balls and ball seats as in the above embodiment, the annular member 11 can be rotated with respect to the frame 4 very smoothly. Furthermore, in this case, if the surfaces on which the first and second anti-friction members 8 and 9 come into contact are machined, the annular member 11 can rotate more smoothly with respect to the frame 4.

If the back air sealing means 29 is configured as in the above embodiment, the back air sealing means can be easily carried in, positioned, and taken out. Although it is sufficient to provide at least three pairs of guide wheels 25, 25 of this airtight means, it is preferable to provide four or more pairs in order to increase stability and facilitate work. Furthermore, in the above embodiment, if cooling water is supplied to the flexible member 24 of the back side airtight means 29, even if the workpiece 31 becomes high temperature during processing, the flexible members 24, 24 will be cooled by this heat. There is no risk of overheating, and most of the heat generated during the processing is removed from the workpiece 31 by cooling water via the flexible member 24.
Heat is not transmitted to each component that comes into contact with the surface of the workpiece, and there is no risk that the airtight members 19, 19 in particular will deteriorate due to processing heat. Also, rotary joint 2
If the cables or traction device are connected to the back side airtight means 7 through 7, the cables or traction tool will not be twisted even if the back side airtight means 29 rotates, and the removal of the back side airtight means 29 can be carried out smoothly and quickly. can be done. Furthermore, if the support member 23 is made detachable from the connection member 26 and the positions of the guide wheels 25 and 25 are configured to be adjustable, the support member 23 and its flexibility can be adjusted even when the inner diameter of the workpiece 31 is different. Other parts can be shared by simply replacing the members 24, 24.

If the beam generator 32 is configured to be freely adjustable in the X direction with respect to the fixed frame 4, positioning of the charged particle beam 34 and the line to be processed 311 is easy, and the processing position can be determined by the observation means 33. By observing 312, it is also possible to adjust the position of the beam 34 and the processed line 311 during processing. Further, by providing two or more compressed fluid connection ports 17, the operating time required for the pressing rod 16 to be displaced to a predetermined position can be shortened.

7 and 8 respectively show other different embodiments of the present invention, and the embodiment shown in FIG. This is suitable when the outer diameters are different. That is, when the outer diameter of the workpiece 31 becomes smaller, in the apparatus shown in FIGS. 2 to 4, the member 6 of the annular member 11 and the pressing rod 16 of the locking means 18
And the airtight member 19 is replaced to match the outer diameter of the workpiece. In this case, the distance between the generator 32 and the surface of the workpiece increases, so if the position of the generator 32 is configured to be freely adjustable in the Y direction,
Processing using the charged particle beam 34 can be performed smoothly. Figure 8 also shows the frame 4 shown in Figure 2.
The generating device 32 is arranged horizontally to perform processing from the horizontal direction, and in this case, in addition to the first and second anti-friction members 8 and 9, a third anti-friction member 8 is used.
1 is configured to face the first anti-friction member 8 and abut against the frame 4. Also, the back side airtight means 29
In this case, an airtight member is used which is arranged to cover the abutting portion of the workpiece. For frame 4
The annular member 11 (not shown in FIG. 8) disposed in the _X1 direction is always subjected to a force due to gravity or gravity and atmospheric pressure in the _X2 direction, regardless of the vacuum state inside the frame 4. acts. On the other hand, when the atmosphere inside the frame 4 is not exhausted to the annular member 11 arranged in the X ₂ direction of the frame 4,
Gravity in the _X2 direction acts, and when the inside of the frame 4 is maintained in a vacuum state, a force represented by (force due to atmospheric pressure) - (gravitational force) acts in the _X1 direction. Moreover, this force in the _X1 direction increases as the radius of the workpiece 31 increases. Therefore, as shown in _FIG .
If the first to third antifriction members 8, 9, and 81 are provided in the frame 4, the position of the annular member 11 can be stably restrained to the frame 4 regardless of the vacuum state inside the frame 4. This is effective because no force in the X direction acts on the airtight members 12 and 13.

When machining is performed from the horizontal direction in this way, the first to third anti-friction members 8,
Although it is preferable to provide 9 and 81, the apparatus shown in FIGS. 2 and 4 can also be maintained in a horizontal state for processing. Further, as shown in FIG. 8, the back side air-tight means 29 can also be constituted by an air-tight member, for example, an air-tight tape, which is closely attached to the back side of the wire 311 to be processed.
If the configuration is as shown in FIGS. 5 and 6, it is possible to automate the attachment and detachment of the back side airtight means, and there is an advantage that it can be used repeatedly.

FIG. 9 shows an embodiment of the second invention of the present application. In this embodiment, an annular member 7 disposed inside each annular member 3 at both ends of a frame 4, Anti-friction members 8, 81 and 9 attached to member 7
The first annular member 111 is constituted by the above. The anti-friction member 8 engages with the disc-shaped member 2, and the anti-friction members 9 and 81 engage with the inner peripheral surface of the annular member 3 and the inner surface of the inner flange of the outer end of the annular member 3, respectively. do. An airtight member 12 is provided between the outer circumferential surface of the member 7 and the inner circumferential surface of the annular member 3 so as to be slidable on the inner circumferential surface of the annular member. The annular member 7 has an annular recess 7a, and a second annular member 112 is provided in the recess so as to be freely slidable in the radial direction. As shown in the figure, this second annular member 112 includes an anti-friction member 811 for reducing friction with the member 7;
812 (for example, an anti-friction member consisting of a ball and a ball seat) is preferably provided. Second annular member 11
2 and the first annular member 111 is an airtight member 1
21 is disposed, and an annular airtight member 19 is disposed between the outer end of the second annular member 112 and the outer peripheral surface of the workpiece 31. Second annular member 1
The circumferential portion of 12 has a hole 3 that opens toward the workpiece 31 side.
The guide tube portions 151 described above are radially bored at approximately constant intervals in the circumferential direction, and each guide tube portion 151 has a sliding press rod 16 that is movable in the radial direction of the workpiece 31. They are airtightly fitted. The pressing rod 16 is configured to be moved in the Y direction by compressed fluid, such as pressure oil, supplied from the fluid supply means 400. A locking means 181 for locking the second annular member 112 to the workpiece 31 is constituted by the guide cylinder portion 151, the pressing rod 16, the fluid supply means 400, and the like. Further, by means of the airtight members 19, 12, 121 and fixed airtight members disposed at each part of the frame 4, the first and second annular members 111 and 112 and the locking means 1 are connected to both ends of the frame 4.
81, the processing position 3 of the workpiece 31 is
An airtight means is configured to keep the space 21 surrounding the area 12 airtight.

When processing is carried out using the apparatus shown in FIG.
6...... is retreated outward in the radial direction. Next, the workpiece 31 is passed through the frame 4 and the first and second annular members 111 and 112 and placed on the support device 22 with a rotational drive source, and the workpiece line 311 and the processing position 312 are aligned. position to match.
In this case, the position of the support device 22 is adjusted in advance so that the center axis of the workpiece 31 supported on the support device 22 substantially coincides with the center axis of the frame 4. Furthermore, since the second annular member 112 supporting the airtight member 19 is movable in the radial direction within the first annular member 111, even if the position of the support device 22 is not adjusted, the workpiece can be easily moved. The goods 31 can be carried in smoothly. After carrying in the workpiece in this way, the fluid supply means 40
By supplying fluid from 0, the pressure rods 16, 16...
... protrudes from the second annular member 112 toward the workpiece, and the second annular member 11
2 to the workpiece 31. Next, the frame 4, the first
The space 21 surrounded by the second annular members 111 and 112, etc. is brought to a predetermined vacuum state by operation of a vacuum evacuation device (not shown), and then the generator 3
Processing is carried out by rotating the workpiece 31 by the support device 22 while irradiating the processing position 312 with a charged particle beam 34 from 2. In this case, when the rotation center of the workpiece on the support device 22 does not coincide with the centers of the frame 4 and the second annular member 112, and when the outer circumference of the workpiece 31 is not perfectly circular,
Naturally, during machining, the workpiece 31 and the first annular member 11
The relative position with respect to 1 will change. However, as described above, the second annular member 112 and the airtight member 19 are fixed onto the workpiece 31 by the locking means 181, and the second annular member 112 is
Because it is configured to be movable in the radial direction with respect to the annular member 111 of The displacement is the second annular member 11
2, the airtight member 19, and the workpiece 31 are absorbed by moving in the radial direction inside the first annular member 111, and the first annular member 1 relative to the frame body 4 is absorbed.
11 is not prevented from rotating. In this device, the second annular member 112 also tries to move in the circumferential direction of the workpiece 31 inside the first annular member 111. However, the sliding resistance between the first annular member 111 and the frame 4 in the circumferential direction is the first
and the anti-friction members 8, 81 and 9 so as to be smaller than that between the second annular members 111 and 112.
If this is done, the second annular member 112 will not rotate relative to the first annular member 111, and therefore, the first annular member 111 will always be connected to the frame as the workpiece 31 rotates. Rotate relative to 4.

As shown in FIG. 9, if a second annular member 112 movable in the radial direction of the workpiece is disposed with respect to the first annular member 111, the frame body 4 and the
Even if the center of rotation of the workpiece 31 is different from the annular member 11, that is, if the support device 22 is not positioned accurately, or if the outer periphery of the workpiece 31 is not perfectly circular, the workpiece 31 can be rotated smoothly. Can be processed. That is, although the outer surface of the workpiece 31 is generally a rough surface, the airtight member 19 that comes into contact with this surface
During machining, the airtight member 19 always rotates integrally with the workpiece 31 and is also arranged in a fixed relationship in the radial direction of the workpiece 31, so the airtight member 19 is never damaged or deteriorated. The airtight member 19 has a long life and maintains good airtightness. Further, since the airtight member does not move on the workpiece 31 and slides on a mechanically processed surface, there is almost no damage to the airtight member. Therefore, airtightness and long life can be maintained. If the locking means 181 is configured to be operated by compressed fluid in this way, the pressing rod 16 can naturally be operated automatically or semi-automatically, so that the workpiece 31 can be carried into and out of the processing device. , and the work of locking the second annular member 112 to the workpiece 31 can be easily performed, and moreover, these works can be performed quickly.

FIG. 10 shows the locking means 1 in the device of FIG.
81 is shown, and in this embodiment, the two compressed fluid connection ports 17, 17 bored in the annular member 3 of the frame 4 are connected to the first annular member 111.
The annular space 14 communicates with the annular spaces 141 and 142 formed by the member 7 and the annular member 3.
1 and 142 are connected to a cylinder chamber provided in the second annular member 112 by flexible hoses 41 and 41, respectively. In this way, the locking means 1
81, the connection ports 17, 17 are in fixed positions during processing, so piping parts such as hoses or pipes connected to these connection ports can be maintained in a fixed state, and each part of the piping can be maintained in a fixed position. There is no loosening of the workpiece 31 in the processing equipment.
Piping parts do not get in the way when carrying in or out. Further, since the position of the pressing rod 16 can be automatically adjusted, the work can be done easily and quickly. In this case, the airtight member 19 fixed to the second annular member 112 can also be tightened using a detachable fastener 42. In this way, after the workpiece 31 is carried in, the fastener 42 can be fastened to the second annular member 112 or to the outer circumference of the workpiece 31. Further, the airtight member 19 may be attached and detached at the same time as the fastener 42. In this way, the airtight member 19 and the fastener 42 are separated when the workpiece 31 is carried in and out, so that the airtight member 19 does not come into contact with the workpiece. Therefore, workpiece 3
1 is easy to handle, and the airtight member 19 is not damaged.

In the above embodiment, the workpiece is rotated, but it is also possible to rotate the frame 4 and fix the workpiece 31. In this way, even if the workpiece becomes longer and the weight increases, the rotational drive device of the frame body 4 will not be affected in any way, so the rotational drive device can be installed relatively inexpensively and easily. It can be manufactured. Moreover, if the workpiece 31 becomes heavy,
Its inertia also increases, and knocking often occurs when the workpiece 31 is rotated, but if the frame 4 is rotated, there is no such risk, and the movement of the frame 4 can be easily controlled. This is advantageous because it can be done reliably.

Although various embodiments have been shown above, the present invention is not limited to these embodiments, and various embodiments can be created by appropriately combining each part of the above embodiments or replacing them with equivalent members. transformations can be made.

As described above, according to the present invention, since the vacuum space formed on the surface of the workpiece is configured to be small, the evacuation time, that is, the work time required to obtain a predetermined vacuum state can be shortened. Since the two or three vacuum pumps used can each be of small capacity, the equipment cost required for the vacuum pumps is reduced and is extremely economical. moreover,
The air-tight means is provided separately from the locking means for locking the annular member to the workpiece, so no excessive force is applied to the air-tight means, and the surface of the air-tight means is machined. Since there is no sliding part with the workpiece, there is almost no wear on the air-sealing member that makes up the air-sealing means, and machining can be performed while maintaining good air-tightness, allowing stable machining. There are advantages to doing so.

Further, in the present invention, the annular member is locked to the workpiece by the locking means equipped with a pressing rod that is supported movably in the radial direction and is urged by fluid pressure to press against the workpiece. Even if the center of the frame and the center of the workpiece are deviated from each other during the process, the process can be performed while maintaining good airtightness.

In particular, according to the second invention, the second annular member provided with the locking means is provided so as to be movable in the radial direction of the workpiece, so that the relative displacement between the frame and the workpiece during machining. can be absorbed more reliably.

[Brief explanation of the drawing]

Fig. 1 is a sectional view showing a conventional device, Fig. 2 is a partially sectional front view showing an embodiment of the device according to the present invention, Fig. 3 is a sectional view taken along the - line in Fig. 2, and Fig. 4 is FIG. 2 is an enlarged partial view, FIG. 5 and FIG.
An enlarged sectional view corresponding to the figure, FIG. 8 shows still another embodiment of the present invention, a sectional view corresponding to FIG. 4, FIG. 9 and FIG. These are cross-sectional views corresponding to FIG. 4, each showing an example. 4... Annular frame body, 7... Annular member, 8,
9, 81, 82, 811, 812, 91... anti-friction member, 11... annular member, 12, 13... airtight member, 14... annular space, 16... pressing rod, 17...
... Compressed fluid connection port, 18... Locking means, 19...
... airtight member, 21 ... airtight means, 22 ... support device with rotational drive source, 24 ... hollow flexible member, 29 ... back side airtight means, 31 ... workpiece,
32... Charged particle beam generator, 34... Charged particle beam, 111... First annular member, 11
2... Second annular member, 141, 142... Annular space, 181... Locking means, 312... Processing position.

Claims (1)

[Scope of Claims] 1. A charged particle beam processing device that processes a workpiece having a circular cross section while irradiating a charged particle beam onto the outer periphery of the workpiece, comprising: an annular frame; and charged particles supported by the frame. a beam generator; a support device that penetrates substantially the center of the frame and supports the workpiece; and a support device that is restrained at both ends of the frame and is rotatable relative to the frame. an annular member; at least three pressing rods disposed radially on the annular member and supported so as to be movable in the radial direction; and a pressing rod urging means for urging the pressing rods by fluid pressure; a locking means for locking the annular member to the workpiece by pressing a pressing rod against the workpiece; and an enclosure surrounded by the frame, the annular member, and a surface portion of the workpiece. an airtight means for keeping the space airtight; a vacuum evacuation device connected to the surrounding space; a back side airtight means disposed on the back side of the workpiece; and a means for keeping the frame and the workpiece relative to each other. A charged particle beam processing device comprising: a rotation drive device for rotating the charged particle beam; 2. The backside airtight means includes an annular support member formed to have a smaller diameter than the inner diameter of the workpiece, and a central flexible support member disposed on both sides of the workpiece position on the outer periphery of the annular support member. a connecting member that connects the annular support member in a radial direction; and the annular support member located outside the outer peripheral portion of the annular support member and inside the inner diameter of the workpiece. Claim 1, further comprising: at least three pairs of guide wheels spaced apart from each other and radially supported by the connecting member; and a compressed fluid supply device connected to a hollow portion of the flexible member. charged particle beam processing equipment. 3. The charged particle beam processing apparatus according to claim 2, wherein the compressed fluid supply device of the back side airtight means is a cooling water supply device. 4. A charged particle beam processing device that processes a workpiece having a circular cross section while irradiating a charged particle beam onto the outer periphery of the workpiece, comprising: an annular frame; a charged particle beam generator supported by the frame; a support device that supports the workpiece by passing through a substantially central portion of the frame; a first annular member that is restrained at both ends of the frame and is rotatable relative to the frame; a second annular member movable in the radial direction of the workpiece while being restrained by the first annular member; and a second annular member disposed radially on the second annular member and supported so as to be movable in the radial direction. The second annular member is made up of at least three pressing rods and a pressing rod urging means for urging the pressing rods by fluid pressure, and the second annular member is pressed against the workpiece by pressing the pressing rods against the workpiece. a locking means for locking to an object; and an airtight means for airtightly maintaining an enclosed space surrounded by the frame, the first annular member, the second annular member, and the surface of the workpiece. , a vacuum evacuation device connected to the surrounding space, a back side airtight means disposed on the back side of the workpiece, and a rotational drive device for relatively rotating the frame body and the workpiece. A charged particle beam processing device comprising: 5. The back side airtight means includes an annular support member formed to have a smaller diameter than the inner diameter of the workpiece, and a hollow flexible member disposed on both sides of the workpiece position on the outer periphery of the annular support member. a connecting member that connects the annular support member in a radial direction; and the annular support member located outside the outer peripheral portion of the annular support member and inside the inner diameter of the workpiece. Claim 4, further comprising: at least three pairs of guide wheels spaced apart from each other and radially supported by the connecting member; and a compressed fluid supply device connected to a hollow portion of the flexible member. charged particle beam processing equipment. 6. The charged particle beam processing apparatus according to claim 5, wherein the compressed fluid supply device of the back side airtight means is a cooling water supply device.